This content was uploaded by our users and we assume good faith they have the permission to share this book. If you own the copyright to this book and it is wrongfully on our website, we offer a simple DMCA procedure to remove your content from our site. Start by pressing the button below!
344
12.7. 3JIeKTpH'IeCKHe xapaKTepHcTHKH cBepxbHpKHX CBeTO.D.HO.D.OB . . . . .. fiH6JIHOrpa
263
16.6. HPKOCTb H JIHHeHHOCTb BocrrpHHTHH CBeTa CHCTeMOH 'IeJIOBe'leCKOrO 3peHHH. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..
346
16.7. UHpKa.D.HbIH pHTM H IJ.HpKa.D.HaH 'IYBcTBHTeJIbHOcTb. . . . . . . . . . ..
348
fiH6JIHOrpa
349
TIpHJIO)KeHHe 16.TIl.
351
TIpHJIO)KeHHe 16.TI2. CKOTOrrH'IeCKaH
352
12.2. CBeTo.u.HO.D.b1 Ha OCHOBe AIGaAs/GaAs. . . . . . . . . . . . . . . . . . ..
r JI a B a
13.
r JI a B a
265
TBep.u.bIe pacTBopbI AlInGaN H HCTO'lHHKH YJIbTpa«pHOJIeTo-
16.
lJYBcTBHTeJIbHOCTb 'IeJIOBe'leCKOrO rJIa3a H «poToMeTpH1Je-
Boro H3JIyqeHHB Ha HX OCHOBe. . . . . . . . . . . . . . . . . . . . . . . . .
270
13.1. CrreKTpbI YJIbTpa
270
13.2. lliHpHHa 3arrpeIUeHHoH 30HbI TBep.D.bIX pacTBopoB AlInGaN. . . . . ..
271
13.3. TIOJIHpH3aIJ.HOHHble 3
272
KOJIOpHMeTpHB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
353
13.4. AKTHBaIJ.HH rrpHMeceH B HHTpH.D.aX III rpyrrrrbl . . . . . . . . . . . . . ..
275
17.1.
353
13.5 . .ll.HCJIOKaIJ.HH B HHTpH.D.ax III rpyrrrrbl . . . . . . . . . . . . . . . . . . . ..
276
17.2. tIHcToTa IJ.BeTa . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..
361
13.6. Y-cBeTO.D.HOAbI, H3JIY'lalOIUHe Ha .D.JIHHaX BOJIH 60JIbIIIe 360 HM
280
17.3. KooPAHHaTbI IJ.BeTHOCTH CBeTO.D.HO.D.OB. . . . . . . . . . . . . . . . . . . ..
363
13.7. Y-cBeTO.D.HOAbI, H3JIY'lalOIUHe Ha .D.JIHHaX BOJIH MeHbIIIe 360 HM . .. fiH6JIHOrpa
283
17.4. B3aHMocBH3b Me)K.D.Y IJ.BeTHOCTblO H IJ.BeTOM . . . . . . . . . . . . . . ..
364
287
fiH6JIHOrpa
364
TIpHJIO)KeHHe 17.TI1 UBeToBaH .D.HarpaMMa MKO 1931 r . . . . . . . . .
366
TIpHJIO)KeHHe 17.TI2 UBeToBaH .D.HarpaMMa MKO 1978 r. . . . . . . ..
367
r JI a B a
14.
CnOHTaHHOe H3JIyqeHHe B pe30HaTopax. . . . . . . . . . . . . .
14.1. Pa3HOBH.D.HOCTH crrOHTaHHoro H3JIY'leHHH . . . . . . . . . . . . . . . . ..
c
r JI a B a
292 292
r JI a B a
r1'
14.2. Pe30HaTopbl THrra
294
3aKoH H3JIyqeHHB II.JIaHKa H D;BeTOBaB TeMnepaTypa. . . . .
368
14.3. TIJIOTHOCTb oIITH'Ieci
297
18.1. CrreKTp H3JIY'leHHH COJIHIJ.a. . . . . . . . . . . . . . . . . . . . . . . . . ..
368
14.4. CrreKTpaJIbHble xapaKTepHcTHKH YCHJIeHHH H3JIY'leHHH . . . . . . . . ..
301
18.2. CrreKTp H3JIY'leHHH a6COJIIOTHO 'IepHOrO TeJIa - H3JIY'laTeJIH TIJIaHKa
368
14.5. MHTerpaJIbHble xapaKTepHcTHKH YCHJIeHHH H3JIY'leHHH. . . . . . . . ..
302
18.3. UBeToBaH TeMrrepaTypa H KOppeJIHpOBaHHaH IJ.BeTOBaH TeMrrepaTypa
370
14.6. 3KcrrepHMeHTaJIbHble .D.aHHble 06 YCHJIeHHH H3JIY'leHHH Hero yrJIOBaH 3aBHCHMOCTb. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . fiH6JIHOrpa
r JI a B a
15.
18.
fiH6JIHOrpa
CBeTO,ll;HO,ll;bI C pe30HaTopoM . . . . . . . . . . . . . . . . . . . . .
310
15.1. BBe.D.eHHe H HCTOpH'IeCKHe CBe.D.eHHH .. . . . . . . . . . . . . . . . . . ..
310
15.2. TIpoeKTHpoBaHHe CBeTO.D.HO.D.OB C pe30HaTopoM . . . . . . . . . . . . . ..
312
373
TIpHJIO)KeHHe 18.TI. UBeToBaH TeMrrepaTypa H KOOp.D.HHaTbI IJ.BeTHOCTH a6COJIIOTHO 'IepHOrO TeJIa Ha IJ.BeTOBblX .D.HarpaMMax MKO 1931 r. H 1976 r. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 375
r JIaBa
CMemeHHe u;seTOB H D;BeTonepe,ll;a'la . . . . . . . . . . . . . . . .
376
19.1. A.D..D.HTHBHOe CMeIIIeHHe IJ.BeTOB. . . . . . . . . . . . . . . . . . . . . . . ..
19.
376
19.2. UBeTOrrepe.D.a'la. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..
379
15.3. CBeTO.D.HO.D.bI C pe30HaTopoM InGaAs/GaAs C .D.JIHHOH BOJIHbI H3JIy'leHHH 930 HM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..
316
15.4. CBeTO.D.HO.D.bI Ha OCHOBe AlInGaP/GaAs C pe30HaTopoM, H3JIY'lalOIUHe Ha .D.JIHHe BOJIHbI 650 HM . . . . . . . . . . . . . . . . . . . . . . . . . . ..
19.3. MH.D.eKC IJ.BeTOrrepe.D.a'lH .D.JIH H3JIY'laTeJIeH, pacrrOJIO)KeHHbIX Ha KPHBOH TIJIaHKa . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..
386
322
15.5. CBeTO.D.HO.D.bI 60JIbIIIOH rrJIOIUa.D.H C rrepeH3JIY'leHHeM
325
19.4. MH.D.eKCbI IJ.BeTOrrepe.D.a'lH .D.JIH HCTO'lHHKOB CBeTa, pacrrOJIO)KeHHblX BHe KPHBOH TIJIaHKa . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..
387
8
OeJlaBJLeHUe
oH6JIHOrpa
23.2. CBeto):(Ho):(b1 B BOJIOKOHHO-OITTHqeCKHX CHCTeMax CBH3H • . • • • • • ••
TIpHJIO)KeHHe 19.TI1 OTpa)KaTeJIbHaH CrrOC06HOCTb 3TaJIOHHbIX U:BeTOB
20.
HCTO'lHHKH 6eJIoro CBeTa Ha OCHOBe CBeTO):(HO):(OB
...
):(JIHHe BOJIHbI 870 HM . . . . • . • . . • . . • • • • • . . • • • . • • . . • •• 23.4. TIoBepxHocTHO-H3JIYQaIOmHe
CBeTO):(HO):(bI,
pa6oTaIOmHe
Ha
20.2. C03):(aHHe 6eJIoro CBeTa rrpH rrOMOmH ):(BYXU:BeTHbIX HCTOqHHKOB
453
):(JIHHe
BOJIHbI 1300 HM. • • • . • • • • • • • • . • • • • • • • • • • . . . . . . . . . .
20.1. C03):(aHHe 6eJIoro CBeTa rrpH rrOMOmH CBeTO):(HO):(OB . • . . . • . . .
453
23.3. TIoBepxHocTHO-H3JIyqaIOmHe CBeTO):(HO):(bI oappaca, pa6oTaIOmHe Ha
TIpHJIO)KeHHe 19.TI2 OTpa)KaTeJIbHaH CrrOC06HOCTb 3TaJIOHHbIX U:BeTOB
r JI a B a
9
OeJLaBJLeHUe
455
23.5. CBeTo):(Ho):(b1 ):(JIH CHCTeM CBH3H, pa6oTaIOmHe Ha ):(JIHHe BOJIHbI 650 HM
457
23.6. CyrrepJIIOMHHecu:eHTHble CBeTO):(HO):(b1 C Topu:eBbIM H3JIYQeHHeM •••
459
oH6JIHOrpa
463
20.3. C03):(aHHe 6eJIoro CBeTa C rrOMOmbIO Tpex pa3HoU:BeTHblx HCTOqHHKOB 20.4. TeMrrepaTYPHaH 3aBHCHMOCTb TpeXU:BeTHbIX HCTOqHHKOB 6eJIoro CBeTa, C03):(aHHbIX Ha OCHOBe CBeTO):(HO):(OB • • • . • . . . . • • • • . . . . . • 20.5. qeTblpex- H rrHTHU:BeTHbie HCTOqHHKH 6eJIoro CBeTa
24.
)luHaMU'IeCKHe xapaKTepHcTHKH CBeTO):(HO):(OB . . . . . . . . .
464
24.1. BpeMH HapaCTaHHH H crra):(a CHrHaJIOB, QaCTOTa rro ypOBHIO 3):(0 H
oH6JIHOrpa
r JI a B a
r JI a B a
rrOJIoca rrporrYCKaHHH B TeopHH JIHHeHHblX u:erreH • . • . . . • . . . . . .
464
24.2. BpeMH HapacTaHHH H crra):(a OrrTHQeCKOrO CHrHaJIa rrpH 60JIblIIOH eM21.
HCTO'lHHKU 6eJIoro CBeTa Ha OCHOBe npeo6pa30BaTeJIeii
):(JIUHbI BOJIHbI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
21.1. 3
HCrrOJIb3yeMblx ):(JIH
rrpeo6pa30BaHHII
):(JIHH BOJIH . . • • • . . . . • • . . . . • • • . . . . . . • • . . . . . . • . • . . 21.2. MaTepHaJIbI ):(JIH rrpeo6pa30BaTeJIeH ):(JIHHbI BOJIHbI . • • . • 21.3. JIIOMHHO
••..••.•.....•••...••••.....••
KOCTH CBeTO):(HO):(OB. . . . • • • • . . . . • • • • • • . • • • • • • • • . • • . .
466
24.3. BpeMeHa HapacTaHHH H crra):(a OITTHQeCKHX CHrHaJIOB rrpH MaJIOH eMKOCTH CBeTO):(HO):(OB. . . . . . . . . . . . . • • • • • • • • • •• • • • • • • • •
467
24.4. 3aBHcHMoCTb HarrpH)KeHHH OT BpeMeHH crra):(a H HapaCTaHHH OrrTHQeCKHX CHrHaJIOB
• . • • • • • • • . • • • • • . • • • . • . . . . • • . . • • . • •
24.5. Yxo):( HOCHTeJIeH H3 aKTHBHOH 06JIaCTH . • • • • • • . . . . . • . • .
469 470
21.4. CBeTo):(Ho):(bI 6eJIoro CBeqeHHH Ha OCHOBe JIIOMHHO
24.6.
471
21.5. TIpocTpaHcTBeHHoe pacrrOJIO)KeHHe JIIOMHHo<popa • . . . . . • • •
24.7. qacToTa CBeTO):(Ho):(a rro ypOBHIO 3):(0. . . • . . . • • • •
473
21.6. CBeTo):(Ho):(b1 6eJIoro CBeqeHHH Ha OCHOBe Y
24.8. rJIa3-):(HarpaMMa • • • • • . . • • • . • • • . • • • . . . . • .
473
24.9. BpeMH )KH3HH HOCHTeJIeH H QaCTOTa rro ypOBHIO 3 ):(0
474
r JI a B a
22.
BOJIOKOHHO-OnTH'IeCKUe CHCTeMbI CBH3H
22.1. THrrbI OITTHqeCKHX BOJIOKOH . . • • . • . . . . . ••. 22.2. CrreKTp 3aTyxaHHH H3JIyqeHHH B KBapu:eBblx H rrOJIHMepHblx BOJIOKHaX 22.3. Me)KMo):(oBaH ):(HcrrepcHH B OITTHqeCKHX BOJIOKHax . • . 22.4. XpOMaTHqeCKaH ):(HcrrepCHH B OITTHqeCKHX BOJIOKOHaX . . • . • • . . . . 22.5. qHCJIOBaH arrepTypa OITTHqeCKHX BOJIOKOH • • . . . • • • • • . . . • • . . • 22.6. Coe):(HHeHHe CBeTO):(Ho):(a C OrrTHqeCKHM BOJIOKHOM rrpH rrOMOmH JIHH3 22.7. oecrrpoBo):(Hble OrrTHqeCKHe CHCTeMbI CBH3H . • • • • oH6JIHOrpa
r JI a B a . 23.
CBeTo):(Ho):(bI B cHcTeMaX CBH3H
23.1. CBeTo):(Ho):(bI B 6ecrrpoBo):(HbiX CHCTeMax CBH3H . • • •
oH6JIHOrpa
476
TIpHJIO)KeHHH • • • . • • • • • . . . • . . . . . . . qacTo HCrrOJIb3yeMble 0603HaQeHHH •
477 477
481
CBoHcTBa apcHHH):(OB A III B v rrpH KOMHaTHOH TeMrrepaType. .
482
CBoHcTBa HHTPH):(OB
v AIIIB
rrpH KOMHaTHOH TeMrrepaType.
483
CBoHcTBa
484
CBoHcTBa Si H Ge rrpH KOMHaTHOH TeMrrepaType . • • •
485
TIepHo):(HQeCKaH CHCTeMa 3JIeMeHTOB (ocHoBHaH) •••
~
•.•
486
TIepHo):(HQeCKaH CHCTeMa 3JIeMeHTOB (pacIIIHpeHHaH) .•
487
TIpe):(MeTHbIH YKa3aTeJIb • • • • • • • • • • • • • • • • • • • • • • • • .
488
r
·11
ilpeaUCAOBue peaa/Cmopa nepeBOaa
,nHo,naM CTaJIH rrpOHBJIHTb IIIHpoKHe KpyrH HH)KeHepOB, pa3pa6aTbIBalOmHX arrrrapaTYPY ,nJIH OrrT03JIeKTpOHHKH H CBeTOTeXHHKH. CTaJIO ropa3,n0 60JIbIIIe B03MO)KHbIX qHTaTeJIeH KHHrH 0 CBeTo,nHo,nax. B
CIIlA,
SIrroHHH, KHTae,
3arra,nHoH EBporre 6bIJIH rrpHHHTbI IIIHpoKoMacIIITa6HbIe HaUHOHaJIbHble H ueJIeBble rrporpaMMbl rro rrp06JIeMe CBeTo,nHo,nHoro OCBemeHHH. CBeTo,nHo,nbI
npe)l;HCJIOBHe pe)l;aKTOpa nepeBO)l;a
BbIIIycKalOTcH COTHHMH MHJIJIHOHOB IIITyK B ro,n. CBeToBaH OT,naqa CBeTO,nHO,nOB 6eJIoro CBeqeHHH ,nOCTHrJIa 3HaqeHHH 130-150 JIM/BT, T. e. rrOqTH Ha rropH,noK rrpeBbICHJIa CBeTOOT,naqy JIaMrr HaKaJIHBaHHH.
nepBaH KHHra 0 CBeTO,nHO,naX A. oepra H n. ,UHHa BbIIIIJIa B 1976 r., a ee PYCCKHH rrepeBo,n -
B 1979 r. I). OHa rro,nBo,nHJIa HTOrH rrOqTH 15 JIeT
HCCJIe,noBaHHH H pa3pa60ToK rrOJIyrrpoBo,nHHKOBbIX HCTOqHHKOB H3JIyqeHHH -
CBeTo,nHo,nOB H HX rrpOMbIIIIJIeHHbIX rrpHMeHeHHH. C Tex rrop 0 CBe-
To,nHo,nax 6bIJIH orry6JIHKOBaHbI TbICHqH )KypHaJIbHbIX CTaTeH H ,nOKJIa,nOB
BJIO)KeHHH B 3TOM HarrpaBJIeHHH COCTaBJIHIOT COTHH MHJIJIHOHOB ,nOJIJIapOB B ro,n. 06mHH 06beM CBeTo,nHo,nHoro pbIHKa B MHpe B 2005 r. COCTaBHJI
4 8
MJIP,n ,nOJIJI.;
rrpe,nrrOJIaraeTCH,
qTO B 2010
r.
OH
6y,neT rrpeBblIIIaTb
MJIP,n ,nOJIJI. Oc06eHHocTb
KHHrH
B TOM,
qTO
<1>.
IIly6epT HBJIHeTCH
rrpo
Ha KOH
POM nOJIHTeXHHqeCKOrO HHCTHTYTa PeHHCJIaY3pa B YHHBepCHTeTe IIITaTa
,neCHTKH 0630pOB H 6POiliIOP, OT,neJIbHbIX rJIaB B yqe6HbIX rroc06HHX, HO
HblO-l1opK, H KHHra BO MHorOM HOCHT yqe6HbIH xapaKTep. KpOMe Toro,
CrreUHaJIbHbIX MOHorpa
aBTOp rrpOBo,nHJI HCCJIe,nOBaHHH B pa3HbIX HayqHblX HarrpaBJIeHHHX, H rJIa-
qHTaTeJIIO KHHra rrpo
BbI 0 CBeTo,nHo,nax C pe30HaTopaMH, 0 CBeTo,nHo,nax C JIIOMHHo<popaMH, 0
3TOT rrp06eJI. BTopoe H3,naHHe 3TOH KHHrH, BblIIIe,nIIIee Ha aHrJIHHCKOM
rrpHMeHeHHH CBeTo,nHo,nOB B BOJIOKOHHO-OrrTHqeCKOH CBH3H co,nep)KaT OPH-
H3bIKe B 2006 r. qepe3 TpH ro,na rrOCJIe rrepBoro H3,naHHH, BKJIlOqaeT aHaJIH3
rHHaJIbHble pe3YJIbTaTbI, eme )K,nymHe rrpaKTHqeCKOrO HCrrOJIb30BaHHH.
pa60T rro CBeTo,nHo,naM BrrJIOTb ,no caMoro rrOCJIe,nHero BpeMeHH, OHO Ha
HeCMOTpH Ha Bce Tpy,nHOCTH rrOCJIe,nHero rrepHo,na pa3BHTHSI OTeqe-
TpeTb 06IIIHpHee rrepBoro H3,naHHH. 3TO 06YCJIOBJIeHO 6YPHbIM pa3BHTHeM
CTBeHHOH HayKH H TeXHHKH, HCCJIe,nOBaHHSI H pa3pa60TKH rro CBeTo,nHo,nHOH
Ba)KHeHiliero HarrpaBJIeHHH B cOBpe-
TeMaTHKe B POCCHH He rrpeKpamaJIHCb. Pa3BHBalOTCSI pa60TbI rro TeXHO-
MeHHoH rrOJIyrrpoBo,nHHKOBOH 3JIeKTpOHHKe H OrrT03JIeKTpOHHKe, IIIHPOKO
JIOrHH 3rrHTaKCHaJIbHOrO BblpamHBaHHSI reTepOCTpYKTYP Ha OCHOBe GaN
rrpHMeHHlOmerocH B rrpOMbIIIIJIeHHOCTH H 06emalOmero HOBbIe rrpHMeHeHHH
Hero TBep,nbIX paCTBopOB. HCCJIe,nYIOTCSI CBOHCTBa rrpHMeceH, ,ne
B He,naJIeKOM 6y,nymeM. B
XX
H ,nHCJIOKaUHH. H3yqalOTCSI 3JIeKTpHqeCKHe H OrrTHqeCKHe CBOHCTBa MaB. rrpo-
TepHaJIOB H CTpyKTyp HH3KOH pa3MepHOCTH.
Pa3pa60TKH 3
H30IIIeJI rrpopbIB 6JIaro,napH C03,naHHIO reTepocTpYKTYP Ha OCHOBe HHTpH,na
CBeTo,nHo,nOB rrpOBo,nSlTCSI B rrpOMblIIIJIeHHbIX
raJIJIHH H 6JIH3KHX K HeMY TBep,nblx pacTBopoB. 3
rropTHblX qHrrOB, TaK H c06CTBeHHbIX BblpameHHblX CTpyKTyp. CBeTo,nHo,nbl
pa3pa60TaHHble Ha OCHOBe 3THX MaTepHaJIOB, rrepeKpbIJIH KOPOTKOBOJIHOBYIO
IIIHPOKO rrpHMeHSlIOTCSI B pa3HbIX 06JIaCTSlX CBeTOTeXHHKH. B POCCHH He06-
qaCTb crreKTpa -
xo,nHMa Koop,nHHaUHSI HayqHblX HCCJIe,nOBaHHH H TeXHHqeCKHX pa3pa60TOK
OT YJIbTpa
HO cymeCTBeHHO YJIyqIIIHJIaCb 3
CBeTo,nHo,nOB B rocy,napCTBeHHOM MaCIIITa6e. CBeTo,nHo,nbl H YCTpOHCTBa Ha HX OCHOBe ,nOJI)KHbl rrpOMblIIIJIeHHO rrpOH3Bo,nHTbCSI B POCCHH TaK, qT06bl
OT )KeJITO-3eJIeHOH ,no 6JIH)KHeH HH
6bITb KOHKypeHTHblMH B COBpeMeHHOM MHpe. n03TOMY MO)KHO Bblpa3HTb
JIH He TOJIbKO cpe,nCTBaMH CHrHaJIH3aUHH H rrepe,naqH HH<popMaUHH BO
YBepeHHOCTb B TOM, qTO pYCCKoe H3,naHHe KHHrH
BceM crreKTpaJIbHOM ,nHarra30HeOT 6JIH)KHeH YJIbTpa
CBoero qHTaTeJISI.
HH
<1>.
IIly6epTa HaH,neT
npH pe,naKTH:pOBaHHH rrepeBo,na Mbl H36eraJIH yrroTpe6JIeHHSI TepMHHa
OCBemeHHH, HO H rrepcrreKTHBHbIMH cpe,nCTBaMH 06mero OCBemeHHH. To,
«CBeTOH3JIyqalOmHe ,nHO,nbl~ H COKpameHHSI «CH,U»
qTO JIHilib rrpe,nrroJIaraJIOCb H Ka3aJIOCb <paHTacTHKoH 6y,nymero B rrpe-
,nOCJIOBHOH rrepe,naqH aHrJIHHCKOro TepMHHa «light-Emitting Diodes» H co-
,nHCJIOBHH pe,naKTopa rrepeBo,na K
KpameHHH «LED». BMecTo 3Toro HCrrOJIb30BaH TepMHH «CBeTo,nHo,nbl», IIIH-
KHHre A.
oepra H n. ,UHHa, CTaJIO
peaJIbHOCTblO. CBoeBpeMeHHocTb rrOHBJIeHHH KHHrH
<1>.
KaK He6JIar03ByqHOH
POKO rrpHMeHSleMblH B PYCCKOH HayqHO-TeXHHqeCKOH JIHTepaType; B HeKOTOIIly6epTa 06YCJIOBJIeHa eme H
pblX CJIyqaSlX HCrrOJIb30BaHO COKpameHHe C,U. nO,nCTpOqHble rrpHMeqaHHSI
TeM, qTO KpoMe HCCJIe,noBaTeJIeH H pa3pa60TqHKOB, 3aHHMalOmHXCH POCTOM
c,neJIaHbl pe,naKTopOM B Tex CJIyqaSlX, Kor,na He06xo,nHMO YKa3aTb yqe6HYlO
KpHCTaJIJIOB H CTpyKTyp H KOHCTpYHpYlOmHX CBeTo,nHo,nbI, HHTep~c K CBeTO-
JIHTepaTYPY Ha PYCCKOM Sl3blKe H Kor,na Ha,no yrroMSlHYTb rrpHopHTeTHble OTeqeCTBeHHbIe rry6JIHKaUHH. KpOMe TOro, ,naHbl CCblJIKH Ha HeKOTopble pa-
I) Eepr A., .L{!iH TI. CBeTo,U.Ho,U.bl: IIep. c aHrJI. IIO,U. pe,U.. A.3. IOHoBH''1a. - M.:
MHP, 1979. - 668 c.
60Tbl, orry6JIHKOBaHHbie Y)Ke rrOCJIe Bblxo,na BToporo aHrJIHHCKOro H3,naHHSI KHHrH.
12
llpeaUCJ/,08ue peaaKmOpa nepe80aa TIepeBO)J. BbIIIOJIHeH
E. JI.
CBylHU:OBbIM H
10. A.
3a6oJIOTHOH,
HaYtI-
HO-TeXHHtIeCKaH TepMHHOJIOrHH nepeBe)J.eHa H tIaCTHtIHO OTpe)J.aKTHpOBaHa A. H. TYPKHHbIM H C.
C.
IllHPOKOBbIM.
Pe.n.aKTOp BblpaJKaeT 6JIarO.n.apHOCTb P.
H.
CTOJIHpeBCKOH H O. E. Ha-
HHIO 3a KOHCYJIbTaU:HH npH nepeBO)J.e TepMHHOB no CBeTOTeXHHKe H BOJIOKOHHO-OnTHtIeCKOH CBH3H. Oco6aH 6JIarO)J.apHOCTb aBTOpy B pa60Te Ha)J. KHHroH.
llpe,IJ.HCJlOBHe aBTopa K PYCCKOMY H3,IJ.aHHIO
npocp.
2007
r.
npHMeHeHHH B CBeTOTeXHHKe. CBeTo)J.Ho)J.bI 3cpcpeKTHBHbI, HMelOT MaJIble pa3MepbI H )J.JIHTeJIbHbIH CpOK CJIYJK6bI. JIHHeHKH H MaTpHU:bI CBeTO)J.HO)J.OB H3JIYtIalOT CBeT TaKoH MOIlI,HOCTH, KOTopaH )J.OCTaTOtIHa )J.JIH OCBeIlI,eHHH ytIpeJK)J.eHHH H yJIHU:. OHH TaKJKe HCnOJIb3YIOTCH )J.JIH U:BeTHoH )J.eKopaTHBHOH nO)J.CBeTKH 3)J.aHHH. ECJIH CBOHCTBa CBeTO)J.HO)J.OB 6Y)J.YT nOJIHOCTblO KOHTPOJIHpOBaTbcH, OHH CTaHyT ropa3)J.o 60JIee MOIlI,HbIMH, tIeM 06bltIHble HCTOtIHHKH CBeTa. MbI 6y)J.eM B He)J.aJIeKOM 6Y)J.yIlI,eM u:eJIeHanpaBJIeHHO ynpaBJIHTb TaKHMH CBOHCTBaMH CBeTO)J.HO)J.OB, KaK HX cneKTp H3JIytIeHHH, U:BeTOBaH TeMnepaTypa, yrJIOBaH )J.HarpaMMa, nOJIHpH3aU:HH, BpeMeHHaH MO)J.YJIHU:HH. CBeTo)J.Ho)J.bI CTaHYT YHHBepCaJIbHbIMH HCTOtIHHKaMH CBeTa, npeBOCXO)J.H B 3TOM OTHOIIIeHHH Bce )J.pyrHe CBeTOBble HCTOtIHHKH, KOTopble H3BeCTHbI tIeJIOBetIeCTBY. TI03TOMY CBeTO)J.HO)J.bI HBJIHIOTCH O)J.HHMH H3 KJIlOtIeBbIX npH6opOB B COBpeMeHHOM TeXHOJIOmtIeCKOM 06IlI,eCTBe. Qpe3BbltIaHHO BaJKHO nOHHMaTb HBJIeHHH, onpe)J.eJIHIOIlI,He npHHU:HnbI )J.eHCTBHH CBeTO)J.HO)J.OB, npOH3BO)J.CTBO npH6opOB H HX pa3Hoo6pa3Hble npHMeHeHHH.
OtIeHb BaJKHO YMeTb HX
)J.eJIaTb. TIepBoe aHrJIHHCKOe H3)J.aHHe KHHrH O)J.bI) nOHBHJIOCb B B
2006
2003
Light-Emitting Diodes
(CBeTo)J.H-
r., CYIlI,eCTBeHHO pacIIIHpeHHoe BTopoe H3)J.aHHe-
r. KHHra CTaJIa CTaH)J.apTHbIM ytIe6HHKOM no CBeTO)J.HO)J.aM. HaCTO-
HIlI,aH pyccKaH ny6JIHKaU:HH -
nepeBO)J. BToporo H3)J.aHHH KHHrH.
AJIeKcaH)J.p IOHOBHtI B3HJI Ha ce6H Tpy)J. no nepeBO)J.y KHHrH Ha PYCCKHH H3bIK. ,lI.JIH MeHH 6bIJIO y)J.OBOJIbCTBHeM nO)J.)J.epJKaTb ero B 3TOM HatIHHaHHH H npe)J.oCTaBHTb tIaCTb 0pHrHHaJIbHbIX HJIJIIOCTpaU:Hii.
51
XOTeJI 6bI nOJKe-
JIaTb, tITo6bI PYCCKHH nepeBO)J. KHHrH 6bIJI nOJIe3HbIM HCTOtIHHKOM 3HaHHH )J.JIH MHorHX tIHTaTeJIeH.
TIYCTb OH nOCJIYJKHT TeXHHtIeCKOMY nporpeccy
B pa3Hblx tIaCTHX HaIIIero MHpa H )J.OCTHJKeHHIO 60JIee CBeTJIOrO H HpKoro 6Y)J.yIlI,ero.
CeHTH6pb
2007
r.
15
[JpeaUCJL08Ue u3aameAbcm8a «Cambridge University Press»
3Ta KHHra rrpe.n.Ha3HaqeHa .n.JISI HayqHhIX pa60THHKOB H CrreUHaJIHCTOB, pa60TaIOIIJ.HX B 06JIaCTH pa3pa60TKH CBeTo.n.Ho.n.OB H CHCTeM, B KOTOPbIX OHH rrpHMeHSlIOTcSI, a TaK)Ke .n.JISI cTy.n.eHToB H acrrHpaHToB cooTBeTcTBYIOIIJ.HX TeXHHqeCKHX CrreUHaJIhHOcTeH.
IIpeAHCJIOBHe H3AaTeJIhCTBa
«Cambridge University Press»
MaHHSI) rro CrreUHaJIhHOCTH HH)KeHep-3JIeKTpOTexHHK B 1981 r., TaM )Ke B 1986 rr. OH C ycrrexoM 3aIIJ.HTHJI KaH.n.H.n.aTCKYIO .n.HcCePTaUHIO. C 1981 rro 1985 r. OH, 6y.n.YQH acrrHpaHTOM, pa60TaJI Ha.n. TeMoH BhlpaIIJ.HBaHHSI
nepe.n. BaMH BTopoe H3.n.aHHe KHHrH, HCrrpaBJIeHHOe H CYIIJ.eCTBeHHO
KpHCTaJIJIOB CJIO)KHbIX rrOJIyrrpoBo.n.HHKOB B IIlTYTrapTcKoM I1HcTHTYTe
.n.orrOJIHeHHoe. KHHra rrOCBSlIIJ.eHa orrHcaHHIO
3HKH TBep.n.oro TeJIa HM. MaKca nJIaHKa. B
CTBHSI H TeXHOJIOmqeCKHX acrreKTOB H3rOTOBJIeHHSI rrOJIyrrpOBo.n.HHKOBhIX
B JIa60paTopHIO BeJIJI (Bell Labs) B XOJIM.n.eJIe. C 1988 r. rro 1995 r.
1985 r. rrocTyrrHJI Ha pa60TY
IIly-
CBeTo.n.Ho.n.OB, H3JIyqalOIIJ.HX B HH
6epT pa60TaJI Be.n.YIIJ.HM CrreUHaJIHCTOM B HaYQHO-HCCJIe.n.OBaTeJIhCKOM OT-
qeCKOrO crreKTpa, a TaK)Ke .n.HO.n.OB 6eJIoro CBeqeHHSI. B HeH rrpe.n.CTaBJIeH-
.n.eJIe JIa60paTopHH BeJIJI B M3ppeH XHJIJI. B
Hhle OCHOBHhle xapaKTepHCTHKH CBeTo.n.Ho.n.OB, HX 3JIeKTpHqeCKHe H OrrTHqe-
HOCTh rrpo
1995 r. rrOJIYQHJI .n.OJI)K-
CKHe CBOHCTBa, YTOqHeHhI H rrpHBe.n.eHhI B COOTBeTCTBHe C COBpeMeHHhIMH
3JIeKTpOTeXHHKH H BbIQHCJIHTeJIhHhIX CHCTeM, KOTopoe SlBJISleTCSI
3HaHHSlMH 0 CTpyKTypax H3JIyqalOIIJ.HX CBeT YCTPOHCTB.
UeHTpa BOJIOKOHHOH OITTHKH. TaM
Bo BTOPOM H3.n.aHHH KHHm BBe.n.eHhI .n.eBSlTh HOBbIX rJIaB. KpoMe TO-
xapaKTepHCTHK MaTepHaJIOB GaN, H3rOTOBJIeHHe H KOHTPOJIh YCTPOHCTB
ro, MaTepHaJIhI paHee CYIIJ.eCTBOBaBUIHX rJIaB CYIIJ.eCTBeHHO .n.orrOJIHeHh!.
Ha OCHOBe rrOJIyrrpOBo.n.HHKOBhIX coe.n.HHeHHH, B QaCTHOCTH CBeTo.n.Ho.n.OB
B
KHHry BKJIlOqeHhI HOBbIe CBe.n.eHHSI: 0 COBpeMeHHhIX MaTepHaJIaX .n.JISI
H3 GaN. C 2002 r. Ha3HaQeH Ha .n.OJI)KHOCTh rrpo
H3rOTOBJIeHHSI KoprrycoB CBeTo.n.Ho.n.OB, 06 OTpa)KaTeJISlX, 0 CBeTo.n.Ho.n.ax, H3-
CKoro I1HcTHTYTa B Tpoe (lliT. HhlO-I10pK), r.n.e 3aBe.n.yeT Ka
JIyqalOIIJ.HX B YJIhTpa
III
rpyrrrrhI, 0 TBep.n.oTeJIhHhIX HCTOqHHKaX H3JIyqeHHSI, HCrrOJIh3ye-
crreKTHBHhIX MaTepHaJIOB .n.o HaCTOSlIIJ.erO BpeMeHH.
MhIX B OCBeTHTeJIhHhIX CHCTeMax, a TaK)Ke 0 TeMrrepaTypax p-n-rrepexo.n.oB.
OH rrepBhIM rrpo.n.eMOHCTpHpOBaJI pa60TY CBeTo.n.Ho.n.OB C pe30HaTopaMH. OH
nO.n.P06HO paccMaTpHBalOTcSI cOBpeMeHHhle rrpe.n.CTaBJIeHHSI 0
SlBJISleTCSI aBTopOM H coaBTopOM. 60JIee QeM 200 rry6JIHKaUHH, BKJIIOQaSl
SlBJIeHHSlX,
rrpoHcxo.n.SlIIJ.HX BHyTpH
H3JIyqalOIIJ.HX YCTPOHCTB:
H3JIyqeHHe
KHHry «JIempoBaHHe rroJIyrrpoBo.n.HHKOB
III-V
rpyrrrrhI»
(Doping in III-V
CBeTa, .n.HHaMHKa H3JIyqaTeJIhHOH H 6e3hI3JIyqaTeJIhHOH peKOM6HHaUHH CBO-
Semiconductors,
60.n.HbIX HOCHTeJIeH TOKa, crrOHTaHHaSl peKOM6HHaUHSI B 06beMHhIX pe30-
KOTOPYIO rroJIYQHJI JIHTepaTypHylO rrpeMHIO.
HaTopax. OrrHcaHhI crroc06hI rrOBhIllIeHHSI OrrTHqeCKOrO BhIBo.n.a 113JIyqeHHSI
26 rraTeHTOB CIIlA H QJIeH HaYQHhIX 06IIJ.eCTB IEEE, APS, OSA H SPIE.
H rrpoeKTHpOBaHHSI CBeTo.n.Ho.n.OB C BhICOKHMH 3HaqeHHSlMH KBaHTOBoro BhIxo.n.a H K. rr .
.n..,
H3JIyqaTeJIeH 6eJIoro CBeTa C rrpHMeHeHHeM JIIOMHHO
HhIX MaTepHaJIOB, crroc06HhIX rrpe06pa30BhIBaTh .n.JIHHhI BOJIH H3JIyqeHHH,
Cambridge University Press, 1993, 0-521-01784-X), 3a
JIpuMettaliUe
H OITTHqeCKHX OTpa)KaTeJIeH. Bo BTOPOM H3.n.aHHH CYIIJ.eCTBeHHO .n.orrOJIHeH
PHCYHKH
peaaKmopa:
QepHo-6eJIhle.
B
O.n.HaKo,
aHrJIHHCKOM rrOCKOJIhKY
pa3.n.eJI, KaCalOIIJ.HHCSI pa.n.HOMeTpHqeCKHX H
HbIe,
POB CBeTo.n.Ho.n.OB BH.n.HMoro .n.karra30Ha OrrTHqeCKOrO crreKTpa,
HaHTH
qYBCTBHTeJIhHOCTH qeJIOBeqeCKOrO rJIa3a, KOJIOpHMeTpHH H UBeTorrepe.n.aqH.
H http://www.LightEmittingDiodes.org.
B KHHre TaK)Ke 06CY)K.n.aIOTCSI BorrpOChI rrpHMeHeHHSI CBeTo.n.Ho.n.OB HH
aBTop H coaBTOp
a
UBeT HX
QaCTO Ha
HeceT
caHTe:
Ba)KHYIO
BapHaHTe
HCxo.n.Hhle
HH
KHHrH
PHCYHKH QHTaTeJIH
Bce UBeT-
MoryT
http://www.cambridge.org/9780521865388
17
llpe8ucJlo8ue a8mopa
npe.ll:HCJIOBHe aBTOpa
B TeqeHHe rrOCne~HHX ~eCHTHneTHH TeXHHqeCKHH rrporpecc B 06naCTH pa3pa60TKH H H3rOTOBneHHH CBeTO~HO~OB H~eT C 3aXBaTbIBalOmeH CKOPOCTblO. COBpeMeHHble CBeTO~HO~bI OTnHqalOTCH MHHHaTlOpHOCTblO, rrpOqHOCTblO, Ha~e:lKHOCTblO, XOpOIIlHMH OrrTHqeCKHMH XapaKTepHCTHKaMH H BbICOKHM KBaHTOBbIM BbIXO~OM H3nyqeHHH. B OTnHqHe OT MHOrHX ~pyrHx HCTOqHHKOB CBeTa CBeTO~HO~bI MoryT rrpe06pa30BbIBaTb 9neKTpHqeCKYlO 9HeprHIO B CBeTOBYIO C K. rr.~. 6nH3KHM K e~HHHl.J:e. Ilporpecc B pa3BHTHH CBeTO~HO~OB He TonbKO He 3aKaHqHBaeTCHOH HaXO~HTCH B caMOM paCIJ:BeTe. HerrpepbIBHoe COBepIIleHCTBOBaHHe TexHOnOrHH crroc06cTByeT 9TOMy. Il09TOMY O:lKH~aeTCH, qTO ponb CBeTO~HO~OB 6y~eT TonbKO B03paCTaTb H B 6y~ymeM OHH CTaHyT OCHOBHbIMH HCTOqHHKaMH CBeTa. IlepBble CBeTO~HO~bI 6blnH pa3pa60TaHbI eme B Haqane rrpOillnoro BeKa, qTO rrO~TBep:lK~aeTCH rry6nHKaIJ:HHMH, ~aTHpoBaHHbIMH 1907 r. Ho, K co:lKaneHHIO, 0 HHX 3a6blnH ~o 1950 r., HeHa~onro BcrrOMHHB 06 HX cymeCTBOBaHHH B 1920-x r. B 1960-x rr. cpa3y HeCKonbKO rpyrrrr Hccne~o BaTeneH rrpo~eMoHcTpHpoBanH pa60TY rronyrrpoBo~HHKOBbIX na3epoB. IlepBble CBeTO~HO~bI 6bInH rr060qHbIM rrpo~yKToM 9THX Hccne~oBaHHH, H ~nH rrpH06peTeHHH caMOCTOHTenbHoro cTaTyca HM rroTpe60Banocb rrpoHTH rryTb B HeCKonbKO ~ecHTHneTHH. B HaCTOHmee BpeMH CBeTO~HO~bI HBnHIOTCH YHHBepcanbHbIMH H BeCbMa rrepcrreKTHBHbIMH HCTOqHHKaMH CBeTa . .L{aHHaH KHHra rrOCBHmeHa orrHcaHHIO
nyrrpoBo~HHKax, KOHCTpYHpOBaHHe KoprrycoB CBeTO~HO~OB, orrHcaHHe yep CBeTO~HO~OB H CBeTO~HO~OB, rrpHMeHHeMblX B OCBeTHTenbHblX CHCTeMax. MHorHe MOH KonnerH rrOMoranH B C03~aHHH 9TOH KHHrH. Oc06ylO 6naro~apHocTb H XOQy Bblpa3HTb ~OKTopaM HaYK: 9HPHKO BennoTTH (BoCTOHCKHH YHHBepcHTeT), .L{:lKaH XH Xo (Samsung Advanced Institute of Technology), TOMacy reccMaHY (RPI), .L{:lKOHr Kay KHM (RPI), lllaYH JIHH (RPI), H. HapeH~paHY (RPI), M . .L{:lKOP~:lKy Kpa
E. llly6epT
19
1.1. HcmopuR coaaaHuR cBemOaUOaOB Ha OCHOBe SiC
r JIaBa HCTOPHB C03,nAHHB
1.1.
CTPYKTYPbI Tlma KpHCTaJIJI-TO'Ie'IHbIH MeTaJIJIH'IeCKHH KOHTaKT 'IaCTO HCCJIe.n:OBaJIHCb B nOHCKax aJIbTepHaTHBbI .n:oporHM BaKYYMHbIM .n:Ho.n:aM, noTpe6mIIOlll.HM MHoro 9JIeKTpH'IeCKOH 9HeprHH, KOTopble BnepBble nOHBHJIHCb B 1904 r. IlpH pa60Te C KpHCTaJIJIaMH Kap60pYH.n:a PaYH.n: 3aMeTHJI HcnycKaeMoe HMH CBe'IeHHe. HMeHHo C 9Toro MOMeHTa cpaKTH'IeCKH Ha'IHHaeTCH HCTOPHH CBeTo.n:Ho.n:OB. IlpaB.n:a, B Te BpeMeHa He CYllI.eCTBOBaJIO TO'IHbIX MeTo.n:OB onpe.n:eJIeHHH CBOHCTB MaTepHaJIOB, 'ITO He n03BOJIHJIO 06bHCHHTb CPH3HKY npo~ecca H3JIY'IeHHH CBeTa. TeM He MeHee, PaYH.n: HeMe.n:JIeHHO .n:OJIO)KHJI 0 CBOHX Ha6J11o.n:eHHHX pe.n:aKTopaM )KypHaJIa «3JIeKTpH'IeCKHH MHP~ (Electric World). 3Ta ny6JIHKa~HH nOKa3aHa Ha pHC. 1.1.
1 CBETO~HO~OB
HCTOPHH C03,Z1;aHHH CBeTO,Zl;HO,Zl;OB Ha OCHOBe
SiC
51BJIeHHe 3JleKmpOJllOMUfteCt{eftt{uu, 3aKJIIO'IaIOIlI.eeCH B H3JIY'IeHHH cpoTOHOB TBep.n:bIM TeJIOM no.n: B03.n:eHCTBHeM 9JIeKTpH'IeCKOrO TOKa, 6bIJIO OTKPblTO B Ha'IaJIe XX B. B TOM, 'ITO 9JIeKTpOJIIOMHHeC~eH~HH MO)KeT npOHcxo.n:HTb npH KOMHaTHOH TeMnepaType, H 3aKJIIO'IaeTCH ee rJIaBHOe OTJIl1'Il1e OT menJLOBOZO CBelieftUJl, HBJIHIOllI.erOCH 9JIeKTpOMarHHTHbIM 113JIY'IeHl1eM BH.n:HMoro .n:l1ana30Ha onTH'IeCKOrO cneKTpa, HcnycKaeMbIM MaTepHaJIaMI1, HarpeTbIMH .n:o BbICOKOH TeMnepaTypbl, 06bI'IHO 60JIbIIIeH750 °C. B 1891 r. 1O.n:)KI1H A'IeCOH pa3pa60TaJI npo~ecc npOMbIIIIJIeHHOrO llOJIY'IeHHH HOB oro MaTepHaJIa - Kap611.n:a KpeMHI1H SiC, Ha3BaHHoro Kap60pYH.n:OM. CI1HTe3 9Toro MaTepl1aJIa npOTeKaJI npl1 BbICOKOH TeMnepaType B Tl1rJIe C 9JIeKTpH'IeCKHM HarpeBoM, B KOTOPOH B pe3YJIbTaTe XHMH'IeCKOH peaK~HH Me)K.n:y CTeKJIOM - .n:HOKCH.n:OM KpeMHHH Si02 H yrJIeM - yrJIepo.n:oM C-cpopMHpOBaJICH Kap60pYH.n: (Filsinger, Bourrie, 1990; Jacobson et al., 1992):
He06blqHOe nOBeAeHHe Kap60pYHAa
PeaaICmopaM
3/CYPHaJla
«3JleICmpu'tecICuu MUp»:
UPH HsyqeHHH npOTeKaHHH TOKa qepes Kap60pYHA H
ApyrHe MaTe-
pHaJibI 6blJIO 06HapYlKeHo JII060nbITHoe SIBJIeHHe. UpH nOAaqe MelKAY AByMB TOqKaMH Ha KpHCTaJIJIe Kap60pYHAa HanpSIlKeHHSI
10
BOJIbT
OH HaqHHaJi CBeTHTbCSI lKeJITOBaTbIM CBeTOM. liblJIO HaiiAeHo ew;e ABa MaTepHaJIa, cnoc06HbIX SIpKO CBeTHTbCSI npH TaKOM HHSKOM HanpSIlKeHHH. OAHaKO npH HanpSIlKeHHH
110
BOJIbT HaqHHalOT HSJIyqaTb CBeT
YlKe ropasAo 60JIbme pasHoBHAHocTeH MaTepHaJIOB, qaCTb HS KOTOPbIX CBeTHTCSI TOJIbKO no KpUM, H
He Bce OHH H3JIyqalOT lKeJITblH CBeT.
HeKOTopbIe Bew;eCTBa HMelOT SeJIeHOe, OpaHlKeBOe HJIH CHHee CBeqeHHe • Do Bcex CJIyqux CBeqeHHe Ha6JIIOAaJIOCb co CTOPOHbI oTpHu:aTeJIbHOrO nOJIIOCa, a
co CTOPOHbI nOJIOlKHTeJIbHOrO nOJIlOca HHorAa nOSIBJISIJIHCb
.3eJIeHO-CHHHe BcnbImKH.· ECJIH B MOHOKpHCTaJIJIe oTpHu:aTeJIbHblH KOHTaKT nOMeCTHTb B u:eHTpe H MeHSITb paCnOJIOlKeHHe nOJIOlKHTeJIbHOrO KOHTaKTa, CBeTHTbCSI 6YAeT TOJIbKO qaCTb KpHCTaJIJIa, B KOTOPOH HaxO-
Si02 (r)+C (TB)--+SiO (r)+CO(r),
AHTCSI nOJIOlKHTeJIbHbIH nOJIlOc.
SiO (r)+2C (TB)--+SiC (TB)+CO (r).
UoxolKe, qTO BbImeonHcaHHoe SIBJIeHHe H SIBJIeHHe BOSHHKHOBeHHSI s. A. C Ha nepexoAe MelKAY Kap60pYHAOM H APyrHM npoBoAHHKOM npH nponycKaHHH qepes KpHCTaJIJIbI nOCTOSIHHoro HJIH nepeMeHHoro TOKa CBSISaHbI
KaK H nOJIynpOBo.n:HI1KH THna AIIIBV, Kap60pYH.n: HBJIHeTCH I1CKYCCTBeHHO nOJIY'IaeMbIM MaTepHaJIOM, He CYlll.eCTBYIOllI.l1M B npHpo.n:e. SiC HMeeT TaKYIO )Ke KpHCTaJIJIH'IecKYIO peilieTKY, KaK H aJIMa3, n09ToMY 9TOT MaTepl1aJI xapaKTepH3yeTcH O'IeHb BbICOKOH TBep.n:ocTbIO, Ilo MHHepaJIOrH'IeCKOH IIIKaJIe TBep.n:ocTH (IIIKaJIe ~ooca) TBep.n:ocTb Kap60pYH.n:a paBHa 9,0, Tor.n:a KaK 'IHCTbIH SiC 06JIa.n:aeT TBep.n:ocTbIO 9,2-9,5, a aJIMa3 10,0. DJIaro.n:apH CBoeH BbICOKOH TBep.n:oCTI1 11 HH3KOH CTOHMOCTI1 CHHTe3a Kap60pYH.n: CTaJI IIIHPOKO HCnOJIb30BaTbCH B npoH3Bo.n:cTBe a6pa3HBHbIX MaTepHaJIOB. B 1907 r. feHpH .z:L)K03ecp PaYH.n: (1881-1966 rr.) npOBepHJI B03MO)KHOCTb npHMeHeHHH KpHCTaJIJIOB SiC B Ka'IeCTBe BbmpHMJIHIOllI.l1X TBep.n:oTeJIbHbIX .n:eTeKTopoB. Il03.n:Hee 9TH .n:eTeKTopbI nOJIytIHJIH Ha3BaHHe «KPHCTaJIJIHtIeCKHX .n:eTeKTopOB~. Hx HCnOJIb30BaJII1 KaK .n:eMo.n:YJIHTOPbI pa.n:HotIaCTOTHbIX CHrHaJIOB B nepBblx pa.n:HonpHeMHHKax. Pa60Ta KpHCTaJIJIHtIeCKHX .n:eTeKTopoB 6bIJIa BnepBble npo.n:eMoHCTpHpoBaHa B 1906 r. B Te ro.n:bI
Apyr C ApyroM, HO STa CBSISb SIBJISIeTCSI BTOPHqHOH, nOCKOJIbKY xopomo HSBeCTHO, qTO nOSIBJIeHHe s. A. c. 06'bSICHSIeTcSI TepMOSJIeKTpuqecKHMH npou:eCCaMH. AsTOP STOH CTaTbH 6YAeT 6JIarOAapeH sa CCblJlKH Ha ApyrHe ny6JIHKau:HH, nOCBSIw;eHHbIe STOMY HJIH nOA06HbIM eMY SIBJIeHHHM. HblO-HoPK,
PHC.
1.1.
Coo6meHHe 0 «JII06onblTHOM
r. )1;lK. PaYHA
lIBJIeHHH~, Ha3BaHHOM 3JIeKTpOJIIOMHHeCueH-
UHeH, 3aKJIIOqaIOmeMClI B H3JIyqeHHH CBeTa KpHCTaJIJIHqeCKHM Kap6opYH.D.OM npH nO.D.aqe Ha Heto Hanpll)!{eHHlI.
M3
CTaTbH BH.D.HO, 'ITO nepBbIH CBeTO.D.HO.D. 6b1JI CKopee
.D.HO.D.OM iIIOTTKH, qeM .D.HO.D.OM C p-n-nepeXO.D.OM (H.J.Round, Electrical World,
49,
309, 1907). PaYH.n: 6b1JI pa.n:HoHH)KeHepOM H BeCbMa ycneIIIHbIM H306peTaTeJIeM, K KOH~y cBoeH KapbepbI HMeBIIII1M 117 naTeHTOB. IlepBble YCTpoHcTBa, 113JIytIaIOIlI.He CBeT, 06JIa.n:aJII1 BbmpHMJIHIOIlI.HMI1 BOJIbTaMnepHbIMH xapaKTepI1CTHKaMH, T. e. HBJIHJIHCb .n:Ho.n:aMH. IlpHtIHHa I1cnycKaHHH CBeTa B HI1X
Dt. 1.
20
1.2. Hcmopuft coaaaftuft cBemOaUOaOB ICpacftoeo u uftcppalCpacftoeo CBe'leftUft 21
Hcmopuft coaaaftuft cBemOaUOaOB
06bHCHHeTCH B03HHKHOBeHHeM BbIIlpHMJIHlOmerO KOHTaKTa illOTTKH B MeCTe KOHTaKTa KpHCTaJIJIa SiC H 3JIeKTpo.n.oB. ,UeHcTBHe .n.Ho.n.a illOTTKH
B
1928 r. JIoceB (Lossev, 1928) orry6JIHKOBaJI pe3YJIbTaTbI CBOHX HC-
CJIe.n.oBaHHH HBJIeHHH JIIOMHHeCIIeHIIHH, Ha6JIIO.n.aeMoro B BbIIlpHMJIHlOmHX
06eCrreqHBaeTCH, KaK rrpaBHJIO, TOKOM OCHOBHbIX HOCHTeJIeH 3apH.n.a (3JIeK-
SiC-.n.Ho.n.ax, HCrrOJIb3yeMblx B KaqeCTBe .n.eMo.n.YJIHTOPOB B pa.n.HocxeMax,
TpOHOB).
Ha rrepexo.n.ax MeTaJIJI-rrOJIyrrpoBo.n.HHK. OH YCTaHOBHJI, qTO H3JIyqeHHe
O.n.HaKo rrpH
06paTHoM CMemeHHH,
CHJIbHOM rrpH
rrpHMoM CMemeHHH rrepexo.n.a HJIH
ero
KOTOPOM 3arrycKalOTcH rrpoIIeccbI JIaBHHHOro
CBeTa B O.n.HHX .n.Ho.n.ax B03HHKaeT TOJIbKO rrpH HX CMemeHHH B 06paTHOM
YMHO)KeHHH, B HeM MO)KeT 06pa30BaTbCH 60JIbiliOe KOJIHqeCTBO HeOCHOBHbIX
HarrpaBJIeHHH, a B .n.pymx -
HOCHTeJIeH (.n.b1pOK).
HarrpaBJIeHHHX. JIoceB rrbITaJICH HaHTH rrpHqHHY rrOHBJIeHHH JIIOMHHeCIIeH-
Ha pHC. 1.2 rrOKa3aH MexaHH3M H3JIyqeHHH CBeTa rrpH rrpHMOM CMemeHHH
.n.Ho.n.a
illOTTKH.
npe.n.CTaBJIeHbI
30HHble
.n.HarpaMMbI
rrepexo.n.a
MeTaJIJI-rrOJIyrrpOBo.n.HHK B Tpex COCTOHHHHX: B YCJIOBHH paBHOBeCHH rrpH He60JIbiliOM rrpHMOM CMemeHHH HHH
(8).
(6)
(a),
H rrpH CHJIbHOM rrpHMoM CMeme-
npe.n.rrOJIaraeTCH, qTO rrOJIyrrpOBo.n.HHK 06JIa.n.aeT rrpoBo.n.HMOCTblO
n-THrra. npH CHJIbHOM rrpHMoM cMemeHHH rrepexo.n.a B rrOJIyrrpoBo.n.HHK qepe3 rrOBepXHOCTHbIH rroTeHIIHaJIbHbIH 6apbep 3a CqeT TYHHeJIbHOrO 3cpcpeKTa HH)KeKTHpyeTcH 60JIbiliOe KOJIHqeCTBO HeOCHOBHbIX HOCHTeJIeH.
B pe3yJIbTa-
Te peKOM6HHaIIHH 3THX HOCHTeJIeH (.n.b1pOK) C 3JIeKTpOHaMH rrOJIyrrpoBo.n.HHKa rrpoHcxo.n.HT H3JIyqeHHe CPOTOHOB.
B
.n.Ho.n.ax illOTTKH .n.JIH ocymeCTBJIe-
HHH HH)KeKIIHH HeOCHOBHbIX HOCHTeJIeH Tpe6YlOTCH HarrpH)KeHHH, HaMHoro rrpeBbIIlIalOmHe 06b1qHO
HCrrOJIb3yeMbie HX 3HaqeHHH
Ha
p-n-rrepexo.n.ax
cBeTo.n.Ho.n.OB. PayH.n. B CBoeM .n.OKJIa.n.e (Round, 1907) YKa3aJI, qTO pa60qHe HarrpH)KeHHH .n.HO.n.OB illOTTKH Haxo.n.HTcH B .n.Harra30He
10-11 0 B.
rrpH CMemeHHH KaK B rrpHMOM, TaK H 06paTHOM
IIHH, .n.JIH qero OH KarraJI Ha CBeTHmYIOCH rrOBepXHOCTb 06pa3IIa )KH.n.KHH 6eH30JI H H3MepHJI CKOPOCTb ero HcrrapeHHH. HCXO.n.H H3 Toro, qTO 6eH30JI HCrrapHJICH OqeHb
Me.n.JIeHHO,
OH
c.n.eJIaJI
rrpaBHJIbHOe
3aKJIlOqeHHe, qTO
H3JIyqeHHe CBeTa HHKaK He CBH3aHO C CHJIbHbIM pa30rpeBOM rrOBepXHOCTH. OH TaK)Ke rrpe.n.rrOJIO)KHJI, qTO HBJIeHHe JIIOMHHeCIIeHIIHH ~OqeHb rrOXO)Ke Ha rrpOIIecc HcrrYCKaHHH XOJIO.n.HbIX 3JIeKTpOHOB». JIoceB 06HapY)KHJI, qTO rrOHBJIeHHe H HCqe3HOBeHHe CBeqeHHH B SiC-.n.Ho.n.ax rrpoHcxo.n.HJIO OqeHb 6bICTPO, qTO .n.eJIaJIO B03MO)KHbIM H3rOTOBJIeHHe Ha HX OCHOBe TaK Ha3bIBaeMbIX CBeTOBbIX peJIe 1). ,UaJIbHeHillee pa3BHTHe CBeTo.n.Ho.n.OB, BrrJIOTb .11.0 1960-x rr., rro.n.P06HO orrHcaHO B pa60Te JIe6Hepa (Loebner, 1976)
K
2).
KOHIIY 60-x rr. 6bIJIH pa3pa60TaHbI TeXHOJIOrHH rrOJIyqeHHH rrJIeHOK
SiC (Violin et ai., 1969) H H3rOTOBJIeHHH Ha HX OCHOBe rrOJIyrrpOBo.n.HHKOBbIX YCTPOHCTB C
p-n-rrepexo.n.OM 3).
,UHO.n.bI H3 Kap6H.n.a KpeMHHH 6bIJIH
rrpapo.n.HTeJIHMH COBpeMeHHbIX CBeTo.n.Ho.n.OB roJIy60ro CBeqeHHH, B KOTOPbIX 3cpcpeKTHBHOCTb rrpe06pa30BaHHH 3JIeKTpHqeCKOH 3HeprHH B OrrTHqeCKOe
H3JIyqeHHe CBeTa B .n.Ho.n.ax illOTTKH MO)KeT TaK)Ke rrpoHcxo.n.HTb rrpH HX
H3JIyqeHHe COCTaBJIHJIa Bcero 0,005% (Potter et ai., 1969).
B rrocJIe.n.YlOmHe
06paTHOM cMemeHHH B pe3YJIbTaTe JIaBHHHOro rrpo60H, cOrrpOBO)K.n.alOme-
.n.eCHTHJIeTHH He y.n.aJIOCb 3HaQHTeJIbHO YJIYQIlIHTb xapaKTepHCTHKH CBeTO-
rOCH y.n.aPHOH HOHH3aIIHeH aTOMOB rrOJIyrrpoBo.n.HHKa HOCHTeJIHMH 3apH.n.oB,
.n.HO.n.OB rOJIy60ro CBeQeHHH. 3TO 06bHcHHeTcH TeM, QTO SiC OTHOCHTCH K
06JIa.n.alOmHMH BbICOKHMH 3HeprHHMH.
B
rrpoIIecce HOHH3aIIHH B BaJIeHTHOH
30He 06pa3yeTcH 60JIbiliOe qHCJIO .n.b1POK, a B 30He rrpoBo.n.HMOCTH -
MHoro
HenpHMo30HHbIM rrOJIynpoBo.n.HHKaM, y KOTOPbIX OQeHb HH3KaH BepoHTHoCTb Me)K30HHbIX OnTHQeCKHX nepexo.n.oB.
K
HaQaJIY 90-x rr. BbIIlYCK CBeTo.n.H-
3JIeKTpOHoB, KOTopble, peKOM6HHHPYH .n.pyr C .n.pyroM, HcrrycKalOT CPOTOHbI.
O.n.OB SiC rOJIy60ro CBeQeHHH 6bIJI rrpaKTHQeCKH npeKpameH, nOCKOJIbKY
B pa60Te
SiC 60JIbille He Mor .n.aJIbille KOHKypHpOBaTb C nOJIynpOBo.n.HHKaMH THna
HCTM3Ha H .n.p. (Eastman et ai., 1964) rrpHBe.n.eHbI 60JIee rro.n.po6-
Hble .n.aHHble 0 rrpoIIeccax H3JIyqeHHH CBeTa B .n.Ho.n.ax illOTTKH B YCJIOBHHX
AIIIBV.
06paTHoro CMemeHHH.
H HMeJIH K. n . .n..
a
JIYQIlIHe CBeTo.n.Ho.n.bI SiC H3JIYQaJIH CBeT C .n.JIHHOH BOJIHbI 470 HM rv
0,03% (Edmond et ai., 1993).
6
1.2. HCTOPHR C03.n;aHHR CBeTo.n;Ho.n;OB KpacHoro H HHcppaKpacHoro CBeqeHHR H3 GaAs H AIGaAs K
1950-M rr. llOJIynpOBo.n.HHKOBble MaTepHaJIbi THna
AIIBvI,
'a
TaK)Ke
SiC, 6bIJIH Y)Ke .n.OBOJlbHO XOPOiliO H3YQeHbI, nOCKOJIbKY 3TO MaTepHaJIbI, BCTpeQalOmHeCH B npHpo.n.e. n03TOMY He CJIYQaHHO, QTO nepBble CBeTO-
MeTaJIJI rronynpoBO.lUlHK PHC. 1.2 . .ll.HarpaMMa 3HepreTHqeCKHX 30H KOHTaKTa lIloTTKH: a - B YCJlOBHHX paBHOBeCHH, 6 - rrpH He6oJlbIIIOM rrpHMoM CMellJeHHH H B - rrpH CHJlbHOM CMellJeHHH. B rrOCJleAHeM cJlyqae rrpOHCXOAHT HH)KeKIIHH HeOCHOBHbIX HOCHTeJleii, 06YCJlOBJlHBaIOlIJaH rrpoIIecc H3J1yqeHHH CBeTa
1) Pa60Tbl O. B. JIoceBa HeAaBHO 6blJlH rrepeH3AaHbI (CM. [1]). O. B. JIoceB YKa3aJl B 1939 r., 'ITO CBeqeHHe B03HHKaeT B KpHCTaJlJle Ha rpaHHIIe Me)KAY p- H n-06J1aCTHMH.
2) JIe6Hep, 6YAyqH aTTaIIIe rro HaYKe ilOCOJlbCTBa ClIlA B MOCKBe, CrreIIHaJlbHO 3HaKOMHJlCH C pa60TaMH O. B. JIoceBa B 6H6J1HOTeKe MfY. 3) ilpHopHTeTHbie pa60Tbl
H. B.
PbI)KHKOBa HAp. rro CBeTOAHOAaM SiC CM. B
[2].
Fit. 1. HcmopuR C03aaHuR c8emOaUOa08
22
.lI.HO.ll.bI 6bIJIH H3fOTOBJIeHbI H3 SiC B
1907 f.,
a B
1.2. HcmopuR C03aaHUR c8emOaUOa08 "'paCHOcO U uHljJpa"'paCHOcO C8e'leHUR 23
1936 f.
rrOHBHJIaCb
.lI.JIH JIa3epOB H orrpe.ll.eJIHJI HX xapaKTepHcTHKH. TaKoe TeCHoe COTpY.ll.HHqe-
rry6JIHKaU:HH 0 C03.l1.aHHH IPpaHU:Y3CKHM yqeHbIM )1(. ,UecTpHo CBeTO.ll.HO.ll.OB
CTBO yqeHbIX 6bICTPO rrpHHeCJIO CBOH rrJIO.ll.bI, 'ITO BbIpa3HJIOCb B pa3pa60TKe
Ha OCHOBe KpHCTaJIJIOB ZnS (Destriau, 1936).
JIa3epa GaAs, pa60TaIOIII.efO BHerrpepbIBHOM pe)KHMe rrpH
3pa rrOJIyrrpoBO.ll.HHKOBbIX COe.ll.HHeHHH THrra AIllBv HaqaJIaCb B 50-x ff. rrOCJIe orry6JIHKOBaHHH pa60T BeJIbKepa (Welker, 1952, 1953) I). noCKOJIbKY rroJIyrrpoBO.ll.HHKOBbIe MaTepHaJibI .lI.aHHOfO THrra C03.l1.aHbI HCKyC-
77
K
(Rup-
precht et aI., 1963). nOCJIe rrpHMeHeHHH MeTO.ll.a )I(
r.
HeJIbCOHOM B JIa60paTopHH IPHpMbI RCA (npHHCTOH), Y.ll.aJIOCb H3fOTOBHTb JIa3ep H3 GaAs, pa60TaIOIII.HH rrpH 300 K, KOTOPbIH 06JIa.ll.aJI fOp a3.l1.0
CTBeHHO, HX .lI.O 3TOfO BpeMeHH rrpOCTO He CYIII.eCTBOBaJIO. COBpeMeHHbIe
MeHblIleH rropofoBOH rrJIOTHOCTbIO TOKa, qeM JIa3epbI, rrOJIyqeHHbIe MeTO.ll.OM
rrOJIyrrpOBO.ll.HHKH paCCMaTpHBaeMOH fpyrrrrbI 06JIa.ll.aIOT XOpOlIlHMH OITTHqe-
.lI.H IPIPY3HH U:HHKa. nOqeprrHYB HHIPOPMaU:HIO H3 rry6JIHKaU:HH 06 HCCJIe.ll.OBaHHHX .lI.PYfHX yqeHbIX, BY.ll.aJIJI 3aHHJICH BbIpaIII.HBaHHeM p-n-rrepexo.ll.OB
CKHMH xapaKTepHCTHKaMH, H .lI.JIH H3fOTOBJIeHHH CBeTO.ll.HO.ll.OB Ha HX OCHOBe rrpHMeHHIOTCH MHOfHe H3 COBpeMeHHbIX TeXHOJIOfHH.
B GaAs C rrpHMeHeHHeM aMIPoTepHbIx JIempYIOIII.HX rrpHMeceH KpeMHHH, B
B 1954 f., KOf.ll.a Y)Ke HayqHJIHCb rrOJIyqaTbH3 paCrrJIaBOB MOHOKpHCTaJI-
KOTOPbIX aTOMbI Si B Y3JIaX Ga HfpaJiH pOJIb .lI.OHOPOB, a B Y3JIaX As-
JIbI GaAs, HaqaJICH 6YM HCCJIe.ll.OBaHHH rrOJIyrrpOBO.ll.HHKOBbIX COe.ll.HHeHHH
pOJIb aKu:emOpOB. 3TO 6bIJIa rrepcrreKTHBHaH H.lI.eH, rrOCKOJIbKY .lI.O 3TOfO
THrra A IllBv. MOHoKpHCTaJIJIbI pa3pe3aJIH, a rrOJIyqaeMbIe rrJIaCTHHbI rro-
MeTO.ll. )I(
JIHpOBaJiH H HCrrOJIb30BaJiH B KaqeCTBe rrO.ll.JIO)KeK .lI.JIH IPopMHpoBaHHH Ha
2a30¢a3H.OU anu-
rrpOBO.ll.HMOCTbIO TOJIbKO O.ll.HOfO THrra. YCJIOBHH rrOJIyqeHHH TaKHXp-n-rrepeXO.ll.OB MeTO.ll.OM )l(cp3 6bIJiH HaH.lI.e-
HHX MeTO.ll.aMH
maKCUU
:JfCUaKO¢a3H.OU anumaKCUU
()I(
(f
HbI .lI.OBOJIbHO 6bICTPO: .lI.JIH 3TOfO paCrrJIaB Ga-As-Si OXJIa)K.lI.aJICH OT 900°C
rrOHBHJIOCb cpa3y HeCKOJIbKO rry6JIHKaU:HH 0 C03.l1.aHHH HHIPpaKpacHbIx CBe-
.lI.O 850°C. npH 3TOM 3rrHTaKCHaJIbHbIH CJIOH (HH)KHHH), BbIpaIII.eHHbIH rrpH
TO.ll.HO.ll.OB (870-980 HM) H JIa3epOB H3 GaAs (Pankove, Berkeyheiser, 1962;
900°C, OKa3bIBaJiCH CJIOeM n-THrra, f.ll.e KpeMHHH BbIrrOJIHHeT· pOJIb .lI.OHOpa,
Pankove, Massoulie, 1962; Hall et aI., 1962; Nathan et aI., 1962; QUist et
a BepxHHH CJIOH, BbIpaIII.eHHbIH rrpH 850°C, -
aI., 1962).
HBJIHeTCH aKu:errTopOM, 'ITO rrO.ll.TBep.ll.HJIOCb HCCJIe.ll.OBaHHeM rrOrrepeqHOfO
B
HaqaJIe
BXO-
pa3pe3a rrOJIyqeHHOfO rrepeXO.ll.a. HHKaKHX rrOTepb KaqeCTBa KpHCTaJIJIa
.lI.HJIH H3BeCTHbIe yqeHbIe H3 HCCJIe.ll.OBaTeJIbCKOfO u:eHTpa IBM «ToMac
rrpH TaKOM BbIpaIII.HBaHHH 06HapY)KeHO He 6bIJIO. BOJIee TOro, 6JIafO.ll.apH
,U)K. YOTCOH»
60-x
ff.
HayqHbIH
KOJIJIeKTHB,
B
COCTaB
KOTOPOfO
CJIOeM p-THrra, f.ll.e KpeMHHH
(pacrrOJIO)KeH B HopKTaYH XeHTc B 'lace e3.l1.bI Ha ceBep
BJIHHHHIO B 3arrpeIII.eHHOH 30He XBOCTOB· rrJIOTHOCTH COCTOHHHH, 06YCJIOB-
OT HbIO-HopKa) ,U)KeppH BY.ll.aJIJI, faHc PyrrrrpexT, MaHIPpe.ll. nHJIKYH,
JIeHHbIX CHJIbHbIM JIefHpOBaHHeM KOMrreHCHpOBaHHOH 06JIaCTH p-n-rrepexo-
MaplIlaJIJI HaTaH H .lI.p., rrpOBeJi 60JIblIlYIO HCCJIe.ll.OBaTeJIbCKYIO pa60TY rro
.lI.a, cBeTO.ll.HO.ll.bI H3 GaAs(Si) CTaJiH H3JIyqaTb B 60JIee .lI.JIHHHOBOJIHOBOH
C03.l1.aHHIO CBeTO.ll.HO.ll.OB H3 GaAs H AIGaAs H H3yqeHHIO HX xapaKTepH-
06JIaCTH (900-980 HM) C 3HepfHeH IPOTOHOB fQpa3.l1.0 HH)Ke KpaH rrOJIOCbI
CTHK.
rrOfJIOIII.eHHH GaAs (870 HM). n03TOMY 06'beMHaH rrO.ll.JIO)KKa GaAs H 3rrH-
B
cBoeH KHHfe, orry6JIHKOBaHHoH B 2000 f.
(Woodall J.M., 2000),
TaKCHaJIbHbIe CJIOH rrepeCTaJiH rrOfJIOIII.aTb 60JIblIlYIO qaCTb H3JIyqaeMofo
BY.ll.aJIJI OTMeqaJI, 'ITO B Te fO.ll.bI OH B OCHOBHOM 3aHHMaJiCH rrp06JIeMOH
CBeTa H CTaJiH BeCTH ce6H KaK rrp03paqHOe OKHO. CBeTO.ll.HO.ll.bI H3 GaAs(Si)
BbIpaIII.HBaHHH 06'beMHbIX KpM'cTaJIJIOB GaAs, HCrrOJIb3yeMbIx B .lI.aJIbHeH-
.lI.ep)KaJIH peKOp.ll. rro BeJIHqHHe BHellIHefO KBaHTOBOfO BbIX0.ll.a, KOTOPbIH
lIleM .lI.JIH C03.l1.aHHH rrOJIYH30JIHPYIOIII.HX rrO.ll.JIO)KeK .lI.JIH 3rrHTaKCHaJIbHbIX
COCTaBJIHJI '" 6% (Rupprecht et aI., 1963). B 2000 f. PyrrrrpexT rrHCaJI:
CTpyKTyp fepMaHHeBbIX YCTPOHCTB, H rrO.ll.JIO)KeK n-THrra .lI.JIH H3fOTOBJIeHHH
«C03.l1.aHHbIe HaMH BbIcoK03IPIPeKTHBHbIe CBeTO.ll.HO.ll.bI GaAs(Si) HBJIHIOT-
HH)KeKU:HOHHbIX JIa3epOB MeTO.ll.OM .lI.HIPIPY3HH U:HHKa. K TOMY BpeMeHH IPHP-
CH HpKHM .lI.OCTH)KeHHeM HayqHO-TeXHHqeCKOfO cO.ll.pY)KeCTBa». KBaHTOBbIH
MbI IBM, GEH JIa60paTopHH JIHHKOJIbH MTI1 Y)Ke rrpO.ll.eMOHCTpHpOBaJiH
BbIXO.ll. CBeTO.ll.HO.ll.OB H3 GaAs(Si) B rrHTb pa3 60JIblIle, qeM y CBeTO.ll.HO.ll.OB
pa60TY CBOHX HH)KeKU:HOHHbIX GaAS-JIa3epoB. PyrrrrpexT pa3pa6aTbIBaJi
GaAs, C03.l1.aHHbIX MeTO.ll.OM .lI.HIPIPY3HH U:HHKa. YpOBHH aKu:eITTOpOB Si fJIy6-
TeopHIO BBe.ll.eHHH rrpHMeceH MeTO.ll.OM .lI.HIPIPY3HH H CTaBHJI 3KcrrepHMeHTbI
)Ke YPoBHeH aKu:errTopoB Zn, rr03TOMY H3JIyqeHHe B KOMrreHcHpoBaHHbIx
C rrpHMeHeHHeM JIa3epOB H3 GaAs. OH TaK)Ke BXO.ll.HJI B fpyrrrry IPH3HKOB,
aKTHBHbIX CJIOHX, JIempOBaHHbIx KpeMHHeM, rrpoHCXO.ll.HT B 06JIaCTH 60JIee
B03fJIaBJIHeMYIO MaplIlaJIJIOM HaTaHoM,
.lI.JIHHHbIX BOJIH, B KOTOPOH GaAs rrp03paqeH I).
O.ll.HHM
H3
C03.l1.aTeJIeH rrepBofo
HH)KeKU:HOHHOfO JIa3epa (Nathan et aI., 1962). I1MeHHo B Te fO.ll.bI BY.ll.aJIJI pa3pa60TaJi MeTO.ll.HKY, KOTopaH BrrOCJIe.ll.-
Pa60TbI BbIlIleyrroMHHYTOfO KOJIJIeKTHBa yqeHbIX 6bIJIH HarrpaBJIeHbI Ha C03.l1.aHHe CBeTO.ll.HO.ll.OB BH.lI.HMOfO .lI.Harra30Ha OrrTHqeCKOfO crreKTpa. ,UJIH
CTBHH CTaJia rrpHMeHHTbcH .lI.JIH fOpH30HTaJIbHOfO BbIpaIII.HBaHHH MOHOKPH-
3TOfO 6bIJIH BbI6paHbI .lI.Ba KaH.lI.H.lI.aTa: GaAsP H AIGaAs. B
CTaJIJIOB GaAs MeTO.ll.OM BpH.lI.)KMeHa, a PyrrrrpexT C03.l1.aJI pH.lI. MaTepHaJIOB
KaK PyrrrrpexT rrbITaJiCH MeTO.ll.OM )I(
I) 0630P HHKax THrra
rr~HO(lHTeTHbIX pa60T H. A. [OpIOHOBOH H A. P. PereJilI 0 rroJIyrrpOBO.ll.-
A IIBv
CM. B
[3]
I) 0630P B
GaAs
CM. B
pa60T
[4].
HatIaJIbHOrO
rrepHO.ll.a
rro
H3JIYtIaTeJIbHOH
TO BpeMH
peKoM6HHaU:HH
1.2. HcmopuJl C03aanUJl cBemOaUOaOB ICpacnoeo U uncppaICpacnoeo CBe'lenUJl 25
FA. 1. HcmopuJl C03aanUJl cBemOaUOaOB
24
6
a GaAsP, BY)l.aJIJI npHMeHHJI 9nHTaKCHaJIbHYIO YCTaHOBKY )l.JIH BbIpaIII.HBaHHH AlGaAs. 06a HCCJle)l.OBaTeJIH CTOJIKHYJIHCb C cepbe3HbIMH np06JIeMaMH. 113-3a HeCOOTBeTCTBHH napaMeTpoB KpHCTaJIJIHqeCKHX pellIeToK GaP H GaAs, COCTaBJIHIOIII.erO rv 3,6
%,
)I(
6b1JIO TPY)l.HO C
C AlGaAs
B03HHKJIH )l.PyrHe np06JIeMbJ.
Te rO)l.b1 CYIII.eCTBOBaJIO y6e2K)l.eHHe, qTO AlGaAs -
nJIOXOH MaTepHaJI,
nOTOMY qTO OH JIerKO OKHCJIHeTCH: no BbIpa2KeHHIO BY)l.aJIJIa «aJIIOMHHHH JII06HT KHCJIOpO)l.~. ATOMbI KHCJIOpO)l.a )l.eHCTBOBaJIH KaK u.eHTpbI TYllIeHHH JIIOMHHecu.eHu.HH. Oc06eHHo 9TO npOHBJIHJIOCb B CTpYKTypax, BbIpaIII.eHHbIX MeTO)l.OM f
1.3.
PHC.
MHKpocHHMoK IIoIIepeLIHoro ceLIeHHlI CBeTOAHOAa H3 AIGaAs, BblpameH -
(a).
nO)l.)l.ep2KKH PYKOBO)l.CTBa IBM. OHH npOBO)l.HJIH OnblTbI no BbIpaIII.HBaHHIO
Horo Ha IIpo3paLIHoH IIOAJIO:lKKe GaP
9nHTaKCHaJIbHbIX CJIOeB AlGaAs no TeXHOJIOrHH )I(
B aKTHBHoH 06JIaCTH (o6JIaCTH HH:lKeKII:HH), paCIIOJIO:lKeHHOH IIOA KOHTaKTHoH IIJIO-
no BbIXO)l.HbIM. BY)l.aJIJI cnpoeKTHpOBaJI H H3rOTOBHJI annapaT )l.JIH npoBe-
maAKoH, Ha6JIIOAaeMall LIepe3 IIpo3paLIHYIO IIOAJIO:lKKY GaP
3JIeKTpOJIIOMHHeCII:eHII:HlI, B03HHKalOmall
(6)
(Woodall et al.,
1972)
)l.eHHH )I(
<pa-
30BbIX nepexo)l.ax, n09ToMY OH pellIHJI 9KcnepHMeHTHpOBaTb C nO)l.60pOM
HO 6eCnOJIe3HYIO, )l.pYrHe -
KaK 3a-
MeqaTeJIbHYIO H OqeHb IlepcIleKTHB-
nepBbIx onbITax OH )l.06aBJIHJI
HYIO. KaK IlOKa3aJIO BpeMH, IlOCJIe)l.-
B paCnJIaB KpeMHHH, )l.OBO)l.HJI ero )1.0 HaCblIII.eHHH H norpY2KaJI Ty)l.a no)l.-
HHe 6bIJIH IlpaBbJ. IlepBbIe CBeTO)l.H-
JI02KKY GaAs Ha BpeMH OXJIa2K)l.eHHH paCIlJIaBa C 925°C )1.0 850°C. IlocJIe
O)l.bI GaAsP HCIlOJIb30BaJIHCb B Ka-
9Toro IlO)l.JI02KKa C 9IlHTaKCHaJIbHblM CJIOeM H3BJIeKaJIaCb H TeMIlepaTypa
qeCTBe HH)l.HKaTOpOB Ha MOHTa2KHbIX
KOHu.eHTpau.HH aJIIOMHHHH B paCnJIaBax. B
JIerHpOBaH-
nJIaTaX, oT06pa2KaIOIII.HX HX COCTOH-
HbIH KpeMHHeM, IlOJIyqHTb He Y)l.aJIOCb, HO Ha IlO)l.JI02KKe 6bIJI 06HapY2KeH
HHe H BblIIOJIHHeMbIe
B03BpaIII.aJIaCb K 300 K. IlpH TaKOM IlO)l.XO)l.e CJIOH AlGaAs BblCOKoro J}aqeCTBa TOJIIII.HHOH 30HOH
p-n-IlepeXO)l.,
100 MKM C 3anpeIII.eHHOH
B KpacHoH 06JIaCTH BH)l.HMoro )l.Hana30Ha OIlTHqeCKOrO cIleKTpa
(Rupprecht et aI., 1967, 1968) I).
.
Tor)l.a 2Ke HayqHJIHCb BbIpaIII.HBaTb 9IlHTaKCHaJIbHbIe CJIOH AlGaAs Ha
TaK2Ke IlpHMeHHJIHCb HOM
6JIOKe
B Ilpou.eccop-
KJIaCCHqeCKOH
yHHBep-
CaJIbHOH 3BM
Ilp03paqHbIX IlO)l.JI02KKaX GaP, qTO Il03BOJIHJIO C03)1.aTb CBeTO)l.HO)l.bI BH)l.HMoro )l.HaIla30Ha OIlTHqeCKOrO cneKTpa. MHKpocHHMKH TaKHX CBeTO)l.HO)l.OB
TO)l.HO)l.OB
IlOKa3aHbI Ha pHC. 1.3.B )l.aJIbHeHllIeM IlpH nOMOIII.H MeTO)l.a )1(<1>3 y)l.a-
H3
GaAs
Texas
6b1JI
HaJIa2KeH
Instruments
Corp.
PHC.
1.4.
3BM
JIOCb C
B HaqaJIe 1960-x rr.(Rostky, 1997).
Hall
(I964
c 60JIbllIHM cO)l.ep2KaHHeM aJIIOMHHHH. B pe3YJIbTaTe 6bIJIH C03)1.aHbI CBeTO-
3TO 6bIJIH CBeTO)l.HO)l.bI HH
)l.HO)l.bI, B KOTOPbIX CJIOH C BbICOKOH KOHu.eHTpau.HeH aJIIOMHHHH HrpaJIH pOJIb
Horo )l.HaIla30Ha OIlTHqeCKorO CIleK-
Ilp03paqHbIX OKOH, IlponycKaIOIII.HX CBeT H3 aKTHBHOH 06JIaCTH AlGa As C
Tpa
HH3KHM CO)l.ep2KaHHeM aJIIOMHHHH (Woodall et aI., 1972).
870 HM. TexHoJIorHqecKHe IlapaMeT-
C
)l.JIHHOH
BOJIHbI
H3JIyqeHHH
KJIaCCHLIecKall YHHBepCaJIb!PHPMbI
1MB
cepHH
360
r.), HCIIOJIb3YIOmall B KaLIeCTBe
HHAHKaTopoB COCTOllHHlI apH!pMeTHLIeCKOro YCTpoHcTBa ra30pa3pllAHble JIaMIIb! BblCOKoro HaIIpll:lKeHHlI. II03AHHX MOAeJilIX
B
3TH AaMIIbI
60JIee 6bIJIH
pbI IlepBbIX CBeTO)l.HO)l.OB 6b1JIH )1.0-
3aMeHeHbI Ha
BMeCTe C PYIlnpexToM Ha)l. C03)1.aHHeM CBeTO)l.HO)l.OB H JIa3epOB GaAsP
BOJIbHO
AHTeJIbHOCTb KOMIIblOTepa IBM cepHH
(Pilkuhn, Rupprecht, 1965), c06paJI He60JIbllIYIO 9JIeKTpHqeCKYIO cxeMY,
BbICOKHMH: 130 )l.OJIJI ClllA 3a O)l.HH
360
IlHTaIOIII.YIOcH OT 6aTapeHKH, C HCIlOJIb30BaHHeM CBeTO)l.HO)l.OB, H3JIyqaIOIII.HX
)l.HO)l..
BOAHTeJIbHOCTH IIepBbIX MOAeJIeH HOYT-
IlHJIKYH, KOTOPbIH TaK2Ke BXO)l.HJI B rpyIlIlY yqeHbIX IBM H pa60TaJI
KpacHbIH CBeT, H IlpO)l.eMOHCTpHpOBaJI ee CBOHM KOJIJIeraM H PYKOBO)l.CTBY IBM (PHkuhn, 2000). HeKoTopbIe ou.eHHBaJIH ero pa60TY KaK KpacHByIO,
HH3KHMH,
a
u.eHbI -
IlepBbIe CBeTO)l.HO)l.bI
TIpHopHTeTHble pa60Tb! )1(.
H.
AJI(jlepoBa HAp. CM. B
[5, 6].
TIPOH3BO-
He CHJIbHO OTJIHLIaJIaCb OT IIPOH36YKOB
C pe30Ha-
TopaMH 6bIJIH C)l.eJIaHbI Ha CHCTeMe MaTepHaJIOB AlGaAs/GaAs
1)
OqeHb
CBeTOAHOAb!.
(Schubert et aI.,
1992,
1994). OHH CTaJIH
Ilpe)l.CTaBHTeJIHMH HOBoro KJIaCCa CBeTO)l.HO)l.OB, IlpHHU.Hn )l.eHCTBHH KO-
D/,. 1.
26
HcmopuJl C03aaHUJl c8emOaUOa08
1.3. HcmopUJl C03aaHUJl c8emOaUOa08 U3 GaAsP
TOPbIX OCHOBaH Ha YCHJleHHH cnOHTaHHoro H3J1YLIeHHH B MHKpOCKonHLIe-
27
CJlOHX GaAsP (Holonyak et aI., 1963b, 1966; Pilkuhn, Rupprecht, 1964,
CKHX pe30HaTopax. MaKCHMYM H3J1YLIeHHH HaXOJl.HTCH Ha Jl.JlHHe BOJlHbI,
1965). TaK:>Ke 6bIJlO YCTaHOBJleHO, LITO npH Jl.OCTH:>KeHHH 44 % KOHueHTpa-
COOTBeTCTBYIOIII.eH OCHOBHOH MOJl.e KOJle6aHHH B pe30HaTope. YCHJleHHe
UHH <poc<popa K. n.
H3J1YLIeHHH CBH3aHO C H3MeHeHHHMH nJlOTHOCTH 3HeprHH CBeTOBOH BOJlHbI
Jl.a:>Ke HH:>Ke (Maruska, Pankove, 1967).
npH ee MHorOKpaTHOM npOXO:>KJl.eHHH BHYTPH pe30HaTopa.
JI.. GaAsP YCTpoikTB npH 300 OK naJl.aeT Jl.0 0,005 % H
CBeTOJl.HOJl.bI
BbInycK nepBbIx CBeTOJl.HOJl.OB H3 GaAsP 6bIJi HaLIaT KopnopaUHeH GE
C pe30HaTopaMH 06J1aJl.a1OT MaKCHMaJlbHOH HHTeHCHBHOCTblO H3J1YLIeHHH
B HaLIaJle 1960-x rr. OHH H3J1YLIaJlH CBeT B KpacHoH 06J1aCTH BHJl.HMO-
BJl.OJlb OCH pe30HaTopa, LITO n03BOJIHeT nOBbIIIIaTb 3
ro onTHLIeCKoro cneKTpa. floCKOJlbKY l1.eHa Jl.HOJl.OB 6bIJIa OLIeHb BbICOKOH
C onTHLIeCKHMH CBeTOBOJl.aMH. B
(260 Jl.OJlJl. CIllA 3a OJl.HY IIITYKY), HX BbInYCTHJlH COBceM MaJlO H B
HaCTOHIII.ee BpeMH CBeTOJl.HOJl.bI H3 AIGaAs/GaAs HH
Jl.Hana30Ha IIIHPOKO HCnOJlb3YIOT B CHCTeMax Jl.HCTaHl1.HOHHOro ynpaBJleHHH
OCHOBHOM HCnOJlb30BaJlH, B JlI06HTeJlbCKOH paJl.H03J1eKTpOHHKe
(Rostky,
1997).
aYJl.HO- H BHJl.eOTeXHHKoH, a TaK:>Ke B JlOKaJlbHbIX ceTHX CBH3H, a CBeTO-
CepHHHbIH BbInycK TaKHX CBeTOJl.HOJl.OB 6bIJI HaJla:>KeH
Jl.HOJl.bI H3 AIGaAs/ AIGaAs KpacHoro CBeLIeHHH OTHOCHTCH K BHJl.HMOMY
caHTO. B
Jl.Hana30HY H npH 3TOM 06J1aJl.a1OT nOBbIIIIeHHOH HPKOCTblO. K
H3rOTaBJlHBaTb cpaBHHTeJlbHO HeJl.OpOrHe CBeTOJl.HOJl.bI H3 GaAsP. 3TOT
TOMY :>Ke
1968 r. 3Ta KaMnaHHH nOCTpOHJla 3aBOJl., Ha KOTOPOM CTaJiH
HX KBaHTOBbIH BbIX0Jl. H3J1YLIeHHH TaKOH :>Ke, KaK Y CBeTOJl.HOJl.OB H3 Ga-
roJl. MO:>KHO Ha3BaTb HaLIaJlOM, 3pbI TBepJl.OTeJlbHbIX H3J1YLIaTeJleH. flpoJl.a:>KH
AsP /GaAs KpaCHoro CBeLIeHHH, HO HH:>Ke, LIeM Y AlInGaP /GaAs.
TaKHX CBeTOJl.HOJl.OB B 1968-1970 rr. cTpeMHTeJlbHO POCJlH, YJl.BaHBaHcb Ka:>KJl.bIe HeCKOJlbKO MeCHl1.eB (Rostky, 1997). CBeTOJl.HOJl.HbIe KpHCTaJlJlbI,
1.3.
BbmycKaBiliHecH MOHcaHTo, npeJl.CTaBJlHJlH C060H
HCTOPHB C03AaHHB CBeTOAHOAOB H3 GaAsP
p-n-CTpYKTypbI
H3 Ga-
AsP, BbIpaIII.eHHbIe Ha nOJl.JlO:>KKaX GaAs, H3J1YLIalOIII.He
HaLIaJlO HCTOPHH CBeTOJl.HOJl.OB BHJl.HMOrO Jl.Hana30Ha onTHLIeCKoro cneK-
zog et aI., 1969; Craford et aI., 1972).
Tpa Jl.aTHpyeTcH 1962 r., KOrJl.a XOJlOHbHK H oeBaKa B )KypHaJle Applied
Physics Letters ony6J1HKOBaJiH C006III.eHHe 0 KorepeHTHOM H3J1YLIeHHH BH-
XblOJleTT flaKKapJl. (HP), npeJl.JlO:>KHB BbmYCKaTb CBeTOJl.HOJl.bI H CBeTOJl.H-
Jl.HMOrO CBeTa, Ha6J1IOJl.aeMOM Ha
p-n-nepeXOJl.e
GaAsP. XOTH 3TO CBeLIeHHe
6bIJlO 06HapY)KeHO npH HH3KOH TeMnepaType, OKa3aJlOCb, LITO CBeTOJl.HOJl.bI GaAsP pa60TalOT H npH KOMHaTHoH TeMnepaType.
OJl.HbIe 3KpaHbI Ha OCHOBe HX MaTepHaJia GaAsP.
B
CepeJl.HHe 1960-x rr.
OHa Jl.a:>Ke HanpaBHJla OJl.HOrO H3 CBOHX Cnel1.HaJlHCTOB H3 CeHT-JIYHca (iliT. MHCCYPH) B flaJlo AJiTO (iliT. KaJlH
HHK XOJlOHbHK, KOTOPbIH B 1962 r. pa60TaJi B OTJl.eJleHHH General Elec-
Jla:>KHBaHHH npOH3BOJl.CTBa. OJl.HaKO
HP
HP
B Ha-
n060HJlaCb nonaCTb B 3aBHCHMOCTb
tric (GE) B CHpaKY3e (iliT. HblO-I10pK), a nOTOM nepeexaJl B YHHBepcHTeT
OT MOHcaHTo H npeKpaTHJla COTpYJl.HHLIeCTBo, HaLIaB BbIpaIII.HBaHHe co6-
IIITaTa HJlJlliHOHC, npHMeHHJI MeTOJl. f
CTBeHHbIX KpHCTaJlJlOB GaAsP (Rostky, 1997).
B
Ha nOJl.JlO)KKaX GaAs. 3TOT MeTOJl. nOJl.XOJl.HT Jl.JlH
nepHOJl. C KOHl1.a 1960-x Jl.0 CepeJl.HHbI 1970-x rr. Ha6J1IOJl.aJlOCb cTpe-
IIIHX 3nHTaKCHaJlbHbIX CJlOeB KaK Ha HCCJleJl.OBaTeJlbCKOM, TaK H Ha npo-
MHTeJlbHOe pa3BHTHe pa3J1HLIHbIX UH
MbIIIIJleHHOM 06opYJl.OBaHHH. B cBoeH KHHre XOJlOHbHK (Holonyak, 2000)
HCnOJlb30BaJlHTOJlbKO B KaJlbKYJlHTOpax. fl03J1.Hee, nocJle Jl.eMOHCTpal1.HH
BcnOMHHaJl, LITO Y)Ke npH H3rOTOBJleHHH nepBbIX CBeTOJl.HOJl.OB OH XOPOiliO
KOpnOpal1.HeH Hamilton Watch B 1972 r. nepBbIx l1.H
npeJl.CTaBJlHJI c
cap», oim CTaJiH npHMeHHTbCH H B HapYLIHbIX LIacax. B
UH
KOHKypHpYIOIII.He
OJl.HaKO HeCMOTpH Ha HBHbre ycnexH, rpynne HCCJI~Jl.OBaTeJleH noJl. pyKOBOJl.CTBOM XOJlOHbHKa HHKaK He YJl.aBaJlOCb H3rOTOBHTb nOJlynpOBOJl.HH-
HP
TO :>Ke BpeMH
H MOHcaHTO Bce CBOH YCHJlHH COCpeJl.OTOLIHJlH
Ha pa3pa60TKe 60Jlee CJlO:>KHbIX MHorOUH
KOBbIH Jla3ep, pa60TalOIII.HH npH KOMHaTHOH TeMnepaType (Holonyak, 1963,
PYKoBOJl.HTeJleM
H
OCHOBHbIM
H306peTaTeJleM
B
MOHcaHTo
6bIJI
1964). 3TO 6bIJlO CBH3aHO C TeM, LITO npH BbIpaIII.HBaHHH Ha nOJl.JlO)KKaX
M.
GaAs 3nHTaKCHaJlbHbIX CJlOeB GaAsP HeKOTopbIe CBOHCTBa TaKHX CHCTeM
CBeTOJl.HOJl.OB :>KeJIToro CBeLIeHHH (Craford et aI., 1972). ,QJlH nOJlYLIeHHH
3HaLIHTeJlbHO YXYJl.IIIaJlHCb. TaK, OHH CMOrJlH nOJlYLIHTb nOJlynpOBOJl.HH-
TaKHX CBeTOJl.HOJl.OB O'H BbIpaIII.HBaJi Ha nOJl.JlO:>KKaX GaAs 3nHTaKCHaJlbHbIe
KOBbIe
p-n-nepeXOJl.bI
C OTJlHLIHbIMH 3J1eKTpHLIeCKHMH xapaKTepHCTHKaMH
(Holonyak et aI., 1963 a), HO OllTHLIeCKHe napaMeTpbI CTpyKTyp npH 3TOM CHJlbHO nOCTpaJl.aJlH. ObIJlO 06HapY)KeHO, LITO npH KOHueHTpal1.Hlr
,Q:>KOPJl.:>K Kpa<popJl.,
CJlOH
GaAsP,
MOHcaHTo
KOTOPbIH
JlempOBaHHbIe
npoJl.aJla CBOH
nepBbIH
a30TOM.
6H3Hec
npOJl.eMOHCTpHpOBaJi
flocJle
TOro
Kpa<popJl. nepeIIIeJl
KaK
B
pa60TY
1979
B HP, rJl.e
BeJl.YIII.HM CneUHaJlHCTOM B 06J1acTH OllT03J1eKTpoHHKH. B
r.
CTaJi
1995 r. fleppH
pa B cJloe GaAsP, Jl.OCTHralOIII.eH 45-50 %, BepOHTHOCTb H3J1YLIaTeJlbHoH
ony6J1HKOBaJi 6Horpa
peKOM6HHal1.HH 3HaLIHTeJlbHO CHH)KaJlaCb, LITO 06bHCHHeTCH H3MeHeHHeM
LIaCTb CBOHX pa60T (BKJlIOLIaH HanpaBJleHHe no pa3pa60TKe CBeTOJl.HOJl.OB)
COOTHOIIIeHHH npHMbIX H HenpHMbIX Me)K30HHbIX onTHLIeCKHX nepeXOJl.OB B
KopnopaUHH Agilent, KOTopaH B TOM :>Ke roJl.Y 06beJl.HHHJlaCb C KOpnOpal1.HeH
HP
nepeJl.aJla
28
Phillips H rrpeo6pa30BaJIaCb B Lumileds Lighting.
B
29
1.4. HcmopuR cOaaaftUR cBemo8uo8oB ua GaAsP U GaP
Fit. 1. HcmopuR cOa8aftUR cBemOaUOaOB 2005
r.
Agilent
CTpaHCTBe HMrrYJIbCOB He COBrra.ll.aIOT. BBe.ll.eHHe B GaP onmUtteCKU aKmUB-
Hoii U303AeKmpoHHoii npUMecu, HarrpHMep a30Ta, rr03BOJIHeT 3HaqHTeJIbHO
rrpO.ll.aJIa CBOIO .lI.OJIIO aKll,HM Lumileds KOprrOpall,HH Phillips. BCKope 6bIJIO o6HapY2KeHO, qTO Me2K.lI.Y rrO.ll.JI02KKaMH GaAs H 3rrHTaK-
rrOBbICHTb BepOHTHOCTb H3JIyqaTeJIbHOM peKOM6HHall,HH B rroJIyrrpOBO.ll.HHKe
CHaJIbHbIMH CJIOHMH GaAsP cymecTByeT CHJIbHOe paccOrJIaCOBaHHe rrapa-
(Thomas et aI., 1965) 3a CqeT C03.l1.aHHH 3TOM rrpHMeCblO B 3arrpemeHHoM
MeTpoB peIIIeTKH, rrpHBO.ll.Hmee K BbICOKOM rrJIOTHOCTH .lI.HCJIOKall,HM (Wolfe
30He rrpOMe2KYTOqHOrO 3HepreTHqeCKOrO ypOBHH, C KOToporo 3JIeKTpoHy
et aI., 1965; Nuese et aI., 1966). B pe3YJIbTaTe 3Toro BHeIIIHHM KBaHTOBbIM
ropa3.l1.0 JIerqe peKoM6HHHpoBaTb C .lI.b1PKOM.
113
GaP, JIerHpOBaHHoro Ta-
%
KHMH rrpHMeCHMH, 6bIJIH C03.l1.aHbI CBeTO.ll.HO.ll.bI, pa60Ta KOTOPbIX OCHOBaHa
(Isihamatsu, Okuno, 1989). HIOH3 (Nuese et aI., 1969) rrOKa3aJI, KaK CHJIb-
Ha coomHOUleHUU Heonpe8eAeHHocmeii reii3eH6epea. B .lI.aHHOM CJIyqae
BbIXO.ll. TaKHX CBeTO.ll.HO.ll.OB OKa3bIBaeTCH .lI.OBOJIbHO HH3KHM, He 60JIee 0,2
HO BJIHHIOT Ha rrapaMeTpbI CBeTO.ll.HO.ll.OB YCJIOBHH BblpamHBaHHH H TOJImHHa
rrpHHll,Hrr reM3eH6epra Bblpa2KaeTCH B TOM, qTO rrpHMeCb CO CTporo JIOKaJIH-
6y¢epHoeo CAO}/,. OH rrpo.ll.eMoHcTpHpOBaJI, KaK 6y~epHbIM CJIOM GaAsP
30BaHHOM BOJIHOBOM ~yHKll,HeM B rrpOCTpaHCTBeHHOM CHCTeMe KOOp.ll.HHaT,
C rrepeMeHHoM KOHll,eHTpall,HeM rrpHMeceM rr03BOJIHeT 3HaqHTeJIbHO YJIyq-
T. e. 06JIa.ll.alOmaH MaJIOM HeOrrpe.ll.eJIeHHOCTblO KOOp.ll.HHaTbI
IIIHTb HPKOCTb CBeTO.ll.HO.ll.OB KpaCHoro CBeqeHHH. CeMqaC Y2Ke .lI.OKa3aHO, qTO
rrOJIaraTbCH Ha 3HepreTHqeCKOM ypoBHe B rrpocTpaHcTBe KBa3HHMrrYJIbCOB
bop
= hbok.
box,
6Y.ll.eT pac~
3TOT 3~~eKT CBH3aH C TeM, qTO rpa.ll.HeHTHbIM CJIOM CHH2KaeT rrJIOTHOCTb
C 60JIbiliOM HeOrrpe.ll.eJIeHHOCTblO
.lI.HCJIOKall,HM B 3rrHTaKCHaJIbHOM CJIoe GaAsP B 06JIaCTH, pacrrOJI02KeHHOM
rrpHMecHblx ll,eHTpOB rrOBbliliaeT BepoHTHoCTb OIITHqeCKHX rrepeXO.ll.OB 1) .
PH.lI.OM C rpaHHll,eM Me2K.lI.Y 3THM CJIOeM H rrO.ll.JIO)KKOM GaAs. npHMble H HerrpHMbIe Me2K30HHble rrepeXO.ll.bI, KaK H BblCOKaH rrJIOTHOCTb .lI.HCJIOKall,HM, OrpaHHqHBalOT HPKOCTb CBeTO.ll.HO.ll.OB H3 GaAsP. B
HaJIHqHe TaKHX «rJIy6oKHX»
6
a
IlaCTO-
Hmee BpeMH CTpyKTYPbI GaAsP /GaAs HCrrOJIb3YlOTCH B OCHOBHOM .lI.JIH H3rOTOBJIeHHH CBeTO.ll.HO.ll.OB KpaCHoro CBeqeHHH, 06JIa.ll.alOmHX HeBbICOKOM HPKOCTblO H rrpHMeHHeMbIX B KaqeCTBe HH.lI.HKaTOpHbIX JIaMrr.
1.4.
HCTOPHB C03)l;aHHB CBeTO)l;HO)l;OB H3 GaAsP H GaP, IIonoiKeHHe
JIerHpOBaHHhlx OnTHQeCKH aKTHBHhIMH npHMecBMH nepBble CBeTO.ll.HO.ll.bI H3 GaP KpaCHoro H 3eJIeHOrO CBeqeHHH 6bIJIH C03.l1.aHbI rpyrrrroM yqeHbIX rro.ll. PYKOBO.ll.CTBOM PaJIb~a JIoraHa B Bell Laboratories B MlOppeM XHJIJI (HblO-)l2KepcH) B HaqaJIe 1960-x
r.
B Te rO.ll.bI
PHC.
1.5.
CHCTeMa KOOP.lI.HHaT B peaJIbHOM npocTpaHcTBe
KBa3HHMnYJIbCOB
B KaqeCTBe KJIlOqeM H YCHJIHTeJIeH. I1MeHHo TOr.ll.a HH2KeHepbI H HCCJIe.ll.OBaTeJIH OC03HaJIH, qTO rroJIyrrpOBO.ll.HHKH HBJIHIOTCH JIyqIIIHMH MaTepHaJIaMH .lI.JIH H3roTOBJIeHHH H3JIyqalOmHX YCTPOHCTB. JIoraH B 2000 r. rrHCaJI, qTO OH 3aHHTepeCOBaJICH rrp06JIeMOH C03.l1.aHHH CBeTO.ll.HO.ll.OB 3Toro THrra· rrOCJIe rrOHBJIeHHH rrepBblx rry6JIHKall,HH 0 rrOJIyqeHHH p-n-rrepeXO.ll.OB B GaP (Allen et aI., 1963, Grimmeiss, Scholz, 1964), H3JIyqalOmHX CBeT KpaCHoro ll,BeTa, KOTOPbIH M02KHO Ha6JIIO.lI.aTb HeBoopY2KeHHbIM rJIa30M .lI.a2Ke B YCJIOBHHX .lI.HeBHOro OCBemeHHH. nepexo.lI.bI rpHMMeHcca-llloJIbll,a 6bIJIH rrOJIyqeHbI rrYTeM JIerHpOBaHHH rrO.ll.JI02KKH p-THrra GaP rrpHMecblO n-THrra -
(a)
H B npocTpaHcTBe
CBeTO.ll.HO.ll.bI Ha OCHOBe GaP, JIempOBaHHoro OnTH'IeCKH aK-
N
HJIH 0, H3JIyqalOT CBeT B KpacHoH HJIH 3eJIeHOH
06JIaCTHX BH.lI.HMorO OIITH'IeCKOro .lI.Hana30Ha
)lJIH ~OpMHpoBaHHH CBeTO.ll.HO.ll.OB GaP HCrrOJIb30BaJIHCb rrJIaCTHHbI C rrorrepeqHbIMH pa3MepaMH 0,5 CM x 1 CM H TOJImHHOH 1 MM, BblpameHHble H3 pacTBopa, cO.ll.ep2Kamero raJIHM H ~oc~op. TaKoM crroco6 rrOJIyqeHHH CTPYKTyp GaP rr03BOJIHJI H36e2KaTb rrp06JIeMbI, cBH3aHHoH C Heo6xo.ll.HMOCTblO C03.l1.aHHH H36bITOqHOrO .lI.aBJIeHHH rrapoB ~oc~opa BO BpeMH BbIpamHBaHHH GaP rrpH BbICOKOH TeMrrepaType. HHKOMY H3 JIa60paTopHH oeJIJI He Y.ll.aJIOCb cpa3y 2Ke BocrrpOH3BeCTHpe3YJIbTaTbI rpHMMaHcca H llloJIbll,a. O.ll.HaKO 3TO CO.ll.eHCTBOBaJIO pacIIIHpeHHIO
HCCJIe.ll.0BaTeJIbCKHX pa60T B 06JIaCTH
3JIeKTpOJIIOMHHeCll,eHll,HH B JIa60paTopHHx Bell AT&T . npH BblpamHBaHHH rrJIaCTHH GaP H3 pacTBopa B KaqeCTBe JIerHpylO-
OJIOBOM.
GaP OTHOCHTCH K HerrpHMo30HHbIM rroJIyrrpOBO.ll.HHKaM, B KOTOPbIX BepoHTHOCTb Me2K30HHbIX rrepeXO.ll.OB, rrpOHCXO.ll.HmHX C coxpaHeHHeM HMrrYJIbCa, rrpeHe6pe2KHMO MaJIa, rr03TOMY H3JIyqaTeJIbHaH peKOM6HHall,HH B HHX rrpoXO.ll.HT, KaK rrpaBHJIO, qepe3 rrpHMecHble ll,eHTpbI. Ha pHC.
(6).
THBHbIMH npHMeCHMH, HanpHMep
rroJIyrrpOBO.ll.HHKOBble MaTepHaJIbI Y2Ke rrpHMeHHJIHCb .lI.JIH C03.l1.aHHH 6HrroJIHPHbIX H rrOJIeBbIX TpaH3HcToPOB, HCrrOJIb3yeMblx B 3JIeKTpOHHbIX cxeMax
x ____
1.5 rrOKa3aHa
°
mHX rrpHMeceH HCrrOJIb30BaJIH ll,HHK H KHCJIOPO.ll., KOTOPbIH rroJIyqaJICH H3 Ga203.
TOM, qTO 06blqHbIH aTMoc~epHbIH B03.l1.YX CO.ll.ep2KHT .lI.OCTaTOqHOe
KOJIHqeCTBO cepbI, HBJIHlOmeHCH rrpHMeCblO n-THrra, .lI.Ora.ll.aJIHCb He cpa3y. npH TaKOM BbIpamHBaHHH rrJIaCTHH OKa3aJIOCb, qTO B KOMrreHCHpOBaHHbIX
30HHaH .lI.HarpaMMa GaP, H3 KOTOPOH BH.lI.HO, qTO OCHOBHble TOqKH CHMMeTpHH .lI.JIH 3KcTpeMYMoB 30HbI rrpOBO.ll.HMOCTH H BaJIeHTHOH 30HbI B rrpo-
1) 0630P pa60T no H3JIYQaTeJIbHOH peKOM6HHall,HH B GaP -
CM.
[7].
-j Fit. 1.
30
HcmopuJl C03aanUJl c8emOaUOa08
1.4. HcmopuJl C03aanUJl c8emOaUOa08 U3 GaAsP U GaP
1
31
paCTBopax CJIOH n-THna
p-n-nepeXO.Zl.bI
pacnOJIaralOTCH no.Zl. nOBepxHocTblO nO.Zl.JIO)J{KH GaP. 3TO
H 6bIJIO o6bHcHeHHeM pe3YJIbTaTOB rpHMMeHcca. JIoraH cpa3Y JKe ony6JIHKOBaJI .ZI.aHHble CBOHX HCCJIe.Zl.OBaHHH (Logan et al., JIoraH (Logan et al.,
1967 b)
1967 a).
OnHCaJI TeXHOJIOrHlO H3rOTOBJIeHHH 3
paCTBopOB.
B
3TOH JKe pa60Te JIoraH OTMeTHJI,
OTJKHr CTpyKTyp nOCJIe BblpaIII.HBaHHH B .ZI.Hana30He CYIII.eCTBeHHO CqHTaeTCH,
nOBblCHTb K. n • .ZI..
qTO npH
400-725
qTO
°C n03BOJIHeT
CBeTO.Zl.HO.Zl.OB, C.ZI.eJIaB ero 60JIblIle
2 %.
OTJKHre npOHCXO.Zl.HT .ZI.H
aTOMOB KHCJIOpO.Zl.a, B pe3YJIbTaTe qero nOBhllIlaeTCH nJIOTHOCTb H303JIeK-
GaP
TPOHHbIX KOMnJIeKCOB Zn-O, cnoc06cTBYIOIII.HX YBeJIHqeHHIO 3JIeKTpOJIIOMHHecueHUHH. B KOHue
1960-x
rr. 6bIJIa pa3pa60TaHa TeXHOJIOrHH nOJIyqeHHH nJIaCTHH
113
GaP H3 paCnJIaBOB npH BbICOKHX TeMnepaTypax H .ZI.aBJIeHHHX.
TaKHX
1.6.
CBeTo.n:Ho.n: GaP, Bblpam:eHHbIH MeTo.n:OM
)K
nJIaCTHH npH nOMOIII.H pe3KH
PHC.
KaKHe HCnOJIb3YlOTCH B HaCTOHIII.ee BpeMH. TIPH JIerHpOBaHHH GaP H30-
ro JIerHpOBaH UHHKOM H KHCJIOPO.n:OM, H3JIYQaeT «H3YMHTeJIbHbIH»
H3rOTOBJIeHbI CBeTO.Zl.HO.Zl.bI 3eJIeHOrO CBeqeHHH, K. n . .ZI.. KOTOPbIX npeBbICHJI (Logan et al.,
1968, 1971).
XOTH BHelIlHHH KBaHToBbIH BbIXO.Zl. CBeTO-
.ZI.HO.Zl.OB 3eJIeHOrO CBeqeHHH MeHblIle, qeM CBeTO.Zl.HO.Zl.OB KpacHoro CBeqeHHH, BoCnpHHMqHBOCTb qeJIOBeqeCKOrO rJIa3a K 3eJIeHoMY UBeTY B
10
pa3 BbIlIIe,
qeM K KpacHoMY, n03ToMY 06a THna CBeTO.Zl.HO.Zl.OB HMelOT cpaBHHMylO KaJKYIII.YIOCH (cy6beKTHBHYIO) HpKOCTb. Ha.Zl.
pa3pa60TKoH
cBeTo!f.HO.Zl.OB
cneKTpa C K. n . .ZI.. BbIlIIe, qeM y .ZI.pYrHe KOMnaHHH -
BH.ZI.HMOrO
.ZI.Hana30Ha
OmHqeCKOrO
CBeTO.Zl.HO.Zl.OB H3 GaAsP, TPY.Zl.HJIHCb H
IBM, RCA H GE. B IBM pa60Thl no C03.Z1.aHHlO CBe-
TO.Zl.HO.Zl.OB H3 GaP. npOBO.Zl.HJIHCb B HCCJIe.Zl.OBaT~JIbCKOM ueHTpe HM. TOMaca ,[{JK. YOTcoHa B 110pKTaYH XeHTC (lIlT. HblO-l1opK). MaH
JK3.
Ha pHC.
1.6
nOKa3aHa <poTorpa
H HHJKHHM KOHTaKTaMH.
B
CTaTbe,
ony6JIHKOBaHHoH
B IBM Research
Journal, 6bIJIO rop.Zl.O 3aHBJIeHO, qTO .ZI.aHHbIH CBeTO.Zl.HO.Zl. H3JIyqaeT «H3YMHTeJIbHbIH KpacHbIH CBeT». 3.Z1.eCb CJIe.Zl.yeT OTMeTHTb, qTO B
1960- x
rr. MOHO-
xpOMaTHqeCKHe UBeTa B OCHOBHOM nOJIyqaJIHCb npH
«H3YMHTeJIbHbIM».
AKTHBHaH 06JIaCTb CBeTO.Zl.HO.Zl.a GaP TIHJIKYHa 6bIJIa JIerHpOBaHa O.Zl.HOBpeMeHHO H .ZI.OHOpaMH, H aKuemopaMH. B POJIH aKuemopa BblcTynaJI UHHK,
KpacHbIH CBeT
(Pilkuhn, 2000)
3JIeKTpOHHhlMH npHMeCHMH, cO.Zl.epJKaIII.HMH a30T, TaKHMH KaK GaN, 6bIJIH
0,6%
p-n-rrepexo.n: KOTOPO-
nap. 3HeprHH H3JIyqaeMbIX
KHCJIOPO.Zl.OM npHBO.Zl.HT K
C.ZI.BHry .ZI.JIHHbI BOJIHbI H3JIyqeHHH,
3HaqHTeJIbHoMY
n03ToMY OHH H3JIyqalOT B KpacHoM
.ZI.Hana30He cneKTpa (Foster, Pilkuhn,
1965).
KHCJIOPO.Zl., BBe.Zl.eHHbIH B GaP,
He HBJIHeTCH HH MeJIKHM .ZI.OHOPOM, HH aKuenTopOM, HO C03.Z1.aeT rJIy60KHH .ZI.OHOPHbIH ypOBeHb -
CM., HanpHMep, (Pilkuhn,
1981)
1).
JIoraH Hero KOJIJIerH, a TaKJKe BCH KOMaH.ZI.a AT&T cpa3y OC03HaJIH lIIHpOKHe nepcneKTHBbI npHMeHeHHH CBeTO.Zl.HO.Zl.OB, oc06eHHO B TeJIe
1960-x
rr. OqeHb MO.Zl.HbIM H npeCTHJKHbIM CqHTaJICH TeJIe<poH
MapKH ~Princess». 3TOT TeJIe<poH npe.Zl.Ha3HaqaJICH .ZI.JIH HCnOJIb30BaHHH B CnaJIbHe H OTJIHqaJICH TeM, qTO ero naHeJIb 3arOpaJIaCb, KaK TOJIbKO ero BbIHHMaJIH H3 .ZI.epJKaTeJIH. ,[{JIH nO.Zl.CBeTKH naHeJIH npHMeHHJIHCb HH.ZI.HKaTopHble JIaMnbI, pa60TaIOIII.He OT
110
B. ,[{JIH 3aMeHhl 3THX JIaMn npH HX
BbIXO.Zl.e H3 CTPOH KaJK.ZI.bIH pa3 npHXO.Zl.HJIOCb 3BOHHTb B cepBHcHYIO CJIYJK6y. TIPH CMeHe HH.ZI.HKaTOpHbIX JIaMn Ha CBeTO.Zl.HO.Zl.bI Y.Zl.aJIOCb H36aBHTbcH OT .ZI.OnOJIHHTeJIbHOrO HCTOqHHKa nHTaHHH
110
B, nOCKOJIbKY .ZI.JIH HOBbIX
3JIeMeHTOB .ZI.OCTaTOqHQ 6bIJIO HanpHJKeHHH TeJIe<poHHoH ceTH H K TO My JKe CpOK CJIYJK6bI CBeTO.Zl.HO.Zl.OB H3 GaP npH HCnOJIb30BaHHH B TeJIe
50
JIeT,
T. e.
6bIJI
HaMHoro .ZI.OJIblIle, qeM y
HH.ZI.HKaTOpHbIX
JIaMn. TaKoe YCOBeplIleHCTBOBaHHe npHBeJIO K 3HaqHTeJIbHOMY CHHJKeHHIO ce6eCTOHMOCTH TeJIe<poHoB KOMnaHHH Bell HJIH npocTo «Ma Bell» (TaK B Te
a .ZI.OHOpaMH 6bIJIH TeJIJIYP, cepa HJIH CeJIeH, n03TOMY H3JIyqeHHe reHepHpoBaJIOCb npeHMYIII.eCTBeHHO 3a CqeT peKOM6HHaUHH .ZI.OHOpHO-aKuenTopHhlx
I)
0
BJIHHHHH rrpHMeceH Ha H3JIYQaTeJIbHYIO peKoM6HHaUHIO B GaP -
eM.
[7].
32
Fit. 1. Hcmopufl cos8anufl ceemo8uo8oe
33
1.5. Hcmopufl cos8anufl ceemo8uo8oe us GaN
rO)1.bI Ha3bIBaJIaCb KOMrraHHSI AT&T) rrpH O)1.HOBpeMeHHoM rrOBbIUIeHHH HX
a30Ta B GaAsP H GaP. ,nJISI BblpamHBaHHSI Tpe6yeMblx CJIOeB rrpHMeHSlJICSI
Ha)1.e)KHOCTH.
MeTO)1. rCD3, rrOCKOJIbKY TOJIbKO OH rr03BOJISlJI JIerHpOBaTb a30TOM 06JIaCTb
Eme 60JIee 3HatIHTeJIbHbIM CTaJIO rrpHMeHeHHe CBeTO)1.HO)1.0B B MHorOKa-
B oKpecTHocTH
p-n-rrepexo)1.a,
tITO )1.aBaJIO B03MO)KHOCTb CHH)KaTb rrorJIO-
HaJIbHbIX TeJIecpoHHbIX CHCTeMax. 3TH CHCTeMbI CTOSlJIH B 60JIbUIHX OcpHCaX,
meHHe H3JIytIeHHSI rrpHJIeraIOmHMH K
HCrrOJIb30BaJIHCb B OCHOBHOM CeKpeTapSlMH H OrrepaTOpaMH, HH)1.HKaTOpHble
K. rr.)1.. CBeTO)1.HO)1.0B (Groves et aI., 1977, 1978 a, 1978
JIaMrrbI B HHX YKa3bIBaJIH Ha COCTOSlHHe BbI3bIBaeMOM JIHHHH: 3aHSITa OHa
BpeMSI GaP:N HCrrOJIb3YIOT )1.JISI H3rOTOBJIeHHSI CBeTO)1.HO)1.0B 3eJIeHOrO CBe-
HJIH CBo60)1.Ha. ,nJISI rrepeKJIIOtIeHHSI TeJIeqJOHHbIX JIHHHM H HH)1.HKaTOpHbIX
tIeHHSI, 06JIa)1.aIOmHx )1.0BOJIbHO HH3KHMH CBeTOBbIMH xapaKTepHcTHKaMH,
JIaMrr 110 B rrpHMeHSlJIH )1.HCTaHI,(HOHHble rrepeKJIIOtIaTeJIH, OT KOTOPbIX K
KOTopble rrpHMeHSIIOT B KatIeCTBe HH)1.HKaTopoB.
Ka)K)1.0MY TeJIecpoHHoMY arrrrapaTY TSlHYJIOCb MHO)KeCTBO rrpOBO)1.0B. YCTa-
p-n-rrepexo)1.y
,npyrHMH 06JIaCTSlMH rrpHMeHeHHSI
)1.0B CTaJIH II.HcppoBble )1.HCrrJIeH )1.JISI KapMaHHblx
HbIX MHorOKaHaJIbHbIX CHCTeMax, BbIIIOJIHSlIOmHX Te )Ke CPYHKII.HH, BMeCTO
KaJIbKYJISITOPOB H HapytIHbIX tIaCOB. nepBble tIaCbI
JIaMrr HCrrOJIb3YIOT CBeTO)1.HO)1.bI, rrHTaIOmHecSi OT HarrpSl)KeHHSI TeJIecpoHHoM
C II.HCPPOBbIM )1.HCrrJIeeM 6bIJIH BbIIIymeHbI Koprro-
ceTH, a 3JIeKTpOHHble MHKpocxeMbI, pa3MemaIOmHecSi BHYTPH TeJIecpoHHbIX
paII.HeM Hamilton B 1972 r. OHH BbI3BaJIH HaCTO-
TPy60K, yrrpaBJISIIOT rrepeKJIIOtIeHHeM JIHHHM H HH)1.HKaTopoB. npH 3TOM
SlmHM CPypop B o6mecTBe, H TOJIbKO OtIeHb BbICO-
pe3Ko rrOHH3HJIaCb CTOHMOCTb npOH3BO)1.CTBa, YCTaHoBKH H 06CJIY)KHBaHHSI
KaSi CTOHMOCTb C)1.ep)KHBaJIa HX pacrrpoCTpaHeHHe.
TaKHX CHCTeM.
Ha pHC. 1.8 rrOKa3aHbI tIaCbI Pulsar C II.HCPPOBbIM
nOCKOJIbKY 3cpcpeKTHBHoCTb CBeTO)1.HO)1.0B H3 GaP 3eJIeHOrO H KpacHoro HSlJIO peUIeHHe 06 opraHH3aII.HH HX rrpOH3BO)1.CTBa B neHCHJIbBaHHH. 06bltIHO Ha TeJIecpoHHble JIHHHH rv
rrO)1.aeTCSI
40 B H TOK HeCKOJIbKO MHJIJIHaMrrep. TOJIbKO OT 3aMeHbI HH)1.HKaTOpHbIX
UIHecSi B 1975 r. 1.9 H306pa)KeHbI )1.Ba rrporpaMMHpy-
eMblX KaJIbKYJISITOpa, BbIIIYCKaBUIHecSi B Cepe)1.HHe 1970-x rr.: SR-56 KOMrraHHH Texas Instruments
JIaMrr Ha CBeTO)1.HO)1.bI Y)1.aJIOCb CHH3HTb yrrpaBJISIIOmee HarrpSl)KeHHe rrpH-
H HP-67 CPHPMbI XbIOJIeTT-naKKap)1.. B
6JIH3HTeJIbHO Ha 2 B H O)1.HoBpeMeHHo YJIytIUIHTb KatIeCTBO HH)1.HKaII.HH Ha
HbIX )1.HCrrJIeSiX 060HX YCTPOMCTB HCrrOJIb30BaHbI
TeJIecpoHHbIX arrrrapaTax. MHorHe MO)1.eJIH TeJIecpoHoB CTaJIH OCHamaTbCSI
CBeTO)1.HO.D.bI GaAsP KpacHoro II.BeTa; He.D.OCTaTKOM
cerMeHT-
KJIaBHaTypaMH C 3eJIeHOM rrO)1.CBeTKOM KHorrOK, 06bltIHO BbI6HpaeMoM )1.H-
060HX KaJIbKYJISITOPOB 6bIJIO TPY.D.HOe CtIHTbIBaHHe
3aMHepaMH. Ha pHC.
HHcpopMaII.HH B YCJIOBHSlX SlpKoro BHeUIHero OCBe-
AT&T
1.7 rrOKa3aHa MO)1.eJIb TaKoro TeJIecpoHa KaMrraHHH
1990 rO)1.a MapKH
«Trimline».
CBeTO)1.HO)1.bI KpacHoro H 3eJIeHO-
meHHSI, rrOCKOJIbKY CBetIeHHe CBeTO.D.HO.D.OB OtIeHb
ro CBetIeHHSI HaUIJIH rrpHMeHeHHe H B MHorOKaHaJIbHbIX TeJIecpoHHbIX CH-
cJIa6oe. KpoMe Toro, TaKHe .D.HCrrJIeH rroTpe6JISlJIH
CTeMax.
)1.0BOJIbHO ECJIH
6Y)1.eTe
B
M3ppeM
XHJIJI
(UIT. HbIO-,n)KepcH) H rroceTI-fTe My-
B HaCTOSImee
)1.HCrrJIeeM H BCTpoeHHbIM KaJIbKYJISITOPOM, rrOSlBHBHa pHC.
rrOCTOSlHHoe HarrpSl)KeHHe
b).
CBeTO)1.HO-
HOBKa H 06CJIY)KHBaHHe TaKHX CHCTeM 6bIJIH OtIeHb )1.0POrHMH. B cOBpeMeH-
CBetIeHHSI HerrpepbIBHo YJIYtIUIaJIaCb, PYKOBO)1.CTBO JIa60paTopHH BeJIJI rrpH-
CJIOSlMH, T. e. rrOBbIUIaTb
Te )Ke
60JIbUIyIO
rrp06JIeMbI
3JIeKTpHtIecKYIO
6bIJIH
H Y
MOmHOCTb.
HapytIHbIX tIaCOB.
)KH.D.KOKpHCTaJIJIHtIeCKHe .D.HCrrJIeH ()KK,n), pa3pa-
3eM JIa60paTopHH BeJIJI, BbI CMO)KeTe
60TaHHble B KOHII.e
caMH YBH)1.eTb MHoro HCTOpHtIeCKHX
MeHbUIeH MOmHOCTH, rro3ToMY K HatIaJIY 1980-x
1970-x,
Tpe60BaJIH ropa3.D.O
TeXHHtIeCKHX 3KcrrOHaTOB, B TOM tIHC-
OHH rrpaKTHtIeCKH rrOJIHOCTbIO BbITeCHHJIH .D.HCrrJIeH
JIe CBeTO)1.HO)1. GaP:N 3eJIeHOrO CBetIe-
Ha CBeT0.D.HO.D.ax.
PHC.
1.B.
4aCbI Pulsar
C IjH
HHSI, pa3pa6oTaHHbIM JIoraHOM. B KOprrOpaII.HH MOHcaHTO )1.JISI rroJIytIeHHSI CBetIeHHSI B KpaCHOM, opaHPHC. 1.7. TeJIe<poH KOMIIaHHH AT&T MapKH {< Trimline~ C nOAcBeTKoH KHOIIOK, BbIIIOJIHeHHOH Ha ABYX CBeTOAHOAax GaP SeJIeHOrO CBeqeHHH. 3TO 6bIJIO OAHHM HS IIepBblX IIpHMeHHH CBeTOAHOAOB GaP SeJIeHOrO CBeqeHHH, JIempOBaHHblx aSOTOM
1.5.
HCTOPHSI C03,ll;aHHSI CBeTO,ll;HO,ll;OB H3 GaN
)KeBOM, )KeJITOM H 3eJIeHOM )1.Harra30Hax )1.JIHH BOJIH rrpHMeHSlJIOCb JIerHpOBaHHe GaAsP a30TOM (Groves et
KOMrraHHSI
Pa.D.HOKOprrOpaII.HSI AMepHKH
(RCA)
B KOHII.e
1960-x rr.
BbIIIYCTHJIa O.D.HOM H3 rrepBblx II.BeTHOM TeJIeBH30p Ha OCHOBe 3JIeKTpOHHO-
aI., 1971, Craford et aI., 1972, Duke,
JIytIeBOM Tpy6KH (3JIT) C TpeMSI 3JIeKTpOHHbIMH rrYUIKaMH. ,n)KeMMC TaMT-
Holonyak,
.D.)KeH, pa60TaIOmHM B O.D.HOM H3 OCHOBHbIX JIa60paTopHM RCA B npHHcToHe
1973). TaM )Ke H3ytIaJIH
xapaKTepHcTHKH MaTepHaJIOB -
3MHC-
(UIT. HbIO ,n)KepCH), B03rJIaBJISlJI B Te rO.D.bI OT.D.eJI rro HCCJIe.D.OBaHHIO Ma-
CHIO, rrOrJIOmeHHe H3JIytIeHHSI C pa3-
TepHaJIOB. Ero MetITOM 6bIJIa pa3pa6oTKa TeJIeBH30pa C rrJIOCKHM 3KpaHoM,
HbIMH )1.JIHHaMH BOJIH, pacTBopHMOCTb
KOTOPbIM MO)KHO 6bIJIO 6bI rrOBeCHTb Ha cTeHY KaK KapTHHy. ,nJISI C03.D.aHHSI
2 <1>. E. IlIy6epT
r= :!."
34
1.5. Hcmopufl COSaaHufl cBemOaUOaOB us GaN
Tit. 1. HCmOpUfl COSaaHUfl CBemOaUOaOB
(
PHC. 1.9. ITporpaMMHpyeMble KapMaHHble KaJIbKYJIlITOPbI: MOAeJIb SR~56 KaMllaHHH Texas Instruments Corporation H MOAeJIb HP-67 KaMllaHHH Hewlett-Packard Corporation. fOA BbIIIYCKa 060HX KaJIbKYJIlITOPOB - 1976. B HX AHCIIJIellX HC1I0JIb30BaJIHCb ceMHcerMeHTHble HHAHKaTopbl, CAeJIaHHble Ha CBeTOAHOAax GaAsP. SR-56 06JIaAaJI orpoMHoH 110 TeM BpeMeHaM IIporpaMMHoH lIaMlITbIO - 100 warOB, a HP 6bIJI OCHameH MarHHTHbIM YCTPOHCTBOM BBOAa AaHHbIX H HMeJI HeCKOJIbKO IIporpaMMHpyeMblx KJIaBHW
1I0JIHOrO UBeTHoro R306pa)KeHRll TaKOH 3KpaH ,n:OJI)KeH COCTOllTb R3 KpacHbIX, 3eJIeHbIX R CRHRX rrRKCeJIeH. K TOMY BpeMeHR Y)Ke 6bIJIR pa3pa60TaHbI TeXHOJIOrRR R3rOTOBJIeHRll KpaCHbIX R 3eJIeHbIX CBeTo,n:Ro,n:OB Ha OCHOBe GaAsP R GaP:N, rr03TOMY .lI.JIll C03,n:aHRll rrJIOCKRX TB-MOHRTOPOB OCTaBaJIOCb HaHTR crroc06 rrOJIYlJeHRll CBeTo,n:Ro,n:OB C llpKRM rOJIy6bIM CBelJeHReM. . B Mae 1968 r. TaHT.lI.)KeH rropYlJRJI MOJIO,n:OMY COTPY.lI.HRKY cBoeH rpyrrrrbI IloJIY MapycbKa pa3pa60TaTb MeTO.lI. BblpaIIJ.RBaHRll MOHoKpRCTaJIJIRlJeCKRX rrJIeHOK GaN, R3 KOTOPbIX rro ero rrpe,n:rrOJIO)KeHRIO MO)KHO 6y,n:eT H3rOTOBRTb CBeTo,n:Ro,n:bI rOJIy60ro CBelJeHRll. K TO My BpeMeHR MapYCbKa Y)Ke RMeJI orrbIT rrOJIYlJeHRll CBeTo,n:Ro,n:OB GaAsP KpaCHoro CBelJeHRll MeTo,n:OM MeTaJIJIO-raJIOreHOBOH f
35
)KaJIeHRIO, OH HerrpaBRJIbHO RCTOJIKOBaJI ,n:aHHble JIopeHua R DRHKOBCKR, orry6JIRKOBaHHble B 1962 r., 0 pa3JIO)KeHRR GaN B BaKYYMe rrpR TeMrrepaType rv 600°C, R ,n:JIll rrpe,n:oTBpaIIJ.eHRll 3Toro CBOR :rrepBble rrJIeHKR GaN BblpaIIJ.RBaJI rrpR TeMrrepaTypax HR)Ke 600 o~;B pe3YJIbTaTe lJero OHR rrOJIYlJaJIRCb He MOHO-, a rrOJIRKpRCTaJIJIRlJeCKRMR.11 JIRIIIb B MapTe 1969 r. MapycbKa rrOHllJI, lJTO B aMMRalJHOH cpe,n:e rrpoueCCbI pOCTa CJIOeB rrpe06JIa,n:aIOT Ha.lI. rrpoueccaMR RX pa3JIO)KeHRll, R rrOBbICRJI TeMnepaTYPY B TRrJIe ,n:o 850°C, rrpR KOTOPOH 06bIlJHO 0pMRpOBaJIHCb CJIOR GaAs. Ilo OKOHlJaHRR rrpouecca BblpaIIJ.RBaHRll Ka3aJIOCb, lJTO carrRpoBall rro,n:JIO)KKa OCTaJIaCb HerrOKpbITOH, HO MapycbKa rrOMlJaJICll B aHaJIRTRlJecKYIO JIa60paTOPRIO RCA, r,n:e rrpR rrOMOIIJ.R KaMepbl JIaY3 ,n:JIll peHTreHoBcKoro aHaJIR3a KpRCTaJIJIOB Ha HeH y,n:aJIOCb o6HapY)KRTb TOHKRH CJIOH rrp03palJHOH MOHOKpRCTaJIJIRlJeCKOH rrJIeHKR GaN C OlJeHb rJIa.lI.KOH rroBepxHocTbIO (Maruska, Tietjen, 1969). HCCJIe,n:oBaHRe 3TOH rrJIeHKR rrOKa3aJIO, lJTO 6e3 BCllKoro JIerRpOBaHRll OHa 06JIa.lI.aeT rrpoBo,n:RMOCTbIO n-TRrra, R ,n:JIll rrOJIYlJeHRll p-n-rrepexo,n:a Tpe60BaJIOCb rro,n:06paTb cooTBeTcTBYIOIIJ.YIO rrpRMecb p-TRrra. MapYCbKa ,n:YMaJI, lJTO ,n:JIll 3TRX ueJIeH XOPOIIIO rro,n:OH,n:eT URHK, rrpRMeHlleMbIH rrpR pa60Te C GaAs R GaP. O,n:HaKO OKa3aJIOCb, lJTO rrpR BbICOKRX KOHueHTpaURllX URHKa rrJIeHKR GaN CTaHOBllTCll ,n:R3JIeKTpRKaMR, a He rrpOBo,n:HRKaMR p-TRrra (Maruska, 2000). B 1969 r. iKaK IlaHKoB Haxo,n:RJICll B TBOplJeCKOM OTIIYCKe, B TelJeHRe KOToporo OH pa60TaJI B DepKJIeeBCKOM YHRBepcRTeTe, r,n:e m~caJI ylJe6HHK rro OIITHlJeCKRM rrpoueccaM B rrOJIyrrpOBo,n:HRKax. BepHYBIIIRCb B RCA B llHBape 1970 r., OH HeMe,n:JIeHHO BKJIIOlJRJICll B pa60TY rro C03,n:aHRIO CBeTo,n:Ro,n:OB Ha OCHOBe rrJIeHOK R3 GaN. IlaHKoB 3aHllJICll RCCJIe,n:OBaHReM rrpoueccoB OrrTRlJeCKOrO rrOrJIOIIJ.eHRll R OTOJIIOMRHeCueHURR B TOHKRX rrJIeHKaX GaN (Pankove et a!., 1970a, 1970b). JIeToM 1971 r. RCA BrrepBble orry6JIRKOBaJIa C006IIJ.eHRe 0 llBJIeHRR 3JIeKTpOJIIOMRHeCueH URR, Ha6JIIO,n:aeMoM Ha o6pa3ue R3 rrJIeHKR GaN (Pankove et a!., 1971a). HCCJIe,n:yeMbIH o6pa3eu, COCTOllBIIIRH R3 CRJIbHO JIerRpOBaHHoro URHKOM CJIOll GaN C ,n:BYMll rroBepxHocTHbIMR 3JIeKTpo,n:aMR, R3JIYlJaJI rOJIy6oH CBeT C ,n:JIRHOH BOJIHbI 475 HM. IlocJIe 3Toro IlaHKoB C KOJIJIeraMR C03,n:aJIR CTPYKTYPY R3 HeJIerRpOBaHHoro CJIOll GaN (n-TRrra), CJIOll, CRJIbHO JIerRpOBaHHoro URHKOM (,n:R3JIeKTpRlJeCKOrO CJIOll), R rroBepxHocTHoro KOHTaKTa R3 RH,n:Rll (Pankove et a!., 1971b, 1972). TaKOH ,n:RO,n: co CTPYKTYPOH MemaAA-8u3AeKmpUfc-noAynpo808HUK (M.llIl) 6bIJI rrepBbIM CBeTo,n:RO.lI.OM R3 GaN, R3JIYlJaIOIIJ.RM 3eJIeHbIH R rOJIy6oH CBeT. 3aTeM B RCA rrpe,n:rrOJIO)KRJIR, lJTO MafHRH JIYlJIIIe, lJeM URHK, R HalJaJIR BblpaIIJ.RBaHRe MeTo,n:OM Mff
1.6. HcmopuJl C03aa1lUJl c8emOaUOa08 eOAy6oeo, 3eAe1l0eO U 6eAoeo c8e'lelluJl37
FA. 1. HcmopuJl C03aa1lUJl c8emOaUOa08
36
JIenIpOBaHHbIe
MarHl1eM,
He
06JIa)l.aIOT
rrpOBO)l.I1MOCTbIO p-Tl1rra, rr03TOMY JIIOMI1HeCueHUI1H JII160
B
HI1X
I1H)KeKUI1I1
fOJIy60e 1f3JIyqeHlfe,
Ha6JIIO.lI.aBIIIeeClI B 1972 r., npoIfCXO.ll.IfJIO B pe3YJIbTaTe peKOM6lfHaUIflf 3JIeKTpOHHO-.lI.b1POqHblX nap B BbICOKOOMHOH CTpyKType 1f3 GaN, JIeflfpOBaHHoro Si If Mg (Maruska, 2000)
p-n-rrepeXO)l.OM
TO)l.110)l. 113JIYQaJI CBeT B YJIbTpacpl10JIeTOBOM
(Akasaki et al., 1992). CBe-
(Y
11 CI1HeM crreKTpaJIbHOM
JIeH, JII160 Y)l.apHOH 110HI13aUl111 )l.113JIeK-
MOHCTpl1pOBaH Ha KOHcpepeHUl111 rro GaAs 11 )l.pynIM rrOJIyrrpOBO)l.HI1KOBbIM
rra
HeOCHOBHbIX
CqeT
)l.l1arra30Hax 11 6bIJI BbIpameH Ha carrcpl1pOBOH rrO)l.JIO)KKe; OH 6bIJI rrpo)l.e-
CJIOeB
3JIeKTpl1qeCiWM
1.10.
3a
1992 r. AKacaKI1 orry6JII1KOBaJI CTaTbIO 0 C03)l.aHI1I1 rrepBoro CBeTO-
HOCI1Te-
Tpl1qeCKI1X
PIfC.
rrpOTeKaeT
B
)l.110)l.a 113 GaN C rOMOreHHbIM
yqeHbIX
0
113
CTPYKTYP
rrOJIe. RCA
B
llaHKOB
CI1JIbHOM
MaTepl1aJIaM, rrpOXO)l.I1BIIIeH B 1992 r. B r. KapycaBa (.HrrOHI1I1).
11
)l.aHHoro CBeTO)l.110)l.a COCTaBJIHJI
rpyrr-
rrpe)l.JIo)KI1JII1
MO-
rv
K. rr. )l..
1 %. 3TO 6bIJIa OQeHb 60JIbIIIaH BeJII1QI1Ha
)l.JIHGaN, BbIpameHHoro Ha carrcpl1pOBOH rrO)l.JIO)KKe C CI1JIbHO OTJII1QaIO-
)l.eJIb, Orrl1CbIBaIOmyIO rrpl1HUl1rr )l.eHCTBI1H
ml1MI1CH rrapaMeTpaMI1 peIIIeTKI1. DbIJIO TaK)Ke rrOKa3aHO, QTO Ha KBaHTO-
TaKI1X YCTPOHCTB, oCHoBaHHYIO Ha y)l.ap-
BbIH BbIXO)l. HI1Tpl1)l.HbIX CBeTO)l.110)l.OB He BJII1HeT 60JIbIIIaH KOHueHTpaUI1H
HOH
110HI13aUI111
11
TYHHeJIbHOM
3cpcpeK-
Te
- )l.I1CJIOKaUI1H, B OTJII1Ql1e OT CBeTO)l.110)l.OB, 113rOTOBJIeHHbIX 113 apCeHI1)l.OB 11 CPOCCPI1)l.OB. Ha3BaHI1e HrrOHCKOH KOMrraHl111 Nichia Chemical Industries Corporation
1).
paTypbI (Pankove, Lampert, 1974; Marus-
(NCIC) TeCHO CBH3aHO C CBeTO)l.110)l.aMI1 11 JIa3epaMI1 113 GaN.
ka et aI., 1974a, 1974b). K CO)KaJIeHI1IO,
HI1KI1, BKJIIOQaH lIIY)l.)K11 HaKaMYPY, BHeCJII1 60JIbIIIOH BKJIa)l. B pa3BI1TI1e
TaKl1e CBeTO)l.110)l.bI o6JIa)l.aJII1 OqeHb H113-
TeXHOJIOnIl1 BbIpaml1BaHI1H GaN 11 113rOTOBJIeHI1H Ha ero OCHOBe CBeTO)l.I1-
KOH 3cpcpeKTHBHOCTbIO, rr03TOMY TaH)l.)KeH, HaqaBIIIHH 3TY pa60TY, caM )Ke
O)l.OB 11 JIa3epOB. OHI1 pa3pa6oTaJII1 )l.ByxrrOTOQHYIO CI1CTeMY BbIpaml1BaHI1H
ee 11 OCTaHOBI1JI. 06 3TOM BcrrOMI1HaJI MapycbKa B cBoeH KHl1re (Maruska, 2000)
1).
Ee COTPY)l.-
GaN MeTO)l.OM MeTaJIJIOOpraHI1QeCKOH [<1>3 (MO[3), rrpO)l.eMOHCTpl1pOBaJII1 rrepBbIe CBeTO)l.110)l.bI InGaN rOJIy6oro 11 3eJIeHOrO CBeQeHI1H C )l.BOHHbIMI1 reTepocTpYKTypaMI1 (Nakamura et al., 1993a, 1993b, 1994b), K. rr.)l. KOTOPbIX )l.OCTl1r 10%, 113rOTOBI1JII1 rrepBbIe I1MrrYJIbCHbIe JIa3epbI 11 JIa3epbI
1.6.
HCTOPHR C03AaHHR CBeTOAHOAOB rOJIy6oro, 3eJIeHOrO
H 6eJIoro CBeqeHHR Ha OCHOBe p-n-nepeXOAOB B loGaN
HerrpepbIBHoro 113JIYQeHI1H InGaN/GaN, pa60TaIOml1e rrpl1 KOMHaTHOH TeMrrepaType B rOJIy6oH 06JIaCTI1 cneKTpa (Nakamura et al., 1996). llo)l.po6HOe Orrl1CaHl1e )l.OCTI1)KeHI1H KOMrraHl111 NCIC rrpl1Be)l.eHO B KHl1re HaKaMYPbI 11
llocJIe Toro KaK rpyrrrra llaHKOBa 3aKOHQl1JIa 113YQeHI1e rrJIeHOK GaN, pa60TbI rro C03)l.aHI1IO GaN-CBeTO)l.110)l.OB 6bIJII1 OCTaHOBJIeHbI.
B
1982 r.
2).
Ha PI1C. 1.11 rrOKa3aHbI CBeTO)l.I1-
GaN 6bIJIa rrOCBHmeHa TOJIbKO O)l.Ha CTaTbH. O)l.HaKO I1caMY AKacaKI1 11 ero
O)l.bI rOJIy6oro CBeQeHI1H, 113rOTOBJIeH-
KOJIJIerl1 113 HaroHI1 (.HrrOHI1H) 3TI1X pa60T He rrpeKpaTI1JII1 11 B 1989 r.
Hble KOMrraHl1eH NCIC, a Pl1c.
rrpO)l.eMOHCTpl1pOBaJII1 rrepBbIH CBeTO)l.110)l. GaN co CJIOeM p-Tl1rra, o6JIa-
rrOCBHmeH caMOMY pacrrpOCTpaHeHHO-
1.12
)l.aIOml1H peaJIbHOH rrpOBO)l.I1MOCTbIO p-Tl1na. CTOHKl1e aKueIITOpbI MarHl1H
My rrpl1MeHeHI1IO InGaN CBeTO)l.110)l.OB
aKTI1Bl1pOBaJII1Cb rrpl1 rrOMOml1 06JIYQeHI1H 3JIeKTpOHHbIM rrYQKOM (Amano et
3eJIeHOrO CBeQeHI1H, 06JIa)l.aIOm11X BbI-
aI., 1989)
2).
l103)l.Hee 6bIJIO rrOKa3aHO, QTO aKTI1Bl1pOBaTb rrpl1MeCI1 MarHI1H
B CJIOHX GaN MO)KHO TaK)Ke B rrpouecce BbICOKOTeMrrepaTypHoro OT)Kl1ra
COKOH HPKOCTbIO, -
B )l.OPO)KHbIX CBe-
Tocpopax. KaK YKa3bIBaJIOCb paHbIIIe,
rOTOBbIX rrJIeHOK (Nakamura et al., 1994a) . .ll.orrOJIHI1TeJIbHOe JIenIpOBaHl1e
CBeTO)l.110)l.bI GaP:N 3eJIeHOrO CBeQe-
(Schubert et al., 1996) rr03BOJIHeT YJIYQIIIaTb 3cpcpeKTI1BHOCTb aKTI1BaUl111
HI1H 113-3a CBoeH HI13KOH HPKOCTI1 )l.JIH
rJIy6oKI1x
3TI1X ueJIeH He rrO)l.XO)l.HT.
aKueIITOpOB.
3TOT
rrpopbIB
B
BbIpaml1BaHl111
JIerl1pOBaHHbIx
CJIOeB p-Tl1rra OTKPbIJI rryTb K C03)l.aHI1IO CBeTO)l.110)l.OB C p-n-rrepeXO)l.aMI1 11
JIa3epHbIX
)l.110)l.OB.
B
JIerl1pOBaHHbIx MarHl1eM,
HaCTOHmee
BpeMH
113rOTaBJII1BaIOT Bce
Ha
OCHOBe
rrJIeHOK
CBeTO)l.110)l.bI
GaN,
11 JIa3epHbIe
0630PbI paHHero neplfO.ll.a pa60T no GaN -
CM.
r.
[8,9].
I1plfoplfTeTHble pa60TbI B. CanaplfHa, M. B. qYKlfqeBa If .lI.p. no aKTIfBaUIfIf JIIOMIfHeCUeHUlf1f B GaN -.CM. [10, 11]. CM. TaK)Ke nplfoplfTeTHble pa60TbI
B. r.
Clf.ll.OpOBa If .lI.p.
[12,13].
1990
3aHHJICH
.
r.,
KOr)l..a
pa3pa6oTKoH
HaKaMypa CBeTO)l.110)l.OB
113 GaN B KOMrraHl111 NCIC, OH 6bIJI 36-JIeTHI1M
)l.110)l.bI, cO)l.ep)Kaml1e HI1Tpl1)l.bI.
1) 2)
B
1)
I1H)KeHepOM
6e3
PIfC. 1.11. MaTplfua 1f3 CBeTO.ll.lfO.ll.OB InGaN/GaN roJIy60KO CBeqeHlfll, 1f3rOTOBJIeHHall qmpMoH Nichia (Nakamura, Fasol, 1997)
YQeHOH
B036Y)K.lI.eH1f1l JIIOMIfHOCPOPOB, pa60TbI no 3cpcpeKTlfBHbIM roJIy6bIM CBeTO.ll.lfO.ll.aM 6bIJIIf IfHIfUlflfpOBaHbI III. HaKaMypoH.
2)
.
CM. TaK)Ke 0630pHble CTaTblf A.3.IOHoBlfqa
[15-18]
If P.3. EaXTlf3lfHa
[19].
r
Dl. 1. Hcmopufl coaaaHufl c8emOaUOa08
38
PHC.
1.12.
CHrHaJIbl 3eJIeHbiX cBeTo<jlopoB -
1.7. HcmopUfl coaaaHufl c8emOaUOa08 8UaUM020 auanaaoHa ua AlinGaP
39
O.l(HO H3 caMblX pacnpocTpaHeHHblx
npHMeHeFIHH CBeTO.l(HO.l(OB InGaN/GaN 3eJIeHOrO U;BeTa CBeqeHHlI PHC.
CTeneHH,
6e3
e.lViHOH
ny6JIHKauJ-ul
H
BbIcTynJIeHHH
Iia
KOHepeHI1.HHX
1.13.
ITpHMepbl npHMeHeHHH CBeTO.l(HO.l(OB KpacHoro H JKeJITOrO CBeqeHHlI H3 AlInGaP
(Nakamura, Fasol, 1997). B KOHI1.e 1990-x rr. OH Y)Ke CTaJI npoeccopoM KaJIHopHHHcKoro KOMnaHHH
Cree
B
KHHre
cBoeH
YHHBepCHTeTa
Lighting
B
CaHTa-5ap6ape
Corporation,
(Nakamura,
2001)
NCIC H HnOHCKoe 06meCTBO:
OCHOBHoro HaKaMypa
H
KOHcYJIbTaHTOM
KOHKypeHTa )KeCTKO
NCIC.
KPHTHKOBaJI
«lITO-TO He B nopH)J.Ke C 3TOH CTpaHoH.
TIpoMbIIIIJIeHHOCTb H ymlBepcHTeTbI B HeH Y)KaCHO 60JIbHbI ... »
60JIee pacnpocTpaHeHHbIx npHMeHeHHH CBeTO)J.HO)J.OB H3 AlInGaP KpacHoro H )KeJITOrO CBelJeHHH. MaTepHaJIbI Ha OCHOBe AlInGaP 6bIJIH pa3pa60TaHbI B HnoHHH )J.JIH JIa3epOB,
pa60TaIDmHx
B
BH)J.HMOM
OKa3aJIOCb, lJTO CHCTeMa InGaN/GaN TaK)Ke nO)J.XO)J.HT )J.JIH nOJIYlJeHHH
OllTHlJeCKOrO
cneKTpa
1990). Bce HalJaJIOCb C H3rOTOBJIeHHH JIa3epa AlInGaP/InGaP C )J.BOHHOH
CBeTO)J.HO)J.OB 6eJIoro CBelJeHHH. CymecTByeT HeCKOJIbKO nO)J.XO)J.OB K H3ro-
reTepocTpYKTYPOH,
TOBJIeHHID TaKHX CBeTO)J.HO)J.OB. O)J.HH H3 HHX OCHOBaH Ha HCnOJIb30BaHHH
Ino,5Gao.5P, napaMeTpbI peIIIe),KH
JIIDMHHOOPOB, npe06pa3YIDmHX )J.JIHHy BOJIHbI (Nakamura,
iHana30He
(Kobayashi et aI., 1985; Ohba et aI., 1986; Ikeda et aI., 1986; Itaya et aI.,
F~sol,
1997),
GaAs I).
HCnOJIb3YIDmero
TIOCKOJIbKY
IIIHpHHa
B
KalJeCTBe
aKTHBHoro
MaTepHaJIa
KOToporo COBna)J.aIDT C napaMeTpaMH
3anpemeHHoH
30HbI
InGaP
COCTaBJIHeT
)J.pyroH Ha npHMeHeHHH nOJIynpoBo)J.HHKOBbIX npe06pa30BaTeJIeH )J.JIHH BOJIH
OKOJIO
(Guo et aI., 1999). O)KH)J.aeTcH, lJTO B 6JIH)KaHilieM 6Y)J.ymeM npoH30H)J.eT
H3rOTOBJIeHHH JIa3epOB, H3JIYlJaIDmHX CBeT B KpacHoH 06JIaCTH BH)J.HMoro
60JIbiliOH
cneKTpa. TaKHe JIa3epbI npHMeHHIDT, HanpHMep, B JIa3epHbIX YKa3Kax H
npopbIB B
06JIaCTH
C03)J.aHHH
H HCnOJIb30BaHHH
CBeTO)J.HO)J.OB
6eJIoro CBelJeHHH, nOCKOJIbKY no CBeTOBOH OT)J.alJe OHH BnOJIHe MoryT KOH-
1,9 3B
(650
HM),
3TOT
MaTepHaJI
MO)KeT HCnOJIb30BaTbCH )J.JIH
DVD-npoHrpbIBaTeJIHx.
KypHpoBaTb C 06bIlJHbIMH JIaMnaMH HaKaJIHBaHHH H JIIDMHHeCI1.eHTHbIMH HC-
.u06aBJIeHHe aJIIDMHHHH K aKTHBHOH 06JIaCTH In GaP n03BOJIHeT CMe-
TOlJHHKaMH. B TO BpeMH KaK CBeTOBaH OT)J.alJa Tpa)J.HI1.HOHHbIX HCTOlJHHKOB
CTHTb H3JIYlJeHHe B CTOPOHY 60JIee KOPOTKHX BOJIH, 3aXBaTbIBaH OpaH)Ke-
CBeTa COCTaBJIHeT 15-100 JIMhBT, Y CBeTO)J.HO)J.OB 6eJIoro CBelJeHHH OHa
BbIH H )KeJITbIH cneKTpaJIbHbIe )J.Hana30HbI. O)J.HaKo (AlxGal-x)O.5Ino.5P
MO)KeT )J.OCTHraTb 300 JIMjBT. )
npH
x
~ 0,53 CTaHOBHTCH HenpHM030HHbIM nOJIynpOBO)J.HHKOM, lJTO npH-
BO)J.HT K CHJIbHOMY CHH)KeHHID ero K. n.)J. Ha )J.JIHHaX BOJIH, ). :::;; 600 HM. CJIe)J.oBaTeJIbHO, 3TOT MaTepHaJI He nO)J.XO)J.HT )J.JIH H3rOTOBJIeHHH BbICOKO-
1.7.
HCTOPHB C03,1l;aHHB CBeTO,ll;HO,ll;OB BH,Il;HMoro
,Il;Hana30Ha OnTH'IeCKOrO cneKTpa H3 AlInGaP
3eKTHBHbIX CBeTO)J.HO)J.OB, H3JIYlJaIDmHX CBeT C )J.JIHHaMH BOJIH MeHbilie 570 HM. TIepBbIe JIa3epbI AlInGaP nOHBHJIHCb B HalJaJIe 1980-x rr., a pa3BHTHe
CHCTeMa MaTepHaJIOB AlInGaP nO)J.XO)J.HT )J.JIH nOJIYlJeHHH HpKoro CBe-
CBeTO)J.HO)J.OB AlInGaP HalJaJIOCb B KOHI1.e 1980-x (Kuo et aI., 1990; Fletcher
lJeHHH B KpacHoM (626 HM), OpaH)KeBOM (610 HM) H )KeJITOM (590 HM!
et aI., 1991; Sugawara et aI., 1991). B OTJIHlJHe OT JIa3epOB AlInGaP B
cneKTpaJIbHbIX )J.Hana30Hax H B HaCTOHmee BpeMH HBJIHeTCH OCHOBHOH )J.JIH H3rOTOBJIeHHH CBeTO)J.HO)J.OB nOBbIIIIeHHoH HPKOCTH, H3JIYlJaIDmHX CBeT
CTpyKTypy CBeTO)J.HO)J.OB 06bIlJHO BXO)J.HT CJIOH pacTeKaHHH TOKa, BBO)J.HMble
B )J.aHHOM HHTepBaJIe )J.JIHH BOJIH. Ha pHC. 1.13 npHBe)J.eHbI npHMepbI HaH-
JIaCb 06JIaCTb, pacnOJIO)KeHHaH HH)Ke BepXHeH lJaCTH OMHlJeCKOrO KOHTaKTa.
1) no
150
JIM/BT, CM.
[21).
)J.JIH Toro, lJT06bI CBeTHJIaCb TOJIbKO nJIOCKOCTb
1) ITpHopHTeTHbie pa60TbI
JI. M.
nOJIrHHOBa, IT.
f.
p-n-nepexo)J.a
H He CBeTH-
EJIHCeeBa H .l(p. -
CM.
[14).
Til. 1. HcmopuJl C03aaHUJl c8emOaUOa08
40
.ll.aJIbHeHIIIHe ycoBepIIIeHcTBoBaHIHI CBeTO,D.HO,D.OB AlinGaP 6bIJIH cBH3aHbI C C03,D.aHHeM B aKTHBHoH 06JIaCTH, <.:ocToHmeH H3 HeCKOJIbKHX KBaHTOBbIX HM (Huang, Chen, 1997; Chang, Chang, 1998a, 1998b), pacnpe,D.eJIeHHbIX OTpa)KaTeJIeH Bp3rra (Huang, Chen, 1997; Chang et aI., 1997) H pa3pa60TKoH TeXHOJIOrHH H3rOTOBJIeHHH np03paqHbIX GaP nO,D.JIO)KeK (Kish, Fletcher, 1997). B KHHrax pH,D.a aBTopoB (Stringfellow, Craford, 1997; Mueller, 2000; Krames et aI., 2002) MO)KHO HaHTH cpaBHHTeJIbHbIH aHaJIH3 CHCTeM AlinGaP H CBeTO,D.HO,D.OB Ha HX OCHOBe.
1.S.
HOBbIe 06JIaCTH npHMeHeHHB CBeTO.ll.HO.ll.OB
r
1.8. H08ble o61lacmu npUMeHeHUJl c8emOaUOa08
41
PHC. 1.15. I1epBbIH aBTOM06HJIb co CBeTO.D.HO.D.HbIMH
no Mepe B03pacTaHHH HHTeHCHBHOCTH H3JIyqeHHH CBeTO,D.HO,D.OB Bce llIHpe CTaHOBHTCH c
PHC. 1.14. I1epBble xHpyprHqeCKHe OqKH co BCTpoeHHblMH CBeTO.D.HO.D.aMH 6eJIoro CBeqeHHlI (a), HCnOJIb3yeMbIe .D.JIlI OCBemeHHlI 30HbI onepau.HH (6) (Shimada et al., 2001; Shimada et al., 2003)
PHc.1.16. ,UHCnJIeH, COCTOllmHH H3 18 MHJIJIHOHOB CBeTO.D.HO.D.OB, pa3MemeHHblH Ha CTeHe ceMH3Ta)KHOrO 3.D.aHHlI B HbIO-l1opKe
PHC. 1.17. CBeTo
B 2004 r.
p . .ll.YHaH B HeMeu.KOM ropo,D.e PereHc6ypr, ,D.JIH OCBemeHHH KOToporo HCrrOJIb3yeTcH 21900 CBeTO,D.HO,D.OB KpacHoro CBeqeHHH. ll.errOqKa H3 HpKO ropHmHX CBeTO,D.HO,D.OB, rrpoTHHYTaH B,D.OJIb MOCTa, KaK 6bI 06be,D.HHHeT ,D.Ba 6epera peKH. nOCKOJIbKY ropo,D. OCHOBaH B 179 r., a MOCT nocTpoeH B 2004 r., Ka)K,D.bIH CBeTO,D.HO,D. CHMBOJIH3HpyeT O,D.HH MecHu. cymecTBoBaHHH ropo,D.a (Os ram Opto Semiconductors, 2004). Ha pHC. 1.19 rrOKa3aHa rrO,D.CBeTKa BXO,D.a B HayqHO-rrpOMbIIIIJIeHHbIH rrapK, HaXO,D.HmHHCH Ha TaHBaHe B ropo,D.e XCHH Illy. B 3TOM rrapKe pacrrOJIO)KeHO MHoro KOMrraHHH, crreu.HaJIH3HpYlOmHXcH Ha pa3pa60TKe TexHOJIOrHH H3rOTOBJIeHHH rrOJIyrrpOBO,D.HHKOBbIX YCTPOHCTB 1).
1) 1000 CBeT0.D.HO.D.HbIX cBeTo
1) I1PHM. pe.D..: CM.
I
42
FIt. 1. Hcmopufl c03aaHufl cBemoauoaoB
I
II "
PHc.1.18. KaMeHHbIH MOCT B ropo.n;e PereHc6ypre (fepMaHHH), OCBeIIl,aeMbIH rrpH rrOMOIIl,H CBeTo.n;Ho.n;OB (Focus Magazine, 2004)
PHC. 1.19. Xy.n;O}l{eCTBeHHaH rro.n;CBeTKa Bxo.n;a B HayqHO-rrpOMblIIIJIeHHblH rrapK, Haxo.n;HIIl,HHCH B TaHBaHe B ropo.n;e XCHH Illy (K.R. Wang, L.-W. Tu, 2005)
BH6JIHOrpa4>HlIecKHH cnHCOK Akasaki 1., Amano H., Itoh K., Koide N., and Manabe K. «GaN based UV/blue light-emitting devices» GaAs and Related Compounds conference, Inst. Phys. Con!. Ser. 129, 851 (1992). Allen J. W., Moncaster M. E., and Starkiewicz J. «Electroluminescent devices using carrier injection in gallium phosphide» Solid State Electronics 6, 95 (1963). Amano H., Kito M., Hiramatsu K., Akasaki 1. «P-type conduction in Mg-doped GaN treated with low-energy electron beam irradiation (LEEBI») Jpn. J. Appl. Phys. 28, L2112 (1989). Chang S. J., Chang C. S., Su Y.K, Chang P. T., Wu Y. R., Huang K. H. and Chen T. P. «AlGaInP multiquantum well light-emitting diodes» lEE Proc. Optoelectronics 144, 1 (1997). Chang S. J. and Chang C. S. «AlGaInP-GaInP compressively strained multiquantum well light-emitting diodes for polymer fiber applications» IEEE Photonics Technol. Lett. 10, 772 (1998a). Chang S. J. and Chang C. S. «650 nm AlGaInP/GaInP compressively strained multi-quantum well light-emitting diodes» Jpn. J. Appl. Phys 37, L653 (1998b). Craford M. G., Shaw R. W., Herzog A. H., and Groves W. O. «Radiative recombination mechanisms in GaAsP diodes with and without nitrogen doping» J. Appl. Phys. 43, 4075 (1972). Destriau G. «Scintillations of zinc sulfides with alpha-rays» J. Chimie Physique 33, 587 (1936). Duke C. B. and Holonyak Jr. N. «Advances in light-emitting diodes» Physics Today, December issue, p. 23 (1973). Eastman P. C., Haering R. R., and Barnes P. A. «Injection electroluminescence in metal-semiconductor tunnel diodes» Solid-State Electronics 7, 879 (1964). Edmond J. A., Kong H. S., and Carter Jr. C. H. «Blue LEDs, UV photo diodes and high-temperature rectifiers in 6 H-SiC» Physica B 185,453 (1993).
r
1.8. Bu6JluoepafjJU'f.eCIWU cnUCOK
43
Filsinger D. H. and Bourrie D.B. «Silica to silicon: Key carbothermic reactions and kinetics» 1. A mer. Ceram. Soc. 73, 1726 (1990). Fletcher R. M., Kuo c., Osentowski T. D., and Robbins V. M. «Light-emitting diode with an electrically conductive window» US Patent 5,008,718 (1991). Foster L. M. and Pilkuhn M. (<Electroluminescence near bandgap in GaP containing shallow donor and acceptor levels» Appl. Phys. Lett. 7, 65 (1965). Grimmeiss H. G. and Scholz H. J. «Efficiency of recombination radiation in GaP» Phys. Lett. 8, 233 (1964). Groves W.O., Herzog A. H., and Craford M. G. «The effect of nitrogen doping on GaAs1_:z:P:z: electroluminescent diodes» Appl. Phys.Lett. 19, 184 (1971). Groves W. o. and Epstein A. S. «Epitaxial deposition of IIItV compounds containing isoelectronic impurities» US Patent 4,001,056 issued Jan. 4 (1977). Groves W.O., Herzog A. H., and Craford M. G. «Process for the preparation of electroluminescent III-V materials containing isoelectronic impurities» US Patent Re. 29,648 issued May 30 (1978a). Groves W.O., Herzog A. H., and Craford M. G. «GaAsP electroluminescent device doped with isoelectronic impurities» US Patent Re. 29,845 issued Nov. 21 (1978b). Guo X., Graff J. W., and Schubert E. F. «Photon recycling semiconductor lightemitting diode» IEDM Technical Digest, IEDM-99, 600 (Dec. 1999). Hall R. N., Fenner G. E., Kingsley J. D., Soltys T. J., and Carlson R. O. «Coherent light emission from GaAs junctions» Phys. Rev. Lett. 9, 366 (1962). Herzog A. H., Groves W.O., and Craford M. G. «Electroluminescence of diffused GaAs1-:z:P:z: diodes with low donor concentrations» J. Appl. Phys. 40, 1830 (1969). Holonyak Jr. N. «Active region in visible-light diode laser» Electronics ,36, 35 (1963). Holonyak Jr. N. «Laser action in Ga(AsP) and GaAs» Proc. IEEE 52, 104(1964). Holonyak Jr. N., personal communication (2000). Holonyak Jr. N. and Bevacqua S. F. «Coherent (visible) light emission from Ga(As1_:z:P:z:) junctions» Appl. Phys. Lett. 1,82 (1962). Holonyak Jr. N., Bevacqua S. F., Bielan C. V., Carranti F. A., Hess B. G., and Lubowski S. J. «Electrical properties of Ga(AsP) pn junctions» Proc. IEEE 51, 364 (1963a). Holonyak Jr. N., Bevacqua S. F., Bielan C. V., and Lubowski S. J. «The «directindirect» transition in Ga(As1_:z:P:z:) p-n junctions» Appl. Phys. Lett. 3, 47 (1963b). Holonyak Jr. N., Nuese C. J., Sirkis M. D., and Stillman G. E. «Effect of donor impurities on the direct-indirect transition in Ga(AsP») Appl. Phys. Lett. 8, 83 (1966). Huang K.-H. and Chen T.-P. «Light-emitting diode structure» US Patent 5,661,742 (1997). Ikeda M., Nakano K., Mori Y., Kaneko K. and Watanabe N. «MOCVD growth of AlGaInP at atmospheric pressure using triethylmetals and phosphine» J. Cryst. Growth 77, 380 (1986).
44
I]
FA. 1. J1cmopuR. coaaanuR. cBemoauoaoB
Isihamatsu S. and Okuno Y. «High efficiency GaAlAs LED» OptoelectronicsDev. Technol. 4, 21 (1989). Itaya K., Ishikawa M., and Uematsu Y. «636 nm room temperature cw operation by heterobarrier blocking structure InGaAlP laser diodes» Electronics Lett. 26, 839 (1990). Jacobson N. S., Lee K. N., and Fox D. S. «Reactions of SiC and Si02 at elevated temperatures» 1. A mer. Ceram. Soc. 75, 1603 (1992). Juza R. and Hahn H. «On the crystal structure of CU3N, GaN and InN (translated from German») Zeitschrift fuer anorganische und allgemeine Chemie 239, 282 (1938). Kish F. A. and Fletcher R. M. «AlGaInP light-emitting diodes» in High Brightness Light-Emitting Diodes edited by G. B. Stringfellow and M. G. Craford, Semiconductors and Semimetals 48, p.149 (Academic Press, San Diego, 1997). Kobayashi K., Kawata S., Gomyo A., Hino I. and Suzuki T. «Room-temperature cw operation of AlGaInP double-heterostructure visible lasers» Electron. Lett. 21,931 (1985). Krames M. R., Ochiai-Holcomb M., Hofler G. E., Carter-Coman c., Chen E. I., Tan I.-H., Grillot P., Gardner N. F., Chui H. c., Huang J.-W., Stockman S. A., Kish F. A., Craford M. G., Tan T. S., Kocot C. P., Hueschen M., Posse It J., Loh B., Sasser G., and Collins D. «High-power truncated-invertedpyramid (AlxGal-x)o.sIno.sP/GaP light-emitting diodes exhibiting> 50% external quantum efficiency» Appl. Phys. Lett. 75, 2365 (1999). Krames M. R., Amano H., Brown J. J., and Heremans P. L. «High-efficiency lightemitting diodes» Special Issue of IEEE l. Sel. Top. Quantum Electron. 8, 185 (2002). Kuo C. P., Fletcher R. M., Osentowski T. D., Lardizabel M. c., Craford M. G., and Robbins V. M. «High performance AlGaInP visible light-emitting diodes» Appl. Phys. Lett. 57, 2937 (1990). Loebner E. E. «Subhistories of the light-emitting diode» IEEE Trans. Electron Devices ED-23, 675 (1976). Logan R. A., personal communication (2000). Logan R. A., White H. G., and Trumbore F. A. «P-n junctions in compensated solution grown GaP» 1. Appl. Phys. 38, 2500 (1967a). Logan R. A., White H. G., and Trumbore F. A. «P-n junctions in GaP with external electroluminescence efficiencies '" 2% at 25°C» Appl. Phys. Lett. 10, 206 (1967b). Logan R. A., White H. G., Wiegmann W. «Efficient green electroluminescence in nitrogen-doped GaP p-n junctions» Appl. Phys. Lett. 13, 139 (1968). Logan R. A., White H. G., and Wiegmann W. «Efficient green electroluminescent junctions in GaP» Solid State Electronics 14, 55 (1971). Lorenz M. R. and Binkowski B. B. «Preparation, stability, and luminescnce of gallium nitride» l. Electrochem. Soc. 109, 24 (1962). LossevO. V. «Luminous carborundum detector and detection effect and oscillations with crystals» Philosophical Magazine 6,1024 (1928).
r
I.B. Bu6AuoepafjJU'leCKUU cnUCOK
45
Maruska H. P., personal communication. The photograph of a GaN MIS LED is gratefully acknowledged (2000). Maruska H. P. and Pankove J. I. «Efficiency of GaAsl-xP x electroluminescent diodes» Solid State Electronics 10, 917 (1967). Maruska H. P. and Tietjen J. J. «The preparation and properties of vapourdeposited single-crystalline GaN» Appl. Phys. Lett. 15, 327 (1969). Maruska H. P., Rhines W. C., Stevenson D. A. «Preparation of Mg-doped GaN diodes exhibiting violet electroluminescence» Mat .. Res. Bull. 7, 777 (1972). Maruska H. P., Stevenson D. A., Pankove J. I. «Violet luminescence of Mg-doped GaN (light-emitting diode properties») Appl. Phys. Lett. 22,303 (1973). Maruska H. P., Anderson L. J., Stevenson D. A. «Microstructural observations on gallium nitride light-emitting diodes» l. Electrochem. Soc. 121, 1202. (1974a) Maruska H. P. and Stevenson D. A. «Mechanism of light production in metalinsulator-semiconductor diodes; GaN:Mg violet light-emitting diodes» Solid State Electronics 17, 1171 (1974b). Mueller G. (Editor) Electroluminescence I Semiconductors and Semi metals 64 (Academic Press, San Diego, 2000). Mukai, Takashi, personal communication (2005). Nakamura S., Senoh M., and Mukai T. «Highly p-type Mg doped GaN films grown with GaN buffer layers» lpn. l. Appl. Phys. 30, L 1708 (1991). Nakamura S., Senoh M., and Mukai T. «P-GaN/n-InGaN/n-GaN doubleheterostructure blue-light-emitting diodes» lpn. l. Appl. Phys. 32, L8 (1993a). Nakamura S., Senoh M., and Mukai T. «High-power InGaN/GaN doubleheterostructure violet light-emitting diodes» Appl. Phys. Lett. 62, 2390. (1993b) , Nakamura S., Iwasa N., and Senoh M. «Method of manufacturing p-type compound semiconductor» US Patent 5,306,662 (1994a). Nakamura S., Mukai T., and Senoh M. «Candela-class high-brightness InGaN/AlGaN double-heterostructure blue-light-emitting diodes» Appl. Phys. Lett. 64, 1687 (1994b). Nakamura S., Senoh M., Iwasa N., Nagahama S. «High-brightness InGaN blue, green, and yellow light-emitting diodes with quantum well structures» lpn. l. Appl. Phys. 34, L797 (1995). Nakamura S., Senoh M., Nagahama S., Iwasa N., Yamada T., Matsushita T., Sugimoto Y., and Kiyoku R «Room-temperature continuous-wave operation of InGaN multi-quantum-well structure laser diodes» Appl. Phys. Lett. 69, 4056 (1996). Nakamura S. and Fasol G. The Blue Laser Diode (Springer, Berlin, 1997). Nakamura S. Breakthrough with Anger (Shueisha, Tokyo, 2001). See also Compound Semiconductors 7, No.7, 25 (Aug. 2001) and 7, No.9, 15 (Oct. 2001). Nathan M. I., Dumke W. P., Burns G., Dill Jr. F. H., and Lasher G.J. «Stimulated emission of radiation from GaAs p-n junctions» Appl. Phys. Lett. 1, 62 (1962).
46
Fit. 1. Hcmopu51. c030aHU51. cBemoouoooB
Nichia Corporation Remarkable Technology edited by I. Matsushita and E. Shibata (Nichia Company, Tokushima, Japan, 2004). Nuese C. J., Stillman G. E., Sirkis M. D., and Holonyak Jr. N. «Gallium arsenidephosphide: crystal, diffusion, and laser properties.) Solid State Electronics 9, 735 (1966). Nuese C. J., Tietjen J. J., Gannon J. J., and Gossenberger H. F. «Optimization of electroluminescent efficiencies for vapor-grown GaAsP diodes~ 1. Electrochem. Soc.: Solid State Sci. 116, 248 (1969). Ohba Y., Ishikawa M., Sugawara H., Yamamoto T., and Nakanisi T. «Growth of high-quality InGaAIP epilayers by MOCVD using methyl metalorganics and their application to visible semiconductor lasers.) !. Cry st. Growth 77, 374 (1986). Osram Opto Semiconductors «LEDs bridge time and space.) press release, June 17 (2004). Pankove J. I. and Berkeyheiser J. E. «A light source modulated at microwave frequencies.) Proc. IRE, 50, 1976 (1962). Pankove J. I. and Massoulie M. J. «Injection luminescence from GaAs.) Bull. Am. Phys. Soc. 7, 88 (1962). Pankove J. I., Berkeyheiser J. E., Maruska H. P., and Wittke J. «Luminescent properties of GaN.) Solid State Commun. 8 1051 (1970a). Pankove J. I.. Maruska H. P., and Berkeyh'eiser J. E. «Optical absorption of GaN.) Appl. Phys. Lett. 17, 197 (1970b). Pankove J. I., Miller E. A., Richman D., and Berkeyheiser J. E. «Electroluminescence in GaN.) !. Luminescence 4, 63 (1971a) Pankove J. I., Miller E. A., and Berkeyheiser J. E. «GaN electroluminescent diodes.) RCA Review 32,383 (1971b). Pankove J. I., Miller E. A., and Berkeyheiser J. E. «GaN blue light-emitting diodes.) !. Luminescence 5, 84 (1972). Pankove J. I. and Lampert M. A. «Model for electroluminescence in GaN.) Phys. Rev. Lett. 33, 361 (1974). Perry T. S. «M. George Craford.) IEEE Spectrum, February issue, p. 52 (1995). Pilkuhn M. H. and Rupprecht H. «Light emission from GaAs",Pl-", diodes.) Trans. Metallurgical Soc. AIME 230, 282 (1964). Pilkuhn M. H. and Rupprecht H. «Electroluminescence and lasing action in GaAs",P 1_",.) 1. Appl. Phys. 36, 684 (1965). Pilkuhn M. H. «Light-emitting diodes.) in Handbook of Semiconductors edited by T. S. Moss, 4, edited by C. Hilsum, p. 539 (1981). Pilkuhn M. H., personal communication. The photograph of GaP:Zn-O LED is gratefully acknowledged (2000). Potter R. M., Blank J. M., and Addamiano A. «Silicon carbide light-emitting diodes~ !. Appl. Phys. 40, 2253 (1969). Quist T.M., Rediker R.H., Keyes R.J., Krag W.E., Lax B., McWhorter A.L. and Zeigler H. J. «Semiconductor maser of GaAs.) Appl. Phys. Lett. 1, 91 (1962).
r
I.B. Bu6Jtuoepat/JU'l.eCKUU cnUCOK
47
Rostky G. «LEDs cast Monsanto in unfamiliar role.) Electronic Engineering Times (EETimes) on the internet, see http://eetimes.com/anniversary/designciassics/monsanto.html, Issue 944, March 10 (1997). Round H. J. «A note on carborundum.) Electrical World, 19, 309 (1907). Rupprecht H., Pilkuhn M., and Woodall J. M. «Continuous stimulated emission from GaAs diodes at 77 K.) (First report of 77 K cw laser) Proc. IEEE 51, 1243. (1963). Rupprecht H., Woodall J. M., Konnerth K., and Pettit D. G. «Efficient electroluminescence from GaAs diodes at 300 K.) Appl. Phys. Lett. 9, 221 (1966). Rupprecht H., Woodall J. M., and Pettit G. D. «Efficient visible electroluminescence at 300 K from AIGaAs pn junctions grown by liquid phase epitaxy,) Appl. Phys. Lett. 11, 81 (1967). Rupprecht H., Woodall J. M., Pettit G. D., Crowe J. W., and Quinn H. F. «Stimulated emission from AIGaAs diodes at 77 K.) Quantum Electron. 4,35 (1968). Rupprecht H., personal communication (2000). Schubert E. F., Wang Y.-H., Cho A. Y., Tu L.-W., and Zydzik G. J. «Resonant cavity light-emitting diode.) Appl. Phys. Lett. 60, 921 (1992). Schubert E.F., Hunt N.E.J., Micovic M., Malik R.J., Sivco D.L., Cho A.Y., and Zydzik G. J. «Highly efficient light-emitting diodes with microcavities.) Science 265, 943 (1994). Schubert E. F., Grieshaber W., and Goepfert I. D. «Enhancement of deep acceptor activation in semiconductors by superJattice doping.) Appl. Phys. Lett. 69, 3737 (1996). Seiko Corporation «Pulsar - it's all in the details.) www.pulsarwatcheseurope. com (2004). Shimada J., Kawakami Y., and Fujita S. «Medical lighting composed of LEDs arrays for surgical operation.) SPIE Photonics West: Light Emitting Diodes: Research, Manufacturing, and Applications, 4278, 165, San Jose, January 24-25 (2001). Shimada J., Kawakami Y., and Fujita S. «Development of lighting goggle with power white LED modules.) SPIE Photonics West: Light Emitting Diodes: Research, Manufacturing, and Applications, 4996, 174, San Jose, January 28-29 (2003) Stringfellow G. B. and Craford M. G. (Editors) High Brightness Light-Emitting Diodes Semiconductors and Semimetals 48 (Academic Press, San Diego, 1997). Sugawara H., Ishikawa M., Kokubun Y., Nishikawa Y., and Naritsuka S. «Semiconductor light-emitting device.) US Patent 5,048,035 (1991). Thomas D. G" Hopfield J. J., and Frosch C. J. «Isoelectronic traps due to nitrogen in gallium phosphide.) Phys. Rev. Lett. 15, 857 (1965). Violin E. E., Kalnin A. A., Pasynkov V. V., Tairov Y. M., and Yaskov D. A. «Silicon Carbide - 1968.) 2nd International Conference on Silicon Carbide, published as a special issue of the Materials Research Bulletin, p. 231 (1969). Welker H. «On new semiconducting compounds (translated from German).) Zeitschrift far Naturforschung 7a, 744 (1952).
48
Til.
1. Hcmopufl C03aaliUfl c8emOaUOa08
Welker H. «On new semiconducting compounds II (translated from German») Zeitschrift fur Naturforschung 8a, 248 (1953). Wolfe C. M., Nuese C. J., and Holonyak J r. N. «Growth and dislocation structure of single-crystal Ga(AsP») !. Appl. Phys. 36, 3790 (1965). Woodall J. M., personal communication (2000). Woodall J. M., Potemski R. M., Blum S. E., and Lynch R. «AlGaAs LED structures grown on GaP substrates» Appl. Phys. Lett. 20, 375 (1972).
.ll:onOJIHeHHe peAaKTopa 1. 310ceB O. B. Y HCTOKOB nOJIynpoBo.n:HHKOBOH TeXHHKH: H36paHHble Tpy.n:bI. - 31.: HaYKa, 1972. - 202 c. 2. TIaBJIH'IeHKO B. YI., PbDKHKOB M. B., KMHTa T. r., KapareoprHH-AJIKaeB TI. M., 31eH.n:epMaH A.lO. 3JIeKTpOJIIOMHHecu:eHU:HlI .n:HO.n:OB H3 Kap6H.n:a KpeMHHlI II
1.8. Bu6lluoepacjJU'teC1WU cnUCOK
49
17. lOHOBH'I A.3. CBeT H3 reTeponepexo.n:OB II TIPHpo.n:a. 2001. ,N'Q 6. C. 38-46. 18. lOHOBH'I A.3. CBeTo.n:Ho.n:bl KaK OCHOBa OCBemeHHlI 6y.n:ymero II CBeTOTeXHHKa. 2003. ,N'Q 3. C. 2-7. 19. EaXTH3HH P.3. fOJIy6ble .n:HO.n:bl II COPOCOBCKHH 06p. )!{ypHaJI. 2001. ,N'Q 3. C. 75-83. 20. TPHH'IYK E.
~I 2.2.
H3JlyttameJlbiiafl peIWM6U1iaf1Ufl npu HU31WM ypOBHe B036Y3ICaeHufl
•
•
•
•
Ec
0
0
By
51
fJIasa 2
H3JIYQATEJIbHMI H BE3bI3JIYQATEJIbHMI
o
o
PEKOMBHHAUH.SI PeKOM6HHaUHH 9JIeKTpOHOB H .lI.b1POK B rrOJIyrrpOBO.ll.HHKax 6bIBaeT H3JIy-
PHC. 2.1. I1JIJIIOCTpaU.HH peKoM6HHau.HH 3JIeKTpOHHO-AbIPOQHbIX nap. KOJIHQeCTBO aKTOB peKOM6HHaU.HH nponOpu.HoHaJIbHO npoH3BeAeHHIO KOHu.eHTpau.HH AhlpOK H 3JIeKTpOHoB, T. e. R ex: np
qaTeJIbHOH, T. e. C HcrrYCKaHHeM
ilepeH.lI.eM K peKoM6HHaUHH rrap HOCHTeJIeH. Ha pHC.
2.1
rrpe.ll.CTaBJIeHa
30HHaH .lI.HarpaMMa rroJIyrrpOBO.ll.HHKa, Ha KOTOPOH rrOKa3aHbI 9JIeKTpOHbI H .lI.b1pKH. Hac HHTepecyeT CKOPOCTb YMeHbIlIeHHH KOHueHTpaUHH HOCHTeJIeH, KOTopaH HBJIHeTCH CKOPOCTblO peKoM6HHaUHH H 0603HaqaeTCH
R.
PaccMoT-
pHM Terrepb rrOBe.ll.eHHe 9JIeKTpOHa B 30He rrpOBO.ll.HMOCTH. BepoHTHoCTb ero peKoM6HHaUHH C .lI.b1PKOH rrporropUHOHaJIbHa KOHueHTpaUHH .lI.b1POK, T. e.
R
ex
p.
ilpH 9TOM qHCJIO aKTOB peKoM6HHaUHH 6Y.ll.eT rrporropUHOHaJIb-
HO KOHueHTpaUHH 9JIeKTpoHoB. CJIe.ll.OBaTeJIbHO, CKOPOCTb peKoM6HHaUHH
2.1.
rrporropUHOHaJIbHa
H3JIYQaTeJIbHWI peKoM6HHau.HB nap 9JIeKTpOH-
R
T. e.
,lI;bIpKa
ex
n . p.
rrpOH3Be.ll.eHHIO
dn
R= - dt
TPOHbI H .lI.b1pKH. B YCJIOBHHX paBHOBeCHH, T. e. KOr.ll.a MaTepHaJI He rrO.ll.BepraeTCH HHKaKHM BHeIlIHHM B03.l1.eHCTBHHM, HarrpHMep B03.l1.eHCTBHIO CBeTa H 9JIeKTpHqeCKHX rrOJIeH, BbIITOJIHHeTCH 3aKOH .lI.eHCTBYIOlll.HX Macc, KOTOPbIH rJIaCHT, "ITO rrpOH3Be.ll.eHHe KOHueHTpaUHH 9JIeKTpOHOB H .lI.b1POK rrpH 3a.ll.aHHOH TeMrrepaType HBJIHeTCH KOHCTaHTOH, T. e.
no
H
Po -
(2.1)
paBHOBeCHble KOHueHTpaUHH 9JIeKTpOHOB H .lI.b1POK, a
dt =B·n·p .
(2.3)
2ho Bblpa)KeHHe Ha3bIBaeTCH ypaBHeHueM clwpocmu 6UMOJleKYJlflpHOU peKOM6uHa/-fUU, a B - K03c[Jc[JU/-fUeHmOM 6UMOJleKYJlflpHOU peKOM6uHa/-fUu. v .LI.JIH rroJIyrrpoBO.ll.HHKOB THrra AIIIB THrrHqHble 3HaqeHHH K09
ni
BaH P036pYKa-llloKJIH, orrHcaHHoH B rJI.
2.2.
3.
H3JIyqaTeJIbHWI peKoM6HHau.HB npH HH3KOM ypoBHe B036YlK,lI;eHHB
.lI.JIH HeBblpO)K.lI.eHHbIX JIerHpOBaHHbIX rrOJIyrrpOBO.ll.HHKOB (CM . .lI.JIH rrpHMepa
1993)
dp = --
Ta
Ha3bIBaeTCH co6CTBeHHOH KOHueHTpaUHeH. ::hOT 3aKOH crrpaBe.ll.JIHB TOJIbKO pa60TY Schubert,
9JIeKTpOHoB,
peKoM6HHaUHH, rrpOHCXO.ll.Hlll.eH B e.ll.HHHUY BpeMeHH B e.ll.HltHqHOM o6beMe,
He3aBHcHMo OT Toro, HBJIHeTCH rrOJIyrrpOBO.ll.HHK JIerHpOBaHHbIM HJIH
r.ll.e
.lI.b1POK H
MO)KHO orrpe.ll.eJIHTb TaK:
HeT, B HeM BCer.ll.a rrpHCYTCTBYIOT o6a THrra CBo60.ll.HbIX HOCHTeJIeH: 9JIeK-
nopo = n;,
KOHueHTpaUHH
I1crroJIb3YH K09
I).
1136bITOK HOCHTeJIeH B rrOJIyrrpOBO.ll.HHKaX C03.l1.aeTCH rrpH rrOrJIOlll.eHHH
PaCCMOTpHM .lI.HHaMHKY rrpouecca peKoM6HHaUHH,
T. e.
orrHIlieM ero
B BH.lI.e
ueHTpaUHH HOCHTeJIeH paBHa cyMMe HX paBHOBeCHbIX KOHueHTpaUHH H
rroJIyrrpOBO.ll.HHKa rrO.ll.BepraeTcH B03.l1.eHCTBHIO CBeTa. ilOCKOJIbKY 9JIeKTpOHbI H .lI.b1pKH B036Y)K.lI.aIOTCH H HCqe3alOT B rrpouecce peKOM6HHaUHH rrapaMH,
KOHueHTpaUHH COOTBeTCTBYIOlll.HX H36bITOqHbIX HOCHTeJIeH, T. e.
n = no + ~n; r.ll.e ~n H ~p
-
p = Po + ~p,
YCTaHOBHBiliHeCH KOHueHTpaUHH H36bITOqHbIX 9JIeKTpOHOB H .lI.b1POK paBHbI:
(2.2)
~n(t) = ~p(t).
KOHueHTpaUHH H36bITOqHbIX 9JIeKTpOHOB H .lI.b1pOK. I1crroJIb3YH ypaBHeHHe
1)
eM. KHHrH
[1-2].
(2.3), CKOpOCTI~
BH.lI.e
R
=
(2.4)
peKoM6HHaUHH MO)KHO 3arrHcaTb B
B [no + ~n(t)l· [Po + ~p(t)l·
(2.5)
r
52
t
2.2.
H3ltYlf.ameltbH.a5l peKOM6uH.aUpR npu H.U3KOM yp08H.e 8036YJIC8eH.UR
OPH HHSKOM ypOBHe Bos6Y)K.n.eHHH KOHll.eHTpar:(I1H HOCHTe.neH, o6pasoBaHHbIX sa C'leT reHepall.HH rro.n. Bos.n.eifcTBHeM CBeTa, HaMHoro MeHbille KOHll.eHTpall.HH OCHOBHbIX HOCHTe.nei1, T. e. Lin (no Po). TIo.n.CTaB.nHH ypaBHeHHe (2.4) B (2.5), rro.nY'laeM
«:
, CBeT BhIKJIIO'leH
+
R = B . n; + B (no + Po) . Lin(t) = Ro + Rexc.
~--------------~
(2.6)
TIepBoe c.naraeMoe rrpaBoi1 'laCTH ypaBHeHHH HaSbIBaeTCH pa8ft08eCftOU clwpocmblO peKoM6uftal1Uu, a BTopoe - CKopocmblO peKoM6uftal1uu u36blmO'lftblX ftOCumeJleu.
_ ( i t - G - R - (Go r.n.e Go H Te.nei1.
Ro -
+ Gexc ) - (Ro + Rexc) ,
t
t
!It-
3aBHcHMoCTb KOHll.eHTpall.HH HOCHTe.nei1 OT BpeMeHH orrpe.n.e.nHeTCH rrpH rrOMOmH ypaBHeHHH (2.3): .
dn(t) _
§
(2.7)
~p(t) =~pe-t/T
+
Po
L_~p
~~---
t __________________~:I __________ ~ . t=O
paBHOBeCHble CKOPOCTH reHepall.HH H peKOM6HHall.HH HOCH-
TIPH Bos.n.ei1cTBHH CBen Ha rro.nyrrpOBo.n.HHK B HeM o6pasyIOTcH Hs6bITO'lHble HOCHTe.nH. TIpe.n.rro.nO)KHM, 'lTO B MOMeHT t = 0 Bos.n.ei1cTBHe CBeTa rrpeKpamaeTCH, T. e. G exc CTaHOBHTCH paBHbIM Hy.nIO (pHC. 2.2). TIo.n.CTaBHB ypaBHeHHe (2.6) B (2.7) H C'lHTaH, 'lTO Go = Ro, Hai1.n.eM Bblpa)KeHHe .n..nH CKOPOCTH peKOM6HHall.HH:
d
dtLin(t) = -B(no + Po) . Lin(t).
53
(2.8)
.ll.aHHoe .n.H
t
t _________ J
~n
no PMC.
2.2.
3aBMcMMoCTM OT BpeMeHM
KOHll.eHTpall.Mi% HOCMTeJlei%: .no, B Te'leHMe
M nocJle OnTM'leCKOrO MMnyJlbca B036y)!{.neHM5I. ITpe.nnOJlaraeTC5I, 'lTO nOJlynpoBO.nHMK 06J1a.naeT npOBo.nMMOCTblO
p-TMna,
T. e.
Po »no.
ITOCKOJlbKY reHepall.M5I
.nb1POK M 3J1eKTpOHOB npOMcxo.nMT· napaMM, cnpaBe.nJlMBO COOTHOIlleHMe ~n ITPM HM3KOM ypOBHe B036y)!{.neHM5I, nOKa3aHHOM 3.neCb, ~n
«: Po.
B
=
~p.
60JlbIllMHCTBe
CJlY'laeB paBHOBeCHa51 KOHll.eHTpall.M5I HeOCHOBHbIX HOCMTeJlei% O'leHb MaJla, rr03TOMY
(2.9) r.n.e
Lino
= Lin(t = 0).
no «:
~n
r.n.e Tn H Tp - BpeMeHa )KHSHH 3.neKTpOHOB H .n.b1pOK. HCrrO.nb3YH .n.aHHbli1 pe3y.nbTaT .n..nH rrO.nyrrpOBO.n.HHKOB orrpe.n.e.neHHOrO THrra rrpOBO.n.HMOCTH, ypaBHeHHe (2.8) MO)KHO 3arrHcaTb B yrrpomeHHoi1 <popMe:
3TO ypaBHeHHe MO)KHO sarrHcaTb TaK:
(2.10) 3.n.eCb
T -
BpeMH )KHSHH HocHTe.nei1, orrpe.n.e.nHeMoe Bblpa)KeHHeM T
=
[B(no + po)r l
.
(2.11 )
.ll..nH rro.nyrrpoB0.n.HHKOB C orrpe.n.e.neHHbIM THrrOM .nerHpOBaHHH ypaBHeHHe (2.11) MO)KHO rreperrHcaTb B BH.n.e
1
1
B·po
B·NA
Tn=--=---
1
1
B·no
B·ND
Tp=--=---
.n..nH p-nma,
(2.12)
.n..nH n-THrra.
(2.13)
liLin(t) = _ ~n(t) dt Tn liLip(t) = _ ~p(t) dt . Tp
.n..nH p-THrra,
(2.14)
.n..nH n-THrra.
(2.15)
3TH Bblpa)KeHHH 'laCTO Ha3bIBaIOT ypa8fteftUflMU CKOpOCmU MOftOMOJleKyJlflPftOU peKoM6uftal1UU. Ha pHC. 2.2 KOHll.eHTpall.HH OCHOBHbIX If HeOCHOBHbIX HOCHTe.nei1 B rro.nyrrpoBo.n.HHKe p-THrra rrOKa3aHbI B BH.n.e
54
2.3.
.n.eHCTBHeM cBeTa, HaMHoro MeHhllIe KOHu;eHTpaU;HH OCHOBHhIX HOCHTeJIeH.
H3JlyttameJlbiiaR peKoM6uHaupR npu BblCOKOM ypOBHe B036YJlCaeHUR
~ B= /c - ~"'T~(BN)I
O.n.HaKo rrpH 3TOM KOHu;eHTpau;mI HOCHTeJIeH, o6pa30BaHHhlx rro.n. B03.n.eHCTBHeM cBeTa, HaMHoro rrpeBhIlliaeT KOHu;eHTpaU;H10 HeOCHOBHhIX HOCHTeJIeH.
II
10- 10
npH
-
TIo OKOHqaHHH HMrrYJIhCa OrrTHqeCKOrO B036Y2K.n.eHHH KOHu;eHTpaU;HH
CM
3
..&..J
HeOCHOBHhIX HOCHTeJIeH HaqHHaeT CHH2KaThCH rro 3KcrroHeHU;HaJIhHoMY 3a-
~
KOHY C xapaKTepHCTHqeCKOH rrocToHHHOH BpeMeHH T, Ha3hIBaeMoH BpeMelieM :JICU3liU lieOCliOBliblX liOCumeJl.eu. KOHu;eHTpaU;HH OCHOBHhIX HOCHTeJIeH CHH2KaeTCH C TOH 2Ke rrOCTOHH-
~. A A
~
A
~
HOH BpeMeHH. O.n.HaKO B rrpou;ecce peKOM6HHaU;HH HCqe3aeT TOJIhKO OqeHh lie6oJl.bUlafl, 8oJl.fI, OCHOBHhIX HOCHTeJIeH, 'ITO TaK2Ke rrOKa3aHO Ha pHC. 2.2. GaAs
TIPH HH3KOM ypOBHe B036Y2K.n.eHHH cpe.n.Hee BpeMH, Tpe6yroIIJ.eeCH OCHOB-
A
HhIM HOCHTeJIHM .n.JIH peKoM6HHaU;HH, HaMHoro rrpeBhIlliaeT BpeMH 2KH3HH
II HIt-!
1
HeOCHOBHhIX HOCHTeJIeH. Ha rrpaKTHKe qaCTO CqHTaroT, 'ITO BpeMH 2KH3HH OCHOBHhIX HOCHTeJIeH HBJIHeTCH 6eCKOHeqHO 60JIhllIOH BeJIHqHHoH.
~
~~
T=300 K
Hwang, 1971 Ehrhardt et aI., 1991 Nelson and So1?ers 1978a, 1978b Ahrenkiel,1993
1015
MOCTH BpeMeHH 2KH3HH HeOCHOBHhIX HOCHTeJIeH B GaAs OT KOHu;eHTpaU;HH JIempyroIIJ.HX rrpHMeceH. TeOpeTHqeCKaH 3aBHCHMOCTh paCCqHTaHa rro
B = 1O-lOcM3/c. B
A
.~
2
Ha pHC. 2.3 rrOKa3aHhI TeOpeTHqeCKHe H 3KcrrepHMeHTaJIhHhle 3aBHCH-
cpopMyJIe (2.10) rrpH
55
1016
1017
KOHII.eHrp8II.HlI JIerHpYIOIII.eii npHMeCH
lOIS
N,
CM-
3
HOMHHaJIhHO HeJIempOBaHHoM
MaTepHaJIe BpeMH 2KH3HH HeOCHOBHhIX HOCHTeJIeH, H3MepeHHoe B GaAs
PHC. 2.3.
rrpH KOMHaTHOH TeMrrepaType, COCTaBHJIO 15 MKC (Nelson, Sobers, 1978a; 1978b) 1).
II.HH JIempYIOlIl.HX IIpHMeceH, IIOJIyqeHHali .D,JIli GaAs IIpH TeMIIepaType 300 K. BpeMli
3aBHcHMoCTb BpeMeHH JKH3HH HeOCHOBHblX HOCHTeJIeH OT KOHII.eHTpa-
JKH3HH
OIIpe.D,eJIlIJIOCb
IIO pe3YJIbTaTaM
H3MepeHHH
BpeMeHH
3aTyxaHHlI
JIIOMHHeCII.eHII.HH. TOqKH Ha rpa!jJHKe COOTBeTCTBYIOT .D,aHHbIM (Nelson, Sobers,
YnpalKHeHHe. OnpeaeJleHUe BpeMeHU JlCU3HU HeOCHOBHblX HOCUmeJleU Tpe6yeTcli Orrpe.D,eJIHTb BpeMli JKH3HH HeOCHOBHbIX HOCHTeJIeH B GaAs p-THIIa 15 CM- 3 H lOIS CM- 3 . K03!jJqmII.HeHT IIpH KOHII.eHTpaII.HlIX JIempYIOlIl.HX IIpHMeCeH 10 6HMOJIeKYJIlipHOH peKOM6HHaII.HH CqHTaeTCli paBHblM
B = 1O-lOcM3/c.
1978a, 1978b) H (Ahrenkiel, 1993), IIOJIyqeHHblM Ha HOMHHa~bHo H eJIerH p OBaHHoM 3 MaTepHaJIe C KOHII.eHTpaII.HeH IIpHMeceH ~ 10 CM-
npe.D,IIO-
Tor.n.a ypaBHeHHe (2.3) M02KHO 3arrHcaTh B BH.n.e
JIaraeTClI, 'ITO y.D,aJIOCb IIOJIyqHTb 6eCIIpHMeCHbIH GaAs. OII.eHHTe BpeMli JKH3HH HOCHTeJIeH B TaKOM MaTepHaJIe, eCJIH HX KOHII.eHTpaII.HlI COCTaBJIlIeT: 2. 106 cM- 3 .
(2.16)
PemeHHe npH npH
15
3
NA = 10 CM- , NA = 1O IS CM- 3 ,
Tn Tn
= 10 = 10
B HeJIempOBaHHOM GaAs T
=
MKC.
PeIIIHM 3TO .n.HcpcpepeHU;HaJIhHOe ypaBHeHHe MeTo.n.OM pa3.n.eJIeHHH rrepeMeH-
HC.
HhIX rrpH HaqaJIhHhIX YCJIOBHHX ~n(O)
2500 c.
= ~no:
06CY.D,HTe, KaK BpeMli JKH3HH HOCHTeJIeH H KOHII.eHTpaII.HlI JIempYIOlIl.eH IIpH-
~n(t) =
MeCH BJIHlIlOT Ha CKOPOCTb MO.D,YJIlIII.HH CBeTO.D,HO.D,OB, HCIIOJIb3yeMblx B CHCTeMax CB1I3H.
B
2.3.
H3JIyqaTeJIbHaB peKOM6HHa:U;HH npH BbICOKOM ypOBHe B036YJK~eHHH
TIPH BhICOKOM ypoBHe B036Y2K.n.eHHH KOHu;eHTpaU;HH HOCHTeJIeH, o6pa30BaHHhIX 3a CqeT B036Y2K.n.eHHH rro.n. B03.n.eHcTBHeM CBeTa, HaMHoro 60JIhllIe paBHoBecHoH KOHu;eHTpaU;HH HOCHTeJIeH, T. e. ~n
I) eM. IIpHopHTeTHble pa60TbI JJ:.3. fap6Y30Ba [3].
:» (no + po).
1 Bt
-I.
+ .6.110
(2.17)
OTJIHqHe OT CJIyqaH HH3Koro ypOBHH B036Y2K.n.eHHH 3.n.eCh CHH2KeHHe
KOHu;eHTpaU;HH HOCHTeJIeH rrpOHcxo.n.HT He rro 3KcrrOHeHU;HaJIhHOMY 3aKOHY. TIPH C06JIro.n.eHHH 3KcrrOHeHU;HaJIhHOrO 3aKOHa .n.JIH YMeHhllIeHHH KOHu;eHTpaU;HH CO 3HaqeHHH
~no
.11.0 3HaqeHHH
~noe-l
Tpe6yeTcH BpeMH T.
I1crroJIh3YH TO 2Ke caMoe orrpe.n.eJIeHHe .n.JIH CJIyqaH He3KcrrOHeHU;HaJIhHOrO CHH2KeHHH KOHu;eHTpaU;HH, «rrOCTOHHHYro BpeMeHH» M02KHO BhlqHCJIHTh H3 HaKJIOHa 3aBHCHMOCTH (2.17):
T(t)
=
.6.n(t) (d.6.n(t)/dt) .
(2.18)
Fit. 2. H3ltytf.ameltbHaJl U 6e3bl3ltYtf.ameltbHaJl pelwM6uHau,UJl
56
nO,nCTaBIfB Bblpa2KeHHe
(2.17)
B
(2.18),
rrOJIyqHM CJIe,nYlOmee orrpe,neJIeHHe
rrOCTOHHHOH BpeMeHH ,nJIH CJIyqaH He3KcrrOHeHUHaJIbHOrO 3aTyxaHHH:
1
r(t) = t+ B.D. .
TaKHM o6pa30M «rrOCTOHHHaH 2KeHHH
(2.19)
BpeMeHH~
no
.
rI \
57
2.5. 3amyxanue 1t1OMUnecu,enu,uu CillIbHoe B036)')K.l1;eHHe .D.n~NA «pacnIHyroe 3KCIIOHeHWiaJThHOe 3aryxaHHe» /)/ cna60e B036)')K.l1;eHHe
a
(2.19)
/
-
.D.n«NA
3aBHCHT OT BpeMeHH. 113 Bblpa-
TaK2Ke CJIe,nyeT, qTO C TeqeHHeM BpeMeHH BpeMH 2KH3HH
HeOCHOBHblX HOCHTeJIeH pacTeT. Qepe3 ,nOCTaTOqHO 60JIbIIIOH rrpOMe2KYToK BpeMeHH cHTyaUHH CTaHeT TaKOH 2Ke, KaK rrpH HH3KOM ypoBHe B036Y2K,neHHH, a rro3ToMY H BeJIHqHHa Bblpa2KeHHeM (2.11).
r
BpeMH
rrpH6JIH3HTCH K 3HaqeHHIO, orrpe,neJIHeMoMY
6
Q '--' ~
=:
2.4.
~
YpaBHeHHe CKOPOCTH 6HMOJIeKYJUlpHOH
peKoM6HHaU;HH ,lI;JI.H CTPYKTYP C KBaHTOBbIMH .HMaMH KBaHTOBble HMbI rrpe,nCTaBJIHIOT C060H Y3KHe 06JIaCTH, pacrrOJI02KeHHble Me2K,ny ,nByMH 6apbepHbIMH CJIOHMH, Ha3HaqeHHe KOTOPbIX 3aKJIIOqaeTCH B OrpaHHqeHHH cBo6o,nHbIX HOCHTeJIeH.
L Qw ,
a rrJIOTHOCTH HOCHTe-
JIeH B ee 30He rrpoBo,nHMOCTH H BaJIeHTHOH 30He -
COOTBeTCTBeHHO n2D
npe,nrrOJI02KHM, qTO IIIHpHHa HMbI paBHa
(3D) KOHueHTpaUHH 3JIeKTpOHoB n 2D / L QW H p2D / LQw. nO,nCTaBHB
H p2D. Tor,na 3
(2.5),
~
~
r=const
~:.:
~
BpeMH
~ ~~~~~~~~~~~~~~~~~~~---P C 24
3aTyxaHHe JIIOMHHeCueHUHH B CJIyqae HH3Koro H BblCOKoro ypoBHe~ (a). I1ocToHHHble BpeMeHH B cJIyqae HH3Koro H BblCOKoro ypoBHeH B036y)!{.n:eHHH (6)
B~36y~;eHHH
HaH,neM ,nJIH ,naHHoro CJIyqaH CKOPOCTb OrrTHqeCKOrO B036Y2K,neHHH. I1HTeHcHBHoCTb JIIOMHHeCueHUHH rrporropUHo-
(2.20) 3TO ypaBHeHHe HJIJIIOCTpHpyeT ,nOCTOHHCTBa CHCTeM C KBaHTOBbIMH HMa-
HaJIbHa CKOPOCTH peKoM6HHaUHH. BblqHCJIHTb rrOCJIe,nHIOIO COOTBeTCTBeHHO rrpH HH3KOM H· BbICOKOM ypoBHe B036Y2K,neHHH M02KHO C rrOMOmblO cJIe,nylOmHX Bblpa2KeHHH -
CM. ypaBHeHHH
(2.17)):
R=---dt
Ha pHC.
2.4
(2.21)
r -B (Bt
+ .D.noI)
(2.22)
2
CXeMaTHqHO rrOKa3aH crra,n JIIOMHHeCueHUHH rrOCJIe B036Y2K,ne-
3TOM CJIyqae
HHH KOPOTKHM OIITHqeCKHM HMrrYJIbCOM. npH HH3KOM ypoBHe B036Y2K,neHHH
M02KHO 3aMeHHTb Ha IIIHPHHY
JIIOMHHeCueHUHH YMeHbIIIaeTCH rro 3KcrrOHeHUHaJIbHOMY 3aKOHY C rrOCTO-
rrepeCTaeT COOTBeTCTBOBaTb ee
LQW
dt dn(t) _
CM. ypaBHe-
npH ,nOCTaTOqHO MaJIOH IIIHpHHe KBaHTOBOH HMbI BOJIHOBaH
H
R = _ dn(t) = _ .D.no e-t/r,
MH H ,nBOHHbIX reTepocTpYKTyp. YMeHbIIIeHHeM IIIHpHHbI KBaHTOBOH HMbI y,naeTCH rrOJIyqaTb BblCOKHe 3HaqeHHH o6beMHoH (3D) KOHueHTpaUHH HO3 CHTeJIeH (qHCJIO HOCHTeJIeH B 1 CM ). B pe3YJIbTaTe YCHJIeHHH H3JIyqaTeJIbHOH peKoM6HHaUHH BpeMH 2KH3HH HOCHTeJIeH COKpamaeTcH HHe (2.11), qTO rrpHBo,nHT K pOCTy KBaHTOBoro BbIxo,na.
(2.9)
KOTopaH rrpH
B
MaJIOH rrpOTH2KeHHOCTH HMbI rrpeBblIIIaeT 3HaqeHHe
L Qw ,
rrOCKOJIbKY BOJIHOBaH
100
A.
MaTepHaJIO~
HHHOH BpeMeHH
B
CJIyqae BblCOKoro ypOBHH B036Y2K,neHHH 3aTyxaHHe
UHaJIbHble
2.5.
r.
JIIOMHHeCueHUHH HOCHT He3KcrroHeHUHaJIbHbIH xapaKTep. Bce He3KcrrOHeH-
[-t/r(t)].
B 60JIbIIIHHCTBe CJIyqaeB rrOCTOHHHble BpeMeHH pacTyT co
BpeMeHeM. TaKoH THrr
3aTyxaHHe JIIOMHHecu;eHU;HH
motl 3K.CnOHeHI,fUaJlbHotl cfJYHK.I,fUetl, HbIH, qeM 3KcrroHeHUHaJIbHbIH.
YMeHbIIIeHHe KOJIHqeCTBa HOCHTeJIeH B rrOJIyrrpOBo,nHHKax M02KeT 6bITb orrpe,neJIeHO rro 3aTyxaHHIO JIIOMHHecueHUHH rrOCJIe KopOTKoro HMrryJIbCa
paCm51HY-
orrHCbIBalOmeH crra,n 60JIee Me,nJIeHu
CaMoe pacrrpocTpaHeHHoe Bblpa2KeHHe ,nJIH pacTHHYTOH 3KcrrOHeHUHaJIbHOH
f3 -
napaMemp, xapaK.-
58
FIt. 2. H3JlY'tameJlbHafl U 6e3bt3JlY'lameJlbHafl peKoM6uHau,ufl
mepU3Y1OUfUU cmeneHb ynopflaO
f3
~ 1/2 -
CI1JIbHO HeyrropH,no'IeHHoH CTPYKTYPOH. 3Ha'IeHI1H
f3
MaTepl1aJI o6JIa,naeT
r
2.6. Ee3bt3JlY'lameJlbHafl peKoM6uHau,Ufl
59
8 06'beMe MamepUalla
l
!
!
~ 1/2 xapaKTepHbI
,nJIH TaKI1X MaTepl1aJIOB, KaK CTeKJIO (Phillips, 1996) 11 HeyrropH,no'IeHHble rrOJIyrrpoBo,nHI1KI1. He3KcrrOHeHUl1aJIbHOe 3aTyxaHI1e 6bIJIO OTKPbITO
3amyxaHueM KOllbpaYUta. napaMeTPbI ,nI1HaMI1'IeCKI1X rrpoueccOB peKoM611HaUl111 HOCI1TeJIeH B CBeTo,n110,nax orrpe,neJIHIOT I1X 6bIcTpo,neHcTBl1e, T. e. BpeMH I1X BKJIIO'IeHI1H 11 BbIKJIIO'IeHI1H (CKOpOCTb MO,nYJIHUI1I1). CKOPOCTb rrepeKJIIO'IeHI1H CBeTo,n110,nOB, I1CrrOJIb3yeMblx B CI1CTeMaX CBH311, OrpaHI1'II1BaeTCH BpeMeHeM )K113HI1 HeOCHOBHbIX HOCI1TeJIeH, KOTopoe MO)KeT 6bITb YMeHbIIleHO JII160 rrOBbIIIleHl1eM CTerreHI1 JIempOBaHI1H aKTI1BHOH 06JIaCTI1, JII160 YBeJII1'IeHl1eM B HeH
PIfC. 2.6. 30HHble .D.lfarpaMMbI, HJIJIIOCTPlfpYIOru;He pa3Hble TIfIIbI. JIIOMHHeCueHUHIf: 6e3bI3JIYQaTeJIbHaH peKOM6lfHaUlfH Qepe3 rrpHMecHble UeHTpbl, 6 - 6e3b13JIyQaTeJIbHaH.OJKe-peKOM6IfHaUIfH, 8 - 1f3JIYQaTeJIbHaH peKOM6lfHaUHH
a_
KOHueHTpaUl111 I1H)KeKTl1pOBaHHbIX HOCI1TeJIeH. ,UJIH rrOJIY'IeHI1H BbICOKI1X KOHueHTpaUI1H HOCI1TeJIeH 11, CJIe,nOBaTeJIbHO, CHI1)KeHI1H I1X BpeMeHI1 )K113-
CymecTByeT HeCKOJIbKO cpI1311'IeCKI1X MeXaHI13MOB 6e3bI3JIyqaTeJIbHOH
HI1 I1CrrOJIb3YlOTCH reTepOCTpYKTypbI, y,nep)KI1BalOml1e cBo6o,nHble HOCI1TeJII1
peKOM6I1HaUI1I1. npl1'II1HOH ee 'IaCTO HBJIHeTCH HaJII1'Il1e B KpI1CTaJIJII1'IeCKOH peIIleTKe pa3JII1'IHbIX ,necpeKTOB -
B Y3KI1X KBaHTOBbIX HMax.
,necpeKTOB, Kax
2.6.
Be3bI3J1YQaTeJlbHaB peKoM6HHaU;HR B 06'beMe
,nI1CJIOKaUI1H
co6CTBeHHbIMI1
aTOMOB rrpl1MeCeH,
11 I1X CKOrrJIeHI1H.
,necpeKTaMI1
MoryT
B
6bITb
CJIO)KHbIX
Me)K,nOY3JII1H
aTOMOB rrOJIyrrpOBo,nHI1Ka. Co6CTBeHHble u ,necpeKTbI 'IaCTO PeKOM611HaUl1H B rrOJIyrrpOBo,nHI1KaX 6bIBaeT B OCHOBHOM ,nByX BI1,nOB: 11
6e3bl3IlY
Ha PI1C. 2.5
11
BaKaHCl111
(Longini, Greene, 1956; Baraff, Schluter, 1985). no cTpyKType 3HepreTI1'IeCKI1X ypoBHeH TaKl1e ,necpeKTbI CI1JIbHO OTJII1'IaIOTCH OT 3aMemaeMbIX
MaTepHaJia
U3llY
co6CTBeHHbIX
rrOJIyrrpOBo,nHI1-
rroKa3aHo, 'ITO B
o6pa~YIOT
O,nI1H
I1JII1 HeCKOJIbKO 3HepreTI1'IeCKI1X ypOBHel1 BHyTPI1 3arrpemeHH0l1 30HbI rro-
Ka)K,nOM aKTe 113JIY'IaTeJIbHOH peKOM611HaUl111 rrpOI1Cxo,nI1T B036Y)K,neHl1e
JIyrrpOBo,nHI1Ka. 3HepreTI1'IeCKl1e ypOBHI1 B 3arrpemeHHOH 30He ~OJIyrrpOBo,nHI1Ka HBJIH-
o,nHoro cpOTOHa C 3HepmeH, paBHOH IIll1pl1He 3arrpemeHHOH 30HbI. B XO-
IOTCH 3cpcpeKTI1BHbIMI1 ueHTpaMI1 6e3bI3JIY'IaTeJIbH0I1 peKOM6I1HaUI1I1,
OCO~
,ne 6e3bI3JIY'IaTeJIbHOH peKOM611HaUl111 3HepmH 3JIeKTpOHa pacxo,nyeTcH Ha
6eHHO eCJII1 3TI1 ypOBHI1 pacrrOJIaralOTCH rrpl16JII1311TeJIbHO B cepe,nI1He
3TO~
B036Y)K,neHl1e KOJIe6aHI1H aTOMOB KpI1CTaJIJII1'IeCKOH peIIleTKI1, T. e. rrpeo6-
30HbI. Ha Pl1c. 2.6 CXeMaTI1'IHO rrpe,nCTaBJIeHa peKoM611HaUI1H HOCI1TeJIel1
pa3yeTcH B TerrJIO. no 3TOH rrpl1'II1He B 113JIY'IalOm11X YCTpoHCTBax aKTbI
'Iepe3 rrpl1MeCHble ypOBHI1. TaKl1e rrpl1MeCHble ypOBHI1 'IaCTO Ha3bIBalOT
6e3bI3JIY'IaTeJIbHOH peKoM611HaUl111 C'II1TaIOTCH He)KeJIaTeJIbHbIMI1.
ueHTpaMI1 mYUteHUfl IlIOMUHectfeHtfuu. PeKoM611HaUI11O cBo6o,nHbIX HOCI1TeJIeH ypOBHI1 rrepBbIMI1
'Iepe3
rJIy6oKI1e
Ha'IaJII1 113Y'IaTb lIIoKJII1, PI1,n 11 XOJIJI
rrpl1MeCHble (Hall,
1952;
Shockley, Read, 1952), rr03TOMY ee 'IaCTO TaK 11 Ha3bIBa1OT: peKoM611HaUI1H lIIoKJII1-PI1,na-XoJIJIa
1).
B pa60Te IIIOKJII1 11 PI1,na (Shockley, Read, 1952)
rrpl1Be,neHo Bblpa)KeHl1e ,nJIH CKOPOCTI1 6e3bI3JIY'IaTeJIbHOH 'Iepe3 ueHTpbI 3aXBaTa (JIOBYIIlKI1) C 3Heprl1HMI1 rrpl1MeCeH
RSR
r,ne PI1C. 2.5. I13JIyqaTeJIbHaH peKOM6HHaUlfH 3JIeKTpOHHO-.D.bIPOqHoil: IIapbI, COIIpOBOJK~ .D.aIOru;aHCH B036YJK.D.eHlfeM
=
I)
peKoM611HaUI1~
11 KOHueHTpaUl1el1
NT: (NTVp(Jp)-I
tln = tlp,
11 O"p -
ET
Vn 11
(no
potln + notlp + tlntlp + nl + tln) + (NTVn(Jn)
(2.23) I
(po
+ PI + tlp)'
vp - TerrJIOBble CKOPOCTI1 3JIeKTpOHoB 11 ,nbIPOK, O"n
rrorrepe'IHbIe Ce'IeHI1H 3aXBaTa JIOByIIleK. BeJII1'II1HbI nl 11 PI orrpe-
eM. KHlffH
[1-2] .
~!
I~ I
.n:eJHlIOT KOHu;eHTpaU;IUI 3JIeKTpOHOB M .n:h1POK, .n:JIH KOTOPhlX BhIIIOJIHHIOTCH COOTHOllleHMH
nl r.n:e
EFi -
= nieXp (
ET - EFi) kT '
PI = ni exp (
EFi - ET) kT '
(2.24)
ypOBeHh
BpeMH 2KM3HM M36hITOqHhiX 3JIeKTpOHOB B CJIyqae 6e3hI3JIyqaTeJIhHOii peKOM6MHaU;MM M02KHO rrOJIyqMTh
.!. _ T
(NT l/p (Jp)
npe.n:rrOJI02KMM,
I
qTO
M3
ypaBHeHMH
Po + no + L\n (no + nl + L\n) + (NTl/n(Jn)-1 (Po
»
OCHOBHhle HOCMTeJIM -
61
06'beMe MamepUaJla
)lJIH c06cTBeHHhlx rrOJIyrrpoB0.n:HMKOB, y KOTOPhIX
I
I i
Ti = Tno ( 1 + PI+nl) ~ = Tna EFi -
r.n:e
ypoBeHh
B
B6JIM3M
06hlqHO pacrrOJI02KeH
ET = EFi,
+ PI + L\p) .
B
no
= Po = ni,
3TO ypaB-
HeHMe yrrp0l!l-aeTcH:
ch
rYMeHT
[1 + h(ET-EFi)] kT '
(2.31)
C
c06CTBeHHoM
rrOJIyrrpoBo.n:HMKe,
KOTOPhlii
cepe.n:MHhI 3arrpemeHHoii 30HhI. Kor.n:a ap-
paBeH HyJIIO, OHa MMeeT MMHMMyM. n03TOMY rrpM
T. e. Kor.n:a rrpMMeCHhlii ypOBeHh pacrrOJI02KeH
B6JIM3M
cepe.n:MHhI
(2.25)
3arrpemeHHoii 30HhI, BpeMH 2KM3HM HeOCHOBHhIX HOCMTeJIeii rrpM COBepllle-
MaTe-
TaKMX
HMM aKTOB 6e3hI3JIyqaTeJIhHOii peKOM6MHaU;MM MMHMMaJIhHO. npM HaJIMqMM
paCCMaTpMBaeMhlii rrOJIyrrpOBo.n:HMK HBJIHeTCH
p-TMrra. 113 3Toro CJIe.n:yeT, qTO no, Po »PI. npM He60JIhlllMX T. e. Po COCTOHHMH, rrpM KOTOPhIX tln «: Po, BpeMH pMaJIOM
RSR = tln/T:
r
2.6. Be3bl3JlYliameJlbH.aJl pelwM6uH.a/{uJl
.n:hIPKM,
u;eHTpOB 3aXBaTa BpeMH 2KM3HM HOCMTeJIeii orrpe.n:eJIHeTCH Bhlpa2Ke-
T
HMeM
~
2Tno.
113 ypaBHeHMH
OTKJIOHeHMHX OT paBHOBeCHoro
ypOBHM -
2KM3HM HeOCHOBHhIX HOCMTeJIeii
OHM paCrrOJI02KeHhI
orrpe.n:eJIHeTCH Bhlpa2KeHMeM
(2.31)
CJIe.n:yeT, qTO rJIy60KMe rrpMMeCHhle
3
113 Bhlpa2KeHMH
B6JIM3M
(2.31)
Cepe.n:MHhI 3arrpemeHHOii 30HhI.
.~
M02KHO TaK2Ke rrOJIyqMTh TeMrrepaTypHYIO
3aBMCM-
MOCTh peKOM6MHaU;MM 1Il0KJIM-PM.n:a: rrpM YBeJIMqeHMM TeMrrepaTyphI BpeMH
(2.26)
2KM3HM HOCMTeJIeii B xo.n:e 6e3hI3JIyqaTeJIhHOii peKOM6MHaU;MM cOKpaUfaemCR. B pe3YJIhTaTe 3TOrO rrpM BhICOKMX TeMrrepaTypax 3
ECJIM
3JIeKTpOHhI HBJIHIOTCH OCHOBHhIMM HOCMTeJIHMM, .n:JIH HaX02K.n:eHMH
BpeMeHM 2KM3HM HeOCHOBHhIX HOCMTeJIeii (.n:h1pOK) MCrrOJIh3yeTCH aHaJIOmqHoe Bhlpa2KeHMe
M3-
JIyqaTeJIhHOii Me2K30HHOii peKOM6MHaU;MM YMelibUlaemCR. MaKCMMaJIhHaH MHTeHCMBHOCTh M3JIyqeHMH B npRM030lilibiX nOJlynpoBOaliUKaX Ha6JIIO.n:aeTCH rrpM HM3KMX TeMrrepaTypax. O.n:HaKO HeKOTophle CBeTOM3JIyqalOmMe YCTpoiiCTBa CTPOHTCH MMeHHO
(2.27)
Ha
rrpMHU;Mrre
M3JIyqaTeJIhHOii
peKOM6MHaU;MM
Ha rJIy60KMX
rrpMMeCHhIX
ypOBHHX. CaMhIM HpKMM rrpMMepOM HBJIHIOTCH CMCTeMhI Ha OCHOBe GaP,
113 3TMX
Bhlpa2KeHMii BM.n:HO, qTO CKOPOCTh peKOM6MHaU;MM, Haii.n:eHHaH rro
JIempOBaHHoro a30TOM. 113 Mo.n:eJIM 1Il0KJIM-PM.n:a CJIe.n:yeT, qTO C POCTOM
ypaBHeHMHM 1Il0KJIM-PM.n:a, orrpe.n:eJIHeTCH CKOPOCThlO 3aXBaTa HeOCHOBHhIX
TeMrrepaTyphI CKOPOCTh peKOM6MHaU;MM qepe3 rJIy60KMe u;eHTphI 3aXBaTa
HOCMTeJIeii. npe.n:rrOJIaraH, qTO BepOHTHOCTh 3aXBaTa OCfWBliblX HOCMTeJIeii
YBeJIMqMBaeTCH.
HaMHoro rrpeBhllllaeT BepOHTHOCTh 3aXBaTa lieOCIiOBliblX HOCMTeJIeii, M02KeM rreperrMcaTh ypaBHeHMe (2.25) B BM.n:e
liUKax,
npM
tln
«: Po
TpO (no
(2.28)
+ nl + L\n) + Tno (Po + PI + L\p).
+ r.
Po
3TO
03HaqaeT,
peKoM6MHaU;MH
~
eM MJIM McrrYCKaHMeM
Po + PI r. nOpo+no·
(2.29)
113 rrOCJIe.n:Hero ypaBHeHMH BM.n:HO, qTO rrpM He60JIhlllMX OTKJIOHeHMHX OT paBHOBeCHoro COCTOHHMH BpeMH 2KM3HM HeOCHOBHhIX HOCMTeJIeii B co6CTBeHHhIX rrOJIyrrpOBo.n:HMKax rrpaKTMqeCKM He M3MeHHeTCH. Terreph rrp e.n:rrOJI02KMM, qTO rrpMMeCHhle u;eHTphI 3aXBaThIBalOT .n:h1pKM M
T = Tno
M3JIyqaTeJIhHaH
Bcer.n:a cOrrpOB02K.n:aeTcH rrOrJIOmeHM-
no + nl + L\n Po+no
3JIeKTpOHhI C o.n:MHaKOBoii CKOPOCThlO, T. e. M3 ypaBHeHMH (2.29) CJIe.n:yeT, qTO
HarrpMMep GaP, rrocpe.n:HM-
HBJIHIOTCH qTO
OHO yrrpomaeTcH .n:o
Po + PI T -".. - 'no--po+no
lienpRM030lilibiX nOJlynpoBoa-
KaMM B M3JIyqaTeJIhHhIX rrepexo.n:ax
Po +no +L\n T
B
VnO"n
(1 + po+no Po + PI).
= VpO"p
MTnO
= TpO.
Tor.n:a
CKOJIhKY KOJIMqeCTBO
M ·qMCJIO aKMX
TOB peKOM6MHaU;MM, CBH3aHHhIX C rrOrJIOmeHMeM. B OT
Herrocpe.n:CTBeHHoii
rJIy60KMX
rrpMMeCHhIX
6JIM30CTM u;eHTpOB
MHTeHCMBHOCTh JIIOMMHeCu;eHU;MM rra.n:aeT. 113-3a OTHOCMTeJIhHO He60JIh-
(2.30)
1II0ro HhIX
3
BJIMHHMe aecfJeKmoB
e.n:MHMqOTCJIe-
PHC.
2.7.
MHKPOCHHMOK
MHHecueHUHH
KaTO.l(OJIIO-
9ITHTaKCHaJIbHOrO
CJIOH
GaAs. TeMHble ITHTHa YKa3bIBaIOT Ha 60JIbllIHe CKOITJIeHHH UeHTPOB 6e3bI3JIyqaTeJIbHOH
peKoM6HHaUHH
bert, 1995)
(Schu-
2.6. Be3bt3AY'lameAbl-taR peKoM6uflau,UR
62
63
8 06'beMe MamepuaAa
OpHqHHaMH'B03HHKHOBeHHH rJIy60KHX ueHTpOB 3aXBaTa 3JIeKTpOHOB MoryT 6bITb
GaN n-nrna/cam}lMp T=295 K
co6cmBelilibte aecpeKmbt -
BaKaHCHH aTOMOB raJIJIH5.I, He)!{e-
JIaTeJIbHbIe npHMeCH, ,n:HCJIOKaUHH, 06be,n:HHeHH5.I npHMeCb-,n:e
1992)
npHBe,n:eHo ,n:OBOJIbHO no,n:po6Hoe
onHcaHHe pa3JIHqHbIX ,n:e
6,5HM
(60 M3B)
yaapliafl O:JICe-peKoM6uliaI1Ufl. JIIOMHHeC~eHIJ;IDI Ha my60Iillx
5.lBJIHeTCH
npH peKoM6HHaUHH nap 3JIeKTpoH-,n:bIpKa, npH6JIH3HTeJIbHO paBHaH pacceHBaeTC5.I
npHMeCHbIX YPOBIDIX
peKoM6HHaUHH
OpH ee npoTeKaHHH 3HeprHH, BbI,n:eJIHeMaH
Ha
B036y)!{,n:eHHe
JIH60
cBo6o,n:Horo
3JIeKTpOHa
B
Eg , 30He
npoBo,n:HMOCTH, JIH60 ,n:bIpKH B BaJIeHTHOH 30He. CXeMaTHqHO 3TOT npouecc nOKa3aH Ha pHC.
2.6,6.
B036y)!{,n:eHHbIe HOCHTeJIH nOCTeneHHO TepHIOT
CBOIO 3HeprHIO npH CTOJIKHOBeHHH C aTOMaMH peIIIeTKH: BbI,n:eJIHH npH 3TO~
500
400
,[(lllfHa BOJIHbI
600
700
A, HM
30HbI (npOBo,n:HMOCTH HJIH BaJIeHTHoH). CKOPOCTb O)!{e-peKOM6HHaUHH onpe,n:eJI5.leTCH CJIe,n:yIOIIJ.HMH COOTHOIIIe-
PHc.2.8. CneKTpbI
, ,n:HTb OqeHb Tpy,n:HO. O,n:HaKo Ha npaKTHKe ,n:e
npocmpalicmBelilibte aecpeKmbt. K
HHM TaK)!{e
OTHOC5.lTC5.I npOT5.I)!{eHHbIe ,n:HCJIOKaUHH H ,n:HCJIOKaUHH HeCOOTBeTCTBH5.I, no5.lBJI5.lIOIIJ.HeCH npH BbIpalIJ.HBaHHH nOJIynpoBo,n:HHKOB Ha no,n:O)!{KaX, nOCT05.lH-
HH5.lMH:
(2.32)
Ro1Ke = Cp • n . p2, Ro1Ke = Cn . n 2 • p.
(2.33)
CKOPOCTb O)!{e-peKOM6HHaUHH nponopUHOHaJIbHa KBa,n:paTY KOHueHTpaUHH HOCHTeJIeH (3JIeKTpOHOB HJIH ,n:b1POK), nOCKOJIbKY B HeH yqaCTBYIOT napbI HOCHTeJIeH o,n:Horo THna (,n:Ba 3JIeKTpOHa HJIH ,n:Be ,n:bIpKH). 113-3a H36bITKa ,n:bIPOK B nOJIynpOBo,n:HHKax
p-THna O)!{e-peKOM6HHaUHH qalIJ.e npOTeKa-
Hble peIIIeTKH KOTOPbIX OTJIHqaIOTCH OT nOCT05.lHHbIX peIIIeTKH 3nHTaKCHaJIb-
eT no MexaHH3MY, onHcaHHOMY ypaBHeHHeM
HbIX CJIOeB. CYlIJ.eCTByeT MHO)!{eCTBO ,n:pyrHx npOCTpaHCTBeHHbIX ,n:e
n-THna ,n:JI5.I O)!{e-peKOM6HHaUHH cnpaBe,n:JIHBO Bblpa)!{eHHe
2.7
(2.32).
B
nOJIynpoBo,n:HHKax
(2.33).
nOKa3aH MHKPOCHHMOK KaTo,n:OJIIOMHHeCueHUHH CJIOH GaAs,
B xo,n:e O)!{e-peKOM6HHaUHH ,n:OJI)!{HbI BblilOJIHHTbC5.I 3aKOHbI coxpaHeHH~
nOJIyqeHHbrH npH KOMHaTHOH TeMnepaType, ,n:JIH HJIJIIOCTpaUHH TOro, 'ITO
3HeprHH H HMnyJIbca. BCJIe,n:cTBHe pa3JIHqHH B CTpYKTypax BaJIeHTHOH
TaKHe ,n:e
30HbI H 30HbI npoBo,n:HMOCTH K03
HecueHUHH. BH,n:HO HeCKOJIbKO TeMHbIX n5.lTeH, n05.lBJIeHHe KOTOPbIX CB5.l3aHO
Ha pHC.
Cp
H
Cn
B nOJIynpoBo,n:HHKax
C 3aTyxaHHeM JIIOMHHeCueHUHH B OKpecTHOCTH ,n:e
06bIqHO HMeIOT pa3HbIe 3HaqeHH5.I. OpH BbICOKOMypoBHe B036y)!{,n:eHHH HepaBHoBecHble KOHueHTpaUHH HO-
KaHaJIOB 6e3bI3JIyqaTeJIbHOH peKOM6HHaUHH. Pa3Mep 3THX nHTeH 3aBHCHT
CHTeJIeH HaMHoro IIpeBbIIIIaIOT paBHoBecHbIe 3HaqeHH5.I, n03TOMY ypaBHeHHe
OT pa3MepOB ,n:e
CKOPOCTH O)!{e-peKOM6HHaUHH MO)!{HO ynpocTHTb ,n:o BH,n:a
HeCMOTp5.1 Ha TO, 'ITO 60JIbIIIHHCTBO nepexo,n:OB qepe3 rJIy60KHe npH-
Ro1Ke = (Cn + Cp )
MeCHbIe ueHTpbl OTHOCHTC5.I K 6e3bI3JIyqaTeJIbHbIM, HeKOTopbIe H3 HHX Bce )!{e 5.lBJI5.lIOTC5.I H3JIyqaTeJIbHbIMH. Ha pHC.
2.8
nOKa3aH npHMep H3JIyqa-
TeJIbHOH peKoM6HHaUHH qepe3 npHMeCHbIe ueHTpbl
1996).
B GaN
(Grieshaber,
Ope,n:cTaBJIeHbI cneKTpbl JIIOMHHeCueHUHH Me)!{30HHblX nepexo,n:OB Ha
,n:JIHHe BOJIHbI
365
HM H nepexo,n:oB qepe3 rJIy60KHe npHMeCHbIe ypOBeHH
r,n:e
C - KoacpcpUI1Uelim O:J/Ce.
•n
3
= C· n 3 ,
(2.34)
QHCJIeHHble 3HaqeHHH K03
C
Moryr 6bITb Haii,n:eHbI H3 ypaBHeHHii KBaHToBoii MexaHHKH, yqHTbIBaIOIIJ.HX 30HHYIO CTpyKTyPY nOJIywoBo,n:HHKa (Agrawal, DuUa, npoBo,n:HHKOB THna AIIIB
1986).
)lJIH nOJIy-
3HaqeHHH K03
npHMeCHbIe ueHTpbl COOTBeTcTByeT )!{eJITOH 06JIaCTH BH,n:HMoro cneKTpa,
B npe,n:eJIax 1O-28_1O-29 cM 6jc (Olshansky, 1984; Agrawal, Dutta, 1986). B nOJIynpoBo,n:HHKaXOR<e-peKOM6HHaUHH CHH)!{aeT HHTeHCHBHOCTb JIIO-
'ITO 06b5.lCHHeTC5.I BaKaHCHHMH aTOMOB raJIJIH5.I -
HaH60JIee pacnpOCTpaHeH-
MHHecueHUHH TOJIbKO npH OqeHb BbICOKOM ypOBHe B036y)!{,n:eHH5.I u HJIH IIpH
HbIMH TOqeqHbIMH ,n:e
OqeHb 60JIbIIIOii HH)!{eKUHH 3JIeKTpOHOB, 'ITO CBH3aHO C Ky6HqeCKOH 3aBHCH-
1996;
MOCTbIO CKOPOCTH peKOM6HHaUHH OT KOHueHTpaUHH HOCHTeJIeii
B ,n:Hana30He ,n:JIHH BOJIH OKOJIO
Schubert,
1997;
550
Saarinen,
HM. I-f3JIyqeHHe npH nepexo,n:ax qepe3
1997).
(2.34).
OPH
64
2.7. Be3bt3JtY'lameJtbltaR. peICoM6U1-taI1UR. Ita n08epXltOCmu noJtynpoBoaltulCa 65
HH3KHX KOHueHTpaUHHX HOCHTeJIeH CKOPOCTh O)Ke-peKOM6HHaUHH OqeHh MaJIa, rr03TOMY B 60JIhIlIHHCTBe rrpaKTHqeCKHX CJIyqaeB eIO MO)KHO rrpeHe6pe1Jh.
r)J,e
In
-
rrJIOTHOCTh TOKa, orrpe)J,eJIHeMaH rrOTOKOM 3JIeKTpOHoB Ha rroBepx-
HOCTH rrOJIyrrpOBO)J,HHKa. B CTaUHOHapHhIX YCJIOBHHX B rJIy6HHe O)J,HOPO)J,-
(2.14),
Bhlpa)KeHHe
2.7.
G = R.
I1crrOJIh3YH
orrpe)J,eJIHIOIll.ee CKOPOCTh peKoM6HHa~HH
B 06beMe,
HOro rrOJIyrrpOBO)J,HHKa 3TO ypaBHeHHe CBO)J,HTCH K BH)J,y
Be3bI3JIYQaTeJIbHaH peKoM6HHan;HSI Ha nOBepxHocTH nOJIynpOBO,lJ;HHKa
Oe3hI3JIyqaTeJIhHaH
peKoM6HHaUHH
MO)KeT
HaH)J,eM 06beMHYIO KOHueHTpaUHIO H36hlTOqHhIX HOCHTeJIeH rroKa3aHHYIO Ha pHC.
2.9.
D.n(X) = GTn,
I1pe)J,rrOJIaraeM, 'ITO TOK 3JIeKTpOHOB )J,HCPCPY3HOH-
HhIH, T. e. )J,JIH Hero crrpaBe)J,JIHBO Bhlpa)KeHHe rrpOHCXO)J,HTh
He
- D a!ln(x, t) J n-en ax·
TOJIhKO
B 06beMe, HO H Ha rrOBepXHOCTH rrOJIyrrpOBO)J,HHKOB, TaK KaK HMeHHO 3)J,eCh qaCTO HapYiliaeTCH rrepHO)J,HqHOCTh KpHCTaJIJIHqeCKOH peIlIeTKH. MO)J,eJIh 3HepreTHqeCKHX 30H OCHOBhIBaeTCH Ha CTporOM C06JIIO)J,eHHH rrepHO)J,HqHOCTH peIlIeTKH. I10CKOJIhKY Ha rrOBepXHOCTH rrepHO)J,HqHOCTh 3aKaHqHBaeTCH,
Tor)J,a, rrO)J,CTaBHB 3TO Bhlpa)KeHHe B ypaBHeHHe
(2.35),
rrOJIyqHM ypaBHeHHe
HerrpephIBHoCTH )J,JIH )J,HCPCPY3HoHHoro TOKa:
)J,JIH rrOBepXHOCTeH 3Ty MO)J,eJIh He06xo)J,HMO MO)J,HCPHUHpOBaTh, )J,06aBHB
a!ln(x, t) = G _ !In(x, t) at Tn
)J,orrOJIHHTeJIhHhle 3JIeKTpOHHhle ypOBHH B 3arrpeIll.eHHOH 30He rrOJIyrrpOBO)J,HHKa. Terreph paCCMOTpHM rrOBepXHOCTh rrOJIyrrpOBO)J,HHKa C XHMHqeCKOH TOq-
(2.36)
+ Dn 0 2 !In(x, t) I n .
