Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 19

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Author: L F Thompson; C G Willson; M J Bowden; American Chemical Society. Division of Organic Coatings and Plastics Chemistry.; American Chemical Society. Meeting (eds.)

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Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)

Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)

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