(2.37)
aX2
Ha rrOBepXHOCTH rrOJIyrrpOBO)J,HHKa H3-3a CYIll.eCTBOBaHHH )J,OrrOJIHHTeJIhHhIX
KH 3peHHH. ATOMhI, pacrrOJIO)KeHHhle Ha rrOBepXHOCTH, H3-3a OTCYTCTBHH CO-
3HepreTHqeCKHX ypOBHeH Ha6JIIO)J,aeTCH BhICOKaH CKOPOCTh peKOM6HHaUHH.
ce)J,HHX aTOMOB He MoryT HMeTh TaKYIO )Ke CTpyKTypy CBH3eH, KaK aTOMhI B
I103TOMY )J,JIH rrOBepXHOCTH CrrpaBe)J,JIHBO CJIe)J,YIOIll.ee 2paHUti1iOe YCJl08Ue:
I
rJIy6HHe rrOJIyrrpOBO)J,HHKa, H qaCTh HX BaJIeHTHhIX CBH3eH OCTaeTCH CB060)J,060p8aHHblMU (c806o8HblMU) C8fl3flMU. 3TH CBH3H HBJIHIOTCH 3JIeKTpOHHhIMH ypOBHHMH, pacrrOJIO)KeHHhIMH B 3arrpeIll.eHHOH 30He rrOJIyrrpOBO)J,HHKa, KOTophle MoryT HrpaTh POJIh ueHTpOB peKOM6HHaUHH. B 3aBHCHMOCTH OT 3HaKa 3apH)J,a 3TH
Op6HTaJIH
MorYT 6hITh
ypOBHHMH-aKueIITOpaMH HJIH
ypOBHHMH-)J,OHopaMH.
I,
eDn a!ln(X, t) = eSD.n(x, t) ax x=o x=o
HOH. Op6HTaJIH, He rrOJIHOCThIO 3arrOJIHeHHhle 3JIeKTpOHaMH, Ha3hIBaIOTCH
r)J,e
S-
(2.38)
CKOPOCTh rroBepxHocTHOH peKOM6HHaUHH. 113 3Toro YCJIOBHH CJIe-
)J,yeT, 'ITO HeOCHOBHhle HOCHTeJIH, )J,HCPCPYH)J,HpYIOIll.He K rrOBepXHOCTH, Ha HeH )Ke H peKOM6HHHPYIOT. CqHTaH, 'ITO CKOPOCTh reHepaUHH rrOCTOHHHa BO BpeMeHH, HaXO)J,HM, 'ITO KOHueHTpaUHH HeOCHOBHhIX HOCHTeJIeH TaK)Ke
CB060)J,Hhle CBH3H MoryT 3aMhIKaThCH O)J,Ha Ha )J,pyryIO, CPOPMHPYH XHMHqeCKHe CBH3H Me)K)J,y coce)J,HHMH aTOMaMH, pacrrOJIO)KeHHhIMH Ha rrOBepxHOCTH rrOJIyrrpOBO)J,HHKa. TaKaH nepecmpOUKa n08epXHocmu Be)J,eT K C03)J,a-
He 3aBHCHT OT BpeMeHH. PeIlIeHHe CTaUHOHapHoro )J,HcpcpepeHUHaJIhHOrO ypaBHeHHH C BhIIlIerrpHBe)J,eHHhIM rpaHHqHhIM YCJIOBHeM HMeeT BH)J,
HHIO HOBOH JlOKaJlbHOU aTOMHOH CTpyKTyphI C 3HepreTHqeCKHMH ypOBHHMH,
n(x) = no
CHJIhHO OTJIHqaIOIll.HMHCH OT COCTOHHHH B rJIy6HHe. I1pe)J,CKa3aTh pacrroJIO)KeHHe 3HepreTHqeCKHX ypOBHeH rrOBepXHOCTHhlX CTpyKTyp )J,a)Ke rrpH HCrrOJIh30BaHHH MOIll.HhIX TeOpeTHqeCKHX MO)J,eJIeH OqeHh TPY)J,HO. I103TOMY qaIll.e Bcero rrpHMeHHIOTCH cpeHOMeHOJIOrHqeCKHe MO)J,eJIH rrOBepXHOCTHOH peKOM6HHaUHH. oap)J,HH H illOKJIH ,(Shockley,
1950)
rrepBhIMH )J,ora)J,aJIHCh 0 rrOHBJIeHHH
HOBhIX 3HepreTHqeCKHX ypoBHeH B rrOBepXHOCTHhIX cTpyKTypax H 06 HX POJIH KaK ueHTpoB peKoM6HHaUHH. OueHHM BJIHHHHe rroBepxHocTHOH peKoM6HHaUHH Ha pacrrpe)J,eJIeHHe HOCHTeJIeH B rrOJIyrrpoBo)J,HHKe p-THrra, rro)J,BeprilieMcH B03)J,eHcTBHIO 06JIyqeHHH. I1pe)J,rrOJIO)KHM, 'ITO BO BpeMH 06JIyqeHHH CKOPOCTh reHepaUHH
G
B JII060H TOqKe rrOJIyrrpOBO)J,HHKa O)J,HHaKOBaH. Tor)J,a )J,OJI)KHO BhIIIOJIHHThCH ypaBHeHHe HerrpephIBHOCTH, KOTopoe B O)J,HOMepHOM rrpe)J,CTaBJIeHHH )J,JIH 3JIeKTpOHOB HMeeT CJIe)J,YIOIll.HH BH)J,:
Ha pHC.
2.9
+ D.n(x) =
no
+ D.n(X)
[1 -
TnSexp(-x/Ln)] Ln + TnS .
(2.39)
rrOKa3aHhI KOHueHTpaUHH HOCHTeJIeH B6JIH3H rroBepxHocTH rro-
JIyrrpOBO)J,HHKa rrpH pa3HhIX CKOPOCTHX peKoM6HHaUHH. I1pH
S
---t
0 KOHueH-
TpaUHH HeOCHOBHhlX HOCHTeJIeH Ha rrOBepXHOCTH paBHa HX KOHueHTpaUHH B 06beMe, T. e.
n(O)
---t
no + D.n(X). I1pHS
---t 00 KOHueHTpaUHH HeOCHOBHhIX
HOCHTeJIeH Ha rrOBepXHOCTH rrpH6JIH)KaeTCH K paBHOBeCHOMY COCTOHHHIO,
T.
e. n(O)
---t
no.
I1oBepxHOCTHaH peKOM6HHaUHH Be)J,eT K CHH)KeHHIO KBaHTOBoro BhIXO)J,a JIIOMHHeCueHUHH H K HarpeBY rrOBepXHOCTH BCJIe)J,CTBHe aKTOB 6e3hI3JIyqaTeJIhHOH peKOM6HHaUHH Ha HeH. B
H3JIyqaIOIll.HX YCTpOHCTBax 06a 3TH X
rrOCJIe)J,CTBHH HBJIHIOTCH He)KeJIaTeJIhHhIMH. B Ta6JI. o
2.1
rrpHBe)J,eHhI )J,aHHhle
CKOPOCTHX peKoM6HHaUHH )J,JIH HeCKOJIhKHX THrrOB rrOJIyrrpOBO)J,HHKOB.
BH)J,HO, 'ITO oc06eHHO BhICOKOH CKOPOCThIO rrOBepXHOCTHOH peKOM6HHaUHH 06JIa)J,aeT GaAs.
a!ln(x, t) at
= G - R + !~J
e ax n,
(2.35)
Ha pHC.
2.10
rrOKa3aH MHKPOCHHMOK KpHCTaJIJIa GaAs C rrOJIOC~OBhIM
MeTaJIJIHqeCKHM KOHTaKTOM )J,JIH HH)KeKUHH TOKa, HJIJIIOCTPHPYIOIll.HH 3KC-
3 <1>. E. IIIy6epT
2.8. KOI'IKypeftI1UJl u3JtY'lameJtbftOU U 6e3bt3JtY'lameJtbftOU peKOM6uftal1ueu
66
67
KOHTaKT Ha nO,ll.lIO)l(J(e
I. nOJIOCKOBLIH KOHTaKT
Ec
6 '.
'
KOHTaKT
Ev
!
,is:
6
PHc.2.10. MHKPOCHHMOK B peJKHMe HHJKeKUHH TOKa CTpyKTYPbI InGaAs/GaAs, Ha BepxHIOIO 'IaCTb KOTOPOH HaHeceH rrOJIOCKOBbIH KOHTaKT, a Ha HHJKHIOIO 'IaCTb co CTOPOHbI rro,n:JIOJKKH -
~
n=no+Don(x)
I~ ""L----~HU:
::::
'ITO 6JIaro,n:apll rrOBepXHOCTHOH peKOM6HHaUHH rrpH rrpH6JIHJKeHHH K rrOBepXHOCTH JIIOMHHeCueHUHll OCJIa6JIlleTCll
Dono = GTn
tl , r.:: __n 9_______________________
BLICOKlUIL CKOPOCTh nOBepXHOCTHOH
3KlUIJ peKOMfiHHarum: g __________________________________________
HMTb, 'ITO aKTMBHaH 06naCTb,B KOTopoHcyruecTBYIOT o6a TMrra HOCMTeneH, ,n:onJKHa pacrronaraTbCH Ha 3HattUmeJlbHOM paccmORHUU' om Jl1060U no-
. 6epXHocmu. 3Toro MOJKHO ,n:06MTbCH MHJKeKIl,MeH HocMTeneH rro,n: KOHTaKT,
bO
.Q
x=O
x
PHC. 2.9. ITOJIynpoBo,n:HHK p-nma, rro,n:BeprnIHHcll Bos,n:elkTBHIO CBeTa
(6).
(a).
30HHall
KOHIJ;eHTpaUHH OCHOBHblX H HeOCHOBHblX HOCHTeJIeH B6JIHSH rro-
BepXHOCTH rrOJIyrrpOBo,n:HHKa (8). ITpe,n:rrOJIaraeTCll, 'ITO B peSYJIbTaTe Bos6YJK,n:eHHll CKOPOCTb reHepaUHH HOCHTeJIeH 6bIJIa o,n:HHaKOBOH B JII060H TO'lKe MaTepHaJIa. KOHueHTpaUHH Hs6bITO'lHbIX HOCHTeJIeH 060SHa'leHbI KaK
T a 6 JI H U a
eme O,n:HH KOHTaKT. JIIOMHHecueHUHll rrpoTeKaeT B aK-
THBHOM CJIoe, pacrrOJIOJKeHHOM rro,n: rrOJIOCKOBbIM KOHTaKTOM. OT'IeTJIHBO BH,n:HO,
is:
,n:HarpaMMa
Ha nO,ll.lIO)l(J(e
Don, Dop
rrnorua,n:b KOToporo HaMHoro MeHbilie rrnorua,n:M KpMcTanna rronyrrpoBo,n:HMKa. KpoMe Toro, 9TOT KOHTaKT cne,n:yeT pa3MeruaTb Ha 3Ha'lMTenbHOM paccToHHMM OT 60KOBbIX rrOBepXHocTeH KpMcTanna. EcnM TOK 6y,n:eT BTeKaTb B 06naCTb, pacrrOnOJKeHHYIO rro,n: KOHTaKToM, HOCMTenM He 6y,n:YT «BM,n:eTb» rrOBepXHOCTeH rronyrrpOBo,n:HMKa. 3,n:ecb Ha,n:o OTMeTMTb, 'ITO B MOHorronHpHbiX 06naCTHX rronyrrpOBo,n:HMKOBbIX YCTPOHCTB M3-3a HeXBaTKM HeOCHOBHbIX HOCMTeneH rrOBepXHOCTHaH peKOM6MHaIl,MH rrpaKTM'IeCKM OTCYTCTByeT. .llnH CHMJKeHMH rrOBepXHOCTHOH peKOM6MHaIl,MM pa3pa6oTaHO HeCKonbKO
2.1. CKOPOCTH peKoM6HHaUHH Ha rrOBepXHOCTH HeKOTopbIX rroJIyrrpo-
MeTo,n:OB rraCCMBMpOBaHMH, BKnIO'IaIOruMX o6pa6oTKY rrOBepXHOCTeH cepOH
BO,n:HHKOB
MnM ,n:pyrMMM XMMM'IeCKMMM peareHTaMM (Lipsanen, ITOJIyrrpOBo,n:HHK
CKOPOCTb rroBepxHocTHOH peKoM6HHaUHH, CM/C
GaAs
106
InP
103
Si
10
2.8.
6MHaIl,MM. ,JIIOMMHeCIl,eHIl,MH Ha6nIO,n:aeTCH co CTOPOHbI rro,n:nOJKKM, a KOHTaKT pacrronaraeTCH C3a,n:M M3nY'laIOrueH 06naCTM. OT'IeTnMBO BM,n:HO, 'ITO B 06naCTM PH,n:OM C rrOBepxHOCTbIO nIOMMHeCIl,eHIl,MH ocna6nHeTCH. nOBepXHOCTHaH peKOM6MHaIl,MH MOJKeT rrpOMcxo,n:MTb TonbKO rrpM HanM'IMM HOCMTeneH 060MX TMrrOB. npM pa3pa6oTKe CBeTo,n:Mo,n:OB BaJKHO rrOM-
KOHKypeHD:H.SI Me1K)l.y H3JIyqaTeJIbHOii
H 6e3bI3JIyqaTeJIbHOii peKoM6HHau:Heii
B rrepMMeHTanbHoe ,n:OKa3aTenbCTBO cyrueCTBOBaHMH rrOBepXHOCTHOH peKOM-
1999).
rrpe,n:bI,n:yruMX pa3,n:enax 6blno paCCMOTpeHO HeCKonbKO MexaHM3MOB
6e3bI3nY'laTenbHoH peKOM6MHaIl,MM:
lIIoKnM-PM,n:a, OJKe- M rrOBepXHOCT-
HblH. ne3bI3nY'laTenbHYIO peKOM6MHaIl,MIO MOJKHO TonbKO YMeHbIlIMTb, HO YCTpaHMTb rronHOCTbIO HeB03MOJKHO. HarrpMMep, rrOBepXHOCTHYIO peKoM6MHaIl,MIO MOJKHO 3Ha'lMTenbHO CHM3MTb, rrpOCTpaHCTBeHHO OT,n:enHH aKTMBHYIO o6nacTb M3nY'leHMH OT nI06bIX rroBepxHocTeH. O,n:HaKO ,n:aJKe rrpM O'leHb 60nbIlIMX paCCTOHHMHX MeJK,n:y ,noH o6nacTbIO M 6nMJKaHIlIeii: rroBepxHo-
3*
68
D1-. 2. HaltyttameltbHaR u 6eabtaltyttameltbHaR peICoM6uHau,uR
CTbIO HeKoTopble HOCHTeJHI 3a CqeT .lI.Hq)(PY3HH Bce )Ke .lI.06epYTcH .lI.O noBepxHocTH H TaM peKOM6HHHPYIOT.
r
2.8. Bu6ltuoepaf/JUtteCKuU cnUCOK B XO.ll.e
6e3bl3JIyqaTeJIbHOH
peKoM6HHaIIHH.
KaK H OT nOBepXHOCTHOH peKOM6HHaIIHH, OT 6e3bI3JIyqaTeJIbHOH peHOCTbIO H36aBHTbCH. B JII060M nOJIynpOBO.ll.HHKOBOM KpHCTaJIJIe HMeIOTCH eCTeCTBeHHble .lI.ecpeKTbI. )J.a)Ke eCJIH HX OqeHb MaJIO, HX KOHIIeHTpaIIHH Bce-TaKH He paBHa HYJIIO. 113 TepMO.ll.HHaMH'-iecKHx paCqeTOB CJIe.ll.yeT, qTO nOCKOJIbKY .lI.JIH C03.l1.aHHH B KpHCTaJIJIHqeCKOH: peIIIeTKe TOqeqHOrO .lI.ecpeKTa
Ea ,
Tor.ll.a nOJIHaH BepoHTHoCTb
peKoM6HHaIIHH .lI.ByX THnOB onpe.ll.eJIHeTCH CYMMOH 9THX BepoHTHOCTeH::
KOM6HHaIIHH B o6beMe H O)Ke-pe,KOM6HHaIIHH HHKOr.ll.a He Y.lI.aeTCH nOJI-
Tpe6yeTcH 3aTpaTHTb 9HeprHIO
69
BepOHTHOCTb 9Toro Ha KOHKpeTHOM Y3JIe
T
-1
=
-1
Tr
+ T nr -1 •
(2.40)
OTHOCHTeJIbHYIO BepOHTHOCTb H3JIyqaTeJIbHOH: peKOM6HHaIIHH MO)KHO HaH:TH KaK OTHOIIIeHHe BepOHTHOCTH H3JIyqaTeJIbHOH: peKOM6HHaIIHH K CYMMapHOH BepOHTHOCTH. TaKHM 06pa30M, BepOHTHOCTb H3JIyqaTeJIbHOH: peKOM6HHaIIHH HJIH 8ftympeftftUU K8aftm08blU 8blXOO U3J1.YlI.eftUll onpe.ll.eJIHeTCH
peIIIeTKH onpe.ll.eJIHeTCH nOCTOHHHOH: DOJIbIIMaHa: exp ( - Ea/kT). npOH3Be-
(2.41)
.lI.eHHe KOHIIeHTpaIIHH Y3JIOB peIIIeTKH Ha 9Ty nOCTOHHHYIO paBHO KOHIIeHTpaIIHH .lI.ecpeKTOB. Co6CTBeHHble TOqeqHble .lI.ecpeKTbI, a TaK)Ke JII06ble npoCTpaHCTseHHble .lI.ecpeKTbI, MorYT npHBO.ll.HTb K C03.l1.aHHIO rJIy60KHX YPOBHeH:
BHYTpeHHHH KBaHTOBblH BblXO.ll. paBeH OTHOIIIeHHIO qHCJIa CPOTOHOB, Hcnyc-
B 3anpelIleHHOH: 30He H, 3HaqHT, HBJIHTbCH IIeHTpaMH 6e3bI3JIyqaTeJIbHOH
KaeMblX BHyTpH nOJIynpOBO.ll.HHKOBOro MaTepHaJIa, K qHCJIY 9JIeKTpOHHO-
peKOM6HHaIIHH.
.lI.blPOqHbIX nap, yqaCTBYIOlIlHX B aKTax peKOM6HHaIIHH.
YnpalKHeHHe. OnpeaeJteHue ICoHu,eHmpau,uu mOttettHbtX aef/JeICmo8 Ct:llnaeM, qTO ,nJIlI BHe,npeHHlI nocTopoHHero aToMa B KpHCTaJIJIHqecKYIO pellIeTKy Tpe6yeTcH 3aTpaTHTb 3HeprHIO Ea = 1,1 38. Onpe,neJIHTe paBHoBecHYIO KOHueHTpaUHIO BHe,npeHHblX ,neIPeKTOB B npoCToH Ky6HqeCKOH pellIeTKe C nOCToHHHOH ao = 2,5 A. PemeHHe: KOHueHTpaUHlI aTOMOB, pacnOJIOJKeHHblX B Y3JIaX npocToH Ky6HQeCKOH pellIeTKH, paBHa N = a(j3 = 6,4 x 1022 CM- 3 • B paBHOBeCHOM COCTOlIHHH npH KOMHaTHOH TeMnepaType KOHueHTpaUHH BHe,npeHHblX ,neIPeKTOB onpe,neJIHeTClI BbI-
H3-3a np06JIeM, CBH3aHHbIX C nOrJIOlIleHHeM CBeTa, .lI.aJIeKO He Bce Hcny-
N~erfJ. = N· exp (-Ea/kT) = 2,7 x 104 CM- 3.
OTMeTHM, QTO BblQHCJIeHHaH no 3TOH IPopMyJIe KOHueHTpaUHlI ,neIPeKTOB HaMHoro MeHbllIe THnHQHbIX KOHueHTpaUHH 3JIeKTpOHoB H ,nblPOK. ECJIH ,neIPeKTbI IPOPMHPYIOT B 3anpemeHHOH 30He ,nonOJIHHTeJIbHble ypOBHH, Ha HHX npOHcxo,nlIT aKTbI 6e3bI3JIYQaTeJIbHOH peKOM6HHaUHH. )J.pyroH: np06JIeMOH HBJIHeTCH XHMHqeCKaH qHCTOTa nOJIyrrpOBO.ll.HHKOB. OqeHb TPY.ll.HO BblpaCTHTb MaTepHaJIbI, CO.ll.ep)KaHHe npHMeCeH: B KOTOPbIX 6blJIO 6bl
MeHbIIIe HeCKOJIbKHX aTOMOB Ha
MHJIJIHa~.lI.. )J.a)Ke y
qHCTblX nOJIyrrpOBO.ll.HHKOB B 1 CM 3 CO.ll.ep)KHTCH 10
1
caMblX
aTOMOB rrpHMeCeH:,
qaCTb H3 KOTOPblX o6pa3yeT rJIy60KHe 9HepreTHqeCKHe ypOBHH, CHH)KaIOlIlHe HHTeHCHBHOCTb JIIOMHHeCIIeHIIHH. B
KOHIIe 1950-x rr., KOr.ll.a 6blJIH BnepBble rrpO.ll.eMOHCTpHpoBaHbl no-
JIynpOBO.ll.HHKH rpynnbl
AHIBv,
BHYTpeHHHH KBaHTOBblH: BblXO.ll. JIIOMHHeC-
IIeHIIHH, Ha6JIIO.lI.aeMOH: rrpH KOMHaTHOH TeMnepaType, 6blJI OqeHb HH3KHH .lI.OJIH npOIIeHTa. B HaCTOHlIlee BpeMH BHYTpeHHHH: KBaHTOBblH: BblXO.ll. KaqeCTBeHHblX 06beMHblX nOJIynpOBO.ll.HHKOB H CTpyKTyp C KBaHTOBblMH HMaMH qaCTO npeBblIIIaeT 90
%,
a HHOr.ll.a .lI.OCTHraeT 99
%.
TaKOH: nporpecc CTaJI
B03MO)KHbIM 6JIarO.ll.apH YJIyqIIIeHHIO KaqeCTBa KpHCTaJIJIOB H YMeHbIIIeHHIO B HHX KOHIIeHTpaIIHH: .lI.ecpeKTQB H npHMeceH. nepeH.lI.eM K OIIeHKe BHYTpeHHero KBaHTOBoro BblXO.ll.a rrOJIynpOBO.ll.HHKOB C IIeHTpaMH 6e3bl3JIyqaTeJIbHOH: peKoM6HHaIIHH. 0603HaqHM T r H3JIyqaTeJIbHOe BpeMH )KH3HH HOCHTeJIeH: H Tnr -
BpeMH )KH3HH HOCHTeJIeH:
OTMeTHM, qTO
lIleHHble CPOTOHbl nOKH.lI.aIOT npe.ll.eJIbl nOJIynpOBO.ll.HHKa.
Agrawal G. P. and Dutta N. K. Long Wavelength Semiconductor Lasers (John Wiley and Sons, New York, 1986). Ahrenkiel R. K. "Minority-carrier lifetime in III-V semiconductors" in Minority Carriers in //l- V Semiconductors: Physics and Applications edited by R. K. Ahrenkiel and M. S. Lundstrom, Semiconductors and Semi metals 39, 40 (Academic Press, San Diego, 1993). Aleksiejunas R., Sudzius M., Malinauskas T., Vaitkus J., Jarasiunas K. and Sakai S. "Determination of free carrier bipolar diffusion coefficient and surface recombination velocity of undoped GaN epilayers" Appl. Phys. Lett. 83, 1157 (2003). Baraff G. A. and Schluter M. "Electronic structure, total energies, and abundances . of the elementary point defects in GaAs" Phys. Rev. Lett. 55, 1327 (1985). Ehrhardt A., Wettling W., and Bett A. "Transient photoluminescence decay study of minority carrier lifetime in GaAs heteroface solar cell structures" Appl. Phys. A (Solids and Surfaces) A53, 123 (1991). Grieshaber W., Schubert E. F., Goepfert I. D., Karlicek R. F. Jr., Schurman M. J. and Tran C. "Competition between band gap and yellow luminescence in GaN and its relevance for optoelectronic devices" l. Appl. Phys. 80, 4615 (1996) . Hall R. N. "Electron-hole recombination in germanium" Phys. Rev. 87, 387 (1952). Hwang C. J. "Doping dependence of hole lifetime in n-type GaAs" l. Appl. Phys. 42, 4408 (1971). Lipsanen H., Sopanen M., Ahopelto J., Sandman J., and Feldmann J. "Effect of InP passivation on carrier recombination in InxGal-xAs/GaAs surface quantum wells" lpn. l. Appl. Phys. 38, 1133 (1999).
70
FA. 2. H3AyttameAbiiaR u 6e3bl3AyttameAbiiaR peKoM6uHau,uR
r
Longini R. L. and Greene R. F. "Ionization interaction between impurities in semiconductors and insulators" Phys. Rev. 102, 992 (1956). Nelson R. J. and Sobers R. G. "Interfacial recombination velocity in GaAIAs/GaAs heterostructures" Appl. Phys. Lett. 32, 761 (1978a).
II II
Nelson R. J. and Sobers R. G. "Minority-carrier lifetime and internal quantum efficiency of surface-free GaAs" Appl. Phys. Lett. 49, 6103 (1978b). Neugebauer J. and Van de Walle C. "Gallium va~ancies and the yellow luminescence in GaN" Appl. Phys. Lett. 69, 503 (1996). Olshansky R., Su C. B., Manning J., and Powazinik W. "Measurement of radiative and non-radiative recombination rates in InGaAsP and AIGaAs light sources" IEEE 1. Quantum Electronics QE-20, 838 (1984). Pantelides S. T. (Editor) Deep Centers in Semiconductors (Gordon and Breach, Yverdon, Switzerland, 1992).
r JIaBa
3
MO,nEJIH H3JIYQATEJIbHOH PEKOMBHHAII.HH
B
3TOH rJIaBe paCCMaTpHBaIDTClI MO.ll.eJIH H3JIyqaTeJIbHOH peKoM6HHa-
UHH. nepBoH 6Y.ll.eT onHcaHa .lI.OCTaTOqHO TOqHall TeOpeTHqeCKall MO.ll.eJIb, OCHOBaHHall Ha ypaBHeHHlIX KBaHTOBOH MexaHHKH. BTopall paCCMaTpHBaeMall MO.ll.eJIb
6bwa
pa3pa6oTaHa BaH POC6pYKOM H illOKJIH (Van Roos-
Phillips J. C. "Stretched exponential relaxation in molecular and electronic glasses" Rep. Prog. Phys. 59, 1133 (1996). ..
broeck, Shockley,
Saarinen K. et al. "Observation of native Ga vacancies in GaN by positron annihilation" Phys. Rev. Lett. 79, 3030 (1997).
.lI.bIPOqHbIX nap HaXO.ll.lITClI B onpe.ll.eJIeHHOM paBHoBecHH. B
Schubert E. F. Doping in 1I/- V Semiconductors (Cambridge University Press, Cambridge UK, 1993).
HaUHH paccMaTpHBaeTclI C TOqKH 3peHHlI CIIOHTaHHblX H BbIHY)K.lI.eHHbIX
Schubert E. F., unpublished (1995)
HlIMH.
1954).
B OCHOBe 3TOH IIOJIYKJIaCCHqeCKOH MO.ll.eJIH JIe:amT
npe.ll.IIOJIO)KeHHe, qTO IIpoueccbI reHepauHH H peKoM6HHauHH 3JIeKTpOHHOKOHue maBbI
6Y.ll.eT IIpe.ll.CTaBJIeHa MO.ll.eJIb 3HHIIITeHHa, B KOTOPOH MexaHH3M peKoM6H(HH.lI.yuHpoBaHHblx) nepeXO.ll.OB B aTOMe C .lI.ByMlI 3HepreTHqeCKHMH ypOB-
Schubert E. F., Goepfert I., and Redwing J. M. "Evidence of compensating centers as origin of yellow luminescence in GaN" Appl. Phys. Lett. 71, 3224 (1997). Shockley W. Electrons and Holes in Semiconductors (D. Van Nostrand Company, New York, 1950). Shockley W. and Read W. T. "Statistics of the recombinations of holes and electrons" Phys. Rev. 87, 835 (1952). Tu L. W., Kuo W. C., Lee K. H., Tsao P. H., and Lai C. M., Chu A. K., and Sheu J. K. "High-dielectric-constant Ta205/n-GaN metal-oxide-semiconductor structure" Appl. Phys. Lett. 77, 3788 (2000).
,lI;onOJlHeHHe pe.ll.aKTOpa 1. BOHQ-BpyeBHq B. JI., KaJIalllHHKOB C. r.
3.1.
KBaHTOBO-MeXaHH1:IeCKaH MO,ll;eJIb peKOM6HHau.HH
B KHHrax (Bebb, Williams, Thompson,
1980
1972;
Agrawal, Dutta,
1986;
Dutta, 1993;
et al.) I) MO)KHO HaHTH ypaBHeHHlI KBaHTOBOH MexaHHKH,
nO.ll.P06HO onHCbIBaIDIUHe MexaHH3MbI CIIOHTaHHOH peKoM6HHauHH, KOTOPYID MbI KpaTKO paccMoTpHM. B KBaHTOBOH MexaHHKe HHTeHCHBHOCTb cnOHTaHHOro H3JIyqeHHlI HaX0.ll.lIT no HHTeHCHBHOCTH BbIHY)K.lI.eHHOrO H3JIyqeHHlI, OIIpe.ll.eJIlIeMOrO 30AomblM npa8UAOM K8anm080U MexanUKU, UAU npa8UAOM CPepMu. npaBHJIO
j
B COCTOllHHe m no.ll. .lI.eHCTBHeM B03MYIUeHHlI:
Wj->m me
H:"j -
=
1t la~(t)12 = 2; 'IH:"jI2 . p(E = E j + hwo),
(3.1)
MampUtf,nblU 3AeMenm nepexoaa. B O.ll.HOMepHOM CJIyqae (O.ll.Ha
npOCTpaHCTBeHHall KOOp.ll.HHaTa qaJIbHOe COCTOllHHe
j
x)
3JIeMeHT MaTpHUbI, CB1I3bIBaIDIUHH Ha-
C KOHeqHbIM m, OIIHCbIBaeTClI Bblpa)KeHHeM 00
H:"j =
(7f;?n
·IH'I· 7f;J) =
J 7f;~(x). A(x) . 7f;J(x) dx,
-00
I) CM: KHHrH [1, 2].
(3.2)
72
r
FIt. 3. MoaeJtu u3JtY'lameJtbHou peKoM6uHau,uu
r.n;e
H' -
raMI1JIbTOHl1aH
B03MymeHI1H.
rrpe.n;rroJIaraJIOCb,
qTO
rapMOHl1qeCKI1M,
rro3ToMY
H' =A(x)·
B036Y2K.n;eHl1e,
H'
I1pl1
BbIBo.n;e
I1cxo.n;Hmee
Orrl1CbIBaeTCH
rrpaBI1JIa
OT
<poToHa,
rapMOHl1qeCKOH
[exp(iwot)+exp(-iwot)]. 113 ypaBHeHI1H
(3.2)
HBJIHeTCH
CJIe.n;yeT, qTO
.n;JIH cymecTBoBaHI1H peKOM611HalI.I111 Me2K.n;y 3JIeKTpOHaMI1 11 .n;blpKaMI1 I1X
f
.n;blPOK, rro.n;30HbI JIerKI1X .n;blPOK 11 8-0-rro.n;30HbI). I1HTerpl1pOBaHl1e ypaBHeHI1H
(3.4)
rsp (E)
rrpl1Bo.n;I1T K CJIe.n;YlOmeMY pe3YJIbTaTY:
=
BOJIHOBble
73
3.1. KBaHmOBO-MeXaHU'leCKaR MOaeJtb peKoM6uHau,uu
I
2 •E 2 2 7r·m e ·co·h ·c
2·n·e
31 Mbl 2 (2mr)3/2 -2 VE 1i
5)
Eg Ie (Ee) Iv (Ev), (3 .
r.n;e
peKOM611HalI.I111 He MorYT.
Ee = (mr/m:) . (E - Eg) , Ee = (mr/m:) . (E - Eg) ,
KBa31111MrrYJIbCbI 3JIeKTpOHOB rrpl1 OrrTI1QeCKI1X rrepexo.n;ax Me2K.n;y 30HOH rrpOBo.n;I1MOCTI1 11 BaJIeHTHOH 30HOH .n;OJI2KHbI OCTaBaTbCH HeI13MeHHbIMI1; 3TO
(3.6) (3.7)
(p = 11, • k). YCJIOBI1H npaBUJLaMU om60pa no
CBH3aHO C OQeHb MaJIOH BeJII1QI1HOH I1MrryJIbCa
BOflHOBOMY BeKmopy k.
,lI.aJIee B 3TOM pa3.n;eJIe MbI 6y.n;eM rrpl1.n;ep2KI1BaTb-
CH ypaBHeHI1H KBaHTOBOH MeXaHI1KI1 B
1986).
11 ,lI.YTTOH (Agrawal, Dutta,
K I1X KHl1re MbI peKOMeH.n;yeM o6pa-
maTbCH .n;JIH rrOJIYQeHI1H 60JIee rro.n;po6HOH I1H
1957),
IMbl
M02KeT 6bITb BbIBe.n;eHO 113 30HHOH Mo.n;eJII1
B KOTOPOH paCCMaTpl1BalOTCH
BO.n;I1MOCTI1 11 Tpl1 rro.n;30HbI BaJIeHTHOH 30HbI -
4
30HbI: 30Ha rrpo-
eM (Kane,
1957;
Casey, Panish,
M 12 _
1 r.n;e
me -
b
-
m:
= 0,067me
E.
peKOM611HalI.I111 rrap 3JIeKTpOH-TH2KeJIaH .n;blpKa B e.n;I1Hl1lI.e 06beMa M02KHO 3arrl1CaTb B BI1.n;e 00
(8-0-
R
=
f rsp (E) dE =
2
A ·IMbI . I,
(3.9)
Eg r.n;e
m;. Eg . (Eg + ~)
12m:. (Eg
rrOJIYQI1M
orrpe.n;e-
pYlOmee ypaBHeHl1e .n;JIH CYMMapHOH CKOPOCTI1 crrOHTaHHOH 113JIYQaTeJIbHOH
1978)
Macca cBo6o.n;Horo 3JIeKTpOHa,
= 0,33 3B,
(3.5)
,lI.JIH rrOJIYQeHI1H CYMMapHOH CKOPOCTI1 peKOM611HalI.I111 3TO Bblpa2KeHl1e Ha.n;o
IMbl2 orrpe.n;eJIHeTCH Bblpa2KeHI1+ 2~/3)'
(3.3)
Eg -
.Do-
3arrpemeHHaH 30Ha,
3HeprHH crrl1H-op6l1TaJIbHOrO paCmerrJIeHI1H. ,lI.JIH GaAs rrpl1
.Do
3
JIHeT CKOPOCTb crrOHTaHHOH peKOM611HalI.I111 .n;JIH
rro.n;30Ha TH2KeJIbIX .n;blPOK,
rro.n;30Ha JIerKI1X .n;blPOK 11 crrl1H~op6l1TaJIbHO OTmerrJIeHHaH rro.n;30Ha rro.n;30Ha). B 06beMHblx rrOJIyrrpOBo.n;HI1Kax
mhh -
rrpOI1HTerpl1pOBaTb BO BceM .n;l1arra30He .n;orrYCTI1MbIX 3Heprl1H. Pe3YJIbTI1-
Cpe.n;Hee 3HaQeHI1e MaTpl1QHOrO 3JIeMeHTa .n;JIH COCTOHHI1H, Orrl1CbIBaeKeHHa (Kane,
(3.8)
Eg
= 1,424 3B,
IMbl2 = 1,3me . E g .
00
1=
f VE - Eg . Ie (Ee) . Iv (Ev) dE,
(3.10)
Eg MH02KI1TeJIb
A-
KOHCTaHTbI, OCTaBIIIl1eCH 113 ypaBHeHI1H
(3.5).
AHaJIorl1QHO
M02KHO BbIBeCTI1 Bblpa2KeHl1e .n;JIH CKOPOCTI1 peKOM611HalI.I111 rrap 3JIeKTpOH-
I1crroJIb3YH rrpaBI1JIa oT6opa rro BOJIHOBOMY BeKTopy, HaH.n;eM Bblpa2Ke-
JIerKaH .n;blpKa. OHO 6y.n;eT a6COJIIOTHO TaKI1M 2Ke, TOJIbKO B HeM 3
Hl1e .n;JIH cYMMapHoH CKOPOCTI1 crroHTaHHoH 113JIYQaTeJIbHOH peKOM611HalI.I111
HaH Macca TH2KeJIOH .n;blpKI1
B e.n;I1Hl1lI.e o6beMa:
Maccy JIerKOH .n;blpKI1
mth.
m hh
.n;OJI2KHa 6b1Tb 3aMeHeHa Ha 3
,lI.JIH K03
1986),
I1CrrOJIb3YH rrpI1Be.n;eH-
Hble BblIIIe paccy2K.n;eHI1H, M02KHO 3arrl1CaTb CJIe.n;YlOmee Bblpa2KeHl1e:
(3.4) r.n;e
Ie
n-
rrOKa3aTeJIb rrpeJIOMJIeHI1H, QJIeH
11
Iv -
8
(ke - kv)
Hl1e rrpaBI1JI oT6opa rro BeKTOpy K. ~H02KI1TeJIb Crrl1HOBbIM COCTOHHI1HM. B
ypaBHeHl111
(3.4)
06eCrreQl1BaeT BbIIlOJIHe-
2
COOTBeTcTByeT .n;ByM
3HaK CYMMbI 03HaQaeT CYM-
Ml1pOBaHl1e B.n;OJIb Bcex. Tpex rro.n;30H BaJIeHTHOH 30HbI (rro.n;30HbI TH2KeJIbIX
KBaHTOBO-MeXaHI1QeCKaH Mo.n;eJIb peKOM611HalI.I111 HBJIHeTCH caMOH TOQHOH 113 Bcex cymeCTBYlOml1X. O.n;HaKO 113-3a ee CJI02KHOCTI1 11 Tpy.n;oeMKOCTI1 paCQeTOB rro 3TOH Mo.n;eJII1 Ha rrpaKTI1Ke OHa rrpl1MeHHeTCH .n;OBOJIbHO pe.n;KO. Orrl1CaHHaH B CJIe.n;YlOmeM pa3.n;eJIe Mo.n;eJIb, 6a311pYlOmaHCH Ha rrOJIyKJIaCCI1QeCKI1X rrpe.n;CTaBJIeHI1HX, 60JIee y.n;o6Ha .n;JIH pa60TbI.
r
3.2. MO)J.eJIh BaH Poc6pYKa-mOKJIH ~o~enb BaH Poc6pYKa-UUOKnH rr03BonHeT oueHHTb CKOPOCTb crrOH-
.l1.nH
9KcrrepHMeHTanbHhlMH
~
rrpenoMneHHH.
rronyrrpoBo~HHK,
K09
rrornOmeHHH
PHC. 3.1. BpeMH npOJleTa cPoToHa Me}KAY ero reHepaIIHeii H nOrJlOIIIeHHeM,.a TaK}Ke paccToHHHe, KOTopoe ycneBaeT npOJleTeTb cP0TOH 3a 3TO BpeMH nO~CTaBnHH 9TO 3HaqeHHe B ypaBHeHHe
(v) =
()
v Vgr
,
2
2
N ()..) d)" = 87rv
1
a
3
•n
•
c
(3.12)
d (nv). hV/k~ dv. dv e - 1
CKOPOCTb rrornomeHHH
r~e Vgr -
rpyrrrroBaH CKOPOCTb pacrrpocTpaHeHHH
rrpoBo~HHKa: Vgr
3~ecb
,I
2KeHHe
n-
dv
d!.JJ =
dv
~Harra30He
(3.17)
OT
v ~o
V
+ dv
B e~HHHue 06beMa paBHa rrnOTHOCTH
(3.13)
dk = d(I/>..) = c d(nv)"
rroKa3aTenbrrpenoMneHHH - rronyrrpoBo~HHKa. nO~CTaBHB Bhlpa-
(3.13)
B
(3.12), 1
Iii T
1,1
(v)
rronyqHM
= a (v) . Vgr
l1HTerpHpYH 9TO Bblpa2KeHHe BO BceM ~Harra30He qaCTOT, HaXO~HM CKOPOCTb
dv = a (v) . c· d (nv)"
(3.14)
rrornomeHHH
3TO ypaBHeHHe orrpe~enHeT
o6pamfwe apeM5l J1CU3IiU c/Jomolia HnH aep05lmliOCmb n08Jlol4eliU5l c/Jomolia 3a e~HHHUY BpeMeHH. npOH3Be~eHHe
Ro =
meHHH
e~HHHqHOM
f Ro
00
(v) dv
o
BepoHTHoCTH rrornOmeHHH Ha rrnOTHOCTb
rronyqaeM pacrrpe~eneHHe
(3.15),
cpe~Hee BpeMH ~o rrornOmeHHH
.1
-I
KOToporo
a(v) orrpe~enHeTcH B e~HHHuax CM- 1. Ha pHC. 3.1 rrOKa3aH
3JIeIcrpOH-ro>IpKa)
paccToHHHe = a BpeMH= (avgr)-I
MeTo~a
MH: nmpHHy 3arrpemeHHOH 30HbI, K09
MecTO rrOrJIOIIIeHIDI cPOTOHa (reHeparrIDI rrapbI
r
3JIeIcrpOH-,l\hIpKa)
:noro Heo6xo~HMO 3HaTb OCHOBHble xapaKTepHcTHKH rrony-
rrpoBo~HHKa, orrpe~enHeMble CTaH~apTHbIMH
PaCCMOTpHM
MecTO reHepaIJ;llH cP0ToHa (peKoM6HHaIIIDI rrapbI
I ...
TaHHOH: H3nyqaTenbHOH: peKOM6HHaUHH B paBHoBecHblx H HepaBHoBecHblx ycnoBHHx .
75
3.2. MOaeJtb Bim Poc6pYKa-llloKJtu
TJt. 3. MoaeJtu u3JtyttameJtbftOU peKOM6uftau,uu
74
paBHOBeCHbIX ycnoBHHX rrnOTHOCTb
n
B
e~HHHue 06beMa-
HaXO~HTCH rro <popMyne nnaHKa,
3Ta <popMyna Ha3bIBaeTCH HHe
(3.19)
2
a (v)
e
hv/kT
-1
(3.19)
dv.
0
06beMe I).
B cpe~e C rrOKa3aTeneM rrpenOMneHHH
f
= 87rV~2' n
ypaBlieliueM Bali Poc6pYlw-llloKJlu. Bblpa2Ke-
M02KHO yrrpocTHTb, 3arrHcaB K09
orrHCbIBalOmeH crreKTp H3nyqeHHH a6conIOTHO qepHOrO Tena:
(3.20)
N
87r - 1 ( ).. ) d)" = 4"' hv/kT
>..
e
\
- 1
dA.
(3.15) TaKOH: BH~
N (v) dv, orrpe~enH ~Harra30He OT v ~o V + dv.
113 9Toro Bblpa2KeHHH M02KHO BblqHCnHTb BenHqHHY IOmylO KOnHqeCTBO
= cj (n· v), d)" = _ _c_. d(n,v)dv. (n. v)2 dv
K09
(3.20)
06bHCHHeTCH rrporropUHoHanbHocTblO Me2K~y
rrornOmeHHH
OT 9HepWH; B
Ta6n.
ao
3.1
HBnHeTCH K09
rrpHBe~eHbI rrpH6nH3HTenbHble 3HaqeHHH
ao
a hv = 2Eg .
~nH HeCKonb-
KHX THrrOB rronyrrpoBo~HHKOB, paCCqHTaHHble rro H3BeCTHbIM 3HaqeHHHM
(3.16)
nmpHHbI3arrpemeHHOH: 30HbI, K09
BpeMH 2KH3HH
H3nyqaTenbHOH: peKoM6HHaUHH
I) eM. TaK}Ke [4]
H rrnOTHOCTblO 9HepreTHqeCKHX ypoBHeH:,
qTO B CBOIO Oqepe~b Be~eT K KOpHeBOH: 3aBHCHMOCTH K09
HeOCHOBHbIX HOCHTeneH rrpH
orrpe~enHnocb
rro <popMyne 18 3 KOHueHTpaUHH OCHOBHbIX HOCHTeneH: 10 CM- .
crrOHTaHHOH
B-1 . ND,~
rrpH
'I
r
i~
, !'
76
FA. 3. MOaeAu u3AY'lameAbHoii pelwM6uHau,uu
T a 6 JI H U a 3.1.
K09<j><j>HUHeHTbI 6HMOJIeKYJIlIpHOH peKoM6HHaUHH npH ClO, CM- I
MaTepHaJl E g , 38 GaAs 1,42 1,35 InP 3,4 GaN 2,26 GaP
n Ro, CM- 3 C- 1
2.104
3,3
2.104 2.105 2.103
Si
1,12
1.103
Ge
0,66
1.103
ni, CM- 3
B,
CM 3 C- 1
300
K
'Tspont, C
7,9· 1()2
2.106
2,0. 10- 10 5,1.10- 9
3,4
1,2. 104
1.107
1,2.10- 10 8,5.10- 9
2,5
8,9.10- 30
2.
10- 10
2,2.10- 10
4,5.10- 9
3,0
1,0. 10- 12
1,6· 10°
3,9. 10- 13 2,6.10- 6
3,4
3,3.106
1.1010
3,2. 10- 14 3,0· 10- 5
4,0
1,1 . 10 14
2.10 13
2,8.10- 13 3,5.10- 6
peKOM6HHaUHH JIe)!{aT B .n:Harra30He HerrpHM030HHble rrOJIyrrpOBo.n:HHKH -
MeTO.n: XOJIJIa (Hall,
-
2
-
·V X- Xg dx eX - I
(3.21)
.
MeTO.n: rap6Y30Ba (Garbuzov,
eM
x
=
=
1982) 1).
10- 13
X
• • -3/2 (mh + me) me me X (1 + m: + m:) . (300 K)3/2 . ( Eg )2 . n, mh me T 19B
CM 3 . c- I •
r.n:e
m: -
KH,
me -
x
9cpcpeKTHBHa51 Macca 9JIeKTpOHa,
m'h -
(3.24)
9cpcpeKTHBHa51 Macca .n:b1p-
Macca cBo6o.n:Horo 9JIeKTpOHa. MeTo.n: rap6Y30Ba OCHOBaH Ha
rrpOCTbIX KBaHTOBO-MeXaHHqeCKHX pacqeTaX .n:JIH rrpHM030HHbIX rrOJIyrrpo-
Xg
3.n:eCb
B:
1960);
B rrepBOM MeTo.n:e HCrrOJIb3yeTc5I .n:BYX30HHaH Mo.n:eJIb:
6peqb 3aBHCHMOCTbIO rrOKa3aTeJIH rrpeJIOMJIeHHH OT qaCTOTbI H HCrrOJIb30-
Ro
GaP, KpeMHHH, repMaHHH H .n:p. o6JIa-
6HHaUHH. CYIlI.eCTBYIOT H .n:pyrHe crroco6bI pacqeTa 3HaqeHHH K09cpcpHUHeHTa
BaTb 3HaqeHHe rrOKa3aTeJI5I rrpeJIOMJIeHHH Ha KpalO 3arrpeIlI.eHHOH 30HbI: 00
IIpH 9TOM paCqeT-
.n:alOT 3HaqHTeJIbHO MeHbWHMH K09cpCPHUHeHTaMH 6HMOJIeKYJI5IpHOH peKOM-
YpaBHeHHe BaH Poc6pYKa-IlloKJIH MO)!{HO yrrpocTHTb, eCJIH rrpeHe-
flT(kT)3fX Eg ch
10-9 -10- 11 CM3I C.
Hble pe3YJIbTaTbI XOPOIllO corJIaCYIOTC5I C 9KcrrepHMeHTaJIbHbIMH .n:aHHbIMH.
B = 5,8
-8 -2 0:0 - ?fen
77
3.3. 3aBucuMocmb pelwM6uHau,uu om meMnepamypbt U AezupOBaHUR.
BO.n:HHKOB:
=
x hv/ (kT) E/(kT), Xg E g / (kT). IIOCKOJIbKY C YBeJIHqeHH9KcrrOHeHUHaJIbHa51 CPYHKUHH pe3KO B03paCTaeT, BKJIa.n: B HHTerpaJI
B -30 ,
X
10-10
3 -1 CM·C·
(300 K)3/2 .(_ Eg-T 1,59B
)2
(3.25)
BHOCHT TOJIbKO Y3Ka51 06JIaCTb 9HeprHH B6JIH3H KpaH 3arrpeIlI.eHHOH 30HbI. Y 9Toro HHTerpaJIa HeT rrpOCToro aHaJIHTHqeCKOrO peWeHH5I, ero BeJIHqHHY
Bce orrHcaHHble crroco6bI rr03BOJI5IIOT rrOJIyqaTb rrpH6JIH3HTeJIbHO o.n:HHa-
MO)!{HO oueHHTb qHCJIeHHblMH MeTo.n:aMH.
KOBble 3HaqeHH5I K09cpcpHUHeHToB
B paBHOBeCHblX YCJIOBHHX CKOPOCTb reHepaUHH HOCHTe~eH (CKOpOCTb rrOrJIOIlI.eHHH CPOTOHOB) paBHa CKOPOCTH HX peKOM6HHaUHH (CKOpOCTH H3JIY-
B.
HarrpHMep, .n:JIH GaAs K09CPCPHUH-
B, paCCqHTaHHble .n:JIH TeMrrepaTypbl 300 K rro (3.23)-(3.25), rrpH6JIH3HTeJIbHO paBHbl 10- 10 CM 3 /c.
eHTbl H
cpopMyJIaM
(3.21)
qeHH5I CPOTOHOB). IIo9TOMY Mo.n:eJIb BaH Poc6pYKa-IlloKJIH .n:aeT B03MO)!{HOCTb oueHHTb TOJIbKO
paBfloBecflYIO clwpocmb peICoM6uflal1Uu. B rrpe.n:bI-
.n:YIlI.HX rJIaBaX 6bIJIO rrOKa3aHO, 'ITO H3 ypaBHeHHH CKOPOCTH 6HMOJIeKYJI5Ip-
3.3.
3aBHCHMOCTb peKOM6HHa:U;HH OT TeMnepaTypbI H JIerHpOBaHHB
HOH peKOM6HHaUHH MO)!{HO HaHTH qHCJIO aKTOB peKOM6HHaUHH B e.n:HHHue 06beMa 3a e.n:HHHUY BpeMeHH, rrpOHcxo.n:51IlI.HX B paBHOBeCHbIX H HepaBHOBeCHbIX YCJIOBHHX:
R=B·n·p. Terrepb
rrOKa)!{eM,
KaK
rro
Mo.n:eJIH
(3.22)
BaH
Poc6pYKa-IlloKJIH
MO)!{HO
orrpe.n:eJIHTb 3HaqeHHe K09CPCPHUHeHTa 6HMOJIeKYJIHpHOH peKoM6HHaUHH B paBHoBecHblx YCJIOBHHX crrpaBe.n:JIHBO COOTHoweHHe KOToporo H Haxo.n:HTCH BeJIHqHHa K09CPCPHUHeHTa
B:
R = Ro = B .
n;,
3aBHCHMOCTb Bep05lTHOCTH peKoM6HHaUHH OT TeMrrepaTypbI rrpe.n:CTaBJIeHa Ha pHC.
E(k)
3.2,
KOTOPblH rrOKa3blBaeT rrapa60JIHqecKYlO 3aBHCHMOCTb
rrpH HH3KHX H BblCOKHX TeMrrepaTypax. IIpH ee aHaJIH3e MO)!{HO
BbIHBHTb YMeHbweHHe qHCJIa HOCHTeJIeH B HHTepBaJIe 3HaqeHHH KBa3HHM-
dk
B.
rryJIbCa
H3
peKoM6HHaUHH BbIITOJIHHeTCH 3aKOH coxpaHeHHH KBa3HHMrrYJIbCa H BepoHT-
C YBeJIHqeHHeM TeMrrepaTypbI. TaK KaK rrpH H3JIyqaTeJIbHOH
HOCTb peKoM6HHaUHH 9JIeKTpOHOB rrporropUHOHaJIbHa KOJIHqeCTBY cBo6o.n:HblX .n:blPOK C paBHblM 3HaqeHHeM KBa3HHMrrYJIbCa, BepoHTHoCTb peKoM6H-
(3.23)
HaUHH YMeHbwaeTcH C POCTOM TeMrrepaTypbI. 9TOT cpaKT rro.n:TBep)!{.n:aeTC5I COOTHOIlleHH5IMH
B
Ta6JI.
3.1
rrpHBe.n:eHbI 3HaqeHHH K09CPCPHUHeHToB 6HMOJIeKYJIHpHOH
peKoM6HHaUHH, paCCqHTaHHble .n:JI5I pa3HbIX rrOJIyrrpoBo.n:HHKOB rro ypaBHeHHHM
(3.21)
H
(3.24)
H
(3.25),
KOTopble rrOKa3bIBa1OT, 'ITO K09cpCPHUHeHT
6HMOJIeKYJIHpHOH peKOM6HHaUHH 3aBHCHT OT TeMrrepaTypbl 06paTHO rrpo-
(3.23).
rropUHOHaJIbHO
T 372 .
.
Bce xapaKTepHCTHKH MaTepHaJIOB, HCrrOJIb30BaHHble
B paCqeTaX, TaK)!{e rrpe.n:CTaBJIeHbI B HeH.
1'13
9TH X .n:aHHblX BH.n:HO, 'ITO .n:JI5I
rrp5lM030HHbIX rrOJIyrrpOBo.n:HHKOB THrra AIIIBV 3HaqeHH5I K09cpcpHUHeHTOB
I) DH6JIHOrpa<j>HIO co CCblJIKaMH Ha UHKJI 0pHrHHaJIbHbIX pa60T C coaBTopaMH CM. B
[5].
,U. 3.
fap6y30Ba
78
rI
FA. 3. MOaeAu u3AyttameAbiiou pelwM6ulia11uu
6
a
3.3. 3a8ucUMocmb pelwM6ulia11uu om meMnepamypbl U Ae2up08aliUft
I
--
t)
pacqer
R. p
79
c nOMOmblO KBaHTOBO-MeXaHH'IecKOro
nO){XO,!l;a (T.e. npaBHJIa OT6opa no
k)
00
Rsp =
JZ(E)B dc(E) [1- /v(E)] Pred(E) dE 2
Eg - - pacqer
R. p
P
c nOMOJTIl>1O ypaBHeHIDl
P
,nIDI CKOPOCTH 6HMOJIeKy.JIllpHoii:
P
peKoM6HHaUHH
Rsp=Bnp B = 2,3x 10- 10 Z(E)=TIJIOTHOCTb r){e
1 3 CM ·C- ,
"
o~eCKHXMO,!l;
PHC.
3.2.
PaCIIpe){eJIeHHe HOCHTeJIeH 3aplI){a IIpH HH3KOH
(a)
H BbICOKOH
(6)
Nv=
TeM-
IIepaType. BepolITHoCTb peKoM6HHaUHH YMeHblIIaeTClI IIpH BbICOKOH TeMIIepaType H3-3a cOKpameHHlI qHCJIa HOCHTeJIeH B HHTepBaJIe 3HaqeHHH KBa3HHMIIYJIbCa
= 1,8 . 1019
GaNp-Tlma
dk
n = 10 CMT=300K 15
CM-
3
3
3aBHCHMOCTb Bep05lTHOCTH peKoM6HHaUHH OT KOHueHTpaUHH JIerHpyIO-
3.3,
Ha KOTOPOM rrOKa3aHbI CPYHK-
HeBbIpO)!{.D.eHHOrO H
BbIpO)!{.D.eHHOrO JIempOBaHH5I.
lIl.HX rrpHMeceH rrpe.D.CTaBJIeHa Ha pHC. UHH
E(k)
B CJIyqae
113 HHX CJIe.D.yeT, qTO qHCJIO .D.bIPOK B HHTepBaJIe 3HaqeHHH KBa3HHMrrYJIbca
dk
KOHueHTPaUIDI ,!I;bIpOK
Po,
CM-
3
OCTaeTC5I rrOCT05lHHbIM B BbIPO)!{.D.eHHOM CJIyqae. n03TOMY B BbIPO)!{-
.D.eHHOM rrOJIyrrpOBO.D.HHKe Bep05lTHOCTb peKOM6HHaUHH He YBeJIHqHBaeTC5I. ElTo rrO.D.TBep)!{.D.aeTC5I KBaHTOBO-MeXaHHqeCKHM paCqeTOM K03cpcpHUHeHTa 6HMOJIeKYJI5IpHOH peKoM6HHaUHH, 3aBHCHMOCTb KOToporo OT KOHueHTpaUHH.D.bIPOK rrpe.D.CTaBJIeHa Ha pHC.
3.4
(Waldron,
2002).
I1x Hero CJIe.D.yeT,
PHC.
3.4.
Type
300 K
3aBHcHMoCTb CKOPOCTH cIIoHTaHHoH peKoM6HHaUHH B GaN IIpH TeMIIepaH KOHueHTpaUHH IIpHMeceH p-THIIa, paCCqHTaHHOH C IIOMOmbJO KJIaCCH-
qeCKOrO H KBaHTOBO-MeXaHHqeCKOrO IIO){XO){OB. B cJIyqae KBaHTOBO-MeXaHHqeCKOrO IIO){XO){a (HCIIQJIb3YlI IIpaBHJIa oT6opa IIO
k)
CKOPOCTb HCIIblTblBaeT HaCblmeHHe
B CJIyqae BblpO}l{){eHHOrO IIOJIYIIPOBO){HHKa (WaldroII,
qTO K03cpCPHUHeHT 6HMOJIeKYJI5IpHOH peKOM6HHaUHH B CJIyqae BbIPO)!{.D.eHHOro JIempOBaHH5I HaCbIlIl.aeTC5I. MO.D.eJIb BaH Poc6pYKa-lIIoKJIH TaKoH
a
3aBHCHMOCTH
He rrpe.D.CKa3b1BaeT,
TaK KaK ee
2002)
rrpHMeHeHHe
OrpaHHqeHO
HeBbIpO)!{.D.eHHbIM CJIyqaeM. YpaBHeHHe (3.22) crrpaBe.D.JIHBO B cJIyqae HeBblpO)!{.D.eHHbIX rroJIyrrpo-
6
BO.D.HHKOB, .D.JI5I KOTOPbIX xapaKTepHa cpaBHHTeJIbHO MaJIa51 KOHueHTpaUH5I HOCHTeJIeH. CJIe.D.OBaTeJIbHO, H ypaBHeHH5I .D.JI5I paCqeTa K03cpcpHUHeHToB 6HMOJIeKYJI5IpHOH peKoM6HHaUHH TaK)!{e rrpHMeHHMbI TOJIbKO .D.JI5I HeBbIpO)!{.D.eHHbIX rrOJIyrrpoBO.D.HHKOB. B
3TOM cJIyqae K03cpCPHUHeHT
B
He 3aBHCHT
OT KOHueHTpaUHH HOCHTeJIeH. O.D.HaKO rrpH OqeHb BbICOKHX KOHueHTpaUH5IX HOCHTeJIeH BeJIHqHHa K03cpcpHUHeHTa
B
YMeHbiliaeTC5I, qTO CB5I3aHO
C YBeJIHqeHHeM paCCOrJIaCOBaHH5I Me)!{.D.Y KBa3HHMrrYJIbCaMH 3JIeKTpOHOB H .D.bIpOK. n03TOMY .D.JI5I BbIpO)!{.D.eHHbIX rrOJIyrrpOBO.D.HHKOB crrpaBe.D.JIHBO BbIpa)!{eHHe
D = B - (n/ N c ) . B*,
KOTopoe rrOKa3b1BaeT, qTO C POCTOM
KOHueHTpaUHH HOCHTeJIeH K03cpCPHUHeHT peKoM6HHaUHH rra.D.aeT. DOJIee rro.D.p06HOe orrHcaHHe rrOBe.D.eHH5I K03cpCPHUHeHTa peKoM6HHaUHH rrpH BbICOKHX KOHueHTpaUH5IX HOCHTeJIeH, a TaK)!{e qHCJIeHHbIe 3HaqeHH5I BeJIHqHHbI PHC.
3.3.
PaCIIpe){eJIeHHe HOCHTeJIeH 3aplI){a B CJIyqae HeBblpO}l{){eHHOrO
pO}l{){eHHOrO
(6)
(a)
H BbI-
MO)!{HO HaHTH B pa60Tax (Agrawal, Dutta,
IIOJIYIIPOBO){HHKa p-THIIa. B cJIyqae BblpO}l{){eHHorO JIerHpOBaHHlI
IIepeKpblTHe Me}l{){Y 9JIeKTpOHaMH H ){b1pKaMH C O){HHaKOBbIMH 3HaqeHHlIMH KBa3HHMIIyJIbCa He YBeJIHqHBaeTClI
I) eM. TaK}I{e CTaTbJO BaplIIHH B
[6].
1986;
Olshansky,
1984)
1).
B*
80
Fit. 3. MoaeJlu u3J1Y'lameJlbHou peIC0M.6uHau,uu YnpalKHeHHe.
3.4. Bu6J1uoepal/Ju'leclCuu cnucolC
OnpeaeJleHUe al/Jl/JelCmuBHocmu u3J1Y'lameJlbHou peIC0M.6uHa-
u,uu Ha OCHOBe aHaJIH3a TeMnepaTypHblx 3aBHCHMOCTeM CKopocTeM H3JIyqaTeJIbHOM H 6e3bl3JIyqaTeJIbHOM peKoM6HHaUHH no Mo.n:eJIlIM BaH Poc6pYKa-IIIoKJIH H IIIoKJIH-PH.n:a npe.n:cKa}KHTe TeMnepaTypHYIO 3aBHCHMOCTb aljlljleKTHBHoCTH H3JIYQaTeJIbHOM peKOM6HHaUHH B pa3JIHQHblX nOJIynpoBo.n:HHKax.
3.4.
MO)l.eJIb 3HHmTeHHa
nepBall TeopHlI OnTH'IeCKHX nepeXO.ll.OB 6bIJIa pa3pa60TaHa AJIb6epTOM 9HHillTeHHOM. MO.ll.eJIb 9HHillTeHHa OCHOBaHa Ha onHcaHHH cnOHTaHHbIX H BbIHY:>K.ll.eHHbIX (HH.ll.YUHpOBaHHbIX) nepeXO.ll.OB. CnOHmaHHble nepexo8bl npOTeKaIOT 6e3 BHeillHHX B03.ll.eHCTBHH, TOr.ll.a KaK 8bLHlj:JIC8eHHble nepexo8bl HH.ll.YUHPYIOTClI cpOTOHaMH. n03TOMY KOJIH'IeCTBO BbIHY:>K.ll.eHHbIX nepeX0.ll.0B nponopUHOHaJIbHO nJIOTHOCTH CPOTOHOB HJIH nJIOTHOCTH H3JIY'IeHHlI. K03CPCPHUHeHTbI A H 8 onHCbIBaIOT cnOHTaHHbIe H BbIHY:>K.ll.eHHble nepeXO.ll.bI B aTOMe C .ll.BYMlI KBaHTOBbIMH y'POBHlIMH. CXeMaTH'IHO 3TH nepeXO.ll.bI nOKa3aHbI Ha pHC. 3.5. KBaHToBble ypOBHH 0603Ha'leHbI 1 H 2. 9HHillTeHH npe.ll.nOJIO:>KHJI, 'ITO BepOllTHOCTH nepeXO.ll.OB C O.ll.HOrO ypOBHlI Ha .ll.PyroH B e.ll.HHHUY BpeMeHH onpe.ll.eJIlIIOTClI CJIe.ll.YIOIIJ.HMH Bblpa:>KeHHlIMH:
W2-+1 = 8 2-+ 1P(V) + A, Wl-+2 = 8 1-+ 2P(V).)
'I
(3.26) (3.27)
"
Bblpa:>KeHHe, onHCbIBaIOIIJ.ee BepollTHoCTb nepexo.ll.a ~cBepxy BHH3» (.ll.JIlI O.ll.HOrO aToMa), COCTOHT H3 .ll.BYX 'IJIeHOB, O.ll.HH H3 KOTOPbIX cooTBeTcTByeT BbIHY:>K.ll.eHHbIM nepeXO.ll.aM, a .ll.PyroH - cnOHTaHHbIM. CJIaraeMOe, onHCbIBaIOIIJ.ee BbIHY:>K.ll.eHHOe H3JIY'IeHHe, 8 2-+ 1p(v) nponopUHOHaJIbHO nJIOTHOCTH H3JIY'IeHHlI p(v). BepOllTHOCTb cnOHTaHHoro nepeXO.ll.a «CBepxy BHH3~ onpe.ll.eJIlIeTClI KOHCTaHTOH A. BepOllTHOCTb nepeXO.ll.OB ~CHH3Y BBepx~ npOCTO paBHa 8 1-+ 2p(v). K03CPCPHUHeHT 9HHillTeHHa A 6HMOJIeKYJIlIpHOH peKoM6HHaUHH TpaUHH 3JIeKTpOHOB H .ll.bIPOK no peKoM6HHaUHH R = B . n . p He
B aTOMe COOTBeTcTByeT K03CPCPHUHeHTY B nOJIynpOBO.ll.HHKe. B aTOMe KOHueHypaBHeHHIO CKOPOCTH 6HMOJIeKYJIlIpHOH HrpaIOT HHKaKOH POJIH, nOCKOJIbKY .ll.JIlI
81
OCYIIJ.eCTBJIeHHlI nepeXO.ll.a «CBepxy BHH3» BepxHHH ypOBeHb .ll.OJI}KeH 6bITb 3aHlIT (n = 1), a HH}KHHH - cB060.ll.eH (p = 1). 9HHillTeHH .ll.OKa3aJI Ha OCHOBaHHH YCJIOBHH .ll.eTaJIbHOrO paBHOBeCHlI, QTO 8 = 8 2-+ 1 = 8 1-+ 2 . I13 3Toro CJIe.ll.yeT, 'ITO HH.ll.YUHpOBaHHoe norJIOIIJ.eHHe H BbIHY:>K.ll.eHHOe H3JIY'IeHHe lIBJIlIIOTClI B3aHMHO .ll.OnOJIHlIIOIIJ.HMH (KOMnJIeMeHTapHbIMH) npoueccaMH. 9HHillTeHH TaK:>Ke nOKa3aJI, 'ITO OTHOilleHHe K03CPCPHUHeHToB A H 8 Ha 'IaCTOTe v B H30TponHOH cpe.ll.e C nOKa3aTeJIeM npeJIOMJIeHHlI n lIBJIlIeTClI KOHCTaHTOH, paBHOH 8nn3 hv 3 / c3 . 30JIOTOe npaBHJIO
BH6JIHOrpa
Semiconductor Lasers Chapter 3
Casey Jr. H. C. and Panish M. B. Heterostructure demic Press, New York, 1978).
Lasers, Part A, Cap. 3 (Aca-
Bebb H. B. and Williams E. W. "Photoluminescence I: Theory" in Transport and Optical Phenomena edited by R. K. Willardson and A. C. Beer, Semiconductors and Semi metals 8, p. 181 (Academic Press, New York, 1972). Dutta N. K. "Radiative transitions in GaAs and other III-V compounds" in Minority Carriers in ///- V Semiconductors: Physics and Applications edited by R. K. Ahrenkiel and M. S. Lundstrom, Semiconductors and Semi metals 39, p. 1 (Academic Press, San Diego, 1993). Garbuzov D. Z. "Radiation effects, lifetimes and probabilities of band-to-band transitions in direct A3B5 compounds of GaAs type" J. Luminescence 27,
109 (1982). Hall R. N. "Recombination processes in semiconductors" 106 B, Supp!. 17,983 (1960). Kane E. O. "Band structure of indium antimonide"
Proc. Inst. Electr. Eng .
J. Phys. Chem. Solids 1, 249
(1957). Olshansky R., Su C. B., Manning J., and Powazinik W. "Measurement of radiative and non-radiative recombination rates in InGaAsP and AIGaAs light sources"
IEEE J. Quantum Electron. QE-20, 838 (1984). Semiconductor Laser Devices (John Wiley and
Thompso,n G. H. B. Physics of Sons, New York, 1980).
CIIOHTaHHOe
Van Roosbroeck W. and Shockley W. "Photon-radiative recombination of electrons and holes in germanium" Phys. Rev. 94, 1558 (1954). Waldron E. L. "Optoelectronic properties of AIGaN/GaN superlattices" Ph.D. Dissertation, Boston University (2002).
"1" PHC. 3.5. CnoHTaHHoe H3JIYQeHHe, IIOfJIOmeHHe H BbIHY}K.n:eHHoe H3JIYQeHHe B .n:ByXYPoBHeBoM Mo.n:eJIH aTOMa
.n;onOJIHeHHe pe,lf.aKTOpa
1. JIaH.n:ay JI. ,ll., JIHljlnIHU E. M. KBaHToBall MexaHHKa. HepeJIlITHBHCTcKall TeopHlI. - M.:
r TA. 3. MOaeAu u3Ayt.tameAbHou pelwM6uHau,uu
82 2. 3. 4.
,llaBbI.lI.OB
5.
Eepf
A. C.
KBaHTOBali MexaHHKa. -
M.:
EJIOXHHueB ,ll.M. OCHOBbI KBaHTOBOH MexaHHKH.
A. 3. OTITHqeCKHe lIBJIeHHlI 1988 (qaCTb 1); 1991 (qaCTb 2).
IOHOBw'I
A.,
,llHH
TI.
-M.:
1973.
HaYKa,
B rrOJIyrrpOBO.ll.HHKax. -
CBeTO.ll.HO.ll.b1: rrep. C aHfJI. rro.ll. pe.ll..
M.:
A.3.
1983. 113.l1.-Bo.
MfY,
IOHoBHqa. -
r JIasa
M.:
MHP, 1979. - 688 c.
6.
BapIIIHH 11. TI. C06cTBeHHali H3JIyqaTeJIbHali peKoM6HHaUHlI B rrOJIyrrpOBO.D.HHKax / / 113JIyqaTeJIbHali peKoM6HHaUHlI B rroJIyrrpoBO.ll.HHKax. - M.: HaYKa,
4
9JIEKTPHQECKHE CBOHCTBA CBETO,llHO,llOB
1972. C. 9-124.
4.1.
BOJIbTaMnepHbIe xapaKTepHcTHKH CBeTO,ZJ;HO,ZJ;OB
B 9TOH fnaBe o6cY)K.lI.aIDTCli 9neKTpHqeCKHe CBOHCTBa p-n-rrepeXO.ll.OB. OCHOBHble COOTHOIlIeHHlI rrpHBO.ll.lITCli 6e3 rrO.ll.p06HOro BbIBO.ll.a. PaCCMaTpHBaIDTCli
pe3Kue p-n-nepexo8bl
uerrTopOB
NA .
T. e.
C KOHueHTpaUHlIMH .lI.OHOPOB
KOHueHTpaUHlI CBo60.ll.HbIX 9neKTpOHOB
CBo60.ll.HbIX .lI.b1POK H .lI.ecpeKTbI B
ND
H aK-
Bce rrpHMeCH CqHTaIDTCli rronHOCTbID HOHH3HpOBaHHbIMH,
p = NA .
n = N D,
a
KOHueHTpaUHlI
npe.ll.rrOnaraeTclI, qTO cnyqaHHble BKnIDqeHHlI
He KOMneHcupYlOm
crreuHanbHO BBe.ll.eHHble rrpHMeCH I).
paBHOBeCHH B OKpeCTHOCTH p-n-rrepeXO.ll.a 9JIeKTpOHbI co CTOPOHbI
MaTepHana n-THrra .lI.HCPCPYH.lI.HPYIDT OT .lI.OHOPOB B 06naCTb p-THrra, r.ll.e OHH, BCTpeqall .lI.b1pKH B 60nbIlIHX KOHUeHTpauHlIX, peKOM6HHHPYIDT C HHMH. AHanOmqHble rrpoueccbI rrpOHCXO.ll.lIT C .lI.b1pKaMH, .lI.HCPCPYH.lI.HPYIDIII.HMH B 06naCTb n-THrra. B pe3ynbTaTe 9Toro 06naCTb B OKpeCTHOCTH p-n-rrepeXO.ll.a OKa3bIBaeTCli 06e.ll.HeHHOH CBo60.ll.HbIMH HOCHTenllMH, rr09TOMY OHa TaK H Ha3bIBaeTCli -
o6e8HeHHaR. 06JlaCmb.
npH OTCYTCTBHH CBo60.ll.HblX HOCHTeJJeH B 06e.ll.HeHHOH o6nacTH e.ll.HHCTBeHHbIMH 3apll)KeHHblMH UeHTpaMH B HeH lIBnllIDTCli HOHH3HpoBaHHble .lI.OHOPbI H aKuerrTOpbI. 3TH nempYIDIII.He rrpHMeCH 06pa3YIDT 3apll)KeHHble 06naCTH, .lI.OHOPHYID -
Ha CTopOHe n-THrra H aKuerrTopHYID -
Ha CTopOHe
p-THrra. TaKali 06naCTb rrpOCTpaHCTBeHHoro 3apll.ll.a CPopMHPyeT pa3HOCTb rrOTeHuHanOB, Ha3bIBaeMYID
KOHmaKmHoii pa3Hocmb1O nomeHl{uaJl08 VD:
TT
_
kTl NA·ND
VD--n
e
r.ll.e
NA
H
ND -
2 ni'
'
KOHueHTpauHH aKuemopOB H .lI.OHOPOB, ni -
(4.1) co6CTBeH-
Hall KOHueHTpauHlI HOCHTeneH B rronyrrpOBO.ll.HHKe. Ha 30HHOH .lI.HarpaMMe (pHC.
4.1)
rrOKa3aHa KOHTaKTHali pa3HOCTb rrOTeHUHanOB. 3TO rrOTeHUHanb-
HbIH 6apbep, KOTOPbIH .lI.On)KHbI rrpeO.ll.OneTb cBo6o.ll.Hble HOCHTenH TOKa .lI.nll rrOrra.ll.aHHlI B HeHTpanbHYID o6nacTb C rrpOBO.ll.HMOCTbID rrpoTHBOrrOnO)KHOrO THrra. 1) CM. KHHfy
[1]
I 84
Fit. 4.
I
3JteKmpUtteCKue C80ucm8a c8emo8uo808
a
I
---------..::------------------_.
I
,,
p-n-nepeXO.ll.a
85
BoJtbma~tnep1tbte xapaKmepucmuKu c8emo8uo808
4.1.
f
ypa8fleflueM llloKJLu.
HHOr.ll.a Ha3bIBalOT
ma.ll.blO nOnepeqHOrO CeqeHH5I
A
)l.JI5I .lI.HO.ll.a C nJIO-
OHO HMeeT BH.lI.
i
1= eA (
~,~--~-r----------Ee
:
,~WD----'
Ee-EF
-TE;~-E~----:==1J--'C---=:-- E,
r.ll.e Dn,p H Tn,p -
fQ; .
VT;
+ [JJ.:.
n;
V-:;:;:
ND
1) ,
n; ) . (eeV/kT NA
(4.3)
K03CPCPHUHeHTbI .lI.HCP$Y3HH H BpeMeHa )KH3HH .lI.JI5I 3JIeK-
TPOHOB H .lI.b1POK -
HeOCHOBHbIX HOCHTeJIeH.
npH o6paTHoM CMemeHHH .lI.HO.ll. BXO.ll.HT B pe)KHM HaCblmeHH5I no TOKy. ~----------------Ev
BeJIHqHHa
TOKa
HaCblmeHH5I
BOJIbTaMnepHa51 xapaKTepHCTHKa
6
______________- - - - - -....-=-=--'__________
,,
~.-.-
_.-EFp
PHC.
4.1.
J eVD -eV
---:-----r------------Ee '' _._(._._._._._._._._._._._._. EFn '' ,
,,
COcTollHHe
CMelIl,eHHH.
(V
< 0) I
_._._._._._._._._.-l-._. e.~.l , '
------------------~--
onpe.ll.eJI5IeTC5I
K03cpCPHUHeHTOM,
CT05l-
mHM B ypaBHeHHH illOKJIH nepe.ll. 3KcnOHeHUHaJIbHOH cpYHKUHeH. n03TOMY
=
p-n-nepexO.ll.a
npH 06paTHOM CMemeHHH
HMeeT CJIe.ll.YlOmHH BH.lI.:
Is' (eeV/kT -
1), Is =
npH np5lMOM CMemeHHH
eA (
. n; + [JJ.:. n;). VfQ; T; ND V-:;:;: NA
p-n-nepexo.ll.a
Hanp5l)KeHHe
V
(4.4)
Ha .lI.HO.ll.e 06blq-
kTje, n03ToMY [exp(eVjkT) - 1] ~ ~ exp(eVjkT). I1cnoJIb3Y51 Bblpa)KeHHe (4.1), nOJIyqaeM ypaBHeHHe illOKJIH
HO
HaMHoro
60JIbllIe
BeJIHqHHbI
.lI.JI5I .lI.HO.ll.a npH np5lMOM CMemeHHH B BH.lI.e
------------------Ev
~~'
p-n-rrepexoAa: a - rrpH HYJIeBOM CMelIl,eHHH, 6 - rrpH rrpllMoM p-n-rrepeXOAa HeOCHOBHble HOCHTeJIH TOKa
1= eA
TIpH rrpllMoM CMelIl,eHHH
(~ . NA + ~ . ND)
. ee(V-VD)/kT.
(4.5)
AHlPYHAHpYIOT B HeHTpaJIbHble 06JIaCTH, rAe peKOM6HHHPYIOT C OCHOBHblMH HOCH-
nOKa3aTeJIb 3KcnoHeHUHaJIbHOH CPYHKUHH: B cpopMyJIe
TeJIlIMH
(4.5)
CBH.lI.eTeJIbCTBY-
eT 0 TOM, qTO npH npH6JIH)KeHHH Hanp5l)KeHH5I Ha .lI.HO.ll.e K KOHTaKTHOH illHpHHa 06e.ll.HeHHOH 06JIaCTH, ee 3ap5l.ll. H KOHTaKTHa51 pa3HOCTb no-
pa3HOCTH
nOTeHUHaJIOB,
T. e.
npH
V ~ VD,
TOK qepe3 nepexo.ll. pe3KO
TeHUHaJIOB CB5I3aHbI ypaBHeHHeM nyaccOHa. 3Ha51 KOHTaKTHYIO pa3HOCTb
B03paCTaeT. Hanp5l)KeHHe, npH KOTOPOM npOHCXO.ll.HT pe3Koe YBeJIHqeHHe
nOTeHUHaJIOB, MO)KHO onpe.ll.eJIHTb umpHHy 06e.ll.HeHHOro CJI05l:
TOKa, Ha3bIBaeTC5I
WD
= J2E: (V _ VD) . (_1 + _1 )', e
NA
nopOC!08blM flanpJl:JICeflueM.
)KeHHe Vnop . ~ VD. Ha 30HHOH .lI.HarpaMMeHeBblpO)K.lI.eHHOrO
(4.2)
ND
OqeBH.lI.HO, qTO 3TO Hanp5l-
p-n-nepeXO.ll.a
(CM. pHC.
4.1)
nOKa3aHO, qTO ypoBeHb
r.ll.e a
C
V-
=
cr . co -
.lI.H3JIeKTpHQeCKa51
npOHHuaeMOCTb
nOJIynpOBO.ll.HHKa,
3HepmH Me)K.lI.Y ypoBHeM
Hanp5l)KeHHe Ha .lI.HO.ll.e.
n Nc
06e.ll.HeHHa51 06JIaCTb 06JIa.ll.aeT BbICOKHM conpOTHBJIeHHeM, nOCKOJIbKY B HeH
MaJIO
CBo60.ll.HbIX HOCHTeJIeH.
BHeUIHee Hanp5l)KeHHe
B 3aBHCH-
MOCTH OT npHJIO)KeHHOH nOJI5IpHOCTH n03BOJI5IeT JIH60 YBeJIHqHTb, JIH60 YMeHbllIHTb nOTeHUHaJIbHbIH 6apbep
p-n-nepeXO.ll.a.
npOTHBOnOJIO)KHblX THnOB, qTO npHBO.ll.HT K
Y8eJLUtteflU1O
TOKa. HOCHTeJIH
.lI.HCPCPYH.lI.HpylOT B 06JIaCTH C npOTHBOnOJIO)KHbIM THnOM npOBO.ll.HMOCTH, r.ll.e OHH peKOM6HHHPYIOT, HcnYCKa51 CPOTOHbI (B CJIyqae H3JIyqaTeJIbHOH peKOM6HHaUHH) . nepBbIM BOJIbTaMnepHYIO
30Ha n-THna,
EF - Ev = -kTln.J!....
30Ha
Nv
npH IIP~MOM CMeme-
HHH 3JIeKTpOHbI H .lI.b1pKH HH)KeKTHpYIOTC5I B 06JIaCTH C npOBO.ll.HMOCT5IMH
Eo - EF = -kT In -
p-TH:na.
(4.6) (4.7)
30HHa51 .lI.HarpaMMa nOKa3bIBaeT, qTO CJIe.ll.YlOma51 cyMMa 3HepmH paBHa HYJIIO:
eVD - Eg
+ (EF -
Ev)
+ (Eo -
EF)
= O.
(4.8)
B JIempOBaHHbIX nOJIynpOBO.ll.HHKaX paCCT05lHHe Me)K.lI.Y ypOBHeM
(I-V)
illOKJIH, n03TOMY Bblpa)KeHHe .lI.JI5I
p-n-nepeXO.ll.a OnHCaJI I-V-xapaKTepHcTHKH TOHKoro pe3Koro xapaKTepHCTHKY
MH H rpaHHuaMH COOTBeTCTBYlOmH:X 30H HaMHoro MeHbllIe llIH:pHHbI 3anpemeHHOH 30HbI, T. e. co CTOPOHbI 06JIaCTH n-THna
Eo - EF «Eg,
a co
86
CTOPOHbI 06JIacTl-1 p-Tl-ma
(4.6)
(4.7)
H
EF - Ev «Eg .
CJIe)I.yeT, "ITO 3TH BeJIHqHHbI rroqTH He 3aBHCHT OT KOH-
(4.8),
rrpeHe6pe% TpeTbHM H qeTBepTbIM CJIaraeMbIMH B ypaBHeHHH
H )I.JIH
Oll.eHKH KOHTaKTHOH pa3HocTH rrOTeHlI.HaJIOB (H rroporOBoro HarrpH)KeHHH) HCrrOJIb30BaTb CJIe)I.YIOllI.ee Bblpa)KeHHe:
0,35 MKM
0,4
0,9
4,0
§
T=295K
Eiill oj
•
ttl ~....
3,0 3eneHLIii GaP1 HHIapHLIii A1InGaP-.
~~ ~ 0
(4.9)
4.2
),=2,01,5 1,2
KpoMe Toro, H3 Bblpa)KeHHH
lI.eHTpall.HH rrpHMeceH (JIOrapH
Ha pHC.
87
4.2. OmlCAOHeHUJl om UaeaAbHbtX BOAbmaMnepHbtX xapaICmepucmuIC
Dt. 4. 3AeICmpUttecICue cBoiicmBa cBemOaUOaOB
~ ~ g
2,0 L - - - - KpaCHO-OpaIDKeBbIiiAlInGaP HI< GaAs (870 HM)
[
J t ~r
+HHTapHLIiiAIInGaP
opaIDKeBbIii AIInGaP KpacHLIiiAlGaAs
+
~ ~ 1,0 rrpe)I.CTaBJIeHbI BOJIbTaMrrepHble xapaKTepHcTHKH pa3Hblx rro-
JIyrrpOBO)I.HHKOBbIX MaTepHaJIOB, )I.JIH KOTOPbIX rrpHBe)I.eHbI 3HaqeHHH llIH-
~
HarrpH)KeHHH, rrOJIyqeHHble H3 3KcrrepHMeHTaJIbHbIX 3aBHCHMOCTeH, rrpH6JIH3HTeJIbHO paBHbI 3HaqeHHHM
°
°
0,0 ILL-..L..-..L.-...l..-.L---L---I----1---1...-L--L..--L--L--1---:-13-=-0--1----1---1...--'---:-'4 1,0 2,0 , ,
pHHbI 3arrpelll.eHHOH 30HbI. BH)I.HO, "ITO )I.JIH 3TH X MaTepHaJIOB rroporOBble
lliHpHHa 3arrpeIlleHHoH 30HbI
Eg • PHC.
0,8
Eg~O,73B
0,6
«-
Eg~
2 -
Eg~
GaAs GaAsP
0- InGaN
.....;- 0,4
THnH"IHaSl 3aBHCHMOCTb npSlMoro HanpSl)!{eHHSI Ha .lI.HO.ll.aX OT llIHpHHhl
3anpemeHHoH 30Hhl .lI.JISI pa3Hblx THnOB CBeTO.ll.HO.ll.OB (Krames,
T=295K a- Ge 6- Si
~
4.3.
E!J' 3B
1,13B 1,43B
Eg~2,03B Eg~2,93B
2000;
Emerson,
2002) )I.JIH 3THX CHCTeM He)I.OCTaTOqHO oTpa60TaHa TeXHOJIOrHH HaHeceHHH KOHTaKTOB, "ITO TaK)Ke rrpHBO)I.HT K rrOBblIIIeHHIO rra)I.eHHH HarrpH)KeHHH Ha HHX; MaTepHaJIbI
THrra
GaN
06bIqHO
06JIa)I.aIOT
HH3KOH
rrpOBO)I.HMOCTbIO
~
~
p-THrra;
0,2
B 6y
0,0
4.2.
° PHC.
4.2.
HarrpIDKeHHe Ha ,!I;HO,!l;e
V,
OTKJIOHeHHH OT H,lJ.eaJIbHbIX BOJIbTaMnepHbIX xapaKTepHCTHK
B
BOJIbTaMnepHble xapaKTepHcTHKH p-n-nepeXO,!l;OB pa3HbIX nOJIynpOBO.ll.HHKOBbIX MaTepHaJIOB, nOJIY"leHHble npH KOMHaTHOH TeMnepaType
113 ypaBHeHHH 1II0KJIH CJIe)I.yeT TeOpeTHqeCKOe Bblpa)KeHHe rrpe)I.rroJIaraeMOH BOJIbTaMrrepHOH xapaKTepHCTHKH p-n-rrepeXO)I.a • .lI.JIH orrHcaHHH 3KcrrepHMeHTaJIbHO Ha6JIIO)I.aeMbIX xapaKTepHCTHK HCrrOJIb3YIOT ypaBHeHHe
Ha pHC.
4.3
rrOKa3aHa 3aBHCHMOCTb rrpHMoro HarrpH)KeHHH Ha )I.HO)I.e or
llIHpHHbI 3arrpelll.eHHOH 30HbI rrpH TOKe qepe3 )I.HO)I.
20
YJIbTpa
(4.9),
COOTBeTCTByeT rrpe)I.-
rrOJIaraeMbIM 3HaqeHHHM rrpHMoro HarrpH)KeHHH. 113 pHC.
4.3
CJIe)I.yeT, "ITO
xapaKTepHCTHKH 60JIbIIIHHCTBa rrOJIyrrpOBO)I.HHKOBbIX CBeTO)I.HO)I.OB .JIe)KaT Ha 3TOH JIHHHH. I1cKJIIOqeHHe COCTaBJIHIOT CBeTO)I.HO)I.bI Ha OCHOBe HHTPH)I.OB
III
I = Is . eeV/(nidealkT),
MA )I.JIH CBeTO)I.HO)I.OB
rpyrrrrbI. .lI.JIH 06bHcHeHHH 3THX OTKJIOHeHHH HMeeTCH HeCKOJIbKO
rrpHqHH:
r)I.e nideal -
CmUKU
(4.10)
Koatj)(jJUI1Ueflm fleu8eaJlbflOCmU 80JlbmaMnepflOU xapaKmepu-
)I.HO)I.a • .lI.JIH H)I.eaJIbHbIX )I.HO)I.OB OH paBeH
1. .lI.JIH
peaJIbHbIX )I.HO)I.OB
JIe)KHT B )I.Harra30He .1,1-1,5. O)I.HaKO v Ha OCHOBe apceHH)I.OB H
K03
K03
2,
a )I.JIH GaN/GaIrtN-)I.Ho)I.oB nideal
=: 6.
DOJIee rrO)I.p06HbIH aHaJIH3 K03
1988)
1).
)I.JIH HHTpH)I.HbIX CHCTeM xapaKTepHbI
1) 06CY)!{.lI.eHHe HeH.lI.eaJIbHbIX BOJIbTaMnepHbIX xapaKTepHCTHK CBeTO.ll.HO.ll.OB C reTepOCTpYKTypaMH InGaN/GaN CM. B
[2-5].
88
FA.
i iT i
a T=300K
-
conpOTHBJIeHIDI o 0
BKJDOQeHHe
2,0
Rp ,
.. - .. -""
_.. -.. -
-0,0
I
4.5
"
BJIllJlllHe
HarrpIDKeHHe Ha )J;Ho)J;e
I -
I._._' .,,,.
CTHKH CTP05lT B JIHHeHHOM H JIOrapHcpMHqeCKOM MaCllITa6ax. Ha pHC.
~,'
I I I
•
BpeMeHHbIM BKJIIOqeHHeM. ,lI.JI5I HX BbI5lCHeHH5I BOJIbTaMrrepHble xapaKTepH-
npelK,lleBpeMeHHoe
~ ~ei\OBaTeJILHoro ~-r;-'I i "_
'
0,0
corrpOTHBJIeHHH (rrOCJIe,n:oBaTeJIbHblX HJIH rrapaJIJIeJIbHblx), TaK H rrpe)!{,n:e-
BAX
I I
• I
BJIllJlllHe
.....·40 ~
• I
Rp
~
O,n:OB OT H,n:eaJIbHbIX MoryT 6b1Tb 06YCJIOBJIeHbI KaK HaJIHqHeM rrapa3HTHbIX
I
I Hi\eaJlLH3JI
~
6,0
:.:
I
KOHKpeTHble rrpHqHHbI OTKJIOHeHHH peaJIbHbIX !-V-xapaKTepHcTHK ,n:H-
6
'~i/
i\HOi\GaAs
8,0
89
4.2. OmKAOfteftUJl om UaeaJlbftblX 80AbmaMnepftblX xapaKmepucmuK
4. 3AeKmpUtteCKue c8oucm8a c8emOaUOa08
I
I
V
conpOTHBJIeHIDI
o--;Wv--+f-o
I I
hfA
.J
Rs
~
J
./
V
V lHA
I
o
0,5
1,0
1,5 2,0 V, B
2,5
PHC.
HarrpIDKeHHe Ha )J;Ho)J;e
l1.l1.eaJIbHali I-V -xapaKTepHcTHKa .lI.HO)J;a, orrHcblBaeMall ypaBHeHHeM 1ll0KJIH
4.5, a. HaeaAbftblU aUoa.
PHC. 4.4. BJIHlIHHe rrOCJIe)J;OBaTeJIbHblX H rrapaJIJIeJIbHbIX rrapa3HTHbIX corrpOTHBJIeHHH Ha BAX p-n-rrepexo.ll.a (a). BOJIbTaMrrepHali xapaKTepHcTHKa C qeTKO Bblpa2KeHHbIM rrpe2K.lI.eBpeMeHHbIM BKJIIOqeHHeM CBeTO.ll.HO.ll.a, CB1I3aHHoro JIH60 C )J;e
06JIa,n:aIOT
npOmU8JleflURMU. Ha pHC.
He)!{eJIaTeJIbHbIMH
4.4
HJIH
napaaumflblMU CO-
I
I
®
~I
I
) ®
)
lMA
V
rrOKa3aHO BJIH5IHHe rrOCJIe,n:OBaTeJIbHbIX H
V lHA
,.=-----/
rrapaJIJIeJIbHbIX rrapa3HTHbIX corrpOTHBJIeHHH Ha BOJIbTaMrrepHble xapaKTePHCTHKH (BAX)
p-n-rrepexo,n:a.
nOCJIe,n:oBaTeJIbHble corrpOTHBJIeHH5I MoryT
~
3a corrpOTHBJIeHH5I HeHTpaJIbHOH 06JIaCTH. JII06ble KaHaJIbI B
......
-=·:::-·F
rr05lBJI5ITbC5I H3-3a CJIHllIKOM 60JIbllIOrO corrpOTHBJIeHH5I KOHTaKTOB HJIH H3-
p-n-rrepexo,n:e,
BbI3BaHHble pa3pYllIeHH5IMH ero 06JIaCTeH HJIH ,n:ecpeKTaMH Ha rroBepxHocTH,
00000
- - -
rrpHBo,n:51T K CPOpMHpoBaHHIO rrapa3HTHbIX rrapaJIJIeJIbHbIX corrpOTHBJIeHHH. ,lI.JI5I yqeTa rrapa3HTHbIX corrpOTHBJIeHHH BOJIbTaMrrepHYIO xapaKTepHCTHKY ,n:Ho,n:a,
orrpe,n:eJI5IeMyIO
CPHll.HpOBaTb. CqHTa5l, "ITO H,n:eaJIbHOMY ,n:HO,n:y,
a
Rs -
ypaBHeHHeM
Rp -
1ll0KJIH,
corrpOTHBJIeHHe,
corrpOTHBJIeHHe,
He06xo,n:HMO
MO,n:H-
CT05llll.ee rrapaJIJIeJIbHO
CT05llll.ee
rrOCJIe,n:OBaTeJIbHO
C H,n:eaJIbHblM ,n:HO,n:OM H llIYHTOM, Bblpa)!{eHHe ,n:JI5I BOJIbTaMrrepHoH xapaKTepHcTHKH p-n-rrepexo,n:a rrpH rrp5lMOM CMelll.eHHH MO)!{HO 3arrHcaTb B BH,n:e
! _ (V - IRs) =! . ee(V-1Rs)/(nideal kT ) Rp s • npH
Rp
--+ 00,
Rs
--+
0
(4.11)
3TO Bblpa)!{eHHe CTpeMHTC5I K ypaBHeHHIO 1ll0KJIH.
O,n:HaKO HHOr,n:a BKJIIOqeHHe CBeTo,n:Ho,n:a rrpOHcxo,n:HT He MrHOBeHHO ITO ,n:OCTH)!{eHHH rroporOBoro
Harrp5l)!{eHH5I,
,n:Harra30H Harrp5l)!{eHHH. Ha pHC.
4.4,6
a
paCT5IrHBaeTC5I Ha HeKOTopbIH
rrOKa3aHbI 06a pe)!{HMa BKJIIOqeHH5I
,n:Ho,n:a. nJIaBHOe BKJIIOqeHHe CBeTo,n:Ho,n:a qaCTO Ha3bIBaIOT npe:HCOeBpeMefl-
flblM 81CJllOtleflueM. n05lBJIeHHe TOKa qepe3 ,n:HO,n: ,n:o ,n:OCTH)!{eHH5I rroporoBoro Harrp5l)!{eHH5I 06b5lCH5IeTC5I JIH60 rrepeHOCOM HOCHTeJIeH qepe3 rroBepxHOCTHble COCT05lHH5I (rroBepxHocTHbIMH TOKaMH YTeqKH), JIH60 HaJIHqHeM rJIy60KHx rrpHMecHblx ypoBHeH B 06beMe rrOJIyrrpoBo,n:HHKa.
'By H)'JIeBoe CMelI\eHHe repMH'leCKOe paBHOBeCHe
MaJIOe CMelI\eHHe (TOK peKOM6HHal\HH)
o6parnoe CMelI\eHHe (TOK reHepaI\HH)
PHC. 4.5,6. flpou.eccbl eeftepau.uu u peKOM6uftau.uu 8 o6eafteftftOU 06Aacmu. B ypaBHeHHH 1ll0KJIH He yqHTbIBaIOTCli aKTbI reHepaD;HH H peKOM6HHaD;HH HOCHTeJIeH, 'rrpOHCXO.ll.lIll1.He B 06e.ll.HeHHOH 06JIaCTH. O.ll.HaKO B peaJIbHbIX .lI.HO.ll.aX B 9TOH 06JIaCTH rrpaKTHqeCKH BCer.ll.a CYlll.eCTBYIOT rrpHMeCHble ypOBHH - JIOBYIIIKH, rrOBblIIIaIOllI.He BepOliTHOCTb peKOM6HHaD;HH, KOTopble rrpHBO.ll.lIT K rrOllBJIeHHIO H36bITOqHOrO TOKa KaK rrpH rrpliMOM, TaK H rrpH 06paTHOM CMelll.eHHH. B pe2KHMe rrpliMoro CMelll.eHHlI B03HHKHOBeHHe H36bITOqHOrO TOKa 06bllCHlieTCli aKTaMH peKOM6HHaD;HH HeOCHOBHbIX HOCHTeJIeH B 06e.ll.HeHHOH 06JIaCTH. 3TOT TOK CKa3b1BaeTClI, B OCHOBHOM rrpH HH3KHX Harrpll2KeHHlIX H rrpHBO.ll.HT K rrOBblIIIeHHIO K09
90
91
4.2. OmKJLOHeHUR om UaeaJLbHblX BOJLbmaMnepHblX xapaKmepucmuK
Fit. 4. 3JLeKmpU'leCKUe CBoucmBa cBemOaUOaOB
I
I
~~~
lMA
)
,,
V
@)-®-~""I-<®
V
lIlA
4.5, e. JI.uoa c napaaumHblMU napaJLJLeJLbHblM u nOCJLeaOBameJLbHblM conpOmUBJLeHURMU. HaJIHqHe TaKHX corrpOTHBJIeHHH rrpHBo,n:HT K HCKa)KeHHlIM I-V-
PHC. PHC.
4.5, B. C/JomomoK.
Koprryc,
TIPH OCBeru:eHHH B ,n:Ho,n:e, rrOMeru:eHHOM B rrp03paqHbIH
6y,n:eT B036Y)K,n:aTbcli
TI03TOMY Bce H3MepeHHlI Heo6xo,n:HMO
xapaKTepHcTHKH CBeTo,n:Ho,n:a, KaK rrpH MaJIblX, TaK H rrpH 60JIblllHX TOKax
rrpoBo,n:HTb B TeMHOTe. ECJIH BbIKJIIOqHTb CBeT HJIH HaKpbITb YCTaHoBKY rrJIOTHOH TKaHbIO, rrapa3HTHbIH
I
H3MepHTeJIbHali arrrrapaTypa rrpH 3TOM
10-
rrpH6JIH3HTeJIbHO paBHbIH
15
A. 3TOT TOK, KaK rrpaBHJIO, He CB1I3aH C ,n:HO,n:OM.
CaMble TOqHble H3MepHTeJIbHble rrpH60pbI rrpH HYJIeBOM CMeru:eHHH H rrOJIHOH TeMHOTe 6y,n:YT rrOKa3bIBaTb TOK rropll,n:Ka
10-
15
A
(10-
15
A
= 10-
3
ITA)
~
I
Y I
I
I I I I I I I I I
/
V
Rs/ PHC.
4.5, e. JI.uoa
C
,'D2
)'
lMA
)
V
> Vih2
4.5, JIC.
PHC.
lMA
I
IIJIO~a.z\bl »IIJIO~a.z\b2
I
I I I I I I I I
I
I I I
D2
Vihl
I
DI
)1.HO,n: C rrapaJIJIeJIbHbIM rrapa3HTHbiM p-n-rrepexo,n:OM MeHbllleH rrJIoru:a-
)
,n:H H C MeHbllleH BbICOTOH rroTeHUHaJIbHOrO 6apbepa, qeM OCHOBHOH rrepexo,n:. )1.JIli
V lllA
JIH60 qepe3 rroBepxHocTHble COCTOllHHlI rro rrepHMeTpy KpHCTaJIJIa, JIH60 BHYT-
TaKHX ,n:HO,n:OB xapaKTepHo rrpe)K,n:eBpeMeHHoe BKJIIOqeHHe, 06bllcHlieMoe YTeqKaMH peHHHMH ,n:e
napaaumHblM nOCJLeaOBameJLbHblM conpOmUBJLeHueM. HaJIHqHe
rrOCJIe,n:OBaTeJIbHOrO corrpOTHBJIeHHlI Be,n:eT K OTKJIOHeHHIO I-V-xapaKTepHcTHKH
C MeHbllleH, ·qeM Y OCHOBHoro ,n:Ho,n:a, BbICOTOH rroTeHUHaJIbHOrO 6apbepa. OTMeTHM, qTO B 3TOM cJIyqae HCKpHBJIeHHe
I-V -xapaKTepHcTHKH
CBeTo,n:Ho,n:a Ha
CBeTo,n:Ho,n:a OT H,n:eaJIbHOH 3KcrrOHeHTbI B 06JIaCTH 60JIblllHX 3HaqeHHH rrpliMoro
rpa
TOKa. B
COOTBeTCTBHH C rrpaBHJIOM KHpxro<pa 3HaqeHHlI Harrpll)KeHHH Ha ,n:Ho,n:e
TOKax rrpliMoro CMeru:eHHlI, qeM ypoBeHb o6paTHoro TOKa HaCblru:eHHlI. 3TO H eCTb
I-V -xapaKTepHcTHKa rrpocToro
OCHOBHoe OTJIHqHe OT CJIyqall ,n:Ho,n:a C rrapaJIJIeJIbHbIM rrapa3HTHbIM corrpOTHBJIeHHeM
H Ha corrpOTHBJIeHHH CKJIa,n:b1BaIOTCli. OTMeTHM, qTO
corrpOTHBJIeHHlI lIBJIlieTCli JIHHeHHOH rrpH rrOCTpoeHHH Ha rpa
I-V -xapaKTe-
PHCTHK CBeTo.n.Ho.n.OB. npHBe.n.eHHble .n.HarpaMMbI MorYT rrOMOqb qHTaTeJIHM pa306paTbcH Ha rrpaKTHKe B rrp06JIeMaX, B03HHKalOIlI.HX B peaJIbHbIX ,n:HO.n.ax.
YnpaJKHeHHe: KpUmU'leCKUe mO'lKU Ha BOJLbmaMnepHou xapaKmepucmUKe CBemoaUoaa BOJIbTaMrrepHble xapaKTepHCTHKH CBeTo,n:Ho,n:a qaCTO 3a,n:aIOT qeTblpbMlI TOqKaPHC.
4.5, a. JI.uoa
C
napaaumHblM napaJLJLeJLbHblM conpOmUBJLeHUeM (utYHmoM).
B COOTBeTCTBHH C rrpaBHJIOM KHpxro<pa TOKH qepe3 ,n:HO,n: H corrpOTHBJIeHHe CKJIa,n:bI-
npRMblM HanpRJlCeHUeM 1- Vfl, npRMblM HanpRJlCeHUeM 2- Vf2' npRMblM HanpRJlCeHUeM 3 - Vf3 H o6pamHbiM mOKOM Hacblw.eHuR Is. OHH orrpe,n:eJIliIOTCli MH:
COOTBeTCTBeHHO rrpH pa60qeM TOKe (HarrpHMep
BaIOTCli. OTMeTHM, qTO <popMa HCKpHBJIeHHlI xapaKTepHcTHKH rrpH rrpliMoM CMeru:e-
(10
HHH ,n:Ho,n:a, Ha6JIIO,n:aeMali Ha rpa
3TH KpHTHqeCKHe TOqKH rrOKa3aHbI Ha _pHC.
3HTeJIbHO COBrra,n:aeT C o6paTHbIM TOKOM HaCblru:eHHlI. I1MeHHo rro 3TOH oco6eHHOCTH MO)KHO pacrro3HaTb HaJIHqHe rrapa3HTHoro rrapaJIJIeJIbHOrO corrpoTHE!JIeHHlI
MKA), OqeHb HH3KOM rrpliMOM TOKe
(I
100
MA), He6oJIblllOM rrpliMOM TOKe
MKA) H 06paTHOM Harrpll)KeHHH
(-5
B).
4.6.
Tpe6yeTcli 06ocHoBaTb Bbl60p KpHTHqeCKHX TOqeK Ha BOJIbTaMrrepHblX xapaKTepHcTHKax CBeTo,n:Ho,n:OB
(a)
H orrpe,n:eJIHTb, KaiwH H3 CJIe,n:YIOru:HX ,n:BYX CBeTo,n:Ho,n:OB
IrrGaN o6JIa,n:aeT JIyqlllHMH xapaKTepHCTHKaMH
(6): I) Vfl
= 3,2
B,
Vf2
= 2,5
B,
92
Tit. 4. T
T
T
1
1
j
1
100MA
__ C___'___
J
I
OTMeTHM, 'ITO .n.JIH 60JIbIlIHHCTBa .n.HO.n.OB rrapaJIJIeJIbHOe corrpOTHBJIeHHe HaMHoro rrpeBbliliaeT rrOCJIe.n.OBaTeJIbHOe, rr03TOMY rrpH oueHKe rrapaJIJIeJIbHOro corrpOTHBJIeHHH HeT Heo6xo.n.HMOCTH Y'IHTblBaTb rrOCJIe.n.OBaTeJIbHOe
I
corrpOTHBJIeHHe. nOCJIe.n.OBaTeJIbHOe corrpOTHBJIeHHe CJIe.n.yeT oueHHBaTb TOJIbKO rrpH Bbl-
IOMKA=L IMKA't, ---'---'-0;0 1
-SB
•
93
4.3. O~eftKa BeltU'lUftbt napaaUmftbtX conpOmUBlteftUU auoaa
3lteKmpU'leCKUe CBoucmBa cBemOaUOaOB
COKHX HarrpH)I{eHHHX, Kor.n.a
V ~( l., Vf3 Vf2 Vfl
Is
V> Eg/e. B
3THX CJIY'IaHX BOJIbTaMrrepHaH
xapaKTepHCTHKa .n.Ho.n.a CTaHOBHTCH JIHHeHHOH H
rr03TOMY .n.JIH oueHKH
rrOCJIe.n.OBaTeJIbHOrO COrrpOTI-IBJIeHHH MO)KHO HCrrOJIb30BaTb COOTHOIlIeHHe
(4.13)
Rs = dV/ dI. O.n.HaKO PHc.4.6. KpHTH'ieCKHe TOqKH BAX CBeTo,n:Ho,n:a: npllMoe Hanpll)l{eHHe 1, Vfl (H3MeplleMoe npH pa60qeM TOKe, HanpHMep 100 MA), npllMoe Hanpll)l{eHHe 2, Vf2 (H3MeplleMoe npH He60JIbIlIOM npllMOM TOKe, 10 MKA), npllMoe Hanpll)l{eHHe 3, Vf3 (H3MeplleMoe npH OqeHb HH3KOM npllMOM TOKe, 1 MKA), H 06paTHbIH TOK HaCblIUeHHlI, Is (onpe,n:eJIlIeMbIH npH 06paTHoM Hanpll)l{eHHH, -5 B)
Vf3 = 2,3 B, Is Is = 0,8 MKA.
=
0,8 MKA; 2)
VfI
=
3,4 B,
Vf2
=
2,0 B,
Vf3
=
1,8 B,
(4.11)
BOJIbTaMrrepHYro xapaKTepHCTHKY
(Rp ~ 00)
MO)KHO 3arrHcaTb B BH.n.e:
(4.14) PeIlIHB 3TO ypaBHeHHe OTHOCHTeJIbHO rro
PemeHHe. (a) nJIlI CBeTo,n:Ho,n:OB, H3JIyqaIOIUHX Ha O,n:HOH H TOH )I{e nHKOBOH ,n:JIHHe BOJIHbI, Vfl ,n:OJI)I{HO 6bITb· KaK MO)l{HO MeftbUle, nOCKOJIbKY ero BblCOKHe 3HaqeHHlI YKa3bIBaIOT Ha 60JIbIlIOe nOCJIe,n:OBaTeJIbHOe conpOTHBJIeHHe. Hanpll)l{eHHe Vf2 ,n:OJI)I{HO 6bITb KaK MO)l{HO 60ltbUle H KaK MO)l{HO 6JIH)I{e Vfl, nOCKOJIbKY HH3Kall BeJIHqHHa Vf2 CBH,n:eTeJIbCTByeT 0 qpe3MepHbIX YTeqKaX, npHBo,n:lIIUHX K npe)l{,n:eBpeMeHHOMY BKJIIOqeHHIO CBeTo,n:Ho,n:a. TaKHe )I{e paCCY)I{,n:eHHlI cnpaBe,n:JIHBbI H ,n:JIlI Vf3. 06paTHblH TOK HaCblIUeHHlI ,n:OJI)I{eH 6b1Tb KaK MO)l{HO MeftbUle, nOCKOJIbKY ero BblCOKHe 3HaqeHHlI YKa3bIBaeT Ha HaJIHqHe MexaHH3MOB YTeqKH TOKa (HanpHMep YTeqKH no nOBepXHOCTH HJIH no 06beMY, CB1I3aHHble C nOBepXHOCTHblMH COCTOllHHlIMH, TOqeqHbIMH ,n:ecpeKTaMH H ,n:HCJIOKaUHlIMH B 06beMe nOJIynpOBo,n:HHKa). HH3KHe 3HaqeHHlI Vfl H Is COBMeCTHO C BbICOKHMH 3HaqeHHlIMH Vf2 H Vf3, KaK npaBHJIO, cooTBeTcTBYIOT CBeTo,n:Ho,n:aM, 06JIa,n:aIOIUHMH BbICOKOH Ha,n:e)l{HOCTbIO. (6) ITepBblH ,n:HO,n: 06JIa,n:aeT JIyqIlIHMH xapaKTepHcTHKaMH, qeM BTOPOH, 6JIaro,n:apH 60JIee HH3KOMY nOCJIe,n:oBaTeJIbHoMY conpOTHBJIeHHIO H He60JIbIlIHM YTeqKaM, npHBO,n:HIUHM K npe)l{,n:eBpeMeHHoMY BKJIIOqeHHIO ,n:Ho,n:a.
HHor.n.a H3-3a HarpeBa OUeHKY corrpOTHI~JIeHHH .n.Ho.n.a CJIe.n.yeT
rrpOBo.n.HTb rro-.n.pyroMy. .lJ.JIH .n.HO.n.OB C 60JIbllIHM rrapaJIJIeJIbHblM corrpOTHBJIeHHeM
I,
V
H rrpo.n.Hlp
rrOJIY'IaeM Bblpa)KeHHe
dV _ R
df -
s
kT 1 + -nideal - e - . I'
(4.15)
r.n.e BTopoe CJIaraeMOe B rrpaBoH 'IaCTH ypaBHeHHH rrpe.n.cTaBJIHeT C060H .n.H
I,
p-n-rrepexo.n.a.
YMHO)KHB 3TO ypaBHeHHe
MO)KHO HaHTH rrOCJIe.n.OBaTeJIbHOe corrpOTHBJIeHHe .n.Ho.n.a H3 HaKJIOHa
3aBHCHMOCTH
a
dI
OT
1
I,
rroKa3aHHoH Ha pHC.
4.7,6.
6 IdV/dI=RsI+kT/e
,I
4.3.
HaKlIOH = 1/Rs ~
Ou.eHKa BeJIHqHHbI napa3HTHbIX conpOTHBJIeHHH
o
.n;Ho.n;a
I
napaJIJIeJIbHOe corrpOTHBJIeHHe .n.Ho.n.a MO)KHO oueHHTb rro TepHCTHKe B .n.Harra30He HarrpH)KeHHH KOOp.n.HHaT.
B
V
«:
Eg/e,
T. e.
I-V-xapaK-
B6JIH3H Ha'IaJIa
3TOM .n.Harra30He HarrpH)KeHHH TOKOM 'Iepe3 p-n-rrepexo.n.
MO)KHO rrpeHe6pe'Ib, a rrapaJIJIeJIbHOe corrpOTHBJIeHHe HaHTH H3 Bblpa)KeHHH
Rp
=
dV/dI.
(4.12)
I
I I I
o HanpH)l{eHHe Ha ,UHo,n:e V
TOK qepe3 ,UH0,l(
I
PHC. 4.7. MeTo,n: oueHKH nOCJIe,n:OBaTeJIbHOrO conpOTHBJIeHHH ,n:Ho,n:a: a - Rg onpe,n:eJIHeTCH no TaHreHCY yrJIa HaKJIOHa BAX CBeTo,n:Ho,n:a npH V > vth; 6 - ypaBHeHHe kT / e B paMKe cnpaBe,n:JIHBO ,n:JIH ,n:Ho,n:a npH npHMoM CMeIUeHHH, Kor,n:a V
:»
94
FA. 4. 3AeKmpU'leC1We CBoucmBa cBemo8uo8oB
B GaAs p-THrra
4.4. 3HeprHR H3JIYQeHHR
HO,
3HeprH5I CPOTOHOB, H3JIY'IaeMbIX rrOJIyrrpOBO,lI.HHKOM, orrpe,lI.eJI5IeTC5I IIIHPHHOH ero 3arrpemeHHoH 30HbI
95
4.6. Pacnpe8eAeftUe ftOCUmeAeu B p-n-zemeponepexo8ax
Ln = (220 CM2/c
HeOCHOBHbIe
HOCHTeJIH
MKM. CJIe,lI.OBaTeJIb-
HeCKOJIbKHX MHKpOMeTpOB.
Eg :
Ha pHC.
4.8, a
H
6
rrOKa3aHO pacrrpe,lI.eJIeHHe HOCHTeJIeH B p-n-rrepexo,lI.e
B YCJIOBH5IX HYJIeBOrO H
(4.16)
1O-8 c ) 1/2 ~ 15
X
pacrrpOCTpaH5IIOTC5I Ha paCCT05lHHe rrOp5l,lI.Ka
rrp5lMOrO
CMemeHH5I.
BH,lI.HO,
'ITO HeOCHOBHbIe
HOCHTeJIH crroco6HbI ,lI.HCPCPYH,lI.HpOBaTb Ha ,lI.OBOJIbHO 60JIbIIIHe paCCT05lHH5I. KpoMe Toro, 'IeM ,lI.aJIbIIIe HeOCHOBHble HOCHTeJIH rrpOHHKalOT B COCe,lI.HHe
B
H,lI.eaJIbHOM ,lI.HO,lI.e HH)KeKII.H5I B aKTHBHYIO 06JIaCTb O,lI.HOrO 3JIeKTpOHa
rrpHBO,lI.HT K reHepaII.HH O,lI.HOrO cpoToHa.
M3
3aKOHa coxpaHeHH5I 3HeprHH
CJIe,lI.yeT, 'ITO 3HeprH5I 3JIeKTpOHa rrpH 3TOM ,lI.OJI)KHa paBH5ITbC5I 3HeprHH cpOTOHa, T. e.
eV = hll. M3
(4.17)
3Toro BbIpa)KeHH5I BH,lI.HO, 'ITO 3HeprH5I cpOTOHa paBHa rrpOH3Be,lI.eHHIO
06JIaCTH, TeM CHJIbHee CHH)KaeTC5I HX KOHII.eHTpaII.H5I. CJIe,lI.OBaTeJIbHO, aKTbI peKOM6HHaII.HH rrpOHCXO,lI.51T B ,lI.OCTaTO'IHO IIIHPOKOH 06JIaCTH, ,lI.JI5I KOTOPOH xapaKTepHO CHJIbHOe H3MeHeHHe KOHII.eHTpaII.HH HeOCHOBHblX HOCHTeJIeH. .LI.aJIee 6Y,lI.eT rrOKa3aHO, 'ITO paCIIIHpeHHe 06JIaCTH peKOM6HHaII.HH B rOMOreHHbIX rrepeXO,lI.ax OTpHII.aTeJIbHO CKa3bIBaeTC5I Ha 3cpcpeKTHBHOCTH H3JIy'IeHH5I.
Harrp5l)KeHH5I, rrpHJIO)KeHHOrO K CBeTO,lI.HO,lI.y, Ha BeJIH'IHHY 3ap5l,lI.a 3JIeKTpO-
a
Ha . .LI.aJIee 6Y,lI.YT o6CY)K,lI.aTbC5I 51BJIeHH5I, crroco6HbIe rrOBJIH5ITb Ha COOTHO-
----------~,~
IIIeHHe
(4.17).
P-THII
TOKa
B
,lI.OBOJIbHO
TPY,lI.HO.
88U:JICIiOCmb liOCUmeJleu, a
rrpome
rOMoreHHbIX
p-n-rrepeXO,lI.ax,
HOCHTeJIeH H3MepHTb
3KcrrepHMeHTaJIbHO
orrpe,lI.eJIHTb
no-
HCrrOJIb3Y51 ,lI.JI5I 3Toro, HarrpHMep, 3cpcpeKT XOJIJIa,
K03cpcpHII.HeHT ,lI.HCPCPY3HH
rrOJIY'IHTb
H3
H
:
...
:::::::::::::.:-
_.~._. ___________._._._.
::
---------
------------t-- :
hv
__
Tp
~Lp~
................................1f.
coomliOUleliUJl 3UliUlmeUlia,
PHC.
6
....
!-WDH--j
----------,~!!!~.......... ~
kT Dp = -J.Lpe
..
----~----
..
KOTopoe ,lI.JI5I HeBbIpO)K,lI.eHHbIX rrOJIyrrpOBO,lI.HHKOB HMeeT BH,lI.
kT Dn = -J.Ln e
hv
Tn
000000000
.................................
Koa¢¢JUl{uelim 8u¢¢y3uu
rOpa3,lI.O
C
:
~Ln~
~ ~ "
::::::::::::::::::••••••••••••••• EV ~~~~~~~~~~~~~~~ •••••••••••••
T. e. B rrepeXO,lI.ax B rrpe,lI.eJIax O,lI.HOrO MaTepHaJIa, 3aBHCHT OT K03cpcpHII.HeHTa ,lI.HCPCPY3HH HOCHTeJIeH.
:"-WD~
••••••••••••••••
p-n-nepexo.z:r.ax HOCHTeJIeH
............... ••••••••••••• E
:,
---------------------t----- ------:--------------------- EF "Qoo~OQiO~O~O~OOO~~o~ooQiO[·0::-:'0 : n-TIm
4.5. Pacnpe.z:r.eJIeHHe HOCHTeJIeH.B rOMoreHHbIX Pacrrpe,lI.eJIeHHe
6
Pacrrpe,lI.eJIeHHe
HOCHTeJIeH
H rrpHMoro
(6)
(a)
CMemeHHH, p-n-reTeporre-
peXO,lI. rrpH rrpHMOM CMemeHHH
(B). B
ro-
MoreHHblX rrepexo,lI.ax HOCHTeJIH ,lI.O peKOM6HHaUHH rrpOJIeTalOT B Cpe,lI.HeM pacCTOHHHH, paBHbIe,lI.HCPCPY3HOHHblM ,lI.JIH-
~~~~~~~~~~~~~~~~~.~.~.~.~.~.~~.~.~.~.
(4.18)
4.8.
B p-n-rrepexo,lI.e B YCJIOBHHX HYJIeBOrO
•••••••••••••••••••••••••••••••••
HaM
Ln
HJIH
Lp. B
reTeporrepeXO,lI.ax
HOCHTeJIH 3aKJIIO'IeHbI B 06JIaCTH Me)l{,lI.Y ,lI.BYMH 6apbepHblMH CJIOHMH
HOCHTeJIH, HH)KeKTHpOBaHHbIe B HeHTpaJIbHbIH rrOJIyrrpOBO,lI.HHK B OTCYTCTBHe BHeIIIHHX 3JIeKTpH'IeCKHX rrOJIeH, rrepeMemalOTC5I 3a C'IeT ,lI.HCPCPY3HH. I1PH HH)KeKTHpOBaHHH HOCHTeJIeH B 06JIaCTb C rrpOBO,lI.HMOCTblO rrpOTHBOrrOJIO)KHOrO THrra HeOCHOBHbIe HOCHTeJIH Ha'IHHaIOT' peKoM6HHHpoBaTb
4.6. Pacnpe.z:r.eJIeHHe HOCHTeJIeH B p-n-reTeponepexo.z:r.ax
CJIY'IaHHbIM o6pa30M. Cpe,lI.Hee paCCT05lHHe, KOTopoe rrpOJIeTalOT HeOCHOB-
8U¢¢y3UOliliOU 8JlUliou.
Bce COBpeMeHHbIe CBeTO,lI.HO,lI.bI pa3pa6aTbIBalOTC5I Ha OCHOBe reTeporre-
3JIeKTpOHbI, HH)KeKTHpyeMbIe B 06JIaCTb p-THrra, ,lI.O peKOM6HHaII.HH C ,lI.bIp-
peXO,lI.OB. YCTpOHCTBa Ha reTeporrepeXO,lI.ax COCT05lT H3 rrOJIyrrpOBO,lI.HHKOB
HbIe HOCHTeJIH ,lI.O peKOM6HHaII.HH, Ha3bIBaeTC5I
KaMH ,lI.HcpcpYH,lI.HPYIOT B Cpe,lI.HeM Ha paCCT05lHHe, paBHoe ,lI.HCPCPY3HOHHOH ,lI.JIHHe
Ln . .LI.JI5I
HaXO)K,lI.eHH5I ,lI.HCPCPY3HOHHOH ,lI.JIHHbI HCrrOJIb3YlOT BbIpa)Ke-
,lI.ByX TImOB: C Y3KOH 3arrpemeHHOH 30HOH ,lI.JI5I C03,lI.aHH5I aKTHBHOH 06JIaCTH H C IIIHPOKOH 3arrpemeHHOH: 30HOH: ,lI.JI5I CPOpMHpOBaHH5I 6apbepHbIX CJIOeB. ECJIH B COCTaB CTpyKTYPbI BXO,lI.51T ,lI.Ba 6apbepHbIX CJI05l, OHa Ha3bIBaeT-
HH5I
(4.19)
C5I
880U1WU eemepocmpYKmypou
('IaCTO HCrrOJIb3yeTc5I COKpameHHe .LI.rC
HJIH DH). r,lI.e 'Tn H 'Tp -
BpeMeHa )KH3HH HeOCHOBHblX HOCHTeJIeH: 3JIeKTpOHOB HJIH
Ha pHC.
4.8,8
rrOKa3aHO BJIH5IHHe reTeporrepeXO,lI.OB Ha pacrrpe,lI.eJIeHHe
,lI.bIpOK. B THrrH'IHbIX rrOJIyrrpOBO,lI.HHKaX ,lI.HCPCPY3HOHHa51 ,lI.JIHHa paBH5IeTC5I
HOCHTeJIeH. B ,lI.BOHHbIX reTepocTpYKTypax 6apbepHbIe CJIOH OrpaHH'IHBalOT
HeCKOJIbKHM MHKpOMeTpaM. HarrpHMep, ,lI.HCPCPY3HOHHa51 ,lI.JIHHa 3JIeKTpOHOB
HH)KeKTHpOBaHHbIe HOCHTeJIH B aKTHBHoH 06JIaCTH. I103TOMY BeJIH'IHHa
Fit. 4. 3AeKmpUtteClwe cBoiicmBa cBemo8uo8oB
96
06JIaCTI1
peKoM611HaUI111
onpeaeJlRemCR
fte
97
4.7. BAuRflue eemeponepexo8oB fla conpomuBAeflue ycmpoiicmB
aUc/Jc/JY3UOftftOU aJlUftOU,
a
mOJllJ,fUftOU aKmUBft020 CJlOR.
flOKa3aHHoro
Ha
Pl1c.
4.9,a.
3apfl,lJ,aM,
flepeMemaIOml1MCfI
113
O,lJ,HOrO
MaTepl1aJIa B ,lJ,pyroH, flPI1XO,lJ,RTCfI flpeO,lJ,OJIeBaTb 3TOT 6apbep 3a CqeT JII160
3TO OqeHb cymecTBeHHoe 113MeHeHl1e. I1pe,lJ,flOJIO)KI1M, 'ITO TOJIml1Ha
TYHHeJIbHOrO 3cpcpeKTa, JII160 TeflJIOBOH 3Hepml1. COflpOTI1BJIeHl1e flepeXO,lJ,-
aKTI1BHOH 06JIaCTI1 HaMHoro MeHbIIle TI1f1l1qHOH ,lJ,I1CPCPY3110HHOH ,lJ,JII1Hbi.
HbIX 06JIaCTeH OTpl1uaTeJIbHO OTpa)KaeTCfI Ha xapaKTepl1CTI1KaX ,lJ,110,lJ,OB,
1-20
3HaqeHI1f1 ,lJ,I1CPCPY3110HHbIX ,lJ,JII1H 06blqHO JIe)KaT B ,lJ,l1afla30He
MKM,
a pa3MepbI aKTI1BHOH 06JIaCTI1 B ,lJ,BOHHbIX reTepocTpYKTypax COCTaBJIflIOT
0,01-1,0
MKM. 3TO 03HaqaeT, 'ITO KOHueHTpaUI1f1 HOCI1TeJIeH B aKTI1BHOH
oco6eHHO MOmHhlX CBeTO,lJ,110,lJ,OB. TeflJIOBafl MOmHOCTb, COflpOTI1BJIeHl111 reTepOflepeXO,lJ,OB,
Bhl,lJ,eJIfleMafl Ha
Be,lJ,eT K HarpeBY aKTI1BHOH 06JIaCTI1,
'ITO CHI1)KaeT KBaHTOBbIH BbIXO,lJ, 113JIyqeHI1f1
06JIaCTI1 ,lJ,BOHHbIX reTepoCTpYKTYP HaMHoro flpeBbIIIlaeT I1X KOHueHTpa-
6
a
UI1IO B rOMoreHHbIX flepeXO,lJ,ax, r,lJ,e HOCI1TeJII1 paCflpe,lJ,eJIeHbI B I1HTepBaJIe HeCKOJIbKI1X ,lJ,I1CPCPY3110HHbIX ,lJ,JII1H. 113 ypaBHeHI1f1,lJ,JIfI CKOPOCTI1 6I1MOJIe-
CTpytcrypa c nOCTeneHHblM H3MeHeHHeM_illHpHHLI 3anpemeHHoH 30HLI (sapH30HHalI)
KYJIflPHOH 113JIyqaTeJIbHOH peKOM611HaUI111
(4.20)
R=B·n·p
•
e
CJIe,lJ,yeT, 'ITO BbICOKafl KOHueHTpaUI1f1 HOCI1TeJIeH B aKTI1BHOH 06JIaCTI1 yBe-
t
JlUtf,UBaem CKOPOCTb 113JIyqaTeJIbHOH peKOM611HaUI111 11 CHI1)KaeT peKOM611-
Eg
HaUI10HHOe BpeMfI )K113HI1. I103TOMY Bce BbICOK03cpcpeKTI1BHble CBeTO,lJ,110,lJ,bI
1
~
CTPOflTCfI Ha OCHOBe ,lJ,BOHHbIX reTepocTpYKTYP I1JII1 CTpyKTyp C KBaHTOBbIMI1 flMaMI1.
Eg
j
4.7. BJIHBHHe reTeponepeXO,lJ.OB Ha conpOTHBJIeHHe YCTpoikTB I1pl1MeHeHl1e
reTepOCTpYKTYP
fl03BOJIfleT
YJIyqIIlI1Tb
~~
3cpcpeKTI1BHOCTb
Y3K030HHblH nonynpoBO,l\HHK
CBeTO,lJ,110,lJ,OB. 3TO flPOI1CXO,lJ,I1T 3a CqeT OrpaHl1qeHI1f1 HOCI1TeJIeH B aKTI1BHOH 06JIaCTI1, 'ITO fl03BOJIfleT I1CKJIIOql1Tb ,lJ,I1CPCPY3I1IO HeOCHOBHbIX HOCI1TeJIeH Ha
60JIbIIll1e paCCTOflHI1f1.
,UJIfI
HaflpaBJIeHI1f1
CBeTa B BOJIHOBO,lJ, qaCTO
flpl1MeHflIOT CBeTO,lJ,110,lJ,bI C TopueBbIM BbIBO,lJ,OM 113JIyqeHI1f1, TaK)Ke, KaK flpaBI1JIO, Ha OCHOBe reTepoCTpyKTyp. B COCTaB 60JIbIIll1HCTBa COBpeMeHHbIX flOJIYflPOBO,lJ,HI1KOBhlX CBeTO,lJ,110,lJ,OB 11 JIa3epOB BXO,lJ,flT HeCKOJIbKO reTepo-
pe3KalI IpaHHUa pa3,l\ena
mHpOK030HHhIH nonynpoBO,l\HHK
Y3K030HHhlH nonynpOBO,l\HHK
mHpOK030HHhlH nonynpOBO,l\HHK
saPH30HHalI o6naCTL
PHc.4.9. 30HHaH ,lJ,HarpaMMa pe3Koro reTeporrepexo,lJ,a (a) H BapH30HHoro reTeporrepexo,lJ,a (6) Me}!{AY ABYMH rroJIyrrpoBoAHHKaMH C 3arrpemeHHbIMH 30HaMH pa3HoH llIHpHHbI. Pe3KHH rrepeXOA 06JIaAaeT 60JIbIIIHM corrpOTHBJIeHHeM, '1eM rrJIaBHblH, 'ITO CBH3aHO C cjJOpMHpOBaHHeM B HeM rrOTeHIJ:HaJIbHOrO 6apbepa -(Schubert, 1992)
flepeXO,lJ,OB: Me)K,lJ,y KOHTaKTHbIMI1 CJIOflMl1, aKTI1BHbIMI1 06JIaCTflMI1 11 BOJIDbIJIO ,lJ,OKa3aHO, 'ITO flJIaBHbIM 113MeHeHI1eM XI1Ml1qeCKOrO COCTaBa flO-
HOBO,lJ,aMI1. HeCMOTpfl Ha TO, 'ITO reTepOCTpYKTypbI fl03BOJIflIOT YJIyqIIlaTb xapaKTepl1CTI1KI1 CBeTO,lJ,110,lJ,OB, I1X flpl1MeHeHl1e CBfl3aHO C Pfl,lJ,OM flpo6JIeM. O,lJ,HOH Pl1c.
4.9, a
113
HI1X
flBJIfleTCfI
COflpOTI1BJIeHl1e
flepeXO,lJ,HbIX
06JIaCTeH.
flOKa3bIBaeT 30HHYIO ,lJ,l1arpaMMY reTepocTpyKTyphl 11 I1JIJIIOCTPI1-
pyeT flPl1pO,lJ,y 3Toro COflpOTI1BJIeHI1f1. feTepocTpYKTypa 'lame Bcero COCTOI1T
JIYflPOBO,lJ,HI1Ka
B6JII1311
reTepOflepeXO,lJ,a
y,lJ,aeTCfI
flOJIHOCTbIO
CKaqKI1 B 3HepreTI1qeCKI1X 30Hax reTepoCTYKTYPbI (Schubert, PI1C.
4.9,6
YCTpaHI1Tb
1992).
Ha
flOKa3aHa 30HHafl ,lJ,l1arpaMMa CTpyKTYPbI C flOCTefleHHbIM 113Me-
HeHl1eM IIll1pl1Hhl 3aflpemeHHoH 30HbI. BI1,lJ,HO, 'ITO B 30He flPOBO,lJ,I1MOCTI1
113 ,lJ,ByX flOJIYflPOBO,lJ,HI1KOB C 3aflpemeHHbIMI1 30HaMI1 pa3HOH IIll1pl1Hbi.
CTpyKTYPbI OTCYTCTBYIOT flOTeHUl1aJIbHble 6apbepbI, flpeflflTCTBYIOml1e flpO-
I1pe,lJ,flOJIaraeTCfI, 'ITO o6e qaCTI1 CTpyKTYPbI 06JIa,lJ,aIOT flPOBO,lJ,I1MOCTbIO
XO)K,lJ,eHI1IO 3JIeKTpOHOB. DbIJIO TaK)Ke ,lJ,OKa3aHO, 'ITO COflpOTI1BJIeHl1e reTe-
n-TI1f1a.
HOCI1TeJII1
Y3K030HHbIH
113
MaTepl1aJI,
IIll1POK030HHoro r,lJ,e
B
30He
C HI13KI1MI1 3HaqeHI1f1MI1 3Hepml1.
,lJ,I1CPCPYH,lJ,I1PYIOT 3aHI1MaIOT
pOCTpyKTYPbI C flapa60JII1qeCKI1M 113MeHeHI1eM IIll1pl1HbI 3aflpemeHHOH 30Hhl CpaBHI1MO C 06beMHbIM COflpOTI1BJIeHHeM MaTepl1aJIa. TaKI1M 06pa30M, ,lJ,O-
3JIeKTpOHOB
flOJIHI1TeJIbHOe COflpOTI1BJIeHl1e, BHOCI1MOe pe3KI1M reTepOflepeXO,lJ,OM, MO)KeT 6hlTb flOJIHOCTbIO KOMfleHCl1pOBaHO 113MeHeHHeM COCTaBa flOJIYflPOBO,lJ,HI1Ka
3apfl)KeHHOrO
B6-!l11311 caMoro flepeXO,lJ,a flO flapa60JII1qeCKOMY 3aKOHY.
06e,lJ,HeHHOro
CJIOfl
flOJIYflPOBO,lJ,HI1Ke
C 11
pe3YJIbTaTe flepeHoca
B
ypOBHI1
o6pa3yeTcfI 3JIeKTpOCTaTI1qeCKI1H ,lJ,11f10JIb, COCTOflml1H 113 flOJIO)KI1TeJIbHO IIll1POK030HHOM
B
MaTepl1aJIa
flPOBO,lJ,I1MOCTI1
110HI1311pOBaHHbIMI1 OTpl1uaTeJIbHO
,lJ,OHOpaMI1
3apfl)KeHHOrO
B
CJIOfl
3JIeKTpOHOB, HaKOflJIeHHbIX B Y3K030HHOM flOJIYflPOBO,lJ,HI1Ke, 'ITO flPI1BO,lJ,I1T K
I1CKpl1BJIeHI1IO
3HepreTI1qeCKI1X
30H
11
CPOpMl1pOBaHI1IO
6apbepa,
'
IlIl1pl1Ha 3aflpemeHHOH 30HbI ,lJ,OJI)KHa 113MeHflTbCfI flO flapa60JIe TaK)Ke 11
flO
CJIe,lJ,YIOmeH
flpl1ql1He.
B
IIll1POK030HHOM
flOJIYflPOBO,lJ,HI1Ke BCJIe,lJ,-
CTBl1e Ml1rpaUl111 3JIeKTpOHOB B Y3K030HHbIH flOJIYflPOBO,lJ,HI1K Ha6JIIO,lJ,aeTCfI
4 <1>. E. lIly6epT
4.7. BAUJI-flue eemeponepeXOa08 fla conpomu8Aeflue ycmpoucm8
98
Fl/.. 4. 3AeKmpUtteCKue c8oucm8a c8emOaUOa08
HeXBaTKa cBo6o,n:HbIX HOCHTeJIeH. TI03TOMY KOHueHTpaUHH 3apH,n:oB B HeM orrpe,n:eJIHeTCH KOHueHTpaUHeH ,n:OHOpOB. CtII1TaH, qTO KOHueHTpaUHH ,n:OHOpOB
ND
rrOCTOHHHa rro BceH reTepocTpyKType, H3 ypaBHeHHH TIyaccoHa
MO)KHO HaHTI'! BeJIHqHHY 3JIeKTpOCTaTHqeCKOro rrOTeHUHaJIa:
=
e~D
Jl.JllI lfJopMHpoBaHHlI rpaJl.HeHTHOro reTeporrepeXOJl.a, o6J1aJl.alOIII.ero MHHHMaJlbHbIM corrpOTHBJleHHeM.
PemeHHe. 113 ypaBHeHHlI (4.22) HaHJl.eM TOJlIII.HHY 06eJl.HeHHOro CJlOll WD = 30 HM. CJleJl.OBaTeJlbHO, Jl.JllI CHH:lKeHHlI rrepeXOJl.HOrO corrpOTHBJleHHlI Heo6xoJl.HMO lfJOPMHpOBaTb rrJlaBHbIH reTeporrepexoJl. Ha rrpOTlI:lKeHHH 30 HM. PHC. 4.9,6 rrOKa3bIBaeT,
. x 2•
(4.21)
qTO 06J1aCTb rrJlaBHOrO reTeporrepexoJl.a Jl.OJl:lKHa COCTOllTb H3 a8YX rrapa60JlHqeCKHX 06J1aCTeH.
H3 ypaBHeHHH BH,n:HO, qTO rrOTeHUHaJI CBH3aH C rrpocTpaHcTBeHHoH KOOP,n:HHaToH
x KBaopamUt/.H.oCi 3aBUCUMocmblO,
99
T. e. 3aBHCHMOCTb rrOTeHUHaJIa
TepocTpyKTypax. PHC.
0'1' paCCTOHHHH HMeeT rrapa60JIHqecKYIO tPOPMY. ,lJ.JIH KOMrreHcaUHH rrapa-
4.10
rrOKa3bIBaeT BJIHHHHe TaKHX rrepexo,n:oB Ha rro-
a
oouHaKoBozo nomeHupa;/.a B,n:OJIb maK:HCe OOA:HCeH U3MeHflmbCfl no napa60AUtteCKoMY aaKOHY. TIpH 3TOM CqHTaeTCH, qTO
60JIHqeCKOH 3aBHCHMOCTH H rrOJIyqeHHH
'lSi
BceH CTpyKTYPbI XHMHqeCKHH COCTaB rrOJIyrrpoBo,n:HHKa
~~
rrapa60JIHqeCKHe H3MeHeHHH XHMHqeCKOrO COCTaBa rrpHBe,n:yT K rrapa60-
p~ ~ ~.
B 3aBHCHMOCTH llIHpHHbI 3arrpeIII.eHHOH 30HbI 0'1' COCTaBa. BbIBe,n:eM paCqeTHOe COOTHOIlIeHHe ,n:JIH rrOJIyqeHHH Tpe6yeMbIx BapH30HHbIX reTepocTpyKTyp. TIpe,n:rrOJIO)KHM, qTO pa3pbIB 30HbI rrpOBo,n:HMO-
AEe
H qTO CTpyKTypa
WD
- EFp
06e,n:HeHHOH 06JIaCTH TOJIIII.HHOH
----;:::-,t';--------
AEe/ e,
3JIeKTpOHbI rrepeCTaIOT rrepeMeIII.aTbCH
B Y3K030HHbIH MaTepHaJI. H3 ypaBHeHHH 06e,n:HeHHoH 06JIaCTH:
(4.21)
WD=
6
MO)KHO HaHTH TOJIIII.HHY
26' flEe e2 .ND .
B
rrepexo,n:HOH
06JIaCTH
~ g~~~ 1----,-------"'.
(4.22)
TOJIIII.HHOH
WD
Bap.ll30HHaJI rrepeXO.l\HaJI o6naCTh
'lSi
He06xo,n:HMO
rrJIaBHO H3MeHHTb CTerreHb JIerHpOBaHHH rrOJIyrrpOBo,n:HHKa ,n:JIH rrOJIyqeHHH rrJIaBHOrO reTeporrepexo,n:a. XO'I'H BbIpa)KeHHe TOJIbKO rrpH6JIH3HTeJIbHYIO BeJIHqHHY
W D,
(4.22)
rr03BOJIHeT rrOJIyqHTb
OHO OqeHb rrOJIe3HO rrpH rrpoeK-
p-nm
THpoBaHHH H3JIyqaIOIII.HX YCTPOHCTB. ,lJ.JIH 60JIee TOqHbIX paCqeTOB MO)KHO rrpHMeHHTb MeTO,n: rrOCJIe,n:OBaTeJIbHbIX rrpH6JIH)KeHHH. HarrpHMep, MO)KB03HHKHOBeHHH
CJIOH
HaKOrrJIeHHH
3JIeKTpoHoB.
CYIII.eCTByeT
Atlas, pa3pa60-
TaHHbIH tPHPMOH CHJIbBaKo.
YnpalKHeHHe. IIpoeKmupo8aflue epaaueflmflblx eemeponepexOa08 CqHTaeM, qTO pa3pbIB 30HbI rrpOBOJl.HMOCTH reTepOCTpYKTypbI AIGaAs/GaAs paBeH flEe = 300 M9B H qTO CTPYKTyga paBHOMepHO JlerHpOBaHa Jl.OHOPHOH rrpH3 MeCblO C KOHII.eHTpaII.HeH N D = 5 . 10 7 CM- . Tpe6yeTclI HaHTH TOJlIII.HHY rrepeXOJl.HOrO CJlOll, BKOTOPOM CJleJl.yeT H3MeHlITb XHMHqeCKHH COCTaB rroJlyrrpOBOJl.HHKa
Ey
~/-------------
______________ fny6.l1Ha
__-_-_-_-_-__Ee
----------------r---
HeCKOJIbKO
rrporpaMMHbIx rraKeTOB, rr03BOJIHIOIII.HX paCCqHTbIBaTb rrOJIyrrpoBo,n:HHKoBbIe reTepocTpYKTYPbI qHCJIeHHbIMH MeTo,n:aMH. O,n:HH H3 HHX -
Bap.ll30HH~_ _ _ __
'l. . -.;. . ._-_"f- -J- ;:=_=_: :-_~ ~_-_-_-
..
HO yqeCTb H3MeHeHHe rrOTeHUHaJIa B Y3K030HHOM rrOJIyrrpoBo,n:HHKe H3-3a
n-nm
rrepeXOmIaJI o6naCTb
~ 1:> ~8 L-________~======~ ~
CJIe,n:OBaTeJIbHO, ,n:JIH MHHHMH3aUHH corrpOTHBJIeHHH, BHOCHMoro pe3KHM reTeporrepexo,n:OM,
1
~.
B IlIHPOK030HHOM rrOJIyrrpOBo,n:HHKe. ECJIH rrOTeHUHaJI B 06e,n:HeHHOH
06JIaCTH CTaHOBHTCH paBHbIM
-~---':"'-EFn--- Ee
----
ND .
TaK)Ke 6y,n:eM CqHTaTb, qTO MHrpaUHH HOCHTeJIeH B Y3K030HHbIH rrOJIyrrpOBo,n:HHK rrpHBeJIa K tPOpMHpOBaHHIO
...,
0
cYIII.eCTByeT JIHHeHHaH CBH3b H MO)KHO rrpeHe6pe% KBa,n:paTHqHbIM qJIeHOM
CTH, BbI3BaHHbIH pe3KHM reTeporrepexo,n:OM, paBeH
6apbep~ cnOM:
aKT.lIBHaJI 06naCTh
~~ lSi ~ 8 LAl_x_G_al::..._.::.~_S__-======G=aA==s=======--__Al_x_G_a:...l-:~_S____
JIHqeCKHM H3MeHeHHHM llIHpHHbI 3arrpeIII.eHHOH 30HbI, T. e. Me)K,n:y HHMH
paBHOMepHO JIerHpOBaHa ,n:OHOPHbIMH rrpHMeCHMH C KOHueHTpaUHeH
6apbepHLlM: cnOM:
~r---- --~~""'r
n-THII
~ '-------'----Ey
PHc.4.10. 30HHall Jl.HarpaMMa Jl.BOHHOH reTepocTpYKTypLi C pe3KHMH rrepeXOJl.aMH (a) H rpaJl.HeHTHbIMH rrepeXOJl.aMH (6). Pe3KHe rrepeXOJl.bI 06J1aJl.a1OT 60JlbIIIHM corrpoTHBJleHHeM! qeM rrJlaBHbIe, qTO CB1I3aHO C lfJopMHpoBaHHeM B HHX rrOTeHII.HaJlbHbIX 6apbepoB 4*
FA. 4. 3AeKmpUtteCKue CBoucmBa cBemOaUOaOB
100
Be)l,eHHe )l,BOHHOH reTepocTpYKTypbI. Ha pHC.
4.10, a
4.8. llomepu HocumeAeu B aBOUHbtx eemepocmpYKmypax
101
H306pa)KeHbI 30HHaH BblXO.ll. HOCmeJIeii: H3 KBaHTOBOii: }lMbI
)l,HarpaMMa H )l,HarpaMMa H3MeHeHHH XHMHqeCKOrO COCTaBa CTPYKTYPbI C pe3KHMH nepeXO)l,aMH. BH)l,HO, "ITO Ha o6eHx· rpaHHlI.ax pa3)l,eJIa Me)K)l,Y nOJIynpOBO)l,HHKaMH )l,BYX THnOB B03HHKJIH nOTeHlI.HaJIbHble 6apbepbI, npenHTCTBYIOIlI.He nOna)l,aHHIO CB060)l,HbIX 3apH)l,OB B aKTHBHYIO 06JIaCTb. Ha pHC.
4.10,6
npe)l,CTaBJIeHbI aHaJIOrHqHble )l,HarpaMMbI )l,JIH )l,BOHHOH
reTepocTpYKTypbI C rpa)l,HeHTHbIMH nepeXO)l,aMH. 113 30HHOH )l,HarpaMMbI CJIe)l,yeT, "ITO B 3TOM CJIyqae nOTeHlI.HaJIbHble 6apbepbl 3HaqHTeJIbHO YMeHb-
I~v
II1HJIHCb. He60JIbIIlHe B03MYllI.eHHH, Ha6JIIO)l,aeMble Ha rpaHHlI.e )l,BYX noJIynpOBO)l,HHKOB, 06bHCHHIOTCH TeM, "ITO XHMHqeCKHH COCTaB nepeXO)l,HOH
L-l_'--_ _ _
06JIaCTH H3MeHHJICH JIHHeHHO. B CJIyqae napa60JIHqeCKOrO H3MeHeHHH COCTaBa OT 3THX B03MYIlI.eHHH qaCTO Y)l,aeTCH nOJIHOCTbIO H36aBHTbCH. B 061l1.eM CJIyqae CqHTaeTCH, "ITO nepeHOC HOCHTeJIeH B reTepOCTpYKTypax npOHCXO)l,HT
PHC.
4.11.
aaua6amUtteCKu, T. e. TaKoH npoll.ecc BHyTpH nOJIY-
npOBO)l,HHKa He COnpOBO)K)l,aeTCH BbI)l,eJIeHHeM H36bITOQHOrO TenJia. ,lI.JIH MOIll.HblX CBeTO)l,HO)l,OB 3TO YCJIOBHe npaKTHqeCKH nOJIHOCTbIO BbIllO;/lHHeTCH, "ITO OqeHb Ba)KHO, nOCKOJIbKY nOBblIIIeHHe pa60qeH TeMnepaTypbl MO)KeT
Ev
npoueccbI MHrpaUHH HOCHTeJIeH B .lI.BOHHblX reTepocTpYKTypax H pacrrpe.ll.eJIeHHe HOCHTeJIeH B aKTHBHOH 06JIaCTH
JIaCTH, npeBblIIIaeT BeJIHqHHY 3Toro 6apbepa. KOHlI.eHTpall.HH HOCHTeJIeH, 06JIa)l,aIOIlI.HX TaKoH 3HepmeH, 3a)l,aeTCH COOTHOIIleHHeM
npHBeCTH K YXY)l,II1eHHIO pa60qHX xapaKTepHCTHK.
I
00
CJIe)l,yeT TaK)Ke OTMeTHTb, "ITO )l,JIH Bcex reTepOCTpYKTYP )KeJIaTeJIbHO
nB =
nO)l,6HpaTb MaTepHaJibi C O)l,HHaKOBbIMH napaMeTpaMH KpHCTaJIJIHqeCKOH
EB
peIIleTKH, nOCKOJIbKY BbillOJIHeHHe 3Toro YCJIOBHH n03BOJIHeT YMeHbIIlHTb nJIOTHOCTb )l,HCJIOKall.HH HeCOOTBeTCTBHH, HrpaIOIlI.HX pOJIb lI.eHTPOB 6e3bI3r)l,e
JIyqaTeJIbHOH peKOM6HHall.HH.
(4.23)
PDOS· !FD(E) dE,
!FD
EB -
BblCOTa nOTeH-
lI.HaJIbHOrO 6apbepa. ,lI.JIH o6beMHoH nJIOTHOCTH COCTOHHHH KOHlI.eHTpall.HH HOCHTeJIeH C 3HeprHeH 60JIbIIle
4.8.
EB ,
onpe)l,eJIHeTCH Bblpa)KeHHeM
nOTepH HOCHTeJIeH B )J,BOHHbIX reTepOCTpYKTYPax
(4.24)
B H)l,eaJIbHOM CBeTO)l,HO)l,e 6apbepHble CJIOH He )l,aIOT HH)KeKTHpOBaHHbIM HOCHTeJIHM B03MO)KHOCTH nOKH)l,aTb aKTHBHyIO. 06JIaCTb. 3TO n03BOJIHeT )l,06HBaTbCH 60JIbIIlQH KOHlI.eHTpall.HH HOCHTeJIeH B 3TOH 06JIaCTH, "ITO Be)l,eT K nOBblIIIeHHIO 3
kT.
TeM He MeHee, HeKOTopblM HOCHTeJIHM Y)l,aeTCH
nOCKOJIbKY Hac HHTepeCYIOT HOCHTeJIH
C 3HepmHMH,
npeBblIIIaIOIlI.HMH
3HeprHIO Cl>epMH, pacnpe)l,eJIeHHe Cl>epMH-,lI.HpaKa MO)KHO 3aMeHHTb pacnpe)l,eJIeHHeM DOJIbll.MaHa
npeO)l,OJIeTb 3TOT nOTeHlI.HaJIbHbIH 6apbep H nOKHHYTb aKTHBHyIO 06JIaCTb.
(4.25)
KOHlI.eHTpall.HH TaKHX HOCHTeJIeH B 6apbepHblX CJIOHX OqeHb HH3Ka, n03TOMy KBaHTOBbIH BbIXO)l,H3JIYQeHHH 3THX CJIOeB TO)Ke HeBbICOK. Pacnpe)l,eJIeHHe CBo60)l,HbIX HOCHTeJIeH B aKTHBHOH 06JIaCTH nO)l,qHHHeTCH CTaTHCTHKe Cl>epMH-,lI.HpaKa, H3 KOTOPOH CJIe)l,yeT, QTO HeKOTopaH qaCTb HOCHTeJIeH 06JIa)l,aeT 3HepmeH, npeBblIIIaIOllI.eH BbICOTY nOTeHlI.HaJIbHOrO 6apbepa.
Ha pHC.
4.11.
nOKa3aHo,
"ITO
HMeHHO
3Ta qaCTb HOCHTeJIeH
nepeXO)l,HT B 6apbepHble CJIOH H3 aKTHBHOH 06JIaCTH.
Nc - 3
lI.e pa3)l,eJIa aKTHBHaH 06JIaCTb -
6apbepHbIH CJIOH. HeocHoBHble HOCHTeJIH,
HaXO)l,HIlI.HeCH Ha KpaIO 6apbepHblx CJIOeB, nepeMelll.aIOTCH 3a CqeT )l,H
PaCCMOTpHM nOBe)l,eHHe 3JIeKTpOHOB B aKTHBHOH 06JIaCTH )l,BOHHOH reTePOCTPYKTYPbI. npH 3TOM 6Y)l,eM CqHTaTb, "ITO 06JIaCTb OrpaHHqeHa CJIOHMH C BbICOTOH nOTeHlI.HaJIbHOrO 6apbepa flEe (CM. pHC.
r)l,e
HeHHe
4.11).
Pacnpe)l,eJIeHHe
3HepmH HOCHTeJIeH onpe)l,eJIHeTCH cTaTHcTHKOH Cl>epMH-,lI.HpaKa, n03ToMY· 3HeprHH onpe)l,eJIeHHOH qaCTH HOCHTeJIeH, HaX0.ll.HIlI.HXCH B aKTHBHoH 06-
°
KOHlI.eHTpall.HeH nB H )l,H
Ln.
CqHTaH Ha-
qaJIOM KOOp)l,HHaT X = KpaH 6apbepHoro CJIOH, pacnpe)l,eJIeHHe HOCHTeJIeH MO)KHO onHcaTb Bblpa)KeHHeM
n~(x) = nB(O) . e- x / Ln = N e • e-(EB-Epn)/kT . e- x / Ln ,
(4.26)
Til. 4. 3ileKmpU'leCKUeCBoucmBa cBemOaUOaOB
102
4.9. Hs6blmO'lltafl KOIt/1eltmpa/1ufl ItOCUmeileu B aKmUBltOuo6ilacmu Ln
r.n:e
= (Dn
· Tn)1/2 - .n:H
.n:JIHHa,
Tn -
BpeMSI
)KH3HH
Dn - K03
HeOCHOBHbIX HOCHTeJIeH, COOTHOllIeHHSI
H3
nJIOTHOCTefi TOKOB .ll.HO.ll.a CJIe.ll.yeT, 'lTO TOKH YTe'lKH MorYT npHBO.ll.HTb K 60JIbIIlHM nOTepHM B CHCTeMax C MaJIofi BbiCOTOfi 6apbepHblx CJIOeB.
IIJIOTHOCTb .n:H
Jnl
= -eDn' dn;;x) x~
I
= ....:.eDn .
x~
103
n~(O).
=
0:
(4.27)
n
Bo Bcex paccY)K.n:eHHSlx 3Toro pa3.n:eJIa MbI CqHTaJIH, qTO 3JIeKTpOHbI .n:H
y.n:eJIbHbIM
corrpOTHBJIeHHeM,
Heo6xo.n:HMO
YQHTbIBaTb
.n:peH
3JIeKTpOHoB, rrOCKOJIbKY OH rrpHBo.n:HT K YBeJIHQeHHIO TOKa. DOJlee Toro, Ha rrpaKTHKe Tpe6yeTcSI Y'lHTbIBaTb H BJIHSlHHe 3J1eKTpHQeCKHX KOHTaK-
TOK YTeqKH orrpe.n:eJISleTCSI KOHueHTpaUHeH HOCHTeJIeH Ha KpaIO 6apbepHoro CJIOSI. IIo3ToMY .n:JISI ero CHH)KeHHSI Heo6xo.n:HMO rrOBbIllIaTb rroTeHUHaJIbHbIH 6apbep 3Toro CJIOSI. OqeBH.n:Ho, qTO .n:JISI 3
kT.
HeKoTopble CHCTeMbI MaTepHaJIOB, HarrpHMep AIGaN/GaN
H AIGaAs/GaAs, 06JIa.n:aIOT OTHOCHTeJIbHO 60JIbllIOH BbICOTOH 6apbepoB H,
CJIe.n:OBaTeJIbHO,
HH3KHMH TOKaMH YTeqKH
3JIeKTpOHoB H3 aKTHBHoH
06JIaCTH. 'uPyrHe CHCTeMbI -
TaKHe, KaK AlinGaP / AlinGaP, H3JIyqaIOII1.He
CBeT B .n:Harra30He .n:JIHH BOJIH
600-650
TOB. IIpH BbICOKOH CKOPOCTH rroBepxHocTHOH peKoM6HHaUHH Ha rpaHHue KOHTaKT-rrOJlyrrpoBo.n:HHK KOHueHTpaUHSI HOCHTeJleH Ha HeH MO)KeT CQHTaTbCSI paBHoH HYJlIO. B pa60Te 96eJlHHra (Ebeling,
rrpHBe.n:eHa Me-
Me)K.n:y KOHTaKTOM H rpaHHueH aKTHBHaSl 06J1aCTb -
6apbepHbIH CJlOH paBHO
X P ' BeJIHQHHa TOKa YTeQKH orrpe.n:eJlSleTCSI Bblpa)KeHHeM
1
I
Ln
Lnl
~+ -2-
HM, HMeIOT HH3KHe rrOTeHUHaJIbHble
6apbepbI H .n:OBOJIbHO 60JIbllIHe TOKH YTeqKH qepe3 3TH 6apbepbJ. OTMeTHM, qTO C POCTOM TeMrrepaTypbI YTeqKa 3JIeKTpOHOB YBeJIHqHBa-
1993)
To.n:HKa paCQeTa TOKa YTeQKH C YQeTOM 3THX 3
·coth
1 +-2I -2 Ln Lnl
1 ) , 'Xp+y;-
nl
(4.28)
r.n:e
eTCSI rro 3KcrrOHeHUHaJIbHOMY 3aKOHY. IIo3TOMY rrOBbIllIeHHe TeMrrepaTypbI
(4.29)
Be.n:eT K rra.n:eHHIO KBaHTOBoro BbIxo.n:a H3JIyqeHHSI CBeTo.n:Ho.n:OB. ,UJISI CHH)KeHHSI TeMrrepaTypHoH 3aBHCHMOCTH HHTeHCHBHOCTH H3JIyqeHHSI Heo6xo.n:HMO rrpoeKTHpoBaTb CBeTo.n:Ho.n:bI, HMeIOII1.He 60JIbllIYIO BbICOTY rrOTeHUHaJIbHbIX 6apbepoB B CJIOSlX, orpaimqHBaIOII1.HX aKTHBHYIO 06JIaCTb. O.n:HaKo
3.n:eCb ap - rrpOBo.n:HMOCTb 6apbepHoro CJlOSl p-THrra, MapHoro TOKa Qepe3 .n:HO.n:.
Jtot
-
rrJlOTHOCTb CYM-
rrOMHMO TOKOB YTeqKH cYII1.eCTBYIOT H .n:pyme SlBJIeHHSI, CHH)KaIOII1.He KBaHTOBbIH BbIXO.n: H3JIyqeHHSI CBeTo.n:Ho.n:OB rrpH BbICOKHX TeMrrepaTypax.
K Ta-
KHM SlBJIeHHSlM OTHOCHTCSI, HarrpHMep, 6e3bI3JIyqaTeJIbHaSl peKoM6HHaUHSI
4.9.
1136bITOQHaB KOHu;eHTpau,H.HHOCHTeJIeH B aKTHBHOH 06JIaCTH ,lI;BOHHbIX reTepOCTpYKTYP
llloKJIH-PH.n:a.
YnpaJKHeHHe. OnpeaeileltUe mOKa yme'lKU 'lepes nomelt/1uailbltblU 6apbep ,UpymM HCTOQHHKOM rrOTepb KBaHTOBoro Bblxo.n:a H3JIYQeHHSI B .n:BOHHbIX
KOHII.eHTpaIl.HH aJIeKTpOHOB B aKTHBHofi 06JIaCTH CTPYKTYPbI GaAs paBHa CM- . Tpe6yeTcH onpe.ll.eJIHTb nJIOTHOCTb TOKaYTe'lKH HOCHTeJIefi H3 aKTHBHOfi 06JIaCTH B CJIOH, 06JIa.ll.aIOlII.He nOTeHII.HaJIbHbIMH 6apbepaMH 200 MaB 2 H 300 MaE. TIO.ll.BH)!{HOCTb aJIeKTpOHOB C'lHTaTb paBHofi 2000 CM a BpeMH )!{H3HH
OHHoro TOKa. IIpH YBeJlHQeHHH TOKa HH)KeKUHH rrpOHcxo.n:HT POCT KOH:
HeOCHOBHbIX HOCHTeJIefi 5 HC. CpaBHHTb nOJIY'leHHble 3Ha'leHHH TOKa YTe'lKH C THnH'lHblMH 3Ha'leHHHMH HH)!{eKII.HOHHOro TOKa CBeTO.ll.HO.ll.OB, JIe)!{alIl.HMH B .ll.Hana30He
IIpH .n:OCTaTOQHO BbICOKHX rrJlOTHOCTSlX TOKa rrOJlO)KeHHe ypOBHSI
0,1-10 KA/cM2.
.n:OCTHraeT BepXHero KpaSl rrOTeHUHaJlbHOrO 6apbepa. IIpH 3TOM aKTHBHaSl
2 . 10 18
/B,
PemeHHe. YpoBeHb ¢epMH B GaAs npH nJIOTHOCTH HOCHTeJIefi 2 . 1018 CM- 3 JIe)!{HT Ha paccToHHHH
77
MaB OT KpaH 30HbI npOBO.ll.HMOCTH. C'lHTaH, 'lTO acpcpeKTHBHble
reTepOCTpYKTypax SlBJlSleTCSI u36blmOliftafl KOftL{eftmpaL{Ufl ftOCUmeileu B aKTHBHOH 06J1aCTH, QTO rrpOHcxo.n:HT rrpH BbICOKHX rrJlOTHOCTSlX HH)KeKUHueHTpaUHH HOCHTeJleH B aKTHBHOH 06J1aCTH H rro.n:beM ypOBHSI
06J1aCTb BCSI 3arrOJIHSleTCSI HOCHTeJlSlMH H .n:aJlbHeHllIee YBeJlHQeHHe rrJlOTHOCTH ~H)KeKUHOHHoro TOKa He rrpHBo.n:HT K POCTY KOHueHTpaUHH HOCHTeJleH
nJIOTHOCTH COCTOHHHfi B 6apbepHblx CJIOHX HaKTHBHofi 06JIaCTH paBHbl, HaXO.ll.HM
B HeH. B pe3YJIbTaTe 3Toro HHTeHCHBHOCTb H3J1YQeHHSI BbIXO.n:HT Ha HaCbI-
KOHII.eHTpaIl.HH HOCHTeJIefi Ha KpaHx 6apbepHblx CJIOeB C nOTeHII.HaJIbHbIMH 6apbepa200 MaB H 300 MaB: 3,9.10 15 CM- 3 H 8,3.10 13 CM- 3. KoacpcpHII.HeHT .ll.HcpcpY3HH no COOTHOIIleHHIO 3fiHillTefiHa paBeH Dn 51,7 CM 2/ c. 'uHCPCPY3HoHHaH .ll.JIHHa
II1.eHHe. ,Ua)Ke rrpH .n:OBOJlbHO BbICOKHX rrOTeHUHaJlbHbIX 6apbepax CHJlbHOe
MH
=
Ln = (Dn . Tn)I/2 = 5,1 MKM. TOKH YTe'lKH, Bbl'lHCJIeHHble no (4.27), paBHbI 63 KA/cM 2 .ll.JIH 6apbepa B 200 MaB H 1,3 KA/cM 2
onpe.ll.eJIHeTcH KaK Bblpa)!{eHHIO .ll.JIH
300
MaE. 113 cpaBHeHHH nOJIY'leHHbIX .ll.aHHblX C THnH'lHbIMH 3Ha'leHHHMH
rrOBbIllIeHHe rrJIOTHOCTH TOKa HH)KeKUHH BbI3blBaeT 3arrOJlHeHHe aKTHBHOH 06J1aCTH HOCHTeJlSlMH 3apSl.n:a. B
TaKHX cJlYQaSlX YTeQKaMH HOCHTeJleH B
6apbepHble CJIOH rrpH MaJibIX rrJlOTHOCTSlX HH)KeKUHOHHoro TOKa MO)KHO rrpeHe6pe'lb. u
PaCCMOTp~M
CBeTo.n:HO.n: Ha OCHOBe .n:BOHHOH reTepOCTpYKTypbI C TOJlII1.H-
HOH aKTHBHOH 06J1aCTH WDH (pHC.
4.12).
YpaBHeHHe cKopoCTeH rrocTyrrJle-
4.9. H36btmO'l1taR IC01tu,e1tmpau,UR 1tOCumeJleu B aICmUB1tOU o6Jlacmu
Til. 4. 3JleICmpu'leCicue cBoucmBa cBemOaUOaOB
·104 a
70
6
.L t---------jr---
M
........ 60
~::;!
Fn -Eo
F
~
....... 50
-E=O
1:.
--E=O
C,lJ; 1 1 Ino,16GaO,84As/GaAs 1 T= 300 K 1
fr
~ ___.---_E - - Ee
f
e
E Fn-- E
1-
My
nL-___
f
:<:
(EFn)
B .lI.BOHHOH reTepocTpYKType
H ypoBeHb
(a)
pa3MepHoro KBaHTOBaHHlI
H B cTpyKType C KBaHToBoH lIMOH
IQ
(Eo)
20
~
10
1
c.>
4)
~
B-
K03cpcpHII.HeHT
6HMOJIeKYJIlIpHOH
1
rrJIOTHOCTlIX TOKa HH2KeKII.HH HO
n
n
= p.
)l.JIlI cTaII.HOHapHblx YCJIOBliH
Peillall ypaBHeHHe
(dn/ dt = 0),
(4.30)
o1
OTHOCHTeJIb-
pe-
3YJIbTaTe 3Toro pacTeT 3HeprHlI
(
EF - Ec = kT
8
10
4~13.
12 1, MA
14
16
18
20
MHTeHCHBHOCTb H3JIyqeHHlI CBeTO.ll.HO.ll.OB Ino,16GaO.84AsjGaAs C aK-
THBHOH 06JIaCTblO, CocTollllleH H3 O.ll.HOH, qeTblpex, meCTH H BOCbMH KBaHTOBbIX liM
(KH)
H TeOpeTHqeCKH paCCqHTaHHall HHTeHCHBHOCTb H.lI.eaJIbHOrO H30TpOIIHoro
A.
CTH WDH = 500 Tpe6yeTclI paCCqHTaTb ypOBeHb TOKa, IIpH KOTOPOM IIPOH30H.lI.eT 3aIIOJIHeHHe KBaHTOBOH liMb!.
PemeHHe. ITPH
Nc
= 4,4 • 1017
3 10 3 CM jc, H B = 10Jmax = 3990 AjCM2.
CM-
HaX0.ll.HM HCKOMYIO IIJIOTHOCTb TOKa
H3 ypaBHeHHlI (4.33)
np06JIeMa H36bITOqHOH KOHII.eHTpaII.HH HOCHTeJIeH HaH60JIee OCTpO CTOHT B CTpYKTypax C MaJibIM 06beMOM aKTHBHOH 06JIaCTH, oc06eHHO B CTPYK-
) 2/3
3.;7r -. !:.. 4
6
H3JIyqaTeJIlI (UlTpHXOBall JIHHHlI) (Hunt, 1992)
(4.31)
POCTOM TOKa HH2KeKII.HH rrJIOTHOCTb HOCHTeJIeH YBeJIHqHBaeTClI. B
. Hoe Bblpa2KeHHe:
4
rrOJIyqaeM Bblpa2KeHHe
n=" / J Ve·B.WDH·
C
BbICOKHX
1 lUI
1
TOK .lI.Ho,!\a PHC.
npH
1
1
0
(4.30)
peKOM6HHaII.HH.
1 1
:<:
(6)
HHlI HOCHTeJIeH B aKTHBHYJO 06JIaCTb (3a CtIeT HH2KeKII.HH) H HX Y)l.aJIeHHlI
r)l.e
~ ~,
§!
is:
H3 :)TOH 06JIaCTH (3a CqeT peKOM6HHaII.HH) orrpe)l.eJIlIeTClI Bblpa2KeHHeM
dn J = W - B· n· p dt e· DH
$ $>'
g 30 0
YpoBeHb
!'j &' '$'~.§lI1
~
is:
y
1
1
~~I
!¥ 40 E
8 lUI
1/
~
:<:
PHc.4.12.
105
(4.32)
Nc
Typax C O)l.HOI1: KBaHToBOH lIMOH H C aKTHBHoH 06JIaCTbJO THrra KBaHTOBbIX TOqeK. npH orrpe)l.eJIeHHOH rrJIOTHOCTH TOKa aKTHBHall 06JIaCTb 3arrOJIHlIeTClI
npH BbICOKHX ypOBHlIX HH2KeKII.HH rrOJI02KeHHe ypOBHlI
HOCHTeJIlIMH, H )l.aJIbHeHillaK HX HH2KeKII.HlI He rrpHBO)l.HT K YBeJIHqeHHJO HHTeHCHBHOCTH H3JIyqeHHlI.
EF - Ee = !lEe. (4.32) M02KHO HaHTH
HHTeHCHBHOCTH H3JIyqeHHlI OT TOKa )l.JIlI CTPYKTYP CBeTO)l.HO)l.OB C O)l.HOH,
CTHqb BeJIHqHHbI rrOTeHII.HaJIbHOrO 6apbepa, B 3TOH TOqKe I1crrOJIb3YlI 3TO 3HaqeHHe, H3 ypaBHeHHH
(4.31)
H
rrJIOTHOCTb TOKa, rrpH KOTOPOH rrpOHCXO)l.HT 3arrOJIHeHHe aKTHBHOH 06JIaCTH HOCHTeJIlIMH 3apll)l.OB:
4.13
rrOKa3aHbI 3KcrrepHMeHTaJIbHO rrOJIyqeHHble 3aBHCHMOCTH
qeTblpbMlI, IlleCTbJO H BOCbMbJO KBaHTOBbIMH lIMaMH (Hurrt et a1.,
1992).
BH)l.HO, 'ITO HHTeHCHBHOCTb H3JIyqeHHlI B CTpYKType C O)l.HOH KBaHTOBOH
4N)2 _ c • (!lE __ c ")3 .e.B.WDH J= ( _ ~.;7r. kT .. l..{TO rreperrOJIHHTClI CHaqaJIa -
Ha pHC.
lIMOH BbIXO)l.HT Ha HaCbIIII.eHHe rrpH )l.OBOJIbHO HH3KOM TOKe. YBeJIHqeHHe
(4.33)
30Ha rrpOBO)l.HMOCTH HJIH BaJIeHTHall 30Ha
qHCJIa KBaHTOBbIX liM Be)l.eT K POCTY TOKa, rrpH KOTOPOM rrpOHCXO)l.HT BbIXO)l. Ha HaCbIIII.eHHe.
npH 3TOM TaK2Ke YBeJIHqHBaeTClI ypOBeHb HaCbIIII.eHHlI
HHTeHCHBHOCTH.
nOKa3aHHoe Ha pHC.
4.13
HaCbIIII.eHHe HHTeHCHBHOCTH
(Ne , N v )
H3JIyqeHHlI HarrpllMYJO CBlI3aHO C H36bITKOM HOCHTeJIeH B aKTHBHOH 06JIaCTH CBeTO)l.HO)l.a.
YnpalKHeHHe. OnpeaeJle1tue mOICa, npu IComopOM npouCXoaum nOJl1toe 3anOJl1te1tue 1tOCUmeJlRMU 3apIlaa aICmUB1tOU o6Jlacmu aBOU1tOU aemepocmpyICmYPbt
HOCHTeJIlIMH, )l.JIlI CTPYKTYP C KBaHTOBbIMH lIMaMH H 06beMHblx CTPYKTYP
PaCCMaTpHBaeTClI IIOBe.ll.eHHe 3JIeKTpOHOB B .lI.BOHHOH reTepOCTpYKType GaAs
paCCqHTbIBaeTClI rro-pa3HOMY. .l{JIlI CTPYKTYP C KBaHTOBbIMH lIMaMH, KaK
KBaHToBoi;j lIMbl 3aBHCHT OT 3cpcpeKTHBHOH rrJIOTHOCTH COCTOllHHH H OT pa3pbIBOB 30H
(!lEe, !lEv).
C BbICOTOH IIOTeHll,HaJIbHOrO 6apbepa
!lEc
= 200 M3B H TOJIlllHHOH aKTHBHOH o6JIa-
YpoBeHb TOKa, rrpH KOTOPOM rrpOHCXO)l.HT HaCbIIII.eHHe aKTHBfiOH 06JIaCTH
rrpaBHJIO, HCrrOJIb3YJOT He TpexMepHYJO
(3D)
rrJIOTHOCTb COCTOllHHH, a )l.BY-
TA. 4. 3AeKmpU'leClcue CBoucmBa cBemOaUOaOB
106 MepHylO
(2D).
YpoBeHb
ypoBHeM C :meprHeH
Eo
T
107
4.10. OepanU'lUBalOUJ,ue CAOU
i
qepe3 KOTopble oCYIll.eCTBJIHeTCH HH)KeKUHH HOCHTeJIeH. YqeT 3TH X rrapa-
orrpe)1.eJIHeTCH H3 cJIe)1.YIOIll.ero Bblpa)KeHHH:
MeTpOB rrpH pa3pa60TKe CBeTO)1.HO)1.0B rr03BOJIHeT H36e)KaTb rreperrOJIHeHHH 2D
EFkT - Eo = 1n [exp ( N~D n ) - 1] r)1.e n 2D -
(4.34)
aKTHBHOH 06JIaCTH rrpH 3a)1.aHHOH pa60qeH rrJIOTHOCTH TOKa.
4.10.
(2D) rrJIOTHOCTb HOCHTeJIeH Ha 1 CM2, a N;D(2D) rrJIOTHOCTb COCTOHHHH, 3a)1.aBaeMaH ypaB-
)1.BYMepHaH
OrpaHHIIHBalOID.He CJIOH
3
HOCHTeJIH 3apH)1.0B BCer)1.a CTpeMHTCHrrepeCKOqHTb H3 aKTHBHOH 06JIa-
N 2D c
=
m*
7r(hj27r)2
.kT.
(4.35)
CTH CBeTO)1.HO)1.a B rpaHHqaIll.He C HeH CJIOH. B )1.BOHHbIX reTepOCTpYKTypax qHCJIO HOCHTeJIeH,
«c6e)KaBIIIHX»
H3 aKTHBHoro CJIOH B COCe)1.HHe CJIOH,
B03paCTaeT rrpH YMeHbIIIeHHH BbICOTbI rrOTeHUHaJIbHOrO 6apbepa Ha rpaHHIloCKOJIbKY paccMaTpHBalOTcH BblCOKHe rrJIOTHOCTH HOCHTeJIeH, MO)KHO rrpHMeHHTb rrpH6JIH)KeHHe )1.JIH rrOJIyrrpOBO)1.HHKOB C BbICOKOH CTerreHblO BblPO)K)1.eHHH, TOr)1.a
uax Me)K)1.y 3THMH CJIOHMH. IlOBblIIIeHHe TeMrrepaTypbI rrpHBO)1.HT K pOCTy TerrJIOBOH 3HeprHH HOCHTeJIeH, qTO TaK)Ke crroc06cTByeT rrpoueccy YTeqKH HOCHTeJIeH H3 aKTHBHOH 06JIaCTH.
(4.36)
B rrOJIyrrpOBO)1.HHKaX THrra A HIBV K03
Terrepb 3arrHIIIeM ypaBHeHHe )1.JIH CKOPOCTH H3MeHeHHH KOHueHTpaUHH HO-
rr03TOMY TOK YTeqKH
3JIeKTpOHOB rrpaKTHqeCKH BCer)1.a 60JIhIIIe TOKa YTeqKH )1.blpOK . .llJIH CHH)Ke-
CHTeJIeH B KBaHTOBOH HMe 3a CqeT HX HH)KeKUHH B aKTHBHYIO 06JIaCTb H
HHH YTeqKH HOCHTeJIeH H3 aKTHBHOH 06JIaCTH rrpHMeHHIOTcH )1.0rrOJIHHTeJIb-
y)1.aJIeHHH (BCJIe)1.CTBHe peKoM6HHaUHH) H3 aKTHBHoH 06JIaCTH:
Hble 3arrHpalOIll.He CJIOH. Bo MHOrHX cTpyKTypax CBeTO)1.HO)1.0B HCrrOJIb3YIOT-
2D
dt r)1.e B
B2D
~ B
/WQW -
2D-CTEYKTyp e.
n 2D = p2
ro CJIyqaH
BbICOKHX
.PeIIIaH ypaBHeHHe
dn
2D
/
dt = 0), n 2D
(4.37)
e
(4.37)
6HMOJIeKYJIHpHOH
rrJIOTHOCTHX OTHOCHTeJIbHO
n 2D
Ha pHC.
peKoM6HHaUHH
HH)KeKUHOHHoro
TOKa:
)1.JIR cTaUHoHapHo-
4.14
rrOKa3aHa 30HHaH )1.HarpaMMa CBeTO)1.HO)1.a IrrGaN C 3arrH-
palOIll.HM CJIOeM. TaKoH CBeTO)1.HO)1. COCTOHT H3 aKTHBHoH 06JIaCTH C MHO)KeCTBeHHbIMH
KBaHTOBbIMH
HMaMH
IrrGaN/GaN
H
6apbepHbIMH
MH AIGaN. Ha rpaHHue pa3)1.eJIa aKTHBHaH 06JIaCTb -
rrOJIyqaeM
=
aKTHBHOH 06JIaCTblO H 6apbepHbIMH CJIOHMH H 06JIa)1.a1OT 60JIbIIIeH IIIHPHHOH 3arrpeIll.eHHOH 30HbI.'
K03
IlpH
CH cJtOU, oepaHUttUBalOU{ue 3JteKmpoHbl, KOTopble pacrrOJIaralOTCH Me)K)1.y
=!.... _ B2D . n2D . p2D
dn
J =J J eB2D
CJIOH-
6apbepHbIH CJIOH
p-THrra BCTpaHBaeTcH 6apbepHbIH CJIOH AIGaN, 3arrHpalOIll.HH 3JIeKTpOHbI.
J . WQw . eB·
(4.38)
Ha pHC.
4.14, a
rrOKa3aHa HeJIerHpOBaHHaH cTpyKTypa, HJIJIIOCTpHpYIOIll.aH
C03)1.aHHe 3arrHpalOIll.HM CJIOeM AIGaN rrperrHTcTBHH )1.JIH OTTOKa HOCHTeJIeH KaK B BaJIeHTHYIO 30HY, TaK H B 30HY rrpOBO)1.HMOCTH.
IlpH BbICOKOM ypoBHe HH)KeKUHH rrOJIO)KeHHe ypOBHH
(4.36)
EF - Eo = l1Ec - Eo. Ilo)1.cTaBHB n 2D H3 ypaBHeHHH (4.36)
H HCKJIlOqHB
HaHTH rrJIOTHOCTb TOKa,
rrpH
3TO Bblpa)KeHHe H
(4.38),
KOTOPOH rrpOHCXO)1.HT rrOJIHOe
MO)KHO
O)1.HaKO H3 pHC. rrperrHTCTBHH )1.JIH
y13
-m* _. ( 7r (h)2
(l1Ec - Eo)
)2 .(D.c)3 kT E
BH)1.HO, qTO B JIerHpOBaHHoH CTpyKType HeT
p-THrra qepe3 3arrHpalOIll.HH CJIOH. 3HaqHT Bce pa3pbIBbI B 30HHOH )1.HarpaMMe COCpe)1.0TOqeHbI B 30He rrpOBO)1.HMOCTH, T. e.
3arrOJIHeHHe BbICOTa rrOTeHUHaJIbHOrO _ 6apbepa )1.JIH 3JIeKTpOHOB -
aKTHBHOH 06JIaCTH HOCHTeJIHMH 3apH)1.0B:
J =
4.14,6
OTTOKa )1.blPOK B BaJIeHTaylO 30HY 6apbepHoro CJIOH
e·B WQW'
(4.39)
Bcero CKa3aHHoro CJIe)1.yeT, qTO rreperrOJIHeHHe aKTHBHOH 06JIaCTH HO-
r)1.e
l1Eg
-
E
E C,6.c. -
C,a.c.
+
l1E g,
(4.40)
pa3HOCTb Me)K)1.y IIIHPHHOH 3arrpeIll.eHHOH 30HbI 6apbepHOrO
H 3arrHpalOIll.erOCJIOeB, 6.c. Ha pHC.
4.14
6apbepHbIH CnOH, a.o. -
aKTHBHaH 06JIaCTb.
TaK)Ke rrOKa3aH B YBeJIHqeHHOM MaCIIITa6e KpaH Ba-
CHTeJIHMH 3apH)1.a HBJIHeTCH He)KeJIaTeJIbHbIM HBJIeHHeM B )1.BOHHbIX reTe-
JIeHTHOH 30HbI CJIOH, 3arrHpalOIll.erO 3JIeKTpOHbl. BH)1.HO, qTO Ha rpaHHue
pOCTpyKTypax H B CTpyKTypax C KBaHTOBbIMH HMaMH. Il03TOMY MOIll.Hble
pa3)1.eJIa 6apbepHoro H 3arrHpalOIll.erO CJIOeB, B 6apbepHOM CJIoe p-THrra
CBeTO)1.HO)1.bI )1.0JI)KHbI HMeTb JIH60 60JtbUlylO moJtU{UHy aKTHBHOH 06JIa-
Ha6JIIO)1.aeTCH 3HepreTHqeCKHH rrpOBaJI, qTO CBH)1.eTeJIbCTByeT o HaKOrrJIe-
CTH B )1.BOHHbIX reTepocTpyKTypax, JIH60 6oJtbUloe ttucJto KBaHmOBblX flM
HHH B 3TOH 06JIaCTH )1.blPOK, a B 3arrHpalOIll.eM CJIoe, Ha060poT, BCrrJIeCK
B aKTHBHOH 06JIaCTH, JIH60 60JtbUlylO nJtoU{aOb KOHmaKmHblX nJtoU{aOOK,
rrOTeHUHaJIa -
CBH)1.eTeJIbCTBO He)1.0CTaTKa TaM )1.blPOK. Il03TOMY )1.blpKaM
)1.JIH rrOrra)1.aHHH B aKTHBHYIO 06JIaCTb rrpHXO)1.HTCH rrpeO)1.0JIeBaTb rrOTeHUH-
108
4.11. Hq,npfl:J/CeHue Ha auoae
Til. 4. 3lleKmpU'lecKue CBoucmBa cBemOaUOaOB
a
6aphepHl>Iii
Terrepb paccMoTpHM rrpHqHHbI Toro, qTO peaJIbHOe HarrpHLKeHHe CMelll.eHHH
3aIIHpaJO~
cnOR
109
~
aKTHBHali
CBeTO.ll.HO.ll.a HeCKOJIbKO OTJIHqaeTCH OT 3HaqeHHH, rrOJIyqaeMbIX H3 9TOH
o6naCTh": MI0I
cpOpMyJIbJ.
Bo-nep8blx,
Ha rrOCJIe.ll.OBaTeJIbHOM corrpOTHBJIeHHH .lI.HO.ll.a rrpOHCXO.ll.HT
.lI.OrrOJIHHTeJIbHOe rra.ll.eHHe HarrpHLKeHHH. HCTOqHHKaMH .lI.OrrOJIHHTeJIbHOrO
L-.---.-_ _ Ey
corrpOTHBJIeHHH HBJIHIOTCH conpOmU8JleHUe Ha ICOHmalCmax, conpOmU8JleHue Ha pe3ICUx epaHu~ax pa3aeJla 8 eemepocmpYICmypax H 06~eMHOe conpOmU8JleHUe, xapaKTepHoe .lI.JIH MaTepHaJIOB C HH3KHMH KOHu:eHTpaU:HH-
-
MH HOCHTeJIeH HJIH MaJIOH rrO.ll.BHLKHOCTblO HOCHTeJIeH. I1a.ll.eHHe HarrpHLKeHHH
AIGaN
I . Rs
Ha rrOCJIe.ll.OBaTeJIbHOM corrpOTHBJIeHHH rrpHBO.ll.HT K He06xo.ll.HMO-
CTH YBeJIHqeHHH HarrpHLKeHHH B036YLK.lI.eHHH.
6
BO-8mopblx,
rrpH HHLKeKu:HH HOCHTeJIeH B CTpyKTYPbI C KBaHTOBbIMH
HMaMH HJIH B .lI.BOHHble reTepOCTpYKTypbI OHH MoryT TepHTb qaCTb CBoeH 9HepmH. 3TO HJIJIIOCTpHpyeT rrpHMep Hea.ll.Ha6aTHqeCKOH HHLKeKu:HH HOCHTeJIeH Ha pHC.
4,12,
r.ll.e rrOKa3aHa Y3KaH KBaHTOBaH HMa rrpH rrO.ll.aqe Ha
CBeTO.ll.HO.ll. rrpHMoro HarrpHLKeHHH. BH.lI.HO,qTO rrpH HHLKeKU:HH HOCHTeJIeH B 9Ty HMy rroTepH 9HeprHH 9JIeKTpOHaMH COCTaBJIHIOT
flEe
n-TIill
~ pa3pbIB 30HbI rrpOBO.ll.HMOCTH,
Eo -
KBaHTOBaHHH B 30He rrpOBO.ll.HMOCTH.
Eo -
BaJIeHTHOH 30HbI, a
r.ll.e
AHaJIOmqHO 9TOMY rrOTepH 9Hep-
rHH .lI.b1pKaMH orrpe.ll.eJIHIOTCH BbipaLKeHHeM
L..-.---Ey -
flEe - Eo,
9HeprHH caMoro HH3Koro ypOBHH
flEv - Eo,
r.ll.e
flEv -
pa3pbIB
9HepmH caMoro HH3Koro ypOBHH KBaHTOBaHHH
.lI.JIH .lI.b1POK B BaJIeHTHOH 30He. I1pH HHLKeKu:HH HOCHTeJIeH B KBaHTOBYIO
-----_
HMy qaCTb HX 9HeprHH TpaTHTCH Ha ....
ucnYClCaHue ¢OHOH08, T. e. rrpe06Heaaua6amuliecICou
pa3yeTcH B TerrJIOBYIO 9HeprHIO. I10TepH 9HeprHH rrpH
PMC. 4.14. BBe.u.eHMe B AIGaN/GaNAnGaN CTPYKTYPY CBeTo.u.Mo.u.a C MHO)!{eCTBeHHblMM KBaHTOBhIMM HMaMM 3aIIMpa10Iu:ero CJIOH AIGaN: a - 30HHaH .u.MarpaMMa CTPYKTYPhI 6e3 JIerMpOBaHMH; 6 - 30HHaH .u.MarpaMMa CTPYKTYPbI C JIempOBaHMeM. Co.u.ep)!{aHMe Al B 3anMpalOmeM CJIoe BbIllIe, qeM B 6apbepHoM CJIoe p-TMlIa
UHJlCelC~UU
HOCUmeJleu
xapaKTepHbI .lI.JIH rroJIyrrpOBO.ll.HHKOB C 60JIbIIIHMH
3HaqeHHHMH pa3pbIBOB30H OCHOBe HHTPH.lI.OB
III
flEe
H
flEv -
GaN H .lI.pymx MaTepHaJIOB Ha
rpyrrrrbJ.
H3 CKa3aHHoro CJIe.ll.yeT, qTO rrOJIHOe rra.ll.eHHe HarrpHLKeHHH Ha CBeTO.lI.HO.ll.e rrpH rrpHMOM CMelll.eHHH orrpe.ll.eJIHeTCH BblpaLKeHHeM
aJIbHbIH 6apbep. O.ll.HaKO CJIe.ll.yeT OTMeniTb, qTO B cJIyqae rpa.ll.HeHTHOro
v=
H3MeHeHHH XHMHqeCKOrO COCTaBa rrpH rrpH6JIHLKeHHH K rpaHHu:e pa3.l1.eJIa 6apbepHoro H 3arrHpalOllI.erO CJIOeB Y.ll.aeTCH rrOJIHOCTblO H36aBHTbcH OT
Eg e
+ IRs + D.Ec e
Eo
+ D.Ev -
Eo ,
(4.42)
e
BCrrJIeCKOB H rrpOBaJIOB KpaH BaJIeHTHOH 30HbJ. I1PH 9TOM 3arrHpalOllI.HH CJIOH
r.ll.e rrepBoe CJIaraeMOe HBJIHeTCH TeOpeTHqeCKHM MHHHMYMOM HarrpHLKeHHH,
COBceM He 6Y.ll.eT rrperrHTCTBOBaTb TOKY .lI.b1pOK.
BTopoe 3aBHCHT or rrOCJIe.ll.OBaTeJIbHOrO corrpOTHBJIeHHH YCTpoHcTBa, a Tpe/Tbe H qeTBepToe rrOHBJIHIOTCH BCJIe.ll.CTBHe Hea.ll.Ha6aTHqeCKOH HHLKeKu:HH / HOCHTeJIeH B aKTHBHYIO 06JIaCTb. 3KcrrepHMeHTaJIbHO 6bIJIO rrOKa3aHO, qTO HarrpHLKeHHe Ha .lI.HO.ll.e MOLKeT
4.11. HanpBlKeHHe Ha AHOAe B
6bITb
XO.ll.e peKoM6HHaU:HH 9JIeKTpOHHO-.lI.bIPOqHbIX rrap rrpOHCXO.ll.HT rrpe-
06pa30BaHHe 9HepmH HHLKeKTHpOBaHHbIX 9JIeKTpOHOB B 9HeprHIO KBaHTOB
HanpRJlCeHUe HanpRJlCeHUe npRJ1.0eO cMeU1eHUR C8emOaUOaa .lI.OJILKHO
CBeTa • .LJ.JIH OCYlll.eCTBJIeHHH TaKoro rrpe06pa30BaHHH 9HepmH
8036YJlCaeHUR
HJIH
6bITb 60JIbIIIe HJIH paBHO IIIHpHHe 3arrpelll.eHHOH 30HbI, T. e. HarrpHLKeHHe Ha
HeCICOJlblCO HUJlCe MUHUMaJlbHOeO 3HalieHUR,
MOlll.H BbipaLKeHHH
9HeprHH KaK 9JIeKTpOHoB, TaK H .lI.b1POK
rrOJIyqeHHOrO rrpH rro-
Eg/e ~ hv/e. paBHa kT. I1pH
(4.41)
Cpe.ll.HHH TerrJIOBaH rrpHMoM CMelll.eHHH
p-n-rrepexo.ll.a HOCHTeJIH, 06JIa.ll.alOllI.He BbICOKOH 9HepmeH, 6bICTpee .lI.HcpCPYH.lI.HpylOT B 06JIaCTb C rrpoTHBOrrOJIOLKHOH rrpOBO.ll.HMOCTblO, qeM HOCHTeJIH C HH3KOH 9HepmeH, rr09ToMY HMeHHO OHH qalll.e yqaCTBYIOT B rrpou:eccax HarrpHLKeHHIO
hv/e ~ Eg/e.
T.e. MeHbIIIe
peKoM6HHaU:HH. I1PH KOMHaTHOH TeMrrepaType 9HeprHH
.lI.HO.ll.e orrpe.ll.eJIHeTCH BblpaLKeHHeM
v=
(4.42),
f"V
100
4kT
COOTBeTcTByeT
MB. B CBeTO.ll.HO.ll.e C He60JIbIIIHM corrpOTHBJIeHHeM Ha-
rrpHLKeHHe Ha .lI.HO.ll.e MOLKeT 6bITb Ha
100-200
MB
HUJlCe hv/e.
HarrpHMep,
a
4.11, Bu611uozpatjJU'leCKUU cnUCOK
Til. 4. 311eKmpU'leClwe cBoucmBa cBemo8uo8oB
110 ,is:
12
6apLepHbrli: ClIOR
aKTHBHlllI 06lIaCTL
6apLepHLrli: ClIOR
BH6JIHOrpactlHQeCKHH cnHCOK
>-t L - - - - - - - - - - - . r " - v - - - - - - " - - - - -
g~
~ ~
::!i is:
~
0
<>
6
YMeHbmeHHe 3Hepnrn 3a
!lEe ~
Ee
cqer HCrryCKaHHJI «pOHOHOB e
E0
E
If (T) ==
!lEv
Ehh 0 YMeHbmeHHe 3Hepnrn 3a
cqer HCrryCKaHHJI «pOHOHOB
Ev
PHc.4.15. XHMHtIeCKHH COCTaB CTpyKTYPbI (a); 30HHall ,nHarpaMMa CTpyKTYPbI C KBaHTOBOH lIMOH, HJIJIIOCTpHpYlOmall 3HepteTHtIeCKHe nOTepH HOCHTeJIeH npH .HX nona,naHHH B KBaHTOBYIO liMy (6)
(Eg = 1,42 3B) rrpH rrpHMoM CMemeHHH reHepaUHH CPOTOHOB C hv = 1,42 3B HaqHHaeTCH rrpH HarrpH)KeHHH
B CBeTO.ll.HO.ll.e GaAs HeKoTopoH qaCTH Ha .lI.HO.ll.e
1,32 B,
111
'ITO HH)Ke 3HeprHH cpOTOHa 1).
Onpe8elleltue ltanpJlJICeltUJl B036YJIC8eltuJl. cBemo8uo8a PaCCtIHTaTb npH6JIH3HTeJIbHble 3HatIeHHlI npllMoro HanplllKeHHlI CBeTO.z(Ho,nOB, H3JIytIalOmHX B cHHeM, 3eJIeHOM H KpaCHOM ,nHana30Hax BH,nHMoro cneKTpa. Onpe,neJIHTb npllMoe HanplllKeHHe .cBeTo,nHo,nOB, H3JIytIalOmHX CBeT C ,nJIHHaMH BOJIH 870 HM H 1,55 MKM.
YnpalKHeHHe.
PemeHHe
UBeT H3JIytIeHHlI
,llJIHHa BOJIHbI, HM
3HeprHlI cpoToHa, 3B
HanplllKeHHe B036YlK,neHHlI, B
CHHHH
470
2,6
2,6
3eJIeHbIH
550
2,2
2,2
KpacHbIH
650
1,9
1,9
MHcppaKpacHbIH
870
1,4
1,4
MHcppaKpacHbIH
1550
0,8
0,8
1) 3TOT cpaKT He npOTHBOpetIHT BTOPOMY 3aKOHY TepMo,nHHaMHKH, TaK KaK HHTerpaJIbHO no BceMY cneKTpy BHYTpeHHHH KBaHTOBbIH BbIXO,n H3JIytIeHHlI MeHbllIe 100%. '
Ebeling K. J. Integrated Opto-Electronics Chapter 9 (Springer, Berlin, 1993). Emerson D" Abare A., Bergmann M" Slater D" and Edmond J. "Development of deep UV IIItN optical sources" 7th International Workshop on WideBandgap IIItNitrides, Richmond VA, March (2002). Hunt N.E.J., Schubert E.F" Sivco D.L., Cho A. Y., and Zydzik G.J. "Power and efficiency limits in single-mirror light-emitting diodes with enhanced intensity" Electron. Lett. 28, 2169 (1992). Krames M. R. et al. "High-brightness AIGaInP light-emitting diodes" Proceedings ofSPIE 3938, 2 (2000). Rhoderick E. H. and Williams R. H. Metal-Semiconductor Contacts (Clarendon Press, Oxford, UK, 1988). Schubert E. F.; Tu L.-W., Zydzik G. J., Kopf R. F., Benvenuti A., and Pinto M. R. "Elimination of heterojunction band discontinuities by modulation doping" Appl. Phys. Lett. 60, 466 (1992). Shah J. M., Li Y.-L., Gessmann Th., and Schubert E. F. "Experimental analysis and theoretical model for anomalously high ideality factors (n ~ 2,0) in AIGaN/GaN p-n junction diodes" 1. Appl. Phys. 94, 2627 (2003). ,l(onOJIHeHHe pe,Zl.aKTOpa 1. JIe6e,neB A.M. CPH3HKa nOJIynpOBo,nHHKOBbIX npH6opoB. - M.: CPH3MaTJIHT, 2007. - 420 c .. 2. TYHHeJIbHbIe 3cpcpeKTbI B CBeTo,nHo,nax Ha OCHOBe reTepocTpYKTYP InGaNI AIGaN/GaN C KBaHTOBbIMH lIMaMH I B. E. Ky,nPllllIOB, K. f. 30JIHHa, A. H. KoBaJIeB, cp.M. MaHlIxHH, A. H. TYPKHH, A.3. IOHOBHtI II cpTIl 1997. T.31, M 11. C. 1304-1309. 3. 3JIeKTpOJIIOMHHeCileHUHlI reTepOCTpYKTYP InGaNI AIGaN/GaN npH HOHH3aIlHOHHOM npo6oe I A. H. KOBaJIeB, cp.M. MaHlIxHH, B. E. Ky,nPllllIOB, A. H. TypKHH, A.3. IOHOBHtI II CPTIT. 1998. T.32, N'21. C. 63-66. 4. JIIOMHHecueHTHble H 3JIeKTpHtIeCKHe CBOHCTBa CBeTo,nHo,nOB InGaNI AIGaNI GaN C MHOlKeCTBeHHbIMH KBaHTOBbIMH lIMaMH I B. E. Ky,nPllllIOB, A. H. TYPKHH, A.3. IOHOBHtI, A.H. KOBaJIeB, cp.M. MaHlIxHH II CPTIT. 1999. T.33, N'24. C. 445-450. 5. TYHHeJIbHO-peKoM6HHaIlHOHHble TOKH H 3cpcpeKTHBHoCTb 3JIeKTpOJIIOMHHeClleHIlHH InGaN/GaN CBeTo,nHo,nOB I H.M. EOtIKapeBa, E. A. )KHPHOB, A. A. EcppeMOB, 10. T. Pe6aHe, P.M. fop6YHOB, 10. r. llipeTep II CPTIT. 2005. T.39, N'25. C. 627-632.
113
5.2. CneKmp U3J1.Y'leHUR
KaK OTHOIlIeHHe qHCJIa
.. fJIaBa 5
_ PI (hv)
1Jextract -
OllTHQECKHE XAPAKTEPHCTHKH
r.ll.e
P-
(5.2)
Fint! (hv) ,
MOIII.HOCTb onTHqeCKOrO H3JIyqeHHH, BhlXO.ll.HIII.ero 3a npe.ll.eJIbI CBe-
TO.ll.HO.ll.a.
CBETO,nHO,nOB
3TOT
napaMeTp
OTpa)KaeT
KaqeCTBO
CBeTO.ll.HO.ll.a.
De3
npHMeHeHHH
CJIO)KHbIX H .lI.0POfHX TeXHOJIOfHqeCKHX npOII.eCCOB npaKTHqeCKH HeB03MO)KHO C.lI.eJIaTb CBeTO.ll.HO.ll. C 1Jextract
> 50 %.
BfleUlflUU KBaflmOBblU BblXOa U3JtytteflUR. cBemOaUOaa onpe.ll.eJIHeTCH OTHOIlIeHHeM qHCJIa
5.1.
THpOBaHHbIX 3JIeKTpOHOB B e.ll.HHHII.Y BpeMeHH (ceKYH.lI.Y):
BHYTpeHHHH H BHemHHH KBaHToBbIH BbIXO,ll;
H3JIyqeHHB,
KoacpcpH~HeHT nOJIe3HOrO ,Il;eHCTBHB (K. n. ,Il;.) 1Jext
=
PI (hv)
~
(5.3)
= 1Jint . 1Jextract·
AKTHBHaH 06JIaCTb H.lI.eaJIbHOrO CBeTO.ll.HO.ll.a HcnYCKaeT OaUfl cpomofl fla
Ka3ICablU ufl3ICeKmupoBaflflblu B flee 3JteKmpOfl, T. e. Ka)K.lI.bIH 3JIeKTpOH reHepHpyeT O.ll.HH CBeTOBOH KBaHT (
K03CPCPUI1Ueflm noJte3floeo aeUCmBUR. (K. n. a.) CBemOaUOaa onpe.ll.eJIHeTCH KaK
P
U3JtytteflUR. aKTHBHOH 06JIaCTH H.lI.eaJIbHOrO CBeTO.ll.HO.ll.a paBeH e.ll.HHHII.e. peflflR.R. 3cpcpeKmuBflocmb) onpe.ll.eJIHeTCH OTHOIlIeHHeM qHCJIa pO)K.lI.eHHbIX B ero aKTHBHOH 06JIaCTH
1Jint r.ll.e Pint -
=
Fint/(hv) [Ie '
r.ll.e
I .V -
3JIeKTpHqeCKaH MOIII.HOCTb, nO.ll.Be.ll.eHHaH K CBeTO.ll.HO.ll.Y.
YnpaJKHeHHe. OnpeaeJl.eHUe K8aHm08oeo 8blXOaa U3J1.Y'leHUR C8emOaUOaa PaccMaTpHBaeTcH
= Egle = 2
(5.1)
MOIII.HOCTb OnTHqeCKOrO H3JIyqeHHH H3 aKTHBHOH 06JIaCTH CBe-
TO.ll.HO.ll.a, 1- TOK HH)KeKII.HH. )KeJIaTeJIbHO, qT06bI Bce
(5.4)
1Jpower = [. V'
Bflympeflfluu KBaflmOBblU BblXOa u3JtytteflUR.CBemOaUOaa (HJIH ero Bflym-
aMilepHaH
CBeTO,l(HO,l(
C
noporOBblM
HanpH)KeHHeM,
B, H ,l(HljlljlepeHII.HaJIbHblM conpOTHBJIeHHeM
xapaKTepHCTHKa
TaKOrO
CBeTO,l(HO,l(a
IIpH
paBHblM
Rs = 20
IIPHMOM
Vih
OM. BOJlbT-
CMemeHHH
HMeeT
= Vih + [Rs . ITpH IIpOIlYCKaHHH qepe3 ,l(HO,l( TOKa [ = 20 MA ero OIlTHQeCKaH MOmHOCTb COCTaBJIHeT P = 4 MBT IIpH hv = E g • Tpe6yeTcH OIlpe,l(eJlHTb BHYTpeHBH,l(: V
HHH H BHellIHHH KBaHToBblH BblXO,l( H3JIYQeHHH CBeTO,l(HO,l(a, a TaK)Ke ero K. II.,l(. ITpe,l(IIOJlaraeTCH, QTO 1}extract
= 50 %.
BbIX0.ll.HJIH 3a npe.ll.eJIbI CBeTO.ll.HO.ll.a. I1MeHHo TaK H .lI.OJI)KHO npOHCXO.ll.HTb B H.lI.eaJIbHbIX CBeTO.ll.HO.ll.aX, BfleUlflUU KBaflmOBblU BblXOa U3JtytteflUR. KOTO-
5.2.
pbIX paBeH e.ll.HHHII.e. O.ll.HaKO B peaJIbHhlX CBeTO.ll.HO.ll.aX qaCTb
OHH MorYT 6bITb nOrJIOIII.eHbI nO.ll.JIO)KKOH CBeTO.ll.HO.ll.a, eCJIH OHa 06JIa.lI.aeT cnoc06HoCTbIO nOrJIOIII.aTb H3JIyqeHHe .lI.aHHOH .lI.JIHHbI BOJIHbI.
MexaHH3M CH
B
CBeqeHHH
H3JIyqeHHH
CneKTp H3JIYQeHHB nOJIynpOBO.ll.HHKOBbIX CBeTO.ll.HO.ll.OB
3JIeKTpOHHO-.lI.bIPOqHhlX
nap.
B
pe3YJIbTaTE!
CnOHTaHHble
cnOHTaHHOH npOII.eCChi
3aKJIIOqaeT-
peKOM6HHaII.HH
H3JIyqeHHH
CBeTa
npHHII.HnHaJIbHO OTJIHqaIOTCH OT npOII.eCCOB BbIHY)K.lI.eHHorO (HH.lI.YII.HpOBaH•
OHH MorYT CTOJIKHYTbCH C MeTaJIJIHqeCKOH nOBepxHocTbIO KOHTaKTa H TaK)Ke nOrJIOTHTbCH eIO, qTO HeMHHyeMo Be.ll.eT K CHH)KeHHIO KBaHTOBoro BhlXO.ll.a. KpoMe Toro, cYIII.eCTByeT noJtfloe Bflympeflflee ompa3ICeflue, 3aKJIIOqa-
IOIII.eeCH B JIOKaJIH3aII.HH CBeTa BHYTPH CTPYKTYPbl, qTO TaK)Ke CHH)KaeT BepOHTHOCTb BbIXO.ll.a
HOro) H3JIyqeHHH, xapaKTepHbIX .lI.JIH nOJIynpOBO.ll.HHKOBhlX JIa3epOB H CYnepJIIOMHHeCII.eHTHbIX .lI.HO.ll.OB. OnTHqeCKHe napaMeTpbI CBeTO.ll.HO.ll.OB HenoCpe.ll.CTBeHHO CBH3aHhI C npOII.eCCaMH cnOHTaHHOH H3JIYQaTeJIbHOH peKOM6HHaII.HH. Il03ToMY B 3TOM pa3.l1.eJIe 6Y.lI.YT 06CY)K.lI.aTbCH xapaKTepHCTHKH cnOHTaHHoro H3JIYQeHHH CBeTO.ll.HO.ll.OB. Ha pHC.
5.1
CXeMaTHQHO nOKa3aH npoII.ecc peKOM6HHaII.HH 3JIeKTpOHHO-
.lI.bIPOQHbIX nap. Ilpe.ll.nQJIaraeTcH, QTO 3aBHCHMOCTH 3HeprHH 3JIeKTpOHoB
Fit. 5. Onmutteclwe xapaKmepucmUKU cBemo8uo8oB
114
5.2. CneKmp U3JlytteHUJl
115
Tenepb cpaBHIiM Cpe.ll.HIiH: KBa31iliMnYJIbC HOCIiTeJISI 3apSl.ll.a C IiMnYJIbCOM
Ee
]~g-
kT
p = m*·
---
m*
Ii 3
KBa31iliMnYJIbC .lI.e BpoH:JISI:
1/
<poToHa
onpe.ll.eJISleTCSI BbIpa)KeHlieM
= V2m* . 4m*. 1/2 = V2m* . kT.
p= (hI27f) . k Ev
---
.
E = Ev -f/2k2 /(2mh *)
Eg
C 3HeprlieH:
¥l3 paCQeTOB no BbIpa)KeHIiSiM
(5.8)
Ii
MO)KHO
(5.8)
BbIBeCTIi
1i3
= hI/Ie = Egle. (5.9)
(5.9)
CJIe.ll.yeT, QTO B OnTIiQeCKOM .lI.lia-
na30He IiMnyJIbC <poToHa HaMHoro MeHbwe IiMnyJIbCa HOCIiTeJIeH: 3apSl.ll.a, T. e. nOCJIe aKTa peKOM6IiHaI.I.1i1i C Bb!.lI.eJIeHlieM <poToHa 3JIeKTpOH nepeXO.ll.liT 1i3 30HbI npOBO.ll.liMOCTIi B BaJIeHTHYIO 30HY npaKTIiQeCKIi 6e3 1i3MeHeHliSi
KBa:m:BOJIHOBOH BeKTOp k
KBa31i1iMnYJIbca. ¥lMeHHO TaKlie nepeXO.ll.b1 npe.ll.CTaBJIeHbI Ha pliC.
5.1
Bep-
TIiKaJIbHbIMIi JIIiHIiSiMIi, nOKa3bIBalOlll.IiMIi, QTO 3JIeKTpOHbI peKoM6liHliPYlOT PHc.5.1.
llapa6oJIHQeCKHH: 3aKOH .lI.HCrrepCHH 3JIeKTpOHoB H .lI.b1POK H rrplIMble
Me)f{30HHble rrepeXO.ll.bI, COOTBeTCTBYIOIII.He aKTaMH3JIYQaTeJIbHOH: peKOM6HHall.HH
TOJIbKO C TeMIi .lI.bIpKaMIi, y KOTOPbIX TaKOH: )Ke, KaK y HIiX, KBa31iliMnYJIbC IiJIIi BeJIIiQIiHa KBa3liBOJIHOBOrO BeKTopa
k.
¥l3 YCJIOBIiSi paBeHcTBa KBa31iliMnYJIbCOB 3JIeKTpOHoB Ii .lI.bIPOK BbITeKaeT B 30He npOBO.ll.liMOCTIi Ii 3Heprlili .lI.bIPOK B BaJIeHTHOH: 30He OT BOJIHOBOrO BeKTopa
k
CJIe.ll.YIOlll.ee COOTHoweHlie, n03BOJISIIOlll.ee paCCQIiTaTb ~meprHlO <poToHa:
IiMelOT napa60JIliqeCKIiH: xapaKTep, T. e.
2
= E + (n)2 . k _ E + (n)2 . k2 = E + (n)2 . k2
h .lI.JISI 3JIeKTpOHoB B 30He npOBO.ll.IiMOCTIi,
(5.5)
.lI.JISI 3JIeKTpOHoB B BaJIeHTHOH: 30He,
(5.6)
1/
r.ll.e m; -
r.ll.e
m:
Ii
HJIaHKa,
mit k-
c
2me*
2mh*
v
2mr* ,
9
npliBe.ll.eHHaSi Macca, onpe.ll.eJISIeMaSi KaK
1
1
1
(5.11 )
-*=-*+-*. mr me mh 3
KBa3IiBOJIHOBOH: BeKTop,
Ec
Ii
Ev -
h-
nOCTOSlHHaSi
3Heprlili 3KCTpeMYMoB
30HbI npOBO.ll.liMOCTIi Ii BaJIeHTHOH: 30HbI.
(5.10)
¥lCilOJIb3YSl lWM,6uflUpOBaflflbtU 3a1Wfl aucnepcuu
(5.10),
MO)KHO HaH:TIi
KOM6liHlipOBaHHYlO IIJIOTHOCTb 3HepreTliQeCKliX COCTOSlHIiH: B 3aBliCliMOCTIi OT 3Heprlili:
3aKoHbI coxpaHeHIiSi 3HeprHIi Ii KBa31iliMnYJIbCa nOMoralOT npliH:TIi K
1
p(E) = 271"2·
60JIee rJIy6oKoMY nOHIiMaHli1O MexaHIi3MOBIi3JIyqaTeJIbHOH: peKOM6IiHaI.I.lili.
(2m;) (n)2
3/2
. J E - Eg .
(5.12)
¥l3 pacnpe.ll.eJIeHIiSi DOJIbI.I.MaHa BIi.ll.HO, QTO Cpe.ll.HSISI KIiHeTIiQeCKaSi 3HeprHSi 3JIeKTpOHoB Ii .lI.bIPOK paBHa
kT.
¥l3 3aKOHa coxpaHeHIiSi 3HeprHIi CJIe.ll.yeT,
QTO 3HeprHSi
Ee
Ii .lI.bIpKIi
Eh:
PaCIIpe.ll.eJIeHlie HOCIiTeJIeH: B pa3peweHHbIx 30Hax HeBbIPO)K.lI.eHHOro nOJIyIIPOBO.ll.HIiKa OIIpe.ll.eJISleTCSI pacnpe.ll.eJIeHlieM DOJIbI.I.MaHa
JB(E) =
(5.7) ECJIIi TenJIOBaSi 3HeprliSi MaJia no cpaBHeHli10 C rrmpliHOH: 3anpelll.eHHOH: 30HbI
Eg,
T. e.
kT
~
E g,
3HeprHSi <poToHa npli6JIli3liTeJIbHO paBHa
Eg.
e-E/(kT).
(5.13)
3aBliCliMOCTb UflmeflCUBflocmu U3JlytteflUR OT 3HeprHIi SlBJISleTCSI
I(E)
OTClO.lI.a CJIe.ll.yeT, qTO npli BbI60pe nOJIynpOBO.ll.HIiKa C COOTBeTCTBYIOlll.eH:
N
(5.12)
JE - Eg . e-E/(kT).
Ii
(5.13): (5.14)
3anpelll.eHHOH: 30HOH: MO)KHO C03.l1.aTb CBeTO.ll.Ii0.ll., 1i3JIyqalOlll.liH: CBeT C Tpe-
5.2 IIOKa3aH CIIeKTp 1i3JIYQeHliSi CBeTO.ll.IiO.ll.OB, onpe.ll.eJISIeMbIH: <pop(5.14). MaKcliMYM cIIeKTpa 1i3JIYQeHliSi COOTBeTcTByeT 3Heprlili
6yeMOH: .lI.JIIiHOH: BOJIHbI. HanpliMep, .lI.JISI GaAs npli KOMHaTHOH: TeMnepaType
Ha pliC.
Eg
MYJIOH:
= 1,42 3B, n03ToMY CBeT0.ll.Ii0.ll.bI GaAs C03.l1.alOT IiH
qeHlie C .lI.JIIiHOH: BOJIHbI
870
HM.
(5.15)
FIt. 5.
116
OnmU'leC1We xapaKmepucmuKu c8emOaUOa08
5.3. Yaoll
8bt80aa U3IlY'leH.UfI.
117
BpeMH :lKH3HH HOCHTeJIeH rrpH crrOHTaHHOM H3JIyqeHHH CBeTO.11.HO.11.0B
~
"",''''~
B rrpHM030HHbIX rrOJIyrrpOBO.11.HHKax orrpe.11.eJIHeTcH KOHIJ.eHTpaIJ.HeH rrpHMeIIJIOTHOCTh COCTolIHHii 0<
ceH B aKTHBHoH 06JIaCTH (HJIH KOHIJ.eHTpalI.HeH HOCHTeJIeH), a TaK:lKe Kaqe-
(E - Eg)1I2
CTBOM MaTepHaJIa, H 06bIqHO JIe:lKHT B .11.Harra30He 1-100 HC, 'ITO rr03BOJIHeT .11.06HTbCH CKopOCTeH MO.11.YJIHIJ.HH BrrJIOTb .11.0 1 r6HT/C.
5.3.
YrOJI BbIBO,ll;a H3JI~eHHJI
ECJIH CBeT Ha rpaHHIJ.e Me:lK.11.Y rrOJIyrrpOBO.11.HHKOM H B03.11.YXOM HcrrbITbIBaeT rrOJIHOe BHyTpeHHee OTpa:lKeHHe, H3JIyqeHHe H3 rrOJIyrrpOBO.11.HHKa He BbIXO.11.HT Hapy:lKy. CBeT MO:lKeT BbIHTH 3a rrpe.11.eJIbI rrOJIyrrpOBO.11.HHKa, eCJIH yrOJI rra.11.eHHH JIyqeH Ha rpaHHlI.Y pa3.11.eJIa 6JIH30K K 90 0
•
nOJIHOe BHYTpeH-
Hee OTpa:lKeHHe B03MO:lKHO .11.JIH JIyqeH, rra.11.alOlII.HX He rro.11. rrpHMbIM yrJIOM,
E g +kT12
a TaK:lKe rrpH HX rrOqTH CKOJIb3HlII.eM rra.11.eHHH. nOJIHOe BHyTpeHHee OTpa-
3HepIWI E
:lKeHHe CHJIbHO CHH:lKaeT BHellIHHH KBaHTOBbIH BbIXO.11. H3JIyqeHHH, oco6eHHO PHC.
5.2.
TeOpeTHlJeCKHH CIIeKTp H3JIYlJeHHH CBeTO)l.HO)l.OB. IllHpHHa pacnpe)l.eJIeHHH Ha nOJIOBHHe HHTeHCHBHOCTH, onpe)l.eJIHeTCH BeJIHlJHHOH 1,8kT
.D.JIH CBeTO.11.HO.11.0B H3 MaTepHaJIOB C BbICOKHMH 3HaqeHHHMH rrOKa3aTeJIeH rrpeJIOMJIeHHH.
lIlHpHHa crreKTpaJIbHOH JIHHHH orrpe.11.eJIHeTCH Ha ypoBHe, paBHoM rrOJIO-
npe.11. rrOJIO:lKHM, 'ITO
BHHe HHTeHCHBHOCTH B MaKcHMYMe H3JIyqeHHH:
D..E =
1
,
8kT
HJIH
:lKeHHH 3Toro JIyqa OT rroBepxHocTH pa3.11.eJIa
D..A = 1,8kT . >.?
ns . sin cp = nair' sin «1>,
GaAs, H3JIyqalOlII.ero CBeT C .11.JIHHOH BOJIHbI 870 HM rrpH KOMHaTHOH TeMlIlHpHHa
D..E =
46 M3B HJIH
crreKTpaJIbHOH
D..A =
r.11.e
ns, nair -
Ha pHC. 5.3,
28 HM.
JIHHHH HBJIHeTCH
Ba)l{HOH
xapaKTepHcTHKOH
CBeTO.11.HO.11.0B. Bo~nepBbtX, .11.JIH CBeTO.11.HO.11.0B, H3JIyqalOlII.HX cBeT, B BH.11.H-
a
rrOKa3aTeJIH
rrpeJIOMJIeHHH
1).
sincpc
0
lieCKoe. BO-BmOpbtX,
.MOHOXp0.Mamu-
B03.11.yxa.
(5.18a)
nair
CPc = arcsIn-=-. ns
HarrpHMep, .11.Harra30H
CBeTO.11.HO.11.0B BocrrpHHHMaeTCH qeJIOBeqeCKHM rJIa30M KaK
H
«1> = 90 0 , MO:lKHO HaHTH
= (nair/ns) . sin 90 = nair/ns, .
IJ.BeTa JIe:lKHT B rrpe.11.eJIax .11.JIHH BOJIH 625-730 HM, 'ITO rOpa3.11.0
IlIHpe THrrHqHOrO crreKTpa H3JIyqeHHH CBeTO.11.HO.11.0B. n09TOMY H3JIyqeHHe
rrOJIyrrpOBO.11.HHKa
rrOKa3aHO, KaK, HCrrOJIb3YH YCJIOBHe
CrreKTp H3JIyqeHHH CBeTO.11.HO.11.0B .11.a:lKe Y:lKe crreKTpa H3JIyqeHHH, BocrrpH-
KpaCHOfJO
(5.17)
KpHTHqeCKHH yrOJI rrOJIHOrO BHYTpeHHero OTpa:lKeHHH. ¥i3 3aKOHa CHeJIJIHyca CJIe.11.yeT, 'ITO
MOM .11.Harra30He, OHa rOpa3.11.0 MeHbllIe IlIHpHHbI Bcero BH.11.HMOrO crreKTpa. HHMaeMoro qeJIOBeqeCKHM rJIa30M KaK O.11.HH IJ.BeT
MO:lKHO HaHTH H3 3aKOHa
(5.16)
he
HarrpHMep, TeOpeTHqeCKaH lImpHHa crreKTpaJIbHOH JIHHHH CBeTO.11.HO.11.a H3 rrepaType, paBHa
CHeJIJIHyca (HHOr.11.a Ha3bIBaeMoro 3aKOHOM CHeJIJIH):
(5.186)
nOJIyrrpOBO.11.H H;KH 06bIqHO 06JIa.11.a1OT .11.0BOJIbHO BbICOKHMH 3HaqeHHHMH rrOKa3aTeJIeH rrpeJIOMJIeHHH. TaK, .!iJIH GaAs -
9TOT rrOKa3aTeJIb paBeH 3,4.
nO.11.CTaBJIHH 3TO 3HaqeHHe B ypaBHeHHe (5.18), rrOJIyqaeM OqeHb MaJIYIO OrrTHqeCKHe BOJIOKHa pacceHBalOT CBeT, B pe3YJIbTaTe qero
BeJIHqHHY KpHTHqeCKOrO yrJIa, xapaKTepHoro .11.JIH rrOJIHOrO BHyTpeHHero
H3JIyqeHHe C pa3HbIMH 3HaqeHHHMH .11.JIHH BOJIH B HeKOTopOM .11.Harra30He,
OTpa:lKeHHH B 9TOM MaTepHaJIe. n03TOMY B TaKHX CJIyqaHX MO:lKHO BOCrrOJIb-
sin CPc
~
CPc.
COCTaBJIHIOlII.HX CBeTOBOHHMrrYJIbC, 6Y.11.eT pacrrpOCTpaHHTbCH B.11.0JIb HerO
30BaTbCH rrpH6JIH:lKeHHeM
C pa3HbIMH
BHYTpeHHero OTpa:lKeHHH HaXO.11.HTCH rrpH rrOMOlII.H Bblpa:lKeHHH
CKOPOCTHMH.
.l1.HcrrepcHH
MaTepHaJIa
OrpaHHqHBaeTCH BeJIHqHHOH rrpOH3Be.11.eHHH
eaUHU/.faX 6um/c Ha paccmOflHue,
OrrTHqeCKOrO
BOJIOKHa
Tor.11.a KpHTHqeCKHH yrOJI rrOJIHOro
CKopocmu nepeaa'l.u aaHHbtX B
(5.19)
orrpe.11.eJIHeMOrO rrapaMeTpaMH CBeTO.11.H-
0.11.0B.
YrOJI rrOJIHOrO BHYTpeHHero OTpa:lKeHHH orrpe.11.eJIHeT
'l.eHUfl.
1) BocnpHHTHe Il,BeTa CHCTeMOH lJeJIOBelJeCKOrO 3peHHH cy6beKTHBHO. XY)l.O:lKHHKH cnoco6HbI pa3JIHtlaTb Il,BeTa C JIYlJIllHM pa3peIlleHHeM - CM. rJI. 16-19.
YfJOJt BbtBOaa U3JtY-
JIyqH CHeTa, rrOrra.11.alOlII.He BHYTPb KOHyca C TaKHM yrJIOM, MoryT
BbIHTH 3a rrpe.11.eJIbI rrOJIyrrpOBO.11.HHKa. OCTaJIbHble JIyqH 3TOH B03MO:lKHOCTH He HMeIOT.
r ,
S.4. [JpocmpaHcm8eHHoe pacnpeaelleHue u3llY'leHUR c8emOaUOa08
Tll. S. OnmU'leCIWe xapatcmepucmUlw C8emOaUOa08
118
6
a
I1crroJIb3YSI rrp116JII1)KeHHOe ypaBHeHl1e
8
(5.19),
119
rrOJIyqaeM:
(5.24) 9TO COOTHOIIIeHl1e SIBJISIeTCSI Ba)KHbIM rrapaMeTpoM CBeTo.u.110.u.OB. IloCKOJIbKy 60JIbIIII1HCTBO rrOJIyrrpoBo.u.HI1KOB I1MeIOT BbICOKl1e 3Ha"'IeHI1SI rrOKa3aTeJIeR rrpeJIOMJIeHI1SI
(> 2,5),
TOJIbKO HeCKOJIbKO rrpou.eHToB CBeTa, reHepl1pyeMoro
BHyTPI1 MaTepl1aJIa, BbIXO.u.SIT 3a rrpe.u.eJIbI rrJIaHapHbIX CBeTo.u.110.u.OB • .lJ.JISI rroJIyrrpoBo.u.HI1KOBbIX CBeTo.u.110.u.OB C He6oJIbIIII1MI1 3HaqeHI1SIMI1 rrOKa3aTeJIeR PHC. 5.3. Onpe.ll.eJleHHe yrJla BbIBO.ll.a H3J1Y'leHHH no KpHTH'leCKOMY yrJly c (a); SJleMeHT nOBepXHOCTH dA (6); nJlOma.ll.b cerMeHTa nOBepXHOCTH ccpepbI, onpe.ll.eJlHeMoro pa.ll.HYCOM
r
H yrJloM
c
(8)
.lJ.JIH orrpe.u.eJIeHHSI .u.OJII1 CBen, rrorra.u.aIOmeR B yrOJI BbIBo.u.a 113JIyqeHI1SI,
r.
Ha Pl1c.
5.3,6
11 '8 rrOKa3aHO, KaK MO)KHO HaRTI1 rrJIOma.u.b cerMeHTa
rrOBepXHOCTI1 c~epbI, orrpe.u.eJISIeMOrO pa.u.l1yCOM
r
11 yrJIOM
'Pc
A=
f dA f 211"· r· =
1,5)
11 rrOJII1MepHbIX CBeTo.u.110.u.OB 3Ta rrp06JIeMa
CTOI1T MeHee OCTpO.
YnpalKHeHHe. OnpeaelleHue yalla 8bl80aa U3llY'leHUR allR GaAs, GaN U nOllUMepHblX c8emOaUOa08 .
Ha.u.o paCCql1TaTb rrJIOma.u.b rrOBepXHOCTI1 c~epl1qeCKOrO KOHyca C pa.u.l1yCOM
rrpeJIOMJIeHI1SI (rropSI.u.Ka
sin
(5.20)
'P=o
I1oKa3aTeJlH npeJlOMJleHHH .lI.JllI GaAs, GaN H H3J1Y'laIOmHX CBeT nOJlHMepHbIX MaTepHaJlOB COOTBeTCTBeHHO paBHbI 3,4; 2,5 H 1,5. Tpe6yeTclI paCC'lHTaTb KpHTH'leCKHe yrJlbI nOJlHOrO BHYTpeHHero OTpalKeHHH .lI.JllI CBeTO.ll.HO.ll.OB Ha OCHOBe .lI.aHHbIX MaTepHaJlOB H onpe.ll.eJlHTb .lI.OJlIO CBeTa, cnoco6Horo BbIHTH 3a npe.ll.eJlbI HX nJlaHapHbIx CTpyKTyp. TaK:lKe Tpe6yeTcH olleHHTb H3MeHeHHH, KOTopble npOH30H.lI.YT npH nOMemeHHH nJlaHapHOro CBeTO.ll.HO.ll.a H3 GaAs B repMeTH'lHbIH np03pa'lHbIH nOJlHMepHbIH Kopnyc C nOKa3aTeJleM npeJlOMJleHHH 1,5 (OTpa:lKeHHeM CBeTa Ha rpaHHlle pa3.l1.eJla nOJlHMep-B03.l1.YX 3.l1.eCb MO:lKHO npeHe6pe'lb).
PemeHHe KpHTH'leCKHe yrJlbI nOJlHOrO BHYTpeHHero OTpa:lKeHHH
Ilpe.u.rroJIO)KI1M, 'ITO CBeT 113JIyqaeTCSI TOqeqHbIM I1CTOqHI1KOM C MOmHOGaAs
CTbIO Psource, pacrrOJIO)KeHHbIM BHyTPI1 rrOJIyrrpOBo.u.HI1Ka. Tor.u.a MOmHOCTb
17, 1°
GaN
23,6°
rrOJII1Mep
4,18%
rrOJII1Mep
41,8°
113JIyqeHI1SI, BbIXo.u.SImero 113 rrOJIyrrpOBo.u.HI1Ka, orrpe.u.eJISIeTCSI Bblpa)KeHl1eM .llOJlH, BbIXO.ll.Hmero H3J1Y'lemIH:
27r· r2 . (1 Pescape = Psource . 4 2 . 7rr r.u.e
411"r2 -
rrJIOma.u.b rrOBepXHOCTI1 BceR
c~epbI
cos
(5.21)
'
pa.u.l1yca
r.
GaAs
2,21 %
GaN
12,7%
I1PH rrOMemeHHH GaAs nJiaHapHOro CBeTO.ll.HO.ll.a B repMeTH'lHbIH np03pa'lHbIH
113 .u.aHHoro paCqeTa CJIe.u.yeT, 'ITO TOJIbKO "'IaCTb CBeTa, 113JIyqaeMaSI
nOJlHMepHbIH Kopnyc .lI.OJIH BbIXO.ll.lImero CBeTa YBeJIH'lHTCH Ha
232 %.
BHYTPb rrOJIyrrpOBo.u.HI1Ka, MO)KeT BbIRTI1 3a ero rrpe.u.eJIbJ. BeJIl1ql1Ha STOR qaCTI1 paBHa
Pescape - = -1 . ( 1 Psource 2
cos
).
(5.22)
5.4.
npOCTpaHCTBeHHoe pacnpe~eJIeHHe H3JIYQeHH.H (~HarpaMMbI HanpaBJIeHHOCTH) CBeTO~HO~OB
IlOCKOJIbKY .u.JISI MaTepl1aJIOB C BbICOKI1MI1 rrOKa3aTeJISIMI1 rrpeJIOMJIeHI1SI xapaKTepHbI CpaBHI1TeJIbHO He6oJIbllIl1e 3HaqeHI1SI Kpl1Tl1qeCKI1X yrJIOB rrOJIHOrO BHYTpeHHero OTpa)KeHI1SI, KOCI1HYC MO)KHO rrpe.u.cTaBI1Tb B BI1.u.e CTerreHHoro pSI.u.a. Tor.u.a, orrycKaSI qJIeHbI BblIIIe BToporo rropSI.u.Ka, MO)KHO
[1.
8
8allblieM nOlle,
npoempaliem8eliliblM paenpe8uaapaMMoii lianpa8llelilio-
I1JII1
TaK)Ke rrpl1HSIT TepMI1H «KpI1BaSI CHJIbI CBen»).
I1HTeHcl1BHOCTb 113JIyqeHI1SI B 3a.u.aHHoR TOqKe, 113MepSIeMaSI B e.u.I1HI1u.ax 2 ' BT/ CM , orrpe.u.eJIHeTCSI ee IlOJISIPHbIMI1 Koop.u.I1HanMI1, T. e. paCCTOSIHl1eM
3arrl1CaTb BbIpa)KeHl1e
Pescape ~ 1 Psource ~ 2"
Bce CBeTo.u.l1o.u.bI 06JIa.u.aIOT co6CTBeHHbIM
8elleliueM u3llytteliUJl emu (B CBeTOTeXHI1Ke
(1 -
=
1
2
4 .
OT 3TOR TO"'IKI1 .u.o CBeTo.u.110.u.a 11 yrJIOM Me)K.u.y HI1M 11 rOpl130HTaJIbHOR
(5.23)
IlJIOCKOCTbIO . .lJ.JISI HaXO)K.u.eHI1SI IlOJIHOR OIlTl1qeCKOR MOmHOCTI1 CBeTo.u.110.u.a
Dl. 5. Onmutteclwe xapaKmepucmUlW cBemOaUOaOB
120
5.5. JIa.M6epmOBcKoe pacnpeaeJleHUe U3JlytteHUR
Heo6xOAHMO BhlqHCnHTb HHTerpan OT HHTeHCHBHOCTH H3nyqeHHH rro BceH rroBepxHocTH c
P=
ff
I (A) dAdA,
ypaBHeHHe OTHOCHTenbHO
2 rAe I(A) - cneK.mpaAbltafl UflmeflCU8flocmb u3AytteflUfl, BT/(HM·CM ), rrnomaAb rrOBepXHOCTH c
A-
rronyqaeM
d
(5.25)
A>'
d
COS
nair
(5.27)
lh 3aKOHa COXpaHeHHH 3HeprHH cneAyeT, qTO MOmHOCTb OrrTHqeCKOrO H3nyqeHHH B rrpeAenaX yrna drp B rronyrrpoBoAHHKe AOn)KHa paBHHTbCH OrrTHqeCKOH MOmHOCTH H3nyqeHHH B B03Ayxe B rrpeAenaX yrna d
5.5. JIaM6epToBcKoe pacnpe,Zl;eJIeHHe H3JIYQeHHB Pa3nHqHH Me)KAY rrOKa3aTenHMH rrpenOMneHHH H3nyqaIOmerO MaTepHana H OKpY)KaIOmeH cpeAbI BeAeT K aHH30TporrHH rrpOCTpaHCTBeHHoro pacrrpeAeneHHH H3nyqeHHH. .l1.nH rrnaHapHbIX AHOAOB Ha OCHOBe MaTepHanOB C BbICOKHMH 3HaqeHHHMH rrOKa3aTeneH rrpenOMneHHH xapaKTepHO naM6epTOBCKoe pacrrpeAeneHHe H3nyqeHHH. Ha pHC. 5.4 rrOKa3aH TOqeqHbIH HCTOqHHK H3nYQeHHH, pacrrOnO)KeHHbIH HeMHoro HH)Ke rpaHHI.I.bI pa3Aena rronyrrpoBoAHHK-B03AYX. JIyq, BblxoAHmHH H3 HCTOqHHKa CBeTa rroA yrnoM rp C HopManbIO K rroBepxHocTH pa3Aena, rrpenoMnHeTcH rroA yrnOM
, OTpa3HBIIIHcb OT rroBepxHocTH pa3Aena, rrorra~eT B B03Ayxe B ceKTOp, orrpeAenHeMbIH yrnoM d
a
6
(5.28)
rAe Is H lair - HHTeHCHBHOCTH H3nyqeHHH B rronyrrpoBoAHHKe H B B03Ayxe, H3MepeHHble B eAHHHI.I.aX BT/M2. I1CXOAH H3 I.I.HnHHApHqeCKOH CHMMeTpHH AHarpaMMbI HarrpaBneHHOCTH, BbI6HpaeM 3neMeHT rrOBepXHOCTH, rrOKa3aHHbIH Ha pHC. 5.4,6. ilnomaAb 3Toro 3neMeHTa orrpeAenHeTCH Bblpa)KeHHeM
dAair = 21f . r . sin
a6pHTIepo (14.2)
(5.29)
(5.27) H (5.28), rronyqaeM
dA air =
21f·
2
r .
n;
1
-2- . ~rp nair COS,..
drp.
(5.30)
AHanOrHqHO 3TOMY, rrnOmaAb 3neMeHTa rrOBepXHOCTH rronyrrpoBoAHHKa orrpeAenHeTCH Bblpa)KeHHeM
dAs = 21f . r . sin rp . r drp ~ 21f r2 . rp. drp.
(5.31)
I1HTeHcHBHocTb H3nyqeHHH BHyTpH rronyrrpoBoAHHKa Ha paccToHHHH r OT rroBepxHocTH HaXOAHTCH AeneHHeM rronHoH MOmHOCTH HCTOqHHKa CBen Ha rrnOmaAb rrOBepXHOCTH c
Is =
Psource 2 • 41fT
(5.32)
I1HTeHcHBHocTb H3nyqeHHH B B03Ayxe HaXOAHT COBMeCTHbIM peIIIeHHeM ypaBHeHHH (5.28), (5.30), (5.31) H (5.32). Pe3ynbTHpYIOmee Bblpa)KeHHe H HBnHeTCH ypaBHeHHeM AnH AaM6epm08CK.OeO npocmpaflcm8eflfloeo pacnpeaeAeflUfl:
P. I·air = ~. 4 2 1fT
noJIYllPo-
121
-2 nair;
-2
ns
COS
.
(5.33)
!,.O,ZtHHK
ns nOJIYllPoBO.I\HIIK
ns
PHC. 5.4. feOMeTpHQeCKaH Mo.n.eJlb, HcrroJlb3yeMaH .n.JlH BbIBo.n.a ypaBHeHHH .n.JlH JlaM6epToBcKoro pacrrpe.n.eJleHHH: a - CBeT, H3J1YQaeMbIH B rrpe.n.eJlax yrJla d1> BHyTpH rrOJlyrrpOBo.n.HHKa, B B03.n.yxe H3J1YQaeTCH B rrpe.n.eJlax yma d; 6 - HJlJlIOCTpaUHH 9J1eMeHTa rroBepxHocTH cerMeHTa c41epbI
113 3TOrO Bblpa)KeHHH BHAHa 3aBHCHMOCTb HHTeHCHBHOCTH H3nYQeHHH rro
r 122
5.6. CBemOaUOabL
FlL. 5. Onmu'teclwe xapaKmepucmUKU cBemOaUOaOB
6
a
Ilo.ll.cTaBJIHH ypaBHeHYle
«
=
C
(5.33)
B
(1/2) sin(2
Pair =
H3nyqaIO~W1
o6nacn.
123
Kopnyca.MU U3 anOKCUaHOU C.MOAbl (5.34)
YI C'IYlTaH,
'ITO cos
• sin =
-2 P. s~rce. ~~r. ns
(5.35)
TaKYlM 06pa30M, rrOJIY'IYlJICH pe3YJIbTaT, YI.ll.eHTYl'IHbIM ypaBHeHYlID (5.24). 3TO He Y.ll.YlBYlTeJIbHO, rrOCKOJIbKY MOLQHOCTb Yl3JIY'IeHYlH rrOJIyrrpOBO.ll.HYlKa
(Pescape) .ll.OJI)KHa 6bITb paBHa MOLQHOCTYI Yl3JIY'IeHYlH B B03.ll.yxe
(Pair).
IlpaB.ll.a, CJIe.ll.yeT OTMeTYlTb, 'ITO BO BCeX rrpYlBe.ll.eHHbIX paC'IeTaX He Y'IYlTbIBaJIYlCb
tjJOpMyJLbt C/JpeHeJLft
rrpYlOTpa)KeHYIYI Ha rpaHYlue pa3.ll.eJIa
rrOJIyrrpOBO.ll.HYlK-B03.ll.YX. IlpYl HOpMaJIbHOM rra.ll.eHYIYI JIY'IeM Ha rrOBepXHOCTb rrOTepYl MOLQHOCTYI Yl3JIY'IeHYlH 3a C'IeT OTpa)KeHYlH rro cpopMYJIaM
T = 1 - R = 1 _ (n8 - nair)2 = 4n8 · nair ns + nair (ns + n air)2 .
B
(5.36)
CTpOrYlX paC'IeTaX rrpeHe6peraTb rrOTepHMYI Ha cppeHeJIeBCKOe OTpa)KeHYle
HeJIb3H.
Ynpa1KHeHHe. OnpeaeAeHue at/lt/leKmuBHocmu CBJl3U CBemOaUOa-onmU'teCKoe BOAOKHO
PHC. 5.5. CBeTo.n.Ho.n.b1 C rrJIaHapHOH (a), rroJIyc<j:lepH'IeCKOH (6) H rrapa60JIH'IeCKOH (B) rrOBepXHOCTHMH; rrpOCTpaHCTBeHHoe pacrrpe.n.eJIeHHe H3JIY'IeHHH pa3HblX THrrOB CBeTo.n.Ho.n.OB (e). ITPH q> = 60° HHTeHCHBHOCTb JIaM6epToBcKoro pacrrpe.n.eJIeHHH H3JIY'IeHHH YMeHbllIaeTCH .n.o 3Ha'IeHHH, paBHoro rrOJIOBHHe MaKCHMYMa, .n.OCTHraeMOro rrpH q> 0°. ITpHBe.n.eHHble rrpocTpaHcTBeHHble pacrrpe.n.eJIeHHH HOp0° HHTeHCHBHOcTb paBHa e.n.HHHue MHpOBaHbI TaK, 'ITO rrpH q.
=
=
PaCCMaTpHBaeTCH rrJIaHapHbIH CBeTo.n.HO.n. GaAs C TO'Ie'IHOH H3JIY'IalOIueH 06JIaCTblO, pacrrOJIO:lKeHHOH B Herrocpe.n.CTBeHHOH6JIH30CTH OT rroBepxHocTH. Bxo.n.HaH yrJIOBaH arrepTypa OIITH'IeCKOrO BOJIOKOHHOro CBeTOBo.n.a paBHa 12°. Tpe6yeTcH orrpe.n.eJIHTb .n.OJIIO H3JIY'IeHHH H3 aKTHBHOH 06JIaCTH CBeTo.n.Ho.n.a, rrorra.n.alOIUYIO B OrrTH'IeCKHH BOJIOKOHHblH CBeTOBO.n.. C'IHTaeTCH, 'ITO rrOKa3aTeJIb rrpeJIOMJIeHHH GaAs ns = 3,4. IToTepHMH Ha OTpa:lKeHHe
PemeHHe YrJIOBaH arrepTypa rrOJIyrrpOBo.n.HHKOBoro cBeTo.n.Ho.n.a, HaH.n.eHHaH rro 3aKOHY CHeJIJIHyca, paBHa
3,5°.
IT09TOMY .n.OJIH H3JIY'IeHHH H3 aKTHBHOH 06JIaCTH CBeTo.n.H-
o.n.a, rrorra.n.alOIUaH B OrrTH'IeCKOe BOJIOKHO, COCTaBJIHeT Bcero
0,093 %.
Ha PYlC. 5.5 rrpYlBe.ll.eHbI rrpYlMepbI CBeTO.ll.YlO.ll.OB C rrOBepXHOCTHMYI .ll.PYrOM reoMeTpHLlecKoM CPOpMbI
YI
xapaKTepHble .ll.JIH HYlX rrpocTpaHcTBeH-
Hble pacrrpe.ll.eJIeHYlH Yl3JIY'IeHYlH. ,lLJIH rroJIyccpepYl'IeCKOrO CBeTO.ll.YlO.ll.a xapaKTepHo Yl30TpOrrHoe rrpocTpaHcTBeHHoe pacrrpe.ll.eJIeHYle C Yl3JIY'IaIDLQeM 06JIaCTbID B Il.eHTpe ccpepbl.
IlpYl rrapa60JIYl'IeCKOM cpopMe rroBepXHOCTYI
rrOJIY'IaeTCH pacrrpe.ll.eJIeHYle C HpKO Bblpa)KeHHOM HarrpaBJIeHHOcTbID.
O.u.-
5.6.
CBeTO,ll.HO,ll.bI C KopnycaMH H3 anOKCH,lI.HOH CMOJIbI
I1crrOJIb30BaHYle
KoprrycoB
C BbICOKYlMYI 3Ha'IeHYlHMYI
KyrrOJIO06pa3HoM
CPOpMbI
rrOKa3aTeJIeM rrpeJIOMJIeHYlH
Yl3
MaTepYlaJIOB
rr03BOJIHeT cYLQe-
CTBeHHO rrOBbICYlTb K03cpcpYlIl.YleHT OrrTYl'IeCKOrO BbIBO.ll.a CBeTO.ll.YlO.ll.OB 'T]extract
HaKO CBeTO.ll.YlO.ll.~ C rrapa60JIYl'IeCKOM YI rroJIyccpepYl'IeCKOM rroBepxHOCTHMYI
3a C'IeT YBeJIYl'IeHYlH yrJIa rrOJIHOrO BHYTpeHHero OTpa)KeHYlH 'Iepe3 Bepx-
ropa3.ll.o CJIO)KHee Yl3rOTOBYlTb, 'IeM rrJIaHapHble CBeTO.ll.YlO.ll.bl.
HIDID rrOBepXHOCTb rrOJIyrrpOBO.ll.HYlKa. 113 ypaBHeHYlH (5.22) CJIe.ll.yeT, 'ITO
IloJiHYID MOLQHOCTb Yl3JIY'IeHYlH, B~Be.ll.eHHOrO B B03.ll.YX, MO)KHO HaMTYI, YlHTerpYlpyH YlHTeHCYlBHOCTb Yl3JIY'IeHYlH B.ll.OJIb BceM rroBepXHOCTYI rroJIyccpe-
OTHOIIIeHYle K03CPCPYlIl.YleHTOB OrrTYl'IeCKOrO BbIBO.ll.a CBeTO.ll.YlO.ll.OB. C 3rrOKCYI.ll.HbIM KoprrycoM YI CBeTO.ll.YlO.ll.OB 6e3 Koprryca orrpe.ll.eJIHeTCH Bblpa)KeHYleM
pbI:
Tjepoxy _
Tjair -
90°
Pair =
J
cI>=00
lair' 211" • r . sin
• r d.
(5.34)
r.ll.e
1 - cos
KpYlTYl'IeCKYle
rpaHYlIl.aX
pa3.ll.eJIa
yrJIbI
rrOJIHOrO
(5.37) BHYTpeHHerO
rrOJIyrrpOBO.ll.HYlK-3rrOKCYI.ll.HaH
OT-
CMOJIa
124
FA. 5. Onmuttec/we xapaICmepucmUlcu c8emOaUOa08
R nOJIynpoBo,n:HRK-B03,n:yX. Ha pRC.
5.6
5.7.
nOKa3aHbI paCl.JeTHble 3Hal.JeHR5I
5.7.
olToro OTHOII1eHR5I npR pa3HbIX nOKa3aTeJI5IX npeJIOMJIeHR5I 9noKcR,n:HOH
TeMoepaTypHaB 3aBHCHMOCTh HHTeHCHBHOCTH H3JIyqeHHB
CMOJIbJ. BR,n:HO, 'ITO npR RCnOJIb30BaHRR 9nOKCR,n:HOro Kopnyca C nOKa3aTeJIeM npeJIOMJIeHR5I
1,5
125
TeMnepamypltaJl 3a8UCUMocmb uitmeltCU8ltOCmU u3AytteltUJl
9
CBeTo,n:Ho,n:a B03paCTaeT B
2-3
C POCTOM TeMnepaTyphl HHTeHCHBHOCTb H3JIYl.JeHH5I CBeTo,n:Ho,n:OB na,n:a-
pa3a.
eT. 3TO CHRJKeHHe HHTeHCHBHOCTH npOHcxo,n:HT H3-3a:
1) 2) 3)
a _ KOH)'C BblBO.l{a TOqe'iHIdH HC o'IHHK:a3Jl)"leHHJI H3JI)"IeHHJI nonynpOBO.l{HH C nOKa3llTeJIeM npenOMJIeHHJI
6e3bI3JIYl.JaTeJIbHOH peKoM6HHaUHH l.Jepe3 rJIy60KHe npHMecHble ypOBHH, peKo.M6HHaUHH Ha nOBepxHocTH, nOTe pH HOCHTeJIeH B 6apbepHbIX CJI05lX reTepocTpyKTyp. TeMnepaTYPHYIO 3aBRCHMOCTb HHTeHCHBHOCTH H3JIYl.JeHH5I CBeTo,n:Ho,n:OB
B6JIH3H KOMHaTHOH TeMnepaTypbI l.JaCTO onHCbIBalOT CJIe,n:YIOII1.HM
10
HOJIOrHl.JeCKHM ypaBHeHHeM:
1=1 r,n:e TI -
I
300 K
(
·exp - T-300K) ,
(5.38)
TI
xapaKmepUCmU'I,eCIWJl meMnepamypa KOHKpeTHoro CBeTo,n:Ho,n:a.
npe,n:nO'ITHTeJIbHee, l.JTo6bI xapaKTepHCTHl.JeCKa51 TeMnepaTypa 6bIJIa ,n:OCTaTOl.JHO BbICOKOH, nOCKOJIbKY 9TOMY COOTBeTcTByeT cJIa6a51 TeMnepaTypHa51 3aBRCHMOCTb. HHTepeCHO OTMeTHTb, 'ITO KaK CBeTo,n:Ho,n:bI, TaK R nOJIynpOBo,n:HHKOC Bhle JIa3epbI 06JIa,n:a1OT CBOHMH co6CTBeHHbIMH 3aBRCHMOCT5IMH HHTeHCHB-
2,0
3,0
IIOKa3!ITeJIb npeJIOMJIeHHJI 3nOKCII)J;Hoii CMOJlhl
4,0 Ii (-)
PHc.5.6. CBeTo,n:Ho,n: 6e3 Kopnyca (a) H CBeTo,n:HO,n: C KynoJIoo6pa3HblM KopnycoM H3 3noKcH,n:HOH CMOJIbI (6) (HcnOJIb30BaHHe Kopnyca YBeJIHtIHBaeT yrOJi BblBo,n:a H3JIytIeHHH); paCtIeTHble OTHOIIIeHHH 3HatIeHHH K03Q>Q>HIl.HeHTa OnTHtIeCKOrO BbIBo,n:a CBeTo,n:Ho,n:a C KopnycoM H3 3noKcH,n:HOH CMOJIbI H 6e3 Hero (8). fIOKa3aTeJIH npeJIOMJIeHHH CTaH,n:apTHblX 3nOKCH,n:HbIX CMOJI JIe}!{aT B HHTepBaJIe 1,4-1,8 (Nuese et aI., 1969). Ha pHC.
5.6,6
nOKa3aHo, 'ITO 6JIaro,n:ap51 KynoJIoo6pa3HoMY Kopnycy
H3 9noKcH,n:HOH CMOJIhl,
CBeT na,n:aeT Ha rpaHHUY pa3,n:eJIa 9nOKCH,n:Ha51
CMOJIa-Bo3,n:yx no,n: yrJIOM OKOJIO
90°.
Ha 9TOH rpaHHue npaKTHl.JeCKH
HOCTH H3JIYl.JeHR5I OT TeMnepaTypbJ. ,UJI5I CBeTo,n:Ho,n:OB 9Ta 3aBHCHMOCTb
T 1, a ,n:JI5I JIa3epOB - ypaBHeHHeM To. B nOJIynpoBo,n:HHKOBbIX JIa3epaX noporoBbIH TOK, T. e. 9JIeKTpHl.JeCKHH TOK,
HHor,n:a Ha3b1BaeTC5I ypaBHeHHeM
Heo6xo,n:HMbIH ,n:JI5I Hal.JaJIa reHepaIl.HH H3JIYl.JeHH5I, C YBeJIHl.JeHHeM TeMnepaTYPbl pacTeT. 3TO YBeJIHl.JeHHe noporoBoro TOKa l.JaCTO onHCbIBaeTC5I ypaBHeHHeM
Ith = Ith
I
300 K
. exp(
T-300 K T,
(5.39)
).
0
OTMeTHM, 'ITO TeMnepaTypHble 3aBHCHMOCTH H HHTeHCHBHOCTH H3JIYl.JeHH5I CBeTo,n:Ho,n:OB H noporOBoro TOKa nOJIynpOBo,n:HHKOBhlX JIa3epOB 51BJI5IIOTC5I l.JHCTO
He npOHcxo,n:HT nOTepb, CB5I3aHHbIX C nOJIHbIM BHyTpeHHHM OTpaJKeHHeM.
HbIX ,n:aHHbIX, ,n:JI5I HX BbIBo,n:a He HCnOJIb30BaHbI ypaBHeHH5I, nOJIYl.JeHHble
HCnOJIb30BaHHe KopnycoB He TOJIbKO YBeJIHl.JHBaeT BHeII1HHH KBaHTOBblH
H3 TeOpeTHl.JeCKHX npHHUHnOB.
BbIXO,n: H3JIYl.JeHH5I CBeTo,n:Ho,n:OB, HO H n03BOJI5IeT H3MeH5ITb npOCTpaHCTBeHHoe pacnpe,n:eJIeHHe H3JIYl.JeHH5I. TaK, ,n:JI5I C03,n:aHH5I Y3KOHanpaBJIeHHbIX
Ha pHC.
5.7
nOKa3aHbI nOJIyqeHHble 9KcnepRMeHTaJIbHO TeMnepaTypHhle
3aBHCHMOCTH HHTeHCHBHOCTH H3JIYl.JeHH5I CBeTo,n:Ho,n:OB Tpex THnOB: CBeTO-
CBeTo,n:Ho,n:OB npHMeH5IIOT c
,n:Ho,n:a rOJIy6oro CBel.JeHH5I InGaN/GaN, CBeTo,n:Ho,n:a 3eJIeHOrO CBel.JeHH5I
nOCKOJIbKY nOJIHMepbI 06JIa,n:a1OT He6oJIbII1HMH nOKa3aTeJI5IMH npeJIOMJIe-
InGaN/GaN H CBeTo,n:Ho,n:a KpacHoro CBel.JeHH5I AlinGaP /GaAs, CH5ITble
2000).
HH5I, nOJIHMepHble Kopnyca He3Hal.JHTeJIbHO H3MeH5IIOT BHeII1HHH KBaHTOBbIH
npH nOCT05lHHOM TOKe (Toyoda Gosei Corporation,
BbIXO,n: CBeTo,n:Ho,n:OB.
CBeTo,n:Ho,n:bI rOJIy6oro CBel.JeHH5I 06JIa,n:a1OT HaH6oJIbII1eH TeMnepaTypoH
B rJI.
11
6y,n:YT paCCMOTpeHbI Kopnyca, H3rOTOBJIeHHble no cOBpeMeH-
HbIM TeXHOJIOrH5IM: 'c rpa,n:HeHTHbIM H3MeHeHHeM nOKa3aTeJI5I npeJIOMJIeHH5I H C BbICOKHMH H3JIYl.JeHHe.
(6oJIee
2)
nOKa3aTeJI5IMH npeJIOMJIeHH5I, paCCeHBalOII1.He
a KpacHoro CBel.JeHH5I -
BH,n:HO, 'ITO
T 1, HaHMeHbII1eH. 3TOT <paKT He 51BJI5IeTC5I HeOJKH,n:aH-
HbIM, nOCKOJIbKY R3BeCTHO, 'ITO CBeTo,n:Ho,n:bI rOJIy6oro CBel.JeHH5I HMelOT caMble rJIy60KHe KBaHTOBble 51Mb! H 9TO ,n:eJIaeT CTpyKTYPbI InGaN/GaN HaH60JIee 9
126
FA. 5. Onmu'teclcue xapaK.mepucmUlcu c8emOaUOa08
[JIaBa
6
TEMDEPATYPA p-n-DEPEXO,nA H TEMDEPATYPA HOCHTEJIEH TOKA
TeMIIepaTYPa oKp)')KalO~eH cpe,w,I T, °C PHC. 5.7. XapaKTepHCTH'l:eCKHe TeMIIepaTypbI TI ,n:JIlI Tpex THIIOB CBeTo,n:Ho,n:OB: CBeTo,n:Ho,n:a roJIy6oro CBe'l:eHHlI InGaN/GaN, CBeTo,n:Ho,n:a 3eJIeHOrO CBe'l:eHHlI InGaN/GaN H CBeTo,n:Ho,n:a KpacHoro CBe'l:eHHlI AlInGaP/GaAs, CHlITbie B6JIH3H KOMHaTHOH: TeMnepaTypbI (Toyoda Gosei Corporation, 2000) YnpalKHeHHe. KOMneHCal{Uf! meMnepamYPHou 3a8UCUMocmu c8emOaUOa08 PaccMoTpHM CBeTo,n:HO,n: C xapaKTepHCTH'l:eCKOH: TeMIIepaTyp0H: TI = 100 K, IIOporoBbiM Hanpll)!{eHHeM npH TeMnepaType 20°C 1,4 B H TeMnepaTypHbIM K03<j:Jq:mU;HeHTOM IIoporoBoro Hanpll)!{eHHlI 0,5 MB/K . .lI.H<j:J<j:JepeHU;HaJIbHOe conpOTHBJIeHHe ,n:aHHoro CBeTo,n:Ho,n:a npH npllMblX Hanpll)!{eHHlIX 60JIbllle Hanpll)!{eHHlI BKJIIO'l:eHHlI paBHo 20 OM. Tpe6yeTclI pa3pa6oTaTb cxeMY ynpaBJIeHHlI CBeTo,n:Ho,n:OM, COCTOll~ylO H3 HCTO'l:HHKa nOCTollHHoro Hanpll)!{eHHlI H pe3HCTopa, KOMneHcHpylO~ylO TeMnepaTypHYIO 3aBHCHMOCTb HHTeHCHBHOCTH H3JIY'l:eHHlI CBeTo,n:Ho,n:a. CxeMa ,n:OJI)!{Ha o6eCne'l:HBaTb o,n:HHaKoBYIO HHTeHCHBHOCTb H3JIyqeHHlI CBeTo,n:Ho,n:a H B TO'l:Ke 3aMep3aHHlI BO,n:bI (O°C), H npH TeMnepaType 60°C. TIPH O°C 'l:epe3 CBeTo,n:HO,n: ,n:OJI)!{eH npoxo,n:HTb TOK 20 MA.
DH6JIHOrpacjmQeCKHH CDHCOK
Nuese C. J., Tietjen J. J., Gannon J. J., and Gossenberger H. F. "Optimization of electroluminescent efficiencies for vapor-grown GaAsP diodes" 1. Electrochem Soc.: Solid State Sci. 116,248 (1969). Toyoda Gosei Corporation, Japan, General LED catalogue (2000). Toyoda Gosei Corporation, Japan, General LED catalogue (2004).
TeMnepamypa p-n-nepexoiJa, COOTBeTCTBYIOw:aH TeMnepaType aKTH:BHOH 06JIaCTH: KpH:CTaJIJIHqeCKOH peIIleTKH:, HBJIHeTCH Ba:>KHbIM rrapaMeTpOM CBeTO.D.H:O.D.OB. Ba)KHOCTb :nOH xapaKTepH:CTH:KH: 06bHCHHeTCH CJIe.D.YIOW:H:MH: rrpH:qH:HaMH:. Bo-rrepBblx, OT TeMrrepaTypbI p-n-rrepeXO.D.a 3aBH:CH:T BHYTpeHHH:H KBaHTOBbIH BbIXO.D. H:3JIyqeHH:H .D.H:O.D.a. BO-BTOPbIX, pa60Ta B pe)KH:Me BbICOKH:X TeMrrepaTYP 3HaqH:TeJIbHO COKpaw:aeT BpeMH )KH:3HH: YCTpoHCTBa. B-TpeTbH:X, BblCOKaH TeMrrepaTypa BHYTPH: CBeTO.D.H:O.D.a MO)KeT HBH:TbCH rrpH:qH:HOH pa3pYIIleHH:H ero Koprryca. I1MeHHo rr03TOMY BCer.D.a )KeJIaTeJIbHO 3HaTb 3aBH:CH:MOCTb TeMrrepaTypbI rrepeXO.D.a OT rrpOTeKaIOw:ero TOKa. MecTaMH: BbI.D.eJIeHH:H TerrJIa BHYTPH: CBeTO.D.H:O.D.a HBJIHIOTCH KOHTaKTbI, BHeIIlHH:e CJIOH: H: aKTH:BHaH 06JIaCTb. IlpH: HH:3KH:X 3HaqeHH:HX TOKa HarpeBOM KOHTaKTOB H: BHeIIlHH:X CJIOeB MO)KHO rrpeHe6peQb H:3-3a He3HaQH:TeJIbHOrO KOJIH:QeCTBa .D.)KOYJIeBa TerrJIa, BbI.D.eJIHeMOrO Ha H:X rrapa3H:THbIX COrrpOTH:BJIeHH:HX (I2 R). Ilo3ToMY rrpH: MaJIbIX TOKax OCHOBHbIM TerrJIOBbIM H:CTOQHH:KOM HBJIHeTCH aKTH:BHaH 06JIaCTb, HarpeB KOTOPOH rrpoH:CXO.D.H:T B pe3YJIbTaTe 6e3bI3JIYQaTeJIbHOH peKOM6H:HaI.l,H:H:. IlpH: rrOBbIIIleHH:H: TOKa BKJIa.D. rrapa3H:THbIX COnpOTH:BJIeHH:H KOHTaKTOB H: BHeIIlHH:X CJIOeB B rroBbIIIleHH:e TeMrrepaTypbI BHYTPH: .D.H:O.D.a B03paCTaeT H: MO)KeT .D.a)Ke CTaTb rJIaBHbIM. Cyw:ecTByeT HeCKOJIbKO crroco60B orrpe.D.eJIeHH:H TeMrrepaTyphl rrepexo.D.OB: • PaMaHOBCKaH crreKTpOCKOrrH:H (Todoroki et aI.,
1985);
• H:3MepeHH:e rroporOBoro HarrpH)KeHH:H (Abdelkader et aI., • H:3MepeHH:e TerrJIOBOrO COrrpOTH:BJIeHH:H (Murata, Nakada, • H:3MepeHH:e K03
MeTO.D.OM
1992); 1992);
<poToTepMH:QeCKOH
• orrpe.D.eJIeHH:e TeMrre.paTypbI rro crreKTpaM 3JIeKTpOJIIOMH:HeCI.I,eHI.I,H:H: (Epperlein, Bona; 1993); • orrpe.D.eJIeHH:e TeMrrepaTypbI rro crreKTpaM
aI, 1992); • 6eCKOHTaKTHbIH MeTO.D., OCHOBaHHbIH Ha H:3MepeHH:H: OTHOIIleHH:H rrH:KOB H:3JIYQeHH:H .D.BYXI.I,BeTHbIX H:CTOQHH:KOB CBeTa (Gu, Narendan, 2003). DOJIbIIlH:HCTBO rrepeQH:CJIeHHbIX MeTO.D.OB IWCBeltltbte, B HH:X TeMrrepaTypa rrepexo.D.a orrpe.D.eJIHeTCH rro JIerKO H:3MepHeMbIM rrapaMeTpaM. B 3TOH rJIaBe 6Y.D.YT paccMoTpeHbI .D.Ba crroco6a HaXO)K.D.eHH:H TeMrrepaTypbI rrepeXO.D.OB: rro
Fit. 6.
128
Te~tnepamypa
6.2. TeMnepamypa nepexoaa u aJ!uHa 80J!Hbt
p-n-nepexoaa u meMnepamypa flOcumeJ!eil mOlw
8
MalCcUMYMe cneICmpa
129
CMeIl.l,emnO )l.JIHHbI BOJIHbI rrHKa H3JIyqeHH51 H rro C)l.BHry rrp51MOrO Harrp512KeHH51 rrpH H3MeHeHHH TeMrrepaTypbI. TaK2Ke 6Y)l.eT 06cY2K)l.aTbC51 Borrpoc o TeMrrepaType HocHTe,n:eH, KOTOpa51 M02KeT 6blTb orrpe)l.eJIeHa H3 HaKJIOHa crreKTpaJIbHOH xapaKTepHcTHKH H3JIyqeHH51 B 06JIaCTH BblCOKHX 3HeprHH I).
6.1.
TeMnepaTypa HOCHTeJIeH H HaKJIOH cneKTpaJIbHOH xapaKTepHCTHKH B 06JIaCTH BbICOKHX sH,eprHH
113 pacrrpe)l.eJIeHH51 DOJIbJJ.MaHa )l.JI51 HOCHTeJIeH 3ap51)l.OB, orrHCblBalOIl.I,ero crreKTp H3JIyqeHH51 B 06JIaCTH BblCOKHX 3HeprHH, BbITeKaeT 3KcrrOHeHJJ.HaJIbHa51 3aBHCHMOCTbHHTeHCHBHOCTH H3JIyqeHH51 OT 3HeprHH
(6.1)
I ex: exp[-hvj(kTc)], r)l.e
Tc - meMnepamypa HOCUmeJleu.
HaKJIOH crreKTpaJIbHOH xapaKTepH-
CTHKH B 06JIaCT~ BblCOKHX 3HeprHH orrpe)l.eJI51eTC51 Bblpa2KeHHeM
d(lnI) -1 d(hv) ex: kTc •
(6.2)
MeTo,lI. orrpe)l.eJIeHH51 TeMnepaTypbI HOCHTeJIeH rro HaKJIOHY crreKTpaJIbHbIX xapaKTepHcTHK B 06JIaCTH BblCOKHX 3HeprHH JIyqIlle Bcero rrO)l.XO)l.HT
OTCIO)l.a BH)l.HO, 'ITO H3 HaKJIOHa crreKTpaJIbHOH xapaKTepHCTHKH M02KHO HerrOCpe)l.CTBeHHO rrOJIyqHTb TeMrrepaTYPY HOCHTeJIeH. IloCKOJIbKY TeMrrepaTypa HOCHTeJIeH rrpaKTHqeCKH BCer)l.a BbIIlle TeMrrepaTypbl rrepexo)l.a, 6JIaro)l.ap51 HH2KeKJJ.HH HOCHTeJIeH C BbICOKOH 3HeprHeH B aKTHBHYIO 06JIaCTb, 3TOT MeTO)l. rr03BOJI51eT orrpe)l.eJI51Tb
PHC. 6.1. TeMnepaTYPbl HOCHTeJIeH B CBeTO)l.HO)l.e CHHero CBeqeHHlI InGaN (a) H CBeTO)l.HO)l.e KpacHoro CBeqeHHlI AlInGaP (6), nOJIyqeHHble H3 HaKJIOHOB cneKTpaJIbHblX xapaKTepHcTHK B 06JIaCTH BbICOKHX 3HeprHH. 11a-3a YUIHpeHHlI cneKTpOB H3JIYqeHHlI MHorOKOMnOHeHTHbiX TBep)l.bIX pacTBopoB H3MepeHHble 3HaqeHHlI npeBbIllialOT peaJIbHble TeMnepaTypbI HOCHTeJIeH (Chhajed et aI., 2005; Gessmann et aI., 2003)
)l.JI51 6HHapHbIx COe)l.HHeHHH -
rrepaTypbI HOCHTeJIeH, orrpe)l.eJIeHHbIe )l.aHHbIM MeTO)l.OM, HaH60JIee 6JIH3KH K peaJIbHbIM.
8epXHfOfO 2paHutfy peaJIbHOH TeMrrepaTypbI
p-n-rrepexo)l.a. Ha pHC.
6.1
6.2. rrOKa3aHbI crreKTpbl H3JIyqeHH51 CBeTO)l.HO)l.OB IrrGaN H
AlInGaP rrpH pa3HbIx 3HaqeHH51X TOKa (Chhajed et aI., et at,
2003).
GaAs H InP. 3THM COe)l.HHeHH51M He CBOH-
CTBeHHO YIllHpeHHe crreKTpOB H3-3a
2005;
TeMnepaTypa nepeXOAa H AJIHHa BOJIHbI B MaKCHMYMe cneKTpa H3JIYQeHH.H
Gessmann
BH)l.HO, 'ITO TeMrrepaTypbl HOCHTeJIeH, orrpe)l.eJI51eMbIe rro
COOTBeTCTBYIOIl.I,HH MeTO)l. OCHOBaH Ha 3aBHCHMOCTH IllHpHHbI 3arrpe-
HaKJIOHaM crreKTpaJIbHbIX xapaKTepHCTHK B 06JIaCTH BbICOKHX 3HeprHH, rrpH
Il.I,eHHOH 30HbI (CJIe)l.OBaTeJIbHO, H )l.JIHHbl BOJIHbI B MaKCHMYMe crreKTpa H3-
YBeJIHqeHHH TOKa paCTYT. TaK, rrpH HH3KHX 3HaqeHH51X TOKa TeMrrepaTY-
JIyqeHH51) OT TeMrrepaTYPbI. MeTo)l. rrpe)l.YCMaTpHBaeT )l.Ba3Tarra: KaJIH6pOB-
pbI HOCHTeJIeH B CBeTO)l.HO)l.aX InGaN H AlInGaP COOTBeTCTBeHHO paBHbI
Ka H3MepHTeJIbHOH arrrrapaTypbI HH3MepeHHe TeMrrepaTypbI
221 DC
235 DC.
"Ha 3Tarre KaJIH6pOBKH H3Mep51eTC51 3HeprH51 B MaKCHMYMe crreKTpa H3-
H
2,12 DC,
a rrpHBbICOKHX TOKax 3TH TeMrrepaTypbI
415 DC
H
p-n-rrepeXO)l.a.
O)l.HaKO H3-3a 3
JIyqeHH51 rrpH pa3HbIX OKpY2KaIOIl.I,HX TeMrrepaTypax, 06blqHO B )l.Harra30He
JIyrrpOBO)l.HHKOBbIX TBep)l.bIX paCTBopOB rrOJIyqeHHbIe 3HaqeHH51 TeMrrepaTYP
20-120 DC.
HeCKOJIbKO BbIIlle peaJIbHblX TeMrrepaTYP HOCHTeJIeH.
rYJI51TOpOM. ,L:LJI51 CHH2KeHH51 Bep051THOCTH )l.OrrOJIHHTeJIbHOrO HarpeBa HO-
YIllHpeHHe crreKTpOB H3JIyqeHH51 MHorOKOMrrOHeHTHbIX TBep)l.bIX pac-"
,L:LJI51 3Toro CBeTO)l.HO)l. rrOMeIl.l,aeTC51 B TepMOCTaT C TepMope-
CHTeJIH HH2KeKTHpYIOTCH B aKTHBHYIO 06JIaCTb CBeTO)l.HO)l.a B HMrrYJIbCHOM
»
TB~pOB rrOJIyrrpOBO)l.HHKOBbIX COe)l.HHeHHH (H, KaK CJIe)l.CTBHe, YMeHbIlleHHe
pe2KHMe co CKBa2KHOCTblO
HaKJIOHOB HX crreKTpaJIbHbIX xapaKTepHCTHK) rrpOHCXO)l.HT H3-3a CTaTHCTH-
BHyTpH TepMOCTaTa H TeMrrepaTypa
qeCKHX
(kT)
1984).
yIllHpeHH51 crreKTpOB rr03BOJI51eT
3HaqHTeJIbHO rrOBblCHTb TOqHOCTb orrpe)l.eJIeHH51 TeMrrepaTypbI HOCHTeJIeH.
Il03ToMY M02KHO CqHTaTb, 'ITO TeMrrepaTypa
p-n-rrepeXO)l.a
6Y)l.YT paBHbl. Ha 3Tarre
KaJIH6pOBKH orrpe)l.eJI51eTC51 3aBHCHMOCTb TeMrrepaTypbI
p-n-rrepeXO)l.a
OT
3HeprHH MaKCHMYMa B crreKTpe H3JIyqeHH51 B 3a)l.aHHOM )l.Harra30He TOKOB. Ha pHC.
(Xi I) 06cY)K)l.eHHe Bonpoca 06 onpe)l.eJIeHHH TeMnepaTypbI HOCHTeJIeH H3 cneKTpoB CM. B [1-4].
1.
6.2,a
et aI.,
rrOKa3aHbl )l.aHHbIe KaJIH6pOBKH CBeTO)l.HO)l.a Y
2005).
Ha 3Tarre H3MepeHHM, CJIe)l.YIOIl.I,HM 3a 3TarrOM KaJIH6pOBKH, orrpe)l.eJI51eTC51 3aBHCHMOCTb 3HeprHH B MaKcHMYMe crreKTpa H3JIyqeHH51 OT rrOCT051HHOrO
5
130
297,5 ,,:; 297 0 ~ ==
,
tl
i 296,51---
~
~~,.,
~ § g :!!~
1l'"! ~J oS
"'1.5
6.3. Teopemu'tecKoe 060Cfl08aflue 3a8UCUMocmu npflMoeo flanpfl:J/Ceflufl
FA. 6. TeMnepamypa p-n-nepexo8a u meMnepamypa flocumeAeu mOlw
YCI> C,l( AlGaN
co I
~--
~I
I
BI1He BbICOTbI ee MaKCI1MaJIbHOrO 3HaqeHI1f1. 9
t 01,0
I13JIyqeHI1H I13-3a TeMrrepaTypHoH 3aBI1CI1MOCTI1 11 rrpI1MeHeHI1f1 MHorOKOM-
~ i '-1-~'~i---+-~ h,8 19* ~ .,q--f
HMIIYJILCHLrii TOK
CKBaJKHOCThlOlOOO
*'
296,0 ,a. 295,5 295,0 -294,51----j-:;"fY 2940 ~y
'
iii
I
I--Wil
rrOHeHTHbIX TBep.ll.bIX pacTBopoB TaK)!{e OrpaHI1QI1BaIOT TOqHOCTb .ll.aHHOrO
0,9
MeTO.ll.a. CMern:eHI1e MaKCI1MYMa B crreKTpe I13JIyqeHI1f1 rrpI1 I13MeHeHI1I1 TeMrre-
I- 0 - I f = L50 MA _e_
I-
- ..-
I I I
TTTI-.-y-
40 MA 30 MA
(dE g / dT)
paTypbI
1
06bflcHfleTcfI TeMrrepaTYPHoH 3aBI1CI1MOCTbIO IIII1pI1HbI
3arrpern:eHHoM 30HbI. 113MeHeHI1e IIII1pI1HbI 3arrpern:eHHoM 30HbI C TeMrrepa-
0 ,7
20MA IOMA
131
TypOH MO)!{eT 6bITb HaM,l(eHO rro rrapaMeTpaM
~06~~~~~~-L~~~~ 293,5 20 30 40 50 60 70 80 90 100110 '290 292 294 296 298 300 302 304 TeMIIepaTypa B TepMocrnTe To, °C
,l(rnrna BOJIHLI B M3KCHM}'Me cneK'Ipa H3JIY'IeHIDI
A, HM
PHC. 6.2. 3aBHcHMoCTb AJIHHbI BOJIHbI B MaKCHMYMe cneKTpa H3JIyqeHHlI OT TeMnepaTyphI B TepMocTaTe AJIlI CBeTOAHOAa AIGaN Y AHana30Ha CBeqeHHlI B HMnYJIbCHOM pe)KHMe co CKBa)KHOCTbJO 1000 (a). CneKTpbI H3JIyqeHHlI H TeMnepaTyphI nepexoAoB npH pa3HbIX 3HaQeHHlIX nOCTOllHHoro TOKa (6). (Xi et aI., 2005)
6Y.ll.YT OrrI1CaHbI B CJIe.ll.YIOrn:eM pa3.ll.eJIe 3TOM rJIaBbI. OTMeTI1M,
'ITO
B .ll.aHHOM
MeTO.ll.e
at/Jt/JeKm
3anOJlI-leHUR
aKmUBHOU
o6/lacmu He OKa3bIBaeT rrpaKTI1qeCKI1 HI1KaKOrO BJII1f1HI1f1 Ha pe3YJIbTaTbI I13MepeHI1M, eCJII1 OH 6hlJI yqTeH Ha 3Tarre KaJII16pOBKI1. npI1 3arrOJIHeHI1I1 aKTI1BHOM 06JIaCTI1, KOTopoe rrpOI1CXO.ll.I1T rrpI1 BbICOKI1X rrJIOTHOCTfiX TOKa, 3HeprI1f1 MaKCI1MYMa B crreKTpe I13JIyqeHI1f1 CMern:aeTCfI B CTOPOHY 6o/lee
BblCOKUX 3HepmH. 11 Hao6opOT, 3Hepmfl B MaKCI1MYMe C.ll.BI1raeTCfI B CTOPOHY 6o/lee HU3KUX 3HeprI1H rrpI1 cy)!{eHI1I1 3arrpern:eHHOH 30HbI. O.ll.HaKO OTJII1qI1Tb CMern:eHI1e MaKCI1MYMa B crreKTpe I13JIyqeHI1f1 I13-3a I13MeHeHI1f1
p-n-rrepeXO.ll.a
TOKa. nOcJIe 3Toro CBeTO,l(I10,l( HaXO,l(I1TCfI rrpI1 KOMHaTHoH TeMrrepaType,
TeMrrepaTypbI
a 3aTeM qero rro KaJII16pOBOqHbIM ,l(aHHbIM .ll.JIfi Ka)!{.ll.OrO 3HaqeHI1f1 TO-
aKTI1BHOH 06JIaCTI1 rrOQTI1 HeB03MO)!{HO, XOTfi rrpI1 tTaH.ll.apTHhlX YCJIOBI1f1X
Ha pI1c. 6.2,6 rrOKa3aHhl Y-.ll.I1arra30Ha CBeqeHI1f1 rrpI1 pa3HbIX 3HaqeHI1f1X I1H)KeKII.I10HHOrO TOKa. Ha pI1C. 6.3 rrOKa3aHO, KaK rro .ll.aHHbIM KaJII16pOBKI1 MO)!{HO orrpe,l(eJII1Tb TeMrrepaTYPY p-n-rrepeXO.ll.OB (Xi et al., 2005).
rrpOBe.ll.eHI1f1 3KCrrepI1MeHTOB, KaK rrpaBI1JIO, rrpeo6JIa.ll.aeT rrepBbIH 3
Ka orrpe.ll.eJIfleTCfI TeMrrepaTypa
crreKTpbI
p-n-rrepexo,l(a.
OT ero CMern:eHI1f1 B pe3YJIbTaTe 3arrOJIHeHI1f1
I13JIyqeHI1f1 CBeTO.ll.I10.ll.a
6.3.
TeOpeTHQeCKOe 060CHOBaHHe 3aBHCHMOCTH npSlMoro HanpSlJKeHHSI CBeTo.n;Ho.n;a OT TeMnepaTypbI
TOqHOCTb MeTO.ll.a OrpaHI1qeHa rrorpeillHOCTbIO orrpe.ll.eJIeHI1f1 .ll.JII1HbI BOJIHbI
B MaKCI1MYMe crreKTpa I13JIyqeHI1f1.
COCTaBJIfieT
5-10 % OT
no OII.eHKaM 3Ta
BbIBO.ll. TeOpeTI1qeCKOM 3aBI1CI1MOCTI1 rrpflMoro Harrpfl)!{eHI1f1 CBeTO.ll.I10.ll.a
rrorpeillHOCTb
rrOJIHOH IIII1pI1HbI crreKTpaJIbHOH JII1HI1I1 Ha rrOJIO-
OT TeMrrepaTypbI, pI1aJIax KHI1m
u
150
(Xi
rrpI1Be.ll.eHHbIH et al.,
B 3TOM pa3.ll.eJIe, 6a3I1pyeTcfI Ha MaTe-
2004, 2005).
BOJIbTaMrrepHafi xapaKTepI1CTI1Ka
I1.ll.eaJIbHOrOp-n-rrepexo.ll.a orrpe.ll.eJIfleTCfI ypaBHeHI1eM UlOKJII1
1
o
Y C,[(AIGaN E..t \eak=295 HM Cd 100 I--T 20°C
J = Js
~
me
Js
-
(eeV!I(nidealkT) -
-it
rr
o
Vf
»
kT / e
crrpaBe.ll.JII1BO
CJIe.ll.YIOrn:ee COOTHOIIIeHI1e:
~-
dVf = dT
-,1,.---.. o
(6.3)
rrJIOTHOCTb TOKa HaCblrn:eHI1f1. ,ll.JIfi HeBblpO)!{.ll.eHHbIX rroJIyrrpo-
BO.ll.HI1KOB B pe)!{I1Me rrpflMoro CMern:eHI1f1 rrpI1
~
1),
CABHr MaKCHMyMa
n-~- crreIcrpa H3rryqeHHlI
~ [nideal' dT e
kT.1 (Jf)] J II
s
.
(6.4)
nJIOTHOCTb TOKa HaCblrn:eHI1f1 3aBI1CI1T OT 3HaqeHI1H K03
10
20
30
40
50
IIOCTOJIHHbIH TOK npllMoro cMew;eHHll
60 If' MA
PHC. 6.3. OnpeAeJIeHHe TeMnepaTypbI nepexoAa no 3aBHCHMOCTH 9HeprHH B MaKcHMYMe cneKTpaH3JIYQeHHlI OT nOCTOllHHoro TOKa HH)KeKUHH AJIlI Y-cBeToAHOAa (300 MKM x 300 MKM), H3JIYQaJOw;ero Ha AJIHHe BOJIHbI 295 HM. IIpHQHHa YKa3aHHoH norpeIIIHOCTH 3aKJIJOQaeTClI B HeOnpeAeJIeHHOCTH 3HaQeHHlI 9HeprHH B MaKcHMYMecneKTpa H3JIYQeHHlI
(Xi
et ai.,
2005)
CTI1 COCTOflHI1H Ha KpaflX BaJIeHTHOH 30HbI 11 30HbI rrpOBO.ll.I1MOCTI1, a TaK)!{e OT IIII1pI1HbI 3arrpern:eHHoH 30HbI. CJIe.ll.yeT OTMeTI1Tb, 'ITO Bce rrepeqI1CJIeHHble rrapaMeTpbI 3aBI1CflT OT TeMrrepaTypbI
p-n-rrepexo.ll.a.
TeMrrepa-
TypHafi 3aBI1CI1MOCTb 3~~eKTI1BHOH rrJIOTHOCTI1 COCTOflHI1H orrpe.ll.eJIfleTCfI Bblpa)!{eHI1eM:
N c .v ex: T / .
B CJIyqae
rrO.ll.BI1)!{HOCTI1 HOCI1TeJIeH OT TeMrrepaTyphl I1MeeT BI1.ll.
OTHOIIIeHI1f1 9HHIIITeHHa CJIe.ll.yeT, 'ITO K03
5*
132
FA. 6. TeMnepamypa p-n-nepexoaa U meMnepamypa ftOCUmeAeu mOlCa
OT TeMrrepaTypbl KaK
D ex: T- I / 2 .
6.3. Teopemu'leclCoe 060Cft08aftUe aa8UCUMocmu npflMOeO ftanpfl:JICeftUfl
BpeMH )KH3HH HeOCHOBHblX HOCHTeJIeH C
POCTOM TeMrrepaTypbI MO)KeT YMeHbIIIaTbcH (B cJIyqae 6e3bI3JIyqaTeJIbHOH peKoM6HHaUHH) HJIH YBeJIHqHBaTbCH (B cJIyqae H3JIyqaTeJIbHOH peKoM6HHaUHH). lib-3a TaKoH HeOrrpe.ll.eJIeHHOCTH 6Y.lI.eM CqHTaTb, qTO BpeMH )KH3HH HeOCHOBHbIX HOCHTeJIeH OT TeMrrepaTypbl He.3aBHCHT. ilO.ll.CTaBHB 3TH TeM-
(6.4)
rrepaTypHble 3aBHCHMOCTH B ypaBHeHHe
H B3HB OT rrOJIyqHBIIIerOCH
dV, = eV, - Eg dT eT
~ 3,4 .5a:l if "!. 3,3 ~«l"
: ~ 3,2t---r--t-~I---+--f---+-""d--\ 2,2
~g
~
+ ! . dEg
~
3,1r----\-~f__ 8---1---1--+
7
3,00
_ 3k.
edT
2,5 r----r--r---r-..,---.r---.--,-...,
,.,
""
Bblpa)KeHHH rrpOH3BO.ll.HYIO, HaXO.ll.HM
200
2,1
I
I
~
---,--+8 I 7 I
I
400
600
(6.5)
e
133
L
L
S002,00'---'--20O--'---40 O--'---6.1.. 00--'---'SOO
3TO ypaBHeHHe H orrpe.ll.eJIHeT OCHOBHYIO 3aBHCHMOCTb rrpHMoro HarrpH)KeHHH CBeTO.ll.HO.ll.a OT TeMrrepaTypbI. TPH CJIaraeMblX rrpaBoH qaCTH BbIpa)KeHHH
(6.5)
EiO K) a (10-4 ~ ) 1l(K)
oTo6pa)KaIOT TeMrrepaTypHble 3aBHCHMOCTH KOHueHTpaUHH
co6CTBeHHblX HOCHTeJIeH, IIIHpHHbI 3arrpemeHHoH 30HbI H 3
1972)
(6.5)
GaN
OT HCrrOJIb30-
GaP GaAs
3aKJIIOqaeTCH B TOM, qTO B HeM
InP
yqTeHa TeMrrepaTypHaH 3aBHCHMOCTb IIIHpHHbI 3arrpemeHHOH 30HbI.
Si
CBeTO.ll.HO.ll.bI 06blqHO pa60TaIOT rrpH rrpHMbIX HarrpH)KeHHHX, 6JIH3KHX K HarrpH)KeHHIO
p-n-rrepeXO.ll.a (Vf ~
Vz,i).
Ge
il03TOMY .lI.JIH HeBblpO)K.lI.eHHbIX
rrOJIyrrpOBO.ll.HHKOB MO)KHO 3arrHcaTb Bblpa)KeHHe
(6.5)
Z: ).
0,6
(6.6)
0,5
200
0
400
600
SOO
oTo6pa)KaeT H3MeHeHHe
B rroJIyrrpOBO.ll.HHKaX 06b1qHO YMeHbIIIaeTCH. TeMrrepaTYPHaH 3aBHCHMOCTb IIIHpHHbI 3arrpemeHHoH 30HbI rrOJIyrrpOBO.ll.HHKa MO)KeT 6bITb orrHcaHa <pop(Varshni,
1967)
I):
PHC. 6.4. TeMnepaTYPHall 3aBHCHMOCTb IIIHpHHbl 3anpellleHHoH 30HbI .lI.JIlI nOJIynpoBO.ll.HHKOB GaAs, InP, Si, Ge. TIpe.ll.CTaBJIeHHble 3aBHcHMoCTH lIBJIlIlOTClI annpoKCHMaUHlIMH 9KcnepHMeHTaJIbHbIX .lI.aHHbIX no cpopMYJIe BapIIIHH C 9MnHpHQeCKHMH K09cpcpHuHeHTaMH a H (3 (loffe, 2004)
.lI.JIH HeKoTOpblXIIOJIyrrpOBO.ll.HHKOB (loffe,
(6.7) r.ll.e
a
H
{3 -
3MrrHpHqeCKH rrO.ll.06paHHble K03
paMempaMU BapUtHu.
Ha pHC.
6.4
1000
TeMIIepaTYPa T, K
IIIHpHHbI 3arrpemeHHoH 30HbI. C POCTOM ,eMrrepaTypbI IIIHpHHa 3TOH 30HbI
tjJ0PMYJWU BapUtHU
rrOKa3aHa 3aBHCHMOCTb
Eg
(6.6)
H
(6.7)
B Bblpa)KeHHe
(6.5),
2004).
dV, _!!:. .In (ND .NA) _ aT· (T+2(3) _ 3k dT - e Nc . Nv e . (T + (3)2 e'
na-
,
OT TeMrrepa-
v
''--...-'
1 dE
e
3aBHCHMOCTb rrpHMoro HarrpH)KeHHH .lI.HO.ll.a HarrpHMYIO CBH3aHa C TeMrrepa-
Eg •
B Ta6JI.
6.1
rrpHBe.ll.eHbI rrapaMeTpbI BapIIIim
r.ll.e qJIeH
(1)
3aBHCHMOCTbIO
rrJIOTHOCTH
[5].
COCTOHHHH.
(ni), 3TO
qJIeH
(2)-
ypaBHeHHe
OqeHb rrOJIe3HO .lI.JIH orrpe.ll.eJIeHHH K03
2004, 2005) paCqeTHble 3HaqeHHH (dVf/ dT = -1,76 MB/K) XOPOIIIQ cOrJIacYIOTcH
ilpHBe.ll.eHHble B pa60Tax (Xi et ai., 1) eM. PYCCKHH nepeBO.ll. CTaTbH BapIIIHH
(2)
dT
06YCJIOBJIeH TeMrrepaTYPHoH 3aBHCHMOCTbIO
TeMrrepaTYPHoH
(6.8)
"-v-'"
-.=
(I)
IIIHpHHbI 3arrpemeHHoH 30HbI HBJIHeTCH OCHOBHbIM <paKToPOM, orrpe.ll.eJIHIOmHM TeMrrepaTypHoe H3MeHeHHe HarrpH)KeHHH Ha .lI.HO.ll.e, TeMrrepaTypHaH
ilO.ll.CTaBJIHH ypaBHeHHH
rrOJIyqaeM
TYPbI, rrocTpoeHHaH .lI.JIH pa3Hblx rroJIyrrpOBO.ll.HHKOB. ilOCKOJIbKY H3MeHeHHe
TYPHOH 3aBHCHMOCTbIO
600 460 204 327 636 235
0,7
=
= kT . In ( ~ :
MYJIOH, qaCTO Ha3bIBaeMOH
770 620 541 4,50 4,73 4,77
I- -
Nv) eVf - E g ~ kT· In ( ND. n~NA) - k T· I n (Nc. ~
BTOPOH qJIeH B rrpaBoH qaCTH ypaBHeHHH
3,470 2340 1519 1,425 1,170 0,744
.lI.JIH GaNcBeTO.ll.HO.ll.OB
134
Fit. 6. Te~tnepamypa p-n-nepexoaa u meMnepamypa HOCUmeJleu mOKa
T a 6 JI H U a 6.1. I1apaMeTpbI BapIIlHH .QJIH HeKoTopbIX rrOJIyrrpoBo.QHHKOB (Ioffe, 2004)
6.4. HaMepeHue meMnepamypbt nepexoaa no npflMoMy HanpflJICeHUIO 10
8 I10JIyrrpOBO.QHHK
Eg rrpH 0 K, 3B
4
a 10- 3B/K (3,K
I1pe.QeJIbI rrpHMeHHMOCTH T~300K
7,7
600
T~600K
2,34
6,2
460
T
1200 K
2
GaAs
1,519
5,41
204
T~1000K
o
GaSb
0,813
3,78
94
T~300K
InN
1,994
2,45
624
T~300K
InP
1,425
4,50
327
T~800K
InAs
0,415
2,76
83
T~300K
InSb
0,24
6,0
500
T~300K
Si
1,170
4,73
636
T
Ge
0,744
4,77
235
T
6,026
18,0
GaN
3,47
GaP
~
~ ~
KpacHbrli C)l; GaAsP/GaAs
I
IT=295K~
t
t
±
±
I T=77K L
1462
AIN
'-;,
135
.
~
1 1 -. d
1 r; -2
-1
o
2
HarrpJDKemre V, B PHc.6.5. Bo.nbTaMrrepHble xapaKTepHCTHKH CBeTO.QHO.Qa GaAsP/GaAs, H3.nyqalOmero CBeT B KpacHoH 06.naCTH BH.QHMoro crreKTpa, H3MepeHHble rrpH 77 H 295 K. I1PH 77 K rroporOBoe HarrpH2KeHHe paBHo 2,0 B, a rrpH 295 K - 1,6 B
1000 K 700 K
6.4. H3MepeHHe TeMnepaTypbI nepexoAa no npBMoMY HanpsDKeHHIO
C 3KcrrepHMeHTaJIbHbIMIf .11.aHHbIMIf (-2,3 MB/K). PacxQ)K.11.eHIfSI Me)K.11.Y TeOpeTIfqeCKIfMIf If 3KcrrepIfMeHTaJIbHbIMIf pe3YJIbTaTaMIf MO)KHO 06bSlCHIfTb TeMrrepaTypHbIM K03cpqmll,IfeHTOM Y.11.eJIbHOrO corrpOTIfBJIeHIfSI HeihpaJIbHbIX 06JIaCTeH:, YMeHbII1aIOIII.IfMCSI C POCTOM TeMrrepaTypbI (Xi et ai., 2005). Ha pIfC. 6.5 rrOKa3aH C.11.BIfr BOJIbTaMrrepHOH: xapaKTepIfcTIfKIf CBeTO.11.IfO.11.a GaAsP/GaAs, BbI3BaHHbIH: If3MeHeHIfeM TeMrrepaTypbI (OT KOMHaTHOH: .11.0 77 K). BIf.11.HO, qTO rrpIf OXJIa)K.11.eHIfIf .11.IfO.11.a ero rroporoBoe HarrpSl)KeHIfe, KaK If ero rrOCJIe.11.0BaTeJIbHOe corrpOTIfBJIeHIfe, pacTeT. OqeBIf.11.HO, qTO rrpIf rrO.11.aqe Ha CBeTO.11.IfO.11. rrOCTOSlHHoro HarrpSl)KeHIfSl, HarrpIfMep 1,9 B, rrpIf TaKOM CHIf)KeHIfIf TeMrrepaTypbI rrpOIf30H:.11.eT CYIII.eCTBeHHoe If3MeHeHIfe TOKa qepe3.11.IfO.11.. YnpalKHeHHe. OnpeaeJleHUe meMnepamypHou aaBUCUMocmu npflMoeo HanpflJICeHUfl CBemOaUOaa
3KcrrepHMeHTaJIbHO orrpe.QeJIeHHble .nHHeHHble TeMrrepaTypHble K03
( dVj / dT) .Q.nH GaAs CBeTO.QHO.QOB .ne2KaT B HHTepBa.ne 1,2-1,4 MB /K. Tpe6yeTcH orrpe.Qe.nHTb .nHHeHHblH TeMrrepaTypHbIH K03
I1pH KOMHaTHOH TeMrrepaType .Q.nH GaAs-CBeTO.QHO.Qa: a = 5,41 . 10-4 3B/K, (3
= 204
K. Tor.Qa
dVj dT
=
Eha rrpOll,e.11.ypa TaK)Ke COCTOIfT If3 .11.BYX 3TarrOB: KaJIIf6pOBOqHOrO If3MepeHIfSI rrpSiMoro HarrpSl)KeHIfSI Ha .11.IfO.11.e Vf B IfMrrYJIbCHOM pe)KIfMe If If3MepeHIfSI 3Toro HarrpSl)KeHIfSI B pe)KIfMe rrOCTOSlHHoro TOKa. PIfC. 6.6 IfJIJIIOCTpIfpyeT aJIrOpIfTM .11.aHHOro MeTO.11.a. Ha 3Tarre KaJIIf6pOBOqHbIX If3MepeHIfH: IfCCJIe.11.yeMbIH: CBeTO.11.IfO.11. rrOMeIII.aeTCSI B TepMocTaT C perYJISlTOPOM, rr03TOMY TeMrrepaTypbI .11.IfO.11.a If rrepeXO.11.a Bcema If3BeCTHbl. TeMrrepaTypa B TepMOCTaTe If3MeHSleTCSI B 3a.11.aHHOM .11.Ifarra30He 3HaQeHIfH:, 06b1QHO 20-120 0C: B XO.11.e KaJIIf6pOBOQHbIX If3MepeHIfH: Ha .11.IfO.11. rrO.11.aeTCSI IfMrrYJIbCHbIH: TOK C BbICOKOH: CKBa)KHOCTbIO (rv 1000),QTO He06xo.11.IfMO .11.JISI IfCKJIIOQeHIfSI BHYTpeHHero pa30rpeBa CBeTO.11.IfO.11.a If3-3a IfH)KeKlI,IfOHHOro TOKa. fipSiMoe HarrpSl)KeHIfe If3MepSleTcSI B 3a.11.aHHOM TeMrrepaTypHoM IfHTepBaJIe .11.JISI pa3Hblx 3HaQeHIfH: TOKa. 113 KaJIIf6pOBOQHbIXIf3MepeHIfH: orrpe.11.eJISleTCSI 3aBIfCIfMOCTb Me)K.11.Y rrpSiMbIM HarrpSI)KeHIfeM If TeMrrepaTYP0H: p-n-rrepeXO.11.a B 3a.11.aHHOM IfHTepBaJIe TOKOB If 1). 3Tarr If3MepeHIfH: rrpOBO.11.IfTCSI rrpIf KOMHaTHOH: TeMrrepaType B pe)KIfMe rrOCTOSlHHoro TOKa, If3MeHSlIOIII.erOCSI B 3a.11.aHHOM IfHTepBaJIe 3HaQeHIfH:. fipSiMoe HarrpSl)KeHIfe If3MepSleTCSI B MOMeHTbI cTa6IfJIIf3all,IfIf TeMrrepaTypbl. Ha OCHOBe rrOJIYQeHHbIX If KaJIIf6pOBaHHbIX .11.aHHbIX HaXO.11.SlT 3HaQeHIfSI TeMrrepaTypbI p-n-rrepeXO.11.a .11.JISI pa3HbIX 3HaQeHIfH: TOKa. Ha pIfC. 6.7 rrpe.11.CTaBJIeHbI pe3YJIbTaTbi .11.ByX 3TarrOB If3MepeHIfH: .11.JISI Yc{:l-cBeTO.11.IfO.11.a AIGaN (Xi et ai., 2005).
-1,09 MB/K. OTclO.Qa HaXO.QHM, qTO rrpH YBe.nHqeHHH
TeMrrepaTypbI Ha 20°C HarrpH2KeHHe Ha .QHO.Qe YMeHbIIlHTcH Ha Do Vj
= 21,9 MB.
1) CM. TaK2Ke pa60TY [6].
D/,. 6. TeMnepamypa p-n-nepexoaa u meMnepamypa Hocumelleu mOlca
136
6.5. CxeMbt numaHUR u ynpa81leHUR c8emOaUOaaMu
a
8,0
C)
I I
Y--r--t-L
·-t-k-
--1_l I
6 HCTO'lHHK
BOJThTMeTp IIoCTOHHHOro
I
ISO ~ YIP c,n; AIGaN I A.peak = 295 HM T 20°C
I
Y-
40MA
--
30MA
~HLIii TOK co CKB8JKHOCThIO
60
-'
100
IIOMA
80
....---.-
!----+--
-I_,~MA
~ 40
°
If=50MA
137
100
1
~
120
10
20
30
40
50
IIoCTOJIHlIIdii: npJIMOH TOK If'
PHC. 6.6. ::hanbl KaJIH6pOBKH B HMnYJIbCHOM pe)fmMe, B xo.n.e KOToporo onpe.n.eJIHeTCH 3aBHCHMOCTb npHMoro HanpH:lKeHHH Ha .n.Ho.n.e Vi OT TeMnepaTypbI p-n-nepexo.n.a Tj (a) H H3MepeHHH, B xo.n.e KOToporo onpe.n.eJIHIOTCH TeMnepaTypbl p-n-nepexo.n.a .n.JIH pa3Hblx 3HaqeHHH nOCTOHHHoro TOKa (6) Ha pHC.
6.8
CBeqeHHH InGaN
(,X
= 525
H y
5
PHC. 6.7. 3aBHcHMoCTb npHMoro HanpH:lKeHHH OT TeMnepaTypbI B TepMocTaTe, nOJIyqeHHaH .n.JIH CBeTo.n.Ho.n.a Y
270
IIOKa3aHbI TeMrrepaTypbI p-n-rrepeXO)l.OB )l.JIH HeCKOJIbKHX
nmOB CBeTO)l.HO)l.OB: KpaCHoro CBeqeHHH AlInGaP
(,X = 625
HM), rOJIy60ro CBeqeHHH InGaN
(,X =370
MM (Chhajed et aI.,
HM), 3eJIeHOrO
(,X
= 460
210
HM)
HM). Bce CBeTO)l.HO)l.bI HMelOT O)l.HHaKOBble
C) o
2005).
E--,-
I1orpernHocTb MeTO)l.a orrpe)l.eJIe-
HHH TeMrrepaTypbI p-n-rrepeXO)l.a rro IIPHMOMY HarrpmKeHHIO COCTaBJIHeT
g~
150
p-n-rrepeXO)l.a rro )l.JIHHe BOJIHbI MaKCHMYMa B crreKTpe H3JIyqeHHH, rrOCKOJIb-
=
HaHTH KoppeKTHO )l.JIH yrnHpeHHblX crreKTpaJIbHbIX JIHHHH. Ha pHC.
6.8
&
J
~
TOqHOCn,
300 100
o
++15°e ~
I
v
CxeMbI nHTaHHB H ynpaBJIeHHB CBeTO)l;HO)l;aMH
I1PH pa3pa60TKe cxeM rrHTaHHH H yrrpaBJIeHHH CBeTO)l.HO)l.aMH, pa60TaIOIII.HMH B CTalI.HOHapHbIX YCJIOBHHX, Tpe6yeTcH yqHTbIBaTb TaKHe cpaKTopbI, KaK CJIO)KHOCTb H CTOHMOCTb yrrpaBJIHIOIII.eH cxeMbI, ee K. rr.)l., a TaK)Ke B03MO)KHOCTb KOMrreHCalI.HH TeMrrepaTypHoH 3aBHCHMOCTH HHTeHCHBHOCTH H3JIyqeHHH CBeTO)l.HO)l.OB.
TO'IHOcTh
250 150 50
~
-
KpaCHbrH
..n.
60
80 100 /, MA
T~20 ·c
C}:( AllnGaP
Y
40
~
7
~
1..
To I . __ carner
V r::;:1:Y"'
80
I
~
..b--iI::::1
TO'IHOCTh
IY
I
40
Tearyier-
j: 160 +±3°e 120
~
.........
~
+±soe
Tearrier- -
T-20 °C 20
eHHHH c,n; InGaN
H 350 ++ 3°e
200
~
IIOCTOJlHHbIH TOK
6.5.
vzr y.o-
TO'IHOCTh
~
3eneHhlii:
450
++lsoe
+± 3°e T=20°C +±lOoe
~ 500 :ll
TeMrrepaTypbI I).
I .....-:::: ~ ~
C,n; InGaN
900
~
crreKTpaJIbHbIX xapaKTepHCTHK B 06JIaCTH BblCOKHX 9HeprHH. Ha TOqHOCTb MHorOKOMrrOHeHTHblX TBep)l.bIX paCTBopOB, KOTopoe HeCKOJIbKO YMeHbrnaeT
p-
-o-Vr
j: ~ 700 4-± 3°e
~
TaK)Ke rrpHBe)l.eHbI TeMrrepaTypbl HOCHTeJIeH, rrOJIyqeHHble rro HaKJIOHaM
HaKJIOH xapaKTepHCTHK H rrpHBO)l.HT K 3aBblrneHHIO rrOJIyqaeMbIX 3HaqeHHH
-o-Apeak
I::
~
orrpe)l.eJIeHHH TeMrrepaTYP HOCHTeJIeH TaK)Ke BJIHHei' yrnHpeHHe crreKTpOB
HaKJIOH
If -Tearrier ),K' ...1 90
~ 30
KY rrOCJIe)l.HeMY MeTO)l.Y CBOHCTBeHHa HeKOTopaH HeOrrpe)l.eJIeHHOCTb rrpH
YIP C}:( InGaN ~BbICOK03Hep~rH~ -
I
HeCKOJIbKO rpa)l.YCOB. 3TOT MeTO)l. TOqHee, qeM H3MepeHHe TeMrrepaTypbI
orrpe)l.eJIeHHH )l.JIHHbI BOJIHbI B MaKCHMYMe, rrOJIO)KeHHeKOToporo TPY)l.HO
60
MA
....-J ~
~~
IP' 0 20
40
T=20 ·c 60
80 100 MA
IIOCTOJlHHbrH TOK /,
PHC. 6.8. 3aBHcHMoCTb TeMnepaTypbI p-n-nepexo.n.a H TeMnepaTypbI HOCHTeJIeH B CBeTo.n.Ho.n.ax OT nOCTOHHHoro TOKa. 113MepeHHble TeMnepaTypbI HOCHTeJIeH HeCKOJIbKO 3aBbIllIeHbI OTHOCHTeJIbHO peaJIbHblX 3HaqeHHH, 'ITO CBH3aHO C yllIHpeHHeM crreKTpOB MHorOKOMnOHeHTHblx TBep.n.b1X paCTBopOB BCJIe.n.CTBHe qlJIYKTyaUHH COCTaBa CaMOH rrpOCTOH cxeMOH yrrpaBJIeHHH CBeTO)l.HOAaMH HBJIHeTCH UClnO~ HU1\, nOClnORHHOZO HanpR:HCeHUR: 6aTapeH HJIH TpaHccpopMaTOp C BbIIIpHMH-
TeJIeM Ha BbIXO)l.e. Bce cxeMbI IIHTaHHH CBeTO)l.HO)l.OB rrOCTOHHHbIM HarrpH)KeHHeM 06JIa)l.a1OT )l.ByMH He)l.OCTaTKaMH. Bo-nep8btX, 3aBHCHMOCTb TOKa,
1) CM.TaK:lKe pa60TY
[4].
rrpOTeKalOIII.erO qepe3 )l.HO)l., OT HarrpH)KeHHH HOCHT 9KCrrOHeHlI.HaJIbHbIH
138
D/,. 6.
TeMnepamypa p-n-nepexoaa U meMnepamypa .1WCumeJleu mOica
6.5. Bu6J1uoepal/JUttecKuu cnUCOK
139
xapaKTep. TI03TOMY He3HaqHTeJIbHbIe H3MeHeHHH yrrpaBJIHIOlll.erO HarrpH-
TeMrrepaTypHaH 3aBHCHMOCTb HHTeHCHBHOCTH H3JIYQeHHH CBeTO,lJ.HO,lJ.OB
BO-8mopblx, rroporoBoe
oco6eHHo CKa3bIBaeTCH B Tex CJIYQaHX, KOr,lJ.a CBeTO,lJ.HO,lJ.bI 3KCrrJIyaTHpy-
HarrpH)KeHHe ,lJ.HO,lJ.a 3aBHCHT OT TeMrrepaTypbI. TI03TOMY JII06ble H3MeHeHHH
IOTCH BHe rrOMelll.eHHH. HarrpHMep, B )KapKHe JIeTHHe ,lJ.HH TeMrrepaTypa H
)KeHHH rrpHBO,lJ.HT K cepbe3HbIM H3MeHeHHHM TOKa.
TeMrrepaTypbI BbI3bIBalOT CHJIbHble H3MeHeHHH TOKa. Ha pHC.
6.9
OCBelll.eHHe ,lJ.OBOJIbHO BbICOKH, a B YCJIOBHHX rroBbIllIeHHoH BHellIHeH OCBe-
rrOKa3aHbI BOJIbTaMrrepHble xapaKTepHCTHKH CBeTO,lJ.HO,lJ.OB,
lll.eHHOCTH CBeTO,lJ.HO,lJ.bI ,lJ.OJI)KHbI CBeTHTbCH HpQe. O,lJ.HaKO HHTeHCHBHOCTb
pa60TaIOlll.HX OT HCTOqHHKa rrOCTOHHHoro HarrpH)KeHHH. BH,lJ.HO, qTO rrOCJIe-
H3JIYQeHHH CBeTO,lJ.HO,lJ.OB C POCTOM TeMrrepaTypbI, Hao6opoT, CHH)KaeTCH .
,lJ.OBaTeJIbHOe BKJIlOqeHHe ,lJ.HO,lJ.a C pe3HcTopOM CHH)KaeT TeMrrepaTypHYIO
.lI.JIH KOMrreHcaU:HH CHH)KeHHH HHTeHCHBHOCTH H3JIYQeHHH, a TaK)Ke ,lJ.JIH
qYBCTBHTeJIbHOCTb TOKa, rrpOTeKalOlll.erO qepe3 ,lJ.HO,lJ.. TIPH TaKOM crroco-
ee HeKoToporo YBeJIHQeHHH rrpH rrOBbIllIeHHH TeMrrepaTypbI Heo6xo,lJ.HMO
6e BKJIlOqeHHH CBeTO,lJ.HO,lJ.a TeMrrepaTypHbIH K03
YBeJIHQHBaTb yrrpaBJIHIOlll.HH TOK.
qepe3 Hero TOKa, orrpe,lJ.eJIHeTCH BeJIHqHHOH rrOCJIe,lJ.OBaTeJIbHOrO corrpOTHBJIeHHH H TeMrrepaTypHbIMH xapaKTepHCTHKaMH caMoro ,lJ.HO,lJ.a.
CxeMa yrrpaBJIeHHH CBeTO,lJ.HO,lJ.OM rro rrocToHHHOMY TOKY MO)KeT COCTOHTb H3 TpaH3HcTopHoro KaCKa,lJ.a, HarpY3KoH ,lJ.JIH KOToporo HBJIHeTCH caM ,lJ.HO,lJ.. TaKaH cxeMa rr03BO~HeT perYJIHpOBaTb HHTeHCHBHOCTb H3JIYQeHMH CBeTO,lJ.HO,lJ.a, He MeHHH ero rroporOBoro HarrpH)KeHHH H TeMrrepaTypbI. O,lJ.HaKO B cxeMe He rrpOHCXO,lJ.HT KOMrreHcaU:HH CHH)KeHHH HHTeHCHBHOCTH H3JIYQeHHH CBeTO,lJ.HO,lJ.a C POCTOM TeMrrepaTypbI.
YnpalKHeHHe. KOMneHca~uJ/. meMnepamypHOU 3a8UCUMocmu UHmeHCU8Hocmu u3J1ytteHUJ/. C8emOaUOa08 npu nOMO~U ynpa8J1J/./O~eU cxeMbl
PaCCMOTpHM CBeTOnHOn, y KOToporo xapaKTepHCTHqeCKaH TeMnepaTypa 1'1 == 100 K, rroporOBoe HanpH)KeHHe npH TeMnepaType 20°C paBHo 1,4 B, TeMnepaTYPHblH K03cpcpHU;HeHT noporoBoro HanpH)KeHHH COCTaBJIHeT -2,1 MBjK, a nHcpcpepeHU;HaJIbHOe conpOTHBJIeHHe, onpeneJIeHHOe Ha JIHHeHHOM yqaCTKe BOJIbTaMnepHoH xapaKTepHcTHKH npH npllMblX Hanpll)KeilHlIX 60Jrbilie noporOBoro HanpH)KeHHlI, paBHO 5 OM. fiyneM CqHTaTb, qTO TeMnepaTypHaH 3aBHCHMOCTb HHTeHCHBHOCTH H3JIyqeHHH CBeTOnHOna 3anaeTCH BbIpa)KeHHeM
==
I
PHc.6.9. CxeMa IIHTaHHH CBeTOnHOnOB C nOCJIenOBaTeJIbHbIM conpOTHBJIeHHeM Rs. Pa60qHMH CqHTalOTCH TOqKH nepeCeqeHHH HarpY30qHbIX JIHHHH C BOJIbTaMnepHbIMH xapaKTepHCTHKaMH. HaJIHqHe B cxeMe He60JIbIIIHX conpOTHBJIeHHH Rs npHBOnHT K pOCTy TOKa qepe3 nHOn npH nOBblIIIeHHH TeMnepaTypbl, qTO n03BOJIHeT KOMneHCHpOBaTb CHH)KeHHe HHTeHCHBHOCTH H3JIyqeHHH I1HTeHcHBHOCTb H3JIyqeHHH CBeTO,lJ.HO,lJ.OB H3~3a 6e3bI3JIyqaTeJIbHOH peKOM6HHaU:HH C POCTOM TeMrrepaTypbI CHH)KaeTCH. TIPH YBeJIHqeHHH TeMrrepaTypbI CHH)KaeTCH H SeJIHqHHa rroporoBoro HarrpH)KeHHH . .lI.JIH YMeHbllIeHHH TeMrrepaTypHoH 3aBHCHMOCTH HHTeHCHBHOCTH H3JIyqeHHH CBeTO,lJ.HO,lJ.OB rrpHMeHHIOT HCTOqHHKH rrOCTOHHHoro HarrpH)KeHHH C rrOCJIe,lJ.OBaTeJIbHO BKJIlOqeHHbIMH pe3HcTopaMH. KaKBH,lJ.HO H3 pHC.
6.9,
B TaKHX cxeMax
== 11300 K
. exp [- (1' - 300 K) j1'J].
Tpe6yeTcH pa3pa6oTaTb cxeMY ynpaBJIeHHH, COCTOHmylO H3 HCTOqHHKa nOCTOHHHoro HanpH)KeHHH H pe3HCTopa, KOMneHCHpYlOmylO TeMnepaTypHYIO qYBCTBHTeJIbHOCTb HHTeHCHBHOCTH H3JIyqeHHH CBeTOnHOna TaK, qTo6b1 HHTeHCHBHOCTb H3JIyqeHHH 6b1JIa OnHHaKoBoH H B TOqKe 3aMep3aHHH BOnbl (0 0c) H npH 60°C. I1PH TeMnepaType 3aMep3aHHH BOnbl TOK qepe3 nHOn nOJI)KeH 6b1Tb 20 MA. PemeHHe
.ll.JIlI nOnnep)KaHHH He3aBHCHMOCTH HHTeHCHBHOCTH H3JIyqeHHH OT TeMnepaTypbl TOK qepe3 nHon npH TeMnepaType 60°C nOJI)KeH 6bITb 36;4 MA. Ha rpacpHKax BOJIbTaMnepHblx xapaKTepHcTHK CBeTOnHOna HaHneM COOTBeTCTBYlOmHe 3HaqeHHH TeMnepaTypbl 0 °C H 60°C, npoBeneM HarpY30QHYlO JIHHHIO Qepe3 TOQKH 0 °C, 20 MA H 60°C, 36,4 MA H onpeneJIHM CJIenYlOmHe napaMeTpbl cxeMbl ynpaBJIeHHH: HCTOQHHK nOCTOHHHoro HanpH)KeHHH nOJI)KeH BblnaBaTb HanpH)KeHHe V == 1,6 B, a nOCJIenOBaTeJIbHOe conpOTHBJIeHHe nOJI)KHO 6blTb 2,7 OM.
rrpH YBeJIHqeHHH TeMrrepaTypbI TOK, rrpOTeKalOlll.HH qepe3 ,lJ.HO,lJ., paCTeT, T.e. rrpOHCXO,lJ.HT KOMrreHcaU:HH CHH)KeHHH HHTeHCHBHOCTH H3JIyqeHHH, BbI3BaHHoro POCTOM TeMrrepaTypbI. Ho 3,lJ.eCb CJIe,lJ.yeT OTMeTHTb, qTO rrpH HCrrOJIb30BaHHH rrOCJIe,lJ.OBaTeJIbHOrO corrpOTHBJIeHHH YMeHbllIaeTCH
3
THBHOCTb ,rrpeo6pa30BaHHH 3JIeKTpHqeCKOH 3HeprHH B CBeTOBYIO, rrOCKOJIbKY qaCTb 3JIeKTpHqeCKOH MOlll.HOCTH TepHeTCH Ha pe3HcTope.
BH6JIHOrpa
140
6.5. Eu6Au02pacpu'£eclwu cnUCOK
FA. 6. TeMnepamypa p-n-nepexoaa u meMnepamypa liOcumeAeu mOlw
Chhajed S., Xi· Y., Li Y.-L., Gessmann Th., and Schubert E. F. "Influence of junction temperature on chromaticity and color rendering properties of trichromatic white light sources based on light emitting diodes"l. Appl. Phys. 97, 054506 (2005). Epperlein P. W. "Reflectance modulation t a novel approach to laser mirror characterization" inProceedings of 17th International Symposium of Gallium Arsenide and Related Compounds, lOP Conference Series, lOP, London, 112, 633 (1990). Epperlein P. W. and Bona G. L. "Influence of the vertical structure on the mirror facet temperatures of visible GaInp quantum well lasers"Appl. Phys. Lett. 62,3074 (1993). Gessmann Th., Schubert E. F., Graff J. W., Streubel K., and Karnutsch C. "Omnidirectionally reflective contacts for light-emitting diodes" IEEE Electr. Dev. Lett. 24, 683 (2003). Gu Y. and Narendran N. "A non-contact method for determining junction temperature of phosphor-converted white LEDs" Third International Conference on Solid State Lighting, Proceedings of SPIE, San Diego, Calif., 2003 (to be published) see also J. Taylor "Non-intrusive techniques help to predict the lifetime of LED lighting systems" Compound Semiconductors October (2003). Ioffe Physico-Technical Institute (Saint Petersburg, Russia) "Physical properties of semiconductors" www.ioffe.ru/SVA/NSM/Semicond (2004). Hall D. C., Goldberg L., and Mehuys D. "Technique for lateral temperafure profiling in optoelectronic devices using a photoluminescence microprobe" Appl. Phys. Lett. 61, 384 (1992). Millman J. and Halkias C. Integrated Electronics: Analog and Digital Circuits and Systems (McGraw-Hill, New York, 1972). Murata S. and Nakada H. "Adding a heat bypass improves the thermal characteristics of a 50 p,m spaced 8-beam laser diode array" l. Appl. Phys. 72, 2514 (1992). Rommel J. M., Gavrilovic P. and Dabkowski F. P. "Photoluminescence measurement of the facet temperature of 1 W gain-guided AlGaAs/GaAs laser diodes" l. Appl. Phys. 80, 6547 (1996). Schubert E. F., Gobel E.O., Horikoshi Y., Ploog K., and Queisser H. J. "Alloy broadening in photoluminescence spectra of AlGaAs" Phys. Rev. B30, 813 (1984). Todoroki S., Sawai M., and Aiki K. "Temperature distribution along the striped active region in high-power GaAlAs visible lasers" l. Appl. Phys. 58, 1124 (1985). Varshni Y. P. "Temperature dependence of the energy gap in semiconductors" Physica 34, 149 (1967). Xi Y. and Schubert E. F. "Junction-temp~rature measurement in GaN ultraviolet light-emitting diodes using diode forward-voltage method" Appl. Phys. Lett. 85, 2163 (2004). Xi Y., Xi J.-Q., Gessmann T., Shah J. M., Kim J. K., Schubert E. F., Fjsch"er A. J., Crawford M. H., Bogart K. H. A., and Allerman A. A. "Junction
141
temperature measurements in deep-UV light-emitting diodes"Appl. Phys. Lett. 86, 031907 (2005).
i
1.
2.
3.
4.
5. 6.
,lI;onOJIHeHHe pe)J;aKTopa JIIOMHHecueHTHhIe H 3JIeKTpHtJecKHe cBoikTBa CBeTOAHOAOB InGaN/AlGaN/ GaN c MH01KeCTBeHHbIMH KBaHTOBhIMH HMaMH / B. E. KYAPHIIIOB, A. H. TYPKHH, A.3. IOHOBHtJ, A. H. KOBa.iIeB, C1>.I1. MaHHxHH /1 C1>TIT. 1999. T. 33,· N24. C. 445.,..450. CneKTphI H KBaHTOBbIH H3JIytJeHHH CBeTOAHOAOB Ha OCHOBe reTepocTpYKTYP InGaN/ AlGaN/GaN c MH01KeCTBeHHhIMH KBaHTOBbIMH HMaMH - 3aBHCHMOCTb OT TOKa H HanpH1KeHHH / B. E. KYAPHIIIOB, C. C. MaMaKHH, A. H. TYPKHH, A.3. IOHQBHtJ, A. H. KOBaJIeB, C1>.I1. MaHjJxHH / / C1>TIT. 2001. T.35, N27. C. 861-868. 3JIeKTpHtJecKHe CBOHCTBa H cneKTpbI JIIOMHHeCueHUHH CBeTOAHOAOB Ha· OCHOBe reTeponepeXOAOB InGaN/GaN c MOAYJIHpOBaHHO-JIerHpOBaHHhIMH KBaHTOBhIMH HMa.MH / C. C. MaMaKHH, A. 3. "IOHOBHtJ, A. o. BaTTaHa, C1>.I1. MaHHxHH / / C1>TIT. 2003. T.37. BhIn.9. C.1131-1137. CneKTphI H3JIytJeHHH CBeTOAHOAOB Ha oCRoBe reTepocTpYKTYP c KBaHTOBbIMH HMaMH THna InGaN/AlGaN/GaN: aHaJIH3 Ha OCHOBe MOAeJiH ABYMepHoH KOM6HHHpoBaHHoH nJIOTHOCTH COCTOHHHH c "ytJeToM q)JIYKTyaUHH nOTeHUHaJia / M. JI. oaArYTAHHoB, A.3. IOHOBHtJ / / C1>TIT. 2008. T.42, N24. C. 438-446. BaplIIHH 11. IT. Co6cTBeHHaH H3JIytJaTeJIbHaH peKoM6HHaUHH B nOJIynpoBoAHHKax / / 113JIytJaTeJIbHaH peKoM6HHaUHH B nOJIynpoBoAHHKax. - M.: HaYKa, 1972.-C.9-124. TenJIOBhIe CBOHCTBa MOII.J.HbIX AlinGaN H AlGalnP AHCKpeTHbIX CBeTOAHOAOB H MaTpHU / B. C. A6paMoB, B. IT. CYIliKOB, A. H. TYPKHH, A. B. lliHIIIOB, H. B. lUep6aKoB / / III BcepoccHHcKaH KOH
143
7.1. }1.Boilftbte eemepocmpyKmYPbt --cnOH paCTeKaHHJI TOKa
r JIaBa
} BepXHHH 6apbepHLIii cnOH --aKI'HBHIUI 06naCTb
7
}
CBETO,LlHO,LlbI C BbICOKHM BHYTPEHHHM KBAHTOBbIM BhIXO,LlOM H3JIYQEHHB
.l{BOHHIUI { reTepoCTpYKTYPa
~ 6apbepHhlH cnOH
} nO.l{HOJl(l(a --KOHTaKT
,n:JIH rrOJIY'IeHHH BbICOKHX 3Ha'IeHHH BHYTpeHHero KBaHTOBoro BblXO.ll:a H3JIY'IeHHH Ha.ll:O JIH60 rrOBbIIIIaTb BepOHTHOCTb H3JIY'IaTeJIbHOH peKoM6H-
PHC.
HaU:HH, JIH60 CHH2KaTb BepOHTHOCTb 6e3bI3JIY'IaTeJIbHOH peKoM6HHaU:HH.
aKTHBHOH 06JIaCTbIO B BH.n;e KBaHTOBOH HMbI H .n;BYX OrpaHHQHBaIOrn;HX 6apbepHblx
7.1.
,n:aJIee 6Y.ll:YT paCCMOTpeHbI o6a rr0.ll:X0.ll:a K 3TOH rrp06JIeMe.
CxeMa .n;BOHHOH reTepOCTpYKTypbI C 06beMHOH aKTHBHOH 06JIaCTbIO HJIH
__ .___··········Ec ..........
CJIOeB
a
7.1. ,LlBoHHbIe reTepocTpYKTypbI
.
HeHHHCKOPOCTH 6HMOJIeKYJIHpHOH peKOM6HHaU:HH, CJIe.ll:yeT, 'ITO KaK rrpH HH3KOM, TaK H rrpH BbICOKOM ypOBHe B036Y2K.ll:eHHH CKOPOCTb H3JIY'IaTeJIbHOH peKOM6HHaU:HH YBeJIH'IHBaeTCH C POCTOM KOHu:eHTpaU:HH CBo60.ll:HbIX
I
~
Tn h..
113 BbIpa2KeHHH .ll:JIH BpeMeHH 2KH3HH HOCHTeJIeH, BbIBe.ll:eHHOrO H3 ypaB-
6
I~Ln~1
I --
: I
~
-+._._._._._._._.- --EF I
Tp
-.-.-.- -·-·-·-·-·-t-·: 00000000000 :-L ---!
~
------nrm~--...,
p
222222222 Ev 1iHiiIii.._ _...........
HOCHTeJIeH. n03TOMY .ll:JIH rrOBbIIIIeHHH BHYTpeHHero KBaHTOBoro BbIXO.ll:a
7.2.
H3JIY'IaTeJIbHOH peKOM6HHaU:HH B aKTHBHOH 06JIaCTH Tpe6yeTcH rrO.ll:.ll:ep2KH-
PHC.
BaTb BbICOKYIO KOHu:eHTpaU:HIO HOCHTeJIeH. 3TO rr03BOJIHIOT C.ll:eJIaTb .ll:BOH-
porrepexo.n;e
rrOKa3aHa cxeMa .ll:BOHHOH reTepOCTpYKTypbl. illHpHHa
3arrpemeHHoH 30HbI 6apbepHbIx CJIOeB BCer.ll:a 3Ha'IHTeJIbHO 60JIbilie IIIHpHHbI 3arrpemeHHoH 30HbI aKTHBHoro CJIOH;
!:l.Eg -
pa3HocTb IIIHpHH 3arrpe-
meHHoH 30HbI aKTHBHoro H 6apbepHoro CJIOeB, orrpe.ll:eJIHeMaH pa3pblBaMH 30H rrpOBO.ll:HMOCTH H BaJIeHTHOH:
Eg,emitter - Eg,base
B YCJIOBHHX rrpHMoro CMern;eHHH.
B rOMoreHHOM
(a)
H reTe-
rrepexo.n;e HOCHTeJIH
B
reTe-
porrepexo.n;e HOCHTeJIH peKoM6HHHPYIOT B 06JIaCT~ KBaHTOBOH HMbI
,n:BOHHaH reTepOCTpYKTypa COCTOHT H3 aKTHBHoro Cpe.ll:HerO CJIOH06JIaCTH peKOM6HHaU:HH, OrpaHH'IeHHOH .ll:ByMH 6apbepHbIMH CJIOHMH (3MHT-
7.1
(6)
peKoM6HHHPYIOT Ha paCCTOHHHH .n;H
HbIe reTepOCTpYKTypbI (,n:rc, DH).
TepaMH). Ha pHC.
Pacrrpe.n;eJIeHHe cBo6o.n;HbIX HOCHTeJIeH B rOMoreHHOM rrepexo.n;e
M02KHO H36e2KaTb, rrpHMeHHB .ll:BOHHYIO reTepocTpyKTypy. Ha pHC.
7.2,6
rrOKa3aHbI HOCHTeJIH, CKorrHBiliHeCH B aKTHBHOH 06JIaCTH reTepocTpYKTYPbl. OHH
He CMorYT rrOKHHYTb
KBaHTOBYIO HMY .ll:O Tex rrop,
rrOTeHU:HaJIbHOro6apbepa 6Y.ll:eT 3Ha'IHTeJIbHO 60JIbilie
rrOKa
kT. B
BbICOTa
HaCTOHmee
BpeMH rrpaKTH'IeCKH Bce MOmHbIe 3CPCPeKTHBHbIe CBeTO.ll:HO.ll:bI BbIIIOJIHHIOTCH Ha OCHose .ll:BOHHbIX reTepOCTpYKTYp.
= !:l.Eg = !:l.Ec + !:l.Ev .
(7.1)
,n:BOHHbIe reTepOCTpYKTypbI C03.ll:aIOTCH Ha OCHOBe TpeXMepHOH aKTHBHOH 06JIaCTH HJIH aKTHBHOH 06JIaCTH B BH.ll:e KBaHTOBblX HM. nOCJIe.ll:HHH
,n:JIH rrpe.ll:OTBpameHHH paCTeKaHHH HOCHTeJIeH H3 aKTHBHOH 06JIaCTH B Ha-
!:l.Ev H !:l.Ec .ll:OJI2KHbI 6bITb HaMHoro 60JIbilie BeJIH'IHHbI kT. Ha pHC. 7.2 CXeMaTH'IHO rrOKa3aHO BJIHHHHe .ll:BOHHOH reTepOCTYKTypbI KOHu:eHTpaU:HIO HOCHTeJIeH. B CJIY'Iae rrO.ll:a'IH rrpHMoro HarrpH2KeHHH
pY2KHbIe CJIOH Ha
Ha rOMoreHHbIH Ha pHC.
7.2, a
p-n-rrepeXO.ll:
HOCHTeJIH .ll:HCPCPYH.ll:HPYIOT B COCe.ll:HHe CJIOH.
06eCrre'IHBaeT YBeJIH'IeHHe KOHu:eHTpaU:HH HOCHTeJIeH B TOHKOM CJIoe, 'ITO rrpHBO.ll:HT K POCTY BHYTpeHHero KBaHTOBoro BbIXO.ll:a H3JIY'IeHHH.
C .ll:PyroH
CTOPOHbI, B TaKHX CTpYKTypax rrOTeHU:HaJIbHbIe 6apbepbI Me2K.ll:Y KBaHTOBbIMH HMaMH C03.ll:aIOT corrpOTHBJIeHHe rrOTOKY HOCHTeJIeH OT HMbI K HMe. n03TOMY B aKTHBHOH 06JIaCTH B BH.ll:e MH02KeCTBeHHbIX KBaHTOBbIX HM 6a-
rrpe.ll:CTaBJIeHbI .ll:HCPCPY3HoHHbIe .ll:JIHHbI 3JIeKTpOHoB H .ll:bIPOK,
pbepbI .ll:OJI2KHbI 6bITb .ll:OCTaTO'IHO rrp03pa'IHbIMH .ll:JIH HOCHTeJIeH (HH3KHMH
Ha rrpOTH2KeHHH KOTOPbIX peKoM6HHHPYIOT HeOCHOBHbIe HOCHTeJIH. ,n:HCPCPY-
H/HJIH TOHKHMH), .ll:OrrYCKalOmHMH HX CBo6o.ll:HOe (TYHHeJIbHoe) rrepeMe-
3HOHHbIe .ll:JIHHbI HOCHTeJIeH B rroJIyrrpOBO.ll:HHKaX THrra
10
AIIIBv
.ll:OCTHraIOT
MKM H MoryT 6bITb .ll:a2Ke 60JIbilie.
meHHe Me2K.ll:Y HMaMH, 'ITO Heo6xo.ll:HMO .ll:JIH 06eCne'IeHHH paBHOMepHoro pacrrpe.ll:eJIeHHH HOCHTeJIeH B rrpe.ll:eJIax aKTHBHOH 06JIaCTH.
PacTeKaHHH HOCHTeJIeH B IIIHPOKOH 06JIaCTH H, COOTBeTCTBeHHO, HX
TOJImHHa aKTHBHOH 06JIaCTH B CBeT0.ll:H0.ll:aX Ha OCHOBe .ll:BOHHbIX reTe-
HH3KOH KOHu:eHTpaU:HH (oco6eHHo Ha paCCTOHHHH .ll:HCPCPY3HOHHOH .ll:JIHHbI)
POCTPYKTYP OKa3bIBaeT CHJIbHOe BJIHHHHe Ha BeJIH'IHHY BHYTpeHHero KBaH-
Tit.
144
7.
7.2.
C8emOaUoabt C 8btCOKUM 8HympeHHUM K8aHm08btM 8blXOaOM
TOBoro BbIXO.D.a R3JIyqeHIHI. TOJIlURHa TpexMepHoH aKTRBHOH
O~JIaCTR,
.llRCPCPY3RSI HOCRTeJIeH B COCe.D.HRe C aKTRBHoH 06JIaCTbIO CJIOR npRBe.D.eT
KaK
K CHR)KeHHIO KBaHTOBoro BbIX0.D.a. n03TOMY aKTRBHYIO 06JIaCTb CBeTO.D.R-
npaBRJIO, paBHa HeCKOJIbKRM .D.eCSlTbIM MRKpOMeTpB, a aKTRBHOR 06JIaCTR B BR.D.e KBaHTOBbIX SlM- HeCKOJIbKO MeHbIIIe. Ha pRC.
7.3
nOKa3aHa
3aBRcR~
O.D.OB C .D.BOHHbIMH reTepocTpYKTypaMH Ha OCHOBe apCeHR.D.OB H CPOCCPR.D.OB
III
MOCTb KBaHTOBoro BbIXO.D.a R3JIyqeHRSI CBeTO.D.RO.D.a OT TOJIIII.RHbI aKTRBHOR 06JIaCTR (Sugawara et 'al.,
1992).
0,8
~ !:)
I
'iB" IS:
0,4
IS:
I
I
'":a
0,2
I
\
npHMeceH B 6apbepHblX CJIOSIX. TRnHqHble3HaqeHRSI KOHueHTpaURH JIerHPYIOIII.HX npHMeceH B aKTRBHOH 06JIaCTH CBeTO.D.HO.D.OB npaBRJIO, JIe)KaT B .D.Rana30He 10 16 _10 17 CM- 3 .
cM-
rHqHOM CJIyqae, aKTHBHaSl 06JIaCTb JIerHpyeTcSI npRMeCSlMH p-TRna ropa3.D.O qaIII.e, qeM ~PrmteCSlMH n-TRna. (CJIe.D.yeT OTMeTHTb, 'ITO B nOJIynpOBO.D.HHKax THna A
l
npRMeCSlMR p-THna Y.D.aeTCSI nOJIyqHTb 60JIee paBHOMepHoe pacnpe.D.eJIeHHe
01 I
Ha pRC.
O~/~'~~~"~:-L____-L____-L--~~----~----~~~ o 0,2 0,4 0,6 MKM
56.5
HM
"ITO onTHMaJlbHoe· 3HaqeHHe TOJllll.HHbl aKTHBHOH 06J1aCTH JleJKHT
0,15-0,75
MKM (Sugawara et aI.,
'
(Sugawara et
al.,
1992)
1992)
BRTCSI CJIRIIIKOM 60JIbIIIOH, HanpRMep 60JIbIIIe .D.RCPCPY3ROHHOH .D.JIRHbI HOCRTeJIeH, npeRMYIII.eCTBa .D.BOHHOH reTepocTpYKTypbl TepSlIOTcSI ij HOCRTeJIR pacnpe.D.eJISlIOTCSI TaK )Ke, KaK B rOMoreHHbIX nepexo.D.ax. O.D.HaKO, eCJIR aKTRBHaSl 06JIaCTb CTaHOBRTCSI CJIRIIIKOM TOHKOH, npR BblCOKRX ypOBHSlX RH)KeKUROHHorOTOKa MO)KeT npOR30HTR HaCbIUI,eHRe HOCRTeJISlMR.
B aKTHBHOH 06JIaCTH. BR.D.HO, 'ITO BblCOKHH KBaHTOBbIH BbIXO.D. .D.OCTHraeTCSI 16 3 npH KOHueHTpaURSlX JIempYIOIII.HX npRMeceH MeHbIIIe 1· 10 CM- .D.JISI 3 aKTRBHOH 06JIaCTR n-TRna H MeHbIIIe 1 . 10 17 CM- .D.JISI aKTHBHOH 06JIaCTR p-THna. 113 pRC.
7.4
TaK)Ke BH.D.HO, 'ITO rrpe.D.nOqTHTeJIbHee npOBO.D.RTb CJIa-
n-THna. I1MeHHo n03TOMY aKTHBHYIO 06JIaCTb CBeTO.D.RO.D.OB H JIa3epOB qaIII.e Bcero JIeni:pYIOT aKuenT0pHbIMH npRMeCSlMH.
III.He 60JIbIIIeH no cpaBHeHHIO C .D.b1pKaMR .D.HCPCPY3ROHHOH .D.JIHHOH, aKTRBHee JIerRpoBaHRe aKTRBHOH 06JIaCTR CBeTO.D.RO.D.a MO)KeT HMeTb KaK npeTaK H
He.D.OCTaTKH. BpeMSI )KH3HR
(nO.D.aqa HR3Koro npSlMoro HanpSl)KeHHSI) npH YBeJIHqeHRR KOHueHTpaUHH
npRMeCSlMR COOTBeTCTBYIOIII.RX TRnOB 3aMeTHO OTpa)KaeTCSI Ha 3cpcpeKTRB-, BHYTpeHHero
KBaHTOBoro BblXO.D.a O.D.H03HaqHO xapaKTepR30BaTb HeB03MO)KHO. CHaqaJIa paCCMOTpRM CJIyqaH JIempOBaHRSI aKTRBHOH 06JIaCTR. AKTRBHaSl 06JIaCTb CBeTO.D.RO.D.OB C .D.BOHHOH reTepOCTPYKTYPOH
p-n-nepeXO.D.
rpaHRUe pa3.D.eJIa aKTRBHaSl 06JIaCTb -
Ha KpaIO KBaHTOBOR 51MbI
III.RX npHMeceH) BpeMSI )KR3HH HOCRTeJIeH COKpaIII.aeTCSI. Eho npRBO.D.HT K nOBblIIIeHRIO BepOSlTHOCTR H3JIyqaTeJIbHOH peKOM6RHaURR.
npRMepOM
MaTepRaJIa, KBaHTOBbIH BbIX0.D. R3JIyqeHHSI KOToporo YBeJIHqRBaeTCSI C POCTOM KOHueHTpaUHH npRMeceH, SlBJISleTCSI GaAs, JIerHpOBaHHbIH 6epRJIJIHeM. O.D.HaKO XOPOIIIO H3BeCTHO, 'ITO KBaHTOBblH BbIXO.D. R3JIyqeHHSI GaAs,
He
.D.OJI)KHa 6bITb CRJIbHO JIerRpOBaHHOH, nOCKOJIbKY B 3TOM CJIyqa: npRMeCR RJIR n-TRna CCPOpMRPYIOT
HOCHTeJIeH 3aBHCHT OT
pe)KRMe cJIa6oro B036Y)K.D.eHRSI
CBo60.D.HbIX HOCRTeJIeH (conpOBO)K.D.aIOIII.eM POCT KOHueHTpaUHH JIerRpyIO-
JIempoBaHRe aKTRBHoro R 6apbepHblx CJIOeB .D.BOHHblX reTepOCTpYKTYP
P_
TOMY )Ke, eCJIR aKTRBHaSl
.D.RCPCPYH.D.HPYIOT B 6apbepHbIH CJIOH p-TRna. HMYIII.eCTBa,
JIerHpoBaaHe aKTHBHOH 06JIaCTH
~eJIRqRHY
K
06JIaCTb CBeTO.D.RO.D.a JIempOBaHa npRMeCSlMH n-TRna, 3JIeKTpOHbI, 06JIa.D.aIO-
KOHueHTpaUHH OCHOBHbIX HOCRTeJIeH. B
HOCTR CBeTO.D.RO.D.OB. BJIRSlHRe JIerRpOBaHRSI Ha
H3
60e JIerHpOB~HHe aKTRBHOH 06JIaCTH npHMeCSlMH p-THna, qeM npRMeCSlMH
'ECJIR TOJIIII.RHa aKTRBHoH 06JIaCTR B .D.BOHHOH reTepocTpYKType CTaHO-
7.2.
Ha npRMepe CBeTO.D.HO.D.a
BblXO.D.a H3~yqeHHSI CBeTO.D.HO.D.OB OT KOHueHTpaUHH JIerRpYIOIII.RX npHMeceH
3aBHcHMOCTb KBaHToBoro BblXO,ll.a H3J1yqeHHlI C ,lI.JlHHOH BOJlHbl
, B HHTepBaJle
7.4
AlInGaP C .D.BOHHOH reTepocTpYKTYPOH nOKa3aHa 3aBRCHMOCTb KBaHTOBoro
CBeTO,ll.HO,ll.a AlInGaP C ,lI.BOHHOH reTepocTPYKTYPOH OT TOJllll.HHbI aKTHBHOH 06-
JI.
3JIeKTpOHbI 06bIqHO 06JIa.D.aIOT 60JIbIIIeH nO.D.BH)KHOCTbIO,
HOCRTeJIeH B.D.OJIb Hee.
:I
BH,lI.HO
B
qeM .D.b1PKR:) n03TOMY npR JIerHpOBaHHH aKTRBHOH 06JIaCTH CBeTO.D.HO.D.a
To~a aKTHBHOH 06JlaCTH d,
aCTH
HJIH n-THna, KaK
HeOCHOBHbIMR HOCHTeJISlMH, 3HaqRTeJIbHO 60JIbIIIe, qeM Y .D.b1POK B aHaJIO-
y
7.3.
p-
nOCKOJIbKY .D.HCPCPY3ROHHaSl .D.JIRHa 3JIeKTpOHOB, KOr.D.a OHH SlBJISlIOTCSI
C.D. AlInGaP c .IUIoiiHoii rerepocrpyxcrypoii, A= 565 HM KOImeHTP~. HocHTeJleii B rucrHBHOii o6nacm AlInGaP 3 16 p-TUIIa 5 . 10 CM-
~, I
~
PHC.
MKM.
3
,
~
~
18
6apbepHLIii CJ10ii p-TUIIa p=5.10 17 CM- 3
,
\
,IS:
- --
,
\
§
,. ,---c- -p=2.10
,, ,
I
~
JIempYIOT, JIH60 ypoBeHb ee JIerRpOBaHRSI He npeBblIIIaeT KOHueHTpaURR
6ap..epHI>Iii: cnoii p-nma
:.:
0,6
0,15-0,75
rpynnbl CHJIbHO He JIempYIOT. 06bIqHO aKTHBHYIO 06JIaCTb .D.BOHHbIX reTepOCTpYKTYP JIH60 COBceM He
BR.D.HO, ,'ITO OnTRMaJIbHaSl TOJIIII.RHa
CBeTO.D.RO.D. a AlInGaP JIe)KRT B RHTepBaJIe
145
JIeeupo8aHue aKmU8HOU o6J!acmu
H~
6apbepHbIH CJIOH, cnoco6CTBYIOIII.RR
nepeTeKaHRIO HOCRTeJIeH R3 aKTRBHOH 06JIaCTR B O.D.RH R3 BHeIIIHRX CJIOeB.
CO.D.ep)KaIII.ero 6epRJIJIRH, paCTeT TOJIbKO npH YMepeHHblX ypOBHSlX JIerRpOBaHRSI. C
.D.PyroH CTOPOHbI, JIerHpYIOIII.He npRMeCH, oco6eHHO B CJIyqae BbI-
COKHX KOHueHTpaUHH,
MorYT BHOCHTb B CTPYKTYPY .D.ecpeKTbI, KOTopbIe
6Y.D.YT HrpaTb pOJIb ueHTpOB peKOM6HHaURR. BbICOKRe KOHueHTpaURR JIe-
146
Fil.
7.
CBemOaUOabl C BblCOKUM BHympeHHuM KBaHmOBblM BblXOaOM
7.3.
147
[JOJlO:JICeHUe p-n-nepexoaa
0,8r-----------~;.===;==~,=======;.~--------------~ aIcrHBHlUI o6JIaCTh : aIcrHBHlUI 06naCTh n-THTIa ' p-THIIa
7.3. llOJIOlKeHUe p-n- nepexo,IJ.a
C)J; AlInGaP C roJOHHOH rerepOCTpYKTYPoH A=565HM, dactive = O,5MKM KOHl\eHTPaWUI HOCHTeneH B 6apbepHoM cnoe p-THIIa 5.10 17 CM- 3
B CBeTo.n:Ho.n:ax Ha OCHOBe .n:BOHHOH reTepOCTpYKTYPhI 6hIBaeT TPy.n:HO CCPOpMHpoBaTh p-n-rrepexo.n: B 6aphepHoM CJIoe. 06hIqHO HH)KHHH 6aphepHhiH CJIOH HBJIHeTCH 06JIaCTbIO n-THrra, a BepxHHH - 06JIaCThIO p-THna. AKTHBHhIH CJIOH rrpH 3TOM JIH60 COBceM He JIerHpOBaH, JIH60 cJIa60 JIerHpOBaH npHMecHMH
n- HJIH p-THna. O.n:HaKO npH nepepacnpe.n:eJIeHHH npHMeceH p-n-
nepexo.n: MO)KeT 6hITh CCPOpMHpOBaH B O.n:HOM H3 OrpaHHqHBaIOIII.HX 6aphepHhIX CJIOeB. 'uHCPCPY3HH npHMeceH B rrpouecce CPOpMHpOBaHHH KpHCTaJIJIa 06bHcHHeTcH BhICOKOH TeXHOJIOrHqeCKOH TeMnepaTypOH, .n:JIHTeJIhHOCThIO
r-
"0
npouecca BhlpaIII.HBaHHH H 60JIhIIIHM K03cpCPHUHeHToM .n:HCPCPY3HH npHMe-
q,
ceH. flepepacnpe.n:eJIeHHe npHMeceH npoHcxo.n:HT 3a CqeT HX .n:HCPCPY3HH,
-,,
OL-____
~
______
2,0
~
______
1,0
~
____
,
cerperaUHH H .n:peHcpa.
_ J _ _ _ _ _ _ _ L _ _ _ _ _ _ ~_ _ ~
1,0
0,0
2,0
P-TJ1II,
3,0
KaK rrpaBHJIO, aKueTITOphI H3 BepxHero 6aphepHoro CJIOH .n:HCPCPYH.n:HPYIOT B aKTHBHYIO 06JIaCTh, a TaK)Ke B HH)KHHH 6aphepHhIH CJIOH. TaKHe
10 17 CM- 3
npHMecH, KaK UHHK H 6epHJIJIHH, HMeIOT aTOMhI MaJIOrO pa.n:Hyca, KOTophIe JIerKO rrepeMeIII.aIOTCH BHYTPH KpHCTaJIJIHqeCKOH peIIIeTKH. K
KOHl\eHTPaWUI HOCHTeneH B aKI'HBHOH o6nacrn
TOMY )Ke
K03CPCPHUHeHThI .n:HCPCPY3HH aTOMOB UHHKa H 6epHJIJIHH CHJIhHO 3aBHCHT OT
PHC. 7.4. 3aBHcHMoCTb KBaHTOBoro BbIxo.n:a H3JIYQeHHH CBeTo.n:Ho.n:OB AlInGaP C .n:BOHHOH reTepocTpYKTYPOH, C .n:JIHHOH. BOJIHbI H3JIYQeHHH 565 HM, OT ypOBHH JIempOBaHHH aKTHBHoH 06JIaCTH (Sugawara et al, 1992).
KOHueHTpaUHH npHMeceH. CKOPOCTh .l!.HCPCPY3HH UHHKa H 6epHJIJIHH pe3Ko B03pacTaeT npH .n:oCTH)KeHHH onpe.n:eJIeHHOH KpHTHqeCKOH KOHueHTpaUHH, B pe3YJIhTaTe qero HapYiliaeTcH pa60Ta cBeTo.n:Ho.n:a. Ha pHC.
rHpYIOIII.HX npHMeceH Be.n:YT K YBeJIHqeHHIO KOHueHTpaUHH co6cTBeHHbIx .n:ecpeKToB, qTO BbI3BaHO B3aHMHoH 3aBHCHMOCThIO KOHueHTpaUHHco6cTBeHHhIX H Heco6CTBeHHhIx .n:ecpeKToB H nOJIO)KeHHH ypOBHH
1956;
flpouecc
1985; 1999).
Baraff, Schluter,
Neugebauer, Van de Walle,
3naTaKCHaJIhHOrO
pOCTa
Walukiewicz,
1988, 1989, 1994;
7.5
nOKa3aH npHMep pacnpe.n:eJIeHHH KOHueHTpaUHH UHHKa
B .n:BOHHOH reTepocTpYKType GalnAsP /InP, nOJIyqeHHOrO MeTo.n:OM MacccneKTpoMeTpHH BTOPliqHhIX HOHOB (SIMS). Ha pHC.
7.5, a
nOKa3aH CJIyqaH
YMepeHHoH KOHueHTpaUHH rrpHMeceH B BepxHeM 6aphepHoM CJIoe (2 x x 10 17 CM- 3). 113 npHBe.n:eHHoro rrpocpHJIH KOHueHTpaUHH BH.n:HO, qTO UHHK B OCHOBHOM cocpe.n:OTOqeH B BepXHeM 6aphepHOM CJIoe, XOTH HeKOTophIe ero aTOMhI Bce )Ke npOHHKJIH B aKTHBHYIO 06JIaCTh. Ha pHC.
TaK)Ke
Henocpe.n:CTBeHHO
CBH3aH
7.5,6
npe.n:-
C KOHueHTpaUHeH JIerHpYIOIII.HX npHMeceH, nOCKOJIhKY OHH MorYT .n:eH-
CTaBJIeHa 60JIee BhICOKaH KOHueHTpaUHH npHMeCH B BepxHeM 6aphepHoM CJIoe (2· 10 19 CM- 3). 113 pacrrpe.n:eJIeHHH KOHueHTpaUHH CJIe.n:yeT, qTO UHHK
CTBOBaTh KaK nOBepXHOCTHo-aKTHBHhIe BeIII.eCTBa (flAB). HanpHMep, flAB
.n:OBOJIhHO rJIy6oKo npoHHK B aKTHBHYIO 06JIaCTh. Teneph
qaCTO nOBhIIIIaIOT rroBepxHocTHhIH K03CPCPHuHeHT .n:HCPCPY3HH, TeM caMhIM
peMeCTHJJCH Ha KpaH 3TOH 06JIaCTH, qTO 3HaqHTeJIhHO CHH3HJIO KBaHToBhIH
YJIyqIIIaH KaqeCTBO KpHCTaJIJIOB. CYIII.eCTBYIOT H .n:PYrHe cnoco6hI B03.n:eH-
BhIXO.n: H3JIyqeHHH.
CTBHH flAB Ha TeXHOJIOrHqeCKHH npouecc 3rrHTaKCHaJIhHOrO BhIpaIII.HBaHHH. XOTH 3TH CBoHcTBa flAB eIII.e He.n:OCTaTOQHO H3yqeHbI, YJIyqIIIeHHe KaqeCTBa KpHCTaJIJIOB B npHCYTCTBHH flAB Ha6JIIO.n:aJIOCh BO MHO)KeCTBe CJIyqaeB, HanpHMep npH JIerHpOBaHHH IrrGaN aTOMaMH KpeMHHH B rrpouecce ero BhIpaill.HBaHHH (Nakamura et al.,
1996, 1998).
KOHueHTpaUHH
KpeMHHH B 6aphepHhIx CJIOHX B CTpYKTypax C MHO)KeCTBeHHhIMH KBaHTOBhIMH HMaMH Ha OCHOBe HHTPH.n:OB III rpyrrnhI MO)KeT .n:OCTHraTh .n:OBOJIhHQ 60JIhIIIHX 3HaqeHHH, HanpHMep 2 . 10 18 CM- 3 . Ha6JIIO.n:aeMoe nOBhlIIIeHHe KBaHTOBoro BhIxo.n:a CBeTo.n:Ho.n:OB MO)KeT 6hITh CBH3aHO C 3KpaHHpoBaHHeM BHYTpeHHHx nOJIHpH3aUHOHHhIX nOJIeH, CHH)KaIOIII.HX pa3HocTh rrOTeHUHaJIOB BHYTPH· aKTHBHOH 06JIaCTH.
Ha pHC.
7.6
p-n-nepexo.n: ne-
nOKa3aHa Mo.n:eJIh, 06bHCHHIOIII.aH H3MeHeHHe nOJIO)KeHHH
p-n-nepexo.n:a B .n:BOHHOH reTepocTpYKType GalnAsP /InP (Schubert et al., 1995). BH.n:Ho, qTO npH ICpumutteclCou KOHueHTpaUHH Ncritical pe3KO B03pacTaeT K03cpcpHUHeHT .n:HCPCPY3HH UHHKa. ECJIH B npouecce BbipaIII.HBaHHH KPHCTaJIJIa KOHueHTpaUHH UHHKa CTaHOBHTCH BhIIIIe 3Toro KpHTHqeCKOrO 3HaqeHHH, UHHK nepepacnpe.n:eJIHeTCH rro CTpyKType TaK, qTO ero KOHueHTpaUHH CHOBa CHH)KaeTCH .n:o ypOBHH HH)Ke 3HaqeHHH Ncritical. 3TO 3HaqHT, qTO B .n:BOHHOH reTepOCTpYKType
p-n-rrepexo.n: MO)KeT nepeMeIII.aThCH KaK BrJIy6h,
TaK H Ha KpaH H .n:a)Ke 3a npe.n:eJIbi aKTHBHOH 06JIaCTH. flpHMeqaTeJIhHO TO, qTO CMeIII.eHHe
p-n-nepexo.n:a npOHcxo.n:HT .n:a)Ke npH .n:OCTaTOqHO HH3KOH 6apbepltOM CJwe 86.11.U3U epaltutfbl c aICmU8ltOU
KOHueHTpaUHH UHHKa 8
06.11.aCmblO.
148
Fit. 7.
7.4.
C8emOaUOabi C 8blCOKUM 8HympeHHuM K8aHm08blM 8blXOaOM
149
JIeeupo8aHue 6apbepHblx CAoe8
19
10
GaInAsP
a
GaInAs--lI------InP--::·+-'--InP-~InP (2-0M 6apLepm,dl: clIoil) , (I-Llli (~~) As , 6apLepHLrn . clIoil) Zn 2.10 17 CM- 3 (3ll,l(aHHoe 3HaqeHHe)
a
'"'I ::;:
.,
6 ----~-------""- -
to)
~N
- - -
~Ncritical \
\
«S
:.::
\ \ \ \ \
== is:
::r 1018 ~ ::r «S
~
\ \ \ \
0
::r ==
~
6
20
10
\ \
As
10
Zn
(31l,l(aHHOe 3HaqeHHe)
18
10
BTOp~H
17
rrepBH'IHLlii
10 E----3ITHTaKCHaJILHLlli - - - - " f:.-3ITHTaKCH~HLlli ClIOM
0,0
1~
ClIO
2~
\
17
10
2.10 19 CM- 3
19
3~
4~
0,0
1,0 2,0 rny6HHa z, OTH. o.n;.
3,0
PHC. 7.6. I1sMeHeHHe rrOJIOJKeHHS! p-n-rrepexo.n;a B peSYJIbTaTe CHJIbHorO JIerHpOBaHHS! 6apbepHoH 06JIaCTH (a - Ha'IaJIbHblH rrpo
Thy6HHa z, MKM PHC. 7.5. Pacrrpe.n;eJIeHHe KOHueHTpaUHH Zn B .n;BOHHOH reTepOCTpYKType GaInAsP /InP, rrOJIY'IeHHOe MeTo.n;OM Macc-crreKTpOCKorrHH BTOPH'IHblX HOHOB (SIMS). B HCCJIe.n;yeMoH CHCTeMe Zn S!BJIS!eTCS! rrpHMecblO p-THrra. Ha pHc.7.5, a HeT CMemeHHS! p-n-rrepexo.n;a. Ha pHC. 7.5,6 rrOKasaHO, 'ITO BbICOKaS! KOHueHTpaUHS! Zn B BepXHeM 6apbepHOM CJIoe rrpHBo.n;HT K HSMeHeHHIO rrOJIOJKeHHS! p-n-rrepexo.n;a (Schubert et al., 1995)
B pa60Te CyhBapbI (Sugawara,
1992)
npHBe.D:eH aH~lJlH3 BJIHHHHS! KOH-
I.I,eHTpalJ,HH JIempYIOI.I.I,HX npHMeceH B 6apbepHblx CJIOHX Ha BHYTpeHHHH KBaHTOBblH BbIX0.D: CBeTO.D:HO.D:OB. Ha pHC. pe3YJIbTaTbI :nOrO aHaJIH3a.
7.7
H pHC.
7.8
npe.D:CTaBJIeHbI
BH.D:HO, 'ITO .D:JIH 6apbepHbIX CJIOeB cYI.I.I,e-
cTByeT OITTHMaJIbHbIH .D:Harra30H KOHI.I,eHTpaI.l,HH JIerHpYIOI.I.I,HX rrpHMeceH. .L{JIH CJIOeB n-THna 3TO .(I:Hana30H 10 16 _2. 10 17 CM- 3 , a .D:JIH p-THna 5 x x 10 17 _2.10 18 CM- 3 , T.e. 3Ha'IHTeJIbHO 60JIbIIle, 'IeM .D:JIH CJIOeB n-THna. npH'IHHa TaKHX pa3JIH'IHH CHOBa 3aKJIIO'IaeTCH B 60JIbillOH pa3HHI.I,e Me)l{.D:Y
7.4. JIerHpoBaHHe 6apbepHbIx CJIOeB
.D:H
JIeTHpoBaHHe6apbepHblX CJIOeB CHJIbHO BJIHHeT Ha KBaHTOBblH BbIX0.D:
06JIaCTH H npe.D:oTBpaI.I.I,aeT HX .D:H
H3JIY'IeHHH CBeTO.D:HO.D:OB C .D:BOHHblMH reTepOCTpYKTypaMH. Y.D:eJIbHOe co-
YTe'IKa HOCHTeJIeH H3 aKTHBHoH 06JIaCTH JIa3epOB Ha OCHOBe .D:BOHHbIX
npOTHBJIeHHe 3THX CJIOeB onpe.D:eJIHeTCH KOHI.I,eHTpaI.l,HeH B HHX npHMeceH.
reTepoCTpYKTYP B 6apbepHbIH CJIOH p-THna paccMoTpeHa Ka3apHHOBbIM
.L{JIH npe.D:OTBpaI.I.I,eHHH HarpeBa 6apbepHblx CJIOeB HX Y.D:eJIbHOe conpOTHB-
H nHHTO (Kazarinov, Pinto,
JIeHHe .D:OJI)I{HO 6b1Tb HH3KHM.
aKTHBHOH 06JIaCTH HaMHOrO npeBbIIIlaeT yTe'IKY
.L{pymM BJIHHIOI.I.I,HM <paKToPOM HBJIHeTCH KOHI.I,eHTpa,I.I,HH OCTaTO'IHbIX
1994).
nOKa3aHO, 'ITO YTe'IKa 3JIeKTpOHOB H3
.D:b1pOK~
npH'IHHa 3TOro
B TOM, 'ITO K03
npHMeceH B aKTHBHOH 06JIaCTH • .L{a)l{e eCJIH aKTHBHaH 06JIaCTb He JIempo-
K03
BaHa, B. HeH Bcer.n:a HMelOTCH OCTaTO'IHble npHMeCH. 06b1'If{O KOHI.I,eHTpaI.l,HH JIempylOI.I.I,HX npHMeceH B aKTHBHOH 06JIaCTH COCTaBJIHeT 1015 _10 16 CM- 3 .
npH npHMOM CMeI.I.I,eHHH. BH.D:HO, 'ITO Ha rpaHHI.I,aX pa3.D:eJIa 6apbepHbIH
Ha pHC.
7.9
npHBe.D:eHa 30HHaH .D:HarpaMMa .D:BOHHOH reTepoCTpYKTypbI
I1x KOHI.I,eHTpaI.l,HH B 6apbepHbIX CJIOHX BCer.D:a .D:OJI)I{Ha npeBbIIIlaTb KOHI.I,eH-
CJIOH -
TpaI.l,HlOnpHMeceH B aKTHBHOH 06JIaCTH.
IOI.I.I,He .D:JIH HOCHTeJIeH nOTeHI.I,HaJIbHblH 6apbep. .L{JIH YMeHbIIleHHH 3Toro
aKTHBHaH 06JIaCTb B03HHKalOT .D:Be 06e.D:HeHHble 06JIaCTH, C03.D:a-
150
7.
TA.
7.4.
CBemOaUOabl C BblCOKUM BHympeHHuM KBaHmOBblM BblXOaOM
EC
~
~
6aPb;~= cnoil
1,5
~-
o6naCTL C MeHbmeil KOHI\eHTpaw<eil):lOHOpOB
evd y ........... p
~
till
evac:
:::::::::: ____ ._._._._._._._._._. __
~i . _ _ _ . . .
'-r-'
o6naCTL HaKOnneHHll i\hlPOK
.,:.:
151
JIeeupoBaHue 6apbepHblx CAoeB
o6naCTL HaKOnneHHJI
;~::- __ •____ ~ __ ._. ______ ~_~ _________________ ~~~~?HOB
~
~
f,;l 1,0
§
'"1
~
i
~I
0:1
l}tillv ~
06JIaCTh C MeHLmeH KOHI\eHTpaI\Heil aKI\eIITOpOB
1
01
-I1 SI
6apbepHLJii cnoil n-THIla
- - - - - - - . Ev
.
<0
'is:
::is 0:1
~ 0,5
PHc.7.9. 30HHaH .l(HarpaMMa .l(BOHHOH reTepOCTpYKTypbI npH npHMOM CMeIll.eHHH. BapbepHbIH CJlOH p-THna COCTOHT H3 cJla60JlefHpOBaHHoH 06J1aCTH, pacnOJlO)!{eHHOH B6J1H3H aKTHBHOH 06J1aCTH, H 60Jlee JlerHpOBaHHoro CJlOH, HaXO.l(HIll.erOCH 3a HeH (Kazarinov, Pinto, 1994)
·1
:.:
~'"
OU-~~~__~~-L~~LL__-L~~_LLLLU__~ 17 18 1016 10 10 Ko~elITpaIJ,WI HOCHTeneil: B 6apbepHOM cnoe n-THlla, CM-3
PHC. 7.7. 3aBHcHMoCTb KBaHTOBoro BbIXO.l(a H3J1yqeHHH CBeTO.l(HO.l(OB Ha OCHOBe .l(BOHHblX reTepocTpYKTYP AlInGaP C .l(JlHHOH BOJlHbI H3J1YQeHHH 565 HM OT KOHueHTpaUHH JlerHpYIOIll.HX npHMeceH B 6apbepHblx CJlOHX n-THna (Sugawara et aI., 1992)
6apbepa HCrrOJlb3yeTcH rpa,lJ.HeHTHOe H3MeHeHHe XHMWIeCKoro COCTaBa COe,lJ.HHeHHSI B6JlH3H rpaHHu Me)K,lJ.Y CJlOSlMH. Ha pHC.
7.10
rrpe,lJ.CTaBJleHa TeMrrepaTypHaSl 3aBHCHMOCTb BHYTpeHHero
KBaHTOBoro BblXO,lJ.a H3J1yqeHHSI Jla3epa Ha OCHOBe ,lJ.BOHHOH reTepocTpYKTYpbI OT KOHueHTpaUHH JlerHpYIOII1.HX rrpHMeceH B 6apbepHOM CJloe H TeMrrepaTYPbI (Kazarinov, Pinto,
1994).
HeTpY,lJ.HO BH,lJ.eTb, 'ITO :na KOHueHTpauHSI
CHJlbHO BJlHSleT Ha KBaHTOBbIH BblXO,lJ. H3JlyqeHHSI Jla3epa. HH3KaSl KOHueHTpaUHSI rrpHMeceH B CJloe p-THrra crroco6cTByeT YTeqKe 3JleKTpOHOB H3 0,8r-----------------~--------------------~
aKTHBHOH 06JlaCTH, 'ITO rrpHBO,lJ.HT K CHH)KeHHIO BHYTpeHHero KBaHTOBoro BblXO,lJ.a.
~
~-
.,:.:
0,6 1 1 1 1 1
~ '"is:
§ 0,4
'"1
'"
~ 0
~
"-
0:1
"0 .....
'is:
::is
"0 .....
..c
0:1
~
1 1 1 1 1 1 1 1 ~I1 0 co
0,2
~
0:1
:.::
O~--~~~~wu~~~--~~-LLU~---L~~
16
10
10
17 .
10
KOHl(elITparurn HOCHTeneil: B ·6apbepHOM cnoe p-THlla
18
40
N A' CM -3
PHC. 7.8. 3aBHcHMoCTb KBaHTOBoro BbIXO.l(a H3J1YQeHHH CBeTO.l(HO.l(OB Ha OCHOBe .l(BOHHblX reTepocTpYKTYP AlInGaP 565 HM, OT KOHueHTpaUHH JlefHpYIOIll.HX npHMeceH B 6apbepHbIx CJlOHX p-THna (Sugawara et aI., 1992)
60 TeMIIepatypa T,
80
100
°C
PHC. 7.10. 3aBHcHMoCTb BHYTpeHHero .l(H<jl<jlepeHUHaJlbHOrO KBaHTOBoro BbIXO.l(a H3JlYQeHHH, onpe.l(eJlHeMOrO KOJlHQeCTBOM HcnYIll.eHHbIX <jlOTOHOB Ha O.l(HH HH)!{eKTHpOBaHHbIH 3J1eKTpOH, OT TeMnepaTypbl H KOHueHTpaUHH npHMeceH p-THna B6apbepHoM cJloe (Kazarinov, Pinto, 1994)
FIt. 7.
152
7.6.
CBemOaUOabl C BblCOKUM BftympeftftUM KBaftmOBblM BblXOaOM
7.5.
COZJlaCOBaftUe napaMempoB KpUCmaJlJlU'leCKUX peutemOK
.....
Be3bI3JIyqaTeJIbHaB peKoM6HHaIJ,HB
..
OqeHb Ba:>KHO, qTo6bI )J.JHI CPOpMHpoBaHHH aKTHBHOH 06JIaCTH HCnOJIb-
153
.....- .... /
nnllHapHLle CBeTO)I.HO,l\bl C Pe30HilTOPOM
30BaJIHCb BbICOKOKaqeCTBeHHble MaTepHaJIbI, B KOTOPbIX MaJIO TOqeqHbIX )J.ecpeKToB, He:>KeJIaTeJIbHbIX npHMeceH, )J.HCJIOKaLl.HH H npOqHX )J.ecpeKToB, cnoco6HbIX npHBeCTH K C03)J.aHHIO 2JLy6oKUX npUMeCHbtX ypoBHeu.
[JoBepxHocmHYIO peKOM6uHal.{UIO CJIe)J.yeT y)J.ep:>KHBaTb Ha MHHHMaJIbHO B03MO:>KHOM ypOBHe. ,UJIH ::lToro Bce cBo6o)J.Hble nOBepXHOCTH )J.OJI:>KHbI 6bITb y)J.aJIeHbI OT 06JIaCTeH HaKOnJIeHHH 3JIeKTpOHOB H. )J.blPOK, T. e. OT aKTHBHOH 06JIaCTH, Ha paCCTOHHHe HeCKOJIbKHX )J.HCPCPY3HOHHbIX )J.JIHH.
Me3acmpYKmYPHbte CBeTO)J.HO)J.bl H JIa3epbl, B KOTOPbIX BbITpaBJIeHHble I=7,5MA
Me3aCTpYKTYPbI OTKpbIBalOT )J.ocTyn B03)J.yxa K aKTHBHbIM 06JIaCTHM, H3-3a
(nocrollHHLlii TOK)
nOBepxHocTHOH peKOM6HHaLl.HH 06blqHO 06JIa)J.a1OT HH3KHM BHyTpeHHHM KBaHTOBbIM BbIXO)J.OM H3JIyqeHHH.
K
1=930HM T=300K
TOMY :>Ke nOBepXHOCTHaH peKoM6H-
HaLl.HH CHH:>KaeT CpOK CJIY:>K6bI CBeTO)J.HO)J.OB, nOCKOJIbKY Be)J.eT K HarpeBY .
nOBepXHOCTH nOJIynpOBO)J.HHKa, 'ITO MO:>KeT BbI3blBaTb nOHBJIeHHe CTpyKTypHblX )J.ecpeKTOB, HanpHMep TeMHblX nOJIOC, KOTOpble 3HaqHTeJIbHO CHH:>KaIOT KBaHTOBbIH BblXO)J. H3JIyqeHHH CBeTO)J.HO)J.OB. Ha pHC.
7.11 .npe)J.CTaBJIeHbl
PHC.
BpeMeHHble 3aBHCHMOCTH
HHTeHCHBHO-
7.11.
t = 0
10
3
1998)
o6opBaHHLle CB1I3H
HHTeHCHBHOCTb H3JIyqeHHH Me3a-
CTPYKTYPHbIX CBeTO)J.HO)J.OB HeCKOJIbKO HH:>Ke, qeM y nJIaHapHblx CBeTO-
nOCTOmIHali
pemeTKH
)J.HO)J.OB;
2)
14
12
'I
BpeMeHHble 3aBHCHMOCTH HHTeHCHBHOCTH H3JIYQeHHH .llByX Me3acTpYK-
113 HHX CJIe)J.yeT, 'ITO B HaqaJIbHbIH MOMeHT BpeMeHH
8
TYPHbIX H .llByX nJIaHapHblx CBeTO.llHO.llOB (Schubert, Hunt,
CTH H3JIyqeHHH )J.ByX Me3acTpYKTYPHbIX H )J.ByX nJIaHapHblx CBeTO)J.HO)J.OB.
1)
6
BpeMJI t, 10
CpOK CJIY:>K6bI
Me3acTpYKTYPHbIX CBeTO)J.HO)J.OB
HaMHoro
HH:>Ke,
al
qeM
y nJIaHapHblx.
B
nJIaHapHblx YCTpoHcTBax peKOM6HHaLl.HH 3JIeKTpoHHO-)J.bIPOqHbIX nap
npoHcxo)J.HT B
06JIaCTH,
pacnOJIO:>KeHHOH
no)J. BepXHHM
MeTaJIJIHqeCKHM
KOHTaKTOM B)J.aJIH OT 60KOBbIX nOBepxHocTeH CBeTO)J.HO)J.OB. n03TOMY B Ta-
nOCTOmIHali
KHX CBeTO)J.HO)J.ax He Ha6JIIO)J.aeTCH CHH:>KeHHH HHTeHCHBHOCTH H3JIyqeHHH,
pemeTKH
ao
CBH3aHHoro C nOBepXHOCTHOH peKOM6HHaLl.HeH. CJIe)J.yeT OTMeTHTb, 'ITO B npHCYTCTBHH HOCHTeJIeH O)J.Horo THna, HanpHMep B6JIH3H BepXHero KOHTaKTa, HaJIHqHe nOBepXHOCTeH He CHH:>KaeT KBaHTOBbIH BblXO)J. H3JIyqeHHH. MOHOnOJIHpHbIX 06JIaCTHX,
nOBepXHOCTH,
pacnOJIO:>KeHHble B TaKHX
He OKa3bIBalOT OTpHLl.aTeJIbHOrO
BJIHHHHH
Ha
PHC.
7.12.
.IlHCJIOKaUHH B6JIH3H rpaHHUbi .llByX nOJIynpOBO.llHHKOB, 06JIa.llaIOIlI.Hx
npOLl.eCCbI peKOM6HHaLl.HH.
pa3HbIMH 3HaQeHHHMH nOCTOHHHOH perneTKH
JIynpOBO)J.HHKOB HJIH B6JIH3H Hee CneLl.HcpHqeCKHX )J.ecpeKToB. Ha pHC.
7.6.
COrJIaCOBaHHe napaMeTpoB KpHCTaJIJIHqeCKHX pemeToK
7.12
nOKa3aHbI )J.ecpeKTbl, KOTopble Ha3bIBalOTCH o6opBaHHbtMU CBR.3R.MU. 113 pHC.
7.12
BH)J.HO, 'ITO Ha rpaHHLl.e )J.ByX MaTepHaJIOB C pa3HbIMH 3Ha-
qeHHHMH riOCTOHHHOH KpHCTaJIJIHqeCKOH perneTKH MoryT CCPOpMHpOBaTbCH
B
)J.BOHHbIX reTepOCTpYKTypax )J.JIH C03)J.aHHH aKTHBHbIX H 6apbepHblx
pH)J.bl 060pBaHHbIX CBH3eH. TaKHe aUCJLOKal.{UU HecoomBemCmBUR. HMelOT
CJIOeB HCnOJIb3YlOT pa3Hble MaTepHaJIbI, KOTopble, O)J.HaKO, )J.OJI:>KHbI HMeTb
BH)J. JIHHeHHO BbITHHYTbIX )J.ecpeKTOB, KOTopble MO:>KHO YBH)J.eTb B paCTpOBOM
O)J.HHaKOBble KpHCTaJIJIHqeCKHe CTpyKTYPbl H nOCTOHHHble perneTOK. HeBbI-
3JIeKTpOHHOM MHKpOCKone B pe:>KHMe JIOKaJIbHOH KaTO)J.OJIIOMHHeCLl.eHLl.HH.
nOJIHeHHe 3THX YCJIOBHH Be)J.eT K B03HHKHOBeHHIO Ha rpaHHLl.e )J.ByX no-
Ha KaTO)J.OJIIOMHHeCLl.eHTHOM H306pa:>KeHHH CTpyKTYPbI C HapyrneHHeM CO-
r 154
rA.
7.
7.6.
CBemOaUOabl C BblCOICUM BnympennuM ICBanmOBblM BblXOaOM pfiC.
7.14.
C02AacoBanue napaMempOB ICpucmaAAU'tecICUX peutemoIC
155
O,ll,HaKO rro Mepe pOCTa KpflCTaJIJIa 9HeprH5I, 3aTpaqflBaeMa5I Ha
ero paCT5I)KeHfle ,lI,O COOTBeTCTBYIOIIJ,eH
ftoii. ~eTO,ll,flKa
(~atthews, Blakeslee, PHc.7.13. H306pa)KeHHe CJIOH Ino.05Gao.95As TOJImHHOM 0,35 MKM, BblpameHHoro Ha lIO,l\JIO)KKe GaAs, 75 MKM, B pacTpoBoM 3JIeKTpOHHOM MHKpocKone B pe)KHMe JIOKaJIbHOM KaTO,l\OJIIOMHHeClleHllHH. TeMHble nepeKpecTHble JIHHHH cooTBeTcTBYIOT ,l\HCJIOKallHHM HeCOOTBeTCTBHH (Fitzgerald, 1989)
KpUmutteCKoii moJtl4u-
ee paCqeTa rrpflBe,ll,eHa B pa60Te ~9TbI03a fI DJI9KCJIfi
1976).
ECJIfi peIIIeTKfI BblpaIIJ,flBaeMOro KpflCTaJIJIa
fI rrO,ll,JIO)KKfI flMeIOT pa3Hble rrepflO,ll,bI, BblpaCTflTb CJIOH, CBo6o,ll,HbIH OT ,lI,flCJIOKaIJ,flH, MO)KHO TOJIbKO rrpfl YCJIOBflfI, qTO ero TOJIIIJ,flHa 6Y,lI,eT MeHbIIIe KpflTflqeCKOH, paCCqflTaHHOH rro MeTO,ll,flKe ~9TbIO-DJI9KCJIfi. nJIOTHOCTb ,lI,flCJIOKaIJ,flH HeCOOTBeTCTBfl5I Ha e,ll,flHflIJ,Y ,lI,JIflHbI rrporropIJ,flOHaJIbHa BeJIflqflHe paccOrJIaCOBaHfl5I peIIIeToK. CJIe,ll,OBaTeJIbHO, C po-
OTBeTCTBfl5I rrapaMeTpoB KpflCTaJIJIHqeCKfiX peIIIeToK BblrJI5I,lI,5IT KaK rrepeKpecTHble IIITPflxoBble rrOJIOCbI (pfiC.
7.13).
TeMHble rrOJIOCbI COOTBeTCTBYIOT
JIflHfl5IM ,lI,flCJIOKaIJ,flH, Ha KOTOPbIX rrpOflCXO,ll,5IT aKTbI 6e3bI3JIyqaTeJIbHot% peKOM6f1HaIJ,fIfi rrap HOCflTeJIeH. pa3,l1,eJIa ,lI,BYX MaTepflaJIOB C pa3HbIMfi 3HaqeHfl5IMfi rrOCT05IHHOH peIIIeTKfI,
fta fteKOmOpoM y8aJteftuu
Ha pfiC.
7.15
nOKa3aHO CHfI)KeHfle flHTeHCflBHOCTfi fl3JIyqeHfl5I CBeTO,ll,flO,ll,OB
AlInGaP, BblpaIIJ,eHHbIX Ha rrO,ll,JIO)KKaX GaAs. nOJIynpoBo,ll,HflK AlInGaP, flCrrOJIb3yeMbIH ,lI,JI5I fl3rOTOBJIeHfl5I CBeTO,ll,flO,ll,OB KpaCHoro CBeqeHfl5I BbICO-
tLflCJIOKaIJ,fIfi HeCOOTBeTCTBfl5I MorYT B03HflKaTb He Ha caMoH rpaHflIJ,e a
CTOM paCCOrJIaCOBaHfl5I KBaHTOBbIH BbIXO,ll, fl3JIyqeHfl5I CBeTO,ll,flO,ll,OB rra,ll,aeT.
OT Hee. 9TO 06b5ICH5IeTCH TeM, qTO B HaqaJIe
rrpoIJ,ecca pOCTa KpflCTaJIJIa Ha rrOJIyrrpOBO,ll,HflKe C rrapaMe-rpaMfi peIIIeTKfI,
KOH 5IPKOCTfI, XOPOIIIO COrJIaCOBaH no rrapaMeTpaM KpflCTaJIJIflqeCKfiX peIIIeTOK C rrO,ll,JIO)KKOH GaAs. H3 pfiC. peIIIeToK
fla / a
7.15
rrpeBbICflT 3HaqeHfle
BfI,lI,HO: KaK TOJIbKO paccOrJIaCOBaHfle
3 . 10- 3 ,
npOfl30H,lI,eT pe3Koe na,ll,eHfle
flHTeHCflBHOCTfi fl3JIyqeHfl5I.
OTJIflqHbIMfi OT ero co6cTBeHHblx rrapaMeTpoB, 9TOT KpflCTaJIJI, o6JIa,ll,a5I ,lI,OCTaTOqHOH yrrpyrocTbIO, paCT5IrfiBaeTC5I TaK, qTO ropfl30HTaJIbHa5I rroCT05IHHa5I ero peIIIeTKfI CTaHOBflTC5I paBHOH rrOCT05IHHOH peIIIeTKfI HfI)Ke-
C~AlInGaP
JIe)KaIIJ,ero KpflCTaJIJIa-rrO,ll,JIO)KKfI. HMeHHo TaKa5I cflTyaIJ,fl5I rrOKa3aHa Ha
6
300
0-0-0-0-0-0-0
I I I
I I
I I
0-0-(;)-@-0-0-0
/=20MA T=300K
nOCTOlIHHWI pemeTKH }
ao
.I _ .I _ .I _ .I _ .I _ •I .1...-.I
~aO-.j
'-I tao'
.-.-.-.-.-.-. .-.-.-.-.-.-. I
I
I
I
I
I
an
I
I
I
I
I
I
I
t
I
I
I
I
I
I
~ao..j
0-0-0
0-0-0-0-0-0-0
0-0-0
0-0-0-0-0-0-0
I
I
I
I I
I I I I
I
nOCTOllHHWI pemeTKH. B,l(OJIL IUIOCKOCTH ITJIeHKH a }
}
o
no
nOCTOlIHHWI pemeTKH HOPMaJIH K
no:~7~an
100
pemCTKH
ao
PHC. 7.14. Ky6HqeCKHe cHMMeTpHQHble KpHCTaJIJIbI C paBHoBecHblMH nOCTOHHHbIMH pelIIeToK ao H aj (a). TOHKHM paBHoMepHo pacTHHYTbIM KpHCTaJIJIHQeCKHM CJIOM C paBHoBecHoM nocToHHHOM pelIIeTKH ai, BblpameHHblM Me)K,l\Y ,l\BYMH nOJIynpOBO,l\HHKaMH C paBHoBecHoM nocToHHHOM pelIIeTKH ao (6). PaBHoMepHoe paCTH)KeHHe npe,l\nOJIaraeT, QTO nOCTOHHHaH pelIIeTKH, napaJIJIeJIbHaH nOBepXHOCTH nJIeHKH, CTaHOBHTCH paBHoM ao, a HOpMaJIbHaH nOCTOHHHaH pelIIeTKH. - an
O~--L-~
o
__
2
~
__-L__- L__
~
4
__~-=I-
6
PaccomacOBaHHe pelIIeTOK,
__
8
~~
10
t1aja.IQ-3
PHc.7.15. 3aBHcHMoCTb HHTeHCHBHOCTH H3JIYQeHHH CSeTO,l\Ho,l\OB AlInGaP OT paccOrJIaCOBaHHH napaMeTpoB pelIIeToK aKTHBHoM 06JIaCTH AlInGaP H nO,l\JIO)KKH GaAs. 3aBHcHMoCTb nOJIYQeHa npH TOKe 20 MA (Watanabe, Usui, 1987)
156
Til.
B
7. C8emoauOabt c 8blCOKUM 8HympeHHuM K8aHm08btM 8btXOaOM
CBeTOJl.ROJl.aX GaAsP KpacHoro CBeqeHRfI, BblpameHHblx Ha nOJl.JIO>K-
Kax GaAs, napaMeTpbI peIIIeToK aKTHBHoM 06JIaCTR nJIOXO COrJIaCOBaHbI C napaMeTpaMH peIIIeTKH nOJl.JIO>KKH, n09ToMY H KBaHToBbIM BbIX0Jl. TaKHX CBeTOJl.HOJl.OB Jl.OBOJIbHO HeBbICOK.
3TH
MaTepHaJIbI HMelOT HH3KYlO
CTORMOCTb. CaMblMH Jl.eIIIeBbIMH CBeTOJl.HOJl.aMH KpacHoro CBeqeHHfI 6bIJIH CBeTOJl.HOJl.bI GaAsP C rOMoreHHblMH nepeXOJl.aMH, BblpameHHble Ha noJl.JIO>KKaX GaAs.
B
TO BpeMfi KaK xapaKTepRCTHKH CBeTOJl.HOJl.OB, H3rOTOBJIeHHbIX H3
MaTepHaJIOB ceMeMCTB GaAs H InP, CHJIbHO 3aBHCflT OT nOBepXHOCTHOM peKoM6HHau.HH H paCCOrJIaCOBaHHfI peIIIeTOK, Ha napaMeTpbI CBeTOJl.HOJl.OB Ha OCHOBe nOJIynpOBOJl.HRKOB ceMeMCTBa Gal'r 9TH flBJIeHHfI npaKTHqeCKH He BJIHflIOT. 3TO CBfl3aHO C TeM, qTO
1)
Jl.RCJIOKau.HH B HHTpHJl.HbIX COeJl.HHeHHflX THna Gal'r 06JIaJl.alOT 60JIee
2)
Jl.RCPCPY3RoHHafi Jl.JIRHa HOCRTeJIeM B MaTepRaJIaX TRna Gal'r 3HaqRTeJIb-
HR3KOM 9JIeKTpRqeCKOM aKTRBHOCTblO;
HO MeHbIIIe, qeM B nOJIynpOBOJl.HRKaX ceMeMCTB GaAs R InP. ECJIR CpeJl.Hee paccToflHRe Me>KJl.Y Jl.RCJIOKau.RflMR 60JIbIIIe Jl.RCPCPY3ROHHOM Jl.JIRHbI HOCRTeJIeM, B qaCTHOCTR Jl.blPOK, BepofiTHoCTb 6e3bI3JIyqaTeJIbHOM peKOM6RHaU.RR Ha 9TRX Jl.ecpeKTax cpaBHRTeJIbHO HeBbICOKa. ,lI.pyrafi MOJl.eJIb, 06bflCHflIOmafi BbiCOKYIO 9cpcpeKTRBHOCTb CBeTOJl.ROJl.OB InGal'r, npRHRMaeT BO BHRMaHRe CPJIYKTyaU.RR XRMRqeCKOrO COCTaBa TPOMHbiX TBepJl.bIX pacTBopoB, KOTopble JIOKaJIR3YlOT HOCRTeJIR, npenflTCTBYfl RX Jl.RCPCPY3RR K JIRHRflM Jl.RCJIOKau.RM.
BH6JIHOrpa«pHQeCKHH CDHCOK
Baraff G. A. and Schluter M. "Electronic structure, total energies, and abundances of the elementary point defects in GaAs" Phys. Rev. Lett. 55, 1327 (1985). Fitzgerald E. A., Watson G. P., Proano R. E., Ast D. G., Kirchner P. D., Pettit G. D., and Woodall J. M. "Nucleation mechanism and the elimination of misfit dislocations at mismatched interfaces by reduction of growth area" !. Appl. Phys. 65, 2220 (1989). Kazarinov R. F. and Pinto M. R. "Carrier transport in laser heterostructures" IEEE !. Quantum Electronics 30, 49 (1994). Longini R. L. and Greene R. F. "Ionization interaction between impurities in semiconductors and insulators" Phys. Rev. 102, 992 (1956). Matthews J. W. and Blakeslee A. E." "Defects in epitaxial multilayers. III. Preparation of almost perfect multilayers" !. Cryst. Growth 32, 265 (1976). Nakamura S., Mukai T., and Iwasa N, "Light-emitting GaN-based compound semiconductor device" US Patent 5,578,839 (1996). Nakamura S., Mukai T., and Iwasa N, "Light-emitting GaN-based compound semiconductor device" US Patent 5,747,832 (1998). Neugebauer J. and Van de Walle C. G. "Chemical trends for acceptor impurities in GaN" !. Appl. Phys. 85, 3003 (1999).
Bu6Jtuoepar/JU'leCKUU cnUCOK
157
Schubert E. F., Downey S. W., Pinzone C., and Emerson A. B. "Evidence of very strong inter-epitaxial-layer diffusion in Zn doped GaInPAs/InP structures" Appl. Phys. A 60, 525 (1995). Schubert E. F. and Hunt N. E. J. "15,000 hours stable operation of resonant-cavity light-emitting diodes" Appl. Phys. A 66, 319 (1998). Sugawara H., Ishikawa M., Kokubun Y., Nishikawa Y., Naritsuka S., Itaya K., Hatakoshi G., Suzuki M., "Semiconductor light emitting device" US Patent 5,153,889, issued Oct. 6 (1992). Walukiewicz W. "Fermi level dependent native defect formation: consequences for metal-semiconductor and semiconductor-semiconductor interfaces" 1. Vac. Sci. Technol. B, 6, 1257 (1988). Walukiewicz W. "Amphoteric native defects in semiconductors" Appl. Phys. Lett. 54, 2094 (1989). Walukiewicz W. "Defect formation and diffusion in heavily doped semiconductors" Phys. Rev. B 50, 5221 (1994). Watanabe H. and Usui A. "Light emitting diode" US Patent 4,680,602, issued July 14 (1987).
8.1. CJIOU pacmelca1tUf/. mOICa
159
f.naBa 8 YllPABJIEHHE TOKOM
3JIeKTpW·leCKHX rrO,D.JIO)KKax. B CTpyKTypax, BblpameHHbIX Ha rrpOBO,D.HmHX
PIiC. 8.1. BJIIiHHHe CJIOH paCTeKaHHH TOKa Ha BbIXO.D:HYJO MOIUHOCTb CBeTO.D:HO.D:OB: BH.D: cBepxy Ha CBeTO.D:IiO.D: 6e3 OKHa, 1i3JIyqeHlie Ha6JIJO.D:aeTCH TOJIbKO no nepliMeTpy BepXHero KOHTaKTa; 6 - BIi.D: cBepxy Ha CBeTO.D:IiO.D: C OKHOM (Nuese et aI.,
rrO,D.JIO)KKaX, TOK TeqeT rrpaKTHqeCKH BepTHKaJIbHO (T. e. rreprreH,D.HKYJIHPHO
1969)
CBeTO,D.110,D.Hble CTpyKTYPbI BblpaUOiBaIOT Ha rrpOBO,D.HIIl.HX JII160 Ha ,D.H-
rrJIOCKOCTH rrO,D.JIO)KKH). B
a-
CBeTO,D.HO,D.aX Ha ,D.H3JIeKTpHqeCKHX rrO,D.JIO)KKaX
TOK, KaK rrpaBHJIO, HarrpaBJIeH rOpH30HTaJIbHO (T. e. rrapaJIJIeJIbHO rrO,D.JIO)K-
B pa60Te (Nuese et aI., 1969) paCCMOTpeHbI CJIOH paCTeKaHHH TOKa, co-
Ke). DOCKOJIbKY MeTaJIJlI1qeCKHe OMHqeCKHe KOHTaKTbI Herrp03paqHble, HX
CTOHmHe H3 TPOHHbIX TBep,D.bIX paCTBopOB GaAsP H 6HHapHblx COe,D.I1HeHHH
pa3MepbI H pacrrOJIO)KeHHe OKa3bIBaIOT cymecTBeHHoe BJIHHHHe Ha BbIBO,D.
GaP, H orrpe,D.eJIeHbI Tpe60BaHHH K TaKHM CJIOHM. OKHa ,D.OJI)KHbI 06JIa,D.aTb
3TOH rJIaBe 6y,D.yr 06cY)K,D.aTbCH crroc06bI
HH3KHM y,D.eJIbHbIM corrpOTHBJIeHHeM, 60JIbIlIOH TOJImHHOH ,D.JIH YCHJIeHHH
yrrpaBJIeHHH TOKOM B pa3JIHQHbIX CTpyKTypax CBeTO,D.HO,D.OB C Il.eJIbIO rrOBbI-
3cpcpeKTa paCTeKaHHH TOKa H rrp03paqHOCTbIO ,D.JIH CHH)KeHHH rrOTepb Ha
IlIeHHH HX KBaHTOBorOBbIXO,D.a.
rrOrJIOmeHHe. .ll.JIH YMeHbIlIeHHH rrOTepb Ha rrOrJIOmeHHe B 3TOH pa60Te
H3JIYQeHHH H3 YCTpoHcTBa. B
rrpe,D.JIO)KeHO
YBeJIHqHTb
GaAs1-xP x (0,45
8.1. CJIou:pacTeKaHHH TOKa
< x :::;
KOHIl.eHTpaIl.HIO
cpoccpopa
B
TBep,D.OM
paCTBope
1) B CJIoe pacTeKaHHH TOKa, qTO BbIIlIe ero ,D.OJIH
B aKTHBHOH 06JIaCTH GaAs1-xP x (x = 0,45). DPH TaKOM COOTHOIlIeHHH KOHIl.eHTpaIl.HH cpoccpopa CJIOH paCTeKaHHH TOKa 6Y,D.eT 06JIa,D.aTb 60JIbIlIeH IlIHPHHOH 3arrpemeHHoH 30HbI, qeM aKTHBHaH 06JIaCTb. O,D.HaKO CBOHCTBa
B CBeTO,D.HO,D.e C TOHKHM BepXHHM 6apbepHbIM CJIOeM TOK HH)KeKTHpyeTCH B Ty QaCTb aKTHBHOH 06JIaCTH, KOTopaH pacrrOJIO)KeHa rro,D. BepXHHM 3JIeKTpO,D.OM. CJIe,D.OBaTeJIbHO, CBeT reHepHpyeTcH rrpeHMymecTBeHHO B 06JIaCTH rro,D. Herrp03paQHbIM MeTaJIJIHQeCKHM KOHTaKTOM, QTO Be,D.eT K HH3KOH BeJIHQHHe K03cp<jmIl.HeHTa OrrTHqeCKOrO BbIBO,D.a TaKoro CBeTO,D.HO,D.a. 3Ty rrp06JIeMY MO)KHO peIlIHTb rrpH rrOMOmH
CllDR pacmelwliuR mO/w, YBO,D.H-
CJIOeB paCTeKaHHH TOKa 6bIJIH paCCMOTpeHbI TOJIbKO KaqeCTBeHHO. TeopeTHqeCKHe OCHOBbI rrpHMeHeHHH 3THX CJIOeB B YCTpoHcTBax C JIHHeHHOH reoMeTpHeH KOHTaKTOB, KOTopble 6Y,D.YT 06cY)K,D.aTbCH B CJIe,D.YIOmeM pa3,D.eJIe, ,D.aHbI B pa60Te TOMrrcoHa (Thompson, 1980). CJIOH pacTeKaHHH TOKa HCrrOJIb3YIOTCH B cTpyKTypax 60JIbIlIHHCTBa CBeTO,D.HO,D.OB C pacrrOJIO)KeHHeM p-n-rrepexo,D.a (06JIaCTbIO H3JIyqeHHH) B BepxHeH qaCTH KpHCTaJIJIa -
CBe-
mero TOK B 06JIaCTH, pacrrOJIO)KeHHble 3a rrpe,D.eJIaMH BepxHero 3JIeKTpO,D.a.
TO,D.HO,D.bI AlGaAs (Nishizawa et aI., 1983; Moyer, 1988), GaP (Groves et
CAOU pacmelwliuR mOKa H OKliO (OKOlilibtU CAOU) CHHOHHMbI. TepMHH YKa3bIBaeT Ha TO, qTO ,D.aHHbIH CJIOH npoapattlibtU H qTO OR
aI., 1977; 1978a, 1978b) H AlInGaP (Kuo et aI., 1990;Sugawara et aI.,
«OKOHHbIH»
1991, 1992a, 1992b).
rrpe,D.Ha3HaQeH ,D.JIH rrOBbIIlIeHHH K03cpcpHIl.HeHTa OrrTHqeCKOrO BbIBO,D.a CBeTO,D.HO,D.a.
PHC. 8.2 CXeMaTHqHO HJIJIIOCTpHpyeT BJIHHHHe CJIOH paCTeKaHHH TOKa.
5e3 3Toro CJIOH
(pHC.
8.2,
a)
06JIaCTb HH)KeKIl.I1H
HOCHTeJIeH TOKa
DOJIe3Hble CBoHcTBa TaKHX CJIOeB 6bIJIH 06HapY)KeHbI eme Ha paHHHx
B aKTHBHYIO 06JIaCTb rrpaKTHqeCKH OrpaHHQeHa pa3MepaMH K(lHTaKTa. DpH
3Tarrax pa3BHTHH CBeTO,D.HO,D.OB. TaK, B pa60Te (Nuese et aI., 1969) 6bIJIO
,D.06aBJIeHHH CJIOH paCTeKaHHH 06JIaCTb HH)KeKIl.HH 3aMeTHO YBeJIHQHBaeTCH
rrOKa3aHO, qTO rrpHMeHeHHe CJIOeB paCTeKaHHH TOKa cymecTBeHHO rrOBbIIlIa-
(pHC. 8.2,6).
eT OrrTHQecKYIO MOmHOCTb CBeTO,D.HO,D.OB GaAsP. OKHO HBJIHeTCH rrepBbIM
CJIOH
rrOJIyrrpOBO,D.HHKOBbIM CJIOeM, pacrrOJIO)KeHHbIM Me)K,D.y BepXHHM 6apbepHbIM
Typax
CJIOeM H BepxHHM OMI1QeCKHM KOHTaKTOM. Ha pHC. 8.1 rrOKa3aHO BJIHHHHe
Ha pHC.
CJIOH pacTeKaHHH
TOKa.
vb
pHC.
8.1,
a
BH,D.HO,
qTO B CBeTO,D.HO,D.e 6e3
paCTeKaHHH
CBeTO,D.HO,D.OB 8.2,8 H 2
TOKa C
rrpHMeHHIOTCH
06JIaCTbIO
rrpeHMymecTBeHHO
H3JIyqeHHH,
rrOKa3aHbI CTpyKTYPbI ,D.ByX CBeTO,D.HO,D.OB
BH,D.HMOrO crreKTpa H3JIyqeHHH,
B
pacrrOJIO)KeHHOH
CTPYKcBepxy.
AlInGaP
BblpameHHbIe Ha rrO,D.JIO)KKaX GaAs. 06
3Toro CJIOH CBeT H3JIyqaeTCH TOJIbKO rro rrepHMeTpy BepxHero KOHTaKTa, a
HCrrOJIb30BaHHH GaP-CJIOeB pacTeKaHHH TOKa co06maJIOCb B pa60Tax Kyo
BBe,D.eHHe OKHa rr03BOJIHeT rrOJIyqHTb 60JIee pOBHyIO H HPKYIO H3JIYQaIOmyIO
11 ,D.p.
rrOBepXHOCTb, rroKa3aHHYIO Ha pHC. 8.1,6.
1991b). illHpHHa 3arrpemeHHoH 30HbI GaP,
(Kuo et aI.,
1990) H
(Fletcher et aI.,
E gGap =
1991a,
2,26 3B, rr03TOMY CJIOH
B.l. GltOU pacmelWHU51 mOKa
rlt. B. YnpaBlteHUe mOKOM
160
161
YXY,l(IlIHTbCH. npaB,l(a, on bIT nOKa3aJI, "ITO 3TH HBJIeHHH ,l(OBOJIbHO pe,l(KH: CBeTO,l(HO,l(bI AlinGaP /GaAs 06JIa,l(a1OT OTJIHqHOH Ha,l(e)KHOCTblO H BbICOKHM KBaHTOBblM BbIXO,l(OM H3JIyqeHHH. AJIbTepHaTHBHbIH no,l(XO,l( K nOBbIIlIeHHIO K03
x
B ,l(Hana30He 0 ~
AlxGal_xAs
x
~ 1 napaMeTpbl peIlIeTKH
COrJIaCOBaHbI
C nocToHHHOH peIlIeTKH
GaAs. WHpHHa 3anpemeHHoH 30HbI AlAs EgAIAs 2
r
p -KOHTlIKT
= 2,9 3B. npH
x> 0,45
AlxGal-xAs CTaHOBHTCH HenpHM030HHbIM nOJIynpOBO,l(HHKOM. K03
p+-GaAs
eHT nOrJIOmeHHH HenpHM030HHbIX nOJIynpOBO,l(HHKOB HaMHoro MeHbIlIe, qeM
AlGaAs p-THIIa
npHM030HHbIX. nOCKOJIbKY nOCTOHHHbIe peilleTOK OKHa AlGaAs H HH)Ke-
~!U"zIIi1)~~"
JIe)Kamero 6apbepHoro CJIOH COrJIaCOBaHbI, ,l(HCJIOKaUHH HeCOOTBeTCTBHH
aIcrHBHali o6naCTL AlInGaP HenernpOBaHHLIii
B CJIoe AlGaAs, B OTJIHqHe CJIOH paCTeKaHHH GaP, He B03HHKaIOT. O,l(HaKO B CJIoe paCTeKaHHH TOKa AlGaAs npOHCXO,l(HT 60JIee CHJIbHOe nOrJIOmeHHe II
N-KOHTaKT
II0.l\l10llOOl GaAs ncTHIIa
CBeTa,
qeM
B CJIoe GaP.
::ho CBH3aHO C TeM,
"ITO
AlGaAs HBJIHeTCH
TPOHHbIM TBep,l(bIM paCTBopOM, KOTOPOMY npHcymH 3aMeTHbIe
L-.N KOHTaKT -
KOHueHTpaUHH KaTHOHOB (aJIIOMHHHH H raJIJIHH), Be,l(ymHe K JIOKaJIbHbIM
PHC. 8.2. BJIHlIHHe CJIOll paCTeKaHHlI TOKa B CBeTO.!(Ho.!(ax AlInGaP Ha BeJIH"IHHY K03cpcpHUHeHTa OIITH"IeCKOrO BblBO,n,a: a - CBeTO.!(HO.!( 6e3 CJIOll; 6 - .!(o6aBJIeHHe B CBeTO.!(HO.!( OKHa «
H3MeHeHHHM IlIHpHHbI 3anpemeHHoH 30HbI. ::ho nOBbIIlIaeT BepOHTHOCTb nOrJIOmeHHH
CJIe,l(OBaTeJIbHO,
nOKa3aTeJIb XBOCTa Yp6axa y
AlGaAs
cymecTBeHHO BbI IlIe , qeM y GaP. XOPOiliO H3BeCTHO, "ITO MeTO,l(OM 3nHTaKCHH MeTaJIJIOOpraHHqeCKHX COe,l(HHeHHH
H3 ra30BOH
<pa3b1,
HBJIHlOmHMCH OCHOBHOH TeXHOJIOrHeH CO-
np03paqeH ,l(JIH H3JIyqeHHH KpacHoH, OpaH)KeBOH, )KeJITOH H 3eJIeHOH o6JIa-
3,l(aHHH KpHCTaJIJIOB CBeTO,l(HO,l(OB, OqeHb TPY,l(HO BbIpaCTHTb CTpyKTYPbI,
cTeH BH,l(HMOrO cneKTpa. BbIJIH H3rOTOBJIeHbI CBeTO,l(HO,l(bI C ,l(JIHHaMH BOJIH
CO,l(ep)KamHe aJIIOMHHHH.
H3JIyqeHHH BnJIOTb ,l(O 550 HM. BHHapHbIH ll()JIynpOBO,l(HHK GaP np03paqeH
eT nOBbIIlIeHHOH cnoco6HOCTblO K BCTynJIeHHIO B XHMHqeCKHe peaKUHH
,l(JIH
H HeJIerKO 06eCneqHTb nOJIHOe OTCYTCTBHe 3arpH3HeHHH HJIH ,l(e
1iw < E g .
nOBepXHOCTH nO,l(JIO)KKH npH BbIpamHBaHHH AI-co,l(ep)KamHX CJIOeB. JI:a)Ke
nOrJIOmeHHH GaP cJIa60 Bblpa)KeH «XBOCT Yp6axa»
B 06JIaCTH
Eho CBH3aHO C TeM, "ITO aJIIOMHHHH o6JIa,l(a-
KpoMe Toro, GaP OTHOCHTCH K KJIaccy HenpHM030HHbIX nOJIynpOBO,l(HHKOB,
caMbIe He3HaqHTeJIbHbIe npOTeqKH B TeXHOJIOrHqeCKOM 060pY,l(OBaHHH MO-
K03
ryT npHBeCTH K pa3pYIlIeHHIO AI-co,l(ep)KamHX nJIeHOK. n03TOMY Ha npaK-
CBeT MaJIO norJIOmaeTCH ,l(a)Ke B TOJICTOM CJIoe paCTeKaHHH TOKa.
THKe HCnOJIb3YlOT He qHCTbIH aJIIOMHHHH, a KOMnOHeHTbI C 60JIbIlIHM ero
O,l(HaKO Me)K,l(Y napaMeTpaMH peilleToKGaP H HH)KeJIe)KamHX 3nHTaK-
CO,l(ep)KaHHeM, HanpHMep AlAs. 3TO Be,l(eT K YXY,l(IlIeHHIO xapaKTepHCTHK
CHaJIbHbIX CJIOeB cymeCTByeT ,l(OBOJIbHO 60JIbiliOe HeCOOTBeTCTBHe. nOCTO-
CJIOH paCTeKaHHH TOKa AlGaAs H HX npH6JIH)KeHHIO K napaMeTpaM CJIOH
HHHble peilleTOK HH)KHerO H BepXHero 6apbepHbIx CJIOeB, a TaK)Ke aKTHlmOH
GaP. TaK)Ke CJIe,l(yeT OTMeTHTb, "ITO 3JIeKTpHqeCKHe CBOHCTBa AlAs H
06JIaCTH COrJIaCOBaHbI C nOCTOHHHOH peIlIeTKH GaAs nO,l(JIO)KKH. nOCKOJIbKY
AlGaAs C BblCOKHM CO,l(ep)KaHHeM aJIIOMHHHH HeCKOJIbKO xY)Ke, qeM y GaP.
nOCTOHHHaH peIlIeTKH GaP MeHbille nOCTOHHHOH GaAs npH6JIH3HTeJIbHO
O,l(HaKO HeCMOTpH Ha Bce 3TO, CBeTO,l(HO,l(bI AlinGaP CJIOHMH paCTeKaHHH
Ha
3,6 %,
cymecTByeT 60JIbiliaH BepOHTHOCTb B03HHKHOBeHHH npOHHKalO-
mHX ,l(HCJIOKaUHH H ,l(e
BepxHHH
6apbepHbIH CJIOH. MO)KHO npe,l(nOJIO)KHTb, "ITO ,l(HCJIOKaUHH, HrpalOmHe
TOKa AlGaAs BbmYCKalOT cepHHHo, H 3TO HanpaBJIeHHe npO,l(OJI)KaeT pa3BHBaTbCH. Ha pHC.
8.3
nOKa3aHO BJIHHHHe CJIOH paCTeKaHHH TOKa GaP p-THna
pOJIb ueHTpOB 6e3bI3JIyqaTeJIbHOH peKOM6HHaUHH, He 6Y,l(YT npHBO,l(HTb K
TOJImHHOH 2-15 MKM C y,l(eJIbHbIM conpOTHBJIeHHeM 0,05 OM'CM Ha BeJIH-
OCJIa6JIeHHIO BHYTpeHHero KBaHTOBoro BbIXO,l(a H3JIyqeHHH CBeTO,l(HO,l(OB,
qHHY K03
nOCKOJIbKY OHH pacnOJIO)KeHbI JIH60 B CJIoe pacTeKaHHH TOKa, JIH60 Ha ero
et aI., 1991a). npHBe,l(eHbI ,l(aHHble CbeMKH B MHKpOCKone co BCTpoeHHoH
rpaHHue C 6apbepHbIM CJIOeM, T. e. B,l(aJIH OT aKTHBHoH 06JIaCTH. O,l(HaKO
BH,l(eOKaMepoH.
eCJIH B XO,l(e pa60TbI YCTpOHCTBa 3TH ,l(HCJIOKaUHH npopaCTyT BHH3, 6JIH)Ke
H3JIyqeHHH npHMeHHJIOCb CKB03Hoe CKaHHpOBaHHe KpHCTaJIJIa CBeTO,l(HO,l(a
K aKTHBHOH 06JIaCTH, KBaHTOBbIH BblXO,l( H Ha,l(e)KHOCTb CBeTO,l(HO,l(OB MoryT
B O,l(HOM HanpaBJIeHHH, BKJIlOqaH ueHTpaJIbHYIO qaCTb KOHTaKTHOH nJIa-
6 <1>. E. IIly6epT
JI:JIH
nOJIyqeHHH
nOKa3aHHoro
np0
HHTeHCHBHOCTH
162
B.l. clloa pacme/WHUR mo/w
B. Ynpa81leHUe mO/WAf-
rll.
, - - - - - - cBerorom.D; AlInGaP co CJIOeM .Q.ac:-reE:amill TOKa GaP
~
,
4
~~"'--~------·To~aoKHa
266,7 X 266,7 MKM2
}
J-
1 0 t-iCBeTO.l(HO.D; AIInGaP co CJIOeM paCTeKaHHH TOKa H3 GaP
pll3MepbI KpHCTaJIJIa:
g
163
GaP = 15 MKM
lSI
~
lSI
•
!~
pe)I(HM IIOCTOHHHOro TOKa
1,0
HMJIYlThCHLIH pe)I(HM (CKB~OCTh
~ ~ 0,8 := f'ij ~ 0,6 [;i
§'
lSI
'
.....
0,2
]'
.:i 5:, i
04
::l!
o
300)
/,il
(I)
~
-
0,21117.-----------_ _
:' i /
...
, 0
20
10
101,6 152,4 203,2
254
IIoJIo)l(eHHe BH)'TpH KpHCTaJIJIa CBeTO.lvm.n;a, MKM PHC. 8.3. TIpOqJHJIH HHTeHCHBHOCTH H3JIY
40
30
IIpHMOH TOK
50,8
1
I I L ~ .1 OO~V~--L-~~~~~~~~~--~~ 0
.,/ 2 ../ ':_ •• _0"
o
5MKM 2MKM
50
60
I, MA
PHC. 8.4. 3aBHcHMoCTH BHeWHero KBaHTOBoro BbIXO,l(a H3JIY
paCTeKaHHH 6b1JIa paBHa 3 •
10 18
CM- 3 . Ha pHC. 8.5 rrOKa3aHa 3aBHCHMOCTb
KBaHTOBoro Bblxo.u.a .u.Ho.u.a OT TOJIllI.HHbl CJIOH paCTeKaHHH. BH.u.HO, qTO OrrTHMaJIbHaH TOJIllI.HHa OKHa JIeJKHT B .u.Harra30He 5-30 MKM. ,lJ.JIH CJIOeB
CTHHbI. I1CXO.u.H H3 Toro, qTO B JII060H 3a.u.aHHoH TO
8.4 rrpe.u.cTaBJIeHO BJIHHHHe 3
BHeIIIHHH KBaHTOBblH BbIXO.u. CBeTo.u.Ho.u.OB AlInGaP /GaAs C OKHOM H3 GaP. IIPH .u.OCTaTOqHO TOJICTblX CJIOHX pacTeKaHHH TOKa K03
pa60Tax
1992b) TOKa
CyraBapbl
rrpOBo.u.HJICH
Alo.7oGao.30As,
KOHu.eHTpau.HH
H
rrOHCK
.u.p.
(Sugawara
OrrTHMaJIbHOH
HCrrOJIb3yeMblx
JIempYIOllI.HX
B
rrpHMeceH
et
TOJIllI.HHbl
aI.,
CBeTo.u.Ho.u.ax p-THrra
B
1991,
CJIOeB
1992a,
paCTeKaHHH
AlInGaP /GaAs.
Alo.7oGao.30As
CJIoe
TOJIllI.HHOH 15 MKM 3
OqeHb
rrpHBo.u.HT K
TOHKHX TOMy,
CJIOeB
paCTeKaHHH
TOKa
qTO 60JIbiliaH u qaCTb CBeTa
(HJIH
HX
OT-
r:HepHpyeTc~
B 06JIaCTH, pacrrOJIOJKeHHOH rro.u. Herrp03paqHOH MeTaJIJIHqeCKOH rrJIaCTHHOH KOHTaKTa, KOTopaH MeiliaeT BbIBO.u.y H3JIyqeHHH 3a rrpe.u.eJIbl KpHCTaJIJIa CBeTo.u.Ho.u.a. IIpHMeHeHHe OqeHb TOJICTblX OKOH TaKJKe HMeeT CBOH He.u.oCTaTKH.
Bo-nepBblX, rrpH HCrrOJIb30BaHHH TOJICTblX CJIOeB paCTeKaHHH TO-
Ka Ha KpaHX KpHCTaJIJIOB CBeTo.u.Ho.u.OB 06pa3YlOTCH 06JIaCTH rrOBblIIIeHHOH rrJIOTHOCTH TOKa, YCHJIHBalOllI.He rrOBepXHOCTHYIO peKOM6HHaU.HIO H YMeHbIIIalOllI.He KBaHTOBblH BbIXO.u. CBeTo.u.Ho.u.OB. CJIOH paCTeKaHHH YCHJIHBaeTCH
BO-BmopblX, C POCTOM TOJIllI.HHbl
rrOrJIOllI.eHHe
B
3TOH
06JIaCTH
06JIa.u.alOllI.HX 3HeprHeH MeHbille IIIHpHHbl 3arrpellI.eHHOH 30HbI.
B-mpembUX,
OKHO 60JIbiliOH TOJIllI.HHbl YBeJIHqHBaeT OMHqeCKOe corrpOTHBJIeHHe .u.HO.u.a, qTO TaKiKe CHHJKaeT ero 3
B-ttemBepmblX, 60JIbiliaH
.u.JIHTeJIbHOCTb rrpou.ecca BblpallI.HBaHHH TOJICTbIX CJIOeB paCTeKaHHH TOKa MOJKeT rrpHBeCTH K .u.H
6*
FA. B. YnpaBJteHue mOKOM.
164 0,8
B.2. TeopuR. pacmeKaHUR. mOKa a BepXHHii KOHTaKT B q,opMe JlHHeiiHOH nOJlOCKII
CBeTO.lIlIO.ll AlInGaP
165
6 BepxHHii KOHTIlKT B q,opMe Kpyra
CJIoii: paCTeKllHllll TOKIl A1o;roGa0,30As p-nrna
p=3.10 18 CM- 3 ~
0,6
A=565HM
i><
BIIJI CBepxy
.:a :a.
':s: 0,4
~
~ 0,2
I
0,00
20
30
i~'--~---.;-_--v----./
To~a CJIOJl paCTeKllHllll TOKIl AlGaAs, MKM
Jo
""
~ 1-------;.
~I---~
g
J
J
x =LO=----P-ac-CTO--.L. - -OTlL..I1-ellTp-a":n:::o==Jlo~C-KII-x---1 lIHHe
BbIxo.u.a I13JIY'IeHI1f1. C03.u.aHI1e CJIOeB paCTeKaHI1H TOKa 'IaCTO CBfl3aHO CO 3Ha'II1TeJIbHMMI1 CTbIO. HarrpI1Mep, I13-3a 60JIbiliOrO y.u.eJIbHOrO COrrpOTI1BJIeHI1H BepxHero
~r---~--T----------,
g
B aKTI1BHYIO 06JIaCTb, 'ITO BbI30BeT CHmKeHI1e BHYTpeHHero KBaHTOBoro
J(r)
Jo
~
PHC. 8.5. 3aBHcHMoCTb KBaHTOBoro BbIXO.lla CBeTO.llHO.llOB AlInGaP/GaAs KpaCHoro CBeqeHHH, H3JIYQalOIIJ:HX CBeT C JJ:JIHHOH BOJIHbI 565 HM, OT TOJIIIJ:HHhI CJIOeB paCTeKaHHH TOKa Alo.70GaO.30As (Sugawara et aI., 1992a)
rrp06JIeMaMI1, oco6eHHO eCJII1 MaTepI1aJIbI 06JIa.u.aIOT HI13KOH rrpOBo.u.I1MO-
--:-_-y----./
J(x)
I
nO)1JIOlKKll
r=L~o--p-~-CTO-lIHH~-eOT~I1-ellTp--a":ID::::::HTaKT---a-r~
PHC. 8.6. CxeMhI CTpyKTyp CBeTOJJ:HO.llOB co CJIOHMH paCTeKaHHH TOKa C rrOJIOCKOBhIM (a) H C KpyrJIbIM (6) KOHTaKTaMH
6apbepHoro CJIOfi p-TI1rra paCTeKaHI1e TOKa B BepXHeM CJIoe p-TI1rra B CBeTo.u.I10.u.e InGaN/GaN 6y.u.eT O'IeHb CJIa6bIM. IIo.u.BmKHocTb .u.b1POK B HI1T" 2 pI1.u.ax III rpyrrrrbI 06bI'IHO paBHa 1-20 cM a I1X KOHueHTpaUI1f117 3 rv 10 CM- , rr03TOMY y.u.eJIbHoe COrrpOTI1BJIeHI1e TaKOrO MaTepI1aJIa Bce-
/B,
r.u.a 60JIbilie
1
OM·CM.
C mYflfleAbflblM.
B
pa60Te (Jeon et al.,
nepexo8oM.,
pacrrOJIO)j{eHHbIM
2001)
OrrI1CaH CBeTo.u.I10.u.
Ha.u. aKTI1BHOH
06JIaCTbIO
Pfl.u.OM C 6apbepHbIM CJIOeM p-TI1rra. CJIOH n-TI1rra cBepxy TYHHeJIbHOrO
CI1MMeTpI1I1 rrOKa3aHa TOJIbKO rrpaBafi rrOJIOBI1Ha JIa3epa, rro3ToMY JIeBbIH KpaH
KOHTaKTa
Ha
cxeMe
cooTBeTcTByeT UeHTPY rrOJIOCKOBOro JIa3epa.
IIpe.u.rroJIaraeTcfI, 'ITO Bce TO'IKI1
x
rro.u. MeTaJIJII1'IeCKI1M KOHTaKTOM
06JIa.u.aIOT o.u.I1HaKOBbIMI1 rrOTeHUI1aJIaMI1 11 rrJIOTHOCTflMI1 TOKa JIOJKKa flBJIfleTCfI 3KBI1rrOTeHUI1aJIbHOH
rrOBepxHOCTbIO.
(x
(Jo),
Tor.u.a
< r c)
a rro.u.-
rrJIOTHOCTb
TOKa 3a rrpe.u.eJIaMI1 KOHTaKTa orrpe.u.eJIfleTCfI BblpaJKeHI1eM
rrepexo.u.a o6eCrre'II1BaeT rrOrrepe'IHOe pacrrpocTpaHeHI1e TOKa B 06JIaCTI1 rro.u.
J(x)
BepXHI1M KOHTaKTOM. TaKI1M o6pa30M, B COCTaB CBeTo.u.I10.u.a C TYHHeJIbHbIM rrepexo.u.OM BXO.u.flT ,n;Ba OMI1'IeCKI1X KOHTaKTa n-TI1rra 11 HI1 o.u.Horo KOHTaKTa
=
2Jo
(8.1)
[(x - Tc) /Ls + v'2f
p-TI1rra. r.u.e
8.2. TeopHSI pacTeKaHHSI TOKa B
pa60Te TOMrrcoHa (Thompson,
1980)
.u.aHM TeOpeTI1'IeCKI1e OCHOBbI
moM. nOJ/.OCK080
8.6, a
B
paCTeKaHI1f1 TOKa, pacrrOJIOJKeHHbIH Bblilie
rrOKa3aHa cxeMa rrOrrepe'IHOrO
CTpyKTypy JIa3epa BXO.u.I1T CJIOH
p-n-rrepexo.u.a.
.u.JII1Ha paCTeKaHI1f1 TOKa:
t . nideal . kT
,
flBJIeHI1f1 paCTeKaHI1f1 TOKa B CJIoe, paCrrOJIQ)KeHHOM rro.u. 8epXflUM. KOflmaKrrOJIyrrpOBo.u.HI1KOBbIX JIa3epOB. Ha pI1C.
Ls -
113 C006paJKeHI1H
(8.2)
p. Jo ' e
3.u.ecb p -
y.u.eJIbHoe COrrpOTI1BJIeHI1e CJIOfi paCTeKaHI1f1 TOKa,
t-
TOJIlUI1Ha
3Toro CJIOfl, nideal -
K03CPCPI1UI1eHT HeI1.u.eaJIbHOCTI1 BOJIbTaMrrepHoH xapaK-
TepI1CTI1KI1 (06bI'IHO
1,05
< nideal < 1,35).
,L{aJIee 6y.u.YT o6cYJK.u.aTbcfI Mo.u.eJII1 .u.JIfi .u.Byx CPOPM KOHTaKTOB: noAOCK080
8.6, a)
11 KPY
8.6,6).
CHa'IaJIa paCCMOTpI1M
CJIY'IaH AUfleUflO
8.3. Bltuftftue ozpaftutteftuft mOKa
Fit. 8. Ynpa8lteftUe mOKOM
166
+
(x = re Ls) B e pa3 MeHhllle TOKa rro.D. MeTaJIJIHtleCKHM KOHTaKTOM. Tor.D.a HarrpH)KeHHe Ha rpaHHue OKHa 6Y.D.eT
KpalO 06JIaCTH pacTeKaHHH TOKa
~nHX
(8.10)
YpaBHeHHe
TeKaHHH TOKa rro
8
C8emOaUOaax
167
rr03BOJIHeT paCCqHTaTh Tpe6yeMYlO TOJIIII.HHY CJIOH pac3a.D.aHH~M
3HaqeHHHM Y.D.eJIhHOrO corrpOTHBJIeHHH 9Toro
TOKa. CorrpOTHBJIeHHe CJIOH pacTeKaHHH TOKa B rrOrrepeqHOM HarrpaBJIeHHH
Ls. OTMeTHM, qTO rrpH 60JIhlllHX r e , HCrrOJIh3YH rrpH6JIH)KeHHe In( 1 + x) ~ x, Bhlpa)KeHHe (8.10) MO)KHO yrrpOCTHTh.· TI09TOMY, KaK H O)KH.D.aJIOCh, rrpH re -+ 00 ypaBHeHHH (8.10) H (8.6) CTaHOBHTCH
orrpe.D.eJIHeTCH Bhlpa)KeHHeM
H.D.eHTHqHhIMH.
MeHhllle HarrpH)KeHHH rro.D. KOHTaKTOM B (nideal .
kT) / e
pa3. Pa3HocTh
HarrpH)KeHHH cooTBeTcTByeT rra.D.eHHIO HarrpH)KeHHH Ha CJIoe pacTeKaHHH
(8.3)
YnpaJKHeHHe. Bltuftftue ozpaftutteftuft mOKa 8 cmpyKmypax co CltOeM pacmeKaftUft npu Otteftb 8blCOKUX 3ftatteftUftx nltomftOcmu mOKa
B CJIoe pacTeKaHHH TOKa B BepTHKaJIhHOM
BHH3) cnOH paCTeKaHHH pacrrpe.n:enHeT TOK rro BceH rmOIUa.n:H p-n-rrepexo.n:a. O.n:HaKO
Ls R =p.-. t dy
TOK, TeKYIII.HH Qepe3
p-n-rrepexo.D.
CJIOH H .D.JIHHhI pacTeKaHHH
B CTpyKTypax
C BepTHKanbHhlM HarrpaBneHHeM TOKa (qepe3 KpHCTann cBepxy
rrpH BbICOKOH rrnOTHOCTH TOK CTpeMHTCH cKoHu.eHTpHpOBaTbCH B 06naCTH rro.n: OMH-
HarrpaBJIeHHH:
(8.4)
1= Jo· Lsdy.
qeCKHMH KOHTaKTaMH, qTO H rrOKa3aHO Ha pHC.
8.7, a
6.
H
Tpe6yeTcH 06bHCHHTb
9<jl<jleKT OrpaHHqeHHH TOKa rrpH BbICOKHX 3HaqeHHHX rrnOTHOCTH TOKa.
TIpHMeHHB 3aKOH OMa, HaH.D.eM COOTHOllleHHe
Ls T L d _ P . - . "0· s y-
a
nideal .
tdy
t,
PelllHB 9TO ypaBHeHHe OTHOCHTeJIhHO
t
= p.
kT
HeHHe
(8.6)
(8.2)
H
rrOJIyqHM
L; .Jo . __e----::-c= kT
(8.6),
(8.6)
PHC.
8.7.
CxeMa pacrrpe.n:eneHHH TOKa B CTpYKTypax co cnOHMH pacTeKaHHH TOKa
rrpH HH3KOM
06HapY)KHBaeM HX H.D.eHTHqHOCTh. YpaB-
.D.aeT B03MO)KHOCTh paCCqHTaTh Tpe6yeMYlO TOJIIII.HHY CJIOH pac-
(a)
H BbICOKOM
(6)
CJIOH H .D.JIHHhI paCTeKaHHH TOKa Ls· • Terreph rrepeH.D.eM K paccMoTpeHHIO CTpyKTyphI CBeTO.D.HO.D.a C KpycAblM
8.6,6).
PaccY)K.D.aH aHaJIOmqHhIM 06pa30M, BhIBe.D.eM,
ypoBHe TOKa. fIpH OqeHb BhlCOKHX rrnOTHOCTHX TOKa
pacTeKaHHe TOKa CHH)KaeTCH, qTO Be.n:eT K rrOBhllIIeHHIO rrnOTHOCTH TOKa rro.n: BepxHHMH KOHTaKTaMH
(6).
3KBHBaneHTHaH cxeMa CBeTo.n:Ho.n:a co cnoeM pacTeKaHHH
TeKaHHH TOKa rro 3a.D.aHH~M 3HaqeHHHM Y.D.eJIhHOrO corrpOTHBJIeHHH 9Toro
KOHmaKmOM (pHC.
8
e
nideal .
CpaBHHB ypaBHeHHH
6
(8.5)
TOKa (8)
PelIIeHHe 1. .ll.nHHa 06naCTH paCTeKaHHH TOKa orrpe.n:enHeTCH 3aBHCHMOCTbIO ex
J.0- 1/ 2 ,H3
U
B~pa)KeHHe .D.JIH HaXO)K.D.eHHH rrOrrepeqHOrO corrpOTHBJIeHHH 06JIaCTH OT
YMeHblIIaeTCH H TOK co6HpaeTCH rro.n: BepXHHM KOHTaKTOM.
KpaH KOHTaKTa .11.0 KpaH CJIOH pacTeKaHHH TOKa:
PemeHHe
R
=
J
p. -AI dr
J
=
2.
)
I
p.
t . 271" • r
dr
=
_Pt . 271"
.In(l + Ls . rc
ex
L•
I1HTYHTHBHoe o6bHcHeHHe 9<jl<jleKTa OrpaHHqeHHH TOKa BbITeKaeT
H3 9KBHBaneHTHOH cxeMbI,rroKa3aHHoH Ha pHC.
rc+ L •
rc+L.
Ls
KOTOPOH cne.n:yeT, qTO rrpH rrOBhllIIeHHH rrnOTHOCTH TOKa BeJIHqHHa
8.7,8.
fIPH OqeHb BhlCOKHX 3HaqeHH-
HX rrnOTHOCTH TOKa corrpoTHBneHHH, rrpe.n:cTaBnHIOIUHe p-n-rrepexo.n:, YMeHblIIaIOTcH,
(8.7)
B TO BpeMH KaK corrpOTHBneHHH, COOTBeTCTBYIOIUHe cnoIO paCTeKaHHH TOKa, OCTaIOTCH HeH3MeHHbIMH. 3TO rrpHBo.n:HT K TOMY, qTO TOK cTpeMHTCH H.n:TH OT BepxHero
rc
KOHTaKTa BepTHKanbHo BHH3.
TOK B BepTHKaJIhHOM HarrpaBJIeHHH qepe3
p-n-rrepexo.D.
B CJIoe pacTeKaHHH
MO)KHO HaHTH H3 ypaBHeHHH
1= Jo [71" (Ls
+ re)2 -
7r.
r~]
8.3. = Jo
.7r.
Ls . (Ls
+ 2re).
(8.8) ,
BJIHHHHe OrpaHHQeHHH TOKa B CBeTO,lJ;HO,lJ;aX Ha
H30JIHpylO~Hx
nO,lJ;JIOlKKaX
)lJIH CBeTO.D.HO.D.HhIX Me3aCTpYKTYP, BhlpaIII.eHHhIX Ha .D.H9JIeKTpHqeCKHX
I1crrOJIh3YH 3aKOH OMa, rrOJIyqHM
rrO.D.JIO)KKaX, xapaKTepHO HBJIeHHe OrpaHHQeHHH TOKa. TIpHMepaMH CBeTO-
-P- . In ( 1 + -L. ) t . 271" rc
. Jo . 7r . Ls· ( Ls +) 2r e =
PelllHB 9TO ypaBHeHHe OTHOCHTeJIhHO
t = p.
t,
nideal .
e
kT .
(8.9)
.D.HO.D.OB C Me3aCTpYKTypaMH HBJIHIOTCH CBeTO.D.HO.D.hI InGaN/GaN Ha caIIqmpoBhlx IIO.D.JIO)KKax.
B
HHX KOHTaKT p-THmi 06hIQHO pa3MeIII.aeTCH Ha
BepxHeH rrOBepXHOCTH Me3aCTpYKTYPhI, a KOHTaKT n-THIIa HaH.D.eM
L~ (r e + ~s ) In ( 1 + ~:). (Jo· nidea~. kT)·
Ha 6y
CJIoe n-THIIa, paCIIOJIO)KeHHOM rro.D. Me3acTpYKTYPOH. 9TO IIPHBO.D.HT K TOMY,
(8.10)
QTO IIO KpalO Me3aCTpYKTYPhI, Ha rpaHHue C KOHTaKTOM n-THrra, IIJIOTHOCTh TOKa CTaHOBHTCH B~llle, QeM B COCe.D.HHX 06JIaCTHX;
Tit. 8.
168
Ynpa8lteliUe mOKOM,
a
8.3.
Bltu5lliue OepaliWleliU5l mOKa 8 C8emOaUOaax
169
6 B conpOTHBJIeHHe } KOHTaKTa
H30lIIIJlYlOlUali
nOJlllOlKKlf
PHC.
8.8.
I
Vj
V = Rv· 10
conpOTHBJIeHHe
•
Ie dx ~ dx ~ ::~~a
x=O Hanp8BJIeHHe x
yqHTbIBaIOTCH
CJIOeB
n-
r.ll.e
Ry
• [exp
(eVjlkT) - 1] + Vj,
(B.12)
(conpOTHBJIeHuHe B BepTHKaJIbHOM HarrpaBJIeHHH)
onpe.ll.eJIHeTCH
CYMMOH conpOTHBJIeHHH CJIOH p-THna H KOHTaKTa p-THna 3JIeMeHTa nJIow.a.lI.H wdx: BJIHlIHHe OrpaHHQeHHlI TOKa B GaN CBeTo,nHo,ne C Me3acTpYKTypOH, Bblpa"
IlI,eHHOM Ha ,nH:'lJIeKTpHQeCKOH 1I0,nJIO)KKe H3 COllpOTHBJIeHHH 6apbepHhlx CJIOeB
n-
(a)
Rv = pp.
H 3KBHBaJIeHTHall cxeMa, COCTOllIll,all
t
wdx
(6)
3.l1.eCb
Pp
H
Pc -
B.B, a
npe.ll.CTaBJIeHO nOnepeqHOe CeqeHHe Me3acTpYKTypbI CBe-
TO.ll.HO.ll.a, Bblpaw.eHHoii Ha .lI.H3JIeKTpHqeCKOii 1I0.ll.JIOJRKe. I1HTYHTHBHo MOJRHO IIpe.ll.nOJIOJRHTb, qTO OrpaHHqeHHe TOKa qepe3p-n-nepexo.ll. npoHCxO.ll.HT
B.B,6
110 KpaIO Me3acTpYKTYPbI, qTO H H306paJReHo. Ha pHC.
IIOKa3aHa
3KBHBaJIeHTHaH cxeMa MO.ll.eJIH, yqHTbIBaIOw.eii conpOTHBJIeHHe KOHTaKTa p-THna H conpOTHBJIeHHH 6apbepHblx CJIOeB
n-
(B.11),
B COOTHOllIeHHe HHe:
k~· (Pc + pp. tp)· Jo·
(B.12) \ no x
exp
dx
2 2 +~. (d'f)2] + d Vj '; dx kT dx dx
HanpHJReHHe B CJIoe n-THrra B.lI.OJIb HarrpaBJIeHHH
x,
TOr.ll.a
dx.
dV -
BeJIHqHHa
TOKa, H.lI.yw.ero BHH3 qepe3 O.ll.HH H3 .lI.HO.ll.OB, orrpe.ll.eJIHeTCH BblpaJReHHr.ll.e
Jo -
CqHTaH, qTO 3JIeKTpOCTaTHqeCKHe nOTeHIl.HaJIbI Bcex TOqeK MeTaJIJIHqeCOCe.ll.HHX Y3JIOB, nOJIyqaeM
d V2 = pn . Jo. dx tn
[exp
(eVj) - 1]. kT
~:
·Jo·
[exp(~~)
=
-1].
(B.14)
TIPH ero peweHHH OrpaHHqHMCH CJIyqaeM npHMoro cMew.eHHH .lI.HO.ll.a, B KO-
kTIe.
TOPOM HanpHJReHHe Ha p-n-nepexo.ll.e HaMHoro npeBblwaeT BeJIHqHHY Tor.ll.a
Vj» kTle
rrJIOTHOCTb TOKa HaCblw.e-
CKoro KOHTaKTa p-THna paBHbI, H npHMeHHH rrpaBHJIO KHpxro<pa .lI.JIH .lI.ByX
2
=
2
.lI.pyr OT .lI.pyra.
na.ll.eHHe HanpHJReHHH Ha conpOTHBJIeHHH n-CJIOH .lI.JIHHOii
- 1]· w dx,
H nO.ll.CTaBJIHH pe3YJIbTaT
(eklfTi) . [d
H p-THna. B npHBe.ll.eHHOii
HeCKOJIbKO Y3JIOB, pacnOJIOJReHHbIX Ha paCCTOHHHH
eM d1 = J o . [exp (eVjlkT) HHH qepe3 p-n-nepexo.ll..
(B. 13)
rrOJIyqaeM CJIe.ll.YIOw.ee .lI.H
cxeMe p-n-nepeXO.ll.bI 3aMeHeHbI Ha H.lI.eaJIbHble .lI.HO.ll.bI. B MO.ll.eJIH nOKa3aHbI
V-
+ Pc· -. w dx
Y.ll.eJIbHble conpOTHBJIeHHH CJIOH H KOHTaKTa p-THna. 'uBa-
JR.lI.bI .lI.H
1
.
-p-
H p-THlla, COllpOTHBJIeHHlI KOHTaKTa p-THlla
H H,neaJIbHbIX ,nHO,nOB, COOTBeTCTBYIOIlI,HX p-n-IIepexo,naM
TIYCTb
conpOTHBJIeHHH
TIa.ll.eHHe HanpHJReHHH Ha p-n-nepeXO.ll.e
H pe3HCTopax p-THna MOJRHO HaiiTH H3 BblpaJReHHH
H CJIOli p-TH11a
mmeHHe } HanplllKeHHlI =
nOCJIe.ll.YIOw.HX paCqeTaX
H p-THna H KOHTaKTa p-THna.
=}
exp(eVjlkT)>> 1.
(B.15)
,UaJIee rrpe.ll.nOJIOJRHM, qTO na.ll.eHHe HarrpHJReHHH Ha nOCJIe.ll.OBaTeJIbHOM conpOTHBJIeHHH p-THna H conpOTHBJIeHHH KOHTaKTa TaKJRe ropa3.l1.0 60JIbWe
kTle,
T.
e.
(Pc + pp. tp ). Jo·
exp
kT k~ »e-. (elf.)
(B.16)
(B. 11)
dV = dVj. B 3TOM peweHHe ypaBHeHHH (B. 11 ). B pa60Te
TIpHMeHHH 3TH YCJIOBHH K THnHqHbIM CBeTO.ll.HO.ll.aM InGaN/GaN, yrrpocTHM ypaBHeHHe
(B.14),
HCnOJIb3YH .lI.Onyw.eHHH
(B.15)
H
(B.16):
Kor.ll.a corrpOTHBJIeHHe CJIOH p-THna 6JIH3KO K HyJIIO, cJIyqae MOJRHO HaiiTH aHaJIHTHqeCKOe TOMncoHa (Thompson,
19BO)
2
d Vj
dx 2
npHBe.ll.eHbI paCqeTbI .lI.JIHHbI paCTeKaHHH TOKa
+ ~ . ( dVj ) 2 _ kT
dx
- (Pc
kT
Pn
+ pp. t p ) tn
e
B .lI.HO.ll.aX, Bblpaw.eHHblx Ha rrpOBO.ll.HW.HX n0.ll.JIOJRKax. TOMrrCOH B CBOHX paccYJR.lI.eHHHX yqHTbIBaJI Y.ll.eJIbHOe conpOTHBJIeHHe BepxHero 6apbepHoro
PewHB ypaBHeHHe
CJIOH p-THna, HO npeHe6peraJI Y.ll.eJIbHbIM conpOTHBJIeHHeM HHJRHerO 6a-
- (kT Ie) (x I L 8).
pbepHoro CJIOH n-THrra. O.ll.HaKO B CBeTO.ll.HO.ll.aX InGaN/GaN COnpOTHBJIeHHe CJIOH n-THna CJIYJRHT o.ll.Hoii H3 npHqHH BJIHHHHH OrpaHHqeHHH TOKa, He6peraTb TaKJRe HeJIb3H, rrOCKOJIbKY B TaKHX CBeTO.ll.HO.ll.aX OHH .lI.OBOJIbHO nOB OKa3bIBaIOT CHJIbHOe BJIHHHHe Ha OrpaHHqeHHe TOKa.
OTHOCHTeJIbHO
Vj,
nOJIyqHM
r.ll.e
J(O) -
nJIOTHOCTb TOKa Ha KpaIO CJIOH p-THna,
lWH.UR m01W,
Vj (x) = Vj(O) ~
J = Jo exp ( e Vj I kT),
J(x) = J(O) . exp (-xl L 8 ),
n03TOMY ero HeJIb3H He yqHTbIBaTb. CorrpOTHBJIeHHHMH CJIOeB p-THna rrpe60JIbWHe. ,UaJIbWe 6Y.ll.eT nOKa3aHO, qTO corrpOTHBJIeHHH CJIOeB 060HX TH-
(B.17)
TIO.ll.CTaBHB Vj B BblpaJReHHe .lI.eM pellIeHHe .lI.H
(B.17)
Haii-
(B.1B)
L8 - 8JluH.a pacme-
KOTopaH onpe.ll.eJIHeT paccToHHHe, Ha KOTOPOM nJIOTHOCTb
TOKa YMeHbwaeTcH B e pa3 no cpaBHeHHIO C nJIOTHOCTbIO TOKa Ha KpaIO
FA. B. Ynpa8AeHue mOKOM
170 CJIOH, T.e.
J(Ls)/J(O)
=
l/e .
B.3. BAUJl.HUe OepaHUlf.eHUJI. mOKa
8
c8emo8uo8ax
171
6 1 , 2 r - - - - - - - - - - - - - -_ _ _~
.lI.JIFlHY pacTeKaHFlH TOKa MO)KHO HaHTFI Fl3
BbIpa)KeHFlH
(8.19) 113 ypaBHeHFlH
(8.19)
....;-
.. 0,8
CJIe)l.yeT, qTO pacrrpe)l.eJIeHFle TOKa 3aBFlCFlT OT TOJI-
:s:
5 ~ 0,6
IlI.FlHbI 9rrFlTaKCFlaJIbHOrO CJIOH FI OT CBOHCTB MaTepFlaJIa • .lI.JIH YMeHbIlIeHFlH BJIFlHHFlH OrpaHFlqeHFlH TOKa 6ycpepHbIH CJIoii" n-TFIrra )l.OJI)KeH 06JIa)l.aTb
&l
HFl3KFlM y)l.eJIbHbIM corrpOTFlBJIeHFleM FI )l.OCTaTOqHO 60JIbiliOH TOJIIlI.FlHOH. 113 ypaBHeHFlH
(8.19)
MO)KHO C)l.eJIaTb y)l.FlBFlTeJIbHbIH BbIBO)l.: YMeHbUl.eHUe
y)l.eJIbHOrO corrpOTFlBJIeHFlH KOHTaKTa p-TFIrra FlJIFI CJIOH p-TFIrra ycuAuBa-
I =20MA T=300K Ls=550MKM
em BJIFlHHFle OrpaHFlqeHFlH TOKa. TIpFi HU3K.UX 3HaqeHFlHX corrpOTFlBJIeHFlH KOHTaKTa FI 6apbepHoro CJIOH p-TFIrra Ha6J11o)l.aeTCH CFlJIbHOe BJIFlHHFle orpaHFlqeHFlH TOKa. 3TOMY MO)KeT rrOMeIlIaTb TOJIbKO BbICOKaH rrpOBO)l.FlMOCTb
o
6ycpepHoro CJIOH n-TFIrra, rrpFlBO)l.HIlI.aH K 60JIbiliOH BeJIFlqFlHe K09CPCPFlII.FleHTa
t n / Pn.
B
100
200
300
400
500
600
PaCCTOlIHHe OT KpWl Me3aCTp)'KTYPLI
CBeTO)l.FlO)l.aX InGaN/GaN cyMMa corrpOTFlBJIeHFlH KOHTaKTa FI
x,
700
800
MKM
CJIOH p-TFIrra MO)KeT 6bITb 60JIbille corrpOTFlBJIeHFlH 6apbepHoro CJIOH, oco6eHHO eCJIFI Ha pFiC.
tn
MaJIO.
8.9
rrpe)l.CTaBJIeHbI 9KcrrepFlMeHTaJIbHbIe )l.aHHbIe, rrOJIyqeHHbIe
rrpFl Fl3yqeHFIFI 9cpcpeKTa C)KaTFlH TOKa B
CBeTO)l.FlO)l.aX InGaN/GaN, BhIpa-
IlI.eHHbIX Ha carrcpFlpoBbIX rrO)l.JIO)KKaX (Guo, Schubert,
2001).
Ha pFiC.
8.9, a
rrpFlBe)l.eH MFlKPOCHFIMOK OIITFlqeCKOrO Fl3JIyqeHFlH CBeTOAFlO)l.a InGaN. OH
PHc.8.9. MHKpocHHMoK H3JIyqeHHlI CBeTOAHOAa Ha OCHOBe Me3aCTpYKTypbI InGaN/GaN, BblpameHHoro Ha H30JIHpYIOmeH camilHpOBOH rrOAJIO)KKe (a), cBeToAHoA oCHameH rrOJIOCKOBbIM KOHTaKTOM p-THrra pa3MepoM 800 MKM X 100 MKM (a); TeOpeTHQeCKall H 3KcrrepHMeHTaJIbHall 3aBHCHMOCTH HHTeHCHBHOCTH H3JIYQeHHlI OT paccTollHHlI OT Kpall Me3acTpYKTypbl (6) (Guo, Schubert, 2001)
C)l.eJIaH co CTOPOHbI carrcpFlpoBoH rrO)l.JIO)KKFI, Ha KOTOPOH OTqeTJIFIBO BFI)l.HO Fl3MeHeHFle FlHTeHCFlBHOCTFI rOJIy60ro CBeqeHFlH CBeTO)l.FlO)l.a: qeM )l.aJIbille OT KpaH Me3acTpYKTYPbI, TeM cJIa6ee CBeqeHFle. Ha pFiC.
8.9,6 Fl306pa)KeHbI
TeOpeTFlqeCKaH FI 9KcrrepFlMeHTaJIbHaH 3aBFlCFlMOCTFI FlHTeHCFlBHOCTFI Fl3JIyqeHFlH OT paccToHHFlH )1.0 KpaH Me3acTpYKTypbI. .lI.JIH rrocTpoeHFlH TeopeTFlqeCKOH 3aBFlCFlMOCTFI FlCrrOJIb30BaHHO BbIpa)KeHFle
(8.18),
COrJIaCOBaHHoe
KOHTaKTHoro corrpOTFlBJIeHFlH IlIFlpFlHa KOHTaKTa n-TFIrra, Wn-contact. )l.OJI)KHa 6bITb, rro KpaHHeH Mepe, paBHa )l.JIFlHe rrepe)l.aqFl KOHTaKTa, KOTopaH CJIe)l.yeT Fl3 MO)l.eJIFI JIFlHFIFI rrepe)l.aqFl, FlCrrOJIb3yeMoH )l.JIH orrpe)l.eJIeHFlH OMFlqeCKFIX KOHTaKTOB (Schroder,
1998).
C 9KcrrepFlMeHTaJIbHbIMFI )l.aHHbIMFI. BFI)l.HO, qTO rrpFl )l.JIFlHe pacTeKaHFlH TOKa
550
MKM rrOJIyqaeTCH xopOillee COrJIaCOBaHFle 9KcrrepFlMeHTaJIbHbIX
FI TeOpeTFlqeCKFIX pe3YJIbTaTOB. CorrpOTFlBJIeHFlH KOHTaKTOB FI y)l.eJIbHhIe corrpOTFlBJIeHFlH CJIOeB GaN p-TFIrra B MOIll.HbIX CBeTO)l.FlO)l.aX He )l.OJI)KHbI 6hITb BbICOKFlMFI, rrOCKOJIbKY 9TO MO)KeT rrpFlBeCTFI
K
CFlJIbHOMY HarpeBY )l.FlO)l.OB.
C
)l.pyroH CTOPO-
HhI, FlMeHHO 9TFI corrpOTFlBJIeHFlH OCJIa6JIHIOT BJIFlHHFle OrpaHFlqeHFlH TOKa. CJIe)l.yeT OTMeTFlTb, qTO rrpFl pa3pa60TKe HOBbIX CBeTO)l.FlO)l.OB C 60JIbilieH rrJIOIll.a)l.bIO, FlMeIOIlI.FlX 60JIbiliFie pa3MepbI KOHTaKTOB, )l.a)Ke rrpFl YCJIOBFIFI YJIyqIlIeHFlH xapaKTepFiCTFIK MaTepFlaJIOB 6e3 YCOBepIlIeHCTBOBaHFlH CPOpMhI
6
6
P-KOHTaKT
n-KOHTaKT
.
KOHTaKTOB npo6AeMbl, CB5l3aHHble C BAU5lHUeM oapaHUlieHU5l mOK.a, Moaym
Bcmamb OlieHb ocmpo. TaK, HOBbIe KOHTaKTbI K p-06JIaCTFI MoryT FlMeTb CPOPMY rpe6eHKFI C IlIFlPFlHOH 3y6beB MeHbille )l.JIFlHbI paCTeKaHFlH TOKa TIpFi
pa3Mepax CBeTO)l.FlO)l.OB
MeHbille
Ls
BJIFlHHFleM
orpaHFllIeHFlH
Ls.
TOKa
..., c--
IiIIII ,, ",<,~",~
,~
MO)KHO rrpeHe6pe%. Ha pFiC.
8.10
rrOKa3aHa cxeMa CTpyKTYPbI FI cpoTorpacpFlH rro.rrocKoBoro
KOHTaKTa rpe6eHqaTOH CPOPMbI. O)l.HOPO)l.HOCTb FlH)KeKII.FIFI TOKa B aKTFlBHYIO 06JIaCTb )l.OCTFIraeTCH rrpFl rrOMOIll.FI KOHTaKTa p-TFIrra, IlIFlpFlHa KOToporo
Wp-contact. MeHbille )l.JIFlHbI paCTeKaHFlH TOKa. .lI.JIH 06eCrreqeHFlH HFl3Koro
PHC. 8.10. CTpYKTypa rrOJIOCKOBOro KOHTaKTa B cpopMe rpe6eHKH, o6eCrreQHBaIOmero OAHOPOAHOCTb TOKa (a); BHA cBepxy (6); cpoTorpacpHlI CBeTOAHOAa InGaN, MOHTHpyeMoro MeTOAOM rrepeBepHYToro KpHCTaJIJIa (8) (LED Museum, 2004)
B.5. CAoii, OepaftUttUBalO/J1uii mOK
FA. B. YnpaBAeftUe mOKOM
172
173
6 HH3KHH
ypoBeHh J(O
- - - -
cpeWUlH ypOBeHhr_Ji_(,-O.<...)_ _---,
IPn1tn«
~
g 0,5
ppltp
I
g PHC. 8.11.
CTpYKTypa
CBeTO.n.Ho.n.a
C nOnepeqHOH
H cxeMa pacnpe.n.eJIeHHH TOKa npH
HH)KeKUHeH HOCHTeJIeH
Pn «Pp (a);
3KBHBaJIeHTHaH cxeMa
J
TOKa
O,OO!-_.J........_--======~===-l
(6)
Ls
Ls
PaCCTOHHHe OT Kpax n-KOHTaKTa
8.4. CTPYKTYPbI C nonepellHoii
HH1KeK~Heii HOCHTeJIeii
TOKa
PHc.8.12.
Pacnpe.n.eJIeHHe nJIOTHOCTH TOKa npH
L
x
BbICOKOM,
cpe.n.HeM
H HH3KOM
3HaqeHHHX TOKa, HOpMHpoBaHHblx Ha HaqaJIbHYIO nJIOTHOCTb TOKa, B CBeTo.n.Ho.n.ax C nOnepeqHoH· HH)KeKUHeH HOCHTeJIeH TOKa. ilpe.n.nOJIaraeTCH, qTO conpOTHBJIeHHe
8.11, a
Ha pHC.
nOKa3aHa cTpyKTypa CBeTo,n:Ho,n:a C nOnepeqHOH HH-
)KeKUHeH HOCHTeJIeH TOKa.
B
CJIOH n-THna HaMHoro MeHbIlIe conpOTHBJIeHHH CJIOH p-THna
TaKHX ,n:Ho,n:ax TOK TetIeT tIepe3 6apbepHbIe
CJIOH 060HX THnOB B ropH30HTaJIbHOM HanpaBJIeHHH.
B
H,n:eaJIbHOM cJIytIae
HenpaKTHtIHbIM), Be,n:eT K pOCTy conpOTHBJIeHHH CBeTo,n:Ho,n:OB. TI03TOMY
H3JIytIeHHe B CBeTo,n:Ho,n:ax 6y,n:eT B036Y)K,n:aTbcH TOJIbKO B 06JIaCTHX Me)K,n:y
nOBbIIIIaTb HHTeHCHBHOCTb H3JIytIeHHH JIytIIIIe He YBeJIHtIeHHeM pa3MepOB
KOHTaKTaMH, KOTopbIe npH 3TOM He 6y,n:YT MeIIIaTb BbIBO,n:y CBeTa. ECJIH
CTpyKTYPbI, a C nOMOIUbID ,n:HO,n:HbIX MaTpHU.
conpOTHBJIeHHe CJIOH n-THna
Pn/tn (Pn
H
tn -
y,n:eJIbHOe conpOTHBJIeHHe
H TOJIIUHHa CJIOH n-THna) HaMHoro MeHbIIIe conpOTHBJIeHHH CJIOH
pp/tp ,
TOK nOH,n:eT cKopee tIepe3 n-CJIOH, tIeM tIepe3
p-THna 6y,n:eT Ha6JIID,n:aTbCH HanpaBJIeHHH p-n-nepexo,n:a.
3Toro no,n: KOHTaKTOM HOCTb TOKa B
8.11, 6
Ha pHC.
P-CJIOH. B
p-THna
8.5. CJIoii, orpaHHIIHBalOm.Hii TOK
pe3YJIbTaTe
60JIee BbICOKaH nJIOT-
B
Tpa,n:HUHOHHbIX CBeTo,n:Ho,n:ax Ha OCHOBe ,n:BOHHbIX reTepeCTpYKTYP
nOKasaHa 3KBHBaJIeHTHaH cxeMa, nOJIe3HaH ,n:JIH KOJIH-
C MaJIbIMH BepXHHMH H 60JIbIIIHMH HH)KHHMH KOHTaKTaMH, HOCHTeJIH, HH-
tIeCTBeHHoro aHaJIH3a CBeTo,n:Ho,n:OB C nOnepetIHOH HH)KeKUHeH HOCHTeJIeH
)KeKTHpyeMbIe B aKTHBHyID 06JIaCTb tIepe3 BepxHHH KOHTaKT, B OCHOBHOM
B
TOKa..
3TOH
cxeMe
nJIOTHOCTb TOKa qepe3
npe,n:nOJIaraeTCH,
p-n-nepexo,n:
qTO
J(O).
KpaID
KOHTaKTa
p-THna
no,n: HHM )Ke H CKanJIHBaIDTCH. OtIeBH,n:Ho, tITO Henp03patIHbIH MeTaJIJIHtIe-
AHaJIHTHqeCKOe peIIIeHHe,
CKHH KOHTaKT CHJIbHO npenHTcTByeT BbIBO,n:y H3JIytIeHHH, B036Y)K,n:aeMoro
nOJIytIeHHOe B COOTBeTCTBHe C ,n:aHHOH 3KBHBaJIeHTHOH cxeMOH H nOKa3aH-
B aKTHBHOH 06JIaCTH, tITO 3HatIHTeJIbHO CHH)KaeT K03
Hoe Ha pHC. et aI.,
8.12,
paBHa
no
HMeeT CJIe,n:YIDIUHH BH,n: (Joyce, Wemple,
1970;
Rattier
2002):
J(x) = J(O) . exp( -x/L s ),
(8.20)
ro BbIBo,n:a CBeTo,n:Ho,n:a. nJIH peIIIeHHH 3TOH np06JIeMbI npHMeHHIDT JIH60 TOJICTbIH CJIOH paCTeKaHHH TOKa,
3TOT CJIOH
nona,n:aHHID B aKTHBHyID 06JIaCTb, pacnOJIO)KeHHYID Henocpe,n:CTBeHHO nOA
r,n:e
2Va
HHM, tITO n03BOJIHeT CYIUeCTBeHHO nOBblCHTb KBaHTOBbIH BbIXO,n: H3JIYtIeHHH
(8.2~)
CBeTo,n:Ho,n:a. Ha pHC.
0) = J(O) - nJIOTHOCTb TOKa no KpaID KOHTaKTa. TIoKa3aHo (Rattier et aI., 2002), qTO Va - HanpH)KeHHe aKTHBaUHH, BeJIHtIHHa KOTOporo COCTaBJIHeT HeCKOJIbKO kT/ e, HanpHMep 50-75 MB.
3,n:eCb
J(x
=
nJIH 06eCneqeHHH paBHoMepHoro B036Y)K,n:eHHH H3JIytIeHHH B 3a30pe Me)K,n:y KOHTaKTaMH )KeJIaTeJIbHO HMeTb 60JIbIIIYID ,n:JIHHy cna,n:a 3KcnOHeHTbI
JIH60 3anHpaIDIUHH CJIOH.
OTBO,n:HT HOCHTeJIH TOKa B CTOPOHbI OT BepXHero KOHTaKTa, npenHTCTBYH HX
Ls.
3Toro MO)KHO ,n:06HTbCH JIH60 BbICOKOH CTeneHbID JIerHpOBaHHH 6a-
pbepHblx CJIOeB, JIH60 YBeJIHtIeHHeM HX TOJIIUHHbI. CYIUeCTByeT TeH,n:eHUHH YBeJIHtIHBaTb pa3MepbI CBeTo,n:Ho,n:OB ,n:JIH ,n:OCTH)KeHHH 60JIbIIIOH MOIUHOCTH
8.13
npe,n:CTaBJIeHa cxeMa CTpyKTYPbI CBeTo,n:Ho,n:a C 3anH-
paIDIUHM CJIOeM. 3anHpaIDIUHH CJIOH, pa3MepbI KOToporo npH6JIH3HTeJIbHO TaKHe )Ke, KaK y MeTaJIJIHtIeCKOrO KOHTaKTa, pacnOJIaraeTCH Ha,n: BepxHHM 6apbepHbIM CJIOeM. 3TOT CJIOH, HMeIDIUHH npOBo,n:HMOCTb n-THna, BCTpaHBaeTCH B MaTepHaJI C npoBo,n:HMOCTbID 06pa30M
p-n-nepexo,n:
nOKa3aHO Ha pHC.
p-THna.
C
HanpaBJIHeT TOK BOKpyr OrpaHHtIHBaIDIUero CJIOH, KaK
8.13.
3anHpaIDIUHe CJIOH tIaCTO
aOpaUfuBaHuR.
anumaKCUaJlbHOeO
TIo 3TOH TeXHOJIOrHH ,n:BoHHaH reTepOCTpYKTypa H TOHKHH
L,ecJIH
3anHpaIDIUHH CJIOH n-THna BblpaIUHBaIDTCH Ha O,n:HOH no,n:JIO)KKe. TIoCJIe
He HCnOJIb3YIDTCH OtIeHb TOJICTble 6apbepHble CJIOH (tITO MO)KeT 6bITb BeCbMa
3Toro no,n:JIO)KKa co C
H3JIytIeHHH . O,n:HaKo YBeJIHtIeHHe paccToHHHH Me)K,n:y KOHTaKTaMH
r
Dt. 8. YnpaBJtenue mOKOM
174
3aIIHpalOnnIii: errOR n-TIma errOR paCTeKaHHlI TOKa p-THna BepXlIHii 6apLepHIdii errOR p-nma
i\BORHIIlI rerepoC"l)"KIYpa
aKTHBHIIlI o6rraCTL
3epKaJIO Ep3ITa
HIDKIIHii 6apLepHLIR errOR n-nma
Du6Jtuoapal/JuttecKuU cnUCOK
175
a HOHHoe JlerHpOBaHHe CJlOeB KHCJlOPO.n:OM HJlH BO.n:OPO.n:OM. ITOCKOJlbKY B Jla3epaX C KOHTaKTaMH 60JlbWOM: nJlOUI.a.n:H CYUI.eCTBeHHOM: CTaHOBHTCH BeJlHqHHa nOnepeqHOrO conpOTHBJleHHH, rJly6HHa HOHHoro JlerHpOBaHHH HMeeT KOHeqHble npe.n:eJlbl.
n-nma
BH6JIHOrpa
PHC. 8.13. CBeToJJ:HoJJ: c OrpaHHqHBaIOIll.HM CJIOeM n-THTIa, pacTIOJIOJKeHHbIM Ha BepxHeM 6apbepHoM cJIoe. 113JIyqeHHe CBeTa HCXOJJ:HT H3 06JIaCTeH, He TIOKPblTbIX HeTIpO3paQHblM BepXHHM OMHQeCKHM KOHTaKToM. CBeToJJ:HoJJ: TaKoro THTIa H3rOTaBJIHBaeTCf! MeToJJ:oM 9TIHTaKCHaJIbHOrO JJ:opaIll.HBaHHf!: TIOCJIe CPOpMHpOBaHHf! 3aTIHpaIOIll.ero CJIOf! TIOJJ:JIOJKKa BbIHHMaeTCf! H3 POCTOBOH KaMepbI H TIoJJ:BepraeTCf! TpaBJIeHHIO, TIOCJIe Qero CHoBa TIorpYJKaeTCf! B 9TIHTaKCHaJIbHYIO CHCTeMY JJ:JIf! JJ:opaIll.HBaHHf! CJIOf! paCTeKaHHf! TOKa POCTOBOM: KaMepbI H no.n:BepraeTCH TpaBJleHHIO. CTpaBJlliBaeTCH nOqTH BeCb BepXHHM: CJlOM: 3a HCKJlIOqeHHeM 06J1aCTH, BbI.n:eJleHHOM:
HanpHMep
CBeTo.n:Ho.n:OB, pa60TaIOUI.HX B CHCTeMax CBH3H.
B CBeTo.n:Ho.n:ax
AlinGaP B KaqeCTBe 3anHpaIOUI.HX CJlOeB npHMeHHIOTCH
CJlOH GaAs n-THna, KOTopble pa3MeUI.aIOTCH Ha BepXHHX 6apbepHbIX CJlOHX AlinGaP. )1.0CTOHHCTBO TaKHX CTpyKTyp B TOM, qTO CJlOH AlinGaP H GaAs COrJlaCOBaHbI no napaMeTpaM peweTOK. )1.JlH CeJleKTHBHoro 2KH.n:KOCTHOro TpaBJleHHH HcnOJlb3YIOT XHMHqeCKHe peareHTbI, pa3pywaIOUI.He TOJlbKO GaAs H HHKaK He BJlHHIOUI.He Ha AlinGaP (Adachi, Oe,
B
1983).
nOBepxHocTHo-H3J1yqaIOUI.HX Jla3epaX C BepTHKaJlbHbIMH pe30HaTopa-
MH .n:JlH HanpaBJleHHH TOKa K aKTHBHOM: 06J1aCTH, pacnOJlO2KeHHOM: Me2K.n:y 3epKaJlaMH Jla3epa, TaK2Ke npHMeHHIOTcH 3anHpaIOUI.He CJlOH. O.n:HaKo .n:JlH HX
Adachi S. and Oe K. "Chemical etching characteristics of (001) GaAs" I. Electrochem. Soc. 130, 2427 (1983). Choquette K. D., Geib K. M., Ashby C. 1. H., Twesten R. D., Blum 0., Hou H. Q., Follstaedt D. M., Hammons B. E., Mathes D., and Hull R. "Advances in selective wet oxidation of AlGaAs alloys" IEEE I. Sel. Top. Quantum Electron. 3, 916 (1997). Fletcher R. M., Kuo C. P., Osentowski T. D., Huang K. H., and Craford M. G. "The growth and properties of high performance AIInGaP emitters using lattice mismatched GaP window layers" I. Electron. Mater. 20, 1125 (1991a). Fletcher R. M., Kuo C. P., Osentowski T. D., and Robbins V. M. "Light-emitting diode with an electrically conductive window" US Patent 5,008,718 (1991 b). Groves W. O. and Epstein A. S. "Epitaxial deposition of III-V compounds containing isoelectronic impurities" US Patent 4,001,056 (1977). Groves W.O., Herzog A. H., and Craford M. G. "Process for the preparation of electroluminescent III-V materials containing isoelectronic impurities" US Patent Re. 29,648 (1978a). Groves W.O., Herzog A. H., and Craford M. G. "GaAsP electroluminescent device doped with isoelectronic impurities" US Patent Re. 29,845 (1978b). Guo X. and Schubert E. F.. "Current crowding and optical saturation effects in GalnN/GaN light-emitting diodes grown on insulating substrates" Appl. Phys. Lett. 78, 3337 (2001). Guo X., Li Y.-L., and Schubert E. F. "Efficiency of GaN/GalnN light-emitting diodes with interdigitated mesa geometry" Appl. Phys. Lett. 79, 1936 (2001). Jeon S.-R., Song Y.-H., Jang H.-J., Yang G. M., Hwang S. W., and Son S. J. "Lateral current spreading in GaN-based light-emitting diodes utilizing tunnel contact junctions" Appl. Phys. Lett. 78, 3265 (2001). Joyce W. B. and Wemple S. H. "Steady-state junction-current distributions in thin resistive films on semiconductor junctions (solutions of \7 2 11 = ±eV ) J. Appl. Phys. 41, 3818 (1970). Kuo C. P., Fletcher R. M., Osentowski T. D., Lardizabal M. C., Craford M. G., and Robins V. M. "High performance AlGalnP visible light emitting diodes" Appl. Phys. Lett. 57,2937 (1990). LED Museum, www.Iedmuseum.org (2004). Moyer C. D. "Photon recycling light emitting diode" US Patent 4,775,876 (1988). Nishizawa J., Koike M., and Jin C. C. "Efficiency of GaAlAs heterostructure red light-emitting diodes" I. Appl. Phys. 54, 2807 (1983). Nuese C. J., Tietjen J. J., Gannon J. J., and Gossenberger H. F. "Optimization of electroluminescent efficiencies for vapor-grown GaAsP diodes" I. Electrochem Soc.: Solid State Sci. 116, 248 (1969).
176
FA. 8. YnpaBAenue mOICOM
Rattier M., Bensity H., Stanley R. P., Carlin J.-F., Houdre R., Oesterle U., Smith C. J. M., Weisbuch c., and Krauss T. F. "Toward ultra-efficient aluminum oxide microcavity light-emitting diodes: Guided mode extraction by photonic crystals" IEEE J. Selected Topics in Quant. Electron. 8, 238 (2002). Schroder D. K. Semiconductor Material and Device Characterization (John Wiley and Sons, New York, 1998). Sugawara H., Ishakawa M., and Hatakoshi G. "High-efficiency InGaAIP/GaAs visible light-emitting diodes" Appl. Phys. Lett. 58, 1010 (1991). Sugawara H., Ishakawa M., Kokubun Y.,· Nishikawa Y., Naritsuka S., Itaya K., Hatakoshi G., Suzuki M. "Semiconductor light-emitting device" US Patent 5,153,889, issued Oct. 6 (l992a). Sugawara H., Itaya K., Nozaki H., and Hatakoshi G. "High-brightness InGaAlP green light-emitting diodes" Appl. Phys. Lett. 61, 1775 (1992b). Steigerwald D. A., Rudaz S. L., Thomas K. J., Lester S. D., Martin P. S., Imler W. R., Fletcher R. M., Kish Jr. F. A., Maranowski S.A. "Electrode structures for light-emitting devices" US Patent 6,307, 218 (2001). Thompson G. H. B. Physics of Semiconductor Laser Devices (John Wiley and Sons, New York, 1980).
fJIaBa 9 CTPYKTYPbI C BbICOKHM K03~~HII.HEHTOM OllTHQECKOrO BbIBO,lJ;A nOCKOJIbKY rrOJIyrrpoBo~HHKH 06JIa~aIOT BbICOKHMH rrOKa3aTeJIHMH rrpeJIOMJIeHHH, CBeT, rra~aIOmHH Ha rpaHHlI.Y rrOJIyrrpoBo~HHK-B03~yX rro~ ~o CTaTOt{HO 60JIbIIIHM yrJIOM, rrpaKTHt{eCKH rrOJIHOCTbIO OTpa)KaeTCH. 113 3aKOHa CHeJIJIHyca (HHor~a Ha3bIBaeMoro 3aKOHOM CHeJIJIH) MO)KHO HaHTH BeJIHt{HHY KpHTHt{eCKoro yrna rrOJIHOrO BHYTpeHHero OTpa)KeHHH.
B pe3YJIb-
TaTe rrOJIHOrO BHYTpeHHero OTpa)KeHHH CBeT KaK 6bI rrorra~aeT B JIOByiliKy JIOKaJIH3yeTcH BHyTpH rrOJIyrrpoBo~HHKa. JIoKaJIH30BaHHoe TaKHM 06pa30M H3JIyt{eHHe rrorJIOmaeTCH H ~e
BbIXO~ aKTHBHOH 06JIaCTH MeHbilie 100%, HBJIeHHH rreperrOrJIOmeHHH H3JIyt{eHHH B aKTHBHOH 06JIaCTH 6Y~YT HeMHHyeMo CHH)KaTb KBaHToBbIH BblXO~
CBeTO~Ho~a. nOrJIOmeHHe CBeTa Ha MeTaJIJIHt{eCKHX KOHTaKTax HBJIHeTCH eme O~HHM MexaHH3MOM CHH)KeHHH K03
Bneul1-luu KBanmoBbLu BbLxo8 u3JtyttenUJl CBeTO~Ho~a orrpe~eJIHeTCH rrpoH3Be~eHHeM Bnympenne20 KBanmOB020 BbLxo8a '1]int H Koaq)(pUl{uenma onmUtteCK020 BbLBo8a '1]extract: '1]ext = '1]int • '1]extract·
. (9.1)
OTCIO~a BH~HO, 'ITO K03
9.1.
rr.~. CBeTO~Ho~a.
llOrJIom,eHHe nOJIynpoBOAHHKaMH H3JIyqeHHB
c aHeprHeH KBaHTa MeHbme mHpHHbI 3anpem,eHHoH 30HbI .lI.JIH rrOJIyt{eHHH BbICOKHX 3Hat{eHHH K03
H
rrpe~OTBpameHHH
rrOrJIOmeHHH CBeTa IIIHpHHa 3arrpemeH-
HOH 30HbI Bcex rrOJIyrrpoBo~HHKOBbIX CJIOeB KpOMe aKTHBHoro CJIOH ~OJI)K Ha 6bITb 60JIbilie 3HeprHH <poToHa. 9Toro MO)KHO ~OCTHt{b rrpHMeHeHHeM
~BOHHbIX reTepOCTpYKTYP, ~OrrOJIHHTeJIbHbIX CJIOeB H ~pyrHx CTPYKTYP,
r 178
FJI. 9. CmpYKmYPbl C 8blCOKUM K03tjJtjJuu.ueHmoM onmUtteCKOeO 8bl80aa
KOTopble 6Yl1.YT onHcaHbI l1.aJIee.
B 3TOM
pa311.eJIe 06cY)Kl1.aeTC5I nOrJIOIlI.eHHe
nOJIynpOBOl1.HHKaMH H3JIyqeHH5I C 3HeprHeH MeHbIIIe IIIHpHHbI 3anpeIlI.eHHOH
179
9.1. 3Hepeueu K8aHma MeHbUle UlUPUHbl aanpew,eHHOU aOHbl
l1.JI5I H3JIyqeHH5I C 3HeprHeH MeHbIIIe IIIHpHHbI 3anpeIlI.eHHOH 30HbI onHCbIBaeTC5I 3KCnOHeHlI.HaJIbHO y6bIBaIOIlI.eH 3aBHCHMOCTbIO
30HbI.
C
a = a g . exp [(E
nepBoro B3rJI5Il1.a MO)KeT nOKa3aTbC5I, qTO nOJIynpOBOl1.HHK cnoc06eH
nOrJIOIlI.aTb H3JIyqeHHe TOJIbKO TOrl1.a,
KOrl1.a 3HeprH5I
IIIHpHHbI ero 3anpeIlI.eHHOH 30HbI, H qTO OH np03paqeH l1.JI5I CPOTOHOB C 3HeprH5IMH MeHbIIIe 3Toro 3HaqeHH5I. Ol1.HaKO
(9.3)
- Eg) / EUrbach]'
CPOTOHOB 60JIbIIIe
B l1.eHCTBHTeJIbHOCTH
nOJIy-
rl1.e
ag
-
npH
E
=
3KCnepHMeHTaJIbHO
Eg ,
EUrbach -
onpel1.eJIeHHbIH
K03CPCPHlI.HeHT
xapaKTepHCTHQeCKa51 3HeprH5I
nOrJIOIlI.eHH5I
(3HepeUfl Yp6axa) ,
npOBOl1.HHK norJIOIlI.aeT TaK)Ke H CPOTOHbI C 3HeprHeH MeHbIIIe IIIHpHHbI ero
onpel1.eJI5IIOIlI.a51 HaCKOJIbKO CHJIbHO nal1.aeT K03CPCPHlI.HeHT nOrJIOIlI.eHH5I CPO-
3anpeIlI.eHHOH 30HbI, npaBl1.a, C 60JIee HH3KHM K03CPCPHlI.HeHTOM norJIOIlI.e-
TOHOB, 06JIal1.aIOIlI.HX 3HeprHeH MeHbIIIe llIHpHHbI 3anpeIlI.eHHOH 30HbI.'
B
HH5I. Ha pHC.
9.1
CXeMaTHqHO nOKa3aHbI 3aBHCHMOCTH K03cpcpHlI.HeHTa norJIO-
pa60Te
Yp6axa
(Urbach,
1953)
npHBel1.eHbI
3KcnepHMeHTaJIbHble
l1.aHHble 0 «XBOCTOBbIX» 3KcnOHeHlI.HaJIbHbIX YQaCTKaX 3aBHCHMOCTH
a(E),
IlI.eHH5I Hl1.eaJIbHOrO np5lM030HHoro nOJIynpOBOl1.HHKa H peaJIbHOrO nOJIynpo-
nOJIYQeHHble npH pa3Hblx TeMnepaTypax. TaM )Ke nOKa3aHo, QTO xapaK-
BOl1.HHKa OT 3HeprHH CPOTOHOB.
TepHCTHQeCKa51 3HeprH5I npH6JIH3HTeJIbHO paBHa TenJIOBOH 3HeprHH Pa60Ta HOKca (Knox, 3aBHCHMOCTH XBOCTOB
kT.
1963) np011.0JI)KHJIa HCCJIe11.0BaHH5I TeMnepaTypHoH a(E). OCHOBHOH BbIBOl1. 3TOH pa60TbI 3aKJIIOQaeTC5I B
TOM, QTO nOrJIOIlI.eHHe CPOTOHOB C 3HeprHeH MeHbIIIe IIIHpHHbI 3anpeIlI.eHHOH 30HbI MaTepHaJIa, KaK npaBHJIO, CBHl1.eTeJIbCTByeT 06 YQaCTHH CPOHOHOB B
3KCIIOHe~am.HIdH CIIaA IIorno~eHIDI «<XBOCT Yp6axa»)
a
=
H3JIYQaTeJIbHOH peKOM6HHall.HH. OTCIOl1.a MO)KHO Cl1.eJIaTb 3aKJIIOQeHHe, QTO
a g exp[(E-Eg)IEUrbach] IIorno~eHHe
B H)(eam.HOM
EUrbach
= kT.
(9.4)
IIOJIYIIPOBO.&HHKe
a oc (E - Eg)112 (MJI IIPJIM030HHhIX
norno~eHHe
CBo60AHhlMH
'~ HOCHTeIDlMH '-
--- ---
IIOJIYIIPOBO.&HHKOB)
a
oc
(E - Eg)2 (MJI HerrpJIM030HHIdX IIOJIYIIPOBO.&HHKOB)
-----------
9.1.
Tyall.HH nOTeHlI.HaJIa BHyTpH CTpyKTYPbI BbI3bIBaIOT JIOKaJIbHble H3MeHeHH5I 5IM IIIHpHHbI 3arrpeIlI.eHHOH 30HbI.
B
pe3YJIbTaTe 3Toro MoryT B03HHKHYTb
YCJIOBH5I l1.JI5I Me)K30HHbIX nepeX011.0B C nOrJIOIlI.eHHeM H H3JIYQeHHeM CPOTO3aBHcHMoCTb K09<j><j>HUHeHTa nOrJIOmeHHlI nOJIynpOBo.n:HHKa C lIIHPHHOH
3anpemeHHoH 30HbI
Eg
OT 9HeprHH <j>OTOHOB.
«XBocToBall»
9KcnOHeHUHaJIbHali
HOB, 06JIal1.aIOIlI.HX 3HeprHeH
Eg.
TIpH eme MeHblIIeH 9HeprHH <j>OTOHbI B OCHOBHOM nOrJIOmalOTCH
E
< Eg.
qaCTb onpe.n:eJIlieT nOrJIOmeHHe <j>OTOHOB C 9HeprHlIMH, HeMHoro MeHblIIHMH HJIH paBHbIMH
E < Eg
MO)KeT npOHCXOl1.HTb H no l1.PYrHM MexaHH3MaM. HanpHMep, JII06ble CPJIYKKpaeB 3HepreTHQeCKHX 30H llOJIyrrpOBOl1.HHKa, QTO npHBOl1.HT K CPJIYKTyall.H-
3HepIWI
PHC.
Ol1.HaKO, KpoMe CPOHOHHOH peKoM6HHall.HH, llOrJIOIlI.eHHe CPOTOHOB C
Horo pacnpel1.eJIeHH5I JIerHpYIOIlI.HX npHMeceH H JIOKaJIbHbIX H3MeHeHHH XHMHQeCKOrO COCTaBa rrOJIynpOBOl1.HHKOB, COCT05lIlI.HX H3 Tpex HJIH QeTblpex
cBo6o.n:HbIMH HOCHTeJIlIMH
KOMnOHeHTOB.
B
Hl1.eaJIbHOM nOJIynpOBOl1.HHKe 3aBHCHMOCTb K03cpcpHlI.HeHTa norJIOIlI.e-
H3MeHeHH5I nOTeHlI.HaJIa BCJIel1.CTBHe HepaBHOMepHoro pacrrpel1.eJIeHH5I
HH5I OT 3HeprHH CPOTOHOB npH HH3KHX TeMnepaTypax onHCbIBaeTC5I cJIel1.Y-
JIerHpYIOIlI.HX npHMeceH MO)KHO Oll.eHHTb rrpH nOMOIlI.H CTaTHCTHQeCKOrO
1971)
pacnpel1.eJIeHH5I nyaccOHa. TaK, B pa60Te IIIy6epTa H l1.p. (Schubert et aI.,
IOIlI.HMH Bblpa)KeHH5IMH (Pankove,
I):
1997) a
<X
(E - E g )I/2
l1.JI5I np5lM030HHbIX nOJIynpOBOl1.HHKOB,
(9.2a)
a
<X
(E - Eg)2
l1.JI5I Henp5lM030HHbIX nOJIynpOBOl1.HHKOB.
(9.26)
l1.JIf{ onpel1.eJIeHH5I BeJIHQHHbI TaKHX cpJIYKTyall.HH rrOTeHlI.HaJIa npel1.-
JIO)KeHO HCrrOJIb30BaTb COOTHOIIIeHHe
2
hE . Urbach -
U
B
Hl1.eaJIbHOM nOJIynpOBOl1.HHKe npH 3HeprHH CPOTOHOB, paBHoH llIHpHHe
ero 3anpeIlI.eHHOH 30HbI, paBeH
HyJ/.10.
E = Eg ,
K03CPCPHlI.HeHT Me)K30HHOro nOrJIOIlI.eHH5I
HHTeHcHBHoCTb nOrJIOIlI.eHH5I B
1) CM. pYCCKoe H3.n:aHHe KHHrH
[1].
peaJlbHOM
nOJIynpOBOl1.HHKe
rl1.e
rs
-
2e N-)· . I(N+ 3e .V D + A .
rs -3/4 37r . e ,
(9.5)
pal1.Hyc aTOMa npHMeCH I).
,lJ.JI5I Oll.eHKH H3MeHeHH5I nOTeHlI.HaJIa H3-3a JIOKaJIbHbIX BapHall.HH XHMHQeCKOrO COCTaBa rrOJIynpOBOl1.HHKOB MO)KHO HCrrOJIb30BaTb 6HHOMHaJIbHOe paCnpel1.eJIeHHe.
B
pa60Te IIIy6epTa H l1.p. (Schubert et aI.,
1) CM.TeOpeTHqeCKHe pa60TbI
[2,3].
1984)
l1.JI5I
Fit. 9. CmpYICmYPbt C 8btCOICUM ICo3Q}(fJUupe1lmOM onmuttecICOeO 8bt808a
180
orrpe~eJIeHHR BeJIHqHHbI TaKHX cpJIYKTyaUHH rrOTeHUHaJIa rrpe~JIQ)KeHo HC-
hE r~e
X -
rrapaMeTp
rrOCTORHHaR
_ dEg d X
alloy
XHMHqeCKOrO
X·(1-X) [ 4a 3 · Vexc ] O
•
COCTaBa
rrOJIyrrpoBo~HHKa,
peIIIeTKH
ueHTpaUHRX MO)l{eT 6bITb
1/2
(9.6)
TPOHHbIX
COe~HHeHHH,
Vexc- 3KCHTOHHbIH
06beM
BeJIHqHHa 3HepreTHqeCKOrO rrOKa3aTeJIR «XBOCTa Yp6axa» B 3aBHCHMO-
a(E) Orrpe~eJIReTCR
TeM, KaKOH H3 rrepeqHCJIeHHbIX Bblilie MeXaHH3MOB
rrpe06JIa~aeT. 9HeprHR Yp6axa 6HHapHbIX coe~HHeHHH GaP H GaAs MeHbIIIe ee 3HaqeHHH ~JIR TPOHHbIX TBep~bIX pacBopoB THrra AIGaAs H GaAsP. BeJIHqHHa XBOCTa TaK)I{e 3aBHCHT OT CTerreHH JIerHpOBaHHR rrOJIyrrpoBo~
rropR~Ka 10
9.1 rrpHBe~eHbI
rrpH-
HOCHTeJIRMH ~JIR HeCKOJIbKHX THrrOB MaTepHaJIOB. B Ta6JIHue 0603HaqeHbI
a-
caHT TH HM. A.
(Wiley, DiDomenico,
1970),
1983; Wlukiewicz ate ex: n· >..2.
ner,
T a 6 JI H 1.1, a 9.1.
B-
et aI.,
Hocpcpe (loffe,
(Casey, Panish,
1980); 0 -
K03$$HUHeHTbI rrOrJIOmeHHH
2002 - CM. [6]), 61978), 2 - (Kim, Bon-
pe3YJIbTaTbI 3KCTparrOJIRUHH rro
CBeTa cBo6o,nHb1MH HOCHTeJIHMH
(afe) ,nJIH HeC.KOJIbKHX IIOJIYIIPOBO,nHHKOB n-THIIa
HHKa: qeM CHJIbHee JIerHpOBaHHe, TeM 60JIbilie 3HeprHR Yp6axa.
MaTepHaJI
.aJIHHa BOJIHbI, MKM
KOHlJ:eHTpaUHH 3JIeKTpOHoB, 10 18 CM- 3
GaN
1,0
I
40 (a, 8)
.lI.JIR CPOTOHOB C 3HeprHeH HaMHoro MeHbilie IIIHpHHbI 3arrpeI.IJ.eHHOH 30HbI rrpe06JIa~alOI.IJ.HM MexaHH3MOM rrOrJIOI.IJ.eHHR CTaHOBHTCR n02Jt0/4eftUe cpomOftOB CBo6ooftblMU ftOCumeJtRMU.
CM-I. B Ta6JI.
6JIH3HTeJIbHbIe 3HaqeHHR K03CPCPHUHeHToB rrOrJIOI.IJ.eHHR CBeTa cB060~HbIMH pa60TbI
aO-
3JIeKTpOHHO- ~bIPOqHOH rrapbI. CTH
H3 3TOrO Bblpa)l{eHHR CJIe~yeT, qTO K03CPCPHUHeHT rrOrJIOI.IJ.eHHR H3JIyqeHHR
CB060~HbIMH HOCHTeJIRMH ~JIR ~aHHoro MaTepHaJIa rrpH BbICOKHX HX KOB-
rrOJIb30BaTb COOTHOIIIeHHe
L.J.
181
9.2. !£80Ullbte eemepocmpYICmYPbt
npH TaKOM rrOrJIOI.IJ.eHHH 3HeprHR
afe, CM
-I
cB060~HbIX HOCHTeJIeH B03paCTaeT, H OHH rrepexo~RT B B036y)l{~eHHoe COCTORHHe. y13 3aKOHa coxpaHeHHR KBa3HHMrrYJIbCa CJIe~yeT, qTO TaKoe
GaP
1,0
I
22 (6, 8)
GaAs
1,0
I
3,0 (8)
H3MeHeHHe COCTORHHR ~OJI)I{HO COrrpOBO)l{~aTbCR JIH60 HcrrYCKaHHeM aKy-
InP
1,0
1,1
2,5 (e)
CTHqeCKHX HJIH OrrTHqeCKHX CPOHOHOB, JIH60 pacceRHHeM Ha rrpHMeCRX.
OqeBH~HO, qTO HHTeHCHBHOCTb rrOrJIOI.IJ.eHHR cB060~HbIMH HOCHTeJIRMH orrpe~eJIReTCR HX KOHueHTpaUHeH. C rrOMOI.IJ.blO KJIaCCHqeCKOH MO~eJIH .lI.py~e ~JIR cB060~HbIX 3JIeKTpOHoB MO)l{HO rrOKa3aTb, qTO rrOrJIOI.IJ.eHHe CPOTOHOB
cB060~HbIMH HOCHTeJIRMH paCTeT rrporropUHOHaJIbHO KBa~paTy ~JIHHbI BOJIHbI
rra~alOI.IJ.ero
H3JIyqeHHR (Pankove,
crrpaBe~JIHBbI ~JIR rrOJIyrrpoBo~HHKOB
1971)
n-
I).
CJIe~ylOI.IJ.He
COOTHOIIIeHHR
H p-THrra:
B
CBeTO~Ho~ax K03cpCPHUHeHT rrOrJIOI.IJ.eHHH CPOTOHOB CB060~HbIMH HO-
CHTeJIRMH BJIHHeT Ha HHTeHCHBHOCTb H3JIyqeHHH qepe3 60KOBbie rpaHH KpHCTaJIJIa. 9TOT rrapaMeTp TaK)I{e OqeHb Ba)l{eH ~JIR CBeTO~HO~OB C KPHCTaJIJIaMH, BblpaI.IJ.eHHbIMH Ha rrp03paqHbIX
rrOJIyrrpoBo~HHKOBbIX
Kax. nOCKOJIbKY TOJII.IJ.HHa TaKHX rrO~JIO)l{eK 06blqHO 60JIbilie BbICOKHX KOHueHTpaUHRx JIerHpYIOI.IJ.HX rrpHMeceH
(9.7)
100
rrO~JIO)l{
MKM, rrpH
rrOrJIOI.IJ.eHHe CPOTOHOB
cB060~HbIMH HOCHTeJIRMH B HHX 6y~eT CYI.IJ.eCTBeHHO CHH)I{aTb MOI.IJ.HOCTb
BbIXO~Horo H3JIyqeHHR. npH HH3KHX KOHueHTpaUHRx rrpHMeceH y H3 KBaHTOBOH MexaHHKH H3BeCTHO, qTO K03cpcpHUHeHT rrOrJIOI.IJ.eHHR MO)l{eT 6bITb rrporropUHOHaJIeH
>..3/2, >..5/2, ).,7/2,
B 3aBHCHMOCTH OT MexaHH3Ma
paTHO
nO~XO~HTb
K
3a~aHHIO
ypOBHR JIerHpOBaHHR rrp03paqHbIX
rrO~JIO)l{eK.
pacceRHHR 3JIeKTpOHOB rrpH rrOrJI0I.IJ.eHHH: HcrrYCKaHHe aKYCTHqeCKHX CPOHO-
.lI.JIR TOHKHX CJIOeB C He60JIbiliOH ~JIHHOH OrrTHqeCKOrO rryTH
HOB, HcrrYCKaHHe OrrTHqeCKHX CPOHOHOB HJIH pacceRHHe Ha HOHH3HpOBaHHbIX
rrOrJIOI.IJ.eHHR CPOTOHOB CB060~HbIMH HOCHTeJIRMH OqeHb MaJIO.
rrpHMeCRX (Swaminathan, Macrander, B
GaAs
n-
1991) 2).
CB060~HbIMH HOCHTeJIRMH CBeTa C ~JIHHOH BOJIHbI
>..
~
950
HM, 3HeprHR
TepHaJIa rrpH KOMHaTHOH TeMrrepaType, MO)l{HO BOCrrOJIb30BaTbCR cpOpMyJIOH
1978)
ate = 3
BJIHRHHe
~JIR HaXO)l{~eHHR K03cpcpHUHeHTa rrOrJIOI.IJ.eHHR
H p-THrra
KBaHTOB KOToporo rrpH6JIH3HTeJIbHO paBHa IIIHpHHe 3arrpeI.IJ.eHHoH 30HbI Ma(Casey, Panish,
3TH X
rrO~JIO)l{eK pe3KO rrOBbliliaeTCR corrpOTHBJIeHHe. n03TOMY Ha~o OqeHb aKKy-
9.2.
,llBoHHbIe reTepOCTpYKTypbI
npaKTHqeCKH Bce COBpeMeHHble CBeTO~HO~bI H3rOTaBJIHBalOT Ha OCHOBe
~BOHHbIX reTepocTpyKTyp. TaKHe CTpyKTYPbI COCTORT H3 ~ByX rraCCHBHbIX CM-
I
•
n
10 18 CM- 3
+ 7 CM- I
•
P 1018 CM- 3 '
(9.8)
6apbepHblx CJIOeB H O~Horo aKTHBHoro CJIOR. Ha pHC.
9.2
rrpe~CTaBJIeHa
30HHaR ,L!.HarpaMMa ~BOHHOH reTepocTpYKTypbI. lIIHpHHa 3anpeI.IJ.eHHOH 30HbI aKTHBHoro CJIOR Bcer~a MeHbilie IIIHpHHbI 3arrpeI.IJ.eHHOH 30HbI 6apbep-
I) CM. pYCCKoe H3,naHHe KHHrH
2)
CM. KHHrH
[4,5].
[1].
HbIX CJIOeB. B pe3YJIbTaTe 3Toro naCCHBHble 06JIaCTH np03pattftbl ~JIR H3JIyqeHHR, HCXO~RI.IJ.erO H3 aKTHBHOH 06JIaCTH. nOCKOJIbKY rraCCHBHble CJIOI1,
9.3. C8emOaUOabt C KpUCma.JLlLaMU pasHOu eeoMempuu
Fit. 9. CmpYKmYPbl C 8blCOKUM Koacpcpuu,ueHmoM onmUtteCKoeo 8bt80aa
182
rrp03paQHbIii: 6apbepHhIH cnOH
R3JIY'Iruoru;al! aKTIIBHal! o6nacTb
rrp03paQHbIH 6apbepHbIii: cnOH
··tt_
_ _ _ _-A..
~{
EF·-'·..
183
OTpa)KeHHH MO)KHO ou:eHHTb rrpIf rrOMOmIf CJIe.lI.YlOmero rrpIf6JIIf)KeHHOrO COOTHOIIIeHHH:
,~
(9.9)
Ee
ns -
r.lI.e
hv
ac
rrOKa3aTeJIb rrpeJIOMJIeHHH rrOJIyrrpOBO.lI.HHKa. KpIfTHqeCKIfH yroJI
3.lI.eCb Bblpa)KaeTCH B pa.lI.IfaHax. ,LLJIH MaTepIfaJIOB C BhlCOKIfMIf rrOKa3a-
TeJIHMH rrpeJIOMJIeHHH KpIfTHqeCKIfe yrJIbI HeBeJIHKIf. HarrpHMep, rrpIf rro-
EFp-IQ·Q....9~..Q.Q.Q....9~t-L_·_ _ _ _ __ -------~
Ev
3,3, KpIfTHqeCKHH yrOJI rrOJIHOrO BHYTpeHHero 17°. n03TOMY B .lI.aHHOM cJIyqae 60JIbIIIaH qaCTb
Ka3aTeJIe
OTpa)KeHIfH paBeH
Bcero
IfcrrYCKaeMoro aK-
THBHOH 06JIaCTblO H3JIyqeHHH OKa3bIBaeTCH JIOKaJIIf30BaHHOH BHyTpIf rrOJIyrrpOBO.lI.HIfKa. 3TO JIOKaJIIf30liaHHoe H3JIyqeHHe, KaK rrpaBIfJIO, rrorJIOmaeTCH
PRC. 9.2. ,UBoHHall reTepocTpYKTypa C OnTH'leCKH np03pa'lHbIMH 6apbepHbIMH CJIOlIMH. lia-3a BbICOKOH KOHueHTpaUHH HOCHTeJIeH B aKTHBHOH 06JIaCTH, lIBJIlIIOIueHClI npH'lHHOH CMemeHHlI Kpall <j>YH.n.aMeHTaJIbHOrO nOrJIOmeHHlI (a<j><j>eKT oYPIIITeHHa-Mocca), nepenOrJIOmeHHe H3JIYQeHHlI B aKTHBHOH 06JIaCTH CBeTo.n.Ho.n.a MaJIOBepollTHo
TOJICTOH rrO.lI.JIO)KKOH. I13-3a HH3Koro KaqeCTBa H MaJIOH 3cpcpeKTHBHoCTIf rrO.lI.JIO)KKH rrOrJIOmeHHe JIOKaJIH30BaHHblX B HeH CPOTOHOB 'lame Bcero corrpOBO)K.lI.aeTCH 6e3bI3JIyq~TeJIbHOH peKoM6HHaU:IfeH 3JIeKTpOHHO-.lI.bIPOqHbIX rrap.
KaK rrpaBHJIO, HMelOT cpaBHHTeJIbHO He60JIbIIIYlO TOJImHHY, HX rrpaKTHqeCKH BCer.lI.a MO)KHO CqHTaTb a6COJIlOTHO rrp03paqHbIMH. neperrOrJIOmeHHeM CBeTa B
aKTHBHoH
06JIaCTH
B
MeCTe
HH)KeKU:HH
HOCHTeJIeH TOKa, pacrrOJIO)KeHHOH rro.lI. BepxHHM KOHTaKTOM, MO)KHO TaK)Ke rrpeHe6pe%. nOCKOJIbKY TOK HOCHTeJIeH B aKTHBHYlO 06JIacTb, KaK rrpaBHJIO, HMeeT 60JIbIIIYlO rrJIOTHOCTb, KBa3HypoBHH
9.2.
n03TOMY rrpH 60JIbIIIHX 3HaqeHHHX HH)KeKU:HOHHoro TOKa aKTHBnOKa3aTeneM npenOMJIeHIDI
HaH 06JIaCTb rrp03paqHa .lI.JIH H3JIyqeHHH C 3HeprHeH, 6JIH3KOH K IIIHpHHe 3arrpemeHHoH 30HbI. O.lI.HaKO CJIe.lI.yeT OTMeTHTb, 'ITO paBHOBeCHoe COCTOHHHe B aKTHBHOH 06JIaCTH .lI.OCTHraeTCH B MeCTax .lI.OCTaTOqHO Y.lI.aJIeHHbIX OT MeCTa HH)KeK-
PHC. 9.3. ECJIH yrOJI KOHyca BbIBo.n.a H3JIYQeHHlI 60JIbIIIe yrJIa (Xc, JIOKaJIH30BaHHbIH BHyTpH nOJIynpoBo.n.HHKa B <j>opMe npllMoyrOJIbHOrO napaJIJIeJIenHne.n.a JIy'l CBeTa He HMeeT B03MO)!{HOCTH BbIHTH Hapy)!{y H3-3a nOJIHOrO BHYTpeHHero OTpa)!{eHHlI
U:HH TOKa. I1MeHHo B 3TH X yqaCTKaX B03MO)KHO rrOrJIOmeHHe H3JIyqeHHH, reHepIfpyeMoro 3.lI.eCb )Ke B aKTmilHOH 06JIaCTH. ,LLJIH KOMrreHcaU:HH OrrTHqe-
C
3TOH rrp06JIeMOH pa3pa60TqHKH CTOJIKHYJIHCb B
1960- x
rr., KOr.lI.a
CKIfX rrOTepb H3-3a rreperrOrJIOmeHIfH H3JIyqeHIfH BHyTpH aKTIfBHOH 06JIaCTIf
rrpoeKTHpOBaJIH rrepBble CBeTO.lI.HO.lI.bI. Tor.lI.a )Ke rrOHHJIH, 'ITO B 3THX BO-
3TH MeCTa .lI.OJI)KHbI 06JIa.lI.aTb KaK MO)KHO 60JIee BbICOKHM BHyTpeHHHM
rrpocax cpopMa KpHCTaJIJIa HrpaeT OqeHb Ba)KHYlO POJIb. OIITIfMaJIbHbIMH
KBaHTOBbIM BbIXO.lI.OM H3JIyqeHHH.
HBJIHlOTCH ccpepHqeCKHe CBeTO.lI.IfO.lI.bI C TOqeqHbIMH If3JIyqalOmHMH 06JIaCTHMIf, pacrrOJIO)KeHHbIMH B HX u:eHTpe. Ha pIfC.
9.4, a
rrOKa3aH CBeTO.lI.HO.lI.
TaKOH CPOpMbI. JIyqH CBeTa, HcrrYCKaeMble TOqeqHOH aKTIfBHOH 06JIaCTblO,
9.3.
CBeTO,lJ;HO,lJ;bI C KpHCTaJIJIaMH pa3Hoii: reOMeTpHH
rra.lI.alOT Ha rpaHIfU:Y pa3.lI.eJIa rrOJIyrrpOBO.lI.HHK-B03.lI.YX rro.lI. rrpHMbIM yrJIOM. n03TOMY B TaKHX CBeTO.lI.HO.lI.aX He rrpOHBJIHeTCH rrOJIHOe BHyTpeHHee OTpa-
MHorOKpaTHoe OTpa)KeHHe H3JIyqeHHH BHyTpH rrOJIyrrpOBO.lI.HIfKOB C BbI-
)KeHIfe. O.lI.HaKO CJIe.lI.yeT OTMeTHTb, 'ITO, eCJIH Ha ccpepe CBeTO.lI.HO.lI.a HeT aH-
COKHMH rrOKa3aTeJIHMH rrpeJIOMJIeHHH HBJIHeTCH O.lI.HOH H3 HaH60JIee Ba)KHbIX
THOTpa)KalOmerO rrOKpbITHH, Ha rpaHIfu:e pa3.lI.eJIa rrOJIyrrpOBO.lI.HHK-B03.lI.YX
rrp06JIeM, C KOTOPOH rrpHXO.lI.HTCH CTaJIKHBaTbCH rrpH pa3pa60TKe MOmHhlX
rrpOIfCXO.lI.HT OTpa)KeHHe JIyqeH CBeTa, If3BeCTHoe KaK OTpa)KeHIfe
CBeTO.lI.HO.lI.OB.
9.3
rrOKa3aH rrpHMep H3JIyqeHHH, JIOKaJIH30BaHHoro BHyTpH
Mep B BIf.lI.e rrepeBepHYToro yceqeHHOrO KOHyca, ITO cpaBHeHHlO C 06bIqHbIMH
rrOJIyrrpOBO.lI.HHKa. no 3aKOHY CHeJIJIIfyca JIyq CBeTa, HCIIymeHHbIH B aKTIfB-
KOHCTPYKU:HHMIf, HarrpIfMep B cpopMe rrpHMoyrOJIbHOrO rrapaJIJIeJIerrHrre.lI.a,
Ha pHC.
HOH 06JIaCTIf, MO)KeT rrO.lI.BeprHYTbCH rrOJIHOMY BHYTpeHHeMY OTpa)KeHHlO.
06JIa.lI.alOT 60JIee BbICOKHMIf K03cpcpIfU:HeHTaMH OrrTHqeCKOrO BbIBO.lI.a H3-
B
JIyqeHHH (Carr, Pittman,
CJIyqae BbICOKHX rrOKa3aTeJIeH rrpeJIOMJIeHHH yrOJI rrOJIHOrO BHYTpeHHero
1963;
Carr, Newman,
1964;
Loebner,
1973).
r 184
Dl.
9.
a
PHC.
9.4.
9.3.
GmpYKmYPbt C BbtCOKUM K03q)(/JUI{UeHmOM onmU'leCKOeO BbtBOaa
a
6
ITpHMepbI CBeTo.u.Ho.u.OB pa3HoH reOMeTpHqeCKOH <jlOPMbI, 06JIa.u.aIOW:Hx
a - c<jlepHqeCKHH ueHTpe; 6 - KOHHqeCKHH
BblCOKHMH 3HaqeHHlIMH K03<jl<jlHUHeHToB OIlTHqeCKoro BbIBo.u.a: CBeTo.u.HO.u. C TOqeqHOH cBeTOH3JIyqaIOw:eH 06JIaCTbIO B CBeTo.u.HO.u.
O)l.HaKO TaKl1e CBeTO)l.I10)l.bI OqeHb )l.OPOrH B 113rOTOBJIeHI1I1, 11 n03ToMY K C02KaJIeHI1IO, c
nJtaliapliou,
nOCKOJIbKY )l.JIH 3nI1TaKCl1aJIbHO-
ro Bblpaml1BaHI1H rrOJIynpOBO)l.HI1KOBbIX MaTep"aJIOB I1CnOJIb3YIOT nJIOCKl1e nO)l.JI02KKI1. IT03TOMY, np"MeHHH Tpa)l.I1Il.I10HHble rrJIaHapHbIe TeXHOJIOrl1l1, nOKa3aH CBeTO)l.I10)l. KOHl1qeCKOH
BbIBO)l.l1TCH 113 aKTI1BHOH 06JIaCTI1, pacnOJI02KeHHOH y
OCHOBaHI1H KOHyca
I1JII1 HeMHoro HI12Ke ero. JIyql1, na)l.aIOmHe Ha rpaHI1Il.Y KOHYC-B03)1.YX, JII160 nepeceKaIOT ee, JII160 npOXO)l.HT 06paTHO qepe3 KOHYC. ITPI1 npOX02K)l.eHI1I1 qepe3 KOHYC JIYQI1 MHoroKpaTHo OTpa2KaIOTCH OT ero rroBepxHocTH. 3TO np"BO)l.IT K TO MY, QTO npl1 nOna)l.aHl111 Ha rpaHHIl.Y nOJIynpOBO)l.HI1K-B03)1.YX I1X yrOJI BbIXO)l.a CTaHOBI1TCH rOpa3)1.0 60JIbUle nepBOHaQaJIbHoro. IT03TOMY JIYQI1 nOKl1)1.aIOT KOHYC rrpaKTI1QeCKI1 no)l. rrpHMbIM yrJIOM K ero nOBepXHOCTI1. O)l.HaKO CBeTO)l.I10)l.bI C TaKOH I1HTepeCHOH KOHIl.errIl.l1eH TaK2Ke OQeHb CKa3aHHoro
HCHO,
nOQeMY
60JIbUll1HCTBO
CBeTO)l.I10)l.OB
I1MeIOT
Kp"CTaJIJI B <popMe rrpHMoyrOJIbHOrO napaJIJIeJIenl1ne)l.a, rrOKa3aHHbIH Ha P"C.
9.5, a.
Kpl1CTaJIJIbI TaKOH
nO)l.JI02KeK B)l.OJIb I1X eCTeCTBeHHblX nJIOCKOCTeH. PaCCMaTpl1BaeMble CBeTO)l.110)l.bI I1MeIOT lIIeCTb KOHYCOB BbIBO)l.a 113JIYQeHI1H: )l.Ba nepneH)l.I1KYJIHPHbIX 11 QeTblpe napaJIJIeJIbHbIX nOBepXHOCTI1 nO)l.JI02KKI1. l13JIYQeHl1e HI12KHerO KOHyca rrorJIOmaeTCH nO)l.JI02KKOH, eCJII1 Ull1pl1Ha ee 3anpemeHHoH 30HbI MeHbUle, QeM 3anpemeHHoH 30HbI aKTI1BHOH 06JIaCTI1. l13JIYQeHl1e QeTblpex napaJIJIeJIbHbIX rrO)l.JI02KKOH. TOJICTOrO
nOBepXHOCTI1
BepXHI1H
CJIOH
~eHH.II
ITpHMepbl CBeTo.u.Ho.u.OB pa3JIHqHOH <jlOpMbl:
a-
KpHCTaJIJI CBeTo.u.Ho.u.a
B <jlopMe npliMoyrOJIbHOrO napaJIJIeJIenHne.u.a C llleCTbIO KOHycaMH BblBo.u.a H3JIyqeHHlI;
6-
KpHCTaJIJI CBeTo.u.Ho.u.a UHJIHH.u.pHqeCKOH <jlOpMbl C BepxHHM KOHYCOM
BblBo.u.a H3JIyqeHHlI H KOJIbUOM, H3JIYQaIOW:HM CBeT Qepe3 60KOBble CTOPOHbl
Ha P"C.
9.5,6
nOKa3aH CBeTO)l.I10)l. Il.I.ryIH)l.p"QeCKOH
60JIee BbICOKI1MH 3HaQeHI1HMI1 K03
CTa)l.l1IO TpaBJIeHI1H.
nepeeepliymou ycelieliliou nupaMu8bl
npl1MepOM CBeTO)l.I1OlI:a C Kp"CTaJIJIOM (Krames et aI.,
1999)
HBJIHeTCH
I). Ha p"c.
9.6
rrpe)l.CTaBJIeHa cTpyKTypa H <poTorpa
)l.OPOrH B 113rOTOBJIeHI1I1. l13
9.5.
60IroBOH KOH)'C BhlBO,l(a
CBeTO)l.I10)l. B <popMe
113rOTaBJII1BaTb CBeTO)l.I10)l.bI c
9.4,6
BepXHHii KOH)'C BLIBOlla l13JI}"IeHHJI
HeHI1IO co CBeTO)l.I10)l.aMI1 Ky611QeCKOH
I1X HI1KTO He BbmYCKaeT.
Ha P"C.
PHC.
185
GBemoaUOabt C KpUCmaJlJlaMU pasHoiJ. eeOMempuu
KOHYCOB
MeTaJIJII1QeCKI1H
paCTeKaHI1H
TOKa
TaK2Ke
QaCTI1QHO
KOHTaKT
nperpa2K)l.aeT
6e3 nyTb
norJIOmaeTCH
CI1MaJIbHOH
BepoHTHOCTI1
BbIXO)l.a
rrOJIyrrpOBO)l.HI1-
Ka reOMeTp"QeCKlenapaMeTpbI CBeTO)l.I10)l.a paCCQI1TbIBaJII1 npl1 rrOMOml1 CneIl.HaJIbHbIX KOMnbIOTepHbIX rrporpaMM, MO)l.eJIl1pYIOml1X TpaeKTOp1111 JIyQeH. CBeTO)l.HO)l.bI B <popMe rrepeBepHYTbIX yceQeHHbIX rrl1paMI1)1. YCTpOHCTBa C 60JIbUlOH rrJIOma)l.bIO
p-n-nepeXO)l.a: 500
l1x CBeTOBaH OT)l.aQa QaCTO npeBbIUlaeT
100
MKM X
MOmHble
500
MKM.
JIM/BT -
B HaCTOHmee BpeMH
nOKa3aHa 3aBHCHMOCTb BHeUlHero
KBaHTOBoro BbIXO)l.a
MaKCI1MaJIbHO )l.OCTI12KI1MbIH ypOBeHb 2). Ha P"C.
9.7
nl1paMl1)1.aJIbHbIX CBeTO)l.I10)l.OB OT TOKa (Krames et aI.,
1999).
ITI1K CBe-
I1CrrOJIb30BaHI1H 113JIYQeHHIO
113
I) BblnycKaeMble
npOMbllllJIeHHO
CBeTo.u.Ho.u.bl
Ha
OCHOBe
reTepOCTpYKTYP
BepXHero KOHyca. IT03TOMY CBeTO)l.I10)l. npOCTOH rrpHMoyrOJIbHOH
InGaN/SiC HMeIOT <jlOPMY nHpaMH.u.bl C nbe.u.eCTaJIOM (<jlHpMeHHoe Ha3BaHHe "Aton",
06JIa)l.aeT
Osram, 2001).
HI13KI1M
K03
OIITI1QeCKOrO
BbIBO)l.a.
O)l.HaKO
ero
HeOCnOp"MbIM )l.OCTOI1HCTBOM HBJIHeTCH HI13KaH CTOI1MOCTb 113rOTOBJIeHI1H.
2) B rrOCJIe.u.HHX ny6JIHKaUHlIX .u.OCTHrHYTa CBeTOBali OT.u.aQa
150 JIM/BT [7, 8].
186
Dt.9. CmpYICmypbt C 8btCOICUM ICo34J4Juu,ueHmoM onmU'leCICOBO BbtBOaa
9.4. IlpuMeHeHue nOAynpo8oaHUIC08 C meICcmypupo8aHHou nOBepXHocmblO 187
-+-+-.-.'. . t "+ L .~ ---------. '. • . ------.....,. I
aKTHBHaJI o6JIacTI. InGaN
t-
I
TIPC,U
tr-
X-l,4
-
\
-
~.
LJC,lJ;
6
KpacHbm C,lJ; AlInGaP/GaP A. = 650 HM T =300K Aj "" 0,25 MM2
f-
rI
10
100
IIPllMOH rrocTOlIHHbIH TOK
PIfC. 9.6. YCTpoikTBa B cpopMe yceqeHHOH nlfpaMIf.ll.bI: a - CIfHIfH 1f3JIyqaTeJIb InGaN Ha nO.ll.JIO:lKKe SiC (npoMbIIIIJIeHHOe Ha3BaHlfe «Aton»); 6 - cxeMa XO.ll.a JIyqeH, .lI.eMOHcTplfpYIOIueIO YBeJIlfqeHlfe BbIBO.ll.a 1f3JIyqeH1f1l; B - cpoTorpacplfll CBeTO.ll.lfO.ll.a AlInGaP IGaP; B - cxeMa C,U, IfJIJIIOCTplfpYIOIUall nOBbllIIeHlfe ero K09cpcplfUlfeHTa OnTlfqeCKOrO BbIBO.ll.a (Osram, 2001; Krames et aI., 1999)
1000
I, MA
Plfc.9.7. 3aBlfclfMoCTb BHelIIHero KBaHTOBoro BblXO.ll.a 1f3JIyqeHlf1l OT TOKa .lI.JIlI CBeTO.ll.lfO.ll.a KpacHoro UBeTa CBeqeHlfll (650 HM), IfMeIOIUero CPOPMY nepeBepHYToH yceqeHHOH nlfpaMlf.ll.bI (TIP), If CBeTO.ll.lfO.ll.a C 60JIblIIOH IIJIOIUa.ll.bIO p-n-nepeXO.ll.a, CMOHTlfpOBaHHoro B Kopnyce MOIUHOH JIaMnbI (LJ). K03cpcplfUlfeHT OnTlfqeCKOrO BblBO.ll.a CBeTO.ll.lfO.ll.a TIP npeBbICIfJI aHaJIOrlfqHblH nOKa3aTeJIb CBeTO.ll.lfO.ll.a LJ B 1,4 pa3a If nplf 100 MA COCTaBIfJI 55 % OT MaKCIfMaJIbHOrO 3HaqeHlf1l BHelIIHero KBaHTOBoro BbIXO.ll.a (Krames et aI., 1999) B
pa60Tax IIIMH)J.a H )J.p.
(Schmid et aI., 2000, 2001, 2002) )J.JIfi
rrOBbIIlIeHHfI K03cpcpHUHeHTa OrrTHqeCKOrO BbIBO)J.a CBeTO)J.HO)J.OB rrpe)J.JIO)KeHO TOBOH OT)J.aqH 102 JIM/BT rrOJIyqeH )J.JIfi CBeTO)J.HO)J.a OpaH:lKeBOrO UBeTa,
A~
HCrrOJIb30BaTb KOHHqeCKHe 3JIeMeHTbI. IIOKa3aHO, 'ITO rrpH rrpHMeHeHHH Ta~
100 MA. 3TO 60JIbille CBeTOBOH OT)J.aqH 60JIb-
KHX 3JIeMeHTOB B HHcppaKpaCHbIX CBeTO)J.HO)J.ax GaAs B03MO)KHO YJIyqIlIeHHe
IIIHHCTBa JIIOMHHeCueHTHbIX (50-104 JIM/BT) H Bcex MeTaJIJIOraJIOreHHblX
BHeiliHero KBaHTOBoro BblXO)J.a )J.O 50 %. O)J.HaKO 3TH )J.HO)J.bI 06JIa)J.aIOT
(68-95 JIM/BT) JIaMrr BbICOKoro )J.aBJIeHHfI . .lI.JIfi )KeJITOrO UBeTa CBeqeHHfI,
)J.OBOJIbHO HH3KOHMomHOCTbIO H3JIyqeHHfI, 'ITO CBfl3aHO C Tpe60BaHHflMH
A~
610 HM), rrpH TOKe
598 HM, CBeTOBafi OT)J.aqa rrHpaMH)J.aJIbHbIX CBeTO)J.HO)J.OB COCTaBJIfieT
K rrJIOIua)J.H rrOBepXHOCTH KOHyca BbIBO)J.a H3JIyqeHHfI, H3-3a KOTOPbIX 06-
68 JIM/BT. 3TO 3HaqeHHe cpaBHHMO co CBeTOBOH oT)J.aqeH 50-BaTTHbIx Ha-
JIaCTb HH)KeKUHH CTaHOBHTCfI HaMHoro MeHbille o6meH rrJIOma)J.H CBeTO)J.H-
TpHeBbIX ra30pa3pfl)J.HbIX JIaMrr BblCOKoro )J.aBJIeHHfI. KBaHToBbIH BbIXO)J. CBe-
o)J.a.
TO)J.HO)J.OB rrHpaMH)J.aJIbHOH CPOPMbI KpacHoro UBeTa CBeqeHHfI,
A~
650 HM),
paBHfleTcfI 55 % OT MaKCHMaJIbHoro. IIPH pa60Te B HMrrYJIbCHOM pe)KHMe (co CKBa)KHOCTbIO 100) KBaHTOBbIH BbIXO)J. paccMaTpHBaeMblx CBeTO)J.HO)J.OB
9.4.
COCTaBJIfieT 60,9% OT MaKCHMaJIbHOrO (Ha pHC. 9.7 )J.aHHble He rrpHBe)J.eHbI),
C TeKcTYPHPOBaHHOH nOBepxHocTblO
TIpHMeHeHHe nOJIynpOBO,ll;HHKOB
'ITO COOTBeTcTByeT HH)KHeH rpaHHue K03cpcpHUHeHTa OIITHqeCKOrO BbIBO)J.a )J.JIfi YCTPOHCTB )J.aHHoro THrra.
.lI.PYrHM 3cpcpeKTHBHbIM crroc060M rrOBbIIlIeHHfI K03cpcpHUHeHTa OIITH-
H UHJIHH)J.POB, KaK rrpaBHJIO, H3rOTaBJIHBaIOT rro TeXHOJIOrHH rrOillarOBOH
rrpHMeHeHHe nOJLynpo80aH.UIC08 C utepOXo8amou UJLU meKcmypup08aH.H.OU n08epXH.OCmblO. B pa60Tax
06pa6oTKH O)J.HOH rrJIaCTHHbI. CBeTO)J.HO)J.Hble KpHCTaJIJIbI B cpopMe rrepe-
IIIHHTuepa H )J.p. (Schnitzer et al.
BepHYTOH yceqeHHOH rrHpaMH)J.bI rrpOH3BO)J.flT HeCKOJIbKO OTJIHqaIOmHMCfI
et aI.,
CBeTO)J.HO)J.Hble KpHCTaJIJIbI B cpopMe rrpflMoyrOJIbHbIX rrapaJIJIeJIerrHrre)J.()B
qeCKOrO BbIBO)J.a CBeTO)J.HO)J.OB flBJIfleTCfI
1993) H BHH)J.HIlIa H )J.p. (Windisch
1999, 2000, 2001, 2002) 6bIJIO rrOKa3aHO, 'ITO )J.JIfi HHcppaKpac-
rrOillarOBOH pe3KoH. CTOHMOCTb H3rOTOBJIeHHfI CBe-
HbIX CBeTO)J.HO)J.OB GaAs rrpH rrpHMeHeHHH TaKHX MaTepHaJIOB B03MO)KHO
TO)J.HO)J.OB rro TeXHOJIOrHH rrOillarOBOH 06pa60TKH O)J.HOH rrJIaCTHHbI flBJIfleTCfI
YJIyqIlIeHHe BHeiliHero KBaHTOBoro BblXO)J.a )J.O 50 %. B pa60Te 3HHUHHrepa
MHHHMaJIbHOH rro cpaBHeHHIO co BceMH OCTaJIbHbIMH MeTO)J.aMH.
H .HHca (Sinzinger, Jahns, 1999) rro)J.p06HO 06cY)K)J.aIOTcfI CBOHCTBa rrOJIy-
rrOillarOBbIM MeTO)J.OM -
188
DL.
9. CmpYKmYPbL
9.4. JlpuMeHeHue nOAynpo8oaHUK08
C 8bLCOKUM KOfHpt/JUI1UeHmOM onmu'teCK020 8bL80aa
10
npOBo,n:HHKOB C MHKPOCTPYKTypHpoBaHHbIMH nOBepxHocTHMH H cnoc06bI HX H3rOTOBJIeHHH 1).
~InGaN/GaN
:s:
nOCJIe nepBOHaqaJIbHbIX nOJIO)KHTeJIbHbIX co06w;eHHH 06 YJIyqIIIeHHH K03Hu.HeHTa BblBo,n:a B CBeTo,n:Ho,n:ax C TeKcTypHpoBaHHbIMH nOBepxHoCTHMH, onTHMH3M pa3pa60TqHKOB HeCKOJIbKO CHH3HJICH, nOCKOJIbKY BbIHC-
a :.:
011)
ill ~ is ='l :.: sa
KopnycHble ,n:HO,n:bI ,n:aHHOrO THna nOKa3bIBalOT YCHJIeHHe HHTeHCHBHOCTH H3JIyqeHHH.
~~
n03,n:Hee nOHBHJIOCb ew;e HeCKOJIbKO co06w;eHHH 06 YBeJIHqeHHH K03-
1il
~
a
--.~ /
11)
2
XHMHqeCKOrO TpaBJIeHHH. ,Uo 3Toro B TeqeHHe MHorHX JIeT CqHTaJIOCb, 'ITO
o
400
Ii"
V]
areHTaMH. O,n:HaKO 6b1JIO nOKa3aHO (Stocker et ai., 1998a), 'ITO, XOTH rpaHb
a
H
m MO)KHO B03,n:eHCTBOBaTb MHorHMH XHMHqeCKHMH peareHTaMH, HanpHMep rOpHqHMH paCTBopaMH KOH H H3P04. ObIJIO TaK)Ke nOKa3aHO (Stocker et
v
t--- -
"-
T~'\..
./
420
GaN He no,n:,n:aeTCH )KH,n:KOCTHOMY TpaBJIeHHIO HHKaKHMH XHMHqeCKHMH peC KpHCTaJIJIa GaN ,n:eHCTBHTeJIbHO He no,n:,n:aeTCH TpaBJIeHHIO, Ha rpaHH
--___
rn".,p~~ 9rJ--~
4
Hu.HeHTa BbIBo,n:a H3JIyqeHHH B CBeTo,n:Ho,n:ax Ha OCHOBe GaN C CHJIbHO TeKCTypHpoBaHHbIMH nOBepxHocTHMH, nOJIyqaeMbIMH MeTo,n:OM )KH,n:KOCTHoro
TeKcrypHpOBaHHaH II ~ IIoBepXHoCTblO
_~
6
189
7\
8 f--- T=295 K
!)g ,.Q
B nOJIHMepHOM Kopnyce BCe 3TH npeHMyw;ecTBa TepHIOTCH H TOJIbKO 6ec-
HHJIOCb, 'ITO B npou.ecce pa3Mew;eHHH nOJIynpOBO,n:HHKOBbIX KpHCTaJIJIOB
,
C meKcmypupo8aHHou n08epXHocmbIO
'-'"
~
440 460 480 500 ,lVrnHa BOJIHbI A, ~.
520
540
PHC. 9.9. CneKTpbI H3JIyqeHHH CBeTO.ll.Ho.n:OB InGaN rOJIy6oro CBeqeHHH C TeKCTYpHpoBaHHoH nOBepxHocTblO H 6e3 Hee. Ha cneKTpe .n:Ho.n:a C rJIa.n:KoH nOBepxHocTblO Ha6JIIO.n:aeTcH HHTepcpepeHUHoHHaH MO.n:YJIHUHH, CBH3aHHaH C CPOpMHpoBaHHeM B ero CTpYKType pe30HaTopa
ai., 1998b, 2000), 'ITO YKa3aHHble peareHTbI no CBoeH npHpo,n:e HBJIHIOTCH OpraHHqeCKHMH KpHCTaJIJIaMH. I1MeHHo 3TO 06CTOHTeJIbCTBO n03BOJIHeT HM C03,n:aBaTb nHpaMH,n:aJIbHble CTpyKTYPbI, CrJIa)KHBalOW;He nOBepXHOCTH Ha aTOM HOM ypOBHe ,n:o COCTOHHHH, npHro,n:Horo ,n:JIH H3rOTOBJIeHHH JIa3epOB.
pa60Tax (Gao H et ai., 2004;
Fujii
et ai., 2004). I13 pHC. 9.9 TaK)Ke CJIe,n:yeT,
'ITO HHTepepeHu.HOHHble CTpyKTYPbI, Ha6JIIO,n:aeMble B cneKTpax CBeTo,n:HO,n:OB GaN C rJIa,n:KHMH nOBepxHocTHMH, npaKTHqeCKH nOJIHOCTblO OTCYTCTBYlOT B ,n:Ho,n:ax C TeKCTypHpOBaHHblMH CJIOHMH. HaJIHqHe Ha cneKTpaJIbHOH xapaKTepHCTHKe HHTepepeHu.HOHHOH MO,n:YJIHU.HH CBH3aHO C 0pMHpOBaHHeM B CTpyKType CBeTo,n:Ho,n:a pe30HaTopa
B03,n:yx H canHp -
GaN
1).
Ha pHC. 9.10 npe,n:CTaBJIeHbI cxeMbI BOJIHOBO,n:OB C rJIa,n:KoH, cJIa60 TeKCTypHpoBaHHoH H CHJIbHO TeKcTypHpoBaHHoH nOBepXHOCTblO. PHC.
9.10,a
COOTBeTcTByeT BOJIHOBO,n:y C 3epKaJIbHOH nOBepxHocTblO, 3a npe,n:eJIbI KOTOporo OnTHqeCKHe MO,n:bI BbIHTH He MorYT. B BOJIHOBo,n:e C CHJIbHO TeKCTYpHpOBaHHOH (JIaM6epTOBOH HJIH ,n:HY3HOH) nOBepXHOCTblO (pHC. 9.10,8) npH Ka)K,n:OM B3aHMo,n:eHCTBHH cBeToBoH BOJIHbI C nOBepxHocTblO npe,n:eJIbI BOJIHOBo,n:a nOKH,n:aIOT O,n:HH HJIH HeCKOJIbKO OTOHOB. npOMe)KYTOqHblH CJIyqaH nOKa3aH Ha pHC. 9.10,
PHC. 9.8.
Ha pHC. 9.9 nOKa3aHO YBeJIHqeHHe HHTeHCHBHOCTH H3JIyqeHHH CBeTo,n:Ho,n:a InGaN C CHJIbHO Bblpa)KeHHOH TeKcTypoH nOBepxHocTH (CM. pHC. 9.8), CBH3aHHoe C POCTOM K03Hu.HeHTa OllTHqeCKOrO BbIBo,n:a (Haerle, 2004). YTBep)K,n:aeTCH, 'ITO nOJIyqeHHOe YBeJIHqeHHe BbIXO,n:HOH MOW;HOCTH COCTaBJIHeT
rv
40-50
%.
AHaJIOmqHble pe3YJIbTaTbI 6bIJIH onHcaHbI H B ,n:pymx
6.
nOCKOJIbKY HHTeHCHBHOCTb BbIxo,n:Hw;ero
C nOBepXHOCTH H3JIyqeHHH 3aBHCHT OT CTeneHH ee IIIepOXOBaTOCTH, )KeJIaTeJIbHO YMeTb KOJIHqeCTBeHHO ou.eHHBaTb 3TOT napaMeTp. Cnoc06 KOJIHqe~ CTBeHHOH ou.eHKH pacceHBalOw;eH cnoco6HOCTH pa3JIHqHbIX nOBepXHOCTeH 6y,n:eT 06cY)K,n:aTbcH B rJI. 10. npH H3yqeHHH nOBepxHocTeH KpHCTaJIJIOB H3 InGaN npH nOMOW;H 3JIeKTpoHHoro MHKpocKona 6bIJIO BbIHBJIeHO, 'ITO CHJIbHO TeKCTypHpOBaHHble nOBepXHOCTH HMelOT
6eJlblU
1) CM. TaK}I{e[ 10, 11].
u.BeT (Nichia, 2005). no 3TOMY npH3HaKY MO)K-
190
FA.
9.
CmpYKmYPbl C 8blCOKUM Koatj}(/JUl1ueHmoM onmU'leCK020 8bl80aa
a
6
r
9.6.
TexHOA02UJl 8blpaw,U8aHUJl c8emOaUOa08 Ha npOapa'lHblX nOaAO'JICKaX
191
.llJIH CBeTo.u.Ho.u.HbIX KpHCTaJIJIOB 60JIbiliOH rrJIOma.u.H
9.11, a
H
6
He ro.u.HTCH, rrOCKOJIbKY OHH He MorYT
06eCrreqHTb paBHOMepHoe pacrrpe.u.eJIeHHe TOKa. .llJIH TaKHX CBeTo.u.Ho.u.OB M02KHO HCrrOJIb30BaTb KOHTaKTbI, H306pa2KeHHble Ha pHC.
9.11, 8.
nJIOma.u.b BepXHHX KOHTaKTOB CTpeMHTCH .u.eJIaTb KaK M02KHO MeHbIIIeH, qT06bI HX Herrp03paQHble YQaCTKH He 3aTpy.u.HHJIH BbIXO.u. H3JIyqeHHH H3 aKTHBHOH 06JIaCTH. O.u.HaKO corrpOTHBJIeHHe KOHTaKTOB Herrocpe.u.CTBeHHO
6
CBH3aHO C HX rrJIOma.u.blO, rr03TOMY rrJIOma.u.b BepXHero KOHTaKTa HeJIb3H YMeHbIIIaTb .u.o 6eCKOHeQHOCTH. PHC. 9.10. CxeMbI BOJIHOBO,n:OB C rJIa,n:KoH (a), cJIa60 TeKcTypHpoBaHHoH (6) H CHJIbHO TeKCTypHpOBaHHOH (8) IIOBepXHOCTbIO. ,Uml rrepBoro THrra BOJIHOBO,n:OB xapaKTepHO SepKaJIbHOe OTpa:lKeHHe CBeTOBblX BOJIH, ,n:JIlI TpeTbero THrra - CHJIbHOe paccellHHe, a ,n:JIlI BToporo THrra - CMeCb paccellHHlI H OTpa:lKeHHlI HO orrpe.u.eJHlTb .u.H
9.6.
TeXHOJIOrHH BbIpam.HBaHHH CBeTO,ll;HO,ll;OB Ha np03pallHbIX nO,ll;JIOlKKaX
CBeTo.u.Ho.u.bI BH.u.HMoro crreKTpa (AlxGal-x)o.sIno.sP, pa60TalOmHe Ha .u.JIHHaX BOJIH B .u.Harra30He
560-660
HM, 06bIQHO BblpamHBalOT Ha rro.u.-
JI02KKaX GaAs. npH 3TOM rrapaMeTpbI peilieTOK MaTepHaJIa CBeTo.u.Ho.u.a H rro.u.JI02KKH COrJIaCOBaHbI .u.pyr C .u.pyrOM. nOCKOJIbKY rrpH KOMHaTHOH TeMrrepaType IIIHpHHa 3arrpemeHHoH 30HbI GaAs
9.5.
TIpHMeHeHHe KOHTaKTOB pa3HOH reOMeTpHlIeCKOH
KaK rrpaBHJIO, BepxHHH KOHTaKT B CBeTo.u.Ho.u.e HrpaeT pOJIb rrJIOma.u.KH .u.JIH rrpHBapHBaHHH coe.u.HHHTeJIbHOH rrpOBOJIOKH. 9Ta rrJIOma.u.Ka qaCTO HMeeT MKM. B TO 2Ke BpeMH BepXHHH KOHTaKT
.u.OJI2KeH 06eCrreqHBaTb OMHqeCKYIO CBH3b CO CJIOeM paCTeKaHHH TOKa H HMeTb MaJIOe corrpOTHBJIeHHe. Ha pHC. PHC. pHC.
9.11, a 9.16,6
9.11
rrOKa3aHbI rrpHMepbI BepxHHx KOHTaKTOB pa3HoH
rrpe.u.cTaBJIHeT caMYIO rrpocTYIO
BceH rrJIOma.u.blO aKTHBHOH 06JIaCTH. OTMeTHM, qTO .u.JIH rrpe.u.oTBpameHHH rroBepxHocTHOH peKOM6HHalI.HH K KpaflM KpHCTaJIJIa CBeTo.u.Ho.u.a ;lI.OJI2KeH H.u.TH JIHilib He3HaqHTeJIbHbIH TOK.
a
6
1,424
3B
(Ag
= 870 HM),
pameHHble Ha rro.u.JI02KKaX GaAs, 06JIa.u.a1OT HH3KHMH K03
K BepXHHM KOHTaKTaM rrpe.u.bHBJIHIOTCH .u.OBOJIbHO CTporHe Tpe60B·aHHH.
100
=
H3JIYQaeMOrO B HX CTOpOHy. n03TOMY CBeTo.u.Ho.u.bI AlInGaP /GaAs, BbI-
cjlOPMbI
KpyrJIylO
Eg
TOJICTble rro.u.JI02KKH GaAs rrOrJIOmalOT QaCTb CBen pa60QHX .u.JIHH BOJIH,
OrrTHQeCKOrO BbIBo.u.a CBeTa. K03
cymecTBeHHO rrOBblilieH y.u.aJIeHHeM
rro.u.JI02KKH GaAs H coe.u.HHe-
HHeM 3rrHTaKCHaJIbHOrO CJIOH AlInGaP C rro.u.JI02KKOH GaP (Kish et aI.,
1994).
GaP -
HerrpHM030HHbIH rrOJIyrrpOBo.u.HHK C IIIHPHHOH 3arrpemeHHOH
Eg = 2,24 3B (Ag = 553 HM). n03TOMY OH He rrorJIOmaeT CBeT A > 553 HM, H3JIYQaeMbIH aKTHBHOH 06JIaCTblO AlInGaP. Ha pHC. 9.12 CXeMaTHQHO rrOKa3aHa TeXHOJIOrHH H3rOTOBJIeHHH CBeTO-
30HbI C
.u.Ho.u.a AlInGaP Ha rro.u.JI02KKe GaP. CHaQaJIa MeTo.u.OM 3rrHTaKCHH MeTaJIJIOOpraHHQeCKHX coe.u.HHeHHH H3 ra30BOH <pa3bI Ha rro.u.JI02KKe GaAs BblpamHBaeTCH .u.BoHHaH reTepocTpYKTypa AlInGaP. nOCJIe 3Toro Ha BepXHeH rrOBepXHOCTH reTepOCTpYKTypbI MeTo.u.OM 3rrHTaKCHH H3 ra30BOH <pa3bI C HCrrOJIb30BaHHeM XJIOPH.u.OB BblpamHBaeTCH TOJICTbIH CJIOH paCTeKaHHH TOKa
6
1
>350 MKM
j
GaP(rv
50
MKM). TaKaH TeXHOJIOrHH BblpamHBaHHH- He.u.oporoH MeTO.u.
1983;
Kish et aI.,
1994).
Bo BpeMH
y.u.aJIeHHH rro.u.JI02KKH GaAs TOJICTbIH CJIOH paCTeKaHHH TOKa GaP HrpaeT pOJIb MeXaHHQeCKOH orropbI .u.JIH TOHKOH .u.BOHHOH reTepocTpYKTYPbI. nOCJIe 3Toro reTepOCTpYKTypa co CJIOeM GaP CKperrJIHeTCH C rro.u.JI02KKoH GaP.
PHC. 9.11. BH,n: cBepxy KpHCTaJIJIa CBeTo,n:Ho,n:a C BepXHHM KOHTaKTOM B
npOlI.eCC coe.u.HHeHHH .u.Byx rrJIaCTHH Tpe6yeT BbICOKOH CTerreHH QHCTOTbI rrOBepXHOCTeH, OTCYTCTBHH KaKHX-JIH60 QaCTHlI. Me2K.u.y rrJIaCTHHaMH H y.u.aJIeHHH C rrOBepXHOCTeHOKHCJIOB. 3a30p Me2K.u.y .u.ByMH rrJIaCTHHaMH QaCTO 3arrOJIHHeTCH crrelI.HaJIbHbIM KJIeeM. npH BpameHHH rrJIaCTHH C BbICOKOH CKO-
TA. 9. CmPYKmYPbl
192
Bb!p~aHHe errOl! AIInGaP MeTO)J.OM MOVPE
C
BblCOKUM Koat/Jt/JUI1UeHmOM onmUtteCK020 BblBOaa
9. 7. AHmuompaJ/Ca/ou,fue onmUttecKue nOKpb1mUfl
COei\HHeHHe )J.BoiiHoii rerepOCTp}'KTYPLI eerroeM GaP CBeTO)J.HO.llHLlii e nOi\llolKKoii GaP Y)J.arreHHe nOi\llOlKKH BLIpall\lfBaHHe errOl! GaAs MeTO)J.OM no)J. )J.aBJleHHeM npH KpHCT3JIJI AlInGaP Ha npo3pa'IHoii paCTeKaHHlI TOKa GaP eerreKTHBHoro nOBbIDleHHOH nOi\llOlKKe GaP MeTO)J.OM VPE )IQf.lJ.KOCTHOrO TPaBJleHHl!
30
I
25
~ ....;-
I
I
CBeTO,WIO~I AlInGaP
A,= 590 HM
I
1I
AS
TS
T=300K
j
20 rrOrJIOIuaIOIII,al! rrO.D.JIO)J(l(a
'§
! II
(AS):
Vf rrpH 20 MA = 1,95 B Rs=40M
:s: 15 ~
"" (1)
fr 10
:r It:
POCTbIO 3TOT KJIeii BbI.D.aBJIllBaeTCSI Hapy)Ky. B pa60Tax KHIIIa H .D.p. H Xe-
1995;
Hoefler et aI.,
1996)
ormcaHa TeXHOJIOrHSI
COe.D.HHeHHSI rrJIaCTHH AlIrrGaP H GaP, rrpHMeHSIeMaSI .D.JISI rrO.D.JIO)KeK GaP .D.HaMeTpoM
50
1996).
Ij/
D
0,0
I
I
I
0,5
1,0
1,5
2,5
2,0
PHC. 9.13. BOJIbTaMnepHble xapaKTepHcTHKH, 3HaQeHHlI npllMoro Hanpll)l{eHHH H noCJIe.u.oBaTe.ifbHoro conpOTHBJIeHHH CBeTo.u.Ho.u.OB AlInGaP Ha no.u.JIO)l{KaX GaP H . GaAs
MM (.D.Ba .D.IOiiMa). B 3TOii TeXHOJIOrHH HCrrOJIb3yeTcSI O.D.HO-
OCHoe .D.aBJIeHHe rrpH rrOBblIIIeHHblX TeMrrepaTypax et aI.,
JJ
Vf npH 20 MA = 2,18B Rs = 12 OM
5
PHC. 9.12. CxeMa npouecca H3rOTOBJIeHHiI CBeTo.u.Ho.u.Horo KpHCTaJIJIa AlInGaP Ha np03paQHOH no.u.JIO)l{Ke GaP. IlocJIe y.u.aJIeHHlI no.u.JIO)l{KH GaAs nOBbIlIlaeTClI TeMnepaTypa H .u.BoHHall reTepOCTpYKTypa co CJIOeM GaP no.u. .u.aBJIeHHeM npH)I{HMaeTClI K no.u.JIO)l{Ke GaP, B pe3YJIbTaTe Qero
qJJIepa H .D.p. (Kish et aI.,
(TS):
rrp03palffial! nO.D.JIO)J(l(a
~
193
IloKa3aHo (Kish et aI.,
1995),
(750-1000 0c)
(Hoefler
.D.Y rrJIaCTHHaMH, JIH60 B rrO.D.JIO)KKe GaP. )1.JISI MHHHMH3aII,HH rrOrJIOIIIeHHSI
qTO KaqeCTBO rrpOBO.D.SIIIIeii
Ha CB060.D.HbIX HOCHTeJISIX KOHII,eHTpaII,HIOJIerHpYIOIIIHX rrpHMeceii n-THrra
06JIaCTH Ha rpaHHII,e pa3.D.eJIa .D.ByX rrJIaCTHH CHJIbHO 3aBHCHT OT BblpaBHH-
B rrO.D.JIO)KKe GaP cTpeMSITcSI rrO.D..D.ep)KHBaTb YMepeHHo HH3KOii.
BaHHSI Ha KpHCTaJIJIOrpaqmqeCKOM ypoBHe COe.D.HHSIeMbIX rrJIaCTHH, a He OT
Ha pHC.
9.14
.D.JISI cpaBHeHHSI rrpHBe.D.eHbI MHKpOCHHMKH .D.ByX CBeTO.D.H-
COrJIaCOBaHHSI HX KpHCTaJIJIHqeCKHX peIIIeTOK. OTMeqeHO, qTO rrpH O.D.HOBpe-
O.D.OB AlInGaP: Ha rrp03paQHOii GaP H rrOrJIOIIIaIOIIIeii GaAs rrO.D.JIO)KKax.
MeHHOM BpaIIIeHHH rrJIaCTHH KpHCTaJIJIOrpa~HqeCKHe opHeHTaII,HH HX rro-
B
BepXHOCTeii .D.OJI)KHbI OCTaBaTbCSI COrJIaCOBaHHbIMH. OrrHcaHHaSI TeXHOJIOrHSI
B CBeTO.D.HO.D.aX rrepBoro THrra. BHeIIIHHii KBaHTOBblii BbIX0.D. CBeTO.D.HO.D.OB
HCrrOJIb3yeTcSI B cepHiiHOM rrpOH3BO.D.CTBe CBeTO.D.HO.D.OB AlInGaP/GaP, pa-
AlInGaP/GaP B
60TaIOIIIHx rrpH HH3KHX rrpSIMbIX HarrpSI)KeHHSIX ('"
2,2
CBeT0.D.H0.D.aX BToporo THrra· rrO.D.JIO)KKa BblrJISI.D.HT 60JIee TeMHoii, QeM
1,5-3,0
pa3a BblIIIe, QeM CBeTO.D.HO.D.OB AlInGaP/GaAs.
B). Ilo Ha.D.e)KHOCTH
TaKHe CBeTO.D.HO.D.bI cpaBHHMbI co CBeTO.D.HO.D.aMH AlInGaP /GaAs. 06blqHO TeXHOJIOrHH CKJIeHBaHHSI rrJIaCTHH rraTeHTOBaHbI H HeH3BeCTHbI IIIHPOKOMY
9.7.
AHTHoTpa.)KaroID.He onTHlIeCKHe nOKpbITHH
Kpyry. IlpSIMoe HarrpSI)KeHHe SIBJISIeTCSI Ba)KHOii xapaKTepHcTHKOii CBeTO.D.HO.D.OB,
AHTHOTpa)KaIOIII,He AR (rrpoCBeTJISIIOIIIHe) rrOKpbITHSI QaCTO HCrrOJIb3YIOT
H3rOTOBJIeHHbIX rro TeXHOJIOrHH COe.D.HHeHHSI rrJIaCTHH. HH3KHe 3HaqeHHSI
B CBeT0.D.HO.D.aX .D.JISI CHCTeM CBSI3H C II,eJIbIO CHH)KeHHSI
HarrpSI)KeHHSI CBH.D.eTeJIbCTBYIOT 06 OTCYTCTBHH rrpOMe)KYTOqHbIX OKCH.D.HbIX
OTpa)KeHHH Ha rpaHHII,e pa3.D.eJIa rrOJIyrrpOB0.D.HHK-B03.D.YX. IlPH HOpMaJIb-
CJIOeB H ~OpMHpoBaHHH rrOJIHOII,eHHOii XHMHqeCKOii CBSI3H Me)K.D.Y .D.ByMSI
HOM rra.D.eHHH JIYQeii H& rrOBepXHOCTb pa3.D.eJIa K03~~HII,HeHT OTpa)KeHHSI
rrOJIyrrpOBO.D.HHKOBbIMH rrJIaCTHHaMH. Ha pHC.
9.13
rrOKa3aHbI BOJIbTaMrrep-
~peHeJIeBCKOro
H3JIYQeHHSI orrpe.D.eJISIeTCSI Bblpa)KeHHeM
Hble xapaKTepHcTHKH .D.ByX BbirrYCKaeMbIX rrpOMbIIIIJIeHHOCTbIO CBeTO.D.HO.D.OB AlInGaP -
Ha rrOrJIOIIIaIOIIIeii H3JIyqeHHe rrO.D.JIO)KKe H Ha rrp03paqHOii rro.D.-
R
JIO)KKe. BH.D.HO, qTO CBeTO.D.HO.D. Ha rrp03paqHOii rrO.D.JIO)KKe 06JIa.D.aeT 60JIee
(ns
BbICOKHMH 3HaqeHHSIMH rrpSIMoro HarrpSI)KeHHSI H rrOCJIe.D.OBaTeJIbHOrO corrpoTHBJIeHHSI rro cpaBHeHHIO co CBeTO.D.HO.D.OM Ha rrOrJIOIIIaIOIIIeii rrO.D.JIO)KKe.
= (-ns - -)2 nair
r.D.e n8 H nair -
+ nair)2 '
(9.10)
rrOKa3aTeJIH rrpeJIOMJIeHHSI rrOJIyrrpOBO.D.HHKa H B03.D.yxa.
DOJIee BblCOKoe HarrpSI)KeHHe y CBeTO.D.HO.D.OB Ha rrp03paqHbIX rrO.D.JIO)KKaX
HOpMaJIbHOe rra.D.eHHe JIYQeii rrpH HCrrOJIb30BaHHH aHTHOTpa)KaIOillerO
MO)KHO 06bSICHHTb OMHQeCKHMH rrOTepSIMH JIH60 Ha rpaHHII,e pa3.D.eJIa Me)K-
rrOKpbITHSI rr03BOJISIeT YMeHbIIIHTb ~peHeJIeBCKOe OTpa)KeHHe Ha rpaHHII,e
7
194
FIt.
9.B. Bu6Auoepat/JU'leCKUU cnUCOK
9. CmPYKmYPbt c BblCOKUM K03t/Jt/JUltUeHmOM onmU'leCKOeO BblBoaa a
195
T a 6 JI HIl, a 9.2. IToKaaaTeJIH IIpeJIOMJIeHHH H AHalIaaOHbI IIpOapaqHOCTH HeKoTopblX AH3JIeKTpHKOB - aHTHOTpa)KalOlUHX IIOKPbITHH
6
.ll.H3JIeKTpHK
IToKaaaTeJIb rrpeJIOMJIeHHH
Si02
1,45
Ab03
1,76
Ti02
2,50
ITpo3pa'ilioCTH, MKM
> 0, 15 > 0,15 > 0,35 > 0,25 > 0,34 > 0,12
-
PHC. 9.14. AlInGaP-cBeToAHoA )KeJITOrO CBe'leHHH C GaP CJIOeM pacTeKaHHH TOKa Ha IIOrJIOlUalOlUeH GaAs IIOAJIO)KKe (a); AlInGaP-cBeToAHoA )KeJITOrO CBeqeHHH C GaP-CJIOeM paCTeKaHHH TOKa Ha IIpOapaqHOH GaP-IIOAJIO)KKe (6). B CTPYKType CBeTOAHOAa BToporo THlIa Me)KAY IIOAJIO)KKOH H aKTHBHbIM CJIOeM MO)KHO paarJIHAeTb KJIeH Ha OCHOBe 3lIOKCHAHOH CMOJIbI C Ao6aBJIeHHeM cepe6pa (Kish, Fletcher, 1997)
KperrHTCSI
Si3N4
2,00
ZnS
2,29
CaF2
1,43
rrpH
pa3BapHBaIOTcSI rrOJIyrrpOBO.ll.HHK-B03.l1.YX rrO'lTH .lI.O HYJIH.
npH 3TOM rrOKpbITHe .lI.OJI}KHO
(9.11)
9.15
rrOKa3aHO aHTHOTpa}KaIOIII.ee rrOKpblTHe C OIITHMaJIbHbIMH
TOJIIII.HHOH: H rrOKa3aTeJIeM rrpeJIOMJIeHHSI, a B Ta6JI.
9.2
rrpHBe.ll.eHbI rro-
Ka3aTeJIH rrpeJIOMJIeHHSI H .lI.Harra30HbI rrp03paqHOCTH HeCKOJIbKHX THrrOB aHTHOTpa}KaIOIII.HX rroKpbITHH: (Palic,
rraSlHblX
CTOJI6HKOB-BbIBO.ll.OB,
ropa3.l1.0
.lI.opo}Ke
rrpOBOJIOqKaMH.
.L{OCTOHHCTBO
MOHTa}Ka
CBeTO.ll.HO.ll.OB
C
rrepeBepHYTblMH KpHCTaJIJIaMH 3aKJIIOqaeTCSI B TOM, 'ITO MeTaJIJIHqeCKHe KOHTaKTbI KpHCTaJIJIOB He MeII1aIOT BbIBO.ll.Y CBeTa, H3JIyqaeMOrO aKTHBHOH:
06JIa.ll.aTb TOJIIII.HHOH: H rrOKa3aTeJIeM rrpeJIOMJIeHHH:
Ha pHC.
rrOMOIII.H
06bIqHOrO . MOHTa}Ka CBeTO.ll.HO.ll.OB, KOr.ll.a rrJIaCTHHbI BepxHHx KOHTaKTOB
06JIaCTbIO.
B
CBeTO.ll.HO.ll.aX C HOpMaJIbHbIM pacrrOJIO}KeHHeM KpHCTaJIJIOB 60JIbII1aSl
rrJIOIII.a.ll.b BepxHero KOHTaKTa p-THrra rrpHBO.ll.HT K paBHoMepHOMY pacrrpe.ll.eJIeHHIO TOKa rro aKTHBHOH: 06JIaCTH, HO O.ll.HOBpeMeHHO C 3THM oHa· rrperrSlTcTByeT BbIBO.ll.Y CBeTa. nOCJIe.ll.HIOIO rrp06JIeMY MO}KHO peII1HTb C rrOMOIII.bIO MOHTa}Ka MeTO.ll.OM rrepeBepHYTbIX KpHCTaJIJIOB. 3TO oco6eHHo Ba}KHO rrpH
1998).
rrpoeKTHpoBaHHH MOIII.HbIX CBeTO.ll.HO.ll.OB.
aHTHOTPa)KaIOlUee rroKpblTHe, nAR = (n. nair) 1/2 rrOJIYIlPOBOAHHK C BbICOKHM rrOKa3aTeJIeM rrpeJIOMJIeHIDI, n.
BH6JIHOrpa4mQeCKHH cnHCOK
PHC. 9.15. AHTHOTpa)KalOlUee IIOKpblTHe C OlITHMaJIbHblMH TOJIlUHHOH H IIOKaaaTeJIeM IIpeJIOMJIeHHH
9.8.
Carr W. N. and Pittman G. E. "One-Watt GaAs p-n-junction infrared source" Appl. Phys. Lett. 3, 173(1963). Casey Jr. H. C. and Panish M. B. Heterostructure Lasers Part A: Fundamental Principles pp. 46, 47, and 175 (Academic Press, San Diego, 1978).
MOHTalK CBeTo,n:Ho,n:OB MeTo,n:OM nepeBepHYTbIX KpHCTaJIJIOB
.L{JISI
Adachi S. and Oe K. "Chemical etching characteristics of (001) GaAs" 1. Electrochem. Soc. 130, 2427 (1983). Billeb A., Grieshaber W., Stocker D., Schubert E. F., and Karlicek R. F. Jr. ·"Microcavity effects in GaN epitaxial layers" Appl. Phys. Lett. 70, 2790 (1997).
CBeTO.ll.HO.ll.OB
C
.lI.BYMSI
BepXHHMH
KOHTaKTaMH,
HarrpHMep
InGaN/GaN, BblpaIII.eHHbIX Ha camlmpoBblx rrO.ll.JIO}KKaX, HCrrOJIb3YIOT .lI.Ba THrra MOHTa}Ka: C HOpMaJIbHbIM pacrrOJIO}KeHHeM KpHCTaJIJIOB (3rrHTaKCHaJIbHbIH: CJIOH cBepxy) H C rrepeBepHYTbIMH KpHCTaJIJIaMH. MOHTa}K MeTO.ll.OM rrepeBepHYTbIX KpHCTaJIJIOB (cpJIHrr-qHrr-MOHTa}K), rrpH KOTOPOM KpHCTaJIJI
Franklin A. R. and Newman R. "Shaped electroluminescent GaAs diodes" !. Appl. Phys. 35,1153 (1964). Fujii T., Gao Y., Sharma R., Hu E. L., Den Baars S. P., and Nakamura S. "Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening" Appl. Phys. Lett. 84, 855 (2004). Gao Y., Fujii T., Sharma R., Fujito K., DenBaars S. P., Nakamura S., and Hu E. L. "Roughening hexagonal surface morphology on laser lift-off (LLO) N-face 7*
196
r.lt.
9. CmpYKmYPbl c BblCOKUM Koal/Jl/Juu,ueftmOM onmU'leCKOeO BblBoaa
GaN with simple photo-enhanced chemical wet etching" lpn. J. Appl. Phys. 43, L 637 (2004). Haerle V. "Naturally textured GaN surface" China Hi-Tech Fair (CHTF) Shenzhen, China, October 12-17 (2004). Haitz R. "Light-emitting diode with diagonal faces" US Patent 5,087,949 (l992). Hoefler G. E., Vanderwater D. A., DeFevere D. c., Kish F. A., Camras M. D., Steranka F. M., and Tan I.-H. "Wafer bonding of 50-mm diameter GaP to AIGalnP-GaP light-emitting diode wafers" Appl. Phys. Lett. 69, 803 (l996). loffe Institute (Saint Petersburg, Russia) database on compound semiconductors available at www.ioffe.rssLru/SVA/NSM/Semicond/ (2002). Kim O. K. and Bonner W. A. "Infrared reflectance and absorption ofn-type InP" I. Electron. Mater. 12,827 (1983). Kish F. A. and Fletcher R. M. "AIGalnP light-emitting diodes" in High Brightness Light-Emitting Diodes edited by G. B. Stringfellow and M. G. Craford, Semiconductors and Semimetals 48 (Academic, San Diego, 1997). Kish F. A., Steranka F. M., DeFevere D. c., Vanderwater D. A., Park K. G., Kuo C.P., Osentowski T.D., Peanasky M.J., Yu J.G., Fletcher R.M., Steigerwald D. A., Craford M. G., and Robbins V. M. "Very high-efficiency semiconductor wafer-bonded transparent-substrate (AlxGal-x )o.slno.sP /GaP light-emitting diodes" Appl. Phys. Lett. 64, 2839 (1994). Kish F.A., Vanderwater D.A., Peanasky M.J., Ludowise M.J., Hummel S.G., and Rosner S. J. "Low-resistance ohmic conduction across compound semiconductor wafer-bonded interfaces" Appl. Phys. Lett. 67, 2060 (1995). Knox R. S. Theory of Excitons (Academic Press, New York, 1963). Krames M. R., Ochiai-Holcomb M., Hofler G. E., Carter-Coman C., Chen E.I., Tan I.-H., Grillot P., Gardner N. F., Chui H. c., Huang J.-W., Stockman S. A., Kish F. A., Craford M. G., Tan T. S., Kocot C. P., Hueschen M., Posse It J., Loh B., Sasser G., and Collins D. "High-power truncated-inverted-pyramid (AlxGal-x)o,slno,sP/GaP light-emitting diodes exhibiting> 50% external quantum efficiency" Appl. Phys. Lett. 75, 2365 (1999). Loebner E. E. "The future of electroluminescent solids in display applications" Proc. IEEE 61, 837 (1973). Nichia Corporation. BH3yaJIbHbIH: OCMOTP nOBepxHocTH MHKpocxeMbI GaN-C,U IIOKa3aJI, QTO OHa 6eJIal1, T. e . .ll.H
9.B. Eu6.1tuoepal/JU'leCKUU cnUCOK
197
Schmid W., Scherer M., Jager R., Strauss P., Streubel K., and Ebeling K. "Efficient light-emitting diodes with radial outcoupling taper at 980 and 630 nm emission wavelength" Proc. SPIE 4278, 109 (2001). Schmid W., Scherer M., Karnutsch c., Plobl A., Wegleiter W., Schad S., Neubert B., and Streubel K. "High-efficiency red and infrared light-emitting diodes using radial outcoupling taper" IEEE I. Sel. Top. Quantum Electron. 8, 256 (2002). Schnitzer I., Yablonovitch E., Caneau C., Gmitter T. J., and Scherer A. "30% external quantum efficiency from surface-textured, thin-film Iight~emitting diodes" Appl. Phys. Lett. 63, 2174 (1993). . Schubert E. F., Goebel E. 0., Horikoshi Y., Ploog K., and Queisser H. J. "Alloy broadening in photoluminescence spectra of AIGaAs" Phys. Rev. B 30, 813 (1984). Schubert E. F., Goepfert I. D., Grieshaber W.,and Redwing J. M. "Optical properties of Si-doped GaN" Appl. Phys. Lett. 71,.921 (1997). Sinzinger S. and Jahns J. Microoptics (Wiley-VCH, New York; 1999). Stocker D. A., Schubert E. F., and Redwing J. M. "Crystallographic wet chemical etching of GaN" Appl. Phys. Lett. 73, 2654 (l998a). Stocker D. A., Schubert E. F., Grieshaber W., Boutros K. S., and Redwing J. M. "Facet roughness analysis for InGaN/GaN lasers with cleaved facets" Appl. Phys. Lett. 73, 1925 (1998b). Stocker D. A., Schubert E. F., and Redwing J. M. "Optically pumped InGaN/GaN lasers with wet-etched facets" Appl. Phys. Lett. 77,4253 (2000). Swaminathan V. and Macrander A. T. Materials Aspects of GaAs and InP Based Structures" (Prentice Hall, Englewood Cliffs, 1991). Urbach F. "The long-wavelength edge of photographic sensitivity of the electronic absorption of solids" Phys. Rev. 92, 1324 (1953). Walukiewicz W., Lagowski J., Jastrzebski L., Rava P., Lichtensteiger M., Gatos C. H., and Gatos H. C. "Electron mobility and free-carrier absorption in InP; determination of the compensation ratio" I. Appl. Phys. 51, 2659 (l980). Wiley J. D. and DiDomenico Jr. M. "Free-carrier absorption in n-type GaP" Phys. Rev. B 1, 1655 (l970). Windisch R., Schobetth S., Meinlschmidt S., Kiesel P., Knobloch A., Heremans P., Dutta B., .Borghs G., and Doehler G. H. "Light propagation through textured surfaces" I. Opt. A: Pure Appl. Opt. 1, 512 (1999). Windisch R., Dutta B., KUijk M., Knobloch A., Meinlschmidt S., Schoberth S., Kiesel P., Borghs G., Doehler G. H., and Heremans P. "40% efficient thin-film surface textured light-emitting diodes by optimization of natural lithography" IEEE Trans. Electron Dev. 47, 1492 (2000). Windisch R., Rooman c.; Kuijk M., Borghs G., and Heremans P. "Impact of texture-enhanced transmission on high-efficiency surface-textured light-emitting diodes" Appl. PhY$. Lett. 79, 2315 (2001). Windisch R., Rooman C., Dutta B., Knobloch A., Borghs G., Doehler G. H., and Heremans P. "Light-extraction mechanisms in high-effiCiency surface-
198
rl!.
9. CmpYKmYPbl C 8blCOKUM K03cpcpuu,ueHmoM onmu'teCKoeo 8bl8oaa
textured light-emitting diodes" IEEE !. Sel. Top. Quantum Electron. 8, 248 (2002).
,nonOJlHeHHe pe)l.aKTOpa 1. IIaHKOB M.I1. OnTH"IeCKHe npOu.eCCbI B nOJIynpOBo.o.HHKax. - M.: MHP, 1973. 2. OOH"I-opyeBH"I B. JI., 3BlIrHH 11. II., KaHnep r., MHPOHOB A. r., 3H.o.epJIaHH P., 3ccep o. 3JIeKTpOHHall TeopHlI Heynopll.o.o"leHHblx nOJIynpOBo.o.HHKOB. - M.: HaYKa, 1981. 310 c. 3. 5lccHeBH"I 11. H. H .o.p.,
r JIasa
10
OTPAJKATEJIH
r.
l1.lI:eaJIbHble OTpa>KaTeJIR,
BCTpaRBaeMble B CTPYKTYPbI CBeTO.lI:RO.lI:OB,
.lI:OJI>KHbI 06JIa.lI:aTb: BbICOKOR OTpa>KaTeJIbHOR crroco6HoCTbIO; .lI:OCTaTOLJHO IImpoKoR 06JIaCTbIO C BblCOKRM K03CPCPRIJ,ReHTOM OTpa>KeHRH (umpoKRM crreKTpoM OTpa>KeHRH); R30TporrHbIMR xapaKTepRcTRKaMR; HR3KRM corrpOTRBJIeHReM (LJTo6bI o6eCrreLJRBaTb rrpoTeKaHRe TOKa LJepe3 OTpa>KaTeJIb). . . Ha rrpaKTRKe 6bIBaeT HeJIerKO orrpe.lI:eJIRTb, KaKoR R3 TRrrOB OTpa>KaTeJIeR rr0.lI:X0.lI:RT B TOM RJIR RHOM KOHKpeTHOM CJIYLJae. Ha pRC.
10.1
rrOKa3aHbI HeCKOJIbKO BapRaHToB OTpa>KaTeJIeR: MeTaJIJIR-
LJeCKRR OTpa>KaTeJIb, pacrrpe.lI:eJIeHHOe 3epKaJIO Bp3rra
(DBR);
m6pR.lI:HbIR
OTpa>KaTeJIb, COCTOHW.RR R3 MeTaJIJIRLJeCKRX CJIOeB R 3epKaJI Bp3rra; OTpa>KaTe.1Ib, rrocTpoeHHbIR Ha rrpRHIJ,Rrre rrOJIHOrO BHytpeHHero OTpa>KeHRH
(TIR)
R BceHarrpaBJIeHHbIR OTpa>KaTeJIb
(ODR). B
rrOCJIe.lI:YIOw.Rx pa3.lI:eJIaX
.lI:aHHOR rJIaBbI 6Y.lI:YT paccMaTpRBaTbcH rrepeLJRCJIeHHble TRrrbI 3epKaJI.
I
I I
MeTlIJIJIH'IecKHii: OTpalKaTelTh
Pacrrpe.n.e.rreHHoe 3epKaJIO Ep3rra
rH6pImHLIii: OTpalKaTenb
IIOJIHoe BHYTPeHHee OTpalKeHHe
BceHarrpaBJIeHEUdH O1palKaTelTh
R=80-98% T=O%
R<100% T=I-R
R< 100% T=O%
R= 100% T=O%
R<100% T=O%
PHC. 10.1. IIpHMepbI OTpa)l{aTeJIeH: MeTaJIJIH"IeCKHH OTpa)l{aTeJIb; pacnpe.o.eJIeHHOe 3epKaJIO op9rra (DBR); rH6PH.o.HbIH OTpa)l{aTeJIb, COCTOllIII:HH H3 MeTaJIJIH"IeCKHX CJIOeB H 3epKaJI op9rra; OTpa)l{aTeJIb, nOCTpoeHHbIH Ha npHHU:Hne nOJIHOrO BHYTpeHHero OTpa)l{eHHlI (TIR) H BceHanpaBJIeHHblH OTpa)l{aTeJIb (ODR). IIpHBe.o.eHHble 3Ha"leHHlI COOTBeTCTBYIOT THnOBbiM K09cpcpHU:HeHTaM OTpa)l{eHHlI H nponYCKaHHlI. Ha pHCYHKe TaK)I{e nOKa3aHbI yrJIbI na.o.eHHlI JIY"leH, npH KOTOPblX 06eCne"lHBaeTClI xopOIlIall OTpa)l{aIOIII:all cnoc06HOCTb Ha
pRCYHKax
CTPYKTYP
BCeX
CBeTO.lI:RO.lI:OB
OTpa>KaTeJIeR CO
rrOKa3aHa
BCTpOeHHbIMR
BH.eUlH.RR cpeaa.
OTpa>KaTeJIHMR
TaKOR
.ll.JIH
cpe.lI:OR
Fit. 10. Ompa:HCameltu
200
10.1. MemaltltUtleCKue· onipa:HCameltu,
100
'"
rrpoIlle.n.Illero l.Jepe3 Hee, rrporropuliOHaJIbHbI KBa.n.paTaM HarrpH)l{eHHOCTeH
Ag/ B03,l1)'X
80
:s:
:I: CI.l
HOpM3.JThHOe IIa,IleHHe nyqeii:
cooTBeTcTBYIOIII.HX
R=98,5%
Jrt0I4Hocmu U3JlyttertUH.
3JIeKTpHl.JeCKHX
~ 60 ~
R
(Ag/GaAs: R '" 95%)
0
t; 40
CI.l
:s: ::r :s:
oS< oS<
~
201
I1HTeHcHBHOCTH H3JIYl.JeHHH, OTpa)l{eHHOrO OT rpaHHUbI .n.ByX cpe.n. H
~
'"
~-
omp€l:HCalO~ue KOflmaKmbl
rrOJIeH.
Koa4}(jJu~uertm
ompa:JICertuH.
orrpe.n.eJIHeTCH Bblpa)l{eHHeM
= IErl: = Irl2 = IN\ - N212 IEil . NI +N2
(10.2)
113 3aKOHa coxpaHeHHH 3HeprHH BbITeKaeT COOTHOIlleHHe .n.JIH HaXO)l{.n.eHHH
20
K03cpcpHUHeHTa rrporrYCKaHHH MOIII.HOCTH H3JIYl.JeHHH l.Jepe3 OTpa)l{aTeJIb 6e3
0 0,6
rrOTepb:
0,7
0,8
0,9
T= 1-R.
1,1
1,0
,lVurna BOJIHLI ).., MKM
(10.3)
TIOCKOJIbKY B MeTaJIJIaX Bcer.n.a rrpOHcxo.n.HT rrOTepH H3JIYl.JeHHH, KO3CPCPHUHeHT rrporrYCKaHHH H3JIYl.JeHHH B CJIYl.Jae TOJICTbIX MeTaJIJIHl.JeCKHX
PHC. 10.2. 3KcnepHMeHTaJIbHO H3MepeHHblH cneKTp OTpa)KaTeJIbHOH cnoco6HoCTH rpaHHU:bI pa3.n:eJIa cepe6po/Bo3.n:yx npH HOpMaJIbHOM na.n:eHHH JIyqeH. Cpe.n:HHH K03cpqmU:HeHT OTpa)KeHHll B 06JIaCTH BH.n:HMoro H3JIyqeHHll paBeH 98,5 %
III.eil: crroco6HOCTH rpaHHUbI pa3.n.eJIa MeTaJIJI-.n.H3JIeKTpHK MO)l{HO BOCrrOJIb-
HBJHIIOTCH rrOJIyrrpoBo.n.HHKoBbIe MaTepHaJibI. BHeIIIHHH cpe.n.a OKa3bIBaeT
rrpeJIOMJIeHHH .n.H3JIeKTpHKa H MeTaJIJIa B BH.n.e
CHJIbHOe BJIHHHHe Ha cBoii:cTBa oTpa:)KaTeJIeH. HarrpHMep, OTpa)l{alOIII.aH
rrOJIYl.JHM ypaBHeHHH .n.JIH oueHKH K03CPCPHUHeHTa OTpa)l{eHHH 3epKaJIbHOii
crroco6HoCTb rpaHHUbI pa3.n.eJIa MeTaJIJI-rrOJIynpOBO.n.HHK Bcer.n.a xy)l{e, l.JeM
rrOBepXHOCTH:
CJIOeB rrpH6JIH)l{eHHO paBeH HyJIlO, T. e.
T
:=:;j
O.
,I:LJIH HaXO)l{.n.eHHH OTpa)l{alO-
30BaTbCH ypaBHeHHeM
NI = nl
H
N2 = n2
+ ik2,
rpaHHUbI MeTaJI-!I-Bo3.n.yX.
R = (nl - nd+ k;.
10.1.
(nl
MeTaJIJIHQeCKHe oTpalKaTeJIH, OTpalKalOm,He
I1.n.eaJIbHble MeTaJIJIbI 06JI~.n.aIOT BbICOKOH rrpOBo.n.HMOCTblO
H np03paQHbIe KOHTaKTbI H, MeTaJIJIH"~eCKHe OTpa)l{aTeJIH C 3epKaJIbHbIMH rrOBepXHOCTHMH Ha rpa-
HHuax
pa3.n.eJIa
MeTaJIJI-B03.n.YX -
3TO
3epKaJIa,
(10.4)
+nd+k;
06JIa.n.alOIII.He
BbICOKH-
CJIe.n.OBaTeJIbHO,
H
MHHMaH
eM
a
y
HHX
k
l.JaCTb YOKa3aTeJIH
00,
--t
3aMeTHM,
rrpeJIOMJIeHHH
k
'ITO
(a
--t
rrpOBo.n.HMOCTb
CBH3aHbI
00)
a
COOTHOIlleHH-
= 2n· w . co . k. CTIe.n.yeT TaK)l{eOTMeTHTb, 'ITO K03CPCPHUHeHT rrorJIOa MO)l{HO HaHTH rrpH rrOMOIII.H Bblpa)l{eHHH a = 47fk/>..o. Tor.n.a .n.JIH
MH 9Tpa)l{aTeJIbHbIMH xapaKTepHCTHKaMH H HCrrOJIb3yeMble l.JeJIOBel.JeCTBOM
III.eHHH
B Tel.JeHHe HeCKOJIbKHX TbICHl.JeJIeTHH. ,I:LJIH MeTaJIJIHl.JeCKHX OTpa)l{aTeJIeH
H.n.eaJIbHbIX MeTaJIJIOB crrpaBe.n.JIHBbI CooTHoIlleHHH·
xapaKTepHbI BblCOKHe 3Hal.JeHHH K03cpcpHUHeHTa OTpa)l{eHHH B IIIHPOKOM
(10.5)
.n.Harra30He .n.JIHH BOJIH H CJIa6aH 3aBHCHMOCTb OTpa)l{aTeJIbHOH crroco6HOCTH OT yrJIa rra.n.eHHH JIYl.JeH. TIepBble BbICOKOKal.JeCTBeHHble MeTaJIJIHl.JeCKHe 3epKaJIa rrpHMeHHJIHCb B aCTpOHOMHl.JeCKHX TeJIeCKOrrax (Bell, Ha pHC.
10.2
OTCIO.n.a CJIe.n.yeT, 'ITO K03cpcpHUHeHTbI OTpa)l{eHHH H.n.eaJIbHbIX MeTaJIJIOB
1922).
rrOKa3aHa rrOJIYl.JeHHaH 3KcrrepHMeHTaJIbHO crreKTpaJIbHaH
xapaKTepHcTHKa OTpa)l{aTeJIbHOH crroco6HoCTH rpaHHUbI pa3.n.eJIa cepe6poB03.n.yx .n.JIH HOpMaJIbHO rra.n.alOIII.HX JIYl.JeH. 3Ta xapaKTepHcTHKa OTJIHl.JaeTCH IIIHPOKOH rrOJIOCOH C BbICOKOH OTpa)l{aTeJIbHOH crroco6HoCTbIO H Cpe.n. HHM
%.
K03cpcpHUHeHToM OTpa)l{eHHH 98,5 K03CPCPHUHeHT OTpa)l{eHHH H3JIYl.JeHHH Ha rpaHHue pa3.n.eJIa MeTaJIJIHl.JeCKoro OTpa)l{aTeJIH H BHeIIIHeH Cpe.n.bI MO)l{eT 6bITb HaH.n.eH rrpH rrOMOIII.H
paBHbI e.n.HHHue, a cpa30BbIH c.n.BHr H3JIYl.JeHHH rrpH OTpa)l{eHHH OT H.n.eaJIbHbIX MeTaJIJIHl.JeCKHX 3epKaJI paBeH
KOHel.JHO 60JIbIllaH, rro3ToMY HX OTpa)l{alOIII.aH crroco6HoCTb Bcer.n.a MeHbIlle
(10.1)
1904) rrpe.n.JIO)l{eHa Mo.n.eJIb .n.JIH aHa10.1 rrpe.n.cTaBJIeHbI 3Hal.JeHHH n H k .n.JIH
e.n.HHHUbI. B pa60Te ,I:Lpy.n.e (Drude, JIH3a rroTepb B MeTaJIJIax. B Ta6JI.
HeCKOJIbKHX MeTaJIJIOB H· rrOJIyrrpoBo.n.HHKOB; I1crrOJIh3YH ypaBHeHHe
ypaBHeHHH
7f.
TIPOBO.n.HMOCTb peaJIbHbIX MeTaJIJIOB, XOTH H Ol.JeHb BbICOKaH, HO He 6ec-
(lOA),
MO)l{HO paCCl.JHTaTb K03CPCPHUHeHTbI OT-
pa)l{eHHH OT rpaHHU pa3.n.eJIa MeTaJIJI-Bo3.n.yx H MeTaJIJI':"rrOJIyrrpoBo.n.HHK. Pe3YJIbTaTbI paCl.JeTOB rrpHBe.n.eHbI B Ta6JI.
10.2.
KaK CJIe.n.yeT H3 Hee, B BH-
.n.HMOH 06JIaCTH crreKTpa K03CPCPHUHeHTbI OTpa)l{eHHH Ha rpaHHuax pa3.n.eJIa r.n.e
NIH N 2 -
KOMrrJIeKCHble rrOKa3aTeJIH rrpeJIOMJIeHHH .n.ByX cpe.n..
MeTaJIJI-rrOJIyrrpoBo.n.HHK Bcer.n.a HH)l{e, l.JeM Ha rpaHHuax MeTaJIJI-B03.n.yX.
Fit. 10.
202
Ompa3ICameltu
10.1. MemaltltU'teCKue ompa3ICameltU, ompa3ICa/ow,ue KOlimaKmbt
203
T a 6 JI H U a 10.1. .LJ:eHcTBHTeJIbHble H MHHMble qaCTH nOKa3aTeJIeH npeJIOMJIeHHlI pa3JIHqHblX nOJIynpoBoJJ:HHKOB H MeTaJIJIOB npH TOJIlUHHe CJIOeB 0,5 MKM H 1,0 MKM
~JI TIapaMeTpbI >..,
GaP GaP
Si
Ag
Ag
Au
Au
AI
AI
0,5
1,0
0,5
1,0
0,5
1,0
0,5
1,0
1,0
n
3,5
3,1
3,6 0,05 0,04 0,86 0,26 0,77 1,35
k
~O
~O
~O
MKM
3,1
7,1
PHC. 10.3. OCJIa6JIeHHe BOJIHOBOJJ:HOH MOJJ:bI Ha-aa nOTepb npH OTpa)!{eHHH HSleT .D.Be
1,90 6,82 6,08 10,7
OTpa)l{aTeJISI H OMHqeCKOrO KOHTaKTa C 60JIbIllOH IIJIO-
III.a.D.bIO IIoBepxHocTH. CJIOH AuBe TaK)l{e HrpaeT pOJIb IIOCTaBIII.HKa aKueIITOPOB (Be), 06eCIIeqHBaIOIII.HX HH3Koe COIIpOTHBJIeHHe KOHTaKTa. KOHTaKTbI
3TO CBSl3aHO C MeHbIlleH pa3HHueH IIoKa3aTeJIeH IIpeJIOMJIeHHSI MeTaJIJIOB H
OT)l{HraIOT IIpH 450°C B TeqeHHe 15 MHH. PaccMaTpHBaeMble CBeTO.D.HO.D.bI
IIOJIYIIPOBO.D.HHKOB, qeM MeTaJIJIOB H B03.D.yxa.
H3rOTaBJIHBaIOT IIO TeXHOJIOrHH COe.D.HHeHHSI IIO.D.JIO)l{eK C HCIIOJIb30BaHHeM KpeMHHeBbIX IIO.D.JIO)l{eK. TIo OKOHqaHHH BblpaIII.HBaHHSI Tpe6yeMoH CTPYK-
T a 6 JI H U a 10.2. PaCQeTHble aHaQeHHlI K03cj>cj>HUHeHToB OTpa)!{eHHlI OT rpaHHU paaJJ:eJIa MeTaJIJI-BoaJJ:YX H MeTaJIJI-nOJIynpoBoJJ:HHK npH TOJIlUHHe MeTaJIJIa 0,5 MKM H 1,0 MKM
TYPbI IIO.D.JIO)l{Ka GaAs, Ha KOTOPOH BblpaIII.HBaJIHCb 3IIHTaKCHaJIbHble CJIOH, Y.D.aJISleTCSI. TIOCKOJIbKY KpeMHHH IIO cpaBHeHHIO C GaAs o6JIa.D.aeT 60JIee BbICOKOH TeIIJIOIIpOBO.D.HOCTbIO, IIOJIyqeHHble CBeTO.D.HO.D.b1 HMeIOT 60JIee HH3-
R%
MaTepHaJi
Ag/BoaJJ:Yx (0,5) 0,982
R%
MaTepHaJi
R%
MaTepHaJi
AI/BoaJJ:Yx (0,5)
0,923
AU/BoaJJ:Yx (0,5) 0,514
KHe TeMIIepaTypbI IIepeXO.D.OB H MeHbIllHH C.D.BHr .D.JIHHbI BOJIHbI H3JIyqeHHSI,
Ag/BoaJJ:Yx (1)
0,997
AI/BoaJJ:Yx (I)
0,955
AU/BOall.Yx (1)
0,979
Ag/GaP (0,5)
0,969
AI/GaP (0,5)
0,805
Au/GaP (0,5)
0,470
Ag/GaP (1,0)
0,992
AI/GaP (1,0)
0,876
Au/GaP (1,0)
0,945
Ag/Si (1,0)
0,991
AI/Si (1,0)
0,861
Au/Si (1,0)
0,939
BbI3BaHHbIH .D.)l{OYJIeBbIM HarpeBOM. l1HTeHcHBHOCTb H3JIyqeHHSI CBeTO.D.HO.D.OB Ha OCHOBe AlInGaP C MeTaJIJIHqeCKHMH OTpa)l{aTeJISlMH BbIIlle, qeM Y .D.HO.D.OB C 3epKaJIaMH I3p3rra, BblpaIII.eHHblX Ha IIO.D.JIO)l{KaX GaAs. OMHqeCKHe KOHTaKTbI C HH3KHM COIIpOTHBJIeHHeM
III
rpYIIIIbI H BbIIlle 600°C .D.JISI HHTPH.D.OB
III
rpYIIIIbi. TIpH OT)l{Hre KOH-
TaKTOB He TOJIbKO MeHSleTCSI BH.D. MeTaJIJIHqeCKOH IIOBepXHOCTH OT rJIa.D.KOH .D.O IllepOXOBaTOH, HO TaK)l{e IIPOHCXO.D.HT YMeHbIlleHHe HX OIITHqeCKOH OT-
TIPH BceH IIpocToTe H IllHPOKOH pacIIpocTpaHeHHocTH MeTaJIJIHqeCKHX OTpa)l{aTeJIeH 3epKaJIa HMeIOT cYIII.eCTBeHHbIH He.D.OCTaTOK -
pa)l{aTeJIbHOH CIIoco6HOCTH.
.D.OBOJIbHO BbI-
Ha IIpaKTHKe TaK)l{e HCIIOJIb3YIOT HeCIIJIaBHble KOHTaKTbI, .D.JISI HaHe-
COKHe IIoTepH. HOTepH IIpH e.D.HHHqHOM OTpa)l{eHHH Ha rpaHHue pa3.D.eJIa
-R,
5%,
ceHflSl KOTOPbIX Ha IIOJIYIIPOBO.D.HHK He Tpe6YIOTCSI BbICOKHe TeMIIepaTY-
OHH CTaHOBSlTCSI eIII.e 60JIee OIII.YTHMbIMH B CJIyqae H3JIyqeHHSI, IIPOXO.D.SlIII.e-
pbI. ,[(JISI 06eCIIeqeHHSI XOPOIllHX BOJIbTaMIIepHbIX xapaKTepHCTHK TaKHX
MeTaJIJI-IIOJIYIIPOBO.D.HHK B TaKHX OTpa)l{aTeJISlX, 1
COCTaBJISlIOT
rv
ro IIO BOJIHOBO.D.aM (pHC. 10.3). l1HTeHcHBHOCTb 3aTyxaHHSI BOJIHOBO.D.HblX
KOHTaKTOB IIOBepXHOCTb IIOJIYIIPOBO.QHHKOBbIX CJIoes ,n:OJI)l{Ha 6bITb CHJIbHO
MO.D. MO)l{HO oueHHTb IIpH IIOMOIII.H COOTHOIlleHHSI
JIempOBaHa. O.D.HaKO .D.a)l{e IIpH BblIIOJIHeHHH 3Toro YCJIOBHSI COIIpOTHBJIeHHe HeCIIJIaBHbIX KOHTaKTOB 06blqHO BbIIlle, qeM Y CIIJIaBHbIX.
1/10 = RN = (1- L)N ~ 1 - NL,
(10.6)
>
TOJICTble MeTaJIJIHqeCKI1e 11 rI16pI1.D.Hble OTpa)l{aTeJII1 SlBJISlIOTCSI IIOrJIOIII.aIOI.gI1MI1, 11 I1X HeJIb3S1 I1CIIOJIb30BaTb B CTpYKTypax CBeTO.D.I10.D.OB .D.JISI
r.D.e
N-
qHCJIO OTpa)l{eHHH IIpH IIPOXO)l{.D.eHHH OIITHqeCKOH BOJIHbI qepe3
BOJIHOBO.D.,
L
= 1-
R-
IIoTepH IIpH OTpa)l{eHHH
(L»
1, II03TOMY
R~
1).
113 ypaBHeHHSI (10.6) BH.D.HO, 'ITO He60JIbIllHe H3MeHeHHSI K03
R
(Bcero Ha HeCKOJIbKO IIpoueHTOB) IIpH 60JIbIllOM qHCJIe OTpa-
)l{eHHH BHYTPH BOJIHOBO.D.a MorYT IIpHBeCTH K CYIII.eCTBeHHOMY CHH)l{eHHIO HHTeHCHBHOCTH BOJIHOBO.D.HbIX MO.D. (HaIIpHMep B .D.Ba pa3a).
BbIBO.D.a I13JIyqeHI1S1. TIpI1 TOJIIII.I1He 60JIee 50 HM MeTaJIJII1qeCKI1e OMI1qeCKI1e KOHTaKTbI <paKTI1qeCKI1 HeIIp03paqHbi. TI03TOMY IIpH .D.OCTaTOqHO TOJICTbIX CJIOSIX MeTaJIJIa IIPOIIYCKHaSl CIIoco6HOCTb m6pI1.D.HbIX OTpa)l{aTeJIeH CTaHOBI1TCSI 6JII13KOH K HYJIIO (Tu et ai., 1990). OqeHb TOHKI1e MeTaJIJII1qeCKI1e KOHTaKTbI IIOJIYIIpo3paqHbi. TIPI1 TOJI- ' III.I1He MeTaJIJII1qeCKOH IIJIeHKI1 5-10 HM K03
B pa60Te(Horng et ai., 1999a, 1999b) OIIHcaHbI CBeTO.D.HO.D.bI Ha OC-
I11I1HCTBa MeTaJIJIOB IIpI16JII13I1TeJIbHO paBeH 50
%.
,[(JISI IIOJIyqeHI1S1 60JIee
HOBe AlInGaP, B KOTOPbIX .D.JISI IIOBbIIlleHHSI K03
.D.I1MO yqI1TbIBaTb He TOJIbKO .D.eHCTBHTeJIbHYIO, HO 11 MHI1MYIO qaCTb IIOKa-
CJIOHCTYIO CTPYKTYPY TaKHX CBeTO.D.HO.D.OB MO)l{HO IIpe.D.CTaBHTb
B BH.D.e
3aTeJISI IIpeJIOMJIeHHSI (Palik, 1998). O.D.HaKO OqeHb TOHKI1e MeTaJIJII1qeCKI1e
AlInGaP j AuBejSi02jSi. [paHHua pa3.D.eJIa p-THIIa AlInGaP-AuBe, BbIIIOJI-
KOHTaKTbI MorYT I1MeTb 6yrpI1CTYIO CTpyKTYPY. K TOMY )l{e 3JIeKTpWlecKoe
TOqHOrO 3HaqeHHSI K03
204
10.2. 3eplwAa H.a OCH.OBe nOAH.020 BH.ympeH.H.e20 ompaJICeH.UR
FA. 10. OmpaJICameAU
205
corrpOTHBJIeHHe MeTaJIJIHqeCKHX rrJIeHOK MO)!{eT 6bITb OqeHb 60JIbIIIHM, OCO6eHHo eCJIH HX cTpyKTypa 6yrpHcTaH. B
CBeTO)l.HO)l.ax Ha rrp03paqHbIX rrO)l.JIO)!{KaX, HarrpHMep AlInGaP Ha
rrO)l.JIO)!{Ke GaP, qaCTb CBeTa, H3JIyqaeMOrO aKTHBHOH 06JIaCTbIO, rrOrra)l.aeT Ha KOHTaKT rrO)l.JIO)!{KH. ,UJIH YBeJIHqeHHH
OTpa)!{aTeJIbHOH crroc06HOCTH
PIfC.
10.4.
JIHilib He3HaqHTeJIbHYIO qaCTb ee rrOBepXHOCTH -
OTpa)!{eHHbIH If rrpeJIOMJIeHHblH JIyqlf CBeTa Ha rpaHIfu:e pa3,lleiIa ,llByX cpe,ll
06paTHOH CTOPOHbI rrO)l.JIO)!{KH HHOr,ll.a HCrrOJIb3YIOT KOHTaKT, 3aKpbIBaIOmHH
C rrOKa3aTeJIHMIf
nl
rrpeJIOMJIeHIfH
If
n2.
MHOrOrrOJIOCKOBbIH HJIH
KOJIbu:eBoH. npHMeHeHHe rrpOBO,ll.HmeH Ag-co,ll.ep)!{ameH 3rrOKCH,lI.HOH CMOJIbI
KopHemiyc BHJIJIe60p)l. CHeJIJIb CcpOpMyJIHpOBaJI
OTpa)!{aTeJIbHYIO crroc06HOCTb B yqaCTKaX, He rrOKpbITbIX OMHqeCKHM KOH-
113 cpaBHeHHH Bblpa)!{eHHH
3rrOKCH,lI.HaH CMOJIa ,lI.JIH KperrJIeHHH KpHCTaJIJIOB C rrp03paqHWMH rro,ll.JIO)!{KaMH B Koprryc, HarrpHMep B CBeTO,ll.HO,ll.aX Ha OCHOBe InGaN Ha camilHPOBWX rrO,ll.JIO)!{KaX, TaK)!{e HrpaeT pOJIb OTpa)!{aTeJIH. TaKaHCMOJIa 06JIa-
aaKOH. CH.eJlJluyca:
(10.7)
H
(10.8)
(10.8)
CTaHOBHTCH OqeBH,lI.HbIM, qTO
3aKOH KerrJIepa HBJIHeTCH arrrrpoKcHMaU:HeH 3aKOHa CHeJIJIHyca ,lI.JIH MaJIbIX yrJIOB. Ha pHC.
10.4
rrOKa3aHbi yrJIbI, HCrrOJIb3yeMble B 3aKOHe CHeJIJIHyca.
KerrJIep TaK)!{e 06HapY)!{HJI, qTO ,lI.JIH HeKoTopbIX rrap MaTepHaJIOB B cpaB-
,lI.aeT He TOJIbKO xopOilieH rrpOBO)l.HMOCTbIO, HO H BbICOKHM K03CPCPHU:HeHTOM
HHTeJIbHO Y3KOM )l.Harra30He yrJIOB rra,ll.eHHH yrJIw
OTpa)!{eHHH, rr03TOMY ee HCrrOJIb30BaHHe MO)!{eT rrpHBeCTH K POCTY K03CP-
rrpeBblIIIaTb
CPHU:HeHTa OIITHqeCKOrO BbIBO,ll.a H3JIyqeHHH CBeTO,ll.HO,ll.OB C rrp03paqHbIMH
OTpa)!{eHHH. 113 3aKOHa CHeJIJIHyca H YCJIOBHH O2 = 90 Bblpa)!{eHHe )l.JIH yrJIa rrOJIHOrO BHYTpeHHero OTpa)!{eHHH:
rrO,ll.JIO)!{KaMH.
nl > n2
nl . sin (h = n2 . sin O2,
,lI.JIH KperrJIeHHH KpHCTaJIJIa CBeTO,ll.HO,ll.a K Koprrycy 06eCrreqHBaeT BbICOKYIO TaKTOM.
3,lleCb
90 0 •
rrpeJIOMJIeHHH MoryT
3TO HBJIeHHe rrOJIyqHJIO Ha3BaHHe rrOJIHOrO BHyTpeHHero 0
MO)!{HO BbIBeCTH
CymeCTBYIOT OMHqeCKHe KOHTaKTbI, rrp03paqHble ,lI.JIH BH,lI.HMOrO CBeTa.
(10.9)
B COCTaB TaKHX KOHTaKTOB BXO,ll.HT OKCH,lI. HH,lI.HH H OJIOBa, qaCTO COKpameHHO Ha3bIBaeMWH ITO (indium tin oxide) (Ray et a!.,
1998;
a!.,
Margalith et a!.,
1999;
Mergel et aI.,
2000;
1983;
Shen et
Shin et aI.,
2001).
3TH MaTepHaJIbI MO)!{HO CqHTaTb rrOJIyrrpOBO,ll.HHKaMH Ha OCHOBe OKCH,lI.a OJIOBa, JIempOBaHHwMH HH,lI.HeM. I1H,lI.HH 3aMemaeT OJIOBO, BbIIIOJIHHH pOJIb aKu:errTopa. Y)l.eJIbHOe corrpOTHBJIeHHe KOHTaKTOB Ha OCHOBe OKCH,lI.OB HH,lI.HH H OJIOBa 06blqHO Bblilie corrpOTHBJIeHHH CrrJIaBHbIX MeTaJIJIHqeCKHX KOHTaKTOB.
nOCKOJIbKY OTHOIIIeHHe rrOKa3aTeJIeH rrpeJIOMJIeHHH B rrpaBOH qaCTH ypaBHeHHH
(10.9)
,lI.OJI)!{HO 6bITb
(n2/nJ) :::; 1,
rrOJIHOe BHyTpeHHee OTpa)!{eHHe
MO)!{eT rrpOHCXO,ll.HTb TOJIbKO B OrrTHqeCKH rrJIOTHblX MaTepHaJIax. nOJIHOe BHyTpeHHee OTpa)!{eHHe B03MO)!{HO ,lI.JIH JIyqeH C yrJIaMH rra,ll.eHHH, 60JIb-
>
01 Ol,crit. ,UJIH yrJIOB rra,ll.eHHH, 6JIH3KHX K yrJIaM CKOJIb)!{eHHH, rrpH ,lI.OCTaTOqHO BbICOKOM K03cpcp H U:HeHTe
IIIHMH BeJIHqHHbl KpHTHqeCKOrO yrJIa:
KOHTpacTa (60JIbiliOH pa3HHu:e rrOKa3aTeJIeH rrpeJIOMJIeHHH )l.ByX cpe,ll.) JIyqH CBeTa He MoryT BbIHTH 3a rrpe,ll.eJIbI Cpe,ll.bI C BWCOKHM rrOKa3aTeJIeM rrpeJIOMJIeHHH.
10.2.
3epKaJIa Ha OCHOBe nOJIHOrO BHyTpeHHero
n03,l1.Hee I1caaK HbIOTOH rrOKa3aJI, qTO )l.JIH 60JIbIIIHHCTBa rrp03paqHbIX
OTpalKeHHSI
cpe,ll. rrOKa3aTeJIb rrpeJIOMJIeHHH MO)!{eT 6bITb HaH,lI.eH B BH,lI.e CYMMbI )l.ByX CJIaraeMbIX, rrepBoe H3 KOTOPbIX paBHO e,ll.HHHu:e, a BTopoe rrporropU:HoHaJIb-
nOJIHOe BHyTpeHHee OTpa)!{eHHe xapaKTepHO ,lI.JIH rpaHHU: pa3,l1.eJIa Me)!{-
HO rrJIOTHOCTH Cpe,ll.bI, H3MepHeMoH B e,ll.HHHu:ax r icM3. n03TOMY MaTepHaJIbI
,lI.y ,lI.ByMH ,lI.H3JIeKTpHqeCKHMH Cpe,ll.aMH C pa3HbIMH rrOKa3aTeJIHMH rrpe-
C BbICOKHMH 3HaqeHHHMH rrOKa3aTeJIeH rrpeJIOMJIeHHH qaCTO Ha3WBaIOT
JIOMJIeHHH. 3TO HBJIeHHe 6bIJIO OTKpbIToJ10raHHoM KerrJIepOM B HaqaJIe
mUttecKU nJlOmH.blMU MamepUaJlaMu.
XVII
B. (Kepler,
1611).
KerrJIep rrbITaJICH 06bHCHHTb Ka)!{ymeecH HCKPHB-
on-
CaMbIH HPKHH rrpHMep rrpHMeHeHHH 3cpcpeKTa rrOJIHOrO BHYTpeHHero OT-
JIeHHe rrpe,ll.MeTOB, qaCTHqHO rrorpy)!{eHHbIX B BO,ll.y. OH 06HapY)!{HJI, qTO
pa)!{eHHH -
,lI.JIH JIyqeH, rra,ll.aIOmHX Ha rpaHHU:Y pa,3,l1.eJIa ,lI.Byx cpe,ll. rro,ll. yrJIaMH, 6JIH3-
6JIarO,ll.apH 3TOMY HBJIeHHIO, pacrrpOCTpaHHIOTCH rro cep,ll.u:eBHHe OIITHqeCKO-
BOJIOKOHHO-OrrTHqeCKHe CHCTeMbI CBH3H, B KOTOpbix JIyqH CBeTa,
1841 r.
KHMH K HOpMaJIbHoMY, OTHOIIIeHHe yrJIOB rra,ll.eHHH K yrJIaM rrpeJIOMJIeHHH
ro BOJIOKHa Ha paCCTOHHHe HeCKOJIbKO TbICHq KHJIOMeTpOB. B
rrporropU:HoHaJIbHO OTHOIIIeHHIO rroKa3aTeJIeH rrpeJIOMJIeHHH ,lI.ByX cpe,ll.:
HHeJIb KOJIJIa,ll.OH rrpO,ll.eMoHcTpHpOBaJI, KaK rrpH rrOMOmH' HBJIeHHH rrOJIHOrO
,Ua-
BHYTpeHHero OTpa)!{eHHH MO)!{HO yrrpaBJIHTb JIyqaMH CBeTa. B ero CHCTe-
(10.7)
Me B KaqeCTBe OrrTHqeCKH rrJIOTHOH Cpe,ll.bI HCIIOJIb30BaJIaCb CTpyH BO,ll.bI (Hecht,
r,ll.e
(h
H
(h -
YrJIbI rra,ll.eHHH H rrpeJIOMJIeHHH JIyqeH, H3MepeHHble OTHO-
CHTeJIbHO HOpMaJIH K rroBepxHocTH pa3,l1.eJIa. Me)!{,lI.y
1621
r. H
1625 r.
2001).
TaKHe CHCTeMbI IIIHPOKO rrpHMeHHIOTCH H B HailiH ,lI.HH ,lI.JIH
IIO,ll.CBeTKH cpoHTaHoB HO%IO. Ha pHC.
10.5
IIOKa3aHa YCTaHOBKa ,UaHHeJIH
KOJIJIa,ll.OHa, KOTOPbIH CqHTaeTCH OTU:OM Bcex CBeTOBO,ll.HbIX CHCTeM.
Fit. 10. Ompa3ICameAU
206
10.3. PacnpeaeAeHHbte aeplcaAa Bp322a
207
100.--------,.-'""'1"'---, GaAs/AlGaAs/AlAs ~
80
'1eTBepThBOJIHOBLle
Ag/B03l1.'fX: R = 98,5%
OTpalKaTeJIH
(Ag/GaAs: R = 96%)
25 nap
160
T=300K
S 40
i
,§. 20 09<
~ OL-~__~~__~__L--L-L~~ 0,6
PHC. 10.5. I1CTOpHqeCKHH PHCYHOK (a) 1'1 cxeMa YCTaHOBKH llIBeHIJ:apCKOro HH)KeHepa .ll.aHHeJlll KOJlJlaAOHa, rrocTpoeHHoH B 1841 r. AJllI rrOKa3a Toro, KaK Ha OCHOBe rrpHHIJ:Hrra rrOJlHOrO BHYTpeHHero OTpa)KeHHlI MO)KHO OCBew:aTb CTPYIO BOAbl (6); CBeTOBble cpoHTaHbI B JIac Berace, llITaT HeBaAa (8); OIITHqeCKHe BOJlOKHa (2) (TheFreeDictionary.com, 2005)
0,7
0,8
0,9
~a BonHLI
A.,
1,0
0,6
MKM
0,7
0,8
0,9
~a BOnHLI
A.,
1,0
1,1
MKM
PHC. 10.6. CrreKTpbl K03cpcpHIJ:HeHTa OTpa)KeHHlI ABYX THrrOB OTpa)KaTeJleH: 3epKaJl Bp3rra (1'13 25 rrap CJlOeB AIAs/GaAs) H MeTaJlJlHqeCKHX 3epKaJl (cepe6po/Bo3AYX)
KaK K09CPCPHll.HeHT OTpa)KeHHH 3epKaJI op9rra pacTeT rro Mepe YBeJIHqeHHH B
rrOJIyrrpOBO,U,HHKOBbIX H3JIYQaIOW:HX YCTpOHCTBax HBJIeHHe rrOJIHOrO
BHYTpeHHero OTpa)KeHHH 3aTpY,U,HHeT BbIXO,U, CBeTa H3 rrOJIyrrpOBO,U,HHKOBoro KpHCTaJIJIa, qTO B pH,U,e CJIyqaeB MO)KeT 6bITb OqeHb cepbe3HOH rrp06JIeMoii. nOCKOJIbKY rrOJIyrrpOBO,U,HHKOBble MaTepHaJIbI 06JIa,U,aIOT BbICOKHMH rrOKa3a-
2,0-3,5,
KOJIHqeCTBa ,U,BOH:HbIX CJIOeB rrOKa 9TH CJIOH rrOJIHOCTbIO rrp03paqHbI. Y CBeTO,U,HO,U,OB, Bblpalll.eHHbIX Ha Herrp03paqHhlX rrO,U,JIO)KKaX, JIyqeHHH H3 aKTHBHOH:
50 % H3-
06JIaCTH rrorJIOlll.aeTCH HMeHHO rro,U,JIO)KKOH:, qTO
rrpHBO,U,HT K CYlll.eCTBeHHOMY CHH)KeHHIO HX 9cpcpeKTHBHoCTH. nOrJIOlll.eHHH
HX KpHTHqeCKHe yrJIbI rrOJIHOrO BHYTpeH-
H3JIyqeHHH B rrO,U,JIO)KKe MO)KHO H36e)KaTb, eCJIH Me)K,U,y HeH: H aKTHBHOH:
Hero OTpa)KeHHH ,U,OBOJIbHO MaJIbI. 3Ta rrp06JIeMa 'CTOHT OqeHb cepbe3HO ,U,JIH
06JIaCTbIO CBeTO,U,Ho,U,a rrOMeCTHTb 3epKaJIO, OTpa)KaIOlll.ee JIyqH, HcrrYCKa-
TeJIHMH rrpeJIOMJIeHHH,
rv
apceHH,U,OB H cpocqm,U,oB
3,0 H
III
rpyrrrrbI C rrOKa3aTeJIHMH rrpeJIOMJIeHHH OKOJIO
MeHee OCTpO ,U,JIH HHTPH,U,OB
OKOJIO
2?0 .
III
rpyrrrrbI C rrOKa3aTeJIHMH rrpeJIOMJIeHHH
.HBJIeHHe rrOJIHOrO BHYTpeHHero OTpa)KeHHH rrpaKTHqeCKH He Ka-
eMhle aKTHBHOH: 06JIaCTbIO B CTOPOHY rrO,U,JIO)KKH, rr03BOJIHH HM rrOKHHYTb rrOJIyrrpOBO,U,HHK qepe3 BepXHIOIO rpaHHll.y . .lI.JIH 9THX ll.eJIeH: XOPOIIIO rrO,U,XO,U,HT pacrrpe,U,eJIeHHble 3epKaJIa op9rra
10.7
caeTCH OpraHHqeCKHX CBeTO,U,HO,U,OB, rrOCKOJIbKY OpraHHqeCKHe MaTepHaJIhl
(DBRs). Ha pHC.
06JIa,U,aIOT cpaBHHTeJIbHO HH3KHMH rrOKa3aTeJIlIMH rrpeJIOMJIeHHH.
ra. OrrHcaHHe TaKOrO CBeTO,U,Ho,U,a, peaJIH30BaHHoro Ha CHCTeMe MaTepHaJIOB
YHHKaJIbHaH HHH -
oco6eHHOCTb
HBJIeHHH
K09CPCPHIl.HeHT OTpa)KeHHH
R = 1.
rrOJIHOrO
BHYTpeHHero
OTpa)Ke-
n09TOMY OTpa)KaTeJIH Ha OCHOBe
9Toro HBJIeHHH 06JIa,U,aIOT HYJIeBhlMH rroTepHMH. I1x HCrrOJIb3YIOT B OCHOBHOM B JIa3epaX (McCall et al.,
rrOJIOCKOBbIX (Smith et al.,
1992),
1993)
H Ha 6a3e MHKPO,U,HCKOB
AIGaAs/GaAs,
rrOKa3aHa CTpyKTypa CBeTO,U,Ho,U,a C 3epKaJIaMH op9r-
6bIJIO BrrepBble ,U,aHO KaTO H ,U,p.
(Kato et
al.,
1991).
B COCTaB ,U,aHHoro ,U,Ho,U,a, H3JIYQaIOlll.ero B HHcppaKpaCHOH: 06JIaCTH crreKTpa Ha ,U,JIHHe BOJIHbI
870
HM, BXO,U,HJIO 3epKaJIO op9rra, COCTOHlll.ee H3
25
rrap
CJIOeB AIAs/GaAs HJIH AIGaAs/GaAs.
BbIIIOJIHHeMblX Ha OCHOBe pe30HaTopoB C BbICOKOH: "
,U,06POTHOCTbIO. pacnpe,l(eJIeHHOe 3epKaDO Bp3ITa
10.3. Pacnpe)l.eJIeHHbIe 3epKaJIa Bparra Ha pHC.
10.6
,U,JIH cpaBHeHHH rrpHBe,U,eHbI crreKTpbI K09cpCPHll.HeHTa OT-
pa)KeHHH,U,BYX THrrOB, OTpa)KaTeJIeH:: 3epKaJIa op9rra H MeTaJIJIHqeCKOrO 3epKaJIa. BH,U,HO, qTO MeTaJIJIHqeCKHe OTpa)KaTeJIH HMeIOT umpoKyIO C
BblCOKUM K03tPtPUI1UeH.mOM Ompa3ICeH.uJt,
nOJlocy
Tor,U,a KaK ,U,JIH 3epKaJI op9r-
ra xapaKTepeH Y3KHH: ,U,Harra30H C BbICOKHM K09cpcpHll.HeHTOM OTpa)KeHHH, Ha3bIBaeMbIH:
nOJloca 3amyxaH.uJt.
CJIe,U,yeT OTMeTHTb, qTO OTpa)KaTeJIbHaH
crroco6HoCTb MeTaJIJIHqeCKHX 3epKaJI OCTaeTCH Bcer,U,a HeH3MeHHOH:, Tor,U,a
nOKa3arelIb npeJIOMJIeHIDI:
iii
H ii2
K03«P«PHUHeHT KOHTPaCTHOCTH: TOlIlll,HHa:
A.o /(4ii l )
H
Ilii =
I ii2 -
iii
I
A.o /(4ii2)
KOJIH'leCTBO ,l(BOHm.Ix CJIOeB:
m
PHC. 10.7. CBeToAHoA C pacrrpeAeJleHHblM 3epKaJlOM Bp3rra, pacrrOJlO)KeHHbiM Me)KAY rrOAJlO)KKOH 1'1 HH)KHHM 6apbepHblM CJlOeM
Fit. 10. OmpaJICameAu
208
10.3. PacnpeaelteHltbte aeplwlta Bp3aaa
Pacrrpe.neJIeHHOe 3epKaJIO Bp3rra lIBJIlIeTClI MHOrOCJIOHHbIM OTpa)KaTeJIeM, 06bIIJHO COCTOlIlUHM H3 5-50 .nBOHHbIX CJIOeB MaTepHaJIOB C pa3HbIMH
COrJIaCOBaHbI.
BO-BmopbIX,
209
.nJIlI rrOJIYIJeHHlI BbICOKoro K03!fJ!fJHU:HeHTa OT-
pa)KeHHlI 3epKaJI Bp3rra rrpH HeBbICOKOM K03!fJ!fJHU:HeHTe KOHTpaCTa ero
rrOKa3aTeJIlIMH rrpeJIOMJIeHHlI. 113-3a pa3HHU:bI rrOKa3aTeJIeH rrpeJIOMJIeHHlI
CJIOeB Heo6xo.nHMO, IJTo6bI Bce CJIOH 3epKaJIa Bp3rra 6bIJIH rrp03paIJHbIMH
Ha Ka)K.noH rpaHHu:e pa3.neJIa .nBYX MaTepHaJIOB rrpoHcxo.nHT OTpa)KeHHe
.nJIlI H3JIYIJeHHlI pa60IJHX .nJIHH BOJIH. B CJIYIJae .nBOHHblX CJIOeB C 60JIb-
IllOH pa3HHu:eH B rrOKa3aTeJIlIX rrpeJIOMJIeHHlI (HarrpHMep Si/Si02) 3epKaJIO
pa)KeHHe
Bp3rra 6y.neT 06JIa.naTb BbICOKHM K03!fJ!fJHU:HeHTOM OTpa)KeHHlI, .na)Ke eCJIH
3epKaJIa Bp3rra BXO.nHT MHoro TaKHX rpaHHU:. OIJeHb Ba)KHO TaK rro.no6paTb TOJIlUHHY .nBOHHblX CJIOeB, IJTo6bI rrpH CJIO)KeHHH
8cex Ompa:JICeHHblX 80JlH
KOHcmpYKmU8Hafl uHmepcpepeHl1ufl.
rrOlIBJIlIJIaCb
Ha rpaHHU:bI pa3.neJIa rro.n yrJIOM 90
0
,
.rr.JIlI JIYIJeH, rra.nalOlUHX
YCJIOBHe pe30HaHca HaCTyrraeT Tor.na,
Kor.na TOJIlUHHa CJIOeB, COCTaBJIlIlOlUHX rrapbI, paBHa
80JlHbi
3.neCb >"0 KHM
(h)
>"0/
tl,h -
.nJIHHa BOJIHbI Bp3rra B BaKYYMe,
H HH3KHM
(l)
rrOKa3aTeJIlIMH rrpeJIOMJIeHHlI,
JIOMJIeHHlI MaTepHaJIOB C BbICOKHM
(h)
(10.10)
(4nl,h)'
H HH3KHM
(l)
B-mpembUX,
eCJIH 3epKaJIO Bp3rra pacrrOJIO)KeHO B 06JIaCTH
rrpOTeKaHHlI TOKa, ero CJIOH .nOJI)KHbI H3rOTaBJIHBaTbClI H3 rrpOBo.nlIlUHX MaTepHaJIOB.
ttem8epmu aJlUHbl
CBeTa, T. e. rrpH HOpMaJIbHOM rra.neHHH JIYIJeH Ha rpaHHU:Y pa3.neJIa:
tl,h = >"1,h/4 =
O.nHH H3 MaTepHaJIOB rrapbI CJIerKa rrorJIOlUaeT H3JIYIJeHHe HHTepeCYlOlUeH .nJIHHbI BOJIHbI.
Ha pHC. 10.8 rrOKa3aHbI 3aBHCHMOCTH K03!fJ!fJHU:HeHToB OTpa)KeHHlI 3epKaJI Bp3rra Ha OCHOBe Si/Si02 H AlAs/GaAs OT .nJIHHbI BOJIHbI H3JIYIJeHHlI . .rr.JIHHa BOJIHbI Bp3rra COOTBeTcTByeT u:eHTpy rrOJIOCbI C BbICOKOH OTpa)KaTeJIbHOH crroco6HOCTbIO HJIH
nOJloce aamyxaHUfl.
113 p~c. 10.8 BH.nHO:
TOJIlUHHa CJIOeB C BbICO-
OTpa)KaTeJIbHalI
crroco6HoCTb
3epKaJIa
Bp3rra
Si/Si02
C
nl,h -
K03!fJ!fJHU:HeHToM
KOHTpaCTa
HaMHoro
Bbl Ille ,
IJeM
OTpa)KaTeJIlI
rrOKa3aTeJIb rrpe-
Y
BbICOKHM
AlAs/GaAs C HH3KHM K03<}l!fJHU:HeHToM KOHTpaCT~ (rrpH o.nHHaKOBOM
rrOKa3aTeJIlIMH rrpeJIOM-
JIeHHlI. TOJIlUHHa peaJIbHOrO CJIOlI, orrpe.neJIlIeMalI Bblpa)KeHHeM (10.10), He
KOJIHIJeCTBe IJeTBepTbBOJIHOBbIX CJIOeB);
061I3aTeJIbHO .nOJI)KHa COCTaBJIlITb >../4, OHa MO)KeT 6bITb paBHa BeJIHIJHHe, IllHpHHa rrOJIOCbI3aTyxaHHlI 3epKaJIa C BbICOKHM K03!fJ!fJHU:HeHToM KOH-
KpaTHoH >../4, HO rrpH 3TOM Heo6xo.nHMO, IJTo6bI CTerreHb KpaTHocTH 6bIJIa JII06bIM HeIJeTHbIM IJHCJIOM, T. e.
tl,h =
TpaCTa HaMHoro 60JIbille IllHpHHbI 3TOH 06JIaCTH Y 3epKaJIa C HH3KHM
>"/4, 3>";4, 5>"/4, 7>../4, TOJIlUHHa
K03!fJ!fJHU:HeHToM KOHTpaCTa.
CJIOeB orrpe.neJIlIeT YCHJIeHHe HHTep!fJepeHU:HH OTpa)KeHHbIX BOJIH. O.nHaKo CJIe.nyeT rrOMHHTb, IJTO rrpH CJIQlIX TOJIlUe >";4, HarrpHMep 3>"/4, 6y.neT rrpoHcxo.nHTb cY)KeHHe rrOJIOCbI 3aTyxaHHlI C BbICOKHM K03!fJ!fJHU:HeHToM OTpa)KeHHlI .
XapaKTepHcTHKH 3epKaJI Bp3rra Ci6bIIJHO paCCIJHTbIBalOT rrpH rroMolUH cooTBeTcTBYlOlUHX MaTpHU: MeTo.naMH MaTpHIJHOH aJIre6pbI (Born, Wolf, 1989). BOJIee rro.nP06HO 3epKaJIa Bp3rra paccMoTpeHbI B pa60Tax KOJI.npeHa
.rr.JIlI yrJIOB rra.neHHlI, OTJIHIJHbIX OT rrplIMoro, BOJIHOBOH BeKTop MO)KeT 6bITb pa3.neJIeH Ha rrapaJIJIeJIbHYIO H HOpMaJIbHYIO COCTaBJIlIlOlUHe. KaK H B cJIYIJae HOpMaJIbHOrO rra.neHHlI JIYIJeH, TOJIlUHHa CJIOeB, COCTaBJIlIlOlUHX
H Kop3HHa, 5IpHBa H BbepKa H .np. (Coldren, Corzine, 1995; Yariv, 1989; Bjork et aI., 1995). HH)Ke rrpHBe.neH KpaTKHH KOHcrreKT pacIJeTa rrapaMeTpOB 3epKaJI Bp3rra.
3epKaJIO Bp3rra, .nOJI)KHa 6bITb paBHa IJeTBepTH .nJIHHbI BOJIHbI HOpMaJIbHOH COCTaBJIlIlOlUeH BOJIHOBOrO BeKTopa. npH rrpOH3BOJIbHOM yrJIe rra.neHHlI JIYIJeH
(h,h
(He paBHOM rrplIMOMY yrJIY) .nJIlI rrOJIYIJeHHlI BbICOKOH OTpa)KaTeJIb~
HOH crroco6HOCTH 3epKaJIa Bp3rra OrrTHMaJIbHYIO TOJIlUHHY CJIOeB CJIe.nyeT BbI6HpaTb HCXO.nlI H3 CJIe.nYlOlUero COOTHOIlleHHlI:
tl,h = >"l,h/ (4 cos (h,h) =
>"0/
PaCCMOTpHM pacrrpe.neJIeHHOe 3epKaJIO Bp3rra, COCTOlIlUee H3 m .nBOHHbIX .D.H3JIeKTpHIJeCKHX CJIOeB C K03!fJ!fJHU:HeHTaMH rrpeJIOMJIeHHlI HH.neKCbI BbICOKHM
nl,h,
r.ne
l H h COOTBeTCTBYIOT H.neaJIbHbIM MaTepHaJIaM 6e3 rrOTepb C (h) H HH3KHM (l) rrOKa3aTeJIlIMH rrpeJIOMJIeHHlI. CIJHTaeTClI, IJTO
TOJIlUHHa CJIOeB, COCTaBJIlIlOlUHX rrapbI, paBHa IJeTBepTH .nJIHHbl, BOJIHbI,
(4nl,h cos (h,h)'
(10.11)
T. e
Ll,h =
>"Bragg/
(4nl,h)'
nepHO.n 3epKaJIa Bp3rra paBeH
Ll
+ L h.
Ko-
3!fJ!fJHU:HeHT OTpa)KeHHlI OT O.nHOH rrOBepXHOCTH pa3.neJIa .nBYX cpe.n rrpH 3.neCb, KaK H B rrpe.nbI.nYlUeM cJIYIJae, TOJIlUHHa peaJIbHOrO CJIOlI MO)KeT
HOpMaJIbHOM rra.neHHH JIYIJeH orrpe.neJIlIeTClI ypaBHeHHeM
6bITb paBHa BeJIHIJHHe, paCCIJHTaHHOH rro !fJ0pMYJIe (10.11) H YMHO)KeHHOH Ha JII060e HeIJeTHOe, IJH.CJIO. OTpa)KaTeJIbHalI crroco6HOCTb 3epKaJI Bp3rra C .nOCTaTOIJHO 60JIbIllHM KOJIHIJeCTBOM IJeTBepTbBOJIHOBbIX CJIOeB MO)KeT 6bITb 6JIH3Ka K 100 npH
(10.12)
%.
pa3MelUeHHH
B
CBeTO.ll.HO.ll.e
rrOJIHlITb CJIe.nYlOlUHe YCJIOBHlI.
BbI-
MHorOKpaTHble OTpa)KeHHlI OT rroBepxHocTeH pa3.neJIa B 3epKaJIe Bp3rra H
rrOCKOJIbKY .lI.BOHHalI reTepo-
YCHJIHBalOlUalI HHTep!fJepeHU:HlI MHO)KeCTBa OTpa)KeHHbIX JIYIJeH rrpHBo.nlIT
3epKaJIa, Bp3rra
Bo-nep8blx,
Heo6xo.ll.HMO
CTpYKTypa CBeTO.ll.HO.ll.a 06bIIJHO BblpalUHBaeTclI cBepxy 3epKaJIa Bp3rra,
K rrOBbIIlleHHIO OTpa)KaTeJIbHOH crroco6HoCTH, rrporropU:HoHaJIbHOH YBeJIH-
.lI.JIlI rrpe.ll.OTBpalUeHHlI rrOlIBJIeHHlI .D.HCJIOKaU:HH HeCOOTBeTCTBHlI rrapaMeTpbI
IJeHHIO IJHCJIa .lI.BOHHbIX CJIOeB. Ha .nJIHHe BOJIHbI Bp3rra Ha6JIIO.lI.aeTClI
KpHCTaJIJIHIJeCKHX peilleToK 3epKaJIa H reTepocTpYKTypbI .lI.OJI)KHbI 6bITb
MaKCHMaJIbHbIH K03!fJ!fJHU:HeHT OTpa)KeHHlI, KOTOPbIH .lI.JIlI 3epKaJIa H3 m
FIt. 10. Ompa3ICameJlu
210 ~ 1:1:::-
~
100
10.3. PacnpeaeJleHHble 3epICaJla Bpaeea
Si/Si02
a
BbIpa)KeHHeM (Yariv,
1989)
(~eTBepTbBOITHOBOH
80
A \
o1"pIDKaTem,)
4
== (!)
~ 60
r)J.e neff -
!il
3<\l<\leKTHBHbIH rrOKa3aTeJIb rrpeJIOMJIeHHH 3epKaJIa Op3rra. ,L{JIH
6blTb 60JIbllIe llIHpHHbI crreKTpa H3JIyqeHHH aKTHBHOH 06JIaCTH.
:=
::r := ..a< ..a<
9<\l<\leKTHBHbIH rrOKa3aTeJIb rrpeJIOMJIeHHH 3epKaJIa op3rra MO)KHO BbIqHCJIHTb rrpH rrOMOIIJ.H BbIpa)KeHHH
~
_
0,8 100 ~
~
~
(10.14)
,
neff
3<\l<\leKTHBHOH pa60TbI CBeTO)J.HO)J.a umpHHa rrOJIOCbI 3aTyxaHHH )J.OJI)KHa
(!)
==
2'>'sragg . ~n
_
Ll.Astop band -
naphl CJIOeB
T=300K
~
1:1:::
211
1,0
1,2
1,6
1,4
6
3epKaJIO lip3rra
UQ-,","", ru"",-,,
(~eTBepTbBOITHOBOH
80
~
0
= 2
1 )-1 =+~ nl nh
( 1
(10.15)
cJIyqae He6oJIbllIOH pa3HHUhl B rrOKa3aTeJIHX rrpeJIOMJIeHHH CJIOeB,
An
«: Anz,
3<\l<\leKTHBHbIH rrOKa3aTeJIb rrpeJIOMJIeHHH MO)KeT
6bITb paCCqHTaH rro rrpH6JIH)KeHHOH <\l0pMYJIe
_
neff
T=300K
!il
B
HarrpHMep
o1"pIDKaTem.) CJIOM AIGaAs C nOCTeneHHbIM JIernpoBaHMeM 25 nap CJIOeB
60
neff
1,8
=
1(_ _ )
2"
nz
+ nh
(10.16)
.
OIITHqeCKaH BOJIHa npoHHKaeT B 3epKaJIO op3rra Ha OrpaHHqeHHOe
(!)
:= ::r :=
paccToHHHe, paBHoe KOHeqHoMY qHCJIY qeTBepTbBOJIHOBhlX CJIOeB. I1MeHHo 3TO 3<\l<\leKTHBHoe qHCJIO )J.BOHHbIX CJIOeB H3 o6IIJ.ero KOJIHqeCTBa qeTBepTb-
..a< ..a<
BOJIHOBbIX CJIOeB 3<\l<\leKTHBHo OTpa)KaeT BOJIHy.
'" ~
Kop3HHa (Coldren, Corzine,
~HHaBOJIHbI
A,
1995)
B
pa60Te KOJI)J.peHa H
rrpHBe)J.eHo BbIpa)KeHHe )J.JIH ero oueHKH:
(10.17)
MKM
PHC. 10.8. 3asHcHMoCTH OTpa)KaTeJIbHblX cnoco6HOCTeH .n;syx pacnpe.n;eJIeHHblX 3epKaJI Ep9rra OT .n;JIHHbl SOJIHbl H3JIyqeHHH: a - .n;JIH 3epKaJIa lip9rra Ha OCHose
Si/Si02
C BblCOKHM K09ljJqmUHeHToM KOHTpaCTa, COCTOHIUero H3 qeTblpex .n;SOHHbIX CJIOeB, 6 -.n;JIH SepKaJIa Ep9rra Ha OCHose AIAs/GaAs, COCTOHIUero HS 25 .n;SOHHbIX CJIoes. ;llJIH .n;OCTH)KeHHH BblCOKOH OTpa)KaTeJIbHOH cnoco6HOCTH SepKaJIY C SbICOKHM K091jJljJHUHeHToM KOHTpaCTa Tpe6yeTcH TOJIbKO qeTblpe .n;SOHHblX CJIOH. npH 9TOM nOJIoca saTyxaHHH SepKaJIa Ep9rra C SblCOKHM K091jJ!f>HUHeHToM KOHTpaCTa HaMHoro IIIHpe, qeM y 3epKaJIa C HHSKHM K091jJ!f>HUHeHToM KOHTpaCTa
,L{JIH TOJICTbIX 3epKaJI op3rra (m --+ 00) <\lYHKUHH rr03TOMY BbIpa)KeHHe
(10:17)
K e)J.HHHue,
(10.18) Ha 6p3rroBcKoH )J.JIHHe BOJIHbI
qeTBepTbBOJIHOBbIX CJIOeB HaXO)J.HTCH H3 BbIpa)KeHHH (Coldren, Corzine,
th CTpeMHTCH
MO)KHO yrrpOCTHTb:
)KeHHOH
BOJIHbI
paBHO
HyJIIO,
a
B
(A = ee
ABragg) H3MeHeHHe <\la3bI OTpaOKpeCTHOCTH
(A
~ ABragg) <\la3a
OTpa)KeHHOH BOJIHbI CBH3aHa C )J.JIHHOH BOJIHbI JlUH.eUTWU 3aBHCHMOCTbIO.
1995)
n03TOMY 3epKaJIO op3rra MO)KHO CXeMaTHqHO rrpe)J.CTaBHTb B BH)J.e H)J.e-
(10.13)
aJIbHOrO MeTaJIJIHqeCKOrO OTpa)KaTeJIH, pacrrOJIO)KeHHOrO Ha paCCTOHHHH
Lpen OT rrOBepXHOCTH rrepBoro )J.BoHHoro CJIOH 3epKaJIa op3rra (pHC.
10.9).
Tor)J.a )J.JIH BbIqHCJIeHHH K03<\l<\lHUHeHTa OTpa)KeHHH 3epKaJIa op3rra MO)KHO IIIHpHHa
rrOJIOCbI
3aTyxaHHH
3epKaJIa
op3rra
3aBHCHT
OT
pa3HO-
BOCrrOJIb30BaTbCH COOTHOllIeHHeM
CTH rrOKa3aTeJIeH. rrpeJIOMJIeHHH )J.ByX MaTepHaJIOB, COCTaBJIHIOIIJ.HX rrapy:
nh - nz = An.
CrreKTpaJIbHaH umpHHa rrOJIOCbI 3aTyxaHHH orrpe)J.eJIHeTCH
(10.19)
r
III'·
I
212
FIL. 10. Ompa3ICameILU
II
10.3. PacnpeaeILelilible 3ep,caILa Sp3eea
a
213
HOCTll 3JIeKTpllqeCKOrO rrOJIH, OrrTllqeCKOe ll3JIyqeHlle rrpoHllKaeT B 3epKaJIO Ha rJIy6llHY B ,lI.Ba pa3a MeHbIIIYIO, qeM 3JIeKTpllqeCKOe rrOJIe. n03TOMY 3
3
m
2
6
JIHpHOrO yrJIa rra.u.eHllH JIyqeH II ,lI.JIllHbI BOJIHbI ll3JIyqeHllH. AHaJIllTllqeCKllH pe3YJIbTaT MO)KHO rrOJIyqllTb
34J4JeKTHBJlhli:j ~ OIpalKaTelTh I :' .....f - - - - -
rrpOll3BOJIbHbIX ,lI.JIllH BOJIH K03
£pen
rrOMOlll.ll qllCJIeHHbIX MeTO,lI.OB. PaccMoTpllM 3epKaJIO Bp3rra, OTpa)KalOlll.ee
z=o PHC.
10.9.
H
Z=£pen
ll3JIYQeHlle OT ll30TporrHoro
I1JIJIIOCTpaU:Hl1 rJIy6HHbI npOHHKHOBeHHH OTITHQeCKOH BOJIHbI
3epKaJIa Bp3rra:
a-
BHYTPb
3epKaJIO Bp3rra, COCTOHIIl,ee H3 ,n:BYX MaTepHaJIOB TOJIIIl,HHbI
L 2 ; 6- H,n:eaJIbHbIH
TOJIbKO ,lI.JIH rra,lI.eHllH JIyqeH rro,lI. rrpHMbIM
yrJIOM II TOJIbKO ,lI.JIH ,lI.JIllHbI BOJIHbI Bp3rra . .llJIH ,lI.pyrllx yrJIOB rra,lI.eHllH II
L1
MeTaJIJIHQeCKHH OTpa}KaTeJIb, pa3MeIIl,eHHblH Ha paccToHHHH
llCTOqHllKa CBeTa.
B
3TOM
cJIyqae
llHTeH-
CllBHOCTb OTpa)KeHHOrO CBeTa orrpe,lI.eJIHerCH llHTerpllpoBaHlleM llHTeHCllBHOCTll ll3JIyqeHllH, OTpa)KaeMOrO BO Bcex HarrpaBJIeHllHx. K03
A
MO)KHO HaHTll ll3
COOTHOIIIeHllH
rJIy6HHbI npoHHKHoBeHHH OT nOBepxHocTH 3epKaJIa Bp3rra
7r/2
r,lI.e
j3 = 271"/ A -
BOJIHbI, OTpa)KeHHOH OT MeTaJIJIH'leCKOro OTpa)KaTeJIH rrpll Z eTCH rrOKa3aTeJIeM Bblpa)KeHllH (CM. pllC.
r metal
Iz=O
npllpaBHllBaH ll3MeHeHllH
<pa3,
HX
(10.19)
II
f
Cpe,lI.HHH <pa30BaH rrOCTOHHHaH BOJIHbL 113MeHeHlle <pa3bI
(10.20),
B 3epKaJIaX Bp3rra
- Ir -
metal
=
0
orrpe,lI.eJIH-
10.9):
I· e2i(27r/>..).Lpen .
II llCrrOJIb3YH
1995),
MO)KHO
..,.::0_--,-_ _ _ _ _
HaHTll
f 27r'
271"
sin 8d8
fo
R (A, 8) ·271" . sin 8d8,
o
(10.24)
a cyMMapHylO llHTeHCllBHOCTb OTpa)KeHHOrO 3epKaJIOM Bp3rra ll3JIyqeHllH paCCqllTaTb TaK:
rJIy6llHY
Ir
rrpoHllKHoBeHllH OrrTllqeCKOH BOJIHbI:
+ L2 . th (2mr ) . Lpen = L1 4r
7r/2
=_ .
7r /2
(10.20)
Orrpe,lI.eJIHeMble rrOKa3aTeJIHMll B ypaBHeHll-
(Coldrerr,
Rint (A) =
R (.A, 8) . 27r . sin 8d8
=
fIi (A)' R(A) dA,
(10.25)
>..
(10.21)
r,lI.e
Ii(A) -
crreKTp llHTeHCllBHOCTll ll3JIyqeHllH aKTllBHOH 06JIaCTll, rrorra-
,lI.alOlll.llHHa 3epKaJIO. 3,lI.eCb rrpe,lI.rrOJIaraeTCH, qTO ,lI.JIH ll30TporrHbIX ll3JIynpll 60JIbIIIOM qllCJIe ,lI.BOHHbIX CJIOeB (m --t 00), rJIy6llHa rrpoHllKHoBeHllH orrpe,fl.eJIHeTCH Bblpa)KeHlleM
qaTeJIeH, K KOTOPbIM OTHOCHTCH aKTllBHble 06JIaCTll CBeTO,lI.llO,lI.OB, crreKTp ll3JIyqeHllH, ,lI.OCTllrIIIero 3epKaJIa Bp3rra,
(10.22)
He 3aBllCllT OT yrJIa BbIXO,lI.a
JIyqeH CBeTa ll3 llCTOqHllKa. 3
3epKaJI Bp3rra orrpe,lI.eJIHeTCH
llHTeHCllBHOCTblO
OT-
pa)KeHHOrO CBeTa. He06xo,lI.llMO TaK)Ke yqllTbIBaTb ll3JIyqeHlle, OTpa)KeHHa OCHOBe Bblpa)KeHllH
(10.22)
II
(10.18)
MO)KHO BblBeCTll CJIe,lI.YIOIIl,YIO
Hoe 3epKaJIOM OT KpllCTaJIJIOB CBeTO,lI.llO,lI.OB. OrrTllMaJIbHYIO
(10.23)
CTpyKTypy CBeTO,lI.llO,lI.a
co
AHaJIllTllqeCKll paCCqllTaTb
BCTpoeHHbIM
3epKaJIOM
Bp3r-
ra, o6JIa,lI.alOlll.ero MaKCllMaJIbHbIM K03
K03
1/2
B Bblpa)KeHllll
(10.23)
rrOHBJIHeTCH ll3-3a Toro, qTO meff
COOTBeTcTByeT 3
'leCK020 nOJl5l,
TOr,lI.a KaK
Lpen
3JleKmpU-
COOTHOCllTCH C OrrTllqeCKOH MOlll.HOCTblO.
nOCKOJIbKY OrrTllqeCKaSI MOlll.HOCTb rrpOrrOplJ.llOHaJIbHa KBa,lI.paTY HarrpH)KeH-
rrporpaMMbI, rr03BOJIHIOlll.lle OTCJIe)KllBaTb TpaeKTopllll JIyqeH BHyTpll CBeTO,lI.llO,lI.a.
Anpuopu
HllKOr,lI.a He 6bIBaeT HCHO, 6Y,lI.eT JIll ,lI.aHHblH CBeTO,lI.IfO,lI. C 3ep-
KaJIOM Bp3rra 06JIa,lI.aTb 60JIee BbICOKIfM K03
OIITlfqeCKOrO
r 214
10.3. PacnpeaelteftftbLe aep,calta Bp322a
rlt. 10. Ompa3ICameltu
BbIBOJl.a, qeM 6e3 Hero. HCrrOJIb30BaHHe 3epKaJI co CJIOfIMH pa3JIHqHOH TOJIllI.HHbI (MeHbilieH HJIH 60JIbilieH qeTBepTH J1.JIHHbI BOJIHbI) TaK)Ke MO)KeT rrpHBOJl.HTb K POCTY KoacpqlHIJ.HeHTa OrrTHqeCKOrO BbIBOJl.a CBeTOJl.HOJl.OB. 3ep-
MeflbUleu ompa60Jlee UlUPOlWU nOJlOCOU 3amyxafluR rro
T a 6 JI HU. a lO.3. CBoHcTBa MaTepHaJIOB, HCnOJIb3yeMblx B pacnpe.ll.eJIeHHbIX 3epKaJIax op3rra, BCTpaHBaeMblx B CBeTO.ll.HO.ll.b1 BH.lI.HMOrO H HHq,paKpacHoro .lI.Hana30HOB .lI.JIHH BOJIH op3rrOBCKall .lI.JIHHa BOJIHbI, HM
KaJIa Epar'ra C rrepeMeHHOH TOJIllI.HHOH CJIOeB 06JIaJl.aIOt
3ICameJlbflOU cnoco6flocmblO,
HO
215
CHcTeMa MaTepHaJIOB
cpaBHeHHIO C qeTBepTbBOJIHOBbIMH 3epKaJIaMH. ,L{JIfi CBeTOJl.H0Jl.0B· C IlIHpO-
n)ow
nhigh
Alo,sIno,sP/GaAs
590
3,13 3,90 0,87
Alo,sIno,sP /Gao,sIno,sP
590
3,13 3,74 0,61
rrp03paqHbIMH J1.JIfi H3JIyqeHHfI pa60qHX J1.JIHH BOJIH, rrOCKOJIbKY TaKHe CJIOH
Alo,sIno,sP/(Alo.3Gao,7 )o,sIno,sP
615
3,08 3,45 0,37
xapaKTepH3YIOTCfI He3HaqHTeJIbHbIMH rrOTepfIMH Ha rrOrJIOlll.eHHe. OJl.HaKO
Alo,sIno,sP/(Al o,4 Gao,6)o,sIno,sP
590
3,13 3,47 0,34
JIeHHfI 3epKaJI Eparra qaCTO rrpHMeHfIIOT rrOrJIOlll.aIOllI.He CBeT MaTepHaJIbI.
Alo,sIno,sP /(Alo,sGao,s)o,sIno,sP
570
3,15 3,46 0,31
MaKCHMaJIbHbIH KoaCPCPHIJ.HeHT OTpa)KeHHfI rrOrJIOlll.aIOllI.HX 3epKaJI BCerJl.a
AlAs/GaAs
900
2,97 3,54 0,57
Si02/Si
1300
1,46 3,51 2,05
KHM crreKTpOM H3JIyqeHHfI 3epKaJIa Eparra C rrepeMeHHbIM rrepHOJl.OM MorYT OKa3aTbCfI J1.a)Ke 60JIee rrpeJl.rrOqTHTeJIbHbIMH. HJl.eaJIbHO, qTo6bI CJIOH, BXOJl.fIllI.He B COCTaB 3epKaJI Eparra, 6bIJIH
HCrrOJIb30BaTb rrp03paqHble CJIOH YJl.aeTCfI He BCerJl.a, rroaTOMY J1.JIfi H3rOTOB-
100 % , J1.a)Ke rrpH 6eCKOHeqHOM qHCJIe J1.BOHHbIX CJIOeB. pHC. 10.8 rrOKa3aH rrpHMep qaCTHqHO rrOrJIOlll.aIOllI.erO 3epKaJIa
MeHbille Ha
Epar-
ra Ha OCHOBe Si/Si02. KpeMHHH rrorJIOlll.aeT H3JIyqeHHe C J1.JIHHOH BOJIHbI
>. < 1,1 >. ~ 1,0
MKM, T. e.
C
hv > E g .
OJl.HaKO BHJl.HO, 'ITO Ha J1.JIHHe BOJIHbI
MKM J1.0CTHraeTCfI BbICOKHH KoaCPCPHIJ.HeHT OTpa)KeHHfI, XOTfi Ha
,UHana30H np03pa'iHOCTH, HM
~n
> 870' > 649' > 592 > 576 > 560 > 870 > llO6
"pHMeIJaHHe. 3Be3.l1.0'lKOH OTMe'leHbI 3epKaJIa, nOrJIOmaIOmHe H3JIY'leHHe C 6p3r-
rOBCKOH .lI.JIHHOH BOJIHbI (Adachi, 1990; Adachi et aI., 1994; Kish, Fletcher, 1997; Babic et aI., 1999; Palik, 1998)
aTOH J1.JIHHe BOJIHbI KpeMHHH Y)Ke J1.0JI)KeH rrOrJIOlll.aTb H3JIyqeHHe. 06bfICHeHHe aToro 3aKJIIOqaeTCfI B 60JIbiliOH pa3HHIJ.e rroKa3aTeJIeH rrpeJIOMJIeHHfI
rrOrJIOlll.eHHe, a TaK)Ke J1.JIfi pacIlIHpeHHfI crreKTpa OTpa)KeHHOrO H3JIyqeHHfI
HCrrOJIb3yeMblx MaTepHaJIOB -
(Streubel,
KpeMHHfI H Si02.
B CBeT0Jl.HOJl.aX Ha OCHOBe AlInGaP /GaAs rrpHMeHfIIOTcfI KaK rrp03paqHble, TaK H rrOrJIOlll.aIOllI.He 3epKaJIa Eparra H3 MaTepHaJIOB, COrJIaCOBaHHbIX
B
2000). 10.3
Ta6JI.
TaK)Ke
rrpHBeJl.eHbI
CBOHCTBa
3epKaJI
AlAs/GaAs
H
Si02/Si. HeTpYJl.HO BHJl.eTb, 'ITO CHCTeMa MaTepHaJIOB Si02/Si 06JIaJl.aeT
rro rrapaMeTpaM peilleToK C GaAs. ,L{aHHafi CHCTeMa MaTepHaJIOB rroJl.xo-
BbICOKHM KoaCPCPHIJ.HeHTOM KOHTpacTa, OJl.HaKO B TOKOrrpOBOJl.fIllI.HX CTPYK-
J1.HT J1.JIfi H3rOTOBJIeHHfI BbICOKoacpcpeKTHBHbIX CBeTOJl.HOJl.OB BHJl.HMOH o6JIa-
Typax OHa HCrrOJIb30BaTbCfI He MO)KeT H3-3a J1.HaJIeKTpHqeCKOH rrpHpOJl.bI
CTH crreKTpa C
>. > 550
HM: 3eJIeHOrO, )KeJITOrO, fIHTapHoro, OpaH)KeBOrO
H KpaCHoro CBeqeHHfI. B Ta6JI.
10.3 rrpHBeJl.eHbI
xapaKTepHCTHKH HeKOTopbIX
np03paqHbIX H rrOrJIOlll.aIOlIJ.HX 3epKaJI Eparra, HCrrOJIb3yeMblx B CBeTOJl.HOJl.ax AlInGaP/GaAs (Kish, Fletcher,
1997).
Si02. 3epKaJIa AlAs/GaAs rrpHMeHfIIOTcfI B CBeTOJl.HOJl.aX C pe30HaTopaMH, a TaK)Ke B rroBepxHocTHO-H3JIyqaIOllI.HX JIa3epaX C BepTHKaJIbHbIMH pe30HaTopaMH, pa60TaIOllI.HX B J1.Harra30He J1.JIHH BOJIH
880-980
HM.
BHJl.HO, 'ITO rrOrJIOlll.aIOllI.He
3epKaJIa Eparra C pe30HaHCOM Ha J1.JIHHe BOJIHbI MaKCHMYMa H3JIyqeHHfI
3epKaJIa Alo,5InO,5P /GaAs HMeIOT BbICOKHH KoaCPCPHIJ.HeHT KOHTpaCTa, HO
He BCerJl.a fIBJIfIIOTCfI OrrTHMaJIbHbIMH OTpa)KaTeJIfIMHJl.JIfi CBeTOJl.HOJl.OB Ha
HX rrOrJIOlll.aIOllI.afI rrpHpOJl.a OrpaHHqHBaeT BepXHHH rrpeJl.eJI MaKCHMaJIbHOH
rrOrJIOlll.aiOllI.HXrrOJl.JIO)KKax. XOTfi 3epKaJIa Eparra rrpH HOpMaJIbHbIX yrJIax
OTpa)KaIOllI.eH crroco6HOCTH. 3epKaJIa Eparra C BbICOKHM KoacpCPHIJ.HeHTOM
rraJl.eHHfI JIyqeH HMeIOT BbICOKYIO OTpa)KaTeJIbHYIO crroco6HOCTb, aTa crro-
KOHTpaCTa 06JIaJl.aIOT
60JlbUleU UlUPUflOU
rrOJIOCbI 3aTyxaHHfI.
Y
rrp03paq-
C06HOCTb pe3KO CHH)KaeTCfI rrpH yrJIax rraJl.eHHfI, OTJIHqHblX OT rrpfIMbIX.
HbIX 3epKaJI Alo,5Ino,5P/(AlGa)O,5Ino,5P He3HaqHTeJIbHble OIITHqeCKHe rrOTe-
nOCKOJIbKY rrpOCTpaHCTBeHHbIH yrOJI (B HHTepBaJIe
pH, OJl.HaKO J1.JIfi rrOJIyqeHHfI CBeTOJl.HOJl.OB C BbICOKHMH 3HaqeHHfIMH KoaCPCPH-
yrJIa
B
dB)
rrpH YBeJIHqeHHH
pacTeT rro 3aKOHY cHHyca, pe30HaHCHYIO J1.JIHHy BOJIHbI 3epKaJIa
IJ.HeHTa OrrTHqeCKOrO BbIBOJl.a H3JIyqeHHfI TaKHe 3epKaJIa J1.0JI)KHbI COCTOfITb
Eparra J1.JIfi HOpMaJIbHO rraJl.aIOllI.HX JIyqeH Ha rrpaKTHKe BCerJl.a )KeJIaTeJIbHO
H3 60JIbillOrO KOJIHqeCTBa J1.BOHHbIX CJIOeB. K TO My )Ke rrOJIOca 3aTyxaHHfI
HMeTb 60JIbille J1.JIHHbI BOJIHbI MaKCHMYMa H3JIyqeHHfI.
3epKaJI J1.aHHOrO THrra HaMHoro Y)Ke, qeM 3epKaJI C 60JIbiliOH pa3HHIJ.eH rrOKa3aTeJIeH rrpeJIOMJIeHHfI.
Ha pHC.
10.10
rrOKa3aHbI 3aBHCHMOCTH KoacpcpHIJ.HeHTOB OTpa)!(eHHfI OT
J1.JIHHbI BOJIHbI H rrOJIfIpHblX yrJIOB rraJl.eHHfI JIyqeH CBeTa, paCCqHTaHHble J1.JIfi
Ha rrpaKTHKe rrp03paqHble CJIOH pa3Melll.aIOTCfI Ha BepXHeH qaCTH 3ep-
rrp03paqHbIX H rrOrJIOlll.aIOllI.HX 3epKaJI Eparra. BHJl.HO, 'ITO 3epKaJIa Eparra
KaJI Eparra (6JIH)Ke K arrHTaKCHaJIbHOMY CJIOIO) HJIH B6JIH3H Hee, a rro-
H3 rrp03paqHbIX MaTepHaJIOB 06JIaJl.aIOT KoaCPCPHIJ.HeHTOM OTpa)KeHHfI, 6JIH3-
rJIOlll.aIOllI.He CJIOH -
KHM K
6JIH)Ke K rrOJl.JIO)KKe. B rrpOMbIIlIJIeHHO BbIIIYCKaeMbIX
100 %,
B TO BpeMfi KaK MaKCHMaJIbHbIH KoacpcpHIJ.HeHT OTpa)KeHHfI
55 %.
CBeTOJl.H0Jl.aX AlInGaP /GaAs Ka)KJl.afI rrapa CJIOeB 3epKaJIa Eparra paCCqH-
3epKaJI C rrOrJIOlll.aIOllI.HMH CJIOfIMH GaAs paBeH Bcero
TbIBaeTCfI HHJl.HBHJl.yaJIbHO C IJ.eJIbIO MHHHMH3aIJ.HH qHCJIa CJIOeB H rrOTepb Ha
3epKaJIa Eparra BToporo THrra J1.0rrOJIHHTeJIbHbIX rrap CJIOeB He rrpHBOJl.HT
BBeJl.eHHe B
216
10.3. PacnpeaeAeHHble 3ep'WAa Bp322a
FA. 10. Ompa:JJCameAu
K rrOBbIlIIemuo HX OTpa)KaTe.nbHOH: crroco6HoCTH, rrocKo.nbKY rrpe.n:e.n 55 % onpe.n:e.neH rror.nOmaIOmeH: rrpHpo.n:OH: c.noeB GaAs. 113 pHC. 10.10,6 OT'IeT.nHBO BH.n:eH OCHOBHOH: He.n:OCTaTOK 3epKa.n Ep3rra - HX OTpa)KaTe.nbHaH crroco6HOCTb BblCOKa TO.nbKO .n:.nH .nY'IeH: C Ma.nbIMH yr.naMH rra.n:eHHH. npH yr.nax 60.nblIIe 20°, K03cpcpHI.J,HeHT OTpa)KeHHH 3THX 3epKa.n pe3Ko CHH)KaeTCH .n:o 3Ha'IeHHH:, 6.nH3KHX K HY.nIO. n03TOMY 3epKa.na Ep3rra nO'ITH COBceM He OTpa)KaIOT .ny'IH C yr.naMH rra.n:eHHH () B HHTepBa.ne 20°-70°. 3TOT He.n:oCTaTOK 3epKa.n Ep3rra HB.nHeTCH OCHOBHOH: rrpH'IHHOH: rIOTepb B CBeTo.n:Ho.n:ax Ha ,OCHOBe AlinGaP, B KOTOPblX aKTHBHble C.nOH BblpamHBaioTCH rrOBepx OTpa)KaIOmHX c.noeB, pacrro.nO)KeHHbIX Ha nor.nOmaIOmHX no.n:.nO)KKaX GaAs. 0
~
1 ,0
..:
a nOaAs = 3,85 kOaAs = 0,19
PIiC. 10.11. CTpYKTypa 3epKaJla op3rra, IicnoJlb3yeMali B paC'IeTaX (a); 3aBIiCHMOCTb K03
!:l 0,8 nAlAs = 3,15 ~
217
noaP =3,32
SO,6
5§.0,4
..
oS< oS<
~ 0,2
(10.28) )J.mma BOJIHhl
A.,
YroJI ITS,lIeHHlI
8M
a, rpll,l\
PIiC. 10.10. PaC'IeTHhle 3aBliCliMOCTH K03
no .
.D.ABragg
= ABragg(6 = 0°) -
ABragg(6 c )
= 4.D.Astop band'
(10.26)
I1cno.nb3YH BbIpa)KeHHe .n:.nH .n:.nHHbI BO.nHbI Ep3rra, 3aBHCHmeH: OT yr.na rra.n:eHHH .nY'IeH:, H Bblpa)KeHHe .n:.nH lIIHpHHbI nO.nOChI 3aTyxaHHH 3epKaJIa,
I1crroJIb3YH rrpH6.nH)KeHHH: COS X ~ 1 - (1/2)x 2 (crrpaBe.n:JIHBO .n:.nH x, 6JIH3KHX K HyJIIO) H arcosx ~ [2(1 - x)P/2 (crrpaBe.n:.nHBO .n:.nH x, 6JIH3KHX K e.n:HHHI.J,e), rrOJIy'IHM CJIe.n:YIOmee Bblpa)KeHHe:
2.6.n:
2
(10.29)
113 nOCJIe.n:Hero ypaBHeHHH BH.n:HO, 'ITO BeJIH'IHHa KpHTH'IeCKOrO yrJIa CHJIbHO 3aBHCHT OT rrOKa3aTe.nH rrpeJIOMJI~HHH BHelIIHeH: Cpe.n:bI no (6 c ex (nor 3/ 2 ). OTcIO.n:a c.ne.n:yeT, 'ITO .n:JIH BHelIIHHX cpe.n: C BbICOKHM nOKa3aTe.neM npe.nOM.neHHH xapaKTepHbI HH3KHe 3Ha'IeHHH KpHTH'IeCKHX yrJIOB. no 3TOH: npH'IHHe npH TaKHX BHelIIHHX cpe.n:ax 3epKa.na Ep3rra 6y.n:YT Bcer.n:a HMeTb HarrpaBJIeHHble xapaKTepHCTHKH OTpa)KeHHH . B Ka'IeCTBe 'IHCJIeHHOrO rrpHMepa paCCMOTpHM 3epKa.no Ep3rra AIAs/GaAs (nAIAs = 3,0, nGaAs = 3,5), pOJIb BHelIIHeH: Cpe.n:bI HrpaeT GaP (nGaP = 3,1). nO.n:CTaBHB 3TH 3Ha'IeHHH B Bblpa)KeHHe (10.29), HaH:.n:eM BeJIH'IHHY KpHTH'IeCKOrO yr.na 6 e = 20,5°, .n:OCTaTO'IHO 6JIH3KorO K yrJIaM HOpMaJIbHOrO rra.n:eHHH . .lla)Ke TaKHe BbICOKOKOHTpaCTHble 3epKa.na Ep3rra, KaK 3epKaJIa Ha OCHOBe Si02/Si, B c.ny'Iae BHelIIHeH: Cpe.n:bI rrOJIyrrpoBo.n:HHKa C BbICOKHM nOKa3aTe.neM rrpeJIOM.neHHH He 06.na.n:aIOT BceHarrpaBJIeHHbIMH OTpa)KaTe.nbHbIMH xapaKTepHCTHKaMH . .ll.nH orrTHMH3aI.J,HH 3epKa.n Ep3rra Ha rrpaKTHKe 6bIJIH npHMeHeHbI pa3Hble CTpaTerHH. B pa60Te (Chiou et aI., 2000) onHcaH CBeTo.n:H-
r 10.4. Ompa3ICameAu C ICpyeo8ou Hanpa8AeHHocmb1O
FA. 10. Ompa3ICameAU
218
219
O.ll. Ha OCHOBe AlInGaP C 3epKaJlOM Bp3rra, COCTOSlIII.HM H3 .lI.ByX 3ep-
06JIaCTSIX reTeponepeXO.ll.OB MeTO.ll.OM napa60JlHqeCKOrO rpa.ll.HeHTHoro JlerH-
KaJl pa3Horo THna, pa3MeIII.eHHbIX O.ll.HO Ha .lI.pyroM. O.ll.HO H3 3epKaJl-
pOBaHHSI cooTBeTcTBYIOIII.HX CJIOeB (Schubert et ai., 1992a, 1992b). TaKaSi
Alo,5Ino,5P/(Alo,4Gao,s)o,5Ino,5P np03paqHOe C pe30HaHcoM Ha .lI.JlHHe BOJI-
TeXHOJIOrHSI JlerHpOBaHHSI IIlHPOKO npHMeHSleTcSI npH H3rOTOBJleHHH cOBpe-
HbI MaKCHMYMa H3JIyqeHHSI (590 HM), a BTopoe .lI.OnOJlHHTeJlbHOe 3epKa-
MeHHbIX 3epKaJl Bp3rra, n03TOMY np06J1eM, CBSl3aHHbIX C HX 60JIbIIlHM
JlO AlAs/GaAs pacnOJlO}KeHO no.ll. nepBblM H 06J1a.ll.aeT 60JlbillOH pa3HH-
conpOTHBJleHHeM, CerO.ll.HSI 60Jlbille He CYIII.eCTByeT.
IJ;eH nOKa3aTeJleH npeJlOMJleHHSI H nOrJlOIII.alOIII.eH cnoc06HOCTbIO (XOTSI H He60JlbIIloH); ero pe30HaHC HaXO.ll.HTCSI Ha .lI.JlHHe BOJlHbI Ha 10% 60Jibille cooTBeTcTBYIOIII.eH
nHKy H3J1yqeHHSI,
10.4.
qTO .lI.aeT B03MO}KHOCTb OTpa}KaTb
OTpa1KaTeJIH C KpyroBoii HanpaBJIeHHOCTblO
JlyqH, na.ll.alOIII.He He no.ll. npSlMblMH yrJIaMH. ABTopaMH pa60TbI 6bIJlO noKa3aHO, qTO CBeTO.ll.HO.ll.b1 C COCTaBHbIMH 3epKaJIaMH Bp3rra OTJlHqalOTCSI
B HaCTOSlIII.ee BpeMH CYIII.eCTByeT nOTpe6HocTb B TOKOnpOBO.ll.SlIII.HX Bce-
60JIee BblCOKHMH 3HaqeHHSlMHK03
HanpaBJleHHblX pe30HaTopax, 06JIa.ll.alOIII.HX BbICOKOH OTpa}KaTeJlbHOH cnoC06HOCTblO. BbICOKoKoHTpacTHbIe 3epKaJla Bp3rra B B03.l1.yxe .lI.eMOHCTpHPY-
qeHHSI. B
pa60Te
(Li
et ai., 1999) paccMoTpeHbI CBeTO.ll.HO.ll.bI C HenepHO.ll.H-
lOT BceHanpaBJIeHHbIe OTpa}KaTeJlbHbIe xapaKTepHCTHKH. KaH.lI.H.lI.aTOM .lI.JISI
qeCKHMH 3epKaJlaMH, 06J1a.ll.alOIII.HMH 60Jlee IIlHPOKOH nOJlOCOH 3aTyxaHHSI,
HCnOJlb3uOB~HHSI B TaKHX 3epKaJlaX Bp3rra SlBJlSleTCSI napa MaTepHaJlOB:
a
KpeMHHH
3HaqHT,
H
60JlbIIlHMH
OTpa}KaTeJlbHOH
cnoc06HOCTbIO
H .lI.Hana30HOM
.lI.OnYCTHMbIX yrJloB na.ll.eHHSI JlyqeH. .llJlSl paCqeTa OllTHMaJlbHbIX HenepHO.ll.HqeCKHX 3epKaJI Bp3rra npHMeHSIIOTcSI MeTO.ll.bI qHCJleHHoro MO.ll.eJlH-
(n ~
3,5 npH
A=
1 MKM) H Si02
(n ~
1,46). HMelOTcSI .lI.aHHbIe
06 OnTHqeCKHX CBoHcTBax BceHanpaBJleHHbIX OTpa}KaTeJIeH, C03.l1.aHHbIX Ha OCHOBe 3epKaJl Bp3rra H3 Si/Si02 H .lI.pymx CHCTeM MaTepHaJlOB (Chen et ai., 1999; Bruyant et aI., 2003).
pOBaHHSI. H3 paCqeTOB, npHBe.ll.eHHbIX paHee, CJle.ll.yeT, qTO YBeJlHqeHHe pa3HH-
B
OTpa}KaTeJlSlX C 3epKaJlaMH Bp3rra HeTpY.ll.HO noJlyqHTb KpyroBbIe
IJ;bI B nOKa3aTeJlSlX npeJlOMJleHHSI CJIOeB Be.ll.eT K pacIIlHpeHHIO .lI.Hana30Ha
xapaKTepHcTHKH OTpa}KeHHSI nOnepeqHbIX 3J1eKTpHqeCKHX (TE) BOJlH, HO
yrJlOB, npH KOTOPbIX 3epKaJla Bp3rra 06J1a.ll.a1OT BbICOKOH OTpa}KaTeJlbHOH
.lI.06HTbCSI KpyroBbIx xapaKTepHcTHK .lI.JlSI nOnepeqHbIX MarHHTHbIX (TM)
cnoc06HoCTblO. HCnOJlb30BaHHe TaKHX BbICOKOKOHTpaCTHbIX 3epKaJl Bp3rra,
BOJIH OqeHb CJlO}KHO. npenSlTcTBHeM .lI.JlSI 3Toro SlBJlSleTCSI yroJl BplOcTepa,
KaK AlGaAs/ AlxO y , B cTpyKTypax CBeTO.ll.HO.ll.OB 6b1J1o BnepBbIe npe.ll.Jlo}KeHO B pa60Te (Chiou et ai., 2003).
nOCKOJlbKY nOKa3aTeJlH npeJIOM-
JleHHSI Al 2 0 3 H AlGaAs C 60JlbIIlHM CO.ll.ep}KaHHeM aJIIOMHHHSI npHMepHo paBHbI 1,75 H 3,25, K03
=
b.n
1,5.
AlxOy,
npH KOTOPOM K03
e ~ 90°
BO BHeIIlHeH cpe.ll.e C
HH3KHM nOKa3aTeJleM npeJlOMJleHHSI, HanpHMep B B03.l1.yxe, npeBpaIII.aeTCSI BHyTpH MaTepHaJIa C 60Jlee BbICOKHM nOKa3aTeJleM npeJlOMJleHHSI, HanpHMep B 3epKaJle Bp3rra, B .lI.Hana30H 0° ~ ()
«:
90°. H
eCJIH yroJl BplOCTepa
BXO.ll.SlIII.HX B COCTaB 3epKaJl Bp3rra, OCYIII.eCTBJlSleTCSI B npOIJ;eCce OKHC-
He 6Y.ll.eT BXO.ll.HTb B 3TOT .lI.Hana30H BHyTpeHHHX yrJIOB, 3epKaJlO Bp3rra
JleHHSI 3nHTaKCHaJlbHblX CJIOeB AlAs, npOTeKalOIII.erO B cpe.ll.e BO.ll.SlHbIX
MO}KHO CqHTaTb BceHanpaBJleHHblM OTpa}KaTeJleM.
napOB npH 400-450 °C. [OTOBbIe CJlOH .lI.JlSI
AlxOy
B CJIOSIX
AlxOy
HenpOBO.ll.SlIII.He, n03ToMY
ra co CJlOSlMH H3 nOJIHCTHpOJla H TeJIJlypa (Fink et aI., 1998). nOCKOJIbKY
He06xo.ll.HMO OCTaBJlSlTb yqaCTKH AlAs, 3aIII.HIII.eHHbIe OT
3TH MaTepHaJlbl 06JIa.ll.alOT 60JIbillOH pa3HHIJ;eH B nOKa3aTeJlSlX npeJlOMJIeHHSI
TOKa
Me}K.lI.Y
nO.ll.JlO}KKOH
H
aKTHBHblMH
(npolyster
OKHCJleHHSI. 3epKaJla JleHHe,
Bp3rra
MeillalOIII.ee
YCTPOHCTB
MoryT
HMeTb
npOTeKaHHIO
nepneH.lI.HKYJlSlPHO
ee
60JlbillOe
TOKa
3JIeKTpHqeCKOe
qepe3
CJlOSIM.
H3-3a
3Toro
MO}KeT
(Jewell
et
HapYIIlHTbCSI
ai.,
1989;
pa60Ta
Jla3epOB
Koyama etai.,
H
1989)
conpOTHB-
=
1,8, nTe
=
5), JlyqH CBeTa H3 BHeIIlHeH B03.l1.YIIlHOH Cpe.ll.b1,
na.ll.alOIII.He Ha nOBepXHOCTb TaKHX 3epKaJl, He HMelOT B03MO}KHOCTH no-
H3JIyqalOIII.HX
naCTb B 06J1aCTb, 3a.ll.aBaeMYlO yrJIOM BplOCTepa (}B, B pe3YJlbTaTe qero
conpOTHBJleHHSI,
B TaKOH CTpyKType OTpa}KaTeJlSl .lI.JlSI
CTpyKTypy
oc06eHHO npOSlBJlSlIOIII.erO ce6S1 B pe}KHMaX CHJlbHOrO HHSI,
KpyroBbIe xapaKTepHcTHIm OTpa}KeHHSI nOJlyqalOTCSI Ha 3epKaJlaX Bp3r-
06J1aCTSlMH
npoXO}K.lI.eHHSI
npSlMoro CMeIII.e-
CBeTO.ll.HO.ll.OB. 3KcnepHMeHTbI
OnHcaHbI C nepBbI-
MH nOBepxHocTHO-H3JIyqalOIII.HMH Jla3epaMH C BepTHKaJIbHbIM pe30HaTopoM
10-15 MKM
06J1a.ll.alOIII.HX CBOH-
CTBOM .lI.BOHHOro JIyqenpeJlOMJleHHSI. TaKHe nOJlHMepbI B nJlOCKOCTSlX, na-
(VCSEL), .lI.JlSI KOTOPbIX 6b1J1o onpe.ll.eJleHO npe.ll.eJlbHOe HanpSl}KeHHe npSl-
paJlJleJlbHbIX H nepneH.lI.HKYJISlPHbIX nOBepXHOCTH CJIOSl, HMelOT pa3HbIe no-
Moro CMeIII.eHHSI
30 B (Jewell, 1992), qTO npe.ll.OTBpaTHJlO B03MO}KHOCTb
Ka3aTeJlH npeJIOMJleHHSI (Weber et aI., 2000). 3a.ll.aBaTb yroJl BplOcTepa
Jla3epHOH reHepaIJ;HH 3THX YCTPOHCTB B HenpepbIBHoM pe}KHMe. npHqHHOH
MO}KHO nO.ll.60POM cooTBeTcTBYIOIII.eH pa3HocTH nOKa3aTeJleH npeJlOMJleHHSI
B03HHKHOBeHHSI 60JlbIIlHX conpOTHBJleHHH B 3epKaJlaX Bp3rra SlBJlSlIOTCSI
nOJlHMepa. B03MO}KHO nOJlyqeHHe yrJloB BplOcTepa, npeBbIIIlalOIII.Hx 90°,
rv
pe3KHe reTeponepexo.ll.b1, C03.l1.alOIII.He 6apbepbI .lI.JISI nepeMeIII.eHHSI HOCH-
a TaK~e ero MHHMblX 3HaqeHHH. 9TO 03HaqaeT, qTO BOJlHbI C TM-nOJlSlpH-
TeJleH. K
3aIJ;HeH OTpa}KaIOTCSI npaKTHqeCKH npH JlI06bIX yrJIax na.ll.eHHSI.
CqaCTblO, Tenepb HayqHJIHCb nOJlHOCTblO YCTpaHSlTb 6apbepbI B
r ;
220
FA. 10. Ompa:HCameAU
K C02KaJIemHO,
10.4. Ompa:HCameAU C KpYeOBOU HanpaBAeHHocmblO 1,01==~==j"'=~~""""~"'-~~4
BCe rrepeqliCJIeHHbIe BCeHarrpaBJIeHHbIe OTpa2KaTeJIIi CO-
CTOHT B OCHOBHOM H3 AH9JIeKTpliqeCKHX MaTepHaJIOB, qTO AeJIaeT rrpaKTH-
'!:l" °'
MeTaJIJIbI CrrOC06HbI OTpa2KaTb H3JIyqeHlie B· IImpOKOM AHarra30He AJIHH
i'i
BOJIH H yrJIOB rraAeHHH. I1x 06JIaCTb Herrp03paqHOCTH (BblCOKOH: OTpa2Ka-
~
TeJIbHOH: CrrOC06HOCTH) OrpaHHqeHa rrJIa3MeHHOH: qaCTOTOH: ra3a CBo6oAHbIX 9JIeKTpOHOB (Drude,
1904;
Lorentz,
1909).
~aP
::z::
2
Ag/Si0 /GaP BCeHanp3BJIellHLlH
8
qeCKH HeB03M02KHbIM HX IiCrrOJIb30BaHHe B COCTaBe CBeTOAHOAOB.
OAHaKo B036Y2KAeHlie 9JIeK-
TPOHOB, BbI3BaHHoe H3JIyqeHHeM, rraAalOIll.HM Ha rroBepxHocTb MeTaJIJIOB, pacxoAyeTcH He TOJIbKO Ha OTpa2KeHHe CBeTa, HO Ii Ha ero rrOrJIOIll.eHHe,
221
OTpaJKlrreJIL
3epK8JIO :Sperm
~ 0,6
GaAs
AIinGaP, 35 nap 3ePK8JIO :Sperm AlGaAs, 35 nap
50,4
~
:0,2
'" ~
qTO CBH3aHO C 9JIeKTpOH-
YroJI
e, I"p3,ll
HCrrOJIb30BaHHH MaTepHaJIOB C BbICOKHMIi rrOKa3aTeJIHMH
10.12
rrOKa3aH OTpa2KaTeJIb, 06JIaAalOIll.HH: BbICOKOH: OTpa2Ka-
TeJIbHOH: crroco6HoCTblO H KpyroBbIMH xapaKTepHcTHKaMIi OTpa2KeHHH, crroC06HbIH: rrpoBoAIiTb TOK (Schubert,
2001, 2004).
OH COCTOHT 1i3 Tpex CJIOeB:
PHC. 10.13. PaCQeTHble 3aBHCHMOCTH K09tPqmUHeHTa OTpa}l{eHHlI TpeXCJIOHHOrO OTpa}l{aTeJIlI C KpyroBoH HarrpaBJIeHHOCTblO OT AJIHHbI BOJIHbI (a) 1'1 yrJIOB rraAeHHlI (6) H3JIYQeHHlI. Ha pHcYHKax TaK}I{e rrpHBeAeHbI aHaJIOrHQHble 3aBHCHMOCTH AJIlI 3epKaJI fip9rra AlinGaP / AlinP (rrpo3paQHOro) H AIGaAs/GaAs (rrorJIomalOmero) (Gessmann et aI., 2003)
rroJIyrrpoBoAHIiKoBoro, Ali9JIeKTpliqeCKOrO Ii MeTaJIJIHqeCKOrO H Ha3b1BaeTCH TpeXCJIOH:HblM OTpa2KaTeJIeM C KpyroBOH: HarrpaBJIeHHOcTblO. B AIi9JIeKTpH-
AJIHH BOJIH. OAHaKo rrpli yrJIax rraAeHIiH
qeCKOM CJIoe CAeJIaH pHA MIiKpoKoHTaKToB, o6eCrreqHBalOIll.IiX 9JIeKTpOrrpo-
paKTepHcTIiKax TM-BOJIH Ha6JIIOAaeTCH He6oJIb1lIOH: rrpOBaJI K09
BOAHOCTb BCeH: CTpyKTYPbI. nOKa3aTeJIb rrpeJIOMJIeHHH AH9JIeKTpHqeCKOrO
OTpa2KeHI1H. 9TOT rrpOBaJI BbI3BaH CHH2KeHlieM OTpa2KaTeJIbHOH: crroco6HO-
30°
f"V
Ha OTpa2KaTeJIbHbIX xa-
CJIOH AOJI2KeH 6bITb KaK M02KHO 60JIee HH3KHM AJIH 06eCrreQeHHH 60JIbllIerO
CTH rpaHIiUbI pa3AeJIa rroJIyrrpoBoAHIiK-AIi9JIeKTpIiK AJIH JIyQeH:, rraAalOIll.IiX
pa3JIliQHH B rrOKa3aTeJIHX rrpeJIOMJIeHIiH C coceAHHMH rroJIyrrpoBoAHHKO-
rrOA yrJIOM oplOcTepa. I1HTerpaJIbHaH OTpa2KaTeJIbHaH crroco6HoCTb Tpex-
BbIM H MeTaJIjmQeCKHM CJIOHMH. 113-3a BbICOKIiX K09
CJIOH:HblX OTpa2KaTeJIeH: OQeHb BeJIIiKa Ii M02KeT Aa2Ke rrpeBbIllIaTb
Ill.eHHH rrOKa3aTeJIIi rrpeJIOMJIeHIiH MeTaJIJIOB BbIpa2KaIOTCH KOMrrJIeKCHbIMIi QHCJIaMH. Ha pHC.
.
10.13
.
rrpeACTaBJIeHbI 3aBliCHMOCTH OTpa2KaTeJIbHOH: crroco6Ho-
)l;JIH HOpMaJIbHO rra.iJ.alOIll.IiX JIYQeH:
«(} =
0°),
99 %.
K09
TpeXCJIOH:HOrO BceHarrpaBJIeHHOrO OTpa2KaTeJIH orrpeAeJIHeTCH CJIeAYIOIll.HM aHaJIHTIiQeCKHM BbIpa2KeHlieM:
CTH TpeXCJIOH:HOrO OTpa2KaTeJIH C KpyroBOH: HarrpaBJIeHHOCTblO OT AJIIiHbI BOJIHbI H yrJIOB rraAeHHH H3JIYQeHIiH, paCCQHTaHHbIe MaTpHQHbIM MeTOAOM.
RODR
=
op9rra (Gessmann et ai.,
2003).
+ nli) . kmf + + [(ns - nli) . km + (nli - n m) . (ns + nli)]2} x x {[(n s + nli) . (nli + n m) + (n s - nli) . km]2 +
{[(ns - nli) . (nli + n m) + (ns
3Aecb 2Ke rrpliBeAeHbI aHaJIOmQHbIe 3aBliCHMOCTii AJIH .u.syx THrroB3epKaJI BHAHO, QTO TpeXCJIOH:HbIH: OTpa2KaTeJIb
06JIaAaeT KpyroBOH: HarrpaBJIeHHOCTblO OTpa2KaTeJIbHbIX xapaKTeplicTIiK Ii o6eCrreQHBaeT BblCOKHH: K09
+ [(ns + nli) . km + (nli -
n m) . (n s - nli)f} -2,
(10.30)
ns - rrOKa3aTeJIH rrpeJIOMJIeHHH Ali9JIeKTpHKa Ii rrOJIyrrpOBOANm = nm + ikm - KOMrrJIeKCHbIH: rrOKa3aTeJIb rrpeJIOMJIeHHH MeTaJI-
rAe nli Ii HHKa,
JIa. B ypaBHeHHIi rrpeArrOJIaraeTCH, QTO TOJIIll.HHa AH9JIeKTpliQeCKOrO CJIOH CJIOH C HH3KHM IIOKa3aTeJIeM
(n - 1,4) MHKpoKOIITaKThI (IIOIq)LIBaIOT -1 % IIoBepXHoCTH) IIOlIyrrpOBO,n;HHK (n - 3,3) rrpeJIOMJIeHIDI
PHC. 10.12. CTpYKTypa OTpa}l{aTeJIlI C KpyroBoH HarrpaBJIeHHOCTblO, COCTOllmero 1'13 Tpex CJIOeB: rrOJIyrrpoBoAHHKOBoro, AH9JIeiCTpHqeCKOrO 1'1 MeTaJIJIHQeCKoro. MHKPOKOHTaKTbI, BbIJ10JIHeHHble B AH9JIeKTpHQeCKOM CJIoe, 06eCrreQHBalOT 9JIeKTpOrrpOBO,n;HOCTb BceH CTpyKTYPbl (Gessmann et aI., 2003)
C HH3KHM rrOKa3aTeJIeM rrpeJIOMJIeHHH paBHa
AO/ (4nli) ,
T. e. 9TOT CJIOH:
HBJIHeTCH QeTBepTbBOJIHOBbIM. )l;JIH CTpyKTYPbI AI/IrrGaP /Si02/ Ag, H3JIyQalOIll.eH: CBeT C AJIIiHOH: BOJIHbI
630
HM, H3 ypaBHeHIiH
(10.30)
CJIeAyeT, QTO
ee RoDR((} = 0°) = 98,8%. )l;JIH CTpyKTYPbI 6e3 Ali9JIeKTpliQeCKOrO CJIOH 9Ta BeJIHQHHa COCTaBJIHeT 96,1%. B
pa60Te feccMaHa (Gessmann et ai.,
2003)
orrHcaHbI CBeTOAHOAbI
AlInGaP C TpeXCJIOH:HbIMH BceHarrpaBJIeHHbIMH OTpa2KaTeJIHMH, H3JIYQalOIll.lie Ha AJIIiHe BOJIHbI
650
HM. nJIOIll.aAb MIiKpoKoHTaKToB B HIiX COCTaB-
r
Dt. 10. Ompa3ICameJLu
222
CAAlinGaP
30
10.5. 3epIWJLbHbte U aU¢¢y3Hbte ompa3ICameJLU 5rr---.---.---.~
a
6
.E-<
30
T=300K
~
4
Q..," 0 tJ::
~ ~
3
Ru°2iSi02/Ag , ,
=
I
::s 2
~
tJ::
~
~
~
III
0
PHC.
10.14.
I,
3aBHcHMoCTH BbIXOJl.HOH OnTH''1eCKOH MOIUHOCTH OT TOKa HH:lKeKUHH J1.JIH
10.15.
PHC. Ta
OT
BOJIbTaMnepHble
TOKa
J1.JIH
DBR-LED -
1%
8
0
xapaKTepHcTHKH
CBeTOJl.HOJl.OB
InGaN
10 npHMOHTOK
C
H
20 30 I, MA
3aBHCHMOCTH
BceHanpaBJIeHHbIMH
BblXOJl.a
CBe-
OTpa)KaTeJIHMH
2004)
CBeTOJl.HOJl. C BceHanpaBJIeHHblM OTpa)KaTeJIeM,
CBeTOJl.HOJl. C pacnpeJl.eJIeHHbIM 3epKaJIOM Eperra, TS-LED -
CBeTOJl.H-
0.11. C np03paQHOH nOJl.JIO)KKOH
JUlJIa
6 V, B
InGaN/Ru02lSi02/Ag (Kim et aI.,
06JIaJl.aIOT 60JIee BbICOKOH BbIXOJl.HOH MOIUHOCTbIO no cpaBHeHHIO C YCTpoHcTBaMH C 3epKaJIaMH Epsrra. ODR-LED -
4
2
HanpH)KeHHe
MA
HeCKOJIbKHX THnOB CBeTOJl.HOJl.OB. CBeTOJl.HOJl.bI C BceHanpaBJIeHHblMH OTpa)KaTeJIHMH
--,
0 0
80
20 TOK HIDKeImHH
,,
,Ni/Au ,, , , ,, ,, , , ,,
0
10
&
}CJ(
PIN PJl.ereKfOP
~
20
.....;-
223
10.14
OT rroBepxHocTH CJIOH. Ha pHC.
10.5.
3ep'WJLbHblX ompa:JICameJLflX yrOJI OTpa)l{eHHH JIyqeH paBeH yrJIy rra~eHHH. 3epKaJIbHble OTpa)l{aTeJIH HBJIHIOTCH .lI.eTepMHHHpOBaHHbIMH
B
rrOKa3aHbI 3aBHCHMOCTH
BbIXO.ll.HOH OrrHI'IeCKOH MOIll.HOCTH OT TOKa HH)I{eKIJ,HH .lI.JIH HeCKOJIbKHX
3epKaJIbHbIe H ,lJ;HY3HbIe OTpalKaTeJIH
HX
THrrOB CBeTO.ll.HO.ll.OB. BH.lI.HO, qTO CBeTO.ll.HO.ll.bI C OTpa)l{aTeJIHMH C KpyroBoH
YCTpOHCTBaMH, rrOCKOJIbKY B HHX yrJIbI OTpa)l{eHHH BCer.ll.a 3a.ll.alOTCH yrJIa-
HarrpaBJIeHHOCTblO 06JIa.ll.alOT 60JIbilieH BbIXO.ll.HOH MOIll.HOCTblO, qeM CBeTO-
MH rra.ll.eHHH JIyqeH.
ObIJIH TaK)I{e C03.l1.aHbI CBeTO.ll.HO.ll.bI C BceHarrpaBJIeHHbIMH OTpa)l{aTeJIHMH Ha OCHOBe InGaN (Kim et a1.,
2004).
OTpa)l{aTeJIH COCTOHJIH H3 OMH-
qeCKOrO KOHTaKTa RU02, CJIOH GaN p-THrra, qeTBepTbBOJIHOBOrO CJIOH Si02 C HH3KHM rrOKa3aTeJIeM rrpeJIOMJIeHHH C ceTKOH MHKpOKOHTaKTOB H CJIOH cepe6pa. 113 pacqeTOB CJIe.ll.yeT, qTO .lI.JIH OTpa)l{aTeJIeH GaN/Si02/ Ag cpe.ll.HM COCTaBJIHeT
98 %,
(94 %).
(49%)
Be.ll.YT ce6H rrpOTHBOrrOJIO)l{-
I1HTeHcHBHocTb OTpa)l{eHHOrO
H3JIyqeHHH B HHX pacrrpe.ll.eJIeHa ITO IlIHPOKOMY .lI.Harra30HY yrJIOB, He3aJIaM6epToBcKHX
~CTOqHHKOB
H3JIyqeHHH H JIaM6epToBcKHX OTpa)l{aTeJIeH,
rrOCJIe qero rrepeH.lI.eM K BorrpocaM HX HCrrOJIb30BaHHH B cTpyKTypax CBeTO.lI.HO.ll.OB.
a
6
qTO ropa3.l1.0 BbIIlIe, qeM y pacrrpe.ll.eJIeHHbIX
3epKaJI op3rra Alo,25Gao,75N/GaN
10.16.
BHCHIlI.HX OT yrJIOB rra.ll.eHHH JIyqeH . .llaJIee 6Y.ll.YT paccMoTpeHbI CBOHCTBa
HeyrJIOBaH OTpa)l{aTeJIbHaH crroc06HOCTb .lI.JIH H3JIyqeHHH C .lI.JIHHOH BOJIHbI
A = 450
/l.u¢¢y3Hble ompa:JICameJLU
HbIM 06pa30M, qTO rrOKa3aHO Ha pHC.
.lI.HO.ll.bI C 3epKaJIaMH op3rra.
H cepe6pHHbIX OTpa)l{aTeJIeH
orp3)Kemn.rli: rraJl.aIOmHH
ObIJIO rrOKa3aHO, qTO OTpa)l{aTeJIH RU02/Si02/Ag 06JIa.ll.alOT 60JIee
JIY'I
JIY'I
BbICOKHM K03
10.15
rrpe.ll.CTaBJIeHbI B cpaBHeHHH 3JIeKTpHqeCKHe
H OrrTHqeCKHe xapaKTepHCTH CBeTO.ll.HO.ll.OB InGaN C BceHarrpaBJIeHHbIMH OTpa)l{aTeJIHMH.
PHC.
10.16.
CXeMaTHQHOe H306pa)KeHHe 3epKaJIbHOrO
TOBcKoro) OTpa)KaTeJIeH
(6).
(a)
H J1.H
PacnpeJl.eJIeHHe MOIUHOCTH OTpa)KeHHOrO J1.H
OTpa)KaTeJIeM H3JIYQeHHH 3aBHCHT OT KocHHyca yrJIa
e
224
TA. 10. Ompa3ICameAu
10.5. 3epKaAbftbte Ii aUc/Jc/JY3ftbte ompa3ICameAU O~eHJ.lBaTb
HPKOCTb HCTO'lHHKa KaK
HPKOCTb r.u.e
225
A . cos e -
113 Bblpa)KeHHH
=
In' A· cose A . cose = In,
(10.32)
rrJIOIII.a.u.b rrOBepXHOCTH HCTO'lHHKa, BH.u.HMaH Ha6JI1o.u.aTeJIIO.
(10.32)
BH.u.HO, 'ITO He3aBHCHMO OT yrJIa 0630pa HPKOCTb
HCTO'lHHKa 6y.u.eT OCTaBaTbCH rrocTOHHHOH:. TIo.u.TBep)K.u.eHHe 3Toro 4>aKTa PHC. 10.17. HPKOCTb TIOBepXHocTH COJIHlIa He 3aBHCHT OT yrJIa Ha6JIIO.lI.eHHlI. COJIHue -XOpOlllHH TIpHMep JIaM6epTOBCKoro HCTO'lHHKa H3JIY'leHHlI (a); JIYHaXOPOlllHH TIpHMep JIaM6epTOBCKoro OTpa>KaTeJIlI (6) I1CTo'lHHKaMH C JIaM6epTOBCKO~ .u.HarpaMMOH: HarrpaBJIeHHOCTH H3JIy'1eHHH Ha3b1BaIOT HCTO'lHHKH, H3JIY'leHHe KOTOPbIX OCTaeTCH rrOCTOHHHbIM He3aBHCHMO OT yrJIa Ha6JIIO.u.eHHH. TIo.u. H3JIY'leHHeM 3.l1.eCb rrOHHMaeTCH orrTH'IeCKaH MOIII.HOCTb, H3JIY'laeMaH e.u.HHH~eH: rrJIOIII.a.u.H rrOBepXHOCTH HCTO'lHHKa B rrpe.u.eJIax rrpOCTpaHCTBeHHoro yrJIa, paBHoro O.u.HOMY CTepa.ll.HaHY. i
il I'
113 3Toro orrpe.u.eJIeHHH, HBHBIlIerOCH pe3YJIbTaTOM MHOrO'lHCJIeHHbIX 3KcrrepHMeHTOB, CJIe.u.yeT, 'ITO H3JIY'leHHe H HPKOCTb JIaM6epTOBCKHX HCTO'lHHKOB He 3aBHCHT OT yrJIa Ha6JIIO.u.eHHH. CaMbIM HpKHM rrpHMepOM JIaM6epTOBCKHX HCTO'lHHKOB H3JIY'leHHH HBJIHeTCH COJIH~e. KaK rrOKa3aHO Ha pHC.
10.17, a,
JII06ble Y'lacTKH COJIli:e'lHOH: rroBepxHocTH 06JIa.u.a1OT O.ll.HHaKOBOH: HPKOCTblO,
rrOKa3bIBalOT 4>oTorpa4>HH Ha pHC.
CHaJIbHoro CJIOH, 6y.u.eT pacrrpocTpaHHTbcH B.u.OJIb 3Toro CJIOH, KaK rro BOJIHOBO.u.y. O.u.HaKo B cJIy'lae .u.H4>4>Y3Horo OTpa)KaTeJIH '1aCTb CBen yH:.u.eT BO BHelIIHee rrpOCTpaHCTBO (pHC.
ec
ec
f
In' Cose . 271" . sin ede p= ~o~_________________ 90°
f
In' cos e . 271" . sin ede
o
sin (2e) de 1 - cos (2e c ) 2
o
MO)KHO Ha-
sin (2e) de
(n, . sin e c = n2, n, > n2), nOJIy'lHM
p = 1 - cos [2 ar~sin (n2/ ndl
HJIH
(10.33)
o
TIpHMeHHB 3aKOH CHeJIJIHyca
JWM6epmoBclwe ompa:JICameJtu
f f
90°
JIOMJIeHHH BOJIHOBo.u.a,
l£ufjJfjJY3Hbte
ec,
orrpe.u.eJIHeTCH Bblpa)KeHHeM
KHM yrJIOM MbI 6y.u.eM CMOTpeTb Ha rrOBepXHOCTb COJIH~a (rro.u. npHMblM
10.17, 6,
TIOCKOJIbKY .u.JIH JIaM6epToBcKoro
HbIH: CBeT rrorra.u.eT B BbIXO.u.HOH: KOHyC H3JIY'leHHH, 3a.u.aBaeMbIH: yrJIOM
HJIH JII06bIM .u.pyrHM), HPKOCTb CBe'leHHH 3THX Y'laCTKOB He H3MeHHTCH. TIo 3TOH: )Ke npH'IHHe JIyi:Iy, nOKa3aHHYlO Ha pHC.
10.18).
OTpa)KaTeJIH crrpaBe.u.JIHB 3aKOH KocHHyca, BepoHTHoCTb TOro, 'ITO OTpa)KeH-
He3aBHCHIII.eH: OT yrJIa Ha6JIIO.u.eHHH. 9TO 03Ha'iaeT, 'ITO OT Toro, rro.u. Ka-
3BaTb XOpOIlIHM npHMepOM JIaM6epToBcKoro OTpa)KaTeJIH.
10.17.
CBeT, OTpa)KalOIII.HH:CH 3epKaJIbHbIM OTpa)KaTeJIeM B CTOPOHY 3rrHTaK-
r.u.e
= (:~
n, -
rrOKa3aTeJIb rrpe-
f
(10.34)
OTpa)KalOT .u.OJIeTalOIII.He .u.o HHX 4>OTOHbI
B rrpOH3BOJIbHOM HarrpaBJIeHHH. TIpe.u.nOJIO)KHM, 'ITO HHTeHCHBHOCTb H3JIY'leHHH (onTH'IeCKaH MOIII.HOCTb H3JIY'leHHH BHyTpH npOCTpaHCTBeHHoro yrJIa, paBHoro O.u.HOMY CTepa.u.HaHY) JIaM6epTOBCKoro HCTO'lHHKa· B.u.OJIb HarrpaBJIeHHH, 3a.u.aBaeMoro yrJIOM
e,
onpe.u.eJIHeTCH Bblpa)KeHHeM r---,(.~__~----
3epKlUThHalI nOBepXHOCTL
I = In' r.u.e
In -
(10.31)
Cose
8 JIaM6epIOBcEJrli.l
JIaMOOpIoBCEJrli o6pa3eI\
HHTeHCHBHOCTb H3JIY'leHHH no HOpMaJIH K nOBepxHocTH OTpa)Ka-
TeJIH. 3TO Bblpa)KeHHe Ha3bIBaeTCH 3aKOHOM KocHHyca JIaM6epn . .ll.aJIee 6y.u.eT nOKa3aHO, 'ITO H3 3aKOHa JIaM6epTa CJIe.u.yeT He3aBHCHMOCTb H3JIY'leHHH HCTO'lHHKa HJIH ero HPKOCTH B .pa.u.HOMeTpH'IeCKHX
e.u.HHH~ax OT yrJIa Ha6JIIO.u.eHHH no OTHOIlIeHHIO K rrOBepXHOCTH HCTO'lHHKa. TIyCTb rrJI0III.a.u.b nOBepXHOCTH JIaM6epTOBCKoro HCTO'lHHKa paBHa Ha6JIIO.u.aTeJIb, Haxo.u.HIII.HH:CH
rro.u. yrJIOM
e
6y.u.eT BH.u.eTb npoeK~HIO 3TOH: rroBepxHocTH
K
A.
rrOBepXHOCTH HCTO'lHHKa
A . cos e.
PHC. 10.18. OIlTH'leCKHH JIy'l, paCTIpOCTpaHlIIOIUHHClI TIO 3TIHTaKCHaJIbHoMY CJIOIO KaK TIO BOJIHOBO.ll.Y, OTpa>KallCb OT 3epKaJIbHblX rpaHHlI pa3.l1.eJIa 3TIHTaKCHaJIbHblH CJIOH/TIO.ll.JIO>KKa H 3TIHTaKCHaJIbHblH CJIOH/B03.l1.YX (a). PaCTIpOCTpaHeHHe OIlTH'leCKoro JIy'la TIO BOJIHOBO.ll.Y, OrpaHH'leHHOe JIaM6epToBcKHM OTpa>KaTeJIeM - rpaHHlIeH pa3.l1.eJIa 3TIHTaKCHaJIbHbIH CJIOH/TIO.ll.JIO>KKa (6) H 3epKaJIbHOH rpaHHlIeH 3TIHTaKCHaJIbHbIH CJIOH/B03.l1.YX (8)
TI03TOMY OH 6y.u.eT
8 <1>. E. IIly6epT
226
10.5. 3epIWAbftbte U aU¢¢y3ftbte ompa:JICameAU
Dt. 10. Ompa:JICameAU
227
ECJIH JIaM6epTOBCKHH OTpa)KaTeJIb 06JIa.ll.aeT e.ll.HHHlIHbIM K09
(R = 1,0),
HHTeHCHBHOCTb CBeTa BHYTPH nOJIynpOBO.ll.HHKO-
Boro MaTepHaJIa 6Y.lI.eT YMeHbIIlaTbcH no 3aKoHY reoMeTpHliecKoH nporpec-
N OTpa)KeHHH OT rpaHHU pa3.l1.eJIa, HHTeHCHBHOCTb (1 - p)N. nYCTb N - lIHCJIO OTpa)KeHHH, nOCJIe HHTeHCHBHOCTb H3JIYlIeHHH YMeHbillaeTcH .lI.O lie. Tor.ll.a MO)KHO
CHH. nOcJIe cOBepIIleHHH
H3JIYlIeHHH CHH3HTCH .lI.O KOTOPbIX
3anHcaTb CJIe.ll.YIOIII.ee COOTHOIIleHHe:
(1 - p)N = lie.
N,
PeIIlHB 9TO ypaBHeHHe OTHOCHTeJIbHO
(10.35)
onpe.ll.eJIHM lIHCJIO OTpa)KeHHH,
KOTopoe He06xo.ll.HMO cOBepIIlHTb JIYlIY CBeTa, nepe.ll. TeM KaK BbIHTH 3a npe.ll.eJIbi nOJIynpOBO.ll.HHKa:
(10.36) B KalleCTBe npHMepa paccMoTpHM CJIOH GaN Cpe.ll.OH HBJIHeTCH B03.l1.YX
(n2
= 1),
nOJIYlIHM
N
(nl = 2,5). ECJIH BHeIIlHeH = 5,7. 3TO 03HaliaeT, liTO
JIYlI CBeTa nOKHHeT npe.ll.eJIbI BOJIHOBO.ll.a npH6JIH3HTeJIbHO lIepe3 IIleCTb
PHC. 10.19. .llHarpaMMbI HanpaBJIeHHOCTH .lI.Hcj>cj>Y3Horo H CMelIIaHHoro (3epKaJIbHO.lI.Hcj>cj>Y3Horo) OTpa)!{aTeJIH, a TaK)!{e 3epKaJIbHOrO OTpa)!{aTeJIH .lI.JIH JIy'Ia C yrJIOM na.ll.eHHH 45
°
.lI.H
pOJIa C nOCJIe.ll.YIOIII.HM HOHHbIM TpaBJIeHHeM H HaHeceHHeM CJIOH cepe6pa.
BbITHHYTbIH B ropH30HTaJIbHOM. HanpaBJIeHHH H3JIYlIaTeJIb, B KOTOPOM He
BH.lI.HO, liTO .lI.H
npOHCXO.ll.HT CHH)KeHHH 9
(Kim
2006).
et ai.,
YCHJIHHHeM IIlepOXOBaTOCTH OTpa)KaIOIII.HX nOBepxHocTeH MeTaJIJIOB HJIH .lI.H9JIeKTpHKOB MexaHHlIeCKHMH MeTO.ll.aMH MO)KHO H3MeHHTb HX OTpa)KaTeJIbHble CBOHCTBa C 3epKaJIbHbIX Ha .lI.H
Si02.
OTpa)KaTeJIH nOliTH Ha .lI.Ba nOpH.lI.Ka BbI IIle , lIeM Y cepe6pHHoro C rJIa.ll.KOH nOBepXHOCTbIO. O.ll.HaKO Y TeKCTypHpOBaHHoro OTpaJKaTeJIH Ha6JIIO.lI.aeTCH H
3TO npHBO.ll.HT K MHorOKpaT-
HOMY npeJIOMJIeHHIO, OTpa)KeHHIO H pacceHHHIO JIYlIeH CBeTa, liTO paCIIlHpHeT .lI.Hana30H HanpaBJIeHHOCTH OTpa)KeHHbIX OT nOBepXHOCTH
oX.
Tor.ll.a OTpa)Ka-
lIeTKHH nHK 3epKaJIbHOrO OTpa)KeHHH. et ai.,
C
nOMOIII.bIO MO.ll.eJIH 3H H .lI.p.
(Xi
2006)
MO)KHO KOJIHlIeCTBeHHO paCClIHTaTb COOTHOIIleHHe .lI.H
Pdiffl (Pspec
+ Pdiff)
COCTaBJIHJIO
21,2
10.20,
K09
= 42,8 %.
,LlJIH npe.ll.CTaBJIeHHOrO TaM )Ke lIaCTHliHO .lI.H
npH
eIII.e
60JIbilleM YBeJIHlIeHHH
MO)KHO .lI.OBeCTH K09
IIlepoxoBaTocTH
100 %.
TeJIbHble xapaKTepHcTHKH .lI.H
YnpaJKlieHHe. flpUMefteftUe AaM6epmo8cKux ompa:JICameAeU 8 C8emOaUOaax
yrnoB
PaCCMOTpHM JIaM6epTOBCKHH OTpa)!{aTeJIb C K03cj>cj>HIIHeHTOM OTpa)!{eHHH, paBHbIM e.ll.HHHIIe, BCTpoeHHbIH B CTpyKTypy CBeTO.ll.HO.ll.a Ha OCHOBe GaAs, y KOTOporo HeT HHKaKHX nOTepb. IToKa3aTeJIb npeJIOMJIeHHH GaAs paBeH 3,5. C'IHTaeM, 'ITO BHelIIHeH Cpe.ll.OH HBJIHeTCH B03.l1.YX. Tpe6yeTcH paCC'IHTaTb KpHTH'IeCKHH yroJI BblXO.ll.HOrO KOHyca H3JIY'IeHHH H Cpe.ll.Hee 'IHCJIO OTpa)!{eHHH, KOTopble cOBeplIIHT cj>OTOH npe)!{.lI.e 'IeM BbIJIeTHT 3a npe.ll.eJIbI MaTepHaJIa C BbICOKHM nOKa3aTeJIeM npeJIOMJIeHHH.
na.ll.eHHH
nOBepxHocTHMH,
JIYlIeH.
MHome
HCnOJIb3yeMble
3epKaJIbHO-.lI.H
OTpa)KaTeJIH
Ha
npaKTHKe,
OTpa)KaTeJIbHbIMH
C
TeKcTypHpOBaHHbIMH
06JIa.ll.aIOT
CMeIIlaHHbIMH
xapaKTepHcTHKaMH.
TaKHe
OTpa)KaTeJIH B OTJIHlIHe OT lIHCTO .lI.H
a
.lI.H
45°. pHC. 10.20
H
10.19
CMeIIlaHHoro
3epKaJIbHOrO
nOKa3aHbI .lI.HarpaMMbI
(3epKaJIbHO-.lI.H
OTpa)KaTeJIH
.lI.JIH
JIYlIa
C
yrJIOM
PemeHHe
na.ll.eHHH Ha
8 c =16,6°; p=8,2%;
npe.ll.CTaBJIeHbI 3aBHCHMOCTH HHTeHCHBHOCTH OTpa)KeH-
Horo H3JIYlIeHHH OT yrJIa OTpa)KeHHH, 9KcnepHMeHTaJIbHO nOJIYlIeHHble .lI.JIH nJIaHapHbIX cepe6pHHbIX OTpa)KaTeJIeH
C rJIa.ll.KOH
H TeKcTypHpoBaHHoH
nOBepxHocTHMH. lIIepoxoBaTocTb nOBepXHOCTH .lI.OCTHraJIaCb HaHeceHHeM Ha nO.ll.JIO)KKY MeTO.ll.OM JIHTOrpa
700
HM H3 nOJIHCTH-
N=11,7.
MO)!{HO JIH HaHTH npHMeHeHHe rHnOTeTH'IeCKoMY nJIaHapHoMY OTpa)!{aTemO, oTpa)!{aIOlIIeMY JIy'IH, na.ll.aIOIIIHe Ha ero nOBepxHocTb no.ll. JII06b1MH yrJIaMH, no.ll. npHMblM yrJIOM? CYlIIecTByeT JIH cj>H3H'IeCKHH npHHIIHn, He .lI.aIOIIIHH peaJIbHbIM OTpa)!{aTeJIHM OTpa)!{aTb JIy'IH TaKHM cnoco60M? 8*
10.5. Bu6ltuoepat/Ju'leclwu cnUCOK
rlt. 10. OmpaJICameltu
228
TaKHX OTpa)!{aTeJIeH HallIJIOCb 6bI MHoro 06JIaCTeH npHMeHeHIUI. O.ll.HaKO H3 aalWHa coxpaHeHUft ftpIwcmu CJIe.ll.yeT, 'ITO HeB03MO)!{HO C03.l1.aTb naccHBHYIO 2 OnTH'IecKYIO cHcTeMY, HPKOCTb H3JIY'leHHH KOTOPOH npeBblllIaJIa 6bI BeJIH'IHHY Ljn , r.ll.e L - HPKOCTb HCTO'lHHKa B BaKYYMe, n - nOKa3aTeJIb npeJIOMJIeHHH Cpe.ll.bI pacnpocTpaHeHHH cBeTa. IT03TOMY TaKHe rHnOTeTH'IeCKHe OTpa)!{aTeJIH Ha npaKTHKe He MoryT 6bITb c03.l1.aHbl.
OTBeT. ,l{JIlI
BH6JIHOrpaHQeCKHH crrHCOK Adachi S. in Properties of Gallium Arsenide EMIS Datareview Ser.2, 513 INSPEC (lEE, New York, 1990). Adachi S., Kato H., Moki A., and Ohtsuka K. "Refractive index of (At"Gal-x)o,5InO.5P quaternary alloys" J. Appl. Phys. 75, 478 (1994). Babic D. I., Piprek L., and Bowers J. E. in Vertical-Cavity Surface-Emitting Lasers edited by C. W. Wilmsen, H. Temkin, and L. A. Coldren (Cambridge University Press, Cambridge, 1999). Bell L. The Telescope this book discusses metal reflectors in a historical context; see pp. 220-227 (McGraw Hill, New York, 1922). Bjork G., Yamamoto Y., and Heitmann H. "Spontaneous emission control in semiconductor microcavities" in Confined Electrons and Photons edited by E. Burstein and C. Weisbuch (Plenum Press, New York, 1995). Born M. and Wolf E. Principles of Optics 6th edition (Pergamon Press, New York, 1989). Bruyant A., Lerondel G., Reece P. J., and Gal M. "All-silicon omnidirectional mirrors based on one-dimensional photonic crystals" Appl. Phys. Lett. 82, 3227 (2003). N:;
:;
104
"
~:; 10 3 gj:0
"
~ = E 0
:0 :0
102 10 1 100
~ 10-1 r ~ tjlO-2
1,1
0
:0
~ 10-3 :0
~
~ 10-4
cepe6pllHLIii OTpIDKaTeJIL
a. = 400 I
,
C I1Il1)\KOli IIoBepXHoCTLIO:
I\ere~.
Pdiff/(Pdiff+ Pspec ) < 1%
~
cepe6pllHLIii OTpIDK!ITeJlL OTpIDKaTeJTh C C Tec-rypHpOBaHHoli IIoBepXHoCTLIO: IIOJIHCTHpOJIOBLIM Pdiff/(Pdiff+ P spec ) = 42,8% IIOKpLITHeM
TeopenJqeCKaJI 3aBHCHMOCTD,
(740 HM)
CI1IIIlIOfBllIOII1a>1 3KCrrepHMeHTaJILHLle TO'lKH,
COOTBeTCTJIYlOII1He ilHq,q,y.3HOMY ...~ H 3epKlUILHoMY~IDKeHHIO _ ....E
~-
~
. . -e·:F"'/"'·_
I cepe~PlI~ 0Tp~!IT~ '1- -1iI-t-iII'+liImlt-.1
-80
-60 -40
-20
t-- ~
",I \.III!I
Yrorr OTpIDKeHHlI
20
. . iII_ ~
p~
-Bl-
0
40
60
Chen K. M., Sparks A. W., Luan H.-C., Lim D. R., Wad a K., and Kimerling L. C. "Si02/Ti02 omnidirectional reflector and microcavity resonator via the solgel method" Appl. Phys. Lett. 75, 3805 (1999). Chiou S.-W., Lee C. P., Huang C. K., and Chen C. W. "Wide angle distributed Bragg reflectors for 590 nm amber AIGaInP light-emitting diodes" J. Appl. Phys. 87, 2052 (2000). Chiou S.-W., Chang H., Chen T.-P., and Chang c.-S. "Light emitting diodes and fabrication method thereof" US Patent 6,552,369 (2003). Coldren L. A. and Corzine S. W. Diode Lasers and Photonics Integrated Circuits (John Wiley and Sons, New York, 1995). Drude P. "Optische Eigenschaften und Elektronen Theorie I" ("Optical properties and electron theoryI") Annalen der Physik 14,677 (1904); see also "Optisc::he Eigenschaften und Elektronen Theorie II" ("Optical properties and electron theory II") Annalen der Physik 14,936 (1904). Gessmann Th., Schubert E. F., Graff J. W., Streubel K., and Karnutsch C. "Omnidirectionally reflective contacts for light-emitting diodes" IEEE Electron. Dev. Lett. 24, 683 (2003). Fink Y., Winn J. N., Fan S., Chen C., Michel J., Joannopoulos J. D., Thomas E. L. "A dielectric omnidirectional reflector" Science 282, 1679 (1998). Hecht J. Understanding Fiber Optics (Pearson Education, Upper Saddle River NJ, 2001). Horng R. H., Wuu D. S., Wei S. C., Huang M. F., Chang K. H., Liu P. H., and Lin K. C. "AlGaInP/AuBe/glass light-emitting diodes fabricated by wafer bonding technology" Appl. Phys. Lett. 75, 154 (1999a). Horng R. H., Wuu D. S., Wei S. c., Tseng C. Y., Huang M. F., Chang K. H., Liu P. H., and Lin K. C. "AlGaInP light-emitting diodes with mirror substrates fabricated by wafer bonding" Appl. Phys. Lett. 75, 3054 (1999b). Jewell J. L., Huang K. F., Tai K., Lee Y. H., Fischer R. J., McCall S. L., and Cho A. Y. "Vertical cavity single quantum well laser" Appl. Phys. Lett. 55, 424 (1989). Jewell J, L. personal communication (1992). Kato T., Susawa H., Hirotani M., Saka T., Ohashi Y., Shichi E., and Shibata S. "GaAs/GaAlAs surface emitting IR LED with Bragg reflector grown by MOCVD" 1. Cryst. Gro'l£!th 107, 832 (1991). Kepler J. Dioptrice (1611).
~
ill
229
80
a, rpaA
PHC. 10.20. 3aBHcHMoCTH HHTeHCHBHOCTH OTpa)!{eHHOrO H3JIY'leHHH OT yrJIa OTpa)!{eHHH JIY'leH .lI.JIH cepe6pHHblx OTpa)!{aTeJIeH c rJIa.ll.KOH H TeKcTYPHpoBaHHoH nOBepxHocTHMH (Xi et ai., 2006)
Kim J. K., Gessmann T., Luo H., and Schubert E. F. "GaInN light-emitting diodes with Ru02/Si02/Ag omni-directional reflector" Appl. Phys. Lett. 84, 4508 (2004). Kim J. K., Luo H., Xi Y., Shah J. M., Gessmann T., and Schubert E. F. "Light extraction in GaInN light-emitting diodes using diffuse omnidirectional reflectors" Journal of the Electrochemical Society 153, G105 (2006). Kish F. A. and Fletcher R. M. "AlGaInP light-emitting diodes" in High Brightness Light-Emitting Diodes edited by G. B. Stringfellow and M. G. Craford, Semiconductors and Semi metals 48 (Academic, San Diego, 1997).
230
TJL. 10. Ompa3lCameJLu
Koyama F., Kinoshita S., and Iga K. "Room temperature continuous wave lasing characteristics of a GaAs vertical-cavity surface-emitting laser" Appl. Phys. Lett. 55, 221 (1989). . Li H., Gu G., Chen H., and Zhu S. "Disordered dielectric high reflectors with broadband from visible to infrared" Appl. Phys. Lett. 74, 3260 (1999). Lorentz H. A. The Theory of Electrons and its Applications to the Phenomena of Light and Radiant Heat (Teubner, Leipzig, Germany, 1909). Margalith T., Buchinsky 0., Cohen D. A., Abare A. C., Hansen M., DenBaars S. P., and Coldren L. A. "Indium tin oxide contacts to gallium nitride optoelectronic devices" Appl. Phys. Lett. 74, 3930 (1999). McCall S. L., Levi A. F. J., Slusher R. E., Pearton S. J., and Logan R. A. "Whispering-gallery mode microdisk lasers" Appl. Phys. Lett. 60, 289 (1992). Mergel D., Stass W., Ehl G., and Barthel D. "Oxygen incorporation in thin films of In203:Sn prepared by radio frequency sputtering" 1. Appl. Phys. 88, 2437 (2000). Palik E. D. Handbook of Optical Constants of Solids (Academic Press, San Diego, 1998). Ray S., Banerjee R., Basu N., Batabyal A. K., and Barua A. K. "Properties of tin doped indium oxide thin films prepared by magnetron sputtering" 1. Appl. Phys. 54, 3497 (1983). Schubert E.F., Tu L.-W., Zydzik G.J., Kopf R.F., Benvenuti A., and Pinto M.R. "Elimination of heterojunction band discontinuities by modulation doping" Appl. Phys. Lett. 60,466 (1992a). Schubert E. F., Tu L.-W., and Zydzik G. J. "Elimination of heterojunction band discontinuities" US Patent ,N'Q 5, 170,407 (1992b). Schubert E. F. "Light-emitting diode with omni-directional reflector" US Patent application 60/339,335 (2001). Schubert E. F. "Light-emitting diode with omni-directional reflector" US Patent 6,784,462; issued Aug. 31 (2004). Sheu J. K., Su Y. K., Chi G. C., Jou M. J., and Chang C. M. "Effects of thermal annealing on the indium tin oxide Schottky contacts of n-GaN" Appl. Phys. Lett. 72,3317 (1998). Shin J. H., Shin S. H., Park J.I., and Kim H. H. "Properties of dc magnetron sputtered indium tin oxide films on polymeric substrates at room temperature" 1. Appl. Phys. 89, 5199 '(2001). Smith G. M., Forbes D. V., Coleman J. J., and Verdeyen J. T. "Optical properties of reactive ion etched corner reflector strained-layer InGaAs-GaAs-AlGaAs quantum-well lasers" IEEE Photonics Technol. Lett. 5, 873 (1993). Streubel K., personal communication (2000). Tu L. W., Schubert E. F., Kopf R. F., Zydzik G. J., Hong M., Chu S. N. G., and Mannaerts J. P. "Vertical cavity surface emitting lasers with semitransparent metallic mirrors and high quantum efficiencies" Appl. Phys. Lett. 57, 2045 (1990). Weber M. F., Stover c. A., Gilbert L. R., Nevitt T. J., and Ouderkirk A. J. "Giant birefringent optics in multilayer polymer mirrors" Science 287, 2451 (2000).
10.5. Bu6JLuoepatjJu'tecK.uu cnucoK.
231
Xi Y., Kim J. K., Mont F., Gessmann Th., Luo H., and Schubert E. F. "Quantitative assessment of diffusivity and specularity of surface-textured reflectors for light extraction in light-emitting diodes" manuscript in preparation (2006). Yariv A. Quantum Electronics 3rd edition (John Wiley and Sons, New York, 1989). ,nonOJlHeHHe peAaKTopa 1. HPHS A. KsaHTosall 3JIeKTpOHHKa, 2 H3JJ.. -M.: CoseTcKoe paJJ.Ho, 1980.488 c.
233
TA. 11. Kopnyca aAfl c8emOaUOa08 MaAot'i U 6oAbUlot'i MOIl1'-tOcmu IIonyc
Bepxmrli KOHTaKT
~/\---.. . \
COeoWiHlfTeJThHb!o/
r JIaBa
!'IaIUKa OTpaJKaTeIDI
rrpOBO~
11
KpHCTanR CBeTO~HO~a
KOPTIYCA ,nJUI CBETO,nHO,nOB MAJIOH
B
6
a
Ii BOJIbllOH MOm.HOCTH COCTaB KOpnYCOB CBeTO~HO~OB 06H3aTe~bHO BXO~HT ~Ba 3~eKTpH
qeCKHX BbIBO~a H OnTHqeCKH np03paqHOe OKHO ~~H BbIBo~a H3~yqeHHH. Kopnyca ~~H MOllI.HbIX CBeTO~HO~OB, KaK npaBH~o, TaK)Ke cO~ep)KaT Ten-
~OOTBO~ ~~H pacceHHHH H36bITKOB Ten~a. MaTepHa~b1 ~~H O~OH Kopnyca ~O~)KHbI 06~a~aTb
c~e~ylOllI.HMH CBoHcTBaMH:
aHO~
OnTHqeCKOH np03paq-
HOCTblO, BbICOKHM nOKa3aTe~eM npe~oM~eHHH, XHMHqeCKOH HHepTHocTblO,
cTa6H~bHoCTblO npH BbICOKOH TeMnepaType H repMeTHqHOCTblO. MOHTa)K KpHcTa~~a B Kopnyc C OKHOM, no nOKa3aTe~1O npe~oM~eHHH HaXO~HllI.HMCH
PHC.
Me)K~y B03~yXOM H no~ynpoBo~HHKOM, yBe~HqHBaeT 3cpcpeKTHBHoCTb BbIBo~a H3~yqeHHH. BO~blliHHCTBO KopnycoB CBeTO~HO~OB H3rOTaB~HBaeTCH
H3
nO~HMepoB
C
nOKa3aTe~HMH npe~oM~eHHH
B
~Hana30He
OT 1,5
~o
1,8.
YMeHbllieHHe pa3HHUbI nOKa3aTe~eH npe~oM~eHHH Ha nOBepxHocTH no~y npoBo~HHKa yBe~HqHBaeT yro~ nO~Horo BHYTpeHHero OTpa)KeHHH, 'ITO pac-
lliHpHeT KOHYC BbIBo~a H3~yqeHHH H yBe~HqHBaeT 3cpcpeKTHBHOCTb BbIBo~a H3~yqeHHH.
Ha pHC. 11.1, a nOKa3aH BapHaHT Kopnyca Ma~OMOllI.HOrO CBeTO~Ho~a. KpHcTa~~
CBeTO~Ho~a
KpenHTcH
BbIBo~aMH
BBepx,
npHK~eHBaeTcH
H~H
~He qallieno~06Horo yr~y6~eHHH (qalliKH OTpa)KaTe~H), O~HHM H3 3~eKTpHqeCKHX KOHTaKTOB (06blqHO C KaTo~oM).
npHnaHBaeTcH Ha
coe~HHeHHoro
C
f1pOBO~ K BepxHeMY KOHTaKTY CBeTO~Ho~a coe~HHHeTCH co BTOPbIM BbIBO-
~OM (aHo~oM).
TaKoH Kopnyc qaCTO Ha3bIBalOT KopnycoM TI-3/4
H~H
5 MM-
KopnYCOM. B Ma~OMOllI.HblX
CBeTO~Ho~ax Kopnyca, KaK npaBH~O, HMelOT CPOPMY no~yccpep, KaK nOKa3aHO Ha pHC. 11.1, a; n03ToMY ~yqH BbIXO~HllI.erO CBe'ta Bcer~a nona~alOT Ha rpaHHUY pa3~e~a Kopnyc-B03~yx no~ npHMbIMH yr~aMH. TaKHM 06pa30M, Ha 3TOH rpaHHue pa3~e~a He B03HHKaeT nO~Hoe
BHyTpeHHee OTpa)KeHHe. CYllI.eCTBYIOT H HeccpepHqeCKHe THnbI KopnycoB, HanpHMep npHMoyro~bHble H UH~HH~pHqeCKHe C n~OCKHMH BepXHHMH noBepXHOCTHMH (pHC. 11.1,6). f1~ocKHe nOBepxHocTH Hcno~b.?yIOT, eC~H CBeTO~HO~b1 ~O~)KHbI 6bITb 3anO~~HUO C nOBepxHocTblO YCTPOHCTB, B KOTopble
OHH BCTpaHBaIOTcH, H~H eC~H Ha HHX 6y~yT CMOTpeTb TO~bKO no~ yr~a MH, 6~H3KHMH K npHMbIM. Kopnyca ~O~)KHbI 3allI.HllI.aTb CBeTO~HO~bI OT
He)Ke~aTe~bHbIX MeXaHHqeCKHX B03~eHcTBHH, B~a)KHOCTH H XHMHqeCKHX peareHToB. Kopnyca cKpen~HIOT KOHCTPYKUHIO, COCTOHllI.YIO H3 aHO~HbIX H KaTO~HbIX BbIBO~OB, BO~OB.
KpHcTa~~a
CBeTO~Ho~a
H coe~HHHTe~bHbIX npo-
11.1.
THnHqHble Kopnyca CBeTO~HO~OB:
Kopnyce,
6-
a-
CBeTO~HO.ll. B nOJIyc
CBeTO.ll.HO.ll.bI B II:HJIHH.lI.pHqeCKOM H npHMoyrOJIbHOM Kopnycax
Ha pHC. 11.2 npe~CTaB~eHa cpoTorpacpHH rpynnbI CBeTO~HO~OB Ha
ma:JICHoii paMKe c 8bt80aaMu. I1H~HBH~ya~bHble Kpen~eHHH,
BpeMeHHoM
y~amleMoM
noc~e
MOH-
paMKH MOHTHPYIOTCH Ha
3aBepllieHHH MOHTa)Ka CBeTO-
~Ho~a (Kpen~eHHH KpHcTa~~a, no~coe~HHeHHH npoBo~oB). 3noKcH~HbIH Kopnyc 06eCneqHBaeT MeXaHHqecKYIO CBH3b Me)K~y aHO~HblM H KaTO~HbIM
BblBo~aMH. KpHcTa~~ CBeTO~Ho~a KpenHTcH K n~ocKoH nOBepxHocTH ~Ha
ttaWKU ompa:JICame,Ml,
06~a~alOllI.ero BbICOKOH OTpa)KaTe~bHoH cnoc06Ho-
CTblO, npH nOMOllI.H npOBO~HllI.eH 3noKcH~HOH CMO~bI, co~ep)KallI.eH cepe6po. OTMeTHM, 'ITO B c~yqae MOllI.HbIX CBeTO~HO~OB ~~H Kpen~eHHH KpHCTa~~OB C
OTpa)KaTe~eM
nocKo~bKy
HX
npe~nOqHTalOT
HcnO~b30BaTb
Ten~OBoe conpOTHB~eHHe
MeTa~~CO~ep)KallI.He
HaMHoro HH)Ke, qeM y
cnaH,
npOBO~HllI.HX
3nOKCH~HbIX CMO~.
Kopnyca ~~H OTBO~HT Ten~o OT KpHcTa~~a CBeTO~Ho~a K pa~HaTopy. TaKoH nyTb MO)KeT o6eCneqHBaTb cneUHa~bHO H3roTosneHHaH neqaTHaH n~aTa. Kopnyc, nOKa3aHHbIH Ha pHC. 11.3, 06~a~aeT TpeMH xapaKTepHbIMH oc06eHHocTHMH. Bo-nepBblx, B ero COCTaB BXO~HT a~IOMH HHeBbIH H~H Me~HbIH pa~HaTop, HMelOllI.HH HH3Koe Ten~OBoe conpoTHB~e Ha pHC. 11.3 nOKa3aH
MOllI.HbIX C.u,
Kopnyc M014HOcO c8emOaUOaa.
KaK npaBH~o,
HHe, K KOTOPOMY npH nOMOllI.H
co~ep)KallI.ero
MeTa~~
npHnoH, KpenHTcH
KpHcTa~~ CBeTO~Ho~a. BO-BTOPbIX, KpHcTa~~ CBeTO~Ho~a repMeTH3HpyeTcH CH~HKOHOM, 06eCneqHBalOllI.HM OTCYTcTBHe MeXaHHqeCKHX HanpH)KeHHH BO BpeMH 3Kcn~yaTaUHH. Ha CH~HKOH HaHOCHTCH n~aCTHKOBoe nOKpbITHe, HrpalOllI.ee pO~b ~HH3bI. B-TpeTbwx, KpeMHHeBaH nO~~O)KKa, Ha KOTOPYIO KpenHTcH CBeTO~HO~, 06eCneqHBaeT KOHCTPYKUHH 3allI.HTY OT 3~eKTpOCTa THqeCKHX
pa3pH~oB.
11.4 npe~cTasneHbI cpoTorpacpHH KopnycoB MOllI.HbIX CBeTO~HO~OB. BH~HbI rpe6eHqaTble KOHTaKTbI CBeTO~HO~OB Ha OCHOBe HHTPHHa pHC.
II I
234
11.1. 3aUfuma om 3AeTCmpocmamUrteCTCUX paapRooB
TA. 11. Kopnyca OAR C8emOOU0008 MaAOU U 60AblUOU MOUfHOCmU
.u.a raJIJIH5I (pHC.
11.4,6).
Ha pHC.
11.4,8
235
nOKa3aHO KpenJIeHHe Kopnyca
CBeTo.u.Ho.u.a K neqaTHOH nJIaTe, 06JIa.u.aIOmeH BbICOKOH TenJIOnpOBo.u.HOCTbIO H 06eCneqHBaIOmeH 9cpcpeKTHBHoe OXJIa)l{.u.eHHe BceH CTpyKTYPbI Museum,
2003).
(LED
HeCKOJIbKO qHnOB, pacnOJIO)l{eHHbIX Ha O.u.HOH no.u.JIO)l{-
Ke, MoryT 6bITb coe.u.HHeHbl nOCJIe.u.OBaTeJIbHO, qTO n03BOJI5IeT YBeJIHqHBaTb pa60qee Hanp5l)l{eHHe npH o.u.HoBpeMeHHoM CHH)I{eHHH pa60qHX TOKOB (Krames et aI.,
2002, 2003). PHC. 11.4. Kopnyc MOll.{Horo CBeTO.ll.HO.ll.a (a); KpHCTaJIJI CBeTO.ll.HO.ll.a B Kopnyce (6); Kopnyc Ha neQaTHOH nJIaTe, 06JIa.ll.aIOll.{eH BbICOKOH TenJIonpOBO.ll.HOCTbIO (8): aKrames et aI., 2003, 6 H 8 - LED Museum, 2003
Ii
'I
11.1.
3aIII.HTa OT 9JIeKTpOCTaTHQeCKHX pa3pSl.ll.OB
O.u.HOH H3 OCHOBHbIX npHqHH Bblxo.u.a H3 CTP051 9JIeKTpOHHbIX H onTO9JIeKTpOHHblX KOMnOHeHTOB 51BJI5IIOTCSI 9JIeKTpOCTaTHqeCKHe pa3pSl.u.bI (Voldman,
2004).
PaccMoTpHM cHTyaUHIO, Kor.u.a Ha O.u.HH H3 9JIeKTpo.u.oB .u.Ho.u.a
nonaJI 3apSl.u.
+Q.
npe.u.noJIO)l{HM, qTO qepe3 BpeMSI fj.t 9TOT 3apSl.u. HC-
qe3HeT. 3TO 3HaqHT, QTO Qepe3 .u.HO.u. npOTeKaJI TOK, paBHbIH [
= +Q/ fj.t
(CQHTaeTCSI, QTO 3apSl.u. YMeHbIlIaJICSI paBHoMepHo). CHaQaJIa paccMoTpHM CJIYQaH nona.u.aHHSI 3apSl.u.a Ha KaTO.u. CBeTo.u.Ho.u.a, aHO.u. KOToporo 3a3eMJIeH. OQeBH.u.Ho, QTO npH 9T"OM nyTh pa3pSl.u.HorO TOKa npoxo.u.HT Qepe3 o6paTHo cMemeHHbIH .u.HO.u.. npe.u.cTaBHM 9KBHBaJIeHTHYIO
PHC. 11.2. MOHTa}l{HaH paMKa, HCnOJIb3yeMaH .lI.JIH cepHHHoro H3rOTOBJIeHHH CBeTO.lI.HO.ll.OB B 5 MM-Kopnycax. Do OKOHqaHHH MOHTa}l{a CBeTO.ll.HO.ll.OB H <j>OpMHpoBaHHH KopnycoB KpenJIeHHe, o6eCneqHBaIOll.{ee MeXaHHQecKYIO }I{eCTKOCTb KOHCTPYKU:HH B npou:ecce H3rOTOBJIeHHH, Y.ll.aJIHeTCH
cxeMY,
cooTBeTcTBYIOmyIO .u.aHHOMY CJIYQaIO,
H napaJIJIeJIbHOrO pe3HcTopa
Rp.
B
BH.u.e
KOH.u.eHcaTopa
C
Tor.u.a B YCTaHOBHBIlIeMCSI COCTOSlHHH npH
npoTeKaHHH Qepe3 .u.HO.u. pa3pSl.u.Horo TOKa HanpSl)l{eHHe Ha .u.Ho.u.e 6y.u.eT paBHO [ .
Rp. 3TO 3HaQHT, Rp . fj.t.
QTO 3a BpeM5I fj.t Ha cBeTo.u.Ho.u.e paCCeeTC5I
9HeprH5I [2 • nnaCTHKOBruJ: llHH3a
.lI.aJIbIlIe paCCMOTpHM CJIYQaH, Kor.u.a 3ap5l.u. nona.u.aeT Ha aHO.u. CBeTO.u.Ho.u.a, KaTO.u. KOToporo 3a3eMJIeH. TOK Tenepb 6y.u.eT H.u.TH Qepe3 np5lMO
repMeTHK
CMemeHHbIH .u.HO.u., 9KBHBaJIeHTHYIO cxeMY KOToporo MO)l{HO npe.u.CTaBHTb B BH.u.e HCTOQHHKa Hanp5l")I{eHH5I C BbIXO.u.HbIM Hanp5l)l{eHHeM
Vih
H nOCJIe-
Rs. B YCTaHOBHBIlIeMC5I pe)l{HMe Hanp5l)l{eHHe Ha Vih + [ . Rs. npH 60JIbIlIHX TOKax OHO onpe.u.eJI5IeTC5I
.u.OBaTe.nbHoro pe3HCTopa
p-n-nepexo.u.e
6y.u.eT
B OCHOBHOM BTOPbIM CJIaraeMbIM, T. e. nepeBepHYThIM
KpHcTann
InGaN
Si no.u.no)lOOl ,lI.IDI KpenneHIDl KpHCTanna C 3neKTpOCTaTH'leCKOM npHnOM
PHC. 11.3. DOnepeQHOe CeQeHHe Kopnyca MOll.{HOrO CBeTO.ll.HO.ll.a. P.JIH 3<j><j>e~THBHoro TenJIOOTBO.ll.a pa.ll.HaTOp MO}l{eT npHnaHBaTbcH K cneU:HaJIbHOH neQaTHOH nJIaTe. TaKOH Kopnyc, npe.ll.JIO}l{eHHbIH KaMnaHHeH Lumileds Corp., Ha3bIBaeTCH KopnycoM oappaKY.ll.a (Krames et aI., 2003)
"
Ha np5lMO CMemeHHOM .u.Ho.u.e 3a
BpeM5I fj.t BeJIHQHHa pacceHBaeMOH 9HeprHH COCTaBHT [2 . nOCKOJIbKY [2 . TOKa Qepe3
Rp . fj.t
06paTHO
~ [2 .
CMemeHHbIH
Rs . fj.t,
Rs . fj.t.
npH npOTeKaHHH pa3p5l.u.Horo
.u.HO.u. pacceHBaeTC5I
ropa3.u.o
60JIbIlIe
9HeprHH, QeM npH ero npOTeKaHHH Qepe3 np5lMO CMemeHHbIH CBeTO~H
o.u.. OTCIO.u.a CJIe.u.yeT, QTO 06pamHbte pa3p5l.u.Hb1e TOKH HaMHoro onaCHeH npRMbtX m01W8. 3TO 3aKJIIOQeHHe 6bIJIO no.u.TBep)l{.u.eHO 9KcnepHMeHTaJIbHO (Wen et aI., 2004). CBeTo.u.Ho.u.bI C 60JIbIlIOH IlIHPHHOH 3anpemeHHoH 30HbI, HanpHMep .u.HO.u.bI GaN, oco6eHHo CHJIbHO cTpa.u.aIOT OT 9JIeKTpOCTaTHQeCKHX pa3p5l.u.oB. 3TO 06b5lCH5IeTC5I 60JIbIlIOH BeJIHQHHOH HX conpOTHBJIeHHH o6paTHbIMH TOKaMH
Rp
(MaJIblMH
HaCblmeHHSI H BbICOKHMH Hanp5l)l{eHH5IMH npo605l).
236
11.3. XUMU'teCKuu cocmaB MamepuaAoB aAR KopnycoB cBemOaUOaOB
FA. 11. Kopnyca aAR cBemOaUOaOB MaAOU u 60AbLUOU MOUJ,Hocmu
TI03TOMY .lI.JIH CBeTO.ll.HO.ll.OB Ha OCHOBe HHTPH.lI.OB
III
237
rpymibi 6bIJIH pa3pa-
60TaHbi cxeMbi 3alll.HTbi OT 3JIeKTpOCTaTHlleCKHX pa3pH.lI.OB -(Steigerwald et aI.,
2002;
2003). 11.5 rrOKa3aHbi
Sheu,
Ha pHC.
THqeCKHX pa3pH.lI.OB:
TpH BapHaHTa cxeM 3alll.HTbi OT 3JIeKTpOCTa-
B BH.lI.e rrOCJIe.ll.OBaTeJIbHOCTH KpeMHHeBbiX .lI.HO.ll.OB,
C O.ll.HHM cTa6HJIHTpOHOM H C .lI.ByMH cTa6H,1lHTpOHaMH aI.,
2002;
)KeHHeM,
Lumileds,
2004).
(Steigerwald et
TOK, BbI3BaHHbIH 3JIeKTpOCTaTHqeCKHM HarrpH-
MHHyH CBeTO.ll.HO.ll., rrpOXO.ll.HT qepe3 rrapaJIJIeJIbHYIO 3alll.HTHYIO
~errb. TaKHe cxeMbi oco6eHHO XOPOlllO pa6oTalOT C pa3pH.lI.aMH o6paTHoH rrOJIHpHoCTH. UerrH 3alll.HTbi OT 3JIeKTpOCTaTHqeCKHX pa3pH.lI.OB, KaK rrpaBHJIO, COBMelll.aIOTCH C KpeMHHeBoH rrO.ll.JIO)KKOH (Steigerwald et aI., Lumileds,
2004).
rrpHMeHeHHe
2002;
PHC. 11.6. CxeMbI samHTbI OT 9JIeKTpOCTaTHQeCKHX paspH.n:oB, paSMemeHHble Ha O.n:HOM KpHCTaJIJIe co CBeTo.n:Ho.n:OM: a - .n:HO.n: lliOTTKH, C<j>OpMHpoBaHHbIH Ha 6y<j>epHOM CJIoe n-THrra CBeTo.n:Ho.n:a IrrGaN; (6) - .n:HO.n: lliOTTKH saMeHeH Ha p-n-rrepexo.n: MaJIOH rrJIOma.n:H (Cheu, 2003)
I1crrOJIb30BaHHe O.ll.HOrO HJIH .lI.ByX cTa6HJIHTpOHOB HJIH
~errOqeK
11.2.
H3 rrOCJIe.ll.OBaTeJIbHO BKJIlOqeHHbiX KpeMHHeBbiX .lI.HO-
TenJIOBOe conpOTHBJIeHHe KopnycoB CBeTO,lJ;HO,lJ;OB
.lI.OB rrpHBO.ll.HT K YBeJIHqeHHIO rroporoBoro HarrpH)KeHHH 3alll.HTHOH ~errH .lI.O 3HaqeHHH, rrpeBblIllalOlll.HX HarrpH)KeHHe BKJIlOqeHHH CBeTO.ll.HO.ll.a. TI03TOMY
TerrJIOBOe corrpOTHBJIeHHe Koprryca CBeTO.ll.HO.ll.a H MaKCHMaJIbHaH pa6o-
B pe)KHMe HOpMaJIbHOH pa60Tbi qepe3 cxeMY 3alll.HTbi TeqeT He3HaqHTeJIb-
qaH TeMrrepaTypa orrpe.ll.eJIHIOT MaKCHMaJIbHYIO TerrJIOBYIO MOlll.HOCTb, pacceHBaeMYIO B HeM. MaKCHMaJIbHaH pa60qaH TeMrrepaTypa, KaK rrpaBHJIO,
HbIH TOK.
orrpe.ll.eJIHeTCH C006pa)KeHHHMH Ha.ll.e)KHOCTH, .lI.erpa.ll.a~HH rrJIaCTHKa Koprryca H BeJIHlIHHbi KBaHTOBoro BbIXO.ll.a H3JIyqeHHH CBeTO.ll.HO.ll.a. Ha pHC.
11.7
rrOKa3aHbi BapHaHTbi CBeT0.ll.HO.ll.HbIX KoprrycoB, a TaK)Ke rrpHBe.ll.eHbi 3HaqeHHH HX TerrJIOBbIX corrpOTHBJIeHHH (Arik et aI.,
2002).
TerrJIOBOe corrpoTHB-
JIeHHe rrepBbix KoprryCOB CBeTO.ll.HO.ll.OB, rrOHBHBlllHXCH B KOH~e H
.lI.O
rv
250
CHX
rrop
K/BT.
HCrrOJIb3yeMbix .lI.JIH
MaJIOMOlll.HbIX .lI.HO.ll.OB,
1960-x
rr.
COCTaBJIHeT
Koprryca C aJIIOMHHHeBbIMH HJIH Me.ll.HbIMH pa.ll.HaTOpaMH,
rrepe.ll.alOlll.HMH TerrJIO OT KpHCTaJIJIa HerrOCpe.ll.CTBeHHo K rreqaTHOH rrJIaTe Ha KOTOPOH: H rrpOHCXO.ll.HT pacceHHHe TerrJIa, 06JIa.ll.alOT TerrJIOBbiM THBJIeHHeM B .lI.Harra30He OT
PHC. 11.5. CxeMbI samHTbI OT 9JIeKTpOCTaTHQeCKHX paspH.n:oB: B BH.n:e rrOCJIe.n:oBaTeJIbHOCTH Si-.n:Ho.n:oB, C O.n:HHM H .n:BYMH cTa6HJIHTpOHaMH (a); cxeMa samHTbI OT 9JIeKTpOCTaTHQeCKHX paspH.n:oB, HHTerpHpoBaHHaH B Si-rro.n:JIo)!{KY (6) (Steigerwald et aI., 2002; Lumileds, 2004)
6-12
corrpo~
K/BT. TIpe.ll.rrOJIaraeTCH, qTO TerrJIOBOe
corrpOTHBJIeHHe cOBpeMeHHblx KoprrycoB MOlll.HbIXCBeTO.ll.HO.ll.OB C rraCCHBHbiM oXJIa)i{.lI.eHHeM 6Y.ll.eT MeHbllle 5 K/BT~ . 3aMeTHM, qTO B Koprrycax, H306pa)KeHHbiX Ha pHC.
11.7,
He aKTHBHoro
OXJIa)K.lI.eHHH, T. e. BeHTHJIHTOpOB. Pa.ll.HaTOpbI C OXJIa)K.lI.alOlll.HMH pe6paMH H BeHTHJIHTOpaMH 06bIqHO rrpHMeHHIOT .lI.JIH OXJIa)K.lI.eHHH 3JIeKTpOHHbIX MHKpOqHrrOB, BKJIlOqaH KpeMHHeBbie MHKporrpo~eCCOPbI KMOTI. I1x TerrJIOBOe
SbIJIO rrpe.ll.JIO)KeHO (Sheu,
2003)
corrpOTHBJIeHHe MeHbllle pa3MecTHTb B O.ll.HOM KpHCTaJIJIe CBeTO-
.lI.HO.ll. H .lI.HO.ll. ilIOTTKH. CTpYKTypa, rrOKa3aHHaH Ha pHC. .lI.HO.ll.a C 60JIblllOH rrJIOlll.a.ll.blO
p-n-rrepexo.ll.a,
11.6, a,
COCTOHT H3
5
K/BT. I1crrOJIb30BaHHe aKTHBHoro OXJIa)K.lI.eHHH
CHH)KaeT 3
OT.lI.eJIeHHOrO rJIy6oKoH 60P03-
.lI.OH OT .lI.HO.ll.a ilIOTTKH MaJIOH rrJIOlll.a.ll.H . .lJ.HO.ll. ilIOTTKH, C
11.3.
XHMHQeCKHH COCTaB MaTepHaJIOB ,lJ;JISI KopnycoB CBeTO,lJ;HO,lJ;OB
HOH rrOJIHpHoCTH. Pa3pH.lI.HbIH TOK o6paTHoH rrOJIHpHOCTH TeqeT B OCHOBHOM qepe3 .lI.HO.ll. ilIOTTKH,.MHHYH
p-n-rrepexo.ll.,
qTO rrpe.ll.OTBpalll.aeT ero rrpo6oH:.
K KoprrycaM CBeTO.ll.HO.ll.OBrrpe.ll.bHBJIHeTCH HeCKOJIbKO Tpe6oBaHHH:: OHH
p-n-rrepexo.ll..
.lI.OJI)KHbi 6bITb rrp03paQHbIMH, XHMHQeCKH cTa6HJIbHbIMH, repMeTHQHbIMH,
TIpH pa3pH.lI.HbiX TOKax rrpHMOH: rrOJIHpHOCTH TOK TeqeT qepe3 Ha pHC.
11.6, 6
3aMeHeH Ha
rrOKa3aHa aJIbTepHaTHBHaH cxeMa, B KOTOPOH .lI.HO.ll. ilIOTTKH
p-n-rrepeXO.ll.
(Cho,
2005).
06JIa.ll.aTb BbiCOKHMH rrOKa3aTeJIHMH rrpeJIOMJIeHHH H BbI.lI.ep)KHBaTb BbiCOKHe TeMrrepaTypbl. Bce Koprryca CBeTO.ll.HO.ll.OB H3rOTaBJIHBalOTCH H3 rrOJIHMepOB;
238
Til. 11. Kopnyca a/lJl c8emOaUOa08 Ma/lOU U 60/lbUlOU MOI4Hocmu
CTpyKTypHbIe
11.3. XUMU'lec/Cuu cocma8 MamepUaA08 a/lJl /Copnyco8 c8emOaUOa08
11.8.
MOJIeKYJIa caMoro rrpOCToro rrOJIHMepa COCTOHT H3 u.errOqKH yrJIeBO.ll.O-
11.8, a).
PO.ll.OB (pHC.
OrBeTBJIeHHH H rrepeKpeCTHbIe CBH3H BHyTpH MO-
JIeKYJI rrOJIHMepOB rrpHBO.ll.HT K o6pa30BaHHIO MaTepHaJIOB THrra pe3HHbI (pHC.
11.8,6).
TaKHe MaTepHaJIbI 06JIa.ll.aIOT HH3KOH rrp03paqHOCTbIO H He
aI aI
MoryT rrpHMeHHTbCH .lI.JIH H3rOTOBJIeHHH KoprrYCOB CBeTO.ll.HO.ll.OB. O.ll.HaKO XOPOIlIO H3BeCTHO, 'ITO OKCH.lI.bI qaCTO 6bIBaIOT rrp03paqHbIMH,
rr09TOMY
B XHMHqeCKOM COCTaBe MaTepHaJIOB .lI.JIH KoprrycoB CBeTO.ll.HO.ll.OB BCer.ll.a rrpHCYTCTByeT KHCJIOPO.ll..
0-0
qame Bcero Koprryca CBeTO.ll.HO.ll.OB H3rOTaBJIHBaIOT H3 anOKCUaH.OU CMO-
I
/lbl (qaCTO Ha3bIBaeMOH 9rrOKCH.lI.KOH). TaKHe Koprryca rrp03paqHbI H He .lI.erpa.ll.HpyIOT rrpH HCrrOJIb30BaHHH HX B CBeTO.ll.H0.ll.aX .lI.JIHHHOBOJIHOBOH qaCTH BH.lI.HMOH H HH
1998),
'ITO 9rrOKCH.lI.HbIe CMOJIbI TepHIOT CBOIO rrp03paqHOCTb rrpH
HCrrOJIb30BaHHH B KOPOTKOBOJIHOBbIX e,ll, H3JIyqaIOmHX B rOJIy6oH,
I
TOBOH HJIH y
::c:u::c:
HbI .lI.O TeMrrepaTYP
rv
120°C.
,llJIHTeJIbHOe B03.l1.eHCTBHe 60JIee BbICOKHX
11.8, B
rrOKa3aHa anOKCUaH.aR 2pynna,
B COCTaB KOTOPOH
BXO.ll.HT KHCJIOPO.ll., CBH3aHHbIH C .lI.ByMH crrapeHHbIMH aTOMaMH yrJIepo.ll.a. TaKHe KOJIbu.eBble 9rrOKCH.lI.Hble rpyrrrrbI HBJIHIOTCH COCTaBHbIMH qaCTHMH CTpyKTYPbI 9rrOKCH.lI.HOH CMOJIbI, rrpe.ll.CTaBJIeHHOH Ha pHC. 9rrOKCH.lI.Hble CMOJIbI TOB -
11.8,2.
TBep.ll.ble
cTexHOMeTpHqeCKHe CMeCH .lI.ByX )KH.lI.KHX KOMrrOHeH-
BemeCTBa C 9rrOKCH.lI.HbIMH rpyrrrraMH H CMOJIbI, cO.ll.ep)KameH .lI.Be
I I ::c:u::c:
I ::c:u::c:
rH.lI.POKCHJIbHble rpyrrrrbI. CMOAbl rrpe.ll.CTaBJIHIOT C060H MacJIoo6pa3Hble Be-
I ::c:u::c:
'"
~
~ ~" 150
,
.,1.2.1"""",
i
::c:u::c:
I
.
::c:u::c:
I
" 125 K1BT
1 6
8
~
I
a~ """'" tr ,
~ §- 100 50
pacIDupeHHaJI
~ P~~~ C_BWID~I
"
::c:u::c: 75 K1BT 2 ! ' J P
~ 00""'" 6_~~I
~
15 KIB
0(i£
I
neqaTHaJI
M~
.)
.
'_'_1t~-_-_~-_-_-_-_--_-~~~KIB_-_-~_-_11-r------~~5~KIB--T~
0L-__ ___ ___ __ AWM __ H___ _______ 1970 1995 1997 1999
·2001
> 2005
PHC. 11.7. TenJIOBOe conpOTHBJIeHHe KopnycoB CBeTO.ll.HO.ll.OB: a - «5 MM», 6 - C HH3KHM npQ(ilHJIeM, 8 - C HH3KHM npOlilHJIeM H paclUHpHTeJIbHOH paMKOH, .2C pa.ll.HaTOpOM, C pa.ll.HaTOpOM, CMOHTHpOBaHHblM Ha neqaTHOH lUTaTe. ToprOBble MapKH .lI.aHHblX KopnycoB: 6 H 8 - «Piranha>} (Hewlett Packard Corp.); 2 H 4Barracuda>} (Lumileds Corp.) HJIH «Dragon>} (Osram Opto Semiconductors Corp.) (Arik et a!., 2002)
a-
I ::c:u::c:
.,~50KIBT KPHCTaJIJI' ,
200
I
::c:u::c:
meCTBa, B COCTaB KOTOPbIX qaCTO BXO.ll.HT
250
aI a
::c:u::c:
TeMrrepaTYP rrpHBO.ll.HT K HX rrQ)KeJITeHHIO, T. e. K rrOTepe rrp03paqHOcTH. Ha pHC.
I
I
a-
I
o
aI aI
I
;><:-00-:>-
I
aI ::c:
u
04
a
o
I
;><:-00-:>-
I
o
I
;><:-00-:>I
239
rJt. 11. Kopnyca aJtfl c8emOaUOa08 AtaJtOU u 60JtbUlOU MOUl,Hocmu
240
rpyrrrra -CSH4-0H rrOJIyqaeTC5I 113 cpeHI1JIbHOH -CSH5 y)1.aJIeHl1eM O)1.HOrO
11.4. YJtyttUleHHbie cmpy/CmYPbl /Copnyco8 c8emOaUOa08
241
MeTI1JIMeTaKpl1JIaT PMMA TaK)Ke 113BeCTeH rro)1. Ha3BaHI1HMI1 aKpl1JIOBOe
aTOMa BO)1.0pO)1.a 11 ero 3aMeHOH Ha rl1)1.pOKCI1JIbHYIO rpyrrrry -OH.
CTeKJIO I1JII1 rrJIeKCl1rJIaC. OH 06JIa)1.aeT CpaBHI1TeJIbHO HI13KI1M rrOKa3aTe-
Ha5I rpyrrrra rrOJIyqaeTC5I 113 6eH30JI·a -
XOPOIIIO 113BeCTHoro IIIeCTl1aTOMHOro ymepO)1.HOrO KOJIbIl,a CsHs y)1.aJIeHl1eM O)1.HOrO aTOMa BO)1.0pO)1.a. B rrpouec -
JIeM rrpeJIOMJIeHI1H (1,49 B )1.l1arra30He )1.JII1H BOJIH 500-650 HM). I103TOMY
ce peaKUl111 rrOJII1Mepl13aUl111 rrpl1 rroBblIIIeHHoH TeMrrepaType 3rrOKCI1)1.Hble
Ha OCHOBe rrOJIyrrpOBO)1.HI1KOBbIX MaTepl1aJIOB C BbICOKI1MI1 rrOKa3aTeJIHMI1
rpyrrrrbI 06be)1.I1H5IIOTC5I C rH)1.POKCI1JIbHbIMI1 rpyrrrraMI1 CMOJIbI.
rrpeJIOMJIeHI15I, rrOJIYQeHHble CTpyKTYPbI I1MelOT OrpaHI1QeHI1H rro BeJII1QI1He
TI111l1qHble 3rrOKCI1)1.Hble CMOJIbI, rrpl1MeHHeMble )1.JIH 113rOTOBJIeHI1H KOPrrycoB
CBeTO)1.110)1.0B,
rrpl1 I1CrrOJIb30BaHI111 PMMA-KoprrycoB )1.JIH CBeTO)1.110)1.0B, BbIIIOJIHeHHblX
OrrTI1QeCKOrO BbIBO)1.a.
HBJIHIOTCH TepMl1qeCKI1 06pa6aTbIBaeMbIMI1 )1.ByXCO-
CTaBHbIMI1 )K11)1.KOCTHbIMI1 CI1CTeMaMI1, COCTOHIII.I1MI1 113 BeIII.eCTBa Ha OCHOBe 6I1c-cpeHOJIa-A
11.4.
I1JII1 UI1KJIl1qeCKOH aJIl1cpaTl1qeCKOH 3rrOKCI1)1.HOH CMOJIbI
YJIyqmeHHhle CTpyKTyphI KopnycoB CBeTO,lJ;HO,lJ;OB
11 aHrH)1.pl1)1.a (Kumar et aI., 2001). 9rrOKCI1)1.HaH CMOJIa rrpl1 CPOPMl1pOBaHl111 rrO)1.BepraeTcH KpaTKoBpeMeHHoH B~coKoTeMrrepaTypHoH 06pa60TKe
B pa60Te JII1 11 )1.p. (Lee et aI., 2004) Orrl1CaHbI ICopnyca c8emOaUOa08
120°C) . .LI:ByxcoCTaBHble CI1CTeMbI )1.0JI)KHbI 6bITb cTexl10MeTpl1qe-
C zpaaueHmHblM U3MeHeHueM nOICa3ameJlfl npeJlOMJleHUfl, COCTOHIII.l1e 113
CKI1MI1 CMeCHMI1. KOMrr0311Ul111 C 60JIbIIII1M CO)1.ep)KaHl1eM CMOJIbI 06JIa)1.a1OT
HeCKOJIbKI1X CJIOeB MaTepl1aJIOB C pa3HbIMI1 rrOKa3aTeJIHMI1 rrpeJIOMJIeHI1H.
(rrpl1
60JIee HI13KI1MI1 TeMrrepaTypaMI1 rrOJII1MepI13aUI1I1, a rrOBblIIIeHl1e cO)1.ep)Ka-
CJIOH C Hal160JIbIIII1M rrOKa3aTeJIeM HaXO)1.I1TCH B HerrOCpe)1.CTBeHHOM KOH-
HI1H OTBep)1.I1TeJIH B CMeCI1 MO)KeT rrpl1BeCTI1 K 113MeHeHI11O UBeTa KOp-
TaKTe C rrOJIyrrpOBO)1.HI1KOBbIM KpI1CTaJIJIOM. BHeIIIHl1e CJIOI1 Koprryca 06-
rrycoB CBeTO)1.110)1.0B. I1oKa3aTeJIb rrpeJIOMJIeHI1H 3rrOKCI1)1.HbIX CMOJI 6JII130K
JIa)1.alOT MeHbIIII1MI1 rrOKa3aTeJIHMI1. Koprryca C rpa)1.l1eHTHbIM 113MeHeHI1eM
K 1,6. K )1.0CT0I1HCTBaM 3rrOKCI1)1.HbIX CMOJI, KpoMe rrp03paqHOCTI1, MO)KHO
rrOKa3aTeJIH rrpeJIOMJIeHI1H 06eCrreQl1BalOT 60JIee BbICOKl1e K03CPCPI1Ul1e~nbI
OTHeCTI1 I1X XOpOIIIl1e· MeXaHl1qeCKl1e CBOHCTBa 11 BbICOKYIO TeMrrepaTYP-
OrrTI1QeCKOrO BbIBO)1.a 113JIYQeHI1H, QeM C Koprryca C rrOCTOHHHbIM rrOKa3aTe-
HylO cTa6I1JIbHOCTb. O)1.HaKO )1.JII1TeJIbHaH TerrJIOBaH 06pa60TKa 3rrOKCI1)1.HbIX
JIeM rrpeJIOMJIeHI1H.
CMOJI rrpl1 TeMrrepaTypax BblIIIe 120°C rrpI1BO)1.I1T K I1X 06eCUBeql1BaHI11O
I1Hor)1.a B COCTaB MaTepl1aJIOB )1.JIH 113rOTOBJIeHI1H KoprrycoB CBeTO)1.110)1.0B
11 rroTepe rrp03paqHOcTI1. B pa60Tax KYMapa 11 )1.p. (Kumar et aI., 2001),
BBO)1.HT crreUl1aJIbHble MUHepaJlbHble a06a8ICu, 3aCTaBJIHIOIII.l1e CBeT oTpa-
[opql1Ka (Gorczyk, 2001) 11
)KaTbCH, rrpeJIOMJIHTbCH 11 paCCeI1BaTbCH, QTO )1.eJIaeT )1.l1arpaMMY HarrpaB-
CMOJIbI, rrOJIyqeHHble He TOJIbKO MeTO)1.0M TepMo06pa60TKI1, HO 11 06pa60T-
JIeHHOCTI1 113JIYQeHI1H KpyroBoH 11 1130TporrHoH. B
KOH CBl.! 11 Y. C HaqaJIa 2000 rr. )1.JIH YJIYQIIIeHI1H TepMOCTa611JIbHOCTI1 KoprrycoB CBe-
113JIYQalOIII.l1x YCTpoHCTBax (Harrpl1Mep B MHOrOKpl1CTaJIbHbIX CBeTO)1.110)1.aX
MHorOUBeTHbIX CBeTO-
6eJIoro CBeQeHI1H) TaKl1e )1.06aBKI1 rr03BOJIHIOT rrOJIYQaTb paBHoMepHoe pac-
TO)1.110)1.0B BMeCTO 3rrOKCI1)1.HbIX CMOJI CTaJII1 rrpl1MeHHTb ICpeMHuu-opzaHu-
rrpe)1.eJIeHl1e UBeTa. B KaQeCTBe MI1HepaJIbHbIX )1.06aBOK, KaK rrpaBI1JIO, I1C-
tteClCue coeaUHeHufl (CUltuICOHbl) , KOTopble coxpaHHIOT CBOI1 xapaKTepl1-
rrOJIb3YlOTCH OIITI1QeCKI1 rrp03paQH~e BeIII.eCTBa -
CTI1KI1 )1.0 TeMrrepaTYP
rv
190°C, QTO 3HaQl1TeJIbHO rrpeBblIIIaeT pa60Ql1H
TeMrrepaTypHbIH )1.l1arra30H CMOJI (Crivello, 2004). KpoMe TOro, CI1JII1KOH-
Ti02, CaF 2 , Si02, CaC03 11 BaS04, rrOKa3aTeJII1 rrpeJIOMJIeHI1H KOTOPbIX OTJII1QalOTCH OT rrOKa3aTeJIH MaTepl1aJIa Koprryca (Reeh et aI., 2003). B
yrrpYrHH MaTepl1aJI (OH coxpaHHeT 3TO CBOHCTBO Ha rrpOTH)KeHI1I1 HeCKOJIbKI1X )1.eCHTI1JIeTI1H), QTO rr03BOJIHeT CHI1)KaTb MeXaHI1QecKYIO HarpY3KY Ha rrOJIyrrpOBO)1.HI1KOBbIH KpI1CTaJIJI. CUJlUICOH HBJIHeTCH rrOJII1MepOM, OCHOBHaH cTpyKTypa KOToporo rrOKa3aHa Ha
PI1C.
11.8,
a.
KaK BI1)1.HO,
B COCTaB
pa60Te (Lester et aI.,
1998) rrpe)1.JIO)KeHO BBO)1.I1Tb B MaTepl1aJIbI
)1.JIH KoprrycoB CBeTO)1.110)1.0B HaHOttaCmutfbl, I1MelOIII.l1e BbICOKI1H rrOKa3aTeJIb rrpeJIOMJIeHI1H,
Harrpl1Mep
OKCI1)1.0B MarHl15I,
TI1TaHa,
I1TTpI1H,
UI1PKOHI1H,
aJIIOMI1HI1H, GaN, AIN, ZnO, ZnSe. HaHOQaCTI1UbI, BCTpoeHHble B I1CXO)1.-
CI1JII1KOHa BXO)1.HT aTOMbI KpeMHI1H 11 KI1CJIopO)1.a, rr03TOMY OH rro CBOI1M
HbIH MaTepl1aJI (KaK rrpaBI1JIO, rrOJII1Mep), He BbI3~BaIOT paCCeHHI1H CBeTa,
CBOHCTBaM ropa3)1.0 6JII1)Ke K Si02, QeM 3rrOKCI1)1.Hble CMOJIbI. 9TO 03HaQaeT,
eCJII1 OHI1 pacrrpe)1.eJIeHbI paBHOMepHO 11 I1X pa3Mep HaMHoro MeHbIIIe )1.JII1HbI
QTO CI1JII1KOHOBble Koprryca CBeTO)1.110)1.0B 06JIa)1.a1OT JIyQIII~H XI1MI1QeCKOH
BOJIHbI 113JIYQeHHH. I1oKa3aTeJIb rrpeJIOMJIeHI1H MaTepl1aJIa C BBe)1.eHHbIMI1
11 TeMrrepaTypHoH cTa6I1JIbHOCTblO, QeM Koprryca 113 3rrOKCI1)1.HbIX CMOJI,
HaHOQaCTl1uaMI1 orrpe)1.eJIHeTCH CJIe)1.YIOIII.I1M Bblpa)KeHl1eM:
11 rOpa3)1.0 pe)Ke TepHIOT CBOIO rrp03paQHOCTb. B03MO)KHO, 6bIJIO 6~ HerrJIOXO
-
n=
113rOTaBJII1BaTb Koprryca CBeTO)1.110)1.0B 113 MaTepl1aJIOB Tl1rra Si02, 06JIa)1.alO-
nhos! . Vitos!
+ nn.no • Vn•no + Yo.no '
~~~~~~----~
Vitos!
(1Ll)
III.I1X TaKI1MI1 )Ke BbICOKI1MI1 rrp03paQHOCTblO 11 CTa611JIbHOCTblO (XI1MI1QeCKOH 11 TeMrrepaTYPHoH) (Crivello, 2004). O)1.HaKO CJIe)1.yeT rrOMHI1Tb, QTO S i02
r)1.e Vhost
He I1MeeT TOH yrrpyroCTI1, KOTOPYIO MO)KeT rrpe)1.JIO)KI1Tb CI1JII1KOH.
60JIbIIIOH KOHUeHTpaUHI1 HaHOQaCTI1U rrOKa3aTeJIb rrpeJIOMJIeHI15I MaTepl1aJIa
[JOJlUMemUJlMemaICpUJlam
(PMMA)
rrOKa eIII.e )1.0BOJIbHO pe)1.KO I1CrrOJIb-
co
11 V nano -
BCTpOeHH~MI1
06beMbI I1CXO)1.HOrO MaTepl1aJIa 11 HaHOQaCTI1U. I1pH
HaHOQaCTl1uaMI1
MO)KeT HaMHOrO
ripeBblIIIaTb
rrOKa3a-
3yeTcH )1.JIH 113rOTOBJIeHI1H KoprrycoB CBeTO)1.110)1.0B. Ha Pl1c. 11.8, e rrOKa3aHa
TeJIb I1CXO)1.HOrO MaTepl1aJIa, QTO YBeJII1QI1BaeT BbIXO)1.HOH KOHYC 113JIYQeHI1H
XI1MI1QeCKaH cTpyKTypa 3JIeMeHTapHoH HQeHKI1 MeTI1JIMeTaKpI1JIaTa. I10JII1-
CBeTO)1.110)1.a 11 rrOBblIIIaeT ero K03CPCPl1UI1eHT OrrTI1QeCKOrO B~BO)1.a.
242
TA. 11. Kopnyca iJAR c8emoiJuoiJo8 MaAOU U 60AblUOU M014Hocmu BH6JIHOrpacpHQeCKHH CDHCOK
Arik M., Petroski J., and Weaver S. "Thermal challenges in the future generation solid state lighting applications: light emitting diodes" Eighth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.02CH37258) May 30-June 1 2002, p. 113 (IEEE, Piscataway NJ, 2002). Barton D. L., Osinski M., Perlin P., Helms C. J., and Berg N. H. "Life tests and failure mechanisms of GaN/AlGaN/InGaN light-emitting diodes" Proc. SPIE 3279, 17 (1998). Cho J., Samsung Advanced Institute of Technology, Suwon, Korea, qaCTHoe coo6meHHe (2005). . Crivello J. V., Rensselaer Polytechnic Institute, qaCTHOe coo6meHHe (2004). Flick E. W. Epoxy Resins, Curing Agents, Compounds, and Modifiers: An Industrial Guide (Noyes Data Corporation/Noyes Publications, Park Ridge NJ, 1993). Gorczyk J., Bogdal D., Pielichowski J., and Penczek P. "Synthesis of high molecular weight epoxy resins under microwave irradiation" Fifth International Electronic Conference on Synthetic Organic Chemistry (ECSOC-5), http://www.mdpLorg/ecsoc-5.htm.lt30 (September 2001). Krames M. R., Steigerwald D. A., Kish Jr. F. A., Rajkomar P., Wierer Jr. J. J., and Tan T. S. "III-nitride light-emitting device with increased light generating capability" US Patent 6,486,499 Bl (2002). Krames M. R. "Overview of current status and recent progress of LED technology" US Department of Energy Workshop "Solid State Lighting - Illuminating the Challenges" Crystal City, VA, Nov. 13-14,2003. Kumar R. N., Keem L. Y., Mang N. c., and Abubakar A. "Ultraviolet radiation curable epoxy resin encapsulant for light-emiting diodes" 4th International Conference on Mid-Infrared Optoelectronics Materials and Devices (MIOMD) (2001). LED Museum, http://ledmuseum.home.att.net/agilent.htm (2003). Lee B. K., Goh K. S., Chin Y. L., and Tan C. W. "Light emitting diode with gradient index layering" US Patent 6,717,362 Bl (2004). Lester S. D., Miller J. N., and Roitman D. B. "High refractive index package material and light emitting device encapsulated with such material" US Patent 5,777,433 (1998). Lumileds Corporation Luxeon reliability Application Brief AB25, 11 (2004). Reeh U., Hohn K., Stath N., Wait! G., Schlotter P., Schneider J., and Schmidt R. "Light-radiating semiconductor component with luminescence conversion element" US Patent 6,576,930 B2 (2003). Sheu J.-K. "Group III-V element-based LED having ESD protection capacity" US Patent 6,593,597 B2 (2003).
11.4. Bu6AuoepafjJU'leCKUU cnUCOK
243
Steigerwald D. A., Bhat J. C., Collins D., Fletcher R. M., Holcomb M.O., Ludowise M. J., Martin P. S., and Rudaz S. L. "Illumination with solid state lighting technology" IEEE 1. Sel. Top. Quantum Electron. 8, 310 (2002). Voldman S. H. ESD: Physics and Devices (John Wiley and Sons, New York, 2004). Wen T. c., Chang S. J., Lee C. T., Lai W. C., and Sheu J. K. "Nitride-based LEDs with modulation-doped AlGaN-GaN superlattice structures" IEEE Trans. Electron Dev. 51, 1743 (2004).
r !
12.1. CeemOaUOabl Ha OCHoee meepablX pacmeopo8 GaAsP, GaP, GaAsP:N 245 H C.D.BHraeT crreKTp H3JIyqeHHH B BH.D.HMyIO 06JIaCTb, KOTopaH HaqHHaeTCH rrpH6JIH3HTeJIbHO C 750 HM. n03TOMY .D.JIH rrOJIyqeHHH CBeTO.D.HO.D.OB BH.D.HMOrO crreKTpa .D.OCTaTOqHO He60JIbillOrO KOJIHqeCTBa <poc<popa. O.D.HaKO CJIe.D.yeT OTMeTHTb, 'ITO Ha KpaIO BH.D.HMOH qaCTH crreKTpa qeJIOBeqeCKHH
fJIaBa 12
rJIa3 06JIa.D.aeT .D.OBOJIbHO HH3KOH qYBCTBHTeJIbHOCTbIO. DOJIbiliOH rrp06JIeMOH CBeTO.D.HO.D.OB Ha OCHOBe GaAsP HBJIHeTCH pac-
CBETO,llHO,llhI BH,llHMOrO cnEKTPA
COrJIaCOBaHHe rrapaMeTpOB peilleTOK rrO.D.JIO)KeK GaAs H 3rrHTaKCHaJIbHbIX CJIOeB GaAsP. OHH pa3JIHqaIOTCH rrOqTH Ha 3,6
.,1'1·
I
%,
rr03TOMY rrpH TOJIIII.HHe
CJIOH GaAsP Ha rrO.D.JIO)KKe GaAs 60JIbille HeKoTopoH KpHTHqeCKOH 06pa3YIOTcH .D.HCJIOKaUHH HeCOOTBeTCTBHH. npH YBeJIHqeHHH KOHueHTpaUHH CHaqaJIa CBeTO.D.HO.D.bI rrpHMeHHJIH TaM, r.D.e He Tpe60BaJIOCb 60JIbiliOH
<poc<popa B TBep.D.OM pacTBope GaAsP 3
HPKOCTH CBeqeHHH, HarrpHMep B KaqeCTBe HH.D.HKaTOpHbIX JIaMrr. I1x HC-
3HaqHTeJIbHO CHH)KaeTCSI. n03TOMY CBeTO.D.HO.D.bI GaAsP HMeIOT HeBblcoKYIO
rrOJIb30BaJIH eCJIH 3
HPKOCTb CBeqeHHH.
HBJIHJIHCb rrapaMeTpaMH rrepBOOqepe.D.HOH Ba)KHOCTH. ,ll.JIH .D.pymx rrpHMeHeHHH, HarrpHMep B CBeTO<popax, H3JIyqeHHe CBeTO.D.HO.D.a .D.OJI)KHO 6bITb
npH
H3yqeHHH
TBep.D.blX
pacTBopoB
GaAsP
BbISICHHJIH,
'ITO
pacco-
rJIaCOBaHHe peilleTOK rrO.D.JIO)KeK GaAs H 3rrHTaKCHaJIbHbIX CJIOeB GaAsP
BH.D.HO C 60JIbillOrO paCCTOHHHH .D.a)Ke B HpKHH COJIHeqHbIH .D.eHb. B TaKHX
CHH)KaeT 3
CJIyqaHX Tpe6YIOTCH CBeTO.D.HO.D.bI, 06JIa.D.aIOIII.He BbICOKOH 3
H HPKOCTbIO. u B 3TOH rJIaBe 6Y.D.YT paCCMOTpeHbI CBeTO.D.HO.D.bI KaK C HH3KOH, TaK H C BblCOKOH HPKOCTbIO. TaM, r.D.e He Tpe6yeTcH BbICOKaH HPKOCTb, MoryT rrpHMeHHTbCH CBeTO.D.HO.D.bI Ha OCHOBe GaAsP H GaAsP:N, JIerHpOBaHHble a30TOM .. CBeTO.D.HO.D.bI Ha OCHOBe AlGaAs HCrrOJIb3YIOT B Tex CJIyqaHX, KOr.D.a He06xo.D.HMa KaK HH3KaH, TaK H BbICOKaH HpKOCTb. B YCTpOHCTBax rrOBbIIlIeHHOH HPKOCTH rrpHMeHHIOTCH CBeTO.D.HO.D.bI Ha OCHOBe AlInGaP H laGaN.
BblpaIII.HBaHHSI H oc06eHHO OT TOJIIII.HHbI 6y
12.1 rrOKa3aHbI 30HHble .D.HarpaMMbI GaAs, GaAsP H GaP.
BH.D.HO, 'ITO GaAsP rrpH HH3KOH MOJISIPHOH .D.OJIe <poc<popa HBJISIeTCSI rrpSIM030HHbIM rrOJIyrrpOBO.D.HHKOM. Kor.D.a .D.OJISI <poc<popa rrpeBbIIlIaeT 45-50
12.1. CBeTo,n:Ho,n:bI Ha OCHOBe TBep,n:bIx pacTBopoB GaAsP, GaP, GaAsP:N H GaP:N
rra.D.eHHIO BHeiliHero KBaHTOBoro BbIX0.D.a (Holonyak et al., 1963, 1966).
TBep.D.b1e paCTBopbI GaAs1-xP x , GaAs1-xPx:N HCrrOJIb3YIOT B YCTPOHCTBax, H3JIyqaIOIII.HX B KpacHoH, OpaH)KeBOH, )KeJITOH H 3eJIeHOH 06JIaCTHX BH.D.HMOrO crreKTpa. nOCKOJIbKY CJIOH GaAsP H rrO.D.JIO)KKH H3 GaAs HMeIOT pa3Hble rrapaMeTpbI KpHCTaJIJIJIHqeCKHX peilleTOK, CBeTO.D.HO.D.bI Ha HX OCHOBe 06JIa.D.aIOT cpaBHHTeJIbHO HH3KHM BHyTpeHHHM KBaHTOBblM BbIXO.D.OM H3JIyqeHHH. OHH rrpHMeHHIOTCH TOJIbKO TaM, r.D.e He Tpe6yeTcH BbICOKaH HPKOCTb CBeqeHHH. O.D.HH
H3
rrepBbIX
CBeTO.D.HO.D.OB
BH.D.HMOrO
Ha OCHOBe TBep.D.OrO paCTBopa GaAs1-xP x Holonyak et al.,
1963,
crreKTpa
6bIJIH
C03.D.aHbI
(Holonyak, Bevacqua,
1966; Pilkuhn, Rupprecht,
%,
rrOJIyrrpOBO.D.HHK CTaHOBHTCH HerrpSIM030HHbIM, 'ITO rrpHBO.D.HT K pe3KOMY
1962;
1965; Nuese et al.,
1966; Wolfe et al., 1965). B HaqaJIe 1960 rr. rrO.D.JIO)KKH H3 GaAs Y)Ke BbIIIYCKaJIHCb cepHHHo. TeXHOJIOmH 06beMHoro BblpaIII.HBaHHH rrO.D.JIO)KeK H3 GaAs rrOHBHJIaCb B 1950 rr., a B 1960 rr. 6bIJIH pa3pa6OTaHbI MeTO.D.bI 3rrHTaKCHaJIbHOrO pOCTa CJIOeB H3 ra30BOH H )KH.D.KOH <pa3bI. npH BBe.D.eHHH <poc<popa B GaAs rrOJIyqHJIH TPOHHOH TBep.D.bIH pacTBop GaAs1-xP x , HJIH
HerrpHM030HHblH rrOJIyrrpOBO.D.HHK GaP MaJIO rrpHrO.D.eH .D.JISI HCrrOJIb30BaHHSI B KaqeCTBe 3
1).
TaKHe rrpHMeCH
30HbI rrOJIyrrpOBO.D.HHKa OrrTHqeCKH aKTHBHble ypOBHH,
H peKoM6HHaUHSI
HOCHTeJIeH qepe3 3TH ypOBHH rrpOHCXO.D.HT C HcrrYCKaHHeM
CHJIbHO
JIOKaJIH30BaHbI B
JIOH Heorrpe:n.eJIeHHOCTbIO KOOp.D.HHaTbI
KpaTKo GaAsP. GaAs H3JIyqaeT B HH
1964; Logan et al.,
1967a, 1967b, 1971; Craford et al., 1972; Groves, Epstein, 1977; Groves
1) eM.
TaK)I{e pa60TbI
[1-7].
rrpOCTpaHCTBe,
D..x.
T. e.
06JIa.D.aIOT Ma-
CJIe.D.OBaTeJIbHO, 3TH BOJIHO-
r 246 a-
TA. 12. rrpllMo30HHhlii
6-
GaAs
12.1. GBemoaUOabt Ita OCltOBe mBepabtX pacmBopOB GaAsP, GaP, GaAsP:N 247
GBemoaUOabt BUaUM020 cneKmpa 6-
rrepeCeqeHHe 30H,
HerrpllM030HHhlii
2,3
GaP
_--r---r----.--T"""""-""T"""-~/..---.--___r-___.
GaAsO,50P0,50
I
• GaAsl-xPx @) GaAsl-xPx:N T = 300K ~~~~~~H~-------L----
~~~e~*H~-------L---1I30Ta
I I.
1I30Ta
12.l.
I
I
I
x
~
0,45-0,50 rrpOHCXOJJ.HT
I
rrpeo6pa30BaHHe 30HHOH CTpyKTYPbl
GaAsP: OH CTaHOBHTClI HerrpllM030HHblM rrOJIyrrpoBoJJ.HHKOM. rCB rrpOBOJJ.HMOCTH B TOqKe r 30HbI OPHJIJII09Ha, XCB B TOqKe X 30HbI OPHJIJII09Ha, rVB -
I
JIernpOBlIHHbIH a3OTOM
CXeMaTHqeCKOe H306pa}l{eHHe 30HHbIX CTpyKTyp GaAs, GaAsP H GaP.
Ha cxeMe TaK}I{e rrOKa3aH ypOBeHb H309JIeKTpOHHOH rrpHMeCH a30Ta. ITPH MOJIlIPHOH JJ.OJIe <j>oc<j>opa
I
hv
hv
PHC.
Er--yl
MHHHMyM 30HbI
MHHHMyM 30HbI rrpOBOJJ.HMOCTH
MaKCHMYM BaJIeHTHOH 30HbI B TOqKe r
30HbI
OPHJIJII09Ha MOIDIpHaH AOM cjloccjlopa
x, %
Bble
12.2.
HeOnpe,l(eJIeHHOCTb ~p). nOCKOJIbKY 3HepreTH'leCKRe ypOBHR npRMeceH 06-
PHC.
JIa,l(aIOT HeOnpe,l(eJIeHHOCTbIO, cymecTByeT 60JIbIIIaH BepoHTHoCTb Toro, 'ITO
HeJIerHpOBaHHoro GaAs1_",P", H GaAsl_",P"" JIerHpOBaHHoro a30TOM, rrpH rrJIOTHO2 CTH TOKa HH}I{eKUHH 5 A/CM H KOMHaTHOH TeMrrepaType. IToKa3aHbI TaK}I{e 3HaQe-
O,l(RH R3 ,l(ByX BepTRKaJIbHbIX nepeXO,l(OB qepe3 npRMeCHOH qeHTp HBJIHeTCH R3JIyqaTeJIbHbIM.
C
3aBHcHMoCTb MaKCHMYMa 9HeprHH H3JIYQeHHlI OT XHMHQeCKOrO COCTaBa
HHlI lIlHpHHbI 3arrpelIleHHoH 30HbI JJ.JIlI rrpllMbIX H HerrpllMblX Me}l{30HHblX rrepexoJJ.oB. ITpH
x
~
50 % rrOJIyrrpOBOJJ.HHK
HenpHMOM Me)K30HHOM nepeXO,l(e 3JIeKTpOHa R3 X-,l(OJIRHbI 30HbI npOBO,l(R-
H3 rrpllM030HHoro rrpeBpalIlaeTClI B HerrpllMo30HHblH (Craford et aI.,
1972)
MOCTR B qeHTpaJIbHYIO r-,l(OJIRHY BaJIeHTHOH 30HbI npORCXO,l(RT R3MeHeHRe KBa3RRMnyJIbCa, nepe,l(aBaeMoro aTOMY R303JIeKTpOHHOH npRMeCR. Ha pRC. 12.2 nOKa3aHa 3aBRCRMOCTb MaKCRMYMa 3HeprHR R3JIyqeHRH
TOJIbKO aKTRBHaH 06J1aCTb, BHeIIIHRH KBaHToBbIH BbIXO,l( R3JIyqeHm:i MO)KeT ,l(OCTRraTb HeCKOJIbKRX npoqeHToB.
OT XRMRqeCKOrO COCTaBa HeJIerRpOBaHHoro GaAsl-xP x R GaAsl-xP x , JIerRpOBaHHoro a30TOM (Craford et aI., 1972). BR,l(HO, 'ITO 3HeprH~ R3-
R3JIyqeHRH HeJIerRpOBaHHblx CBeTO,l(RO,l(OB Ha OCHOBe GaAsP R C,L{ C aK-
JIyqeHRH JIerHpOBaHHoro R HeJIerHpOBaHHoro GaAsP BCer,l(a HR)Ke 3Haqe-
TRBHOH 06J1aCTbIO, JIerRpOBaHHoH a30TOM, OT MOJlHPHOH ,l(OJIR <poc<popa
HRH IIIRpRHbI 3anpemeHHoH 30HbI nOJIynpOBO,l(HRKa (npR6JIR3HTeJIbHO Ha
B TpexKoMnoHeHTHoM TBep,l(OM paCTBope (Campbell,
50-150 M3B). B pe3YJIbTaTe 3Toro B cTpyKTypax, JIerRpOBaHHblx a30TOM,
3
nepenOrJIOmeHRe R3JIyqeHRH RrpaeT rOpa3,l(0 MeHbIIIYIO POJIb, qeM B CBeTO-
pOBaHHbIX, BO BceM ,l(Rana30He R3MeHeHRH XRMRqeCKOrO COCTaBa.
,l(RO,l(aX, B KOTOPbIX ,l(eHcTByeT Me)K30HHaH R3JIyqaTeJIbHaH peKoM6RHaqRR.
Ha pRC. 12.3 nOKa3aHbl 3aBRCRMOCTR BHeIIIHero KBaHTOBoro BblXO,l(a
TaK)Ke
OTMeTRM,
'ITO
%
npR R3MeHeHRR
1974). BR,l(HO, 'ITO
MOJlHPHOH ,l(OJIR <poc<popa
x
B 9TOM R 3aKJIIOqaeTCH OCHOBHoe ,l(OCTORHCTBO CBeTO,l(RO,l(OB, JlerRpOBaH7
B ,l(Rana30He 40:"'60
HblX R303J1eKTpOHHbIMR npRMecHMR.
CHR)KaeTCH 60Jlee qeM Ha ,l(Ba nOpH,l(Ka. 3TO 06bHcHHeTcH R3MeHeHReM
B
pa60Tax (Groves et aI.,
1978a,
1978b) 6bIJlO nOKa3aHO, 'ITO 3TO
3
TRna Me)K30HHbIX nepeXO,l(OB B nOJlynpOBO,l(HRKe (c npHMblx Ha HenpHMble)
npeRMymecTBo CBeTO,l(RO,l(OB CTaHOBRTCH HBHbIM, eCJlR a30TOM JlerHpyeTcH
R TeM, 'ITO npR BbICOKOM CO,l(ep)KaHRR <poc<popa YBeJlRqRBaeTCH nJlOTHOCTb
TOJlbKO aKTRBHaH 06J1aCTb. B
,l(RCJIOKaqRH. npR
caM
p-n-nepexo,l(
3TOM cJlyqae JlerRpOBaHRIO nO,l(BepraeTCH
R npRJleraIOmRe K HeMY 06J1aCTR Ha paCCTOHHRR ,l(R
x
i=::j
0,75 BHeIIIHRH KBaHToBbIH BbIXO,l( R3J1yqeHRH CBeTO-
,l(RO,l(OB Ha OCHOBe GaAsP COCTaBJIHeT JlRIIIb 0,002
%.
6apbepHble CJlOR R
Ha pRC. 12.4 npe,l(CTaBJleHbI 3aBRCRMOCTR BHeIIIHero KBaHTOBoro BbIXO-
CJlOR paCTeKaHRH TOKa a30TOM He JlerHpYIOTCH. n03TOMY nepenOrJlOmeHRe
,l(a R3J1yqeHRH CBeTO,l(RO,l(OB Ha OCHOBe GaAsP, HeJlerRpOBaHHblx R JlerRpO-
CBeTa R303J1eKTpOHHbIMR npRMeCHMR OrpaHRqeHO Y3KOH 30HOH aKTRBHoro
BaHHblX a30TOM B aKTRBHOH 06J1aCTR, OT ,l(JlRHbI BOJlHbI R3J1yqeHRH. BR,l(HO,
CJlOH. ,L{JlH CBeTO,l(RO,l(OB Ha OCHOBe GaP:N, B KOTOPbIX a30TOM JlerRpOBaHa
'ITO 3
Fit. 12.
248
12.1. CBemOaUOabl Ha OCHOBe mBepablX pacmBopoB GaAsP, GaP, GaAsP:N 249
CBemOaUOabl BUaUM020 cneKmpa
1,0~--,----.---,----.----.---.--~
GaAsl-xPx T=300K •
He JIeIllpOBaHHble a30T0M
@II JIeIllpOBaHHble a30T0M
\ \
• GaAsl-xPx @ GaAsl-xPx:N T = 300K
'lSi
I
ill
\
-.. - -. ....
0,001 L..---'-_'----'-_-'---'-_..L---'-_..1----l.---I o 20 40 60 80 100 MOlIJ'1lHruI .n;OlIJl
o
lPoclPopa x, %
0,001 690
PlfC. 12.3. 9KcrreplfMeHTaJIbHbie 3aBlfClfMOCTIf BHelilHero KBaHTOBoro Bblxo.n:a H3JIYqeHHH CBeTo.n:Ho.n:OB Ha OCHOBe GaAsP, He JIerHpOBaHHblX H JIerHpOBaHHblX a30TOM,
650
630
610 A.,
590
570
550
HM
H rrepexo.n:oB
(crrJIOIlIHble JIHHHH). OTMeTHM, qTO BO BceM .n:Harra30He
PHC. 12.4. 3aBHcHMoCTH BHelliHero KBaHTOBoro Bblxo.n:a H3JIyqeHHH CBeTo.n:lfo.n:OB
9<j><j>eKTHBHoCTb rrepexo.n:OB qepe3 OrrTHqeCKH aKTHBHble rrpHMeCHble ypOBHH
Ha OCHOBe GaAsP, He JIerHpOBaHHblX H JIerHpOBaHHblX a30TOM, OT .n:JIHHbl BOJIHbl
qepe3 ypOBHH a30ra
x > 50
(r)
670
,Z:{JrnHa BOJIHhI
B aKTlfBHOH 06JIaCTIf, OT MOJIHPHOH .n:OJIIf <j>oc<j>opa. 3.n:ecb TaK)Ke rrOKa3aHbl paCqeTHble .n:aHHble rro 9<j><j>eKTHBHOCTH rrpHMblx Me)K30HHbIX rrepexo.n:OB
lIIDKeBhIii:
KpaCHbrii ----l~.......:'----f-"--I--_---L'---t_f L..----'-__--'-__---'____..L-__--'-__---L__- . l
(N)
BblIlIe, qeM Y Me)K30HHbIX rrepexo.n:OB (Campbell et al., 1974)
.
H3JIYQeHHH (Groves et al., 1978a, 1978b)
HeJIempOBaHHbIX oc06eHHo B ,n:Harra30He ,n:JIHH BOJIH, cooTBeTcTBYIOmeM OpaH:)KeBOH, 2KeJITOH H 3eJIeHOH 06JIaCTHM crreKTpa (B 9TH X ,n:Harra30Hax Ha6JIIO,n:aeTCSI YBeJIHqeHHe 9cpcpeKTHBHOCTH B
2-5
GaAsl_~x:N
pa3). B KpacHoi1 06JIaCTH
9cpcpeKTHBHoCTH 060HX THrrOB CBeTo,n:Ho,n:OB rrpaKTHqeCKH COBrra,n:aIOT. Ha pHC.
12.5
HGaAsl_~x
cpaBHHBaIOTcSI BHeIIIHHe KBaHTOBble BbIXO,n:bI H3JIyqeHHSI
T=300K
CBeTo,n:Ho,n:OB GaAsP HeJIempOBaHHblX H JIempOBaHHblx a30TOM. CpaBHeHHe rro,n:TBep2K,n:aeT, qTO 9cpcpeKTHBHoCTb JIempOBaHHblx CBeTo,n:Ho,n:OB BbIIIIe, qeM HeJIempOBaHHbIX, BO BceM ,n:Harra30He H3MeHeHHH MOJISIPHOi1 ,n:OJIH cpoccpopa. BeJIHqHHa
SlPKOCTH
CBeTo,n:Ho,n:OB,
JIempOBaHHblx
H309JIeKTpOHHbiMH
rrpHMecSlMH THrra a30Ta, OrpaHHqeHa K01le tilWU pacm80pU~toCmblO 9TH X rrpHMecei1. HarrpHMep, a30T paCTBopHM B GaP ,n:o KOHu.eHTpau.HH rropSl,n:Ka 1020 CM- 3 . nOCKOJIbKY OIITHqeCKHe rrepexo,n:bI qepe3 rrpHMecHble ypOBHH rrpoTeKaIOT 3a KopoTKoe, HO Bce 2Ke KOHeqHOe BpeMSI, rrpe,n:eJIbHbIH ypoBeHb KOHu.eHTpau.HH a30Ta orrpe,n:eJISIeT BeJIHqHHY MaKCHMaJIbHOrO pa60qero TOKa, BblIIIe KOTOPOH 9cpcpeKTHBHoCTb CBeTo,n:Ho,n:OB rra,n:aeT.
~~0--~4~0---5LO---6LO---7LO---8LO--~9LO--~100 MOJIJIPHIDI .n;OlIJl
npOMbIIIIJIeHHO BbIIIycKaeMble CBeTo,n:Ho,n:bI 3eJIeHOrO CBelleHHSI C03,n:aIOT
lPoclPopa x, %
Ha OCHOBe GaP, JIempOBaHHoro a30TOM. CBeTo,n:Ho,n:bI Ha OCHOBe GaP:N
PHC. 12.5. OTHoIlIeHHe BHeIlIHHX KBaHTOBblX BbIXO.n:OB H3JIYQeHHH CBeTo.n:lfo.n:OB H3
HCrrOJIb3YIOT, B OCHOBHOM, B KalleCTBe HH,n:HKaTopHbIX JIaMrr; HX HeJIb3S1
GaAsP, He JIerHpOBaHHblX H JIerHpOBaHHblX a30TOM, BO BceM .n:Harra30He H3MeHeHHH
BCTpaHBaTb B CHCTeMbI C BbICOKHMH Tpe60BaHHSlMH K SlPKOCTH CBelleHHSI H rrpHMeHSlTb HX ,n:JISI pa60TbI B YCJIOBHSlX SlpKoro BHeIIIHero OCBemeHHSI,
MOJIHPHOH .n:OJIH <j>oc<j>opa rrpH 300
K
(Groves et al., 1978a, 1978b)
FA. 12. CBemoiJuoiJbt BUiJUMOeO cneKmpa
250
12.2. CBemoiJuoiJbt Ha oCHoBeAlGaAs/GaAs
HarrpHMep rrpH HPKOM COJIHeqHOM CBeTe. ,L{JIH TaKHX rrpHMeHeHHH HY)KHbI
251
Ha pHC. 12.7 rrpe.ll.CTaBJIeHa 3aBHCHMOCTb lIIHpHHbI 3arrpemeHHoH 30HbI
x-
CBeTO.ll.HO.ll.bI 3eJIeHOrO CBeqeHHH H3 IrrGaN, 06JIa.ll.aIOmHe BbICOKOH HPKO-
AlxGal_xAs OT
CTbIO.
BH.lI.HO, 'ITO GaAs H AlxGaI_xAs C MOJIHPHOH .lI.OJIeH
MOJIHPHOH .lI.OJIH aJIIOMHHHH (Casey, Panish,
1978).
x < 45 % HBJIHIOTCH
npflM0301UlblMU rrOJIyrrpOBO.ll.HHKaMH, r-.lI.OJIHHa 30HbI rrpOBO.ll.HMOCTH orrpe-
.lI.eJIHeT ee caMblU l£UJlCl£UU 3HepreTHqeCKHH ypOBeHb. npH x
12.2.
CBeToAHoAbI Ha OCHOBe
AIGaAs/GaAs
> 45 % rrOJIY-
rrpOBO.ll.HHK CTaHOBHTCH llenpflM0301l1lblM, H-MUllUMYM 30HbI rrpOBO.ll.HMOCTH onpe.ll.eJIHeT
X -.lI.OJIHHa.
reTepOCTPYKTYPbI AlxGal_xAs/GaAs 6bIJIH pa3pa60TaHbI B 1970-e rI., a B HaqaJIe 1980-e rr. Ha HX OCHOBe 6bIJIH peaJIH30BaHbI rrepBble CBeaJIIOMHHHH H raJIJIHH HMeIOT BeCbMa 6JIH3KHe aTOMHble pa.ll.HYCbI (1,82 H 1,81
A),
A
CHCTeMa AlxGal_xAs (HJIH rrpOCTO AIGaAs) OCTaeTCH coma-
COBaHHOH rro rrapaMeTpaM pelIIeTKH C rrO.ll.JIO)KKOH GaAs BO BceM .lI.Harra30He H3MeHeHHH MOJIHPHOH .lI.OJIH aJIIOMHHHH B TpeXKOMrrOHeHTHOM coCTaBe., Ha pHC. 12.6 rrOKa3aHbI 3HaqeHHH lIIHpHHbI 3arrpemeHHoH 30HbI H rrOCTOHHHblX pellieTOK HeKoTopbIX rroJIyrrpOBO.ll.HHKOB THrra AIlIBv H HX
Eg;r.hB = 1,708 + 0,642 x (O";x"; 1,0)
,; 2,4 §l 2,2
Eg;X /3B = 1,900 + 0,12~ x + 0,143~ (O";x"; 1,0)
i
~ 1,8
~
--eAIP '~r--L_--L_---L--,
GaP
,,
;ii il!
2,6
:li
8
~ 2,0
I!i:
:1
"'lbo
3aBHCHMOCTH Me)K.lI.Y rrOCTOHHHOH pelIIeTKH H MOJIHPHOH .lI.OJIeH aJIIOMHHHH (Tien, 1988).
~'i,I,
Ilil 2,8 -
Tpex- H qeTblpexKoMrroHeHTHblx TBep.u.b1x pacTBopoB. BH.lI.HO OTCYTcTBHe
2,4
2,0
,
I I
GaAs
0,6 0,7
"'lbo
= = =
1,6
0,8 ~ II 0,9.< 1,0 ~ :3 1,2 :
GaAs
0
InP
1! 1,2 "go '"'"
l:!
OJ
= ~ 0,8
a
1,5~ GaSb
AlAs
PHC. 12.7. 3aBHcHMoCTb lIIHpHHbI 3anpemeHHoH 30Hbl H ,nJIHHbI BOJIHbl H3JIYQeHHlI AlxGal-xAs OT MOJIlIPHOH ,nOJIH Al npH KOMHaTHOH TeMnepaType. E gf COOTBeTcTByeT nplIMoMy nepexo,ny, Eg H Egx - HenplIMblM nepexo,naM B L H X TOQKaX 30Hbl EPHJIJI\03Ha (Casey, Panish, 1978)
r,
AISb
0
,='"
1,0
0,80
: npJlMLle nepeXOJlhl I I - - - HenpJlMLle nepeXOJlhl
Ilil :li
Eg,r hB = 1,424 + 1,247 x (O";x"; 0.45) Eg,r hB = 1,424 + 1,247x + 1,147(x- 0,45) (0,45";x"; 1,0)
3,0 -"
TO.ll.HO.ll.bI, C BbICOKOH HPKOCTbIO CBeqeHHH (Steranka, 1997) I). nOCKOJIbKY
2,0
CHcTeMY AIGaAs MO)KHO HCrrOJIb30BaTb .lI.JIH H3rOTOBJIeHHH cBepxbHpKHX CBeTO.ll.HO.ll.OB KpacHoro CBeqeHHH. AIGaAs CTaHOBHTCH HerrpHM030HHbIM Ha .lI.JIHHaX BOJIH
>. < 621
HM. H3-3a 3Toro B TOqKe rrepeCeqeHHH 30H
KBaHTOBblH BbIX0.ll. H3JIyqeHHH 3aMeTHO rrOHH)KaeTCH. ,L{JIH nO.ll..lI.ep)KaHHH BbICOKOH 3cpcpeKTHBHoCTH CBeTO.ll.HO.ll.OB 3HeprHH H3JIyqeHHH B 3TOH TOqKe .lI.OJI)KHa 6bITb Ha HeCKOJIbKO
kT
MeHblIIe lIIHpHHbI 3arrpemeHHoH 30HbI.
Pa3pa6aTbIBaIOTcH 3cpcpeKTHBHble CBeTO.ll.HO.ll.b1 KpacHoro CBeqeHHH Ha
3,0 4,0 6,0 10 6,3
6,4
6,5
OCHOBe AIGaAs CJIe.ll.YIOmHX THrrOB: •
C o6beMHbIMH aKTHBHbIMH CJIOHMH,
•
C aKTHBHbIMH 06JIaCTHMH B BH.lI.e KBaHTOBbIX HM AlxGal_xAs/GaAs,
•
C
aKTHBHbIMH
06JIaCTHMH
B
AlxGal_xAs/AlyGal_yAs (x> PHC.
12.6.
3anpemeHHble 30HbI H 3HaqeHHlI nOCTOlIHHblX pelIIeToK HeKoTopblX noJIynpoBo,nHHKOB THna NIIBv npH KOMHaTHOH TeMnepaType (Tien, 1988)
BH.lI.e
.lI.BOHHbIX
reTepocTpYKTYP:
y).
06beMHble aKTHBHble CJIOH JIHlIIeHbI .lI.OCTOHHCTB reTepocTpYKTYP H He HCnOJIb3YIOTCH .lI.JIH H3rOTOBJIeHHH CBepXbHpKHX CBeTO.ll.HO.ll.OB. Ha pHC. 12.8 CXeMaTHqeCKH nOKa3aHbI 30HHble .lI.HarpaMMbI aKTHBHbIX 06JIaCTeH CBe-
I) CM. npHopHTeTHble pa60TbI )K. Ii. AJI(pepOBa KaUHH rpynnbl )K. Ii. AJI(pepOBa [10].
[8, 9]
H OpHfHHaJIbHble ny6JIH-
TO.ll.HO.ll.OB
KpacHoro
AlxGal-xAs/GaAs,
CBeqeHHH
Ha
HCrrOJIb3yeMoH
OCHOBe
AIGaAs:
.lI.JIH
YBeJIHqeHHH
C KBaHTOBOH HMOH 3HeprHH
H3JIyq
e-
252
FA. 12.
12.3. C8emOaUOabl Ita OCH08e AlInGaP/GaAs
C8emOaUOabl 8UaUMOeO cneKmpa
6
a
GaAs
(x>y)
PHC. 12.8. 30HHble .D:HarpaMMbI CTpyKTyp AIGaAs/GaAs, H3JIYQaIOIII.HX CBeT B KpacHOH cneKTpaJIbHOH o6JIacTH: a - cTpyKTypa AIGaAs/GaAs Ha OCHOBe KBaHToBoH HMbI, C03.D:aHHOH B BH.D:e TOHKoro CJIOH GaAs; 6 - .D:BOHHaH reTepepocTpYKTypa AIGaAs/AIGaAs C aKTHBHbIM CJIOeM AIGaAs
HHH (a) H C .n:BOHHOH reTepocTPYKTypOH AlxGal_xAs/ AlyGal_yAs (6), r.n:e AlGaAs HCrrOJIb3yeTcH .n:JIH rrOCTpoeHHH H 6apbepHblx CJIOeB H KBaHTOBOH HMbI. He.n:oCTaTKoM aKTHBHblX 06JIaCTeH rrepBoro THrra HBJIeeTCH MaJIaH TOJIIIJ.HHa CJIOeB GaAs, OrpaHHqeHHblX 6apbepaMH AlxGal-xAs. BepTHKaJIbHblH rrepeHoc B CTpYKTypax C MHO)!{eCTBeHHblMH KBaHTOBblMH HMaMH (MK5I) MO)!{eT rrpHBo.n:HTb K HepaBHoMepHoMY pacrrpe.n:eJIeHHIO HOCHTeJIeH B aKTHBHOH 06JIaCTH C MK5I, eCJIH TOJIbKO 6apbepbl He CJIHllIKOM TOHKHe. n09TOMY .n:JIH C03.n:aHHH HpKHX CBeTo.n:Ho.n:OB rrpe.n:rrOqTHTeJIbHee aKTHBHble 06JIaCTH C .n:BOHHblMH reTepOCTpYKTypaMH AlxGal-xAs/ AlyGal_yAs. CBeTo.n:Ho.n:bl Ha OCHOBe AlGaAs/GaAs H3rOTaBJIHBaIOT BBH.n:e rOMoreHHbIX CTPYKTYP, O.n:HHOqHbIX H .n:BOHHbIX reTepocTpYKTYP (Nishizawa et aI., 1983). CaMble 9cpcpeKTHBHble CBeTo.n:Ho.n:bl KpacHoro CBeqeHHH Ha OCHOBe AlGaAs BblpaIIJ.HBaIOT Ha rrp03paqHblX rro.n:JIO)!{KaX, OHH HMeIOT .n:BOHHYIO reTepocTpYKTYPY (Ishiguro et aI., 1983; Steranka et aI., 1988; Ishimatsu, Okuno, 1989). TaKHe CBeTo.n:Ho.n:bl BblpaIIJ.HBaIOTCH Ha BpeMeHHblx rro.n:JIO)!{Kax GaAs H COCTOHT H3 TOJICTOrO ('" 125 MKM) HH)!{HerO 6apbepHoro CJIOH AlxGal-xAs C MOJIHPHOH .n:OJIeH XAI > 60%, aKTHBHoro CJIOH AlxGal-xAs C XAI = 35 % (.n:JIH .n:HO.n:OB KpaCHoro CBeqeHHH) H BepXHero 6apbepHoro CJIOH, aHaJIOrHqHOrO HH)!{HeMY. ,llJIH CBeTo.n:Ho.n:OB HHcppaKpacHoro .n:Harra30Ha MOJIHpHaH .n:OJIH aJIIOMHHHH BO Bcex CJIOHX 6y.n:eT HH)!{e. no OKOHqaHHH 9rrHTaKCHaJIbHOrO BblpaIIJ.HBaHHH Tpe6yeMoH CTPYKTYPbl rrorJIOIIJ.aIOIIJ.aH rro.n:JIO)!{Ka GaAs y.n:aJIHeTCH MeTo.n:aMH llIJIHCPOBKH H CeJIeKTHBHoro )!{H.n:KOCTHoro TpaBJIeHHH. 5IPKOCTb CBeTo.n:Ho.n:OB AlGaAs C .n:BOHHbIMH reTepocTpYKTypaMH, BblpaIIJ.eHHblMH Ha rrp03paqHblX rro.n:JIO)!{KaX, 60JIee q~M B .n:Ba pa3a BblllIe, qeM· y aHaJIOrHqHblX CBeTo.n:Ho.n:OB Ha rrOrJIOIIJ.aIOIIJ.HX rro.n:JIO)!{KaX (Steranka et aI., 1988). B 1980 rr. CBeTo.n:Ho.n:bl Ha OCHOBe AlGaAs Ha rrp03paqHblX rro.n:JIO)!{Kax BblpaIIJ.HBaJIH MeTo.n:OM 9rrHTaKCHH H3 )!{H.n:KOH cpa3bI. 3TO rr03BOJIHeT C BblCOKOH CKOPOCTbIO BblpaIIJ.HBaTb TOJICTble CJIOH AlGaAs BblCOKoro KaqeCTBa C 60JIbllIHM co.n:ep)!{aHHeM aJIIOMHHHH, rr09TOMY MeTO.n: rrpHro.n:eH .n:JIH cepHHHoro rrpoH3Bo.n:cTBa (Ishiguro et aI., 1983; Steranka et aI., 1988; Ishimatsu, Okuno, 1989). CBeTo.n:Ho.n:bl Ha OCHOBe AlGaAs/GaAs Ha rrorJIOIIJ.aIOIIJ.HX rro.n:JIO)!{KaX MoryT 6blTb TaK)!{e BblpaIIJ.eHbl MeTo.n:OM 9rrHTaKCHH H3
253
ra30BOH cpa3bl MeTaJIJIOOpraHHqeCKHX coe.n:HHeHHH (Bradley et aI., 1986). O.n:HaKo CKOPOCTb BblpaIIJ.HBaHHH KpHCTaJIJIOB 9THM MeTo.n:OM 3HaqHTeJIbHO HH)!{e, qeM MeTo.n:OM )!{H.n:KOCTHOH 9rrHTaKCHH, rr09TOMY ero rrpH rrOMOIIJ.H Tpy.n:HO rrOJIyqaTb TOJICTble CJIOH, He06xo.n:HMble .n:JIH cos.n:aHHH CBeTo.n:Ho.n:OB. nepBble cBepxbHpKHe CBeTo.n:Ho.n:bl, rrpHMeHHeMble B HH.n:HKaTopHbIX JIaMrraX cBeTocpopoB H CHfHaJIbHblX JIaMrraX TOpMO)!{eHHH aBTOM06HJIeH, KOTopble .n:OJI)!{Hbl 6bITb qeTKO pa3JIHqHMbl B YCJIOBHHX HpKoro BHellIHero OCBeIIJ.eHHH, 6blJIH BblpaIIJ.eHbl Ha rrpOSpaqHblX rro.n:JIO)!{KaX H co.n:ep)!{aJIH .n:BoHHble reTepocTpYKTYPbl AlGaAs. Ha.n:e)!{HOCTb CBeTO.D.Ho.n:OB Ha OCHOBe AlGaAs Bcer.n:a HH)!{e, qeMHa OCHOBe AlInGaP 6es CJIOeB AlGaAs. BblcoKoe co.n:ep)!{aHHe aJIIOMHHHH B CJIOHX AlGaAs HBJIHeTCH rrpHqHHOH HX OKHCJIeHHH H KOPPOSHH, qTO SHaqHTeJIbHO CHH)!{aeT CpOK CJIy)!{6bl YCTPOHCTB, B KOTOPblX OHH rrpHMeHHIOTCH. OTMeqaJIOCb (Dallesasse et aI., 1990), qTO reTepOCTpYKTypbl AlGaAs/GaAs paspYllIaIOTCH Hs-sa rrpou:eCCOB m.n:pOJIHsa. TpeIIJ.HHbl, pacKOJIbl H rropbl 6blJIH 06Hapy)!{eHbl B TOJICTblX (> 0,1 MKM) CJIOHX AlGaAs C BblCOKHM co.n:ep)!{aHHeM aJIIOMHHHH ('" 85 %) rrOCJIe .n:JIHTeJIbHOrO rrpe6b1BaHHH B HOpMaJIbHblX YCJIOBHHX. TaK)!{e OTMeqeH JII060rrbITHblH cpaKT: OqeHb TOHKHe CJIOH AlGaAs ('" 20 HM) 60JIee YCTOHqHBbl, qeM TOJICTble CJIOH, .n:a)!{e eCJIH co.n:ep)!{aT .n:o 100 % AI. ,llJIH rrpe.n:OTBpaIIJ.eHHH rrpou:eCCOB OKHCJIeHHH H rH.n:pOJIH3a CJIOeB AlGaAs He06xo.n:HMO HCrrOJIbSOBaTb repMeTHqHble Koprryca. B pa60Te (Steranka et aI., 1988) YTBep)!{.n:aeTCH, qTO rrOCJIe HCrrbITaHHH B .n:OBOJIbHO CypOBblX YCJIOBHHX YCKopeHHoro cTapeHHH (cBeTo.n:Ho.n:bl B TeqeHHe 1000 q pa60TaJIH rrpH TeMrrepaType 55°C H TOKe HH)!{eKU:HH 30 MA) qaCTb CBeTo.n:Ho.n:OB Ha OCHOBe AlGaAs rrpOMblllIJIeHHOrO HSrOTOBJIeHHH BblllIJIa H3 CTpOH. O.D.HaKO Y .n:pyroH qaCTH CBeTo.n:Ho.n:OB He 6blJIO 06Hapy)!{eHO HHKaKHX CJIe.n:oB pa3pYllIeHHH. TaKHe pe3YJIbTaTbl rOBopHT 0 He06xo.D.HMOCTH cTpororo KOHTPOJIH rrpou:eccoB H3rOTOBJIeHHH H MOHTa)!{a cBeTo.n:Ho.n:HbIX YCTPOHCTB.
12.3. CBeToAHoAbI Ha OCHOBe AlInGaP/GaAs TBep.n:ble paCTBopbl AlInGaP 6blJlH pa3pa60TaHbI B KOHu:e 1980-x H HaqaJIe 1990-x rr.; B HaCTOHIIJ.ee BpeMH OHH HBJIHIOTCH OCHOBOH .n:JIH HsrOTOBJIeHHH CBepXbHpKHX CBeTo.n:Ho.n:OB, H3JIyqaIOIIJ.HX B .n:JIHHHOBOJIHOBOH qaCTH BH.n:HMoro crreKTpa, T. e. B KpaCHOM, OpaH)!{eBOM H )!{eJITOM .n:HarraSOHax. TBep.n:blH paCTBOp AlInGaP H CBeTo.n:Ho.n:bl Ha ero OCHOBe orrHcaHbl B pa60Tax (Stringfellow, Craford, 1997; Chen et aI., 1997; Kish, Fletcher, 1997, a 60JIee rros.n:HHe 0630Pbl H rrOCJIe.n:HHe paspa60TKH rrpe.n:CTaBJIeHbl B pa60Tax (Mueller, 1999, 2000; Krames et aI., 2002). ' Ha pHC. 12.9 rrOKasaHa 3aBHCHMOCTb llIHpHHbl sarrpeIIJ.eHHOH SOHbl H cooTBeTcTBYIOIIJ.HX .n:JIHH BOJIH OT 3HaqeHHH rrOCTOHHHbIX pellIeToK AlInGaP (Chen et aI., 1997). AlInGaP MO)!{eT 6blTb COrJIaCOBaH rro rrapaMeTpaM pellIeTKH C GaAs. 3aMeHHB aTOMbl As B pellIeTKe GaAs Ha MelibUlue aTOMbl P, a qaCTb aTOMOB Ga - Ha 60JlbUlUe aTOMbI In, rrOJIyqHM TBep.n:blH paCT BOp
12.3. CBemOaUOabt Ita OCltOBe AlInGaP/GaAs
TA. 12. CBemOaUOabt BUaUMoeo cneKmpa
254 i :1
255
'I! II
2,5 r----:-::=---;------::-::-::-::-.,...----,------.500
I'
,
.
~
2,3
550
~ ~
2,1
.
:a
~ 1,9
"~ 1,7 ,.'"'"
1 2
'"
i
~-----"----1850
t.=~§e~±:::~±~~J900 950
1,3 ~ 5,3
5,4
5,5
5,6
5,7
rrOCTOJlHH"" peWeTKH
5,8
5,9
('IaCTHbIH
CJIY'IaH Ino,5Gao,5P),
cOrJIaCOBaHHbIH
paBHbI, TBep)l,bIH paCTBOp (AlxGal-x) 0,5InO,5P TaK)Ke 6y,neT COrJIaCOBaH C GaAs. pa60Te
(Chen
et
al.,
(AlxGal-x)0,5Ino,5P HBJIHeTCH
x > 0,5 -
1997)
OTMe'IaJIOCb,
rrpHMo30HHblM
2,33
1995)
x < 0,5
rrpl1
x = 0,5,
1997)
a
rrpl1
IIIl1pl1Ha 3arrpe-
3B, 'ITO COOTBeTcTByeT )l,JII1He BOJIHbI
KI1III 11
'ITO
rrOJIyrrpOBO)l,HI1KOM,
HerrpHM030HHbIM. B TO'IKe rrepeCe'IeHI1H
IIJ,eHHOH 30HbI paBHa
~w
0,0
532
HM.
Ha OCHOBe )l,aHHblX Opl1HCa 11 )l,p.
6bIJII1 C)l,eJIaHbI BblBO)l,bI, 'ITO (AlxGal-x)0,5Ino,5P-
rrpHMo30HHbIH rrOJIynpOBO)l,HI1K rrpl1 xAI
O~
< 0,53.
Ha Pl1c.
12.10.
O~
«!....
:a:.:
a
580 IQ oS 600 :.: := 620 ~ 640 660 680 1,0
I--
O~
Al B (AlxGa l-x)O,51no,5P, x (-)
3aBHcHMoCTb WHpHHbl aanpeIIJ.eHHOH 30HbI Ii )l.JlHHbI BOJIHbI H3JIYQeHHSI
OT MOJIHPHOM ,n:OJIM Al B COCTaBe AlinGaP C HeynopH,nOqeHHbIMM aTOMaMM; COCTaB COrJIaCOBaH no napaMeTpy peIlleTKM C GaAs. IlpM KOMHaTHOM TeMnepaType Er COOTBeTcTByeT npHMblM Me}l{30HHblM nepexo,naM, a Ex - HenpHMblM nepexo,n:aM B r M X TOqKaX 30HbI OPMJIJII09Ha (Prins et aI., 1995; Kish, Fletcher, 1997)
no rrapaMeTpaM
peIIIeTKI1 C GaAs. OOCKOJIhKY pa)l,l1ycbI aTOMOB Al 11 Ga rrpl16JII1311TeJIbHO
B
PHC.
540
x=53% A.= 555 HM
/'"
MOIDIpHaJI )lOID!
;-
::i!
520 :.:
/'"
ao' A
PMC. 12.9. 3aBMCMMOCTb UIMpMHbl 3anpeIII.eHHOM 30HbI M cooTBeTcTBYIOIII.eM eM ,nJIMHbI BOJIHbI OT 3HaqeHMM nOCTOHHHblX peIlleToK (Al x Gal - X)ylnl_yP npM 300 K. 1IITpMxoBaH BepTMKaJIbHaH JIMHMH COOTBeTcTByeT (AlxGal-x)O,5Ino,5P, COrJIaCOBaHHOMY no napaMeTpaM peIlleTOK C GaAs (Chen et aI., 1997) InGaP
./
1,8
6,0
V
./
L TO'lKll rrepeCeqeHHll
.,/
Ert
~ 2,0
500
V
./
~ --- ---- i;r --- 560 --- ---- /--i----= '
-
,2
§
750 ~ 800~
~ 1,5
2,4
~
~---'~--1700 ~
S
T=300K Er= 1,913B +0,613B xx Ex = 2,19 3B + 0,085 3B xx
':=
650..!' :lI
480
(AIPal-)O,sIno,sP
~
600 ~
,,.g
S
2,6
ao = 5,4510 A GaP: Eg = 2,26 3B, ao = 5,4512 A InP: Eg = 1,353B, ao = 5,8686 A GaAs: E g =I,4243B, ao =5;6533 A
AlP: Eg = 2,453B,
12.10
BbI3BaHO pa3HOH CTerreHbIO yrropH)l,O'IeHHOCTI1 aTOMOB B peIIIeTKax AlInGaP. YrropH)l,O'IeHl1e Kpl1CTaJIJIl1'IeCKI1X peIIIeTOK rrpI1BO)l,I1T K YMeHbIIIeHI1IO III I1pl1HbI 3arrpeIIJ,eHHOH 30HbI Ha BeJIl1'Il1HY )l,O
190
M3B (Kish, Fletcher,
1997). - - rrpllMLIe rrepeXOJ\f>l ----- HenpllMLIe rrepexOJ\f>l ••••••••••••. 3HaqeHHJl rroCTOlIHHbIX
AlP (HenpllM030HIIbIH rronyrrpoBOAHHK)
peWeTKH
rrpl1Be)l,eHa
3aBI1CI1MOCTb IIIl1pl1HbI 3arrpeIIJ,eHHOH 30HbI OT MOJIHPHOH )l,OJII1 aJIIOMI1HI1H B COCTaBe (AlxGal-x)0,5Ino,5P (Prins et al.,
1995;
Kish, Fletcher,
1997).
<
OPR x 0,53 MI1HI1MyM III I1pl1HbI 3arrpeIIJ,eHHOH 30HbI HaXO)l,I1TCH B ~r u -TO'IKe 30HbI rrpOBO)l,I1MOCTI1, rr03TOMY rrOJIyrrpOBO)l,HI1K rrpHM030HHbIl1; rrpl1
x> 0,53 MI1HI1MyM IIIl1pl1HbI 3arrpeIIJ,eHHOH 30HbI HaXO)l,I1TCH B X-MI1HI1MYMe 30HbI
rrpOBO)l,I1MOCTI1,
B TO'IKe rrepeCe'IeHI1H paBHa
555
11
x
rrOJIyrrpOBO)l,HI1K
= 0,53
CTaHOBI1TCH
HerrpHM030HHblM.
0,6 InP
0,5
(npJlM030HIIbIH
nonyrrpoBOAHHK)
)l,JII1Ha BOJIHbI 113JIY'IeHI1H rrpl16JII1311TeJIbHO
HM. PeaJIbHaH )l,JII1Ha BOJIHbI B TO'IKe rrepeCe'IeHI1H MO)KeT 6bITb
0,4
HeCKOJIbKO I1HOH B CI1JIY 113MeHeHI1H CTerreHI1 yrropH)l,O'IeHHOCTI1 aTOMOB, BXO)l,HIIJ,I1X B COCTaB KOHKpeTHoro MaTepl1aJIa (Kish, Fletcher, Ha Pl1c.
12.11
1997).
(AIGa)o,sIno,sP
rrOKa3aHa )l,l1arpaMMa, COCTOHIIJ,aH 113 JII1HI1H, COOTBeT-
CTBYIOIIJ,I1X 3Ha'IeHI1HM rrOCTOHHHbIX peIIIeTOK 11 )l,JII1HaM BOJIH 113JIY'IeHI1H (a,
3Ha'II1T,
AlInGaP
11 IIIl1pl1HaM 3arrpeIIJ,eHHOH 30HbI)
(Chen et al.,
1997).
)l,JIH
TBep)l,bIX paCTBopOB
~
(cornacoBBHIIbIH no napaMeTpaM peWeTKH c GaAs)
GaP (HerrpHM030HHhlH rronyrrpoBOAHHK)
Ope)l,CTaBJIeHHble Ha )l,l1arpaMMe 3Ha'Ie-
HI1H IIIl1pl1HbI 3arrpeIIJ,eHHOH 30HbI 11 rrOJIO)KeHI1H TO'IKI1 rrepeCe'IeHI1H HeMHoro OTJIl1'IaIOTCH OT rrpe)l,CTaBJIeHHbIX Ha Pl1c.
12.10,
r - X,
'ITO MO)KeT 6bITb
PMC. 12.11. .llMarpaMMa 3HaqeHMM nOCTOHHHblX peIlleToK (BepTMKaJIbHble JIMHMM) M ,nJIMH BOJIH M3JIyqeHMH ,nJIH CMCTeMbi MaTepMaJIOB AlinGaP (Chen et aI., 1997)
Ii
I
II
256
Dt. 12. CBemOaUOabt BUaUMOeO cneKmpa
12.5. OCfloBflbte xapaKmepucmuKu CBepX'bJl.pKUX cBemOaUOaOB
257
TBep).l.bIH pacTBop AlInGaP rrO).l.XO).l.IU ).I.JHI C03).1.aHHH cBepxbHpKHX CBe).I.HMOrO crreKTpa. IlpH H3MeHeHHH COCTaBa B T04Ke rrepece4eHHH 3KcTpeMYM(m
r -X, CBoHcTBa AlInGaP H3MeHHIOTCH, OH CTaHOBHTCH HerrpHM030HHbIM
rrOJIyrrpOBO).l.HHKOM, 3
kT.
200
HmpJW>I III rpynnhl T=300K (c -1,6 ao) (napaMeTJ>bl H3rH6a He
TO).l.HO).l.OB, H3JIY4aIOmHX B KpacHoM, opamKeBoM H )!{eJITOM ).I.Harra30Hax BH-
:a
g
,:= 4,0 1---+-~-\-~-~rl-----1---+----1'-------=1 300
I
~
~ 3,01---+---~~~~-~--1---+--
12.4.
TBep).l.bIH paCTBOp InGaN rrOHBHJICH B Ha4aJIe 1990-x rr., a BO BTOPOH
1 2
CBeTO).l.HO).l.bI, H3JIY4aIOmHe B CHHeM H 3eJIeHOM ).I.Harra30Hax crreKTpa. B HaCTORmee BpeMH CBeTO).l.HO).l.bI Ha OCHOBe InGaN -
,0
1,0 3,0
3,1
3,2
0630p CBOHCTB CBeTO).l.HO).l.OB Ha HX OCHOBe. BbICOKaH 3
PHC.
pble B03HHKaIOT H3-3a HeCOOTBeTCTBHH peilieTOK 3THX CJIOeB H rrO).l.JIO)!{eK H3 carr
B TBep).l.bIX paCTBopax Ha OCHOBe apCeHH).I.OB H
III
3,4
3,5
12.12.
3,6
3,7
3aBHcHMoCTb lliHpHHbI 3arrpemeHHoH 30HbI H cooTBeTcTBYJOmHX JI.JIHH
BOJIH OT rrOCTOllHHbIX pellieTKH J.l.JIlI HHTPHJ.l.OB
H3JIY4aTeJIbHOH peKOM6HHal1.HH HeCMOTpH Ha BbICOKYIO KOHl1.eHTpal1.HIO rrpoHHKaIOmHX ).I.HCJIOKal1.HH B 3rrHTaKCHaJIbHbIX rrJIeHKaX InGaN/GaN, KOTO-
3,3
IIOCTOJlHHaJI peDIeTKH ao, A
1997; Strite, Morkoc, 1992) orrHcaHbI TBep).l.ble paCTBopbI InGaN H ).I.aH
107 -109
a
OCHOBHble CBepXbHpKHe
CBeTO).l.HO).l.bI CHHero H 3eJIeHOrO CBe4eHHH. B pH).I.e pa60T (Nakamura, Fasol,
CaMoe y).l.HBHTeJIbHOe B 3THX MaTepHaJIaX -
:a::c
500 :=::cos'" 600 ~ 700 800 1000
os
rrOJIOBHHe 1990-x rr. Ha ero OCHOBe y)!{e 6bIJIH C03).1.aHbI rrpOMbIIlIJIeHHbIe
JIOKal1.HH JIe)!{aT B ).I.Harra30He
400
~
CBeTO)l.HO)l.bI Ha OCHOBe InGaN
;:;;
::c
III
rpyrrrrbI rrpH
300 K
CO).l.ep)!{aHHeM HH).I.HH 04eHb Tpy).l.HO. O).l.Ha H3 rrpH4HH 3Toro 3aKJII04aeTCH B HcrrapemfH HH).I.HH C BbIpameHHoH rroBepxHocTH. Il03ToMY B HaCTOHmee BpeMH TBep).l.ble pacTBopbI InGaN HCrrOJIb3YIOT TOJIbKO ).I.JIH H3rOTOBJIeHHH CBeTO).l.HO).l.OB YJIbTpa
rpyrirrbI
pe).l.KO ).I.JIH 60JIee ).I.JIHHHbIX BOJIH.
rrO).l.06Hble KOHl1.eHTpal1.HH ).I.HCJIOKal1.HH HeCOOTBeTCTBHH KaTaCTpo
.LJ.0 2002 Ha
1,9 3B.
r.
C4HTaJIOCb, 4TO IlIHpHHa 3arrpemeHHoH 30HbI InN paB-
O).l.HaKO
6bIJIO
rrOKa3aHO
(Wu
et
aI.,
2002a,
2002b),
4TO
IlIHpHHa 3arrpemeHHoH 30HbI InN rro ).I.aHHbIM JIIOMHHeCll.eHll.HH HH)!{e 3Toro 3Ha4eHHH, OHa JIe)!{HT B HHTepBaJIe 0,7-0,8 3B I). ¥lCCJIe).l.OBaHHH JIIOMHHeCl1.eHl1.HH TaK)!{e rrOKa3aJIH, 4TO ).I.JIH 3arrpemeHHOH 30HbI InN rrpH rrOBbIIlIeHHH TeMrrepaTypbI xapaKTepeH He06bI4HbIH C).I.BHr B KOPOTKOBOJIHOBYIO 06JIaCTb.
JIOKaJIH3YIOTCH B rrOTeHl1.HaJIbHbIX HMax, 4TO MeiliaeT HM ).I.OCTHraTb ).I.HCJIOKal1.HH. 04eBH).I.HO, 4TO 60JIbiliaH 4aCTb aKTOB H3JIY4aTeJIbHOH peKOM6HHal1.HH 06YCJIOBJIeHa HOCHTeJIHMH, JIOKaJIH30BaHHbIMH B rrOTeHl1.HaJIbHbIX HMax.
12.5'.
OCHoBHble xapaKTepHcTHKH CBepX'bBpKHX
XOTH
CBeTO)l.HO)l.OB
3
TeMrrbI rrOBbIIlIeHHH CBeTOBOH OT).I.a4H CBeTO).l.HO).l.OB BH).I.HMOro cneKTpa
3THX CHCTeM He TaK BeJIHKO, KaK B CHCTeMax Ha OCHOBe apCeHH).I.OB H
Brre4aTJIHIOT. ¥Ix MO)!{HO cpaBHHTb c. TeMrraMH pa3pa60TKH KpeMHHeBbIX
III
rpyrrrrbJ.
Ha pHC.
12.12 rrOKa3aHa 3aBHCHMOCTb IlIHpHHbI 3arrpemeHHoH 30HbI
H COOTBeTCTBYIOmHX ).I.JIHH BOJIH OT 3Ha4eHHH rrOCTOHHHbIX peilieToK, rpa
HHTerpaJIbHbIX cxeM, CKOPOCTb YJIY4IlIeHHH xapaKTepHCTHK KOTOPbIX rro).l.4HHHeTCH «3aKOHY Mypa~, COrJIaCHO KOTOPOMY rrpOH3BO).l.HTeJIbHOCTb 3THX MHKpocxeM y).l.BaHBaeTCH rrpH6JIH3HTeJIbHO Ka)!{).I.bIe 18 Mec.
KH rrocTpoeHbI ).I.JIH ceMeHCTBa MaTepHaJIOB Ha OCHOBe HHTPH).I.OB III rpyrrrrbJ.
Ha pHC. 12.13 rrOKa3aHbI 3TarrbI YBeJIH4eHHH CBeTOBOH OT).I.a4H CBeTO).l.H-
BH).I.HO, 4TO TeopeTH4ecKH InGaN rrO).l.XO).l.HT ).I.JIH C03).1.aHHH CBeTO).l.HO).l.OB,
O).l.OB BH).I.HMOrO crreKTpa (Craford, 1997, 1999). BH).I.HbI CKpOMHble Ha4aJIb-
pa60TaIOmHX BO Bcex ).I.Harra30Hax ).I.JIHH BOJIH BH).I.HMOrO crreKTpa. O).l.HaKO OKa3aJIOCb, 4TO BbIpacTHTb BbICOKOKa4eCTBeHHbIe CJIOH InGaN C BbICOKHM
1) eM. rrpHopHTeTHbIe pa60TbI
9 <1>. E. lIIy6epT
B. IO .
.ll.aBbIJ.l.OBa H J.l.p.
[11, 12].
I I
12.5. OCli08lible xapaICmepucmuICu C8epX'bRpICUX c8emOaUOa08
Dt. 12. C8emOaUOabt 8UaUM020 cneICmpa
258
Ii
•
i
100
~
JI3.MIIa
__ KOMnaKTHlUI ~nyopeCo;eHTHlUI
CBeTO)l.HO)l.bI Ha OCHOBe reTepocTpYKTYP GaAsP /GaAs, JIempOBaHHblx a30TOM, H3JIyqalOIII.He B KpacHoM )l.Harra30He crreKTpa. 3TH CBeTO)l.Ho)l.bI
nyopeCo;eHTHlUI _
259
06JIa)l.alOT HH3KOH 3cpcpeKTHBHOCTbIO H3-3a 60JIbIIlOrO KOJIHqeCTBa )l.HC-
~
'it
!~aHIffiO ~HJIbTpa~Y
-- 6e3 __ naMna HaKanHBaHIffi C lKeJlThlM ~HJIbTpOM
JIOKaUHH HeCOOTBeTCTBH5I, BbI3BaHHbIX HeCOOTBeTCTBHeM rrapaMeTpOB
AllnGaP/GaP
peIIleTOK HCrrOJIb3yeMblx MaTepHaJIOB.
(KpacHLlli, OpaHlKeBblii, lKeJITblii) •
AlInGaP/GaAs
CBeTO)l.HO)l.bI
KpaCHoro
AIGaAs/GaAs.
(KpaCHbIii, OpaHlKeBLIii:)
DR AIGaAs/AIGaAs
B
COCTaB
CBeqeHH5I
Ha
aKTHBHbIX
OCHOBe
06JIaCTeH
reTepOCTpYKTYP
TaKHX
CBeTO)l.HO)l.OB
BXO)l.51T KBaHTOBble 51MbI GaAs.
(KpaCHbIii)
•
__ naMna HaKaJIHBaHiffi
CBeTO)l.HO)l.bI KpacHoro CBeqeHH5I C )l.BOHHbIMH reTepOCTpYKTypaMH Ha OCHOBe AIGaAs/AIGaAs. B 3TH X CBeTO)l.HO)l.aX rrpHMeH5IIOTC5I aKTHBHble
C KpacHbiM ~HJIbTpOM
06JIacTH AIGaAs H 6apbepHble CJIOH AIGaAs. •
CBeTO)l.HO)l.bI Ha OCHOBe reTepOCTpYKTYP AlInGaP /GaAs Ha rrorJIOIII.aJOIII.HX rrO)l.JIO)f{KaX GaAs.
•
CBeTO)l.HO)l.bI Ha OCHOBe reTepOCTpYKTYP AlInGaP /GaP Ha rrp03paQHbIX rrO)l.JIO)f{KaX GaP.
•
CBeTO)l.HO)l.bI C KpHCTaJIJIaMH B BH)l.e rrepeBepHYTbIX yceQeHHbIX rrHpaMH)I. Ha OCHOBe AlInGaP/GaP co CBeTOBOH OT)l.aQeH 60JIee 100 JIM/BT (Krames et aI., 1999).
•
BpeMH (ro~) PHC.
12.13.
113MeHeHHe C TeqeHHeM BpeMeHH cBeTOBoH OT.D:aqH CBeTO.D:HO.D:OB BH.D:H-
Moro crreKTpa B cpaBHeHHH C .D:PYrHMH HCTOqHHKaMH CBeTa (Craford,
1997, 1999,
2000)
Ha
OCHOBe InGaN,
H3JIYQaJOIII.He
B CHHeM
H
3eJIeHOM
Ha pHC. 12.13 TaK)f{e rrOKa3aHa CBeTOBa51 OT)l.aQa 06bIQHbIX HCTOQHHKOB CBeTa:
rrepBOH
JIaMrrOQKH
3)1.HCOHa
(1,4 JIM/BT)
H JIaMrr
HaKaJIHBaHH5I
C KpacHbIMH H )f{eJITbIMH cpHJIbTpaMH. BH)l.HO, QTO cOBpeMeHHble CBeTO)l.HO-
Hble TeMrrbI pa3BHTH5I TeXHOJIOmH H3rOTOBJIeHH5I CBeTO)l.HO)l.OB BH)l.HMOr~
)l.bI 3HaQHTeJIbHO rrpeBOCXO)l.51T JIaMrrbI HaKaJIHBaHH5I C cpHJIbTpaMH. Ha pHC. 12.14 rrpe)l.CTaBJIeHa 3aBHCHMOCTb CBeTOOT)l.aQH CBepXb5lpKHX
crreKTpa B 1960-x rr. ECJIH C 1960 r. rro 2000 r. YJIyqIIleHHe CBeTOBOI1 OT)l.aqH IIlJIO rrOCTerreHHO, TO rrOCJIe 2000 r.
CBeTO)l.HO)l.bI
)l.Harra30Hax crreKTpa.
OHa Y)l.BaI1BaJIaCb Ka)f{)l.ble
qeTblpe rO)l.a. Ha pI1c. 12.13 rrpe)l.CTaBJIeHbI CJIe)l.YIOIII.I1e TI1rrbI CBeTO)l.I10)l.OB.
H
HeKoTopbIX )l.eIIleBbIX CBeTO)l.HO)l.OB B
H3JIYQeHH5I
(United
Epitaxy
Corp.,
3aBHCHMOCTH OT )l.JIHHbI BOJIHbI
1999).
BH)l.HO,
QTO
CBeTO)l.HO)l.bI
)f{eJIToro (590 HM, AlInGaP), OpaH)f{eBOrO (605 HM, AlInGaP) H 3eJIeHOrO •
CBeTO)l.HO)l.bI Ha OCHOBe GaAsP, BblpaIII.eHHble Ha rrO)l.JIO)f{KaX GaAs. nOCKOJIbKY rrapaMeTpbI
peIIleToK GaAsP
H
GaAs He COrJIaC?BaHbI,
(525 HM, InGaN) CBeQeHH5I XOPOIIlO rrO)l.XO)l.51T )l.JI5I YCTPOHCTB C BbICOKOH cBeTOOT)l.aQeH.
B 3rrI1TaKCI1aJIbHbIX CJI05lX GaAsP 06pa3yeTc5I MHoro )l.HCJIOKaUHH HecoOTBeTCTBH5I. n03TOMY )l.JI5I CBeTO)l.HO)l.OB 3Toro THrra xapaKTepHbI HH3KI1e 3HaqeHH5I CBeTOBOH OT)l.aqH ('" 0,1 JIMjBT). DJIaro)l.ap51 rrpocToTe 3rrHTaKCHaJIbHOrO BblpaIII.HBaHH5I H HH3KOH CTOHMOCTH H3rOTOBJIeHH5I CBeTO)l.HO)l.bI KpacHoro CBeqeHH5I Ha OCHOBe GaAsP BbIIIycKalOTc5I )1.0 CHX rrop . •
CBeTO)l.HO)l.bI Ha OCHOBe GaP, JIempOBaHHble rrpHMecHMH, HrpalOIII.I1~ MH pOJIb ueHTpoB H3JIyqaTeJIbHOH peKoM6HHaUHH.
Ga~
TOT cpaKT, Qro CBeTO)l.HO)l.bI Ha OCHOBe AlInGaP TeMHO-)f{eJITOro H opaH)f{eBOrO CBeQeHH5I 06JIa)l.aJOT BbICOKOH cBeToBoH OT)l.aQeH, QaCTHQHO 06b5lCH5IeTC5I 60JIbIIlOH QYBcTBHTeJIbHOcTbJO QeJIOBeQeCKOrO rJIa3a B 3TOM )l.Harra30He )l.JIHH BOJIH. B
CB5I3H C TeM, QTO MaKCHMaJIbHa51 QYBcTBHTeJIbHOCTb
rJIa3a cooTBeTCTByeT )l.JIHHe BOJIHbI 555 HM, CBeTO)l.HO)l.bI,
H3JIYQaJOIII.He
3eJIeHbIH CBeT Ha 3TOH BOJIHe, Ka)f{YTC5I 51pQe CBeTO)l.HO)l.OB TaKOH )f{e orrTHQeCKOH MOIII.HOCTH, HO pa60TaJOIII.HX B )l.pyroM crreKTpaJIbHOM )l.Harra30He.
6e3 rrpHMeceuH
nOCKOJIbKY CBeTO)l.HO)l.bI 51HTapHoro CBeQeHH5I Ha OCHOBe AlInGaP 06JIa-
51BJI5IeTC5I Herrp5lM030HHbIM rronyrrpOBO)l.HHKOM C HH3KOH CBeTOOT)l.aqeH.
)l.aJOT BbICOKHMH 3HaQeHH5IMH CBeTOBOH OT)l.aQH H He)l.OpOm B rrpOH3BO)l.CTBe
O)l.HaKO
THrra
(rro cpaBHeHHJO co CBeTO)l.HO)l.aMH3eJIeHOrO CBeQeHH5I Ha OCHOBe InGaN),
a30Ta HJIH rrpH O)l.HOBpeMeHHoM JIerHpOBaHHH UHHKOM H KHCJIOPO)l.OM B
rrpH
ero JIempOBaHHH
H303JIeKTpOHHbIMH rrpHMeC5IMH
OHH rrpHMeH5IJOTC5I B YCTpoHcTBax, r)l.e Tpe6yeTc5I BbICOKa51 51PKOCTb H HH3-
3arrpeIII.eHHOH 30He cpOPMHpyIOTC5I rrpHMecHble ueHTpbI, qepe3 KOTopbIe
Ka51 MOIII.HOCTb rroTpe6JIeHH5I, HarrpHMep B CHCTeMax OCBeIII.eHH5I )l.OPO)f{-
oCYIII.eCTBJI5IIOTC5I aKTbI H3JIyqaTeJIbHOH peKoM6HHaUI1H. TaKHe CBeTO-
HbIX 3HaKOB. B
)l.HO)l.bI H3JIyqalOT CBeT B 3eJIeHOM H KpacHoM )l.Harra30Hax BH)l.HMOrO
Ha OCHOBe MOIII.HbIX JIaMrr HaKaJIHBaHH5I, rrHTaJOIII.HXC5I OT 3JIeKTpHQeCKO-
crreKTpa.
9*
1980-x rr. YCTpoHcTBa OCBeIII.eHH5I 3HaKOB H3rOTaBJIHBaJIH
rl!.
260
12. CBemOaUOabt BUaUM030 cneKmpa
12.6. OnmUtlecKue xapaKmepucmuKu CBepX7>5lpKUX cBemOaUOaOB
40
I
InGaN ~.(3enem.lli)
20
... ~=:
,. ~
/
10 ..,-/.InGaN 8 (cmnrli) 6 4
/
j
~
2
'"~ u'"
1..,0,8 0,6 0.4
/• •
l:i
0~60
IIII~." AIInGaP/GaAs
~--103r--'---r---.--.---r--.--~ __~ 10 ....
T=300K
3
~
• •
AlGaAs/AlGaAs
Ilil
•
L
I
I
I
1
500
520
540
560
;:;;
",..0:;
102
-::
'" =i
~a
i§:1:! ~f
10 1
t
AlGaAs/GaAs
u _
'" =:
10°
®GaP:N/GaP
t 0
10-1 ;:;;
-
"'--,&:--:A. GaAsP:N/GaP
i
580
oS
II:
t
lSi g is '"fS' 2 U 10J::
I_GaP/GaP
480
261
I
600
620
,lImrna BOJIHLI B MaKclIM)'Me crreKIjla mnyqeHHll
A,
640
660
680
HM
PHC. 12.14. CBeToBall OT,n:aqa CBeTo,n:Ho,n:OB BH,n:HMoro cneKTpa H3JIyqeHHlI, H3rOTOBJIeHHbIX H3 MaTepHaJIOB Ha OCHOBe <pocqm,n:oB, apceHH,n:oB H HHTPH,n:OB - coe,n:HHeHHH THna AIIIBv (United Epitaxy Corp., 1999, 2000)
PHC. 12.15. XpOHOJIOrHlI nOBbIllIeHHlI 3HaqeHHH CBeTOBoro nOTOKa OT o,n:Horo CBeTo,n:Ho,n:a H cooTBeTcTBYIOillero CHH2KeHHlI CTOHMOCTH CBeTo,n:Ho,n:a B nepeCqeTe Ha 1 JIM. ,llJIlI cpaBHeHHlI npHBe,n:eHbI 3HaqeHHlI ,n:JIlI 60-BaTTHbIX JIaMn HaKaJIHBaHHlI C BOJIb
ro reHepaTopa, KOTOPbIH rroJIyqaJI ::lHepnllo OT 6eH3HHoBoro }1.BHraTeJHI. B HaCTOHmee BpeMH TaKHe YCTpoHcTBa Ha OCHOBe CBeTO}1.HO}1.0B HHTapHoro
JI.JIH cpaBHeHHH Ha PHC. 12.15 TaK)Ke rrpHBe}1.eHbI }1.aHHble 0 CBeTOBOM
CBeqeHHH HBJIHIOTCH 9Heproc6eperaIOmHMH, rrOCKOJIbKY K HHM 9JIeKTpO-
rrOTOKe H rrpH6JIH3HTeJIbHOH ueHe }1.JIH 60-BaTTHoH JIaMrrbI HaKaJIHBaHHH C
9HepmH rrocTyrraeT OT aKKYMYJIHTOPOB, 3apH)KaIOmHXCH }1.HeM COJIHeqHbIMH
BOJIbcppaMoBoH HHTbIO, HMeIOmeH cBeTOBYIO OT}1.aqy 17 JIM/BT H CBeTOBOH rrOTOK 1000
6aTapeHMH. Ha pHC. 12.13 H PHC. 12.14 TaK)Ke rrOKa3aHbI MaJIOMOmHble H He}1.0pO-
~M.
CpaBHeHHe rrOKa3bIBaeT, qTO eCJIH CBeTO}1.HO}1.bI cMorYT
3aHHTb }1.0CTOHHoe MeCTO Ha pbIHKe OCBeTHTeJIbHbIX YCTPOHCTB, 6Y}1.eT rro-
me CBeTO}1.HO}1.bI Ha OCHOBe GaAsP H GaP:N, 06JIa}1.aIOmHe cpaBHHTeJIbHO
CTOHHHO rrOBbIIllaTbCH HX 9cpcpeKTHBHoCTb rrpH O}1.HoBpeMeHHoM CHH)KeHHH
HeBbICOKOH CBeTOBOH OT}1.aqeH. yi3-3a HH3Koro KBaHTOBoro BbIXO}1.a H3JIyqe-
CTOHMOCTH. OTMeTHM, qTO CTOHMOCTb, YKa3aHHaH Ha PHC.
HHH TaKHe CBeTO}1.HO}1.bI He rrO}1.XO}1.HT }1.JIH CHCTeM, OT KOTOPbIX Tpe6yeTcH
BeTcTByeT ueHe JIaMrrbI, B KOTOPYIO He BXO}1.HT CTOHMOCTb 9JIeKTpHqeCTBa
12.15, COOT-
BbICOKaH HPKOCTb CBeqeHHH. HH3KHH BHYTpeHHHH KBaHTOBbIH BbIXO}1. H3-
rroTpe6JIHeMOrO eIO B TeqeHHe cpOKa CJIY)K6bI. ECJIH yqHTbIBaTb
JIyqeHHH CBeTO}1.HO}1.0B GaAsP 06bHCHHeTCH HeCOOTBeTCTBHeM rrapaMeTpOB
rroTpe6JIHeMOrO
9~eKTpHqeCTBa,
CTOHMOCT~
KOTopaH }1.JIH JIaMrr HaKaJIHBaHHH rOpa3}1.0
peIlleTOK HCrrOJIb3yeMblx MaTepHaJIOB. CBeTO}1.HO}1.bI Ha OCHOBe GaP:N TaK-
BbIIlle ueHbI caMOH JIaMrrbI, rrpeHMymeCTBa CBeTO}1.HO}1.0B CTaHYT ,eme, 60JIee
)Ke xapaKTepH3YIOTCH HH3KOH 9cpcpeKTHBHOCTbIO. 3TO CBH3aHO C rrpHpO}1.0H
OqeBH}1.HbIMH, HeCMOTpH Ha HX BbICOKYIO rrepBOHaqaJIbHYIO CTOHMOCTb.
H3JIyqaTeJIbHbIX rrepeXO}1.0B, 3aBHCHmHX OT KOHueHTpaUHH OrrTHqeCKH aKTHBHbIX rrpHMeceH a30Ta. JI.JIH MHorHX rrpaKTHqeCKH Ba)KHbIX CJIyqaeB, KOf}1.a Tpe6yeTcH 60JIbIllOH cBeToBOH rroToK, HarrpHMep B YCTpOHCTBaX oCBemeHHH }1.0PO)KHbIX 3HaKoB, CBeTocpopax H CHCTeMax oCBemeHHH, Ba)KHbIM rrapaMeTpoM HBJIHeTCH He
12.6.
OnTHQeCKHe xapaKTepHCTHKH CBepX'bSlpKHX CBeTO.ll:HO.ll:OB
TOJIbKO C8em08a51 omaatta, HO H nOJ/,IW51 MOI4Hocmb H3JIyqeHHH. HeCMOTpH Ha TO, qTO BbICOKY-IO CBe'rOBYIO MOmHOCTb JIerKO 06eCrreqHTb rrpH rrOMOmH JIaMrr
HaKaJIHBaHHH,
}1.JIH 9THX ueJIeH ace qame HaqHHaIOT rrpHMeHHTb
YCTpOHCTBa Ha OCHOBe CBeTO}1.HO}1.0B, OTJIHqaIOmHXCH HH3KOH rroTpe6JIHeMOH MOmHOCTbIO. Ha pHC. 12.15 rrOKa3aHa XpOHOJIOrHH rrOBbIIlleHHH 3HaqeHHH CBeTOBoro rrOTOKa (B JIIOMeHax), H3JIyqaeMOrO O}1.HHM CBeTO}1.HO}1.0M (Krames et al.; 2000). BH}1.HO, qTO 3a 30 JIeT 9Ta xapaKTepHcTHKa YBeJIHqHJIaCb rrOqTH Ha qeTblpe rrOpH}1.Ka.
Ha PHC. 12.16 rrOKa3aHbI crreKTpbI H3JIyqeHHH CBeTO}1.HO}1.0B KpacHoro CBeqeHHH Ha OCHOBe AlInGaP, rOJIy60ro H 3eJIeHOrO CBeqeHHH Ha OCHOBe InGaN (Toyoda Gosey Corp., 2000).
BH}1.HO, qTO crreKTp CBeTO}1.HO}1.0B
3eJIeHOrO CBeqeHHH 3HaQHTeJIbHO IllHpe CneK1'pOB CBeTO}1.HO}1.0B rOJIy60ro
M
KpacHoro CBeqeHHH. 3TO MO)KeT 6bITb CBH3aHO C rrp06JIeMaMH BblpamHBaHHH CTpyKTyp Ha OCHOBe InGaN C BbICOKHM cO}1.ep)KaHHeM HH}1.HH. 5bIJIO 06HapY)KeHO, qTO B rrpouecce BblpaIUHBaHHH CJIOeB InGaN, oc06eHHo rrpH BbICOKOM cO}1.ep)KaHHH HH}1.HH, cpOPMHpyIOTCH CKOrrJIeHHH ero aTOMOB HJIH
100 InGaN/GaN CBeTO~O.lUd
f\
f\
,
cHHero CBeqeHHll
I \
3eJIeHoro CBeqeHHll
-
AlInGaP/GaAs 'CBeTO.nHO.lUd KpaCHoro CBeqeHHll
I-
I J
",
V
\
\
/f/~ 450
\
,
600 Aruma BOJIHLI ft., HM
500
J T=25°C
J
550
300
T
KBaHTOBWI 3cjJcjJeIcrHBHoCTL
E!l~
is
20
0
l~
10
700
CneKTpbI H3J1yqeHHSI CBeTO,ll.HO,ll.OB KpacHoro CBeqeHHSI Ha OCHOBe reTe-
pOCTpyKTyp AlinGaP/GaAs, CHHero H 3eJleHOrO CBeqeHHSI Ha OCHOBe reTepocTpYKTyp InGaN/GaN npH KOMHaTHOH TeMnepaType (Toyoda Gosey Corp., 2000)
PHC.
12.17.
1
",/
I
InGaN/GaN cmrneC.n;
", ",
",'"
",'"
",
./
InGaN/GaN (470 HM) 3eJIeHbIe C.n; ",
50 ~ r30
0
I
I f=
263
25 °C ~ E)lHHH'lHWI ~cjJcjJepeHWIam.HWI
I
~1il 100
~~ u =:
650
r=:1
200
=5
,',
~/
5~
=. ~~ =: •
;\
J
500
..= .
(625 HM)
\ \
!:lu 0
I,""
I
12.16.
CBeTO~O.lUd
(525 HM)
II
400
1000 InGaN/GaN
/
(470HM)
PHC~
12. 7. 3AeKmpU'lecKue xapaKmepucmuKu C8epX'bRpKUX c8emOaUOa08
TA. 12. C8emOaUOabl 8UaUMOZO cne/cmpa
262
(525 HM)
1/
",'/ ~ V
/ V/ 2
,/
AlInGaP/GaAs KpaCHLleC.n;
V
3
(625 HM) 20
10
5
I I
30
50
100
3aBHcHMoCTb BbIXO,ll.HOH MOIU:HOCTH H3JIyqeHHSI ,ll.JISI CBeTO,ll.HO,ll.OB Kpac-
Horo CBeqeHHSI Ha OCHOBe AlinGaP /GaAs H CBeTO,ll.HO,ll.OB CHHero H 3eJIeHOrO CBeqeHHSI Ha oCHose InGaN/GaN OT TOKa HH:lKeKUHH npH KOMHaTHOH TeMnepaType (Toyoda Gosey Corp., 2000)
06pa3YIOTcH KBaHTOBble TOqKH. YCTaHOBJIeH(), "110 06pa30BaHHe CKorrJIeHHH orrpe.D.eJIHeTCH YCJIOBHHMH Bblpaw.HBaHHH CJIoeB ). AKTHBHble 06JIaCTH Bcex CBeTO.D.HO.D.OB, rrpe.D.CTaBJIeHHbIX Ha pHC. cOCTOHT H3
CJIOHMH ropa3.D.O
12.16,
HOCHTeJIHM
BbIIlIe, LIeM B .D.PYrHX CHcTeMax AIIIBv. n09TOMY
TPY.D.HO
rrpeO.D.OJIeTb
9TH
6apbepbI,
LITO
3HaLIHTeJIbHO
CHHJKaeT BepOHTHOCTb YTeLIKH HOCHTeJIeH H3 aKTHBHOH 06JIaCTH.
m8epablX pacm8opo8 nOAynpo8oaflUTW8blX coeaUHeHuu. YBe-
JIHLIeHHe umpHHbI crreKTpOB H3JIYLIeHHH rrpoHcXO.D.HT 3a CLIeT CJIYLIaHHblx
BO-8mopblX, TOLIKa nepeceLIeHHH 30H (B KOTOPOH rrOJIyrrpOBO.D.HHK rre-
peCTaeT 6bITb rrpHM030HHbIM H rrpeBpaw.aeTCH B HerrpHM030HHbIH) .D.JIH
06JIaCTH CBeTO.D.HO.D.OB. YumpeHHe crreKTpaJIbHOH JIHHHH rrpH 9TOM MO)KeT
AlInGaP COOTBeTcTByeT .D.JIHHe BOJIHbI
rrpeBbIIlIaTb BeJIHLIHHY TpOB. Ha pHC.
1,8kT -
xapaKTepHoro TerrJIOBOrO yIlIHpeHHH crreK-
555
HM. npH rrOBbIIlIeHHH TeM-
rrepaTypbI B03paCTaeT 3aCeJIeHHOCTb .D.OJIHH HerrpHMbIX rrepeXO.D.OB, LITO rrpHBO.D.HT K CHH)KeHHIO 9
12.17
rrpe.D.cTaBJIeHbI MOW.HOCTH H3JIYLIeHHH CBeTO.D.HO.D.OB pa3-
HbIX THrrOB B 3aBHCHMOCTH OT TOKa HH)KeKUHH . .ll.JIH H.D.eaJIbHbIX CBeTO.D.HO-
12.7.
.D.OB TaKaH 3aBHCHMOCTb .D.OJI)KHa 6bITb JIHHeHHOH C e.D.HHHLIHbIM HaKJIOHOM, T. e . .D.1:f
3JIeKTpHlIeCKHe xapaKTepHCTHKH CBepX'bBpKHX CBeTO,lJ;HO,lJ;OB
.D.OJI)KHa 6bITb paBHa e.D.HHHue. 3TOH 3aBHcHMoCTH cooTBeTCTByeTiliTpHXOBaH JIHHHH. HaH60JIee 6JIH3KH K H.D.eaJIbHbIM CBeTO.D.HO.D.bI Ha OCHOBe
Ha pHC.
12.19
rrpe.D.cTaBJIeHbI BOJIbTaMrrepHble xapaKTepHcTHKH CBeTO-
AlInGaP. HaKJIOH 3aBHcHMocTH .D.JIH cBeTO.D.HO.D.OB 3eJIeHOrO CBeLIeHHH Ha
.D.HO.D.OB KpacHoro CBeqeHHH Ha OCHOBe AlInGaP,
OCHOBe InGaN .D.aJIeK OT e.D.HHHUbI, LITO 06bHCHHeTCH HeCOBepIlIeHCTBOM
rOJIy6oro H 3eJIeHOrO CBeLIeHHH Ha OCHOBe InGaN B pe)KHMe rrpHMoro
CJIOeB InGaN, oco6eHHO rrpH BbICOKH;X KOHueHTpaUHHX HH.D.HH.
cMew.eHHH. npHMaH 3aBHCHMOCTb Me)K.D.Y rroporoBbIM HarrpH)KeHHeM H HH-
Ha pHC.
12.18
rrOKa3aHbI TeMrrepaTypHble 3aBHcHMOCTH HHTeHcHBHOCTH
H3JIYLIeHHH cBeTO.D.HO.D.OB pa3Hblx THrrOB. BH.D.HO, LITO HHTeHCHBHOcTb H3JIyLIeHHH CBeTO.D.HO.D.OB Ha OCHOBe HHTPH.D.OB
III
rpyrrrrbI H3MeHHeTCH C TeM-
rrepaTypoH ropa3.D.0 cJIa6ee, LIeM cBeTO.D.HO.D.OB Ha OCHOBe AlInGaP. 3TO 06bHCHHeTcH CJIe.D.YIOW.HM.
Bo-nep8blx,
III
B
IlIHPOK030HHbIX
MaTepHaJiaX
Ha
ocHOBe
HHTPH.D.OB
rpyrrrrbI rroTeHUHaJIbHbIH 6apbep Me)K.D.Y aKTHBHbIM H 6apbepHbIMH
a TaK)Ke CBeTO.D.HO.D.OB
TeHCHBHOCTblO H3JIYLIeHHH cBH.D.eTeJIbCTByeT 0 XOPOIlIHX pa60LIHx xapaK-
1
TepHcTHKax .D.HO.D.OB. npH TOKe
MA HarrpH)KeHHH rrpHMoro cMew.eHHH
CBeTO.D.HO.D.OB 3eJIeHOrO H rOJIy6oro CBeqeHHH OKa3aJIHCb 6JIH3KH H
2,75
(2,65
B
B), .D.a)Ke HecMoTpH Ha 3aMeTHYlO pa3HHUY B 9HeprHHX H3JIYLIeHHH
>. = 470 >. = 525 HM,
hv = 2,64 9B, a .D.JIH hv = 2,36 9B). MaJIoe
(.D.JIH CBeTO.D.HO.D.OB rOJIy6oro CBeqeHHH
HM,
CBeTO.D.HO.D.OB 3eJIeHOrO CBeLIeHHH
a
pa3JIHLIHe HarrpH)KeHHH cMew.eHHH, B03MOJKHO, YKa3bIBaeT Ha BepoHTHoCTb TOro, LITO rrpH HH)KeKUHH HOCHTeJIeH B aKTHBHYIO 06JIaCTb InGaN qepe3
1)
CM. aHaJIH3 cneKTpOB CBeTO,ll.HO,ll.OB Ha OCHOBe InGaN/GaN B
[13-17].
6apbepHbIH CJIOH
GaN LIaCTb
H3
HHX TepHIOT 9HeprHIO
Ha
H3JIYLIeHHe
264
. Dt. 12. CBemo8uo8bl Bu8uMOeO cneKmpa
12.7. Bu6AUOepat/JU'leCKUU cnUCOK
265
1000
...... 0
500
0
:I:
~~ :I: •
'--
-
Q):I: !;;!:: lSi
InGaN/GaN 3eneHhleC,[( (525 HM)
,--
300
•
DOJIbllIee COrrpOTI1BJIeHl1e CBeTO,ZI.110,ZI.OB Ha OCHOBe InGaN 06bHcHHeTcH HeCKOJIbKI1MI1 rrpl1QI1HaMI1:
~
1:i~ 100
InGaN/GaN I-ClUlHe C,[( I-(470HM)
~I- t---
•
«rrOrrepeQHbIM~ COrrpOTI1BJIeHl1eM 6ycpepHblx CJIOeB n-Tl1rra, BblpameHHbIX Ha carrcpl1pOBbIX rrO,ZI.JI02KKaX;
•
CI1JIbHbIM 3cpcpeKToM rrOJIHpl13all.l1l1, xapaKTepHblM ,ZI.JIH ceMeHcTBa MaTepl1aJIOB Ha OCHOBe HI1TPI1,ZI.OB;
•
HI13KOH rrpOBO,ZI.I1MOCTbIO p-Tl1rra B 6apbepHblx CJIOHX;
:I: :I:
~&
50
0
30
5 r;l is
AlInGaP/GaAs KpacHhle C,[( (625 HM)
't
0
•
BbICOKI1M COrrpOTI1BJIeHl1eM KOHTaKTOB p-Tl1rra. HI13KaH rrpOBO,ZI.I1MOCTb p-Tl1rra B03HI1KaeT 113-3a BbICOKOH 3Heprl111 aK-
TI1Ball.l111 aKlI.eIITOpOB ('"
10
-20
40 60 80 o 20 TeMilepaTYPa oKp)'lKalOm.eli cpeiU>I T, DC
100
Ha PI1C.
PHC. 12.18. 3aBHcHMoCTb HHTeHCHBHOCTH H3JIyqeHHlI OT TeMrrepaTypbI ,lI.JIlI CBeTO,ll.HO,ll.OB KpacHoro CBeqeHHlI Ha OCHOBe AlInGaP /GaAs, CHHero H 3eJIeHOrO CBeqeHHlI Ha OCHOBe InGaN/GaN (Toyoda Gosey Corp., 2000)
200
M3B) B CJIOHX GaN 11 IhGaN, rro3ToMY JIl1llIb
He60JIbllIaH ,ZI.OJIH aKlI.errTopoB OKa3bIBaeTCH 110HI130BaHHOH 11 orrpe,ZI.eJIHeT KOHlI.e HTp a ll.l1IO CB060,ZI.HbIX ,ZI.blPOK; rrpHMoro
12.20
rrOKa3aHbI TeMrrepaTypHble 3aBI1CI1MOCTI1 HarrpH2KeHI1H
CMemeHI1H ,ZI.110,ZI.OB rrpl1
TOKe
30
MA.
,UJIH Bcex ,ZI.110,ZI.OB rrpl1
rrOBbIllIeH1111 TeMrrepaTypbI HarrpH2KeHl1e rrpHMoro CMemeHI1H rra,ZI.aeT, QTO CBH3aHO CYMeHbllIeHl1eM IlIl1pl1HbI 3arrpemeHHoH 30Hbl. YMeHbllIeHl1e rroCJIe,ZI.OBaTeJIbHOrO COrrpOTI1BJIeHI1H CBeTO,ZI.110,ZI.OB C POCTOM TeMrrepaTypbI HB-
CPOHOHOB. nOTepl1 YBeJIl1ql1SaIOTCH rrpl1 I1H2KeKlI.l1l1 HOCI1TeJIeH B aKTI1BHble
JIHeTCH eme O,ZI.HOH rrpl1QI1HOH CHI12KeHI1H HarrpH2KeHI1H CMemeHI1H B CBeTO-
CJIOI1 InGaN C BbICOKOH KOHlI.eHTpall.I1eH I1H,ZI.I1H ,ZI.JIH CBeTO,ZI.110,ZI.OB 3eJIeHOrO
,ZI.I1O,ZI.ax CI1HerO 11 3eJIeHOrO CBeQeHI1H Ha OCHOBe InGaN. 9TO YMeHbllIeHl1e
CBeqeHI1H. 9HeprHH paCXO,ZI.yeTcH Ha 113JIyqeHI1e CPOHOHOB, BOCrrOJIHHeTCH
COrrpOTI1BJIeHI1H 06bHcHHeTcH rrOBblllIeHl1eM aKTI1BHOCTI1 aKlI.errTopoB rrpl1
BHellIHI1M HarrpH2KeHl1eM, rrO,ZI.aBaeMbIM Ha CBeTO,ZI.110,ZI.bl.
rrOBbIllIeH1111 TeMrrepaTypbI, QTO YBeJII1QI1BaeT rrpOBO,ZI.I1MOCTb CJIOeB GaN 11 InGaN p-Tl1rra.
100
~ ~
30
5l'"
a:
g
::s
\§.
~
5
J
1,5
2,0
2,5
r
3,0
nOCJIe,ZI.OBaTeJIbHOe
COrrpOTI1BJIeHl1e
xapaKTepl1CTI1KI1
rrpl1
r-:==::'
r
.q
---,. I
3,5
4,0
,ZI.110,ZI.a
l l
InGaN/GaN 3eneHbIe C,[( (525 lIM)
I
2,0
l~
1,0 -50
25
:sI
~
1nA1GaP/GaAs KpacHbIeC,[( (625 HM)
o 25 50 75 TeMIIepawa oKp)'lKaIOm.eli CpeiU>I T, DC
100
125
4,5
orrpe,ZI.eJIHeTCH
60JIbllII1X
lSi
IInGaN/GaN ~ CHHHe C,[( (470 HM)
~
§'51
PHC. 12.19. BOJIbTaMrrepHbIe xapaKTepHcTHKH CBeTO.ll.HO,ll.OB AlInGaP/GaAs KpacHoro CBeqeHHlI H CBeTO,ll.HO,ll.OB InGaN/GaN CHHero H 3eJIeHOrO CBeqeHHlI B peJKHMe rrpllMoro CMemeHHlI rrpH KOMHaTHOH TeMrrepaType (Toyoda Gosey Corp., 2000)
BOJIbTaMrrepHoH
3,5
~ '" 2,5
InGaN/GaN clUlHe C,[( I (470HM)J
I
4,0
8i:!l 3,0 ~~
1sl
I
3
I
/;V
AlInGaP/GaAs KpaCHbIeC,[( ,(625,ffidJ
10
I
D 25 C ~
InGaN/GaN r-r-- H T 3eneHbIe C,[( (525 HM)
50
TOKax.
HaKJIOHOM
PHc. 12.20. TeMrrepaTYPHble 3aBHCHMOCTI1 HarrpllJKeHHlI rrpllMoro CMemeHHlI CBeTO,lI.HO,ll.OB KpacHoro CBeqeHHlI Ha OCHOBe AlInGaP /GaAs, CHHero H 3eJIeHOrO CBeqeHHlI Ha OCHOBe InGaN/GaN rrpH TOKe 30 MA (Toyoda Gosey Corp., 2000)
BH6J1HOrpa4iHlIecKHH CllHCOK
CBeTO,ZI.110,ZI.bI
rOJIy60ro 11 3eJIeHOrO CBeQeHI1H 06JIa,ZI.aIOT60JIee BbICOKI1MI1 3HaQeHI1HMI1 rrOCJIe,ZI.OBaTeJIbHOrO COrrpOTI1BJIeHI1H, QeM CBeTO,ZI.110,ZI.bI KpacHoro CBeQeHI1H.
Bradley R. R., Ash" R. M., Forbes N. W., Griffiths R. J. M.,Jebb D. P., and Shepard H. E. Metalorganic chemical vapor deposition of junction isolated GaAlAs/GaAs LED structures" !. Cryst. Growth 77, 629 (1986).
266
Fit. 12. C8em08u08bt 8u8uMOeO cneKmpa
Campbell J. C., Holonyak Jr. N., Craford M. G., and Keune D. L. "Band structure enhancement and optimization of radiative recombination in GaAsP (and InGaP:N)" J. Appl. Phys. 45, 4543 (1974). Casey Jr. H. C. and Panish M. B. Heterostructure Lasers, Part A and Heterostructure Lasers, Part B (Academic Press, San Diego, 1978). Chen C.H., Stockman S.A., Peanasky M.J., and Kuo c.P. "OMVPE growth of AIGalnP for high-efficiency visible light-emitting diodes" in High Brightness Light Emitting Diodes edited by G. B. Stringfellow and M. G. Craford, Semiconductors and Semimetals 48, (Academic Press, San Diego, 1997). Craford M. G., Shaw R. W., Herzog A. H., and Groves W. O. "Radiative recombination mechanisms in GaAsP diodes with and without nitrogen doping" J. Appl. Phys. 43, 4075 (1972). Craford M. G. "Overview of device issues in high-brightness light-emitting diodes" in High Brightness Light Emitting Diodes edited by G. B. Stringfellow and M. G. Craford, Semicondu.ctors and Semimetals 48 (Academic Press, San Diego, 1997). Craford M. G. "The bright future of light-emitting diodes" Plenary talk on light emitting diodes at the MRS Fall Meeting, Boston Massachusetts December (1999). Dallesasse J. M., EI-Zein N., Holonyak Jr. N., Hsieh K. C., Burnham R. D., and Dupuis R. D. "Environmental degradation of AIGaAs-GaAs quantum-well heterostructures" J. Appl. Phys. 68, 2235 (1990). Grimmeiss H. G. and Scholz H. "Efficiency of recombination radiation in GaP" Phys. Lett. 8, 233 (1964). Groves W. O. and Epstein A. S. "Epitaxial deposition of III-V compounds containing isoelectronic impurities" US Patent 4,001,056 (1977). Groves W.O., Herzog A. H., and Craford M. G. "Process for the preparation of electroluminescent III-V materials containing isoelectronic impurities" US Patent Re. 29,648 (1978a). . Groves W.O., Herzog A. H., and Craford M. G. "GaAsP electroluminescent device doped with isoelectronic impurities" US Patent Re. 29,845 (1978b). Holonyak Jr. N. and Bevacqua S. F. "Coherent (visible) light emission from Ga(AsP) junctions" Appl. Phys. Lett. 1, 82 (1962). Holonyak Jr. N., Bevacqua S. F., BielanC. V., and Lubowski S. J. "The "directindirect" transition in Ga(AsP) p-n junctions," Appl. Phys. Lett. 3, 47 (1963). Holonyak Jr. N., Nuese C. J., Sirkis M. D., and Stillman G. E., "Effect of donor impurities on the direct-indirect transition in Ga(AsP)" Appl. Phys. Lett. 8, 83 (1966). Ishiguro H., Sawa K., Nagao S., Yamanaka H., and Koike S. "High efficient GaAIAs light emitting diodes of 660 nm with double heterostructure on a GaAIAs substrate" Appl. Phys. Lett. 43, 1034 (1983). Ishimatsu S. and Okuno Y. "High efficiency GaAIAs LED" Optoelectron. Dev. Technol. 4, 21 (1989). . Kish F. A. and Fletcher R. M. "AIGalnP light-emitting diodes" in High Brightness Light Emitting Diodes edited by G. B. Stringfellow and M. G. Craford, Semiconductors and Semimetals 48 (Academic Press, San Diego, 1997).
12. 7. Bu6J1uoepa£jJu'tecKuu cnUCOK
267
Krames M. R. et at. "High-power truncated-inverted-pyramid (AlxGal-x)o.sInos P/GaP light emitting diodes exhibiting > 50% external quantum efficiency"Appl. Phys. Lett. 75,2365 (1999). Krames M. R. et al. "High-brightness AIGaInN light emitting diodes" Proc. SPIE 3938, 2 (2000). Krames M. R., Amano H., Brown J. J., and Heremans P. L. "High-efficiency Iightemitting diodes" Special Issue of IEEE J. Sel. Top. Quantum Electron. 8, 185 (2002). Logan R. A., White H. G., and Trumbore F. A. "p-n junctions in compensated solution grown GaP" J. Appl. Phys. 38, 2500 (1967a). Logan R. A., White H. G., and Trumbore F. A. "p-n junctions in GaP with external electrolumi-nescence efficiencies rv 2% at 25 .C" Appl. Phys. Lett. 10, 206 (1967b). Logan R. A., White H. G., and Wiegmann W. "Efficient green electroluminescent junctions in GaP" Solid StC1:te Electron. 14, 55 (1971). Mueller G. (editor) Electroluminescence I, Semiconductors and Semimetals 64 (Academic Press, San Diego, 1999) .. Mueller G. (editor) Electroluminescence II, Semiconductors and Semimetals 65 (Academic Press, San Diego, 2000). Nakamura S. and Fasol G. The Blue Laser Diode (Springer, Berlin, 1997). Nishizawa J., Koike M., and Jin C. C. "Efficiency of GaAIAs heterostructure red light emitting diodes" J. Appl. Phys. 54, 2807 (1983). Nuese C. J., Stillman G. E., Sirkis M. D., and Holonyak Jr. N., "Gallium arsenidephosphide: crystal, diffusion, and laser properties" Solid State Electron. 9, 735 (1966). Nuese C. J., Tietjen J. J., Gannon J. J., and Gossenberger H. F. "Optimization of electroluminescent efficiencies for vapor-grown GaAsP diodes" 1. Electrochem. Soc.: Solid State Sci. 116, 248 (1969). Pilkuhn M. and RupprechtH. "Electroluminescence and lasing action in GaAsP" 1. Appl. Phys. 36, 684 (1965). Prins A. D., Sly J. L., Meney A. T., Dunstan D. J., O'Reilly E. P., Adams A. R., and Valster A.J. Phys. Chem. Solids 56, 349 (1995). Steranka F. M., DeFevre D. C., Camras M. D., Tu C.-W., McElfresh D. K., Rudaz S.L., Cook L. W., and Snyder W. L. "Red AIGaAs light emitting diodes" Hewlett-Packard lourn,al p. 84 August (1988). Steranka F. M. "AIGaAs red light-emitting diodes" in High Brightness Light Emitting Diodes edited by G. B. Stringfellow and M. G. Craford, Semiconducitors and Semimetals 48 (Academic Press, San Diego, 1997). Stringfellow G. B. and Craford M. G. (Editors) High Brightness Light Emitting Diodes, Semiconductors and Semimetals 48 (Academic Press, San Diego, 1997). Strite S. and Morkoc H., "GaN, AIN, and InN: A review" J. Vac. Sci. Technol. B 10, 1237 (1992). Tien P. K. Original version of the graph is courtesy of P. K. Tien of AT&T Bell Laboratories (1988).
V
k
268
TA. 12. C8emoiJuoiJbt 8uiJUMOZO cneKmpa
Toyoda Gosei Corporation, Japan, LED product catalog (2000). United Epitaxy Corporation, Taiwan, General LED and wafer product catalog (1999). Wolfe C. M., Nuese C. J. and Holonyak Jr. N. "Growth and dislocation structure of single-crystal Ga(AsP)" f. Appl. Phys. 36, 3790 (1965). Wu J., Walukiewicz W., Yu K. M., Ager III J. W., Haller E. E., Lu H., Schaff W. J., Saito Y., and Nanishi Y. "Unusual properties of the fundamental bandgap of InN" Appl. Phys. Lett. 80, 3967 (2002a). Wu J., Walukiewicz W., Yu K. M., Ager III J. W., Haller E. E., Lu H., and Schaff W. J. "Small bandgap bowing in Inl-xGaxN alloys" Appl. Phys. Lett.80, 4741 (2002b).
i
,ll;onOJIHeHHe peAaKTopa 1. 3JIeKTpOJIIOMlfHeCQeHQIHI }J.IfO}J.OB 1f3 <pocq)lf}J.a raJIJIlf5I I JI. A. AHreJIOBa, B. C. BaBIfJIOB, A.3. IOHOBlftf/I
12.7. Bu6AuozpacpUtteCKuU cnUCOK
269
A. H. TYPKIfH, A.3. IOHOBIf'l, A. H. KOBaJIeB,
13.2. lllupuHa 3anpew,eHHou 30Hbt mBepiJblx pacmBopoB AlInGaN
271
fJIaBa 13 TBEP,nbIE PACTBOPbI AlInGaN H HCTOqHHKH YJIbTPACIlHOJIETOBOrO H3JIYQEHHR HAHXOCHOBE
PHC.
13.1.
KJIaCcH
BOJIH
(International
13.2. illHpHHa 3anpeIIJ.eHHOH 30HbI TBep,ZJ;bIX paCTBopOB
AlInGaN 13.1.CneKTpbI YJIbTpactmOJIeTOBOI'O H3JIYQeHHSI Ha pHC. 13.2 nOKa3aHa 3aBHCHMOCTb lIIHpHHbl 3anpeIII.eHHOH: 30Hbl OT H BH,D.HMOrO
nOCTOSlHHOH: pelIIeTKH ,D.JISI TBep,D.blx paCTBOpOB AlInGaN • .lI.aHHble TBep,D.ble
H3JIyqeHHH: npOXO,D.HT Ha ,D.JIHHe BOJIHbl, npH6JIH3HTeJIbHO paBHOH: 390 HM,
pacTBopbl HCnOJIb3YIOTCSI ,D.JISI CBeTO,D.Ho.zi.oB, pa60TaIOIII.HX B lIIHPOKOM ,D.Ha-
rpaHlH.J.a MeiK,D.Y ,D.Hana30HaMH YJIbTpaqmOJIeTOBOro (Y
no ,D.HarpaMMe
na30He ,D.JIHH BOJIH, OXBaTbIBaIOIII.eM CJIe,D.YIOIII.He cneKTpaJIbHble 06JIaCTH:
MeiK,D.YHap0,D.HaSl KOMHCCHSI no OCBeIII.eHHIo) co-
,D.aJIeKOrO H 6JIHiKHerO Y
KOTOPOH: qYBcTBHTeJIbHOCTb qeJIOBeqeCKOrO
MKO 1978 r. (MKO -
CTaBJISleT 0,1 ~ OT MaKCHMaJIbHOrO 3HaqeHHSI. B
3peHHSI
3TOH: rJIaBe 6Y,D.YT pac-
cMaTpHBaTbcSI CBeTO,D.HO,D.bl Ha OCHOBe HHTPH,D.OB III rpynnbl, H3JIyqaIOIII.He B Y
(>. < 390
HM) H cpHOJIeTOBOM
(>'
~ 390-410 HM) ,D.Hana30Hax cneKTpa.
HHcppaKpacHoro H3JIyqeHHSI. DblJIO nOKa3aHO, 'ITO MOiKHO nOJIyqHTb TpH BH,D.a 6HHapHblX nOJIynpOBO,D.HHKOBbIX COe,D.HHeHHH:: InN, GaN H AlN, npH 3TOM GaN, BbipaIII.eHHblH: MeTO,D.OM 3nHTaKCHH, 6blJI 60JIee cOBeplIIeHblM.
XOTSI nOCJIe,D.HSISI rpynna YCTP0H:CTB H3JIyqaeT CBeT B BH,D.HMOM ,D.Hana30He,
O,D.HaKO TBep,D.ble pacTBopbl AlGaN C 60JIblIIOH: KOHueHTpaUHeH: aJIIOMHHHSI
HX qaCTO OTHOCSIT K YJIbTpacpHOJIeTOBblM H3JIyqaTeJISlM. Y
H InGaN C 60JIblIIOH: KOHueHTpaUHeH: HH,D.HSI, 06JIa,D.aIOIII.He BblCOKHM BHYT-
pa3JIHqaIOTCSI THnOM aKTHBHblX 06JIaCTeH:. 3,D.eCb 6Y,D.YT paccMaTpHBaTbcSI
peHHHM KBaHTOBblM BblXO,D.OM H3JIyqeHHSI, nOJIyqHTb Ha npaKTHKe OqeHb CJIOiKHO.
,D.HO,D.bl C aKTHBHblMH 06JIaCTSlMH InGaN H AlGaN, H3JIyqaIOIII.HMH CBeT Ha ,D.JIHHaX BOJIH
>. > 360
HM H
>. < 360
CYIII.eCTBYIOT pa3JIHqHble ,D.aHHble 0 lIIHpHHe 3anpeIII.eHHOH: 30HbI -InN.
HM COOTBeTCTBeHHO.
Ha pHC. 13.1 npe,D.CTaBJIeHbl ,D.Be KJIaCcHcpHKaUHH Y
OepBOHaqaJIbHO CqHTaJIOCb, 'ITO OHa npH6JIH3HTeJIbHO paBHa 1,9 3B. 003,D.-
Tpa. 00 O,D.HOH: H3 HHX, YTBepiK,D.eHHOH: B 1932 r. BTOPblM MeiK,D.YHap0,D.HbIM
Hee 06HapYiKHJIOCb, 'ITO ee BeJIHqHHa ,D.OJIiKHa 6blTb rOpa3,D.0 MeHblIIeOKOJIO 0,77 3B 1).
KOHrpeccoM no OCBeIII.eHHIO (International,
1932), Y
113~rHYTble
HT H3 Tpex nO,D.,D.Hana30HOB: Y
: I
I
«
280 HM) . .lI.Hana30H Y
p~c.
HHIO, npOXO,D.SlIII.eMY qepe3 BCIO aTMoccpepy H ,D.OCTHraIOIII.eMY nOBepxHocTH
Ha
3eMJIH ,D.aiKe CKB03b 06JIaKa.
JIHHeHHOro qJIeHa, nponopUHOHaJIbHOrO UHOHaJIbHOrO x . (1 - x):
BbICOKOH: 3HepfHH,
3TO
H3JIyqeHHe, COCTOSlIII.ee H3 CPOTOHOB
OqeHb onaCHO ,D.JISI KOiKH JIIO,D.eH: (oc06eHHo ,D.JISI ee
rJIy6HHHblX CJIOeB), HMeHHO OHO SlBJISleTCSI npHqHHOH: B03HHKHOBeHHSI KaTa-
030HOBblM CJIOeM 3eMJIH) H Y
13.2,MOiKHO onHcaTb ypaBHeHHeM H3 Tpex qJIeHOB: KOHCTaHTbl,
x,
H HeJIHHeH:HOrO qJIeHa, nponop-
E:B = E: + (E: - E:) . x + X· (1- x) . Eb,
paKTbl (noMYTHeHHSI xpycTaJIHKa qeJIOBeqeCKOrO rJIa3a) H MOiKeT npHBecTH K nOJIHOH: CJIenOTe. 113JIyqeHHSI ,D.Hana30HOB Y
i
JIHHHH, xapaKTepH3YIOIII.He 3aBHCHMOCTb lIIHpHHbl 3anpe-
III.eHHOH 30Hbl nOJIynpOBO,D.HHKOB OT HX XHMHqeCKOrO COCTaBa, nOKa3aHHble
(13.1)
r,D.e Eb Ha3bIBaeTCSI 3Hepzueu napa60JlUttecKoeo npozu6a HJIH napaMemPOM napa60JlUtteCKozo npozu6a. OapaMeTpbl napa60JIHqeCKOrO nporH6a
>. ~ 280 HM ,D.O nOBepxHocTH
(CM. pHC. 13.2) ,D.JISI AlGaN, InGaN H AlInN, B3S1Tbl H3 pa60T (Siozade et
3eMJIH npaKTHqeCKH He ,D.OXO,D.HT, Y
aI., 2000; Yun et aI.,. 2002; Wu et aI., 2003). He,D.aBHO nOSlBHJIHCb ,D.onOJI-
COJlHettHo-CJlenblM ,D.Hana30HOM.
HHTeJIbHble ,D.aHHble 06 3HeprHSlx napa60JIHqeCKOrO nporH6a (Walukiewicz et aI., 2004) 2).
CKOJIbKY eCTeCTBeHHblH: CBeT C ,D.JIHHaMH BOJIH
003,D.Hee nOSlBHJIaCb aJIbTepHaTHBHaSl KJIaCCHcpHKaUHSI Y
I) CM. 2) eM.
npHOpHTeTHble pa60TbI KHHry [3].
B.IO .
.LJ:aBbI.D:OBa H .D:p.
[1, 2].
13.3. [JoiLRpUaal1UOHHbte acfJcfJeK,,!bt B Humpu8ax III epynnbt
FiL. 13. TBep8bte pacmBopbt AlInGaN
272
A.,HM 200 210
6,0
CnOmaHHaJI nOIDlpH3aI1Hl1
r-------~ , nOBepXHOCTL Ga nOBepXHOCTL N
IILe303JIeIcrpH'IeCKliH llOIDlpH3aI1Hl1, nOBepXHOCTL Ga
273
llie303JIeIcrpH'IeCKlIH nOIDlpH3aI1HH, nOBepXHOCTL N
(__------A---~--_, r--------A--------, paCTlDKenne
ClKarne
paCTlDKenne
220 230 240 250 260
5,0
HQnpUMep, InGaN Ha GaN AlxGal-xN : Eg = 3,42 3B + x 2,86 3B -x (I-x) 1,0 3B InxGal-xN: Eg = 3,42 3B - x 2,65 3B -x (I-x) 2,4 3B
4,0
>Q
'"
~
I
3,01P!-~
• 3,1
PHC.
13.2.
340 360 380 400 425 450 475 500
~.lIffi:::m::ct~890000 3,2
1000 1200 1400 1800
3,3
3,4
IIoCTOllHHaJI pemeTKH Qo,
3,6
pa60T (Siozade et aI.,
III
2000; Yun
2002; Wu
TIoBepxHocTHble 3apSl.n:bI, HaIIpaBJIeHHe 3JIeKTpHQeCKOrO IIOJISI H IIOJISI
(co CTOPOHbI Ga HJIH co CTOPOHbI
l{UU
et aI.,
2003)
TIOJUIPH3aIJ.HOHHble act>ct>eKTbI B HHTPH)J.ax
III
N)
BCJIe.nCTBl1e MeXaHI1QeCKI1X HarrpH)KeHI1H BHyTPI1' MaTepl1aJIa (Bernar-
dini et aI.,
1997;
Ambacher et aI.,
1999, 2000, 2002).
nOJIHpHOCTb BHYT-
peHHero 3JIeKTpl1QeCKOrO rrOJIH 3aBI1CI1T OT BI1.na .necpopMaUI1I1 11 HarrpaBJIeHI1H 3rrl1TaKCI1aJIbHOrO pOCTa Kpl1CTaJIJIOB (co CTOPOHbI raJIJII1H IiJII1 co CTOPOHbI a30Ta). Ha pliC.
13.3
paccMOTpeHbI HeCKOJIbKO CJIYQaeB rrOJIHpli-
3aUIiIi. MeXaHIiQeCKaH .necpopMaUIiH 3fIliTaKCliaJIbHOrO CJIOH MO)KeT 6bITb BbI3BaHa KaK ero paCTH)KeHlieM, TaK Ii C)KaTlieM. B nOCJIe.nHeM CJIYQae 3rrliTaKCl1aJIbHbIH CJIOH C)KIiMaeTCH B rrOrrepeQHOM HarrpaBJIeHl111 (rrorrepeQHOe 3.neCb 03HaQaeT B rrJIOCKOCTI1 rro.nJIO)KKIi). HarrpliMep, CJIOH InGaN rrpli BblpaIlI.I1BaHIiI1 Ha TOJICTOM 6ycpepHoM CJIoe GaN, Haxo.nHIlI.l1eCH B HeHarrpH)KeHHOM COCTOHHIiI1, 6y.neT C)KI1MaTbCH. B
CJIYQae paCTH)KeHI1H 3rrl1-
TaKCl1aJIbHbIH CJIOH pacllIlipHeTcH B rrOrrepeQHOM HarrpaBJIeHlfli. TaK, CJIOH
Ha Pl1c.
rpynnbI
Hal160JIee pacIIpocTpaHeHHoH rrpl1 3rrl1TaKCI1aJIbHOM BbIpaIlI.I1BaHI1I1 HI1T-
PI1.nOB
III rpyrrrrbI HBJIHeTCH rrJIOCKOCTb c reKcarOHaJIbHOH CTpyKTYPbI Tl1rra BIOpUI1Ta. Ha Ka)K.noH 113 .nByX rrOBepXHOCTeH CJIOH HI1Tpl1.na B rrpouecce I1T BblpaIlI.I1BaHI1H CPOPMI1PYIOTCH rrOJIHpl13aUl10HHble 3apH.nbI , qTO rrpl1Bo.n K rrOHBJIeHI1IO B CJIOe BHYTpeHHero 3JIeKTpl1qeCKOrO rrOJIH, OKa3bIBaIOIlI.erO CI1JIbHOe BJII1HHl1e Ha OrrTl1qeCKl1e 11 3JIeKTpl1qeCKI1e CBOHCTBa noro KJIaCCa
13.4
rrpliBe.neHbI paCQeTHble 3HaQeHliH 3JIeKTpliQeCKOrO rrOJIH,
B03HI1KaIOIlI.erO B TBep.nb1x pacTBopax HI1Tpli.nOB HI rpyrrrrbI, BbIpaIlI.eHHblx Ha HeHarrpH)KeHHbIX CJIOHX GaN (Gessmann et aI., Ha Pl1c.
13.3.
III
rpynIIbI IIpH pa3HoH opHeHTaU:HH KpHCTaJIJIOB B IIpou:ecce 3IIHTaKCHaJIbHOrO pocTa
B HeHarrpH)KeHHOM COCTOHHI1Ii, 6y.neT pacTHrliBaTbcH.
rpYIIIIbI. TIapaMeTpbI H3rH6a B3S1TbI H3 et aI.,
AlOaN Ha 0aN
AIGaN rrpli BblpaIlI.IiBaHIiI1 Ha TOJICTOM 6ycpepHoM CJIoe GaN, Haxo.nHIlI.lieCH
A
3aBHcHMoCTb IIlHpHHbI 3aIIpemeHHoH 30HbI OT IIOCTOSlHHOH pelIleTKH .zVISI
IIOJIYIIPOBO.n:HHKOB Ha OCHOBe HHTPH.n:OB
13.3.
InOaN Ha GaN
IIOJIHpH3aU:HH IIpH cIIoHTaHHoH H IIbea03JIeKTpHQeCKOH IIOJIHpH3aU:HH B HHTpH.n:ax
550 600 650 700
T=295K AIN: Q O= 3,112 A l::::::::::~:j:::::l GaN: QO = 3,191 A 1--_-1-;.--; InN: QO = 3,545 A c = 1,6 Qo
1--.. ---.·-;-·<-----1
PHC.
AIGaN Ha GaN
13.5
2002).
rrOKa3aHO BJII1HHlie rrOJIHpli3aUliOHHbIX rrOJIeH Ha CTPYK-
TYPbI C KBaHTOBbIMH HMaMI1. BHYTpeHHee 3JIeKTpliQeCKOe rrOJIe B CJIOHX C KBaHTOBbIMIi HMaMI1 pa3.neJIHeT B rrpoCTpaHcTBe ::meKTpoHbI Ii .nb1pKIi, TeM caMbIM CHIi)KaH BepoHTHoCTb 1i3JIYQaTeJIbHOH peKOM6IiHaUIiIi.
9TOT
3cpcpeKT oco6eHHo CIiJIbHO CKa3bIBaeTCH B cTpyKTypax C TOJICTbIMI1 aKTIiBHbIMIi CJIOHMI1 B BIi.ne KBaHTOBbIX HM (TOJIIlI.IiHOH 60JIee
100 A).
,l{JIH ero
CHIi)KeHIiH Heo6xo.nIiMO I1CrrOJIb30BaTb OQeHb TOHKlie aKTIiBHbIe 06JIaCTI1. ,l{JIH MliHI1MI13aUIili 3cpcpeKTa pa3.neJIeHIiH 3JIeKTpOHOB 11 .nblPOK 06bIQHO BbI6lipaeTCH TOJIIlI.I1Ha KBaHTOBbIX HM
20-30 A.
BJII1HHlie CIiJIbHbIX 3JIeKTpliQeCKliX rrOJIeH, BbI3BaHHblX rrOJIHpI13aUIiOHHbIMIi 3cpcpeKTaMI1, MO)KHO YMeHbIIII1Tb nYTeM YBeJIIiQeHIiH KOHueHTpaUl11i
rrOJIyrrpOBo.nHI1KOB. 3ap .nbI Ha rrOBepXHOCTHX rrOJIyrrpOBo.nHI1KOB MoryT B03HI1~aTb 3a cqeT H KaK cnOHmaHHOU nOAJtpuaaupu, TaK 11 nbea03AeKmpUf/,eCIWU nOAJtPuaa-
cBo6o.nHbIX HOCIiTeJIeH. 9Toro .no6I1BaIOTcH JIli60 CIiJIbHbIM JIerlipOBaHlieM aKTIiBHbIX 06JIaCTeH, JIli60 YBeJIIiQeHlieM TOKa IiH)KeKUIiI1. TaKoe 3KpaHIi-
FA. 13. T8epabte pacm80pbt AlInGaN
274
'I 'I eJIOM InOaN MAIOaN (BepXHJIJI nOBepXHOCTh - Oa), Bldp~eHHble nCeB){OMopqIHo Ha HeHanpJDKeHHLIX CJIOJIX OaN
0,20 0,15
~
I
i
x =0,19
0,05 0,00
/'
nOBbIIlleHHlO BepoHTHoCTH TYHHenHpoBaHHH Jl.bIPOK H COOTBeTCTBeHHO CHH)!{eHHlO conpoTHBneHHH cnOH loGaN
/VV
2002).
./
....-
-0,10 -0,15 0,0
/
V V V ----
..c:::;, ....-~ /
I=: -0,05
:1 " "Iii'
:/ Ptot
./
/:
.
et al.,
2000;
Gessmann et al.,
et al.,
2001, 2003). B cnyqae OT)!{Hra YJl.enbHOe conpOTHBneHHe KOHTaK"(OB 2.10- 7 OM·CM- 2 , a BO BTOPOM -1,1 . 10-6 OM·CM- 2 • Yco-
COCTaBHno
BepIlleHCTBOBaHHe KOHTaKTOB CBeTOJl.HOJl.OB 3a CqeT 3cpcpeKTa nonHpH3aUHH -----
-----
--r--+-:
P HLanpLeHHoro
7CJIOJIOaN
n03BonHeT CHH3HTb HX YJl.enbHOe conpOTHBneHHe Ha HeCKonbKO nOpHJI.-
.
KOB no cpaBHeHHlO C KOHTaKTaMH, CCPOpMHpOBaHHbIMH no TpaJl.HUHOHHbIM
~Psp
- AlxOal xN
TeXHOnOrHHM.
P pz
AlxOal-xN-:::7 P sp
HanpH)!{eHHH npHMoro CMeru.eHHH Jl.nH
3HaqHTenbHO HH)!{e pa60qHX HanpH)!{eHHH aHanOrHQHbIX Jl.HOJl.OB C 06bIQHbI-
11xoal-x~1:t::: Ptot 1
TI03ToMypa60qHe
CBeTOJl.HOJl.OB Ha OCHOBe GaN C ynyqIlleHHbIMH KOHTaKTaMH, KaK npaBHno, MH KOHTaKTaMH (Su,
2005).
'I
o~ o~ o~ o~ XHMH'IecKHH COCTaB TBep){oro paCTBopa x (-)
1,0
13.4. AKTHBaIJ.HH npHMeceii B HHTPH)I;ax III rpynnhI
PHC.' 13.4. BeJIHqHHa H HanpaBJIeHHe cnoHTaHHoH H nbeSOSJIeKTpHqeCKOH nOJIlipHSaIl,HH B nCeBJl.OMop<j>HbIX CJIOliX InGaN H AIGaN, BblpallleHHblx Ha HeHanpll}KeHHblx CJIOliX GaN. HeHanpll}KeHHbIM CJIOliM GaN CBOHCTBeHHa cnOHTaHHall, a He nbesoSJIeKTpHqeCKali nOJIlipHSaIl,HlI (Gessmann et aI., 2002).
'I':
!
(Li
Co06ru.aeTcH 0 HaHeceHHH OTO)!{)!{eHHbIX H HeOTO)!{)!{eHHbIX OMHqe-
CKHX KOHTaKTOB TaKoro THna Ha nOBepxHocTb cnOH GaN p-THna (Kumakura
'I
"--InxGal xN
i"'--
275
TaKoro KOHTaKTa, nOHBHBIlleeCH BCneJl.CTBHe nonHpH3aUHH, cnoc06cTByeT
Ppz
I Inxoa1-xt>_/ ~ ,- InxGal-xN
0,10
~
~
J.l
13.4. AKmu8al1UJl npuMeceu B Itumpuaax III epynnbt
I,
TIPH pa60Te C MaTepHanaMH Ha OCHOBe HHTPHJl.OB
III
rpynnbI B03HHKa-
lOT Jl.OnOnHHTenbHbIe TPYJl.HOCTH, BbI3BaHHbIe He06xoJl.HMOCTblO aKTHBaUHH npHMeceH, QTO CBH3aHO C Jl.ByMH oc06eHHOCTHMH TaKHX nonynpoBoJl.HHKOB.
B
paCCMaTpHBaeMbIX MaTepHanax npOHCXOJl.HT XHMHQeCKaH KOMneHca-
UHH aKuenTopOB 3a CQeT npHCOeJl.HHeHHH K
HHM aTOMOB BOJl.OpOJl.a.
pOBaHHe BHyTpeHHHX 3neKTpHqeCKHX noneH BeJl.eT K cJl.BHry MaKCHMYMa
OTpHuaTenbHbIH 3apHJI. HOHH3HpOBaHHbIX aKuenTopOB KOMneHcHpyeTcH
H3nyqeHHH B KOPOTKOBonHOBYlO qaCTb cneKTpa, qTO qaCTO Ha6nlOJl.aeTCH
nOnO)!{HTenbHO 3apH)!{eHHbIMH HOHaMH BOJl.OpOJl.a, B H36b1TKe npHcyT-
B CBeTOJl.HOJl.aX Ha OCHOBe InGaN npH YBenHqeHHH TOKa HH)!{eKUHH. OJl.HaKO y
HBneHHH nonHpH3aUHH
eCTb H nOnO)!{HTenbHaH
cTopoHa.
Ero MO)!{HO Hcnonb30BaTb Jl.nH YMeHbIlleHHH conpoTHBneHHH OMHqeCKHX
CTBYlOru.HMH npH 3nHTaKCHanbHOM BbIparu.HBaHHH. 'uPYrHMH B03MO)!{HbIMH HCTOQHHKaMH BOJl.OpOJl.a HBnHlOTCH MeTHnOBble (-CH 3 ) H 3THnOBbIe (-C2H5) rpynnbI MeTannOOpraHHQeCKHX COeJl.HHeHHH, aMNmaK
KOHTaKTOB B CBeTOJl.HOJl.aX Ha OCHOBe GaN. ,UnH 3Toro Ha nOBepxHocTb cnOH
(NH 3 ) H BOJl.OPOJl. H3 ra3a-HOCHTenH H2.
GaN p-THna HaHOCHTCH TOHKHH cnoH InGaN, HaXOJl.Hru.HHCH B HanpH)!{eH-
AKuemopbI
HOM (C)!{aTOM) COCTOHHHH, KOTOPbIH H BblnonHHeT ponb YCOBepIlleHCTBOBaH-
TennOBOH aKTHBaUHH, HaMHoro npeBblIllalOru.eH
Horo npH nOMoru.H nonHpH3aUHH KOHTaKTa. 3neKTpHqeCKOe none BHYTPH
300 K. B
B
HHTpHJl.aX
III
rpynnbI
06naJl.alOT
BbICOKOH
kT
3HeprHeH
npH TeMnepaType
pe3ynbTaTe TonbKO He60nbIllaH Jl.OnH aKuemopoB HOHH3HPY-
eTCH npH KOMHaTHOH TeMnepaType.
a
6
YnpalKHeHHe. AKmUBal1UR aKI1enmop08 MaeltUJl 8 GuN 3HeprHlI HOHHSaIl,HH aKIl,eITTOpOB MarHHlI B GaN Ea = 200 MsB. a. Tpe6yeTcli onpeJl.eJIHTb, KaKali Jl.OJIli aKIl,eITTOpOB OKa)!{eTCli HOHHsHpoBaHHoH npH TeMnepaType 300 K, eCJIH KOHIl,eHTpaIl,HlI aKIl,enTOpOB COCTaBJIlieT NMg = 10 18 CM- 3 • B paCqeTe CJIeJl.yeT HCnOJIbSOBaTb <j>OpMyJIy
p = (g-1 . N Mg . N v ). exp( -Ea /2kT),
=
PHC. 13.5. 30HHbleJl.HarpaMMbI TOHKoro (a) H TOJICTOrO (6) aKTHBHoro CJIOli AIGaN/GaN C nOJIlipHSaIl,HOHHbIMH nOJIlIMH (BepxHlIli nOBepXHOCTb KpHCTaJIJIOBGa, nOJl.JIO)!{Ka Hso6pa)!{eHa C npaBoH CTOpOHbI)
rJl.e 9 - CTeneHb BblpO)!{Jl.eHHlI OCHOBHoro COCTOllHHlI aKIl,eITTOpOB (g 4), N v s<j><j>eKTHBHali nJIOTHOCTb COCTOllHHH Ha KpaIO BaJIeHTHOH SOHbI GaN. 6. KaKoH 6YJl.eT CTeneHb HOHHSaIl,HH aKIl,enTOpOB, ·eCJIH K Ka)!{Jl.OMY HS HHX npHKpenJIeH aTOM BOJl.OpOJl.a?
PemeHHe. a. I1CnOJIbSYli npHBeJl.eHHYIO <j>OpMyJIy, HaXOJl.HM, qTO npH YKasaHHOH TeMnepaType HOHHSHpoBaHHbIMH OKaSbIBaIOTCli TOJIbKO 6 % aKIl,eITTOpoB. 6. B CJIy-
276
13.5. J!.ucJLoICaupu
rJL. 13. T8epable pacm80pbl AlInGaN
qae naCCHBaUHH Bcex aKuenTopOB BO,!{OPO,!{OM HHKor.n:a He y.n:aCTClI ,!{06HTbClI p-THna npOBo.n:HMOCTH no~ynpOBo.n:HHKOBoro MaTepHa~a. DhIJIO rrOKa3aHO (Amano et aI., 1989), qTO aKIIeIITOpHble rrpliMeCli MoryT
8
HumpUaax
III epynnbl
277
Mli TepMI1QeCKliMli, XI1MliQeCKliMli li MeXaHliQeCKliMli xapaKTepl1CTI1KaMli.
O.!l.HaKO y caIIcplipa ~pliCTaJIJIliQeCKaH CTpYKTypa KopyH.!l.a, B TO BpeMH KaK HliTp l1.!l.hI TpeTheli rpyrrrrhI liMeIOT CTpyKTypy BIOpIIliTa. K TO My )Ke
6hITh aKTliBlipOBaHhI 06JIyqeHlieM 3JIeKTpOHHhIM rrYQKOM Hli3KOH 3Hepmli
pa3JIliQaIOTCSI li 3HaQeHliH rrOCTOHHHhIX perneTOK carrcplipa li GaN. Bce 3TO
(LEEBI).
rryqKOM
Be.!l.eT K B03Hl1KHOBeHl1IO B 3IIliTaKCliaJIhHhIX IIJIeHKaX GaN, BhIpaIIIeHHhlx
rrpl1qeM B pSI.!l.e
Ha caIIcpl1pOBhIX IIO.!l.JIO)KKaX, IIpoHliKaIOIIIlix li KpaeBhlx .!l.liCJIOKaIII1H HecoOTBeTCTBliH, rrJIOTHOCTli KOTOPhIX 06hIQHO COCTaBJIHIOT 108 _10 9 CM-2
.lI.JISI aKTliBaIIlili
3JIeKTpOHoB
aKIIeIITOpOB HapSI.!l.Y C 06JIYQemfeM
MO)KeT rrpliMeHHThcSI TepMliqeCKliH OT)Klir,
CJIyqaeB BTOPOH MeTO.!l. OKa3hIBaeTCSI 60JIee rrpe.!l.rrOqTliTeJIhHhIM (Nakamura et al. 1991; 1992). TI1IIl1qHhle YCJIOBI1SI TepMliqeCKOrO OT)Klira GaN p~TliIIa, BhlpaIIIeHHoro MeTO.!l.OM XliMliqeCKOrO OCa)K.!l.eHliSI MeTaJIJIOOpraHliqeCKliX
Ha pliC. 13.7 CXeMaTI1QHO IIOKa3aHhI HaQaJIhHhle 3TarrhI
COe.!l.liHeHliH li3 ra30BOH cpa3hI (MOCVD): TeMilepaTypa 675-725 °C, IIpO-
BOHaQaJIhHhI~
.!l.OJI)KliTeJIhHOCTh 5 MI1H, aTMoccpepa -
BhlpaIIIeH~hIli rrpli Hli3KliX TeMilepaTypax
a30T. Alo.30Gao.7oN p-Tlilla OT)Klira-
BhlpaIIII1~aHI1SI
3IIliTaKCl1aJIhu HhIX CJIOeB u GaN u Ha caIIcpHpe (Nakamura, Fasol, 1997). nep6ycpepHhIli CJIOli (liHOr.!l.a Ha3hIBaeMhIH 06JIaCThIO .!l.ecpeKToB),
(f"V
500°C) 11 B .!l.aJIhHeHrneM OT-
IOT rrpli 60JIee BhICOKOH TeMilepaType, 06hlqHO 850°C, B TeqeHlie 1-2 MliH.
)KliraeMhIli, xapaKTepl13yeTcH 60JIhrnl1M KOJIliQeCTBOM .!l.liCJIOKaIIliH. O.!l.HaKO
CqliTaeTCSI, qTO BO BpeMSI TepMl1qeCKOrO OT)Kl1ra IIPOliCXO.!l.liT pa3pyrneHlie
BIIpOIIecce OT)Klira 3Tli .lI.I1CJIOKaII~li I1CQe3aIOT, li B IIOCJIe.!l.YIOIIIlix CJIOHX
CpaBHI1TeJIhHO CJIa6hIX CBSI3eH Me)K.!l.Y aKIIeilTopaMli li BO.!l.OPO.!l.OM, rrOCJIe
Ha6JIIO.!l.aIOTCH rOpa3.!l.0 60JIee Hl13Klie IIJIOTHOCTli .!l.liCJIOKaIIliH HeCOOTBeT-
qero aTOMhI BO.!l.opO.!l.a BhIXO.!l.SIT 113 3IIliTaKCl1aJIhHOH IIJIeHKI1 11 peampyIOT
CTBI1H. KOJIeCKe li .!l.p. (Koleske et aI., 2004) IIo.!l.p06HO rrpOaHaJIli3lipOBaJIl1
C a30TOM, 06pa3YH MOJIeKYJIhI aMMliaKa NH 3 . DJIarO.!l.apSI MaJIhIM pa3MepaM, aTOMhI BO.!l.opO.!l.a, KaK IIpaBliJIO,.!l.OBOJIhHO JIerKO .!l.liCPCPYH.!l.lipyIOT CKB03h
HaQaJIhHhle 3TailhI BhlpaIIIliBaHliSI 3IIliTaKCliaJIhHhIX CJIOeB GaN Ha carrcplipe.
Me)K.!l.oY3JIliSI B KpliCTaJIJIl1qeCKOH perneTKe MaTepl1aJIa. npe.!l.IIOJIaraeTCSI,
MliKPOCKOillili li 113MepeHHH K03cpCPliIIl1eHTOB OTpa)KeHliSI.
npliBe.!l.eHHhle liMli .!l.aHHhle 6hIJIli rrOJIYQeHhI C rrOMOIIIhIO aTOMHO-CI1JIOBOH
qTO 06JIyqeHlie 3JIeKTpOHaMl1 IIpliBO.!l.liT K HarpeBY MaTepliaJIa, qTO TaK)Ke BhI3hIBaeT pa3phIB CBSI3eH Me)K.!l.Y BO.!l.OPO.!l.OM li aKIIeIITOpaMli, T. e . .!l.eHCTBlie 06JIyqeHl1SI aHaJIOmqHO OT)Kl1ry I).
B
pa60Te Illy6epTa li .!l.p. (Schubert et aI., 1996) YTBep)K.!l.aJIOCh, qTO
JIenipOBaHlie cBepxperneToK AIGaN/GaN li AIGaN/ AIGaN (B OTJIliql1e OT 06beMHhlx MaTepliaJIOB GaN li AIGciN) cIIoc06CTByeT 3JIeKTpl1qeCKOH aKTliBaIIlili rJIy60Klix aKIIeilTopoB, HailpliMep MarHliSI. n03.!l.Hee HeCKOJIhKO He3aBliCl1MhIX rpyrril liCCJIe.!l.OBaTeJIeH orry6JIliKOBaJIli 3KcIIepliMeHTaJIhHhle
,I
.!l.aHHhle 0 IIOBhlrneHlili IIPOBO.u.liMOCTli B TaKliX MaTepliaJIaX B .!l.eCHTh li 60-
1
JIee pa3 (Goepfert et aI., 1999, 2000; Kozodoy et aI., 1999a, b; Kipshidze
I
et aI., 2002, 2003). Ha Pl1c. 13.6 IIpe.!l.CTaBJIeHhI IIp06JIeMhI, CBSI3aHHhle
GaN; cOBepnlemflUl....:....~ o6JIacn. GaN; nonycOBepmemflUl o6nacT&;rrorrepeqaoe BLIpaIl\HBamfe (150 HM) 06nacn. .n:e$eIcrOB
(50 3apo.LILImeBbIH (GaN mrn AlN) . . (50 HM)
C aKTliBaIIlieH rrpliMeceH B GaN 11 AIGaN, li IIyTI1 liX perneHI1SI. PHC. 13.7: CTpYKTypa .n:Hc~ciKaUHH B3nHTaKCHa~bHOM c~oe GaN, Ha c
CPOpMHpoBa~clI 6ycpepHbIH C~OH GaN H~H AIN. 3TOT C~OH 06b1qHO BbipalI(HBaeTclI npH TeMnepaType 500°C, ropa3.n:o 6o~ee HH3KOH, qeM TeMnepaTypa BbipalI(HBaHHlI noc~e.n:yIOII(HX 3nHTaKCHa~bHbIX c~oeB GaN (Nakamura, Fasol, 1997) PHC.
13.6.
CneumlmqecKHe IIpo6~eMbI, CB1I3aHHble C IIpHMeclIMH p-THrra B GaN, H nyTH HX peIIIeHHlI
06hIQHO IIpoHliKaIOIIIlie .!l.liCJIOKaIIl1li3.neKTpI1QeCKI1 3apSI)KeHhI, II03TOMy 06JIaCTli BOKpyr HliX 3a CQeT .!l.eHCTBliSI KYJIOHOBCKliX CI1JI JIli60 IIpliTSIrMBaIOT, JIl160 OTTaJIKliBaIOT cB060.!l.Hhle HOCI1TeJIli 3apHAoB.
13.5 .
.ll.HCJIOKa~HH B HHTpHAax
III rpynnhI
HaliOOJIee paCilpOCTpaHeHHhIM MaTepliaJIOM IIO.!l.JIO)KeK .!l.JISI 3rrliTaKCliaJIhHOrO BhlpaIIII1BaHliH GaN SIBJISIeTCH caIIcplip, 06JIa.!l.aIOIIIliH rrOCTOSIHHhI-
I) CM. npHopHTeTHble pa60TbI
[4,
5].
JISIeTCSI rrOJIHpHOCThIO .!l.liCJIOKaIIliH li CB060.!l.HhIX HOCliTeJIeH. Ha pliC. 13.8 rrOKa3aHa oTpliIIaTeJIhHO 3apH)KeHHaH JIliHeHHaSI .!l.I1CJIOKaIII1SI, rrpliTHrliBaIOIIIaSI .!l.hlpKli li OTTaJIKliBaIOIIIaSI 3JIeKTpOHhI. Ha pliC. 13.9 rrpe.!l.CTaBJIeHO 113MeHeHlie BO BpeMeHI1 pacrrpe.!l.eJIeHliH HOCliTeJIeli 3apH.!l.OB B 06JIaCTl1 rrOJIO)KI1TeJIhHO 3apH)KeHHOH JII1HeHHOH .!l.liCJIOKaIIlil1. BHaQaJIe, 113-3a pa3HOCTli rrOTeHIIliaJIOB, C03.!l.aHHoH .!l.liCJIOKaIIlieH,
278
Fit. 13. TBepabLe pacmBopbL AlInGaN
13.5. JI,ucJtoKau,uu B HumpUaax III epynnbl a
279 e
06naCTb J(HCnOK~HH
PHC. 30He, PHC.
13.8.
30HHall .lI.HarpaMMa rrOJIyrrpOBO.ll.HHKa, B KOTOPOM HMelOTClI OTpHu:aTeJIb-
HO 3aplI)KeHHble .lI.HCJIOKaU:HH, rrpHTlIrHBalOmHe K ce6e .lI.b1pKH, KOTopble .lI.OJI)KHbI
13.10.
6-
30HHall .lI.HarpaMMa .lI.HCJIOKaU:HH:
a-
.lI.OHOpHble ypOBHH B 3arrp e meHHoH
aKu:eIlTOpHble ypOBHH B 3arrpemeHHoH 30He, B -
.lI.OHOpHble ypOBHH B 30He
rrpOBO.ll.HMOCTH, e - aKu:errTopHble ypOBHH B BaJIeHTHOH 30He. COCTOllHHlI a H 6 rrp HBO.ll.lIT K 6e3b13JIyqaTeJIbHOH peKoM6HHaU:HH, a COCTOllHHlI B H e - He rrpHBO.ll.lIT
peKoM6HHHpoBaTb C 3JIeKTpOHaMH
omcymcmBue U3JlYlf-ameJlbHOU pelWM6uHa/{uu, HO npH 3TOM maM npoucxoaum 6e3bL3JlYlf-ameJlbHaR pelWM6uHa/{UR. npHqHHOH B03HHKHOBeHHfI 06JIaCTeH 3aTeMHeHHfI Ha
.D.OKa3bIBaeT 3JIeKTpOHbI K HeH npHTflrHBaIOTcfI, a .D.b1pKH OTTaJIKHBaIOTCfI OT Hee. O.D.HaKO HaKanJIHBaIOIII.HeCfI 3JIeKTpOHhI nOCTeneHHO 3KpaHHpYIOT 3TY pa3HocTb
B
pe3YJIbTaTe 3JIeK-
KaTO.D.OJIIOMHHeClI.eHTHbIX H306pa2KeHHflX M02KeT 6bITb HenOJIHOe 3KpaHH-
TPOHbI H .D.b1pKH HaqHHaIOT cOBepIIIaTb aKTbI 6e3bI3JIyqaTeJIbHOH peKoM6H-
pOBaHHe pa3HOCTH nOTeHlI.HaJIOB, C03.D.aHHoH .D.HCJIOKall.HeH, "ITO Be.D.eT K
nOTeHlI.HaJIOB, TeM caMbIM CHH)Kafi 6apbep .D.JIfi .D.b1pOK. Hall.HH qepe3 ypOBHH .D.HCJIOKall.HH. PHC.
13.9 nOKa3bIBaeT,
"ITO 3JIeKTpOHHble
ypOBHH .D.HCJIOKall.HH paCnOJI02KeHbI BHyTpH 3anpeIII.eHHOH 30HbI. 3.D.eCb He MO)KeT He B03HHKHYTb Bonpoc, nOqeMY, HeCMOTpfl Ha BbICOKYIO nJIOTHOCTb .D.HCJIOKall.HH, HHTpH.D.bI I
I
:I
HeJIb3f1 O.D.H03HaqHO YTBep2K.D.aTb, "ITO
III
rpynnbI Bce )Ke 06JIa.D.aIOT .D.OBOJIbHO
BbICOKOH 3
OTTaJIKHBaHHIO JIH60 3JIeKTpOHOB, H3JIyqaTeJIbHOH peKOM6HHall.HH.
JIH60 .D.b1POK H TeM
caMbIM
MeIIIaeT
,ll;pyrHM B03M02KHbIM 06bflCHeHHeM BbICOKOH BepOfiTHOCTH H3JIyqaTeJIbHOH peKOM6HHall.HH B HHTpH.D.aX
III
rpynnbI MoryT 6hITb
Ba TBep.D.bIX paCTBopOB, 3
pHaHTOB 06bflcHeHHii: 3Toro flBJIeHHfI 6Y.D.YT npHBe.D.eHbI HH:>Ke. O.D.HaKO HH
BHyTpH paCTBopOB, "ITO HeMHHyeMo npHBO.D.HTK H3MeHeHHIO 3anpeIII.eHHhIX
O.D.HH H3 HHX He MO)KeT CqHTaTbCfI 06III.enpHHflTbIlVI ..
30H. H B03HHKHOBeHHIO JIOKaJIbHbIX nOTeHlI.HaJIbHbIX flM Ha 30HHOH .D.Ha-
O.D.HO H3 B03M02KHbIX 06bflCHeHHH BbICOKOH BepOfiTHOCTH H3JIyqaTeJIbHOH peKOM6HHall.HH B HHTpH.D.aX
III
rpynnbI 3aKJIIOqae'i'cfI B TOM, "ITO 3JIeK-
TpOHHble ypOBHH .D.HCJIOKall.HH pacnOJI02KeHbI 3a npe.D.eJIaMH 3anpeIII.eHHOH 30HbI nOJIynpOBO.D.HHKa, T. e.· B pa3peIIIeHHhIX 30Hax, "ITO H nOKa3aHO Ha pHC.
13.10,8 H
2. 3TO o6bflcHeHHe nO.D.TBep2K.D.aIOT KaTO.D.OJIIOMHHeClI.eHTHble
H306pa2KeHHfI, Ha KOTOPhIX BOKpyr .D.HCJIOKall.HH Ha6JIIO.D.aIOTCfI 3aTeMHeHHble 06JIaCTH. (Rosner et ai.,
1997;
Albrecht et at,
2002).
l1x HaJIHqHe
rpaMMe H B pe3YJIbTaTe BbI3bIBaeT JIH60 npHTflrHBaHHe HOCHTeJIeH, JIH60 HX OTTaJIKHBaHHe (Nakamura, Fasol, et aI.,
1997
a,b).
1997;
B
1996;
Narukawa
H qeTBepHbIX TBep.D.bIX pacTBopoB -
loGaN H AlInGaN. nOTeHlI.HaJIbHble
flMhI npHTflrHBaIOT H ,JIOKaJIH3YIOT HOCHTeJIH, npenflTcTBYfl HX .D.H
13.11
.cxeMaTHqHO npe.D.CTaBJIfieT 30HHYIO .D.HarpaMMY
InGaN C xapaKTepHbIMH
Jl01WJlU3a/{uu HOCUmeJleu.
6
a
Chichibu et ai.,
TaKoe 06bflCHeHHe XOPOIIIO n0.D.X0.D.HT .D.JIfi TPOHHbIX
nOCKOJIbKY nOKa3aHO,
. "ITO
MeTO.D.OM npOCBeqHBaIOIII.eH
3JIeKTpOHHOH
MHKpOCKonHH HenOCpe.D.CTBeHHO onpe.D.eJIHTb
13.9.
6e3bI3JIyqaTeJIbHall peKoM6HHaU:HlI Ha rrOJIO)KHTeJIbHO 3apll)KeHHOH .lI.HC-
JIOKaU:HH. TIoCJIe.ll.OBaTeJIbHOCTb
a-B rrOKa3bIBaeT, "ITO CKOrrJIeHHe 3JIeKTpOHOB 3Kpa-
CHaJIbHbIX CJIOfiX HHTPH.D.OB
III
V-06pa3HbIX
2005),
B KO-
.D.e
rpynnbI npOHCXO.D.HT YMeHbIIIeHHe TOJIIII.HHbI
Kl?aHTOBbIX flM InGaN/GaN. ABTOPbI pa60TbI npe.D.nOJIaraIOT, "ITO 60JIee
HHpyeT pa3HOCTb rrOTeHU:HaJIOB, C03.l1.aHHYlO .lI.HCJIOKaU:HeH, rr03BOJIlIlI .lI.b1pKaM pe-
IIIHpoKafi .3anpeIII.eHHafi 30Ha, cooTBeTcTBYIOIII.afl Y3KHM KBaHTOBbIM flMaM
KOM6HHHpOBaTb C 3JIeKTpOHaMH
InGaN, 3KpaHHpyeT JIHHeHHble .D.HCJIOKall.HH OT nO.D.BH2KHbIX HOCHTeJIeH,
280
13.6. YCfJ-cBemOaUOabt, u3ltY'la/0Ufue Ha altUHaX BOltH 6oJ/.bUte 360 HM
Fit. 13. TBepabte pacm80pbt AlInGaN
281
o6nacTh
L-.r-' HMa AJIJI ~bIpOK
o6nacTb, o6oram;eHHaJI In
PHC. 13.11. 30HHaH .n.HarpaMMa InGaN C KJlaCTepaMH, 06ycJloBJleHHbIMH H36bITKaMH aTOMOB In, B KOTOPbIX JloKaJlH3YlOTCH HOCHTeJlH 3apH.n.oB, qTO MeIIIaeT HM .n.HljJljJYH.n.HpoBaTb K .n.HCJlOKaUHHM IIrrOTHOCTh rorcJIoKaIUlli, CM-2
JIOKaJIH30BaHHblx B IImpOKI1X (rrJIaHapHblx) KBaHTOBbIX flMax InGaN. HMeHHO 3TO rr03BOJIfieT rro.l(.l(ep)fUIBaTb BbICOKHH BHYTpeHHHH KBaHToBbIH BbIXO.l( H3JIyqeHHfI B CTpYKTypax C KBllHTOBbIMH flMaMH .l(aiKe rrpH HaJIHqHH JIHHeHHblx .l(HCJIOKauHH. O.l(HaKO 3Ta MO.l(eJIb He MOiKeT 06bflCHHTb BbICOKI1H BHerriHHH KBaHTOBbIH BbIXO.l( H3JIyqeHHfI TOHKHX rrJIeHOK GaN.
13.12. 3aBHcHMoCTb 3ljJljJeKTHBHOCTH H3J1YQeHHH apceHH.n.oB H ljJOCljJH.n.OB rpylIlIbI OT lIJlOTHOCTH .n.HCJlOKaUHH; olIpe.n.eJleHHOH lIO HMKaM TpaBJleHHH (Lester et aI., 1995). JJ:aHHble .n.JlH HHTPH.n.OB III rpylIlIbI lIoJlyqeHbI aBTopOM KHHrH lIO pe3YJlbTaTaM, lIpHBe.n.eHHblM B pa60Te (Lester et aI., 1995)
PHC.
III
HeCMOTpfl Ha TO, qTO 06bflCHeHHfI BbICOKOH 3cpcpeKTI1BHOCTH HHTPH:nOB III rpyrrrrbI, CrrpaBe.l(JIHBOrO .l(mi: Bcex CJIyqaeB, .l(O CHX rrop He HaH.l(eHO, YCTaHOBJIeHHbIM CqHTaeTCfI TOT cpaKT, qTO 3TH MaTepHaJIbI, a B oco6eHHOCTH CBeTO.l(HO.l(bI CHHero CBeqeHHfI Ha OCHOBe TBep.l(bIX paCTBopOB InGaN/GaN, HMeIOT HH3KYIO qYBCTBHTeJIbHOCTb K HaJIHqHIO B HHX .l(HCJIOKaUHH. I103TOMy TaKHM H3JIyqaTeJIfiM CBOHCTBeHHa BbICOKafi 3cpcpeKTHBHOCTb H3JIyqemifl .l(aiKe rrpH BbICOKOH rrJIOTHOCTH .l(HCJIOKaUHH I). Ha pHC. 13.12 rrOKa3aHbI 3aBHCHMOCTH HOpMHpoBaHHoro BHellIHero KBaHTOBoro BblXO.l(a HeCKOJIbKHX rrOJIyrrpOBO.l(HHKOB THrra AIIIBv (GaAs, AIGaAs, GaP H GaAsP) OT rrJIOT-
Ha .l(Harra30H .l(JIHH BOJIH 400-410 HM. Ha pHC. 13.13 rrOKa3aHa cTpyKTypa rrepBblx YCI>-cBeTO.l(HO.l(OB Ha OCHOBe InGaN, H3JIyqaIOIUHX Ha .l(JIHHe BOJIHbI 370 HM. AKTHBHafi 06JIaCTb TaKHX CBeTO.l(Ho.l(OBrrpe.l(CTaBJIfieT C060H .l(BOHHyIO reTepoCTpYKTYPY InGaN/AIGaN H 6apbepHble CJIOH AIGaN, orpaHHqHBaIOIUHe 3JIeKTpOHbI H .l(blpKH (Mukai et a!., 1998). BOKpyr aKTHBHOH 06JIaCTH H 6apbepHblx CJIOeB paCrrOJIOiKeHbI CJIOH Ha
pHC.
13.14 rrpe.l(CTaBJIeHbI
crreKTpbI
P-
H n-THrra H3 GaN.
H3JIyqeHHfI
YCI>-cBeTO.l(HO.l(a
HOCTH .l(HCJIOKauHH. BHellIHHH KBaHTOBbIH BbIXO.l( GaN rrpHrrJIOTHOCTH .l(HC2 oueHHBaeTCfI B 4% (Lester et a!., 1995). 3aTeMHeHHafi
C .l(JIHHOH BOJIHbI 375 HM B .l(ByX peiKHMax pa6oTbI: HerrpepblBHoM H HM-
JIOKaUHH 10 10 CM-
rrYJIbCHOM. BH.l(eH He6oJIbllIOH C.l(BHr MaKCHMYMa 3JIeKTpOJIIOMHHeCueHUHH
06JIaCTb COOTBeTcTByeT CHHHM CBeTO.l(HO.l(aM Ha OCHOBe InGaN/GaN. ,ll,aH-
B .l(JIHHuHOBOJIHOBYIO CTOPOHY rrpH CMeHe HMrrYJIbCHOrO peiKHMa Ha Herrpe-
Hble Ha pHC. 13.12 rrO.l(TBepiK.l(aIOT MeHbllIYI03aBHcHMqCTb 3cpcpeKTHBHoCTH
pbIBHbIH. 9TOT 3cpcpeKT MOiKHO 06bflCHHTb HarpeBOM aKTHBHOH 06JIaCTH,
H3JIyqeHHfI HHTPH.l(OB III rpyrrrrbI OT iIJIOTHOCTH .l(HCJIOKaUHH rro cpaBHeHHIO C apCeHH.l(aMH H cpoccpH.l(aMH 3THX iKe rpyrrrr.
13.6.
3JIeKTpO.l( p-nma
Y~-cBeTO,ll;HO,ll;bI, H3JIYllaroID;He Ha ,ll;JIHHax BOJIH 60JIbme
360
HM
AKTHBHble 06JIaCTH CBeTO.l(HO.l(OB, H3JIyqaIOIUHX B YCI>-.l(Harra30He .l(JIHH BOJIH 60JIbllIe 360 HM,
06blqHO C03.l(aIOTCfI H3 GaN HJIH InGaN.
YiKe
B 1993 r. 6bIJIH orry6JIHKOBaHbI (Nakamura et a!., 1993a,b, 1994) .l(aHHble
GaN p-THrra, 120 HM AIO,lSGao,8sN p-TflIIa, 60 HM HeJIempOBaHHbIH InGaN, 40 HM AIo,! GaO,9N n-nma, 30 HM
-r=-----..
~
GaN n-TIma, 4,0 MKM 3apO.l(blIIIeBbIH CJIOH
GaN
-{:===========~ camlmpoBruI nO.l(JIO)l(l(a
o TOM, qTO MaKCHMYM KI1,ll, CBeTO.l(HO.l(OB Ha OCHOBe InGaN rrpHXO.l(HTCfI
.
1) 60TbI
0 BJlHHHHH .n.HCJlOKaUHH Ha peKOM6HHaUHIO C.IO. KaplIoBa H .n.p. [6, 7].
B HHTPH.n.HbIX CTpyKTypax CM. pa-
.
PHC. 13.13. TIoCJlOHHaH cTpyKTypa InGaN Y
282
FA.
t
I
13.
g•
1,0 ~ YIP-CBeTO.lUiOJ(
~
InGaN/GaN ~ Ha camlJHpoBoii: 0,8 IIOMOlKKe
lSI
0,6
pe~)-
(HMII)'JILCHbIH pelKHM,O,l%)
§'
a. 0,2
J
~
350
i 1\''\
360
370
380
13.14.
I
YII> CBeTO.lUiO.l\
/.
20
o
y
367
~
CJ(BoiiHoii: / rerepoCTpYKTYPoii: InGaN/GaN Ha camiJHpOBoii: IIOMOlKKe
T=295K
368 370 369 371 372 ,nrrUHa BOJlHLI H3JIY'1eHHJI A., HM
400
,[Vrrrna BOJIHLI A., HM PHC.
II
!5 40
~
390
J,......-.
=
-
283
It
80
:: ~ 60
1\ .
_ 0,4
0
100
I
20MA
rl-(HerrpephIBHbIH
1-20MA
T=295K
1
0,0
13.7. Y(/J-c8emOaUOabl, u3Ay'lalOUjue Ha aAuHax 80JlH oMeHbUle 360 HoM
T8epable pacm80pbl AlInGaN
CneKTpbI H3JIYQeHHH Y
PHC. 13.16. 3aBHcHMoCTb HHTeHCHBHOCTH H3JIYQeHHH Y
KOTOPbIH 06blqHO Be.n.eT K YMeHbUIeHHIO 3anpeIll.eHHOH 30HbI, 'ITO BbI3bIBaeT c.n.BHr MaKCHMYMa JIIOMHHeCueHUHH B .n.JIHHHOBOJIHOBYIO qaCTb cneKTpa. Ha pHC. 13.15 nOKa3aHa 3aBHCHMOCTb HHTeHCHBHOCTH Y
qeHHH cBeTo.n.Ho.n.a OT .n.JIHHbI BOJIHbI. TIPH YMeHbIlIeHHH .n.JIHHbI BOJIHbI Ha6JIIO.n.aeTcH CHH}I{eHHe HHTeHCHBHOCTH H3JIyqeHHH. TaKoe nOBe.n.eHHe MO}l{eT 6bITb CBH3aHO C KOHueHTpaUHeH HH.n.HH, BBe.n.eHHoro B aKTHBHYIO 06JIaCTb.
CBeTo.n.Ho.n.a C .n.JIHHOH BOJIHbI 375 HM OT TOJIIll.HHbI aKTHBHoro CJIOH. BH.n.HO,
TIOJIO}l{HTeJIbHOe BJIHHHHe HH.n.HH Ha BHYTpeHHHH KBaHToBbIH BbIXO.n. CBe-
'ITO MaKCHMaJIbHaH HHTeHCHBHOCTb H3JIyqeHHH .n.OCTHraeTCH npH TOJIIll.HHe
To.n.Ho.n.a CHH2KaeTCH C rra.n.eHHeM ero KOHueHTpaUHH, rr09ToMY HeJIerHpO-
aKTHBHorO CJIOH 30-50 HM. TIpH 9TOM aKTHBHaH 06JIaCTb .n.OJI}I{Ha 6bITb
BaHHble aKTHBHble 06JIacTH GaN HHTeHCHBHOCTbIO H3JIyqeHHH.
CHJIbHO JIempOBaHHOH, 'ITO He06xo.n.HMO .n.JIH 9KpaHHpOBaHHH nOJIHpH3aUH-
(Ag
~ 360 HM) 06JIa.n.aIOT HaHMeHbilieH
OHHbIX nOJIeH. B aKTHBHbIX 06JIaCTHX C TOJIIll.HHOH KBaHTOBbIX HM MeHee 5 HM CHH}I{aeTCH BJIHHHHe npOCTpaHCTBeHHoro pa3.n.eJIeHHH 9JIeKTpOHOB H .n.b1POK. TIo 9TOH npHqHHe CTPYKTYPbI C KBaHTOBbIMH HMaMH H BbITeCHHJIH
13.7.
.n.BoHHble reTepOCTpYKTYPbI.
Y<{)-cBeToAHoAbI, H3JIyqaroIIJ.He Ha AJIHHax BOJIH MeHbme 360 HM
AKTHBHble 06JIaCTH CBeTo.n.Ho.n.OB, H3JIyqaIOIll.HX B Y
%,
XOTH B rrOCJIe.n.HHe ro.n.bI H 3.n.eCb Ha6JIIO.n.aeTcH
3HaqHTeJIbHbIH rrporpecc (Zhang et al., 2002a, 2003; Yasan et al., 2002; Kipshidze et al., 2003; Fischer et al., 2004; Kim et al., 2004; Oder et al.,
YIP-cBeTO.l\UO.l\ CJ(BoiiHoii:
2004; Razeghi, Henini, 2004; Shakya et al., 2004)
reTepOCTpYKTYPoii: InGaN/GaN Ha camlJHpoBoii: IIOMOlKKe, A. = 375 HM
. 50 To~a
100
Ha pHC.
ro Y
T=295K 150
1).
13.17 rrOKa3aHbI crreKTpbI H3JIyqeHHH CBeTo.n.Ho.n.OB .n.aJIbHe-
JIyqeHHH H3JIyqeHHH Ha .n.JIHHe BOJIHbI 290 HM aKTHBHaH 06JIaCTb TaKHX
200
250
aKTUBHOro CJlOl!, HM
PHC. 13.15. 3aBHcHMoCTb HHTeHCHBHOCTH H3JIYQeHHH Y
CBeTo.n.Ho.n.OB 6bIJIa CCPOpMHpoBaHa H3 Tpex KBaHTOBbIX HM Al o,36 Gao,64 N H 6apbepHblx CJIOeB Alo,4sGao,52N. CrreKTp H3JIyqeHHH 9THX CBeTo.n.Ho.n.OB COCTOHT H3 O.n.HOH Y3KOH JIHHHH C rrHKOM Ha .n.JIHHe BOJIHbI 289 HM. O.n.HaKo
I)
0630P nOCJIe.ll.HHX pa60T no Y
[8].
rJt.
284
~o
a
looMA
~
C.L\ c MKJIAlGaN/AlGaN Apeak
HCrrOJIb3YfI MaTpHll,Y CBeTO.L\HO.L\OB (Kim et aI.,
.,
a
200 x 200 MKM2
~lOMA 250
300
350
3y6ll,OB.
&~ ~ $
60JIbIIIHX KOHll,eHTpall,HflX aJIIOMHHHfI OqeHb TPY.L\HO 06eCrreqHTb HH3Koe
,L\nHHa BOJIHhl A, PHC.
13.17.
550
500
rrpaBHJIO, flBJIfllOTCfI ew:e 60JIee IIIHPOK030HHbIMH MaTepHaJIaMH, rrpH P!I3Mep
0"
10-3 .................~...L.~................~........_LJ KpHCTaJlJIa: 250 300 350 400 450 500 550 1,Oxl,O MM2 ,L\nHHa BOJIHhl A,
HM
CneKTpbI H3JIYQeHHlI CBeTo.n:Ho.n:OB .n:aJIeKOrO
corrpOTHBJIeHHe KOHTaKTOB.
-
HM
a-
JIHHeHHbIH MacllITa6,
Y
6 - nOJIyJIOrapH(pM~eCKHH
Ha OCHO-
K CHH:lKeHHIO KBaHTOBOrO BbIXO.L\a. ,lJ.H
MacllITa6. ,UJIlI
Ha MaKCHMaJIhHYIO TOJIW:HHY 6apbepHbIX CJIOeB p-THna.
KpHCTaJIJIOB 60JIbllIOH nJIOIua.n:H HCnOJIb30BaJIHCb KOHTaKTbI rpe6eHQaTOH ljJOpMbI (8) (Fischer et aI.,
/l,u¢¢yau5I. aKl1enmopo8. B rrp0ll,ecce 3rrHTaKCHaJIhHOrO pOCTa BepXHerO 6apbepHoro CJIOfl aKll,eIITOpHhle rrpHMeCH THrra MarHHfI MorYT .L\H
Be AIGaN/ AIGaN C MHOJKeCTBeHHbIMH KBaHTOBbIMH lIMaMH npH pa3Hblx TOKax HHJKeKUHH:
JIH60
IIIHPHHOH 3arrpew:eHHoH 30HbI, a KOHTaKTbl H 6apbepHble CJIOH, KaK
_
450
2004),
., sa
£ 400
Khan,
ConpOmU8JleHUe KOHmaKm08. TIoCKOJIbKY AlGaN 06JIa.L\aeT 60JIbiliOH
a alO-2
25MA
2003;
rrpH rrOMOW:H KOHTaKTOB rpe6eHqaTOrO THrra C 6JIH3KHM pacrrOJIO:lKeHHeM
i~ i5i
p!l3Mep KpHCTaJlJIa:
285
rrpOXO.L\HT B.L\OJIb CJIOfl AlGaN n-THrra. dToro MO:lKHO .L\06HTbCfI JIH60
8
Sl i'i1O-1
= 289 HM
50MA
13.7. Yc[J-c8emOaUOabt, u3JtY'l.alOl4ue Ita aJtUftax 80JtH AteHbUte 360 HAt
13. T8epabte pacm80pbt AlInGaN
2004)
flOmeHI1UaJlbHble 6apbepbl Ha <:emeponepexoaax. 113-3a 60JIhiliOH IIIHpHHbI 3arrpew:eHHOH 30HhI B CBeTO.L\HO.L\aX Ha OCHOBe AlGaN Ha6JIIO.L\a-
i·'.I' 11
npH nocTpoeHHH cneKTpoB .L\aHHbIX CBeTO.L\HO.L\OB B rroJIYJIOrapH
IOTCfI 60JIbiliHe pa3phIBbl 30H Ha reTepOrpaHHll,ax. TIJIaBHOe H3MeHeHHe
MaCIIITa6e Ha HHX MO:lKHO YBH.L\eTb ew:e O.L\HH He60JIbiliOH rrHK B6JIH3H
XHMHqeCKOrO COCTaBa B6JIH3H reTepOrpaHHll, rr03BOJIfleT CHH3HTb corrpo-
330 HM (3,76 3B < E~lGaN). DPH pa3Mepax CBeTO.L\HO.L\OB 200 X 200 MKM2 H 1 x 1 MM2 Harrpfl:lKeHHfI rrpflMoro CMew:eHHfI COOTBeTCTBeHHO COCTaBHJIH 7 B H 6 B rrpH TOKe 20 MA.
'I
I!!
THBJIeHHe 3THX 06JIaCTeH.
flponYCKaHue C8ema. ,lJ.JIfI CHH:lKeHHfI rrepenOrJIow:eHHfI BO BCeX CJIOflX CBeTO.L\HO.L\a He06xo.L\HMO rrO.L\.L\ep:lKHBaTb BbICOKYIO KOHll,eHTpall,HIO aJIIO-
TIPH paccMoTpeHHH Y
MHHHfI, qTO orrpe.L\eJIfleT HX rrp03pa'IHOCTb .L\JIfI H3JIYQeHHfI.
XO.L\HMO 06paTHTh BHHMaHHe Ha CJIe.L\YIOw:ee.
-
Paapbl8bl. TIJIeHKH AlGaN, Bhlpaw:eHHhle Ha nO.L\JIO:lKKaX GaN, Ha-
Aacop6 11 U5I. aJlIOMUHUeM KUCJlOpOaa. AJIIOMHHHH 06JIa.L\aeT CBOHCTBOM rrpHTflrHBaTb
KHCJIOPO.L\,
rr03TOMY
HHfI
AlGaN
HeM
C POCTOM
KOHll,eHTpall,HH
XO.L\flW:HXCfI B HeHarrpfl:lKeHHOM COCTORHHH, H3-3a MeHhilierO rrepHO.L\a KpHCTaJIJIHQeCKOH peIIIeTKH 6Y.L\YT HCrrblTblBaTh Harrpfl:lKeHHe
aJIIOMH-
HHH. TIPH .L\OCTaTOQHO 60JIhiliOH TOJIW:HHe nJIeHKH MorYT pa30pBaThCfI.
TOPbIH
O.L\HaKO rrpH HCrrOJIb30BaHHH .L\JIfI KOMrreHCall,HH Harrpfl:lKeHHH CJIOeB co
CJIoe
(McCluskey et aI.,
B
1998;
TaK:lKe
Wetzel et aI.,
rrOflBJIfleTCfI
H
KHCJIOPO.L\,
2001).
CBepxpeIIIeTKaMH C 60JIhiliOH KOHll,eHTpall,HeH aJIIOMHHHfI, BepOflTHOCTb TaKHX pa3pbIBOB MO:lKHO 3HaQHTeJIbHO CHH3HTb HJIH .L\a:lKe YCTpaHHTh
flp080aUMocmb AlGaN. TIPOBO.L\HMOCTb AlGaN n- H p-THrra CHH:lKaeTCfI
(Hearne et aI.,
C POCTOM MOJIflPHOH .L\OJIH aJIIOMHHHfI, oc06eHHo 3aMeTHO npH MOJIflPHOH .L\OJIe aJIIOMHHHfI 60JIee aI.,
2000;
Jiang, Lin,
30% (Katsuragawa et aI., 1998; Goepfert et 2002). dTO Be.L\eT K rrOBblIIIeHHIO Y.L\eJIbHOrO
2001;
Zhang et ai.,
2002b).
KOMrreH-
rOpa3.L\Q MeHbillee paCTfI:lKeHHe HJIH .L\a:lKe HaXO.L\flTCfI B QYTb C:lKaTOM COCTOflHHH.
B
pa60Te
(Hearne
et
aI.,
2000)
rrpHBe.L\eHa
MeTO.L\HKa
tfHCJIeHHOrO orrpe.L\eJIeHHfI MaKCHMaJIbHO .L\OrrycTHMoH TOJIW:HHbI CJIOfl,
,lJ.JIfI 06JIerqeHHfI JIerHpOBaHHfI MaTepHaJIa
HaXO.L\flw:erOCfI B COCTOflHHH paCTfI:lKeHHfI, npH KOTOPOH pa3pbIBa 3TOrO
aKll,eIITOpaMH rrpHMeHfllOTcfI cBepxpeIIIeTKH Alx Ga l-xN / Aly Ga l-yN.
'I
Han et ai.,
TaKHM 06pa30M, QTO rrOCJIe.L\YIOW:He 3rrHTaKCHaJIbHble CJIOH HCnbIThIBalOT
HHfI CBeTO.L\HO.L\OB. TIp06JIeMbI C rrpOBO.L\HMOCThlO oc06eHHO OW:YTHMbI B CJIOflX AlGaN p-THrra.
2000;
Call,HOHHble cBepxpeIIIeTKH YMeHhilialOT 3HaQeHHfI nOCTOflHHhIX peilleTOK
corrpOTHBJIeHHfI 6apbepHblx CJIOeB H rrOCJIe.L\OBaTeJIbHOrO corrpOTHBJIe-
It
paCTfI~e
KO-
B
CJIOfl He rrpOHCXO.L\HT.
flonepeliHa5I. npo80aUMocmb. B CBeTO.L\HO.L\aX, Bhlpaw:eHHblx Ha .L\H3JIeKTpHqeCKHX rrO.L\JIO:lKKaX co cTaH.L\apTHOH KOH
Ha
pHC.
13.18, a
Alo,15GaO,85N TOJIW:HHOH
6
H
0,9
rrOKa3aHhI
MHKpo<poTorpa
rrJIeHOK
MKM, Bblpaw:eHHblx C rrpHMeHeHHeM nO.L\JIO:lKKH
C KOMneHCall,HOHHOH cBepxperueTKoH H 6e3 Hee. PHC.
13.18,6
COOTBeT-
cTByeT CJIYQalO BhlpaW:HBaHHfI CJIOfl AIGaN, cB060.L\HOrO OT pa3phIBOB, Ha KOMrreHCall,HOHHOH
10
rrO.L\JIO:lKKe
co
cBepxpeilleTKoH
AIN/ Alo,45Gao,55N
H3
rrepHO.L\OB C O.L\HHaKOBoH TOJIW:HHOH 6apbepHoro CJIOfl H KBaHTOBOH flMbI
paBHoH
10
HM.
'
286
rJl. 13. TBep8bte pacmBOpbt AlInGaN
13. 7. Bu6Jlu02pafjJU'leCKUU cnUCOK
287
,lJ.JIH cBeTO.ll.HO.ll.OB C HH3KOH: H Cpe.ll.HeH: 9
2004) orrHcaHa CTpYKTypa CBeTO.ll.HO.ll.a, B .Il.aHHOM CBeTO.ll.HO.ll.e rrpH rrOMOmH
06JIa.ll.aIOmerO BbICOKHM TerrJIOOTBO.ll.OM.
JIa3epa Y.Il.aJIHJIH carr
AIO,lSGaO,8SN 0,9 Ha GaNIA12 0 3
TOJIIIUlHOH
BH6J1HOrpacjlHllecKHH CDHCOK
PHC. 13.18. MHKpmjlOTorpaqmH nJleHOK Alo.15Gao,8~N, BblpaIII.eHHblX C npHMeHeHHeM nOAJlO}){KH C KOMneHcaUHoHHoH cBepxpeIlIeTKoH AIN/Alo,45Gao.5~N (SL) H 6e3 Hee (a). CBepxpeIlIeTKa COCTOHT H3 10 nepHoAoB C OAHHaKOBOH TOJlIII.HHOH 6apbepHoro CJl051 H KBaHTOBOH 51Mbl, paBHoH 10 HM. YrJlbl Me}){AY JlHHH5IMH pa3pbIBa qaCTO paBHbI 60 0 H 1200
(6!
YnpalKHeHHe. PaapbtBbt I10qeMY pa3pblBbl npOHCxOA5IT B 3nHTaKCHaJlbHblX CJl05lX, HcnbIT~BaIOIII.HX AByXOCHoe paCT5I}){eHHe, a He B CJl05lX B COCT05lHHH AByxocHoro C}){aTH5I. OTBeT. 113rH6 nOAJlO}){KH C B03MO}){HbIM nocJleAYIOIII.HM pa3pbIBOM 3nHTaKcHaJlbHblX nJleHOK, HaXOA5IIII.HXC5I B COCT05lHHH paCT5I}){eHH5I, BbICB060}){AaeT 3HeprHIO Aet!>opMaUHH nJleHKH. ,UJl5I 3nHTaKCHaJlbHblX CJlOeB, HCnblTblBaIOIII.HX C}){aTHe, 3HepfH5I Aet!>opMaUHH MO}){eT 6blTb BbICB060}){AeHa JlH60 H3fH60M nOAJlO}){KH H nJleHKH, JlH60 CnJlIOIII.HBaHHeM nJleHKH. I10CKOJlbKY npH C}){aTHH CJlOeB TpeIII.HHaM npocTO HerAe 06pa30BblBaTbC5I, pa3pblBOB nJleHOK, HaXOA5IIII.HXC51 B TaKOM COCT05lHHH, KaK npaBHJlO, He npOHCXOAHT. 3aKJlIOqeHHa51 B rOMoreHHOH 3nHTaKCHaJlbHOH nJleHKe 3HeprH5I Aet!>opMaUHH Bbl3BaHHOH HeCOOTBeTCTBHeM napaMeTpOB peIlIeTOK CJl051 H nOAJlO}){KH, nponopu~o HaJlbHa TOJlIII.HHe 3TOH nJleHKH. I1PH YBeJlHqeHHH TOJlIII.HHbl nJleHKH, HaXOA5IIII.eHC5I B Hanp5l}){eHHOM COCT05lHHH, BcerAa HaXOA5ITC5I TOqKH, B KOTOPblX npOHCXOAH~ BblAeJleHHe 3HepfHH Aet!>opMaUHH, qTO Bblpa}){aeTC5I B B03HHKHOBeHHH AHCJlOKaUHH HeCOOTBeTCTBH5I H pa3pblBax. KpHTHQeCKa51 TOJlIII.HHa rOMoreHHoro 3nHTaKCHaJlbHOro CJl051 npH KOTOPOH B HeM HaQHHaIOT t!>0pMHpOBaTbC5I AHCJlOKaUHH HeCOOTBeTCTBH5I, ~npeAeJl5leTC5I aaKOHOM Mammb/O-BJlauKcJlu (Matthew, Blakeslee, 1976). I1PH YBeJlHQeHHH TOJlIII.HHbl 3nHTaKCHaJlbHOrO CJl051 BblIlIe KpHTHQeCKOrO 3HaQeHH5I B OTAeJlbHblX MeCTax nJleHKH n05lBJl5IIOTC5I pa3pblBbI. B pa60Te (Hearne, ~OOO) npHBeAeHa t!>opMyJla AJl5I oueHKH KpHTHQeCKOH TOJlIII.HHbl nJleHKH, npH KOTOPOH OHa B COCT05lHHH ABYXOCHoro paCT5I}){eHH5I HaQHHaeT pa3pblBaTbC5I. HarrpSDKeHHe rrpHMoro
CMememIH
(Vf)
Y
AIGaN t.IaCTO 3HaQHTeJIbHO rrpeBbIlI1aeT BeJIHQHHY ),
hv / e. B
Ha
OCHOBe
3aBHCHMOCTH
OT CTPYKTYPbI CBeTO.ll.HO.ll.a, 9TO H36bITOt.IHOe HarrpH)KeHHe MO)KeT B03HHKa'rb JIH60 Ha KOHTaKTe p-THrra, JIH60 Ha 6apbepHoM CJIoe AIGaN p-THrra, JIH60 Ha CJIoe AIGaN n-THrra, o6eCrrel.IHBaIOmeM rrOrrepet.IHYIO rrpOBO.ll.HMOCTb, JIH60 Ha YHHrrOJIHpHbIX reTeporrepexo.ll.ax.
Albrecht M., Strunk H. P., Weyher J. L., Grzegory I., Porowski S., and Wosinski T. "Carrier recombination at single dislocations in GaN measured by cathodoluminescence in a transmission electron microscope" l. Appl. Phys. 92, 2000 (2002). Amano H., Kito M., Hiramatsu K, and Akasaki I. "P-type conduction in Mgdoped GaN treated with low-energy electron beam irradiation (LEEBI)" lpn. l. Appl. Phys. 28, L2112 (1989). Ambacher 0., Smart J., Shealy J. R., Weimann N. G., Chu K., Murphy M., Schaff W. J.,Eastman L. F. Dimitrov R., Wittmer L., Stutzmann M., Rieger W. and Hilsenbeck J. "Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures" l. Appl. Phys. 85, 3222 (1999). Ambacher 0., Foutz B., Smart J., Shealy J. R., Weimann N. G., Chu K, Murphy M., Sierakowski A. J., Schaff W. J., Eastman L. F., Dimitrov R., Mitchell A., and Stutzmann M. "Two dimensional electron gases induced by spontaneous and piezoelectric polarization in undoped and doped AIGaN/GaN heterostructures" l. Appl. Phys. 87, 334 (2000). Ambacher 0., Majewski J., Miskys C., Link A., Hermann M., Eickhoff M., Stutzmann M., Bernardini F., Fiorentini V., Tilak V., Schaff W. J, and Eastman L. F. "Pyroelectric properties of AI(In)GaN/GaN hetero- and quantum well structures" l. Phys.: Condens. Matter 14, 3399 (2002). Bernardini F., Fiorentini V., and Vanderbilt D. "Spontaneous polarization and piezoelectric constants of III-V nitrides" Phys. Rev. B 56, RIO 024 (1997). Chichibu S., Azuhata T., Sota T., and Nakamura S. "Spontaneous emission of localized excitons in InGaN single and multiquantum well structures" Appl. Phys. Lett. 69, 4188 (1996). Fischer A. J., Allerman A. A., Crawford M. H., Bogart K. H. A., Lee S. R., Kaplar R. J., Chow W. W., Kurtz S. R., Fullmer K W., and Figiel J. J. "Room-temperature direct current operation of 290 nm light-emitting diodes with milliwatt power levels" Appl. Phys. Lett. 84, 3394 (2004). Gessmann T., Li Y.-L., Waldron E. L., Graff J. W., Schubert E. F., and Sheu J. K "Ohmic contacts to p-type GaN mediated by polarization fields in thin InxGal_xN capping layers" Appl. Phys. Lett. 80; 986 (2002).
288
13.7. Bu6Ilu02paQJU'leCKUU cnUCOK
Til. 13. T8epable pacm80pbl AlInGaN
Goepfert I. D., Schubert E. F., Osinsky A., and Norris P. E. "Demonstration of efficient p-type doping in AlGaN/GaN superlattice structures" Electron. Lett. 35, 1109 (1999). Goepfert I. D., Schubert E. F., Osinsky A., Norris P. E., and Faleev N. N. "Experimental and theoretical study of acceptor activation and transport properties in p-type AlxGal_xN/GaN superJattices" I. Appl. Phys. 88, 2030 (2000). Hangleiter A., Hitzel F., Netzel e., Fuhrmann D., Rossow U., Ade G., and Hinze P. "Suppression of nonradiative recombination by V -shaped pits in GaInN/GaN quantum wells produces a large increase in the light emission efficiency"Phys. Rev. Lett. 95, 127402 (2005). Han J., Waldrip K.E., Lee S. R., Figiel J. J., Hearne S. J., Petersen G. A., and Myers S. M. "Control and elimination of cracking of AlGaN using low-temperature AlGaN interlayers" Appl. Phys. Lett. 78, 67 (2001). Hearne S.J., Han J., Lee S.R., Floro J.A., Follstaedt D., Chason M.E., and Tsong I. S. T. "Brittle-ductile relaxation kinetics of strained AlGaN/GaN heterostructures" Appl. Phys. Lett. 76, 1534 (2000). International Congress on Light, Copenhagen, Denmark (1932}. Jiang H. X. and Lin J. Y. "AlGaN and InAlGaN alloys - epitaxial growth, optical and electrical properties, and applications" Opto-Electron. Rev. 10, 271 (2002). Katsuragawa M., Sota S., Komori M., Anbe C., Takeuchi T., Sakai H., Amano H., and Akasaki I. "Thermal ionization energy of Si and Mg in AlGaN"I. Cryst. Growth 189/190,528 (1998). Khan M. A. "Deep-ultraviolet LEDs fabricated in AlinGaN using MEMOCVD" Proc. SPIE 5530, 224 (2004). Kim K. H., Li J., Jin S. X., Lin J. Y., and Jiang H. X. "III-nitride ultraviolet lightemitting diodes with delta doping" Appl. Phys. Lett. 83, 566 (2003). Kim K. H., Fan Z. Y., Khizar M., Nakarmi M. L., Lin J. Y., and Jiang H. X. "AlGaN-based ultraviolet light-emitting diodes grown on AlN epilayers" Appl. Phys. Lett. 85, 4777 (2004). Kipshidze G., Kuryatkov V., Borisov B., Holtz M., Nikishin S., and Temkin H. "AlGaInN-based ultraviolet light-emitting diodes grown on Si ?111?" Appl. Phys. Lett. 80, 3682 (2002). Kipshidze G., Kuryatkov V., Zhu K., Borisov B., Holtz M., Nikishin S., and Temkin H. "AlN/AlGaInN superJattice light-emitting diodes at 280 nm" I. Appl. Phys. 93, 1363 (2003). Koleske D. D., Coltrin M. E., Cross K. C., Mitchell e. e., and Allerman A" A. "Understanding GaN nucleation layer evolution on sapphire" I. Cry st. Growth 273, 86 (2004). Kozodoy P., Hansen M., DenBaars S. P., and Mishra U. K. "Enhanced Mg doping efficiency in Alo.2Gao.8N/GaN superlattices" Appl. Phys. Lett. 74, 3681 (1999a). Kozodoy P., Smorchkova Y. P., Hansen M., Xing H., DenBaars S. P., Mishra U. K., Saxler A. W., Perrin R., and Mitchel W. e. "Polarization-enhanced Mg doping of AlGaN/GaN superJattices" Appl. Phys. Lett. 75, 2444 (l999b).
289
Kumakura K., Makimoto T., and Kobayashi N. "Low resistance non-alloy ohmic contact to p-type GaN using Mg-doped InGaN contact layer" Phys. Stat. Sol. (a) 188, 363 (2001). Kumakura K., Makimoto T., and Kobayashi N. "Ohmic contact to p-GaN using a strained InGaN contact layer and its thermal stability" lpn. I. Appl. Phys. 42, 2254 (2003). . Lester S. D., Ponce F. A., Craford M. G., and Steigerwald D. A. "High dislocation densities in high efficiency GaN-based light-emitting diodes" Appl. Phys. Lett. 66, 1249 (1995). Li Y.-L., Schubert E. F., Graff J. W., Osinsky A., and Schaff W. F. "Low-resistance ohmic contacts to p-type GaN" Appl. Phys. Lett. 76, 2728 (2000). Matthews J. W. and Blakeslee A. E. "Defects in epitaxial multilayers - III. Preparation of almost perfect multilayers"l. Cryst. Growth 32, 265 (1976). McCluskey M.D., Johnson N.M., Van de Walle e.G., Bour D.P., Kneissl M., and Walukiewicz W. "Metastability of oxygen donors in AlGaN"Phys. Rev. Lett. 80,4008 (1998). Morita D., Yamamoto M., Akaishi K., Matoba K., Yasutomo K., Kasai Y., Sano M., Nagahama S.-I., and Mukai T. "Watt-class high-output-power 365 nm ultraviolet light-emitting diodes" lpn. I. Appl. Phys. 43, 5945 (2004). Mukai T., Morita D., and Nakamura S. "High-power UV GaInN/AlGaN doubleheterostructure LEDs" I. Cryst. Growth 189, 778 (1998). Nakamura S., Senoh M., and MukaiT. "Highly p-type Mg doped GaN films grown with GaN buffer layers" lpn. I. Appl. Phys. 30, Ll708 (1991). Nakamura S., Mukai T., Senoh M., and Iwasa N. "Thermal annealing eff~cts on p-type Mg-doped GaN films" lpn. I. Appl. Phys. 31, Ll39 (1992). Nakamura S., Senoh M., and Mukai T. "P-GaN/N-InGaN/N-InGaN double heterostructure blue-light-emitting diodes" lpn. I. Appl. Phys. 32, L8 (1993a). Nakamura S., Senoh M., and Mukai T. "High-power InGaN/GaN doubleheterostructure violet light emitting diodes" Appl. Phys. Lett. 62, 2390 (1993b). Nakamura S. "Growth of InGaN compound semiconductors and high-power InGaN/AlGaN double heterostructure violet-light-emitting diode" Microelectron.1. 25, 651 (1994). Nakamura S. and Fasol G. The Blue Laser Diode (Springer, Berlin, 1997). ASTOPbl 06cYJKAalOT 3cjJcjJeKTbi JlOKaJlH3au.HH HOCHTeJleH: Ha c. 305 3TOH: KHHfH, a HaqaJlbHble CTaAHH 3nHTaKCHaJlbHOrO pOCTa Ha c. 13. Narukawa Y., Kawakami Y., Fujita S., Fujita S., and Nakamura S. "Recombination dynamics of localized excitons in Ino.2oGao.8oN - Ino.osGao.9sN multiple quantum wells" Phys. Rev. B 55, R 1938 (1997a). Narukawa Y., Kawakami Y., Funato M., FUjita S., Fujita S., and Nakamura S. "Role of self-formed InGaN quantum dots for exciton localization in the purple laser diode emitting at 420 nm" Appl. Phys. Lett. 70, 981 (1997b). Oder T. N., Kim K. H., Lin J. Y., and Jiang H. X. "III-nitride blue and ultraviolet photonic crystal light emitting diodes" Appl. Phys. Lett. 84, 466 (2004). Razeghi M. and Henini M. "Optoelectronic devices: III-nitrides" (Elsevier, Amsterdam, 2004). 10 ct>. E. IIly6epr
290
i
I
'I,I'l,' 'Ii
I
Fit. 13. T8epabte pacm80pbt AlInGaN
Rosner S. J., Carr E. c., Ludowise M. J., Girolami G., and Erikson H. I. "Correlation of cathodoluminescence inhomogeneity with microstructural defects in epitaxial GaN grown by metal-organic chemical-vapor deposition" Appl. Phys. Lett. 70,420 (1997). Schubert E. F., Grieshaber W., and Goepfert I. D. "Enhancement of deep acceptor activation in semiconductors by superlattice doping" Appl. Phys. Lett. 69, 3737 (1996). Shakya J., Kim K. H., Lin J. Y., and Jiang H. X. "Enhanced light extraction in III-nitride ultraviolet photonic crystal light-emitting diodes" Appl. Phys. Lett. 85, 142 (2004). Siozade L., Leymarie J., Disseix P., Vasson A., Mihailovic M., Grandjean N., Leroux M., and Massies J. "Modelling of thermally detected optical absorption and luminescence of (In,Ga)NIGaN heterostructures" Solid State Commun. 115,575 (2000). Smeeton T.M., Kappers M.J., Barnard J.S., Vickers M.E., and Humphreys C.J. "Electron-beam-induced strain within InGaN quantum wells: False indium "cluster" detection in the transmission electron microscope" Appl. Phys. Lett. 83, 5419 (2003). Su Y. K., personal communication at the Second Asia-Pacific Workshop on Widegap Semiconductors (APWS), Hsinchu, Taiwan, March 7-9 (2005). Walukiewicz W., Li S. X., Wu J., Yu K. M., Ager III J. W., Haller E. E., Lu K., and Schaff W. J. "Optical properties and electronic structure of InN and In-rich group III-nitride alloys" !. Cryst. Growth 269, 119 (2004). Wetzel C., Amano H., Akasaki I., Ager III J. W., Grzegory I., and Meyer B. K. "DX-like behavior of oxygen in GaN" Physica B302-303, 23 (2001). Wu J., Walukiewicz W., Yu K. M., AgerJ. W., Haller E. E., Lu H., and Schaff W. J. "Small band gap bowing in Inl-xGaxN alloys" Appl. Phys. Lett. 80, 4741 (2002). . Wu J, Walukievicz W., Yu K. M., Ager III J. W., Li S. X., Haller E. E., Lu H., and Schaff W.J. "Universal bandgap bowing in group-III nitride alloys" Solid State Commun. 127, 411 (2003). Yasan A., McClintock R., Mayes K., Darvish S. R., Kung P., and Razeghi M. "Top-emission ultraviolet light-emitting diodes with peak emission at 280 nm" Appl. Phys. Lett. 81, 801 (2002). Yun F., Reshchikov M. A., He L., King T., MorkoC; H., Novak S. w., and Wei L. "Energy band bowing parameter in AlxGal-xN alloys" !. Appl. Phys. 92, 4837 (2002). Zhang J.P., Chitnis A., Adivarahan V., Wu S., Mandavilli V., Pachipulusu R., Shatalov M., SiminG., Yang J. W., and Khan M. A. "Milliwatt power deep ultraviolet light-emitting diodes over sapphire with emission at 278 nm" Appl. Phys. Lett. 81, 4910 (2002a). Zhang J. P., Wang H. M., Gaevski M. E., Chen C. Q., Fareed Q., Yang J. W., Simin G., and Khan M.A. "Crack-free thick AlGaN grown on sapphire using AlNIAlGaN superlattices for strain management" Appl. Phys. Lett. 80, 3542 (2002b). Zhang J. P., Wu S., Rai S., Mandavilli V., Adivarahan V., Chitnis A., Shatalov M., and Khan M. A. "AlGaN multiple-quantum-w~ll-based deep ultraviolet light-
13. 7. Bu6JluoepaljJU'leCKUU cnUCOK
r
291
emitting diodes with significantly reduced long-wave emission" Appl. Phys.
Lett. 83, 3456 (2003). ,nonOJlHeHHe pe,ll;aKTOpa 1. ,[{aBbI.D:OB B.IO., CMHPHOB A. H., fOHqapYK 11. H., KIOTT P. H., BaH.D:aKOBa M. B., JIYH.D:HH B. B., 3aBapHH E. E. I V. Yu. Davydov, A. N. Smirnov, I. N. Goncharuk, R. N. Kyutt, M. V. Baidakova, V. V. Lundin, E. E. Zavarin II Bandgap of hexagonal InN and InGaN alloys. 10th International Symposium on Nanostructures: Physics and Technology. Proc. SPIE. Vol. 5023. .N'2 1. P. 146-149. 2. ,[{aBbI.D:OB B.IO., CMHPHOB A. H., fOHqapYK 11. H., KIOTT P. H., BaH.D:aKOBa M. B., JIYH.D:HH B. B., 3aBapHH E. E. I Davydov B. Yu., Smirnov A. N., Goncharuk I. N., Kyutt R. N., Baidakova M. V., Lundin V. V., Zavarin E. E. II Band gap of hexagonal InN and InGaN alloys. Phys. Stat. Sol. (b). 2002. Vol. 234, .N'23, P. 975-979. 3. IIIpeTep 1O.f., Pe6aHe 10. T., 3b1KOB B. A., CH.D:OPOB B. r. IIIHPOKo30HHble nOJIynpoBo.D:HHKH. - Cn6.: HaYKa, 2001. - 125 c. 4. CanapHH f. B., 06b1.D:eH C. K., qeTBepHKoBa 11.
10*
14.1.
[JIaBa
14
CIIOHTAHHOE H3JIYQEHHE B PE30HATOPAX
14.1.
I !I II
II
I :I
I
II II \
I
Pa3HoBH,ll;HOCTH cnOHTaHHoro H3JIYQeHHSI
113JIyqaTeJIbHble rrepexo,n:bI, T. e. rrepexo,n:bI 3JIeKTpOHOB C o,n:Horo KBaHTOBoro ypOBHH Ha ,n:pyroH, corrpOB02K,n:alOmHecSI HcrrYCKaHHeM KBaHTOB CBeTa - Q>OTOHOB, SlBJISlIOTCSI OCHOBOH 60JIbIIIHHCTBa Q>YH,n:aMeHTaJIbHbIX rrpoueCCOB B OrrT03JIeKTpOHHbIX YCTpoHcTBax. CymecTBYIOT ,n:Ba pa3JIHqHbIX MexaHH3Ma, B xo,n:e KOTOPbIX MO)l(eT rrpOHcxo,n:HTb HcrrYCKaHHe Q>OTOHOB: cnOHmaflHoe H BblHY3ICaeHHoe H3JIyqeHHe. BrrepBble 3Ta TepMHHOJIOmSl 6bIJIa BBe,n:eHa B pa60Te 3HHIIITeHHa (Einstein, 1917). BbIHY)l(,n:eHHoe H3JIyqeHHe rrpHMeHSleTcSI B rrOJIyrrpoBo,n:HHKOBbIX JIa3epax H cyrrepJIIOMHHeCueHTHblx CBeTo,n:Ho,n:ax. B 1960-x rr. 6bIJIO rrOKa3aHO, qTO pe)l(HM BbIHY)l(,n:eHHoro H3JIyqeHHSI rr03BOJISleT pa,n:HKaJIbHO MeHSlTb H3JIyqaTeJIbHble xapaKTepHcTHKH rrOJIyrrpoBo,n:HHKOB. nepBbIM rrpHMepoM rrpHMeHeHHSI BbIHY)l(,n:eHHoro H3JIyqeHHSI 6bIJIH rrOJIyrrpoBo,n:HHKoBble JIa3ePbI, pa60TalOmHe rrpH KOMHaTHoH TeMrrepaType (Hayashi et ai., 1970) I), H cyrrepJIIOMHHeCueHTHble CBeTo,n:Ho,n:bI (Hall et ai., 1962). TepMHH crrOHTaHHoe H3JIyqeHHe rro,n:pa3YMeBaeT, qTO rrpoueccbI peKOM6HHaUHH rrpOHcxo,n:SlT caMonpOU3BO/lbHO, 6e3 KaKOrO-JIH60 BHeIIIHero BJIHSlHHSI, H Ha caMOM ,n:eJIe CqHTaJIOCb, qTO rrpouecc crrOHTaHHoro H3JIyqeHHSI HeKOHTpOJIHpyeMbIH. O,n:HaKo rrpH H3yqeHHH MHKpOCKOrrHqeCKHX OrrTHqeCKHX pe30HaTopoB, rrpoCTpaHcTBeHHble pa3MepbI KOTOPbIX corrOCTaBHMbI C ,n:JIHHOH BOJIHbI H3JIyqeHHSI, 6bIJIa HaH,n:eHa B03MO)l(HOCTb yrrpaBJIeHHSI TaKHMH xapaKTepHcTHKaMH crrOHTaHHoro H3JIyqeHHSI, KaK HHTeHCHBHOCTb, crreKTpaJIbHaSl qHCTOTa H HarrpaBJIeHHocTb. YrrpaBJIeHHe 3THMH xapaKTepHcTHKaMH rr03BOJISleT rrOBblIIIaTb 6blcTpo,n:eHcTBHe, HPKOCTb H 3Q>Q>eKTHBHoCTb rrOJIyrrpoBo,n:HHKOBbIX H3JIyqalOmHX YCTPOHCTB. B pa60Te (Joannopolous, 1995) ,n:aH 0630p pe30HaTopoB H rrpHBe,n:eHbI xapaKTepHcTHKH HX crrOHTaHHoro H3JIyqeHHSI. B HaCTOSlmee BpeMH peaJIH30BaHo ,n:OBOJIbHO MHoro THrrOB MHKpope30HaTopoB C pa3JIHQHbIMH cTpyKTypaMH H aKTHBHbIMH cpe,n:aMH. B pa60Te (Purcell, 1946) orrHcaHa cTpyKTypa rrepBoro MHKpope30HaTopa ,n:JIH H3JIYQeHHSI BOJIH B BQ-,n:Harra30He, OCHOBHbIMH 3JIeMeHTaMH KOToporo 6bIJIH
ii' 1) eM. rrpHopHTeTHble pa60TbI )1(.11. AJI(pepOBa [1,2].
Pa31tOBUa1tOCmu cn01tma1t1toeo u3Aytte1tUfl
293
MaJible MeTaJIJIHQeCKHe cQ>epbJ. Ho 3TO 6bIJIO TeOpeTHQeCKOe rrpe,n:JIO)l(eHHe, co06meHHH 0 ero rrpaKTHQeCKOH peaJIH3aUHH He HaH,n:eHO. B 1980-x H 1990-x rr. 6bIJIO H3rOTOBJIeHO HeCKOJIbKO BapHaHToB MHKpope30HaTopHbIX CTpyKTyp C pa3HbIMH THrraMH OrrTHQeCKH aKTHBHbIX cpe,n:. B HHX HCrrOJIb30BaJIHCb H3JIYQalOmHe cpe,n:bI Ha OCHOBe OpraHHQeCKHX KpHCTaJIJIOB (De Martini et ai., 1987; Suzuki et ai., 1991), rrOJIyrrpoBo,n:HHKOB (Yablonivitch et ai., 1988; Yokoyama et ai., 1990), ,n:HOKCH,n:a KpeMHHSI, JIempOBaHHOro pe,n:K03eMeJIbHbIMH 3JIeMeHTaMH (Schubert et ai., 1992b; Hunt et ai., 1995b), rrOJIHMepOB (Nakayama et ai., 1993; Dodabalapur et ai., 1994). DbIJIH rrpo,n:eMoHcTpHpoBaHbI H3MeHeHHH BpeMeHHblx, rrpocTpaHcTBeHHblx H crreKTpaJIbHbIX xapaKTepHcTHK crrOHTaHHoro H3JIYQeHHSI B 3THX aKTHBHbIX cpe,n:ax. B HaQaJIe 1990-x rr. rrOSlBHJIHCb rrepBble HH)I(eKUHOHHble cBemOaUOabl C pe30HamopaMu, C03,n:aHHble Ha OCHOBe TBep,n:blx paCTBopOB GaAs (Schubert et ai., 1992b), a QyTb rr03)1(e 6blJlH rrpo,n:eMoHcTpHpoBaHbI CBeTo,n:Ho,n:bI Ha OCHOBe OpraHHQeCKHX MaTepHaJIOB (Nakayama et ai., 1993). B 060HX HCCJIe,n:OBaHHSlX rrpHMeHeHHe pe30HaTopoB rrpHBo,n:HT K CY)l(eHHIO crreKTpaJIbHOH JIHHHH H3JIYQeHHSI. npeHMymecTBa CBeTo,n:Ho,n:OB C pe30HaTopaMH rro cpaBHeHHIO C Tpa,n:HUHOHHbIMH CBeTo,n:Ho,n:aMH 3aKJIIOQalOTCSI B 60JIbIIIeH SlPKOCTH CBeQeHHSI, rrOBblIIIeHHOH crreKTpaJIbHOH QHCTOTe H 60JIee BbICOKOH 3Q>Q>eKTHBHoCTH. HarrpHMep, 6bIJIO rrOKa3aHO, QTO CBeTo,n:Ho,n:bI C pe30HaTopaMH 06JIa,n:a1OT 60JIee QeM Ha rropSl,n:oK 60JIbIIIeH rrJIOTHOCTblO crreKTpaJIbHOH MOmHOCTH (Hunt et ai., 1992, 1995b). B pa60Te (Deppe, Lei, 1992) rrpOaHaJIH3HpOBaHo H3MeHeHHe orrTHQeCKoro YCHJIeHHSI rroBepxHocTHO-H3JIYQalOmHX JIa3epOB C BepTHKaJIbHbIMH pe30HaTopaMH rrpH YBeJIHQeHHH HHTeHCHBHOCTH crrOHTaHHoro H3JIYQeHHSI. npH cpaBHeHHH MaKpope30HaTOpoB,,n:JIHHa KOTOPbIX HaMHoro 60JIbIIIe ,n:JIHHbI BOJIHbI H3JIYQeHHSI (oX Lcav) , C MHKpope30HaTopaMH (oX rv Lcav) OKa3aJIOCb, QTO rrpH THrrHQHOH IIIHpHHe crreKTpaJIbHOH JIHHHH H3JIYQeHHSI GaAs, paBHoH rrpH KOMHaTHOH TeMrrepaType 50 HM, OrrTHQeCKOe YCHJIeHHe MO)l(eT 6bITb YBeJIHQeHO B 2-4 pa3a. nOBbIIIIeHHe YCHJIeHHSI B cTpyKTypax C MHKpope30HaTopaMH ,n:aeT B03MO)l(HOCTb CHH)I(aTb rroporoBbIH TOK JIa3epa. Ba)l(HO OTJIHQaTb H3JIYQeHHe BHyTpli pe30HaTopa OT H3JIYQeHHSI, BbIXo,n:Slmero li3 Hero. I1HTeHcHBHoCTb crrOHTaHHoro H3JIYQeHHSI BHyTpli pe30HaTopa H H3JIYQeHHSI, BbIXO,n:Slmero Qepe3 O,n:HH H3 OTpa)l(aTeJIeH 3a e20 npeae/lbl, MoryT 3HaQHTeJIbHO pa3JIHQaTbcSl. B pe30HaTopax co cpe,n:HHMH 3HaQeHHHMH K03Q>Q>HUHeHTa OTpa)l(eHHSI rrpH YCHJIeHHH crrOHTaHHoro H3JIYQeHHSI BHyTpH pe30HaTopa rrpoHcxo,n:HT YBeJIHQeHHe BbIBo,n:a H3JIYQeHHSI 3a ero rrpe,n:eJIbl. O,n:HaKo rrpH cymecTBeHHOM rrOBblIIIeHHH K03Q>Q>HUHeHTa OTpa)l(eHHSI pe30HaTopa (Jewell et ai., 1988) cYMMapHbIH BbIXO,n: I13JIYQeHHSI 3a ero rrpe,n:eJIbI CHU3ICaemCfl (Schubert et ai., 1996). B rrpe,n:eJIbHOM CJIYQae HCrrOJIb30BaHHSI 3epKaJI C OQeHb BbICOKHM K03Q>Q>HUHeHToM OTpa)l(eHHSI (R 1 = R2 - t 100) BbIXO,n: H3JIYQeHHSI 3a rrpe,n:eJIbI pe30HaTopa CTaHOBHTCSI rrpaKTHQeCKH paBHbIM HYJIIO. ,lI.aJIee 3TOT 3Q>Q>eKT 6y,n:eT 06cY)l(,n:aTbcSl 60JIee rro,n:p06HO.
«
I'
Fit. 14. CnoHmaHHoe USJlY'leHUe
294
B
8 peSOHamOpaX
14.2. PeSOHamOpbt muna r:t>a6pu-flepo
pa60Tax (Kobayashi et ai., 1982, 1985) paccMaTpHBaeTcH YCTPOH-
CTBO, B KOTOPOM rrpm-lCXO)l.HT YCHJIeHHe KO O)l.HOrO THrra BOJIH.
cnOHmaHHOcO
c HyAe8btM nopOcOM (Yokoyama, 1992) H aa (Yablonovitch, 1994). B 06bILIHOM JIa3epe
a
H3JIYLIeHHH TOJIb-
Jla3epa OaHOMOa080cO c8emOaUO-
TaKoe YCTpoikTBO rrOJIYLIHJIO Ha3BaHHe
295
rl
H3MeHeHHe{ 33'" cp
TOJIbKO He60JIbiliaH LIaCTb
r2
CD
£otlt2
cotl t2rl r2ei2q,
@
&ott t2rir~ei4.p
@ £otl t2rtrk6q,
crrOHTaHHO H3JIYLIeHHbIX
B
TaKOM pe30HaTope Bce
« RI=R2=1
6 RI
R2
KaK 3a CLieT crrOHTaHHoro, TaK H BbIHY)I{)l.eHHOrO H3JIYLIeHHH, rrpHBO)l.HT K YCHJIeHHIO
OIITHLIeCKOH MO)l.bI.
B
I
:s:'"
6ecrroporOBOM JIa3epe rrpaKTHLIeCKH
OTCYTCTByeT rropor reHepa~HH, KOTOPWH LIeTKO BH)l.eH Ha 3aBHCHMOCTHX
.v
2vo
2 RI<1,R2<1
BbIXO)l.HOH MOmHOCTH H3JIYLIeHHH OT TOKa B 06bILIHbIX JIa3epaX, LITO H HBJIHeTCH OCHOBHbIM pa3JIHLIHeM crrOHTaHHoro H JIa3epHOro pe)l{HMOB pa60TW.
II
OLIeBH)l.HO, LITO JIa3epbI C HYJIeBbIM rroporOM HMeIOT IIIHPOKYIO 06JIaCTb rrpHMeHeHHH. O)l.HaKO Ha rrpaKTHKe OHH )1.0 CHX rrop peaJIH30BaHbI He 6bIJIH, XOTH HMeIOTCH co06meHHH 0 rrorrbITKax HX C03)1.aHHH (Yokoyama et ai., 1990; Yokoyama, 1992; Numai et ai., 1993).
Vo
AVFSRJ:c~v . Vo
v
2vo
PHC. 14.1. ITpoXO)l{.n:eHHe CBeTOBOH BOJIHbl C aMnJIHTy.n:oH 3JIeKTpHQeCKOrO nOJIH Eo Qepe3 pe30HaTOp
14.2. Pe30HaTopbI THna Cl>a6pH-llepo
<
<
CaMbIH rrpOCTOH OIITHLIeCKHH pe30HaTOp COCTOHT H3 )l.BYX KOrrJIaHapHWX 3epKaJI, pacrrOJIO)l{eHHWX Ha paCCTOHHHH Lcav. OKOJIO CTa JIeT Ha3a)l.
KOr)l.a )l.JIHHa BOJIHbl H3JIyqeHHH HaMHoro 60JIbille )l.JIHHbI MHKpope30HaTo-
H TIepo (Fabri, Perot, 1899)rrepBbIMH H3rOTOBHJIH OIITHLIeCKHe pe30HaTopbI
pa). TIPH HCrrOJIb30BaHHH H)l.eaJIbHbIX (HerrOrJIOmaIOmHx) OTpa)l{aTeJIeH HX
C KOrrJIaHapHbIMH OTpa)l{aTeJIHMH H HCCJIe)l.OBaJIH HX pa60TY.
B
rrepBbIx
pe30HaTopax
»
A.
O)l.HaKO eCJIH paCCTOHHHe
Me)l{)l.y OTpa)l{aTeJIHMH C)l.eJIaTb rrOpH)l.Ka )l.JIHHbI BOJIHW H3JIYLIeHHH, B03HHKaeT HOBoe
YCHJIeHHe orrTHLIeCKoro H3JIYLIeHHH
B aKTHBHOH cpe)l.e BHyTpH pe30HaTopa. MHHHaTIOpHbIe pe30HaTopbI C pa3MepaMH Lcav
B
rv
A LIaCTO
Ha3WBaIOT
MUKpope30HamopaMU.
K03
R2 .
OTpa)l{eHHH,
Tl = 1 - R 1 , TIOCKOJIbKY Me)l{)l.y 3epKaJIaMH rrpOHCXO)l.HT MHoroKpaTHbIe
K03
)l.aHHOM pa3)1.eJIe 6Y)l.YT paCCMOTpeHbI CBOHCTBa caMbIX rrpOCTbIX orr-
THLIeCKHX MHKpope30HaTopOB -
(14.1)
C KOrrJIaHapHbIMH 3epKaJIaMH. TIO)l.P06HYIO
HH<popMa~HIO 06 orrTHLIeCKHX CBOHCTBax pe30HaTopoB
I).
Ha
r)l.e ¢ -
H3MeHeHHe <pa3bI OIITHQeCKOH BOJIHbI rrpH O)l.HOKpaTHOM rrpOXO)l{)l.e-
rrOKa3aHbI cxeMbI, rrOHCHHIOmHe rrpHH~Hrr )l.eHCTBHH pe30-
HHH paCCTOHHHH Me2K)l.y )l.ByMH 3epKaJIaMH, C)l.BHr <pa3 Ha caMHX OTpa)l{aTe-
HaTopOB
JIHX He YQHTbIBaeTCH. MaKCHMaJIbHOe 3HaQeHHe rrporrYCKaHHH )l.OCTHraeTCH
Rl
TOJIbKO rrpH BbIIIOJIHeHHH YCJIOBHH KOHCTPYKTHBHOH HHTep
pHC. H
14.1,a
R2.
H
6
TIJIOCKHe BOJIHbI, pacrrpocTpaHHIOmHecH BHyTpH pe30HaTopa, MO-
ryT HHTep
B
rrepBOM CJIYLIae
3aTyxaIOmHe (3arrpemeHHbIe) MO)l.bI. (PaCCMaTpHBaeTCH cHTya~HH,
I) CM. TaK)I{e YQe6HHK
[3].
KOr)l.a 2¢
=
0,
2n, ...
TIO)l.CTaBJIHH 3TH 3HaQeHHH
B
HaXO)l.HM MaKCHMaJIbHbIH K03
Dt. 14. Cnoftmaftftoe uallY'leftUe
296
PH'-IHblX
Tmax =
i= R2), Tmax
(Rl
,l(JIH HeCHMMeTpH'-IHbIX pe30HaTOpOB
14.3. JIIlOmftOCmb onmU'leCKUX MOa
8 peaOftamOpaX
< I,
a )I,JIH CHMMeT-
297
OaftOMepftOM peaoftamope
rrHKOB rrporrycKaHH5I K lIIHpHHe rrHKa. ylcrrOJIb3YSl 3TO orrpe)l,eJIeHHe H ypaBHeHHe (14.4) rrOJIY'-lHM
1.
YnpalKHeHHe. Onpeaelleftue Koat/lt/luu,ueftma nponYCKaftWl peaoftamopa C/Ja6puJIepo Tpe6yeTcH BblBeCTH ypaBHeHHe (14.1). ,llJIlI :3Toro HaJl.O npH nOMOlIl.H reOMeTpH"IeCKOM nporpeC·CHH, npeJl.CTaBJIeHHOM Ha pHC. 14.1,a, paCC"IHTaTb HHTeHCHBHOCTb BOJIHbl, npOllIeJl.llIeM "Iepe3 pe30HaTOp.
B
8
Q= "IaCTOTa
nHKOB
= 2;;;;·
llIHpHHa nHKa
Lcav.
1I"{!i'iJi; ~ 2;;;;· Lcav • 1 - J RI R2
>.
>.
(14.6)
11"
1 - J RI R2 '
r)l,e lIIHpHHa rrHKa H3MepSleTcSl B e)l,HHHIJ.aX '-IaCTOTbI.
= 0,211", •.. '-IJIeH rrpH KocHHyce B ypaBHeHHH (14.1) MOJKeT 6bITb 3aMeHeH CTerreHHbIM P5I)I,OM: cos2
pa, COCTOSlIII.erO H3 '-IeTblpex rrap pacrrpe)l,eJIeHHbIX 3epKaJI Bp3rra
Tor)l,a 3TO BblpalKeHHe rrpeo6pa3yeTC5I K BH)I,y
Si/Si02,
OKpeCTHOCTH 3Ha'-leHHH
T =
2
.
+ J RI . R2
(14.3)
•
.4
(DBR)
Si02 Si/Si02.
HaHeceHHblX Ha KpeMHHeBYIO rrO)l,JIOJKKY, IJ.eHTpaJIbHOrO CJIOSl
H BepXHero OTpaJKaTeJISl Ha OCHOBe 3epKaJI Bp3rra H3 2,5 rrap
TI·T2 ( J RI . R2)
Ha PHC. 14.2 rrpHBe)l,eH rrpHMep crreKTpa OTpaJKeHHSl MHKpope30HaTo-
Pe30HaHCHa5I )I,JIHHa BOJIHbI rrpH6JIH3HTeJIbHO paBHa 1 MKM. OTpaJKalOIII.a5I crroco6HoCTb Ha pe30HaHcHoH )I,JIHHe BOJIHbI He paBHa HyJIIO H3-3a pa3HHIJ.bI K03
113 Hero
CJIe)l,yeT., '-ITO B6JIH3H pe30HaHca
~
ypaBHeHHeM (14.3), rrpHHHMaeT MaKCHMaJIbHOe 3Ha'-leHHe. K03
~
rrporrYCKaHH5I pe30HaTopa CTaHOBHTC5I paBHblM rrOJIOBHHe MaKCHMYMa rrpH
~ 80
pa CTaHOBHTC5I
[1 -
T. e. KOr)l,a
{RIR2)1/2]j[4{RIR2)1/2J'/2. Rl ~ R2 ~ I,
K03
F
30HaTopa
0
T,
IlpH BbICOKHX 3Ha'-leHHSlX -
Rl
H
CI)
~ 60
S
pe-
Eo<
lI:
CI)
orrpe)l,eJI5IeTCSl KaK OTHOlIIeHHe paCCT05IHHSl MeJK)I,y rrHKaMH
rrOJIOBHHe MaKCHMaJIbHOrO 3Ha'-leHH5I: paCCTOllHHe Me1KJl.Y nHKaMH
113
BblpaJKeHHSl
(14.4)
'"
_11"_
llIHpHHa nHKa
=
2'1/2
11"
0 ~
(!i'iJi; ~
I-JRIR2
• (14.4)
11"
BH)I,HO, '-ITO I1PH 60JIblIIHX 3Ha'-leHHSlX
Rl
a
He C <pa30H.
0,8
1,0
1,2
,lVnrna BOJIHbI
H
R2
Ha rrpaKTHKe '-IaCTO y)l,06Hee pa60TaTb C TaKHMH BeJIH'-IHHaMH, KaK H '-IaCTOTa CBeTa,
0 0,6
I-JRIR2
3epKaJIbHOCTb pe30HaTopa CTaHOBHTC5I BbICOKOH. )I,JIHHa BOJIHbI
40
§ IS: .e- 20 .e-
rrporrYCKaHHSl (MeJKMO)l,OBOrO HHTepBaJIa pe30HaTopa) K lIIHpHHe rrHKa Ha
F=
SilSi02 DBR Si02 SilSi02 DBR IIOAJIOlKKa Si
lI:
R2,
{RIR2)1/2].
(HJIH pa3pelIIalOIII.aSl crroco6HoCTb)
100
1,4
ft.,
1,6
1,8
MKM
PHC. 14.2. CneKTp OTpa1KeHHlI MHKpope30HaTopa, COCTOlllIl.erO H3 Jl.ByX pacnpeJl.eJIeHHblX 3epKaJI 5p3rra (DBR) Si/Si02 H lI.eHTpaJIbHOrO CJIOll Si02. Ha pe30HaHcHOM Jl.JIHHe BOJIHbl (>. ~ 1 MKM) K03cpcpHlI.HeHT OTpa1KeHHSl. pe3Ko naJl.aeT
.ll.JISl rrpeo6pa30BaHHSl
ypaBHeHHH (14.1)-(14.4) K 3THM BeJIH'-IHHaM HCrrOJIb3yeTcSl COOTHOlIIeHHe
;;;; . Lcav 211"->.-
= 211"
;;;; . Lcav . 1/ c '
14.3.
(14.5)
TIJIOTHOCTb OIITHlleCKHX MO~ B O~HOMepHOM pe30HaTope
r)l,e
Lcav -
'-IaCTOTa
)I,JIHHa pe30HaTopa,
CBeTa,
pHC. 14.1, 8 H
Rl = R2 =
n-
rrOKa3aTeJIb
c rrOKa3aHbI Rl
A-
)I,JIHHa BOJIHbI CBeTa B BaKYYMe,
rrpeJIOMJIeHHSl
BHyTpH
pe30HaTopa.
vHa
crreKTpbI rrporrYCKaHHSl pe30HaTopOB C 3epKaJIaMH
< I, R2 <
B
B
3TOM pa3)1,eJIe 6Y)l,eT rrOKa3aHO, KaK Ha OCHOBe H3MeHeHHH rrJIOTHO-
CTH OrrTH'-IeCKHX MO)l, B O)l,HOMepHOM pe30HaTope, HarrpHMep KOrrJIaHapHOM
'-IaCTOTHOM rrpe)l,CTaBJIeHHH paccToSl-
MHKpope30HaTope
c806oaHblM cneKmpallbHblM
'-IeHH5I. CHa'-laJIa 6Y)l,YT o6cYJK)I,aTbCSl
auanaaoHoM VFSR (CM. pHC. 14.1, c). 3epKaJIbHOCTb pe30HaTopa B '-IaCTOTHOM rrpe)l,CTaBJIeHHH orrpe)l,eJISleTCSl KaK: F = VFSR/ tlv.
K H3MeHeHHSlM crrOHTaHHoro H3JIY'-leHHSl B OrrTH'-IeCKH aKTHBHoH Cp e)l,e ,
C
1 H
1.
HHe MeJK)I,y rrHKaMH rrporrycKaHHSl Ha3bIBaeTCSl
Ha rrpaKTHKe BMeCTO K03
a06pomHocmb peaOHamopa
Q,
orrpe)l,eJISleMYIO KaK OTHOlIIeHHe '-IaCTOTbI
pacrrOJIOJKeHHOH BHyTpH MHKpope30HaTopa. IlocJIe 3Toro 6Y)l,YT BbIBe)l,eHbI aHaJIHTH'-IeCKHe COOTHOlIIeHH5I, orrHCbIBalOIII.He crreKTpaJIbHble H HHTerpaJIbHble xapaKTepHcTHKH YCHJIeHHSl H3JIY'-leHHSl. CKOPOCTb crrOHTaHHblX H3JIy-
, 298
TJt. 14.
CnOl-tmaftftoe u3AytteftUe B pe30ftamOpax
14.3. IlAOmftOCmb onmuttecx;ux MOa B OaftOMepftOM pe30ftamOpe
299
qaTenbHhlX rrepexo~oB B OrrTHqeCKH rOMoreHHoH aKTHBHoH cpe~e orrpe~e
1982)
nSleTCSI Bblpa)KeimeM (Yariv,
a
4nF ~ 1 - - - - v FSR -.- - - I
00
Wspant
= Ts;~nt =
f ws~lntP
1tC
(14.7)
(Ill) dill,
o ___ d_V_=_VFSRlF
rne W(l) - CKOPOCTb crrOHTaHHbIX rrepeXO~OB BHyTpH OrrTHqeCKOH MO~hl " spant u u 1, p(lIt) - rrnOTHOCTb OrrTHqeCKHX MO~. B cnyqae rOMoreHHOH orr::HqeCKOH
2n
cpe~bI BpeMSI )KH3HH crrOHTaHHoro H3nyqeHHSI SlBnSleTCSI BenHqHHOH, 06paT-
----~_=:\_--
HOH CKOPOCTH crrOHTaHHoro H3nyqeHHSI. O~HaKo ecnH rrnOTHOCTb OrrTHqeMO~
CKHX
3aBHCHT OT HX opHeHTHpOBKH B rrpOCTpaHCTBe, HarrpHMep B cny-
qae 06beMHoro pe30HaTopa, CKOPOCTb H3nyqeHHSI, orrpe~enSleMaSl Bblpa)Ke-
(14.7),
HHeM
TaK)Ke 3aBHCHT OT HarrpaBneHHSI MO~. YpaBHeHHe
(14.7)
5 . _________________
crrpa-
Be~nHBO TonbKO B rrpe~enax He60nblIlHx rrpoCTpaHcTBeHHhlx yrnoB B~onb
paCqeTa CKOPOCTH H3nyqeHHSI B
orrpe~eneHHoM
0::0:
HarrpaBneHHH, B qaCTHOCTH,
=§!5 is::
~~
rro OrrTHqeCKOH OCH pe30HaTOpa. CKOPOCTb CrrOHTaHHOrO H3nyqeHHSI BHyTpH OITTHqeCKOH MO~bI
~HrronbHbIH
)KHT
MaTpHqHbIH 3neMeHT
ws~lnt ~ByX
HHH, yqaCTBYIOIlI.HX B rrepexo~e (Yariv,
1982).
n03TO(l) rrpH pa3MeIll.eHHH
OrrTHqeCKH aKTHBHOH cpe~bI BHyTpH pe30HaTopa
Wspant H3MeHSlTbCSI He
---:=
L...-_ _ _ _
09<
1 co~ep
3neKTpoHHbIX COCTOSl-
PHC.
14.3.
ITJIOTHOCTb OTITHQeCKHX MO.n. B O.n.HoMePHOM nJIaHapHOM MHKpope30Ha-
Tope (cnJIOlliHall JIHHHlI) H B O.n.HOPO.n.HOM O.n.HOMePHOM npOCTpaHCTBe (lIITpHXOBall JIHHHlI)
(a).
TeopeTHQeCKall cpopMa cneKTpa JIIOMHHeCueHUHH 06beMHoro nOJIynpoBo.n.HHKa
6y~eT. O~HaKO rrpH 3TOM CHnbHO H3MeHSleTCSI rrnOTHOCTb orrTHqeCKHX MO~
p(1I1)'
.nanee 6y~eT rrOKa3aHO, KaK rro BenHqHHe H3MeHeHHSI rrnOTHOCTH
OrrTHqeCKHX
MO~
MO)KHO paCCqHTaTb H3MeHeHHe CKOPOCTH crrOHTaHHoro
H3nyqeHHSI. CHaqana cpaBHHM rrnOTHOCTH OrrTHqeCKHX MO~ B CB060~HOM rrpOCTpaHCTBe H BHyTpH MHKpope30HaTopa. .nnSl rrpOCTOTbI OrpaHHqHMCSI O~HOMep HbIM cnyqaeM KorrnaHapHoro pe30HaTopa
B HHIl.Y
O~HOMepHOH rOMoreHHOH cpe~e rrnOTHOCTb OrrTHqeCKHX MO~ Ha e~H ~nHHbI
H Ha
e~HHHIl.y
qaCTOTbI
orrpe~enSleTCSI
Bblpa)KeHHeM
~
~~
rrpHMeHSlIOT ~nSl
(14.7)
________________ ___,
=0
orrpe~eneHHblx HarrpaBneHHH, HarrpHMep rreprreH~HKynSlpHo OTpa)KaTenSlM B pe30HaTope ct>a6pH-nepo. n03TOMY Bblpa)KeHHe
~~
... ::r r6 !;i3 o::r
B rrnaHapHbIX
(6)
MHKpope30HaTopax OITTHqeCKHe MO~bI SlBnSlIOTCSI ~HCKpeT
HbIMH BenHqHHaMH H 3HaqeHHSI HX qaCTOT HOH MO~bI. Ha pHC.
14.3, a
Bcer~a
KpaTHbI qaCTOTe OCHOB-
CXeMaTHqHO rrOKa3aHa rrnOTHOCTb OrrTHqeCKHX
MO~ BHyTpH rrnaHapHoro MHKpope30HaTopa. OCHOBHOHH rrepBoH Mo~aM cooTBeTcTBYIOT qaCTOTbI 110 H 2110 . .nnSl pe30HaTopa C ~ByMSI MeTannHqeCKHMH OTpa)KaTenSlMH (6e3 3epKan 5p3rra) H co C~BHrOM cpa3 OITTHqeCKHX BonH rrpH OTpa)KeHHH, paBHOM 7J", OCHOBHaSl qaCTOTa 110
=
c/2nL cav ,
orrpe~enSleTCSI
Bblpa)KeHHeM
r~e C - CKOPOCTb CBeTa B BaKYYMe, Lcav - ~nHHa pe30HaTO-
j:>a. npH BbLnOAHeHUU YCAOBUU pe30HaHca qaCTOTa H3nyqeHHSI B OITTHqeCKH
(14.8)
aKTHBHOH
cpe~e BHYTPH pe30HaTopa paBHa qaCTOTe O~HOH H3 ero MO~.
nnOTHOCTb OrrTHqeCKHX MO~ B~onb OCH pe30HaTopa MO)KHO HaHTH rrpH rrOMOIll.H COOTHOIIleHHSI Me)K~y rrnOTHOCTblO MO~ H K03cpCPHIl.HeHTOM rrpo-
r~e
n-
rrOKa3aTenb rrpenOMneHHSI Cpe~bI. YpaBHeHHe
(14.8)
MO)KHO rro-
rrYCKaHHSI MO~bI qepe3 pe30HaTOp
T(II):
nyqHTb C rrOMOIll.bIO rrpHHIl.Hrra rro~06HSI, 06blqHO Hcrronb3yeMoro rrpH BbI-
Bo~e Bblpa)KeHHSI ~nSl rrnOTHOCTH MO~ B cB060~HOM rrpoCTpaHcTBe. Ha pHC.
14.3, a
p(lI) = KT(II),
rrOKa3aH rrocToSlHHbIH ypoBeHb rrnOTHOCTH OrrTHqeCKHX MO~,
orrpe~enSleMbIH paBeHCTBOM
(14.8).
..
YnpaJKHeHHe. RbtBOa ypaBfteftUR nAOmftOCmu onmuttecx;ux MOa. Tpe6yeTclI BbiBeCTH ypaBHeHHe .n.JIlI nJIOTHOCTH OnTHqeCKHX MO.n. B O.n.HOMePHOM npOCTpaHCTBe, T. e. Bblpa)i{eHHe
(14.8).
r~e
K-
(14.9)
KOHCTaHTa. 3HaqeHHe 3TOH KOHCTaHTbI HaXO~SlT, HCXO~SI H3 ycno-
BHH HOPMHPOBKH, HarrpHMep H3 ycnoBHSI CYIll.eCTBOBaHHSI TonbKO O~HOH OITTHqeCKOH
MO~bI. I1crronb3YSl Bblpa)KeHHe
(14.1), ~mI
K03cpcpHIl.HeHTa
rrporrycKaHHSI qepe3 pe30HaTop
Fit. 14. Cnoltmaltltoe U3ltY'leltue
300
8
14.4. CneKmpaAbltble xapaKmepucmuKu yculteltuR. u3ItY'leItUR.
pe30ltamOpaX
F-
r.n.e BbIpa)KeHHe:
TI·T2
(14.10)
1 + RI . R2 - 2JRI . R2 . cos (411"n . Lcav· vic)·
K09cpcpHUHeHT nponyCKaHHSI MaKCHMaJIeH Ha qaCTOTax
(14.16)
KOCHHYC pa3JIO)KHTb B PSl.n. B TOqKe
v
=0
nponopUHOHaJIbHa ero 3epKaJIbHOcTH. ,llJISI MHHHMaJIbHOrO 3HaqeHHSI nJIOTHOCTH OnTHqeCKHX MO.n. nOJIyqHM Bblpa)KeHHe
(1-
4 . _ (RIRd/ . ~) Pmm 2 + ..jRIR2)
v = 0, Yo, 2vO,
= vo/2, 3vo/2, 5vo/2 ....
v
••. H MHHHMaJIeH Ha qaCTOTax
(14.10)
K09cpCPHUHeHT 3epKaJIbHOCTH pe30HaTopa. H3 ypaBHeHHSI
CJIe.n.yeT, qTO B MaKCHMYMe nJIOTHOCTb MO.n. B.n.OJIb OCH pe30HaTopa npSlMo
T(v)=
HHH
301
ECJIH B ypaBHe2 (cos x 1 - x /2),
(1
=
4n
(14.17)
c
nOJIyqHM BbIpa)KeHHe .n.JISI MaKCHMYMa K09cpCPHUHeHTa nponycKaHHSI B BH.n.e IlpH nOMOmH
npH6JIH)KeHHSI JIopeHua:
(14.4) H Pmin:
H3 YCJIOBHSI
(RIR2)3/4 ::::: 1 BbIBO.n.HM
Bblpa)KeHHe .n.JISI
T (v)
=
TI . T2 · ( ..jRI . R2) -I . (411"n· Lcav/c)-2
(l-~) (.,jR 1 • R2) - I .
HHTerpHpySl
p(v)
(47rn.
2
OCH pe30HaTopa 06paTHo nponopUHOHaJIbHa ero 3epKaJIbHOCTH.
Lcav/C)2
Ha pHC.
o
B
14.3
O.n.HoMePHOM
.n.JISI cpaBHeHHSI nOKa3aHbI nJIOTHOCTH OllTHqeCKHX MO.n.
cB06o.n.HOM
npocTpaHcTBe H
B
o.n.HoMepHoM
nJIaHapHOM
pe30HaTope. OTMeTHM, qTO nJIOma.n.H, OrpaHHqeHHbIe npe.n.cTaBJIeHHblMH 3aBHCHMOCTSlMH, paBHbI, T. e. B 060HX CJIyqaSlX Ha6JIIO.n.aeTcSI o.n.HHaKOBaSl Cpe.n.HSISI nJIOTHOCTb MO.n..
00
JJ
(14.18)
H3 KOToporo CJIe.n.yeT, qTO B MHHHMyMe nJIOTHOCTb OnTHqeCKHX MO.n. B.n.OJIb
+v2
BO BceM .n.Hana30He qaCTOT H no BceH .n.JIHHe pe30Ha-
K·
n
Pmin ::::: 11". cF'
(14.11)
Topa, Haxo.n.HM YCJIOBHe cymecTBoBaHHSI e.n.HHcTBeHHoH OnTHqeCKOH MO.n.bl: Lcav
npH6JIH)KeHHOe
(14.12)
p(v)dvdL= 1.
14.4.
-00
CneKTpaJIbHbIe xapaKTepHcTHKH YCHJIeHHB H3JIyqeHHB
BepXHHH H HH)KHHH npe.n.eJIbI HHTerpHpoBaHHSI no qaCTOTe Bbl6paHbI paB-
(14.11) npH v = 0 HMeeT TOJIbypaBHeHHSI (14.9), (14.11) H cpOpMyJIY
HbIMH ±oo H3-3a Toro, qTO BbIpa)KeHHe KO O.n.HH MaKCHMYM. HCnOJIb3YSl HHTerpHpoBaHHSI
f~oo
(a2
+
HaXO)K.n.eHHSI K09CPCPHUHeHTa
x 2 ) -I
dx = 11"/ a,
nOJIyqaeM BbIpa)KeHHe .n.JISI
K:
K = (R 1R2)3/4 . 4n . TIT2 c
(1 - JRIR2).
Ilo.n.CTaBHB 9TO BbIpa)KeHHe B ypaBHeHHe
(14.9),
IlOCKOJIbKY
HHTeHCHBHOCTb
H3JIyqeHHSI
npSlMO nponopUHOHaJIbHa nJIOTHOCTH
(14.7),
Ha
3a.n.aHHoH
OnTHqeCKHX MO.n. -
.n.JIHHe CM.
BOJIHbl
ypaBHeHHe
YBeJIHqeHHe cneKTpaJIbHOH nJIOTHOCTH onpe.n.eJISleTCSI OTHOIIleHHeM
nJIOTHOCTeH MO.n. B o.n.HoMepHoM pe30HaTope H B o.n.HOMepHOM cB060.n.HOM
(14.13)
npoCTpaHcTBe. KaK 6bIJIO nOKa3aHO, cneKTp YCHJIeHHSI pe30HaTopa HMeeT CPOPMY pacnpe.n.eJIeHHSI JIopeHua.
HaH.n.eM nJIOTHOCTb onTH-
Il09ToMY K09CPCPHUHeHT YCHJIeHHSI Ha
pe30HaHcHoH .n.JIHHe BOJIHbI paBeH OTHOIIleHHIO nJIOTHOCTeH OnTHqeCKHX MO.n. B pe30HaTope H BHe ero, T. e.
qeCKHX MO.n. H3JIyqeHHSI B.n.OJIb OCH O.n.HoMepHoro pe30HaTopa:
p (v) = (R 1R 2 )3/4 TIT2
4n
• _.
( 1 - JRIR2 ) . T (v).
(14.19)
(14.14)
C
MO)KHO HaHTH MaKCHMaJIbHYIO H MHHH-
H3 ypaBHeHHSI BH.n.HO, qTO MHKpope30HaTop n03BOJISleT .n.06HTbCSI 3HaqH-
MaJIbHYIO nJIOTHOCTb OnTHqeCKHX MO.n.. ,llJISI MaKCHMYMa nOJIyqHM BbIpa)Ke-
TeJIbHOrO YBeJIHqeHHSI HHTeHCHBHOCTH cnOHTaHHoro H3JIyqeHHSI B.n.OJIb ero
IlpH nOMOmH ypaBHeHHSI
HHe
I,
(14.14)
OCH.
(RIR2)3/4 4n Pmax = (1- ..jRIR2) .~.
(14.15)
YpaBHeHHe
(14.19)
nOKa3bIBaeT
cpe8Hee YBeJIHqeHHe HHTeHCHBHOCTH
H3JIyqeHHSI OT ,lI.Byx OTpa)KaTeJIeH pe30HaTopa. ,llJISI HaXO)K.n.eHHSI YCHJIeHHSI H3JIyqeHHSI TOJIbKO B O,ll.HOM HanpaBJIeHHH He06xo.n.HMO K09CPCPHUHeHT YCH-
HCnOJIb3YSl ypaBHeHHe
(14.4)
npH6JIH)KeHHOe Bblpa)KeHHe .n.JISI
H
COOTHOIueHHe
(R 1R2)3/4 :::::1,
Haxo.n.HM
4
n·F
(14.19),
YMHO)KHTb Ha .n.OJIIO CBeTa, OT-
pa)KeHHOrO OT 3epKaJIa C K09cpCPHUHeHToM OTpa)KeHHSI
Pmax:
Pmax ::::: ;: . -c-,
JIeHHSI, onpe.n.eJISleMblH ypaBHeHHeM
RI
(T. e. Ha
1 - Rd
H pa3.n.eJIHTb Ha cpe.n.HHe nOTepH Ha .n.ByX OTpa)KaTeJISlX 3a O.n.HH nOJIHbIH
(14.16)
npoxo.n. pe30HaTopa (T. e. Ha
1/2[(1 - Rd
+ (1
- R2)]).
,llJISI 60JIbIIlHX
FA. 14. CnOHmal-tftoe U3AYlf.eHUe
302 3HaqeHHH:
RI
14.5. HHmeepaAbHbte xapatcmepucmUlw YCUAeHUft U3AYlf.eHUft
pe30HamOpaX
R2
MO)KHO 3anHCaTb CJIe,ll.YIOlll.ee Bblpa)KeHHe ,lI.JISI K03
H
8
~ ~ . 7r. (RIR2)1/4 . (1-2 Rt).
1 - Rl . 2F I-JRIR2 7r
2-RI-R27r
(I-JRIR2)
7r
6bIJIO
HcnoJIb30BaHO
npH6JIH)KeHHe
1 -
(RIR2)1/2 ~
(1/2)(1 -
- R 1R2) ~
1/2(2 - RI - R2). Tenepb yqTeM B3aHMOCBSl3b Me)K,lI.y CTOSlqHMH BOJIHaMH BHYTPH pe30Ha-
Topa H pacnpe,ll.eJIeHHeM OnTHqeCKH aKTHBHoro MaTepHaJIa no OTHOlIIeHHIO K Y3JIaM H nyqHOCTSIM 3THX BOJIH.
e=
K03
2, eCJIH aKTHBHaSi 06JIaCTb pacnOJIO)KeHa TOqHO B TOqKe nyqHOCTH
CTOSlqeH: BOJIHbI BHyTpH pe30HaTopa. K03
e=
1, eCJIH aKTHBHaSi
06JIaCTb nepeKpwBaeT ,lI.OCTaTOqHO MHoro nepHO,ll.OB CTOSlqeH: OnTHqeCKOH: BOJIHbI. 11, HaKOHeu,
e=
0, KOf,ll.a aKTHBHbIH: MaTepHaJI pacnOJIO)KeH B
Y3JIOBOH: TOqKe CTOSlqeH: BOJIHbI. Tor,ll.a ,lI.JISI K03
e
MO)KeT 6WTb BblqHCJIeHa ITO K03
1,8kT (CM. HarrpHMep, Schubert, 1993), r,ll.e k - rrOCTOSlHHaSi T - a6COJIIOTHaSi TeMrrepaTypa. npH KOMHaTHOH: TeMrrepaTYpe ,lI.JISI ,lI.JIHHbI BOJIHbI H3JIyqeHHSI 900 HM 1,8kT COOTBeTcTByeT lIIHpHHe crreKTpaJIbHOH: JIHHHH .6.An = 31 HM. npH lIIHpHHe pe30HaHCHOH: KpHBOH:
HHKa paBHa
BOJIbUMaHa,
5-10
HM O,ll.Ha qaCTb eCTeCTBeHHoro cneKTpa 6Y,ll.eT YCHJIHBaTbCSI, a ,lI.pyraSi
rrO,ll.aBJISlTbCSI. ECJIH rrpe,ll.rrOJIO)KHTb, qTO eCTeCTBeHHbIH: crreKTp H3JIyqeHHSI HMeeT BH,lI. pacnpe,ll.eJIeHHSI [aycca, MO)KHO BbIBeCTH aHaJIHTHLJeCKOe Bwpa)KeHHe ,lI.JISI BblqHCJIeHHSI K03
60AbUte lIIHpHHbI pe30-
.6.An =
2CT(21n 2) 1/2,
CTaH,lI.apTHOe
OTKJIOHeHHe.
HaHCHOH: KPHBOH:. illHpHHa raYCCOBa crreKTpa paBHa
·,lI.YIOlll.ee Bblpa)KeHHe:
G ~
lIIHPHHY crreKTpa eCTeCTBeHHoro H3JIyqeHHSI. illHpHHa pe30HaHCHOH: KPHBOH ero ,lI.06POTHOCTH.
(14.20) 3,l1.eCb
nee orrpe,ll.eJIHTb, rrpOH30H:,lI.eT JIH B pe30HaTope YCHJIeHHe HHTerpaJIbHOrO H3JIyqeHHSI. .LLJISI paCLJeTa nOJIHOrO YCHJIeHHSI H3JIYLJeHHSI BO BceM ,lI.Harra30He ,lI.JIHH BOJIH He06xo,ll.HMO 3HaTb lIIHPHHY pe30HaHcHoro cneKTpa H
RI:
G ~ 2(1 - Rt} . ~ . F ~ e
303
a
i . ~ . 7r. (R1R2)1/4. (1 -2 Rl) 2
.
Tcav,
(I-JRIR2)
7r
(14.21)
rrHKOBoe
3HaqeHHe
(CT(21f)1/2)-I,
r,ll.e
CT -
.LLJISI K03
T
RI - K03
r,ll.e
G int = ~. G e . .6.A. 2
I
CT •
yI2;
= Ge .
J1fln2 .
Ll)' ,
Ll).n
(14.22)
r,ll.e K03
BpeMSI )KH3HH
HMeeT
)KH3HH cnOHTaHHoro H3JIyqeHHSI. ECJIH cTpyKTypa pe30HaTopa CHH)KaeT
TerpaJIbHOe YCHJIeHHe 3aBHCHT OT lIIHpHHbI crreKTpa eCTeCTBeHHoro H3JIy-
H3JIyqaTeJIbHOe BpeMSI )KH3HH, 3TO BWpa)KaeTCSI B YMeHblIIeHHH YCHJIeHHSI,
qeHHSI aKTHBHOH: Cpe,ll.bI. BeJIHqHHa
qTO OTpa)KaeT K03
K03
(Vredenberg
et
aI.,
KaK
npaBHJIO,
1993).
113
Bcer,ll.a
3Toro
60JIblIIe
MO)KHO
HJIH
C,lI.eJIaTb
Gint ,lI.JISI pa3HWX THrrOB OrrTHLJeCKH aKTHBHbIX MaTepHaJIOB MeHSleTCSI B ,lI.OBOJIbHO lIIHPOKHX rrpe,ll.eJIax. Y3KHe
paBeH
0,9
aTOMHwe crreKTpbI MoryT 6bITb YCHJIeHbI Ha HeCKOJIbKO rrOpSl,ll.KOB (Schubert
BbIBO,ll.,
qTO
et aI., 1992b). C ,lI.pyroH: CTOPOHbI, B MaTepHaJIaX C lIIHpOKHM crreKTpOM
BpeMSI )KH3HH H3JIyqeHHSI B nJIaHapHblx MHKpope30HaTopax onpe,ll.eJISleTCSI
H3JIYLJeHHSI, HarrpHMep KpaCHTeJISIX HJIH rrOJIHMepaX, HHTerpaJIbHOrO YCHJIe-
B OCHOBHOM KOHueHTpaUHeH: HeOCHOBHbIX HOCHTeJIeH:.
HHSI H3JIyqeHHSI MO)KeT H He Ha6JIIO,lI.aTbCSI (de Martini et aI., 1987; Suzuki et aI., 1991). 113 ypaBHeHHSI (14.33) TaK)Ke CJIe,ll.yeT, qTO lIIHpHHa pe30-
14.5.
HaHCHOH: KpHBOH: CHJIbHO BJIHSleT Ha BeJIHqHHY HHTerpaJIbHOrO YCHJIeHHSI.
HHTerpaJIbHbIe xapaKTepHcTHKH YCHJIeHHSI
Y3KaSi pe30HaHCHaSi KpHBaSl, COOTBeTCTBYIOlll.aSl JIH60 BbICOKHM 3HaLJeHHSlM
H3JIYQeHHSI
3epKaJIbHOCTH pe30HaTopa, JIH60 60JIblIIOH: ero ,lI.JIHHe (Hunt et aI., 1992),
.LLJISI MHorHX rrpaKTHqeCKHX CJIyqaeB 60JIee Ba)KHbIM SlBJISleTCSI He yCHJIeHHe H3JIyqeHHSI Ha pe30HaHCHOH: ,lI.JIHHe BOJIHbI, aero cyMMapHoe yCHJIeHHe BO BceM ,lI.Harra30He ,lI.JIHH BOJIH. B
YCA08URX pe30nanca YCHJIeHHe no Mepe yaaAenuR
H3JIyqeHHSI rrpOHCXO,ll.HT B,lI.OJIb OCH pe30HaTopa. O,ll.HaKO
CHH)KaeT
Gint .
DpHMep. CneKmpaAbnble. U unme2paAbnble xapaKmepucmUKU YCUAenUR cmpyKmYPbl C pe30namopOM B KaqeCTBe rrpHMepa rrpH rrOMOlll.H ypaBHeHHH: (14.21) H (14.22) paCCLJH-
om pe30nanca HHteHcHBHOCTb H3JIyqeHHSI HaqHHaeT CHH)KaTbCSI. nOCKOJIb-
TaeM crreKTpaJIbHbIH: H HHTerpaJIbHbIH: K03
KyeCTecTBeHHbIH: crreKTp H3JIyqeHHSI aKTHBHOH: Cpe,ll.bI (6e3 pe30HaTopa)
rrOJIyrrpOBO,ll.HHKOBOH: CTpyKTYPbI C pe30HaTopoM. CqHTaeM, qTO K03
MO)KeT 6bITb rOpa3,l1.0 lIIHpe, qeM pe30HaHCHaSi KpHBaSl, HeB03MO)KHO
3apa-
eHTbI OTpa)KeHHSI 3epKaJI
R1 =
90
%, R2
= 97 %, K03
Fit. 14. CnOHmamWe u3ltytteHUe
304 nytIHOCTeH ~
=
1,5,
a nHKOBoe 3HaqeHHe
T/Tcav ~l. Ge
8 pe30HamOpaX
14.6. 3KcnepUMeHmaltbHbte aaHHbte 06 YCUlteHUU u3ltytteHuR
Tor,lJ.a pa3peIIIaIOmaH cnoc06HOCTb
F=
8
46,
~
no ypaBHeHHIO (14.21) paBHO 68. ilO,lJ.CTaBJIHH 3TO
3HaqeHHe B (14.22) H CqHTaH IIIHPHHY pe30HaHcHoH KPHBOH ~A
=
:.:
~A
=
Ii 6
e:.:
30 HM, HaXO,lJ.HM BeJIHqHHY
Ginl =
TeOpeTHqeCKOrO K03cpCPHI.(HeHTa HHTerpaJIbHOrO ynlJIeHHH 60Te (Schubert et aI., 1994) npHBe,lJ.eHO 3HaqeHHe
G inl =
13.
B
g} 5
H
3KcnepHMeHTaJIbHbiX
3HaqeHHH
06bHCHHIOTCH
pe30HaTOP
T=295K c pe30HaTOpoM --_. 6e3 pe30HaTOpa
:=
5M3B
::!i
fa
"g 3
60JIee IIIHpOKHM
.:= 0
:.:
cneKTpoM eCTeCTBeHHoro H3JIyqeHHH, KOTOPbIH npeBblIIIaJI TeOpeTHqeCKOe 3HaqeHHe
Si/Si02:Er
.,":.:
pa-
5, nOJIyqeHHOe
3KcnepHMeHTaJIbHO ,lJ.JIH aHaJIOmqHOH CTpyKTYPbJ. Pa3JIHqHH TeOpeTHqeCKoro
7
!>
6,5 HM
(Schubert et aI., 1994), a TeOpeTHqecKYIO IIIHPHHY cneKTpa eCTeCTBeHHoro H3JIyqeHHH npH TeMnepaType 300 K
305
1,8kT.
":.: ~
:.:
Ha pHC. 14.3,6 CXeMaTHqHO nOKa3aH cneKTp cnOHTaHHoro H3JIyqeHHH
::s::
06beMHoro nOJIynpOBO,lJ.HHKa. ,UJIH ,lJ.OCTH)KeHHH MaKCHMaJIbHOrO YCHJIeHHH H3JIyqeHHH B,lJ.OJIb OCH pe30HaTopa He06xo,lJ.HMO, qT06bI COBna,lJ.aJIH rrHKH
,lVrnHa BOlIHbI A,
HM
pe30HaHCHOH KPHBOH H crreKTpa eCTeCTBeHHoro H3JIyqeHHH. HcrroJIb30BaHHe JIerHpYIOmHX rrpHMeceH paCIIIHpHeT crreKTp H3JIyqeHHH rrOJIyrrpOBO,lJ.HHKa, 'ITO ,lJ.eJIaeT ero IIIHPHHY 60JIbIIIe TeOpeTHqeCKOrO 3HaqeHHH
1,8kT.
CrreKTpbI CTpyKTyp C KBaHTOBbIMH HMaMH H3-3a cTyrreHqaTOCTH CPYHKI.(HH rrJIOTHOCTH COCTOHHHH rrpaKTHqeCKH BCer,lJ.a Y)Ke
O,7kT.
HH3KHe TeMrre-
PHC. 14.4. CneKTpbI OTOJIIOMHHeCueHUHH CJlOeB Si02, JlerHpOBaHHblx 3p6HeM. Y3KaH JIHHHH cooTBeTcTByeT CJlOIO Si02, pacnOJlOJKeHHoMY B pe30HaTOpe C pe30HaHCOM Ha .n.JlHHe BOJIHbI 1540 HM. BTOPOH cneKTp OTBeqaeT cTpyKType 6e3 pe30HaTopa. Ha6J1IO.n.aeTcH YCHJIeHHe H3JJyqeHHH 60Jlee qeM B 50 pa3 (Schubert et" aI., 1992b)
paTypbI H 06pa30BaHHe 3KCHTOHOB TaK)Ke rrpHBO,lJ.HT K cY)KeHHIO crreKTpa eCTeCTBeHHoro H3JIyqeHHH. il03TOMY ,lJ.06HTbCH BbiCOKHX 3HaqeHHH yCHJIeHHH H3JIyqeHHH MO)KHO HCrrOJIb30BaHHeM CTpyKTyp C KBaHTOBbIMH HMaMH
HOCTb pe30HaTopa
F =
310, 'ITO OKa3aJIOCb HeCKOJIbKO HHJKe paCqeTHOrO
3HaqeHHH 370. ,UJIHHa BOJIHbi B MaKCHMYMe H3JIyqeHHH 3aBHCl1T OT yrJIa.
H HH3KHX .pa60qHX TeMrrepaTYp.
,UaHHaH
yrJIOBaH 3aBHCHMOCTb MO)KeT 6bITb BbIBe,lJ.eHa H3 YCJIOBHH, B COOTBeTCTBHH C KOTOPbIM HOpMaJIbHaH COCTaBJIHIOmaH BOJIHOBOrO BeKTopa
14.6.
3KcrrepHMeHTaJIbHbIe .zr.aHHbIe
06
YCHJIeHHH
H3JIYQeHHB Hero yrJIOBaB 3aBHCHMOCTb
k.l
rrpH co-
6JIIO,lJ.eHHH Tpe60BaHHH pe30HaHca B pe30HaTope ,lJ.OJI)KHa OCTaBaTbCH HeH3MeHHOH He3aBHCHMO OT HarrpaBJIeHHH pacrrpocTpaHeHHH BeKTopa
k.
3TO
YCJIOBHe MO)KeT 6bITb 3arr.HcaHO B BH,lJ.e 3HaqHTeJIbHOrO YCHJIeHHH crrOHTaHHoro H3JIyqeHHH MO)KHO ,lJ.06HTbCH
kcosf} =
rrpH rrOMomH H3JIyqaTeJIeH, eCTeCTBeHHbie crreKTpbI KOTOPbIX HMeIOT BH,lJ.
k.l
(14.23)
Y3KHX JIHHHH. ATOMHbie rrepeXO,lJ.bI B pe,lJ.K03eMeJIbHbiX 3JIeMeHTax xapaKTepH3YIOTCH HMeHHO TaKHMH Y3KHMH crreKTpaJIbHbIMH JIHHHHMH. il03TOMY pe30HaTopbI,
JIerHpOBaHHbie pe,lJ.K03eMeJIbHbIMH
HJIH
271"
271"
(14.24)
Ae (0) . cos f} = Ares'
3JIeMeHTaMH, npeKpaCHO
rrO,lJ.XO,lJ.HT ,lJ.JIH HCCJIe,lJ.OBaHHH YCHJIeHHH H3JIyqeHHH. Ha pHC. 14.4 rrOKa-
Ae -
3aH crreKTp H3JIyqeHHH pe30HaTopa Ha OCHOBe SijSi02 C JIerHpOBaHHoH
r,lJ.e Ares H
3p6HeM aKTHBHOH 06JIaCTbIO Si02, 06JIa,lJ.aIOmerO BbiCOKOH pa3peIIIaIOmeH
f} - nOJIHpHbIH yrOJI (yrOJI BHyTpH pe30HaTopa no OTHOIIIeHHIO K HOpMaJIH
crroc06HOCTbIO (Schubert et aI., 1992b). OTqeTJIHBO BH,lJ.HO 3HaqHTeJIbHOe
K nOBepXHOCTH), nOKa3aHHbIH Ha pHC. 14.5.
CY)KeHHe crreKTpaJIbHOH JIHHHHH YCHJIeHHe H3JIyqeHHH. ilo cpaBHeHHIO co CTPYKTYPOH 6e3 pe30HaTopa ,lJ.aHHbIH H3JIyqaTeJIb nOKa3aJI YBeJIHqeHHe
pe30HaHCHaH ,lJ.JIHHa BOJIHbi H ,lJ.JIHHa BOJIHbi H3JIyqeHHH,
HcrroJIb3YH ypaBHeHHe (14.24) H 3aKOH CHeJIJIHyca
HHTeHCHBHOCTH 60JIee qeM B 50 pa3. Pe30HaTop COCTOHT H3 HH)KHerO 3epKaJIa Bp3rra B BH,lJ.e qeTbIpeX CJIOeB Si/Si02 C paCqeTHOH OTpa)KaIOmeH cnoc06HOCTbIO 99,8 JIaCTH Si02, TOJImHHa
A/2,
%;
(n·
sin f)
= sin e),
nOJIyqHM BbIpa)KeHHe ,lJ.JIH ,lJ.JIHHbl BOJIHbi H3JIyqeHHH:
Ae
= Ares . cos [arcsin
(~ . sin e) ].
(14.25)
aKTHBHoH 06-
JIempOBaHHOH 3p6HeM,H BepxHero 3epKaJIa
,UJIH MaJIbiX yrJIOB 3TO BbIpa)KeHHe MO)KHO ynpocTHTb:
Bp3rra H3 2,5 CJIOeB Si/Si02 C paCqeTHOH OTpa)KaIOmeH cnoc06HOCTbIO 98,5 x
%.
10 15
KOHI.(eHTpaI.(HH 3p6HH B aKTHBHOH 06JIaCTH Si02 COCTaBJIHeT 7,7 x 2 CM- . 3KcnepHMeHTaJIbHO onpe,lJ.eJIeHHaH pa3peIIIaIOmaH cnoc06-
(14.26)
FIt. 14. CnOHmaHHoe u31lytteHue
306
8
pe30Hamopax
14.6. Bu6lluoepal/JUtteCfWU cnucox;
307
R
5
8
~
... 6
R
PMC. 14.5. I1eprreH.D:MKYJIlIpHall M rrapaJIJIeJIbHall COCTaBJIlIIOIlJ,Me BOJIHOBOrO BeKTOpa k rrpM pacrrpocTpaHeHMM CBeTa B pesoHaTope
Ha pHC. 14.6 npe.n:CTaBJIeHa 3aBHCHMOCTb .n:JIHHbI BOJIHbI B MaKcHMYMe H3JIyqeHHlI OT yrJIa
6.
fpaqmK B BH.n:e CnJIOIIIHOM JIHHHH, COOTBeTcTByeT
ypaBHeHHIO (14.25), a IIITPHXOBOM -
B paCqeTaX
ynpoIIIeHHOMY Bblpa)KeHHIO (14.26).
HCnOJIb30BaJIClI nOKa3aTeJIb npeJIOMJIeHHlI, paBHbIM 1,5.
nO.n:06Hall yrJIOBall 3aBHCHMOCTb 6bIJIa HaM.n:eHa .n:JIlI pa3JIHqHbIX nOJIynpOBo.n:HHKOBbIX MaTepHaJIOB. Ha pHc.14.7 nOKa3aHbI cneKTpbI H3JIyqeHHlI pe30HaTopa Ha OCHOBe AlInGaP .n:JIlI pa3HbIX yrJIOB H3JIyqeHHlI (Streubel
1: ~-+---+--620
630
640
650
660
,[\JrnHa BOJIHbI ft.,
670
680
690
HM
PMC. 14.7. CrreKTpbl M3JIYQeHMlI CBeTO.D:MO.D:a C pe30HaTopoM Ha OCHOBe AlinGaP .D:JIlI pa3Hblx rrOJIlIpHbIX yrJIOB. ,UJIMHHOBOJIHOBall QaCTb M3JIYQeHMlI KBaHToBoH lIMbI MCrrycKaeTclI B.D:OJIb OCM pe30HaTopa (~ = 0°). I1sJIYQeHMe 60JIee KOPOTKMX BOJIH pacrrpocTpaHlIeTclI rro.D: HeKOTopbIMM yrJIaMM K OCM. ,UJIlI HaX01K.D:eHMlI IIlMpMHbI crreKTpa FWDH (18 HM) MCrrOJIb30BaJIaCb MHTerpMpYIOIlJ,all cq,epa (Streubel et aI., 2002)
et aI., 2002). OTMeTHM, QTO HaH60JIbiliall HHTeHCHBHOCTb H3JIYQeHHlI Ha6JIIO.n:aeTclI npH yrJIe 30°. 9TO 03HaQaeT, QTO pe30HaHcHall .n:JIHHa BOJIHbI pacnOJIO)KeHa B .n:JIHHHOBOJIHOBOM QaCTH eCTeCTBeHHoro cneKTpa H3JIYQeHHlI nOJIyrrpoBo.n:HHKa. YQeT 3Toro· n03BOJIlIeT rrOJIYQHTb MaKCHMaJIbHYIO MOIIIHOCTb H3JIYQeHHlI (Streubel et aI., 2002).
1600.---.---,----r--~--~--~
pe30Harop Si/Si02 aKTMBHhIH CJIOH: Si02 :Er T=295K
1450~--~--~---L---L--~--~
o
20 YroJI 00, rpa.n:
10
30
PMC. 14.6. 3aBMcMMoCTb .D:JIMHbI BOJIHbI B MaKCMMYMe MSJIYQeHMlI OT rrOJIlIpHOrO yrJIa ~ .D:JIlI rrJIaHapHOro pe30HaTopa Si/Si02 C JIerMpOBaHHoH 3p6MeM aKTMBHOH 06JIaCTbIO Si02 (Schubert et aI., 1992b)
Bu6JIuorpaUlJeCKUH cnUCOK Coldren L. A. and Corzime S. W. Diode Lasers and Photonic Integrated Circuits (John Wiley and Sons, New York, 1995). De Martini F., Innocenti G., Jacobovitz G. R., and Mataloni P. "Anomalous spontaneous emission time in a microscopic optical cavity" Phys. Rev. Lett. 59, 2955 (1987). Deppe D. G. and Lei C. "Spontaneous emission and optical gain in a Fabry-Perot micro cavity" Appl. Phys. Lett. 60, 527 (1992). Dodabalapur A., Rothberg L. J., and Miller T. M. "Color variation with electroluminescent organic semiconductors in multimode resonant cavities" Appl. Phys. Lett. 65, 2308 (1994). Einstein' A. "On the quantum theory of radiation" (translated from German) Z. Phys. 18, 121 (1917). Fabry G. and Perot A. "Theory and applications of a new interference method for spectroscopy" (translated from French) Ann. Chim. Phys. 16, 115 (1899). Hall R. N., Fenner G. E., Kingsley J. D., Soltys T. J., and Carlson R. O. "Coherent light emission from GaAs junctions" Phys. Rev. Lett. 9, 366 (1962). Hayashi I., Panish M. B., Foy P. W., and Sumski S. "Junction lasers which operate continuously at room temperature" Appl. Phys. Lett. 17, 109 (1970). Hunt N. E. J., Schubert E. F., Logan R. A., and Zydzik G. J. "Enhanced spectral power density and reduced linewidth at 1.3 p,m in an InGaAsP quantum well resonant cavity light emitting diode" Appl. Phys. Lett. 61, 2287 (1992). Hunt N. E. J., Schubert E. F., Kopf R. F., Sivco D. L., Cho A. Y., and Zydzik G. J. "Increased fiber communications bandwidth from a resonant cavity light emitting diode emitting at'\ = 940 nm" Appl. Phys. Lett. 63, 2600 (1993).
308
FA. 14. Cnoltmaltltoe u3Jtytteltue
8
pe30ltamOpax
Hunt N. E. J., Schubert E. F., Sivco D. L., Cho A. Y., Kopf R. F., Logan R. A., and Zydzik G. J. "High efficiency, narrow spectrum resonant cavity light-emitting diodes" in Confined Electrons and Photons edited by E. Burstein and C. Weisbuch (Plenum Press, New York, 1995a). Hunt N.E.J., Vredenberg A.M., Schubert E.F., Becker P.c., Jacobson D.C., Poate J.M., and Zydzik G.J. "Spontaneous emission control of Er3+ in Si/Si02 microcavities" in Confined Electrons and Photons edited by E. Burstein and C. Weisbuch (Plenum Press, New York, 1995b). Jewell J. L., Lee Y. H., McCall S. L., Harbison J. P., and Florez L. T. "High-finesse AlGaAs interference filters grown by molecular beam epitaxy" Appl. Phys. Lett. 53, 640 (1988). Joannopoulos J. D., Meade R. D., and Winn J. N. Photonic Crystals (Princeton University Press, Princeton, 1995). Kobayashi T., Segawa T., Morimoto A., and Sueta T. Meeting of the lpn. Soc. of Appl. Phys. Tokyo (1982); see also Yokoyama (1992). Kobayashi T., Morimoto A., and Sueta T. Meeting of the lpn. Soc. of Appl. Phys. Tokyo (1985); see also Yokoyama (1992). Nakayama T., Itoh Y., and Kakuta A. "Organic photo- and electroluminescent devices with double mirrors" Appl. Phys. Lett. 63, 594 (1993).
!I,
Numai T., Kosaka H., OguraI., Kurihara K., Sugimoto M., and Kasahara K. "Indistinct threshold laser operation in a pnpn vertical to surface transmission electrophotonic device with a vertical cavity" IEEE l. Quantum Electron. 29, 403 (1993). Purcell E. M. "Spontaneous emission probabilities at radio frequencies" Phys. Rev. 69, 681 (1946). Saleh B. E. A. and Teich M. C. Fundamentals of Photonics (John Wiley and Sons, New York, 1991). Schubert E. F., Wang Y. H., Cho A. Y., Tu L. w., and Zydzik G. J. "Resonant cavity light emitting diode" Appt. Phys. Lett. 60, 921 (1992a). Schubert E. F., Vredenberg A. M., Hunt N. E. J., Wong Y. H., Becker P. C., Poate J. M., Jacobson D. C., Feldman L. c., and Zydzik G. J. "Giant enhancement in luminescence intensity in Er-doped Si/Si02 resonant cavities" Appl. Phys. Lett. 61, 1381 (1992b). Schubert E. F. Doping in 1II- V Semiconductors p. 512 (Cambridge University Press, Cambridge UK, 1993). Schubert E. F., Hunt N. E. J., Micovic M., Malik R. J., Sivco D. L., Cho A. Y., and Z ydzik G. J. Science 265, 943 (1994). Schubert E.F., Hunt N.E.J., Malik R.J., Micovic M., and Miller D.L. "Temperature and modulation characteristics of resonant cavity light-emitting diodes" IEEE l. Lightwave Technol. 14, 1721 (1996). Streubel K., Linder N., Wirth R., and Jaeger A. "High brightness AlGaInP lightemitting diodes" IEEE l. Set. Top. Quantum Electron. 8, 321 (2002). Suzuki M., Yokoyama H., Brorson S. D., and Ippen E. P. "Observation of spontaneous emission lifetime change of dye-containing LangmuirtBlodgett films in optical microcavities" Appl. Phys. Lett. 58, 998 (1991).
14.6. Bu6Auoepat/JUttecKuU cnUCOK
309
Vredenberg A.M., Hunt N.E.J., Schubert E.F., Jacobson D.C., Poate J.M., and Zydzik G.J. Phys. Rev, Lett. 71,517 (1993). Yablonovitch E., Gmitter T. J., and Bhat R. "Inhibited and enhanced spontaneous emission from optically thin AlGaAs/GaAs double heterostructures" Phys. Rev. Lett. 61, 2546 (1988). . Yablonovitch E. personal communication (1994). Yariv A. Theory and Applications of Quantum Mechanics (John Wiley and Sons, New York, 1982) p. 143. Yokoyama H., Nishi K., Anan T., Yamada H., Boorson S. D., and Ippen E. P. "Enhanced spontaneous emission from GaAs quantum wells in monolithic microcavities" Appl. Phys. Lett. 57, 2814 (1990). Yokoyama H. "Physics and device applications of optical microcavities" Science 256,66 (1992).
.IJ:onOJlHeHHe pe,Zl.aKTOpa 1. AJI
15.1. B8eJeHue u ucmoputteClCue c8eJeHufl
311
Bce nepeQHCJIeHHble npeHMymecTBa CBeTO)l.HO)l.OB C pe30HaTopoM BOCTpe60BaHbI B JIOKaJIbHbIX HHMH
r JIaBa
CKOPOCTHMH
«
5 KM) OllTHQeCKHX CHCTeMax CBH3H co cpe)l.-
nepe)l.aQH
)l.aHHbIX
«
1
f6HT/C).
B
QaCTHOCTH,
B
OnTHQeCKHX CHCTeMax nepe)l.aQH )l.aHHblX Ha KopOTKHe paCCTOHHHH Bce
15
Qame npHMeHHIOTcH nOJIHMepHble OnTOBOJIOKHa. CpaBHHTeJIbHO BbICOKaH HHTeHCHBHOCTb H HanpaBJIeHHOCTb H3JIYQeHHH CBeTO)l.HO)l.OB C pe30HaTO-
CBETO,llHO,llbI C PE30HATOPOM
POM n03BOJIHeT nepe)l.aBaTb HHopMaUHIO Qepe3 OnTHQeCKOe BOJIOKHO Ha )l.OCTaTOQHO 60JIbiliHe paCCTOHHHH. BbICOKaH cneKTpaJIbHaH QHCTOTa TaKHX CBeTO)l.HO)l.OB npHBO)l.HT K YMeHbIIIeHHIO xpOMaTHQeCKOH )l.HCnepCHH, QTO n03BOJIHeT YBeJIHQHBaTb CKOPOCTb nepe)l.aQH )l.aHHbIX. CBeTO)l.HO)l.bI HCnOJIb3YIOTCH B CHCTeMax OnTHQeCKOH CBH3H )l.JIH nepe)l.aQH HHopMaUHH co Cpe)l.HeH CKOPOCTblO Ha paCCTOHHHH MeHbille 5 KM.
15.1.
BBe)l;eHHe H HCTopHlleCKHe CBe)l;eHHB
B
OTJIHQHe
OT JIa3epOB
CBeTO)l.HO)l.bI
06JIa)l.alOT
MeHbilieH
CTOHMOCTblO,
60JIbilieH Ha)l.e2KHOCTblO H MeHbilieH 3aBHCHMOCTblO napaMeTpOB OT TeMY CBeTO)l.HO)l.OB C pe30HaTopOM (RClED) aKTHBHble 06JIaCTH HaXO)l.HTCH
nepaTypbI. CBeTO)l.HO)l.bI C pe30HaTopOM YHaCJIe)l.OBaJIH Bce )l.OCTOHHCTBa
BHYTPH OnTHqeCKHX pe30HaTopOB, OllTHqeCKHH pe30HaTOp 06bIqHO HMeeT
06bIQHbIX CBeTO)l.HO)l.OB. BOJIee Toro, MHorHe HX xapaKTepHCTHKH YJIYQIIIH-
TOJImHHY, paBHYIO nOJIOBHHe HJIH ueJIOH )l.JIHHe BOJIHbI CBeTa, H3JIyqaeMOrO
JIHCb. OTpa2KalOmaH cnoc06HOCTb 3epKaJI, BXO)l.HmHX B COCTaB CBeTO)l.HO)l.OB
CBeTO)l.HO)l.OM, T. e. )l.JIH YCTpoikTB BH)l.HMOrO H HHli>paKpacHoro )l.Hana30HOB
C pe30HaTopOM, HH2Ke, QeM Y OTpa2KaTeJIeH B nOBepXHOCTHO-H3JIYQalOmHX
TOJImHHa pe30HaTopa COCTaBJIHeT )l.OJIH MHKpOMeTpa. Pe30HaHCHaH )l.JIHHa
JIa3epaX C BepTHKaJIbHbIMH pe30HaTopaMH (VCSEl), n03TOMY HX )l.eIIIeBJIe
BOJIHbI COBna)l.aeT C )l.JIHHOH BOJIHbI H3JIyqeHHH aKTHBHOH 06JIaCTH CBeTO-
H3rOTOBHTb. Ha )l.JIHHe BOJIHbI 650 HM, HBJIHlOmeHCH pa60QeH )l.JIH CHCTeM
)l.HO)l.a HJIH 6JIH3Ka K HeH. CnOHTaHHoe H3JIyqeHHe, HcnYCKaeMoe aKTHB-
CBH3H, npHMeHHIOTCH B OCHOBHOM TOJIbKO CBeTO)l.HO)l.bI, QTO CBH3aHO C OT-
HOH 06JIaCTblO, pacnOJI02KeHHOH BHYTPH pe30HaTopa, YCHJIHBaeTCH 3a CqeT
CYTCTBHeM 3epKaJI C OQeHb BbICOKOH OTpa2KalOmeH cnoc06HoCTblO, He06xo-
pe30HaHCHoro 3eKTa.
)l.HMbIX )l.JIH H3rOTOBJIeHHH COOTBeTCTBYlOmHX JIa3epOB C BepTHKaJIbHbIMH
CBeTO)l.HO)l.bI C pe30HaTopOM"":' nepBble YCTPOH-
CTBa, B KOTOPbIX HCnOJIb30BaH npHHUHn YCHJIeHHH cnOHTaHHoro H3JIyqeHHH
pe30HaTopaMH.
B MHKpope30HaTope. Pa3MemeHHe n03BOJIHJIO
CBeTO)l.HO)l.bI C pe30HaTopOM TaK2Ke HCnOJIb3YIOT B YCTpoHcTBax, Tpe-
OnTHqeCKH
YJIyqrrmTb
aKTHBHoro
xapaKTepHCTHKH
MaTepHaJIa CBeTO)l.HO)l.OB
BHYTPH B
pe30HaTopa
HeCKOJIbKO
pa3.
Bo-nep8blX, HHTeHCHBHOCTb H3JIyqeHHH CBeTO)l.HO)l.OB C pe30HaTopOM B)l.OJIb ero OCH, T. e. nepneH)l.HKYJIHPHO nOBepXHOCTH nOJIynpOBO)l.HHKa, npeBbliliaeT
BO-8mopblx, cneKTp H3JIyqeHHH xapaKTepH3yeTcH 60Jlee 8blC01WU cneKmpaJlbliOU ttUcmomou no cpaBHeHHIO co cneKTpaMH 06blqHbIX CBeTO)l.HO)l.OB. B 06blqHbIX HHTeHCHBHOCTb H3JIyqeHHH 06blqHbIX CBeTO)l.HO)l.OB B 2-10 pa3.
CBeTO)l.HO)l.aX IIIHpHHa cneKTpaJIbHOH JIHHHH H3JIyqeHHH onpe)l.eJIHeTCH TenJIOBOH 3HepmeH
kT,
a B CBeTO)l.HO)l.aX C pe30HaTopoM -
)l.06POTHOCTblO on-
THqeCKOrO pe30HaTopa. B pe3YJIbTaTe 3Toro rrmpHHa cneKTpa CBeTO)l.HO)l.OB C pe30HaTopoM B2-5 pa3 MeHbille IIIHpHHbI cneKTpa 06bIQHbIX CBeTO)l.HO)l.OB. no 3TOH 2Ke npHQHHe TeMnepaTypHbIH C)l.BHr )l.JIHHbI BOJIHbI onpe)l.eJIHeTCH TeMnepaTypHbIM K03HUHeHToM OllTHQeCKOrO pe30HaTopa, a He IIIHPHHOH 3anpemeHHOH 30HbI aKTHBHOH 06JIaCTH. Bce 3TO Be)l.eT K 3HaQHTeJIbHOMy nOBblIIIeHHIO TeMnepaTYPHOH cTa6HJIbHOCTH )l.JIHHbI BOJIHbI H3JIYQeHHH CBeTO)l.HO)l.OB C pe30HaTopOM no cpaBHeHHIO C 06bIQHbIMH CBeTO)l.HO)l.aMH.
B-mpembux, )l.HarpaMMa HanpaBJIeHHOCTH CBeTO)l.HO)l.OB C pe30HaTopoM 60JIee Y3KaH, QeM Y 06bIQHbIX CBeTO)l.HO)l.OB. ECJIH B 06bIQHbIX CBeTO)l.HO)l.aX )l.HarpaMMa HanpaBJIeHHOCTH
H3JIYQeHHH
HMeeT BH)I. pacnpe)l.eJIeHHH
no
6YIOmHx BbICOKOH HPKOCTH CBeQeHHH aI.,
2001,
2002).
(Streubel et aI.,
1998; Wirth
et
,L{JIH TaKHX npHMeHeHHH pe30HaHCHaH )l.JIHHa BOJIHbI
CBeTO)l.HO)l.OB BbI6HpaeTcH B )l.JIHHHOBOJIHOBOH QaCTH cneKTpa cnOHTaHHoro H3JIYQeHHH nOJIynpOBO)l.HHKa, QTO 06eCneQHBaeT MaKCHMaJIbHYIO HHTeHCHBHOCTb H3JIYQeHHH BO Bcex HanpaBJIeHHHX B npocTpaHcTBe. YCHJIeHHe cnOHTaHHoro H3JIYQeHHH, npOHCXO)l.Hmee B CTpYKTypax C pe30HaTopaMH, M02KHO C ycnexoM HCnOJIb30BaTb B pa3Hblx THnax CBeTO)l.HO)l.OB: nOJIynpOBO)l.HHKOBbIX H nOJIHMepHblx. nepBble CBeTO)l.HO)l.bI C pe30HaTOPOM Ha OCHOBe TBep)l.bIX pacTBopoB GaAs nOHBHJIHCb B 1992 r. (Schubert et a!., 1992a). npHMepHo Qepe3 ro)l. 6bIJIO co06meHo 06 H3rOTOBJIeHHH CBeTO)l.HO)l.OB )l.aHHOrO THna Ha OCHOBe OpraHHQeCKHX MaTepHaJIOB (Nakayama et a!., 1993). npe)l.npHHHTbI nOnbITKH C03)1.aTb pe30HaTopHble CTPYKTypbI, YCHJIHBaIOmHe cnOHTaHHoe H3JIYQeHHe, Ha OCHOBe MHKpope30HaTopOB, JIempOBaHHbIX 3p6HeM
(Schubert et aI.,
1992b).
¥l3JIYQaTeJIbHble nepeXO)l.bI npH
YQaCTHH aTOMOB 3p6HH xapaKTepH3YlOTCH Y3KOH JIHHHeH JIIOMHHeCueHUHH, cOBna)l.alOmeH C OllTHQeCKOH MO)l.OH pe30HaTopa. ,L{o HaCTOHmero BpeMeHH CBeTO)l.HO)l.bI C MHKpope30HaTopoM, JIempOBaHHbIM 3p6HeM, He C03)1.aHbI.
JIaM6epTY (nO)l.06HO YHKUHH KocHHyca), B CBeTO)l.HO)l.ax C pe30HaTopoM
O)l.HaKO 3TO OQeHb nepcneKTHBHble YCTpOHCTBa, H BbICOKa BepOHTHOCTb
OHO B OCHOBHOM HanpaBJIeHO B)l.OJIb OnTHQeCKOH OCH pe30HaTopa.
Toro, QTO OHH nOHBHTCH B 6JIH2KaHilleM 6Y)l.ymeM.
, I
FA. 15. C8emOaUOabt C pe30HamopOM
312
H ero ~06pOTHOCTH
IIpoeKTHpoBallHe CBeTO,ZJ;HO,ZJ;OB C pe30HaTopoM Ha pHC.
T~-l
CBeTO~Ho~a
313
pe30HamopoM
KOToporo
Lcav
Lactive
1""""-------R2 6apbepHbIR CJIOR
T
BXO~HT
CTpYKTypa CBeTOAHOAa
C peaOHaTopOM, B COCTaB KOToporo BXOAHT ABa MeTaJIJIH'IeCKHX aepKa-
~Ba
3epKaJIa
OTpa}KeHHH
RI
C KOH
R2.
OTpa}KeHHH BbI6paHbI ~JIH Toro, qTo6bI B
BbIXO~HJIO
OCHOBHOM
CTOPOHbI TOJIbKO
O~Horo
AH
Acav -
~JIHHbI BOJIH H3JIyqeHHH, reHepHpyeMoro B aKTHBHOH o6JIa-
A H lIIHpHHa
crreKTpaJIbHOH JIHHHH eCTeCTBeHHoro H3JIyqeHHH ~An HBJIHIOT-
CH rrapaMeTpaMH, orrpe~eJIHeMbIMH aKTHBHOH cpe~oH, H3 ypaBHeHHH (15.2)
3epKaJIa, Ha3b1-
CJIe~yeT, 'ITO rrpH MHHHMaJIbHOH ~JIHHe pe30HaTopa Lcav HHTerpaJIbHaH HHTeHCHBHOCTb H3JIyqeHHH CTaHOBHTCH MaKCHMaJIbHoH.
3epKaJIO C K03
JIa C K03cpcpHUHeHTaMH OTpa)!{eHHH RJ H R2. 3AeCb Lactive - TOJImHHa aKTHBHOH 06JIaCTH, Q - ee K03CP-
TeJIbHee, qTo6bI ee rrOJIO}KeHHe COBrra-
cpHUHeHT IIOrJIOmeHHH. TaK)!{e IIO-
~aJIO C 06JIaCTbIO rryqHOCTH CTOHqeH
KaaaHa CTOH'IaH OllTH'IeCKaH BOJIHa.
OrrTHqeCKOH BOJIHbI pe30HaTopa, KaK rro-
.llJIHHa peaOHaTopa Lcav paBHa ),/2
Ka3aHO Ha pHC. 15.1. TIpe~rrOJIaraeTCH, ~aHHOM CBeTO~Ho~e
MeTaJIJIHqeCKHe 3epKaJIa, rr03TOMY Ha rpaHHlJ.e C HHMH
r~e
CTH, B BaKYYMe H BHyTpH pe30HaTopa. TIOCKOJIbKY ~JIHHa BOJIHbI H3JIyqeHHH
co
BaeMoro c8emonponyclwlO/4UM. ,ILaJIee 6y~eM CqHTaTb, 'ITO TaKHM HBJIHeTCH
'ITO B
(15.2)
B COCTaB
3epKaJIa C pa3HbIMH K03
F
Q:
15.1 rrOKa3aHa cTpyKTypa C pe30HaTopoM,
3
15.1.
C
rrOMOlII.H CooTHolIIeHHH ~JIH K03
15.2.
PHC.
15.2. llpoeICmupo8aHue c8emOaUOa08
PHC. 15.2 rrOHCHHeT rrpaKTHqecKYIO Ba)!{HOCTb CHH}KeHHH ~JIHHbI pe30HaTopa.
TIoKa3aHbI pacrrpe~eJIeHHH rrJIOTHOCTH OrrTHqeCKHX MO~ ~ByX
pe30HaTopoB pa3HoH ~JIHHbI, Ha30BeM HX KOPOTKHM
(a)
H ~JIHHHbIM
(6).
06a pe30HaTopa 06JIa~a1OT O~HHaKOBbIMH K03
15.2,8 rrOKa3aH eCTe-
cTBeHHbIH crreKTp H3JIyqeHHH aKTHBHoH 06JIaCTH. BH~HO, 'ITO KOPOTKHH pe30HaTOp 06eCrreqHBaeT MaKCHMaJIbHOe rrepeKpblTHe pe30HaHCHoro rrHKa rrJIOTHOCTH OrrTHqeCKHX MO~ H crreKTpa H3JIyqeHHH aKTHBHOH 06JIaCTH.
rrpHMeHHIOTCH
aMrrJIHTy~a
~
BOJIHbI
g~
paBHa HYJIIO. C
a
rrpH rrpoeKTHpOBaHHH CBeTO~HO~OB, ~JIH rrOJIyqeHHH MaKCHMaJIbHOrO YCHJIeHHH crrOHTaHHoro H3JIyqeHHH B CTpyKType C pe30HaTopOM (Schubert et ai., 1994, 1996; Hunt et ai., 1995a, 1995b). 9TH rrpaBHJIa rrOMorYT
AJ2-pe30HaTOp
~ ~
~ I ~b:=:===::::!!Z~
(Lcav = 'A/2) 3ePKaJIbHOCTb F
hvo
hv
JIyqlIIe rrOHHTb OCHOBHble rrpHHlJ.HrrbI ~eHCTBHH CBeTO~HO~OB C pe30HaTopOM H BblHCHHTb, qeM OTJIHqalOTCH TaKHe
CBeTO~HO~bI
OT rrOBepxHOCTHO-H3JIY-
qalOlII.HX JIa3epOB C BepTHKaJIbHbIM pe30HaTopOM.
6
nepBoe npaBHJIO. K03
RI
~OJI}KeH 6bITb HaMHoro HH}Ke K03
poro 3epKaJIa
R2 ,
3'A/2-pe30HaTop
(Lcav = 3'A/2) 3epKaJIbHOCTb F
hv
T. e.
(15.1) BbIIIOJIHeHHe 3Toro rrpaBHJIa rapaHTHpyeT, 'ITO CBeT 6y~eT rrOKH~aTb ~HO~
,I ,I , II I,
B OCHOBHOM TOJIbKO qepe3 3epKaJIO C K03
RI •
CO-
6JIIO~eHHe 3Toro rrpaBHJIa oco6eHHO Ba}KHO ~JIH CBeTO~HO~OB, rrpe~Ha3Ha qeHHbIX ~JIH pa60TbI B CHCTeMax CBH3H, r~e CBeT H3JIyqaeTCH B Cep~lJ.eBHHY
MHorOMO~OBoro OrrTHqeCKOrO BOJIOKHa C He60JIblIIHM rrOrrepeqHbIM ceqeHHeM, H ~JIH CBeTO~HO~OB, BXO~HlII.HX B COCTaB ~HCrrJIeeB, CBeT KOTOPblX
~OJI}KeH H3JIyqaTbCH B CTOPOHY Ha6JIIO~aTeJIH. BTopoe npaBHJIO. ,LlJIHHa pe30HaTopa Lcav ~OJI}KHa 6bITb KaK MO}KHO MeHblIIe. ,LlJIH BbIBo~a 3Toro rrpaBHJIa Heo6xo~HMO rrpeo6pa30BaTb Bblpa}KeHHe ~JIH K03
PHC. 15.2. PaCIIpeAeJIeHHe IIJIOTHOCTH OIITH'IeCKHX MOA AByX peaoHaTopoB paaHoH AJIHHbI C OAHHaKOBbIMH K03cpcpHUHeHTaMH aepKaJIbHOCTH F: a - B KOPOTKOM peaoHaTope, 6 - B AJIHHHOM peaOHaTope, 8 - eCTeCTBeHHblM CIIeKTp HaJIY'leHHH aKTHBHOM 06JIaCTH cBeToAHoAOB. KOpOTKHH peaoHaTop 06eCIIe'lHBaeT JIy'lIIIee IIepeKpbITHe peaOHaHcHoro IIHKa IIJIOTHOCTH OIITH'IeCKHX MOA H cIIeKTpa HaJIY'leHHH aKTHBHoM 06JIaCTH IIO cpaBHeHHIO C AJIHHHbIM peaoHaTopOM
Fit. 15. CBemOaUOabt
314
C
15.2. flpoeKmupoBaHue cBemOaUOaOB
pe30HamopOM
=
LIeM KOpOtIe pe30HaTop, TeM 60JlbIIIee YCHJleHlfe H3J1YtIeHHfI MO)KHO rrOJlYtIHTb B HeM, eCJlH rrpH 3TOM MaKCHMYM ero OC1W8ftOU MO.ll.bI COBrra.ll.aeT C MaKCHMYMOM crreKTpa H3J1YtIeHHfI aKTHBHOH Cpe.ll.bI. I1crrOJlb30BaHHe B KatIeCTBe OTpa)KaTeJleH pacrrpe.ll.eJleHHbIX 3epKaJl op3rra C He60JlbiliOH rJlY6HHOH rrpOHHKHOBeHHfI TaK)Ke rr03BOJlfleT YMeHbIIIHTb .lI.JlHHY pe30HaTopa (HarrOMHHM, "ITO 3epKaJIa op3rra COCTOfiT H3 .lI.BYX MaTepHaJIOB C 60JIbiliOH
pe30HamopoM
315
20~------------------------------------------~
I"f 10
pa3HHl1.eH rrOKa3aTeJleH rrpeJIOMJIeHHfI).
C
T=300K IIoBepXHoCTIlo-
H:myqaronnm JIlI3ep c BepTHKaJThHldM
pe30HaTopoM
/=2MA
j2f= 8 MKM
TpeTbe npaBHJIO. neperrOrJIOIII.eHHe H3JIYtIeHHfI BHYTPH aKTHBHoH 06JIaCTH .lI.OJI)KHO 6bITb MHHHMaJIbHbIM. 3TO rrpaBHJlO MO)KHO CCPOPMYJIHpOBaTb
5
TaK: BepofiTHoCTb rrOrJIOIII.eHHfI CPOTOHOB, reHepHpyeMblx B aKTHBHOH 06J1aCTH HHcrrYCKaeMbIX BHYTPb pe30HaTopa, .lI.OJl)KHa 6bITb HaMHoro MeHbilie BepofiTHoCTH BbIX0.ll.a CPOTOHOB tIepe3 O.ll.HH H3 OTpa)KaTeJIeH. npH YCJIOBHH
R2
~
1 3TOT
KpHTepHH MO)KHO 3arrHcaTb B BH.lI.e
J
840
880
860
900
Amrna BOJlHbl A.,
920
940
960
HM
(15.3) PHC.
r.ll.e
a
H Lactive -
ECJIH KpHTepHH
K03cpcpHl1.HeHT rrOrJIOIII.eHHfI H TOJIIII.HHa aKTHBHoH 06JIaCTH.
(15.3)
He 6Y.lI.eT BbIIIOJIHflTbCfI, 60JIbIIIHHCTBO CPOTOHOB,
He .lI.0IIIe.ll.IIIHX .lI.O CBeTorrporrYCKaIOIII.erO 3epKaJIa, 6Y.lI.YT rrOrJIOIII.eHbI B MaTepHaJIe. nOCJIe 3Toro C BbICOKOH BepOfiTHOCTbIO rrpOH30H.lI.eT BTOpHtIHOe
15.3.
CrreKTpbI cnOHTaHHoro H3JIYlJeHHH CBeTOJl.HOJl.a C pe30HaTopoM, pa6OTa-
IOmero Ha Jl.JIHHe BOJIHbI
930
HM, H nOBepxHocTHO-H3JIYlJalOmero JIa3epa C BepTH-
KaJIbHbIM pe30HaTopoM C pa60lJeii Jl.JIHHOii BOJIHbI CJIY'IaHX paBeH
2
850
HM. TOK HH)KeKUHH B 060HX
MA. KpHBaH HHTeHCHBHOCTH H3JIY'leHHH JIa3epa YMHO)KeHa Ha
TIoporoBblii TOK reHepaUHH JIa3epa
Jlh
= 7 MA (Schubert et aI.,
10.
1996)
H3JIYtIeHHe, HO Y)Ke He B OrrTHtIeCKYIO MO.ll.Y pe30HaTopa, a B rrOrrepetIHOM
!
I
!
!
15.3
HarrpaBJIeHHH (BOJIHOBO.ll.Hble MO.ll.bI). npH 3TOM TaK)Ke CYIII.eCTByeT Bepo-
C pe30HaTopaMH. 113 pHC.
flTHOCTb Toro, "ITO 3JIeKTpOHHO-.lI.b1pOtIHble rrapbI, 06pa30BaHHble B rrpOl1.ec-
H3JIYtIeHHfI JIa3epa Y)Ke crreKTpa H3JIYtIeHHfI CBeTO.ll.HO.ll.a. OOJIee BbICOKafi
TaK)Ke CJle.ll.yeT, "ITO crreKTpaJIbHafi JlHHHfI
ce rreperrOrJIOIII.eHHfI CPOTOHOB, 6Y.lI.YT peKOM6HHHpOBaTb 6e3bI3JIYtIaTeJIbHO.
crreKTpaJIbHaSI tIHCTOTa H3JIYtIeHHfI JIa3epOB 06bflCHfleTCfI 60JIee BbICOKHMH
B JII060M CJIYtIae OtIeBH.lI.HO, "ITO rrpOl1.eCCbI rreperrOrJIOIII.eHHfI, rrpOHCXO.ll.fI-
K03cpCPHI.J.HeHTaMH OTpa)KeHHfI 3epKaJl, HCrrOJIb3yeMblx B HHX.
III.He B pe30HaTopax C 60JIbiliOH 3epKaJIbHOCTbIO, CftU:HCalOm 8btXOa usJty'leftuJ/, us pesoftamopa. n03TOMY rrpH HeBbIIIOJIHeHHH KpHTepHfI
(15.3)
MO)KeT
rrpOH30HTH He YCHJIeHHe, a OCJIa6JIeHHe HHTeHCHBHOCTH H3JIYtIeHHSI.
(15.3)
.lI.JIfi CBeTO.ll.HO.ll.OB C pe30HaTopoM TaK)Ke CJIe.ll.yeT
reHep a l1.HH . KaK YTBep)K.lI.aJIOCb BbI IIIe , BCer.ll.a crrpaBe.ll.JIHBO HepaBeHCTBO
O.ll.HaKO TpeTbe rrpaBHJIO .lI.OJI)KHO BbIIIOJIHflTbCSI TOJIbKO .lI.JISI CBeTO.ll.HO.ll.OB C pe30HaTopOM, a He .lI.JIfi JIa3epOB C BepTHKaJIbHbIM pe30HaTopOM. B pa60Te
1996)
113 KpHTepHfI
BbIBO.ll., "ITO TaKHe YCTpOHCTBa He MoryT pa60TaTb B pe)KHMe JIa3epHOH
Igl < lal· CJIe.ll.OBaTeJIbHO, rrOTepH Ha OTpa)KaTeJIe (1 -
RI)
BCer.ll.a 60JIbilie
MaKCHMaJIbHO .lI.OCTH)KHMOrO YCHJleHHfI rrpH .lI.BYKpaTHoM rrpoxo.ll.e pe30Ha-
rrpOBe.ll.eHO cpaBHeHHe HHTeHCHBHOCTH crrOHTaHHoro
Topa 2~gLactive. Hecrroc06HoCTb CBeTO.ll.HO.ll.OB C pe30HaTopoM BXO.ll.HTb B pe-
H3JIYtIeHHfI B CBeT0.ll.HO.ll.aX C pe30HaTopOM H B JIa3epaX C BepTHKaJIbHbIM
)KHM JIa3epHOH reHepal1.HH 6bIJla .lI.OKa3aHa 3KcrrepHMeHTaJIbHo. ,l{JIfi 3Toro
(Schubert et aI.,
pe30HaTopoM. Ha 06a THrra H3JIYtIaIOIII.HX YCTPOHCTB rrO.ll.aBaJiH HH)KeKl1.HOHHbIH TOK
Jth =
7
2
MA, KOTOPbIH MeHbilie rroporoBoro TOKa reHepal1.HH JIa3epa
MA. Ha pHC.
15.3
rrOKa3aHbI crreKTpbI crrOHTaHHoro H3JIYtIeHHfI CBe-
TO.ll.HO.ll.a H rroBepxHocTHO-H3JIYtIaIOIII.erO JIa3epa. B COCTaB JIa3epa BX0.ll.HT aKTHBHafi 06JIaCTb AlGaAs/GaAs C KBaHTOBbIMH flMaMH, H3JIYtIaIOIII.afl CBeT C .lI.JIHHOH BOJIHbI
850
HM, H .lI.Ba 3epKaJIa op3rra AlGaAs/ AlAs. BH.lI.HO, "ITO
HHTeHCHBHOCTb crrOHTaHHoro H3JIYtIeHHfI JIa3epa C BepTHKaJIbHbIM pe30HaTOPOM 60JIee tIeM B
15
pa3 HH)Ke HHTeHCHBHOCTH H3JIYtIeHHfI CBeTO.ll.HO.ll.a.
nOCKOJIbKY BeJIHtIHHa MaKCHMaJlbHOrO YCHJIeHHfI H3J1YtIeHHSI B rrOJIyrrpoBO.ll.HHKaX BCer.ll.a MeHbilie BeJlHtIHHbI K03CPCPHl1.HeHTa rrOrJIOIII.eHHSI B rrOJIYrrpOBO.ll.HHKaX 6e3 HaKatIKH
(Igl < laD,
rrpH BbIIIOJIHeHHH YCJIOBHfI
(15.3)
JIa3ep C BepTHKaJlbHbIM pe30HaTopoM reHepHpoBaTb H3JIYtIeHHe He MO)KeT. n03TOMY HHTeHCHBHOCTb crrOHTaHHoro H3JIYtIeHHfI TaKHX JIa3epOB .lI.JlfI OCYIII.eCTBJIeHHfI reHepal1.HH CBeTa aoJt:HCfta 6btmb ftU:HCe, tIeM Y CBeTO.ll.HO.ll.OB
Ha HHX rrO.ll.aBaJiH HMrrYJIbCbI HH)KeKl1.HOHHoro TOKa 60JIbiliOH aMrrJIHTY.lI.bI. HHKaKHx rrpH3HaKoB B03HHKHOBeHHfI JIa3epHOH reHepal1.HH B CBeT0.ll.HO.ll.aX rrpH 3TOM 06HapY)KeHO He 6bIJIO. 113 CKa3aHHoro MO)KHO C.lI.eJIaTb BbIBO.ll., "ITO CBeTO.ll.HO.ll.bI C pe30HaTopOM H rrOBepXHOCTHO-H3JIYtIaIOIII.He Jla3epbI C BepTHKaJlbHbIM pe30HaTopOM HMeIOT pa3Hble cpH3HtIeCKHe rrpHHl1.HrrbI pa60TbI. HH3KYIO HHTeHCHBHOCTb crrOHTaHHoro H3JIYtIeHHfI JIa3epOB C BepTHKaJIbHbIM pe30HaTopOM tIaCTO 06bflCHflIOT rreperrOrJIOIII.eHHeM CPOTOHOB B aKTHBHOH 06JIaCTH. npH 3TOM rrorrbITKH rrOHH3HTb rroporOBbIH TOK reHepal1.HH 3a CtIeT rrOBblIIIeHHfI OTpa)KaIOIII.eH crroc06HOCTH 3epKaJI Be.ll.YT K eIII.e 60JIbIIIeMy CHH)KeHHIO HHTeHCHBHOCTH CnOflmaftftOZo H3JIYtIeHHfI. Ha OCHOBaHHH Bcero 3Toro MO)KHO rrpe.ll.rrOJIO)KHTb, "ITO, rrpHMeHSIfi rrJlaHapHble CTPYKTYPbI C pe30HaTopOM, HeJIb3f1 C03.l1.aTb JIa3ep C HYJIeBbIM rroporOM reHep a l1.HH (Kobayashi et aI.,
1982;
Yokoyama,
1992).
316
15.3. C8emOaUOabt
FJL. 15. C8emOaUOabt c peaoltamOpOM
15.3.
CBeTO,ll;HO,ll;bI C pe30HaTopoM InGaAs/GaAs C ,ll;JIHHOH BOJIHbI H3JIyqeHHjI
930
HM
Ha Pl1c. 15.4, a rrOKa3aHa cTpyKTypa CBeTo,n110,na C pe30HaTopoM C aKTI1BHOH 06JIaCTbIO InGaAs. Pe30HaTop OrpaHl1qeH ,nByMH OTpa)KaTeJIHMI1: MeTaJIJIl1qeCKI1M 11 6p9rrOBCKI1M. B CTpyKTypy CBeTo,n110,na TaK)Ke BXO,nI1T aKTI1BHaH 06JIaCTb C qeTblpbMH KBaHTOBbIMI1 HMaMI1 11 ,nByMH 6apbepHbIMI1 CJIOHMI1. Ha CI1JIbHO JIempOBaHHYIO rro,nJIO)KKY n-Tl1na HaHeceH CJIOH aHTI1OTpa)KaIOru:ero rrOKpblTI1H Zr02 (Schubert et al., 1994). Ha Pl1c. 15.4,6 rrpe,nCTaBJIeHa 4>oTorpaqmH rrepBoro CBeTo,n110,na TaKoro Tl1rra.
peaoltamOpOM InGaAs/GaAs
C
aJLu/wu 80JLltbt 930 ItM 317
CBH3aHHOH C I1X BbICOKI1M COrrpOTI1BJIeHl1eM (Schubert et aI., 1992c; Lear, Schneider,
1996). B
TO )Ke BpeMH 6bIJIO rrOKa3aHO, QTO rrJIaBHOe rrapa-
60JII1QeCKOe JIerl1pOBaHl1e CJIOeB rrpl1Bo,nI1T K cyru:ecTBeHHoMY CHI1)KeHI1IO OMI1QeCKOrO COnpOTI1BJIeHI1H 3epKaJI op9rra. TaKoe rrJIaBHOe rrapa60JII1QeCKoe JIerl1pOBaHl1e TaK)Ke rrpl1MeHHeTcH ,nJIH YCTpaHeHI1H pa3pbIBoB 30H Ha reTepOrpaHl1l1.ax (Schubert et aI., 1992c). BeJII1QI1Ha K094>4>I1lI.l1eHTa OTpa)KeHI1H 3epKaJI op9rra ,nOJI)KHa y,nOBJIeTBOPHTb ypaBHeHI1HM (15.1) 11 (15.3). K094>4>1111.I1eHT OTpa)KeHI1H 3epKaJIa 113 cepe6pa rrpl16JII1311TeJIbHO paBeH 96%. JI.JIH BbIIIOJIHeHI1H BToporo KPI1TepHH -
ypaBHeHI1H
CQI1TaH, QTO
RI <
a
C
~ =
Rd.
He06xo,nI1MO, QT06bI 2~aLactive < (1 = 104 CM- 1; Lactive = 400 A, rrOJIYQI1M YCJIOBl1e
(15.3) -
1,3; a
90. TaKI1M 06pa30M, OTpa)KaIOru:aH crroc06HoCTb 3epKaJI CBeTo,n110-
,nOB C pe30HaTopOM Bcer,na HaMHoro MeHbIIIe K094>4>1111.I1eHTOB OTpa)KeHI1H 3epKaJI JIa3epOB C BepTI1KaJIbHbIM pe30HaTopOM. BbICOKaH OTpa)KaIOru:aH crroc06HOCTb 3epKaJI rrOBblIIIaeT caMOrrOrJIoru:eHl1e 113JIyqeHliH Ii CHIi)KaeT
6
ero BbIXO,n 1i3 YCTPOHCTB, QTO 06cY)K,naJIOCb paHee . .Ll.JIH paCQeTa K094>4>Ii1I.I1eHTOB OTpa)KeHI1H 6bIJIa I1CrrOJIb30BaHa 60JIee rro,np06HaH TeOpeTIiQeCKaH Mo,neJIb (De Neve et aI., 1995). MaKCIiMaJIbHbIlf KBaHTOBbIH BbIXO,n, pacCQI1TaHHbIH rro 9TOH Mo,neJI 11 , rrOJIYQI1JICH rrpli K094>4>1111.I1eHTe OTpa)KeHIiH
RI =
50-60%.
Ha pliC. 15.5 rrpe,nCTaBJIeHbI xapaKTepl1CTIiKI1 CBeTo,n110,na C pe30HaTopOM. CrreKTp K094>4>1i1l.I1eHTa OTpa)KeHIiH
(a)
rrOKa3b1BaeT, QTO TaKOH CBeTO-
,n1i0,n Ha ,nJIIiHaX BOJIH 60JIbIIIe 900 HM 06JIa,naeT BbICOKIiM K094>4>1111.I1eHTOM OTpa)KeHI1H, KOTOPbIH pe3Ko rra,naeT Ha pe30HaHcHoH ,nJIIiHe BOJIHbl. WIiaHTHOTpIDKalOlI{ee ITOICpLITHe
pl1Ha pe30HaHcHoH KpliBOH paCCMaTpl1BaeMOro pe30HaTopa paBHa 6,3 HM. CrreKTp 9JIeKTpOJIIOMI1HeClI.eHlI.Iili YCTpoHcTBa (6) rrpaKTIiQeCKI1 rroBTopHeT
PHC. 15.4. CTpYKTypa CBeTo,n:Ho,n:a InGaAs/GaAs C H3JIYQalOmeH rro,n:JIO)KKOH C MeTaJIJIHQeCKHM (Ag) OTpa)KaTeJIeM HaBepxy H pacrrpe,n:eJIeHHbIM 3epKaJIOM 5psrra (AIAs/GaAs) CHH3Y, pa6oTalOmero Ha ,n:JIHHe BOJIHbI 930 HM (a). <poTorpaqmll rrepBoro CBeTo,n:Ho,n:a C pe30HaTopoM (Schubert et al., 1994) (6)
4>0PMY pe30HaHcHoH KpIiBOH. ECJIIi B 06bIQHbIX CBeTo,nlio,nax crreKTpaJIbHble xapaKTepliCTIiKI1 113JIyQeHIiH orrpe,neJIHIOTCH TerrJIOBbIM pacrrpe,neJIeHl1eM 9JIeKTpOHoB 11 ,nblPOK B 30He rrpOBo,nI1MOCTIi 11 BaJIeHTHOH 30He, TO B CBeTo,n110,nax C MliKpope30HaTopaMIi OHI1 CI1JIbHO 3aBI1CHT OT CJIO)KHOCTIi CTpyKTyp. O,nHaKO eCJII1 OrpaHIiQI1TbCH
MeTaJIJIl1qeCKI1H OTpa)KaTeJIb I1CrrOJIb3yeTcH rro ,nByM rrpl1ql1HaM. BonepBblx, MeTaJIJIl1qeCKOe 3epKaJIO 113 cepe6pa o,nHoBpeMeHHo I1rpaeT pOJIb
paCCMOTpeHlieM 113JIYQeHI1H TOJIbKO B,nOJIb OrrTIiQeCKOlf OCIi pe30HaTopa,
KOHTaKTa C Be~XHI1M CI1JIbHO JIerl1pOBaHHbIM ~ 5 X 1019 CM- ), qTO rr03BOJIHeT 94>4>eKTI1BHO
CBeTo,n110,nOB. CQI1TaH, QTO pe30HaHCHaH Kpl1BaH ropa3,n0 Y)Ke eCTeCTBeHHO-
OT,neJIHTb 06JIaCTb HaKaqKI1 OT 06JIaCTI1, pacrrOJIO)KeHHOH rro,n KOHTaKTOM.
CTI1 I1X rrepeKpblTl1H crrOHTaHHoe 1i3JIYQeHlie 6y,neT YCI1JII1BaTbCH, a 3a rrpe-
BO-BmopblX, KaK 6bIJIO nOKa3aHO B rrpe,nbI,nyru:eM pa3,neJIe, ,nJIH rrOJIyqeHI1H
,neJIaMIi pe30HaHCHOH 06JIaCTI1 -
MaKCI1MaJIbHOrO YCHJIeHI1H 113JIyqeHI1H pe30HaTOp ,nOJI)KeH I1MeTb MI1HI1-
B,nOJIb OCI1 pe30HaTopa Herrocp,necTBeHHO orrpe,neJIHeTCH xapaKTepl1CTIiKaMIi
MaJIbHO B03MO)KHYIO ,nJII1Hy. IlOCKOJIbKY MeTaJIJIl1qeCKl1e 3epKaJIa 06JIa-
pe30HaTopa. 3KCrrepl1MeHTaJIbHble ,naHHble Ha pliC. 15.5 rro,nTBep)K,naIOT 9TO
,naIOT MI1HI1MaJIbHOH rJIy611HoH rrpOHI1KHOBeHI1H, OHI1 rr03BOJIHIOT YMeHb-
rrpe,nrrOJIO)KeHl1e.
HeCrrJIaBHOrO
OMl1qeCKOrO
CJIOeM GaAs p-Tl1rra
(NA
CTaHOBI1TCH ropa3,n0 JIerQe rrOHHTb 4>113IiQeCKI1H rrpl1HlI.lirr ,neHCTBI1H TaKIiX ro crreKTpa 1i3JIYQeHI1H rrOJIyrrpOBo,nHI1Ka, MO)KHO YTBep)K,naTb, QTO B 06JIaOCJIa6JIHTbcH. Il09TOMY crreKTp 113JIYQeHliH
IIIaTh ,nJII1Hy pe30HaTopa. Co06ru:aJIOCb 0 C03,naHI1I1 pe30HaTopa C ,nByMH
oJIaro,napH pe30HaTopaM crreKTp 113JIYQeHliH CBeTo,n110,nOB C pe30HaTo-
MeTaJIJII1QeCKI1MI1 OTpa)KaTeJIHMI1 (Wilkinson et al., 1995). O,nHaKo eCJII1
POM ropa3,n0 Y)Ke crreKTpa 113JIYQeHI1H 06b1QHbIX CBeTo,n110,nOB (Schubert
B TaKI1X cTpyKTypax I1CrrOJIb3YIOTCH MeTaJIJII1QeCKl1e OTpa)KaTeJII1, I1MeIO-
et aI., 1992a; Hunt et aI., 1992, 1993). WlipliHa crreKTpa CBeTo,nl1o,nOB C
ru:l1e CpaBHI1TeJIbHO 60JIbIIIYIO TOJIru:I1HY, B cBeTorrponycKaIOru:l1x 3epKaJIaX
pe30HaTopOM, 113JIYQaIOru:IiX B orrpe,neJIeHHOM HarrpaBJIeHl1li, 3aBI1CI1T OT orr-
pe3Ko B03pacTaIOT OnTI1QeCKl1e rrOTepl1 Ha rrOrJIoru:eHl1e (Tu et al., 1990).
TI1QeCKI1X xapaKTepliCTI1K I1CrrOJIb3yeMblx pe30HaTopoB, Tor,na KaK IIIlipl1Ha
OTCYTCTBl1e 3epKaJI op9rra p-Tl1rra TaK)Ke rr03BOJIHeT 1136e)KaTb rrp06JIeMbI,
crreKTpa 113JIYQeHI1H 06bIQHbIX CBeTo,nlio,nOB, KaK rrpaBI1JIO, rrpl16JIli311TeJIbHO
D/,. 15. CBemOaUOabl c peaOHamopOM
318
a
~
15.3. CBemOaUOabl c peaoHamopoM InGaAs/GaAs c aJLUHOU BOAHbl 930 HM 319 10
-3
I:(
~
~
.,!:l ~
~
.., 0
-5
:= ::r :=
!il
-7 850 10
!:lII:
8
'"~ '"Ol:s:~. ~ .
890
930
:='"
1050
970
J
C~ c pe3!maropoM
2
/=5MA 900
T=300K
~a BOJIHbI
6
g~ 4 II:
:= Q
2 0 880
900
940 ~a BOJlHhl A., HM 920
960
980
PMC. 15.5. K03
1000
eMaH B OrrTOBOJIOKOHHbIH cBeTOBO.ll., rrpHMo rrporropUIiOHaJIbHa rrJIOTHOCTH rrOTOKa CPOTOHOB. Ha pHC.
15.7
rrpe.ll.CTaBJIJIeHa 3aBHCHMOCTb HHTeHCHBHOCTIi H3JIY'IeHliH
CBeTO.ll.liO.ll.a C pe30HaTopoM OT HH2KeKUIiOHHoro TOKa . .L{JIH cpaBHeHIiH rrOKa3aHa TeOpeTli'IeCKaH 3aBHCHMOCTb .lI.JIH UaeaAb1-l0eO u30mpOn1-l0eO ucmo'l-
1-lUTW, KOTOPbIH HBJIHeTCH rlirrOTeTH'IeCKIiM YCTpoHcTBoM. C'IIiTaeTCH, 'ITO li.ll.eaJIbHbIH HCTO'IHIiK 06JIa.ll.aeT BHYTpeHHIiM· KBaHTOBbIM BbIXO.ll.OM Ii HYJIeBbIM K09cpcpHUHeHToM OTpa2KeHIiH
paBHa
950 A., HM
PMC. 15.6. CpaBHeHMe cneKTpoB M3JIYQeHMll CBeTo.n.Mo.n.a Ha OCHOBe GaAs C pa60QeH .n.JIMHOH BOJIHbI 870 HM (AT&T, cepMll ODL 50) M CBeTo.n.Mo.n.a Ha OCHOBe InGaAs C pe30HaTopoM C pa60QeH .n.JIMHOH BOJIHbI 930 HM (Hunt et aI., 1993)
III
~
5HM
~ 4
6...;-
II:
InGaAs
£
oS< oS<
!a'"
pe30HaTopoM
~
II:
'" ~
C~c
8
~ li i'j
II:
1,8kT, 'ITO HaMHoro umpe crreKTpa CBeTO.ll.liO.ll.OB C pe30HaTopOM. 15.6 .lI.JIH cpaBHeHIiH rrOKa3aHbI crreKTpbI 1i3JIY'IeHliH CBeTO.ll.liO.ll.OB
Ha pliC.
(R = 0)
100 %
BO BceM .lI.liarra30He 1i3-
JIY'IaeMbIX .lI.JIIiH BOJIH, .lI.JIH 'Iero Ha ero Hapy2KHyIO rroBepxHocTb HaHeceHO aHTHoTp a2KaIO w.ee rroKpbITHe. ECJIIi H3JIY'IeHlie CPOTOHOB BHyTpli rroJIyrrpo-
.lI.ByX TlirrOB: 06bl'IHOrO Ha OCHOBe GaAs Ii Ha OCHOBe InGaAs C pe30Ha-
B0.ll.HIiKa 1i30TporrHoe, TO OrrTH'IeCKaH MOW.HOCTb H3JIY'IeHHH Ha e.ll.HHIiUY
TOpOM. BIi.ll.HO, 'ITO crreKTp CBeTO.ll.liO.ll.a C pe30HaTopOM rrO'ITIi Ha rrOpH.lI.OK
TOKa Ii Ha e.ll.HHIiUY TeJIeCHOrO yrJIa, rreprreH.lI.HKYJIHpHOrO rrOBepXHOCTH
Y2Ke crreKTpa 06bl'IHOrO CBeTO.ll.IiO.ll.a.
rrJIaHapHOro rrOJIyrrpOBO.ll.HIiKa, orrpe.ll.eJIHeTCH Bblpa2KeHlieM
06bl'IHble CBeTO.ll.liO.ll.bI xapaKTepli3YIOTCH cJIa60H yrJIOBOH 3aBIiCIiMOPoptical
-n =
CTbIO crreKTpa 1i3JIY'IeHIiH, B TO BpeMH KaK OTpa2KaIOw.lie CBoHcTBa 3epKaJI op9rra Ii caMIiX pe30HaTopOB, B COCTaB KOTOPbIX OHIi BX0.ll.HT, CIiJIbHO
n-
he 41rn2 . eA'
n-
(15.4)
3aBliCHT OT HarrpaBJIeHIiH 1i3JIY'IeHIiH. Ilo9TOMY crreKTp 1i3JIY'IeHIiH, BbI-
r.u.e
XO.ll.Hw.ero 1i3 CBeTO.ll.Ii0.ll.a C pe30HaTopOM rro.ll. orrpe.ll.eJIeHHhlM yrJIOM, KaK
rrpOBO.ll.HHKa, C -
rrpaBIiJIO, Y2Ke crreKTpa 1i3JIY'IeHHH 06bI'IHOrO CBeTO.ll.IiO.ll.a. O.ll.HaKO eCJIIi
1i3JIY'IeHHH B BaKYYMe. YpaBHeHHe
rrpOIiHTerplipOBaTb IiHTeHCHBHOCTb H3JIY'IeHHH CBeTO.ll.liO.ll.a C pe30HaTopOM
.lI.e UITPHXOBOH JIHHIiIi. O.ll.HaKO Ha rrpaKTIiKe HeB03M02KHO peaJIli30BaTb
e.u.HHliua TeJIeCHOrO yrJIa, CKOPOCTb CBeTa, e -
rrOKa3aTeJIb rrpeJIOMJIeHIiH rroJIy-
3apH.u. 9JIeKTpOHa, ). -
(15.4)
.lI.JIIiHa BOJIHbI
rrOKa3aHO Ha pliC.
15.7
B BIi-
rro BceM HarrpaBJIeHIiHM, OKa2KeTCH, 'ITO ero CYMMapHbIH crreKTp 1i3JIY'IeHliH
Hii BHYTpeHHHH KBaHTOBbIH BbIX0.ll.
6Y.ll.eT 3Ha'iliTeJIbHO IImpe .
C HYJIeBbIM K09cpCPliUlieHToM OTpa2KeHIiH. Ilo9ToMY JIIiHHH li.ll.eaJIbHOrO 1i3-
. OCHoBHoH xapaKTeplicTIiKOH CBeTO.ll.IiO.ll.a, IicrrOJIb3yeMoH B BOJIOKOHHO-
100 %,
Hii f1irrOTeTH'IeCKOe rrOKpblTlie
JIY'IaTeJIH HBJIHeTCH BepXHHM (He.ll.OCTIi2KHMbIM) rrpe.u.eJIOM .lI.JIH H3JIY'IeHliH
OrrTli'IeCKHX CIiCTeMax CBH31i, HBJIHeTCH rrJIOTHOCTb rrOTOKa IicrrycKaeMhlx
06bI'IHbIX CBeTO.ll.HO.ll.OB. TO'IKa Ha pHC.
HM CPOTOHOB rrpH 3a.ll.aHHOM ypoBHe TOKa, KOTopaH .lI.JIH 3a.ll.aHHoH .lI.JIIiHbl
Horo CBeTO.ll.HO.ll.a Ha OCHOBe GaAs (ODL
BOJIHbI IiMeeT pa3MepHoCTb MKBT / Cpo OrrTli'IeCKaH MOW.HOCTb, rrepe.ll.aBa-
OrrTH'IeCKIiX CIiCTeMax CBH3H. Bce rrpe.ll.CTaBJIeHHble xapaKTepliCTHKIi COOT-
15.7 - xapaKTeplicTHKIi cOBpeMeH50), HCrrOJIb3yeMoro B BOJIOKOHHO-
fA. 15. CBemOaUOabl c peaoHamopoM
320
15.3. CBemOaUOabl c peaoHamopoM InGaAs/GaAs c aAUHOU BOAHbl 930 HM 321
10
100
8
C,n; C pe30HaTOpoM AHaMeTp KOHTaKTa:
80
21 MKM
A= 910 HM T=20 °C "'-..
0.. 0
1=<
~
::. 60
4
Pe30H3TOPOM
ci ;.:
2
1..=930 HM
:.::
....;-
= = :.:: =
0 :.:: 10
0
40
§
~ 20
.a< @ ~
6
6
U
4
1..= 870 HM
0
0
::s::
:s:
°0~~C---2~~~~4--~--~6--~--~8--~--~10 TOK PHC.
C,n; C
~
g 0
a
6
~ ~ 0
15.7.
8
C,n; ATT-ODL50
2
0
I, MA
o
-5
-10
3aBMcMMoCTb MHTeHCMBHOCTM M3JIY'IeHMlI OT MHJKeKlI.MOHHOro TOKa AJIlI
CBeTO.ll.MOAa Ha OCHOBe InGaAs/GaAs C pe30HaTopoM M MAeaJIbHOrO M30TponHoro M3JIY'IaTeJIlI. BbIAeJIeHHall 06JIaCTb COOTBeTcTByeT xapaKTepMcTMKaM JIy'lIIIMX 06pa311.0B 06bI'IHbIX CBeTO.ll.MO.ll.OB. TO'lKOH nOKa3aHbI xapaKTepMcTMKM cOBpeMeHHoro CBeTO.ll.MO.ll.a
ODL 50
(Schubert et aI.,
5
PMC.
15.8.
t,
MH 6e3 rrpHMeHeHHSI JIHH3. . 113 pHC. 15.7 BH.D.HO, 'ITO CBeTO.D.HO.D.bI C pe30HaTopOM 06JIa.D.a1OT JIyqIlIM-
25
CMrHaJIbI, npMHlITble cpoTonpMeMHMKoM Ha KOHlI.e MHOrOMO.ll.OBOrO OnTO-
62,5
MKM. flcTO'lHMKM CMrHaJIOB:
Ha OCHOBe InGaAs/GaAs C pe30HaTopOM M
BeTCTBYIOT cBeTO.D.HO.D.aM C rrJIaHapHbIMH H3JIyqalOIll.HMH CBeT rroBepxHocTSI-
20
HC
BOJIOKOHHOro CBeTOBO.ll.a C rpa.ll.MeHTHbIM M3MeHeHMeM nOKa3aTeJIlI npeJIOMJIeHMlI M .lI.MaMeTpOM lI.eHTpaJIbHOH JKMJIbI
1994)
15
10
BpeMll
6-
nepe.ll.a'lM CMrHaJIOB Ha KopOTKoe paCCTOllHMe He 6bIJIO. IToCJIe npOXOJK.lI.eHMlI
3,4
a-
CBeTOAMO.ll.
CBeTO.ll.MO.ll. Ha OCHOBe GaAs. ITocJIe
(5
M) pa3HMlI.b1 MeJK.lI.Y HMMM HaH.lI.eHO
KM npMHlITble CMrHaJIbI OT CBeTO.ll.MOAa C pe30Ha-
TOPOM OTJIM'IaJIMCb MeHbIIIMM YiliMpeHMeM MMnYJIbCOB no cpaBHeHMIO C CMrHaJIaMM OT 06bI'IHOrO CBeTO.ll.MO.ll.a (Hunt et aI.,
1993)
MH xapaKTepHCTHKaMH H3JIyqeHHSI: 60JIbllIHMH 3HaqeHHSIMH HHTeHCHBHOCTH H KPYTH3HbI. KpYTH3Ha xapaKTepHCTHKH TaKHX CBeTO.D.HO.D.OB rrpeBbIlliaeT KPYTH3HY JIyqllIHX 06blqHbIX CBeTO.D.HO.D.OB B qaTeJISI -
B
3,1
pa3a. TIpH TOKe
.D.OB C pe30HaTopoM B
3,3
5 MA
7,3
pa3a, a H.D.eaJIbHorO H3JIy-
HHTeHCHBHOCTb H3JIyqeHHSI CBeTO.D.HO-
pa3a 60JIbllIe HHTeHCHBHOCTH JIyqllIHX 9K3eMrrJISI-
paCCTOSIHHH
5
M H
3,4
KM qepe3 MHOroMo.D.OBbIH BOJIOKOHHO-OrrTHqeCKHH
CBeTOBO.D. C rpa.D.HeHTHbIM rrpo
62,5
MKM. HHKaKoH pa3HHlI.bI Me)K.D.Y rrpHHSITbIMH CHr-
pOB 06bIqHbIX CBeTO.D.HO.D.OB. DJIarO.D.apSI CBoeH BbICOKOH 9
HaJIaMH rrOCJIe rrpoXO)K.D.eHHSI paCCTOSIHHSI
OHH HalliJIH llIHpOKoe rrpHMeHeHHe B OrrTHqeCKHX CHCTeMax CBSI3H.
rrOCJIe rrpoXO)K.D.eHHSI paccToSIHHSI
BWCOKaSI crreKTpaJIbHaSI qHCTOTa H3JIyqeHHSI CBeTO.D.HO.D.OB C pe30HaTOPOM CHH)KaeT xpOMaTHqeCKYIO .D.HCrrepCHIO B BOJIOKOHHO-OrrTHqeCKHX CHCTeMax CBSI3H
(Hunt et
aI.,
1993).
XpOMaTHqeCKaSI .D.HCrrepCHSI rrpSIMo
rrpOrrOpll.HOHaJIbHa llIHpHHe crreKTpaJIbHOH JIHHHH H3JIyqeHHSI HCTO'lHHKa. TIOCKOJIbKY llIHpHHa crreKTpOB TaKHX CBeTO.D.HO.D.OB B
5-10
pa3 MeHbllIe, qeM
3,4
5
M BbISIBJIeHO He 6wJIO. O.D.HaKO
KM pa3JIHqHSI CTaJIH 3HaqHTeJIbHbIMH.
BH.D.HO, 'ITO rrpHHSITble CHrHaJIbI OT 06bIqHOrO CBeTO.D.HO.D.a qepe3
3,4
KM
OTJIHqalOTCSI OT CHrHaJIOB CBeTO.D.HO.D.a C pe30HaTopoM 60JIbllIHM YllIHpeHHeM HMrrYJIbCOB. 3TO pa3JIHqHe 06'bSICHSIeTCSI MeHbllIeH xpOMaTHqeCKOH .D.HcrrepCHeH .D.JISI H3JIyqeHHSI CBeTO.D.HO.D.a C pe30HaTopoM. B pa60Te (Schubert et aI.,
1996)
rrpO.D.eMOHCTpHpoBaHa B03MO)KHOCTb
crreKTpaJIbHbIX JIHHHH 06bIqHbIX CBeTO.D.HO.D.OB, B HHX TaK)Ke MeHbllIe BJIHSI-
BbICOKOqaCTOTHOH
HHe xpOMaTHqeCKOH .D.HCrrepCHH, KOTopoe oco6eHHo CHJIbHO rrpOSIBJISIeTCSI B
TIPH H3MepeHHH rJIa3-.D.HarpaMMbI C rrOMOIll.blO reHepaTopa CJIyqaHHbIX 6H-
.D.Harra30He .D.JIHH BOJIH
800-900
HM (Hunt et ai.,
1993).
Ha pHC.
15.8
rrpe.D.-
MO.D.YJISIlI.HH
H3JIyqeHHSI
CBeTO.D.HO.D.OB
C pe30HaTopoM.
TOBbIX rrOCJIe.D.OBaTeJIbHOCTeH «rJIa3') OCTaBaJICSI OTKPbITWM .D.O CKOPOCTH
CTaBJIeHbI 9KcrrepHMeHTaJIbHble .D.aHHble, rrOJIyqeHHble B X0.D.e cpaBHeHHSI
622
.D.ByX THrrOB CBeTO.D.HO.D.0B: C pe30HaTopoM H 06bIqHOro. TIoKa3aHbI CHrHaJIbI, eHHSI rrpHHSITble <poTorrpHeMHHKoM OT .D.BYX CBeTO.D.HO.D.O B rrOCJIe rrpoXO)K.D.
CBeTO.D.HO.D.bI C pe30HaTopoM 06JIa.D.a1OT HH3KOH rrapa3HTHoH eMKOCTblO. TIo-
M6HT/C. 113-3a MaJIbIX pa3MepoB 06JIaCTH HH)KeKlI.HH HOCHTeJIeH TOKa
9TOMY OHH crroco6HbI pa60TaTb Ha qaCTOTax MO.D.YJISIlI.HH CBbIllie
11 <1>. E. IlIy6epT
1 r6HT/C.
15.4. C8emOaUOabt fta OCft08e AlInGaP/GaAs
FA. 15. C8emOaUOabt C pe3OftamOpOM
322
C
323
pe30ftamOpOM
15.4.
CBeToJJ:HoJJ:bI Ha OCHOBe AlInGaP /GaAs C pe30HaTopoM, H3JIYQaIOm.He Ha JJ:JIHHe BOJIHbI 650 HM B PlI.lI.e pa60T (Streubel et aI.,
2002)
1998;
Whitaker,
1999;
Wirth et aI.,
2001,
paccMoTpeHbI CBeTO.ll.HO.ll.bI Ha OCHOBe AlInGaP /GaAs C pe30HaTo-
POM, H3JIyqaIOII.I:He B BH.lI.HMOH qaCTH crreKTpa: TBep.ll.bIH paCTBOp AlInGaP HCrrOJIb3yeTclI B OCHOBHOM .lI.JIlI H3rOTOBJIeHHlI CBeTO.ll.HO.ll.OB C BbICOKOH lIpKOCTbIO CBeqeHHlI B KpaCHOM, opamKeBOM H 2KeJITOM .lI.Harra30Hax .lI.JIHH BOJIH. TaKHe CBeTO.ll.HO.ll.bI, KaK rrpaBHJIO, BblpaII.I:HBaIOT Ha COrJIaCOBaHHbIX rro rrapaMeTpaM peIIIeTOK rrO.ll.JI02KKaX GaAs. AKTHBHalI 06JIaCTb CBeTO.ll.HO.ll.OB Ha OCHOBe AlInGaP/GaAs C pe30HaTopOM COCTOHT H3 MH02KeCTBeHHbIX KBaHTOBbIX lIM AlInGaP /InGaP, H3JIyqaIOII.I:HX CBeT C .lI.JIHHOH BOJIHbI
650
HM.
PHC. 15.10.
TaKHe CBeTO.ll.HO.ll.bI rrO.ll.XO.ll.lIT .lI.JIlI pa60TbI B CHCTeMax CBlI3H, HCrrOJIb3YIOII.I:HX rrOJIHMepHble CBeTOBO.ll.bI. I13roToBHTb rrOBepXHOCTHO-H3JIyqaIOII.I:He JIa3epbI C BepTHKaJIbHbIMH pe30HaTopaMH, pa60TaIOII.I:He B 3TOM .lI.Harra30He
Ii
.lI.JIHH BOJIH, OqeHb CJI02KHO, rrOCKOJIbKY TPY.ll.HO rrO.ll.06paTb COrJIaCOBaHHble
06e.ll.HeHHbIH CJIOH no.ll. MeTaJIJIH3HpOBaHHbIM KOHTaKTOM. I1MnJIaHTau.HlI BO-
rro
.lI.opo.ll.a HJIH, QaII.I:e, KHCJIOpO.ll.a HCrrOJIb3yeTclI .lI.JIlI rrOJIYQeHHlI rrOJIynpOBO,ll.-
rrapaMeTpaM
peIIIeTOK rrp03paqHble
MaTepHaJIbI .lI.JIlI 3epKaJI op3rra,
06JIa.ll.aIOII.I:He K TO My 2Ke 60JIbIIIOH pa3HHu.eH rrOKa3aTeJIeH rrpeJIOMJIeHHlI.
II:. II
1!
BepxHHH KOHTaKT CBeTO.ll.HO.ll.a HMeeT cpOpMy KOJIbu.a. TOK BBO.ll.HTClI B U.eHTp 3T~ro K~JIbu.a 6JIarO.ll.aplI HOHHOH HMrrJIaHTau.HH, KOTopalI C03.l1.aeT
Ha
pHC.
15.9
rrOKa3aHa
cTpyKTypa
CBeTO.ll.HO.ll.a
Ha
AlInGaP / GaAs C pe30HaTopoM, H3JIyqaIOII.I:ero Ha .lI.JIHHe BOJIHbI
OCHOBe
650
HM.
YCTpOHCTBO COCTOHT H3 aKTHBHOH 06JIaCTH AlInGaP /InGaP C MH02KeCTBeHHbIMH KBaHTOBbIMH lIMaMH H 6apbepHblx CJIOeB AlInGaP. 3epKaJIa op3rra
HHKOB C BbICOKHM conpOTHBJIeHHeM. 3aMeTHM, QTO HOHHOH HMrrJIaHTau.HH rrO.ll.BepraIOTclI TOJIbKO CJIOH p-THrra H He 3aXBaTbIBaeTClI aKTHBHalI 06JIaCTb
u.eHTpaMH 6e3bI3JIYQaTeJIbHOH peKoM6HHau.HH H CHH2KaIOII.I:HX HHTeHCHBHOCTb H3JIYQeHHlI.
CBo6o.ll.HO rrporrYCKaJIO CBeT, H3JIYQaeMbIH aKTHBHOH 06JIaCTbIO. Ilo3ToMY
Ha pHC. 15.10 rrOKa3aHbI AlInGaP/G~As C p:30HaTopoM C BbIXO.ll.HOH JIHH30H (a), B
K03CPCPHu.HeHT KOHTpaCTa TaKHX 3epKaJI 06bIQHO He OQeHb BbICOKHH.
JIHH3bI
peaJIH30BaHbI Ha OCHOBe CJIOeB AIAs/ AIGaAs. B
CJIOlIX
AIGaAs
BbI6HpaeTclI
.lI.OCTaTOqHO
CO.ll.ep2KaHHe aJIIOMHHHlI
60JIbIIIHM,
QTo6bI
3epKaJIO
lIBJIlIIOII.I:HXC~
QTO rr03BOJIlIeT npe.ll.OTBpaTHTb 06pa30BaHHe TaM .lI.ecpeKTOB,
lIBJIlIIOTClI
cpoTorpacpHH B
.lI.ByX
Koprryce
c06HpaIOII.I:HMH
CBeT
CBeTO.ll.HO.ll.OB
THrrax C
Ha
KopnycoB:
rH6KHMH
YCTpoHcTBaMH,
B
OCHOBe Koprryce
BbIBO.ll.aMH
(6).
rrOBblIIIaIOII.I:HMH
3cpcpeKTHBHoCTb COrJIaCOBaHHlI CBeTO.ll.HO.ll.OB C OnTOBOJIOKHOM.
; ;
rrYTbTOKal
~ H3nyqeHHe KOHTaKT B CBeTa
Ha pHC.
o6JIacn <,
~,
'"
'--l
~
GaAs p+-THIIa '1~,"U'Him""""%W"",CV~~'
,
---y- HMIIJIaHTaqRH LI_ HOHOB
/
-
w
ee
*-
v v'
rrpe.ll.CTaBJIeHbI TpH pa60TaIOII.I:He CBeTO.ll.HO.ll.a Ha OCHO-
B~.lI.HO,
QTO H3JIYQeHHe HarrpaBJIeHO rreprreH.lI.HKYJIlIPHO
K rrOBepXHOCTH YCTpOHCTBa • .lI.JIHHa BOJIHbI H3JIYQeHHlI paBHa
650
HM.
pacrrpe~eJIeHHOe
~> , " ,
;;lHI
~
15.11
Be AlInGaP /GaAs.
}
6 ' apbepHblH CJIOH p-THIIa
3epKaJIO I>p3ITa p-THIIa aKTHBHali o6JIacn
cMK5I IrrGaP/AIInGaP
6apbepHhIH cJIon n-THIIa
pacrrpe~eJIeHHOe }
3epKaJIO I>p3rra n-THIIa
rroAJIoJKKa GaAs n+-THIIa
PHC. 15.9. CTpYKTypa CBeTo,n:Ho,n:a Ha OCHOBe InGaP/AHnGaP/GaAs C pe30HaTopOM. AKTHBHaH 06JIaCTb, COCTOHIII.aH H3 MH01KeCTBeHHblX KBaHTOBbIX HM, H3JIyqaeT Ha ,n:JIHHe BOJIHbI 650 HM. TaKHe CBeTo,n:Ho,n:bI HCnOJIb3YlOTCH B BOJIOKOHHO-OrrTHqeCKHX CHCTeMax CBH3H (Whitaker, 1999)
PHC. 15.11.
Fit. 15. GBemoaUOabt c pe30HamopOM
324 Ha PYlC.
15.12
15.5. GBemoaUOabt 60ILbULOU nILow,aau c nepeu3ILY'leHUeM r/JomoHoB
rrOKa3aHhI crreKTpbI Yl3JIyqeHYlH CBeTo,nYlo,nOB Ha OCHO-
Be AlInGaP C pe30HaTopoM YI 6e3 Hero rrpYi pa3HbIX TOKax YlH)KeKUYlYI. H3MepeHYIe crreKTpOB rrpOBo,nYlJIOCb rrOCJIe coe,nYlHeHYlH C rrOJIYlMepHhIMYI CBeTOBo,naMYI. TaKYIM 06pa30M, ,naHHble crreKTpbI HBJIHIOTCH pe3YJIbTaTOM
325
rrpHBo,nHT K CHH)KeHHIO TeMrrepaTypHoH qYBcTBHTeJIbHOCTYI cBeTo,nHo,nOB. CrreKTp eCTeCTBeHHoro H3JIyqeHYlH
CMemaeTCH
B KpacHYIO CTOPOHY co
CKOPOCTblO 0,5 HM/oC, Tor,na KaK c,nBHr pe30HaHcHoH KPHBOH rrpOHcxo,nHT co CKOPOCTblO B ,neCHTb pa3 MeHbweH.
rrpHMblx Yl3MepeHYlH KaK 9cpcpeKTYlBHOCTH CBeTo,nYlo,nOB, TaK H 9cpcpeKTHBHOCTYI CBH3H. H3pHC. •
15.12
CJIe,nyeT:
CBeTo,nHO,n C pe30HaTopoM ITO cpaBHeHHIO c· 06blqHbIM CBeTo,nHo,nOM 06-
15.5.
CBeTO,lJ;HO,lJ;bl 60JIbmOH nJIom.a,lJ;H C nepeH3JIYQeHHeM
JIa,naeT 60JIee BbICOKHM rrHKOBbIM 3HaqeHHeM MOmHOCTH CBH3H H rrOJIHOH
«POTOHOB
MomHOCTH Yl3JIyqeHYlH, •
CBeTo,nHO,n C pe30HaTopoM xapaKTepH3yeTcH 60JIbWeH qYlCTOTOH crreKB
pa60Te (Streubel et al.,
1998)
TaK)Ke co06maJIOCb, qTO rrpH KOM-
HaTHOH TeMrrepaType crreKTp H3JIyqeHHH
BMeCTO TOro, QT06bI ,n06HBaTbCH CHUJlCeHU51 u3ILytteHU51 8 nonepettHoM Hanpa8JleHUU, MO)KHO HaHTH crroc06 rrepeH3JIYQeHHH CPOTOHOB, JIeTHmYlX
Tpa ITO cpaBHeHHIO C 06blqHbIM CBeTo,nHo,nOM. 6bIJI crreUYlaJIbHO CMemeH OT-
B ropH30HTaJIbHOM HarrpaBJIeHHH, T. e. rrOCTapaTbCH HarrpaBHTb H3JIyqeHHe B CTOPOHY BepXHeH rpaHHUbI CBeTo,nYlo,na. I1epeYl3JIYQeHHe CPOTOHOB, JIeTH-
rrOBblweHHH
mHX B~OJIb CJIOeB, coxpaHHeT 9HeprHIO B aKTHBHOH 06JIaCTH, KOTopaH B
TeMrrepaTYPHoH CTa6HJIbHOCTYI BbIXO,nHOH MOmHOCTH ,nJIH CBeTo,nHo,nOB C
,naJIbHeHWeM MO)KeT 6bITb HCrrOJIb30BaHa ,nJIH HcrrYCKaHHH ,nPYrHX CPOTOHOB
pe30HaTopoM. TaKaH HaCTpoHKa pe30HaTopa rrpHBeJIa K TOMY, qTO rrpYi
B HY~HOM HarrpaBJIeHYlH. ,L{aJIee 6y,nYT paCCMOTpeHbI ,nBa rrpHMepa TaKHX YCTPOHCTB.
HOCHTeJIbHO
pe30HaHcHoH
KPHBOH
B
CHHIOIO
06JIaCTb
,nJIH
KOMHaTHOH TeMrrepaType ,nYlarpaMMa HarrpaBJIeHHOCTYI CTaJIa HMeTb cpopMy cep,nua. 3TO 06bHcHHeTcH TeM, qTO ,nJIH HarrpaBJIeHHH, OTJIYlqHbIX OT
o
rrepBOM TaKOM YCTpOHCTBe B CTpYKType C OrrTHQeCKOH HaKaQKOH,
HOpMaJIbHOrO, YMeHbWYlJIaCb pe30HaHcHaH ,nJIHHa BOJIHbI. I1PH rrOBbIWeHHYI
C006maJIOCb B pa60Te (Schnitzer et al.,
TeMrrepaTypbI eCTecTBeHHbIH crreKTp H3JIyqeHHH aKTHBHoH 06JIaCTH CMema-
rrOKa3aHa Ha pHC.
15.13, a.
1993).
CTPYKTypa YCTpoHcTBa
HH)KHHH cTopoHa TOHKoro rrOJIyrrpoBo,nHHKoBoro
eTCH B KpacHylO 06JIaCTb, rr09TOMY YJIyqWaeTCH rrepeKpbITHe pe30HaHCHOH
CJIOH rroKpbITa 30JIOTOM. I1PH OIITHQeCKOH HaKaQKe 06pa3ua H3JIYQeHHeM
KPHBOH (B,nOJIb OCH pe30HaTopa) C eCTeCTBeHHbIM crreKTpOM H3JIyqeHYlH, qTO
He60JIbWOH HHTeHCYlBHOCTYI rrpaKTHQeCKH Bce BHeWHHe CPOTOHbI rrorJIOmaIOTCH aKTHBHOH 06JIaCTblO. OKOJIO
95 % rrOrJIOmeHHbIX
CPOTOHOB, ,nOJIeTeB-
WHX ,no rpaHHUbI pa3,neJIa rrOJIyrrpoBo,nHYlK-B03,nyx, H3-3a rrOJIHOrO BHYTaIcrHBHaJI o6JIacTl.:
peHHero OTpa)KeHHH OCTaIOTCH B rrOJIyrrpOBo,nHYlKe. B HHcppaKpacHoM ,nHa-
MI0I InGaP/AlInGaP 3epKllJIa Ep3ITa AlAslAIGaAs
rra30He :OJIOTO HBJIHeTCH XOpOWHM OTpa)KaTeJIeM. I10JIyrrpoBo,nHYlK, CPOPMHpYlOmHH aKTHBHYIO 06JIaCTb, rrorJIOmaeT Ha ,nJIHHe BOJIHbI H3JIYQeHHH, T. e.
T=300K
ITO ,nOCTH)KeHHH HeKoTopoH cpe,nHeH ,nJIYlHbI rrOrJIOmeHYlH Labs rrOHMaHHble CPOTOHbI HMelOT waHC OCB06o,nHTbCH. BHeWHHH KBaHTOBbIH BbIXO,n TaKOH CTpyKTYPbI ,nOCTYlraeT ,nOJI)KeH 6bITb
72 %. ,L{JIH 99,7%.
He MeHee
9Toro BHYTpeHHHH KBaHTOBbIH BbIXO,n I1PH H3rOTOBJIeHHYI TaKOH CTPYKTYPhI
CHaQaJIa Ha cooTBeTcTBYlOmeH rro,nJIO)KKe BblpamYlBaeTcH aKTYlBHbIH CJIOH, rrOCJIe Qero OH rro,nTpaBJIHBaeTCH H OT,neJIHeTCH OT rro,nJIO)KKH. OTMeTHM, QTO B paccMaTpHBaeMoH CTpYKType HeT 9JIeKTpYlQeCKYlX KOHTaKTOB. K09CPCPHUHeHT OrrTHQeCKOrO BbIBo,na CTPYKTYP 6e3 KOHTaKTOB Bcer,na HaMHoro BbIwe, QeM Y HH)KeKUHOHHbIX YCTPOHCTB C 9JIeKTpYlQeCKYIMYI KOHTaKTaMH. O,nHaKo YCTpoHcTBa, H3rOTOBJIeHHble TaKHM crroco60M, 06JIa,na1OT MeHbweH Ha,ne)K-
600
620
640 ,[Vnrna BOJIHbI
660 A, HM
680
700
HOCTblO, QTO CBH3aHO C xpyrrKocTblO 9rrHTaKCHaJIbHbIX CJIOeB, OT,neJIeHHbIX OT rro,nJIO)KKYI. B pa60Te (Blondelle et al.,
1995)
paccMoTpeHo rrOXO)Kee, HO
60JIee rrpaKTHQHOe H3JIYQalOmee CBeT YCTPOHCTBO. PHC.
15.12.
CrreKTpbI H3JIYQeHHlI CBeTO.ll.HO.ll.a Ha OCHOBe IrrGaP/AlInGaP C aKTHB-
HOM 06JIaCTbIO C MHO)!{eCTBeHHbIMH KBaHTOBbIMH lIMaMH H o6b1'.JHoro CBeTO.ll.HO.ll.a
B
pa60Te (De Neve et al.,
1995)
OrrYlCaHO rrepeYl3JIYQeHHe CPOTOHOB,
peaJIH30BaHHoe B CBeTo,nHo,nax Ha OCHOBe InGaAs/GaAs/AIGaAs C pe30-
InGaP / AlInGaP rrpH pa3Hblx TOKax HH)!{eKUHH, rrO.ll.COe.ll.HHeHHblx K rrOJIHMepHbIM
HaTopoM. Ha pHC.
cBeTOBO.ll.aM.
TaKOrO CBeTo,nHo,na. ECJIH BOKpyr KBaHTOBbIX HM pacrrOJIO)KeHbI ,nOBOJIb-
OTMeTHM,
QTO
cBeTO.ll.HO.ll.
C pe30HaTopoM
o6JIa.ll.aeT 60JIee Y3KHM
crreKTpoM H3JIYQeHHH H 60JIee BbiCOKOM 3cpcpeKTHBHOCTbIO CB1I3H co cBeTOBO.ll.OM (Streubel et aI.,
1998)
15.13,6
rrOKa3aHa yrrpomeHHaH ,nYlarpaMMa CTPYKTYPbI
HO TOJICTble 6apbepHble CJIOYl C rrOCTerreHHO H3MeHHIOmYiMCH rrpocpHJIeM JIerHpOBaHHH, aKTHBHaH 06JIaCTb Be,neT ce6H KaK BOJIHOBO,n C rpa,nHeHT-
FIt. 15. CeemOaUOabl c peSOHamopOM
326 a
15.6. Becnopo2oBbie ltaSepbl
327
6 IIO)\JIOlKKa
B03JIYX
XOTeJIH C,ZI.eJIaTb ,ZI.HO,ZI. 60JIbiliOrO ,ZI.HaMeTpa, 06JIa,ZI.aIOmHH 60JIbIIIHM K. II. ,ZI.., H 3TO HM y,ZI.aJIo:b. npH BbICOKHX IIJIOTHOCTSlX TOKa YMeHbiliaeTcSl orpaHHtIeHHe HOCHTeJIeH B KBaHTOBbIX SlMax, tITO npHBO,ZI.HT K CHH)KeHHIO 3
K
TOMY )Ke pe30HaHc TaKHX CBeTO,ZI.HO,ZI.OB, KaK
IIpaBHJIO, He COBlIa,ZI.aeT C MaKCHMYMOM ClIeKTpa eCTeCTBeHHoro H3JIyqeHHSl, a CMem:H B ,ZI.JIHHHOBOJIHOBYIO CTOpOHy. 9TO npHBO,ZI.HT K C)(BHry MaKCHMaJIbHOH HHTeHCHBHOCTH rJIaBHOrO JIelIeCTKa ,ZI.HarpaMMbI HalIpaBJIeHHOCTH H3JIytIeHHSl Ha HeKoTopbIH yrOJi OT OCH, B pe3YJIbTaTe tIero 06maSl HHTeHPHC.
a-
15.13 . .uBa
rrOAXOAa K rrocTpoeHHIO CBeTOAHOAOB C rrepeH3JIyqeHHeM
o6beMHbIH 3rrHTaKCHaJIbHblH CJIOH pa3MelllaeTcH cBepxy CJIOH 30JIOTa, 60JIbIllaH
qaCTb crrOHTaHHoro H3JIYQeHHH, He rrOKHHYBIIlero aKTHBHbIH CJIOH, rrepeH3JIYQaeTCH,
CHBHOCTb H3JIytIeHHSl, IIOlIa,ZI.aIOmero B 3Ty 06JIaCTb, CTaHOBHTCSl MaKCHMaJIbHoH. CBeTO,ZI.HO,ZI.bI, OIIHcaHHble B pa60Tax (Blondelle et aI., (De Neve et aI.,
1995),
1995)
H
pa3pa6aTbIBaJIHCb ,ZI.JISl YBeJIHtIeHHSl H3JIyqeHHSl,
H
BbIXO,ZI.Slmero Qepe3 BepxHIOIO IIOBepXHocTb ,ZI.HO,ZI.OB, QTO He06xo,ZI.HMO ,ZI.JISl
6-
IIpHMeHeHHHH B ,ZI.HCIIJIeSlX H YCTpoHcTBax IIepe,ZI.atIH ,ZI.aHHblX B CB06o,ZI.HOM
aKTHBHaH 06JIaCTb CTPYKTypbI,
BCTpoeHHaH B MHKpope30HaTop,
HMeeT BHA
BOJIHOBOAa, H3JIYQeHHe, rrpoxoAH Qepe3 BOJIHOBOA, rrepeH3JIYQaeTCH Qepe3 HeCKOJIbKO AeCHTKOB MHKPOH, QaCTb BHOBb BbICB060JKAaeMblX
HbIM IIOKa3aTeJIeM IIpeJIOMJIeHHSl. PaCCtIHTaHO, tITO
30 %
IIpOCTpaHcTBe, a He ,ZI.JISl BOJIOKOHHO-OIITHtIeCKHX CHCTeM. B 3THX pa60Tax C006maJIOCb 0 ,ZI.OCTH)KeHHH MaKCHMaJIbHOrO BHeIIIHero KBaHTOBoro BbIXO,ZI.a TOr,ZI.a KaK ,ZI.JISl H,ZI.eaJIbHhlX o6beMHblx H3JIYtIaTeJIeH H3
aHa~
JIOrHtIHbIX MaTepHaJIOB ,ZI.aHHbIH IIOKa3aTeJIb TeOpeTHtIeCKH COCTaBJISleT
2 %.
paBHoro
16 %,
tIeHHbIX aKTHBHOH 06JIaCTbIO, IIOlIa,ZI.aeT B ::ny BOJIHOBO,ZI.HYIO MO,ZI.Y, r,ZI.e qepe3 HeCKOJIbKO ,ZI.eCSlTKOB MHKpoMeTpoB nepeH3JIYtIaeTCSl, tIT06hl BHOBb
15.6. BecnoporoBbIe JIa3epbI
HcnymeHHble
30 %.
npH He,ZI.OCTaTOtIHOH TOJImHHe aKTHBHOH 06JIaCTH
B pa60Te (De Martini et aI.,
1987)
,ZI.aHbI CCbIJIKH Ha IIy6JIHKall.HH, B KO-
TOPbIX OIIHcaHbI 6eciioporoBble JIa3epbI H IIepClIeKTHBbI HX HCnOJIb30BaHHSl
C KBaHTOBbIMH SlMaMH CBeTO,ZI.HO,ZI. C pe30HaTopOM He MO)KeT nO,ZI.,ZI.ep)KHBaTb
B CHCTeMax CBSl3H. oecnoporoBbIH JIa3ep -
BOJIHOBO,ZI.HbIH pe)KHM pa60TbI. Ha IIepBbIH B3rJISl,ZI. MO)KeT IIOKa3aTbCSl, qTO
Bce CBoe H3JIytIeHHe HJIH 60JIbIIIyIO ero tIaCTb B
pa60Ta aKTHBHOH
IIpOCTpaHcTBeHHoro pe30HaTopa. B 3TOM cJIYQae pe)KHMa reHepall.HH JIa3epa
06JIaCTH
B
KatIeCTBe BOJIHOBO,ZI.a Be,ZI.eT K
CHH)KeHHIO
3TO YCTPOHCTBO, HanpaBJISlIOmee
MOmHOCTH HOpMaJIbHOrO H3JIYtIeHHSl, HO, K CtIaCTbIO, 3TO He TaK. CBeTOBO,ZI.-
MO)KHO ,ZI.06HTbCSl ,ZI.a)Ke IIpH MHHHMaJIbHOM YCHJIeHHH, eCJIH B pe30HaTope
HaSl BOJIHa <popMHpyeTcSl 3a CtIeT
6Y,ZI.eT XOTSl 6bI O,ZI.HH
yrJIaMH, II03TOMY ee cymecTBoBaHHe IIpaKTHtIeCKH HHKaK He CKa3bIBaeTCSl
Ha BeJIHtIHHe BHeIIIHero KBaHTOBoro BbIXO,ZI.a.
A
3a CqeT SlBJIeHHSl nepeH3JIy-
BepoSlTHoCTb H3JIytIeHHSl CBeTa B
3bIBaIOT K03
qeHHSl
6JIH30K K e,ZI.HHHll.e, 3aBHCHMOCTb HHTeHCHBHOCTH H3JIytIeHHSl CBeTO,ZI.HO,ZI.a
B03paCTaeT.
OT TOKa HOCHT IIpaKTHtIeCKH JIHHeHHbIH xapaKTep H TaKOH ,ZI.HO,ZI. MO)KHO
Y
MeTO,ZI.a IIepeH3JIytIeHHSl
,ZI.JISl ocymeCTBJIeHHSl 3HaqHTeJIbHOrO tIHCJIa aKTOB IIepeH3JIytIeHHSl YCTPOH-
Ha3BaTb 6eCIIoporoBbIM JIa3epoM. Ha pHC.
15.14
,ZI.JISl cpaBHeHHSl IIOKa3aHbI
3aBHCHMOCTH HHTeHCHBHOCTH H3JIYQeHHSl 06bltIHOrO JIa3epa, JIa3epa C BbICO-
CTBO ,ZI.OJI)KHO 06JIa,ZI.aTb 60JIbIIIHM ,ZI.HaMeTpOM H3JIytIaIOmeH 06JIaCTH. 9TO
KHM K03
CHH)KaeT ero npHBJIeKaTeJIbHOCTb ,ZI.JISl IIpHMeHeHHSl B BOJIOKOHHO-OIITHqe-
6eciioporoBblx JIa3epOB Ha OCHOBe BepTHKaJIbHbIX pe30HaTopoB pa3pa60T-
CKHX CHCTeMax CBSl3H, r,ZI.e 60JIbIIIe IIO,ZI.XO,ZI.SlT ,ZI.HO,ZI.bI MaJIOrO ,ZI.HaMeTpa,
tIHKH CTOJIKHYJIHCb C PSl,ZI.OM IIp06JIeM, JIHilib OTQaCTH CBSl3aHHblX C HX
oco6eHHO eCJIH OHH cHa6)KeHbI corJIaCYIOmHMH JIHH3aMH. ,lI.PYfHM He,ZI.O-
H3rOTOBJIeHHeM. ,lI.JISl nOCTpoeHHSl TaKHX YCTPOHCTB H nOJIytIeHHSl BbICOKOH
CTaTKOM CBeTO,ZI.HO,ZI.OB C IIepeH3JIytIeHHeM
HHTeHCHBHOCTH H3JIYQeHHSl IIpH IIJIOTHOCTSlX TOKa HH)Ke IIOpOrOBoro 3HatIe-
HeBbICOKaSl MaKCHMaJIbHaSl qaCTOTa MO,ZI.YJISlll.HH, tITO CBSl3aHO C SlBJIeHHeM
HHSl He,ZI.OCTaTOtIHO 06eCnetIHTb cy6JIHHeHHYIO 3aBHCHMOCTb HHTeHCHBHOCTH
BHYTpeHHero IIOrJIOmeHHSl
H3JIytIeHHSl OT TOKa C He60JIbIIIHM IIeperH60M B 06JIaCTH IIepexo,ZI.a OT
BpeMeHH )KH3HH cnOHTaHHoro H3JIytIeHHSl. npaB,ZI.a, aBTopbI YCTpOHCTBa H He CTaBHJIH CBoeH 3a,ZI.atIeH C03,ZI.aHHe CBeTO,ZI.HO,ZI.a ,ZI.JISl pa60Thl B BOJIOKOHHO-OnTHtIeCKHX CHCTeMax CBSl3H, OHH
6eciioporoBoro pe)KHMa K pe)KHMy JIa3epHOH reHepall.HH. HH)Ke IIOpOrOBoro ypOBHSl TOKa CKOPOCTb MO,ZI.YJISlll.HH BbIXO,ZI.Horo H3JIytIeHHSl TaKHX YCTPOHCTB 6Y,ZI.eT OQeHb HH3KOH 110 cpaBHeHHIO C pa60ToH B pe)KHMe JIa3epHOH reHepall.HH. nOCKOJIbKY K03
Fit. 15. GBemoauOabt C pesoHamopoM
328
15. 7. JJ.pyeue cBemOauOabt C pesoHamopoM
329
KOHe'IHO, C03,lI.aTb JIa3ep C O'IeHb HH3KHM rroporoM reHepaUHH MO)!{HO, HO rrpH 3TOM OH ,lI.OJI)!{eH 6bITb O'IeHb MaJIbIX pa3MepoB, Hero BbIXO,lI.HaH MOmHOCTb H3JIY'IeHHH 6Y,lI.eT BeCbMa He60JIbWoH. Y rHrrOTeTH'IeCKOrO O,lI.HOMO,lI.OBOro CBeTO,lI.HO,lI.a C aKTHBHOH 06JIaCTbIO H3 'IeTbIpex KBaHTOBbIX HM 6e3 YCHJIeHHH, HO C K03cpcpHUHeHTOM MO)!{eT 6bITb BbIwe
50
(3 6JIH3KHM
MKA/MKM2 HJIH
HaXQ}K,lI.eHHH K03cpcpHUHeHTa
(3
5
K e,lI.HHHue, rrJIOTHOCTb TOKa He
KA/CM2. HCrrOJIb3YH CPOPMYJIY ,lI.JIH
,lI.JIH ,lI.H3JIeKTpH'IeCKOrO CToJI6HKa
«(3
> 0,5)
H 3TO 3Ha'IeHHe rrJIOTHOCTH TOKa, HaXO,lI.HM, 'ITO MOmHOCTb TaKoro CBeTO,lI.HO,lI.a He MO)!{eT 6bITb 60JIbWe
2
MKBT. O'IeBH,lI.HO, 'ITO 3Toro CJIHWKOM MaJIO,
'IT06bI TaKHe YCTpOHCTBa MOrJIH rrpHMeHHTbCH B 6bICTp0,lI.eHCTBYIOmHX CHCTeMax CBH3H, pa60TaIOmHX Ha CKOPOCTHX
100-650
M6HT/C, ,lI.JIH KOTOPbIX
MHHHMaJIbHaH MOmHOCTb H3JIY'IaTeJIH ,lI.OJI)!{Ha 6bITb He MeHbwe
10
MKBT.
B CBeTO,lI.HO,lI.ax C pe30HaTopOM, 06JIa,lI.aIOmHX 60JIbWHM BHYTpeHHHM YCHTOK, OTH. eon. PHC.
15.14.
CBblCOKHM
JIeHHeM H BCJIe,lI.CTBHe 3Toro MaJIbIMH BpeMeHaMH )!{H3HH HOCHTeJIeH, TOK
3aBHcHMoCTH HHTeHCHBHOCTH HSJIYLIeHHlI 06blLIHoro JIasepa, JIasepa K03
{3
H 6ecIIoporoBoro JIasepa.
Y
06b1LIHOrO JIasepa
Ha6JI1o.n.aeTclI OTLIeTJIHBblH IIopor IIO TOKY. BJIasepe C BblCOKHM
{3
3TOT IIopor
HaKa'IKH MO)!{eT 6bITb 60JIbWe, HO, K CO)!{aJIeHHIO, ,lI.JIH H3rOTOBJIeHHH TaKHX rrOJIyrrpOBO,lI.HHKOBbIX YCTPOHCTB B HaCTOHmee BpeMH HeT TeXHOJIOrH'IeCKOH 6a3bI. MaJIbIe H3JIY'IaTeJIbHbIe BpeMeHa )!{H3HH HOCHTeJIeH rr03BOJIHJIH 6bI
Bblpa)!{eH MeHee lIpKO. O,nHaKo npH HCCJIe.n.OBaHHH cIIeKTpa HSJIYLIeHHlI H LIaCTOTbI
CBeTO,lI.HO,lI.aM pa60TaTb B JIa3epHOM pe)!{HMe. TIpH 3TOM YCTpOHCTBa 06JIa,lI.a-
MO.n.YJIlIIJ:HH TaKHX YCTPOHCTB HaJIHLIHe 3Toro IIopora CTaHOBHTClI saMeTHblM. fHIIO-
JIH 6b1 60JIbWeH MOmHOCTbIO H3JIY'IeHHH, HO H3-3a MHHHaTIOpHbIX pa3MepOB
TeTHLIecKHH 6ecIIoporoBblH JIasep o6JIa.n.aeT K03
{3
6JIHSKHM K e.n.HHHIJ:e,
H ,nJIlI 06eCIIeLIeHHlI pe)!{HMa JIaSepHOH reHepaIJ:HH B ero aKTHBHOH 06JIaCTH Ha.n.o IIo.n.,nep)!{HBaTb Tpe6yeMblH ypoBeHb IIJIOTHOCTH HOCHTeJIeH H IIo.n.aBJIlITb Bce MO.n.bI HSJIYLIeHHH KpoMe OCHOBHOH
H rrp06JIeM C OXJIa)!{,lI.eHHeM OHH rrOKa He peaJIH30BaHbI. B 3aKJIIO'IeHHe OTMeTHM: ,lI.HaMeTp CBeTO,lI.HO,lI.OB C pe30HaTopOM ,lI.OJI)!{eH 6bITb- 60JIbWe
5-10
MKM,
H rrpH 3TOM OHH ,lI.OJI)!{HbI OCTaBaTbCH MHOrOMO,lI.OBbIMH H3JIY'IaTeJIHMH; rrOJIY'IeHHH JIa3epHOH reHepaUHH CHCTeMa ,lI.OJI)!{Ha 06JIa,lI.aTb HeKoTopbIM
pa3MepbI rrOJIyrrpOBO,lI.HHKOBbIX JIa3epOB C BepTHKaJIbHbIM pe30HaTopOM
YCHJIeHHeM, ,lI.JIH 'Iero He06xo,lI.HMO rrpOBO,lI.HTb HaKa'IKY aKTHBHoH 06JIaCTH.
,lI.OJI)!{HbI orrpe,lI.eJIHTbCH TeXHOJIOrH'IeCKHMH rrapaMeTpaMH, a He BeJIH'IHHOH K03cpcpHUHeHTa (3;
)J.JIH
06eCrre'IeHHH
YCJIOBHH
pe)!{HMa JIa3epHOH
reHepaUHH
B aKTHBHoH
06JIaCTH HY)!{HO rrO,lI.,lI.ep)!{HBaTb orrpe,lI.eJIeHHYIO rrJIOTHOCTb HOCHTeJIeH, 'ITO
rrOCKOJIbKY crrOHTaHHoe H3JIY'IeHHe HBJIHeTCH HCTO'IHHKOM rrOBbIweHHbIX
cpaKTH'IeCKH 03Ha'IaeT HaJIH'IHe HeKOToporo rropora.
WYMOB, JIa3epbI C BbICOKHM K03cpcpHUHeHTOM Tpe60BaHHbIMH.
MO)!{HO rrpe,lI.rrOJIO)!{HTb, 'ITO BHYTpeHHHH KBaHTOBbIH BbIXO,lI. YCTPOHCTB, B KOTOPbIX rrO,lI.aBJIeHbI
Bce OrrTH'IeCKHe MO,lI.bI KpOMe
6JIH30K K
B
H,lI.eaJIbHOMY.
3TOM CJIY'Iae ,lI.a)!{e rrpH
OCHOBHOH,
(3
MorYT OCTaTbCH HeBOC-
6Y,lI.eT
O'IeHb MaJIOM TOKe
rrJIOTHOCTb HOCHTeJIeH B aKTHBHOH 06JIaCTH 6Y,lI.eT Me,lI.JIeHHO paCTH ,lI.0 Tex rrop, rrOKa aKTHBHaH 06JIaCTb He CTaHeT rrp03pa'IHOH H 6Y,lI.eT rrpe06JIa-
15.7.
,lJ;pyrHe CBeTO,1J;HO,1J;bI C pe30HaTopOM
,lI.aTb TOJIbKO O,lI.Ha OrrTH'IeCKaH MO,lI.a. KOHe'IHO, TaKHe YCTpoHcTBa 6Y,lI.YT
BeCbMa BepOHTHO, 'ITO y)!{e B 6JIH)!{aHWeM 6Y,lI.ymeM ,lI.JIH C03,lI.aHHH
06JIa,lI.aTb O'IeHb HH3KHM rroporOM JIa3epHOH reHepaUHH, HO rrpH 3TOM HM
CBeTO,lI.HO,lI.OB C pe30HaTopOM H HCTO'IHHKOB H3JIY'IeHHH C OrpaHH'IeHHeM
He06xo,lI.HM ,lI.OCTaTO'IHO 60JIbWOH rrpOMe)!{YToK BpeMeHH ,lI.JIH HaKOrrJIeHHH
CPOTOHOB 6Y,lI.YT HCrrOJIb30BaTbCH HOBbIe MaTepHaJIbI. B03MO)!{HO, HeKOTopbIe
Tpe6yeMoro rrpocTpaHcTBeHHoro 3apH,lI.a BHYTPH aKTHBHoH 06JIaCTH, 'IT06bI
H3 HHX 6Y,lI.YT Te, KOTopbIe B HaCTOHmee BpeMH rrpHMeHHIOTCH B CHCTeMax
C,lI.eJIaTb ee rrp03pa'IHOH ,lI.JIH CPOTOHOB OCHOBHOH MO,lI.bI, T. e. 6ecrroporoBbIe
CBH3H H oT06pa)!{eHHH HHcpopMaUHH. YCTpOHCTBa, OCHOBaHHbIe Ha rrpHH-
JIa3epbI HBJIHIOTCH HHepUHoHHbIMH. K TOMY )!{e ,lI.a)!{e rrpH YCJIOBHH rrOJIHOrO
UHrre crrOHTaHHoro H3JIY'IeHHH C OrpaHH'IeHHeM CPOTOHOB, 6Y,lI.YT BCer,lI.a
OTCYTCTBHH OCHOBHOH MO,lI.b1 rrpH HH3KHX rrJIOTHOCTHX HOCHTeJIeH B aKTHB-
KOHKypHpOBaTb C 06bI'IHbIMH CBeTO,lI.HO,lI.aMH, JIa3epaMH H ,lI.pyrHMH H3JIY'Ia-
HOH 06JIaCTH, O'IeHb TPY,lI.HO ,lI.06HTbCH rrOJIHOrO rrO,lI.aBJIeHHH ,lI.PyrHx MO,lI.
TeJIHMH. Qepe3 HeKOTopoe BpeMH He 6Y,lI.eT HHKaKHX rrp06JIeM C rrO,lI.60pOM
H3JIY'IeHHH, T. e. HeH36e)!{HbI rroTepH HH)!{eKTHpOBaHHbIx HOCHTeJIeH. TIpaK-
MaTepHaJIOB ,lI.JIH cepHHHoro BbIIIycKa YCTPOHCTB, H3JIY'IaIOmHX CBeT Ha
TH'IeCKH HeB03MO)!{HO ,lI.06HTbCH rrOJIHOrO rrO,lI.aBJIeHHH 60KoBoro H3JIY'IeHHH,
3a,lI.aHHOH ,lI.JIHHe BOJIHbI, rrpHrO,lI.HbIx ,lI.JIH cooTBeTcTBYIOmHx rrpHMeHeHHH.
rr03ToMY ,lI.0 HaCTOHmero BpeMeHH rrOJIyrrpOBO,lI.HHKOBbIe 6ecnoporoBbIe JIa-
YKa)!{eM HeCKOJIbKO cOBpeMeHHbIx MaTepHaJIOB, HCCJIe,lI.yeMbIx C ueJIbIO CO3,lI.aHHH HOBbIX THrrOB H3JIY'IaTeJIeH.
3epbI HBJIHIOTCH rHrrOTeTH'IeCKHMH YCTpoHcTBaMH.
Til. 15. C8emoauoabl c peaonamopOM
330 B
pa60Te (Wilkinson et aI.,
1995)
15.8. Bu61luoepaqJUtteCKutl cnUCOK
c006III.aeTCSI 0 C03)l.aHHH TOHKO-
nJIeHOLfHOro YCTpoikTBa C MeTaJIJIHLfeCKHMH 3epKaJIaMH Ha OCHOBe AIGaAs/GaAs
880
BOJIHbI
Ha KpeMHHeBoH HM,
a
B pa60Te
nO)l.JIO:lKKe,
H3JIYLfalOIII.ero
(Pavesi et aI.,
1996) -
CBeT Ha )l.JIHHe
06 H3rOTOBJIeHHH·
CBeTO)l.HO)l.a C pe30HaTopoM Ha OCHOBe nopHCToro KpeMHHSI C )l.JIHHOH BOJIHbI H3JIYLfeHHH
750
HM. I1MelOTcH C006III.eHHH 0 pa3pa60TKax CBeTO)l.HO)l.OB C
o~a
flJIH E) BOJIH,
331
6Y)l.eT cnoc06Ha nO)l.aBJISITb 60KoBoe H3JIYLfeHHe onpe)l.e-
JIeHHbIX 9HepmH. O)l.HaKO )l.JISI 9cpcpeKTHBHoro nO)l.aBJIeHHSI 60KoBoro H3JIYLIeHHH H3JIYLIalOIII.aSI CBeT 06JIaCTb )l.OJI:lKHa HMeTb )l.HnOJIbHYIO opHeHTaII.HIO B)l.OJIb OCH CTep:lKHSI (TaKYIO :lKe, KaK B KBaHTOBOH SIMe npH H3JIYLIaTeJIbHOH peKOM6HHaII.HH 9JIeKTpOH-)l.b1pKa). CTPYKTYPbI C nepHO)l.HLIecKHMH oTBep-
650
CTHHMH xapaKTepH3YIOTCSI MeHbIIIHMH 3anpeIII.eHHbIMH 30HaMH no cpaBHe-
CdHgTe/HgTe C )l.JIHHOH
HHIO co CTep:lKHeBbIMH CTpYKTypaMH, HO npH 9TOM OHH MorYT ycneIIIHo
I1HTepecHoH CTPYKTYPOH 06JIa)l.aeT CBeTO)l.HO)l. Ha OCHOBe GaAs/AlxO y ,
no ce6e HJIH B COLfeTaHHH C nJIaHapHbIMH pe30HaTopaMH TeopeTHLIecKH
pe30HaTopoM: nOJIHMepHOro CBeTO)l.HO)l.a C )l.JIflHOH BOJIHbI H3JIYLfeHflSI HM (Fisher et aI., BOJIHbI H3JIYLfeHHSI
1995) H CBeTO)l.HO)l.a Ha OCHOBe 3,2 MKM (Hadji et aI., 1995).
pa60TaIOIII.HH Ha)l.JIflHe BOJIHbI
950
nO)l.aBJISITb H3JIYLIeHHe 060HX THnOB nOJISIpH3aII.HH. TaKHe CTPYKTYPbI caMH
HM (Huffaker et aI.,
1995).
B
9TOM
CBeTO)l.HO)l.e Ha cBeTonponycKalOIII.ee 3epKaJIO HaHeceH CJIOH OKCH)l.a aJIIOMHHflSI,
nOJIYLfaeMbIH npH OKHCJIeHHH AlAs.
TaKaSI CTpYKTypa 3epKaJIa
n03BOJISIeT npfl He60JIbIIIOH 9cpcpeKTHBHoH )l.JIHHe pe30HaTopa MaKcHMa.rrbHo
MO:lKHO HCnOJIb30BaTb )l.JISI YCHJIeHHSI npO)l.OJIbHOrO H3JIYLIeHHSI. ,UpyrHM H3JIYLfaTeJIeM, nocTpoeHHbIM Ha npHHII.Hne orpaHHLfeHHSI cpoTOHOB, SI~JISIeTCSI JIa3ep Ha OCHOBe MHKpO)l.HCKa (McCall et aI.,
1992),
HMelOIII.HH CPOPMY TOHKoro )l.H9JIeKTpHLIecKoro )l.HCKa, no KpaSIM KOToporo
YCHJIHBaTb H3JIYLfeHHe CBeTO)l.HO)l.a. BTopoe 3epKaJIO CBeTO)l.HO)l.a )l.aHHOrO
BbIXO)l.HT H3JIYLIeHHe. nYCTb MO)l.a JIa3epHOro H3JIYLIeHHSI cooTBeTcTByeT
Tflna H3rOTaBJIHBaeTCSI H3 cepe6pa. PaccMaTpHBaeTcSI eIII.e O)l.HH HHTepec-
MO)l.e no)l. HOMepoM
M,
TOr)l.a Bblpa:lKeHHe exp( iM
cp)
onHCbIBaeT H3MeHe-
(938-970 HM), 1995). Ero BepxHee
HHe 9JIeKTpHLIeCKoro nOJISI BOKpyr II.HJIHH)l.pHLIeCKoro )l.HCKa. nOCKOJIbKY
3epKaJIO npe)l.CTaBJIHeT C060H MeM6paHY, CPOPMY KOTOPOH MO:lKHO MeHSITb
KaK nOJIO:lKHTeJIbHbIM, TaK H OTpHII.aTeJIbHbIM. ,UHCK MO:lKHO H3rOTOBHTb
HblH CBeTO)l.flO)l. C pe30HaTopOM C )l.JIHHOH BOJIHbI fl3JIYLfeHflSI perYJIHpyeMoH B IIIHPOKOM )l.Hana30He (Larson, Harris,
BOJIHbI MorYT pacnpocTpaHSITbcSI B 060HX HanpaBJIeHHSIX,
M
MO:lKeT 6bITb
TaKOH TOJIIII.HHbI, LIT06bI H3JIYLIeHHe, nepneH)l.HKYJISIpHOe )l.HCKY, nO)l.aBJISI-
npH nOMOIII.H 9JIeKTpOCTaTHLfeCKHX CHJI.
JIOCb. MaJIble )l.HCKH MorYT nO)l.)l.ep:lKHBaTb TOJIbKO HeCKOJIbKO onTHLIeCKHX MO)l., LITO 06ecneLIHBaeT BbICOKoe 3HaLIeHHe K09cpcpHII.HeHTa cnOHTaHHoro
15.8.
J(pyrHe opHrHHaJIbHble H3JIyqaTeJIH
H3JIYLIeHHSI CTblO
C OrpaHHQeHHeM
Q,
(3.
Ha TaKHX MO)l.aX YCTpOHCTBa 06JIa)l.a1OT BbICOKOH )l.06POTHO-
LITO n03BOJISIeT HM pa60TaTb B pe:lKHMe JIa3epHOH reHepaII.HH. EIII.e
O)l.HHM )l.OCTOHHCTBOM MHHHaTlOpHbIX YCTPOHCTB SIBJISIeTCSI HanpaBJIeHHOCTb )l.aHHOM pa3)l.eJIe 6Y)l.YT paCCMOTpeHbI )l.aJIeKO He Bce TfinbI COBpe-
H3JIYLIeHHSI no nJIOCKOCTH 06pa3II.a, LITO n03BOJISIeT pa3MeIII.aTb HeCKOJIb-
MeHHbIX H3JIYLfaTeJIeH, pa60TalOIII.HX Ha npHHII.Hne orpaHHLfeHHSI CPOTOHOB.
KO TaKHX )l.HCKOB Ha O)l.HOH nO)l.JIO:lKKe. O)l.HaKO CYIII.eCTBYIOT cepbe3Hble
B
O)l.HaKO nOJIe3HO 3HaTb npHHII.HnbI pa60TbI HeKOTopbIX HCTOLfHHKOB CBeTa
np06JIeMbI npH COrJIaCOBaHHH TaKHX YCTPOHCTB C BOJIHOBO)l.aMH H CBeTOBO-
C orpaHHLfeHHeM CPOTOHOB.
)l.aMH. PaccMoTpeHbI (Mohideen et aI.,
(/>omOl-lHble KpUCmaJlJ/.bl HJIH cmpYKmYPbl c 3anpeUfeHHOU 30HOU 8Afl cpomOH08 CO)l.ep:lKaT )l.ByX- HJIH TpeXMepHble 06JIaCTH )l.JISI orpaHHLfeHHSI
CJIY:lK6bI, )l.Hana30Ha pa60LfHx TeMnepaTYP H MeTO)l.bI naCCHBaII.HH aKTHBHbIX
CPOTOHOB, CCPOpMHpOBaHHble JIH60 HaHeceHHeM nepHO)l.HLfeCKOro pHCYHKa Ha
C HenpepbIBHoH reHepaII.HeH CBeTa npH KOMHaTHOH TeMnepaType )l.0 CHX nop np06JIeMaTHLIHo.
H3JIYLfalOIII.YIO CBeT aKTHBHYIO 06JIaCTb, JIH60 nO)l.60pOM COOTBeTCTBYIOIII.HX
1993)
cnoc06bI nOBblIIIeHHH cpoKa
CJIOeB JIa3epOB Ha OCHOBe ~HKpO)l.HCKOB. O)l.HaKo C03)l.aHHe TaKHX JIa3epOB u
MaTepHaJIOB )l.JISI CJIOeB, rpaHHLfaIII.HX C aKTHBHOH 06JIaCTblO. npHBe)l.eHbI npHMepbI TaKHX CTPYKTYP (Joannopoulos et aI.,
1996;
Fan et aI.,
1999;
Erchak et aI.,
2001).
1995;
Baba, Matsuzaki,
npe)l.CTaBJIeHbI OLfeHb 06Ha)l.e-
:lKHBalOIII.He pe3YJIbTaTbI, CBH)l.eTeJIbCTBYIOIII.He 0 IIIecTflKpaTHoM YBeJIHLfeHHH BbIXO)l.a CBeTa B TaKHX YCTpoHCTBax B HanpaBJIeHHfI, nepneH)l.HKYJISIpHOM K nOBepXHOCTH.
BH6JIHOrpa
Baba T: and ~~tsuzaki T., "GaInAsP/InP 2-dimensional photonic crystals" in Mlcrocavltles and Photonic Bandgaps edited by J. Rarity and C. Weisbuch, p. 193 (Kluwer Academic Publishers, Netherlands, 1996). Blon~:l1~ J., De Neve H., Deme~s~er P., Van Daele P., Borghs G., and Baets R. 16Yo external quantum effiCiency from planar microcavity LED's at 940 (~9~. precise matching of the cavity wavelength" Electron. Lett. 31, 1286
B 60KOBbIX HanpaBJIeHHSIX. ECJIH CTep:lKHeBaH CTpYKTypa HMeeT 60JIbIIIYIO IIIHPHHY 3anpeIII.eHHOH 30HbI )l.JISI nonepeLfHbIX MarHHTHbIX (TM HJIH H) BOJIH fI MeHbIIIYIO 3anpeIII.eHHYIO 30HY )l.JISI nonepeLfHblx 9JIeKTpflLfecKHx (TE
De Martini F., Innocenti G., Jacobovitz G. R., and Mataloni P. "Anomalous spontaneous· emission time in a microscopic optical cavity" Phys. Rev. Lett 59, 2955 (1987). .
332
I
II "
FA. 15. CBemoauOabt c pe301tamOpOM
De Neve H., Blondelle J., Baets R., Demeester P., Van Daele P., and Borghs G. "High efficiency planar microcavity LEDs: Comparison of design and experiment"IEEE Photonics Technol. Lett. 7, 287 (1995). Erchak A. A., Ripin D. J., Fan S., Rakich P., Joannopoulos J. D., Ippen E. P., Petrich G. S., and Kolodziejski L. A. "Enhanced coupling to vertical radiation using a two-dimensional photonic crystal in a semiconductor light-emitting diode"Appl. Phys. Lett. 78, 563 (2001). Fan S., Villeneuve P. R., Joannopolous J. D., and Schubert E. F. "High extraction efficiency of spontaneous emission from slabs of photonic crystals" Phys. Rev. Lett. 78, 3294 (1997). Fisher T. A., Lidzey D. G., Pate M. A., Weaver M. S., Whittaker D. M., Skolnick M. S., and Bradley D. D. C. "Electroluminescence from a conjugated polymer microcavity structure" Appl. Phys. Lett. 67, 1355 (1995). Hadji E., Bleuse J., Magnea N., and Pautrat J. L. "3.2 /tm infrared resonant cavity light emitting diode" Appl. Phys. Lett. 67,2591 (1995). Huffaker D. L., Lin C. c., Shin J., and Deppe D. G. "Resonant cavity light emitting diode with an AI",Oy/GaAs reflector" Appl. Phys. Lett. 66, 3096 (1995). Hunt N. E. J., Schubert E. F., Logan R. A., and Zydzik G. J. "Enhanced spectral power density and reduced Iinewidth at 1,3/tm in an InGaAsP quantum well resonant-cavity light-emitting diode" Appl. Phys. Lett. 61, 2287 (1992). Hunt N. E. J., Schubert E. F., Kopf R. F., Sivco D. L., Cho A. Y., and Zydzik G. J. "Increased fiber communications bandwidth from a resonant cavity Iightemitting diode emitting at >. = 940 nm" Appl. Phys. Lett. 63, 2600 (1993). Hunt N. E. J., Schubert E. F., Sivco D. L., Cho A. Y., Kopf R. F., Logan R. A., and Zydzik G. J. "High efficiency, narrow spectrum resonant cavity Iightemitting diodes" in Confined Electrons and Photons edited by E. Burstein and C. Weisbuch (Plenum Press, New York, 1995a). Hunt N. E. J., Vredenberg A. M., Schubert E. F., Becker P. c., Jacobson D. c., Poate J. M., and Zydzik G. J. "Spontaneous emission control of Er3+ in Si/Si02 microcavities" in Confined Electrons and Photons edited by E. Burstein and C. Weisbuch (Plenum Press, New York, 1995b). Joannopoulos J. D., Meade R. D., and Winn J. N. Photonic Crystals (Princeton University Press, Princeton NJ, 1995). Kobayashi T., Segawa T., Morimoto A., and Suet a T., paper presented at the 43rd fall meeting of the Japanese Society of Applied Physics, Tokyo, Sept. (1982). Larson M. C. and Harris Jr. J. S. "Broadly tunable resonant-cavity light emission" Appl. Phys. Lett. 67, 590 (1995). Lear K. L. and Schneider Jr. R. P. "Uniparabolic mirror grading for vertical cavity surface emitting lasers" Appl. Phys. Lett. 68, 605 (1996). McCall S. L., Levi A. F. J., Slusher R. E., Pearton S. J., and Logan R. A. "Whispering-gallery mode microdisk laser" Appl. Phys. Lett. 60, 289 (1992). Mitel Corporation, Sweden. Photograph of RCLED is gratefully acknowledged (1999). Mohideen U., Hobson W.S., Pearton J., Ren F., and Slusher R.E. "GaAs/AIGaAs microdisk lasers" Appl. Phys. Lett. 64, 1911 (1993).
15.8. Bu6AuoepatjJu'tecKuu cnUCOK
333
Nakayama T., Itoh Y., and Kakuta A. "Organic photo- and electroluminescent devices with double mirrors" Appl. Phys. Lett. 63, 594 (1993). Osram Opto Semiconductors Corp., Germany. RCLED photograph is gratefully acknowledged (1999). Pavesi L., Guardini R., and Mazzoleni C. "Porous silicon resonant cavity light emitting diodes" Solid State Comm. 97, 1051 (1996). Schnitzer I., Yablonovitch E., Caneau c., and Gmitter T. J. "Ultra-high spontaneous emission quantum efficiency, 99.7% internally and 72% externally, from AIGaAs/GaAs/AIGaAs double heterostructures" Appl. Phys. Lett. 62 131 (1993). ' Schubert E. F., Wang Y.-H., Cho A. Y., Tu L.-W., and Zydzik G. J. "Resonant cavity light-emitting diode" Appl. Phys. Lett. 60, 921 (1992a). Schubert E. F., Vredenberg A. M., Hunt N. E. J., Wong Y. H., Becker P. c., Poate J. M., Jacobson D. C., Feldman L. c., and Zydzik G. J. "Giant enhancement of luminescence intensity in Er-doped Si/Si02 resonant cavities" Appl. Phys. Lett. 61, 1381 (1992b). Schubert E. F., Tu L. W., Zydzik G. J., Kopf R. F., Benvenuti A., and Pinto M. R. "Elimination of heterojunction band discontinuities by modulation doping" Appl. Phys. Lett. 60,466 (1992c). Schubert E. F., Hunt N. E. J., Micovic M., Malik R. J., Sivco D. L., Cho A. Y., and Zydzik G. J. "Highly efficient light-emitting diodes with microcavities" Science 265, 943 (1994). Schubert E. F., Hunt N. E. J., Malik R. J., Micovic M., and Miller D. L. "Temperature and modulation characteristics of resonant cavity light-emitting diodes" IEEE J. Lightwave Technol. 14, 1721 (1996). Streubel K., Helin U., Oskarsson V., Backlin E., and Johanson A. "Highbrightness visible (660 nm) resonant-cavity light-emitting diode" IEEE Photonics Technol. Lett. 10, 1685 (1998). Tu L. W., Schubert E. F., Zydzik G. J., Kopf R. F., Hong M., Chu S. N. G., and Mannaerts J. P. "Vertical cavity surface emitting lasers with semitransparent metallic mirrors and high quantum efficiencies" Appl. Phys. Lett. 57 2045 (1990). ' Whitaker T. "Resonant cavity LEDs" Compound Semiconductors 5,32 (1999). Wilkinson S. T., Jokerst N. M., and Leavitt R. P. "Resonant-cavity-enhanced thinfilm AIGaAs/GaAs/AIGaAs LED's with metal mirrors" Appl. Opt. 34 8298 (1995). ' Wirth R., Karnutsch C., Kugler S., and Streubel K. "High-efficiency resonantcavity LEDs emitting at 650 nm" IEEE Photonics Technol. Lett. 13 421 (2001). ' Wirth R., Huber W., Karnutsch c., and Streubel K. "Resonators provide LEDs with laser-like performance" Compound Semiconductors 8, 49 (2002). Yokoyama H. "Physics and device applications of optical microcavities" Science 256,66 (1992).
16.1.
r JIaBa
Pel{enmOpbt 'teJlOee'teCKOi!O i!Jlasa
335
16
qYBCTBHTEJIbHOCTb qEJIOBEqECKOrO r JIA3A H q,OTOMETPHqECKHE XAPAKTEPHCTHKH [JIa3a qeJIOBeKa HBJIHIOTCH OCHOBHbIMH rroTpe6HTeJIHMH CBeTa, rrOCTYrraIOll1.erO OT CBeTO)l.HO)l.OB BH)l.HMOrO crreKTpa. B
,)TOH rJIaBe 6Y)l.YT pac-
CMaTpHBaTbCH OCHOBHble CBOHCTBa qeJIOBeqeCKOrO rJIa3a H 3pHTeJIbHOrO BocrrpHHTHH. Oco6oe BHHMaHHe 6Y)l.eT y)l.eJIeHO TaKOH xapaKTepHCTHKe, KaK qYBCTBHTeJIbHOCTb qeJIOBeqeCKOrO rJIa3a H ee CBH3H C cpoToMeTpHqeCKHMH
PHC. 16.1. nOnepeqHOe CeqeHHe qeJIOBeqeCKOrO rJIa3a (a). CxeMa HqeHKH CeTqaTKH, B COCTaB KOTOPOH BXO,n:HT CTep)!meBble H KOHHqeCKHe peuenTopbI - naJIOqKH H KOJI60qKH (6) (Encyclopedia Britannica, 1994)
BeJIHqHHaMH. HOCTb BocrrpHHTHH UBeTa. HarrpHMep, 6e3JIYHHoH HOqbIO )l.JIH qeJIOBeKa Bce
Ha pHC. Britannica,
16.1. Peu.enTopbI qeJIOBeqeCKOrO rJIa3a
06beKTbI TepHIOT CBOH UBeTa H BocrrpHHHMaIOTcH KaK pa3Hble OTTeHKH
16.1, a rrOKa3aHa cxeMa qeJIOBeqeCKOrO rJIa3a (Encyclopedia 1994). BHYTpeHHHH rroBepxHocTb rJIa3HOrO H6JIOKa rroKpbITa
MeHee
ceporo. CKOTOrrHqeCKHH pe)KHM 3peHHH cooTBeTcTByeT ypOBHIO HPKOCTH 0,003 K)l./M 2 . CYll1.eCTByeT ell1.e O)l.HH pe)KHM 3peHHH, 3aHHMaIOll1.HH
rrpOMe)KYTOqHOe rrOJIO)KeHHe Me)K)l.Y cpoTOrrHqeCKHM H CKOTOrrHqeCKHM 3pe-
MeaOnUtteCKUM apeHueM.
060JIOqKOH, Ha3bIBaeMOH CeTqaTKOH, KOTopaH HBJIHeTCH CBeTOqYBcTBHTeJIb-
HHeM, Ha3bIBaeMbIH
HOH qaCTbIO rJIa3a.
HPKOCTH B HHTepBaJIe
TaK)Ke H306pa)KeHa HMKa, rrpe)l.CTaBJIHIOll1.aH C060H
0,003-3
3TOT pe)KHM COOTBeTcTByeT
K)l./M 2 .
ueHTpaJIbHYIO 06JIaCTb CeTqaTKH 6oraTYIO KOJI6oqKaMH, KOTopaH rrpH)l.aeT OCTPOTY 3peHHIO. Ha pHC. KH, COCTOHll1.aH H3
KO.ll6otteK),
16.1,6 rrpe)l.CTaBJIeHa
Cmep:JICHe8blX
H
CTpYKTypa HqeHKH CeTqaT-
lWHUtteC1WX pe~enmopo8 - (na./WtteK
H
JI)'HHhlH CBeT lie3nyHHaJI HO'ib (CIIJIOlDHaJI 06JIa'IHoCTb) (rroJIHonyHHe)
PaHHHe C)'MepKH
Mara3HH HJIH
ocpnc
Ha OTKphlTOM B03.l\YXe (COJIHe'lHLrn ,lIeHL)
a TaK)Ke HepBoB, rrepe)l.aIOll1.HX HHcpopMaUHIO B M03r. IlaJIoqeK
HaMHoro 60JIbIIle, qeM KOJI60qeK, H OHH 06JIa)l.aIOT 60JIee BbICOKOH CBeTOqYBCTBHTeJIbHOCTbIO. IlaJIoqKH BocrrpHHHMaIOT H3JIyqeHHe Bcero BH)l.HMOro crreKTpa, a KOJI60qKH -
TOJIbKO orrpe)l.eJIeHHOH ero qaCTH. CYll1.eCTByeT
TpH THrra KOJI60qeK, BocrrpHHHMaIOll1.HX H3JIyqeHHe B KpaCHOM, 3eJIeHOM H rOJIy60M )l.Harra30Hax BH)l.HMOrO crreKTpa. Ilo3ToMY OHH H Ha3bIBaIOTCH peuerrTopaMH KpacHoro, 3eJIeHOrO H rOJIy60ro UBeTa HJIH rrpocTo KpacHbIMH, 3eJIeHbIMH H CHHHMH KOJI60qKaMH. Ha pHC.
16.2
rrOKa3aHbI TpH pa3JIHqHbIX pe)KHMa 3peHHH H )l.JIH Ka)K)l.OrO
H3 pe)KHMOB YKa3aHbI rpyrrrrbI pa60TaIOll1.HX peueIITOpOB (Osram Sylvania,
2000). QJomOnUtteCKoe apeHue -
3TO 3pHTeJIbHOe BocrrpHHTHe 06beKTOB
PHC. 16.2. npH6JIH3HTeJIbHble ,n:Hana30HbI, cooTBeTcTBYIOIII.He pa3JIHqHbIM pe)!{HMaM 3peHHH H pa60Te pa3Hblx rpynn peueIITOpoB (Osram Sylvania, 2000)
qeJIOBeqeCKHM rJIa30M rrpH BbICOKOM ypoBHe BHeIIlHeH OCBell1.eHHOCTH (HarrpHMep
rrpH )l.HeBHOM cBeTe),
KOr)l.a B OCHOBHOM pa60TaIOT KOJI60qKH. Ha pHC.
16.3
rrpHBe)l.eHbI rrpH6JIH3HTeJIbHble qiYHKUHH crreKTpaJIbHOH
qYBCTBHTeJIbHOCTH rraJIOqeK H KOJI60qeK
rrpHHTHe 06beKTOB qeJIOBeqeCKHM rJIa30M rrpH HH3KOM ypOBHe BHeIIlHeH
HOqHOe 3peHHe (cKoTOrrHqeCKHH pe)KHM) rro cpaBHeHHIO C )l.HeBHblM 3peHH-
(Dowling,
1987).
BH)l.HO,
qTO
OCBell1.eHHOCTH (HarrpHMep HO%IO), KOr)l.a B OCHOBHOM pa60TaIOT rraJIoq-
eM (cpOTOrrHqeCKHH pe)KHM) cJIa6ee B KpacHoH 06JIaCTH crreKTpa H, COOT-
KH, qYBCTBHTeJIbHOCTb KOTOPbIX HaMHoro BbIIIle, qeM KOJI60qeK. O)l.HaKO
BeTCTBeHHO, CHJIbHee B rOJIy60M )l.Harra30He. CJIe)l.YIOll1.He pa3)l.eJIbI 6Y)l.YT
B 3TOM pe)KHMe Y qeJIOBeqeCKOrO rJIa3a CYll1.eCTBeHHO CHH)KaeTCH crroc06-
B OCHOBHOM rrOCBHll1.eHbl 06cY)K)l.eHHIO pe)KHMa cpoTOrrHqeCKOrO 3peHHH.
TJl.
336
16.
16.2.
lfYBcmBUmeJlbftOCmb 'leJlOee'leC1WeO eJlaaa
OCltoBftble paaUOMempU'leC1We U c/JomoMempU'leC1We eaUftUtt,bl
H pa3MepbI (pHC.
337
16.4). GUlla C8ema om OaftOU cmaH.aapmHOU C8ettU
pa8HRJtaCb 1,0 Ka. TaKHM o6pa30M, CHJIY CBeTa JIIo6oro HCTOqHHKa CBeTa MO)KHO xapaKTepH30BaTb qHCJIOM CTaH.lI.apTHbIX CBeqei1:, KOTopble COBMeCTHO H3JIyqalOT CBeT C TaKOi1: )Ke HHTeHCHBHOCTblO. E.lI.HHHua
C8e'la
He BXO.ll.HT B CHCTeMY
Cl1 H B HaCTOHIll.ee BpeMH rrOqTH He HCrrOJIb3yeTCH.
G8em080U nomOK,
TaK)Ke HBJIHIOIll.Hi1:CH
xapaKTepH3yeT MOIll.HOCTb H3JIyqeHHH HCTOqHHKa CBeTa rro ee BocrrpHHTHIO qeJIOBeqeCKHM rJIa30M. E.lI.HHHuei1: H3MepeHHH CBeTOBoro rrOTOKa HBJIHeTCH
JlIOMeH (JIM). no orrpe.ll.eJIeHHIO C8em080U nomOK om MOHoxpOMamUtteCKOeo UCmOttHUKa C MOUfHocmblO U3JlytteHUR (1/683) Em Ha aJlUHe 80JlHbl 555 HM pa8eH 1 JlM (JlIOMeHY). JIIOMeH BXO.ll.HT B cHcTeMY Cl1.
.D.mma BOlIHLI A, HM PHC.
16.3.
HOpMHpoBaHHali cneKTpaJIbHali qYBcTBHTeJIbHOCTb naJIOqeK H KOJI6oqeK CeTqaTKH qeJIOBeqeCKOrO rJIa3a (Dowling,
1987)
. 113 cpaBHeHHH orrpe.ll.eJIeHHi1: KaH.lI.eJIbI H JIIOMeHa CJIe.ll.yeT, qTO .lI.eJIa paBHa
1
JIIOMeHY, .lI.eJIeHHoMY Ha
1
CTepa.ll.HaH, T. e.
1
K.lI. =
1
1
KaH-
JIM/Cp.
OTClO.lI.a HaXO.ll.HM, qTO cBeToBoi1: rrOTOK H30TporrHoro HCTOqHHKa H3JIyqeHHH
16.2.
OCHOBHble p8,lJ.HOMeTpHlleCKHe H cpoTOMeTpHlleCKHe
C CHJIOi1: CBeTa
1
K.lI. paBeH
OC8eUfeHHocmb -
eAHHHD;bI
47f
JIM HJIH
12,57
JIM.
3TO OTHOIIIeHHe CBeTOBororrOTOKa K e.ll.HHHue OCBe-
Ill.aeMoi1: rrJIOIll.a.ll.H. E.lI.HHHuei1: H3MepeHHH OCBeIll.eHHOCTH B CHCTeMe Cl1
PaaUOMempUtteCKue eaUHUl1bl
xapaKTepH3YlOT
3JIeKTpOMarHHTHbiX H3JIyqeHHi1:. l1x, B qaCTHOCTH, HCrrOJIb3YlOT .lI.JIH orrHcaHHH H3JIyqeHHi1: B TepMHHax
m08blM nomOKOM).
onmUtteCKOU MOUfHocmu
(QaCTO _Ha3bIBaeMoi1:
C8e-
O.ll.HaKO Kor.ll.a pe% H.lI.eT 0 BocrrpHHTHH H3JIYQeHHH Qe-
JIOBeQeCKHM rJIa30M, HCrrOJIb30BaTb pa.ll.HOMeTpHQeCKHe e.ll.HHHUbI HeYMeCTHO.
TaK,
HH
H3JIYQeHHe
He
BocrrpHHHMaeTCH
rJIa30M
HBJIHeTCH
JlIOKC
(JIIOKC
= JIM/M2). 9Ta e.ll.HHHua HCrrOJIb3yeTcH .lI.JIH xapaKTeB
PHCTHKH YCJIOBHi1: OCBeIll.eHHH.
Ta6JI.
16.1
rrpHBe.ll.eHbI THrrOBble 3HaqeHHH
OCBeIll.eHHOCTH B pa3Hblx YCJIOBHHX. T a 6 JI H U a
16.1.
THnoBble 3HaqeHHli OCBemeHHOCTH
YCJIOBHli OCBemeHHli
OCBemeHHocTb, JIK
QeJIO-
BeKa. n03TOMY .lI.JIH xapaKTepHCTHKH CBeTO- H
1
I10JIHOJIYHHe
UBeTOBocrrpHHTHH rJIa3a rrpHMeHHIOT He pa.ll.HO-
¢omOMempUtteCKue eaUHUl1bl. GUJla C8ema - 3TO
MeTpHQeCKHe, a JIHQHHa,
xapaKTepH3YIOIll.aH
HHTeHCHBHOCTb
H3JIYQeHHH HCTOQHHKa CBeTa rro ee BocrrpHH-
10
YJIHqHOe OCBemeHHe
30-300
)loMalliHee OCBemeHHe
100-1000
OqmcHoe OCBemeHHe
THIO QeJIOBeQeCKHM rJIa30M. CHJIa CBeTa H3MepHeTCH HOCHTCH
B K
KaHaeJlaX OCHOBHbIM
Me)K.lI.YHapO.ll.Hoi1:
Ill.ee
(K.lI.) ,
KOTopble
e.ll.HHHuaM
CHCTeMbI
Cl1.
OT-
OCBemeHHe B xHpyprHqeCKOH onepaUHoHHoH
H3MepeHHH
B
HaCTOH-
10000
I1pliMoe COJIHeqHOe OCBemeHHe
100000
fJpKocmb n08epxHocmu UCmOttHUKa
(T. e. HCTOQHHKa CBeTa, rrJIOIll.a.ll.b
BpeMH HCrrOJIb3yeTcH CJIe.ll.YIOIll.ee orrpe-
JIeHHli CBHHUOBoro npHnoli
GUJla C8ema MOHoxpOMamUtteCKoeo UCmOttHUKa C MOUfHOcmblO u3JlytteHuR(1/683) Em Ha aJlUHe 80JlHbl 555 HM 8 npeaeJlax meJleCHOeO yeJla 1 cp (cmepaauaH) pa8Ha 1 Ka. E.lI.HHHua KaHaeJla HMeeT 60JIbIIIYlO HCTOpHIO. OHa rrpOH30IIIJIa OT 60JIee paHHei1: eaUHUI1 bl , Ha3bIBaBIIIei1:cH C8etta. O.ll.Ha CBeQa paBHfI-
.!I.JIli
JIaCb CHJIe CBeTa, H3JIYQaeMOrO peaJIbHoi1: CBeQ-
CBeTa, H3JIYQaeMOrO B.lI.OJIb ~OpMaJIH K rrOBepXHOCTH KpHCTaJIJIa, .lI.eJIeHHoi1:
KOi1:, HMelOIll.ei1: orrpe.ll.eJIeHHYIO KOHCTPYKUHIO
Ha rrJIOIll.a.ll.b 3Toro KpHCTaJIJIa.
.lI.eJIeHHe e.ll.HHHUbi CHJIbI CBeTa.
PHC.
16.4.
«CBeqa
npoBO.!l.qHKa».
3TO
BO.!l.OHa3Ba-
HHe H.!I.eT H3 .!I.eBliTHa.!l.uaTOro BeKa, KOr.!l.a TaKHe CBeqH HCnOJIb30BaJIHCb
BO.!l.onpo-
BO.!l.qHKaMH
paCnJIaB-
.!I.JIli
COe.!l.HHeHHli
BO.!l.onpo-
BO.!l.HbIX Tpy6
H3JIYQalOIll.ei1: rrOBepXHOCTH KOToporo He paBHa HyJIIO, HarrpHMep .lI.HCrrJIeH HJIH CBeTO.ll.HO.ll.a) orrpe.ll.eJIHeTCfI KaK OTHOIIIeHHe CHJIbI CBeTa, H3JIYQaeMOro HM B HeKOTopOM HarrpaBJIeHHH H3MepfleMoi1: B KaH.lI.eJIaX, K
n08epXHocmu, npoel1UpyeMou
nJlOUfaaU
B 3TOM HarrpaBJIeHHH H3MepfleMoi1: B e.ll.HHH-
uax M2. E.lI.HHHuei1: H3MepeHHfI flPKOCTH B CHCTeMe Cl1 flBJIHeTCH K.lI./M2.
B
60JIbIIIHHCTBe CJIYQaeB flPKOCTb orrpe.ll.eJIfleTCfI B HarrpaBJIeHHH, rreprreH.lI.HKYJIHPHOM K rrOBepXHOCTH KpHCTaJIJIa.
B
3TOM CJIYQae flPKOCTb paBHa CHJIe
TA. 16. CfYBcmBumeAbHocmb tteAoBetteC1WZO ZAa3a
338
J!Jwl4aab
npoel1UpyeMou
nOBepxfwcmu,o
KOTOPOH
16.2. OCHoBHbte pa8uoMemputteCKue u tjJomoMemputtecKue e8uHuu,bt
yrroMHHaeTcH
B orrpe~eneHHH HPKOCTH HCTOqHHKa, orrpe~enHeTcH rro 3aKoHY KOCHHYCOB,
339
T a 6 JI H U a 16.3. THI1H'IHble 3HaqeHHH HPKOCTH .lI.HCI1JIeeB, OpraHHqeCKHX H HeopraHHqeCKHX CBeTO.ll.HO.ll.OB
H3 KOToporo cne~yeT, 'ITO BenHqHHY rrpoeU:HpyeMoH rrnOlll.a~H MO)KHO HaHTH rrpH rrOMOlll.H Bblpa)KeHHH Aprojected rrOBepXHOCTH
e-
KpHCTanna,
=
e, r~e Asurface -
Asurface . COS
Me)K~y
yron
HOpManbIO
K
rrnOlll.a~b
rrOBepXHOCTH
KpHCTanna H paCCMaTpHBaeMbIM HarrpaBneHHeM H3nyqeHHH. Ha pHC. CBeTa
CBeTO~HO~OB
HPKOCTb
C
e
C yrnoM
CBeTO~HO~OB
TaKHX
3aBHCHlll.eH OT yrna
~HarpaMMoH
naM6epToBcKOH
CBH3aHa
3aKOHOM
HBnHeTCH
HarrpaBneHHocTH
KOCHHYCOB.
rrocToHHHOH
n03TOMY
BenHqHHOH,
He
e.
IIJIOn:(a,nr,:
A ---A~~~f~ik~~i~;~:~;1\~ ~ I I
JI3.JI)'lIalO:m;eH CBer
I :
"' ........ "" I
.... .... I I .......: I
I~, ~
IIoBepXHocm:
KPHCTaJIJI
'it
~ ~ I ~,..
I I ...
<:~"Y rrpoe~ye~!UI
J. ..... ,.'
I I
IIJIOn:(a,nr,
.," ........
A
cos
E>
'-
"' ...........
100 (pa60qee 3HaqeHHe)
,UHCI1JIeM
250-750 (MaKCHMaJIbHOe 3HaqeHHe)
CBeTO.ll.HO.ll.bI MaTepHaJIOB
Ha
OCHOBe OpraHHqeCKHX
CBeTO.ll.HO.ll.bI Ha OCHOBe 110JIYI1POBO.ll.HHKOB AIIIB v
~/
----{Ii
,UHCI1JIeM
CBeToBoM 110TOK
A
Pa3MepHocTb
H I1poeUHpyeMaH I1JIOma.ll.b
JIM
A . cos e,
HCI10JIb3yeMbie I1pH Ol1pe.ll.eJIeHHH HPKOCTH CBeTO.ll.HO.ll.a
HPKOCTH
06na~anH CBen
1 K.lI./CM
(l/rr)
K.lI./CM
(l/rr)
Ha3BaHHe 1 CTHJIb6
TOro,
THBHO
1 JIaM6epT 1 HHT
K.lI./M2
1 al10CTHJIb6 2
rrOTOKOM
1 tPYT-JIaM6epT
HaCKonbKO
CBeTa rrpH
orrpe~eneHHOH
3a~aHHOM
~nH
CHnbI
3HaqeHHH TOKa
HH)KeKU:HH. CYlll.eCTByeT HeCKonbKO e~HHHU: H3MepeHHH, Hcrronb3yeMblx
~nH
xa-
paKTepHCTHKH HPKOCTH HCTOqHHKOB H3nyqeHHH. B Ta6n.
16.2
rrpHBe~eHbI
caMble pacrrpocTpaHeHHble H3 HHX. B Ta6n.
16.3
TIOTOK H3JIyqeHHH (OI1THqeCKaH MOmHOCTb)
BT
= K.lI.
3HepreTHqeCKaH CHJIa CBeTa (CHJIa H3JIyqeHHH)
BT/Cp
OCBemeHHOCTb
JIM/M2
= JIK
3HepreTHqeCKaH OCBemeHHOCTb (I1JIOTHOCTb MomHocm)
BT/M
RPKOCTb
JIM/(Cp. M2)
= K.lI./M2
3HepreTHqeCKaH HPKOCTb
2
BT/(Cp. M2)
3cpcpeK-
rronyrrpoBo~HHKa
rrnaCTHHbI
Pa3MepHocTb
JIM/Cp
rrpH
rrnOlll.a~b
Hcrronb3yeTcH
~OCTH)KeHHH
2
K.lI./ tPYT
CBeTOBbIM
TaKHM 06pa30M, HPKOCTb HBnHeTCH
2
1 K.u./M
(l/rr)
2
H
cHnoH
MHHHManbHOH rrnOlll.a~H KpHCTanna. MepOH
E.lI.HHHua H3MepeHHH
MaKCHManbHbIMH
Pa.ll.HOMeTpHqeCKaH
CHJIa CBeTa
lKenaTenbHO, qT06bI CBeTO~HO~bI T a 6 JI H U a 16.2. HaH60JIee paCl1pOCTpaHeHHble CHCTeMHble H BHeCHCTeMHble e.ll.HHHUbI H3Mepemm
1 000000-10000000
e.ll.HHHua
e.ll.HHHua
CBeTO~O,l\a
PHC. 16.5. TIJIOma.ll.b KpHCTaJIJIa CBeTO.ll.HO.ll.a
100-10000
T a 6 JI H U a 16.4.
IlJI01I{8J(b.
~~~
.... "
RPKOCTb, K.lI./M2
16.5
rrOKa3aHbI rrnOlll.a~H H3nyqaIOlll.eH H rrpoeU:HpyeMoH rroBepxHocTeH. CHna H3nyqeHHH TaK)Ke
YCTpOMCTBO
rrpe~CTaBneHbI THrrHqHble 3HaqeHHH HPKOCTH ~HcrrneeB, op-
Ynpa)KHeHHe. Pa60ma C tjJomOMempUtteCKUMU e8uHuu,aMU CBeTOBOM 110TOK 60-BaTTHOM JIaMl1bI HaKaJIHBaHHH paBeH 1000 JIM. CqHTaeM, 'ITO JIaMl1a HaKaJIHBaHHH HBJIHeTCH H30TP0l1HbIM H3JIyqaTeJIeM. a. l..J:eMY paBHa CBeTOBaH OT.lI.aqa JIaMl1bI (CBeTOBaH OT.lI.aqa xapaKTepH3yeTcH BeJIHqHHOM CBeTOBoro 110TOKa (JIM) Ha 1 BT I1pHJIO)KeHHOM 3JIeKTpHqeCKOM MOmHOcm)?
6.
CKOJIbKO CTaH.lI.apTHbIX CBeqeM Ha.ll.O 3a)Keqb, qT06bI 110JIyqHTb TaKYIO )Ke
CHJIY CBeTa? B. l..J:eMY paBHa OCBemeHHOCTb .lI.OCKH, HaXO.ll.HmeMCH Ha paCCTOHHHH 1,5 M HH)Ke JIaMl1bI, E'urn, Bblpa)KeHHaH B JIIOKcax? z. KOMtPOPTHbI JIH YCJIOBHH OCBemeHHOCTH, 110JIyqeHHble B I1.B .lI.JIH qTeHHH?
3aTenbHO 06na~aTb OqeHb BbICOKOH HPKOCTbIO, rrocKonbKY qenOBeK CMOTPHT
l..J:eMY paBHa CHJIa CBeTa JIaMl1bI ['urn B KaH.lI.eJIax? BbIBe.ll.HTe tP0PMYJIY .lI.JIH paCqeTa OCBemeHHOCTH Ha paCCTOHHHH r OT JIaMl1bI 110 H3BeCTHOM BeJIHqHHe CHJIbI CBeTa. OCBemeHHOCTb H3MepHeTCH B JIIOKCaX, a CHJIa
Ha Hero rrpHMO H C 6nH3Koro paccToHHHH. A BOT MOlll.Hble HeOpraHHqeCKHe
CBeTa -
CBeTO~HO~bI, Hcrronb3yeMbie B CBeTocpopax H B OCBeTHTenbHbIX CHCTeMax,
r OT JIaMl1bI 110 H3BeCTHOM BeJIHqHHe CBeTOBoro 110TOKa. OCBemeHHOCTb H3MepHeTCH B JIIOKCaX, a CBeTOBOM 110TOK - B JIIOMeHax. 3. B Ol1pe.ll.eJIeHHH KaH.lI.eJIbI HCI10JIb3yeTcH OI1THqeCKaH MOmHOCTb, paBHaH (1/683) BT. OTKY.lI.a B3HJIaCb 3Ta BeJIHqHHa?
raHHqeCKHX H HeOpraHHqeCKHX CBeTO~HO~OB. BH~HO, 'ITO ~HcrrneIO He 0651-
Ha060pOT, ~On)KHbI 6bITb OqeHb HpKHMH. B
Ta6n. 16.4
rrpHBe~eHbI cpoToMeTpHqeCKHe H COOTBeTCTBYIOlll.He pa~Ho-
8.
e.
B KaH.lI.eJIax.
:JIC. BbIBe.ll.HTe tP0PMYJIY .lI.JIH paCqeTa OCBemeHHOCTH Ha paCCTOHHHH
TA.
340
! •
1,
16.
OTBeThI: a -
16,7 JIM/BT,
Aa,
JIM/Cp
a-79, 6
16.3.
lfY8cm8umeAbHocmb tteAo8etteCIW20 2Aaaa
6-
80 KA, 8 -
E lum
= 35,4
JIM/M2
= 35,4
16.6
Ha PI1C.
JIIOKC, 2 -
TaK)Ke
nOKa3aHa CPYHKUI1H
Vi (>.)
341
QYBCTBI1TenbHOCTI1
a-
QenOBeQeCKOrO rna3a ,LI.nH pe)KI1Ma CKOTOnl1QeCKOrO 3peHI1H. I1I1K QYBCTBI1-
TIepBOHaqaJIbHO eAHHHIJ.eH CHJIbI CBeTa 6bIJIa CBeqa, onpeAeJIlIeMall KaK CHJIa CBeTa
TenbHOCTI1 B pe)KI1Me CKOTOnl1QeCKOrO 3peHI1H npI1XO,LI.I1TCH Ha ,LI.nl1HY BonHbI
=
79,6 KA,
e-
(/>YHICI{UR ttY8cm8umeAbHocmu tteA08ettecIC020 2Aaaa
= l lum ,
Elumr2
:J/C -
Elum47rr2
=
lum,
OT OAHOH cTaHAapTHoH CBeqH. TIoaAHee eAHHHIJ.eH CHJIbI CBeTa CTaJIa CHJIa CBeTa
507
HCTOqHHKa H3JIyqeHHlI onpeAeJIeHHOH OnTHqeCKOH MOru.HOCTH Ha onpeAeJIeHHOH
CTBI1TenbHOCTI1 B pe)KI1Me cpoTOnl1QeCKOrO 3peHI1H. 11l1cneHHhIe 3HaQeHI1H
AJIHHe BOJIHbI. ECJIH MOru.HOCTb HCTOqHHKa paBHa (1/683) BT, ero CHJIa CBeTa onpe-
CPYHKUI1I1
AeJilIeTClI BeJIHqHHOH B 1 CBeqy. TI03TOMY 3HaqeHHe (1/683) BT HMeeT rJIy60KHe
HM. 9To 3HaQeHI1e HaMHoro MeHbilie ,LI.nl1HhI BonHbI MaKCI1MYMa QYB-
V'(>')
MKO
1951
16.112 . V (>.) MKO 1978
r. npl1Be,LI.eHbI B npl1nO)KeHI1I1
OTMeTI1M, QTO, XOTH B pH,LI.e cnYQaeB CPYHKUI1H
r.
HCTOpHqeCKHe KOpHH H HCnOJIb3yeTclI AO CHX nop, qTo6b1 He npepbIBaTb BpeMeHHYIO
HBnHeTCH
JIOnlqeCKYIO CBlI3b.
CTaH,LI.apTOB, nOCKonbKY 113MeHeHI1e CTaH,LI.apTOB QaCTO npI1BO,LI.I1T K B03HI1K-
npe,LI.nOQTI1TenbHOH,
OHa
Bce )Ke He OTHOCI1TCH
K
KaTerOpl111
HOBeHl11O HeOnpe,LI.eneHHOCTeH. O,LI.HaKO HeCMOTpH Ha 9TO, Ha npaKTI1Ke OHa
16.3.
~YHKII.HH qYBCTBHTeJIbHOCTH qeJIOBeqeCKOrO rJIa3a
Pa,LI.110MeTpl1qeCKl1e 11 cpoToMeTpl1qeCKl1e e,LI.I1HI1UbI MO)KHO CBH3aTb Me)K,LI.Y
C060H
2Jlaaa B
npl1
V(>'),
1924
t/JYHKI1UU
nOMoru.11
'lY8cm8UmeJlbHOCmU
'leJl08e'leCK020
I1cnonb3yeTcH ,LI.OBOnbHO QaCTO (Wyszecki' and Stiles,
V(>')
TOQHbIM
r. Me)K,LI.YHapO,LI.HaH KOMI1CCI1H no oCBeIUeHI1IO, MKO
(CIE),
BBe-
1978 r.,
Onl1CaHl1eM
nOKa3aHHYlO Ha Pl1c.
16.7,
2000).
MO)KHO CQI1TaTb Hal160nee
Bapl1aUI1H QYBcTBI1TenbHocTI1 QenOBeQeCKOrO rna3a
B pe)KI1Me cpoTOnl1QeCKOrO 3peHI1H. .LI:nH HaXO)K,LI.eHI1H CPYHKUI1I1 QYBcTBI1TenbHocTI1 QenOBeQeCKOrO rna3a
I1HOr,LI.a Ha3bIBaeMOH CPYHKUl1eH CBeTOBOH 9cpcpeKTI1BHOCTI1.
na nOHHTl1e CPYHKUI1I1 qYBcTBI1TenbHocTI1 qenOBeqeCKOrO rna3a B pe)KI1Me
MKO
I1cnonb3yeTcH MemoiJ MUHUMaJlbHOU 8cnblUlKU, HBnHIOIUI1HCH KnaCCI1QeCKI1M cnoc060M cpaBHeHI1H I1CTOQHI1KOB cseTa no HPKOCTI1 11 onpe,LI.eneHI1H
cpoTOnl1qeCKOrO 3peHI1H ,LI.nH TOqeqHbIX I1CTOqHI1KOB 113nyqeHI1H 11 yrna Ha-
2° (CIE, 1931).
6nlO,LI.eHI1H
V(>') MKO 1931 B
CIlIA
1,0_1IfI . . . .
I) .
.LI:)Ky,LI.,LI. 11 Boc B (Vos,
::ha CPYHKUI1H, nonyql1BIIIaH Ha3BaHI1e t/JYHKI1UU
2., ,LI.O CI1X nop HBnHeTCH cpoToMeTpl1qeCKI1M CTaH,LI.apTOM
1978;
1978 r.
BBenl1 MoiJUt/JUl1upo8aHHYIO CPYHKUI1IO
1982, 2000), V(>') MKO 1978 2.
Wyszecki, Stiles,
Ha3bIBaTbCH t/JYHKI1UeU
V (>.)
KOTopaH B 9TOH KHl1re 6Y,LI.eT I13MeHeHI1H 6bIJII1 CBH3aHbI C
He COBceM npaBl1nbHOH oueHKOH qYBCTBI1TenbHOCTI1 qenOBeqeCKOrO rna3a cneKTpa, npl1HHTOH B 1931 r. V (>.) B cneKTpanbHoM ,LI.I1ana30He ,LI.nl1H BonH MeHbilie 460 HM I1MeeT 60nee BbICOKl1e 3HaqeHI1H. MKO 0,LI.06pl1na BBe,LI.eHl1e CPYHKUI1I1 V(>') 1978 r. nOCTaHOBI1B, qTO «CPYHKUI1IO qYBCTBI1B rony60M
11
cpl10neTOBOM ,LI.I1ana30Hax
MO,LI.I1CPI1Ul1pOBaHHaH
CPYHKUI1H
TenbHOCTI1 QenOBeQeCKOrO rna3a ,LI.nH TOQeQHbIX I1CTOQHI1KOB 113nYQeHI1H MO)KHO npe,LI.CTaBnHTb B Bl1,L1.e MO,LI.I1CPI1Ul1pOBaHHoH CPYHKUI1I1
(CIE, 1988).
nonee Toro, B
1990
V(>')
.LI:)Ky,LI.,LI.a~
r. MKO BbIHecna pe30nlOUI1IO: «B
cny-
QaHX npOBe,LI.eHI1H 113MepeHI1H HPKOCTI1 B ,LI.I1ana30He KOPOTKI1X ,LI.nl1H BonH, cornaCOBaHHblX C onpe,LI.eneimeM UBeTa, Ha6nlO,LI.aTeneM, pacnOnO)KeHHbIM no HOpManl1 K I1CTOQHI1KY 113nYQeHI1H, npe,LI.nOQTI1TenbHee nonb30BaTbCH
(CIE, 1990).
MO,LI.I1CPI1Ul1pOBaHHoH cpYHKUl1eH .LI:)KY,LI.,LI.a» Ha Pl1c.
16.6
nOKa3aHbI CPYHKUI1I1
V(>')
MKO
1931
r.
11
1978
r.
MaKCI1ManbHaH QYBCTBI1TenbHOCTb rna3a npI1XO,LI.I1TCH Ha ,LI.nl1HY BonHbI
555
HM,
HaXO,LI.HIUYIOCH
B
3eneHOH
06naCTI1 cneKTpa.
BonHbI QYBCTBI1TenbHOCTb rna3a paBHa B CPYHKUI1I1
V (>.)
MKO
1931
1,
T. e.
V(555
HM)
Ha 9TOH ,LI.nl1He
= 1.
BI1,L1.HO, QTO
~
t:'
a'"
~
0,1
~
<.:>
I
~mlllill
s
~
0,01'1111
I 1111 ~
001
!
0,
0,0001 L..L.J......................... 300 400
r. 3aHI1)KeHa QYBcTBI1TenbHocTb QenOBeQeCKO-
ro rna3a B rony60H 06naCTI1 cneKTpa
(>. < 460 HM). B npl1nO)KeHI1I1 16.111 V(>') 1931 r. 11 1878 r.
npl1Be,LI.eHbI QI1CneHHble 3HaQeHI1H CPYHKUI1H
500 ,l(mrna BOJIHhl
PHC. 16.6.
MKO
STOT CTaHAapT AeHcTByeT H B POCCHH.
700
1931
800
HM
CpaBHeHHe
1978 H
V(,X)
rOAOB AJIlI <poTOnHqeCKOrO pe}l{HMa 3peHHlI. 3Aecb TaK}I{e
nOKa3aHa
1)
600
A.,
V' (,X)
B pe}l{HMe CKOTOnHqeCKOrO
3peHHlI, KOTopall HCnOJIb3yeTclI npH HH3KHX ypOBHlIX BHellIHeH OCBeru.eHHOCTH
FIt. 16.
342
16.4.
£[YBcmBUmeJlbliOCmb tteJlOBetteCIW20 2Jlaaa
~ ~
8
os
g; El 1 8 10-
;>.,
100
lSI
1> 0
Slu
.,
a'; 0
:'l:>< 1'/
§
10
10-2
I.
1;; :>: lSI
a
of
0
~
0
..0
0:
., .,~ g'j
~
S.
~
os
~
:>:
~
~
,.. ~0: ;;
0
,I
10-3
u
Iii
0,1
~
:>: >-.
e
PIiC.
0,1
-4
10 30'-0L...L...L...L..L.LJ..I 400
500
600
,lVrnHa BOJIHbI
16.7.
PIiC.
A,
700
V()')
(JIeBalI OCb
HOCTIi (rrpaBalI OCb 0p.ll.IiHaT). MaKCIiMYM qYBCTBIiTeJIbHOCTIi qeJIOBeqeCKOrO rJIa3a
V(A).
B
555
B3aliMocB1I3b
Me)K.ll.Y
COOTBeTCTBHH C 3THM MeTO.ll.OM He60JIbiliaH KpyrJIaH
(MacAdam,
15
6500 K
OHa COCTaBJIHeT
15
fI.J"
fI.J,) OCBe-
n03ToMY, eCJIH .ll.Ba UBeTOBbIX
CHrHaJIa pa3JIHqalOTCH no HPKOCTH, Ha6JIlO.ll.aeTCH BH.ll.HMaH BcnbIIlIKa. UeJIb HCCJIe.ll.OBaTeJIH -
P(A)
MO)!{HO
pacnpe.ll.eJIeHHH
.ll.06HTbCH
cneKTpaJIbHOH:
IIOJIyqeHHH
JI106oro
MOIII.HOCTH
CBeTOBOH:
OT.ll.aqH
16.4.
.ll.ByX
cMellIeHHeM
H3JIyqeHHH
MOHoxpOMaTHqeCKHX
Ha pHC.
16.8
OT.ll.aqH,
nOJIyqaeMble
HCTOqHHKOB
1931
420
JIM/BT, a npH 60JIee HH3KHX I.J,BeTOBbIX
onpe.ll.eJIHeTCH
rv
500
nOJIO)!{eHHeM
JIM/BT.
TOqHOe 3HaqeHHe
HHTepeCYlOIII.erO
OTTeHKa
H3J1YlleHH.SI B rJIa3a
.ll.Hana30He .ll.JIHH BOJIH 390-720 HM
V(A)
H3JIyqeHHe C .ll.JIHHaMH BOJIH MeHbllle
T a 6 JI Ii U a 16.5.
)!{eJIaTeJIbHOrO
I.J,BeTOBoro
390
HM H 60JIbille
720
HM,
ero
onpe.ll.eJIeHHOH:
HCTOqHHKOB
CBeTa
H3JIyqeHHH.
nOMOIII.H
O.ll.HOH:
MaKcHMaJIbHaH
CBeTa 3aBHCHT OT I.J,BeTOBOH: TeMnepaTypbI.
napbI
HHTeHcHBHOCTH
(MacAdam,
1950).
MOHoxpOMaTHqeCKHX
CBeTOBaH
UBeTa Ii COOTBeTCTBYIOIUlie liM .ll.JIIiHbI BOJIH
UBeT
.llJIIiHa BOJIHbI, HM
UBeT
.llJIIiHa BOJIHbI, HM
YJIbTpaqmOJIeTOBbIH.
< 390
)KeJITbIH.
570-600
390-455
lIHTapHbIH.
590-600
CIiHIiH.
455-490
OpaH)KeBbIH.
600-625
roJIy6oH.
490-515
KpaCHbIH.
625-720
3eJIeHbIH.
515-570
IiH
> 720
nOKa3aHbI MaKCHMaJIbHO .ll.OCTH)!{HMble 3HaqeHHH CBeTOBOH: npH
r.
1950)
II.BeTa KBa3HMoHoxpoMaTHllecKHx HCTOIIHHKOB
CHMaJIbHO B03MO)!{HOH: CBeTOBOH: OT.ll.aqeH:. ,n06HTbCH npe.ll.eJIbHOH: CBeTOBOH: MO)!{HO
OT.ll.aqeH.
H3JIyqeHHH
OTTeHKa. O.ll.HH H3 BapHaHTOB 3TOro pacnpe.ll.eJIeHHH xapaKTepH3yeTcH MaKOT.ll.aqH
CBeTOBOH.
perYJIHpOBaTb I.J,BeT TecTHpyeMoro HCTOqHHKa H3JIyqeHHH
.ll.O Tex nop, nOKa Ha6J11o.ll.aeMaH BcnbIIlIKa He CTaHeT MHHHMaJIbHOH:. H3MeHeHHeM
B03MO)KHOH.
Ha UBeTOBOH. .ll.liarpaMMe MKO
I.J,BeTa qepe.ll.YlOIII.HXCH
CHrHaJIOB 6Y.ll.YT Hepa3JIHqHMbI. O.ll.HaKO qaCTOTa CJIHHHHH BX0.ll.HbIX CHrfI.J"
rv
TeMnepaTypax OHa MO)!{eT npeBbICHTb
III.aeTCH HCTOqHHKaMH 3TaJIOHHOrO H cpaBHHBaeMoro I.J,BeTOB. TIocKOJIbKY qaCTOTa CJIHHHHH I.J,BeTOBblX OTTeHKOB HH)!{e
15
(x,y)
0,8
B npe.ll.eJIax .ll.HaIIa30Ha 6eJIoro I.J,BeTa Ha I.J,BeTOBOH: .ll.HarpaMMe.
1978)
HM (.ll.aHHble MKO,
cBeTOH3JIyqalOIII.aH nOBepxHocTb noOqepe.ll.HO (c qaCTOTOH:
HaJIOB no HPKOCTH BCer.ll.a BbIllIe
MaKCIiMaJIbHO
(JIM/BT) Ii Koop.ll.IiHaTaMIi UBeTHOCTIi
0,7
HM
rrpIiXO.ll.IiTClI Ha .ll.JIIiHY BOJIHbI
16.8.
0,2 0,3 0,4 0,5 0,6 Koop,llHHara ~eTHOCTH x (-)
800
0p.ll.IiHaT) Ii CBeTOBalI OT.ll.aqa 1i3MepeHHalI B JIIOMeHaX Ha BaTT OrrTliqeCKOH. MOIU-
OT
343
aBema KBaaUMOlioxpOMamUtteclWX UCmOttliuKOB uaJlytteliuJt
OT.ll.aqa
6eJloeo
TIPH I.J,BeTOBOH: TeMnepaType
344
FA.
'IYBCTBHTeJIbHOCTb
16. lfYBcmBumeAbHocmb 'leAOBe'leClWZO ZAa3a B 3THX .u.Hana30Hax O'IeHb
.u.Hana30H .u.JIHH BOJIH
390
HM ::::;
>. ::::; 720
auana301wM aAUfl eOAfl. B Ta6JI.
16.5
HH3KaH.
16.5. CBemOBaJl 3ljJljJeKmuBHocmb U CBemOBaJt omaa'la
345
CJIe.u.oBaTeJIbHO,
Ceemoeafl omaatta UCmOttflUKa u3AytteflUfl, TaK)Ke H3MepHeMaH B e.u.H-
eUaUMblM
HHIJ.aX JIM/BT, paBHa OTHOIIIeHHIO CBeTOBoro nOTOKa OT HCTO'IHHKa H3JIY'Ie-
HM Mox<eT C'IHTaTbCH
nOCTaBJIeHbI B COOTBeTCTBHe IJ.BeT
HHH K BXO.u.HOH 3JIeKTpH'IeCKOH MOIIJ.HOCTH:
H .u.JIHHa BOJIHbI B npe.u.eJIax BH.u.HMoro .u.Hana30Ha .u.JIHH BOJIH. npHBe.u.eHHble CBeTOOT.u.a'Ia HCTO'IHHKa CBeTa
3Ha'IeHHH cnpaBe.u.JIHBbI .u.JIH MOHoxpOMaTH'IeCKHX H KBa3HMoHoxpoMaTH'IeCKHX HCTO'IHHKOB CBeTa, HanpHMep CBeTo.u.Ho.u.OB. OTMeTHM, 'ITO IJ.BeT B HeKOTopOH CTeneHH HBJIHeTCH cy6beKTHBHOH xapaKTepHCTHKOH.
K TOMY
)Ke Ha.u.o nOMHHTb, 'ITO nepexo.u.b1 Me)K.u.y pa3HbIMH IJ.BeTaMH Bcer.u.a nOCTeneHHble H Me)K.u.y HHMH HeT pe3KHX rpaHHIJ..
I· V
r.u.e npoH3Be.u.eHHe
=
q>lum
(16.4)
I. V'
HBJIHeTCH BXO.u.HOH 3JIeKTpH'IeCKOH MOIIJ.HOCTblO
YCTpoHCTBa. 3aMeTHM, 'ITO CBeTOBaH OT.u.a'Ia HHor.u.a Ha3bIBaeTCH
ceemoeou
acjJcjJeKmueflocmblO UCmOttflUKa. 113 ypaBHeHHH
(16.3)
H
(16.4)
CJIe.u.yeT, 'ITO CBeTOBaH OT.u.a'Ia HCTO'IHHKa
CBeTa Haxo.u.HTCH H3 npOH3Be.u.eHHH CBeTOBOH 3
16.5.
CBeTOBCUI aeKTHBHoCTh H CBeTOBaB OT,lI;aqa
CKYIO.
3HaH pa.u.HOMeTpH'IeCKYIO MOIIJ.HOCTb H3JIY'IeHHH, MO)KHO HaHTH BeJIH'IHHy
Ha K03
683
Ta6JI.
16.6
npHBe.u.eHbI
3Ha'IeHHH
CBeTOBOH OT.u.a'IH HaH60JIee
IJ.eHTHbIX JIaMn (6), ra30pa3pH.u.HblX JIaMn (B).
ceemoeozo nOm01W
B
pacnpocTpaHeHHblx HCTO'IHHKOB CBeTa: JIaMn HaKaJIHBaHHH (a),
~~ . f V(>.) . P (>')d>',
(16.1 )
T a 6 JI H U; a
16.6.
CBeToBali OT.lI.a'Ia HeKOTopbIX HCTO'IHHKOB CBeTa
>. r.u.e
P(>.) -
MCTO'IHHK CBeTa
CBeTOBali OT.lI.a'Ia, JIM/BT
cneKTpaJIbHaH nJIOTHOCTb MOIIJ.HOCTH, T. e. MOIIJ.HOCTb CBeTa Ha
e.u.HHHIJ.Y .u.JIHHbI BOJIHbI, a MHO)KHTeJIb
683
JIM/BT -
K03
1,4
ITepBali JIaMnO'IKa 3.l1.HcoHa (a)
pOBKH. npH 3TOM OnTH'IeCKaH MOIIJ.HOCTb HCTO'IHHKa H3JIY'IeHHH onpe.u.eJIHeTCH Bblpa)KeHHeM
P=
f P(>.) d>..
(16.2)
>.
Y
BbICOK03
BeJIH'IHHa CBeTOBoro nOTOKa npH TOKe HH)KeKIJ.HH
10-100
100-1000
JIaMnbI C BOJIbljJpaMoBoH HHTbIO HaKaJIa (a)
15-20
KBapu;eBble raJIOreHHble JIaMnbI (a)
20-25
50-80
PTYTHble JIaMnbl (B)
50-60
MA .u.OCTHraeT
JIM.
Ceemoeafl acjJcjJeKmueflocmb onmUtteCKOzO u3AytteflUfl (HHor.u.a Ha3bIcjJYflKI1UeU flpKocmu HJIH AlOMefl-aKeueaAeflmOM), H3MepHeMaH
MeTaJIJIoraJIOreHHble JIaMnbl (B)
80-125
HaTpHeBble JIaMnbI BblCOKoro .lI.aBJIeHHlI (B)
100-140
BaeMaH
B JIIOMeHaX Ha BaTT OITTH'IeCKOH MOIIJ.HOCTH, npe.u.CTaBJIHeT C060H K03
[683 CBeTOBaH 3
= q>~m =
CBeTOBaH OT.u.a'Ia HBJIHeTCH Ba)KHOH xapaKTepHCTHKOH CBeTo.u.Ho.u.OB BH.u.HMorocneKTpa, OTpa)KalOIIJ.eH 3
~. IV(>.)· P(>')d>']
HHKOB CBeTa C BbICOKHM K03
(16.3)
HOCTH H3JIY'IeHHH.
YnpalKHeHHe. OnpeaeAeHue CBemOBOU 3ljJljJeKmuBHocmu U CBemOBOU omaa'lU
[I P(>')d>']
CBemOaUOaOB PaCCMOTpHM CBeTO.ll.HO.ll.bI KpaCHoro H lIHTapHOro CBe'IeHHlI, pa60TaIOllI.He Ha .lI.JIHHaX
.LlJIH
CTporo
MOHoxpOMaTH'IeCKHX HCTO'IHHKOB CBeTa
(bo>'
-t
0)
CBeTO-
BaH 3
V(>.),
YMHO)KeHHOH Ha K03
683
JIM/BT.
O.u.HaKo .u.JIH MHOrOIJ.BeTHblX HCTO'IHHKOB, oc06eHHO .u.JIH HCTO'IHHKOB 6eJIoro CBeTa, .u.JIH onpe.u.eJIeHHH CBeTOBOH 3
16.7
BeJIH'IHHa CBeTOBOH
BOJIH
625
H
590
HM . .llJIli ynp0lll.eHHlI paC'IeTOB npe.ll.nOJIO)J{HM, 'ITO cneKTpbl
H3JIY'IeHHlI .lI.aHHbIX CBeTO.ll.HO.ll.OB MOHoxpOMaTH'IeCKHe (~>. - t
0).
Tpe6yeTcli onpe-
.lI.eJIHTb CBeTOBYIO 31jJljJeKTHBHOCTb H CBeTOOT.lI.a'IY .lI.ByX CBeTO.ll.HO.ll.OB, C'IHTall, 'ITO HX BHeIIIHHH KBaHTOBblH BbIXO.ll. paBeH
50 %.
ITpe.ll.nOJIaraeTClI, 'ITO .lI.JIli Hanpll)J{eHHlI
Ha CBeTO.ll.HO.ll.aX cnpaBe.ll.JIHBO CJIe.ll.YIOllI.ee COOTHOIIIeHHe:
V = Eg / e = hv / e.
Tenepb npe.ll.nOJIO)J{HM, 'ITO cneKTpbl CBeTO.ll.HO.ll.OB HMeIOT IjJOpMy KpHBblX faycca C IIIHPHHOH nOJIOCbI
1,8kT,
H elll.e pa3 paCC'IHTaeM CBeTOBYIO 31jJljJeKTHBHOCTb
H CBeTOBYIO OT.lI.a'IY .lI.ByX HCTO'IHHKOB CBeTa. Onpe.ll.eJIHTe, KaKYIO norpeIIIHOCTb
Dl.
346
16.6. 51pKocmb U AUHeuHocmb 80cnpuRmuR C8ema cucmeMOU apeHUR
16. lfY8cm8umeAbHocmb 'leA08e'leCIW20 2Aaaa
B paC'IeTbi BHOCHT IIpe.n:IIOJIOJKeHHe, 'ITO HCTO'lHHKH H3JIY'IeHHlI lIBJIlIIOTClI MOHOXPO-
T a 6 JI H U a 16.7.
MaTH'IeCKHMH.
XapaKTepHCTHKa
OIIHcaHHe
E.n:HHHua H3MepeHHlI
CBeToBall 3cjlcjleKTHBHOCTb (H3JIY'IeHHlI)
CBeToBoH IIOTOK Ha e.n:HHHUY OIITH'IeCKOH MOIUHOCTH
JIM/BT
CBeToBall OT.n:a'la (HCTO'lHHKa)
CBeToBoH IIOTOK Ha e.n:HHHUY BXO.n:HOH 3JIeKTpH'IeCKOH MOIUHOCTH
JIM/BT
K. II . .n:. IIO CHJIe CBeTa
CBeToBoH IIOTOK Ha CTepa.n:HaH H Ha e.n:HHHUY BXO.n:HOH 3JIeKTpH'IeCKOH MOIUHOCTH
K.n:/BT
5IPKOCTb
CBeToBoH IIOTOK Ha CTepa.n:HaH H Ha e.n:HHHUY IIJIOIUa.n:H KpHCTaJIJIa
K.n:jCM
K. II . .n:.
Bblxo.n:Hall OIITH'IeCKall MOIUHOCTb Ha e.n:HHHUY BXO.n:HOH 3JIeKTpH'IeCKOH MOIUHOCTH
%
BHYTpeHHHH KBaHToBbIH BbIXO.n:
llHCJIO cjlOTOHOB, H3JIY'IeHHbIX B aKTHBHOH 06JIaCTH, Ha O.n:HH HHJKeKTHpOBaHHbIH 3JIeKTpOH
%
BHeIllHHH KBaHTOBbIH BbIXO.n:
llHCJIO cjlOTOHOB, H3JIY'IeHHbIX CBeTo.n:Ho.n:OM, Ha O.n:HH HHJKeKTHpOBaHHblH 3JIeKTpOH
%
HeKOTOpble THIIbI CBeTO.D.HO.D.OB C MaJIbIMH IIJIOIua.D.SlMH H3JIyqaIOmHX CBeT 06JIaCTeM (C HHJK:eKUHeM TOKa B He60JIbIIIYIO qaCTb IIOBepXHOCTH KpHCTaJIJIa) H YJIyqIIIeHHbIMH CTpyKTypaMH BblBO.D.a H3JIyqeHHSI XapaKTepH3YIOTCSI .D.OBOJIbHO BbICOKHMH 3HaqeHHSlMH 3
60JIbIIIHM K. II • .D.. (Schmid et aI.,
i,
2002).
I
.D.OJISI 06JIaCTH, B KOTOpyIO HHJK:eKTHpyeTcSI TOK, MaJIa IIO cpaBHeHHIO C 06-
O.D.HaKO TaKHe CBeTO.D.HO.D.bI 06JIa.D.aIOT HH3KOM SlPKOCTbIO, IIOCKOJIbKY
meM IIJIOma.D.bIO KpHCTaJIJIa. ,L:LJISI Bcex CBeTO.D.HO.D.OB CTPOSIT i'
'.1',
aua2paMMbt HanpaBJteH1-WCmU U3Jty-
tteHufl HJIH KpHBble CHJIbI CBeTa. I1HTeHcHBHocTb H3JIyqeHHSI B 3a.D.aHHOM 2 TOqKe, H3MepSleMaSl B e.D.HHHuaX BT/CM , OIIpe.D.eJISleTCSI paccToSlHHeM OT 3TOM TOqKH· .11.0 CBeTO.D.HO.D.a H ee IIOJISlPHbIMH KOOp.D.HHaTaMH. ,L:LJISI HaXOJK:-
.D.eHHSI IIOJIHOM OIITHqeCKOM MOmHOCTH CBeTO.D.HO.D.a He06xo.D.HMO BblqHCJIHTb HHTerpaJI OT HHTeHCHBHOCTH H3JIyqeHHSI IIO BceM IIoBepxHocTH C
P
=
JJI (A) dA dA,
(16.5)
AA r.D.e
I(A) - cneICmpaJtbHafl UHmeHCUBHocmb U3JtytteHUfl,
A-
IIJIOma.D.b IIOBepXHOCTH c
16.7
2 BT/(HM' CM ),
IIpHBe.D.eHO KpaTKoe OIIH-
caHHe OCHOBHbIX IIapaMeTpOB CBeTO.D.HO.D.OB.
BepollTHoCTb Bblxo.n:a cjlOTOHOB, H3JIY'IeHHbIX B aKTHBHOH 06JIaCTH,
K03cjlcjlHUHeHT OIITH'IeCKOrO BbIBo.n:a
16.6.
347
2
%
H3 CBeTo.n:Ho.n:a
BPKOCTb H JIHHeHHOcTb BocnpHHTHH CBeTa CHCTeMOH qeJIOBeqeCKorO 3peHHH
xapaKTepH3YIOmHecSI O.D.HHaKOBbIM CBeTOBbIM IIOTOKOM, HaIIpHMep
C
TepMHHoM
flpICocmb,
HecMoTpSl Ha ero qaCTOe HCIIOJIb30BaHHe, CBSI-
3aHa HeKoTopaSl IIyTaHHua. 3TO BbI3BaHO TeM, qTO IIO.D. CJIOBOM
flpICocmb,
SlBJISlIOmHMCSI aTpH6YTOM 3pHTeJIbHOrO BOCIIPHSITHSI, JIIO.D.H qaCTO IIO.D.pa3Y-
flpICocmu HJIH CUJtbt cBema, JIH60 U3JtyttameJtbHou cnoco6Hocmu (qTO HeKop-
MeBaIOT JIH60
K KaKoMY THIIy HCTOqHHKOB OH OTHOCHTCSI: TOqeqHoMY HJIH IIoBepxHocT-
mOttettHOzo UCmOttHUICa
SlPKOCTb B peJK:HMe
3peHHSI IIPH6JIH3HTeJIbHO paBHa ero CHJIe CBeTa, H3MepSleMOM B KaH.D.eJIaX (K.D.). ,L:LJISI
HMeTb
paBHyIO
nOBepXHocmHozo ucmottHUlCa
SlPKOCTb B peJK:HMe
CKoro 3peHHSI MOJK:HO oueHHTb BeJIHqHHOM ero
TIOCKOJIbKY .D.JISI TepMHHa SlPKOCTb He
cymecTByeT CTaH.D.apTH3HpOBaHHoro OIIpe.D.eJIeHHSI, B TeXHHqeCKHX IIy6JIHKaUHSlX ero IIpe.D.IIOqHTaIOT He HCIIOJIb30BaTb. TIo
JtuHeUHbtM.
OqeBH.D.HO,
qTO .D.Ba H30TPOIIHbIX TOqeqHbIX HCTOqHHKa roJIy60ro H KpacHoro CBeTa,
CHJIY
CBeTa.
113 IIpe.D.IIOJIOJK:eHHSI
0
5
JIM,
JIHHeMHOCTH
5
JIM, .11.0 HaIIpHMep,
5000
JIM 3HaqeHHSI CHJIbI CBeTa
060HX HqOqHHKOB 6Y.D.YT IIO-IIpeJK:HeMY paBHbJ. O.D.HaKO B cJIyqae 3HaqHTeJIbHOrO YMeHbIIIeHHSI CBeTOBoro IIoToKa, KOr.D.a peJK:HM 3peHHSI
,L:LJISI KOJIHqeCTBeHHoM oueHKH SlPKOCTH HCTOqHHKa CBeTa Ha.D.O 3HaTb HOMy. ,L:LJISI
6Y.D.YT
IIepecTaeT 6bITb
CTaHOBHTCSI Me30IIH-
qeCKHM HJIH CKOTOIIHqeCKHM, HCTOqHHK rOJIy60ro CBeTa 6Y.D.eT Ka3aTbCSI 60JIee SlpKHM IIO cpaBHeHHIO C HCTOqHHKOM KpacHoro cBeTa, qTO CBSl3aHO co c.D.BHrOM
npu6JtU3umeJtbHoU.
JIHHeMHocTb BBe.D.eHa
JIHIIIb .D.JISI YIIpOmeHHSI
16. 7. Bu6AuOepa¢U'leCKUU cnUCOK
FA. 16. lfY8cm8UmeAbH.OCmb 'leA08e'leC1WeO eAa3a
348
16.7.
349
UHpKa.n:HbIH pHTM H D:HpKa.n:HaH qYBcTBHTeJIbHOCTb
nepHO.LI. qepe.LI.OBaHHH CHa H 60.LI.pCTBOBaHHH qeJIOBeKa rrpH6JIH3HTeJIbHO
24 q. TaKoH CYTOqHbIH pHTM qaCTO Ha3bIBalOT I{UP1WiJHbtM pumMOM l{upKaiJHbtM I{UKJlOM. Ha3BaHHe 3Toro TepMHHa rrpOH30IllJIO OT .LI.BYX JIaTHHCKHX CJIOB circa H dies (B pO.LI.HTeJIbHOM rra.LI.e)Ke diem), 03HaqalOIlI.HX npU6JlU3UmeJlbHO H iJeHb. 113.L1.aBHa H3BeCTHO, qTO CBeT OTBeTCTBeH 3a CHHpaBeH
HJIH
xpOHH3aIl.HIO 6HOJIOrHqeCKHX qaCOB qeJIOBeKa, T. e. 3a ero I1.HpKa.LI.HbIH pHTM. B pa60Tax (Pittendrigh,
1993)
H (Sehgal,
2004)
paccKa3aHo, KaK JIIO.LI.H
rrpHIllJIH K rrOHHMaHHIO CYIlI.eCTBOBaHHH I1.HpKa.LI.HOrO pHTMa H TOro, qTO CBeT HBJIHeTCH rJIaBHbIM HHHII.HaTOpOM 3arrYCKa 3H.LI.OreHHbIX rrpOIl.eCcoB. PHTM qepe.LI.OBaHHH CHa H 60.LI.pCTBOBaHHH qeJIOBeKa CHHXpoHH3HpyeTCH CMeHOH HHTeHCHBHOCTH H crreKTpaJIbHOrO COCTaBa CBeTa. COJIHeqHhlH CBeT -
HeqHbIH CBeT xapaKTepH3yeTcH BbICOKOH HHTeHCHBHOCTblO, BbICOKOH I1.BeTOBOH TeMrrepaTypoH H BhlCOKOH .LI.OJIeH rOJIy6oro H3JIyqeHHH. B BeqepHHe qaCbI HHTeHCHBHOCTb, I1.BeTOBaH TeMrrepaTypa H rOJIy6aH COCTaBJIHIOIlI.aH COJIHeqHOrO CBeTa 3HaqHTeJIbHO CHH)KaIOTCH. JIIO.LI.H a.LI.arrTHpOBaJIHCb K TaKOH CMeHe CBeTOBbIX rrapaMeTpoB,
il 'I
0
TOM,
qTO
perYJIHpHOe
06JIyqeHHe
qeJIOBeKa
CBeTOM
CJIHIllKOM BhlCOKOH HHTeHCHBHOCTH (He COOTBeTCTBYIOIlI.eH BpeMeHH CYTOK) B rrpe.LI.BeqepHHe H BeqepHHe qaCbI MO)KeT rp03HTb eMY c60eM 6HOJIOrHqeCKoro pHTMa, 6eCCOHHHII.eH H .LI.a)Ke cepbe3HbIMH 3a6oJIeBaHHHMH, TaKHMH KaK paK (Brainard et al.,
2001;
Blask et al.,
2003).
n03TOMY CJIe.LI.yeT
OrpaHHqHBaTb 06JIyqeHHe CBeTOM BhlCOKOH HHTeHCHBHOCTH B rrpe.LI.BeqepHHe H BeqepHHe qaCbI (Schubert,
HM
PHC. 16.9. KpHBaH cneKTpaJIbHOii qYBCTBHTeJIbHOCTH HepBHblx Y3JIOB CeTqaTKH MJIeKOnHTaIOIII.HX, nOJIyqeHHaH MeTo,n:OM H3MepeHHH <j>OTOOTKJIHKa. 113 pHcYHKa BH,n:Ha 3HaqHTeJIbHaH pa3HHua Me2K,n:y cneKTpaJIbHbIMH qYBcTBHTeJIbHOCTHMH HepBHbIX ueHTpoB CeTqaTKH rJIa3a H qeJIOBeqeCKOrO 3peHHH (Berson et al., 2002) .LI.Harra30He roJIy6H3Ha He6a B .LI.HeBHbIe qaCbI HBJIHeTCH Ba)KHbIM cpaKToPOM, CHHXPOHH3HPYIOIlI.HM 3H.LI.OreHHbIH pHTM qeJIOBeKa. I1cXO.LI.H H3 3Toro,
POH H rOJIy6oH COCTaBJIHIOIlI.eH COJIHeqHOrO H3JIyqeHHH. C006Il1.aeTCH
A,
H HX I1.HpKa.LI.HbIH pHTM cpaKTHqeCKH
orrpe.LI.eJIHeTCH TpeMH cpaKTopaMH: HHTeHCHBHOCTblO, I1.BeTOBOH TeMrrepaTY-
!
,[{.rrllHa BOJIHbi
eCTeCTBeHHbIH perYJIHTOp )KH3HH qeJIOBeKa. B .LI.HeBHbIe qaCbI COJI-
1997).
)loJIroe BpeMH CqHTaJIOCb, qTO OrrTHqeCKH qYBCTBHTeJIbHbIMH peIl.errTO-
CPOTOqYBcTBHTeJIbHbIe HepBHbIe I1.eHTpbI HHOr,LI.a Ha3bIBalOT
pel{enmoPaMu
ZOJly6ozo He6a. 113 pHC.
16.9
BH.LI.Ha 60JIbIllaH pa3HHII.a Me)K.LI.Y qYBCTBHTeJIbHOCTblO
HepBHbIX Y3JIOB CeTqaTKH B KpaCHOM H CHHeM ,n:Harra30Hax crreKTpa. BJIHHHHe CHHero H3JIyqeHHH Ha CHHxpOHH3aIl.HIO 6HOJIOrHqeCKOrO pHTMa JIIO.LI.eH B HeCKOJIbKO pa3 rrpeBbIIllaeT BJIHHHHe KpacHoro CBen. 3Ta oco6eHHOCTb CHHero CBeTa 06H3aTeJIbHO .LI.OJI)KHa yqHTbIBaTbCH rrpH rrpoeKTHpOBaHHH CHCTeM OCBeIll.eHHH H rrpHMeHeHHH HCTOqHHKOB HCKYCCTBeHHoro CBeTa.
paMH qeJIOBeqeCKOrO rJIa3a HBJIHIOTCH TOJIbKO rraJIOqKH (cTep)KHeBbIe peIl.errTOpbI) H TpH BH.LI.a KOJI6oqeK (KoHHqeCKHX peIl.eIlTOpoB). O.LI.HaKO, B pa60Te (Brainard et al.,
2001)
YTBep)K.LI.aeTCH, qTO B qeJIOBeqeCKOM rJIa3Y eCTb
HeH3BeCTHbIe paHee cpoTOpeIl.errTOpbI, OTBeqalOIlI.He 3a I1.HpKa.LI.HbIH pHTM qeJIOBeKa. I1MelOTcH .LI.OKa3aTeJIbCTBa (Berson et al.,
2002)
2002;
Hattar et al.,
Toro, qTO HepBHbIe Y3JIbI Ha CeTqaTKe TaK)Ke 06JIa.LI.a1OT CBeTOBOH
qYBCTBHTeJIbHOCTblO. 3TH Y3JIbI rrOKa3aHbI CXeMaTHqHO Ha pHC.
16.1.
DbI-
JIH rrpOBe.LI.eHbI pa60TbI rro orrpe.LI.eJIeHHIO crreKTpaJIbHOH qYBCTBHTeJIbHOCTH HepBHbIx Y3JIOB Ha CeTqaTKe MJIeKOrrHTaIOIlI.HX. Pe3YJIbTaTbI 3TH X HCCJIe.LI.OBaHHH rrpHBe.LI.eHbI Ha pHC.
16.9.
BH.LI.HO, qTO MaKCHMaJIbHaH qYBCTBHTeJIb-
HOCTb HepBHbIx Y3JIOB CeTqaTKH Ha6JIIO.LI.aeTCH Ha .LI.JIHHe BOJIHbI
484
HM,
JIe)KaIll.eH B cHHeH qaCTH crreKTpa. B pa60Te (Berson et al.,
2002)
rrpe.LI.CTaBJIeHbI cpaKTbI, rrO.LI.TBep)K.LI.alO-
IlI.He Ba)KHYIO pOJIb CPOTOqYBcTBHTeJIbHbIX HepBHhlX Y3JIOB CeTqaTKH rJIa3a B yrrpaBJIeHHH I1.HPKa.LI.HhlM pHTMOM.
npe.LI.rrOJIaraeTCH, qTO H3-3a BbICO-
KOH qYBCTBHTeJIbHOCTH HepBHhlX Y3JIOB CeTqaTKH B CHHeM crreKTpaJIbHOM
Berson D. M., Dunn F. A., and Takao M. "Phototransduction by retinal ganglion cells that set the circadian clock" Science 295, 1070 (2002). Brainard G. c., Hanifin J. P., Greeson J. M., Byrne B., Glickman G., Gerner E., and Rollag M. D. "Action spectrum for melatonin regulation in humans: Evidence for a novel circadian photoreceptor" !. Neuroscience 21, 6405 (2001). Blask D. E., Dauchy R. T., Sauer L. A., Krause J. A., Brainard G. C. "Growth and fatty acid metabolism of human breast cancer (MCF-7) xenografts in nude rats: Impact of constant light-induced nocturnal melatonin suppression" Breast Cancer Research and Treatment 79, 313 (2003). CIE Commission Internationale de l'Eclairage Proceedings (Cambridge University Press, Cambridge, 1931). CIE Proceedings 1, Sec. 4; 3, p. 37; Bureau Central de la CIE, Paris (1951).
350
Dl. 16. lJY8cm8umeltbHocmb '1.elt08ettecIWZO zltaaa
data of 1931 and 1978 available at http://cvision.ucsd.edu and http://www.cvrl.org (1978). )laHHble CIE 1931 V(>') 6bIJIH MO.u.HqlHl\HpOBaHbI D.B. Judd and J.J. Vos B 1978.l1x MO.u.H!jlHl\HpOBaHHYIO !jlYHKl\HIO l.JYBCTBHTeJIbHOCTH rJIasa l.JaCTO 060SHal.JaIOT VM(>'); CM. J. J. Vos "Colorimetric and photometric properties of a 2-deg fundamental observer" Color Res. Appl. 3, 125 (1978). CIE publication 75-1988 Spectral Luminous Efficiency Functions Based Upon Brightness Matching for Monochromatic Point Sources with 2° and 10° Fields ISBN 3900734119 (1988). CIE publication 86-1990 CIE 19882° Spectral Luminous Efficiency Function for Photopic Vision ISBN 3900734232 (1990). Dowling J. E. The retina: An Approachable Part of the Brain (Harvard University Press, Cambridge, Massachusetts, 1987). Encyclopedia Britannica, Inc. I1so6pa)!{eHHe l.JeJIOBel.JeCKOrO rJIasa BSHTO HS Hs.u.aHHH 1994 r. (1994). Hattar S., Liao H.-W., Takao M., Berson D.M., and Yau K.-W. "Melanopsincontaining retinal ganglion cells: Architecture, projections, and intrinsic photosensitivity" Science 295, 1065 (2002). MacAdam D. L. "Maximum attainable luminous efficiency of various chromaticities" J. Opt. Soc. Am. 40, 120 (1950). Osram Sylvania Corporation Lumens and mesopic vision Application Note FAQ0016-0297 (2000) Pittendrigh C. S. "Temporal organization: Reflections of a Darwinian clockwatcher" Ann. Rev. Physiol. 55, 17 (1993). Schmid W., Scherer M., Karnutsch c., Plobl A., Wegleiter W., Schad S., Neubert B., and Streubel K. "High-efficiency red and infrared light-emitting diodes using radial outcoupling taper" IEEE J. Sel. Top. Quantum Electron. 8, 256 (2002). Schubert E. F. ABTop 3TOH KHHfH B 1997 r. SaMeTHJI, l.JTO pa60TaH B o!jlHce nOCJIe 20.00 B YCJIOBHHX HpKoro OCBemeHHH, OH MO)!{eT saCHYTb TOJIbKO Ol.JeHb nos.u.HO, 06bIl.JHO nOCJIe nOJIYHOl.JH. ITPHl.JHHOH 6eccoHHHl\b1 OKaSaJIHCb BblCOKaH HHTeHCHBHOCTb OCBemeHHH o!jlHca. KaKTOJIbKO ee YMeHbIIlHJIH, 6eCCOHHHl\a IIpeKpaTHJIacb. (1997). Sehgal A., editor Molecular Biology of Circadian Rhythms (John Wiley and Sons, New York, 2004). Vos J. J. "Colorimetric and photometric properties of a 2-deg fundamental observer" Color Res. Appl. 3, 125 (1978). Wyszecki G. and Stiles W. S. Color Science - Concepts and Methods, Quantitative Data and Formulae 2nd edition (John Wiley and Sons, New York, 1982). Wyszecki G. and Stiles W. S. Color Science - Concepts and Methods, Quantitative Data and Formulae 2nd edition (John Wiley and Sons, New York, 2000).
flpUltO:JICeHUe 16.fll
CIE
OpHJIOlKeHHe
351
16.01
qHCJIeHHble SHal.JeHHH !jlYHKl\HH l.JYBCTBHTeJIbHOCTH l.JeJIOBel.JeCKOrO rJIasa B pe)!{HMe !jloTOIIHl.JeCKOrO speHHH IIpH yrJIe o6sopa 2°: MKO 1931 r. H MKO 1978 r. (Mo.u.H!jlHKal\HH )l)!{y.u..u.a H Boca) .u.JIH TOl.Jel.JHbIX HCTO'lHHKOB HSJIYl.JeHHH (CIE, 1931; CIE, 1978). A,
HM
360 365 370 375 380 385 390 395 400 405 410 415 420 425 430 435 440 445 450 455 460 465 470 475 480 485 490 495 500 505 510 515 520 525 530 535 540 545 550 555 560 565 570 575 580 585
CIE 1931 yeA)
CIE 1978 yeA)
3,9170.10- 6 6,9650.10- 6 1,2390.10- 5 2,2020.10- 5 3,9000.10- 5 6,4000.10- 5 1,2000.10- 4 2,1700. 10- 4 3,9600.10- 4 6,4000.10- 4 1,2100. 10- 3 2,1800. 10- 3 4,0000.10- 3 7,3000.10- 3 1,1600. 10- 2 1,6840.10- 2 2,3000.10- 2 2,9800.10- 2 3,8000.10- 2 4,8000.10- 2 6,0000.10- 2 7,3900.10- 2 9,0980.10- 2 0,11260 0,13902 0,16930 0,20802 0,25860 0,32300 0,40730 0,50300 0,60820 0,71000 0,79320 0,86200 0,91485 0,95400 0,98030 0,99495 1,00000 0,99500 0,97860 0,95200 0,91540 0,87000 0,81630
0,0000.10- 4 0,0000.10- 4 0,0000.10- 4 0,0000.10- 4 2,0000.10- 4 3,9556.10- 4 8,0000.10- 4 1,5457.10- 3 2,8000.10- 3 4,6562.10- 3 7,4000.10- 3 1,1779.10-2 1,7500.10- 2 2,2678.10- 2 2,7300. 10- 2 3,2584.10- 2 3,7900.10- 2 4,2391.10- 2 4,6800.10- 2 5,2122.10- 2 6,0000.10- 2 7,2942.10- 2 9,0980.10- 2 0,11284 0,13902 0,16987 0,20802 0,25808 0,32300 0,40540 0,50300 0,60811 0,71000 0,79510 0,86200 0,91505 0,95400 0,98004 0,99495 1,00000 0,99500 0,97875 0,95200 0,91558 0,87000 0,81623
590 595 600 605 610 615 620 625 630 635 640 645 650 655 660 665 670 675 680 685 690 695 700 705 710 715 720 725 730 735 740 745 750 755 760 765 770 775 780 785 790 795 800 805 810 815 820 825
0,75700 0,69490 0,63100 0,56680 0,50300 0,44120 0,38100 0,32100 0,26500 0,21700 0,17500 0,13820 0,10700 8,1600 .10- 2 6,1000.10- 2 4,4580 .10- 2 3,2000 .10- 2 2,3200 .10- 2 1,7000.10- 2 1,1920.10- 2 8,2100 .10- 3 5,7230 .10- 3 4,1020 .10- 3 2,9290 .10- 3 2,0910 .10- 3 1,4840 .10- 3 1,0470 .10- 3 7,4000 .10- 4 5,2000 .10- 4 3,6110 .10- 4 2,4920 .10- 4 1,7190.10- 4 1,2000 .10- 4 8,4800 .10- 5 6,0000 .10- 5 4,2400 .10- 5 3,0000 .10- 5 2,1200 .10- 5 1,4990 .10- 5 1,0600 .10- 5 7,4657 .10- 6 5,2578 .10- 6 3,7029 .10- 6 2,6078 .10- 6 1,8366 .10- 6 1,2934 .10- 6 9,1093 .10- 7 6,4153 .10- 7
0,75700 0,69483 0,63100 0,56654 0,50300 0,44172 0,38100 0,32052 0,26500 0,21702 0,17590 0,13812 0,10700 8,1652.10- 2 6,1000. 10- 2 4,4327.10- 2 3,2000.10- 2 2,3454.10- 2 1,7000. 10- 2 1,1872.10- 2 8,2100. 10- 3 5,7723. 10- 3 4,1020. 10- 3 2,9291.10- 3 2,0910. 10- 3 1,4822.10- 3 10470.10- 3 7:4015.10- 4 5,2000.10- 4 3,6093.10- 4 2,4920.10- 4 1 7231.10- 4 1:2000.10- 4 8,4620.10- 5 6,0000.10- 5 4,2446.10- 5 3,0000.10- 5 2,1210.10- 5 1,4989.10- 5 1,0584. 10- 5 7,4656.10- 6 5,2592.10- 6 3,7028. 10- 6 2,6076.10- 6 1,8365.10- 6 1,2950.10- 6 91092.10- 7 6:3564.10- 7
'I
i:i
Fit. 16.
352
I' l
i
npHJlO1KeHHe 16.n2
iii 1
I'::
lfYBcmBUmeltbltOCmb tteltOBetteClWeO eltasa
CKOTOnHqeCKaH
I
4HCJIeHHble 3HaqeHHlI lPyHKIJ.HH qyacTBHTeJIbHOCTH qeJIOBeqeCKOrO rJIa3a B pe)!(HMe CKOTOI1HqeCKOrO 3peHHlI )., HM
MKO 1951, V('x)
(CIE,
CIE 1951 V'().)
). (HM)
CIE 1951 V'()')
5,890.10- 4 1,108. 10- 3 2,209.10- 3 4,530.10- 3 9,290.10- 3 1,852. 10- 2 3,484.10-2 6,040.10- 2 9,660.10- 2 1,436. 10- 1 1,998. 10- 1 2,625.10- 1 3,281 . 10- 1 3,931 . 10- 1 4,550.10- 1 5,130. 10- 1 5,670.10- 1 6,200.10- 1 6,760.10- 1 7,340.10- 1 7,930.10- 1 8,510.10- 1 9,040.10- 1 9,490.10- 1 9,820.10- 1 9,980.10- 1 9,970.10- 1 9,750·1Q-1 9,350.10- 1 8,800.10- 1 8,110.10- 1 7,330.10- 1 6,500.10- 1 5,640.10- 1 4,810. 10- 1 4,020.10- 1 3,288.10- 1 2,639.10- 1 2,076.10- 1 1,602.10- 1 1,212. 10- 1
585 590 595 600 605 610 615 620 625 630 635 640 645 650 655 660 665 670 675 680 685 690 695 700 705 710 715 720 725 730 735 740 745 750 755 760 765 770 775 780
8,990.10- 2 6,550.10- 2 4,690.10- 2 3,315. 10- 2 2,312. 10- 2 1,593.10-2 1,088. 10- 2 7,370.10- 3 4,970.10- 3 3,335.10- 3 2,235.10- 3 1,497.10- 3 1,005. 10- 3 6,770.10- 4 4,590.10- 4 3,129. 10- 4 2,146. 10- 4 1,480. 10-4 1,026.10- 4 7,150.10- 5 5,010.10- 5 3,533.10- 5 2,501 . 10- 5 1,780.10- 5 1,273.10- 5 9,140. 10- 6 6,600.10- 6 4,780.10- 6 3,482.10- 6 2,546.10- 6 1,870.10- 6 1,379.10- 6 1,022. 10- 6 7,600.10- 7 5,670.10- 7 4,250.10- 7 3,196. 10- 7 2,413. 10- 7 1,829.10- 7 1,390.10- 7
'II 380 385 390 395 400 405 410 415 420 425 430 435 440 445 450 455 460 465 470 475 480 485 490 495 500 505 510 515 520 525 530 535 540 545 550 555 560 565 570 575 580
[JIaBa
1951).
17
KOJIOPHMETPHlI
KOJIOpHMeTpHH HJIH HaYKa 0 IJ.BeTe 3aHHMaeTCH OI1pe~eJIeHHeM H KOJIHqeCTBeHHOH OIJ.eHKOH IJ.BeTa. KOJIOpHMeTpHH TeCHO CBH3aHa C IJ.BeTHWM 3peHHeM qeJIOBeKa. Ha npOTH2KeHHH MHorHX BeKOB BonpOCbI KOJIOpHMeTpHH H qeJIOBeqeCKOrO 3peHHH npHBJIeKaIDT BHHMaHHe HCCJIe~OBaTeJIeH. 60Te (MacAdam,
1993)
B pa-
co6paHa KOJIJIeKIJ.HH HHTepeCHbIX HCTOpHqeCKHX
cTaTeH, npe~CTaBJIHIDIII.HX C060H no~po6HbIH H 3aHHMaTeJIbHbIH 0630p no HCTOPHH KOJIOpHMeTpHH, BKJIIDqaIDIII.HH onHcaHHe nepBblx rrorrWTOK JIID~eH pa306paTbcH, qTO TaKOe IJ.BeT 1). .uBa qYBCTBa qeJIOBeKa -
3peHHe H CJIyx CHJIbHO OTJIHqaIDTCH ~pyr OT
~pyra. ECJIH qeJIOBeK CJIbIIIlHT ~Ba 3BYKa pa3HOH qaCTOTW O~HOBpeMeHHO, HarrpHMep
~Ba
3BYKa pa3HbIX MY3bIKaJIbHbIX HHCTpYMeHTOB, OH M02KeT pa3-
JIHqHTb MY3bIKaJIbHYID TOHaJIbHOCTb 3ByKH ~ByX qaCTOT.
B
Ka2K~OrO
HHCTpYMeHTa, T. e.
pa3~eJIHTb
CJIyqae 3pHTeJIbHOrO BocrrpHHTHH ~ByX OrrTHqeCKHX
CHrHaJIOB cHTyaIJ.HH COBceM ~pyraH. KOM6HHaIJ.HH H3 ~ByX MOHoxpOMaTHqeCKHX OrrTHqeCKHX CHrHaJIOB 6y~eT BocrrpHHHMaTbCH qeJIOBeKOM KaK O~HH IJ.BeT, H OH He CM02KeT B cHOH KOM6HHaIJ.HH pa3JIHqHTb OT~eJIbHble CHrHaJIbl.
17.1.
CBeT
B036Y2K~aeT peIJ.errTOpW KpaCHoro,
3eJIeHOrO
H
CHHero
IJ.BeTa
B pa3HoH CTerreHH. flPH 3TOM pa3Hble JIID~H rro-pa3HOMY BocrrpHHHMaIDT
O~HH H TOT 2Ke IJ.BeT Hero CBeTOBOH rrOTOK. EOJIee Toro, BocrrpHHTHe IJ.BeTa HBJIHeTCH
cy6beKTHBHoH
BeJIHqHHOH,
KOTOPYID HeJIb3H
H3MepHTb
MeJIC8yftapo8ftaR IWMUCCUR no oCBeU1eftUIO (MKO) cmaft8apmU3UpOBaJla LfBemoBble U3MepeftUR, BBe8R nOftRmUR CPYftKLfUii COZltaCOBaftUR LfBema H LfBemoBoii 8uazpaMMbt (CIE, 1931). o6beKTHBHo. flo 3THM rrpHqHHaM
Terrepb rrorrpo6yeM pa306paTbcH, KaK rrOJIyqaIDT
17.1).
flPH orrpe~eJIeHHOM rro~6ope HHTeHCHBHOCTeH Tpex OCHOBHbIX
IJ.BeTOB (T. e. rrpH HX BblpaBHHBaHHH) qeJIOBeK 6y~eT BocrrpHHHMaTb IJ.BeT
~Byx HCTOqHHKOB O~HHaKOBbIM. TPH
1)
CM. KHHrH
12 <1>. E. IIly6epT
[1-3].
354
17.
r.ll..
17.1.
KO.ll.0pUMempuR
fPYliKI{UU COZ.II.aC08aliUR 1{8ema U 1{8em08aR iJuazpaMMa
355
';" 1,8 r------r-,1~r31----:;; _{""[\---.-.----.--.----r---~ IOTCH H3 rrOCJIe.n:OBaTeJIbHOCTH rrpoue.n:yp COrJIaCOBaHHH H3JIyqeHHH OT .n:Byx
I">
HCTOqHHKOB, B KOTOPbIX HCCJIe.n:OBaTeJIb rro.n:6HpaeT KOM6HHaUHH HHTeH-
1,6 t---t---+--H,"""',r--+----f--+--+--I---l-------l
CHBHocTeH Tpex OCHOBHbIX UBeTOB o.n:Horo H3 H3JIyqaTeJIeH, Heo6xo.n:HMbIX
I;>:' 1,4 t----r---t-----jH\-\-'t'-t-----t--+--+-----l---I---I
.n:JIH rrOJIyqeHHH UBeTa MOHoxpOMaTHqeCKHX HCTOqHHKOB C pa3HoH .n:JIHHOH
~ 1,2 t--+---t---t-f--1l-t--+---+--I---I-----1-----l
Il{
~
BOJIHbI BH.n:HMoro crreKTpa. I
!I
HCTO'iHHK
TPH HCTO'lHHKa
MOHOXpOMaTUqeCKoro CBeTa
OCHOBHbiX lIBeTOB
i
\
1978--i
x
y= V(A)
z
1,0 t----t--t---if-,--I---F-t---=~ /~"",...,.£f\\~--+---+-------l
I
0,8
f1978/' \
\l/f----HI/r--*I\-\-+
S 0,6 t---t--h/!I----+-+-t-: \1-93-1+----1---1 8 0,4 t----r---+I!itl. ,.+--\-11 ,'--------Ii j'----+--'r---'\-f----+----1I---I IS: 1978-f.;.y, ~ ) 1931-\
~
~ 0,2 t------+-=D-+J~'-!JI.~LX~Lpr)lr--l-+-----4-----:l'r-l,,~~-l----I-------l 0,0t--+-~:..-""'1==--~~:..::"!!+-_I_-~..:::::~....-_+_-__1
t
300 PlfC.
17.1.
400
ITplfHUlfn COrJIaCOBaHlfH UBeTOB. 06JIaCTb, OCBemaeMaH TpeMH HCTOt.IHH-
KaMH OCHOBHblX UBeTOB: KpacHbIM, 3eJIeHbIM H ClfHlfM, 0603Hat.IeHHaH «nOJIe cpaBHeHlfH», BblpaBHlfBaeTcH no UBeTY C 06JIaCTblO, oCBemaeMoH 3TaJIOHHbIM IfCTOt.IHlfKOM
B KOTOPOM
y (>.)
BbI6HpaeTcH paB-
HOH
o
r.n:e
X, Y
H
Z-
CiliA
3HaqeHHH Tpex OCHOBHbIX UBeTOB, cooTBeTcTBYIOlll.He
B036Y2K.n:eHHIO (T. e. MOlll.HOCTH) Ka2K.n:oro H3 COCTaBJIHIOlll.HX UBeTOB (KpacHoro, 3eJIeHOrO H cHHero), Heo6xo.n:HMbIX .n:JIH rrOJIyqeHHH H3JIyqeHHH UBeTa
T. e.
y(>.)
=
V (>.).
(17.1 )
17.2 rrOKa3aHbI
BBe.n:eHHble MKO B 1931
r.
x(>'), y(>.) , Z(>') ,
P(>.).
2KaIOT TOT <paKT, qTO qeJIOBeqeCKOe 3peHHe
x(>,), y(>.) , z(>.)
mpext{8emHoe.
OTpa-
3TO 03HaqaeT,
qTO UBeT JII06oro HCTOqHHKa H3JIyqeHHH M02KeT 6bITb orrHcaH Ha6opoM
X(>.) , y(>.) , Z(>.) , HBJIHIOlll.HXCH
6e3pa3MepHbIMH BeJIHqH-
3HaqeHHH
X, Y
H
Z
H CHHero UBeTa B crreKTpe
YKa3bIBaIOT Ha KOJIHqeCTBO KpacHoro, 3eJIeHOrO
P(>.).
110CKOJIbKY Me2K.n:y
H 1978 r. ¥Ix qHCJIeHHble 3HaqeHHH rrpHBe.n:eHbI
B rrpHJImKeHHHx 17.111 H 17.112. 3TH TpH
Tpex rrepeMeHHblx
800
17.2. X(>') , 17(>'), z(>.) - ') H.n.eHTHt.IHbI '). OTMeTHM, t.ITO
110cJIe :)Toro rrOJIyqeHHbIH Ha60p
Ha pHC.
700
HM
PlfC.
MaTHqeCKH rrpeo6pa3yeTcH B HOBbIH Ha60p
V(>'),
600
A,
B
MOHoxpOMaTlft.IeCKOrO CBeTa
CTH)
500 ,L(mma BOJIHhl
rJIa3a H
npU6JlU3UmeJlbHYlO
(HO
He m01iHYIO)
X, Y
H
Z
CTerreHb B036Y2K.n:eHHH
HaMH. TaK2Ke CJIe.n:yeT oTMeTHTb, qTO HH
Ka2K.n:oH rpyrrrrbI KOJI6oqeK qeJIOBeqeCKOrO rJIa3a rrpH rrorra.n:aHHH Ha HHX
uBeToBaH .n:HarpaMMa He HBJIHIOTCH o.n:H03HaqHbIMH. CYlll.eCTByeT HeCKOJIbKO
H3JIyqeHHH OT HCTOqHHKa CO crreKTpaJIbHOH
BapHaHTOB
(Judd,
1951; Vos, 1978). Ka2K.n:bIH UBeToBoH OTTeHOK, xapaKTepH3YIOlll.HHCH crreKTpaJIbHOH rrJIOTHOCTbIO MOlll.HOCTH H3JIyqeHHH
P(>'),
M02KHO Bblpa3HTb Ha6opoM Tpex rra-
paMeTpoB:
x
=
JX(>.)P(>.)d>.,
H3MepHTbcH B BaTTax. Ho Ha rrpaKTHKe 3TH rrapaMeTpbI qalll.e Bcero 3a.n:aIOT B BH.n:e 6e3pa3MepHbIX BeJIHqHH, .n:JIH qero B COOTHOllIeHHH (17.2)-(17.4) BBO.n:HTCH .n:orrOJIHHTeJIbHble K03
(17.2)
.n:orrOJIHHTeJIbHble K03
A
Y
=
Jy(>')P(>')d>",
KOOpaUHambt t{8emHocmu x
H
y,
orrpe.n:eJIHeMble
H3 3HaqeHHH Tpex OCHOBHbIX UBeTOB rro <popMYJIaM (17.3)
x
X=_---
A
Z= JZ(>')P(>')d>',
P(>.).
¥l3 ypaBHeHHH (17.2)-(17.4) BH.n:HO, qTO UBeTOBble rrapaMeTpbI .n:OJI2KHbI
X+Y+Z' Y
(17.4)
y= X+Y+Z·
A 12*
(17.5) (17.6)
FA.
356
1~
17.1. c[JyltlCl1uu coeAaCOBaltUR I1Bema U I1BemoBaR iJuaepaMMa
KOAopuMempuR
0,9,-------------------------r=========~
TaKHM 06pa30M, 3HaqeHHe Koop~HHaThl UBeTHOCTH orrpe~enHeT CTerreHb
R B G
B036y)f{~eHHH O~HOH: H3 rpyrrrr UBeToBbIX peuemOpOB, HOpMHpOBaHHYIO Ha CYMMapHOe B036y)f{~eHHe
(X
+ y + Z).
3HaqeHHe KOOp~HHaTbI Z BblqHC-
=
z
X +y
+Z
=
(17.7)
1 - x - y.
qTO KOOp~HHaTY UBeTHOCTH Z
3HaqeHH~M ~BYX ~pyrHx KOOp~HHaT,
;::.,
MO)f{HO HaH:TH rro
[)
H3BeCTHbIM
~~
rr03ToMY OHa HBnHeTCH H36bITOqHOH: H
§
ee MO)f{HO He Hcrronb30BaTb. , Ha pHC. 17.3 rrOKa3aHa UBeTOBaH ~HarpaMMa. OTTeHKH 3eneHoro UBeTa COOTBeTCTBYIOT HaH60nbIlIHM 3HaqeHHHM HaH60nbIlIHM 3HaqeHHHM
x,
y,
x
H
y
lIo6aBJ1l!eT
0,6
OKOJl1laHHe «aThlih>
0,5
OTTeHKH KpacHoro UBeTa-
a OTTeHKH CHHero -
HM Z, KOTopble B COOTBeTCTBHH C ypaBHeHHeM naCTH ManblX 3HaqeHHH:
CHHHii
o
IS:
3aMeTHM
KpacHLIii
3eneHLIii y )I(eJIn.rn opaIDKeBLIii P qlHoneTOBLIii Pk P030BLIii CrpO'lliaJI 6)'KBa
0,8
nHeTC5i rrpH rrOMOlUH aHanOmqHOrO Bblpa)f{eHHH:
Z
357
HaH60nbIlIHM 3HaqeHH-
(17.7)
pacrrOnO)f{eHbI B
06~
HnH B 06nacTH Haqana Koop~HHaT uBeTOBOH
~HarpaMMbI.
Ha pHC.
17.4
rrOKa3aHO COOTBeTCTBHe Me)f{~y UBeTaMH H HX pacrrono-
)f{eHHeM Ha UBeTOBOH:
~HarpaMMe
(Gage et al.,
1977).
0,9.-------------------, 0,1
0,2
380HM
PHC.
17.4.
Ha pHC.
~
06naCTeH:
euu,
0,5
=
§
0,4
0,5
0,6 x
0,7
0,8
UBeToBall .n;HarpaMMa MKO 1931 r. C BbI,n:eJleHHbIMH 06JIaCTlIMH, COOTBeTCTBYIOlIJHMH orrpe.n;eJIeHHOMY IIBeTY (Gage et al., 1977)
;::.,
E 500 g
0,3
KOOp,ll;HHaTLI IIBeTHOCTH
17.5
rrpHBe~eHa UBeTOBaH ~HarpaMMa C YKa3aHHeM Ha HeH:
OCHOBHbIX
UBeTOB.
TaM )f{e
rrOKa3aHa
mO'l.IW paBHOU Emep(x, y, Z) =
pacrrOnO)f{eHHaH B ueHTpe ~HarpaMMbI C KOOp~HHaTaMH
(1/3,1/3,1/3).
na~aeT
CrreKTp H3nyqeHHH, cooTBeTcTBYlOlUHH: 3TOH: TOqKe, 06-
rrOCTOHHHbIM crreKTpanbHbIM
pacrrpe~eneHHeM,
T. e. 3HepmH H3ny-
qeHHH B- HHTepBane ~nHH BonH d)" rrOCTOHHHa BO BceM BH~HMOM ~Harra30He. ToqKa paBHOH: 3HeprHH xapaKTepH3yeTcH O~HHaKOBbIMH 3HaqeHHHMH Tpex OCHOBHbIX UBeTOB:
X
= Y = Z.
MOHoxpoMaTHqecKHe HnH qHCTble UBeTa pacrrOnO)f{eHbI rro rrepHMeTpy, a 6enbIH: UBeT HaXO~HTCH B ueHTpe ~HarpaMMbI. BceM UBeTaM COOTBeTCTBYlOT Koop~HHaTbI Ha UBeTOBOH: ~HarpaMMe. B pa60Te (MacAdam,
1943)
rrpOBe~eH aHanH3 pa3HOCTH UBeTa B TOq-
Kax, pacrrOnO)f{eHHbIX Ha UBeTOBOH: ~HarpaMMe 6nH3Ko O~Ha K ~pyroH:. YCTaHoBneHo, qTO qenOBeK MO)f{eT pa3nHqHTb UBeTa ~ByX TOqeK, ecnH
0,8 Koop.n;HHaTbI I(BeTHocrn PHC.
17.3.
x
UBeToBall ,n:HarpaMMa MKO 1931 r. MOHOXpOMaTHQeCKHe IIBeTa pacrroJlO)KeHbI rro rrepHMeTpy, a 6eJlbIH: IIBeT Haxo,n:HTClI B IIeHTpe ,n:HarpaMMbI
Ha
~HarpaMMe
cmORHue.
Me)f{~y
HHMH eCTb
MUHUMaJlbHOe eeOMempU'l.eC1We pac-
UBeTa B rrpe~enax HeKOTOpOH: He60nbIlIOH: 06nacTH Ha UBeTO-
BOH: ~HarpaMMe BocrrpHHHMalOTCH qenOBeKOM KaK O~HH UBeT. MaKA~aM rrOKa3an, qTO TaKHe 06naCTH HMelOT CPOPMY 3nnHrrCOB. 3nnHrrcbI, qaCTO Ha3bIBaeMble
8JlJlUnCaMU MaKAaaMa,
rrOKa3aHbI Ha pHC.
17.6
(MacAdam,
Til. 17. KOJlOpUMempU51
358
17.1. (/JYHKI1UU COeJlaCOBaHU51 I1Bema U I1BemoBa51 8uaepaMMa
359
0,9
;;"
~ () o
0,6
~
0,5
~
t 500
~ 0,4
~
::a
~ 0,3
!;
i
~
0,1
0,8 KOOP.n;HHaTbI UBeTHOCTH X
PHC.
1931
0,1
0,2
380HM KOOp,lIHHaTbI ~BeTHOCTH
1943, 1993;
Wright,
1943).
3JIJIHnCbI MaKA)J.aMa, HaHeceHHble Ha UBeToBYIO )J.HarpaMMY MKO r. OCH 9JIJIHnCOB npeBbIllialOT CBOH peaJIbHbIe pa3MepbI B 10 pa3 (MacAdam,
1943, 1993; Wright, 1943)
0,8 x
PHC. 17.5. U.BeToBaH )J.HarpaMMa MKO 1931 r. MOHoXpOMaTH'IeCKHe UBeTa pacnoJIO)KeHbI no nepHMeTpy )J.HarpaMMbI. HacblmeHHocTb ~BeTa YMeHblllaeTcH B HanpaBJIeHHH K ~eHTpy rpa<jJHKa. OeJIbIH UBeT pacnOJIO)KeH B ueHTpe. I1oKa3aHbI 06JIaCTH «'lHCTbIX>} UBeTOB. TO'lKa paBHoH 9HeprHH, pacnOJIO)KeHHaH B ~eHTpe )J.HarpaMMbI, HMeeT Koop)J.HHaTbI
17.6.
KOTopbIe 6bIJIH Ha3BaHbI (Wyszecki, Stiles, 2000):
4X
u=-----X + 15Y +3Z' I 4X u = =X'-+--::-:15=Y-=-+---==-3-=Z'
(x, y) = (1/3, 1/3)
BH.Il.HO, qTO 9JIJIHrrCbI B roJIy60H H 3eJIeHOH
06JIaCTHX 3aMeTHO pa3JIHqaIDTCH rro pa3MepaM. TI09TOMY reOMeTpHqeCKOe paccToHHHe Me)K.Il.Y .Il.BYMH TOqKaMH Ha lI.BeTOBOH .Il.HarpaMMe He CBH3aHO JIIfHeHHOH 3aBHCHMOCTbID C pa3HHlI.eH B lI.BeTe 9THX .Il.BYX TOqeK. 06llI.ee qHCJIO pa3JIHqllMbIX lI.BeTOBbIX OTTeHKOB MO)KeT 6bITb HaH.Il.eHO
Yflu8epCaJlbflblMU Koop8uflamaMu /,f8emflocmu
6Y v = ."-,,.--,-----
(17.8)
X+15Y+3Z' I 9Y v = X + 15Y + 3Z·
(17.9)
3TH KOOp.Il.HHaTbI H CTaJIH KOOp.Il.HHaTaMH paBHoKoHTpacTHoH lI.BeToBoH .Il.HarpaMMbI. Ha pHC.
17.7
1976 r. (x, y) rrpH
rrOKa3aHa paBHoKoHTpacTHaH .Il.lIarpaMMa MKO
/
KOOp.Il.HHaTbI (u, v) II (u , v') MO)KHO rrOJIYQHTb H3 KOOp.Il.HHaT rrOMOllI.H CJIe.Il.YIDllI.HX BbIpa)KeHHH:
.Il.eJIeHlleM rrJIOllI.a.Il.1I lI.BeTOBOro rpaHKa Ha Cpe.Il.HIDID rrJIOllI.a.Il.b 9JIJIHrrCOB MaKA.Il.aMa. TIpoBe.Il.H TaKHe BbIqHCJIeHIIH, YCTaHOBHJIII, qTO qeJIOBeK MO)KeT pa3JIllqaTb
50000
u
pa3JIHqHbIX lI.BeTOBbIX OTTeHKOB. ECJIH yqllTbIBaTb
Bce B03MO)KHbIe H3MeHeHHH HPKOCTH, qHCJIO pa3JIHqHMbIX lI.BeTOB CTaHeT 6 60JIbIIle 10 .
v=
4x = u I = --::---;-::----::-2x+ 12y+3'
6y -2x+ 12y+3'
v' =
9y -2x+ 12y+3·
(17.10) (17.11)
DbIJIO 6bI )KeJIaTeJIbHO, QTo6bI Ha lI.BeTOBOH .Il.HarpaMMe pa3HOCTb lI.BeTOB .Il.BYX TOQeK 6bIJIa rrpOrrOplI.lIOHaJIbHa reOMeTpHQeCKOMY paCCTOHHHID Me)K.Il.Y HHMH. TI09TOMY 6bIJIH BBe.Il.eHbI HOBbIe KOOp.Il.HHaTbI lI.BeTHOCTH, OTJIHQHbIe OT paCCMOTpeHHbIX BblIIle KOOP.Il.HHaT
(x, y).
UeJIb 9Toro HOBOBBe.Il.eHHH
1960 r. (u /, v'),
3aKJIIDQaJIaCb B C03.I1.aHHH YHHBepCaJIbHOH lI.BeTOBoH .Il.HarpaMMbI. B MKO BBeJIa KOOp.Il.HHaTbI
(u, v),
a
B
1976
r. -
KOOp.Il.HHaTbI
COOTBeTCTBeHHO, MO)KHO rrpOH3BeCTH H o6paTHoe rrpeo6pa30BaHHe:
9u' 2v' 6u' - 16v' + 12' y = 3u' - 8v' + 6 ' 3u 2v x = ~--=.;:.----:2u- 8v+4' y = 2u-8v+4·
X=
-~~~---
(17.12) (17.13)
TA. 17 KOAopuMempuR
360
17.2. Cfucmoma tJ,Bema
361
51
-;:..
p
0,3
<.)
o
~;- 0,2 !;;
51
~ 0,11---+-f-:-::c:-'-'
~ ~1
KOOp,!I;HHaTa ~eTHocm u' PHC.
17.7.
PaBHoKoHTpacTHalI UBeTOBalI ,n:HarpaMMa MKO 1976 r., paCC'lHTaHHalI C HCIlOJIb30BaHHeM UBeToBoH ,n:HarpaMMbI MKO 1931 r.
Pa3HH~a B ~BeTe Me)K,n:y ~ByMH TO'lKaMH Ha ~BeToBoH ~HarpaMMe (x,y) 3aBHCHT OT HX rrpocTpaHcTBeHHoro pacrrOJIO)KeHHH, T. e.
~BeT
H3MeHHeTCH
60JIee pe3Ko B O~HOM H3 HarrpaBJIeHHH. HarrpHMep, B~OJIb OCH H3MeHHIOTCH 6bICTpee, 'leM B~OJIb OCH YMeHbllIHJICH
(XOTH
y.
~BeTa
118em080U KOHmpacm Me)K~y ~ByMH
~HOHaJIeH
eeOMempUtteCKOMY paccmORHUIO
3JIJIHrrCbI
Me)K~y
3THMH TO'lKaMH.
MaKA~aMa Ha ~BeTOBOH ~HarpaMMe MKO
'lTO H rrOKa3aHO Ha pHC.
17.8. BH~HO,
MOHoxpOMaTH'leCKHe HCTO'lHHKH
(LlA -+0)
pacrrOJIaraIOTCH rro rrepH-
MeTpy ~BeTOBOH ~HarpaMMbI, a rrpH YBeJIH'leHHH IlIHpHHbI crreKTpaJIbHOH JIHHHH HCTO'lHHKa rrOJIO)KeHHe ~BeTa Ha ~HarpaMMe CMemaeTCH B CTOPOHY
1931 r.
MO-
ryT 6bITb rrepeHeceHbI Ha paBHoKoHTpacTHYIO ~HarpaMMy B KOOp~HHaTaX
(u' , v'),
0,6
17.2. qHcToTa :U;BeTa
C BBe~eHHeM YHHBepCaJIbHbIX
TO'lKaMH paBHOKOHTpaCTHOH ~BeTOBOH ~HarpaMMbI rrO'lTH Bcer~a rrporrop-
~
PHC. 17.8. 3JIJIHIlCbl MaKA,n:aMa, HaHeceHHble Ha paBHoKoHTpacTHYIO ,n:HarpaMMY MKO 1976 r. OCH TpaHc
3TOT He~OCTaTOK cymeCTBeHHO
H He HC'le3 COBceM)
Koop~HHaT ~BeTHOCTH. B pe3YJIbTaTe
x
~ ~ ~ KOOp,!I;HHaTa ~erHocm u'
'lTO 3JIJIHrrCbI MaKA~aMa,
COOTBeTCTBYIOmHe 06JIaCTHM Hepa3JIH'lHMbIX OTTeHKOB, Ha paBHoKoHTpacT-
~eHTpa. ECJIH IlIHpHHa crreKTpa H3JIY'leHHH CTaHOBHTCH cpaBHHMoH C IlIHpHHOH Bcero BH~HMoro ~Harra30Hai HCTO'lHHK C'lHTaeTCH HCTO'lHHKOM
6eAOeO
CBeTa, KOTOPbIH pacrrOJIaraeTCH B6JIH3H ~eHTpa ~BeTOBOH ~HarpaMMbI.
J!.OMUHuPYlOl4eu aAUHOU 80AHbl
TecTHpyeMoro HCTO'lHHKa CBeTa C'lH-
HOH ~HarpaMMe 60JIee O~HOpO~HbI rro cpopMe H pa3MepaM, 'leM Ha ~BeToBoH
TaeTCH ~JIHHa BOJIHbI MOHoxpOMaTH'leCKOrO H3JIY'leHHH, pacrrOJIO)KeHHaH Ha
~HarpaMMe MKO
KpaIO ~BeTOBOH ~HarpaMMbI Ha caMOM KOPOTKOM paCCTOHHHH OT TO'lKH
1931
r.
CJIe~yeT OTMeTHTb, 'lTO rrpeo6pa30BaHHe Koop~HHaT (x,
y)
B
(u ' , v')
HBJIHeTCH MaTeMaTH'leCKH HeJIHHeHHOH orrepa~HeH, rr03TOMY 3JIJIHrrCbI Ha
~HarpaMMe
1931
r. He MoryT 6bITb, CTporo rOBopH, TpaHccpopMHpOBaHbI
B 3JIJIHrrCbI Ha paBHOKOHTpaCTHOH ~HarpaMMe.
O~HaKO rrpH ~OCTaTO'lHO
MaJIbIX pa3Mepax 3JIJIHrrCOB Ha ~BeTOBOH ~HarpaMMe
1931
r. OllIH6KH HeJIH-
HeHHOCTH 6Y~YT TaK)Ke MaJIbI, rr03TOMY cpopMa rrpeo6pa30BaHHblx cpHryp Ha ~HarpaMMe
1976
r. 6y~eT 6JIH3Ka K 3JIJIHrrcaM.
C Koop~HHaTaMH ~BeTHOCTH HCTO'lHHKa. )lJIH orrpe~eJIeHHH ~oMHHHpyIOmeH ~JIHHbI BOJIHbI rrpOBO~HT rrpHMyIO JIHHHIO K KpaIO ~HarpaMMbI, rrpOXO~H
myIO 'lepe3 TO'lKY paBHoH 3HeprHH HCTO'lHHKa 6eJIoro CBeTa H TO'lKY C Koop~HHaTaMH ~BeTHOCTH
(x, y),
COOTBeTCTBYIOmHMH TecTHpyeMOMY HC-
TO'lHHKY CBeTa. TO'lKa rrepeCe'leHHH 3TOH rrpHMOH C BHellIHeH rpaHH~eH
~BeToBoH ~HarpaMMbI H 6y~eT orrpe~eJIHTb ~oMHHHpyIOmyIO ~JIHHy BOJIHbI 17.9 CXeMaTH'lHO rrOKa3aHa rrpo~e~ypa HaXO)K~eHHH
HCTO'lHHKa. Ha pHC.
~oMHHHpyIOmeH ~JIHHbI BOJIHbI.
II "I
FA. 11 KOAopuMempuR
362
......-1----1----+.----1-1
510
17.3. Koop8unambt tJ,8emnocmu c8emo8uo808 lI.BeTa, KaK rrpaBHJIO, paBHa
Koop,!\HHaThJ HCTO'lHHKll (x, y) ,L(OMHI!Hpyro~aJI AJIHHa BOJIHhl 515 HM ~CTOTal.\BeTa
paBHa
100 %,
363
a .D.JIH HCTOqHHKOB 6eJIoro CBeTa OHa
0% .
OTMeTHM, 'ITO .D.OMHHHpYlOmaH .D.JIHHa BOJIHbI H qHCTOTa lI.BeTa -
a/(a+b)
aJIb-
TepHaTHBHble rrapaMeTpbI, xapaKTepH3YIOmHe rrOJIOiKeHHe H3JIyqaTeJIH Ha lI.BeTOBOH .D.HarpaMMe. .lI.OMHHHpYlOmaH .D.JIHHa BOJIHbI H qHCTOTa lI.BeTa HBJIHIOTCH BocrrpHHHMaeMbIMH rrOHHTHHMH H, B OTJIHqHe OT qHCJIeHHbIX 3Ha-
0,6
qeHHH KOOP.D.HHaT lI.BeTHOCTH, Y.D.06HbI .D.JIH rrpaKTHqeCKOrO HCrrOJIb30BaHHH.
500HM
;>.,
~
0,5
I
17.3.
Koop)J;HHaTbI U;BeTHOCTH CBeTO)J;HO)J;OB
t;!
I
MOHoxpOMaTHqeCKHe HCTOqHHKH H3JIyqeHHH
0,3
(~>. ~ 0) pacrrOJIaralOTCH
rro rrepHMeTpy lI.BeTOBoH .D.HarpaMMbI. .lI.JIH qeJIOBeqeCKOrO rJIa3a H3JIyqe-
~
HHe CBeTO.D.HO.D.OB KaiKeTCH MOHoxpOMaTHqeCKHM, O.D.HaKO C TOqKH 3peHHH
0,2
CPI13HKH 3TO He TaK, rrOCKOJIbKY UIHpHHa crreKTpaJIbHOH JIHHI1H CBeTO.D.HO.D.a HBJIHeTCH KOHeqHOH BeJIHqHHOH, rrpH6JIH3HTeJIbHO paBHoH
0,1
1,8kT.
TI03TOMY
CBeTO.D.HO.D.bI pacrrOJIaralOTCH He Ha caMOH rpaHHlI.e lI.BeTOBOH .D.HarpaMMbI, a 86JlU3U Hee. ECJIH HCTOqHHK H3JIyqaeT CBeT He O.D.HOH .D.JII1HbI BOJIHbI,
0,0 L-..L.-..L-....LII:...J...---L..---L--1---J'--i.......:-'-::-....I.....--:-'-::---'--:-'-:::-'----::'O 8 0,0
0,1
0,2
0,3 0,4 0,5 Koop,!\HHaTa l.\BeTHOCTH x
0,6
0,7
a B .D.Harra30He .D.JII1H BOJIH, ero KOOp.D.I1HaTbI lI.BeTHOCTI1 C.D.BI1raIOTCH 6JIHiKe
,
K lI.eHTPY .D.HarpaMMbI. Ha pHC.
PHC.
17.9.
UBeToBall )l,HarpaMMa, Ha KOTOPOH nOKa3aHa npOue)l,ypa HaXQ}K)l,eHHlI
)l,OMHHHpYIOmeH )l,JIHHbI
BOJIHbI
H onpe)l,eJIeHHlI tJHCTOTbI UBeTa HCTotJHHKa H3-
(x, y). B
JIytJeHHlI C KOOp)l,HHaTaMH UBeTHOCTH
KatJeCTBe 3TaJIOHHOrO HCTotJHHKa
6eJIoro UBeTa HCnOJIb30BaJIOCb paBHoMepHo CBeTlImeeClI nllTHO C KOOp)l,HHaTaMH
(x
= 1/3,y = 1/3). TaK)J{e nOKa3aHO pacnOJIO)J{eHHe THnHtJHblX CBeTO)l,HO)l,OB CHHero, 3eJIeHOrO H KpaCHoro CBetJeHHlI
17.10
rrOKa3aHO paCrrOJIOiKeHHe pa3JIHqHbIX THrrOB CBeTO.D.H-
O.D.OB Ha lI.BeTOBoH .D.HarpaMMe. CBeTO.D.HO.D.bI KpacHoro 11 CHHero CBeqeHHH HaXO.D.HTCH Ha rpaHHlI.e 6JIH3Ka K
100 %.
lI.BeTOBOH .D.HarpaMMbI. QI1CTOTa HX lI.BeTa
O.D.HaKO CBeTO.D.HO.D.bI CHHe-3eJIeHOrO H 3eJIeHOrO CBeqe-
HHH CMemeHbI OT rrepHMeTpa 6JIHiKe K lI.eHTpy .D.HarpaMMbI, 'ITO 06bHCHHeTCH KOHeqHOH UIHPHHOH crreKTpOB H3JIyqeHHH 3TOH rpyrrrrbI CBeTO.D.HO.D.OB H CHJIbHOH KPHBH3HOH lI.BeTOBoH .D.HarpaMMbI B 3eJIeHOH 06JIaCTH
1.fucmoma £f8ema
HJIH
HaCbtU{eHHocmb £f8ema
HCTOqHHKa CBeTa paBHa
crreKTpa.
paCCTOHHHIO Ha lI.BeTOBOM rpaqmKe MeiK.D.Y TOtJKOH C KOOp.D.HHaTaMH lI.BeTHOCTH
(x, y)
C,L( InGaN ;>., 520 yv 525 HM rJ (3eJIeHLIH) ~
H TOqKOH paBHOH ::meprHH, .D.eJIeHHOMY Ha paCCTOHHHe MeiK.D.Y
TOqKOH .D.OMHHHPYlOmeH .D.JIHHbI BOJIHbI H TOqKOH paBHOH ::meprHH.
.1I)m
orrpe.D.eJIeHHH qHCTOTbI lI.BeTa HCrrOJIb3yeTcH BblpaiKeHHe
qHCTOTa lI.BeTa
r.D.e
a
H
b rrOKa3aHbI
a = --b =
a+
Ha pHC.
17.9,
v
(x - Xee )2 + (y - Yee)2
V(Xd - Xee)2 + (Yd - Yee)2 ' a
(x, y), (xee, Yee), (Xd, Yd)
(17.14)
C,L( InGaN
(CHH!?3~;~LIH) C,L(InGaN 450HM (cHHHii)
COOTBeTCTBY-
HCTOqHHKa 6eJIoro CBeTa H .D.OMHHHpYlOmero lI.BeTa. OTCIO.D.a BH.D.HO, 'ITO qHCTOTa lI.BeTa rrOKa3bIBaeT HaCKOJIbKO Y.D.aJIeH TeCTOBbIH HCTOqHHK H3JIyqeHHH OT lI.eHTpa lI.BeTOBOH .D.HarpaMMbI. .lI.JIH MOHoxpOMaTHqeCKHX HCTOqHHKOB
0),
540 560
C,L(InGaN 505HM ___I (cHHe-3eneHLIH)500
lOT KOOp.D.HHaTaM lI.BeTHOCTH TecTHpyeMoro HCTOqHHKa CBeTa, 3TaJIOHHOrO
(~>. ~
r ...----rrr
paCrrOJIOiKeHHbIX rro rrepHMeTpy lI.BeTOBOro rpacpHKa, qHCTOTa
PHC.
17.10.
l
j
C,L(AIinGaP 590 HM (JIlITapHLIii) C,L( AIInGaP 605 HM (opaIDKeBLIH)
C~~J~aP
80 MKO
HCTO~K "c"
600
(KpaCHo0paIDKeBLIH)
(6enLIH CBeT)
400
OCLX
PacnOJIo)J{eHHe pa3JIHtJHblX THnOB CBeTO)l,HO)l,OB Ha UBeToBoH )l,HarpaMMe
(Schubert, Miller, 1999)
364
17.4. Bu6Auoepat/JurteCKuii cnUCOK
FA. Il KOAopuMempuR
17.4.
B3aHMocBH3b MelK.lI:Y U:BeTHOCTblO H U:BeTOM
3aKOH'lHB paCCY)K.lI.eHHH Ha TeMY I1Bemflocmu, MbI MO)KeM BHOBb BepHYTbCH K Borrpocy 0 TOM, 'ITO )Ke TaKoe lI.BeT. MO)KHO, KOHe'lHO, yTBep)K.lI.aTb, 'ITO lI.BeT orrpe.ll.eJIHeTCH pacrrOJIO)KeHHeM HCTO'lHHKa H3JIY'leHHH Ha lI.BeTOBOH: .lI.HarpaMMe, T. e. ero KOOp.ll.HHaTaMH lI.BeTHOCTH. O.ll.HaKO MKO B
1986 r.
BBeJIa 60JIee o6mee orrpe.ll.eJIeHHe lI.BeTa, KOTopoe He· OrpaHH'lH-
BaeTCH pacrrOJIO)KeHHeM HCTO'lHHKa Ha lI.BeTOBOH: .lI.HarpaMMe, a BKJIIO'laeT B ce6H rrOHHTHH I1Bemflocmu H Rplwcmu. no orrpe.ll.eJIeHHIO MKO H3MeHeHHe CHJIbI CBeTa (HpKOCTH)
1986
r.
HCTO'lHHKa Be.ll.eT K H3MeHeHHIO ero
lI.BeTa, .lI.a)Ke eCJIH ero lI.BeTHOCTb rrpH 9TOM OCTaeTCH rrOCTOHHHOH:. Ho O'leBH.lI.HO, 'ITO rrpH O.ll.HOM H TOM )Ke ypOBHe HPKOCTH rrOHHTHH lI.BeTHOCTH H lI.BeTa COBrra.ll.alOT H 9TH CJIOBa HBJIHIOTCH CHHOHHMaMH. PacrrOJIO)KeHHe TO'lKH lI.BeTHOCTH MO)KeT 6bITb Bblpa)KeHO 'lepe3 rrOHHTHH 80MUflaflmflOU 8AUflbt BOAflbt H flaCbtU{eflflocmu crroco6 -
(aJIbTepHaTHBHbIH:
'lepe3 I1BemoBou mOfl H flaCbtU{eflflocmb). TaKHM 06pa30M, B
COOTBeTCTBHH C orrpe.ll.eJIeHHeM MKO lI.BeT HCTO'lHHKa H3JIY'leHHH 3a.ll.aeTCH ero 80MUflaflmflOU 8AUflOU BOAflbt, flaCbtU{eflflocmblO H RpKocmblO, a lI.BeT 06beKTa orrpe,lJ.eJIHeTCH 80MUflaflmflOU 8AUflOU BOAflbt, flaCbtU{eflflocmblO H OCBeU{eflflocmblO.
BH6JIHOrpaq,HQeCKHH CnHCOK
CIE Commission Internationale de l'Eclairage Proceedings (Cambridge University Press, Cambridge, 1931). CIE data of 1931 and 1978 available at http://cvision.ucsd.edu and http://www.cvrl.org (1978). CIE data of 1960 relating to the (u, v) chromaticity coordinates can be found in CIE, 1986. CIE data of 1976 relating to the (ul, vI) chromaticity coordinates can be found in CIE, 1986. CIE publication No. 15 (E.1.3.1) 1971: Colorimetry; this publication was updated in 1986 to CIE Publication 15.2 Colorimetry (CIE, Vienna, Austria, 1986). Gage S., Evans D., Hodapp M. W., and Sorensen H. Optoelectronics Applications Manual 1st edition (McGraw Hill, New York, 1977). Judd D. B. "Report of US Secretariat Committee on Colorimetry and Artificial Daylight" in Proceedings of the 12th Session of the CIE 1, p. 11 (Bureau Central de la CIE, Paris, 1951). MacAdam D. L. "Specification of small chromaticity differences" 1. Opt. Soc. Am. 33, 18 (1943). MacAdam D. L. (Editor) Colorimetry - Fundamentals (SPIE Optical Engineering Press, Bellingham, Washington, 1993). Schubert E. F. and Miller J. N "Light-emitting diodes - An introduction" Encyclopedia of Electrical Engineering, edited by John G. Webster, Vol. 11, p. 326 (John Wiley and Sons, New York, March 1999).
365
Vos J. J. "Colorimetric and photometric properties of a 2-degree fundamental observer" Color Res. Appl. 3, 125 (1978). Wyszecki G. and Stiles W. S. Color Science - Concepts and Methods, Quantitative Data and Formulae 2nd edition (John Wiley and Sons, New York, 2000). Wright W. D. "The graphical representation of small color differences" 1. Opt. Soc. Am. 33, 632 (1943). ,nonOJlHeHHe pe,lJ;aKTopa 1. KpHBoilleeB M., KycTapeB A. I.J.BeToBble H3MepeHHf!. - M.: HaYKa, 1992. 2. rypeBH'l H. I.J.BeT Hero H3MepeHHf!. - M. HaYKa, 1988. 3. CnpaBO'lHHK no CBeTOTeXHHKe, 3-e H3.l1.. / fIo.ll. 06111. pe.ll.. npocp. 10. O. AH3eH6epra. - M.: 2006. - 986 c.
FA. 11 KOAopuMempuR
366
flpUAO'JICeHUe 17.fl2
npHJlOlKeHHe 17.n 1 lJ,BeTOBa51 )J,l1arpaMMa
MKO 1931
npHJlOlKeHHe 17.n2 r.
lJ,BeTOBa51 )J,l1arpaMMa
qliCJIeHHble 3HaqeHli1l
.>..,
HM
360 365 370 375 380 385 390 395 400 405 410 415 420 425 430 435 440 445 450 455 460 465 470 475 480 485 490 495 500 505 510 515 520 525 530 535 540 545 550 555 560 565 570 575 580 585
MKO 1951, V(A) (CIE, 1951).
x(.>..)
y= V(.>..)
z('>")
KpaCnblU
3eAenblU
cunuu
1,2990.104 2,3210.104 4,1490.104 7,4160.104 1,3680.103 2,2360.103 4,2430.103 7,6500.103 1,4310.102 2,3190.102 4,3510.102 7,7630.102 0,13438 0,21477 0,28390 0,32850 0,34828 0,34806 0,33620 0,31870 0,29080 0,25110 0,19536 0,14210 9,5640.102 5,7950.102 3,2010·102 1,4700.102 4,9000.103 2,4000.103 9,3000.103 2,9100.102 6,3270.102 0,10960 0,16550 0,22575 0,29040 0,35970 0,43345 0,51205 0,59450 0,67840 0,76210 0,84250 0,91630 0,97860
3,9170.106 6,9650.106 1,2390.105 2,2020.105 3,9000.105 6,4000.105 1,2000.104 2,1700.104 3,9600.104 6,4000.104 1,2100.103 2,1800.103 4,0000.103 7,3000.103 1,1600.102 1,6840.102 2,3000.102 2,9800.102 3,8000.102 4,8000.102 6,0000.102 7,3900.102 9,0980.102 0,11260 0,13902 0,16930 0,20802 0,25860 0,32300 0,40730 0,50300 0,60820 0,71000 0,79320 0,86200 0,91485 0,95400 0,98030 0,99495 1,00000 0,99500 0,97860 0,95200 0,91540 0,87000 0,81630
6,0610.104 1,0860.103 1,9460.103 3,4860.103 6,4500.103 1,0550.102 2,0050·102 3,6210.102 6,7850.102 0,11020 0,20740 0,37130 0,64560 1,03905 1,38560 1,62296 1,74706 1,78260 1,77211 1,74410 1,66920 1,52810 1,28764 1,04190 0,81295 0,61620 0,46518 0,35330 0,27200 0,21230 0,15820 0,11170 7,8250.102 5,7250.102 4,2160.102 2,9840.102 2,0300.102 1,3400.102 8,7500.103 5,7500.103 3,9000.103 2,7500.103 2,1000.103 1,8000.103 1,6500.103 1,4000.103
590 595 600 605 610 615 620 625 630 635 640 645 650 655 660 665 670 675 680 685 690 695 700 705 710 715 720 725 730 735 740 745 750 755 760 765 770 775 780 785 790 795 800 805 810 815 820 825
1,02630 1,05670 1,06220 1,04560 1,00260 0,93840 0,85445 0,75140 0,64240 0,54190 0,44790 0,36080 0,28350 0,21870 0,16490 0,12120 8,7400.102 6,3600.102 4,6770.102 3,2900.102 2,2700.102 1,5840·102 1,1359.102 8,1109.103 5,7903.103 4,1065.103 2,8993.103 2,0492.103 1,4400.103 9,9995.104 6,9008.104 4,7602.104 3,3230.104 2,3483.104 1,6615.104 1,1741.104 8,3075.105 5,8707.105 4,1510.105 2,9353.105 2,0674·105 1,4560.105 1,0254.105 7,2215.106 5,0859.106 3,5817.106 2,5225.106 1,7765.106
367
0,75700 0,69490 0,63100 0,56680 0,50300 0,44120 0,38100 0,32100 0,26500 0,21700 0,17500 0,13820 0,10700 8,1600.102 6,1000·102 4,4580·102 3,2000·102 2,3200·102 1,7000.102 1,1920.102 8,2100·103 5,7230.103 4,1020·103 2,9290.103 2,0910.103 1,4840.103 1,0470.103 7,4000.104 5,2000.104 3,6110.104 2,4920.104 1,7190.104 1,2000.104 8,4800.105 6,0000.105 4,2400.105 3,0000.105 2,1200.105 1,4990.105 1,0600.105 7,4657.106 5,2578.106 3,7029.106 2,6078.106 1,8366.106 1,2934.106 9,1093.107 6,4153.10 7
MKO 1978
r.
qliCJIeHHble 3HaqeHli1l
(CIE, 1978).
3TIi
1,1000.103
TaK}J{e Ha3bIBaIOT MO.ll.Ii
1,0000.103 8,0000.104 6,0000.104 3,4000.104 2,4000.104 1,9000.104 1,0000.104 5,0000.105 3,0000.105 2,0000.105 1,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105 0,0000.105
Boca.
.>..,
HM
380 385 390 395 400 405 410 415 420 425 430 435 440 445 450 455 460 465 470 475 480 485 490 495 500 505 510 515 520 525 530 535 540 545 550 555 560 565 570 575 580 585 590 595
x(.>..)
y
= V(.>..)
z(.>..)
Kpacnblu
3eJleHblU
cunuu
2,6899.103 5,3105.103 1,0781.102 2,0792.102 3,7981.102 6,3157.102 9,9941.102 1,5824.101 2,2948.101 2,8108.101 3,1095.10 1 3,3072.10 1 3,3336.10 1 3,1672.10 1 2,8882.10 1 2,5969.10 1 2,3276.101 2,0999.10 1 1,7476.10 1 1,3287.101 9,1944.102 5,6985.102 3,1731.102 1,4613.102 4,8491.103 2,3215.103 9,2899.103 2,9278·102 6,3791.102 1,1081.10 1 1,6692.10 1 2,2768.10 1 2,9269.10 1 3,6225.10 1 4,3635.10 1 5,1513.10 1 5,9748.10 1 6,8121.101 7,6425.101 8,4394.10 1 9,1635.10 1 9,7703.10 1 1,0230 1,0513
2,0000.104 3,9556.104 8,0000.104 1,5457.103 2,8000.103 4,6562.103 7,4000.103 1,1779.102 1,7500.102 2,2678.102 2,7300.102 3,2584.102 3,7900.102 4,2391.102 4,6800.102 5,2122.102 6,0000.102 7,2942.102 9,0980.102 1,1284.10 1 1,3902.10 1 1,6987.10 1 2,0802.10 1 2,5808.10 1 3,2300.10 1 4,0540.10 1 5,0300.10 1 6,0811.10 1 7,1000.10 1 7,9510.10 1 8,6200.10 1 9,1505.101 9,5400.10 1 9,8004.10 1 9,9495.10 1 1,0000 9,9500.10 1 9,7875.10 1 9,5200.10 1 9,1558.10 1 8,7000.10 1 8,1623.10 1 7,5700.101 6,9483.10 1
1,2260.102 2,4222.102 4,9250.102 9,5135.102 1,7409.10 1 2,9013.10 1 4,6053.10 1 7,3166.10 1 1,0658 1,3146 1,4672 1,5796 1,6166 1,5682 1,4717 1,3740 1,2917 1,2356 1,1138 9,4220.10 1 7,5596.10 1 5,8640.10 1 4,4669.10 1 3,4116.10 1 2,6437.10 1 2,0594.10 1 1,5445.10 1 1,0918.10 1 7,6585.102 5,6227.102 4,1366.102 2,9353.102 2,0042.102 1,3312.102 8,7823.103 5,8573.103 4,0493.103 2,9217.103 2,2771.103 1,9706.103 1,8066.103 1,5449.103 1,2348.103 1,1177.103
600 605 610 615 620 625 630 635 640 645 650 655 660 665 670 675 680 685 690 695 700 705 710 715 720 725 730 735 740 745 750 755 760 765 770 775 780 785 790 795 800 805 810 815 820 825
1,0550 1,0362 9,9239.10 1 9,2861.10 1 8,4346.10 1 7,3983.10 1 6,3289.10 1 5,3351.101 4,4062.101 3,5453.10 1 2,7862.10 1 2,1485.10 1 1,6161.10 1 1,1820.10 1 8,5753·102 6,3077-102 4,5834.102 3,2057.102 2,2187.102 1,5612.102 1,1098.102 7,9233.103 5,6531.103 4,0039.103 2,8253.103 1,9947.103 1,3994.103 9,6980.104 6,6847.104 4,6141.104 3,2073.104 2,2573.104 1,5973.104 1,1275.104 7,9513.105 5,6087.105 3,9541.105 2,7852.105 1,9597.105 1,3770.105 9,6700.106 6,7918.106 4,7706.106 3,3550.106 2,3534.106 1,6377-106
6,3100.10 1 5,6654.10 1 5,0300.101 4,4172.10 1 3,8100.10 1 3,2052.10 1 2,6500.10 1 2,1702.10 1 1,7500.10 1 1,3812.101 1,0700.10 1 8,1652.102 6,1000.102 4,4327.102 3,2000.102 2,3454.102 1,7000.102 1,1872·102 8,2100.103 5,7723.103 4,1020.103 2,9291.103 2,0910.103 1,4822.103 1,0470.103 7,4015.104 5,2000.104 3,6093.104 2,4920.104 1,7231.104 1,2000.104 8,4620.105 6,0000.105 4,2446.105 3,0000.105 2,1210.105 1,4989.105 1,0584.105 7,4656.106 5,2592.106 3,7028.106 2,6076.106 1,8365.106 1,2950.106 9,1092.107 6,3564.107
9,0564.104 6,9467.104 4,2885.104 3,1817.104 2,5598.104 1,5679.104 9,7694.105 6,8944.105 5,1165.105 3,6016.105 2,4238.105 1,6915.105 1,1906.105 8,1489.106 5,6006.106 3,9544.106 2,7912.106 1,9176.106 1,3135.106 9,1519.10" 6,4767.107 4,6352.107 3,3304.107 2,3823.107 1,7026.107 1,2207.107 8,7107.108 6,1455.108 4,3162.108 3,0379.108 2,1554.108 1,5493.108 1,1204.108 8,0873.109 5,8340.109 4,2110.109 3,0383.109 2,1907.109 1,5778.109 1,1348.109 8,1565.10 10 5,8626.10 10 4,2138.10 10 3,0319.10 10 2,1753.10 10 1,5476.10 10
18.2. CneKmp U3AY'leHUR a6coAIOmHo 'lepH080 meAa - U3AY'lameAR ilAaHKa 369 5 3
1000
3AKOH H3JIYQEHHSI IIJIAHKA H UBETOBASI TEMIIEPATYPA OeJIbIH: CBeT I1MeeT oc06ble UBeTOBble xapaKTepl1CTI1KI1. CymecTByeT
0,5
0,4
~ '!Xl 300 o '" is,,,· 200 01
a~
.,~ !ilEf
50
;:g
30 20
J::
U
0
C03,U.aHI1H 6eJIoro CBeTa. Cpe,U.11 3TI1X crreKTpOB MO:>KHO BbI,U.eJII1Tb crreKTp Ha3bIBaeMoro 113JIyqeHI1eM
IlJIaHKa. )l.aHHbIH: crreKTp JIe:>KI1T B OCHOBe 0,U.H03HaqHOrO 11 OqeHb rrOJIe3HO-
10
ro CTaH,U.apTa, rr03BOJIHIOmerO Orrl1CbIBaTb crreKTp 113JIyqeHI1H rrpl1 rrOMOml1 e,U.I1HCTBeHHoro rrapaMeTpa -
1,0
.@~ ~ti. 100
MHoro OrrTl1qeCKI1X crreKTpOB, KOTopble MoryT 6bITb I1CrrOJIb30BaHbI ,U.JIH qaCTO
1,4
500
fJIaBa 18
113JIyqeHI1H a6COJIIOTHO qepHOrO TeJIa,
2
0
1,0
2,0
UBeTOBOH: TeMrrepaTypbI. oOJIee TOro, crreKTp
3,0
4,0
hv, 38
3HepIIDI CPOTOHOB
113JIyqeHI1H eCTeCTBeHHoro ,U.HeBHoro CBeTa 6JII130K K crreKTpy rrJIaHKOBCKOPI1C.
ro I1CTOqHI1Ka 113JIyqeHI1H.
18.1.
3aBI1CHMOCTb crreKTpaJIbHOH: IlJIOTHOCTH MOW:HOCTH COJIHeqHOrO H3JIY-
qeHHlI OT 3HeprHH
18.1.
1975)
CneKTp H3JIyqeHHH COJIHu;a ,U.eJIHeMblH: TOJIbKO O,U.HI1M rrapaMeTpoM -
OeJIbIH: CBeT, KaK rrpaBI1JIO, xapaKTepl13yeTcH llII1pOKI1M crreKTpOM 113JIyqeHI1H, KOTOPbIH: 06blqHO pacrrpOCTpaHHeTCH Ha BeCb BI1,U.I1MbIH: ,U.l1arra30H. TI1III1QHOH: Mo,U.eJIbIO 6eJIoro CBeTa HBJIHeTCH COJIHeQHbIH: CBeT. Ha Pl1c.
MyJIy, orrl1cblBaIOmyIO IlJIaHK B 1900 r.:
crreKTp
I (A) =
18.1
2h· c
5
A
rrOKa3aHbI OrrTHQeCKl1e crreKTpbI COJIHua B BepxHHx CJIOHX 3eMHOH: aTMO-
TeMilepaTyp0H: TeJIa. IlepBbIM <pop-
113JIyqeHI1H
qepHOrO
TeJIa,
BbIBeJI
MaKc
2
[exp C.~~) - 1]
•
(18.1)
c
1975).
CrreKTp COJIHeQHOrO CBeTa
Ha pHC.
18.2
rrpe,U.CTaBJIeHbI crreKTpbI H3JIYQeHHH a6COJIIOTHO QepHOrO
3aKoH BUHa
3aHHMaeT BeCb ,U.Harra30H BH,U.HMoro H3JIYQeHHH. O,U.HaKO HHTeHCHBHOCTb
TeJIa IIpH pa3Hblx TeMilepaTypax.
COJIHeQHOrO 113JIYQeHHH 3aBHCHT OT BpeMeHH CyTOK, BpeMeHH ro,U.a, BbICOTbI
KOTOPOH: cooTBeTcTByeT MaKCI1MaJIbHaH HHTeHCI1BHOCTb H3JIYQeHI1H, Hcrryc-
Ha,U. ypOBHeM MOPH, IIorO,U.bI H ,U.pyrHx <paKTopOB.
KaeMoro QepHbIM TeJIOM, HMeIOmHM TeMrrepaTYPY
IloCKOJIbKY B COJIHeQHOM CBeTe BeJIHKa ,U.OJIH I1H
A
YJIbTpa
_
2880
max -
MKM •
T
K
orrpe,U.eJIHeT ,U.JIHHy BOJIHbI,
T: (18.2)
.
H3JIYQeHHH COJIHua He y,U.aeTCH rrOJIYQHTb 3
3000
CBeTa. Il03TOMY COJIHue He HBJIHeTCH XOpOIIIHM rrpHMepOM 3
IlpH «HH3KHX» TeMrrepaTypax QepHOrO TeJIa (Harrpl1Mep
HCTOQHHKa 6eJIoro CBeTa. )l.a:>Ke eCJIH 6bI y,U.aJIOCb HCKJIIOQHTb H3 crreKTpa
rrpOHCXO,U.HT B OCHOBHOM B I1K-'u'l1arra30H~ ,U.JII1H BOJIH. Ilo Mepe YBeJIHQeHHH
COJIHua 11K - H YeP-COCTaBJIHIOmHe, ero Bce paBHO HeJIb3H 6bIJIO 6bI Ha3BaTb
TeMilepaTypbI MaKCI1MYM 113JIYQeHI1H CMemaeTCH B CTOPOHY 60JIee KOPOTKI1X
OrrTHMaJIbHbIM H3-3a BbICOKOH: HHTeHCHBHOCTH H3JIYQeHHH Ha rpaHHuax pa3-
BOJIH, T. e. B CTOPOHY BH,U.HMoro ,U.l1arra30Ha crreKTpa.
,U.eJIa BH,U.HMbIH: CBeT -
I1K-H3JIYQeHHe H BH,U.I1MbIH: CBeT -
YeP-H3JIYQeHl1e.
Ha PI1C.
1931
18.2.
18.3
crreKTpa
rrOKa3aHO pacrrOJIO:>KeHHe Ha UBeTOBOH: ,U.l1arpaMMe MKO H3JIYQeHHH QepHOrO
TeJIa,
KOTOPbIH:
QaCTO
Ha3bIBaIOT
JIHHHeH: UBeTHOCTH a6COJIIOTHO QepHOrO TeJIa HJIH KPHBOH: IlJIaHKa. C po-
CneKTp H3JIYQeHHH a6COJIIOTHO QepHOrO TeJIaH3JIYQaTeJIH IIJIaHKa
B
r.
K) H3JIYQeHI1e
CTOM TeMrrepaTypbI QepHoto TeJIa rrOJIO:>KeHHe ero 113JIYQeHHH Ha ,U.HarpaMMe C,U.BHraeTCH 113 06JIaCTH KpaCHbIX BOJIH 6JIH:>Ke K UeHTPY ,U.HarpaMMbI. TeMrrepaTypa QepHOrO TeJIa, 113JIYQaIOmerO 6eJIbIH: CBeT, 06bIQHO JIe:>KHT B
KaQeCTBe He3aBHCHMoro CTaH,U.apTa, xapaKTepl13YIOmero 6eJIbIH: CBeT,
QaCTO HCrrOJIb3YIOT
cneKmp u3llytteHU51 a6COll1OmHO ttepHOeO mella,
orrpe-
,U.HaIIa30He
2500-10 000
K. Ha pHC.
18.3
TaK:>Ke rrOKa3aHO pacrrOJIO:>KeHHe
Ha UBeTOBOH: ,U.HarpaMMe HeCKOJIbKI1X cTaH,U.apTHblx HCTOQHHKOB H3JIyQe-
370
FA.
18.
3alwH U3AY'leHUR flAaHlCa U u,BemoBaR meMnepamypa
18.3. ll.BemoBaR meMnepamypa U lCoppeAupOBaHHaR meMnepamypa
10
371
HcroqHHKA (x, y) = (0,4476; 0,4074) (CBeT OT JIaMnLI HaKaJIHBaHHJI,
T= 2856 K) Hcro~B
(x,y) = (0,3484; 0,3516) (nplIMOH COJIHeqsb]H CBer,
T=4870 K) HcroqHHKC (x,y) = (0,3101; 0,3162) (ocBemeHHe B naCMYPIILIH lIeHL
T= 6770 K)
2
HcroqHHK D" (x, y) = (0,3128; 0,3292) (IIHeBHoH CBeT, T = 6500 K)
,1(JllfHa BOllHhl PHC.
18.2.
A.,
HcroqHHKE (x, y) = (0,3333; 0,3333)
3,0 MKM
(TO~ paBHOH 3HepI"HH)
CneKTpaJIbHble pacnpe.ll.eJIeHHH HHTeHCHBHOCTH H3JIyqeHHH a6COJIIOTHO
qepHOrO TeJIa no .lI.JIHHaM BOJIH,
H3MepeHHble npH pa3HblX TeMnepaTypax.
ITPH
nOBblIIIeHHH TeMnepaTypbl qepHOrO TeJIa MaKCHMYM HHTeHCHBHOCTH C.lI.BHraeTCH B CTOPOHY 60JIee KOPOTKHX .lI.JIHH BOJIH PHC.
HlUI, OIIpe,ll,eJIeHHbIX MKO:
A, B, C
H
D65 .
Ha pHC. 18.4 npe,ll,CTaBJIeHbl
18.3.
UBeToBaH .lI.HarpaMMa, Ha KOTOPOH nOKa3aHO nOJIOlKeHHe CTaH.lI.apTHblx
HCTOqHHKOB H3JIyqeHHH 6eJIoro CBeTa
A, B,
C H D65 H HX UBeTOBble TeMnepaTypbI.
Ha .lI.HarpaMMY TaKlKe HaHeceHa KpHBaH ITJIaHKa (CIE,
KpHBaH nJIaHKa H pa3JIHqHble 3HaqeHHH TeMIIepaTypbl a6COJIIOTHO qepHOrO
1978)
TeJIa Ha paBHoKoHTpacTHoH ,lI,HarpaMMe MKO 1976 r. KOOp,ll,HHaTbl I.J.BeTHOCTH
(x, y)
H
(u ' , v')
a6COJIIOTHO qepHOrO TeJIa -
H3JIyqaTeJIH nJIaHKa
IIpHBe,ll,eHbl B IIpHJIO)KeHHH 18.n 1. Ha 06eHX ,lI,HarpaMMax, 1931 r. H 1976 r., KpHBaH nJIaHKa HaqHHaeTCH B 06JIaCTH KpaCHoro I.J.BeTa, 3aTeM nepeceKaeT 06JIaCTH OpaH)KeBOrO H )KeJITOrO I.J.BeTOB, a 3aKaHqHBaeTCH B 06JIaCTH 6eJIoro I.J.BeTa. 3Ta IIOCJIe,lI,OBaTeJIbHOCTb I.J.BeTOB IIOXO)Ka Ha H3MeHeHHe I.J.BeTa peaJIbHOrO 06beKTa (HaIIpHMep KYCKa MeTaJIJIa), HarpeBaeMoro ,lI,O BblCOKHX TeMIIepaTYP, qTO YKa3bIBaeT
Ha 6JIH30CTb I.J.BeTHOCTH peaJIbHblX
06beKTOB H
a6COJIIOTHO
qepHOrO TeJIa (H3JIyqaTeJIH nJIaHKa).
18.3. II.BeToBCUI TeMnepaTypa H KOppeJIHpOBaHHCUI IJ.BeTOBCUI TeMnepaTypa C
IIepBoro B3rJIH,lI,a
I1BemoBaR meMnepamypa
Ma cTpaHHoH BeJIHqHHOH, IIOCKOJIbKY napaMeTpbl
MO)KeT IIOKa3aTbCH BeCb-
I1Bem
H
meMnepamypa
He HMelOT npHMoro OTHOIIIeHHH ,lI,pyr K ,lI,pyry. O,ll,HaKO, npOaHaJIH3HpOBaB IIOBe,ll,eHHe a6COJIIOTHO qepHOrO TeJIa, HeB03MO)KHO He YBH,lI,eTb B3aHMOCBH3b Me)K,lI,y 3THMH IIapaMeTpaMH.
ro TeJIa MeHHeTCH OT KpaCHoro ,lI,O rOJIy6oBaTO-6eJIoro (KpaCHbIH BblH -
Koop,lJ;HHlITa ~eTHOCTH U'
C POCTOM TeMIIeparypbl I.J.BeT CBeqeHHH qepHO-
)KeJITOBaTO-6eJIbIH -:- 6eJIblH -
OpaH)Ke-
rOJIy6oBaTO-6eJIbIH).ll.BemoBaR meM-
PHC.
18.4.
PaBHoKoHTpacTHaH UBeTOBaH .lI.HarpaMMa
MKO 1976 r. C MKO 1931
Ka, paCCqHTaHHaH H3 UBeToBoH .lI.HarpaMMbI
KPHBOH ITJIaHr.
372
18.3. Bu6Ituozpac/JU'leCKUU cnUCOK
Tit. 18. 3alwIi U3ItY'leIiUR flltalilW U /.fBemoBaR meMnepamypa
nepamypa (lIT)
HCTOqHHKa 6eJIoro CBeTa, H3Mep5leMa51 B KeJIbBHHaX, orrpe-
.n:eJI5IeTC5I TeMrrepaTYP0H: a6COJIIOTHO qepHOrO TeJIa, paCrrOJIQ)KeHHoro Ha
HbIX JIaMrr HaKaJIHBaHH5I JIe)KaT B .n:Harra30He raJIOreHHblX JIaMrr -
B .n:Harra30He
2800-3200
373
2000-2900 K, a KBapIIeBbIX 1997) . .ll.pyme HC-
K (Ohno,
IIBeTOBOH: .n:HarpaMMe TaM )Ke, r.n:e H paCCMaTpHBaeMbIH: HCTOqHHK H3JIyqe-
TOqHHKH H3JIyqeHH5I, TaKHe KaK MeTaJIJIOraJIOreHHble JIaMrrbI, Ha IIBeTOBOH:
HH5I.
.n:HarpaMMe 3aMeTHO y.n:aJIeHbI OT KPHBOH: TIJIaHKa. TIo3TOMY .n:JI5I HHX Ha.n:o
ECJIH HCTOqHHK 6eJIoro CBeTa He rrorra.n:aeT Ha KPHBYIO TIJIaHKa, .n:JI5I ero
orrpe.n:eJI5ITb KOppeJIHpOBaHHYIO IIBeToBYIO TeMrrepaTYPY. HarrpHMep, Koppe-
KoppeAupOBat-lI-taJl I1BemoBaJl meMnepamy-
JIHpOBaHHa51 IIBeTOBa51 TeMrrepaTypa .n:JI5I JIaMrrbl rOJIy6oBaTO-6eJIoro IIBeTa
xapaKTepHCTHKH HCrrOJIb3yeTC5I
pa
(KUT). ::ha BeJIHqHHa TaK)Ke H3Mep5leTC5I B KeJIbBHHaX H orrpe.n:eJI5IeTC5I
COCTaBJI5IeT
rv
8000 K. B
Ta6JI:
18.1
rrpHBe.n:eHbI 3HaqeHH5I KOppeJIHpO-
TeMrrepaTYP0H: a6COJIIOTHO qepHOrO TeJIa, IIBeT KOToporo MaKCHMaJIbHO rrpH-
BaHHOH: IIBeTOBOH: TeMrrepaTypbI HaH60JIee pacrrpocTpaHeHHblx HCTOqHHKOB
6JIH)KeH K IIBeTY HCTOqHHKa 6eJIoro CBeTa.
HCKyccTBeHHoro H eCTeCTBeHHoro CBeTa .
.ll.JI5I HaXO)K.n:eHH5I KOppeJIHpOBaHHOH: IIBeTOBOH: TeMrrepaTypbI HCTOqHHKa H3JIyqeHH5I Ha IIBeTOBOH: .n:HarpaMMe MKO HaTax
(u' , v'),
orrpe.n:eJI5IeTC5I CaMa51
1976
6AU3KaJl
r., rrocTpOeHHOH: B KOOp.n:H-
T a 6 JI Ii II a 18.1. KOppeJIlipOBaHHall IIBeTOBall TeMnepaTypa Hali60JIee pacnpocTpaHeHHblX IiCTOqHIiKOB IiCKyccTBeHHoro Ii eCTeCTBeHHoro CBeTa
K HCTOqHHKY TOqKa Ha KPHBOH:
TIJIaHKa (T. e. caMoe KopoTKoe reOMeTpHqeCKOe paCCT05lHHe). TeMrrepaTypa
KOppeJIlipOBaHHall IIBeTOBall TeMnepaTypa, K
I1CTOqHIiK CBeTa
qepHOrO TeJIa, pacrrOJIO)KeHHOrO B ::lTOH: TOqKe, H 6y.n:eT COOTBeTCTBOBaTb KOppeJIHpOBaHHOH: IIBeTOBOH: TeMrrepaType paccMaTpHBaeMoro HCTOqHHKa
1968).
(CIE, Robertson,
113-3a HepaBHOMepHOCTH IIBeTOBOH: .n:HarpaMMbI MKO
1931
r., rro HeH:
HeB03MO~HO orrpe.n:eJIHTb KOppeJIHpOBaHHYIO IIBeTOBYIO TeMrrepaTYPY, HC-
rrOJIb3Y5I rrpHBe.n:eHHbIH: BbIllIe aJIrOpHTM . .ll.JI5I HaXO)K.n:eHH5I KOppeJIHpOBaHHOH: IIBeTOBOH: TeMrrepaTypbI rro IIBeTOBOH: .n:HarpaMMe MKO
1931 r.
Ha Hee
Heo6xo.n:HMO HaHeCTH JIHHHH, COOTBeTCTBYIOIIJ.He rrOCT05lHHbIM 3HaqeHH5IM KOppeJIHpOBaHHOH: IIBeTOBOH: TeMrrepaTypbI, 'ITO H rrOKa3aHO Ha pHC.
18.5
(Duggal, 2005). 0,44 I---H---,I-+--++--I-I--I+--...J+---if--t-I
8
KpHBaH IlrrllHKa
0,42
ilJIaMll BOCKOBOH CBeqli/rrJIaMll cTaH.u.apTHOH CBeqli MKO
1500-2000/2000
JIaMna HaKaJIIiBaHlill 60 BT/IOO BT
2800/2850
r aJIOreHHall JIaMna
2800-3200
3000
4300
6500
oeJIoe nJIaMll yrJIepo.u.HoH .u.yrli
5000
KceHoHoBall .u.yra (HeqmJIbTpOBaHHall)
6000
0,38 ~--V----"H-+--+l--~""--ll--.
JIeTHIiH COJIHeqHbIH CBeT (.u.o 9.00 IiJIIi nOCJIe 15.00)
4900-5600
0,36 1---4---t-H~'f--J.+---;H----I4-
JIeTHIiH COJIHeqHbIH CBeT (c 9.00 .u.o 15.00)
5400-5700
ilpllMoe COJIHIIe
5700-6500
COJIHIIe CKB03b 06JIaKa
6500-7200
51cHoe roJIy60e He60
8000-27000
0,34 r--+~R;f--I+-+-++-If-f--++-+---l 0,32 h,oL+I-J.-lf--++I--Ir-.f!----.4----if------l 0,30 L...J.--L.UL...I-L...JL....uLL.LJ..-...L....IL......J.--I.....L..L....J 0,3 0,32 0,34 0,36 0,38 0,4 0,42 0,44 0,46 KOOpAHHaTa ~eTHOCTH
x (-)
PIiC. 18.5. UBeToBall .u.liarpaMMa MKO 1931 r., Ha KOTOPYIO HaHeceHbI JIIiHIiIi noCTOllHHblX 3HaqeHliH KOppeJIlipOBaHHoH IIBeToBoH TeMnepaTypbI. 3TIi JIIiHIiIi onpe.u.eJIeHbI 1i3 IIBeToBoH .u.liarpaMMbI MKO 1976 r. (Duggal, 2005) Koop.n:HHaTbI IIBeTHOCTH JIaMrr HaKaJIHBaHH5I Ha IIBeTOBOH: .n:HarpaMMe 6JIH3KH K Koop.n:HHaTaM a6COJIIOTHO qepHOrO TeJIa, XOT5I rrOJIHOrO COBrra.n:eHH5I HeT (Ohno,
2001).
TI03TOMY .n:JI5I TaKHX HCTOqHHKOB IIBeTOBa51 TeMrre-
paTypa orrpe.n:eJI5IeTc5i .n:OBOJIbHO TOqHO. UBeToBble TeMrrepaTYPbI cTaH.n:apT-
BH6JIHOrpa
CIE publication No. 17.4 International Lighting Vocabulary see http://www.cie . co.at (CIE, Vienna, Austria, 1987). Duggal A. R. "Organic electroluminescent devices for solid-state lighting" in Organic Electroluminescence ed. by Z. H. Kafafi (Taylor & Francis Group, Boca Raton, Florida, 2005). Jackson J. D. Classical Electrodynamics (John Wiley and Sons, New York, 1975).
374
I
,il
ii
rA. 18. 3aKon U3AY'lenUfl IlAanKa U u,BemOBafl meMnepamypa
Ohno Y. "Photometric standards" Chapter 3 in OSA/AlP Handbook of Applied Photome~ry, 55 (Optical Society of America, Washington DC, 1997). Ohno Y. "Photometry and radiometry" Chapter 14 in OSA Handbook of Optics, Volume III Review for Vision Optics, Part 2, Vision Optics (McGraw-HilI, New York, 2001). Planck M. "On the theory of the law on energy distribution in the normal spectrum (translated from German)" Verhandlungen der Deutschen Physikalischen Gesellschaft 2, 237 (1900). Robertson R. "Computation of correlated color temperature and distribution temperature" ! . .opt. Soc. Am. 58, 1528 (1968).
IlpuAo:JICenue 18.Ill
375
DpHJIOJKeHHe lS.D1 UBeToBafi TeMIIepaTypa H KOOp.D:HHaTbI UBeTHOCTH a6COJIIOTHO qepHOrO TeJIa Ha UBeTOBbIX .D:HarpaMMax
T,K 1000 1200 1400 1600 1800 2000 2200 2400 2600 2800 3000 3200 3400 3600 3800 4000 4200 4400 4600 4800 5000 5200 5400 5600 5800 6000 6200 6400 6500 6600 6800 7000 7200 7400 7600 7800 8000 8500 9000 9500 10000
x 0,649 0,623 0,597 0,572 0,549 0,527 0,506 0,487 0,470 0,454 0,439 0,425 0,413 0,402 0,392 0,383 0,374 0,367 0,360 0,353 0,347 0,342 0,337 0,332 0,328 0,324 0,321 0,317 0,315 0,314 0,311 0,308 0,306 0,303 0,301 0,299 0,297 0,292 0,289 0,285 0,282
MKO 1931 r. l
y
u
0,347 0,370 0,389 0,402 0,412 0,417 0,420 0,419 0,417 0,414 0,409 0,404 0,399 0,393 0,388 0,382 0,376 0,371 0,366 0,361 0,356 0,351 0,347 0,343 0,339 0,335 0,332 0,328 0,327 0,325 0,322 0,319 0,317 0,314 0,312 0,309 0,307 0,301 0,297 0,293 0,290
0,443 0,402 0,369 0,342 0,321 0,303 0,288 0,276 0,266 0,257 0,250 0,243 0,237 0,233 0,228 0,225 0,221 0,218 0,216 0,213 0,211 0,209 0,208 0,206 0,205 0,203 0,202 0,201 0,201 0,200 0,199 0,198 0,198 0,197 0,196 0,196 0,195 0,194 0,193 0,192 0,191
H
1976 VI
0,533 0,538 0,541 0,542 0,542 0,540 0,538 0,535 0,531 0,528 0,524 0,520 0,516 0,512 0,508 0,504 0,500 0,497 0,494 0,490 0,487 0,484 0,481 0,479 0,476 0,473 0,471 0,469 0,468 0,466 0,464 0,462 0,460 0,459 0,457 0,455 0,454 0,450 0,447 0,444 0,441
r.
19.1. Aaaumu8Hoe CMeweHue Ur8em08
377
II
(X3, Y3).
III
Tor.LI.a pe3YJIbTHPYIOIII.HH I1.BeT MO)KHO orrHcaTb cJIe.LI.YIOIII.HMH TpeMH
rrapaMeTpaMH I1.BeTHOCTH:
I
x(A),P2 (A)
X(A)'P, (A)
r JIasa
19
f
X=
f
dA+
A
CMEmEHHE UBETOB H UBETOllEPE,L(AqA
f
dA+
z(A)·P, (A)
coe8UHeHue
HJIH
a88umUBHoe CMe-
H3JIY'IeHHH OT .LI.ByX HJIH 60JIee HCTO'IHHKOB CBeTa.
dA+
HarrpHMep,
dA+
A
B CBeTO.LI.H0.LI.HbIX 3KpaHax HCrrOJIb3YlOT TpH THrra CBeTO.LI.H0.LI.OB: KpaCHoro,
f
30H I1.BeTOB KaK KOM6HHaI1.HIO 3THX Tpex H3JIY'IeHHH. ,lJ.pyrHM rrpHMepOM CMeIIIeHHH I1.BeTOB HBJIHIOTCH HCTO'IHHKH 6eJIoro CBeTa, rrOCTpoeHHble Ha OCHOBe .LI.ByX- HJIH .TpeXI1.BeTHbIX HCTO'IHHKOB H3JIY'IeHHH. Ha pHC.
dA+
PI, P2, P3 -
r.LI.e
+Y(A2)P2 +Y(A3)P3; (19.2)
f
dA~
A
~
BeK, CMOTPHIII.HH Ha 3KpaH, cpaKTH'IeCKH BocrrpHHHMaeT IIIHpOKHH .LI.Harra-
dA~
z(A)·Pa(A)
A
3eJIeHOrO H CHHero CBe'IeHHH, H3JIY'IeHHe KOTOPbIX CMeIIIHBaeTCH, H 'IeJIO-
(19.1)
A
z( A)' P2 (A)
f
Z=
+ x (A2) P2 + x (A3) P3;
f
~Y(AdPI
AMHTHBHoe CMemeHHe U;BeTOB
dA~'
y( A)· Pa(A)
A
A
Ha rrpaKTHKe 'IaCTO rrpHMemleTCH
x (Ad PI
y(A),P2 (A)
f
f A
~
y=
UleHue
dA+
A
y(A)'P, (A)
19.1.
x(A)·Pa(A)
Z (AI) PI
+ Z(A2) P2 + Z (A3) P3·
(19.3)
OrrTH'IeCKHe MOIII.HOCTH Tpex H3JIY'IaTeJIeH. HCrrOJIb3YH
COOTHOIIIeHHH
19.1
rrOKa3aH rrpHHI1.Hrr a.LI..LI.HTHBHOro CMeIIIeHHH I1.BeToB H rrpHBe.LI.eH rrpHMep a.LI..LI.HTHBHOro CMeIIIeHHH H3JIY'IeHHH CBeTO.LI.HO.LI.OB.
H3 ypaBHeHHH
LI =x(AdPI +Y(AdPI +z(AdPI;
(19.4)
L2 =X(A2)P2+Y(A2)P2+Z(A2)P2; L3 = x (A3) P3 + Y (A3) P3 + Z (A3) P3,
(19.5) (19.6)
(19.1)-(19.3)
HaH.LI.eM KOOp.LI.HHaTbI I1.BeTHOCTH KOM6HHHPO-
BaHHoro I1.BeTa:
(19.7) (19.8) H3 3THX Bblpa)KeHHH BH.LI.HO, 'ITO KOOp.LI.HHaTbI I1.BeTHOCTH MHorOKOMrrOHeHTHoro CBeTa HBJIHIOTCH
cmu
J/.UHeUHblMU KOM6uHal1URMU Koop8uHam l1BemHO-
TIpHHI1.Hrr CMeIIIeHHH I1.BeTOB rrOKa3aH Ha pHC. PMC.
19.1.
TIPMHUMII a,n,nMTMBHoro CMeIIIeHMH Tpex OCHOBHbIX UBeTOB
~MBHoe CMeIIIeHMe M3JIYQeHMlI CBeTo,nMo,nOB
(a).
I1.BeTa C Koop.LI.HHaTaMH I1.BeTHOCTH A,n,nM-
(6)
Orrpe.LI.eJIHM KOOP.LI.HHaTbI I1.BeTHOCTH HCTO'IHHKOB, H3JIY'IalOIII.Hx CBeT
L3
=
Li . CMeIIIHBalOTcH .LI.Ba
Ka)K.LI.OrO HCTO'IHHKa C BeCOBbIMH K03cpcpHI1.HeHTaMH
P3 = O.
Pe3YJIbTHPYIOIII.HH
19.2.
(XI, yd, (X2, Y2).
,lJ.JIH .LI.aHHOrO CJIY'IaH
I1.BeT pacrrOJIO)KeH
Ha rrpHMoH
JIHHHH,
COe.LI.HHHIOIII.eH KOOp.LI.HHaTbI I1.BeTHOCTH .LI.ByX HCTO'IHHKOB CBeTa. CJIe.LI.OBaTeJIbHO,
J/.1060u
I1.BeT (BKJIIO'IaH 6eJIbIH), pacrrOJIO)KeHHbIH Me)K.LI.Y .LI.ByMH
B Tpex .LI.HCKpeTHblx .LI.Harra30Hax .LI.JIHH BOJIH. C'IHTaeM, 'ITO IIIHpHHa crreK-
TO'IKaMH Ha I1.BeTOBOH .LI.HarpaMMe, MO)KeT 6bITb rrOJIY'IeH CMeIIIeHHeM 3THX
Tpa Ka)K.LI.OrO HCTO'IHHKa HaMHoro Y)Ke JII060H H3 Tpex CPYHKI1.HH COrJIaCOBa-
.LI.ByX I1.BeTOB.
HHH I1.BeTOB. PaCCMOTpHM TpH HCTO'IHHKaCO crreKTpaJIbHbIMH rrJIOTHOCTHMH MOIII.HOCTH H3JIY'IeHHH Ha .LI.JIHHaX BOJIH
H (A), P2(A), P3(A)
AI, A2, A3.
C MaKCHMYMaMH HHTeHCHBHOCTH
Ha pHC.
19.2
TaK)Ke rrOKa3aHO CMeIIIeHHe
mpex
I1.BeTOB, pacrrOJIO)KeH-
HbIX B KpacHoH, 3eJIeHOH H CHHeH 06JIaCTHX I1.BeToBOH .LI.HarpaMMbl. TPH
TIpe.LI.rrOJIO)KHM, 'ITO KOOp.LI.HHaTbI I1.BeTHOCTH
BbI6paHHble TO'IKH Ha .LI.HarpaMMe COOTBeTCTBYIOT H3JIY'IeHHIO CBeTO.LI.HO.LI.OB
(XI, yd, (X2, Y2),
KpaCHoro, 3eJIeHOrO H CHHero CBe'IeHHH. 06JIaCTb BHyTpH TpeyrOJIbHHKa
3THX Tpex HCTO'IHHKOB H3JIY'IeHHH orrpe.LI.eJIHIOTCH KaK
378
379
19.2. L(Bemonepeaa'la
TA. 19. CMeUleHue u,BemoB u u,Bemonepeaa'la
3HaHHe Toro, KaK rrpoHcxo,n:HT CMeIIIeHHe U:BeToB, rrOMoraeT rrOHHTb paCrrOJIOlKeHHe pa3JIHqHbIX CBeTo,n:Ho,n:OB Ha U:BeToBoH ,n:HarpaMMe. rpaHHu:a ,n:HarpaMMbI B 06JIaCTH KpacHblx U:BeTOB HBJIHeTCH rrpaKTHqeCKH npRMou JlUflUeU, rr03ToMY CBeTo,n:Ho,n:bI KpacHoro CBeqeHHH, HecMoTpH Ha TerrJIOBOe YIIIHpeHHe crreKTpa, pacrrOJIaraIOTCH Ha 3TOH rpaHHu:e. nOCKOJIbKY B 06JIaCTH 3eJIeHbIX U:BeTOB ,n:HarpaMMa 06JIa,n:aeT CHJIbHO BhIpalKeHHoH KpHBH3HOH, cBeTo,n:Ho,n:bI 3eJIeHOrO CBeqeHHH H3-3a crreKTpaJIbHOrO pacIIIHpeHHH CMeIII.aIOTCH OT rpaHHU:hI K u:eHTPY ,n:HarpaMMbI.
19.2. II.BeTonepe,n:aqa .lI.pyroH BalKHOH xapaKTepHcTHKOH HCTOqHHKOB 6eJIoro CBeTa HBJIHeTCH HX crroc06HOCTb rrepe,n:aBaTb peaJIbHble U:BeTa cpH3HqeCKHX 06beKTOB,
HarrpHMep CPPYKTOB, paCTeHHH HJIH HrpYIIIeK,
OCBeIII.aeMbIX 3THMH
HCTOqHHKaMH. Crroc06HOCTb HCTOqHHKa H3JIyqeHHH rrepe,n:aBaTb Bce U:BeTa OCBeIII.aeMOrO 06beKTa orrpe,n:eJIHeTCH ero (Wyszecki, Stiles,
1982;
MacAdam,
UflaeKCOM ~8emonepeaattu (CRI)
1993;
Berger-Schurrll,
1994;
CIE,
1995). 0,2
0,1
0,3
0,4
0,5
0,6
0,7
Ha
0,8
pHC.
19.3
rrpHBe,n:eH
rrpHMep
cpH3HqeCKOrO
06beKTa
(KapTHHbI
xy,n:OlKHHKa-HMrrpeCCHOHHCTa O. PeHyapa), OCBeIII.eHHOrO ,n:ByMH pa3HbIMH
KOOp,lIHHaTa I:\BeTHOCTII x
HCTOqHHKaMH CBeTa, 06JIa,n:aIOIII.HMH BbICOKHM H HH3KHM HH,n:eKCaMH. U:BePHC.
19.2.
ITPHHUHIl CMeIIIeHHH UBeTOB. PaccMaTpHBalOTcH .lLBa HCTOqHHKa CBeTa
C KOOp.lLHHaTaMH UBeTHOCTH B TOqKe C KOOp.lLHHaTaMH
(Xl, Yl), (X2, Y2).
(X, y).
Pe3YJIbTHpYlOmHH UBeT paCIlOJIO)!{eH
Ha UBeTOBOH .lLHarpaMMe TaK)!{e IlOKa3aHa Tpe-
yrOJIbHaH 06JIaCTb, Ha3bIBaeMaH UBeTOBOH raMMoH . .n106oH UBeT H3 ,nOH 06JIaCTH MO)!{eT 6bITb IlOJIyqeH IlpH aMHTHBHOM CMeIIIeHHH H3JIyqeHHH CBeTO.lLHO.lLOB KpacHOro, 3eJIeHOrO H rOJIy6oro CBeqeHHH. ITo CTaH.lLapTY
sRGB
KpaCHblH, 3eJIeHbIH H
CHHHH UBeTa paCIlOJIO)!{eHbI COOTBeTCTBeHHO B TOqKaX C KOop.lLHHaraMH UBeTHOCTH: (X r
= 0,64, Yr = 0,33),
(Xg = 0,30,Yg = 0,60), (Xb = 0,15, Yb sRGB IlOXO)!{ Ha CTaH.lLapT NTSC
= 0,06).
CTaH.lLapT
Torrepe,n:aqH. npH HCTOqHHKe CBeTa C BbICOKHM HH,n:eKCOM U:BeTorrepe,n:aqH U:BeTa Ha KapTHHe KalKYTCH 60JIee HaCbIIII.eHHbIMH H lKHBbIMH rro cpaBHeHHIO co CJIyqaeM HCTOqHHKa CBeTa C HH3KHM HH,n:eKCOM U:BeTorrepe,n:aqH. XapaKTepHCTHKH U:BeTorrepe,n:aqH HCTOqHHKOB oc06eHHO CYIII.eCTBeHHbI, ecJIH OHH HCrrOJIb3YIOTCH B u:eJIHX OCBeIII.eHHH, T. e. Kor,n:a BalKHO rrpaBHJIbHO oT06pa3HTb U:BeTa 06beKTOB, HarrpHMep B MY3eHX, ,n:OMax H ocpHcax. 3TOT rrapaMeTp CTaHOBHTCH MeHee CYIII.eCTBeHHbIM B CJIyqaHX rrpHMeHeHHH OCBeTHTeJIbHhIX rrpH60pOB Ha YJIHu:ax H rrapKOBKax. npH HCrrOJIb30BaHHH HCTOqHHKOB B KaqeCTBe HH,n:HKaTopHbIX JIaMrr H ,n:pyrHx YKa3aTeJIbHbIX YCTPOHCTB rrapaMeTp COBceM TepHeT CBoe 3HaqeHHe.
H3 llITPHXOBbIX JIHHHH, coe,n:HHHIOmHX 3TH TpH TOqKH MelK,n:y C060H, Ha3bIBaeTCH ~8em080ii MorYT 6bITb
caMMoii, rrOCKOJIbKY Bce U:BeTa BHYTPH 3TOH 06JIaCTH
rrOJIyqeHbI
CMeIIIeHHeM Tpex
OCHOBHbIX U:BeTOB:
KpaCHoro,
3eJIeHOrO H CHHerO. Crroc06HOCTb BocrrpOH3Be,n:eHHH KaK MOlKHO 60JIbIIIerO qHCJIa U:BeTOB HBJIHeTCH O,n:HOH H3 BalKHbIX xapaKTepHCTHK MOHHTOpOB. lJeM
Ou:eHKa crroc06HOCTH
mecmupyeMoco UCmOttfluKa U3JlytteflUR K rrepeamaJlOflflbtM UCmOttflUKOM
,n:aqe U:BeTOB rrpOH3Bo,n:HTCH ero cpaBHeHHeM C
C8ema. no peKOMeH,n:aU:HH MKO (CIE, 1995) ,n:JIH rrpOBe,n:eHHH paCqeTOB 3TaJIOHHbIH HCTOqHHK BbI6HpaeTcH HCXO,n:H H3 CJIe,n:YIOIII.HX co06palKeHHH. ECJIH Koop,n:HHaTbI U:BeTHOCTH TeCTOBoro HCTOqHHKa JIelKaT Ha KPHBOH nJIaHKa, TO 3TaJIOHHbIH HCTOqHHK ,n:OJIlKeH 6bITb a6COJIIOTHO qepHbIM TeJIOM,
60JIbIIIe 06JIaCTb U:BeTOBOH raMMbI, TeM BblIIIe KaqeCTBO 3KpaHa. ll.BeToBaH raMMa rrpe,n:CTaBJIHeT C060H rrOJIHYIO cOBoKyrrHocTb U:BeTOB,
HMeIOIII.HM Ty lKe U:BeTOBYIO TeMrrepaTYPY, qTO H TecTHpyeMbIH H3JIyqaTeJIb.
KOTOPYIO MOlKHO rrOJIyqHTb H3 Ha60pa HCXO,n:HbIX U:BeTOB, Ha U:BeTOBOH
ECJIH Koop,n:HHaTbI U:BeTHocTH TeCTOBoro HCTOqHHKa He rrpHHa,n:JIelKaT
mpex
KPHBOH nJIaHKa, TO 3TaJIOHHbIH HCTOqHHK ,n:OJIlKeH 6bITb a6COJIIOTHO qep-
,n:HarpaMMe OHa oT06palKaeTCH B BH,n:e MHoroyrOJIbHHKa. B HCXO,n:HbIX OCHOBHbIX U:BeTOB raMMa HMeeT BH,n: 3aHO Ha pHC.
19.2.
CJIyqae
mpeycOJlbflUlW, qTO H rrOKa-
Bce U:BeTa, rrOJIyqaeMble rrpH a,n:,n:HTHBHOM CMeIIIHBaHHH
OCHOBHbIX U:BeTOB raMMbI, COOTBeTCTBYIOIII.HX BepIIIHHaM MHoroyrOJIbHHKa, Bcer,n:a pacrrOJIaraIOTCH BHyTpH Hee.
HbIM TeJIOM, HMeIOIII.HM Ty lKe KOppeJIHpOBaHHYIO U:BeTOBYIO TeMrrepaTYPY, qTO H TecTHpyeMbIH H3JIyqaTeJIb. B
KaqeCTBe 3TaJIOHHOrO MOlKHO HCrrOJIb30BaTb O,n:HH H3 CTaH,n:apTHbIX
HCTOqHHKOB MKO (HarrpHMep
D65).
19.2. IJ,Bemonepe8a'la
Fit. 19. CMeweHue I1BemoB U I1Bemonepe8a'la
380
IIepBOHallaJIbHO IIpe,n:JIO)KeHHOrO AJIb6epTOM
381
r. MaHCeJIJIOM, IIpocpeccopoM,
IIpeIIo,n:aBaBllleM B POllecTepcKoM TeXHOJIOrHlIeCKoM I1HcTHTYTe (Rochester,
NY)
B KOHu.e 1800-x -
HallaJIe 1900-x rr. (Munsell, 1905; 2005; Billmeyer,
1987; Long, Lyke, 2001). MaHCeJIJI BBeJI CHCTeMY 0603HalleHHH u.BeTOB,
/,f8em080u cucmeMbl MaHCeJlJla,
IIOJIYllHBlllYIO Ha3BaHHe
II03BOJIHIOII.I.YIO
H,n:eHTHcpHu.HpoBaTb OlleHb lllHPOKHii: ,n:HaIIa30H u.BeTOB. MeTo,n:bI paclIeTa HH,n:eKca u.BeToIIepe,n:allH (CRI) IIo,n:po6HO o6cy)K,n:aIOTCH B pa60Tax (Wyszecki, Stiles, 1982, 2000; CIE, 1995). MKO IIpe,n:JIO)KHJIa CJIe,n:yIOII.I.YIO cpOpMyJIy ,n:JIH BbIlIHCJIeHHH IIOJIHOrO (cYMMapHoro) 3HalleHHH 3Toro HH,n:eKca:
1 8 19.3. KapTHHa tPpaHU;Y3cKoro xy.n:O)!{HHKa-HMrrpeccHoHHcTa OrlOcTa PeHyapa (1841-1919) «UBeTbI B Ba3e», OCBemaeMaH HCTO'lHHKOM CBeTa C BbICOKHM (a) H HH3KHM (6) HH.n:eKCOM U;BeTorrepe.n:a'lH
C RIgeneral
PHC.
I1.n:eaJIbHblii: cJIYllaii: -
TecTHpyeMblii: H 3TaJIOHHblii: HCTOllHHKH CBeTa
=
"8
L C Rh
(19.9)
i=I r,n:e CRl i - 'laCmHble UHOeK.Cbl /,f8emonepeoa'lU ,n:JIH BOCbMH 3TaJIOHHbIX IIOBepxHocTeii:, KOTopble OIIpe,n:eJIHIOTCH IIO cpopMyJIe
CRli =
HMeIOT o,n:HHaKOBble Koop,n:HHaTbi u.BeTHOCTH H paBHble CBeTOBbleIIOTOKH.
100 -
4,66.Ei,
(19.10)
YCJIOBHJIHCb ClIHTaTb, liTO 3TaJIOHHblii: HCTOllHHK CBeTa 06JIa,n:aeT H,n:eaJIbHbIMH IIapaMeTpaMH u.BeToIIepe,n:a'lH, T. e. ero HH,n:eKc u.BeToIIepe,n:allH CRI
=
r,n:e
6.Ei -
pa3HOCTb u.BeTOB 3TaJIOHHoii: IIOBepXHOCTH IIpH ee IIOCJIe,n:OBa-
100. IlpH 3TOM HCXO,n:HJIH H3 Toro, liTO eCTeCTBeHHblii: ,n:HeBHoii: CBeT
TeJIbHOM OCBelI.l.eHHH 3TaJIOHHbIM H TeCTOBbIM HCTOllHHKaMH H3JIYlleHHH.
6JIH30K IIO IIapaMeTpaM K H3JIYlleHHIO a6COJIIOTHO lIepHOrO TeJIa H II03TOMY
ECJIH 3Ta pa3HOCTb paBHa HyJIIO, HH,n:eKC u.BeTOIIepe,n:allH u.BeTa 06beKTa pa-
6.Ei,
IIO IIpaBy MO)KeT 6bITb OTHeceH K CTaH,n:apTHbIM 3TaJIOHHbIM HCTO'lHHKaM
BeH 100. Pa3HOCTb u.BeTOB
CBeTa. I1H,n:eKCbI u.BeTOIIepe,n:allH peaJIbHbIX H3JIYllaTeJIeii:, OTJIHlIHbIX OT 3Ta-
HrpaeT KJIIOlIeBYIO pOJIb B BbIlIHCJIeHHH HH,n:eKca u.BeTOIIepe,n:allH, II03TOMY
JIOHHbIX HCTOllHHKOB CBeTa, Bcer,n:a HH)Ke 100. OTMeTHM, liTO IIOJIYllaeMble
B IIOCJIe,n:YIOII.I.HX ,n:ByX pa3,n:eJIaX 6y,n:YT IIo,n:po6HO o6CY)K,n:aTbCH CIIoco6bI
lIaCTO Ha3bIBaeMaH u.BeTOBbIM KOHTpaCTOM,
3HalleHHH HH,n:eKCOB u.BeTOIIepe,n:allH CHJIbHO 3aBHCHT OT BbI6paHHoro 3Ta-
ee OIIpe,n:eJIeHHH IIpHMeHHTeJIbHO K TecTHpyeMbIM HCTOllHHKaM H3JIYlleHHH,
JIOHHOrO HCTOllHHKa H3JIYlleHHH. Ilo3TOMY IIpH cpaBHeHHH HH,n:eKca u.BeTO-
JIe)KaII.l.HM Ha KPHBOii: IlJIaHKa H BHe ee.
IIepe,n:allH pa3HbIX HCTOllHHKOB CBeTa Ha,n:o OlleHb BHHMaTeJIbHO IIO,n:XO,n:HTb IloCKOJIbKY cIIeKTpbI H3JIYlleHHH JIaMII HaKaJIHBaHHH H a6COJIIOTHO lIepHoro
TeJIa
6JIH3KH,
TaKHe
JIaMIIbI
IlpH BbI60pe K03cpcpHu.HeHTa 4,6 B cpopMyJIe (19.10) HCXO,n:HJIH H3 Toro, lITo6bI IIpH HCIIOJIb30BaHHH B KalleCTBe TeCTOBoro HCTOllHHKa cTaH,n:apTHoii:
K BbI60py 3TaJIOHHOrO H3JIYllaTeJIH. 06JIa,n:aIOT MaKCHMaJIbHO
B03MO)KHbI-
cpJIyopeCu.eHTHoii: JIaMIIbI TeIIJIOrO 6eJIoro CBeTa, a B KalleCTBe 3TaJIOHHOrO HCTOllHHKa -
a6COJIIOTHO lIepHOrO TeJIa CYMMapHblii: HH,n:eKC u.BeTOIIepe,n:allH
MH HH,n:eKcaMH u.BeToIIepe,n:allH. Ilo3ToMY C TOllKH 3peHHH u.BeToIIepe,n:allH
,n:OJI)KeH 6bITb IIPH6JIH3HTeJIbHO paBeH 60. COBpeMeHHble CPJIyopeCu.eHTHble
JIaMIIbI HaKaJIHBaHHH HBJIHIOTCH JIylllllHMH cpe,n:H Bcex HCTOllHHKOB HC-
JIaMIIbI 06JIa,n:aIOT 60JIee BbICOKHMH 3HalleHHHMH CRI (60-85)
KyccTBeHHoro OCBelI.l.eHHH.
Scholand, 2001).
B
3TOM H 3aKJIIOlIaeTCH IIpHlIHHa Toro, liTO
KBapu.eBble raJIOreHHble JIaMIIbI HaKaJIHBaHHH lllHPOKO HCIIOJIb3YIOTCH TaM, r,n:e Heo6xo,n:HMa OTJIHlIHaH IIepe,n:alla u.BeTa raJIepeH H Mara3HHbI o,n:e)K,n:bI.
K
B MY3eHX, xy,n:O)KeCTBeHHble
He,n:OCTaTKaM KBapu.eBbIX raJIOreHHbIX
JIaMII OTHOCHTCH HX BbICOKoe 3HeprOIIOTpe6JIeHHe.
.
IlpH 3KCIIepHMeHTaJIbHOM OIIpe,n:eJIeHHH HH,n:eKca u.BeTOIIepe,n:allH TecTHpyeMoro
HCTOllHHKa .IIOMHMO TeCTOBoro
HCIIOJIb3YIOT
amaJ/.OHHble ompaJlcalO/4ue n08epXI-/.Ocmu.
H
3TaJIOHHOrO
H3JIYllaTeJIeii:
TaKOBbIMH MoryT
(Kendall,
9TaJIOHHble OTpa)KaIOII.I.He IIoBepxHocTH, 0 KOTOPbIX YIIoMHHaJIOCb BbIllle, OIIpe,n:eJIHIOTCH lIepe3 HX cIIeKTpaJIbHYIO OTpa)KaTeJIbHYIO CIIoco6HOCTb. Ha pHC. 19.4 IIOKa3aHbI cIIeKTpbI OTpa)KeHHH BOCbMH Me)K,n:YHapo,n:HbIX 3TaJIOHOB u.BeTa, IIepellHCJIeHHbIX B IIpHJIO)KeHHH 19.Ill. CYMMapHblii: HH,n:eKC u.BeToIIepe,n:allH BbIlIHCJIHeTCH Ha OCHOBe H3MepeHHii: IIpH HCIIOJIb30BaHHH Bcex BOCbMH 3TaJIOHHbIX IIOBepxHocTeii:
(i
=
1 -
8).
I1Hor,n:a ,n:JIH 60JIee ,n:eTaJIbHOrO H3YlleHHH CIIoco6HOCTH H3JIYllaTeJIeii:
6bITb peaJIbHble 06beKTbI, HaIIpHMep CPPYKTbI, u.BeTbI, ,n:epeBO, Me6eJIb H
BOCIIPOH3BO,n:HTb u.BeTa IIOMHMO BOCbMH 3TaJIOHHbIX 06pa3u.oB (c HOMe-
o,n:e)K,n:a. O,n:HaKO C u.eJIbIO 06eCIIelleHHH Me)K,n:YHapo,n:Hoii: CTaH,n:apTH3au.HH
paMH
IIpH OIIpe,n:eJIeHHH K03cpcpHu.HeHTOB u.BeTOIIepe,n:allH peaJIbHbIX H3JIYllaTeJIeii:
II.I.HX IIoBepxHocTeii: (c HOMepaMH 9-14). 9TH ,n:OIIOJIHHTeJIbHble IIoBepx-
IIpHMeHHeTCH cIIeu.HaJIbHblii: Ha60p H3 14 u.BeTHbIX IIoBepxHocTeii:. 9TOT
HOCTH xapaKTepH3YIOTCH CJIe,n:YIOII.I.HMH u.BeTaMH: 9 -
Ha60p H3 14 u.BeTOB 6bIJI BbI6paH H3 ropa3,n:o 60JIblllerO Ha60pa u.BeTOB,
Hblii:,
1-8)
10 -
IIpHMeHHIOT llleCTb ,n:OIIOJIHHTeJIbHbIX 3TaJIOHHbIX
HHTeHcHBHblii:
)KeJITbIH,
11 -
OTpa)KaIO-
HHTeHcHBHblii: Kpac-
HHTeHCHBHbIH
3eJIeHbIH,
12-
I
0,6 "i"
!O~
" <>:: 0,4
!~ ~~ ,"""- ~ rfc.
N.l
(cBeTJILIii CepOBIITO KpacHLIii I\BeT)
0, 1
I
+-
0,0 ~O,51-
~ ~ 0,4
lISeJITOBaTO~I(cpeJ1HHii N.4 3eJ1ellbIH I\BeT)
1 ~ 0,3 ~ ~ 0,2
§l I:-
00, I,....,
1
:\
\
L/
3eJ1ellHIillf I\BeT)
1\
V
0,2
§lS-
V
~
f....... (CBeTJILIii ~JI}'60BaTO3eJ1ellblH I\BeT)
V
" --
6 5
N.7
,
(CBeTJIO-q,HOJIeTOBblH I\BeT)
4
\
I
/'
/:
0 0, 400
):(mtHa BOJlHbI
PIiC.
19.4.
700
SOO
A., HM
400
500
N.9 (HaChlII\eHHLIii KpacHLIii)
0,4 0,3
500
700
600
I I I II
0,4
I
§l 0,0
~
1\
I \ f\ I ~ 0,1 ~
\- ......../
400
.t
600
):(mtHa BOJIHhl
I
I
700
SOO
PIiC.
500
19.5.
19.5 rrOKa3aHbI
crreKTpbI
3eJ1eHLIii)
600
700
/'
I
\
J
.J
1((TeJIecHLIii)1 N.13 I I
{
\
N.14
(I\BeT JIHCTBbI)
/
Ir'
/ '"
1""'-
,/
I SOO
400
A., HM
500
600
700
800
-400
A., HM
):(mtHa BOJIHhl
/"... 500
600
AmtHa BOJIHhl
700
SOO
A., HM
OTpaJKaTeJIbHaH cIIoc06HOCTb lIIeCTIi .n:OIIOJIHIiTeJIbHblX 3TaJIOHHbIX OTpaJKalOIUIiX IIoBepxHocTefi (MKO 1995)
He COBceM COOTBeTcTByeT rrOHHTHIO «Il.BeTHOCTb». DOJIee rrOJIHOe orrpe,ll.eJIeHHe Il.BeTa MKO BKJIlOqaeT B ce6H TaKHe xapaKTepHCTHKH, KaK TOHaJIbHOCTb,
HaCblmeHHOCTb
orrpe.n:eJIHIOTCH Ha pHC.
~(HachlII\eHHLIii N.ll
O,ll.HaKO CJIe,ll.yeT OTMeTHTb, qTO TepMHH «Il.BeT», HCrrOJIb3yeMbIH MKO,
A., HM
TeJIeCHblH Il.BeT, 14 -
/
11
,lI.nHHa BOJIHLI
OTpaJKaTeJIbHaH CIIoc06HOCTb BOCbMIi 3TaJIOHHblX UBeTOBblX IIOBepXHOcTefi (MKO 1995)
t..... f-'
./
HI
SOO
I-
"\
N.12 ~ 0,7 (q,HOJIeTOBO-cHHHii) II
A., HM
-
I
Ii 0,6
AmtHa BOJIHbI
-"""
I
,0,2 §l 0,1 f..... I-0,0 8 0,8
~ ....
I
N.IO
(HaChlII\ ~l lKeJlThlii}
L
~ 0,5
400
~(
"
~
V
'-.V
!O
"S:
(
nypnypllblH I\BeT)
-
r:
~ 0,5
\.
1---1
600
V
~ 0,3 .§. 0,2
.--- f-
P 500
0,9
~ 0,8 ~ 0,7
'"
1'./ 1---1 (CBeTJILIiiN.S Kp'!.CHOBaTO-
0, 1
~
~ 0,6
b
1
\
'-.J
",.
r-
/
\
..... '/
\
I-
-
IT
N.6 lL\. II.II (CBeT:~)HHii
N.5
-
V -/
i'--- - . /
II
0,0
0,7~
N.3 lKeJITO-
(HaChlII\e~
(TeMHLIH cepoBaTOlKeJITIdii I\BeT) H
/
0,3
rl<
N.2
H
0,5
383
19.2. l!8emonepeaatta
Dt. 19. CMeUleHue /.f8emo8 u /.f8emOnepeaatta
382
Il.BeT JIHCTbeB Ha ,lI.epeBbHx.
OTpaJKeHHH
H
qHCJIeHHble
3HaqeHHH
H
HpKOCTb.
TOHaJIbHOCTb
pacrrOJI02KeHHeM TOqeK Ha
H
HaCblmeHHOCTb
Il.BeTOBOH ,lI.HarpaMMe,
a
.n:JIH
rpa
19.7 B KaqeCTBe
lJ,BemoBaR pa3Hocmb
OTpaJKalOIueH crroc06HOCTH IIIeCTH ,lI.OrrOJIHHTeJIbHbIX 3TaJIOHHbIX OTpa:>Ka-
HJIJIIOCTpaIl.HH.
IOmHX rroBepxHocTeH, rrepeqHCJIeHHbIX B rrpHJI02KeHHH 19.TI2. BH,lI.HO, qTO
Oqepe,ll.HOM OCBemeHHH 3TaJIOHHbIM H TecTHpyeMbIM HCTOqHHKaMH CBeTa,
pa3HocmRMU
~BemHocmu
orrpe,ll.eJIHeTCH
9-14 06JIa,ll.a1OT 60JIee HHTeHCHBHbIMH Il.BeTaMH H cpaBHHTeJIbHO Y3KHMH
reOMeTpHqeCKHM paccToHHHHM Me2K,lI.y ,lI.ByMH TOqKaMH Ha pHC. 19.7. TaKoe
ttaCmHbtMU uHoelCcaMu
rrpe,ll.CTaBJIeHHe Il.BeTHOCTH He HBJIHeTCH CTaH,lI.apTOM MKO H rrpHBe,ll.eHO
rrHKaMH. K03
~Bemonepeoattu. PHC. 19.6 rrOKa3bIBaeT, qeM OTJIHqaeTCH ~BemoBaR
H
RpICocmu, cooTBeTcTBYlOmHMH
crreKTpbI OTpa2KeHHH IIIeCTH ,lI.OrrOJIHHTeJIbHbIX rroBepxHocTeH C HOMepaMH
3,l1.eCb JIHIIIb C rr03HaBaTeJIbHOH Il.eJIblO.
pa3Hocmb TecTHpy-
eM oro H 3TaJIOHHOrO HCTOqHHKOB H3JIyqeHHH OT pa3HOCTH oT06pa2KaeMbIX
BBe,ll.eHHe MKO rrOHHTHH
YHUBepcaJtbHoeo ~BemoBoeo npocmpaHcmBa
(ClE, 1986) 6bIJIO rrpO,ll.HKToBaHo He06xo,ll.HMOCTblO KOJIHqeCTBeHHOH OIl.eH-
Il.BeTOB 3TaJIOHHbIX rrOBepXHOCTeH, oCBemaeMbIX TecTHpyeMbIM H 3TaJIOH-
KH Il.BeTa C yqeTOM xapaKTepHcTHK Il.BeTHOCTH H HpKOCTH. YHHBepCaJIbHOe
HbiM HCTOqHHKaMH. TIpHBe,ll.eHHbIH rrpHMep HCTOqHHKa COOTBeTcTByeT HeKO-
Il.BeTOBOe rrpocTpaHcTBo ,lI.OJI2KHO 06eCrreqHBaTb rrpHMylO rrpOrrOpIl.HOHaJIb-
TOPOMY OTKJIOHeHHIO TecTHpyeMoro HCTOqHHKa OT KPHBOH TIJIaHKa. B Kaqe-
HOCTb Me2K,lI.y Il.BeToBOH pa3HocTblO ,lI.ByX TOqeK H reOMeTpHqeCKHM pac-
CTBe 3TaJIOHHOrO HCTOqHHKa HCrrOJIb30BaHO a6COJIIOTHO qepHOe TeJIO, 6JIH2Ke
CTOHHHeM Me2K,lI.y HHMH. 3TO 3HaqHT, qTO Il.BeTOBaH pa3HocTb B TaKOM
Bcero pacrrOJI02KeHHOe K TOqKe C KOOp,ll.HHaTaMH Il.BeTHOCTH TecTHpyeMoro
YHHBepCaJIbHOM Il.BeTOBOM rrpocTpaHcTBe 0,ll.H03HaqHO orrpe,ll.eJIHeTCH pac-
HCTOqHHKa. CJIe,ll.OBaTeJIbHO, Il.BeTOBaH TeMrrepaTypa 3TaJIOHHOrO HCTOqHH-
CTOHHHeM Me2K,lI.y ,lI.ByMH TOqKaMH B HeM. MKO BBeJIa rrOHHTHH ,lI.ByX Tpex-
Ka CBeTa paBHa KOppeJIHpOBaHHOH Il.BeTOBOH TeMrrepaType HCrrbITyeMoro
MepHbIX YHHBepCaJIbHbIX Il.BeTOBbIX rrpOCTpaHCTB, Ba3BaHHbIX rrpOCTpaH-
H3JIyqaTeJIH. B BblqHCJIeHHHX HH,lI.eKCa Il.BeTOrrepe,ll.aqH HCrrOJIb3YlOTCH Bce
CTBaMH
qeTblpe TOqKH, rrOKa3aHHble Ha pHC. 19.6.
OrpaHHqHMCH paccMoTpeHHeM
(L*, u*, V*)
H
(L*, a*, b*) (Wyszecki, Stiles, 2000; ClE, 1986). (L*, u*, v*) - YHHBepCaJIbHOrO Il.BeTOBOro
TA. 19. CMetueHUe UrBemOB U UrBemonepeaa'ta
384
19.2. ll.Bemonepeaa'ta
385
)1.JIH 60JIee 6JIH3KOrO 3HaKOMCTBa C YHHBepCaJIbHbIM I.I.BeTOBbIM rrpocTpaHcTBoM
(L*, u*, v*)
paccMoTpHM rrpHMep, B KOTOPOM 3TaJIOHHaH oTpa-
i
OCBeIII.aeTCH 3TaJIOHHbIM HCTOqHHKOM 6eJIoro CBe-
)KaIOII.I.aH rroBepxHocTb Ta. KOOp.n.HHaTbI
L * , u*, v*,
orrpe.n.eJIHIOIII.He I.I.BeToBYIO pa3HocTb 06beKTa H
3TaJIOHHOrO H3JIyqaTeJIH, Haxo.n.HTCH H3 CJIe.n.YIOIII.HX CooTHoIlIeHHH:
L* Iref =
116· (Yref,dYref) 1/3 -
=
13 .
L * (Uref,i
v* Iref =
13·
L* (Vref,i - Vref),
u* Iref
16,
(19.11a) (19.116)
- Uref),
(19.11B)
r.n.e Yref,i, Uref,i H Vref,i orrHCbIBalOT I.I.BeT Z-OH 3TaJIOHHOH rrpH ee OCBeIII.eHHH 3TaJIOHHbIM
HCTOqHHKOM,
a Yref,
rroBepxHocTH
Uref H Vref -
I.I.BeT
H3JIyqeHHH 3TaJIOHHOrO HCTOqHHKa 6eJIoro CBeTa. PaccMoTpHM 3TaJIOHHYIO OTpa)KalOIII.YIO rroBepxHocTb, OCBeIII.aeMYIO TecTHpyeMbIM HCTOqHHKOM 6eJIoro CBeTa.
B
3TOM CJIyqae Koop.n.HHaTbI
L *, u*, v*,
orrpe.n.eJIHIOIII.He I.I.BeToBYIO
pa3HocTb I.I.BeTOB nOBepxHocTH H TecTHpyeMoro HCTOqHHKa, Haxo.n.HTCH H3 COOTHOIlIeHHH
KOOpAHHaTa ~eTHOcm U' PHC.
19.6.
UBeToBali pa3HOCTb, B03HHKalOlIl,alI B pe3YJIbTaTe OCBelIl,eHHlI 06beKTa
3TaJIOHHbIM H TecTHpyeMbIM HCTOqHHKaMH. Ha paBHoKoHTpacTHoH UBeToBoH AHarpaMMe
MKO 1976
r. pa3HOCTb UBeTOB rrpliMO rrporropUHOHaJIbHa reOMeTpHqeCKOMY
L* Itest =
116· (Yiest,dYiest)1/3 -
u* Itest =
13·
L* (Utest,i - Utest),
(19.126)
v* Itest =
13·
L* (Vtest,i - Vtest),
(19.12B)
16,
(19.12a)
paccTolIHHIO Me)KAY AByMlI TOqKaMH. ::haJIOHHbIH HCTO'lHHK pacrrOJIO)KeH Ha KPHBOH nJIaHKa B TO'lKe, xapaKTepH3YIOlIl,eHCli KOppeJIHpOBaHHoH UBeToBoH TeMrrepaTypoH
r.n.e Yiest,i, Utest,i H
Vtest,i
OnHCbIBalOT I.I.BeT Z-OH 3TaJIOHHOH nOBepXHOCTH
npH ee OCBeIII.eHHH TecTHpyeMbIM HCTOqHHKOM, a Yiest. Utest H H3JIyqeHHH TecTHpyeMoro HCTOqHHKa 6eJIoro CBeTa.
TecTHpyeMoro HCTO'lHHKa CBen
Pa3HOCTb
I.I.BeTOB
(L*,u*,v*),
.n.ByX
onpe.n.eJIHeMOM
TOqeK,
paCnOJIO)KeHHbIX
ypaBHeHHHMH
(19.11)
H
B
Vtest -
I.I.BeT
rrpOCTpaHCTBe (19.12),
paBHa
3BKJIH.n.OBY paCCTOHHHIO Me)K.n.y 3THMH TOqKaMH:
(19.13) r.n.e
0,1
0,2
0,3
0,4
KOOp,lIHHaTa ~eTHOCTII
PHC.
19.7.
0,5
0,6
u'
I1JIJIIOCTpaUHlI UBeToBoH pa3HocTH B TpexMepHoM UBeTOBOM rrpOCTpaH-
D.L* = L* Itest -L* IreI'
(19.14a)
D.U* = U* Itest -U* Iref'
(19.146)
D.V* = V* Itest -V* Iref .
(19.14B)
CTBe, COCTOlIlIl,eM H3 ropH30HTaJIbHOH UBeToBoH AHarpaMMbI H BepTHKaJIbHOH OCH
PaCqeT HH.n.eKCOB I.I.BeTOnepe.n.aqH 6y.n.eT no.n.P06HO paccMoTpeH B .n.ByX
lIPKOCTH
nocJIe.n.YIOIII.HX p a3.n.eJIax. npOCTpaHCTBa MKO. )1.aHHoe npoCTpaHcTBo TpexMepHoe B .n.eKapToBOH CHCTeMe Koop.n.HHaT,
.n.Be H3 KOTOPbIX Koop.n.HHaTbI I.I.BeTHOCTH
(u*, v*),
B
Ta6JI.
19.1
npHBe.n.eHbI 3HaqeHHH cYMMapHblx HH.n.eKCOB I.I.BeTOne-
pe.n.aqH HaH60JIee pacnpoCTpaHeHHblx HCTOqHHKOB CBeTa. npe.n.CTaBJIeHbI .n.aHHble .n.JIH HeCKOJIbKHX THnOBCBeTo.n.Ho.n.OB: .n.BYXI.I.BeTHbIX H TpeXI.I.BeTHbIX
a TpeTbH rrpe.n.CTaBJIHeT C060H HPKOCTb HCTOqHHKa HJIH
CBeTo.n.Ho.n.OB 6eJIoro CBeqeHHH, a TaK)Ke .n.JIH CBeTo.n.Ho.n.OB 6eJIoro CBeqe-
eKTa. YHHBepCaJIbHOe I.I.BeTOBOe npocTpaHcTBo oc06eHHo no.n.xo.n.HT .n.JIH
HHH, C03.n.aHHbIX C npHMeHeHHeM JIIOMHHO
KOJIHqeCTBeHHoH OI.I.eHKH I.I.BeTOBOH
pa3fwcmu.
13 <1>. E. Illy6epT
FA.
386 Ii
Ii
I
19.4. HHaeICCbt tJ,8emonepeaa'tu aAfl ucmo'tHUIC08 C8ema
19. CMeuteHUe tJ,8em08 U tJ,8emonepeaa'ta
OCBenlTeJIbHbIX CHCTeMax. ECJIH YCTpoHcTBa 06JIa.n:aIOT HH.n:eKCOM Il.BeTOrrepe.n:aqH OT
70
.n:o
90,
r.n:e
HX MO)KHO HCrrOJIb30BaTb BO MHorHX CTaH.n:apTHbIX
CHCTeMax OCBeLUeHHH. YCTpoHcTBa C HH.n:eKCOM Il.BeTOrrepe.n:aqH MeHee
70
6..L* =L;ef-L;est= [116
CqHTaIOTCH HH3KOKaqeCTBeHHbIMH. T a 6 JI H U a
19.1.
Ci:~i )1/3 -16]-[ 116 (~:t/ )1/3 -16],
(19.16)
6..u* = u;ef - u;est = 13L;ef (Uref,i - Uref) - 13L;est (Utest,i - Uref), (19.17) 6..v* = V;ef - V~st = 13L;ef (Vref,i - vret) - 13L;est (Vtest,i - Vref), (19.18) 4X 6Y (19.19) U = X + 15Y + 3Z ' v = ""'X=-+-15=Y-+---'-3Z='
3HaqeHHH cYMMapHblx HH.lI.eKCOS useTOnepe.ll.aqH HaH60JIee pacnpocTpaHeHHblx HCTOqHHKOS cseTa
MCToqHHK cseTa
387
MH.lI.eKC useTOnepe.ll.aqH
COJIHeqHbIH: cseT
100
A
OTMeTHM, qTO U H V BblqHCJIHIOTCH rro rrapaMeTpaM crreKTpa 3TaJIOHHOrO
Ksapuesble raJIOreHHble JIaMnbI C SOJIb
100
5
HCTOqHHKa (HH.n:eKc ref), rro crreKTpy H3JIyqeHHH 3TaJIOHHOrO HCTOqHHKa,
TblO HaKaJIHSaHHH
OTpa)KeHHOrO OT 3TaJIOHHOH rroBepxHocTH (HH.n:eKc ref,
JIaMnbI C SOJIb
100
5
H3JIyqeHHH TecTHpyeMoro HCTOqHHKa, OTpa)KeHHOrO OT 3TaJIOHHOH rroBepxHOCTH (HH.n:eKc test, i) .
60-95
5
i)
H rro crreKTpy
.lI.JIH rrOJIyqeHHH MaKCHMaJIbHO B03MO)KHOrO 3HaqeHHH HH.n:eKca Il.BeTOnepe.n: aqH TecTHpyeMorOHCTOqHHKa CBeTa rrpH ero BblqHCJIeHHH rro npH-
TpexuseTHble CSeTO.ll.HO.ll.bI 6eJIoro CSeqeHHH
60-95
5,B
C.ll. 6eJIoro CSeqeHHH Ha OCHose JIIOMHHO
55-85
5, B
3TaJIOHHOrO HCTOqHHKa .n:OJI)KHbI 6bITb H.n:eHTHqHbIMH,
Uref, Vtest Vref, ¥test ¥ref. C06JIIO.n:aTb CJIe.n:YIOLUHe YCJIOBHH: Utest B <popMYJIaX (19.9)-(19.19), HCrrOJIb3yeMblx .n:JIH BblqHCJIeHHH HH.n:eKca
.ll.syxuseTHbie CSeTO.ll.HO.ll.bI 6eJIoro CSeqeHHH
10-60
5,B
PTYTHble JIaMnbl, nOKpblTble JIIOMHHO
50
5
PTYTHble JIaMnbI
33
5
10
HaTpHesble JIaMnbI SbiCOKoro H HH3Koro .lI.aSJIeHHH
22
A-
COJIHeqHblii CBeT;
BaHHIl C KOppeJIHpOBaHHoii l.{BeTOBOii TeMllepaTypoii; HeKOTopble AaHHbie H3 pa60TbI (Kelldall, Scholalld,
B-
5-
=
(6..L*) .
(6..u*, 6..V*) ,
HO
.lI.aHHbIH crroc06 orrpe.n:eJIeHHH HH.n:eKca
Il.BeTOrrepe.n:aqH OCHOBaH Ha rrpe.n:nOJIO)KeHHH, qTO 3TaJIOHHbIH HCTOqHHK ne-
B
D65;
He06xo.n:HMO
=
pe.n:aBaTb He TOJIbKO Il.BeTHOCTb
pe.n:aeT peaJIbHyIO Il.BeTHOCTb H HPKOCTb, T. e. peaJIbHble Il.BeTa
CBeT JIaMnbl HaKallJIH'
HCTOqHHK
T. e.
=
Il.BeTOnepe.n:aqH, yqHTbIBaeTCH cnoc06HOCTb TecTHpyeMoro HCTOqHHKa rre-
5
-50
3eJIeHbIH: MOHoxpOMaTHqeCKHH: cseT
fipHMe'laHHe. ::haJIOHHble HCTOqHHKH:
H
Be.n:eHHbIM <popMYJIaM Koop.n:HHaTbI Il.BeTHOCTH H CBeTOBOH nOTOK ero H
HCIIOJIb30BaHbi
2001).
(19.16)-(19.19)
He .n:aeT 0.n:H03HaqHblX pe3YJIbTaTOB. l.JHCJIOBble K03
19.3.
HH,lJ;eKC D;BeTOnepe,lJ;aIlH ,lJ;JUI H3J1YllaTeJleii,
19.4.
pacnOJlOJKeHHbIX Ha KPHBOii nJlaHKa
HH,lJ;eKcbI D;BeTOnepe,lJ;aIlH ,lJ;JlSI HCTOIlHHKOB CBeTa, pacnOJlOJKeHHbIX BHe KPHBoii nJlaHKa
npHBe.n:eHHble HH)Ke paCqeTbI rr03BOJIHIOT HaHTH 3HaqeHHe
(19.10)
6..Ei,
KOTO-
He06xo.n:HMO .n:JIH orrpe.n:eJIeHHH
CJIe.n:YIOLUHe paCqeTbI crrpaBe.n:JIHBbI .n:JIH TecTHpyeMblx HCTOqHHKOB CBe-
HH.n:eKca Il.BeTOrrepe.n:aqH TecTHpyeMoro HCTOqHHKa. TaKHe paCqeTbI crrpa-
Ta, pacrrOJIO)KeHHbIX 3a npe.n:eJIaMH KPHBOH nJIaHKa. MeTo.n: paCqeTa, rrpH-
poe B COOTBeTCTBHH C ypaBHeHHeM
1995).
Be.n:JIHBbI .n:JIH HCrrbITyeMblx H3JIyqaTeJIeH, pacrrOJIO)KeHHbIX JIH60 Herrocpe.n:-
Be.n:eHHbIH 3.n:ecb, orrHcaH B rry6JIHKaIl.HH (MKO,
CTBeHHO Ha KPHBOH nJIaHKa, JIH60 Ha OqeHb He60JIbillOM paccToHHHH OT
aaanmU8ftbtU Ca8Uc lf8ema, B03HHKaIOLUHH H3-3a cnoc06HOCTH qeJIOBeKa K lf8em080U aaanmalfUU.
Hee.
1995).
BeJIHqHHa
6..Ei,
1982)
H rry6JIHKaIl.HH
B HeM yqHTblBaeTCH
HBJIHIOLUaHCH Il.BeTOBOH pa3HocTbIO
no.n: Il.BeTOBOH a.n:anTaIl.HeH nOHHMaeTCH crroc06HOCTb qeJIOBeKa rrpHcno-
3TaJIOHHOH rroBepxHocTH rrpH ee oCBeLUeHHH 3TaJIOHHbIM H TecTHpyeMbIM
Ca6JIHBaTbCH K orrpe.n:eJIeHHblM YCJIOBHHM BHelllHero OCBeLUeHHH 6e3 CYLUe-
HCTOqHHKaMH Haxo.n:HTCH rro <popMyJIe
CTBeHHOH rrOTepH Il.BeTOBoro BocrrpHHTHH. PaCCMOTpHM CJIe.n:YIOLUHH rrpHMep. KOMHaTa OCBeLUaeTCH npH rrOMOLUH HCTOqHHKa )KeJITOrO Il.BeTa, CqH-
(19.15)
TaIOLUerOCH HH3KOKaqeCTBeHHbIM OCBeTHTeJIbHbIM YCTPOHCTBOM. nOCKOJIbKY
13*
DL. 19. CMeuteHUe lI,BemOB U lI,BemOnepeaa'la
388
19.4. HHaeKCbl lI,BemOnepeaa'lu allSl UCmO'lHUKOB CBema
B crreKTpe TaKoro H3nY'IaTenH rrO'ITH OTCYTcTByeT H3nY'IeHHe KOPOTKHX
389
3TanOHHbIX rrOBepXHOCTeH rrocne /a,narrTHBHoro IJ,BeTOBoro c,nBHra:
,nnHH BonH (qmoneToBoro, CHHero H rony60ro IJ,BeTOB), ero Koop,nHHaTbI IJ,BeTHOCTH pacrronmKeHbI 3a rrpe,nenaMH KPHBOH I1naHKa. O,nHaKo BOllIe,nllIeMY B !ny KOMHaTY 'Iepe3 HeKoTopoe BpeMH, Ha3bIBaeMoe BpeMeHeM a,naITTaIJ,HH (06bl'IHO rropH,nKa HeCKonbKHX ,neCHTKOB MHHYT), IJ,BeTa OKpy-
10,872 + 0,404 Cre ! Ctest i - 4 d re ! d test i ' U;e:t,i = _ _ _ _ _ _~Ct~es'_!..t__'_ _d;::t!=:es!!.,t_ _ 16,518 + 1,481 Cre ! Ctest,i - d re ! dtest,i, Ctest dtest
(19.22)
5,520 = ------.....:....-------,,...--16,518 + 1,481 Cre! Ctest,i - d re ! dtest,i .
(19.23)
)KalOII.I,HX rrpe,nMeToB Ha'IHHalOT Ka3aTbCH ropa3,n0 60nee eCTeCTBeHHbIMH,
V;;st,i
'IeM Kor,na OH TonbKO 'ITO 3allIen B Hee. EcnH HH,neKC IJ,BeTOrrepe,na'IH H3nY'IaTeneH BHe KPHBOH I1naHKa Bbl'IHC-
Ctest
dtest
nHTb crroc060M, rrpe,nnO)KeHHbIM B rrpe,nbI,nyII.I,eM pa3,nene, OH rronY'IHTCH O'IeHb HH3KHM. O,nHaKo, KaK rrOKa3bIBalOT OrrblTbI C nlO,nbMH, B ,neHcTBHTenbHOCTH TaKHe HCTO'IHHKH MoryT 06na,naTb HaMHoro nY'IllIeH IJ,BeTOrre-
COOTBeTCTBeHHO, Koop,nHHaTbI IJ,BeTHOCTH TecTHpyeMoro H3nY'IaTenH rrocne a,narrTHBHoro IJ,BeTOBOro c,nBHra Haxo,nHTCH rro cpopMynaM
10,872 + 0,404cre! - 4dre ! 16,518 + 1,481cre ! - d re ! = Uref, 5,520 v:e~t = -,---,-...,...---=,:..::..,::,.::,...----,-- = Vref. 16,518 + 1,481cre ! - d re !
pe,na'IeH, rrOCKonbKY, 6naro,napH IJ,BeTOBOH a,narrTaIJ,HH, IJ,BeTa rrpe,nMeToB, OCBeII.I,aeMbIX HCTO'IHHKaMH CBeTa BHe KPHBOH I1naHKa (HO Bce )Ke He,naneKO OT Hee) MoryT Ka3aTbCH 'IenOBeKY )KHBbIMH H eCTeCTBeHHbIMH. ,lI.nH rrpeo,noneHHH 3Toro rrpoTHBOpe'IHH H rronY'IeHHH peanbHbIX 3Ha'IeHHH HH,neKca IJ,BeTOrrepe,na'IH MKO rrpe,nnO)KHna anbTepHaTHBHbIH crroc06 ero pac'IeTa (ClE,
1995),
B KOTOPOM y'IHTblBaeTcH crroc06HOCTb 'IenOBeKa K IJ,BeTOBOH
a,narrTaIJ,HH, rrpoHcxo,nHII.I,eH 3a C'IeT a,narrTHBHoro IJ,BeTOBOro c,nBHra TeCTHpyeMoro HCTO'IHHKa H3nY'IeHHH B CTOPOHY COOTBeTCTBYIOII.I,erO 3TanOHHoro
3Ha'IeHHH U;e:t H
vt"e~t -
(19.24) (19.25)
Koop,nHHaTbI IJ,BeTHOCTH HCTO'IHHKa CBeTa, Y'IHTbI-
BalOII.I,He a,narrTHBHbIH IJ,BeTOBOH c,nBHr (OTMeTHM eII.I,e pa3, 'ITO U;:st = Uref,
V;e~t = Vref).
Terrepb C rrOMOII.I,blO KOOp,nHHaT B YHHBepCanbHOM IJ,BeTOBOM
rrpOCTpaHCTBe MO)KHO HaHTH HCKOMYIO BenH'IHHY IJ,BeTOBOH pa3HOCTH:
H3nY'IaTenH I1naHKa. 9KcrrepHMeHTanbHo 6blno ,nOKa3aHO, 'ITO Ka'IeCTBO HCTO'IHHKOB 6eno-
(19.26)
ro CBeTa pe3Ko CHH)KaeTCH rrpH y,naneHHH HX Koop,nHHaT IJ,BeTHOCTH Ha IJ,BeTOBOH ,nHarpaMMe, X
H
y,
OT KPHBOH I1naHKa 60nee 'IeM Ha
0,0l.
9Ta BenH'IHHa cooTBeTcTByeT pa3MepaM rrpH6nH3HTenbHo 'IeTblpex 3nnHrrCOB MaKA,naMa (Duggal, Ha
0,01»
2005).
CTaH,napTY, rrpHHHToMy ,nnH OCBeTHTenbHbIX rrpH60pOB O,nHaKo cne,nyeT OTMeTHTb, 'ITO KpHTepHH «OTKnOHeHHH
HBnHeTCH He06xo,nHMbIM,
HO He,nOCTaTO'IHbIM ,nnH rronY'IeHHH
r,ne
~L ** = L;;j,i - L;;st,i = [25 (Yref,i) 1/3 -17] - [25 (Yiest,i) 1/3 -17] , (19.27) A ** =Uref *** -Utest *** = uU
A uV
BbICOKOKa'IeCTBeHHblX HCTO'IHHKOB OCBeII.I,eHHH. PaC'IeT Ha'IHHaeTCH C orrpe,neneHHH Koop,nHHaT IJ,BeTHOCTH 3TanOHHoro H TecTHpyeMoro HCTO'IHHKOB CBeTa Ha paBHoKoHTpacTHoH IJ,BeTOBOH ,nHarpaM-. Me, a TaK)Ke Koop,nHHaT IJ,BeTHOCTH 3TanOHHbIX OTpa)KalOII.I,HX rrOBepXHOCTeH
13L** ** ) ' (19.28) ref,i (Uref,i-Uref ) - 13L** test,i (** Utest,i-Utest ** =Vref *** -Vtest *** = 13L** ( ) 13L** (** ** test,i Vtest,i-Vtest ) . (19:29) ref,i Vref,i-Vref -
OTMeTHM, 'ITO rro peKOMeH,naIJ,HH MKO paC'IeT Tpe6yeT, 'IT06bI Yref =
= Yiest = cpopMynaM
100 (ClE, 1995). (19.9) H (19.10)
Hcrronb3YH rronY'IeHHble 3Ha'IeHHH
~Ei, rro
Haxo,nHT CYMMapHbIH HH,neKC IJ,BeTOrrepe,na'IH.
rrpH HX OCBeII.I,eHHH 3TanOHHbIM H TecTHpyeMbIM HCTO'IHHKaMH, T. e. (Uref,
,lI.nH rronY'IeHHH rronHoro rrpe,nCTaBneHHH 0 IJ,BeTOrrepe,na'Ie HCTO'IHHKOB
Vref) , (Utest. Vtest), (Uref,i, Vref,i), (Utest,i, Vtest,i)'
OCBeII.I,eHHH rrpH6eralOT K HaXO)K,neHHIO 'IaCTHblX HH,neKCOB IJ,BeTOrrepe,na'IH CRl i (i = 9-14).
,lI.nH HaXO)K,neHHH a,naITTHBHOrO IJ,BeTOBOro c,nBHra Koop,nHHaTbI
(u, V)
B rrapax 3Ha'IeHHH (Uref, Vref), (Utest. Vtest), (Utest,i, Vtest,i) rrpe06pa3ylOTcH B Koop,nHHaTbI
(c, d)
rrpH rrOMOII.I,H cne,nYIOII.I,HX cpopMyn:
Ynpa1KHeHHe. /JBemonepeaa'la Ha UBeT
c=
(4-u-1Ov) , v
d = (l,708v + 0,404 - 1,481u). v
(19.20) (19.21)
OTMeTHM, 'ITO 3a 3THMH ,nByMH ypaBHeHHHMH CKpbIBalOTCH llIeCTb Bblpa)Ke-
Hhle UBeTa 06beKTOB (TO'lHall UBeTOIIepe.n:a'la), Tor.n:a KaK .n:pyme HCKa)KaIOT UBeTa (IIJIOXall UBeTOIIepe.n:a'la).
a.
KaKHM 6y.n:eT UBeT )KeJITOrO 6aHaHa IIpH ero OCBemeHHH CBeTo.n:Ho.n:aMH
KpaCHoro CBe'leHHlI?
6. KaKoro UBeTa 3eJIeHhIH 6aHaH IIpH ero OCBemeHHH CBeTo.n:Ho.n:aMH )KeJITOrO CBe'leHHlI? B. Ey.n:eT JIH IIOJIe3HO IIpo.n:aBuaM Mara3HHOB IIo.n:CBe'lHBaTh MlICO CBeTo.n:Ho.n:aMH
HHH, rrpe06pa3ylOII.I,HX (Uref, Vref) , (Utest, Vtest), (Utest,i, Vtest,i) B (Cref, dref) ,
KpaCHoro CBe'leHHlI, 6aHaHhI -
(Ctest. d test )' (ctest,i, dtest,i), rro KOTOPbIM H HaXO,nHT KOOp,nHHaTbI IJ,BeTHOCTH
CBeTo.n:Ho.n:aMH OpaH)KeBOrO CBe'leHHlI?
CBeTo.n:Ho.n:aMH )KeJITOrO CBe'leHHlI, a aIIeJIhCHHhI-
II
• I
.I
390
FA. 19. CMeuteftUe u,eemoe u u,eemonepeaa'ta
e. MO)KHO JIH npH nOMOlll.H OCBeTHTeJIbHbIX YCTpoikTB c.n:eJIaTb TaK, qTo6bI .n:Ba o6beKTa pa3HbIX UBeTOB Ka3aJIHCb o.n:Horo H Toro )Ke UBeTa? a. TIOqeMY, HeCMOTplI Ha HH3KHH HH.n:eKC UBeTonepe.n:aqH, HaTpHeBble JIaMnbI HH3Koro .n:aBJIeHHlI Bce )Ke HCnOJIb3YlOTClI Ha npaKTHKe? e. KaKOBbI npeHMYlll.eCTBa H He.n:OCTaTKH npHMeHeHHlI CBeTo.n:Ho.n:OB 3eJIeHOrO CBeqeHHlI B OCBeTHTeJIbHblX CHCTeMax? PemeHHe_ a. KpacHbIH. 6. )KeJITblH. e. ,Ua, HO qeCTHO JIH 3TO. e. ,Ua. a. 113-3a HX BblCOKOH CBeTOOT.n:aqH (H HH3Koro nOTpe6JIeHHlI 3JIeKTp03HeprHH). e. BblCOKalI CBeTOBalI 3<j><j>eKTHBHoCTb, HO nJIOXalI UBeTonepe.n:aqa. BH6JIHOrpa«i>HlIeCKHH cnHCOK
Berger-Schunn A. Practical Color Measurement (John Wiley and Sons, New York, 1994) Billmeyer Jr. F. W. "Survey of color order systems" Color Res. Appl. 12, 173 (1987) CIE publication No. 15 (E.1.3.l) 1971: Colorimetry this publication was updated in 1986 to CIE Publication 15.2 Colorimetry (CIE, Vienna, Austria, 1986) CIE publication No. 13.3 Method of Measuring and Specifying Color-Rendering of Light Sources (see also www.cie.co.at) (CIE, Vienna, Austria, 1995) Duggal A. R. "Organic electroluminescent devices for solid-state lighting" in Organic Electro-luminescence edited by Z. H. Kafafi (Taylor and Francis Group, Boca Raton, Florida, 2005) Kendall M. and Scholand M. Energy Savings Potential of Solid State Lighting in General Lighting Applications available to the public from National Technical Information Service (NTIS), US Department of Commerce, 5285 Port Royal Road, Springfield, Virginia 22161 (2001) Long J. and Luke J. T. The New Munsell Student Color Set 2nd ring-bound edition (Fairchild Books and Visuals, New York, 2001) MacAdam D. L. (Editor) Colorimetry - Fundamentals (SPIE Optical Engineering Press, Bellingham, Washington, 1993) Munsell A. H. A Color Notation - An Illustrated System Defining All Colors and Their Relations by Measured Scales of Hue, Value, and Chroma (G. H. Ellis, Boston, 1905) Munsell Munsell Book of Color, Matte Edition is available through GretagMacbeth Corporation, gretagmacbeth.com and munsell.com (Regensdorf, Switzerland, 2005) Wyszecki G. and Stiles W. S. Color Science - Concepts and Methods, Quantitative Data and Formulae 2nd edition (John Wiley and Sons, New York, 1982) Wyszecki G. and Stiles W. S. Color Science - Concepts and Methods, Quantitative Data and Formulae 2nd edition "Wiley Classics Library" (John Wiley and Sons, New York, 2000)
flpUA03lCeftUe 19.fl1 OpHJlO}KeHHe
391
19.01
OTpa)!{aTeJIbHaSI crroco6HoCTb 3TaJIOHHbIX IJ:BeTOB tIHCJIeHHble 3HaqeHHlI cneKTpaJIbHOH OTpa)KaTeJIbHOH cnoco6HOCTH .R('>") 3TaJIOHHblX OTpa)KalOlll.HX nOBepxHocTeH TCS (i = 1-8) (CIE, 1974), HCnOJIb3yeMblx .n:JIlI BblqHCJIeHHlI cYMMapHoro HH.n:eKca UBeTonepe.n:aqH (CIE, 1995) .>..,HM RJ (-) R2 (-) R3 (-) R.t (-) R5 (-) l4; (-) R7 (-) Rs (-) 360 0,116 0,053 0,058 0,057 0,143 0,079 0,150 0,D75 365 0,136 0,055 0,059 0,059 0,187 0,081 0,177 0,D78 370 375 380 385 390 395 400 405 410 415 420 425 430 435 440 445 450 455 460 465 470 475 480 485 490 495 500 505 510 515 520 525 530 535 540 545 550 555 560 565 570 575 580
0,159 0,190 0,219 0,239 0,252 0,256 0,256 0,254 0,252 0,248 0,244 0,240 0,237 0,232 0,230 0,226 0,225 0,222 0,220 0,218 0,216 0,214 0,214 0,214 0,216 0,218 0,223 0,225 0,226 0,226 0,225 0,225 0,227 0,230 0,236 0,245 0,253 0,262 0,272 0,283 0,298 0,318 0,341
0,059 0,064 0,070 0,079 0,089 0,101 0,111 0,116 0,118 0,120 0,121 0,122 0,122 0,122 0,123 0,124 0,127 0,128 0,131 0,134 0,138 0,143 0,150 0,159 0,174 0,190 0,207 0,225 0,242 0,253 0,260 0,264 0,267 0,269 0,272 0,276 0,282 0,289 0,299 0,309 0,322, 0,329 0,335
0,061 0,063 0,065 0,068 0,070 0,072 0,073 0,073 0,074 0,074 0,074 0,073 0,073 0,073 0,073 0,073 0,074
0,D75 0,077 0,080 0,085 0,094 0,109 0,126 0,148 0,172 0,198 0,221 0,241 0,260 0,278 0,302 0,339 0,370 0,392 0,399 0,400 0,393 0,380 0,365 0,349 0,332 0,315
0,062 0,067 0,074 0,083 0,093 0,105 0,116 0,121 0,124 0,126 0,128 0,131 0,135 0,139 0,144 0,151 0,161 0,172 0,186 0,205 0,229 0,254 0,281 0,308 0,332 0,352 0,370 0,383 0,390 0,394 0,395 0,392 0,385 0,377 0,367 0,354 0,341 0,327 0,312 0,296 0,280 0,263 0,247
0,233 0,269 0,295 0,306 0,310 0,312 0,313 0,315 0,319 0,322 0,326 0,330 0,334 0,339 0,346 0,352 0,360 0,369 0,381 0,394 0,403 0,410 0,415 0,418 0,419 0,417 0,413 0,409 0,403 0,396 0,389 0,381 0,372 0,363 0,353 0,342 0,331 0,320 0,308 0,296 0,284 0,271 0,260
0,089 0,113 0,151 0,203 0,265 0,339 0,410 0,464 0,492 0,508 0,517 0,524 0,531 0,538 0,544 0,551 0,556 0,556 0,554 0,549 0,541 0,531 0,519 0,504 0,488 0,469 0,450 0,431 0,414 0,395 0,377 0,358 0,341 0,325 0,309 0,293 0,279 0,265 0,253 0,241 0,234 0,227 0,225
0,218 0,293 0,378 0,459 0,524 0,546 0,551 0,555 0,559 0,560 0,561 0,558 0,556 0,551 0,544 0,535 0,522 0,506 0,488 0,469 0,448 0,429 0,408 0,385 0,363 0,341 0,324 0,311 0,301 0,291 0,283 0,273 0,265 0,260 0,257 0,257 0,259 0,260 0,260 0,258 0,256 0,254 0,254
0,084 0,090 0,104 0,129 0,170 0,240 0,319 0,416 0,462 0,482 0,490 0,488 0,482 0,473 0,462 0,450 0,439 0,426 0,413 0,397 0,382 0,366 0,352 0,337 0,325 0,310 0,299 0,289 0,283 0,276 0,270 0,262 0,256 0,251 0,250 0,251 0,254 0,258 0,264 0,269 0,272 0,274 0,278
TA. 19. CMeweliue I1BemoB u I1Bemonepeaa'la
392 >., HM
Ii
585 590 595 600 605 610 615 620 625 630 635 640 645 650 655 660 665 670 675 680 685 690 695 700 705 710 715 720 725 730 735 740 745 750 755 760 765 770 775 780 785 790 795 800 805 810 815 820 825 830
RI (-)
0,367 0,390 0,409 0,424 0,435 0,442 0,448 0,450 0,451 0,451 0,451 0,451 0,451 0,450 0,450 0,451 0,451 0,453 0,454 0,455 0,457 0,458 0,460 0,462 0,463 0,464 0,465 0,466 0,466 0,466 0,466 0,467 0,467 0,467 0,467 0,467 0,467 0,467 0,467 0,467 0,467 0,467 0,466 0,466 0,466 0,466 0,466 0,465 0,464 0,464
R2 (-) 0,339 0,341 0,341 0,342 0,342 0,342 0,341 0,341 0,339 0,339 0,338 0,338 0,337 0,336 0,335 0,334 0,332 0,332 0,331 0,331 0,330 0,329 0,328 0,328 0,327 0,326 0,325 0,324 0,324 0,324 0,323 0,322 0,321 0,320 0,318 0,316 0,315 0,315 0,314 0,314 0,313 0,313 0,312 0,312 0,311 0,311 0,311 0,311 0,311 0,310
R3 (-) 0,299 0,285 0,272 0,264 0,257 0,252 0,247 0,241 0,235 0,229 0,224 0,220 0,217 0,216 0,216 0,219 0,224 0,230 0,238 0,251 0,269 0,288 0,312 0,340 0,366 0,390 0,412 0,431 0,447 0,460 0,472 0,481 0,488 0,493 0,497 0,500 0,502 0,505 0,510 0,516 0,520 0,524 0,527 0,531 0,535 0,539 0,544 0,548 0,552 0,555
flpUAOJICeliUe 19
14 (-) Rs (-) F4, (-) R7 (-) Rs (-) 0,229 0,214 0,198 0,185 0,175 0,169 0,164 0,160 0,156 0,154 0,152 0,151 0,149 0,148 0,148 0,148 0,149 0,151 0,154 0,158 0,162 0,165 0,168 0,170 0,171 0,170 0,168 0,166 0,164 0,164 0,165 0,168 0,172 0,177 0,181 0,185 0,189 0,192 0,194 0,197 0,200 0,204 0,210 0,218 0,225 0,233 0,243 0,254 0,264 0,274
0,247 0,232 0,220 0,210 0,200 0,194 0,189 0,185 0,183 0,180 0,177 0,176 0,175 0,175 0,175 0,175 0,177 0,180 0,183 0,186 0,189 0,192 0,195 0,199 0,200 0,199 0,198 0,196 0,195 0,195 0,196 0,197 0,200 0,203 0,205 0,208 0,212 0,215 0,217 0,219 0,222 0,226 0,231 0,237 0,243 0,249 0,257 0,265 0,273 0,280
0,222 0,221 0,220 0,220 0,220 0,220 0,220 0,223 0,227 0,233 0,239 0,244 0,251 0,258 0,263 0,268 0,273 0,278 0,281 0,283 0,286 0,291 0,296 0,302 0,313 0,325 0,338 0,351 0,364 0,376 0,389 0,401 0,413 0,425 0,436 0,447 0,458 0,469 0,477 0,485 0,493 0,500 0,506 0,512 0,517 0,521 0,525 0,529 0,532 0,535
0,259 0,270 0,284 0,302 0,324 0,344 0,362 0,377 0,389 0,400 0,410 0,420 0,429 0,438 0,445 0,452 0,457 0,462 0,466 0,468 0,470 0,473 0,477 0,483 0,489 0,496 0,503 0,511 0,518 0,525 0,532 0,539 0,546 0,553 0,559 0,565 0,570 0,575 0,578 0,581 0,583 0,585 0,587 0,588 0,589 0,590 0,590 0,590 0,591 0,592
0,284 0,295 0,316 0,348 0,384 0,434 0,482 0,528 0,568 0,604 0,629 0,648 0,663 0,676 0,685 0,693 0,700 0,705 0,709 0,712 0,715 0,717 0,719 0,721 0,720 0,719 0,722 0,725 0,727 0,729 0,730 0,730 0,730 0,730 0,730 0,730 0,730 0,730 0,730 0,730 0,730 0,731 0,731 0,731 0,731 0,731 0,731 0,731 0,731 0,731
IIpHJIo1KeHHe
393
19.112
OTpa)KaTeJIbHaH crroco6HOCTb 3TaJIOHHbIX UBeTOB tIHCJIeHHble 3HaqeHHH crreKTpaJIbHOH OTpaJKaTeJIbHOH crroco6HoCTH JIOHHblX OTpaJKaIOllI.HX rroBepxHocTeH .n.JIH BblqHCJIeHHH qaCTHbIX HH.n.eKCOB >.,HM
360 365 370 375 380 385 390 395 400 405 410 415 420 425 430 435 440 445 450 455 460 465 470 475 480 485 490 495 500 505 510 515 520 525 530 535 540 545 550 555 560 565 570 575 580
E.g (-) 0,069 0,072 0,073 0,070 0,066 0,062 0,058 0,055 0,052 0,052 0,051 0,050 0,050 0,049 0,048 0,047 0,046 0,044 0,042 0,041 0,038 0,035 0,033 0,031 0,030 0,029 0,Q28 0,Q28 0,Q28 0,029 0,030 0,030 O,O~l
0,031 0,032 0,032 0,033 0,034 0,035 0,037 0,041 0,044 0,048 0,052 0,060
RIO (-)
0,042 0,043 0,045 0,047 0,050 0,054 0,059 0,063 0,066 0,067 0,068 0,069 0,069 0,070 0,072 0,073 0,076 0,078 0,083 0,088 0,095 0,103 0,113 0,125 0,142 0,162 0,189 0;219 0,262 0,305 0,365 0,416 0,465 0,509 0,546 0,581 0,610 0,634 0,653 0,666 0,678 0,687 0,693 0,698 0,701
TCS (i = 9-14) (CIE, 1974), U:BeTorrepe.n.aqH (CIE, 1995)
Rll (-) 0,074 0,079 0,086 0,098 0,111 0,121 0,127 0,129 0,127 0,121 0,116 0,112 0,108 0,105 0,104 0,104 0,105 0,106 0,110 0,115 0,123 0,134 0,148 0,167 0,192 0,219 0,252 0,291 0,325 0,347 0,356 0,353 0,346 0,333 0,314 0,294 0,271 0,248 0,227 0,206 0,188 0,170 0,153 0,138 0,125
RI2 (-) 0,189 0,175 0,158 0,139 0,120 0,103 0,090 0,082 0,076 0,068 0,064 0,065 0,075 0,093 0,123 0,160 0,207 0,256 0,300 0,331 0,346 0,347 0,341 0,328 0,307 0,282 0,257 0,230 0,204 0,178 0,154 0,129 0,109 0,090 0,075 0,062 0,051 0,041 0,035 0,029 0,025 0,022 0,019 0,017 0,017
RI3 (-) 0,071 0,076 0,082 0,090 0,104 0,127 0,161 0,211 0,264 0,313 0,341 0,352 0,359 0,361 0,364 0,365 0,367 0,369 0,372 0,374 0,376 0,379 0,384 0,389 0,397 0,405 0,416 0,429 0,443 0,454 0,461 0,466 0,469 0,471 0,474 0,476 0,483 0,490 0,506 0,526 0,553 0,582 0,618 0,651 0,680
~(A) :ITa-
HCrrOJIb3yeMblx
R14 (-) 0,036 0,036 0,036 0,036 0,036 0,036 0,037 0,038 0,039 0,039 0,040 0,041 0,042 0,042 0,043 0,044 0,044 0,045 0,045 0,046 0,047 0,048 0,050 0,052 0,055 0,057. 0,062 0,067 0,075 0,083 0,092 0,100 0,108 0,121 0,133 0,142 0,150 0,154 0,155 0,152 0,147 0,140 0,133 0,125 0,118
FIt. 19. CMeuteHUe l{BemOB U l{Bemonepeaa'la
394
>.,
I I
HM
585 590 595 600 605 610 615 620 625 630 635 640 645 650 655 660 665 670 675 680 685 690 695 700 705 710 715 720 725 730 735 740 745 750 755 760 765 770 775 780 785 790 795 800 805 810 815 820 825 830
E.g (-) RIO (-) 0,076 0,704 0,102 0,705 0,136 0,705 0,190 0,706 0,256 0,707 0,336 0,707 0,418 0,707 0,505 0,708 0,581 0,708 0,641 0,710 0,682 0,711 0,717 0,712 0,740 0,714 0,758 0,716 0,770 0,718 0,781 0,720 0,790 0,722 0,797 0,725 0,803 0,729 0,809 0,731 0,814 0,735 0,819 0,739 0,824 0,742 0,828 0,746 0,830 0,748 0,831 0,749 0,833 0,751 0,835 0,753 0,836 0,754 0,836 0,755 0,837 0,755 0,838 0,755 0,839 0,755 0,839 0,756 0,839 0,757 0,839 0,758 0,839 0,759 0,839 0,759 0,839 0,759 0,839 0,759 0,839 0,759 0,839 0,759 0,839 0,759 0,839 0,759 0,839 0,759 0,838 0,758 0,837 0,757 0,837 0,757 0,836 0,756 0,836 0,756
RII (-)
RI2 (-)
RI3 (-)
RI4 (-)
0,114 0,106 0,100 0,096 0,092 0,090 0,087 0,085 0,082 0,080 0,079 0,Q78 0,Q78 0,Q78 0,Q78 0,081 0,083 0,088 0,093 0,102 0,112 0,125 0,141 0,161 0,182 0,203 0,223 0,242 0,257 0,270 0,282 0,292 0,302 0,310 0,314 0,317 0,323 0,330 0,334 0,338 0,343 0,348 0,353 0,359 0,365 0,372 0,380 0,388 0,396 0,403
0,017 0,016 0,Ql6 0,016 0,Ql6 0,016 0,Ql6 0,016 0,016 0,Ql8 0,018 0,Ql8 0,018 0,019 0,020 0,023 0,024 0,026 0,030 0,035 0,043 0,056 0,074 0,097 0,128 0,166 0,210 0,257 0,305 0,354 0,401 0,446 0,485 0,520 0,551 0,577 0,599 0,618 0,633 0,645 0,656 0,666 0,674 0,680 0,686 0,691 0,694 0,697 0,700 0,702
0,701 0,717 0,729 0,736 0,742 0,745 0,747 0,748 0,748 0,748 0,748 0,748 0,748 0,748 0,748 0,747 0,747 0,747 0,747 0,747 0,747 0,747 0,746 0,746 0,746 0,745 0,744 0,743 0,744 0,745 0,748 0,750 0,750 0,749 0,748 0,748 0,747 0,747 0,747 0,747 0,746 0,746 0,746 0,746 0,745 0,745 0,745 0,745 0,745 0,745
0,112 0,106 0,101 0,098 0,095 0,093 0,090 0,089 0,087 0,086 0,085 0,084 0,084 0,084 0,084 0,085 0,087 0,092 0,096 0,102 0,110 0,123 0,137 0,152 0,169 0,188 0,207 0,226 0,243 0,260 0,277 0,294 0,310 0,325 0,339 0,353 0,366 0,379 0,390 0,399 0,408 0,416 0,422 0,428 0,434 0,439 0,444 0,448 0,451 0,454
fJIasa 20
HCTOqHHKH IiEJIOrO CBETA HA OCHOBE CBETO,L{HO,L{OB no Mepe rrOBbIlIIeHIU! 3
(SSL).
CBeTo.n.Ho.n.bI -
TBep.n.oTeJIbHOe HJIH
MOHoxpOMaTHqeCKHe HC-
TOqHHKH CBen, o.n.HaKO Ha HX OCHOBe M02KHO C03.n.aBaTb HCTOqHHKH 6eJIoro CBeTa.
B
3TOH rJIaBe
6y.n.YT paccMoTpeHbI crroco6bI rrOJIyqeHHf.I 6eJIoro
CBeTa rrpH rrOMOIII.H cBeTo.n.Ho.n.OB, a B CJIe.n.YIOIII.eH -
BorrpocbI c03.n.aHHf.I
HCTOqHHKOB 6eJIoro cBeT~ Ha OCHOBe cBeTo.n.Ho.n.OB H MaTepHaJIOB, crroc06HbIX rrpeo6pa30BbIBaTb .n.JIHHbI BOJIH H3JIyqeHHH. B pa60Te (Bergh et aI.,
2001)
rro.n.P06HO o6cY2K.n.aIOTcf.I rrepcrreKTHBbI rrpHMeHeHHf.I TBep.n.oTeJIbHbIX
OCBeTHTeJIbHbIX rrpH6opoB, a B KHHre (Zukauskas et aI.,
2002)
paccMaTpH-
BaIOTCf.I TeXHOJIOmqeCKHe acrreKTbI HX c03.n.aHHf.I I). )lJIf.I HCrrOJIb30BaHHf.I B CHCTeMax OCBeIII.eHHf.I HCTOqHHKH .n.OJI2KHbI o6JIa.n.aTb CJIe.n.YIOIII.HMH CBoHcTBaMH: BbICOKOH 3
20.1. C03AaHHe 6eJIoro CBeTa IIpH IIOMO~H CBeTOAHOAOB qeJIOBeqeCKHH rJIa3 BocrrpHHHMaeT CBeT KaK
6e.l/.blU,
eCJIH Bce TpH
rpyrrrrbI peII.errTopoB ero CeTqaTKH B036Y2K.n.eHbI B orrpe.n.eJIeHHOM COOTHOlIIeHHH. Koop.n.HHaTbI II.BeTHOCTH 6eJIoro CBeTa Haxo.n.f.lTCf.I B 06JIaCTH, pacrrOJI02KeHHOH B II.eHTpe II.BeTOBOH .n.HarpaMMbl. nOJIyqHTb 6eJIbIH CBeT M02KHO Ha OCHOBe 60JIbiliOrO qHCJIa crreKTpoB H3JIyqeHHf.I. CYIII.eCTByeT HeCKOJIbKO crroco6oB C03.n.aHHf.I 6eJIoro CBeTa rrpH rroMOIII.H MOHoxpOMaTHqeCKHX H3JIyqaTeJIeH BH.n.HMoro crreKTpa. Ha pHC. rrOKa3aHbI TpH H3 HHX,
20.1
OCHOBaHHble Ha H3JIyqeHHH cBeTo.n.Ho.n.OB .n.ByX,
Tpex H qeTblpex II.BeTOB. I13JIyqaTeJIH xapaKTepH3YIOTCf.I CJIe.n.YIOIII.HMH rra-
I) eM. TaK)Ke 0630phJ
[1-3].
I'
Fit. 20. HcmoliliuKu 6eAo2o CBema lia OCIiOBe cBemOaUOaOB
396
20.2. C03aaliue 6eAo2o CBema npu nOMo/J1u aBYXI1Bemliblx ucmOliliUKOB
397
HaMH BOJIH HJIH ,lI.OrrOJIHHTeJIbHbIMH UBeTaMH. ,ll.Ba ,lI.OrrOJIHHTeJIbHbIX UBeTa,
~~ IA I! I"
CHHHftH *enTLlli
CBeroWi°)\hI
.
~=HH t!).~ ~ :=)\hI
14. A AI"
CMeIIIaHHbIX B orrpe,ll.eJIeHHOH: rrporropUHH, BocrrpHHHMalOTcH 'IeJIOBe'IeCKHM .lIBYXI.\BeTHLIH MOHOllHTHLlH
CBeTOWiO.ll
TpeXI.\BeTHLlH MOHOllHTHLIH
rJIa30M KaK 6eJIbIH: UBeT. Ha pHC.
1& Ii I"
20.2
rrpe,ll.CTaBJIeHbI ,lI.JIHHbI BOJIH KOMrrJIe-
MeHTapHbIx UBeTOB.
::; ~
~
660
c<.~
MKO D 65 CTaH,IIaPTHLlli Ha6mo.n:aTellL MKO 1931 CTaH,llaPTHLlli HCroqHHK
~
a
CBeroWiO.ll
0:1
oS ~
lSi
I
•I
KOMl1JleMeHTapHLle MJlHLI BOllH
:a 640 ~
I
•
+
620
Ii Ii
~ ~ ~
• I
600
Ii
~
.,!;;::; ., PHC.
S ::;
20.1.
TIpHHUHrr C03.n:aHHH O.n:HoKpHCTaJIbHbIX H MHoroKpHCTaJIbHbIX HCTO'IHHKOB 6eJIoro CBeTa Ha OCHOBe CBeTo.n:Ho.n:OB .n:ByX, Tpex H 'IeTblpex UBeTOB
:2
580
--- --- -.- .... .•...-" -
560
380
400
paMeTpaMH: cBeTOBOH: OT,lI.a'IeH:, cBeTOBOH: 3cpcpeKTHBHoCTblO H3JIY'IeHHH H UBeTOrrepe,ll.a'IeH:. ,ll.JIH MOmHbIX H3JIY'IaTeJIeH: BCer,ll.a )KeJIaTeJIbHO HMeTb BbICOKHe 3Ha'IeHHH cBeTOBOH: OT,lI.a'IH H cBeTOBOH: 3cpcpeKTHBHoCTH H3JIY'IeHHH, TOr,ll.a KaK Tpe60BaHHH K HX UBeTOrrepe,ll.a'Ie orrpe,ll.eJIHIOTCH B OCHOBHOM 06JIaCTHMH rrpHMeHeHHH. BbIcoKHe HH,lI.eKCbI UBeTOrrepe,ll.a'IH, KaK rrpaBHJIO, Heo6xo,ll.HMbI B BbICOKOKa'IeCTBeHHbIX CHCTeMax OCBemeHHH, HCrrOJIb3yeMbIx B My3eHX, ,lI.OMaX, ocpHcax H CKJIa,ll.ax. TO'IHHKaM He rrpe,ll.bHBJIHIOTCH TaKHe CTpome Tpe60BaHHH rro UBeTOrrepe,ll.a-
A
B CJIy'Iae OCBemeHHH 3HaKOB, BbIBeCOK, pa3JIH'IHbIX YKa3aTeJIeH: H T. rr.
3Ha'IeHHH K03cpCPHUHeHToB UBeTOrrepe,ll.a'IH CBeTOBbIX HCTO'IHHKOB H BOBce HeBa)KHbl.
460 A"
480
500
HM
PHC. 20.2 . .lI.JIHHbI BOJIH KOMrrJIeMeHTapHblx MOHoxpOMaTH'IeCKHX HCTO'IHHKOB, BOCrrpHHHMaeMblx 'IeJIOBe'IeCKHM rJIa30M rrpH CMeIIIeHHH B orrpe.n:eJIeHHOM COOTHOIIIeHHH KaK 6eJIbIH CBeT (Wyszecki, Stiles, 1982) B Ta6JI.
20.1
rrpHBe,ll.eHbI 3Ha'IeHHH MOHoxpOMaTH'IeCKHX KOMrrJIeMeHTap-
HbIX ,lI.JIHH BOJIH. TaM )Ke ,lI.aHbI COOTHOIIIeHHH HHTeHcHBHOCTeH: H3JIY'IeHHH:, COBrra,ll.aIOT C KOOp,ll.HHaTaMH CTaH,lI.apTHOro HCTO'IHHKa CBeTa HaTbI UBeTHocTH OCBeTHTeJIH D65: X065 Stiles,
D65 .
= 0,3138, YOS5 = 0,3310
KOOP,ll.H-
(Wyszecki,
1982)
Terrepb rrpOaHaJIH3HpyeM CBeTOBYIO 3cpcpeKTHBHoCTb HCTO'IHHKa C ,lI.BYMH KOMrrJIeMeHTapHbIMH crreKTpaJIbHbIMH JIHHHHMH. C'IHTaeM, 'ITO H3-3a
I1PH BbI60pe HCTO'IHHKa 6eJIoro CBeTa BCer,ll.a rrpHXO,ll.HTCH HCKaTb KOMrrpOMHCC Me)K,lI.y ero UBeTOrrepe,ll.a'IeH: H CBeTOBOH: 3cpcpeKTHBHoCTblO H3JIY'IeHHH. ,ll.ByxUBeTHbIe HCTO'IHHKH 6eJIoro CBeTa, KaK rrpaBHJIO, HMelOT caMbIe BbICOKHe 3Ha'IeHHH CBeTOBOH: 3cpcpeKTHBHoCTH, HO rrpH 3TOM HaHXy,ll.IIIylO UBeTOrrepe,ll.a'IY. TpexUBeTHbIe H3JIY'IaTeJIH 06JIa,ll.a1OT rrpHeMJIeMbIMH rrapaMeTpaMH UBeTOrrepe,ll.a'IH (CRI CBeTOBOH: 3cpcpeKTHBHoCTH (6oJIee
300
> 80)
H Cpe,ll.HHMH rrOKa3aTeJIHMH
JIM/BT). I1H,lI.eKCbI UBeTOrrepe,ll.a'IH
'IeTbIpeXUBeTHbIX HCTO'IHHKOB 6eJIoro CBeTa MoryT 6bITb 60JIbIIIe
20.2.
440
Tpe6yeMbIx ,lI.JIH rrOJIY'IeHHH H3JIY'IeHHH, KOOp,ll.HHaTbI UBeTHocTH KOToporo
I1PH OCBemeHHH YJIHU, rrapKoBoK, JIeCTHH'IHbIX rrpOJIeTOB H T. rr. K HC'Ie.
420
KopOTKaJI .ll:llHHa BOllHLI
90.
C03,II.aHHe 6eJIoro CBeTa IIpH IIOMOIIJ;H ,II.BYXII.BeTHbIX HCTOQHHKOB
TerrJIOBOrO paCIIIHpeHHH 3HepreTH'IeCKaH IIIHpHHa JIHHHH:
b..E
paBHa HX
rrOJIHOH: IIIHpHHe Ha rrOJIOBHHe HHTeHCHBHOCTH H3JIY'IeHHH. 9KcrrepHMeHTaJIbHO 6bIJIO YCTaHOBJIeHO, 'ITO B TBep,ll.OM paCTBope IrrGaN rrpH KOMHaTHOH: TeMrrepaType 3HepreTH'IeCKaH IIIHpHHa crreKTpaJIbHOH: JIHHHH COCTaBJIHeT
2-10 kT
(rrpH
300
K
kT = 25,9
b..E
M3B). I1pe,ll.rrOJIaraeTCH, 'ITO
o6e JIHHHH H3JIY'IeHHH xapaKTepH3YlOTCH HOpMaJIbHbIM pacrrpe,ll.eJIeHHeM
(pacnpedeJleliUeM Faycca),
rro3ToMY crreKTpaJIbHYIO rrJIOTHOICTb MOmHOCTH
pe3YJIbTHpYlOmero H3JIY'IeHHH MO)KHO orrHcaTb ypaBHeHHeM )
P()..)=p1 _ 0"1
1 _1(>'->'2)2 , 1_e- 1(>._>.\)2 2 +P2 - - e 2 0"2 0"\
..,f2;i
(20.1)
0"2..,f2;i
OeJIbIH: CBeT MO)KHO rrOJIY'IHTb HeCKOJIbKHMH crroco6aMH. O,ll.HH H3 HHX 3aKJIIO'IaeTCH B CMeIIIeHHH H3JIY'IeHHH ,lI.ByX HCTO'IHHKOB, 06JIa,ll.alOmHX Y3KHMH crreKTpaJIbHbIMH JIHHHHMH, Ha3bIBaeMbIMH KOMrrJIeMeHTapHbIMH ,lI.JIH-
1) PeaJIbHble crreKTpbI H3JIY'IeHHH CBeTo.n:Ho.n:OB Ha OCHOBe IrrGaN 3aMeTHO OTJIH'IaIOTCH OT pacrrpe.n:eJIeHHH [aycca [4, 5].
D/,. 20. HCmOttHUKu 6eJloeo CBema Ha OCHOBe cBemOaUOaOB
398
T a 6 JI H U a 20.1.
20.2. CoaaaHue 6eJloeo CBema npu nOMoll1u aByx~BemHbtX UCmOttHUKOB
,llJlHHbI BOJIH MOHoxpOMaTHqeCKHX KOMTIJleMeHTapHblx UBeTOB,
D65 , 1931
CMeIIIeHHe KOTOPblX ,ZJ;aeT CBeT cTaH,ZJ;apTHoro HCTOqHHKa MKO MblH: CTaH,ZJ;apTHblM Ha6J1IO,ZJ;aTeJleM MKO
KOMTIJleMeHTapHble ,ZJ;JlHHbl BOJlH, HM
OTHOIIIeHHe HHTeHCHBHOCTeH: H3J1yqeHHH:
KOMTIJleMeHTapHble ,ZJ;JlHHbl BOJlH, HM
,ll;B)'XWleTIIDIil HCTO'lHllK
BOCTIpHHHMae-
OTHoIIIeHHe HHTeHCHBHOCTeH:
.,/"I
A2
P(A2)/P(Al)
Al
A2
P(A2)/P(Al)
380
560,9
0,000642
460
565,9
1,53
390
560,9
0,00955
470
570,4
1,09
400
561,1
0,0785
475
575,5
0,812
410
561,3
0,356
480
584,6
0,562
420
561,7
0,891
482
591,1
0,482
430
562,2
1,42
484
602,1
0,440
440
562,9
1,79
485
611,3
0,457
450
564,0
1,79
486
629,6
0,668
,-....;::.
"t~
~~ lOkT
;-7fj V
7
II
;>"1
PHC.
20.3.
1
i
400
]..,2
1
1I
V
".
IA AI ", 1-'
V/-
jW
380
I
M~ ./"'-"'-l.~
"~~kT
M = 2kT
H3J1yqeHHH:
Al
!-
II ~~'-I~l
6enom CBeTa T=300K kT= 259 M3B
1/+ .......... -+-+ [
420
I 440
460
586 584 582 580 578 576 574 572 570 568 566 564 562 560
399
~ «'N
~
:= ==
~
(.)
:=
80
~""
:ll ==
a '"'"
== :=
~
480
PaCqeTHble 3aBHCHMOCTH cBeTOBOH: 9ljlljleKTHBHoCTH H3J1yqeHHlI ,ZJ;ByX-
UBeTHoro HCTOQHHKa 6eJloro CBeTa (c Koop,ZJ;HHaTaMH UBeTHOCTH, cooTBeTcTBYIOIUH-
D65 ) OT ,ZJ;JlHHbI BOJlHbl TIepBOrO HCTOQHHKa ,ZJ;JllI JlHHHH: pa3HOH: 9HepreTHQeCKOH: IIIHpHHbl. ITpHBe,ZJ;e-
MH TIOJlO:lKeHHIO Ha UBeTOBOH: ,ZJ;HarpaMMe cTaH,ZJ;apTHoro H3J1YQaTeJlH
PI
r,ll.e
11
P2 -
OIITl1qeCKl1e MOIll.HOCTI1 ,lI.ByX JII1HI1H 113JIyqeHI1H, )'1 11
>'2 -
,lI.JII1HbI BOJIH III1KOB 113JIyqeHI1H. CTaH,lI.apTHOe OTKJIOHeHl1e 0" OIIpe,ll.eJIHeTCH
Hbl 3HaQeHHlI KOMTIJleMeHTapHblx ,ZJ;JlHH BOJIH BToporo HCTOQHHKa
(Li
et aI.,
2003)
OTHOCI1TeJIbHO IIOJIHOH UlHpl1HbI JII1HI1I1 Ha IIOJIOBI1He I1HTeHCI1BHOCTI1 CIIeKTpa 113JIyqeHI1H
CBeTO,ll.110,ll. 6eJIoro CBeQeHI1H C aKTI1BHOH 06JIaCTblO B BI1,l1.e O,ll.HOH KBaHTO-
.6.>.: 0"=
LU b.A = --. 2v21n2 2,355
BOH HMbI, JIerHpOBaHHoH IIpl1MeCHMI1 ,lI.ByX TI1IIOB (20.2)
II.I1HKOM 11 KpeMHl1eM.
B TaKOM CBeTO,ll.110,ll.e 113JIYQeHHe CI1HerO II.BeTa CPopMl1pyeTcH B KBaHToBoH HMe BCJIe,ll.CTBl1e Me2K30HHbIX IIepeXO,ll.OB, B TO BpeMH KaK 2KeJITOBaTOe 113-
.llJII1HbI BOJIH MaKcI1MYMOBI13JIyqeHI1H
>'1
11
>'2
BbI611palOTCH 113 Ta6JI. 20.1.
JIYQeHl1e B03HI1KaeT 113-3a IIepeXO,ll.OB Me2K,lI.y ,lI.OHOPHbIMI1 11 aKII.eIITOpHbIMI1
113 Hee 2Ke HaXO,ll.HT Tpe6yeMoe OTHOI1leHl1e MOIll.HOCTeH ,lI.ByX I1CTOqHI1KOB
ypOBHHMI1
CBeTa. XOTH IIpl1Be,ll.eHHble 3HaqeHI1H COOTBeTCTBYlOT CTporo MOHOXpOMaTI1-
I1ll1pOKl1e CIIeKTpaJIbHble JII1HI1H, 9TI1 CBeTO,ll.110,ll.bI OTJII1QalOTCH XOpOI1leH
qeCKI1M I1CTOqHI1KaM
(.6.>'
(D-A-IIepeXO,ll.bI).
nOCKOJIbKY D-A-IIepeXO,ll.aM COOTBeTCTBYlOT
0), 9TI1 ,lI.aHHble M02KHO I1CIIOJIb30BaTb B Ka-
II.BeTOIIepe,ll.aQeH . .llaJIMaCCO IIpO,ll.eMOHCTpl1pOBaJI ,lI.BYXII.BeTHbIH CBeTO,ll.110,ll.,
qeCTBe XopOI1lero IIpI16JII12KeHI1H ,lI.JIH I1CTOQHI1KOB C YMepeHHOH I1lI1PI1HOH
COCTOHIlI.I1H 113 ,lI.ByX 6JII13KO paCIIOJI02KeHHbIX aKTI1BHbIX 06JIaCTeH InGaN
---t
CIIeKTpaJIbHbIX JII1HI1H, K KOTOPbIM OTHOCHTCH CBeTO,ll.110,ll.bl.
BHYTpl1p-n-IIepeXO,ll.a. B HeM Ha6JIlO,lI.aeTCH CI1JIbHaH 3aBHCI1MOCTb CIIeKTpa
Ha Pl1c. 20.3 IIOKa3aHa CBeTOBaH 9cpcpeKTI1BHOCTb 113JIYQeHI1H ,lI.BYXII.BeTHOro I1CTOQHI1Ka. BI1,l1.HO, QTO MaKCI1MaJIbHaH CBeTOBaH 9cpcpeKTI1BHOCTb 440 JIM/BT cooTBeTCTByeT ,lI.JIHHe BOJIHbI IIepBoro I1CTOQHI1Ka IIpl1
.6.E = 2kT.
>'1
= 445 HM
BblcoKl1e 3HaQeHI1H CBeTOBOH 9cpcpeKTI1BHOCTI1 113JIYQeHI1H
TaKI1X IIpl160pOB YKa3bIBalOT Ha I1X orpoMHbIH IIOTeHII.HaJI. B 2002;
pa60Tax (Guo et aI.,
Li
1999; Sheu et aI., 2002; Dalmasso et aI.,
et aI., 2003) OIII1CaHbI I1CTOQHI1KI1 6eJIoro CBeTa, peaJII130BaHHble
113JIYQeHI1H OT TOKa I1H2KeKII.I1I1. JII1 11 ,lI.p.
(Li
et aI., 2003) co06Il1.I1JII1 0 C03,l1.aHI1I1 CBeTO,ll.110,ll.a Ha OCHOBe
InGaN C ,lI.ByMH aKTI1BHbIMI1 06JIaCTHMI1, pa3,l1.eJIeHHbIMI1 TOHKI1M CJIOeM GaN.
PaCQeTHble ,lI.JII1HbI
BOJIH
113JIYQeHI1H ,lI.aHHOrO
CBeTO,ll.110,ll.a paBHbI
465 HM 11 525 HM, ero CTpyKTypa IIOKa3aHa Ha pl1c.20.4. Ha PI1C. 20.5,
a
IIOKa3aH CIIeKTp CPOTOJIlOMI1HeCII.eHII.1111 ,lI.BYXII.BeTHOro
CBeTO,ll.110,ll.a. Ha cneKTpe BbI,lI.eJIHlOTCH ,lI.Be 06JIaCTI1 113JIYQeHI1H, II.eHTpy
Ha IIpI1HII.I1IIe CMeI1leHI1H ,lI.ByX KOMIIJIeMeHTapHblx II.BeTOB. O,ll.I1H 113 HI1X
O,ll.HOH 113 KOTOPbIX COOTBeTCTByeT ,lI.JII1Ha BOJIHbI, IIpl16JII1311TeJIbHO paBHaH
6bIJI IIOCTpoeH Ha OCHOBe ,lI.ByX CBeTO,ll.110,ll.OB, KOTopble 113JIYQaJII1 CBeT Ha
465 HM, a
,lI.JII1HaX BOJIH rOJIy60H 11 2KeJITOH 06JIaCTHX CIIeKTpa. B ,lI.pyroM HCTOQHI1Ke,
113MeHeHI111 IIJIOTHOCTI1 B036Y2K,lI.eHI1H IIOJI02KeHI1H ,lI.ByX III1KOB OCTalOTCH
II.eHTp ,lI.pyroH npI1XO,ll.I1TCH Ha ,lI.JII1Hy BOJIHbI 525 HM.
npl1
IIpe,ll.CTaBJIeHHOM [yo, ,lI.JIH IIOJIYQeHI1H 6eJIoro CBeTa I1CIIOJIb30BaJICH CBe-
HeI13MeHHbIMI1. O,ll.HaKO IIpl1 113MeHeHI111 IIJIOTHOCTI1 MOIll.HOCTI1 JIa3epHO-
TO,ll.110,ll. CI1HerO CBeQeHI1H Ha OCHOBe GaN, pa60TalOIlI.I1H B IIape C IIOJIY-
ro B036Y2K,lI.eHI1H MeHHeTCH OTHOI1leHHe I1HTeHCI1BHOCTeH 113JIYQeHHH ,lI.ByX
IIPOBO,ll.HI1KOBbIM IIpe06pa30BaTeJIeM ,lI.JII1H BOJIH AlinGaP. Illy peaJII130BaJI
III1KOB, QTO M02KeT 6bITb 06'bHCHeHO KOHKypeHII.l1eH ,lI.ByX KaHaJIOB peKOM-
FA. 20. !1cmO'lHUKU 6eAoeo CBema Ha OCHOBe cBemOaUOaOB
400
OMH'leCKHH KOHTaIcr
NilAu
COSaaHue 6eAoeo CBema C nOJoWUI,blO mpex UCmO'lHUKOB
401
M02KeT 6bITb CBH3aHO C 60JIee BbICOKHM KBaHTOBbIM BbIXO,n:OM B «CHHeH~
KOHTaIcrHbIH CJIoii CJIoii
20.3.
A1GaN p-THna (20 HM), 6JIoKHpyromHii 3JIeKTPoHbI
KBaHTOBOH HMe rro CpaBHeHHIO C «3eJIeHOH». K
TOMY 2Ke ,n:blpKH HH2KeK-
THPYIOTCH H3 06JIaCTH C 60JIee BbICOKOH 3HepmeH (CO CTOPOHbI «CHHeH» KBaHTOBOH HMbI), B TO BpeMH KaK 3JIeKTpOHbI HH2KeKTHpYIOTCH CO CTOPOHbI
«3eJIeHOH~ KBaHTOBOH HMbI. nOCKOJIbKY ,n:blpKH 06JIa,n:aIOT 60JIee HH3KOH rrO,n:BH2KHOCTbIO H 60JIbilieH 3
OMH'leCKHH KOHTaIcr
,n:06paTbCH ,n:0 «3eJIeHOH~ KBaHTOBOH HMbI, qTO TaK2Ke 06bHCHHeT 60JIee
TilAlINilAu
BbICOKYIO HHTeHCHBHOCTb CHHerO H3JIyqeHHH.
CJIoii
B
06Pa30BaHHlI 3ap0.l\bIIIIeii
CJIyqae 3JIeKTpOJIIOMHHeClI.eHlI.HH ,n:blpKH HH2KeKTHpYIOTCH B 06JIaCTb
«CHHHX» KBaHTOBbIX HM, a 3JIeKTpOHbI -
canIPIfP (0001)
B 06JIaCTb «3eJIeHbIX». 9TOT crro-
c06 CHJIbHO OTJIHqaeTCH OT CJIyqaH OrrTHqeCKOrO B036Y2K,n:eHHH, Kor,n:a 06a THrra HOCHTeJIeH HH2KeKTHpYIOTCH C ,n:ByX CTOPOH aKTHBHOH 06JIaCTH. ,lI.JIH
PHc.20.4. CTpYKTypa ,n:Byx~BeTHoro CBeTo,n:Ho,n:a C ,n:BYMH aKTHBHbIMH 06JIaCTHMH (U et ai., 2003)
paCCMaTpHBaeMOH 3,n:eCb CTpyKTYPbI ,n:JIHHa OIITHqeCKOrO rrOrJIOmeHHH 60JIbIIIe paCCTOHHHH Me2K,n:y aKTHBHbIMH 06JIaCTHMH H rrOBepXHOCTbIO. I1MeHHo 3TO M02KeT 06bHCHHTb OTMeqeHHbIe pa3JIHqHH Me2K,n:y
6HHalI.HH
(Li
et aI.,
2003).
ECJIH rrpeHe6pe% 6e3bI3JIyqaTeJIbHOH peKOM-
eH H 3JIeKTpOJIIOMHHeClI.eHlI.HeH
6HHalI.HeH, M02KHO CqHTaTb, qTO ,n:JIH 3JIeKTpOHa, Haxo,n:HmerOCH B «CHHeH»
(Li
et aI.,
2003).
Ha BOJIbTaMrrepHblx xapaKTepHcTHKax CBeTo,n:Ho,n:OB C ,n:BOHHOH aKTHB-
KBaHTOBOH HMe, cymecTByeT TOJIbKO ,n:Ba Bblxo,n:a: JIH60 cOBepIIIHTb rrpHMoH
HOH 06JIaCTbIO, CHHTbIX rrpH KOMHaTHOH TeMrrepaType, HarrpH2KeHHe rrpHMoro
Me2K30HHbIH H3JIyqaTeJIbHbIH rrepexo,n: B rrpe,n:eJIax 3TOH 2Ke HMbI, JIH60 3a
CMemeHHH COCTaBJIHeT MeHee
CqeT TYHHeJIbHOrO
3
rrepeMeCTHTbCH B «3eJIeHyIO» KBaHTOBYIO HMy
rv
100
3,0 B,
qTO rrpH MaJIbIX ,n:HaMeTpax KOHTaKTOB,
MKM, cBH,n:eTeJIbCTByeT 0 BbICOKOM KaqeCTBe OMHqeCKHX KOHTaKTOB.
H Y2Ke TaM COBepIIIHTb aKT H3JIyqaTeJIbHOH peKOM6HHalI.HH. 9JIeKTpOHbI H
YBeJIHqeHHe HarrpH2KeHHH rrpHMoro CMemeHHH rrpH HCrrOJIb30BaHHH KOHTaK-
,n:blpKH HMeIOT B03M02KHOCTb TYHHeJIHpOBaTb H3 ~CHHeH~ KBaHTOBOH HMbI
TOB 60JIbilierO ,n:HaMeTpa CBH3aHO C POCTOM rra,n:eHHH HarrpH2KeHHH B 6y-
B «3eJIeHyIO»
H B3aHMo,n:eHCTBOBaTb TaM C HcrrYCKaHHeM
KO H3-3a 60JIee BbICOKHX 3HepmH B «CHHeH» rrorraB B «3eJIeHyIO»
KBaHTOBOH HMe HOCHTeJIH,
KBaHTOBYIO HMY, He MoryT TYHHeJIHpOBaTb 06paTHO
A;
a BeJIHqHHa H36bITOqHOrO corrpOTHBJIeHHH 6y
rrporrOplI.HoHaJIbHa
B CHHHIO.
A-I/2. B
,n:orrOJIHeHHe K 3TOMY
3
IIIHypOBaHHH
TOKa, oc06eHHo cymecTBeHHbIH B CJIyqae KOHTaKTOB 60JIbiliOrO ,n:HaMeTpa, 1,4
a
rrpHBo,n:HT K HepaBHoMepHoMY pacTeKaHHIO HH2KeKlI.HOHHOro TOKa, qTO T02Ke
CBeTOl\HOI\ C 1\B)'MlI 3KlliBHblMH 06JIaCTIIMH
BbI3bIBaeT POCT HarrpH2KeHHH rrpHMoro CMemeHHH.
~ 1,2 T=300K He-CdJIa3ep '" 1,0 nnOTHOCTL
~ ge 5 ! 0,8
'~"
"~
MOII(HOCTH
10 =
= 10 x 10-ND
20.3.
8,3 KBT/CM'
C03AaHHe 6eJIoro CBeTa C nOMOID;blO Tpex pa3HOII.BeTHbIx HCTOIIHHKOB
0,6
s: l!i
Ei 0,4
i
KaK yrroMHHaJIOCb paHee, rrOJIyqHTb BbICOKOKaqeCTBeHHble HCTOqHHKH
0,2
6eJIoro CBeTa Ha rrpHHlI.Hrre a,n:,n:HTHBHOrO CMeIIIeHHH ,n:ByX KOMrrJIeMeHTap-
0,0 L-.J.-..l.--,-...L.-L..-L..-L..-L--'--L--I.---l 300 350 400 450 500 550 600 .LJ:miHa BOJlHhl
A.,
HbIX lI.BeTOB, rrpHrO,n:Hble ,n:JIH rrpHMeHeHHH B OCBeTHTeJIbHbIX CHCTeMaX,
.LJ:neea BOJlHhl A.,
HM
HM
rrpaKTHqeCKH HeB03M02KHO. n03TOMY BCe BbICOKOKaqeCTBeHHble HCTOqHHKH 6eJIoro CBeTa rrOCTpoeHbI, KaK rrpaBHJIO, Ha rrpHHlI.Hrre CMeIIIeHHH Tpex
PHC. 20.5. CneKTpbI
(HJIH ,n:a2Ke 60JIbilierO KOJIHqeCTBa) OCHOBHbIX lI.BeTOB.
1971)
B
pa60Te (Thornton,
6bIJI rro,n:p06HO orrHcaH HCTOqHHK 6eJIoro CBeTa, peaJIH30BaHHbIH Ha
OCHOBe CMeIIIeHHH Tpex ,n:HCKpeTHbIX crreKTpaJIbHbIX JIHHHH, rrHKH KOTOPbIX Ha pHC.
20.5,6
rrpe,n:CTaBJIeHbI crreKTpbI 3JIeKTpOJIIOMHHeClI.eHlI.HH pac-
CMaTpHBaeMoro CBeTo,n:Ho,n:a.
B
HHX OTqeTJIHBO pa3JIHqHMbI ,n:Ba rrHKa H3-
JIyqeHHH C MaKcHMYMaMH Ha ,n:JIHHaX BOJIH
450
HM H
520
rrpHxo,n:HJIHCb Ha ,n:JIHHbI BOJIH, rrpH6JIH3HTeJIbHO paBHble H
610
HM. nHK CHHe-
ro H3JIyqeHHH 3HaqHTeJIbHO HHTeHCHBHee rrHKa 3eJIeHOrO H3JIyqeHHH, qTO
450
HM,
540
HM
HM 1). TopHTOH rrpOBeJI 3KcrrepHMeHTbI C yqaCTHeM IIIeCTH,n:eCHTH
I) CM. npHopHTeTHYIO pa60TY [6].
FA. 20. HcmO'lHUKU 6eAoeo CBema Ha OCHOBe cBemOaUOaOB
402
20.3. CoaaaHue 6eAoeo CBema
C
nOMoUfblO mpex UCmO'lHUKOB
403
HM TpeXLl.BeTHoro qe Jl OBeK , KOTopble OLl.eHHBaJIH KaqeCTBO H3rOTOBJIeHHOrO u H3J1yqaTeJlH no nepe.ll.aqe Ll.BeTa MHca, OBOILl.eH, Ll.BeTOB H qeJIOBeqeCKOrO JlHua. OLl.eHKH 6blJIH OT «OqeHb XOPOIIIO» .lI.O «OTJIHqHO». OH TaK>Ke npHIIIeJI K BbIBO.ll.Y, qTO npH nocTpoeHHH KaqeCTBeHHblX TpeXLl.BeTHblx HCTOqHHKOB 6eJIoro cBeTa, 06JIa.ll.aIOILl.HX BbICOKHMH HH.lI.eKCaMH Ll.BeTOnepe.ll.aqH, CJIe.ll.yeT H36eraTb HCnOJIb30BaHHH H3JIyqeHHH C .lI.JIHHaMH BOJIH
500
HM H
580
HM.
XOTH TOPHTOH nOKa3aJI B03MO)KHOCTb nOCTpoeHHH BbICOKOKaqeCTBeHHblX TpeXLl.BeTHblx HCTOqHHKOB 6eJIoro CBeTa, Ka)K.lI.aH cneKTpaJIbHaH JIHHHH , HCnOJIb30BaHHaH B ero
OCBeTHTeJIe 06JIa.ll.aJIa .lI.OBOJIbHO 60JIbiliOH
IIIHpHHOH. TaK, nOJIHaH IIIHpHHa JIHHHH Ha nOJIOBHHe HHTeHCHBHOCTH H3JIyqeHHH npHMeHHeMblx HM HCTOqHHKOB C JIIOMHHOCPOPM npeBblIIIaJIa
50
HM.
KaK H3BeCTHO, nOJIynpOBO.ll.HHKOBble MaTepHaJIbl xapaKTepH3YIOTCH ropa3.l1.0 60JIee Y3KHMH cneKTpaJIbHbIMH JIHHHHMH no cpaBHeHHIO C JIIOMHHocpopaMH, THnHqHaH HX IIIHpHHa, KaK npaBHJIO, MeHbilie Ha pHC.
20.6, a
50
455
HM,
525
HM H
605
HM. 3KcnepHMeHTaJIbHO 6blJIO
YCTaHOBJIeHO, qTO nOJIHaH 3HepreTHqeCKaH IIIHpHHa cneKTpaJIbHOH JIHHHH Ha
nOJIOBHHe
HHTeHCHBHOCTH
H3JIyqeHHH
npH
KOMHaTHOH
TeMnepaType
520
~a BOJlHhl
nOKa3aH cneKTp H3JIyqeHHH TpeXLl.BeTHOro HCTOqHHKa
6eJIoro CBeTa, H3roTOBJIeHHOrO H3 CBeTO.ll.HO.ll.OB Tpex THnOB, H3JIyqaIOILl.HX Ha .lI.JIHHaX BOJIH
480
HM.
PHC.
20.6.
560
A,
600
640
HM
CrreKTp H3J1Y'leHHH TpexUBeTHoro HCTO'lHHKa 6eJloro CBeTa, COCTOHIUero
H3 CBeTO.l(HO.l(OB pa3Horo THrra,
C UBeToBoH TeMrrepaTYPoH
6500 K
(crrJlOIJIHall
JlHHHlI) Hero raYCCOBO rrpH6J1H)KeHHe (Ha OCHOBe HOpMaJlbHOrO pacrrpe.l(eJleHHlI). CBeTOBall OT.l(a'la HCTO'lHHKa paBHa
319
JlM/BT, HH.l(eKC UBeTOrrepe.l(a'lH
84 (a). <1>0-
Torpa
5,5kT, .lI.JIH 7,9kT, a .lI.JIH HCTOqHHKa OpaH)KeBOrO Ll.BeTa Ha OCHOBe AlinGaP - 2,5kT (kT = 25,25 M3B). 3HaqeHHe nOJIHOH IIIHpHHbI cneKTpaJIbHOH JIHHHH B e.ll.HHHLl.aX kT OqeHb
CHMMeTpHIO, rrpHMeHeHHH HecHMMeTpHqHOrO rayccOJ~a pacrrpe.ll.eJIeHHH .lI.JIH
nOJIe3HaH BeJIHqHHa, nOCKOJIbKY ee JIerKO cpaBHHBaTb C TepMHqeCKHM YIIIH-
Hero He Tpe6yeTCH.
(20 DC)
.lI.JIH HCTOqHHKa CHHero Ll.BeTa Ha OCHOBe InGaN paBHa
CBeTO.l(HO.l(OB
HCTOqHHKa 3eJIeHOrO Ll.BeTa Ha OCHOBe InGaN -
peHHeM JIHHHH H3JIyqeHHH nOJIynpOBO.ll.HHKa, paBHoro
1,8kT.
I1cnOJIb3YH
3HaqeHHH 3HepreTHqeCKOH IIIHpHHbl cneKTpaJIbHbIX JIHHHH, npHBe.ll.eHHble Ha pHC.
20.6,
Ha pHC.
20.6, 6
(6)
(Chhajed et aI.,
2005)
rrpHBe.ll.eHa cpoTorpacpHH HCTOqHHKa 6eJIoro CBeTa, co-
6paHHoro H3 60JIbiliOrO qHCJIa CBeTO.ll.HO.ll.OB. OTHoIIIeHHH MOILl.HOcTeH H3JIyqeHHH HCTOqHHKOB OpaH)KeBOrO, 3eJIeHOrO H CHHero CBeTa rrO.ll.6HpaIOTcH
H Bblpa)KeHHe
TaK, qTo6bI KOOp.ll.HHaTbI Ll.BeTHOCTH pe3YJIbTHpYIOILl.erO H3JIyqeHHH COBna.ll.a-
A, = LolA
>.? • AE = (>.., he.u
HM)2 •
1239,8
(~E
3B)
(20.3)
"
JIH C KOOp.ll.HHaTaMH Ll.BeTHOCTH a6COJIIOTHO qepHOrO TeJIa C Ll.BeTOBOH TeMrrepaTypoH
6500
K. TaKoH CBeTO.ll.HO.ll.HhlH HCTOqHHK 6eJIoro CBeTa xapaK-
TepH3yeTcH CJIe.ll.YIOILl.HMH rrapaMeTpaMH: JIIOMeH-3KBHBaJIeHT onpe.ll.eJIHM nOJIHYIO IIIHPHHY cneKTpaJIbHblX JIHHHH Ha rrOJIOBHHe HHTeHCHBHOCTH H3JIyqeHHH HCTOqHHKOB CHHero, 3eJIeHOrO H OpaH)KeBOrO Ll.BeTa
23,2
HM,
44,3
HM H
18,6
HM, COOTBeTCTBeHHO. TIPH 3TOM HCTOqHHK 3eJIeHO-
ro CBeTa 06JIa.ll.aeT caMOH IIIHPOKOH crreKTpaJIbHOH JIHHHeH, qTO MO)KeT 6bITb CBH3aHO C 60JIbiliOH KOHLl.eHTpaLl.HeH rrpHMeceH H 06pa30BaHHeM KBaHTOBbIX TOqeK InN B CJIoe InGaN C BblCOKHM cO.ll.ep)KaHHeM In. Ha pHC.
20.6.
TaK)Ke rrOKa3aHa arrnpOKCHMaLl.HH raYCCOBbIM pacrrpe.ll.e-
.lI.eJIeHHe .lI.OBOJIbHO XOPOiliO orrHCbIBaeT 3KcrrepHMeHTaJIbHble KpHBble. OTMeTHM, qTO HOpMaJIbHOe pacrrpe.ll.eJIeHHe (orrHcaHHoe paHee B 3TOH rJIaBe) cHMMeTpHqHO OTHOCHTeJIbHO MaKCHMaJIbHOH .lI.JIHHbI BOJIHbJ.
32
JIM/BT H HH.lI.eKC Ll.BeTOrrepe.ll.aqH
84
319
JIM/BT;
(Chhajed et aI.,
2005). CYlLl.ecTByeT 60JIbiliOe qHCJIO B03MO)KHbIX KOM6HHaLl.HH .lI.JIHH BOJIH H3JIyqeHHH, Ha OCHOBe KOTOPbIX MO)KHO peaJIH30BaTb TpeXLl.BeTHble HCTOqHHKH 6eJIoro CBeTa. O.ll.HaKO rrpH rrocTpoeHHH H3JIyqaTeJIeH C BbICOKHMH 3HaqeHHHMH CBeTOBOH 3cpcpeKTHBHoCTH H3JIyqeHHH CJIe.ll.yeT H36eraTb HC-
JIeHHeM 3KcrrepHMeHTaJIbHOrO crreKTpa H3JIyqeHHH. BH.lI.HO, qTO 3TO pacrrpe-
pUtf.1We eaYCCOBO pacnpeOe.lteHUe
CBeTOBaH OT.lI.aqa
HeCUMMem-
C qeTKO Bblpa)KeHHbIM XBOCTOM B 06JIa-
cm 60JIbIIIHX .lI.JIHH BOJIH, rrpHMeHHeTcH .lI.JIH JIIOMHHOCPOPOB (Ivey,
1963).
TIOCKOJIbKY pacrrpe.ll.eJIeHHe crreKTpaJIbHOH MOILl.HOCTH H3JIyqeHHH rroJIyrrpoBO.ll.HHKa rrpH rrocTpoeHHH 3aBHCHMOCTH OT .lI.JIHH BOJIH HMeIOT 3aMeTHYIO
rrOJIb30BaHHH HCTOqHHKOB CBeTa C .lI.JIHHaMH BOJIH, pacrrOJIO)KeHHbIMH Ha KpaHx BH.lI.HMOro .lI.Harra30Ha crreKTpa (T. e . .lI.aJIbHerO KpaCHoro H .lI.aJIbHerO cpHOJIeTOBOro H3JIyqeHHH). Ha pHC.
20.7
rrOKa3aHbI KOHTypHhle rpacpHKH
JIIOMeH-3KBHBaJIeHTOB H HH.lI.eKCOB Ll.BeTOrrepe.ll.aqH TpeXLl.BeTHoro HCTOqHHKa 6eJIoro CBeTa C Ll.BeTOBoH TeMrrepaTypoH
6500
K
.lI.JIH CJIyqaH, KOr.ll.a
rrOJIHaH 3HepreTHqeCKaH IIIHpHHa crreKTpaJIbHOH JIHHHH Ka)K.lI.OrO H3 Tpex H3JIyqeHHH Ha rrOJIOBHHe HHTeHCHBHOCTH crreKTpa paBHa
5kT.
BH.lI.HO, qTO
.lI.JIH nOJIyqeHHH BbICOKHX HH.lI.eKcOB Ll.BeTorrepe.ll.aqH caMbIMH rr0.ll.XO.ll.HILl.HMH HBJIHIOTCH .lI.JIHHbI BOJIH )"
=
455
HM,
A2
=
530
HM H
A3
=
605
HM.
D/,. 20.
404
Hcmotf,ltu/cu 6e./wzo CBema Ita OCHOBe cBemOaUOaOB
20.4.
TeMnepamYPHafl aaBUCUMocmb mpexlI,BemltblX ucmOtf,ltU/cOB
CYMMapHblti: HH,II;eKC Il.BeTOrrepe,ll;aqH ,ll;JIH HCTOqHHKa C TaKHMH ,ll;JIHHaMH
85, 20.7
BOJIH 6JIH30K 113 pHC.
a JIIOMeH-3KBHBaJIeHT rrpH 3TOM COCTaBJIHeT
320
JIM/BT.
CJIe,ll;yeT, qTO HH,II;eKC Il.BeTOrrepe,ll;aqH CHJIbHO 3aBHCHT OT
rrOJIO)KeHHH MaKcHMYMOB H3JIyqeHHH. HarrpHMep, rrpH H3MeHeHHH ,ll;JIHHbI
605 HM ,11;0 620 HM, HH,II;eKC Il.BeTO85 ,11;0 65. 113MeHeHHe ,ll;JIHHbI BOJIHbI MaKCHMYMa 3eJIeHOrO H3JIyqeHHH C 530 HM ,11;0 550 HM rrpHBO,ll;HT K YMeHbIIIeHHIO HH,II;eKCa Il.BeTOrrepe,ll;aqH ,11;0 3HaqeHHH MeHbIIIHX 60. Ha pHC. 20.8 rrpe,ll;CTaBJIeHbI KOHTypHble rpaqlHKH JIIOMeH-3KBHBaJIeHTa BOJIHbI rrHKa KpacHoro H3JIyqeHHH C rrepe,ll;aqH CHH)KaeTCH C
H HH,II;eKCa Il.BeTOrrepe,ll;aqH TpexIl.BeTHOro HCTOqHHKa 6eJIoro CBeTa C Il.BeTOBOH TeMrrepaTypoH
6500 K
,ll;JIH CJIyqaH, KOr,ll;a rrOJIHaH 3HepreTHqeCKaH
IIIHpHHa crreKTpaJIbHOH JIHHHH Ka)K,II;OrO HCTOqHHKa Ha rrOJIOBHHe HHTeHCHBHOCTH paBHa
8kT.
YIIIHpeHHe crreKTpaJIbHbIX JIHHHH H3JIyqeHHH Be,ll;eT
K rrOBblIIIeHHIO HH,II;eKCa Il.BeTOrrepe,ll;aqH. 113 rpaqlHKoB BH,II;HO, qTO HaH-
= 90-95) Al = 450-455
60JIbIIIHH HH,II;eKC Il.BeTOrrepe,ll;aqH (CRI ,ll;YIOIII.eH KOM6HHaIl.HH ,ll;JIHH BOJIH: H
A3 = 600-615
20.4.
rrOJIyqaeTCH HM,
rrpH CJIe-
A2 = 525-535
HM
HM.
TeMnepaTYPHaH 3aBHCHMOCTb TpexD;BeTHbIx
HCTOQHHKOB 6eJIoro CBeTa, C03AaHHbIX Ha OCHOBe CBeTOAHOAOB 113-3a cpaBHHTeJIbHO Y3Koro ,ll;Harra30Ha ,ll;JIHH BOJIH H3JIyqeHHH, rrpH KOTOPbIX B03MO)KHbI
BbICOKHe
HH,II;eKCbI
Il.BeTorrepe,ll;aqH,
Borrpoc 0
CTa-
6HJIbHOCTH xapaKTepHcTHK TpeXIl.BeTHblx HCTOqHHKOB 6eJIoro CBeTa rrpH H3MeHeHHH TeMrrepaTypbI
rrepeXO,ll;a
H OKpY)KaIOIII.eH Cpe,ll;bI CTaHOBHTCH
OqeHb OCTpblM. 113BecTHO, qTO MOIII.HOCTb H3JIyqeHHH
P,
,ll;JIHHa BOJIHbI
B MaKCHMYMe H3JIyqeHHH Apeak H IIIHpHHa crreKTpaJIbHOH JIHHHH
.6.A
3a-
BHCHT OT TeMrrepaTypbI, rrpH 3TOM Ka)K,II;aH H3 3TH X BeJIHqHH HMeeT CBOH TeMrrepaTypHbIH K03CPCPHIl.HeHT. TeMrrepaTYPHaH 3aBHCHMOCTb MOIII.HOCTH H3JIyqeHHH CBeTO,ll;HO,ll;OB OrrHCbIBaeTCH 3KCrrOHeHIl.HaJIbHOH CPYHKIl.HeH, B KOTOpyIO TaK)Ke BXO,ll;HT XapaKTepHCTHqeCKaH TeMrrepaTypa
P
=P
TI : 1300 K . exp
T-300 K TJ .
(20.4)
B pe3YJIbTaTe TaKOH 3aBHCHMOCTH rrpH H3MeHeHHH TeMrrepaTypbI MeHHIOTCH KOOp,ll;HHaTbI Il.BeTHOCTH HCTOqHHKa 6eJIoro CBeTa, C03,11;aHHOrO Ha OCHOBe CBeTO,ll;HO,ll;OB. PaCCMOTpHM HCTOqHHK 6eJIoro CBeTa, COCTOHIII.HH H3 Tpex THrrOB H3JIyqaTeJIeH: KpacHoro, 3eJIeHOrO H CHHero Il.BeTa. B
Ta6JI.
20.2
rrpHBe,ll;eHbI 3HaqeHHH TeMrrepaTypHbIX K03CPCPHIl.HeHTOB ,ll;JIHHbI BOJIHbI B MaKcHMYMe H3JIyqeHHH, IIIHpHHbI crreKTpaJIbHOH JIHHHH H MOIII.HOCTH H3JIYqeHHH, 3KcrrepHMeHTaJIbHO orrpe,ll;eJIeHHble ,ll;JIH CBeTO,ll;HO,ll;OB ,ll;aHHblX THrrOB (Chhajed et ai.,
2005).
~
«'" ::a § I:!l
. .I~--+T-t~!
405
406
20.4. TeMnepamYPHaR aa8UCUMocmb mpexl{8emHbtX ucmOliHUK08
FJL. 20. HcmoliHuKu 6eJL020 C8ema Ha OCH08e c8emOaUOa08
T a 6 JI If U a 20.2.
407
3KcIIeplfMeHTaJIbHble SHaqeHlflI TeMIIepaTypHblx K03
,n:JIIfHbI BOJIHbI B MaKclfMYMe IfSJIyqeHlflI, nIlfplfHbI cIIeKTpaJIbHOH JIIfHIfIf If MOIUHOCTIf IfSJIyqeHlflI CBeTo,n:lfo,n:OB CIfHero, SeJIeHOrO If KpacHoro CBeqeHlflI
ITapaMeTp
dApeak/ dT,
CIfHIfH
3eJIeHblH
KpacHbIH
CBeTo,n:IfO,n:
CBeTo,n:IfO,n:
CBeTo,n:IfO,n:
0,0389
0,0308
0,156
0,0466
0,0625
0,181
493
379
209
HM;oC
dflApeak/ dT,
HM;oC
Tcharacteristic, K
.lI.aJIee 6y,n:eM C1JHTaTb, 1JTO BeJIH1JHHa TOKa, TeKymero 1Jepe3 CBeTo,n:HO,n:bI KpacHoro, 3eJIeHOrO H CHHero CBe1JeHHfI, BbI6HpaeTcfI TaK, 1JTo6bI rrpH TeMrrepaType
20 DC
Koop,n:HHaTbI UBeTHOCTH pe3YJIbTHpYIOmero H3JIY1JeHHfI
II.BeTHOCTH HCT01JHHKa D6S . Ha pHC. 20.9 rrOKa3aH crreKTp H3JIYLJeHHfI TaKoro TpeXII.BeTHOro HCTOLJHHKa 6eJIoro CBeTa.
COBrra,n:aJIH C Koop,n:HHaTaMH
r! rI:
1,0
,I
if
20°C (Tee - 6500 K)
50°C (Tee = 6900 K~ - - 80°C (Tee = 7200 K)
I 1\
I
inG~BA~GJ,
!
~A
!
/.';\.
iL '\
II J
0,0 400
.I.
440
PIfC.
20.9.
i ~
J
480
I
"
\
~
520
):{Jnrna BOJIHhl
, I
"
560
A.,
~t
600
~
,.
'\
h I\.\~ 640
HM
CIIeKTpbl IfSJIyqeHlflI TpexUBeTHoro CBeTo,n:lfo,n:Horo IfCTOqHIfKa 6eJIoro
CBeTa IIPIf paSHbIX TeMIIepaTypax oKpY.lKalOIUeH cpe,n:b1 (HarpeB IIepexo,n:a s,n:eCb He yqIfTbIBaJIClI). C POCTOM TeMIIepaTypbI MeHlIIOTClI: MOIUHOCTb IfsyqeHlflI, ,n:JIIfHa BOJIHbI B MaKCIfMYMe IfSJIyqeHlflI If nIlfplfHa CIIeKTpaJIbHbIX JIIfHIfH.
B
peSYJIbTaTe
3TlfX IfSMeHeHIfH YBeJIlfqlfBaeTClI UBeTOBalI TeMIIepaTypa (Chhajed et aI.,
C
2005)
POCTOM TeMrrepaTypbI MeHflIOTCfI Koop,n:HHaTbI II.BeTHOCTH TpeXII.BeTHO-
ro HCT01JHHKa 6eJIoro CBen, LJTO rrpOHcxo,n:HT H3-3a TeMrrepaTypHbIX 3aBHCHMOCTeH: MOmHOCTH H3JIYLJeHHlI, ,n:JIHHbI BOJIHbI B MaKCHMYMe H3JIY1JeHHlI H IIIHpHHbI crreKTpaJIbHbIX JIHHHH:. ::hOT c,n:BHr Koop,n:HHaT II.BeTHOCTH rrOKa3aH Ha pHC.
20.10.
BH,n:HO,LJ'i'O CMemeHHe TOLJKH Ha II.BeTOBOH: ,n:HarpaMMe
rrpoHcxo,n:HT B CTOPOHY 60JIee BbICOKHX II.BeTOBbIX TeMrrepaTYp. 9TO MO)KHO 06bflCHHTb 60JIee CHJIbHOH: TeMrrepaTYPHOH: 3aBHCHMOCTbIO MOmHOCTH H3JIYLJeHHfI CBeTo,n:Ho,n:a KpacHoro CBeLJeHHfI. npH BbICOKHX TeMrrepaTypax KpaCHafi COCTaBJIflIOmafi H3JIY1JeHHfI HCTOLJHHKa 6eJIoro CBeTa YMeHbIIJaeTcfI
Fit.
408
20. HcmOttHUK;U 6e./tozo C8ema Ha OCH08e c8emOaUOaOB
20.5. lJ'emblpex- U n1lmUtI,BemHble UCmOttHUKU 6eitozo CBema 0,35
~Tc= '[15400 K
II.aeTOBali AHarp8MMa
MKO 1931 r. ;;... i'5 0,34 Tj-20°C a
I oj
Tc=650?~
1 50 °c'
0,33
580b-
rY'~6200 -
:169I00K ...... "'6600 80°C 7000 nOOK "'7400 I 0,31 KpHBall e- f-ljI"i'" ,/17800 .... 8200 0,30 0,..~6 0,..~8 0,30 0,32 Koopi\HHaTa l.\IIeTHOCTH x
!; 0,32
t
~
1-11
PHC.
PaBHOKOHTJlaCTHWI l.\IIeTOBali AHarp8MMa
-,.
0,48 MKO 1976r.
~I-.}. =~oot
~
0
I>= 0,47
'"
::f
'"{;j 0,46 = :5~ 0,45
I
20.11.
0,49
~
0,44
J. f-J ~. 1 K5~00
1
5400
1;, = 6500 K IJ
5800 500C 6200 1 - 1 - 6900 K--J 6690 -I-
8O~C~70Q0 7400
nOOK
TpeXl.\lleTHLIH CBeTOAHOJ\HLrn HCTO'JHHK
0,34
409
6enoro CBeTa
0,16
0,18
7800 8200 8600 9pOO 0,20 0,22
Koopi\HHaTa l.\IIeTHOCTH
0,24 u'
I13MeHeHHe Koop.QHHaT uBeTHOCTH TpexuBeTHoro CBeTO.QHO.QHoro HCTO"l-
HHKa 6eJloro CBeTa C POCTOM TeMuepaTypbl. I1PH KOMHaTHOH TeMuepaType uBeTOBaH TeMuepaTypa HCTO"lHHKa COCTaBJlHeT
6500 K
(Chhajed et al.,
2005)
CHCTeMa o6paTHoH CBH3H KoppeKTHpyeT OITTHqecKYIO MomHOCTb Ka)K.lI.OH COCTaBJlHIOmeH
pe3YJlbTHpYIOmero H3J1yqeHHH. B
.lI.pyroM crroco6e rro.ll.-
CTPOHKH OTCJle)KHBaeTCH TeMrrepaTypa HCTOqHHKa H rro H3BeCTHbIM TeMrrepaTypHbIM 3aBHCHMOCTHM xapaKTepHcTHK HcrroJlb3yeMblx CBeTO.ll.HO.ll.OB
Koop~aTa ~eTHOCTH X
KoppeKTHpyeTcH MOmHOCTb H3J1yqeHHH Bcex KOMrrOHeHT pe3YJlbTHpYIOmero
I13MeHeHHe Koop.QHHaT uBeTHOCTH TpexuBeTHoro CBeTO.QHO.QHoro HCTO"l-
H3J1yqeHHH. BTOPOH crroc06 60Jlee JlerKHH, qTO CBH3aHO C OTHOCHTeJlbHOH
HHKa 6eJloro CBeTa C POCTOM TeMuepaTypbl. I1PH KOMHaTHOH TeMuepaType uBeTOBaH
rrpocToTOH rrpoBe.ll.eHHH TeMrrepaTypHbIX H3MepeHHH. O.ll.HaKO HM HeB03MO)K-
PHC.
20.l0.
TeMuepaTypa HCTO"lHHKa COCTaBJlHeT
6500 K.
I13-3a TeMuepaTypHblX 3aBHCHMO-
CTeH MOIUHOCTH H3J1yqeHHH, .QJlHHbl BOJlHbl B MaKCHMYMe H3J1Y"leHHH H UIHpHHbl
HO KOMrreHcHpoBaTb .lI.peH
CUeKTpaJlbHblX JlHHHH UpH YBeJlH"IeHHH TeMuepaTypbl HCTO"lHHKa ero Koop.QHHaTbl uBeTHOCTH Ha"lHHalOT OTKJlOHHTCH OT KPHBOH I1J1aHKa (Chhajed et al.,
2005)
CHJlbHee (qTO CBH3aHO C HH3KHM 3HaqeHHeM xapaKTepHCTHqeCKOH TeMrre-
TI),
paTypbI
Ha pHC. 20.11
LJeTblpex-
rrOKa3aH C.lI.BHr KOOp.ll.HHaT II.BeTHOCTH TpeXII.BeTHOro
HCTOqHHKa 6eJloro CBeTa B.lI.OJlb KPHBOH OJlaHKa Ha ~BeTOBOH.lI.HarpaMMe 1931
r.
H
Ha paBHoKoHTpacTHoH .lI.HarpaMMe MKO
YBeJlHqeHHOM MaclIITa6e). 0PH TeMrrepaType CMemaeTCH OT rrepBOHaqaJlbHOH Ha 0,009, a
1976 r.
(B
ec, TOqKa II.BeTHOCTH rrpH TeMrrepaType TI = 80 ec, TI =
50
3TO CMemeHHe Y)Ke COCTaBJlHeT 0,02. OPH TaKOM C.lI.BHre H3MeHeHHe II.BeTa HCTOqHHKa CTaHOBHTCH OqeBH.lI.HbIM. B OCBeTHTeJlbHble
npaBUitO
qeTblpex- H nSlTH~BeTHbIe HCTO'lHHKH 6eJIoro CBeTa
qeM 3eJleHaH H CHHHH COCTaBJlHIOmHe, KOTopble 06J1a.ll.aIOT
60JlbllieH TeMrrepaTypHoH cTa6HJlbHOCTbIO.
MKO
20.5.
0,01
CHCTeMbI,
rrpOMbIlIIJleHHOCTH, BbmycKaIOmeH
06merrpHHHTbIM
HBJlHeTCH
TaK
Ha3b1BaeMOe
0603HaqaIOmee rrpe.ll.eJl OTKJlOHeHHH TOqKH II.BeTHOCTH Ha
0,01 e.ll.HHHII.bI, rrpH rrpeBbIlIIeHHH KOToporo MeHHeTCH BocrrpHHTHe II.BeTa (DuggaJ, 2005). CMemeHHe KOOp.ll.HHaT II.BeTHOCTH MO)KeT 6bITb YCTpaHeHO rrO.ll.CTPOHKOH OTHOlIIeHHH MOmHOcTeH CBeTO.ll.HO.ll.OB, KOTOpyIO MO)KHO ocymecTBHTb .lI.By-
H
rrHTHII.BeTHble
6eJloro
CBeTa C03.l1.aIOTCH
Ha
et al., 2002a; Schubert, Kim, 2005). BeJlHqHHa HH.lI.eKCa II.BeTorrepe.ll.aqH rrOJlHXpOMHoro HCTOqHHKa 6eJloro CBeTa, KaK rrpaBHJlO, HerrOCpe.ll.CTBeHHO CBH3aHa C qHCJlOM HcrroJlb3yeMblx B HeM II.BeTOB. O.ll.HaKO POCT qHCJla CBeTO.ll.HO.ll.OB pa3Horo THrra qaCTO Be.ll.eT K CHH)KeHHIO CBeTOBOH OT.lI.aqH. I1cToqHHKH 6eJloro CBeTa, KaK rrpaBHJlO, 06J1a.ll.aIOT 60JlblIIHMH HH.lI.eKCaMH II.BeTorrepe.ll.aqH, HO MeHbllieH CBeTOBOH 3
MH crroco6aMH. OepBbIH 3aKJlIOqaeTCH B rrOCTOHHHOM H3MepeHHH crreKTpa H3J1yqeHHH HCTOqHHKa 6eJloro CBeTa. Ha OCHOBaHHH rroJlyqaeMbIX .lI.aHHbIX
HCTOqHHKH
OCHOBe CBeTO.ll.HO.ll.OB qeTblpex H rrHTH II.BeTOB, COOTBeTCTBeHHO (Zukauskas
1) CM. TaK>Ke pa60TY
[7].
I).
410
D/,. 20. HCmO'lHUlW 6eAoeo CBema Ha OCHOBe cBemoauoaoB BH6JIHOrpacpHQeCKHH CDHCOK
Bergh A., Craford G., Duggal A., and Haitz R. "The promise and challenges of solid-state lighting" Physics Today p. 42 (December 2001). Chhajed S., Xi Y., Li Y.-L., Gessmann Th., and Schubert E. F. "Influence of junction temperature on chromaticity and color rendering properties of trichromatic white light sources based on light-emitting diodes" l. Appl. Phys. 97, 054506 (2005). Duggal A. R. "Organic electroluminescent devices for solid-state lighting" in Organic Electroluminescence edited by Z. H. Kafafi (Taylor & Francis Group, Boca Raton, Florida, 2005). Dalmasso S., Damilano B., Pernot c., Dussaigne A., Byrne D., Grandjean N., Leroux M., and Massies J. "Injection dependence of the electroluminescence spectra of phosphor free GaN-based white light emitting diodes" Phys. Stat. Sol. (a) 192, 139 (2002). Guo X., Graff J. W., and Schubert E. F. "Photon-recycling semiconductor Iightemitting diodes" IEDM Technol. Dig., IEDM-99, 600 (1999). Ivey H. F. "Color and effiCiency of luminescent light sources"l. Opt. Soc. Am. 53, 1185 (1963). Li Y.-L., Gessmann Th., Schubert E. F., and Sheu J. K. "Carrier dynamics in nitride-based light-emitting p-n junction diodes with two active regions emitting at different wavelengths" l. Appl. Phys. 94, 2167 (2003). Schubert E. F. and Kim J. K. "Solid-state light sources becoming smart" Science 308, 1274 (2005). Sheu J. K., Pan C. J., Chi G. c., Kuo C. H., Wu L. W., Chen C. Chang H., S. J., and Su Y. K. "White-light emission from InGaN-GaN multiquantum-well Iightemitting diodes with Si and Zn co-doped active well layer" IEEE Photonics Technol. Lett., 14,450 (2002). Thornton W. A. "Luminosity and color rendering capability of white light" l. Opt. Soc. Am. 61, 1155 (1971). Wyszecki G. and Stiles W. S. Color Science - Concepts and Methods, Quantitative Data and Formulae 2nd edition (John Wiley and Sons, New York, 1982). Zukauskas A., Shur M. S., and Gaska R. Introduction to Solid-State Lighting (John Wiley and Sons, New York, 2002a). Zukauskas A., Vaicekauskas R., Ivanauskas F., Gaska R., and Shur M. S. "Optimization of white polychromatic semiconductor lamps" Appl. Phys. Lett. 80, 234 (2002b). ,nonOJIHeHHe pe,ll;aKTOpa
I. CBeTo.u.Ho.u.b1 KaK OCHOBa OCBern:eHHH 6y.u.yrn:ero / A.3. IOHOBH':I / / CBeToTexHHKa, 2003 . .N'~ 3. C. 2-7. 2. CBeTo.u.Ho.u.b1 HOBoro nOKOJIeHHH .u.JIH CBeTOCHrHaJIbHbIX H OCBeTHTeJIbHblX npH60pOB / JI. M. KoraH / / HOBOCTH CBeTOTeXHHKH, BbIll. 7-8 (34-35). - M.: .llOM CBeTa, 2001. - 47 c.
20.5. Bu6AuoepacjJU'leCKutl cnUCOK
411
3. CBeTo.u.Ho.u.Hble OCBeTHTeJIbHble npH60Pbl / JI. M. KoraH / / CBeToTexHHKa. 2002. No5. C. 16-20. 4. 3JIeKTpH':leCKHe CBoHcTBa H cneKTpbI JIIOMHHeCueHUHH CBeTo.u.Ho.u.OB Ha oCHoBe reTeponepexo.u.oB InGaN/GaN c MO.u.YJIHpOBaHHO-JIerHpOBaHHblMH KBaHTOBblMH HMaMH / C. C. MaMaKHH, A.3. IOHOBH':I, A. B. BaTTaHa,
~
0
:.:
t
§
c:s ~
:.: 0,3 lSI
~
~
0,1
Koop,n:~lHaTa
nBeTHOCrn x
PHC. 2l.9. Koop,n:HHaTbI Jl,BeTHOCTH CBeTo,n:Ho,n:a 6eJIoro CBeqeHHH C JIIOMHHO<jlOPOM, H3rOTOBJIeHHOrO B 2001 r. KOMrraHHeH Nichia Chemical Industries Corporation (Anan, Tokushima, Japan). I1pe,n:cTaBJIeHa KpHBaH I1JIaHKa C cooTBeTcTBYIOlllHMH UBeTOBbIMH TeMrrepaTypaMH TeMrrepaTypOM, KOTopaH JIe)KHT B HHTepBaJIe OT 2800 K (TerrJIhlM 6eJIbIM Cl?eT) ,n:o 4700 K. UBeToBall TeMrrepaTypa HCTOqHI1Ka 3aBHCHT OT COCTaBa JIIOMHHo<popa. O,n:HaKo 3,n:eCb CJIe,n:yeT OTMeTHTb, 'ITO ,n:06aBJIeHHe JIIOMHHo<popa KpacHoro Il.BeTa Be,n:eT K CHI1)KeHHIO CBeTOBOM 3
KHbI 6bITb MeHblIIe .D.HaMeTpa cep.D.u.e BHHbI BOJIOKHa.
KeHHII OUTH'IeCKOrO nOJIII
KeHHe
422
21.5. ilpocmpaHcm8eHHoe pacnOA03ICeHue AIOMuHoljJopa
Dt. 21. Hcmo'tHuKu 6e/toeO C8ema Ha OCH08e npeo6paa08ameAeu 80AHbt HHKa:
6JlU:JICHee
yaaJleHHOe
H
423
(Goetz, 2003; Holcomb et aI., 2003; Kim
et aI., 2005; Luo et aI., 2005; Narerrdrarr et aI., 2005). npH 6JIH)I{HeM pacrrOJIO)l{eHHH JIIOMHHO
a
H
6).
npH y,n:aJIeHHOM
pacrrOJIO)KeHHH JIIOMHHO
500
600 ,Z:Vnrna BOJIHLi A,
700
800
HM
PHC. 21.10. CrreKTp 3JIeKTpOJIIOMHHeCueHUHH CBeTO.ll.HO.ll.HbIX JIaMrr 6eJIoro CBen rrepBoro H BToporo rrOKOJIeHHH qmpMbI Nichia Chemical Industries Corporation. YUIHpeHHe crreKTpa HSJIyqeHHH HCTOqHHKOB BToporo rrOKOJIeHHH Be.ll.eT K rrOBbIIlleHHIO HH.lI.eKCa UBeTOrrepe.ll.aqH H CHH)!{eHHIO rrpOBaJia Ha crreKTpaJIbHOH xapaKTepHCTHKe (Narukawa, 2004)
PHC. 21.11. PacrrOJIO)!{eHHe JIIOMHHoqlOpa: a - 6JIH)!{Hee pacrrOJIO)!{eHHe JIIOMHHO<popa; 6 - 6JIH)!{Hee KOH<popMHoe; 8 - Y.ll.aJIeHHOe, rrpH KOTOPOM JIIOMHHO
21.12 rrpHBe,n:eHbI <poTorpa
(npH ,n:JIHHe BOJIHe B036Y)l{,n:eHHH 460 HM H ,n:JIHHe BOJIHbI MaKCHMYMa H3JIy-
CTBeHHoro
qeHHH 655 HM). 50JIee Toro, xoporno H3BeCTHO, qTO KpaCHble JIIOMHHO
6JIH)I{HerO pacnOJIO)l{eHHH JIIOMHHo<popa, rrOKa3aHHoro Ha pHC. 21.12,
B036Y)l{,n:aeMble H3JIyqeHHeM C ,n:JIHHOH BOJIHbI 460 HM, He OqeHb 9
pa3pa6aTbIBaJIOCb B Nichia Corporatiorr B TeqeHHe 1990-x rr. lJaCTHl\bI
HbI. n09TOMY, XOTH B ,n:aHHOM CJIyqae l\BeTOrrepe,n:aqa JIaMrr 6eJIoro CBeTa
JIIOMHHo<popa pacTBopHIOTCH B 9rroKcH,n:HOH CMOJIe, KOTopaH 3aTeM pacrrpe-
H 6bIJIa YJIyqrneHa, 9TO y,n:aJIOCb c,n:eJIaTb 3a CqeT CHH)I{eHHH HX CBeTOBOH
,n:eJIHeTCH rro qarnKe OTpa)l{aTeJIH. Ha qaCTHlI.bI JIIOMHHo<popa ,n:eHcTBYIOT CHJIa TH)I{eCTH,
9
pacrrOJIO)l{eHHH
OaHOpOaHocmb 118ema.
l1.BeTHocTb HCTOqHHKa 6eJIoro CBeTa He
JIIOMHHo<popa.
TeXHOJIOrHH
CHJIa ApxHMe,n:a H CHJIa TpeHHH,
oCYIII.eCTBJIeHHH
a,
KOTopble orrpe,n:eJIHIOT
rrpocTpaHcTBeHHoe 'pacrrpe,n:eJIeHHe JIIOMHHo<popa. B pe3YJIbTaTe ,n:eHcTBHH 9THX CHJI 6JIH)I{e K rroBepxHocTH KpHCTaJIJIa OKa3bIBaIOTCH 60JIee TH)I{eJIble
,n:OJI)I{Ha 3aBHceTb OT HarrpaBJIeHHH H3JIyqeHHH. ,l{JIH rrOJIyqeHHH O,n:HOPO,n:-
qaCTHlI.bI JIIOMHHO<popa
HOCTH l\BeTa He06xo,n:HMO 06eCrreqHTb TaKoe pacrrpe,n:eJIeHHe JIIOMHHO<popa,
Ha pHC. 21.12,
6
1).
rrOKa3aH eIII.e O,n:HH BapHaHT 6JIH)I{HerO pacrroJIo)l{e-
lWHc/JopMHoe pacnOJlO:JICeHUe JlIOMuHoc/Jopa.
rrpH KOTOPOM ,n:JIH Bcex HanpaBJIeHHH H3JIyqeHHH BHyTpH MaTepHaJIa ,n:JIHHa
HHH -
OIITHqeCKOrO rryTH 6bIJIa 6bI o,n:HHaKOBOH (Reeh et aI., 2003).
JIIOMHHo<popa rr03BOJIHeT cYIII.eCTBeHHo CHH3HTb 3aTpaTbI Ha H3rOTOBJIe-
06beMHoH O,n:HOPO,n:HOCTH l\BeTa MO)l{HO TaK)I{e ,n:06HTbCH BBe,n:eHHeM B 9rrOKCH,n:HYIO CMOJIY
MUHepaAbHblX pacceu8a1OUfux npuMeceu
(Reeh et
TaKoe pacrrOJIO)l{eHHe
HHe HCTOqHHKOB 6eJIoro CBeTa, rrOCKOJIbKY HaHeceHHe CJIOH JIIOMHHO<popa rrpOHcxo,n:HT B rrpOlI.eCce
aI., 2003). B KaqeCTBe TaKHX rrpHMeceH MoryT HCrrOJIb30BaTbCH OIITHqeCKH
a He rrpH c60pKe JIaMrrbI.
rrp03paqHble BeIII.eCTBa, HarrpHMep Ti02, CaF 2 , Si02, CaC03 H BaS04, rro-
)l{eHHeM JIIOMHHO<popa xapaKTepH3YIOTCH MaJIOH rrJIOIII.a,n:bIO H3JIyqeHHH H
I1CTOqHHKH CBeTa C KOH
pacrrOJIO-
Ka3aTeJIb rrpeJIOMJIeHHH KOTOPbIX OTJIHqaeTCH OT rrOKa3aTeJIH rrpeJIOMJIeHHH
BbICOKOH HPKOCTbIO, qTO ,n:eJIaeT HX rrpHro,n:HbIMH ,n:JIH HCrrOJIb30BaHHH B
CMOJIbI. Ha3HaqeHHe MHHepaJIbHbIX ,n:06aBoK 3aKJIIOqaeTCH B TOM, qT06bI
pa3JIHqHbIX OrrTHqeCKHX CHCTeMax, HarrpHMep B CHCTeMax BocrrpOH3Be,n:eHHH
3aCTaBHTb CBeT OTpa)l{aTbCH, rrpeJIOMJIHTbCH H pacceHBaTbCH, ypaBHHBaH
H306pa)l{eHHH. B
TeM caMWM BepOHTHOCTb pacrrpOCTpaHeHHH CBeTa BO Bcex HarrpaBJIeHHHX,
qaCTO Tpe6yeTcH HCrrOJIb30BaHHe JIHH3. I1MeHHo ,n:JIH 9THX rrpHMeHeHHH
TaKHX YCTpOHCTBax, KaK rrepe,n:HHe <papbI aBTOM06HJIH,
H rro,n:xo,n:HT TOqeqHble HCTOqHHKH, T. e. HCTOqHHKH C MaJIOH rrJIOIII.a,n:bIO
qTO H 06eCrreqHBaeT 06beMHYIO O,n:HOPO,n:HOCTb l\BeTa.
H3JIyqeHHH.
21.5. TIpocTpaHcTBeHHoe pacnOJI01KeHHe JIIOMHHoopa O,n:HOPO,n:HOCTb
l\BeTa
CHJIbHO 3aBHCHT OT
H
9
HCTOqHHKOB
6eJIoro
CBeTa
OCHOBHbIM He,n:OCTaTKOM HCTOqHHKOB CBeTa C 6JIH)I{HHM pacrrOJIO)l{eHHeM JIIOMHHO<popa HBJIHeTCH rrOrJIOIII.eHHe ero H3JIyqeHHH rrOJIyrrpOBO,n:HHKOBbIM KpHCTaJIJIOM. I13JIyqeHHe JIIOMHHO<popa, HarrpaBJIeHHOe B CTOPO-
npocmpaHcm8eHHOZO pacnOJlO:JICeHUJl JlIOMUHoc/Jopa.
CYIII.eCTByeT ,n:Ba BapHaHTa pacrrOJIO)l{eHHH JIIOMHHO<popa BHyTpH HCTOq-
1)
CM. TaK)!{e pa60TY
[5).
424
Fit. 21.
21.6. GBemoauOabl 6eJloeo CBe'leHUJI Ha OCHOBe Y4J KpUCmaJlJlOB
HCmO'lHUKU 6eJloeo CBema Ha OCHOBe npeo6paaoBameJleu BOJlHbl
21.6.
CBeTo)J.Ho)J.bI 6eJIoro CBeqeHHH Ha OCHOBe
425
Yet»
KpHCTaJIJIOB C JIIOMHH0l}10pOM B
pa60Te
(Karlicek,
1999)
OIIHcaHbI
CBeTO,llJlO,n:bI
6eJIoro CBe1JeHHH
C YcI>-Bo36Y2K,n:eHHeM JIIOMHHocpopa. B TaKHX HCT01JHHKaX 6eJIoro CBeTa 1JaCTO HCrrOJIb3YIOT CBeTo,n:Ho,n:b1, pa60TaIOIlI.He B 6JIH2KHeH Y (320-390 HM) H cpHOJIeTOBOH 06JIaCTHX crreKTpa Ha ,n:JIHHaX BOJIH, pacrrOJI02KeHHbIX 6JIH3KO K KpaIO BH,n:HMoro crreKTpa (390-410 HM). C006IlI.aeTCH (Morita et al., 2004) 0 rrOJIyrrpoBo,n:HHKOBbIX ,n:Ho,n:ax, H3JIY1JaIOIlI.HX CBeT Ha ,n:JIHHe BOJIHbI rv
400 HM H 06JIa,n:aIOIlI.HX BbICOKOH 3cpcpeKTHBHoCTbIO. B
rrOJIyrrpoBo,n:HHKOBbIX HCT01JHHKaX CBeTa, pa60TaIOIlI.HX B ,n:aJIbHeM
Y-,n:Harra30He (200-320 HM), ,n:JIH rrpeo6pa30BaHHH ,n:JIHHbI BOJIHbI M02KHO
PHc.21.12. PaCIIpeAeJIeHHe JIIOMHHo<jJopa BHYTPH HCTO'IHHKOB 6eJIoro CBen: a6JIH:lKHee paCIIOJIO:lKeHHe JIIOMHHo<jJopa; 6 - 6JIH:lKHee KOH<jJopMHoe paCIIOJIO:lKeHHe JIIOMHHo<jJopa; B - YAaJIeHHOe paCIIOJIO:lKeHHe JIIOMHHo<jJopa; a H 6 - (Goetz, 2003); B - (Kim et a1., 2005)
HCrrOJIb30BaTb 06bI1JHble JIIOMHHOCPOPbI, KOTopble, HarrpHMep rrpHMeHHIOTCH B cpJIyopecueHTHblx JIaMrrax. O,n:HaKo HX cYIlI.eCTBeHHbIM He,n:OCTaTKOM HBJIHeTCH CHJIbHbIH CTOKCOB c,n:BHr, CBoHcTBeHHbIH HCT01JHHKaM ,n:aJIbHeH YcI>-06JIaCTH. KpoMe Toro, rrpH pa3pa6oTKe CBeTo,n:Ho,n:OB ,n:aJIbHerO Y,n:Harra30Ha Ha OCHOBe AIGaN CTOJIKHYJIHCb C rrp06JIeMaMH, BbI3BaHHbI-
Hy rrOJIyrrpoBo,n:HHKoBoro KpHCTaJIJIa, M02KeT 6bITb rrOrJIOIlI.eHO, HarrpHMep, MeTaJIJIH1JeCKHMH KOHTaKTaMH, rroKpbIBaIOIlI.HMH KpHCTaJIJI, rrOCKOJIbKY HH KOHTaKTbI, HH caM KpHCTaJIJI, KaK rrpaBHJIO, He 06JIa,n:aIOT BbICOKOH OTpa9TY rrp06JIeMY MO)KHO peIIIHTb, eCJIH JIIOMHHOCPOp rrpOCTpaHCTBeHHO KpHCTaJIJIa, T. e.
C03,n:aTb CTpyKTypy
C y,n:aJIeHHbIM pacrrOJIO)KeHHeM JIIOMHHocpopa (Kim et al., 2005; Luo et al., 2005; Narendran et al., 2005). B HOCPOpOM cYIlI.eCTBeHHo CHH2KaeTCH
cpeKTHBHoCTH JIerHpOBaHHH rrpHMecHMH
P-
H n-THrra. K
TOMY )Ke OKa3a-
JIOCb, 1JTO 3rrHTaKCHaJIbHbIMH MeTo,n:aMH HeJIerKO rrOJIY1JHTb BbICOKOKa1JeCTBeHHble CJIOH AIGaN, 06JIa,n:aIOIlI.He HH3KOH rrJIOTHOCTbIO ,n:HCJIOKaUHH
2KaIOIlI.eH crroco6HOCTbIO. OT,n:eJIHTb OT rrOJIyrrpOBo,n:HHKOBoro
MH BbICOKHM co,n:ep2KaHHeM aJIIOMHHHH, rrpHBo,n:HIlI.HM K CHH)KeHHIO 3CP-
cTpyKTypax C y,n:aJIeHHbIM JIIOMH-
BepoHTHoCTb rrorra;naHHH H3JIY1JeHHH
Ha rrOJIyrrpoBo,n:HHKOBbIH KpHCTaJIJI C HH3KOH OTpa2KaIOIlI.eH crroco6HoCTbIO. 9TO 06bHCHHeTCH TeM, 'ITO B TaKHX CTpyKTypax rrepBH1JHbIH HCT01JHHK (rrOJIyrrpOBo,n:HHKOBbIH KpHCTaJIJI) rrpOCTpaHCTBeHHO y,n:aJIeH OT BTOpH1JHOrO HCT01JHHKa (JIIOMHHocpopa). ECJIH paccToHHHe Me2K,n:y KPHCTaJIJIOM H JIIOMHHOCPOpOM rrpeBblIIIaeT rrOrrepe1JHble pa3MepbI KpHCTaJIJIa, T. e.
d > a,
KaK
rrOKa3aHO Ha pHC. 21.11, 8, BepOHTHOCTb rrorra,n:aHHH H3JIY1JeHHH JIIOMHHOcpopa Ha rrOBepXHOCTb rrOJIyrrpOBo,n:HHKa CYIlI.eCTBeHHO CHH2KaeTCH. B
H ,n:ecpeKToB. B
CBeTo,n:Ho,n:ax 6eJIoro CBe1JeHHH C YcI>-Bo36Y2K,n:eHHeM BH,n:HMoe H3-
JIY1JeHHe C03,n:aeTCH Herrocpe,n:cTBeHHo B JIIOMHHocpope. JIIOMHHOCPOp, HCrrOJIb3yeMbIH B TaKHX CBeTo,n:Ho,n:ax,
rro,n:06eH JIIOMHHOCPOpy B cpJIyopec-
ueHTHbIX JIaMrraX, pa3pa6oTaHHblx B 1950-x rr. IlpaKTH1JecKH TaKHe 2Ke JIIOMHHOCPOPbI rrpHMeHHIOTcH C 1980-x rr. B KOMrraKTHblX cpJIyopecueHTHblx JIaMrrax. JIIOMHHOCPOp B 3THX JIaMrraX B036Y2K,n:aeTcH Y-H3JIY1JeHHeM ra30BbIX pa3pH,n:oB, rrpoHcxo,n:HIlI.HX B pTyTHbIX JIaMrraX HH3Koro ,n:aBJIeHHH. OCHoBHoe H3JIY1JeHHe pTyTHblx JIaMrr rrpHxo,n:HTCH Ha ,n:JIHHy BOJIHbI 254 HM. JIIOMHHOCPOPbl, 06JIa,n:aIOIlI.He CHJIbHOH rrOrJIOIlI.aIOIlI.eH crroco6HoCTbIO B 3TOM ,n:Harra30He ,n:JIHH BOJIH, Y2Ke BbIIIYCKaIOTCH cepHHHo, H HX xapaKTepHcTHKH UBeTorrepe,n:a1JH rro,n:xo,n:HT ,n:JIH MHOrHX rrpHMeHeHHH.
pe-
OrrHcaHbI (Kaufmann et al., 2001) CBeTo,n:Ho,n:bI 6eJIoro CBe1JeHHH, HC-
3YJIbTaTe 3Ha1JHTeJIbHO rrOBblIIIaeTCH 3cpcpeKTHBHOCTb TaKHX HCTO'IHHKOB.
rrOJIb3YIOIlI.He ,n:JIH B036Y2K,n:eHHH Y-cBeTo,n:Ho,n:bI AlinGaN H CMeCb Tpex
Mo,n:eJIHpoBaHHe xo,n:a JIY1JeH H 3KcrrepHMeHTbI C HCT01JHHKOM, C03,n:aHHbIM
JIIOMHHOCPOPOB. YcI>-cBeTo,n:Ho,n: H3JIY1JaeT Ha ,n:JIHHaX BOJIH 380-400 HM,
Ha OCHOBe CHHero CBeTo,n:Ho,n:a InGaN H JIIOMHHocpopa, rrpocTpaHcTBeHHo
T. e. Ha rpaHHue BH,n:HMOH H Y-06JIaCTeH crreKTpa. CMecb JIIOMHHOCPOPOB
y,n:aJIeHHOrO OT Hero, ,n:eHCTBHTeJIbHO rrOKa3aJIH YBeJIH1JeHHe
HHTeHCHB-
COCTOHT H3 Tpex KOMrrOHeHTOB, H3JIY1JaIOIlI.HX CBeT B KpacHoH, 3eJIeHOH H
COOTBeTCTBeHHO (Kim
CHHeH 1JaCTHX crreKTpa. HH,n:eKc UBeTorrepe,n:a1JH TaKHX CBeTo,n:Ho,n:OB rrpH-
HOCTH H3JIY1JeHHH JIIOMHHocpopa Ha 75
%
H 27
%
et al., 2005; Luo et al., 2005). Coo6IlI.aJIOCb (Narendran et al., 2005), 1JTO rrpH HCrrOJIb30BaHHH MeTo,n:a OTBo,n:a pacceHHHblx CPOTOHOB
(MeTo,n:a
SPE), y,n:aJIOCb rrOBblCHTb BbIXO,n: H3JIY1JeHHH B cpe,n:HeM Ha 61
%.
6JIH3HTeJIbHO paBeH 78. COBpeMeHHble JIIOMHHOCPOPbI 06JIa,n:aIOT ,n:OBOJIbHO BbICOKHMH HH,n:eKcaMH
IlpH
UBeTorrepe,n:a1JH (60-100), 1JTO HBJIHeTCH ,n:OCTOHHCTBOM CBeTo,n:Ho,n:OB 6e-
HH3KHX 3Ha1JeHHHX TOKa CBeTOBaH OT,n:a1Ja SPE-H3JIY1JaTeJIeH rrpeBblIIIaeT
JIoro CBe1JeHHH C YcI>-HaKa1JKOH, C03,n:aHHbIX Ha HX OCHOBe. C006IlI.aeTCH
80 JIM/BT, Tor,n:a KaK Ha 06bI1JHbIX CTpyKTypax OHa, KaK rrpaBHJIO, COCTaB-
(Radkov et al., 2003) 0 CMeCH JIIOMHHOCPOPOB, B036Y2K,n:aeMoH Ha ,n:JIHHe
JIHeT 54 JIM/BT..
BOJIHbI
rv
400 HM, C 01JeHb BbICOKHMH 3Ha1JeHHHMH HH,n:eKca UBeTorrepe,n:a1JH
426
rft. 21, }fcmo'lftu/cu 6eftOeO CBema fta OCftOBe npeo6pa30BamefteiJ. BOftftbt
(rv 97).
21.8. Pac'lem omftOWeftUR UftmeftCUBftOCmeiJ. U3ftY'leftUR B cBemOauoae
427
BH,n:HMaH qaCTb crreKTpa H3JIyqeHHH TaKHX 6eJIblX C,lL orrpe,n:eJIHeT-
CH TOJIbKO H3JIyqeHHeM JIIOMHHO
Y
}
H3nyqeHIDI
B036Y2K)l.eHHeM OTJIHqalOTCH xopoIIIeH BocrrpOH3BO)l.HMOCTblO OrrTHqeCKHX crreKTpoB, qTO CBH)l.eTeJIbCTByeT 0 XOPOIIIO oTpa6oTaHHOH TeXHOJIOrHH. IlpH rrOMOmH MO)l.eJIHpOBaHHH MeTO)l.OM MOHTe KapJIo (Radkov et ai.,
2004)
}
camlmpoBaJI nO)UlOlKKll
6bl-
JIO rrOKa3aHO, qTO KOOp)l.HHaTbl LI.BeTHOCTH HCTOqHHKOB C JIIOMHHo<popaMH,
nepBH'IHhIH HCTO'lHHK H3nyqeHIDI
B036Y2K)l.aeMbIMH pa3JIHqHblMH CBeTO)l.HO)l.aMH C )l.JIHHaMH BOJIH B )l.Harra30He
400-410
(AIInGaP)
(C,[( InGaN/GaN)
KOHTaKT } ......_--'-------1 n-THna
HM, pa3JIHqalOTCH He3HaqHTeJIbHO (JIe2KaT B rrpe)l.eJIax rrepBoro
3JIJIHrrCa MaKA)l.aMa). DblJIO TaK2Ke rrOKa3aHO, qTO KOOp)l.HHaTbl LI.BeTHOCTH CBeTO)l.HO)l.OB C JIIOMHHO
21.13.
Y3KHX rrpe)l.eJIax, qeM y HCTOqHHKOB C JIIOMHHo<popaMH, B036Y2K)l.aeMbIMH
PHC.
CBeTO)l.HO)l.aMH CHHero CBeqeHHH.
TOHOB C ,n:ByMH aKTHBHbIMH 06JIaCTHMH: 06JIaCTbIO HHJKeKU:HH TOKa (nepBaH aKTHB-
OCHOBHblM He)l.OCTaTKOM CBeTO)l.HO)l.OB 6eJIoro CBeqeHHH C Y
CTpYKTypa nOJIynpOBO.ll.HHKoBoro CBeTo,n:Ho,n:a C nepenOrJIOIII.eHHeM ¢o-
HaH 06JIacTb) H 06JIaCTbIO OnTHQeCKOrO B036YJK.ll.eHHH (BTopaH aKTHBHaH 06JIaCTb)
(Guo et ai., 1999)
HBJIHIOTCH cpaBHHTeJIbHO BblCOKHe 3HepreTHqeCKHe rroTepH (C)l.BHr CToKca) rrpH rrpeo6pa30BaHHH Y
BXO.n: OIJTHqeCKruI MOIUHOCTL,
aJIbHaH CBeTOBaH OT)l.aqa TaKHX CBeTO)l.HO)l.OB 3HaqHTeJIbHO HH2Ke, qeM CBe-
(I1T]2)RP I ("-2IA. I )
BblXO,n:: OIITHqeCKaJI MOIUHOCTL
H:myqeHHll,P,
TO)l.HO)l.OB 6eJIoro CBeqeHHH C B036Y2K)l.eHHeM 2KeJIToro JIIOMHHo<popa rrpH rrOMomH CBeTO)l.HO)l.OB CHHero CBeqeHHH. nOJIH3JI OITTHlJeCK3JI
MOII\HOCTb:
21.7.
CBeTO.ll:HO.ll:bI 6eJIoro CBeqeHH.H Ha OCHOBe
MOII\HOCTeii R ~ P2/ PI
nOJIynpOBO.ll:HHKOBbIX npeo6pa30BaTeJIeii (PRS- LED)
BXOA:
3JIeKTPH'leCKali MOIUHOCTL,
B pa60Te (Guo et ai.,
1999)
21.13
Po
BhlXO,n.: ollTIf'lecKWI MOIIUlOCTh
rrpHBe)l.eHO orrHcaHHe CBeTO)l.HO)l.OB 6eJIoro
KOPOTKOBOJIHOBOro H3JI}":IeHIDI,
CBeqeHHH Ha OCHOBe rrOJIyrrpOBO)l.HHKOBbIX rrpeo6pa30BaTeJIeH )l.JIHHbl BOJIHbI. Ha pHC.
PI + P2
omomeHHe OIJTHqeCKHX
CXeMaTHqHO rrOKa3aHa cTpyKTypa rrOJIyrrpOBO)l.HHKOBOro
CBeTO)l.HO)l.a C rreperrorJIOmeHHeM
PHC.
21.14.
BTOPHOMY H3JIyqeHHIO
KOPOTKOBOJIHOBOro H3..JIY'IeHIDI,
PI
Pacnpe,n:eJIeHHe 3HeprHH BHyTpH nOJIynpoBo,n:HHKoBoro CBeTo,n:HO.ll.a
JIoro CBeQeHHH C nepenOrJIOIu:eHHeM ¢OTOHOB: HOCTb, a
PI
H
HcrrymeHHblX CBeTO)l.HO)l.OM CHHero CBeqeHHH Ha OCHOBe InGaN, rrorJIOmaeTCH BTOPHqHOH aKTHBHOH 06JIaCTblO AlInGaP, qTO rrpHBO)l.HT K rro-
BhlXO.n;: OnTHlJeCK3JI MODUlOCTb
ll1Po
P2
-
Po -
6e-
Bxo,n:HaH 3JIeKTpHQeCKaH MOIII.-
MOIII.HOCTH BbIXO.ll.HOrO H3JIYQeHHH.
,lLJIH HaX02K)l.eHHH OrrTHMaJIbHOH pa60qeH )l.JIHHbl BOJIHbl rrpe)l.CTaBHM 6eJIoe CBeqeHHe B BH)l.e H3JIyqeHHH CTaH)l.apTHOro HCTOqHHKa C C KOOp)l.HHaTaMH LI.BeTHOCTH Xc
= 0,3101, Yc = 0,3163,
Zc
= 0,3736, a
rro 3THM KOOp)l.HHaTaM
orrpe)l.e.iIHM KOMrrJIeMeHTapHble )l.JIHHbl BOJIH.
BaThCH orrpe)l.eJIeHHOe COOTHOIIIeHHe, BblqHCJIeHHeM KOToporo Mbl 6Y)l.eM 3aHHMaTbCH. Ha pHC.
21.14
CXeMaTHqHO rrOKa3aHO pacrrpe)l.eJIeHHe 3HeprHH
BHyTpH paccMaTpHBaeMoro YCTpoHcTBa. IlycTb CKaH MOmHOCTb,
PI
H
P2 -
Po -
BXO)l.HaH 3JIeKTpHqe-
MomHOCTH BbIXO)l.HOrO H3JIyqeHHH B CHHeM
H 2KeJITOM )l.Harra30Hax )l.JIHH BOJIH, 1]1 H 1]2 -
K. rr.)l.. CBeTO)l.HO)l.a CHHero
21.8.
PaCqeT OTHOmeHH.H HHTeHcHBHocTeii H3JIyqeHH.H B CBeTO.ll:HO.ll:e C nepenOrJIow.eHHeM CPOTOHOB
CBeqeHHH H rrOJIyrrpOBO)l.HHKOBOrorrpeo6pa30BaTeJIH C rreperrOrJIOmeHHeM
Terrepb paCCqHTaeM OTHOIIIeHHe HHTeHCHBHOCTeH H3JIyqeHHH OT )l.BYX HCTOqHHKOB )l.JIH rrOJIyqeHHH pe3YJIbTHpYlOmero 6eJIoro CBeqeHHH, a TaK-
IlpH Bbl60pe OIITHMaJIbHblX 3HaqeHHH pa60qHX )l.JIHH BOJIH )l.JIH rrOJIy-
2Ke orrpe)l.eJIHM CBeTOBYIO 3
qeHHH MaKCHMaJIbHOH 3
3HepreTHqeCKHe rrOTepH B rrpOLI.eCce rreperrOrJIOmeHHH
(KOpOTKOBOJIHOBoro) H BTOpHqHOrO ()l.JIHHHOBOJIHOBoro) HCTOqHHKOB CBeTa.
OTMeTHTb, qTO )l.a2Ke rrpH
,lLJIH rrOJIyqeHHH 6eJIoro CBeTa
e)l.HHHqHOM
KBaHTOBOM BbIXO)l.e rrpOLI.eCC
rre-
perrOrJIOmeHHH
AI
H
A2 AI
H
)l.JIHHbl BOJIH H3JIyqeHHH rrepBHqHOrO
A2
)l.OJI2KHbl 6bITb rrapoH KOMrrJIeMeH-
TapHblX )l.JIHH BOJIH. Orrpe)l.eJIHM Beca LI.BeTOB )l.ByX HCTOqHHKOB H3JIyqeHHH
428
Dl.
21. HCmO'lHUKU 6eJl080 CBema Ha OCHOBe npeo6pa30BameJleu BOJlHbt
21.9. Pac'lem CBemOBOU omaa'lu cBemOaUOaa C nepen08J1ol4eHueM f/JomoHoB 429
B BH,ne
21.9.
(21.6)
PaCqeT CBeTOBOH OT)l;aqH CBeTO)l;HO)l;a C nepenOrJIom.eHHeM q,OTOHOB
XI, 'Ill, %1, X2, '112, %2 -
1985) .
.ll.JIH HaX01K,neHHH OTHOllIeHHH HHTeHcHBHocTeR. H3JIyqeHHH ,nBYX
pa60TaIOIIJ,HM Ha )1.JIHHe BOJIHbI
HCTOqHHKOB CBeTa HCrrOJIb3yeM Bblpa2KeHHe
A2
.ll.JIH rrOJIyqeHHH Ha ,nJIHHe BOJIHbI
orrTI-IqeCKOR MOIIJ,HOCTH
P2
rrpH
rreperrOrJIOIIJ,eHHH
AI,
Ha BXO)1. BTOpHqHOrO rrpeo6pa30BaTeJIH
)1.0JI2KHa rrocTyrraTb OrrTHqeCKaH MOIIJ,HOCTb H3JIyqeHHH
(21. 7) r,ne
PI
H
P2 -
OrrTHqeCKHe MOIIJ,HOCTH HCTOqHHKOB ,nJIHHHOBOJIHOBOrO
H KOPOTKOBOJIHOBOrO
(AI)
P2 'f}2 •
(A2)
H3JIyqeHHH. Koop,nHHaTbI IJ,BeTHOCTH pe3YJIbTH-
pYIOIIJ,ero crreKTpa orrpe,neJIHIOTCH CJIe,nylOIIJ,HMH COOTHOllIeHHHMH
r,ne
772 -
A2 he P2 • A2 he . x;- = 'f}2· Al '
(21.11)
K03
B )1.pyroR B rrpOIJ,ecce rreperrOrJIOIIJ,eHHH
Po -
BXO)1.HaH 3JIeK-
TpHqeCKaH MOIIJ,HOCTb, TO OrrTHqeCKaH MOIIJ,HOCTb H3JIyqeHHH rrepBHqHOrO
Ynew =
PI·fh +P2 ·fh
PI
. ml
+ P.2· m2
=
'fiI +R·112 ml
XI +R·X2
Xnew =
ml
+R·m2
(21.8)
+ R . m2 '
CBeTO)1.Ho,na
77IPO,
r,ne
771 -
K03
3HeprHH B OrrTHqeCKYIO B rrepBHqHOM HCTOqHHKe. Tor)1.a )1.JIH OrrTHqeCKOR
(21.9)
.
MOIIJ,HOCTH H3JIyqeHHH rrepBHQHOrO HCTOQHHKa M02KHO 3arrHcaTb COOTHOllIeHHe
(21.12)
.ll.JIH HCTOqHHKOB 6eJIoro IJ,BeTa B KaqeCTBe Ynew H Xnew MoryT 6bITb BbI6paHbI Koop,nHHaTbI IJ,BeTHOCTH CTaH,napTHoro HCTOqHHKa C: XC
Yc
= 0,3162 (CIE,
1932;
= 0,3101,
1951), T. e. Xnew = Xc = 0,3101, Ynew (21.8), Haxo,nHM COOTHOllIeHHe ,nJIH R
Judd,
= 0,3162. PellIaH ypaBHeHHe
R = 'lIt - Yc . ml • Yc·
m2 -
= Yc =
1 R0= P I· ( -+ 'f}1
(21.10)
Y2
Po
PellIaH 3TO ypaBHeHHe OTHOCHTeJIbHO
H HCrrOJIb3YH Bblpa2KeHHe
= R . PI, rrOJIyqaeM
R· A2 ) .
'f}1 . 'f}2·
P2
=
(21.13)
Al
TIOJIHaH BbIXO)1.HaH OrrTHQeCKaH MOIIJ,HOCTb CBeTO)1.HO)1.a C rreperrOrJIOIIJ,eHHeM Ha pHC.
21.15
rrOKa3aH rpa
(21.10)
B 3aBHCHMOCTH OT ,nJIHHbI BOJIHbI.
(21.14)
•
r:...- 2,0
rr03TOMY ,nJIH HaX02K,neHHH K03
~
r:...'" ,:s;:
1,5
.~.".
~
1
~
.
1,0
,,~
0,5
3HeprHH B OrrTHQecKYIO BHyTpH TaKOrO YCTpoRCTBa M02KHO BbIBeCTH Bblpa2KeHHe
'.'.'.'.....! -,
_ Pout _ 77 - K - PI.
-···...i
/
J .--.
PI· (1
+ R)
(~ + ~ . ),2) 171
171 . 172
), I
1
1 +R R
171
171 . 172
- + - _ . ),2 -•
(21.15)
), I
CBeTOBOR rrOTOK YCTpORCTBa orrHCbIBaeTCH Bblpa2KeHHeM
0,0
380
400
420
440
460
,L\mrna BOJIHbI KOPOTKOBOJIHOBOro H3JI}"1eHHJI
480
AI'
500
4>lum =
683
JIBM • T
("UI . PI
+ 112 . P2) =
683
JIM • BT
(UI
+ 112 . R) . PI.
(21.16)
HM
Tor)1.a CBeTOBYIO 3
PI
H
P2,
npH KOTOPbIX pe3YJIbTHpYIOIIjee H3JIyqeHHe HMeeT 6eJIbIH U:BeT
(Guo, et aI., 1999)
eM
Pout
= 683 JIM . ('fIt BT
+ fh . R) 1 +R
(21.17)
430
FA. 21. HCmOttHuKU 6eAo2o C8ema Ha OCH08e npeo6pa308ameAeii 80AHbt
21.10. CneKmp u3AytteHuR c8emo8uo8a
OTCIO)1.a rrOJIyqHM Bblpa)KeHHe )1.JIH HaXO)K)1.eHHH cBeToBoH OT)1.aqH TaKHX
CBeTa C )1.JIHHOH BOJIHbI
YCTpoikTB, H3MepHeMoH B JIIOMeHaX Ha 9JIeKTpHqeCKHH BaTT
C )1.JIHHOH BOJIHbI
= 683
JIM.
Po
•
(iiI
BT 'TJ
+ 112 . R) .
(21.18)
1+R
, ~
•
.,......-..........
~
...••
200
~
.,•
•
100
50
meHHeM
B
paC'IeTa
cBeToBoH
3aBHCHMOCTH
OT
OTAa'lH
AJIHHbI
(Guo et aI.,
~
•I •I •I •I •
0
AI'
KpaCHoe H3nyqeHHe B IIOAJIOlKKe A1InGaP, CBJI3aHHOe C
IIepeIIomo~eHHeM cjJOTOHOB
~
10
0
400
550 ,lVnrna BOJIHbI
21.17.
650
A,
700
HM
CrreKTp H3JIY'leHHlI AByxUBeTHblx CBeTOAHOAOB C rreperrOrJIOmeHHeM
HM
rrOAJIO)KKa AlInGaP C H3-
JIY'leHHeM B KpaCHOH o6JIacTH crreKTpa (Guo et aI.,
CBeTOAHOAOB
BOJIHbI
30
(I)
PHC.
Pe3YJIbTaTbI
8"
:r
~3~8~0~-4~0~0~-4~2~0~~«~0~~46~0~~48~0~~50=0~
21.16.
40
:.: 20 <>
o
PHC.
i<> ::; ~
~
,lVnrna BOJIHbI KOPOTKOBOliHOBOro H3JI)"IeHHJI
KaqeCTBe BTOpHqHOrO HCTOqHHKa B 9TOM
§l
~ o 150
I
B
~ ~ 50
'TJI = 'TJ2 = 100 %.
/
HM B CJIoe AlInGaP H rrepeH3JIyqeHHIO
60
rrpe)1.CTaBJIeHbI pe3YJIbTaTbI paCqeTOB )1.JIH U8eaJlbHbtX HCTOq-
HHKOB, T. e. rrpH
HM.
431
HCTOqHHK 6bIJI rrJIaHapHblM 6e3 TeKcTypHpoBaHHoH rroBepxHocTH.
B BH)1.e
21.16
470
nepeno2Ao14eHueM t/JomoHo8
9KcrrepHMeHTe HCrrOJIb30BaHa )1.BOHHaH reTepocTpYKTypa AlInGaP /GaAs.
HCrrOJIb3YH 9Ty
630
C
2000)
C rreperrorJIo-
rrepBH'IHOrO
HCTO'lHHKa
,lI.JIH rrpe)1.0TBpaIII.eHHH rrOrJIOIII.eHHH H3JIyqeHHH B rrO)1.JIO)KKe GaAs ee y)1.aJIHIOT C 9rrHTaKCHaJIbHOrO CJIOH AlInGaP. ,lI.JIH 9Toro CHaqaJIa CTPYK-
1999)
Typy AlInGaP /GaAs, HCrrOJIb3yeMYlO )1.JIH rreperrOrJIOIII.eHHH
(336 JIM/BT) COOTBeTcTByeT )1.JIHHe H3JIyqeHHH 440 HM. B pacqenx rrpe)1.rrOJIa-
MaKCHMaJIbHaH CBeTOBaH OT)1.aqa BOJIHbI rrepBHqHOrO HCTOqHHKa
raJIOCb, 'ITO 06a HCTOqHHKa H3JIyqalOT MOHoxpOMaTHqeCKHH CBeT. O)1.HaKO llIHpHHa crreKTpa crrOHTaHHOro H3JIyqeHHH rrOJIyrrpOBO)1.HHKOB paBHa
1,8kT.
ilpHHHMaH BO BHHMaHHe KOHeqHYIO IIIHPHHY crreKTpaJIbHOH JIHHHH H3JIyqeHHH, peaJIbHaH CBeTOBaH OT)1.aqa 6Y)1.eT HeCKOJIbKO HH)Ke rrpe)1.CTaBJIeHHOH Ha pHC.
21.16.
MeIII.alOT Ha rJIa)1.KOH CTeKJIHHHOH rrOBepXHOCTH. 3aTeM rrO)1.JIO)KKa GaAs y)1.aJIHeTCH MeTO)1.0M IIIJIH
Ta6JI.
21.2
rrpHBe)1.eHbI TeOpeTHqeCKHe 3HaqeHHH CBeTOBOH OT)1.aqH
CBeTO)1.HO)1.0B C rreperrOrJIOIII.eHI1eM<poToHOB H HeKoTopbIX )1.pymx THrrOB CBeTO)1.HO)1.0B 6eJIoro CBeqeHHH. B paCqeTaX rrpe)1.rrOJIaraJIOCb, 'ITO CBeTO)1.HO)1.bI xapaKTepH3YlOTCH e)1.HHHqHOH KBaHTOBOH 9
21.10.
CneKTp H3JIYQeHHH CBeTO,Zl;HO,Zl;a
)1.BYXII.BeTHble HCTOqHHKH CBen rro cpaBHeHHIO C H3JIyqaTeJIHMH C 60JIee IIIHpOKHM crreKTpoM 06JIa)1.a1OT 60JIbilleH cBeTOOT)1.aqeH.
C nepenOrJIom.eHHeM 4>OTOHOB
KaK rrpaBHJIO, )1.BYXII.BeTHble CBeTO)1.HO)1.bI 6eJIoro CBeqeHHH HMelOT 60JIbB pa60Te (Guo et aI.,
1999)
orrHcaHbI CBeTO)1.HO)1.bI Ha OCHOBe CBeTO)1.H-
IIIylO cBeToBYIO OT)1.aqy, HO xy)1.IIIylO II.BeTorrepe)1.aqy, qeM TpeXII.BeTHble.
0)1.0B CHHero CBeqeHHH InGaN/GaN H 9JIeKTpHqeCKH rraCCHBHoro BTOPHq-
il09TOMY Ha rrpaKTI1Ke BCer)1.a rrpHXO)1.HTCH HCKaTb KOMrrpOMI1CC, I1CXO)1.H
Horo HCTOqHHKa AlInGaP, H3JIyqalOIII.ero CBeT B KpacHoH 06JIaCTH crreK-
H3 3HaqeHHH 9THX rrapaMeTpoB
Tpa, HCrrOJIb3YIOIII.erO rreperrOrJIOIII.eHHe
21.17
(Walter,
1971).
CYIII.eCTBYIOT )1.Ba . crro-
rrOKa3aH
c06a YJIyqIIIeHHH II.BeTOrrepe)1.aqH )1.BYXII.BeTHblx CBeTO)1.HO)1.0B. Bo-nep8btX,
crreKTp H3JIyqeHHH TaKoro YCTpoHcTBa. BH)1.HO, 'ITO crreKTpaJIbHaH JIHHHH
MO)KHO paCIIII1pHTb crreKTp I13JIyqeHHH CBeTO)1.HO)1.0B, HarrpHMep MeTO)1.0M
rrepBHqHOrO CBeTO)1.HO)1.a HaXO)1.HTCH Ha )1.JIHHe BOJIHbI HCTOqHHKa -
Ha )1.JIHHe BOJIHbI
630
470
HM, a BTOpHqHOrO
HM, 'ITO COOTBeTcTByeT rrOrJIOIII.eHHIO
rpa)1.HeHTHoro H3MeHeHHH XHMHqeCKOrO COCTaBa OCHOBHOH KOMrr03HII.I1H.
BO-8mOpbtX,
B CTpyKTypy )1.BYXII.BeTHOro CBeTO)1.HO)1.a MO)KHO )1.06aBI1Tb
432
T a 6 JI HU; a 21.1. TeOpeTHqeCKHe 3HaqeHHH CBeTOOT.n:aqH pa3Hblx THIIOB CBeTo.n:HO.n:OB 6eJIoro CBeqeHHH
CBeToBaH OT.n:aqa, JIM/BT 300-360
Koop.n:HHaTbl U;BeTHOCTH (x,y)
280-350
(0,31 ;0,32)
TpexU;BeTHble CBeTo.n:Ho.n:hl
240-340
(0,31 ;0,32)
CBeTo.n:Ho.n:bl c JIIOMHHo<jlOpaMH
200-280
(0,31 ;0,32)
THllhl CBeTo.n:Ho.n:OB nByxU;BeTHble CBeTo.n:Ho.n:bl nByxU;BeTHble CBeTo.n:Ho.n:bl c lllHpOKHM ClleKTpOM
(0,31 ;0,32)
BTOPOH HCTOqHHK .D.JHI nepenOrJIOllJ,eHHll
I ! !
21.11.
CBeTO.ll.HO.ll.bI 6eJIoro CBeqeHHB Ha OCHOBe KpaCHTeJIeH
I' 1
Bu6JtuoepatjJU'leCKUU cnUCOK
rJt. 21. HCmO'lHUKU 6eJtoeo CBema Ha OCHOBe npe06paaoBameJteu BOJtHbl
B CBeTO.D.HO.D.aX 6eJIoro CBeqeHHll B KaqeCTBe rrpeo6pa30BaTeJIeH .D.JIHH BOJIH HCrrOJIh3YIOT OpraHHqeCKHe MOJIeKYJIhI KpaCHTeJIeH, KOTophle, KaK rrpaBHJIO, BCTpaHBalOTCll B repMeTHK H3 3rrOKCH.D.HOH CMOJIhI (Schotter et aI., 1997) HJIH B OIITHqeCKH rrp03paqHhle rrOJIHMephI. KOHeqHOe BpeMll )KH3HH OpraHHqeCKHX MOJIeKYJI llBJIlleTCll cephe3HhIM He.D.OCTaTKOM OpraHHqeCKHX KpaCHTeJIeH. TIoCJIe orrpe.D.eJIeHHOrO qHCJIa aKTOB rrOrJIOllJ,eHHll
BH6JIHOrpa«pHQeCKHH CIIHCOK
Bando K., Noguchi Y., Sakano K., and Shimizu Y. (in Japanese) Tech. Digest, Phosphor Res. Soc., 264th Meeting, November 29 (1996).
433
CIE Commission Internationale de l'Eclairage Proceedings, 1931 (Cambridge University Press, Cambridge, 1932) . Goetz W. "White lighting (illumination) with LEDs" Fifth International Conference on Nitride Semiconductors, Nara, Japan, May 25-30 (2003). Guo X., Graff J. W., and Schubert E. F. "Photon-recycling semiconductor lightemitting diode" IEDM Technical Digest, IEDM-99, 600 (1999). Guo X., Graff J. W., and Schubert E. F. "Photon-recycling for high brightness LEDs" Compound Semiconductors 6, May/June (2000). Holcomb M.O., Mueller-Mach R., Mueller G.O., Collins D., Fletcher R. M., Steigerwald D. A., Eberle S., Lim Y. K., Martin P. S., and Krames M. "The LED light bulb: Are we there yet? Progress and challenges for solid-state illumination" Conference on Lasers and Electro-Optics (CLEO), Baltimore, Maryland, June 1-6 (2003). Ivey H. F. "Color and efficiency of luminescent light sources" I. Opt. Soc. Am. 53, 1185 (1963). Jones G., qaCTHOe co06meHHe (2000). Judd D. B. "Report of US secretariat committee on colorimetry and artificial daylight" inProceedings of the Twelfth Session of the CIE, Stockholm Vol. 1, p. 11 (Bureau central de la CIE, Paris, 1951). Justel T., Nikol H., and Ronda C. R. "New developments in the field of luminescent materials for lighting and displays" Angewandte Chemie (International Edition) 37, 3084 (1998). KarHcek Jr. R. F., qaCTHOe co06meHHe (1999). Kaufmann U., Kunzer M., Kohler K., Obloh H., Pletschen W., Schlotter P., Schmidt R., Wagner J., Ellens A., Rossner W., and Kobusch M. "Ultraviolet pumped tricolor phosphor blend white emitting LEDs" Phys. Stat. Sol. (a) 188, 143 (2001). Kim J. K., qaCTHOe co06meHHe (2005). Kim J. K., Luo H., Schubert E. F., Cho J., Sone c., and Park Y. "Strongly enhanced phosphor efficiency in GalnN white light-emitting diodes using remote phosphor configuration and diffuse reflector cup" lpn. I. Appl. Phys. - Express Letter 44, L 649 (2005). Luo H., Kim J. K., Schubert E. F., Cho J., Sone c., and Park Y. "Analysis of high-power packages for phosphor-based white-light-emitting diodes" Appl. Phys. Lett. 86, 243505 (2005). MacAdam D. L. "Maximum attainable luminous efficiency of various chromaticities" I. Opt. Soc. Am. 40, 120 (1950). MacAdam D. L. Color Measurement: Theme and Variations (Springer, New York, 1985). Morita D., Yamamoto M., Akaishi K., Matoba K., Yasutomo K., Kasai Y., Sano M., Nagahama S.-I., and Mukai T. "Watt-class high-output-power 365 nm ultraviolet light-emitting diodes" lpn. I. Appl. Phys. 43, 5945 (2004). Nakamura S., Senoh M., Iwasa N., Nagahama S., Yamada T., and Mukai T. "Superbright green InGaN single-quantum-well-structure light-emitting diodes" lpn. 1. Appl. Phys. (Lett.) 34, L1332 (1995). 15 <1>. E. Illy6epT
434
Bu6AuoepacjJU'leCICUU cnucO/c
FA. 21. HCmO'lHUICU 6eAoeo C8ema Ha OCH08e npeo6pa308ameAeu 80AHbt
Nakamura S. and Fasol G. The Blue Laser Diode (Springer, Berlin, 1997). Narendran N., Gu Y., Freyssinier-Nova J. P., and Zhu Y. "Extracting phosphorscattered photons to improve white LED efficiency" Phys. Stat. Sol. (a) 202, R60 (2005). Narukawa Y. "White light LEDs" Optics & Photonics News 15, M4, p. 27 (2004). Osram-Sylvania Corporation. Data sheet on type 4350 phosphor (2000). Potdevin A., Chadeyron G., Boyer D., Caillier B., and Mahiou R. "Sol-gel based YAG:Tb3+ or Eu3+ phosphors for application in lighting sources" !. Phys. D: Appl. Phys. 38, 3251 (2005). Radkov E., Set!ur A., Brown Z., and Reginelli J. "High CRI phosphor blends for near UV LED lamps" Proc. SPIE 5530,260 (2003). Radkov E., Bompiedi R., Srivastava A. M., Setlur A. A., and Becker C. "White light with UV LEDs" Proc. SPIE 5187, 171 (2004). Reeh U., H6hn K., Stath N., Wait! G., Schlotter P., Schneider J., and Schmidt R. "Light-radiating semiconductor component with luminescence conversion element" US Patent 6,576,930 B2 (2003). Schlotter P., Schmidt R., and Schneider J. "Luminescence conversion of blue light emitting diodes" Appl. Phys. A64, 417 (1997). Schlotter P., Baur J., Hielscher C., Kunzer M., Obloh H., Schmidt R., and Schneider J. "Fabrication and characterization of GaN/InGaN/AIGaN double heterostructure LEDs and their application in luminescence conversion LEDs" Materials Sci. Eng. B59, 390 (1999). Srivastava A. M. "Phosphors" Encyclopedia of Physical Science and Technology 3rd edition 11, 855 (2004). . Srivastava A. M. and Ronda C. R. "Phosphors" Interface (The Electrochemical Society) 12 (2), p. 48 (2003). Thornton W. A. "Luminosity and color-rendering capability of white light" !. Opt. Soc. Am. 61, 1155 (1971). Vos, J. J. "Colorimetric and photometric properties of a 2-degree fundamental observer" Color Res. Appl. 3, 125 (1978). Walter W. "Optimum phosphor blends for fluorescent lamps" Appl. Opt. 10, 1108 (1971). Wegh R. T., Donker H., Oskam K. D., and Meijerink A. "Visible quantum cutting in LiGdF4:Eu3+ through downconversion" Science 283, 664 (1999).
435
4. MOmHble CBeTO)l.HO)l.b1 6eJIoro CBeqeHHH )l.JIH OCBemeHHH I M. JI. oa)l.rYT)l.HHOB, H. A. faJIbqHHa, JI. M. KoraH, 11. T. PaccoxHH, H. IT. COmHH, A.3. IOHOBHq II CBeToTexHHKa. 2006. ,N'Q 3. C. 36-40. 5. CrreKTpbl 3JIeKTpOJIIOMHHeCueHUHH YJIbTpaifJHOJIeTOBbiX CBeTO)l.HO)l.OB Ha OCHOBe p-n- reTepocTpYKTYP THrra InGaN/AIGaN/GaN, rrOKpblTbiX JIIOMHHoifJopaMH I H. A. faJIbqHHa, JI. M. KoraH, H. IT. COmHH, C. C. illHPOKOB, A.3. IOHOBHq II
,Z:{onOJIHeHHe pe.ll.aKTOpa 1. Crroc06 H3rOTOBJIeHHH MHOr03JIeMeHTHblX 3JIeKTpOJIIOMHHeCueHTHblx rroJIyrrpoBO)l.HHKOBbIX HCTOqHHKOB CBeTa I B. A. A6paMoB, O. H. EpMaKoB, B. IT. CYIIIKOB II A.c. CCCP. M635813 ITPHOp. 09.12.1977 r. 2. KoraH JI. M., BHIIIHeBcKaH 0.11., KOBblpeBa H.M., PO)l.KHH B. C. 3JIeKTpOHHaH rrpOMbIIIIJIeHHOCTb. 1992. M2. C. 46-47. 3. CrreKTpbl JIIOMHHeCueHUHH, 3ifJifJeKTHBHoCTb H UBeTOBbie xapaKTepHcTHKH CBeTO)l.HO)l.OB 6eJIoro CBeqeHHH Ha OCHOBe p-n-reTepocTpYKTYP InGaN/GaN, rroKpbITbIX JIIOMHHoifJopaMH I M. JI. oa)l.rYT)l.HHOB, E. B. Kop060B,
437
22.1. TUnbt onmu'tecICux 80ll0ICOH
a npoCT0T3. nO,llCOeJJ:InleHIDl; 6om.m8JI Me>KMO.ll.OBrul ,nHcnepCHJI
r JI a B a
o60nollKa
l
22
BOJIOKOHHO-OllTHQECKHE CHCTEMbI CB.H3H
I\HaMerphl cepl\lleBHllhllo6onO'llCH
62,51125, 1001140, ... , 1000/1200 MI<M
nOKa3aTe.JTh nperrOMJIeHHH cepMeBHBld
1,45
P33HOcn, nOKa3aTeJleii: IIpenoMJIeHH.II
1-2 %
6 npoCTOTa nOACOeJlHHeHWI; CJlO>KHoe H3I'OTOBJIeHHe; HH3KaJI HJIH uyn:eB3JI Me)I(MO,l:(OB3JI .l{HcnepcHJI
>~
Hcpe,n:HI1MH CKOPOCTHMH rrepe,n:atm ,n:aHHblX (MeHee
1
f6HT/C) H rrepe,n:a-
10
Mynbaev, Scheiner,
2001;
1999;
Neyer et aI.,
Kibler et aI.,
2004),
1999;
Hecht,
Heatley et aI.,
1998;
Kahn, Barry,
2001).
1,45
1-2% Bnon rpcmHelITHOro DpoHID!
CJImKHOCTh IIo,lJ;COeJlHHeHIDl; CJIo~oe H3fOTQBJIeHHe; OTcyTCTBHe MeX<MO,lJ;OBOH )UfCnepcHH
.D:J:faMeTpbI cepJtl(eBHHLI/o6oJIo1JKH nOK33aTeJIL npenoMJIeHWI cepMeBHHbI
2001;
P33HOCTL nOK83arerrea npenoMJIeHIDI
91125 1,45 1-2%
JII160 Ha CBemOBbtX BOll-
Hax, pacnpocmpaHfllO/4uxCfl B cBo600HOM npocmpaHcmBe (Carruthers,
2002;
Pa3HOCTL nOKa3aTeneH IIpeJIoMJIeHIDI
6
KM).
TaKHe CHCTeMbI OCHOBaHbI JIH60 Ha CBemOBbtX BOll/taX, pacnpOCmpaHJllO-
/4UXCfl no BOllftoBOOaM (Keiser,
501125, 62,5/125, 851125
n-
CBeTO.lI;IfO,n:bl HCrrOJIb3YlOTCH B CHCTeMax CBH3H, pa6oTalOrn.I1X C HH3KI1MH 1Orn.I1X I1H0PMaU:HIO Ha KopoTKHe H cpe,n:HHe paCCTOHHI1H (MeHee
I\HaMerphl cepl\lleBHllhllo60no'lKH
nOKa3aTeJIb npe.nOMneHHH CepJtl(eBHHEd
B BOJIOKOHHO-OIITI1'IeCKI1X
CI1CTeMaX CBH311 B Ka'IeCTBe cpe,n:bI rrepe,n:a'IH HCrrOJIb3YlOTCH OT,n:eJIbHble CBeTOBo,n:bI KBapl1eBbte HJIH nOllUMepHbte )KrYTbI H3 HHX. ,[{aHHble B TaKHX
PHC.
22.l.
MHOrOMO.n:OBOe BOJIOKHO co cTyneH'laTbIM npO
JIOMJIeHHH, rro.n:.n:ep}!{HBaIOmee paCrrpOCTpaHeHHe HeCKOJIbKHX OrrTH'leCKHX MO.n:
(a).
MHorOMo.n:OBoe BOJIOKHO C rrapa60JIH'leCKHM rrpO
CHCTeMax rrepe,n:alOTcH Ha paccToHHHH HeCKOJIbKHX KI1JIOMeTpoB. I1epe,n:a'Ia
KOHCTaHTaMH pacrrpOCTpaHeHHH
HH0PMaU:HH 6ecrrpoBo,n:HbIMH CI1CTeMaMH CBH311 06bI'IHO OrpaHH'II1BaeTCH
.n:OBOH .n:HcrrepCHeH, 'leM BOJIOKHa rrpe.n:bl.n:ymero THrra. O.n:HOMo.n:OBoe BOJIOKHO co
rrpe,n:eJIaMH KOMHaTbI, XOTH B03MO)KHa rrepe,n:a'Ia 11 Ha 60JIblime paccToHHHH.
cTyrreH'laTblM rrpO
B
(6).
TaKHe BOJIOKHa 06JIa.n:aIOT MeHblIleH Me}!{MO-
MaJIblMH .n:HaMeTpaMH cep.n:u:eBHHbl H OTCYTCTBHeM Me}!{Mo.n:OBOH .n:HcrrepCHH
3TOH rJIaBe 6y,n:YT o6cY)K,n:aTbcH xapaKTepHCTI1KH rrepe,n:alOrn.eH cpe,n:bI
CI1CTeM CBH3H Ha OCHOBe CBeTo,n:110,n:OB. CTeMax CBH3H, 06bI'IHO COCTaBJIHIOT
50
MKM,
62,5
100
MKM H
MKM. ,[{l1a-
MeTpbI cep,n:u:eBHHbI rrOJII1MepHblx BOJIOKOH, KaK rrpaBHJIO, ern.e 60JIbIIIe-
22.1.
1 MM. ,[{OCTOHHCTBOM MHorOMo,n:OBbIX BOJIOKOH HBJIHeTCH npocmoma COnpfl:JICeHUfl C HCTO'IHHKaMH CBeTa. ,[{JIH TaKHX BOJIOKOH C ,n:HaMeTpaMH
OKOJIO
THllbI OllTHQeCKHX BOJIOKOH
OrrTH'IeCKl1e BOJIOKHa COCTOHT H3 KpyrJIOH cep,n:u:eBI1HbI, oKpY)KeHHOH 060JIO'IKOH.
I1oKa3aTeJIb
rrpeJIOMJIeHHH
y 060JIO'IKH (rrpH6JIH3I1TeJIbHO Ha
1%).
cep,n:u:eBHHbI
Bcer,n:a
BblIIIe,
'IeM
CBeT pacrrpocTpaHHeTcH rro cep.n:-
rv
50
MKM 06bI'IHO ,n:OCTaTO'IHO TO'IHOCTH BblpaBHHBaHHH
a = ±5
MKM.
OCHOBHbIM He,n:OCTaTKOM MHorOMo,n:OBbIX BOJIOKOH HBJIHeTCH 3Ha'II1TeJIbHaH
Me:JICMOOOBafl oucnepcufl.
u:eBHHe BOJIOKHa 6JIaro,n:apH HBJIeHHIO nOllHOcO BHympeHHeco Ompa:JICeHufl.
I10CKOJIbKY ,n:HaMeTpbI cep,n:u:eBHHbI MHorOMo,n:OBbIX BOJIOKOH HaMHoro
YCJIOBHH rrOJIHOrO BHYTpeHHero OTpa)KeHHH BbIBO,n:HTCH H3 3aKOHa CHeJIJIH-
rrpeBblIIIalOT pa60'IYIO ,n:JIHHy BOJIHbI, B BOJIHOBo,n:e o,n:HoBpeMeHHo MoryT
yca. I1PH C06JIIO,n:eHHI1 3THX YCJIOBI1H JIy'I CBeTa, rra,n:alOrn.I1H Ha rpaHHU:Y
pacrrpocTpaHHTbcH HeCKOJIbKO OrrTI1'IeCKHX MO,n:. 3TH MO,n:bI HMelOT pa3Hble
cep,n:u:eBHHa -
KOHCTaHTblpacrrpOCTpaHeHI1H__CB_eTa, H rrpH o,n:HOBpeMeHHOM BBo,n:e B BOJI-
060JIO'IKa, He MO)KeT BbIHTI1 3a rrpe,n:eJIbI cep,n:u:eBI1HbI, T. e.
6y,n:eT pacrrpOCTpaHHTbCH BHyTPI1 cep,n:u:eBHHbI rro 3Uc3acoo6pa3HOU mpa-
HOBO,n: HM Tpe6yeTcH pa3Hoe BpeMH ,n:JIH ,n:OCTI1)KeHHH KOHu:a BOJIHOBo,n:a,
eKmopuu.
'ITO rrpl1Bo,n:HT K yIIIl1peHHIO OrrTH'IeCKOrO HMrryJIbCa H OrpaHH'IeHHIO MaK-
B
CI1CTeMaX CBH3H I1CrrOJIb3YlOT HeCKOJIbKO THrrOB OrrTI1'IeCKHX BOJIO-
CI1MaJIbHOH CKOPOCTH rrepe,n:a'IH ,n:aHHbIX rrpH 3a,n:aHHOH ,n:JII1He BOJIHOBo,n:a.
KOH: BOllOKHO CO cmyneHliambtM npocpUlleM nOKa3amellfl npellOMlleHUfl,
B MHorOMo,n:OBbIX BOJIOKHaX C rrapa60JIH'IeCKI1M rrpoI1JIeM rrOKa3aTeJIH
MHOcOMOOOBoe BOllOKHO c cpaoueHmHbtM npocpUlleM nOKa3amellfl npellOMlleHUfl H OOHOMOOOBoe BOllOKHO. Ha Pl1c. 22.1 rrOKa3aHbI Bce TpH Tl1rra
rrpeJIOMJIeHI1S1 Me)KMo,n:OBaSl ,n:HcrrepCHSI 3Ha'IHTeJIbHO MeHbIIIe, 'IeM B CJIy'Iae
OrrTI1'IeCKHX BOJIOKOH H I1X rrp0HJIH rrOKa3aTeJIH rrpeJIOMJIeHI1H.
cTyrreH'IaTOrO rrpoHJISI. ,[{HaMeTp cep,n:u:etmHbI O,n:HOMO,n:OBbIX BOJIOKOH TaK MaJI
(5-10
MKM), 'ITO
MHoroMo,n:oBble BOJIOKHa co cTyrreH'IaTbIM rrp0HJIeM rrOKa3aTeJIH rrpe-
B HI1X MO)KeT pacrrpOCTpaHSlTbCSI TOJIbKO o,n:Ha OrrTI1'IeCKaSl Mo,n:a. ,[{OCTOI1H-
JIOMJIeHI1H 06JIa,n:a1OT cpaBHHTeJIbHO 60JIbIIIHMH ,n:HaMeTpaMH cep,n:u:eBHHbl.
CTBOM TaKHX BOJIOKOH SlBJISleTcSI omcymcmBue Me:JICMOOOBOU oucnepcuu,
HarrpHMep, ,n:HaMeTpbI cep,n:u:eBHH KBapu:eBblx BOJIOKOH, HCrrOJIb3yeMblx B CH-
a He,n:OCTaTKOM -
CllO:JICHOCmb COnpfl:JICeHUfl C HCTO'IHHKaMH CBeTa. I13-3a
Dt. 22.
438
BOJtOKOltltO-OnmutteCKue cucmeMbl C6J!3U
22.3.
MaJlOrO .n.HaMeTpa cep.n.u.eBHHbI BOJlOKHa HPKOCTb HCTOqHHKOB CBeTa )l.OJDKHa 6b1Tb cpaBHHMa C HPKOCTbIO JIa3epOB. n03TOMY )l.JIH pa60TbI C O)l.HOMO.n.OBbIMH BOJIOKHaMH HCnOJIb3YIOTCH CBeTO)l.HO)l.bI C Topu.eBbIM H3JIyqeHHeM H cynepJIIOMHHecu.eHTHble CBeTO)l.HO)l.bI. TOqHOCTb BblpaBHHBaHHH CBeTO)l.H,
O)l.OB C TaKHMH BOJIOKHaMH )l.OJI)KHa COCTaBJIHTb HeCKOJIbKO MHKpOMeTpOB.
I' i
,L{JIH )l.HaMeTp
onmUtteCKOU MOU{Hocmu
nOBbIllIeHHH Cep)l.u.eBHHbI
BOJIOKHa
H
pa3HOCTb
nepe)l.aBaeMOro
nOKa3aTeJIeH
CHrHaJIa
npeJIOMJIeHHH
cep)l.u.eBHHbI H 060JIOqKH )l.OJI)KHbI 6b1Tb KaK MO)KHO 60JIbllie. B HaCTOHru.ee BpeMH BbmYCKaIOTCH cneu.HaJIbHbIe BOJIOKHa, )l.HaMeTp Cep)l.u.eBHHbI KOTOpblX npeBbIllIaeT
1
MM. Ho TaKHe BOJIOKHa H3-3a 60JIblliOH Me)KMO)l.OBOH
)l.HCnepCHH He npHrO)l.HbI )l.JIH HCnOJIb30BaHHH B CHCTeMax CBH3H.
,L{JIH
nepe)l.aqH
HCnOJIb3YIOTCH H
1,55
439
Me3ICMOa06aJ! aucnepcuJ! 6 onmUtteCKuX 60JtOKltaX
CHrHaJIOB
OllTHqeCKHe
no
OKHa
KBapu.eBblM
BOJIKOHHbIM
np03paqHOCTH
MKM. OKHO np03paqHOCTH Ha )l.JIHHe BOJIHbI
CBeTOBO)l.aM
0,85 MKM, 1,3 MKM 0,85 MKM npHrO)l.HO )l.JIH
pa60TbI co CBeTO)l.HO)l.aMH Ha OCHOBe GaAs H JIa3epaMH. O)l.HaKO Ha HCnOJIb30BaHHe 3Toro OKHa HaKJIa)l.bIBaIOT OrpaHHQeHHe KopOTKHe paCCTOHHHH nepe)l.aQH )l.aHHbIX, QTO CBH3aHO C )l.HCnepCHeH: H BbICOKHM "3aTyxaHHeM H3JIyQeHHH B KBapu.eBbIX BOJIOKHaX Ha 3TOH )l.JIHHe BOJIHbI. OKHO np03paQHOCTH
1,3
MKM TaK)Ke HCnOJIb3yeTcH npH pa60Te co CBeTO)l.HO)l.aMH H JIa3epaMH.
3TO OKHO xapaKTepH3yeTcH cpaBHHTeJIbHO HH3KHMH nOTepHMH H HYJIeBOH )l.HcnepcHeH, QTO n03BOJIHeT ocyru.ecTBJIHTb BbICOKOCKOPOCTHYIO nepe)l.aQy )l.aHHbIX, B QaCTHOCTH, B O)l.HOMO)l.OBbIX BOJIHOBO)l.aX H BOJIOKHaX C rpa)l.HeHT-
1,55
MKM
npHMeHHeTCH
)l.JIH
HbIM npoqlHJIeM nOKa3aTeJIH npeJIOMJIeHHH. B OKHe np03paqHOCTH Ha6JIIO)l.aIOTCH
22.2.
CneKTp 3aTyxaHHJI H3JIyqeHHJI B KBapu.eBbIx
caMbIe
HH3KHe
nOTepH,
n03TOMY OHO
CKOPOCTHOH: nepe)l.aqH )l.aHHbIX Ha 60JIblliHe paCCTOHHHH. ,L{JIH 06eCneqeHHH BbICOKOH: CKOPOCTH nepe)l.aqH )l.aHHbIX He06xo)l.HMO HCnOJIb30BaTb O)l.HOMO-
H nOJIHMepHbIx BOJIOKHax
)l.OBbIe CBeTOBO)l.bI. nOCKOJIbKY TPY)l.HO opraHH30BaTb 3$$eKTHBHYIO CBH3b KBapu. (Si02) 06JIa)l.aeT OTJIHqHblMH OllTHqeCKHMH CBoHcTBaMH, a TaK)Ke BbICOKOH cTa6HJIbHOCTbIO. Ha pHC.
22.2
nOKa3aH cneKTp 3aTyxaHHH
H3JIyqeHHH B KBapu.eBblx BOJIOKHax. BH)l.HO, qTO MHHHMaJIbHbIe nOTepH
0,2
)l.B/KM cooTBeTcTBYIOT )l.JIHHe BOJIHbI
1,55
CBeTO)l.HO)l.OB C O)l.HOMO)l.OBbIMH BOJIOKHaMH, )l.JIH pa60TbI B OKHe np03paqHOCTH
1,55
MKM npe)l.nOqTHTeJIbHee HCnOJIb30BaTb JIa3epbI, a He CBeTO)l.HO)l.bI.
,L{JIH nepe)l.aqH )l.aHHblX Ha KopOTKHe paCCTOHHHH B nOCJIe)l.Hee BpeMH Bce qaru.e npHMeHHIOT nOJIHMepHbIe OllTHqeCKHe BOJIOKHa (Neyer et ai.,
MKM.
1999;
Kibler et ai.,
nOqTH B
1000
2004).
O)l.HaKO nOTepH B nOJIHMepHbIx CBeTOBO)l.aX
pa3 npeBbIllIaIOT nOTepH B KBapu.eBbIx BOJIOKHax. n03TOMY
paccToHHHH nepe)l.aqH )l.aHHblX 3)1.eCb HaXO)l.HTCH B npe)l.eJIax OT HeCKOJIbKHX MeTpoB )1.0 HeCKOJIbKHX COTeH MeTpOB, T. e. TaKHe CBeTOBO)l.bI MoryT HCnOJIb30BaTbCH )l.JIH 06ecneqeimH CBH3H, HanpHMep, B aBTOM06HJIe (Kibler et ai.,
2004)
Ha pHC.
HJIH CaMOJIeTe.
22.3
nOKa3aH cneKTp 3aTyxaHHH nOJIHMepHblx OllTHqeCKHX BO-
JIOKOH. npe)l.nOQTHTeJIbHOe OKHO np03paQHOCTH )l.JIH 3THX BOJIOKOH COOTBeTcTByeT )l.JIHHe BOJIHbI
650
HM, Ha KOTOPOH nOTepH nopH)l.Ka
0,1-0,2
)l.B/M.
Ha 60JIee KOPOTKHX )l.JIHHaX BOJIH 3aTyxaHHe B nOJIHMepHblx BOJIOKHaX eru.e CHJIbHee, H npH 3TOM B03paCTaeT )l.HCnepcHH. n03TOMY OnTHMaJIbHOH )l.JIHHOH BOJIHbI npH pa60Te C nOJIHMepHbIMH BOJIOKHaMH CQHTaeTCH
-J-_ /
/
--
/ IIomo~eHHe~
MKH3.JI}"IeHHll
/ /
0,01 L-_l-_L-_...L-_...L_-'-_-L_-L._-L_~_-1.._---L_--I 0,6 0,8 1,0 1,2 1,4 1,6 1,8 ~a BOJlHld A., MKM PHC.
22.2.
22.3.
3KcnepHMeHTaJIbHO nOJIyqeHHblH cneKTp 3aTyxaHlfll 1f3JIYQeHlfll B KBap-
Hlflf), CB1I3aHHble B KOPOTKOBOJIHOBOH 06JIaCTif C peJIeeBCKlfM paccellHlfeM, a B IfH
C KOJIe6aHlfllMif MOJIeKYJI (lfH
HM.
Me1KMo,ZJ:oBaJI ,ZJ:HcnepCHJI B onTHlleCKHX BOJIOKHaX
~e)KMO)l.OBaH )l.HCnepCHH xapaKTepHa )l.JIH MHOrOMO)l.OBblX OnTHQeCKHX BOJIOKOH, 06JIa)l.aIOru.HX no cpaBHeHHIO C O)l.HOMO)l.OBbIMH CBeTOBO)l.aMH 60JIbllIHM )l.HaMeTpOM Cep)l.u.eBHHbI HJIH 3HaQHTeJIbHOH: pa3HHu.eH: Me)K)l.y 3HaQeHHHMH nOKa3aTeJIH npeJIOMJIeHHH cep)l.u.eBHHbI H 060JIOQKH. THnHQHbIe 3HaQeHHH )l.HaMeTpa Cep)l.u.eBHHbI JIe)KaT B npe)l.eJIax MHOrOMO)l.OBbIX BOJIOKOH H
u.eBblX BOJIOKHaX (cnJIOlIIHall JIlfHlfll) If TeOpeTlfQeCKlfe npe,ll;eJIbI (lIITplfxoBble JIIf-
650
5-10
50-1000
MKM )l.JIH
MKM )l.JIH O)l.HOMO)l.OBbIX. npH nOCTpoeHHH
reOMeTpHQeCKOH MO)l.eJIH CBeTOBO)l.a PYKOBO)l.CTBYIOTCH TeM, QTO pa3HbtM
onmuttecKUM MOaaM COOTBeTCTBYIOT JIYQH CBeTa, pacnpOCTpaHHIOru.HeCH BHyTpH Cep)l.u.eBHHbI BOJIOKHa no)l. pa3HbtMU yeJLaMU. nOCTpoeHHe OllTHQeCKOH: MO)l.eJIH MHOrOMO)l.OBOrO OnTHQeCKOrO BOJIOKHa He HBJIHeTCH u.eJIbIO
Fit. 22. BOJl~ICOHHo-onmutteclCue cucmeMbl
440
22.3. Me:JICM08oBafl 8ucnepcufl B onmuttecICux BOJlOICHaX
CBfl3U
441
10,0 /
I/l/
1,0
~ I
~
~ tv)
/
L
0,1
if
I""
/
j
PHC.
22.4.
feOMeTpH'IeCKall Mo.n:eJIb .n:JIlI oueHKH Me)!{Mo.n:oBoH .n:HcnepcHH B MHoroMO.n:OBOM OnTHqeCKOM BOJIOKHe
'---.---'
~
rrpeAnO~eITbHOe
nOTepH TOqHOCTH npHMeHHTb K JIID60MY qHCJIY MO,n, pacnpoCTpaHHIDmHXCH
OKHO rrp03paQHOCTH
B CBeTOBo,ne.
):\JIJ! OCYII.\eCTBJIeHIDI CBJl3
BpeMeHa pacnpocTpaHeHHH caMoH 6bICTPOH H caMoH Me,nJIeHHOH MO,nbI Ha e,nHHHUY ,nJIHHbI BOJIOKHa onpe,neJIHIDTCH Bblpa)KeHHHMH
Tfast
500
600
700 ):(mrna BOJIHbI A, HM
800
=
L
L/ cos Be
C nl
C nl
/_' Ts!ow =
/
(22.1)
'
900 r,ne KpHTHqeCKHH yrOJI nOJIHOrO BHYTpeHHero OTpa)KeHHH BbIBO,nHTCH H3 3aKOHa CHeJIJIHyca:
PHC. 22.3. CneKTp 3aTyxaHHlI H3JIyqeHHlI B nOJIHMepHblX BOJIOKHaX PMMA co cTyneHqaTbIM npoqlHJIeM nOKa3aTeJIlI npeJIOMJIeHHlI. Ha .n:JIHHe BOJIHbI 650 HM, npe.n:nOqTHTeJIbHOH .n:JIlI ocy~eCTBJIeHHlI CB1I3H no 3THM BOJIOKHaM, 3aTyxaHHe coCTaBJIlIeT 150 .n:E/KM (cnpaBOqHble .n:aHHble Toray Industries Ltd., 2002)
(22.2)
Tor,na 3a,nep)KKY BpeMeHH ,nOCTH)KeHHH Mo,naMH npoTHBOnOJIO)KHOrO KOHua CBeTOBo,na Ha e,nHHHUY ,nJIHHbI,
HJIH BOJIHOBO,nHYID ,nHcnepcHID,
MO)KHO
HaHTH H3 Bblpa)KeHHH
f}"T
3Toro pa3,neJIa. 3,necb 6y,neT ormcaH cnoc06 oueHKH Me)KMo,noBOH ,nHcnep-
L
=
Tsl ow -
L
Trost
= 'iiI
. (
c
1 ). cosBc-1
(22.3)
CHH B OnTH-tleCKOM BOJIOKHe.
n! - nOKa3aTeJIb npeJIOMJIeHHH cep,nueBHHbI n2 - nOKa3aTeJIb npeJIOMJIeHHH ero 060JIOqKH.
TIYCTb JIOKHa,
OnTHqeCKOrO BOCqHTaeM, qTO B
CBeTOBo,ne o,nHoBpeMeHHo pacnpocTpaHHIDTcH HeCKOJIbKO OnTHqeCKHX MO,n. Ha pHC.
22.4
nOKa3aHbI ,nBe TaKHe MO,nbI. TIOCKOJIbKY yrJIbI pacnpocTpa-
HeHHH MO,n pa3JIHqHbI, MO,nbI npoxo,nHT OnTHqeCKHe nyTH pa3HoH ,nJIHHbI.
qeM 60JIbIIIe MO,n MO)KeT pacnpocTpaHHTbcH no CBeTOBO,ny, TeM 60JIbIIIe BpeMH 3a,nep)KKH Me)K,ny caMoH 6bICTPOH H caMOH Me,nJIeHHOH Mo,naMH. CJIe,nOBaTeJIbHO, qeM 60JIbIIIe OnTHqeCKHX MO,n no,n,nep)KHBaeTCH CBeTOBo,nOM, TeM BblIIIe B HeM Me)KMo,nOBaH ,nHcnepCHH.
Ynpa)!{HeHHe. Ou,eHlCa Me:JICM08oBOU 8ucnepcuu B onmUtteCICOM BOJlOICHe
onpe,neJIHeTCH pa3HocTbID BpeMeHeM ,nOCTH)KeHHH KOHua CBeTOBo,na caMoH
ITYCTb nOKa3aTeJIb npeJIOMJIeHHlI cep.n:ueBHHbI MHorOMo.n:OBoro OnTHqeCKOrO BOJIOKHa 'iiI 1,45, a nOKa3aTeJIb npeJIOMJIeHHlI ero 060JIOqKH 'ii2 1,4. Tpe6yeTclI onpe.n:eJIHTb BpeMlI 3a.n:ep)!{KH Me)!{.n:y caMoH 6b1CTPOH H caMoH Me.n:JIeHHOH OnTHqeCKHMH Mo.n:aMH, a TaK)!{e paCCqHTaTb MaKCHMaJIbHO B03MO)!{HYIO CKOPOCTb nepe.n:aqH
6bICTPOH H caMoH Me,nJIeHHOH H3 OnTHqeCKHX MO,n, HOpMHpoBaHHoH Ha
Ha paccTollHHe
Mo,na, HMeIDmaH MeHbIIIHH yroJI pacnpocTpaHeHHH (), ,nOCTHrHeT ,npyroro KOHua CBeTOBo,na paHbIIIe.
,nJIHHy CBeTOBo,na B
MeJICM0008afl oucnepcufl
BHyTpH BOJIOKHa
L. =
cln!
~ V gr . CaMaH 6bICTpaH on-
THqeCKaH Mo,na 06JIa,naeT HaHMeHbIIIHM yrJIOM pacnpOCTpaHeHHH, KOTOPbIH 6y,neM CqHTaTb npH6JIH)KeHHO paBHbIM HyJIID, T. e. ()m=O ~
00 •
CaMaH Me.n-
JIeHHaH OnTHqeCKaH Mo,na 06JIa,naeT HaH60JIbIIIHM yrJIOM pacnpOCTpaHeHHH, KOTOPbIH 6y,neM CqHTaTb npH6JIH)KeHHO paBHbIM KpHTHqeCKOMY yrJIy nOJIHOro BHYTpeHHero OTpa)KeHHH, T. e. ()m ~
1 KM.
(22.2) HaH.n:eM BeJIHqHHY Be ~ 15° . .llJIlI BbIqHCJIeHHlI BpeMeHHOH 3a.n:ep)!{KH HCnOJIb3yeM Bblpa)!{eHHe (22.3): f}"T 170 HC. BeJIHqHHa f}"T onpe.n:eJIlIeT MHHHMaJIbHOe BpeMlI nepe.n:aqH o.n:Horo 6HTa HH¢OpMaUHH. Tor.n:a MaKCHMaJIbHYIO CKOPOCTb nepe.n:aqH .n:aHHblX MO)!{HO oueHHTb KaK fmax = 1/170 HC = 5,8 M6HT/C. I13 paCqeTOB BH.n:HO, qTO Me)!{Mo.n:OBall .n:HcnepCHlI MO)!{eT 3aMeTHO BJIHlITb Ha napaMeTpbI OnTHqeCKHX CHCTeM CB1I3H. IT03TOMY B CHCTeMax, Tpe6ylO~Hx BbICOKHX CKopOCTeH nepe.n:aqH .n:aHHbIX, npe.n:nOqTHTeJIbHee HCnOJIb30BaTb O.n:HOMo.n:OBble BOJIOKHa HJIH MHorOMo.n:OBble, HO C rpa.n:HeHTHbIM npO¢HJIeM nOKa3aTeJIlI npeJIOMJIeHHlI. PemeHHe. I13 3aKOHa CHeJIJIHyca
paCqeTaX TaK)Ke npe,nnOJIaraeTCH, qTO cpa30BaH H rpynnoBaH CKO-
POCTH onpe,neJIHIDTCH Bblpa)KeHHeM Vph
=
=
()c. TaKoe npH6JIH)KeHHe MO)KHO 6e3
=
442
D!. 22. BOI!OICOHHO-OnmU'leclCue cucmeMbl CBJ!3U
22.4.
22.4. XpOMamU'leClCaJ! iJucnepcuJ! B onmU'leclCUX BOI!OICOHaX
443
XpOMaTH'IeCKaH AHcnepcHR B OnTH'IeCKHX
ii
BOJlOKOHax
go
aIs::11.
XpOMaTHtleCKafi ,LI.HCnepCHfi TaK1Ke flBJIfleTCfI <paKTopoM, OrpaHHqHBaIOmHM nponycKHylO cnoco6HOCTb OnTHqeCKHX BOJIOKOH. XpOMaTHqeCKafi ,LI.HCnepCHfi Bbl3BaHa 3aBHCHMOCTbIO nOKa3aTeJIfi npeJIOMJIeHHfI OT ,LI.JIHHbI 1 BOJIHbl ). Ha pHC. 22.5 nOKa3aHbI 3aBHCHMOCTH <pa30Boro H rpynnoBoro nOKa3aTeJIeH npeJIOMJIeHHfI KBapua OT ,LI.JIHHbI BOJIHbI. <Pa30BbIH nOKa3aTeJIb
i!i!:i 1,48
n=-,
(22.4)
Vph
"
I'\.
- 80
)8 ~ I " ~5 ~ n~~ ,~g- 1,47 1-l--+-~>oI,r".....-I-f7-/)b/'-::"'!---=-+-+-+-I-+-+-+-I-+--I-p-::;;;d 40
I"--.. ~L--k: ~~-+~~~~~-~---I~ -K ---- - ----- --- -_.- .- -- _.- -".'; -_. -". -- -- ------- . --
IS::
c
I'
c:=
npeJIOMJIeHHfI onpe,LI.eJIfleTCfI Bblpa)KeHHeM
_
- 120
I'
!;j
0
1,46
~
"~ 0
a rpynnoBoH
_
5
c
(22.5)
=-.
ngr
Vgr
3,L1.eCb Vph H Vgr -
<pa30Bafi H rpynnoBafi CKOPOCTH pacnpocTpaHeHHfI MO,LI.
B KBapue. (/Ja30BbtU U epynnoBou nOlW3ame/l,U npe/l,OM/I,eliUR CBfl3aHbI COOTHOIIIeHHeM
_
_ ,an _ ,an
ngr
=n
-
A
dA
=n
-
AO
g-
1,45
/~,
oO
5
I
"
, ,,
1,44
I=:
XpOMaTIflleCKaJI
,
I\HcnepcHli
0,5
1,0
(22.6)
dAo .
1,5 )J.mma BOllHld
PHC.
22.5.
A.,
2,0
MI<M
3aBHcHMoCTH 4la30Boro H rpynnoBoro nOKa3aTeJIeM npeJIOMJIeHHH, a TaK-
npH HaJIHqHH ,LI.HCnepcHH B OnTHqeCKOM BOJIOKHe pa3HocTb rpynnoBblx
)Ke xpOMaTHqeCKOM .D:HCnepCHH KBapu.eBoro OnTHqeCKOrO BOJIOKHa OT .D:JIHHbI BOJI-
CKopocTeH caMoro Me,LI.JIeHHOrO H caMoro 6bICTporo UBeTOB OnTHqeCKOrO
Hbi H3JIyqeHHH; ~AO
A ~ 1,3
CHrHaJIa onpe,LI.eJIfleTCfI Bblpa)KeHHeM
c angr II....l.Vgr I --~·~·I....l.A, ngr i\
r,LI.e ~A
-
i\,
(22.7)
Cna,LI.OM
OnTHqeCKOrO
BOJIOKHa ,LI.JIHHOH
CHrHaJIa
nOCJIe
llIHpHHa cneKTpa OTITHqeCKOrO CHrHaJia B BaKYYMe. ilPH
JIHHHflMH, B CHCTeMax CBfl3H Ha HX OCHOBe xpOMaTHqeCKafi ,LI.HCnepCHfi COBMeCTHO C Me)KMO,LI.OBOH ,LI.HCnepCHeH flBJIfllOTCfI <paKTopaMH, OrpaHHqHBalOmHMH nOJIOcy nponYCKaHHfI.
rrmpHHa CneKTpa OnTHqeCKOrO· CHrHaJIa.
XpOMamUtteCICaR aUCnepCUR Onpe,LI.eJIfleTCfI BpeMeHeM Me)K,LI.y
-
MKM xpOMaTHqeCKaH .D:HCnepCHH B KBapu.eBoM BOJIOKHe paBHa HYJIIO
npOXO)K,LI.eHHfI
HM
OnTHqeCKOrO
L:
YnpaJKHeHHe. Ol{eHlCa xpOMamU'leCICOU iJucnepcuu B CBemoBoiJax BblBe.D:HTe ypaBHeHHH
(22.6)
H
(22.7).
OTBeTbTe Ha Bonpoc, nOqeMY npH HC-
nOJIb30BaHHH nOJIynpOBO.D:HHKOBbIX JIa3epOB BMeCTO CBeTO.D:HO.D:OB BJIHHHHe xpoMaTHqeCKOM .D:HCnepCHH 3HaqHTeJIbHO CHH)KaeTCH.
(22.8)
B
nOJIHMepHblx OUTHqeCKHX BOJIOKHaX Ha Bcex pa60qHX ,LI.JIHHaX BOJIH
Ha6JIIO,LI.aeTCfI cymecTBeHHafi xpOMaTHqeCKafi ,LI.HCnepcHfi. MHHRMaJIbHble XpOMaTHqeCKafi Ha
pHC.
22.5
,LI.HCnepCHfi npHBe,LI.eHa
H3MepfleTCfI xpOMaTHqeCKafi
B
e,LI.HHHuaX ,LI.HCnepcHfi
nC/(HM·KM). B
KBapueBbIX
BOJIOKHax. nOCKOJIbKY CBeTO,LI.HO,LI.bI 06JIa,LI.a1OT rrmpOKHMH cneKTpaJIbHbIMH
650 HM, a ,LI.RaB Ta6JIRue 22.1
nOTepR B TaKRX BOJIOKHaX Ha6JIIO,LI.aIOTCfI Ha ,LI.JIHHe BOJIHbI na30H
500-600
HM CqHTaeTCfI 30HOH HR3KHX nOTepb.
npHBe,LI.eHbI ,LI.aHHble 0 xpOMaTHqeCKOH ,LI.HCnepCHH B nOJIRMepHbIX BOJIOKHaX H3 PMMA. 113 3THX ,LI.aHHbIX CJIe,LI.yeT, qTO Ha ,LI.JIHHe BOJIHbI
I) XpOMaTI:I'IeCKaH .D:HCnepCHH BKJIIOqaeT B ce6H .D:Be COCTaBJIHIOIUHe -
MaTepH-
650
HM
Ha6JIIO,LI.aeTCfI HaHMeHbIIIafi xpOMaTHqeCKafi ,LI.HCnepCHfI, n03TOMY HMeHHO
aJIbHYIO .D:HCnepCHIO, CBH3aHHYIO C 3aBHCHMOCTbIO nOKa3aTeJIH npeJIOMJIeHHH MaTepHaJia OnTHqeCKHX BOJIOKOH OT .D:JIHHbI BOJIHbI, H BOJIHOBO.D:HYIO .D:HCnepCHIO, CBH3aHHYIO C 3aBHCHMOCTbIO BbinOJIHeHHH YCJIOBHM nOJIHOrO BHYTpeHHero OTpa)KeHHH
Ta6
JI H
U. a 22.1.
XpOMaTHqeCKaH .D:HCnepCHH B nOJIHMepHblX BOJIOKHaX H3 PMMA.
(C pa3pellIeHHH
R.
Marcks von Wurtenburg, MiteJ Corporation,
2000
CHrHaJia Ha rpaHHu.e cep.D:u.eBHHbI H 060JIOqKH OnTHqeCKOrO BOJIOKHa OT llIHPHHbi cneKTpaJIbHOM JIHHHH CHrHaJia. B
MHOrOMO.D:OBbIX BOJIOKHaX OCHOBHOM BKJIa.D:
.llJIHHa BOJIHbI, HM
525 560 650
XpOMaTHqeCKaH .D:HCnepCHH, nC/(HM·KM)
700 500 320
B xpOMaTHqeCKYIO .D:HCnepCHIO BHOCHT MaTepHaJIbHaH .D:HCnepCHH, a B O.D:HOMO.D:OBbIX BOJIOKHaX -
BOJIHOBG.D:HaH.
(llpuM. peiJ.)
444
rlt.
22.5. l{uCltOBaJl anepmypa onmU'leCKUX BOltOKOH
22. BOltOKOHHO-OnmU'lecf'-Ue cucmeMbl CBJl3U
OHa HBnHeTCH pa60qeH ~nHHoH BonHhl MHorHX CHCTeM CBH3H Ha OCHOBe rronHMepHhlx cBeToBo~oB. YnpalKHeHHe. CpaBHeHue Me:J/CMOaOBOU U xpOMamU'leCKOU aucnepcuu ):{HaMeTp Cep}l,~eBHHbI MHOrOMO}l,OBOrO BOJIOKHa }l,JIHHOH rrpo<jJHJIeM rroKaS3TeJI5I rrpeJIOMJIeHH5I paBeH
cep}l,~eBHHbI OrrTOBOJIOKHa
nl = 1,45,
62,5
3
KM co cTyrreHlJaTbIM
aero 060JIOlJKH
850
CBen C yrnaMH pacrrpOCTpaHeHHH, rrpeBhIIlIalOIII.HMH BXO~HylO arrepTYPY, BhIXO~HT B 060nOqKY, r~e H TepHIOTCH. BXO~HaH arrepTypa BonOKHa orrpe~enHeTCH H3 3aKOHa CHennHyca. KaK rrOKa3aHO Ha pHC. 22.6 MaKcHManhHhIH yron Bxo~a nyqeH B BonOKHO 3a~aeTCH Bhlpa)!{eHHeM
MKM. I10KaSaTeJIb rrpeJIOMJIeHH5I
n2 =
1,4. C
BXO}l,OM BOJIOKHa
CHalJaJIa COe}l,HH5IeTC5I CBeTO}l,HO}l, C llIHPHHOH crreKTpaJIbHOH JIHHHH JIasep, HSJIYlJaIOLII:HH Ha }l,JIHHe BOJIHbI
50
(22.9)
nair· sin Bair = nl • sinB c ·
HM, saTeM
HM, C llIHPHHOH crreKTpaJIbHOH JIHHHH
5
HM. Tpe6yeTc5I }l,JI5I 060HX CJIYlJaeB paCClJHTaTb MeJKMO}l,OBYIO }l,HCrrepCHIO, H xpOMaTHlJecKYIO }l,HcrrepcHIO H cpaBHHTb rrOJIYlJeHHble peSYJIbTaTbl.
f10CKOJIhKY rrOKa3aTenh rrpenoMneHHH B03~yxa rrpaKTHqeCKH paBeH e~HHH u.e, MaKcHManhHhIH yron orrpe~enHeTcH KaK
(22.10)
Bair = arcsin (nl . sin Bc).
22.5.
qHCJIOBWI anepTypa onTHlIeCKHX BOJIOKOH
B COOTBeTCTBHH C ycjjoIlHeM rronHoro BHYTpeHHero OTpa)!{eHHH B cepk u.eBHHe BonOKHa 6e3 rrOTeph MoryT rrpOXO~HTh TonhKO Te nyqH, yron pacrrpOCTpaHeHHH KOTOPhIX MeHhilie KpHTHqeCKOrO yrna rronHoro BHYTpeHHero OTpa)!{eHHH. OTCIO~a cne~yeT, qTO nyqH CBen C 60nhIlIHMH yrnaMH pacrrpOCTpaHeHHH rrpOCTO He rrorra~YT B BonOKHO. )l.anee paCCMOTpHM rrpo6neMY 3cpcpeKTHBHOCTH CBH3H CBeTO~Ho~a C OIITHqeCKHM BonOKHOM. f1pek rronaraeTCH, qTO BonOKHO 06na~aeT rronHpOBaHHOH rrnocKoH rroBepxHocThlO, pacrrOnO)!{eHHOH rreprreH~HKynHpHo OrrTHqeCKOH OCH BonOKHa, KaK rrOKa3aHO Ha pHC. 22.6. 3aKOH CHeJlJluyca:
445
nair sin 6 air = n l sin 6 c
TelIeCHbIH yroll 21t (1 - cos 6 air)
cep.lUleBHHa
3TOT yron 3a~aeT KOHYC pa3peIlIeHHhlx yrnoB, rroKa3aHHhIH Ha pHC. 22.6. JIyqH CBeTa, rrOrra~alOIII.He B cep~u.eBHHy OrrTHqeCKOrO BonOKHa rro~. yrnaMH pacrrpOCTpaHeHHH, ne)!{aIII.HMH BHyTpH KOHyca, pacrrpOCTpaHHIOTCH rro BonOKHY 6e3 rrOTeph. )l.pyrHM crroc060M 3a~aHHH BXO~Horo KOHyca HBnHeTCH 1lUClt08aR anepmypa BonOKHa, orrpe~enHeMaH KaK
NA =
nl . sin Bc = nair· sin Bair = sin Bair ~ Bair ,
(22.11)
r~e ycnoBHe sin Bair ~ Bair BhIIIonHHeTCH TonhKO ~nH rte60JLbUlUX3HaqeHHH qHCnOBOH arrepTyphI. no cBoeH CyTH qHCnOBaH arrepTypa 3a~aeT MaKCHManhHhIH yron OTKnOHeHHH OT OCH CBeTOBo~a, rrpH KOTOPOM eIII.e HMeeT MeCTO rronHoe BHyTpeHHee OTpa)!{eHHe. THrrHqHhle 3HaqeHI:IH qHCnOBOH arrepTyphI ~nH KBapu.eBhIX O~HOMO~OBhIX BonOKOH 6nH3KH K 0,1, a ~nH MHorOMO~OBhIX paBHhI 0,15-0,25. )l.nH rronHMepHhIX BonOKOH 3HaqeHHH arrepTyphI ne)!{aT B ~Harra30He 0,2-0,4. TenecHhIH yron, cooTBeTcTBYIOIII.HH orrpe~eneHHoMy 3HaqeHHIO qHCnOBOH arrepTyphI, BhlqHCnHeTCH KaK
n=
27r . (1 -
cos Bair ) =
27r [1 -
cos (arcsin(N A))]
~ 7rN A2.
(22.12)
3~eCh
Hcrronh30BaHhI rrpH6nH)!{eHHH sin Bair ~ Bair H cos Bair ~ 1 - (1/2) B~ir> crrpaBe~nHBhle ~nH ManhlX yrnOB. nOCKOnhKY MOIII.HOCTh H3nyqeHHH CBeTO-
IQUCJl060.J1 anepmypa PHC.
22.6.
HJIJIIOCTpa~H5I lJHCJIOBOH arrepTypbl
NA
(NA)
= nair
sin 6air = sin 6 air
OIITHlJeCKOrO BOJIOKHa. HarrpH-
~Ho~a rrpOrropu.HoHanhHa BenHqHHe TeneCHoro yrna, B cnyqae He60nhIlIHX yrnoB MOIII.HOCTh H3nyqeHHH CBeTO~Ho~a, rrorra~alOIII.ero B BonOKHO, orrpe~enHeTCH KBa~paTOM qHCnOBOH arrepTyphI BonOKHa. YnpalKHeHHe. OnpeaelteHUe a¢¢eKmuBHocmu BBOaa U3ltY'leHUJl CBemOaUOaa B mope/,{ onmU'leCK020 BOltOKHa PaccMaTpHBaeTC5I CBeTO}l,HO}l, C TOlJelJHOH 06JIaCTbIO HSJIYlJeHH5I H MOLII:HOCTbIO
Mep, rrpH BXO}l,HOH yrJIOBOH arrepType OrrTHlJeCKOrO BOJIOKHa co CTOPOHhl BOS}l,yxa
Bair = 11,50
lJHCJIOBa51 arrepTypa paBHa
0,2
HSJIYlJeHH5I B rroJIyc<jJepy
1
BT. ):{JI5I yrrp0LII:eHH5I paClJeTOB ClJHTaeM, lJTO HHTeH-
CHBHOCTb HSJIYlJeHH5I CBeTO}l,HO}l,a He saBHCHT OT yrJIa HSJIYlJeHHlI. Tpe6yeTclI orrpe-
f1PH BhIIIonHeHHH ycnoBHH rronHoro BHYTpeHHero OTpa)!{eHHH BHyTph OrrTHqeCKOrO BonOKHa 6e3 rroTeph rrpoxo~HT TonhKO nyqH CBeTa C yrnaMH pacrrpOCTpaHeHHH, COCTaBnHIOIII.HMH 8XOaHYlO anepmypy CBeTOBo~a. JIyqH
}l,eJIHTb: C
NA
1)
MaKCHMaJIbHble SHalJeHH5I BXO}l,HOH arrepTypbI O}l,HOMO}l,OBOrO BOJIOKHa
= 0,1
H MHOrOMO}l,OBOrO BOJIOKHa C
HSJIYlJeHH5I, rrOrra}l,aIOLII:erO B BOJIOKHO.
NA
= 0,25;
2)
SHalJeHHlI MOLII:HOCTH
446
rl/..
22.
BOI/.OKOHHo-onmUtteCKue cucmeMbl C8R.3U
22.6.
PemeHHe
CoeaUHeHue c8emOaUOaa C onmUtteCKUM 801/.0KHOM npu nOMOU{U I/.UH3
K03HU.HeHT YBeJIHqeHHSI H306pa2KeHHSI CBeTo.zr.Ho.zr.a Ha cep.zr.u.eBHHY
MaKCHMaJIbHble 3HalJeHHlI anepTypbl paccMaTpHBaeMbix BOJIOKOH B B03.l(yxe COOTBeTCTBeHHO paBHbI 5,7
0
H 14,5
0 •
BOJIOKHa onpe.zr.eJISIeTCSI COOTHOllieHHeM
TeJIeCHbie yrJIbI, onpe.l(eJIlieMble .l(aHHblMH
3HalJeHHlIMH anepTypbI, paBHbI 0,031 H 0,20 (.l(JIli O.l(HO- H MHOrOMO.l(OBbiX BOJIOKOH).
(22.14)
I10CKOJIbKY TeJIeCHblH yrOJI nOJIyc<j>epbl paBeH 211", 3HalJeHHlI MOIUHOCTH H3JIYlJeHHlI, nOna.l(aIOIUero B BOJIOKHO, COOTBeTCTBeHHO paBHbI 0,0049 MBT H 0,032 MBT.
113 pHC.
22.7
CJIe.zr.yeT, qTO
1
22.6.
447
COe,lJ.HHeHHe CBeTO,lJ.HO,lJ.a C OnTHlIeCKHM BOJIOKHOM npH nOMOID;H JIHH3
"2 0
+ do· tgt'hED =
1 "21 + d[ . tgOair.
ECJIH CBeTo.zr.HO.zr. H cep.zr.u.eBHHa BOJIOKHa HaMHoro MeHbIIIe .zr.HaMeTpa JIHH3bI H yrJIbi na.zr.eHHSI JIyqeH MaJIbI, ypaBHeHHe
ECJIH H3JIyqalOIIJ.aSI 06JIaCTb CBeTo.zr.Ho.zr.a MeHbllie cep.zr.u.eBHHbI OnTHqe-
(22.15)
B 3THX
M02KHO 3aMeHHTb CJIe.zr.y-
IOIIJ.HM npH6~H2KeHHeM
CKoro BOJIOKHa, npHMeHeHHe BbmYKJIbIX JIHH3 nOBblIIIaeT 3eKTHBHoCTb BBo.zr.a H3JIyqeHHSI CBeTo.zr.Ho.zr.a B CBeTOBO.zr..
(22.15)
d[
CJIyqaSIX JIHH3bi npo-
0
I
O·
OLED = do . Oair =
(22.16)
air·
eu.HpylOT H3JIyqalOIIJ.YIO 06JIaCTb CBeTo.zr.Ho.zr.a Ha BCIO nJIOIIJ.a.zr.b cep.zr.u.eBHHbI
d[
> do,
BOJIOKHa, CHH2KaSI npH 3TOM yrOJI na.zr.eHHSI JIyqeH, T. e. npOHcxo.zr.HT cOZ/La-
TaK KaK
C08aHue HCTOqHHKa H3JIyqeHHSI C BOJIOKHOM no ItUCJl080U anepmype.
60JIbIIIe BXO.zr.HOij anepTypbI BOJIOKHa, qTO npHBo.zr.HT K YJIyqllieHHIO onTH-
nYCTb BbinYKJIaSI JIHH3a 0pMHpyeT Ha BOJIOKHe H306pa2KeHHe BbICOTOH
I
o6beKTa BbICOTOH
O.
ECJIH BblCOTa H306pa2KeHHSI 60JIbllie BbICOTbI
yrJIOBaSI anepTypa Bbixo.zr.a H3JIyqeHHSI CBeTo.zr.Ho.zr.a TaK2Ke
qeCKOrOCOrJIaCOBaHHSI. I1cxo.zr.SI H3 3Toro M02KHO BbiBeCTH Bblpa2KeHHe .zr.JISI qHCJIOBOH anepTypbI CBeTo.zr.Ho.zr.a
N A LED ,
onpe.zr.eJISIIOIIJ.eH MaKCHMaJIbHbIH
o6beKTa, yrJIbi CX02K.zr.eHHSI JIyqeH CBeTa OT JIHH3bi K BOJIOKHY 6y.zr.YT MeHbIIIe
yrOJI JIyqeH CBeTa, HCXO.zr.SIIIJ.HX H3 CBeTo.zr.Ho.zr.a
yrJIOB paCX02K.zr.eHHSI JIyqeH OT HCTOqHHKa H3JIyqeHHSI K JIHH3e. YMeHbllieHHe
.LI.JISI 3Toro Ha.zr.o HCnOJIb30BaTb ypaBHeHHe
paCX02K.zr.eHHSI JIyqeH B TaKHX CJIyqaSIX n03BOJISIeT YJIyqlliHTb OllTHqeCKOe
2KeHHe .zr.JISI BeJIHqHH
22.7 nOKa3aH npHHu.Hn COrJIaCOBaHHSI CBeTo.zr.Ho.zr.a co CBeTOBo.zr.OM npH nOMOIIJ.H BbmYKJIbIX JIHH3.
NA
H
Ii BXO.zr.SIIIJ.HX B OnTOBOJIOKHO.
(22.14)
H npHMeHHTb npH6JIH-
N ALED
B CJIyqae MaJIbIX yrJIOB:
NALED
I = (5'
COrJIaCOBaHHe CBeTo.zr.Ho.zr.a co CBeTOBo.zr.OM. Ha pHC.
(22.17)
NA.
nOCKOJIbKY 3eKTHBHOCTb CBSI3H npOnOpu.HOHaJIbHa HHe
(22.12),
(N A)2 -
(22.18)
NAtED = [(I/O)· NAf· Cep.l\IIeBHHa
OTCIO.zr.a
CM. ypaBHe-
OHa B03paCTaeT .zr.o BeJIHqHHbi
BH.zr.HO,
qTO
BblCOKaSI
3eKTHBHoCTb
CBSI3H .zr.OCTHraeTCSI
npH
HCnOJIb30BaHHH CBeTo.zr.Ho.zr.OB C MaJIbIM .zr.HaMeTpoM 06JIaCTH H3JIyqeHHSI, OnTHqeCKHX BOJIOKOH C 60JIblliHM .zr.HaMeTpoM cep.zr.u.eBHHbI H CBeTOBo.zr.OB
i - do ---1-------
C 60JIblliHMH qHCJIOBbIMH anepTypaMH.
YnpalKHeHHe. Onpeael/.eHUe 3r/Jr/JeKmu8Hocmu 880aa u3l/.ytteHUR. C8emOaUOaa PHC. 22.7. I1pHHUHn COrJIaCOBaHHlI CBeTO.l(HO.l(a co CBeTOBO.l(OM npH nOMOIUH BbmYKJIbIX JIHH3. ,llHaMeTp 06JIaCTH H3JIYlJeHHlI CBeTO.l(HO.l(a (BbicoTa o6beKTa) paBeH 3Ta 06JIaCTb npoeUHpyeTcli npH nOMOIUH JIHH3b1 C <j>OKYCHbiM paCCTOllHHeM Cep.l(ueBHHY BOJIOKHa .l(HaMeTpoM
I
f
8 onmUtteCKoe 801/.0KHO npu nOMOU{U I/.UH3bl
O.
I1YCTb CBeTO.l(HO.l( C .l(HaMeTpOM KpyroBoH H3JIYlJalOIUeH 06JIaCTH 20 MKM npH-
Ha
COe.l(HHlIeTCli K KBapueBOMY MHOrOMO.l(OBOMY OnTHlJeCKOMY BOJIOKHY C lJHCJIOBOH
(BblcoTa H306pa)l{eHHlI)
anepTypoH
NA =
0, 2 H .l(HaMeTpOM Cep.l(ueBHHbI 62,5 MKM. MOIUHOCTb H3JIYlJeHHlI
CBeTO.l(HO.l(a B nOJIyc<j>epy, pacnOJIO)l{eHHYIO BblIIIe nJIOCKOH nOBepXHOCTH CBeTO.l(HO-
YCJIOBHe nOJIyqeHHSI COKycHpoBaHHoro H306pa2KeHHSI onHCbIBaeT ypaBHeHHe JIHH3bI
(22.13)
.l(a, paBHa 1 MBT. ,llJIli npOCTOTbI paClJeTOB ClJHTaeM, lJTO HHTeHCHBHOCTb H3JIYlJeHHlI CBeTO.l(HO.l(a He 3aBHCHT OT yrJIa BbIBO.l(a H3JIYlJeHHlI. Tpe6yeTcli OIIpe.l(eJIHTb MaKCHMaJIbHYIO MOIUHOCTb H3JIYlJeHHlI, BBO.l(HMOrO B BOJIOKHO.
PemeHHe r.zr.e
do
H
CTBeHHO,
d[ -
f-
YJIyqIIIeHHlI OIITHlJeCKOH CB1I3H MO)l{HO .l(06HTbCli IIpH IIOMOIUH BbmYKJIOH JIHH3bl.
paccToSIHHSI OT o6beKTa H H306pa2KeHHSI .zr.o JIHH3bI COOTBeToKycHoe paccToSIHHe JIHH3bI.
,llJIli nOJIYlJeHHlI MaKCHMaJIbHOH 3<j><j>eKTHBHOCTH BBO.l(a Ha.l(O HCIIOJIb30BaTb JIHH3Y C K03<j><j>HUHeHTOM YBeJIHlJeHHlI
M =
62,5
MKM/20 MKM
=
3,125.
I1pH IIOMO-
rA. 22. BOAOlwlilio-onmuliecKue cucmeMbl CBR3U
.448
449
22.7. BecnpoBOalible onmUlieCKue cucmeMbl CBR3U
1,1
I
IJ.Ui TaKoH JIHH3bI BXO,l(HaH anepTypa BOJIOKHa YBeJIH'lHBaeTCH OT Bair = 11 ,5° ,l(O BLED = 35,9°. TeJIeCHbIH yrOJI, onpe,l(eJIHeMbIH BeJIH'lHHOH BLED, paBeH = 1,19. ITOCKOJIbKY 1 MBT - MOlll.HOCTb H3JIY'leHHH CBeTO,l(HO,l(a B nOJIyc!Pepy, 3a,l(aBaeMYIO TeJIeCHbIM yrJIOM 211", MOlll.HOCTb H3JIY'leHHH, BBO,l(HMOrO B BOJIOKHO, paBHHeTCH 0,189 MBT.
n
B
CliCTeMax CBSl3l1 'laCTO lICrrOJIb3YIOT CBeTOJI.110JI.bI C corJIacYIOml1MI1
JII1H3aMI1. Ha Pl1c.
22.8
rrOKa3aH MI1KPOCHI1MOK CBeTO,l(110JI.a co BCTpoeHHoM
JII1H30M. l-hJIY'laIOmaSl 06JIaCTb TaKoro CBeTOJI.110JI.a paBHa MeTp JII1H3bI OKOJIO
80
20
MKM, a JI.l1a-
MKM.
rrOCKOJIbKY OHI1, B OTJIl1ql1e OT I1CTO'lHI1KOB BI1JI.I1MOrO 113JIyqeHI1S1, He BbI3bIBaIOT pa3JI.pa)KeHI1S1 11 He OTBJIeKaIOT BHI1MaHl1e JIIOJI.eM. . C II.eJIbIO 06eCrre'IeHI1S1 3aml1TbI qeJIOBeqeCKI1X rJIa3 OT B03JI.eMCTBI1S1 113JIyqeHI1S1 JI.JISI OrrTl1qeCKliX rrepeJI.aTql1KOB BBeJII1 rrapaMeTp MOmHOCTb 113JIyqeHI1S1. Ha JI.JII1He BOJIHbI 06bl'IHO
OrpaHl1qeHa
BOJIH, Harrpl1Mep
HeCKOJIbKI1MI1
1500
870
MaKCliMaJIbHaSl
HM OrrTl1'IeCKaSl MOmHOCTb
MI1JIJII1BaTTaMI1.
Ha JI.pyrl1x JI.JII1HaX
HM, JI.OrrYCKaIOTCSI 60JIbllIHe MOmHOCTI1 113JIyqeHI1M.
)l.l1arra30H JI.JII1H BOJIH B paMoHe
1500
HM C'Il1TaeTCSI 6e30rracHbIM JI.JISI rJIa3,
rrOCKOJIbKY TaKoe 113JIY'IeHI1e rrorJIOmaeTCSI pOrOBI1II.eM rJIa3a 11 He JI.OCTl1raeT ero CeTqaTKI1.
~80MKM~
I1PI1 rrepeJI.a'Ie Cl1rHaJIOB Ha KOpOTKl1e paCCTOSlHI1S1 B03JI.YX MO)KHO Cql1TaTb CpeJI.OM, He BHOCSlmeM HI1KaKI1X JI.OrrOJIHI1TeJIbHbIX rrOTepb. Ho B CJIyqae I1CTO'IHI1KOB HeKOJIJIlIMl1pOBaHHoro CBeTa 113-3a paCXO)KJI.eHI1S1 JIY'IeM I1HTeHCI1BHOCTb OrrTl1'IeCKliX Cl1rHaJIOB 6YJI.eT CHI1)KaTbCSI JI.a)Ke B B03JI.yxe. )l.JISI U30mponlibiX U3AYliameAeu I1HTeHCI1BHOCTb rraJI.aeT rrpOrrOpII.110HaJIbHO KBaJI.paTY paCCTOSlHI1S1 :
(22.19) rJI.e
P-
OrrTl1'IeCKaSl MOmHOCTb 113JIyqeHI1S1 I1CTOqHlIKa
CBeTa,
r -
pac-
CTOSlHl1e OT I1CTOqHI1Ka. CHI1)KeHl1e I1HTeHCI1BHOCTI1 113JIY'IeHI1S1 B CI1CTePHC. 22.8. CepHHHo BbIIIycKaeMbIH CBeTO,l(HO,l( co BCTpoeHHoH JIlIH30H, HCnOJIb3YeMbIH B CHCTeMax CBH3H (a). JIHH3a, BbITpaBJIeHHaH !POToXHMH'leCKHM cnoco60M B nO,l(JIO)!{Ke GaAs (6). (AT&T ODL product line, 1995)
Max JI.I1CTaHII.110HHOro
yrrpaBJIeHI1S1
CI1JIbHO
OTJIlI'IaeTCSI
OT
ee
rraJI.eHI1S1
B BOJIOKOHHO-OrrTI1'IeCKI1X CI1CTeMaX CBSl311. CKOPOCTb CHI1)KeHI1S1 I1HTeHCI1BHOCTI1 orrpeJI.eJISleT rrpeJI.eJIbI lICrrOJIb30BaHI1S1 CI1CTeM JI.I1CTaHII.110HHOM CBSl311. B CJIyqae KOJIJII1Ml1pOBaHHbIX JIyqeM 3TOM rrp06JIeMbI He cymecTByeT 11 OpraHI13aII.l1S1 rrepeJI.aql1 Cl1rHaJIOB . Ha
HeCKOJIbKO KI1JIOMeTpOB B XOPOllIl1X aTMoccpepHbIX YCJIOBI1S1X (6e3 TyMa-
22.7.
BeCnpOBO.lJ;Hble OnTHqeCKHe CHCTeMbI CBR3H
Ha 11 OCaJI.KOB) He SlBJISleTCSI Hepa3pellIliMOM 3aJI.aqeM. B
TaKI1X CI1CTeMaX
B Ka'IeCTBe I1CTOqHI1Ka KOJIJII1Ml1pOBaHHoro lI3JIyqeHI1S1 06bIqHO I1CrrOJIb3YIOT CHCTeMbI OrrTl1'IeCKOM CBSl3H 'Iepe3 CB060JI.HOe rrpOCTpaHCTBO 06ecrreql1BaIOT HI13KYIO 11 CpeJI.HIOIO CKOPOCTb rrepeJI.aql1 JI.aHHbIX (Carruthes, Heatley et aI.,
1998;
Kahn, Barry,
2001).
B
2002;
rrOJIyrrpOBOJI.HI1KOBble JIa3epbI, 06eCrre'Il1BaIOml1e reHepaII.I1IO JIY'IeM C OqeHb MaJIOM rrpOCTpaHCTBeHHOM paCXOJI.I1MOCTbIO.
OCHOBHOM TaKl1e CI1CTeMbI
HCIWJlCeHUe 11 BpeMeHHa51 3aaepJICIW, 06YCAOBAeHHbie MH080AYlieBbiM
I1CrrOJIb3YIOT JI.JISI JI.HCTaHII.110HHOro yrrpaBJIeHI1S1 6bITOBbIMI1 rrpl160paMI1-
pacnpocmpaHeHueM CU8HaAOB, cepbe3HO OrpaHl1ql1BaIOT CKOPOCTb rrepeJI.a-
paJI.l1oarrrrapaTypoM 11 TeJIeB1130paMI1. )l.pyrl1e rrpI1MeHeHI1S1: JI.I1CTaHII.110HHOe
'Ill JI.aHHbIX B CB060JI.HOM rrpOCTpaHCTBe. Ha Pl1c.
yrrpaBJIeHl1e OTKpbITl1eM-3aKpbITl1eM JI.BepeM aBTOM06I1JIeM, 6eCrrpOBOJI.HaSl
HI1KHOBeHI1S1 TaKI1X I1CKa)KeHI1M. JIyq CBeTa OT OrrTlI'IeCKOrO rrepeJI.aT'II1Ka
CBSl3b Me)KJI.Y KOMrrbIOTepoM 11 rrepl1cpepl1MHbIMI1 YCTpoMcTBaMI1 -
MbIllIbIO,
KJIaBHaTypoM 11 rrpl1HTepoM.
22.9
rrOKa3aHa cxeMa B03-
MO)KeT JI.OCTliraTb rrpl1eMHI1Ka HeCKOJIbKI1MI1 rrYTSlMI1. 9TO qaCTO rrpol1cxoJI.I1T B KOMHaTaX C 60JIbllII1M ql1CJIOM CI1JIbHO OTpa)KaIOml1X rroBepxHocTeM -
I10CKOJIbKY rrpl1 rrepeJI.aqe CI1rHaJIOB'Iepe3 cB060JI.HOe rrpOCTpaHCTBO
6eJIoro rrOTOJIKa, CTeH 11 3epKaJI. CymecTByeT rrpaBI1JIO OII.eHKI1 MaKCI1-
CTeHbI 11 rrOJIbI C03JI.aIOT rrperpaJI.bI JI.JISI rrpOXO)KJI.eHI1S1 JIY'IeM. CBeTa, 3TlI
MaJIbHOM JI.JII1HbI TpaeKTOp1111 Cl1rHaJIa: OHa paBHa JI.BOMHOMY KpaTqaMllIeMY
CliCTeMbI CBSl3l1 pa60TaIOT TOJIbKO B rrpeJI.eJIax rrpSlMOM BI1JI.lIMOCTli. Me6eJIb
paCCTOSlHI1IO Me)KJI.Y rrpl1eMHI1KOM
TaK)Ke MO)KeT rrperrSlTCTBOBaTb
CJIeJI.yeT, 'ITO BpeMeHHaSl 3aJI.ep)KKa 113-3a MHOrOJIY'IeBOrO pacrrpOCTpaHeHI1S1
rrpOXO)KJI.eHI1IO
CBeTa. OJI.HaKO CBeTOBble
JIyql1 MoryT OTpa)KaTbCSI OT rrOTOJIKOB, 06eCrreqllBaSl CBSl3b Me)KJI.Y rrepeJI.aT-
11
rrepeJI.aTqI1KOM.
113 3Toro
rrpaBI1JIa
Cl1rHaJIOB MO)KeT 6bITb HaMJI.eHa 113 Bblpa)KeHI1S1
qllKOM II rrplleMHlIKoM, pacrrOJIO)KeHHbIMli BHe 30HbI rrpSlMOM BlIJI.lIMOCTli. TaKlie 6eCrrpOBOJI.Hble CliCTeMbI CBSl3l1, KaK rrpaBlIJIO, pa60TaIOT B l1K-
fiT =
Lie,
(22.20)
JI.lIarra30He JI.JIliH BOJIH, rro3ToMY B HliX 'IaCTO rrpliMeHSlIOT CBeTOJI.lIOJI.bI
L-
GaAs, 06JIaJI.aIOmlie BbICOKOM 3cpcpeKTI1BHOCTbIO. B CliCTeMax JI.lICTaHII.lIOH-
rJI.e
Horo yrrpaBJIeHlISI rrpeJI.rrOqTlITeJIbHee I1CrrOJIb30BaTb 11K -liCTOqHlIKlI CBeTa,
CBeTa. MaKCI1MaJIbHaSl CKOPOCTb rrepeJI.aqll JI.aHHblX OrpaHlIqeHa c.iIeJI.YIO-
paccToSlHlIe Me)KJI.Y rrepeJI.aTqllKOM II rrplleMHlIKOM, e -
CKOPOCTb
FIt. 22. BOJl.OIWHHo-onmUtteclwe cucmeMbt CBf!3U
450
22.7. Bu6J1.uoepatjJutteclwu cnuco/C
(22.21) .llJUI KOMHaTbI )!.JUfHOM
5M
Be.mlqHHaAT ~
nepe)!.aqH )!.aHHblX COCTaBJIHeT
17 HC,
a MaKCHMaJIbHaH qaCTOTa
60 Mru:.
rrrnronoK------------~~------------------------,
,,~ OlITH'leCKHH
rrepe~3T'IHK
"
" ""
" ,, ,, ,
',-
" "
,
,,"
Ii••~, --- ---
rrpHeMHHK ,
--- ...... _----
rron ------------------------------~--------~
PHC. 22.9. CxeMa B03HHKHOBeHHH HCKa)KeHHH, 06YCJIOBJIeHHhlX MHOrOJIyqeBhlM pacnpocTpaHeHHeM OnTHqeCKHX CHrHaJIOB B cB060.n.HOM npocTpaHcTBe, OrpaHHqHBaIDIUHX CKOPOCTb nepe.n.aqH .n.aHHbIX .llpyrHM <paKToPOM, OrpaHHqHBaIOIUHM nepe)j.aqy CHrHaJIOB B cBo6o)!.HOM npOCTpaHCTBe, HBJIHeTCH IIIyM )!.eTeKTopa. CneKTpbI COJIHeqHOrO CBeTa H H3JIyqeHHH JIaMn HaKaJIHBaHHH 3aXBaTblBaIOT 06JIaCTb HK-)!.Hana30Ha )!.JIHH BOJIH. nO:nOMY no)!. B03)!.eH:CTBHeM TaKHX H3JIyqeHHH: B )!.eTeKTope reHepHpyeTcH 3HaqHTeJIbHbIH: nOCTOHHHbIH:
Carruthers J. B. "Wireless infrared communications" in Wiley Encyclopedia of Telecommunications edited by J. G. Proakis (John Wiley and Sons, New York, 2002). Heatley D. J. T., Wisely D. R., Neild I., and Cochrane P. "Optical wireless: the story so far" IEEE Comm. Mag. 36, 72 (1998). Hecht J. Understanding Fiber Optics (Prentice Hall, Upper Saddle River, New Jersey, 2001). Kahn J. M. and Barry J. R. "Wireless infrared communications" Proc. IEEE 85, 265 (2001). Keiser G. Optical Fiber Communications 3rd edition (McGraw-Hill, New York, 1999).
451
Kibler T., Pofer! S., Bock G., Huber H.-P., and Zeeb E. "Optical data buses for automotive applications" IEEE !. Lightwave Technol. 22, 2184 (2004). Mynbaev D. K. and Scheiner L. L. Fiber-OpticCommunications Technology (Prentice Hall, Upper Saddle River, New Jersey, 2001). Neyer A., Wittmann B., and Johnck M. "Plastic-optical-fiber-based parallel optical interconnects" IEEE !. Sel. Top. Quantum Electron. 5, 193 (1999).
23.3. floBepxHocmHO-U3Jlyt.talOU{ue cBemOaUOabt Bappaca
23.2.
453
CBeTO,lJ;HO,lJ;bI B BOJIOKOHHO-OnTHqeCKHX cHcTeMax CBSl3H
r JI a B a
23
CBeTo.n.Ho.n.hI rrpHMeH5IIOTC5I B CHCTeMax BOJIOKOHHO-OrrTHqeCKOH CB5I3H, rrepe.n.aIOIll.HX .n.aHHhle Ha cpaBHHTeJIhHO KopOTKHe paCCT05IHH5I C HH3KHMH
CBETO,llHO,llbI B CHCTEMAX CBB3H
H cpe.n.HHMH CKOPOCT5IMH. TIOCKOJIhKY BpeM5I )!{H3HH crrOHTaHHoro H3JIyqeHH5I B CHJIhHO B036y)!{.n.eHHhlx °rrOJIyrrpoBo.n.HHKax COCTaBJI5IeT '"
1
HC,
MaKCHMaJIhHO .n.OCTH)!{HMhle CKOPOCTH rrepe.n.aqH .n.aHHhIX B CHCTeMax co CBeTo.n.Ho.n.aMH OrpaHHqeHhI 3HaqeHHeM
1
r6HT/C. TI03TOMY B BOJIOKOHHO-
CBeTo.n.Ho.n.hI MoryT HCrrOJIh30BaThC5I KaK B 6ecrrpoBo.n.HhIX, TaK H B BO-
OrrTHqeCKHX CHCTeMax Ha OCHOBe CBeTo.n.Ho.n.OB HeJIh35I rrepe.n.aBaTh .n.aH-
JIOKOHHO-OrrTHtIeCKHX CHCTeMax CB5I3H. EecnpoBOalible cucmeMbl CB513U-
Hhle co CKOPOCThIO HeCKOJIhKO r6HT/C. O.n.HaKo CKOPOCTH rrepe.n.aqH .n.aH-
3TO CHCTeMhI .n.HCTaHI.(HOHHoro yrrpaBJIeHH5I 6hITOBhIMH rrpH60paMH -
HhIX B HeCKOJIhKO COTeH M6HT/c rrOJIHOCThIO y.n.oBJIeTBOp5JIOT Tpe60BaHH5IM
Te-
JIeBH30paMH H MY3hIKaJIhHhIMH ueHTpaMH, a TaK)!{e cpe.n.CTBa CB5I3H KOMrrhIOTepOB C rrepHcpepHHHhIMH YCTpoHCTBaMH. CBeTo.n.Ho.n.hI, rrpHMeH5IeMhle
60JIhllIHHCTBa CHCTeM JIOKaJIhHOH CB5I3H. CBeTo.n.Mo.n.bI, rrpHMeH5IeMhle B BOJIOKOHHO-OrrTHqeCKHX CHCTeMax, CHJIh-
Y
B BOJlOIWliliO-OnmU'leCICUX cucmeMax CB513U, .n.OJI)!{HhI 06eCrreqHBaTh rrepe-
HO OTJIHqaIOTC5I OT OCBeTHTeJIhHhIX CBeTo.n.Ho.n.OB.
.n.aqy .n.aHHhlX Ha paCCT05IHH5I .n.o HeCKOJIhKHX KHJIOMeTpOB co CKOPOCT5IMH,
CTeM CB5I3H Ba)!{HhIM rrapaMeTpoM 5IBJI5IeTC5I 3cpcpeKTHBHoCTh BBo.n.a H3JIyqe-
1
CBeTo.n.Ho.n.OB .n.JI5I CH-
r6HT/C. TIpaKTHqeCKH Bce OIITHqeCKHe
HH5I B OrrTHQeCKOe BOJIOKHO. 3.n.ech rrOJIe3HhlM CQHTaeTC5I H3JIYQeHHe, HCXO-
BOJIOKHa, HCrrOJIh3yeMhle COBMeCTHO co CBeTo.n.Ho.n.aMH, 5IBJI5IIOTC5I MHoro-
.n.5IIll.ee TOJIhKO OT O.n.HOH rroBepxHocTH KpHCTaJIJIa CBeTo.n.Ho.n.a, rpaHHQaIll.eH
qaCTO rrpeBhIllIaIOIll.HMH ypOBeHh MO.n.OBhIMH
(co cTyrreHqaThIM HJIH
rpa.n.HeHTHhIM
rrpocpHJIeM
rrOKa3aTeJI5I
C OrrTHQeCKHM BOJIOKHOM. TI03TOMY B. CBeTo.n.Ho.n.ax, rrpe.n.Ha3HaQeHHhIX .n.JI5I pa60ThI B BOJIOKOHHO-OrrTHQeCKHX CHCTeMax, CTpeM5ITC5I rrOJIYQHTh MaKCH-
rrpeJIOMJIeHH5I). O.n.HaKo HHor.n.a rrpHMeH5IIOTC5I H O.n.HOMo.n.OBhle BOJIOKHa.
MaJIhHOe H3JIYQeHHe co CTOPOHhI HMeHHO 3TOH rroBepxHocTH. OQeBH.n.Ho, QTO .n.JI5I TaKHX CBeTo.n.Ho.n.OB Ba)!{HOH xapaKTepHcTHKOH 5IBJI5IeTC5I MOUl-
23.1.
liocmb U3JlY'leliU51 eaUliUl1bl nOBepxliocmu, Tor.n.a KaK .n.JI5I CBeTo.n.Ho.n.OB
CBeTO,lJ;HO,lJ;bI B 6eCnpOBO,lJ;HbIX CHCTeMax CBSl3H
B 6ecrrpoBo.n.HhIX CHCTeMax orrpe.n.eJI5IIDIll.HM rrapaMeTpoM CQHTaeTC5I nOJllia51 CBeTo.n.Ho.n.hI,
HCrrOJIh3yeMhle B
6ecrrpoBo.n.HhIX CHCTeMax CB5I3H,
KaK
rrpaBHJIO, COCT05IT H3 aKTHBHhIX 06JIaCTeH GaAs HJIH IrrGaAs, BhlpaIll.eHHhIX
MOUiliocmb U3JlY'leliU51 cBemOaUOaOB. . tIT06hI rrOJIYQHTh
CBeTo.n.Ho.n.OB
.n.OJI)!{Ha
H3JIyqeHH5I CBeTo.n.Ho.n.OB GaAs H InGaAs OrpaHHqeHhI HK-.n.Harra30HOM
pa60ThI C MHorOMo.n.OBhIMH BOJIOKHaMH, KaK rrpaBHJIO, HCrrOJIh3YIOT CBe-
870
HM (.n.JI5I aKTHBHhIX 06JIaCTeH GaAs) .n.o
950
HM (.n.JI5I
HaMHoro
BOJIOKHO,
H3JIYQeHH5I
TOHKHe, H3JIyqaIOT KorepeHTHhIH CBeT, B HHX HeT .n.HCJIOKaUHH • .L{JIHHhI BOJIH
6hITh
OrrTHQeCKOe
06JIaCTh
CBeTo.n.Ho.n.a
.n.JIHH BOJIH OT
B
MaKCHMaJIhHYIO 3cpcpeKTHBHoCTh BBo.n.a H3JIYQeHH5I
Ha rro.n.JIO)!{KaX GaAs. CJIOH InGaAs rrceB.n.oMopcpHhle, T. e . .n.OCTaTOqHO
MeHhllie .n.HaMeTpa
cep.n.ueBHHhI
BOJIOKHa.
TO.n.HO.n.hI C KpyroBhIMH 06JIaCT5IMH H3JIYQeHH5I .n.HaMeTpOM
20-50
.L{JI5I MKM •
.L{HaMeTp cep.n.ueBHHhI MHorOMo.n.OBhIX KBapueBhIX BOJIOKOH 06hIQHO paBeH
aKTHBHhIX 06JIaCTeH InGaAs). CBeTo.n.Ho.n.hI, H3JIyqaIOIll.He CBeT B HK-.n.Harra30He .n.JIHH BOJIH, XOPOIliO O
rro.n.xo.n.5IT .n.JI5I pa60ThI B 6ecrrpoBo.n.HhIX CHCTeMax CB5I3H, rrOCKOJIhKY HX
50-100 MKM. TIOJIHMepHhle CBeTOBo.n.hI MoryT HMeTh .n.HaMeTphI 60JIhilie
1
MM, rro-
CBeT HeBH.n.HM .n.JI5I qeJIOBeqeCKOrO rJIa3a H, CJIe.n.OBaTeJIhHO, He BhI3hlBa-
3TOMY .n.JI5I pa60ThI C HHMH MoryT rrpHMeH5IThC5I CBeTo.n.Ho.n.hI C 60JIhilieH
eT pa3.n.pa)!{eHH5I. TIOCKOJIhKY CHCTeMhI .n.HCTaHUHOHHoro yrrpaBJIeHH5I, KaK
06JIaCThIO H3JIYQeHH5I.
rrpaBHJIO, 06eCrreqHBaIOT rrepe.n.aqy CHrHaJIOB Ha paCCT05IHH5I MeHee
100
M;
CqHTaeTC5I, qTO cpe.n.a rrepe.n.aqH (B03.n.yX)He HMeeT HH .n.HcrrepCHH, HH rrOTeph •
23.3.
IIoBepxHocTHO-H3JIyqalOID.He CBeTO,lJ;HO,lJ;bI Bappaca, pa60TalOID.He Ha ,lJ;JIHHe BOJIHbI
.L{JI5I CBeTo.n.Ho.n.OB, pa60TaIOIll.HX B 6ecrrpOBo.n.HhIX CHCTeMax CB5I3H, Ba)!{-
870
HM
HOH xapaKTepHCTHKOH 5IBJI5IeTC5I nOJllia51 MOUiliocmb U3JlY'leliU51, rr03TOMY BHYTpeHHHH KBaHTOBhIH BhIXO.n. H3JIyqeHH5I H K03CPCPHUHeHT OIITHqeCKOrO
O.n.Ha H3 rrepBhIX CTpyKTyp CBeTo.n.Ho.n.OB, rrpHro.n.HhIX .n.JI5I pa60ThI B BO-
BhIBo.n.a CBeTo.n.Ho.n.OB .n.OJI)!{HhI 6hITh KaK MO)!{HO 60JIhllie . .L{pyroH Ba)!{HhIH
JIOKOHHO-OrrTHQeCKHX CHCTeMax CB5I3H, 6hIJIa pa3pa60TaHa tIapJIh30M Bap-
rrapaMeTp CBeTo.n.Ho.n.OB -
paCOM H3 KOMrraHHH AT&T Bell Laboratories (Burrus, Miller,
rrpOCTpaHCTBeHHoe pacrrpe.n.eJIeHHe HJIH .n.HarpaM-
1985).
1971; Saul 23.l,a.
Ma HahpaBJIeHHOCTH H3JIyqeHH5I, KOTOpa5I .n.OJI)!{Ha 6hITh .n.OCTaTOqHO IlIHpO-
et aI.,
KOH .n.JI5I 06JIerqeHH5I CB5I3H H3JIyqaTeJI5I C rrpHeMHHKOM.
CBeTo.n.Ho.n. Bappaca COCTOHT H3 .n.BOHHOH reTepocTpYKTYPhI C aKTHBHOH
CTpYKTypa TaKoro CBeTo.n.Ho.n.a rrOKa3aHa Ha pHC.
454
23.4. Ilo8epxflocmflo-u3AyttalOl4Ue c8emOaUOabl
FA. 23. C8emOaUOabl 8 CUCmeMaX C8R3U
06JIaCTbIO GaAs,
Bblpa~eHHOM: Ha COrJIaCOBaHHOM: no napaMeTpaM pelIIeTKH
23.4.
nO.D.JIO.>KKe GaAs. nepBOHaqaJIbHO npe.D.JIO.>KeHHaH BappacoM cTpyKTypa 6b1CBeTa B COCe.D.HHX C aKTHBHOM: 06JIaCTbIO CJIOHX CBeTO.D.HO.D.bI Ha OCHOBe
IIoBepxHocTHO-H3JIYQalOm.He CBeTO,!J;HO,!J;bI,
pa6oTalOm.He Ha ,!J;JIHHe BOJIHbI
JIa npocTblM rOMonepeXO.D.OM. Ho H3-3a He.>KeJIaTeJIbHOrO nepenOrJIO~eHHH
455
1300
HM
B BOJIOKOHHO-OnTHqeCKHX CHCTeMax CBH3H Ha OCHOBe KBapu.eBbIX CBeTOBO.D.OB C rpa.D.HeHTHbIM npo
rOMoreHHblX nepeXO.D.OB He HalIIJIH pacnpOCTpaHeHHH.
nepe.D.aBaTb HH
H3JIyqalO~He CBeT Ha .D..nHHe BOJIHbI
a n+-TIlDa CJIoii A1GaAs n-TllDa
PHC.
23.1.
23.2
nOKa3aHa
113JIyqeHHe npOXO.D.HT
1300
HM. CooTBeT-
CJIOeM BHH3. lIKTHBHWI 06JI8CTL GaAs CJIoii A1GaAs p-TllDa
Si02HJIH Si3N4 KDHTaIcrHa 31I1m1KCHaJILHOM
6 CJIoe
on-TUna
CBeTO.ll.HO.ll. Eappaca AlxGal-xAs/GaAs C .lI.BOHHOH reTepocTPYKTypOH,
6apLepHLIii CJIoii InP n-TllDa lIKTHBHaJi 06JIaCTL
.lI.OM )KH.lI.KOCTHOrO XHMH'IeCKOrO TpaBJleHHH. CBeTO.ll.HO.ll. Eappaca MOHTHpyeTcH nO.ll.-
(a).
1985).
CTBeHHO KpHCTaJIJI B Kopnyce CBeTO.D.HO.D.a MOHTHpyeTcH 3nHTaKCHaJIbHblM
B KOTOPOM nOrJlOlualOlIlaH CBeT nO.ll.JlO)KKa GaAs Y.lI.aJleHa C aKTHBHoro CJlOH MeTOJlO)KKOH BBepx
HM. Ha pHC.
qepe3 nO.D.JIO.>KKY InP, np03paqHylO Ha .D.JIHHe BOJIHbI
no.l\lIOllCKa GaAs
!!!!!!!iiiiii~
1300
CTpyKTypa TaKoro CBeTO.D.HO.D.a (Saul et ai.,
OMHlleCKHH KOHTaKT HanO.l\lIOlKKe
GaInPAs
OnTH'IeCKOe BOJlOKHO, COe.ll.HHeHHoe co CBeTO.ll.HO.ll.OM Eappaca
6apLepHLIii CJIoii InP p-TllDa
(6).
KOHT3.ICl'CDOH
GaInPAs p+-TllDa
HeCKOJIbKO oco6eHHOCTeM: .D.eJIalOT CBeTO.D.HO.D.bI Bappaca npHrO.D.HbIMH .D.JIH HCnOJIb30BaHHH B CHCTeMax CBH3H.
Bo-nep8blX,
l\IDlIeICIJlHK
CBeT reHepHpyeTcH
B aKTHBHOM: 06JIaCTH MaJIOM: npOTH.>KeHHOCTH. nOnepeqHble pa3MepbI aK-
23.2.
THBHOM: 06JIaCTH 3a.D.aIOTCH BeJIHqHHOM: OMHqeCKOrO KOHTaKTa p-THna Ha
PHC.
nOBepXHOCTH CBeTO.D.HO.D.a. ECJIH 6apbepHbIM: CJIOM: p-THna .D.OCTaTOqHO TOH-
BOJlHbI
KHM:, paCTeKaHHH TOKa He npOHCXO.D.HT H nOnepeqHble pa3MepbI aKTHBHOM:
pellieToK C nO.ll.JlO)KKOH InP. CBeT, reHepHpyeMblH B aKTHBHOH 06J1aCTH, npoxo-
06JIaCTH COBna.D.aIOT C pa3MepaMH KOHTaKTa. ,UJIH nOJIyqeHHH MaKCHMaJIb-
.lI.HT CKB03b npo3pa'lHylO nO.ll.JlO)KKY. TIonepe'lHble pa3Mepbl 06J1aCTH H3J1Y'leHHH
HOM: 3
BO-8mopblX,
KaK nOKa3aHO Ha pHC.
23.1,
Henp03paqHaH
CTPYKTypa CBeTO.ll.HO.ll.a .lI.JlH CHCTeM CBH3H, H3J1Y'IalOlIlerO CBeT Ha .lI.JlHHe
1300
HM, C aKTHBHOH 06J1aCTblO InGaAsP, COrJlaCOBaHHOH no napaMeTpaM
onpe.ll.eJlHIOTCH 06J1aCTblO HH)KeKUHH HOCHTeJleH TOKa no.ll. KpyroBblM OMH'IeCKHM KOHTaKTOM .lI.HaMeTpoM
20
MKM.
B
nO.ll.JlO)KKe MeTO.ll.OM TpaBJleHHH
JlHH3a C aHTHOTpa)KalOlIlHM nOKpbITHeM, HanpaBJIHlOlIlaH Jlyq CBeTa
(a).
COe.ll.HHeHHe
CBeTO.ll.HO.ll.a C OnTH'IeCKHM BOJlOKHOM npH lIOMOlIlH 3nOKCH.lI.HOH CMOJIbI
(6)
nO.D.JIO.>KKa GaAs qaCTHqHO Y.D.aJIHeTCH, H 3TO 3HaqHTeJIbHO CHH.>KaeT no-
rJIO~eHHe B HeM: CBeTa. ,UJIH YMeHblIIeHHH TOJI~HHbI nO.D.JIO.>KKH CHaqaJIa
CBeTO.D.HO.D. COCTOHT H3 aKTHBHOM: 06JIaCTH InGaAsP, COrJIaCOBaHHOM:
npHMeHHIOT .>KH.D.KOCTHOe XHMHqeCKOe TpaBJIeHHe, a 3aTeM MeXaHHqeCKYIO
lIO lIapaMeTpaM pelIIeTOK C nO.D.JIO.>KKOM: InP. 3.D.eCb HeT CJIOH paCTeKaHHH
lIIJIH
TOKa H 06JIaCTb H3JIyqeHHH pacnOJIO.>KeHa HenOCpe.D.CTBeHHo Ha.D. KOHTaKTOM.
rv
150
MKM.
yJIyqlIIalO~aH
ECJIH neperopO.D.Ka GaAs 6Y.D.eT CJIHlIIKOM TOHKOM:, OHa MO.>KeT JIerKO JIO-
B TOqKe BbIBO.D.a CBeTa C
MaTbCH npH CTbIKOBKe C OlITHqeCKHM BOJIOKHOM, a eCJIH CJIHlIIKOM TOJICTOM:,
3
H3-3a nOTepb Ha lIOrJIO~eHHe CBeTa 6Y.D.eT CHH.>KaTbCH KBaHTOBbIM: BbIXO.D. H3JIyqeHHH.
JIHH3a BbITpaBJIHBaeTCH B nO.D.JIO.>KKe InP no
Ha pHC.
23.1,6
nOKa3aH MeTO.D. COe.D.HHeHHH CBeTO.D.HO.D.a Bappaca C on-
THqeCKHM BOJIOKHOM. ,UJIH nOCTOHHHoro COe.D.HHeHHH BOJIOKHa co CBeTO-
BBO.D.a
H3JIyqeHHH
TeXHOJIOrHH (Ostermayer et ai., Ha pHC.
23.3
CBeTO.D.HO.D.a
B
OlITHqeCKOe
BOJIOKHO.
1983).
npe.D.CTaBJIeHbI cneKTpbI H3JIyqeHHH TaKHX CBeTO.D.HO.D.OB,
H3MepeHHbIe B .D.ByX MeCTaX: Ha nOBepXHOCTH H C TOpU.OB .D.HO.D.a. BH.D.HbI
.D.HO.D.OM npHMeHHeTCH 3nOKCH.D.HaH CMOJIa. OTMeTHM, 'ITO KOHTaKT p-THna
3HaqHTeJIbHble pa3JIHqHH 3THX cneKTpOB. CneKTp H3JIyqeHHH, HanpaBJIeH-
HrpaeT TaK.>Ke pOJIb pa.D.HaTOpa, OTBO.D.H~ero TelIJIO OT aKTHBHOM: 06JIaCTH.
HOro K TOpU.aM CBeTO.D.HO.D.a, 06JIa.D.aeT MeHblIIeM: lIIHPHHOM: H3-3a caMOnOrJIO-
TelIJIOOTBO.D. 6Y.D.eT oc06eHHO 3
IIJ.eHHH, npH KOTOPOM lIPOHCXO.D.HT nepenOrJIOIIJ.eHHe
456
rA. 23. CBemo8uo8bt B cucmeMax CBfl3U 1400HM
~ 7 ~ 6 0
1200HM
nepCIUI. fI03TOMY CBeTO.D.HO.D.bl C .D.JIHHOH BOJIHbI H3JIyqeHHH KBap~eBbIx
npHMeHHTb B CHCTeMax CBH3H Ha OCHOBe
CBeTO.lUfO):(
1500 HM
HeJIb3H
CBeTOBO.D.OB.
GaInPAsIInP T=300K
......
~
1300HM
457
23.5. CBemo8uo8bt 8Afl cucmeM CBfl3U, Ita 8Aulte BOAltbt 650 ItM
5
23.5.
CBeTO)J:HO)J:bl )J:JUI CHCTeM CBB3H, pa60TalOm.He
'" 4
Ha )J:JIHHe BOJIHbl
i3 '"
650
CBeTO.D.HO.D.bI, pa6oTaJOIll.He Ha .D.JIHHe BOJIHbI
1;
0 :.: 2
HM
650
HM, KaK npaBHJIO,
HCnOJIb3YlOT COBMeCTHO C nOJIHMepHbIMH OnTHqeCKHMH BOJIOKHaMH. TaKHe
'" ::0:
BOJIOKHa 06JIa.D.a1OT MHHHMaJIbHbIMH nOTepHMH H cpaBHHTeJIbHO HH3KOH
0
:.:
~
is::
0,9
0,95 3HeprHlI 1I3J1)"ieHHlI
1,0
E,
1,05
3B
650 600-650
.D.HCnepCHeH Ha .D.JIHHe BOJIHbI
HM. CBeTO.D.HO.D.bI, H3JIyqalOIll.He CBeT
B .D.Hana30He .D.JIHH BOJIH
HM,
.D.Hana30Ha C .D.JIHHOH BOJIHbI Ha pHC.
PHC. 23.3. CrreKTpbI H3JIyqeHHll CBeTO,ll.HO,ll.OB InGaAsP /lnP. H3JIyqalOllUIX Ha ,ll.JIHHe BOJIHbI 1300 HM, H3MepeHHble Ha rrOBepXHOCTH H C TOPllOB ,ll.HO,ll.a. CrreKTp H3JIyQeHHll C TOPllOB CBeTO,ll.HO,ll.a H3-3a caMOrrOrJIOllleHHll OTJIHQaeTCli MeHbIlIeH IlIHPHHOH
H3rOTaBJIHBalOT Ha OCHOBe TOH
)Ke CHCTeMbI MaTepHaJIOB (AIGa)0.5Ino.5P, qTO H CBeTO.D.HO.D.bI BH.D.HMOrO
23.5
650
HM.
npe.D.CTaBJIeHbI CTpyKTYPbI THnHqHbIX CBeTO.D.HO.D.OB C pa-
60qeH .D.JIHHOH BOJIHbI
650
HM, npHMeHHeMbIX COBMeCTHO C nOJIHMepHbIMH
CBeTOBO.D.aMH. 06a THna npe.D.CTaBJIeHHbIX CBeTO.D.HO.D.OB HBJIHIOTCH YCTPOHCTBaMH C BepxHeH H3JIyqalOIll.eH nOBepXHOCTblO, QTO BbI3BaHO Henp03paQHO-
Ha pHC.
23.4
nOKa3aH MHKPOCHHMOK CBeTO.D.HO.D.a InGaAsPflnP, no-
CTblO nO.D.JIO)KeK GaAs.
B
COCTaB 060HX CBeTO.D.HO.D.OB BXO.D.HT 3anHpalOIll.He
JIYQeHHbIH B pacTpoBoM 3JIeKTpOHHOM MHKpOCKone. lIIepoxoBaTocTH Ha
CJIOH, KOTopble JIOKaJIH3YIOT HOCHTeJIH TOKa B aKTHBHOH 06JIaCTH. MeTaJI-
nOBepxHocTH KOHTaKTOB B03HHKalOT B npo~ecce OT)KHra npH HX HaHeceHHH.
JIHQeCKHe KOJIb~eBble KOHTaKTbI B 06eHX CTpyKTypax He MeIllalOT BbIXO.D.Y
,UJIH CHH)KeHHH nOTepb H3-3a cppeHeJIeBCKOro OTpa)KeHHH Ha rpaHH~e pa3-
CBeTa H3 aKTHBHOH 06JIaCTH.
.D.eJIa Cpe.D. nOJIynpOBO.D.HHK-B03.D.YX Ha JIHH3bI HaHOCHTCH aHTHOTpa)KalOIll.ee nOKpbITHe.
Ha pHC.
23.5
aanupalOU1ux
nOKa3aHbI .D.Ba THna
CJlOeB. PHC.
23.5, a -
p-n-p-CTpyKTypa 3anHpalOIll.erO CJIOH, CCPOpMHpoBaHHaH B BepXHeM npo3paQHOM CJIoe. 06JIaCTb, B KOTOPYIO MeTO.D.OM .D.HCPCPY3HH BHe.D.peH ~HHK, pacnOJIO)KeHHaH B ~eHTpe CBeTO.D.HO.D.a, nepeKOMneHcHpyeT .D.OHOPbI H npeBpaIll.aeT 3anHpalOIll.HH CJIOH B CJIOH
p-THna. B pe3YJIbTaTe TOK HaQHHaeT H.D.-
TH TOJIbKO Qepe3 3Ty 06JIaCTb. Ha pHC.
23.5,6
nOKa3aH 3anHpalOIll.HH CJIOH,
nOJIYQeHHbIH MeTO.D.OM 3nHTaKCHaJIbHOrO .D.OpaIll.HBaHHH. fIocJIe CPOpMHpoBa-
a
6
PHc.23.4. MHKPOCHHMOK CBeTO,ll.HO,ll.a InGaAsP/lnP co BCTpoeHHoH rrOJIyrrpOBO,ll.HHKOBOH JIHH30H.
B
rrpOllecce OT:lKHra Ha MeTaJIJIHQeCKOH rrOBepXHOCTH OMHQeCKOrO
KOHTaKTa rrOllBJIlilOTCli IlIepOXOBaTOCTH (Ostermayer et aI., 1983)
OTMeTHM,
QTO
.D.JIH
KBap~eBbIx cBeTOBO.D.OB, nepe.D.alOIll.Hx .D.aHHble
PHc.23.5. CTPYKTYPbI CBeTO,ll.HO,ll.OB AlinGaP/GaAs C ,ll.JIHHOH BOJIHbI H3JIYQeHHll 650 HM, pa6oTalOillHe C rrOJIHMepHbIMH CBeTOBO,ll.aMH (B 06eHX cTpyKTypax TOK HarrpaBJIlieTCli K lleHTpy aKTHBHOH 06JIaCTH, H3JIYQeHHIO H3 KOTOPOH He MellialOT Bepx-
a-
Ha 60JIbIllHe paccToHHHH, OC06bIH HHTepec npe.D.CTaBJIHeT .D.JIHHa BOJIHbI
HHe MeTaJIJIHQeCKHe KOJIblleBble KOHTaKTbI):
1500
AIGaAs n-THrra H ,ll.mp
HM. TaKHe CBeTOBO.D.bI .D.OJI)KHbI 6bITb O.D.HOMO.D.OBbIMH C MaJIbIM .D.Ha-
MeTpOM Cep.D.~eBHHbI, QTO Heo6xo.D.HMO .D.JIH HCKJIIOQeHHH Me)KMO.D.OBOH .D.HC-
CTpyKTypa C 3arrHpalOIllHM CJIOeM cTpyKTypa, H3rOTOBJIeH-
Hall MeTO,ll.OM 3rrHTaKCHaJIbHOrO ,ll.OpaIllHBaHHll, C 3arrHpalOIllHM CJIOeM GaAs n-THrra
458
23.6. CynepltlOMuHecu,eHmHbte cBemOaUoabt c mopu,eBbtM u3ltytteHUeM
Dl.23. CBemOaUOabl B cucmeMax CBJl3U
HHH cBepxy 6apbepHoro CJIOH
p-THna 3anHpa1Orn:ero CJIOH n-THna nO,l(JIO)KKa
aKrHBHaJI o6.rracn.:
H3BJIeKaeTCH H3 KaMepbI BbIparn:HBaHHH KpHCTaJIJIOB ,n:JIH HaHeceHHH Tpa<pa-
""
GaInPlAlInGaP c MI0I
peTa H npoBe,n:eHHH Onepau.HH TpaBJIeHHH. nOcJIe 3Toro no,n:JIO)KKa BHOBb
TOK:
nOMern:aeTCH B KaMepy ,n:JIH npo,n:OJI)KeHHH npou.e,n:YPbI 3nHTaKCHaJIbHOrO
T=300K
I"'I
/=30MA
I
I I I
CBeTo,n:Ho,n:bI C pe30HaTopaMH HMelOT npeHMyrn:eCTBa nepe,n: 06blqHbIMH Schubert, Hunt,
I I
,n:JIHHe
BOJIHbI
23.6 nOKa3aH CBeTo,n:HO,n: C pe30HaTopoM, H3JIyqa1Orn:HH Ha 650 HM (Streubel, Stevens, 1998; Streubel H ,n:p., 1998;
Mitel,
2000).
KaK H B ,n:ByX npe,n:bI,n:yrn:HX cTpyKTypax, 3,n:eCb BepxHHH KOHTaKT
CJIY)KHT ,n:JIH JIOKaJIH3au.HH HOCHTeJIeH TOKa. B KaqeCTBe HMnJIaHTaHTOB qarn:e Bcero HCnOJIb3Y1OT KHCJIOPO,n: H BO,n:OpO,n:, qTO npeBparn:aeT 3Ty 06JIaCTb B H30JIHTOp. KHCJIOP0,n: CqHTaeTCH 60JIee cTa6HJIbHbIM HMnJIaHTaHTOM, qeM BO,n:OpO,n:, nOCKOJIbKY MaJIble aTOMbl Bo,n:opo,n:a JIerKO ,n:H
I ,
, \
600
,
660
640 ,llmrna BO.lIlII>I
HMeeT KOJIbu.eBYIO
, I
,
1999).
Ha pHC.
, I I I
, I
CBeTo,n:Ho,n:aMH: OHH 06JIa,n:a1OT 60JIbilieH HPKOCTblO H 60JIee Y3KHM cneK-
1992, 1994;
,
I I I I
a TaK)Ke H3 GaP H ,n:pyrHx np03paqHbIX nOJIynpoBo,n:HHKOB.
TpOM H3JIyqeHHH (Schubert et aI.,
I I
I
H3,n:eJIHH. np03paqHOe OKHO MO)KeT 6bITb C
23.5,
:
: :- 30MA
BbIparn:HBaHHH • .lI.OBOJIbHO ,n:oporaH TeXHOJIOrHH C MaJIbIM BbIXO,n:OM ro,n:HbIX Ha pHC.
459
A.,
680
700
HM
PHC. 23.7. CrreKTpbI H3JIyqeHHlI CBeTo.nHo.na C pe30HaTopoM H 06b1QHorO CBeTo.nHo.na, 0,275, rrpH TOKe 30 MA. Pe30HaHCHblR rro.ncoe.nHHeHHblX K OIITOBOJIOKHY C N A 31jlljleKT B CBeTo.nHo.nax rrepBoro THrra YBeJIHQHBaeT HHTeHCHBHOCTb H3JIYQeHHlI H CHHJKaeT nlHpHHY crreKTpa H3JIyqeHHlI, oco6eHHO rrpH HCrrOJIb30BaHHH OrrTHQeCKHX BOJIOKOH C HH3KHM 3HaQeHHeM rrapaMeTpa N A (Whitaker, 1999)
=
nOJIynpoBo,n:HHKa ,n:a)Ke npH YMepeHHblX TeMnepaTypax OT)KHra. KOlILI\eBOH KOHTaKT p-THTIa
GaAs P+-THTIa
~""~~I·~~-L~~~~"""~mm~HomoH~rurr~
!
~~!!~~~~!~!~!!I~
pacnpellenemoe 3epKllJlO npeITa p-THTIa 6apLepHhlii CJIOH p-THTIa aKTHBHali ~ InGaP/AlInGaP c MKJI 6apLepHhlii cnOH IlrTHTIa pacnpellenemoe 3epKllJlO npeITa IlrTHTIa
GaAs n+-THTIa OMH'IeCKHH KOHTaKT IlrTHTIa
Bo,n:aMH ,n:aeT B03MO)KHOCTb nOJIyqHTb BblCOKHe CKOPOCTH nepe,n:aqH ,n:aHHbIX
rv
250
23.6.
M6HT/c (Streubel, Stevens,
1998).
CynepJIIOMHHecu:eHTHbIe CBeTO,ZJ:HO,ZJ:bI C Topu:eBbIM H3JIyqeHHeM
CBeTo,n:Ho,n:bI C TOpu.eBbIM H3JIyqeHHeM, 06JIa,n:alOrn:He 60JIbiliOH HpKOCTblO, 06eCneqHBa1OT BbICOKYIO 3
PHC.
23.6.
CTpYKTypa CBeTo.nHo.na C pe30HaTopoM, H3JIyqalOIlI.ero Ha .nJIHHe BOJIHbI 650 HM. Pe30HaTop IjlOPMHPYIOT .nBa pacrrpe.neJIeHHblX 6p3rroBcKHx 3epKaJIa. AKTHBHaH 06JIaCTb rrpe.nCTaBJIlIeT C060R CTPYKTYPY InGaP/ AlInGaP C MHOJKeCTBeHHblMH KBaHTOBblMH lIMaMH (Whitaker, 1999) Ha pHC.
23.7
npe,n:cTaBJIeHbl cneKTpbI H3JIYQeHHH CBeTo,n:Ho,n:a C pe30-
QeHHe 3a CQeT nOJIHOrO BHYTpeHHero OTpa)KeHHH. CynepJIIOMHHeCu.eHTHble ,n:HO,n:bI HBJIHIOTCH HCTOQHHKaMH HeKorepeHTHOro H3JIYQeHHH BblCOKOH HHT.eHCHBHOCTH, HMelOT IlIHpOKHe cneKTpaJIbHble JIHHHH. HeKorepeHTHoe H3JIYQeHHe xapaKTepH3yeTcH 60JIbilieH pa3MblTOCTblO pe3YJIbTHpY1Orn:ero CBeTOBoro nHTHa no cpaBHeHHIO C nHTHOM, nOJIy-
HaTopOM H 06blQHOrO CBeTo,n:Ho,n:a, COOTBeTCTBYlOrn:He CBeTo,n:Ho,n:aM, npHco-
QaeMbIM OT HCTOQHHKOB KorepeHTHoro H3JIYQeHHH -
e,n:HHeHHbIM K OnTHQeCKOMY BOJIOKHY. BH,n:HO, QTO Y CBeTo,n:Ho,n:OB C pe30Ha-
Hecu.eHTHble CBeTo,n:Ho,n:bI HCnOJIb3Y1OT ,n:JIH pa60Tbl B CHCTeMax CBH3H Ha
TOPOM 60JIee BblCOKHe:
OCHOBe O,n:HOMO,n:OBbIX CBeTOBo,n:OB, a TaK)Ke B KaQeCTBe HCTOQHHKOB CBeTa
•
•
JIa3epOB. CynepJIIOMH-
cne~TpaJIbHaH QHCTOTa, QTO CBH3aHO C HH3KOH xpOMaTHQeCKOH ,n:Hcnep-
nOBblIlIeHHOH HHTeHCHBHOCTH B aHaJIH3aTOpax OnTHQeCKHX KOMnOHeHTOB
CHeH,
(Liu, 2000).
HHTeHCHBHOCTb H3JIYQeHHH, QTO 06bHCHHeTCH 60JIbilieH HanpaBJIeHHOCTblO HX npocTpaHcTBeHHoro pacnpe,n:eJIeHHH H3JIYQeHHH.
DbIJIO nOKa3aHO, QTO HCnOJIb30BaHHe CBeTo,n:Ho,n:OB C pe30HaTopoM, H3JIyQalOrn:HX Ha ,n:JIHHe BOJIHbl
650
HM, COBMeCTHO C nOJIHMepHblMH CBeTO-
113JIYQeHHe HanpaBJIHeTCH B aKmUBftbtU CAOU BOAftOBOaa. Ha rpaHHu. ax Me)K,n:y aKTHBHbIM
CJIOeM H
BepxHHM
H HH)KHHM
6apbepHblMH CJIOHMH
npoHcxo,n:HT nOJIHOe BHyTpeHHee OTpa)KeHHe H3JIYQeHHH (pHC.
23.8).
QTo6bI
CBeT Mor pacnpocTpaHHTbcH B,n:OJIb BOJIHOBo,n:a, nOKa3aTeJIb npeJIOMJIeHHH
FIt.
460
23.
461
23.6. CyneplllOMuHecu,eHmHbte c8emOaUOabt c mopu,e8btM u311ytteHUeM
C8emOaUOabt 8 cucmeMax C8fl3U
aKTHBHoro CJIOH ,n;OJI)KeH 6bITb 3HaqHTeJIbHO BbIllie rrOKa3aTeJIeH rrpeJIOMJIeHHH 6apbepHbIX CJIOeB. Tor,n;a CPOTOHbI 6y,n;YT BbIJIeTaTb rro,n; MaJIbIMH yrJIaMH KOCH
BOJIHOBO,n;a H
rrepeMemaTbCH
B,n;OJIb aKTHBHOrO CJIOH 3a
CqeT OTpa)KeHHH OT rpaHHU pa3,n;eJIa ,n;ByX cpe,n; C pa3HbIMH rrOKa3aTeJIHMH rrpeJIOMJIeHHH (pHC.
23.8).
sepXHHii
O~amNmmro~_~~~~;m~~~~~~~~~~~~~ CHORi 3KTHBm.m cnOH
HHlKHlIii
o~amNmmroII\Hjj
enOH
nOJ\lIOlKKll
nO,lVIO)KI(R
PHC.
23.9.
CTPYKTYPbI .n:BYX THrrHqHbIX cyrrepJIIOMHHeCIl,eHTHblx CBeTo.n:Ho.n:OB:
a-
cyrrepJIIOMHHeCIl,eHTHblH CBeTo.n:HO.n: co CKOJIOTbIMH rpaHHMH, Ha o.n:HY H3 KOTOpbIX... -. - - . PHc •. 23.8. feoMeTpHH BOJIHOBo.n:a, rrOKa3bIBalOmaH pacrrpOCTpaHeHHe JIyqeH CBeTa
HaHeceHO aHTHOTpaJKalOmee rroKpbITHe;
6-
cyrrepJIIOMHHeCIl,eHTHbIH CBeTo.n:HO.n: co
CKOJIOTbIMH rpaHHMH 6e3 aHTHOTpaJKalOmerO rrOKpblTHH H C rrOJIOCKOBbIM KOHTaKTOM
B aKTHBHOM CJIoe
.n:JIH BBo.n:a TOKa, qaCTHqHO rroKpbIBalOmHM rrOBepXHOCTb YCTpoHcTBa
ITOCKOJIbKY CBeT pacrrpOCTpaHHeTCH B,n;OJIb aKTHBHoro CJIOH cseTo,n;Ho,n;a (BOJIHOBo,n;a), HHTeHCHBHOCTb CBeqeHHH YBeJIHqHBaeTCH JIHHeHHO C POCTOM
HaMHoro 60JIbllIe ,n;JIHHbI rrOrJIOmeHHH aKTHBHoH 06JIaCTH, 06paTHoH CBH3H
ero ,n;JIHHbI. TaKHM 06pa30M, YBeJIHqeHHe ,n;JIHHbI CBeTo,n;Ho,n;a C TopueBbIM
B YCTpOHCTBe He Ha6JIIO,n;aeTCH, T. e.
H3JIyqeHHeM rr03BOJIHeT rrOBbICHTb HHTeHCHBHOCTb ero CBeqeHHH. O,n;HaKO
6
,n;JIHHa 0 JIaCTH rrOTepb
rrpH 3TOM TaK)Ke B03paCTaeT BeJIHqHHa TOKa B036Y)K,n;eHHH.
Cynep.IlIOMUlieC/,felimHote C8emOOUOObt
:» a -1 ,
(23.1)
BbIHY)K,n;eHHOH peKOM6HHaUHH. B TaKHX aKTax Ka)K,n;bIH CPOTOH rrpHBo,n;HT
a - K03cpcpHUHeHT rrOrJIOmeHHH aKTHBHOH 06JIaCTH. K03cpcpHI.l,HeHT rroV rJIOmeHHH rrOJIyrrpOBo,n;HHKOB AIIIB Ha KpalO 3arrpemeHHOH 30HbI a ~ ~ 104 CM- I . IT03TOMY rrpH ,n;JIHHe 06JIaCTH rroTepb 60JIbllIe HeCKOJIbKHX
K peKOM6HHaUHH 3JIeKTpOHHO-,n;WPOqHOH rrapw C H3JIyqeHHeM Oqepe,n;Horo
,n;eCHTKOB MHKpoMeTpoB, orrTHqeCKaH 06paTHaH CBH3b qepe3 3a,n;HIOIO rpaHb
cpOTOHa. BHOBb HcrrymeHHbIH CPOTOH HMeeT TO )Ke HarrpaBJIeHHe ,n;BH)KeHHH, H ,n;JIHHy BOJIHbI, qTO H HCXO,n;HbIH CPOTOH. IT03TOMY cyrrepJIIOMHHeC-
rrpeHe6pe)KHMO MaJIa. B ,n;orrOJIHeHHe K rroTepHM Ha rrOrJIOmeHHe B 06JIaCTH 6e3 HaKaqKH
ueHTHble CBeTo,n;Ho,n;bI OTJIHqalOTCH OT 06blqHWX 60JIbllIeH KorepeHTHOCTblO
HH)KeKUHOHHbIM TOKOM B03HHKalOT rroTepH Ha ,n;HcppaKIl,HIO. YCHJIeHHe H3JIy-
H3JIyqeHHH. B
qeHHH rrpoHcxo,n;HT B 06JIaCTH HH)KeKIl,HH HOCHTeJIeif TOKa, a He B 06JIaCTH
HBJIHIOTCH CBeTo,n;Ho,n;aMH TOPUe-
Boro H3JIyqeHHH C BbICOKHMH TOKaMH HaKaqKH, 06eCrreqHBalOmHMH aKTbI
cpa3y
pe)KHMe BbIHY)K,n;eHHOH peKOM6HHaUHH crrOHTaHHoe H3JIy-
r,n;e
Ha rrOrJIOmeHHe H ,n;HcppaKIl,HIO rro~
qeHHe, H,n;ymee K BepXHeH rrOBepXHOCTH CBeTo,n;Ho,n;a, YMeHbliiaeTCH, Tor,n;a
rrOTepb. IT03TOMY 06a THrra rrOTepb -
KaK H3JIyqeHHe B BOJIHOBo,n;Hble MO,n;bI YCHJIHBaeTCH.
MoralOT H36e)KaTb B CBeTo,n;Ho,n;ax ,n;aHHoro BH,n;a B03HHKHOBeHHH JIa3epHOH
CyrrepJIIOMHHeCueHTHble ,n;HO,n;W rrOXO)KH Ha rrOJIyrrpOBo,n;HHKOBble JIa3epbI, HO C O,n;HHM ,n;OBOJIbHO cepbe3HbIM OTJIHqHeM: B HHX OTCYTCTByeT
reHepaIl,HH. Ha pHC.
OrrTHqeCKaH 06paTHaH CBH3b, 06eCrreqHBaeMaH OTpa)KaTeJIHMH B JIa3epax.
cyrrepJIIOMHHeCIl,eHTHOro CBeTo,n;Ho,n;a H JIa3epa. 06bIQHWe CBeTo,n;Ho,n;bI HMe-
Ha pHC.
23.9
rrOKa3aHbI CTpy!{TYPbI ,n;ByX THrrHqHbIX cyrrepJIIOMHHeCueHT-
HbIX CBeTo,n;Ho,n;OB. 3a,n;HHH rpaHb CBeTo,n;Ho,n;a Ha pHC.
23.9, a
23.10
rrOKa3aHbI crreKTpbI H3JIyqeHHH 06blqHOrO CBeTo,n;Ho,n;a,
lOT HaH60JIee llIHpOKHe crreKTpbI H3JIYQeHHH. CrreKTpbI cyrrepJIIOMHHeCIl,eHT-
06JIa,n;aeT
HbIX CBeTo,n;Ho,n;OB C He60JIbllIHMH K03cpcpHIl,HeHTaMH OTpa)KeHHH rpaHeH
BbICOKHM K03cpcpHUHeHToM OTpa)KeHHH, a Ha rrepe,n;HIOIO rpaHb HaHeceHO
OTJIHQalOTCH rrepHo,n;HQeCKOH MO,n;YJIHIl,HeH crreKTpaJIbHbIX JIHHHH, B03HHKa-
aHTHOTpa)KalOmee rrOKpbITHe. ,L{JIH rrpe,n;oTBpameHHH JIa3epHOH reHepaUHH K03cpCPHUHeHT OTpa)KeHHH rrepe,n;HeH rpaHH ,n;OJI)KeH 6bITb ::::; 10- 6 (Liu,
IOmeif H3-3a YCHJIeHHH H3JIYQeHHH B pe30HaTopax a6pH-ITepo. H,n;eaJIbHble
2000;
MH JIHHHHMH 6e3 KaKOH-JIH60 MO,n;YJIHIl,HH. CrreKTpbI cyrrepJIIOMHHeCIl,eHT-
Saul et aI.,
1985).
,L{JIH BbIlIOJIHeHHH 3Toro Tpe60BaHHH aHTHOTpa-
cyrrepJIIOMHHeCIl,eHTHble CBeTo,n;Ho,n;bI 06JIa,n;a1OT rJIa,n;KHMH
crreKTpaJIbHbI-
)KalOmee rrOKpbITHe ,n;OJI)KHO HMeTb BblCOKoe KaqeCTBO, qTO rrpHBo,n;HT K cy-
HbIX CBeTo,n;Ho,n;OB Y)Ke, QeM y
meCTBeHHOMY YBeJIHqeHHIO CTOHMOCTH H3rOTOBJIeHHH TaKHX CBeTo,n;Ho,n;OB.
YJIYQllIeHHeM KorepeHTHOCTH, BbI3BaHHbIM BbIHY)K,n;eHHbIM H3JIYQeHHeM. Ha
BOJIee ,n;ellIeBbIH CBeTo,n;HO,n; rrOKa3aH Ha pHC.
06.1laCmb nomepb,
23.9,6.
B CTpyKTypy TaKO-
pHC.
23.10
06bIQHbIX CBeTo,n;Ho,n;OB. 3TO 06bHcHHeTcH
TaK)Ke rrOKa3aH crreKTp JIa3epa a6pH-ITepo C HeCKOJIbKHMH
rpaHblO ,n;Ho,n;a. 3Ta 06JIaCTb He rrOKpbITa _BepXHHM MeTaJIJIHqeCKHM KOH-
JIa3epHbIMH Mo,n;aMH. Ha pHC. 23.11 ,n;JIH cpaBHeHHH rrpe,n;cTaBJIeHbI
TaKToM H rr03TOMY He HaKaq~~OKO~CJIH ,n;JIHHa 06JIaCTHrrQTg~ __ __
CHBHOCTH
ro CBeTo,n;Ho,n;a BXO,n;HT
pacrrOJIO)KeHHaH PH,n;OM C 3a,n;HeH
H3JIYQeHHH
OT TOKa
(3aBHcHMoCTH
L-I)
3aBHCHMOCTH ,n;JIH
HHTeH-
06bIQHOrO
CBe-
FA. 23. CBemoauoabl
462
8
23.6. Bu6AuoepacjJU'leCKUU cnUCOK
cucmeMax C8R3U
463
a BH6JIHOrpaclmlleCKHH CDHCOK Burrus C. A. and Miller 8.1. "Small-area double heterostructure AIGaAs electroluminescent diode sources for optical fiber transmission lines" Opt. Commun. 4, 307 (1971). Liu
Amma IIOJIHLI A.
Amma BOlIHhl A.
Amma BOlIHhl A.
Amma BOlIHhl A.
PHC. 23.10. CneKTpbI H3JIyqeHHlI: a - OOhlqHOrO CBeTOAHOAa c TeOpeTHQeCKOH IllHPHHOH cneKTpa 1,8kT; 6 - MHorOMOAOBoro nOJIynpoBoAHHKoBoro JIa3epa; 8 cynepJIIOMHHeCueHTHoro cBeTOAHOAa, H3rOTOBJIeHHOrO Ha OCHOBe MHorOMOAOBoro JIa3epa c aHTHOTpa)l{aIOlI.{HM nOKphlTHeM OAHOH H3 ero rpaHeH; e - HAeaJIbHOrO cynepJIIOMHHeCueHTHoro CBeTOAHOAa C IllHPHHOH cneKTpa MeHbllleH kT (Liu, 2000) TOJl.HOJl.a, cyrrepJIloMHHecueHTHoro CBeTOJl.I-IOJl.a M JIa3epa. nOBepXHOCTHOM3JIyqaIOIIJ.Me CBeTOJl.MOJl.b1 C He60JIbIllMM J1.MaMeTpOM M3JIyqaIOIIJ.eH 06JIaCTM xapaKTepM3YIOTCH 8btnYKJlbtMU 3aBMCMMOCTHMM L-1. npM BbICOKMX rrJIOTHOCTHX TOKa aKTMBHble 06JIaCTH nOBepXHOCTHO-M3JIyqaIOIIJ.MX CBeTOJl.MOJl.OB He6oJIbillOrO 06beMa rreperrOJIHlIIOTCH HOCMTeJIHMM, 'ITO BeJl.eT K HaCbIIIJ.eHMIO. CBeTOJl.MOJl.bI C TOPUeBbIM M3JIyqeHMeM, pa60TaIOIIJ.Me B pe)l{MMe crrOHTaHHoro M3JIyqeHMH, OTJIMqaIOTCH JlUHeUHbtMU 3aBMCMMOCTHMM L-1, TaKMMM KaK y MJl.eaJIbHblX CBeTOJl.MOJl.OB. CyrrepJIIOMMHeCueHTHbie CBeTOJl.MOJl.b1 06JIaJl.aIOT 802HymbtMU 3aBMCMMOCTHMH L-1, 'ITO Bbl3BaHO pa60TOH B pe)KMMe BbIHY)KJl.eHHOrO M3JIyqeHMH, rrpMBOJl.HIIJ.eM K pOCTy qMCJIa OTOHOB, pacrrpOCTpaHHIOIIJ.MXCH B BOJIHOBOJl.e. KOJIMqeCTBO OTOHOB, M3JIyqaeMbIX B BOJIHOBOJl.HYIO MOJl.Y, paCTeT rrporropUMOHaJIbHO YBeJIMqeHMIO TOKa, rrOCKOJIbKY rrpM 9TOM BblHY)l{J1.eHHOe M3JIyqeHMe CTaHOBMTCH OCHOBHbIM. KaK M cyrrepJIIOMMHeCueHTHbie CBeTOJl.MOJl.b1, rrOJIyrrpOBOJl.HMKOBble JIa3epbI xapaKTepM3YIOTCH BorHYTbIMM 3aBMCMMOCTHMM L-1. npM 9TOM L-1-3aBMCMMOCTM JIa3epOB OTJIMqaIOTCH 60JIee Bblpa)KeHHblM rroporOM. 6-
nOBepXHOCTHQ-H3JI}"IaJOII.\He CBeTOi\HO}:\hl: BLInyKJlaJI xapaKTepHCTHKa H3-3a
.q,q,eKTa HaCIillI\eHHll
TOK
TOK
6 -
cynepJIIOMHHecI\eHTllLle CBeTOi\HO}:\hl: BOrHyTaJI xaplIKTepHCTHKa H3-3a
cynepJIIOMHHecI\ellI\HH
TOK
PHC. 23.11. 3aBHcHMoCTH HHTeHCHBHOCTH H3JIYQeHHlI OT TOKa AJIlI pa3Hhlx THnOB CBeTOAHOAOB: a - CBeTOAHOAbi C TopueBbIM H3JIYQeHHeM co CJIaObIM 3!jJ!jJeKToM HaChllI.{eHHlI HJIH oe3 Hero; 6 - nOBepXHOCTHO-H3JIYQaIOlI.{He CBeTOAHOAbI C HeOOJIblllOH aKTHBHOH OOJIaCTbIO C 3!jJ!jJeKTOM HaCbIlI.{eHHlI H3-3a nepenOJIHeHHlI HOCHTeJIlIMH; B - cynepJIIOMHHeCueHTHbie CBeTOAHOAbi. IloKa3aHa L-I-3aBHcHMocTb JIa3epa, OTJIHQaIOlI.{allClI Bhlpa)l{eHHbIM noporoBbiM TOKOM
Y. "Passive components tested by superluminescent diodes" February issue of WDM Solutions p. 41 (2000).
Mitel Corporation. RC-cBeToAHoAbi ObIJIH BnepBble H3rOTOBJIeHbI KopnopaUHeH Mitel. RC-C)l C BOJIHOH H3JIYQeHHlI 650 HM HMeIOT ,N'g lA466 (2ooo). MacCOBoe npOH3BOACTBO RC-C)l OhlJIO HaQaTO B 2001 r. KopnopaUHeH Osram Optosemiconductors, - CM. Wirth R., Huber W., Karnutsch C., and Streubel K. "High-efficiency resonant-cavity LEDs emitting at 650 nm" Compound Semiconductors 8, 49 (2002). Ostermayer Jr. F. W., Kohl P. A., and Burton R. H. "Photoelectrochemical etching of integral lenses on GaInPAs/InP light-emitting diodes" Appl. Phys. Lett. 43, 642 (1983).
R. H., Lee T. P., and Burrus C. A. "Light-emitting-diode device design" in Lightwave Communications Technology edited by W. T. Tsang, Semiconductors and Semimetals 22 Part C, (Academic Press, San Diego, 1985). Schubert E. F. and Hunt N. E. J. "Enhancement of spontaneous emission in microcavities" in Vertical Cavity Surface Emitting Lasers edited by C. Wilmsen,
Saul
H. Temkin, and L. A. Coldren (Cambridge University Press, Cambridge, UK, 1999). Schubert E. F., Wang Y-H., Cho A. Y., Tu L.-W., and Zydzik G. J. "Resonantcavity light-emitting diode" Appl. Phys. Lett. 60, 921 (1992). Schubert E. F., Hunt N. E. J., Micovic M., Malik R. J., Sivco D. L., Cho A. Y, and Zydzik G. J. "Highly efficient light-emitting diodes with microcavities" Science 265, 943 (1994). Streubel K. and Stevens R. "250 Mbit/s plastic fibre transmission using 660 nm resonant cavity light emitting diode" Electron. Lett. 34, 1862 (1998). Streubel K., Helin U., Oskarsson V., Backlin E., and Johansson A. "High brightness visible (660 nm) resonant-cavity light-emitting diode" IEEE Photonics Technol.Lett. 10, 1685 (1998). Whitaker T. "Resonant cavity LEDs" Compound Semiconductors 1999).
5
(4), 32 (May
24.1. BpeMR HapacmaHUR U cnaaa CU2HaJl08, ttacmoma no yp08HIO 3aB
a
v~t--
r JI a B a
L
24
.llHHAMHqECKHE XAPAKTEPHCTHKH
465
tnt T
o
0
t
6
CBETO.llHO.llOB B 'JIOKaJIbHbIX CHCTeMax CBfl3H, pa6oTalOmHx B .D.Harra30He OT OqeHb KOPOTKHX
« 1 M)
.lI,O Cpe.ll,HHX
(rv 5
KM) paccToflHHH, B KaqeCTBe HCTOqHH-
KOB H3JIyqeHHfI 'lame Bcero HCrrOJIb3YIOT CBeTO.ll,HO.ll,bI. THrrHqHble CKOPOCTH rrepe.ll,aqH .lI,aHHbIX B TaKHX CHCTeMax JIe2KaT B HHTepBaJIe OT HeCKOJIbKHX .lI,eCflTKOB M6HT/C .lI,O
1 r6HT/C.
CBeTO.ll,HO.ll,bI flBJIfllOTCfI HeJIHHeHHbIMH 3JIeMeHTaMH, H HX xapaKTepHCTHKH, TaK2Ke KaK H rrapaMeTpbI rrOCJIe.ll,OBaTeJIbHbIX corrpOTHBJIeHHH, IIIYHTOB H KOH.lI,eHCaTopoB CHJIbHO 3aBHCflT OT rrpHJI02KeHHOrO Harrpfl2KeHHfI. TIpH rrpOBe.ll,eHHH TOqHbIX paCqeTOB 3TH HeJIHHeHHOCTH rrpHXO.ll,HTCfI yqHTbIBaTb,
8
=
PlfC.
KaK JIHHeHHble YCTpoHCTBa. O.ll,HaKO Ha OCHOBe JIHHeHHOH MO.ll,eJIH HeJIb3f1
BpeMH HapacTaHlfH)
---Po
Eli
t
XOTfI .lI,JIfI ou.eHKH pa60TbI pfl.ll,a CHCTeM M02KHO paCCMaTpHBaTb CBeTO.ll,HO.ll,bI
24.1.
I
I
RC-I1.enlf
OTKJIlfK JIlfHeHHOH
(a);
Ha BXO,nHOH cTyneHlfaTbIH IfMnyJIbC (Tris.-
BpeMH HapacTaHlfH If cna,na nplf 3KCnOHeHI1.lfaJIbHOM 1f3-
(6);
BbIBeCTH peaJIbHble .lI,HHaMHqeCKHe xapaKTepHCTHKH CBeTO.ll,HO.ll,OB. B 3TOH
MeHeHlf1f
rJIaBe CBeTO.ll,HO.ll,bI CHaqaJIa paCCMaTpHBalOTCfI KaK JIHHeHHble 3JIeMeHTbI,
1f3JIyqeHlfH KaK
.lI,JIfI KOTOPbIX 6Y.lI,YT orrpe.ll,eJIeHbI .lI,HHaMHqeCKHe xapaKTepHCTHKH. TIoCJIe
ClfrHaJIa Tr (8)
ClfrHaJIa
(T\
If T2 -
nOCTOHHHble BpeMeHIf)
Bblxo,nHaH
MOII1.HOCTb
3Toro .lI,HHaMHqeCKHe xapaKTepHCTHKH 6Y.lI,YT YTOqHeHbI C yqeTOM HeKOTOH crra.ll,a CHrHaJIa CBfl3aHbI C rrOCTOflHHbIMH BpeMeHH Tl H T2 CJIe.ll,YlOmHMH
pbIX HeJIHHeHHOCTeH CBeTO.ll,HO.ll,OB.
COOTHOIIIeHHflMH:
24.1.
BpeMSI HapacTaHHSI H cna~a CHrHaJIOB, qaCTOTa
3 ~B
no ypOBHIO
Ha pHC.
24.1, a
H nOJIoca nponYCKaHHSI B TeopHH JIHHeHHbIX u,eneH
rrOKa3aHa rrpocTafl
RC-u.errb.
Tr
= (In 9) . Tl
~ 2,2Tl;
Tf
= (1n 9) . T2 ~ 2,2T2.
flepeaamOtt1-taR tPYHKLfUR no HanpR3ICeHUlO
H (w) = (1
Kor.ll,a Ha BXO.ll, 3TOH cxe-
(24.3)
orrpe.ll,eJIfleTCfI KaK
+ iWT)-1 .
(24.4)
MbI rrO.ll,aeTCfI cTyrreHqaTbIH CHrHaJI, Harrpfl2KeHHe Ha ee BbIXO.ll,e MeHfleTCfI
flo/toca nponYCKaHUR
B COOTBeTCTBHH C Bblpa2KeHHeM
Vout(t) = Yo [1 r.ll,e Tl
exp
(-t/T!)]'
(24.l)
= RC - rrOCTOflHHafl BpeMeHH RC-u.errH. TIPH pe3KoM CHH2KeHHH
BXO.ll,HOrO Harrpfl2KeHHfI .lI,O HyJIfI BbIXO.ll,HOe Harrpfl2KeHHe u.errH YMeHbIIIaeTcfI rro cJIe.ll,YlOmeMY 3aKoHY:
(24.2) ,ll.JIfI
RC-u.errH
Tl
=
T2. BpeMeHa HapacTaHHfI H crra.ll,a CHrHaJIa orrpe.ll,e-
JIfllOTCfI KaK HHTepBaJIbI Me2K.lI,y MOMeHTaMH paBeHcTBa Harrpfl2KeHHfI H
90%
OT YCTaHOBHBIIIerOCfI 3HaqeHHfI (pHC.
24.1,6).
10%
BpeMeHa HapaCTaHHfI
CHCTeMbI
IlJ
orrpe.ll,eJIfleTCfI qaCTOTOH, rrpH KOTO-
POH MOmHOCTb, rrepe.ll,aHHafl qepe3 CHCTeMY, YMeHbIIIaeTCfI B .lI,Ba pa3a rro cpaBHeHHIO co 3HaqeHHeM, H3MepeHHbIM Ha HH3KOH qaCTOTe. ;:ho YCJIOBHe M02KHO 3arrHcaTb B BH.lI,e
IH (21ff) 12
= 1/2.
Tor.ll,a rrOJIoca rrporrycKaHHfI
RC-u.errH
AJ -- f 3)1.B --
L.l.
1 _ In9 -_ 21fT 21fTr
-- -
1f
In 9 "0,7 "(Tr + Tf) (Tr + Tf)·
TIOJIOca rrporrYCKaHHfI HHOr.ll,a orrpe.ll,eJIfleTCfI
t{,acmomou no yp08HlO 3 aB,
rrOCKOJIbKY MOmHOCTb CHrHaJIa, rrepe.ll,aHHOrO Ha ::ITOH qaCTOTe, Ha MeHbIlle MOmHOCTH CHrHaJIa, rrepe.ll,aHHOrO Ha HH3KOH qaCTOTe.
16
(24.5)
3
.lI,B
466
24.3. BpeMeHa HapacmaHUfl U cnaiJa onmU'leCKUX CU2HaA08
FA. 24. /l.uHaMU'leCKUe xapaKmepucmuKu c8emoiJuoiJo8 Terrepb paccMoTpHM CBeTO~HO~ co BpeMeHeM HapacTaHHH CHrHa~a
(pHC.
24.1,8).
Tr
llPH rro~aqe Ha BXO~ CBeTO~Ho~a cTyrreHqaTOrO HMrrY~bca
TOKa MOlll.HOCTb
BbIXO~Horo
OrrTHqeCKOrO
H3~yqeHHH
yBe~HqHBaeTCH
rro
3aKoHY
Pout(t)
=
llo aHa~OrHH C ypaBHeHHHMH
c8emoiJuoiJa no MOUJ,ftOCmu
Po [1 (24.1)
exp H
(-tfTr)J.
(24.6)
(24.4) nepeiJamo'l-HYIO t/JyftKLfUIO
MO}KHO orrpe~e~HTb KaK
H[ED (w) = (1
+ iWT)-1 .
(24.7)
~B a6co~IOTHoe 3HaqeHHe 9Toro Bblpa}KeHHH YMeHbIIIHTCH B ~Ba pa3a. l109TOMY <popMy~a ~~H HaXO}K~eHHH rrO~OCbI Ha qaCTOTe rro ypOBHIO
3
rrporrycKaHHH HMeeT c~e~yIOllI.HH: BH~:
TaKHX
CBeTO~HO~OB
.liE
= v'3 = v'3 . In 9 = v'3. In 9 ~ 27rT 27rTr 7r (Tr + Tj)
1,2
(24.8)
(Tr + Tj)·
(24.3)-(24.5)
H
BpeMeHeM }KH3HH
O~OB ~aHHoro
THrra He
rrO~qHHHeTCH
orrpe~eJIHeMoMy Bblpa}KeHHeM
CTporo 9KcrrOHeHUHaJIbHOMY 3aKOHY,
(24.6),
ypaBHeHHe
(24.8)
~JIH HHX HBJIHeTCH
~HIIIb rrpH6JIH}KeHHbIM. PaccMoTpHM CBeTO~HO~, 06JIaCTb p-n-rrepexo~a KOToporo 3aHHMaeT BCIO
rr~Olll.a~b KpHCTaJIJIa. Pa3Mep KOHTaKTa (06blqHO He6o~bIIIOH:) B TaKOM CBeTO~Ho~e orrpe~eJIHeT BeJIHqHHY 06JIaCTH H3JIyqeHHH. B CHCTeMax CBH3H, KaK rrpaBH~o, HCrrOJIb3YIOT HMeHHO TaKHe CBeTO~HO~bI. llpH HYJIeBOM CMelll.eHHH eMKOCTb CBeTO~Ho~a orrpe~eJIHeTCH ero 6apbepHOH: eMKOCTbIO (eMKocTbIO rrpocTpaHcTBeHHoro 3apH~a). llOCKOJIbKY CBeTO~HO~bI ~aHHoro THrra 06JIa~aIOT ~OBO~bHO 60~bIIIOH: rrJIOlll.a~bIO (HarrpHMep MKM), HX eMKOCTb MO}KeT ~OCTHraTb
200-300
250
MKM x
250
rr
CBeTO~Ho~a ~aHHoro THrra MOHTHpyeTcH B rrepeBepHYToM
BH~e, 9JIeKTpOHbI co6HpaIOTcH B 06JIaCTH, pacrrO~O}KeHHOH: rro~ KOHTaKTOM. llpH rrpHMoM CMelll.eHHH p-n-rrepexo~a eMKOCTb CBeTO~Ho~a orrpe~eJIHeTCH eMKOCTbIO ~H
HB~HeTCH He BeCb KpHCTa~JI, a TOJIbKO 06JIaCTb HH}KeKUHH HOCHTe~eH: TOKa.
YnpalKHeHHe. Bbl80iJ iJuHaMU'leCIWX xapaKmepucmU/c cBemoiJuoiJa Tpe6yeTcli BbiBeCTH ypaBHeHHlI
a
crrOHTaHHoro H3~yqeHHH. llOCKOJIbKY HHTeHCHBHOCTb H3JIyqeHHH CBeTO~H
KpHCTaJIJI
llJ = h
OrpaHHqeHa He HX eMKOCTbIO,
467
(24.8).
CHH}KeHHe eMKOCTH Be~eT K paCIIIHpeHHIO pa6oqeH: rrQJIOCbI qaCTOT.
YnpalKHeHHe. OnpeiJeAeHue nOAOCbl nponYCKaHUfl c8emoiJuoiJa
BapbepHaH eMKOCTb MO}KeT 6bITb YMeHbilieHa rrpH rrOMOlll.H BbITpaBJIHBaHHH
PaccMaTpHBaeTcli CBeTO,AHO,A co BpeMeHeM HapacTaHHlI 1,75 HC. CqHTaeTClI, 'ITO BpeMli HapaCTaHHlI CHrHa~a paBHO BpeMeHH cna,Aa. Tpe6yeTcli onpeAeJIHTb nOJIOcy nponYCKaHHlI CBeTOAHOAa H 06blICHHTb, nOqeMY no ypaBHeHHIO (24.8) MO:lKHO HaRTH JIHlIIb npH6JIH3HTeJIbHOe 3HaqeHHe qaCTOTbI no ypOBHIO 3 AE.
Me3acTpyKTyp. llPH 9TOM ~JIH HCKJIIOqeHHH rrOBepXHOCTHOH: peKOM6HHaUHH
crroco6oB He CYlll.eCTByeT.
PemeHHe
KO YMeHbilieHa BBe~eHHeM ~e
HaRAeHHoe no ypaBHeHHIO (24.8) 3HaqeHHe, onpeAeJIlIIOIII;ee nOJIOcy nponycKaHHlI, paBHo 343 Mf[(. OAHaKo Ha npaKTHKe, eCJIH CHrHaJI npH HapacTaHHH HJIH cnaAe MeHlIeTCli He no 3KCnOHeH[(HaJIbHOMY 3aKOHY, peaJIbHali qaCTOTa no ypOBHIO 3 AE 6b1BaeT HeCKOJIbKO BbIllie HJIH HeCKOJIbKO HH:lKe 3Toro 3HaqeHHlI. I103TOMY K03(j>qlH[(HeHT 1,2 B ypaBHeHHH (24.8) B 3aBHCHMOCTH OT KOHKpeTHoro CJIyqalI MO:lKeT H3MeHlITbCli B AHana30He 1,0-1,5.
JIIOMHHeCueHUHH. TaKHe ~e
24.2.
Me3aCTpYKTypbI ~OJI}KHbI 6bITb 60~bIIIe rrJIOlll.a~H KOHTaKTOB. ,lJ.JIH CYlll.eCTBeHHoro CHH}KeHHH ~H
HOCHTeJIeH: H, CJIe~OBaTeJIbHO, CHH}KaIOT ~H
TO~HO~bI C BHe~peHHbIMH ~e
BpeMH HapaCTaHHH H cnaAa OnTHlIeCKOrO CHrHaJIa
24.3.
npH 60JIbmou: eMKOCTH CBeTOAHOAOB
BpeMeHa HapacTaHHH H cnaAa OnTHlIeCKHX
CHrHaJIOB npH MaJIou: eMKOCTH CBeTOAHOAOB B
~liO~ax, Hcrro~b3yeMblx ~~H OCBelll.eHHH, 06~aCTb HH}KeKUHH HO-
CHTe~eH: TOKa B p-n-rrepexo~ MO}KeT 6bITb OqeHb 60~bIIIOH:. I1Hor~a OHa MO}KeT rrepeKpbIBaTb rr~Olll.a~b Bcero KpHCTa~~a CBeTO~Ho~a. TaKHe ~HO~bI xapaKTepH3YIOTCH 60AbUlOU eMKOCTbIO. 0603HaqHM eMKOCTb ~Ho~a KaK
C,
a rrO~Hoe corrpOTHB~eHHe uerrH, COCTOHllI.eH: H3 corrpOTHBJIeHHH ~Ho~a H
~OCJIe~OBaTeJIbHOrO corrpOTHBJIeHHH yrrpaBJIHiolll.eH: cxeMbI KaK
R.
BpeMeHa
HapaCTaHHH H crra~a CHmaJIa ~Ho~a paBHbI H orrpe~eJIHIOTCH rrOCTOHHHOH: BpeMeHH
RC.
Terrepb paCCMOTpHM BpeMH HapaCTaHHH H crra~a CHrHaJIOB B CBeTO~HO ~ax MaJIOH: eMKOCTH. MaJIoH: eMKOCTbIO 06blqHO 06~a~aIOT rrOBepXHOCTHOH3JIyqaIOllI.He CBeTO~HO~bI
C He6oJIbIIIOH: rrJIOlll.a~bIO aKTHBHOH: 06JIaCTH,
HCrrOJIb3yeMble B CHCTeMax CBH3H. PaccMoTpHM CBeTO~HO~, yrrpaBJIHeMbIH: rrOCTOHHHbIM TOKOM, KOTOPbIH: BKJIIOqaeTCH B MOMeHT BpeMeHH
t =
o.
llpH
9TOM B aKTHBHYIO 06JIaCTb HH}KeKTHpYIOTCH 9JIeKTpOHbI, orrpe~eJIHIOllI.He B HeH: KOHueHTpaUHIO HOCHTeJIeH:, 'ITO BbI3bIBaeT YBeJIHqeHHe BbIXO~HOH:
B CBeTO~Ho~ax, rrpHMeHHeMbIX B CHCTeMax CBH3H, pa3MepbI aKTHBHOH:
MOlll.HOCTH CBeTO~Ho~a. B MO~eJIH MOHOMOJIeKYJIHpHOH: peKOM6HHaUHH HH-
06~aCTH C HH}KeKUHOHHOH: HaKaqKOH: Bcer~a HaMHoro MeHbIIIe, qeM B OCBeTHTe~bHblX CBeTO~Ho~ax. l109TOMY MaKCHMa~bHaH'qaCTOTa MO~y~HUHH
TeHCHBHOCTb BbIXO~Horo H3~yqeHHH CBeTO~Ho~a rrpHMO rrporropUHOHaJIbHa KOHueHTpaUHH HeOCHOBHbIX HOCHTeJIeH:.
16*
Til. 24. /JuHaMuliecKue xapaKmepucmUKU cBemOaUOaOB
468
469
24.4. 3aBucuMocmb HanpJt3ICeHUJt om BpeMeHu cnaaa U HapacmaHUJt
YpaBHeHHe ~RH CKOPOCTH MOHoMoReKYRHpHOH peKoM6HHaUHH HMeeT
cRe~YIOIII.HH BH~:
24.4. 1
_ dna _ na
3aBHCHMOCTb HanpBlKeHHB OT BpeMeHH cnaAa H HapaCTaHHB OHTHQeCKHX CHrHaJlOB
(24.9)
e·A·d----;]t-7'
Ha pHC.
r~e n a -
KOHueHTpaUHH HocHTeReH B aKTHBHoH 06RacTH,
06RaCTH HH)KeKUHH TOKa B aKTHBHOH 06RacTH, RaCTH. YCTaHoBHBIIIHHCH TOK u
HeOCHOBHhlX HOCHTeReH paBHo T -
na
I
d-
A-
rWOIII.a~b
TORIII.HHa aKTHBHOH 06-
onpe~eRHeT cTaUHoHapHYIO KOHueHTpaUHIO
l·T = e.A.~'
C
u
pe~Hee BpeMH )KH3HH HOCHTeReH
BpeMeHH )KH3HH HOCHTeReH npH crrOHTaHHOH peKoM6HHaUHH.
Terrepb paccMoTpHM CBeTO~HO~, B HaqaRe Haxo~HBIIIHHCH B BbIKRIOqeH-
I.
~RH
orrpe~eReHHH
BpeMeHH
1996).
KaK rrOKa3aHO, BpeMeHa crra~a H HapaCTaHHH H3MepHIOTcH Me)K~y ypOBHHMH
10 %
H
90 %
OT YCTaHOBHBIIIerOCH 3HaqeHHH BblXO~Horo OllTHqeCKOrO
CHrHaJIa. HHTeHCHBHOCTb OrrTHqeCKOrO CHrHaJIa orrpe~eRHRH rro ~OTOTO Ky rrOJIyrrpoBo~HHKoBoro ~oTo~eTeKTopa. TIPH rrpoBe~eHHH TaKHX H3MepeHHH He06xo~HMO HcrrORb30BaTb reHepaTopbl HMrrYJIbCOB H ~OTO~HO~bl,
B BblKRIOqeHHOM COCTOHHHH KOHueHTpaUHH HeOCHOBHblX
BpeMeHa crra~a H HapaCTaHHH BXO~HT rrOCTOHHHhle BpeMeHH reHepaTopa
t = 0 na ~ O.
YCROBHHX,
HCrrOJIb3yeMhle
crra~a H HapaCTaHHHHX BblXO~Horo H3JIyqeHHH (Schubert et al.,
3HaqHTeJIbHO 60Ree 6blcTpo~eHcTByIOIII.He, qeM CBeTO~HO~. B H3MepeHHble
HocHTeReH B aKTHBHoH o6RacTH qTO rrpH
rrOKa3aHbl 3KcrrepHMeHTaRbHo rrOJIyqeHHhle rrepexo~Hble CBeTO~HO~OB,
Ha HerO 6blR rro~aH rro-
t = 0
HOM COCTOHHHH. TIYCTb B MOMeHT BpeMeHH CTOHHHblH TOK
24.2
xapaKTepHcTHKH
HaXO~HM
6bwa
OqeHb MaRa, T. e. 6y~eM CqHTaTb,
(24.9)
HM·nYRbcoB, CBeTO~Ho~a, ~en~KTopa, YCHRHTeJIH ~oToToKa H OCUHRRorpa-
npH TaKHX HaqaRbHblX
~a. TIOCKORbKY CBeTO~HO~ 06JIa~aeT caMOH 60JIbIIIOH rroCToHHHOH BpeMeHH,
BpeMeHHYIO 3aBHCHMOCTb H3MeHeHHH KOHueHTpaUHH
eMY H cooTBeTcTBYIOT H3MepeHHble 3HaqeHHH BpeMeHH crra~a H HapacTaHHH.
PeIIIaH ypaBHeHHe
HOCHTeReH B aKTHBHOH 06RaCTH:
TIoKa3aHbl BepXHue npeaeJlbl peaRbHblx 3HaqeHHH rrOCTOHHHblX BpeMeHH cBeTO~HO~OB.
(24.10)
H3 pHC.
24.2
BH~HO, qTO BpeMH HapacTaHHH CHmaJIa HaMHoro 60JIbIIIe
BpeMeHH crra~a. TIo TeOpeTHqeCKOH MO~eJIH, orrHcaHHOH BblIIIe, TaKOH pa3HHUbl 6bITb He ~OJI)KHO.
1-13
ypaBHeHHH
BH~HO, qTO 3a BpeMH T
B aKTHBHOH 06RaCTH YCTaHO-
BHTCH CTaUHOHapHaH KOHueHTpaUHH HOCHTeReH 3apH~OB. HHTeHCHBHOCTb BbrXO~Horo
H3RyqeHHH
Bcer~a
rrpHMO
rrporropUHOHaRbHa
CBeTO)UlO.!\ C pe30HaTOpoM T = 300 K Von = 1,4 B Voff= 0,0 B
KOHueHTpaUHH
HeOCHOBHblX HOCHTeReH. TI03TOMY BpeMH HapaCTaHHH BblXO~Horo CHmaRa
f3JIJ> = 490 Mr~
CBeTO~Ho~a orrpe~eRHeTCH BpeMeHeM )KH3HH HOCHTeReH rrpH crrOHTaHHOH peKOM6HHaUHH. Bce CKa3aHHoe crrpaBe~RHBo H ~RH BpeMeHH crra~a H3RyqeHHH CBeTO-
.Q
U
~Ho~a. TIPH OTKJIIOqeHHH TOKa, rro~aBaeMoro Ha CBeTO~HO~, rrOCTOHHHaH BpeMeHH YMeHbIIIeHHH ero H3JIyqeHHH TaK)Ke
orrpe~eJIHeTCH
"j:
E-
~~
:= •
BpeMeHeM )KH3-
1,0 - - - - - - . -
- - - -
----
.......--..--,
- - - - - - - - - - - - - 100% 90%
.
0,8
u'"
! !s!~
HH HOCHTeJIeH rrpH crroHTaHHoH peKoM6HHaUHH. B cJIyqae HeRerHpoBaHHoH aKTHBHOH 06JIaCTH ~RH orrHcaHHH ~HHaMH
0,6
:=
1:i ~ 0,4
KH H3MeHeHHH KOHueHTpaUHH HOCHTeJIeH BMeCTO ypaBHeHHH MOHOMOJIe-
='"' 5!il
KYRHPHOH peKoM6HHaUHH Ha~o HcrrORb30BaTb ypaBHeHHe 6HMOJIeKYJIHpHOM peKoM6HHaUHH. TIPH 3TOM Ha~o rrOMHHTb, qTO BpeMH )KH3HH HocHTeReH
~g 0,2
nepecTaeT 6blTb rrOCTOHHHOH BeJIHqHHoH. TI03TOMY B ypaBHeHHH, KaK rrpa-
::s:: § 0,0
~~
BHJIO, HCrrOJIb3yeTcH MUflUMaJlblWe BpeMH )KH3HH, T. e. TaKOe, rrpH KOTOPOM
10% 0%
o
Ha6RIO~aeTcH MaKCUMaJlbfla51 KOHueHTpaUHH HOCHTeReH. CRe~yeT OTMeTHTb, qTO cYIII.eCTBYIOT MeTO~hl CHH)KeHHH BpeMeHH crra~a
2
3
4
5
6
2
0
3
4
BpeMJI t, HC
BpeMJI t, HC
H· HapaCTaHHH BblXO~Horo CHmaRa CBeTO~Ho~a ~O ypOBHeH, MeHbIIIHX Bpe-
PHC.
MeHH )KH3HH HOCHTeJIeH rrpH crrOHTaHHOH peKOM6HHaUHH. BpeMH HapaCTa-
CKoro CHrHaJla CBeTo,n:Ho,n:OB pe30HaTopHoro THna. I1cnoJlb3yeMbIH ,n:JlH H3MepeHHH
24.2.
113MepeHHe BpeMeHH HapaCTaHHlI
(a)
H cna,n:a
(6)
Bblxo,n:Horo OIITHqe-
HHH YMeHbIIIaeTCH rrYTeM tjJ0pMupOBaflU51 UflJICeKl{UOflfl020 mOKa, a BpeMH
<jJoTo,n:eTeKTop o6J1a,n:aeT JlyqllIHMH ,n:HHaMHqeCKHMH xapaKTepHcTHKaMH no cpaB-
C rrOMOIII.bIO yaaJleflU51 If,acmu flOCUmeJleu aa npeaeJlbl aKmUBflOU
HeHHIO co CBeTo,n:Ho,n:OM, n03TOMY MO)KHO CqHTaTb, qTO npHBe,n:eHHble 3HaqeHHH
crra.ii.a -
o6Jlacmu. 06a MeTo~a 6Y~YT paccMoTpeHbl B CJIe~yIOIII.Hx pa3~eJIax.
COOTBeTCTBYIOT nOCTOHHHblM BpeMeHH CBeTo,n:Ho,n:a
D/,. 24. JI,UltaMU'leCiCUe xapaKmepucmUlCU cBemOaUOaOB
470
24.6. C/>0pMupoBanue mOKa
,LlJIH BblHCHeHHH npHqHH B03HHKHOBeHHH pa3HHUbl MeJK)J.y BpeMeHeM cna)J.a H HapacTaHHH CHrHaJIa CBeTO)J.HO)J.a 6blJIH, H3MepeHbl 3aBHCHMOCTH
471
B OCHOBHOM onpe)J.eJIHeTCH BpeMeHeM JKH3HH HOCHTeJIeH npH cnoHTaHHoH peKoM6HHaUHH.
3THX napaMeTpoB OT HanpHJKeHHH Ha .D.Ho)J.e. Bo BKJIJOqeHHOM COCTOHHHH HanpHJKeHHe CBeTO)J.HO)J.a COCTaBJIHJIO
1,4 B. .Ho
a
KaK TOJIbKO HanpHJKe-
HHe CTaHOBHJIOCb HeMHoro HHJKe HanpHJKeHHH «BKJlIOqeHHH»,
6
p-n-nepexo)J.
)J.HO)J.a nepeCTaBaJI H3JIyqaTb CBeT, t!03TOMY HanpHJKeHHJO «BbIKJIJOqeHHH» )J.HO)J.a MeHHeTCH B HeKoTopoM )J.Hana30He 3HaqeHHii. Ha pHC.
24.2
nOKa3aHbl nOJIyqeHHble 3KcnepHMeHTaJIbHble 3aBHCHMO-
CTH. TIPH nOCTOHHHOM 3HaqeHHH HanpHJKeHHH BKJllOqeHHH JKeHHe BblKJIJOqeHHH H3MeHHJIOCb B )J.Hana30He
0-1,0 B.
(1,4
B) HanpH-
3aMeTHa CHJIbHaH
3aBHCHMOCTb BpeMeHH cna)J.a OT HanpHJKeHHH, KOTopaH 06bHcHHeTcH yxo-
PHC.
)J.OM HOCHTeJIeH H3 aKTHBHOH 06JIaCTH. B OTJIHqHe OT BpeMeHH cna,iJ.a BpeMH
HHH CBeTOAHOAa:
HapacTaHHH BblXO)J.Horo CHrHaJIa CBeTO)J.HO)J.a npaKTHqeCKH He 3aBHCHT OT
K YXOAY HOCHTeJIeH H3 aKTHBHOH 06JIaCTH; BpeMH TaKoro YXOAa MOJKeT 6b1Tb OqeHb
HanpHJKeHHH.
24.4.
HJIJIIOCTpaUHH ABYX MexaHH3MOB, OTBeqalOIUHX 3a BpeMH cnaAa H3JIyqe-
a-
CHHJKeHHe HanpHJKeHHH CMeIUeHHH CBeTOAHOAa AO HYJIH BeAeT
KOPOTKHM, HaMHoro MeHbllIHM
1 HC; 6 -
npH MeHbllIeH aMnJIHTYAe ynpaBJIHIOIUerO
HanpHJKeHHH (HanpHJKeHHH MOAYJIHUHH) HOCHTeJIH OCTalOTCH B aKTHBHOH 06JIaCTH H
c--- "CraIl -=0 "Crise --
1I •
HHTeHCHBHOCTb BblXOAHoro H3JIyqeHHH CBeTOAHOAa onpeAeJIHeTCH BpeMeHeM JKH3HH
CBeroJuWA c pe30HaropoM
..
0"
HOCHTeJIeH npH cnOHTaHHOH peKoM6HHaUHH
Von = 1,4B TIPH 60JIbIIIHX nepena)J.ax HanpHJKeHHH Ha6JIJO)J.aeTcH )J.pyraH cHTya-
Q
UHH. B MOMeHT cna)J.a HanpHJKeHHH )J.O HyJIH H3-3a CHJIbHOrO 3JIeKTpHqe-
~.-.---.Q
CKoro nOJIH B 06JIaCTH npocTpaHcTBeHHoro 3apH)J.a
""-0____
p-n-nepexo)J.a
30HHaH
)J.HarpaMMa HMeeT )J.OBOJIbHO CHJIbHblH HaKJIOH, qTO npHBo)J.HT K yxo)J.y cB060)J.Hb1X HOCHTeJIeH o~
6apbepHblx CJIOeB
p-
H3
aKTHBHoH 06JIaCTH B CTOPOHY HeHTpaJIbHblX
H n-THna. BpeMH TaKoro yxo)J.a MOJKeT 6blTb HaMHoro
KOpOqe BpeMeHH JKH3HH cnOHTaHHoro H3JIyqeHHH. TI03TOMY B 3TOM cJIyqae BpeMH cna)J.a BblXO)J.Horo H3JIyqeHHH CBeTO)J.HO)J.a 6Y)J.eT onpe)J.eJIHTbCH He
o
o
0,5
1,0
BpeMeHeM JKH3HH HOCHTeJIeH npH cnOHTaHHOH peKOM6HHaUHH, a BpeMeHeM
1,5
HX yxo)J.a H3 aKTHBHOH 06JIaCTH. Ha OCHOBe 3HaqeHHH 3JIeKTpHqeCKOrO nOJIH H nO)J.BHJKHOCTH HOCHTeJIeH MOJKHO oueHHTb BpeMH yxo)J.a HOCHTeJIeH PHC.
24.3.
3aBHcHMoCTb BpeMeHH cnaAa H HapacTaHHH BblXOAHoro CHrHaJIa CBeTO-
AHOAa OT nepenaAa HanpmKeHHH. BpeMH cnaAa CHmaJIa CBeTOAHOAa CHHJKaeTCH npH YBeJIHqeHHH nepenaAa HanpHJKeHHH, qTO CBH3aHO C YXOAOM HOCHTeJIeH H3 aKTHBHOH 06JIaCTH
H3 aKTHBHOH 06JIaCTH, KOTopoe, KaK npaBHJIO, JIeJKHT B nHKoceKYH)J.HOM )J.Hana30He.
YnpalKHeHHe. OnpeaeAenue BpeMenu yxoaa nocumeAeu U3 aKmUBnou 06Aacmu. Tpe6yeTcH ~ paCCqHTaTb BpeMH YXOAa HOCHTeJIeH H3 aKTHBHOH 06JIaCTH AJIH THnHqHblX 3HaqeHHH 9JIeKTpHqeCKOrO nOJIH B 06JIaCTH npOCTpaHCTBeHHoro 3apHAa
p-n-nepeXOAa
24.5.
YXOA HOCHTeJIeii H3 aKTHBHoii 06JIaCTH
OT HanpHJKeHHH
(pHC.
24.3)
MOJKeT 6blTb
o6bHcHeHa
0,1-1
MKM.
BpeMH yxoAa HOCHTeJIeH H3 aKTHBHoH 06JIaCTH MOJKeT 6b1Tb OQeHb KOpOTKHM.
3aBHCHMOCTb HanpHJKeHHH cna)J.a OnTHqeCKOrO BblXO)J.Horo CHrHaJIa CBeTO)J.HO)J.a
H CKopOCTeH 3apHAOB npH TOJIIUHHe aKTHBHoro CJIOH
PemeHHe ,llJIH AHOAOB C THnHqHblMH napaMeTpaMH 9TO BpeMH JIeJKHT B AHana30He
1-100
nc,
QTO HaMHoro MeHbllIe BpeMeHH JKH3HH HOCHTeJIeH npH cnOHTaHHOH peKoM6HHaUHH.
YXO)J.OM
HOCHTeJIeH H3 aKTHBHOH 06JIaCTH, onpe)J.eJIHeMblM BeJIHqHHOH nepena)J.a HanpHJKeHHH. Ha pHC.
24.4
nOKa3aHbl 30HHble )J.HarpaMMbl aKTHBHOH 06JIaCTH
)J.JIH BblKJIJOqeHHOrO cBeT0.ll.Ho)J.a npH 60JIbillOM
(a)
H MaJIOM
(6)
na)J.ax HanpHJKeHHH MeJK)J.y BKJIJOqeHHblM H BblKJIJOqeHHblM COCTOHHHHMH CBeTO)J.HO)J.a. B
24.6.
nepe-
CJIyqae MaJIblX nepena)J.OB HanpHJKeHHH npaKTHqeCKH Bce
q,OPMHpOBaHHe TOKa
HaH60JIee pacnpOCTpaHeHHblM cnoco60M YMeHbIlleHHH BpeMeHH cna)J.a H HapaCTaHHH BbIXO)J.HbIX CHrHaJIOB CBeTO)J.HO)J.a HBJIHeTCH MeTO)J.
¢OPMUpO-
HOCHTeJIH, nOKa He peKOM6HHHPYJOT, OCTaJOTCH B aKTHBHOH 06JIaCTH. B pe-
BaHUJl mOTw(Lee,
3YJIbTaTe BpeMH cna)J.a HHTeHCHBHOCTH BblXO)J.Horo H3JIyqeHHH CBeTO)J.HO)J.a
npe)J.CTaBJIeHa cxeMa q,OpMHpOBaTeJIH TOKa, COCTOHlll.aH H3 KOH)J.eHcaTopa H
1975;
Zucker,
1978;
Saul et aI.,
1985).
Ha pHC.
24.5, a
472
rA.
24.
J!.UftaMUtteCKue xapaKmepucmuKu cBemOaUOaOB
24.8. rAas-auaepaMMa
pe3HCTopa, coe.nHHeHHbIX nOCJIe.nOBaTeJIbHO co CBeTo.nHo.nOM. KaK JlOKa3aHO Ha pHC.
24.5, 6,
npH BKJIlOqeHHH HJIH BbIKJIlOqeHHH CBeTo.nHo.na HaJIHqHe
473
.nJIH onTHMH3aUHH napaMeTpoB cxeMbI RC-Q:J0pMHpOBaTeJIH TOKa He06xo.nHMO npHMeHHTb 3KcnepHMeHTaJIbHble HJIH qHCJIeHHbIe MeTo.nbI.
KOH.neHcaTopa B cxeMe npHBo.nHT K nOHBJIeHHIO KopOTKoro HMnYJIbCa TOKa.
CxeMbI RC-Q:JOpMHpOBaTeJIH TOKa Tpe6ylOT YBeJIHqeHHH pa60qero Ha-
B TeqeHHe 3Toro HMnYJIbCa BO BpeMH BKJIlOqeHHH H36blTOqHbIH TOK, npo-
npH)!{eHHH, qTO CHH)!{aeT 3Q:JQ:JeKTHBHoCTb ueneH ynpaBJIeHHH.
TeKalOmHH no uenH, n03BOJIHeT YCKOPHTb npouecc .nOCTH)!{eHHH Tpe6yeMoH
ro.napH HH3KOMY nOTpe6JIeHHIO 3JIeKTpHqeCKOH MOmHOCTH CBeTo.nHo.naMH,
cTaUHoHapHoH KOHueHTpaUHH HOCHTeJIeH B aKTHBHOH 06JIaCTH. BpeMH BbI-
HCnOJIb3yeMbIMH B CHCTeMax CBH3H, 3TO CHH)!{eHHe K. n . .n. He HBJIHeTCH
xo.na CBeTo.nHo.na Ha YCTaHOBHBIllHHCH pe)!{HM B 3TOM CJIyqae 6y.neT MeHbille
cymecTBeHHbIM.
Ho 6JIa-
BpeMeHH )!{H3HH HOCHTeJIeH npH cnOHTaHHOH peKoM6HHaUHH. Bo BpeMH OTKJIlOqeHHH HanpH)!{eHHH Ha CBeTo.nHo.ne
(V = 0)
KOH.neHcaTop CMemaeT
.nHO.n B 06paTHoM HanpaBJIeHHH, TeM caMbIM nOMoraH HOCHTeJIHM nOKHHYTb aKTHBHYIO 06JIaCTb. BeJIHqHHa HMnYJIbCa TOKa onpe.neJIHeTCH BHYTpeHHHM qacToTa CBeTo.nHo.na no ypOBHIO
conpOTHBJIeHHeM HCTOqHHKa HanpH)!{eHHH, conpOTHBJIeHHeM H eMKOCTblO Q:JOpMHpOBaTeJIH TOKa, a TaK)!{e nOCJIe.nOBaTeJIbHbIM conpOTHBJIeHHeM CBe-
3
.no MO)!{eT 6bITb onpe.neJIeHa no qa-
CTOTe, Ha KOTOPOH CHrHaJi .neTeKTopa CTaHOBHTCH paBHbIM nOJIOBHHe CBoero 3HaqeHHH, H3MepeHHoro Ha HH3KHX qaCTOTax. TIpH npOBe.neHHH H3MepeHHH
To.nHo.na.
He06xo.nHMO npHHHMaTb BO BHHMaH'He qaCTOTHbIe xapaKTepHCTHKH .neTeKTopa. ,n:JIH CBeTo.nHo.na, BpeMeHHbIe xapaKTepHcTHKH KOToporo nOKa3aHbI Ha pHC.
24.2,
H3MepeHHaH qaCTOTa no ypOBHIO
3
Mru. CpaBHeHHe 3HaqeHHH qaCTOTbl no ypOBHIO
.no COCTaBHJIa OKOJIO
3
500
.no, xapaKTepHbIX .nJIH
CBeTo.nHo.nOB pa3Horo THna, n03BOJIHJIO c.neJIaTb BbIBO.n, qTO HaH60JIbillHe 4aCTOTbI no ypOBHIO
3
.no COOTBeTCTBYIOT .nHo.naM C HaHMeHbIiIHMH napa-
3HTHbIMH conpOTHBJIeHHHMH H eMKOCTHMH. ,n:JIH 3Toro y CBeTo.nHo.nOB KOHTaKTbI p-THna .nOJI)!{HbI 6bITb He60JIbIllHMH;,
6
'v- co cxeMOH RC-tPopMHpoBaTeJlJ! TOKa
i. ,
t: ("",
PHC.
24.5.
Ha CTopOHe p-THna )!{eJIaTeJIbHO CQ:J0pMHpoBaTb TOJICTbIH .nH3JIeKTpHqe-
6e3 cxeMhl RCtPopMHpOBaTeJlJ! -:OKa
CKHH CJIOH (HanpHMep Si02); KOHTaKTHaH nJIOma.nKa Ha CTopOHe p-THna TaK)!{e .nOJI)!{Ha 6bITb He60JIb-
t
IllOH; 6apbepHYlO eMKOCTb p-n-nepexo.na npH HYJIeBOM CMemeHHH CJIe.nyeT
CxeMa RC-
MeHH HapaCTaHHH H3JIYQeHHH CBeTo.n.Ho.n.a
(a).
OrpaHHqHBaTb npH nOMOmH Me3acTpYKTYP, H3rOTOBJIeHHbIX MeTo.nOM
I1MrrYJIbC TOKa Qepe3 CBeTo.n.HO.n.
TpaBJIeHHH.
C MaJIOH eMKOCTblO (crrJIOIIIHaH JIHHHH) H HJIJIIOCTpaUHH BJIHHHHH
(6)
24.8. fJIa3-)l.HarpaMMa
KpHTepHH BbI60pa napaMeTpoB cxeMbI Q:JOpMHpOBaTeJIH TOKa: nOCTOHHHaH BpeMeHH RC-Q:JOpMHpOBaTeJIH TOKa .nOJI)!{Ha 6bITb paBHa
TJW3-auacpaMMa
BpeMeHH )!{H3HH HOCHTeJIeH npH cnOHTaHHOH peKOM6HHaUHH; HaqaJIbHbIH TOK HMnYJIbCa HanpH)!{eHHH .nOJI)!{eH 6bITb B .nBa pa3a BbIIlle CBoero YCTaHOBHBillerOCH 3HaqeHHH. ,n:JIH BbIllOJIHeHHH 3THX YCJIOBHH BeJIHqHHa pe3HCTopa
BbI6HpaeTCH
paBHOH .nHQ:JQ:JepeHUHaJIbHOMY conpOTHBJIeHHIO .nHo.na, a eMKOCTb cxeMbI 3a.naeTCH TaKOH, qT06bI nOCTOHHHaH BpeMeHH BceH uenH
RC
COBna.naJia
C BpeMeHeM HapacTaHHH OnTHqeCKOrO CHrHaJia CBeTo.nHo.na (Schubert et aI.,
1996).
CHrHaJI, CQ:JOpMHpoBaHHbIH npH nOMOIIUi reHepaTopa CJIyqaHHbIX qHCeJI. Ha pHC.
R
npH BblnOJIHeHHH 3TH X YCJIOBHH y.naeTCH .n06HTbCH paCIllHpeHHH
qaCTOTHoro .nHlma30Ha CBeTo.nHo.na. CJIe.nyeT OTMeTHTb, qTO nOCJIe.nOBaTeJIbHOe conpOTHBJIeHHe .nHo.na CHJIb-
n03BOJIHeT oueHHTb 3Q:JQ:JeKTHBHoCTb pa60TbI CHCTeMbI
OllTHqeCKOH CBH3H. :::ha .nHarpaMMa npe.ncTaBJiHeT H3MepeHHbIH .neTeKTopOM
24.6
nOKa3aHa rJIa3-.nHarpaMMa CBeTo.nHo.na, nepe.nalOmero CHrHaJi co
CKOPOCTblO
622
M6HT/c.TaKaH CKOPOCTb nepe.naqH CHrHaJIOB HCnOJIb3yeTcH
B IllHPOKO pacnpocTpaHeHHoM CTaH.napTe .nJIH CHHXPOHHOH OnmqeCKOH cem (SONET). TIoKa3aHbI TaK)!{e TpH ypOBHH TOKa, COOTBeTCTBYlOmHe COCTOH-
0 (10 ), 1 (II) H mOKY npUHRmUR peLUeHUR (1D), T. e. rpaHHUbI 30H, B KOTOPbIX ilpHeMHHK BocnpHHHMaeT CHrHaJi KaK 0 H KaK 1. TIpe.ncTaBJIeH-
HHHM
HaH .nHarpaMMa HBJIHeTCH OTKPbITOH, T. e . .naHHaH CHCTeMa 06eCneqHBaeT nepe.naqy .naHHblX C HH3KOH qaCTOTOH nOHBJIeHHH OIllH60K. Hanp5,l)!{eHHH
HO 3aBHCHT OT HanpH)!{eHHH, n03TOMYTeopHH JIHHeHHbIx ueneHn03BOJIHeT
BKJIlOqeHHH H BbIKJIlOqeHHH CBeTo.nHo.na COOTBeTCTBeHHO paBHbl
'JiHillb oueHHTb ero BeJIHqHHY,a He nOJIyqHTb TOqHOe 3HaqeHHe. TI03TOMY
1,1
1,4 B
B. CxeMa RC-Q:JOpMHpOBaTeJIH TOKa COCTOHT H3 conpOTHBJIeHHH
20
H
OM
Fit. 24. p,uHaMU'lecKue xapaKmepucmUKU cBemOaUOaOB
474
24.9.. BpeMR. 3/CU3HU HocumeAeu U 'lacmoma no YPOBftlO 3 aB
8,0
475
TaK)Ke COKpa~aIDT BpeMH )KH3HH HeOCHOBHbIX HOCHTeJIeH H qaCTO, HO He Bcer~a, Be~YT
7,0
K YMeHbIlleHHID KBaHTOBoro
BbIxo~a
H3JIyqeHHH
~Ho~a.
npOaHaJIH3HPyeM BJIHHHHe CHH)KeHHH BpeMeHH )KH3HH HeOCHOBHbIX HOCHTeJIeH Ha HHTeHCHBHOCTb H3JIYQeHHH H 3HaqeHHe qaCTOTbI no ypOBHID
~ 6,0
3
~B. B COOTBeTCTBHH C ypaBHeHHeM
(24.8)
qaCTOTa no ypOBHID
3
~B
::0 50 ....... ,
CBH3aHa C BpeMeHeM )KH3HH HOCHTeJIeH npH H3JIyqaTeJIbHOH peKoM6HHaU:HH
'" 4,0 8' ~
COOTHOllIeHHeM
~
~
f3~B = (3)'/2 / (27[" . 'T), r~e 'T-' = 'T;'
+ 'T;;'.
BHYTpeH-
HHH KBaHTOBbIH BbIXO~ H3JIyqeHHH CBeTO~Ho~a onpe~eJIHeTCH BbIpa)KeHHeM
'fJint =
3,0
'Tnr/ ('Tr
+ 'Tnr).
B CJIyqae MaJIOrO BpeMeHH )KH3HH HOCHTeJIeH npH
6e3bI3JIyqaTeJIbHOH peKoM6HHaU:HH
:.::
f3~B <X
'T;;-r';
'fJint <X
'Tnr . OTcID~a BH~HO,
qTO, XOTH BBe~eHHe rJIy60KHx npHMeCHbIX u:eHTPOB n03BOJIHeT paCllIHpHTb
~ 2,0
nOJIOcy pa60qHX qaCTOT CBeTO~Ho~a, npOH3Be~eHHe MO~HOCTH Ha nOJIOcy nponYCKaHHH YCTpoHcTBa npH 3TOM He H3MeHHeTCH B JIyqllIYID CTOPOHY.
1,0
24.7 nOKa3aHO, KaK CBH3aHbI Me)K~y C060H qaCTOTa no ypOBHID 3 ~B, BbIXO~HaH MO~HOCTb H BpeMH )KH3HH HOCHTeJIeH npH H3JIyqaTeJIbHOH H Ha pHC.
0,0
L..i.J...l.J.J...l.J.J...l.J.J...l.J.J...l.J.J...l.J.J...l.J.J...l.J.J...l.J.J...l.J.J.J....U..J....U..J....U..J....U..J....U..J....U..I...-.....I
0,0
0,4
0,8
1,2
1,6
6e3bI3JIyqaTeJIbHOH peKoM6HHaU:HH • .lI.JIH BblqHCJIeHHH qaCTOTbI no ypOBHID
2,0
3
BpeMJI t, He PHC. 24.6. fJla3-.lI.HarpaMMa npHHHToro OnTHqeCKOrO CHrHaJla CBeTO.ll.HO.ll.a C pe30HaTOpOM. OnTHqeCKHH CHrHaJl onpe.ll.eJlHJlCH qepe3
100
n
~OpMHpOBaTeJIH TOKa n03BOJIHIDT CHCTeMe nepe~aBaTb ~aHHbIe co CKOpOCTbID
~B H 3HaqeHHH MO~HOCTH HCnOJIb30BaJIH ypaBHeHHH, npHBe~eHHble BbI-
Ille. npe~nOJIaraeTCH, qTO Ha rpa~HKe, nOCTpoeHHOM B JIOrapH~MHqeCKOM
1 [6HT/C.
npH YBeJIHqeHHH CKOPOCTH nepe~aqH ~aHHbIX ~HarpaMMa 3aKpbIBaeTcH, T. e. CHCTeMa nepecTaeT ~ocToBepHo pa3JIHqaTb ypOBHH
0
H
q-ro Be~eT
1,
K YBeJIHqeHHID qaCTOTbI nOHBJIeHHH OllIH6oK.
3 ~B 1994).
MacIllTa6e, Ha qaCTOTax 60JIbnie qaCTOTbI noypoBHID JIHHeHHOe CHH)KeHHe OITTHqeCKOH MO~HOCTH (Wood,
2
~
~ Q.;'
0,5
t;!
t;
~'tnr f--
:>::
'" ~ ...==
BpeMJIlKH3HH HOCHTeJIeH npH 6e3b1:myqareJThHOH ~ 300 HC
peKOM6HH~
0,2 0,1
I
'tnr
10Hc
IIIII
H:myqaTeJThHOe BpeMJIlKH3HH ~ HOCHTeneH 10 HC
'tr
~h.zU;
'tnrl= ~!J II
npOHCXO~HT
h.zU; ~
~ l'tnrl-llJ II
h~ ~
0
:>::
g 0,05 ~
h.zU;
gj
24.9.
~:a
BpeMB lKH3HH HOCHTeJIeii HqaCTOTa no ypOBHIO
3 AB
I\..
0,02
"\
tIl
0,01 YMeHbllIeHHe BpeMeHH )KH3HH HeOCHOBHbIX HOCHTeJIeH 3a CqeT CHJIbHOro JIerHpOBaHHH aKTHBHoH 06JIaCTH HJIH u:eHTPOB npHBO~HT
K
YBeJIHqeHHID
BBe~eHHH
MO~YJIHU:HH
~eKT. C O~HOH CTOPOHbI, HaJIHqHe 3THX u:eHTPOB BbI3bIBaeT COKpa~eHHe BpeMeHH )KH3HH HeOCHOBHbIX HOCHTeJIeji, TeM caMbIM nOBbIlliaH qaCTOTY
3
2.
5
10
20
50
100
200
500
1000
'"
3000
rJIy60KHx npHMeCHbIX
MaKCHMaJIbHOHqaCTOTbI
CBeTO~Ho~a. BBe~eHHe rJIy60KHx npHMeCHbIX u:eHTPOB HMeeT ~BOHHOH 3~
no ypOBHID
1
PHc.24.7. 3aBHcHMoCTH paCQeTHbIX 3HaQeHHH BblXO.ll.HOH MOlIl.HOCTH CBeTO.ll.HO.ll.a OT QaCTOTbI MO.ll.YJlHUHH, nocTpoeHHble npH pa3Hblx 3HaQeHHHX BpeMeHH :1KH3HH HOCHTeJleH npH 6e3bI3J1YQaTeJlbHoH peKoM6HHaU:HH. l-iaJlYQaTeJlbHoe BpeMH :1KH3HH npHHHTo paBHbIM 10 HC
~B. O~HaKo, C ~pyroH CTOPOHbI, OHO Be~eT K CHH)KeHHID
HHTeHCHBHOCTH H3JIyqeHHH H YBeJIHqeHHID HarpeBa CTPYKTYPbI
CBeTO~HO
~a. BbICOKHe KOHu:eHTpaU:HH JIerHpYID~HX npHMeceH B aKTHBHOH 06JIaCTH
Cnoco6bI
CHH)KeHHH
BpeMeHH
)KH3HH
HeOCHOBHbIX
HOCHTeJIeH
6e3
YMeHbllIeHHH KBaHTOBoro BbIxo~a H3JIyqeHHH CBeTO~HO~OB e~e He HaH-
476
Dl. 24. }1;UI,"-aMUtleClCue xapalCmepucmulCu cBemoauoaoB
,n:eHhI. ECJIlf 9TO y,n:acTC51 c,n:eJIaTh, 6y,n:eT ,n:OCTHrHyT peaJIhHhIH nporpecc B YBeJIHqeHHH 6hlcTpo,n:eHcTBH51 CBeTo,n:Ho,n:OB (Chen et aI., Ilpe,n:JImKeH (Chen et aI.,
1999)
1999).
MeTO,n: YMeHhIIIeHH51 BpeMeHH )KH3-
HH HeOCHOBHhIX HOCHTeJIeH 6e3 cymecTBeHHoro yxy,n:IIIeHH51 BHYTpeHHero KBaHTOBoro Bblxo,n:a H3JIyqeHH51 CBeTo,n:Ho,n:OB -
llpHJIOlKeHHB
CHJIhHOe JIerHpOBaHHe 6e-
N A = ~-7).. 10 19 CM- 3 • .lI.JI51 npOBepKH 6hIJI H3rOTOBJIeH CBeTo,n:HO,n: C N A = 2 . 10 1 CM- 3 . LJ:acToTa OTCeQKH TaKoro ,n:Ho,n:a OKa3aJIaCh paBHoH 440 Mfu. npH BHYTpeHHeM KBaHTOBOM BhIxo,n:e H3JIYQeHH51 25-30 %. IlpH ypOBHe JIerHpOBaHH51 N A = 7 . 10 19 CM- 3 QaCTOTa OTCeQKH CTaJIa paBHa 1,7 ffu., a BHYTpeHHHH KBaHTOBhIH BhIXO,n: 10%. pHJIJIHeM aKTHBHOH 06JIaCTH GaAs
I I
I
BH6JIHOrpacpH'lJeCKHH cnHCOK
CHMBOJI
Chen C. H., Hargis M., Woodall J. M., Melloch M. R., Reynolds J. S., Yablonovitch E., and Wang W. "GHz bandwidth GaAs light-emitting diodes" Appl. Phys. Lett. 74, 3140 (1999). Ikeda K., Horiuchi S., Tat:Jaka T., and Susaki W. "Design parameters of frequency response of GaAs-AlGaAs DH LEDs for optical communications" IEEE Trans. Electron Dev. ED-24, 1001 (1977). Lee T. P. "Effect of junction capacitance on the rise time of LEDs and on the turn-on delay of injection lasers" Bell Syst. Tech. !. 54, 53 (1975). Saul R. H., Lee T. P., and Burrus C. A. "Light-emitting-diode device design" in Lightwave Communications Technology edited by W. T. Tsang, Semiconductor and Semimetals, 22 Part C (Academic Press, San Diego, 1985). Schubert E. F., Hunt N. E. J., Malik R. J., Micovic M., and Miller D.L. "Temperature and modulation characteristics of resonant-cavity light-emitting diodes" IEEE!. Lightwave Technol. 14, 1721 (l996). Wood D. Optoelectronic Semiconductor Devices p. 98 (Prentice Hall, New York, 1994). Zucker J. "Closed-form calculation of the transient behavior of (AlGa)As douj:Jle heterojunction LEDs"!. Appl. Phys. 49, 2543 (l978).
ao aB
A A a ag
CHCTeMa
E,n:HHHII.b1, '1aCTO
Cli
HCnOJlb3yeMbie
nOCTOllHHali pellIeTKH
M
HM
Pa,n:HYc Bopa
M
HM
M2
CM 2
06bllCHeHHe
nJlOlll.a,n:b K03
c- l
c- l
A
K03
M- l
CM- l '
K03
M- l
CM- l
M- l
CM- l
M- l
CM- l
HOH lIIHpHHe 3anpelll.eHHOH 30HbI
afe
K03(p
ao B
K03
hv
= 2Eg
M3/c
CM3 / c
M3 (J1.)I{' c 2 )
M3 (J1.)I{·c2 )
M/c
M/c
K03
B
I
I
B
K03
C
CKOPOCTb CBeTa B BaKYYMe
C
EMKOCTb
cI>
cI>
3aBHCHMOCTb eMKOCTH OT Hanpll)l{eHHlI
-
-
c-v d
TOJllll.HHa CJlOli
D
K03
V
J1.H3J1eKTpH'IeCKOe CMelll.eHHe
D n , Dp t.n, t.p t.Ee, t.Ev
M
M
M2/c
MKM
KJI/M
2
KJI/CM
2
K03
2 M /C
2 CM /C
li3MeHeHHe KOHlI.eHTpall.HH 3J1eKTpOHOB/,n:b1POK
M- 3
CM- 3
CKa'lOK B 30He npOBo,n:HMOCTH/B BaJleHTHOH 30He
J1.)I{
3B
e
3J1eMeHTapHbI'H 3apll,n:
KJI
KJI
£
Hanpll)l{eHHOCTb 3J1eKTpH'IeCKOrO nOJili
B/M
B/CM
E
3HeprHlI
J1.)I{
3B
Ee
3HeprHlI Kpall 30HbI npOBo,n:HMOCTH
J1.)I{
3B
EF
3HeprHlI cI>epMH
J1.)I{
3B
EFi
3HeprHlI cI>epMH co6CTBeHHoro nOJlynpOBo,n:HHKa
J1.)I{
3B
EFn
KBa3H-3HeprHlI cI>epMH B 06J1aCTH n-THna
J1.)I{
3B
EFp
KBa3H-3HeprHlI cI>epMH B 06J1aCTH p-THna
J1.)I{
3B
478
lfacmo UcnoAb3yeMbte 0603fta'leftUR
CHMBOJI
Eg E Ryd
ET Ev Eo
e
= er' eo
06bllCHeHHe
CHCTeMa Cli
E.D:HHHUbi. '1aCTO HCnOJIb3yeMbie
IIIHpHHa 3anpemeHHoH 30HbI nOJIynpOBO.D:HHKa
,l{}K
3B
3HeprHlI PH.D:6epra
,l{}K
3B
3HeprHlI JIOBYWKH HJIH rJIy60Koro npHMecHoro ypOBHlI
,l{}K
,l{}K
3HeprHlI Kpall BaJIeHTHOH 30HbI HaHMeHbwali 3HeprHlI KBaHTOBOH lIMbi
,l{}K
CHMBOJI A ABragg
3B
m me m*
3B 3B
A· c/(B· M)
A·c/(B·M)
m:,m h
eo
A6coJIIOTHali .D:H3JIeKTpH'IeCKali npoHliuaeMocTb 'A· c/(B· M)
er
OTHOCHTeJIbHali MOCTb
"'I
,l{H3JIeKTpH'IeCKali npOHHuaeMOCTb
.D:H3JIeKTpH'IeCKali
npOHHuae-
K.n ..D:. (3qHpeKTHBHoCTb)
"'lint
BHYTpeHHHH KBaHTOBblH BblXO.D:
"'Iext
BHeWHHH KBaHTOBblH BbIXO.D:
"'Iextract
K03q,q,HUHeHT OnTH'IeCKOrO BblXO.D:a
"'Ipower
3q,q,eKTHBHOCTb no MOmHOCTH
B·c/(A·M)
B· c/(A· M)
rpa.D: JIM
rpa.n:
rpa.D:
rpa.D:
rpa.D:
PaBHOBeCHali CKOPOCTb reHepaUHH
h
nOCTOllHHali nJIaHKa
,l{}K' C
3B·c
1i
nOCTOllHHali nJIaHKa • .D:eJIeHHali Ha 211"
,l{}K' C
3B·c
,l{}K
3B
BT/M 2
BT/M2
/c CM- 3 / c CM- 3
TOK
A
A
Is I-V
TOK HaCblmeHHlI
A
A
J
nJIOTHOCTb TOKa nJIOTHOCTb TOKa HaCblmeHHlI
A/CM
A/M2
2
A/CM 2
3B/K
,l{JIHHa
M
M
,l{JIHHa pe30HaTopa
M
,l{Hq,q,Y3HOHHali .D:JIHHa 3JIeKTpOHa/.D:blpKH 3aBHCHMOCTb MOmHOCTH BblXO.D:HOrO H3JIY'leHHlI OT TOKa
M
-
MKM MKM
-
-
-
CJIa60 JIerHpOBaHHblH MaTepHaJI n-THna
-
-
CHJIbHO JIerHpOBaHHblH MaTepHaJI n-THna
-
-
M- 3
CM- 3
,l{ByxMepHali KOHueHTpaUHlI 3JIeKTpOHOB
M- 3
CM- 3
no
PaBHoBecHali KOHueHTpaUHlI 3JIeKTpOHOB
M- 3
CM- 3
np ri ris rigs
NA.ND Nc NT Nv
CM- 1
nOCTollHHali BOJIbUMaHa
M 2 /(B·c)
K03q,q,HUHeHT H.D:eaJIbHOrO .D:HO.D:a KOHueHTpaUHlI 3JIeKTpOHOB B MaTepHaJIe p-THna
M- 3
CM- 3
nOKa3aTeJIb npeJIOMJIeHHlI
-
nOKa3aTeJIb npeJIOMJIeHHlI B03.D:yxa
-
-
nOKa3aTeJIb npeJIOMJIeHHlI nOJIynpOBO.D:HHKa
-
-
rpynnoBoH K03q,q,HUHeHT
-
-
-
K03q,q,HUHeHT aKuemopOB/.D:OHOPOB
M- 3
CM- 3
3q,q,eKTHBHali nJIOTHOCTb COCTOllHHH Ha KpalO
M- 3
CM- 3
M- 3
CM- 3
M- 3
CM- 3
rU
KOHueHTpaUHlI JIOByweK HJIH rJIy60KHx npHMecHbIX UeHTPOB
M- 1
BOJIHOBOe '1HCJIO (211"A)
k L
nOJIynpOBO.D:HHK n-THna
-
M2 /(B·c)
30HbI npOBO.D:HMOCTH
,l{}K/K
k
Lcav Ln. Lp L-I
A/M2
nO.D:BH}KHOCTb 3JIeKTpoHoB/.D:blPOK
-
KOHueHTpaUHlI 3JIeKTpOHoB
nair M- 3
OTHOCHTeJIbHali MarHHTHali nOCTOllHHali
n n 2D nideal
JIM
/c M- 3 /c
Js
Kr
A6coJIIOTHali MarHHTHali nOCTOllHHali
JLo
rpa.n:
BOJIbTaMnepHali xapaKTepHcTHKa
Kr
JLr JLn. JLp n nn+
YrOJI
I
Kr
3q,q,eKTHBHali Macca 3JIeKTpoHa/.D:blpKH
% % % % %
il>
liHTeHcHBHoCTb H3JIY'leHHlI
Kr
% % % % %
B
I
Kr
3q,q,eKTHBHali Macca
Kr
B
3HeprHlI q,oToHa
Kr
B· c/(A 'M)
3JIeKTpOCTaTH'IeCKHH nOTeHUHaJI
hv
Kr
Macca cB060.D:HOrO 3JIeKTpOHa
Kr
il>
Go
Kr
B·c/(A·M)
-
CKOPOCTb reHepaUHH
HM
Macca
3q,q,eKTHBHali Macca JIerKoH/TlI}KeJIOH .D:b1pKH
ru
G
HM
MarHHTHali npoHHuaeMocTb
-
KpHTH'IeCKHH yrOJI nOJIHOrO BHYTpeHHero OTpa}KeHHlI
M M
JL= JLr 'JLo
ru
!Pc
,l{JIHHa BOJIHbI ,l{JIHHa OTpa}KeHHOH BOJIHbI Bp3rra
mih·mhh
K03q,q,HUHeHT 3epKaJIbHOCTH pe30HaTopa
YrOJI
E.D:HHHUbi. '1aCTO HCnOJIb3yeMbie
-
lJacToTa
!P
CHCTeMa Cli
A· c/(B· M)
f
CBeTOBOH nOTOK
06bllCHeHHe
-
F
il>lum
479
lfacmo ucnoAb3yeMbte 0603fta'leftUR
v
3q,q,eKTHBHali nJIOTHOCTb COCTOllHHH Ha KpalO BaJIeHTHOH 30HbI lJacToTa OnTH'IeCKOrO H3JIY'leHHlI
rU
P Pp+
nOJIynpOBO.D:HHK p-THna
-
-
CJIa60 JIerHpOBaHHblH MaTepHaJI p-THna
-
-
CHJIbHO JIerHpOBaHHbIH MaTepHaJI p-THna
-
-
P P p2D
MOMeHT
Kr'M/c
Kr'M/c
KOHueHTpaUHlI .D:blPOK
M- 3
CM- 3
,l{BYMepHali KOHueHTpaUHlI .D:blPOK
M- 2
CM- 2
Po
PaBHoBecHali KOHueHTpaUHlI .D:blPOK
M- 3
CM- 3
Pn
KOHueHTpaUHlI .D:blPOK B MaTepHaJIe n-THna
M- 3
CM- 3
480
lfacmo Ucnollb3yeMbte 0603ltatteltUR
CHMBOJI 06'bIlCHeHHe
P P(A) Q Q r
II
CHCTeMa
E.n:HHH~b1, 'IaCTO
CM
HCnOJIb3yeMble
Morn;HOCTb
llo llexcess
p p
,l106POTHOCTb pe30HaTopa
X
K03
X
Koop.n:HHaTa KpacHoro
K03
y
y y
OTpa>KeHHII OUTH'IeCKOii MOrn;HO-
COnpOTHBJIeHHe
OM
OM
/c /c CM- 3 /c
CKOPOCTb peKoM6HHa~HH
M- 3 /C
CM- 3
PaBHoBecHall CKOPOCTb peKoM6HHa~HH
M- 3
/c M- 3 /c
CM- 3
CKOPOCTb peKoM6HHa~HH H36bITO'lHblX HOCHTeJIeii ITJIOTHOCTb 3apll.n:oB
KJI/M 3
KJI/CM 3
Y.n:eJIbHOe conpOTHBJIeHHe
OM'M
OM'CM
Y.n:eJIbHOe conpOTHBJIeHHe KOHTaKTa
OM'M2
TpexMepHall nJIOTHOCTb COCTOIlHHII
M- 31,ll>K
,llByxMepHall nJIOTHOCTb COCTOIlHHII
OM'CM2 CM- 3/
-
-
-
Koop.n:HHaTa 3eJIeHOrO ~BeTa
-
-
Z
-
-
Z
Koop.n:HHaTa rOJIy6oro ~BeTa
-
-
DpHMe'laHHe.
He npHBe.n:eHbl 0603Ha'leHHII, HCnOJIb3yeMble TOJIbKO B pa3.n:eJIax, r.n:e OHH
onpe.n:eJIeHbI
Cl»H3HllecKHe nOCTOBHHbIe 0,5292
aB
A
aB =0,5292.10- 10 M
Pa.n:HYc Bopa
3JIeMeHTapHblii 3apll.n:
c
2,9979· 108 M/C
CKOPOCTb CBeTa B BaKYYMe
E Ryd
13,6063B
3HepfHlI PH.n:6epra
9
9,8067 M/C2
YCKopeHHe cBo6o.n:Horo na.n:eHHII Ha ypoBHe MOpll
G
6,6873.10- 11 M3 /(Kr. c2)
rpaBHTa~HoHHall
h
6,6261.10- 34 ,ll>K' C
ITocTollHHall ITJIaHKa
h = 4,1356.10- 15 3B· C
n
1,0546.10-34 ,ll>K' C
ITocTollHHall ITJIaHKa, .n:eJIeHHall Ha 27l"
n=6,5821·10- 16 3B· C
k
1,3807· 10 - 23 ,ll>K/K
K03
k=8,6175· 10-5 3B/K
/l{)
1,2566· 10-6 B c(A· M)
me
9,1094.10- 31 Kr
A6coJIIOTHall MarHHTHall nOCTOIlHHall Macca cBo6o.n:Horo 3JIeKTpOHa
NAvo
6,0221.102 3 MOJIb- 1
qHCJIO ABara.n:po
8,3145· 1023 ,ll>K' K-1x X MOJIb- 1
ITocToIlHHliIlH.n:eaJIbHOrO ra3a
K
K HJIH °C
nepe.n:a'lH OUTH'IeCKOrO MOrn;HO-
CTH T
PeKoM6HHa~HoHHoe
BpeMII >KH3HH
C
C
Tcav
PeKoM6HHa~HoHHoe
BpeMII >KH3HH B pe30HaTOpe
C
C
Tn, Tp
PeKOM61IHa~HOHHOe
C
C
HOB/.n:b1POK YHHBepCaJIbHble KOOp.n:HHaTbI ~BeTHOCTH MKO, onpe.n:eJIeHHble B 1960, 1976 rr. CKOPOCTb
M/C
M/C
.fpynnoBall CKOPOCTb
M/C
M/C
Vph
M/C
M/C
v,
YHHBepCaJIbHble Koop.n:HHaTbl ~BeTHOCTH MKO, onpe.n:eJIeHHble B 1960, 1976 rr.
ll= = kNAv~
Hanpll>KeHHe
B
B
,llH
B
Hanpll>KeHHe Ha nepexo.n:e
B B
IToporoBoe Hanpll>KeHHe
B
B
B
8,8542· 10- 12 A· c/(B· M) A6coJIIOTHall .n:H3JIeKTpH'IeCKall nOCTOIlHHall
F=G.M.mlr 2
nOCTOIlHHall
o.
npOHU~aeMOCmb
MaTepHaJIa onpe.n:eJIlIeTCII KaK .n:H3JIeKTpH'IeCKHe nOCTOIlHHble. MaZHUmHaJ/, npOHU~aeMOCmb MaTepHaJIa onpe.n:eJIlIeTCII KaK JL=JLr'/l{), r.n:e JLr H /l{) - omHOCUmeltbHaJ/, H a6COltlOmHaR MarHHTHble nOCTOIlHHble. DpHMe'laHHe.
J!U3lteKmpUIleCKaR
c = cr . co' r.n:e cr H co -
OmHOCUmeltbHaJ/,
II
a6COltlOmHaJ/,
DOJIe3Hble COOTHOmeHHJI.
'IeJIOBe'leCKOrO
1 3B = 1,6022· 10- 19 KJI' B = 1,6022.10- 19 ,ll>K; kT = 25,86 M3B (npH T = 300 K).
rJIa3a lliHpHHa
-
(OM 'CM)-I
TeMnepaTypa
W
Koop.n:HHaTa ~BeTHOCTH
(OM'M)-I
T
'IYBCTBHTeJIbHOCTH
-
1,6022· 10- 19 KJI
C
-
e
MKM
Vi
-
~BeTa
CM/C
C
Vgr
-
M/C
M
3JIeKTpO-
-
BblpaBHHBaHHII KpacHoro ~BeTa
co
TOJIrn;HHa CJIOIl
BpeMII >KH3HH
-
M- 21,ll>K
BpeMII
K03
~BeTHOCTH
3B CM- 2 /3B
t
V
MKM
Koop.n:HHaTa
t
U'
MKM
M
X
Y.n:eJIbHall 3JIeKTpOnpoBo.n:HOCTb
u,
M
KJI
IToBepxHocTHall CKOPOCTb peKoM6HHa~HH
T
lliHpHHa 3anHpaIOrn;ero CJIOIl lliHpHHa .n:BoiiHOii reTepocTpYKTYPbl
WD WDH
CTH
II II
'IaCTO HCnOJIb3yeMble
BT
3JIeKTpH'IecKHii 3apll.n:
E.n:HHH~b1,
CM
CHcTeMa
CHMBOJI 06bllcHeHHe
BT/HM
CneKTpaJIbHall nJIOTHOCTb Morn;HOCTH
481
lfacmo Ucnollb3yeMbte 0603ltatteltUR
M
M
""~
C6oiicm6a nOJlynpo6ooHUK06 - apceHuoo6 III zpynnb' npu KOMHamHoii meMnepamype 0603Ha'leHUe
BeJlU'IUHa CrpYKTYPa KpHCTaJJJIa fIpJlMoooHHblii (D)/HeupJIMoooHHblii (I)
ao Eg
fIOCTOJlHHlIJI peWeTKH lIIHpHHa 3arrpeIl.\eHHOH 30HbI
KOH~eHTpaIIHJI co6cTBeHHbIX HOCHTeneH 3apJI.ZIOB
ni
Nc Nv
3<jJ<jJeKTHBHlIJI fIe Ha KpaIO 3fI 3<jJ<jJeKTHBHlIJI fIe Ha KpaIO B3 fIO.rlBIDKHOCTb 3neKTpOHOB
/In
fIO.rlBIDKHOCTh ,!(bIPOK
IIp
K03<jJ<jJH~HeHT .rIH<jJ<jJY3HH 3neKTpoHoB
Do Dp X
K03<jJ<jJH~HeHT .rIH<jJ<jJY3HH .rIbIpOK 3neKTpOHHoe CPO.rlCTBO
't
Bpewr lKH3HH HeOCHOBHbIX HOCHTeneH
me* mhh* Er
3<jJ<jJeKTHBHlIJI Macca 3neKTpOHa 3<jJ<jJeKTHBHlIJI Macca TJllKenOH .rIbIpKH OTHOCHTenbHaJi .rIH3neKTpHQeCKlIJI rrOCTOJlHHlIJI fIOKa3aTenb rrpenOMneHHJI
n
K03<jJ<jJH~HeHT rrOrnOIl.\eHHJI B6nH3H Eg
IX
D -
anMa3.
Z-
ccj>anepHT.
W-
AlAs
GaAs
Z I 5,6611 2,168 10 1,5.10 19 1,7.10 19 200 100 5,2 2,6 3,50 10-7 0,146 me 0,76 me 10,1 3,2 103
Z D 5,6533 1,42 2.10 6 4,4.10 17 7,7 . lOIS 8500 400 220 10 4,07 lO-S 0,067 me 0,45 me 13,1 3,4 104
EOUHu~a
lnAs
Z D 6,0584 0,354 7,8.10 14 8,3.10 16 6,4. lOIS 33000 450 858 12 4,9 lO-S 0,022 me 0,40 me 15,1 3,5 104
A 3B CM-3 CM-3 CM-3 2
/B 2 CM /B CM
i§
~
C
o
C CM2/C
!::
CM2/C
~
B C
g
~ ~
1<:
o
f
I:l
CM- I
.0:
~
~
BIOp~. fIe - rrnOTHOCTb COCTOJlHHH. 3fI - 30Ha rrpOBO.rlHMOCTH. B3 - BaneHTHlIJI 30Ha.
K03<jJ<jJH~HeHT .rIH<jJ<jJY3HH H rrO.rlBHlKHOCTh HOCHTeneH 3apg.rlOB B HeBbIpOlK.rleHHOM rronynpoBO.rIHHKe CBg3aHbI COOTHOWeHHeM 3HHWTeHHa:
D = ll(kT/e).
,l(H<jJ<jJY3HoHHbIe .z:IHHHbI HeOCHOBHbIX HOCHTeneH orrpe.rlenllIOTCg BbIpaJKeHHJlMH
Ln = (Dn 'tyl2 HLp = (Dp ~/12.
fIpHBe.rleHHble 3HaQeHHJI rrO.rlBHlKHOCTH H K03<jJ<jJHQHeHTa .rIH<jJ<jJY3HH HocHTeneH 3apJI.ZIOB COOTBeTCTBYIOT HH3KHM KOH~eHTpa~HJlM rrpHMeceH ( -1 0 15 CM·3). Bpewr lKH3HH HeOCHOBHbIX HOCHTeneH 't COOTBeTCTByeT KOH~eHTpa~HH rrpHMeceH rrpH .rIpyrHX KOH~eHTpaIIHJiX MOlKHO Bocrronb30BaTbCJI COOTHOWeHHeM 't =
10 18 CM·3.,l(ng orrpe.rleneHHJI 't r.rle BOaAs= 10. 10 CM 3/C.
B·I (n+p)·I,
C6oiicm6a nOJlynpo6ooHUK06 - Humpuoo6 III zpynnb' npu KOMHamHoii meJHnepamype BeJlU'IUHa
0603Ha'leHUe
eTpYKTYPa KpHCTaJJJIa fIpJIMoooHHblii: (D)/HeupJIMoooHHblii: (I)
ao
fIOCTOJlHHlIJI peWeTKH
Co
Eg
lIIHpHHa 3arrpeIl.\eHHoii: 30HbI
KOH~eHTpa~ co6cTBeHHbIx HocHTeneii: 3apJI.ZIOB
ni
Nc Nv
3<jJ<jJeKTHBHlIJI fIe Ha KpaIO 3fI 3<jJ<jJeKTHBHlIJI fIe Ha KpaIO B3
Ilo IIp Do Dp
fIO.rlBHlKHOCTh 3neKTpOHOB fIO.rIBIDKHOCTb .rIblPOK
K03<jJ<jJH~eHT .rIH<jJ<jJY3HH 3neKTpoHoB K03<jJ<jJHQHeirr .rIH<jJ<jJY3HH .rIbIpOK 3neKTpOHHOe CPO.rlCTBO
X
Bpewr lKH3HH HeOCHOBHbIX HocHTeneii: 3<jJ<jJeKTHBHaJI Macca 3neKTpoHa 3<jJ<jJeKTHBHlIJI Macca TJllKenOH .rIbIpKH OTHOCHTenbHaJI .rIH3neKTpHQeCKaJI rrOCTOJlHHlIJI
't me* mhb* Er
n
fIOKa3aTenb rrpenOMneHHJI
K03<jJ<jJH~HeHT rrOrnOIl.\eHHJI B6nH3H
D -
anMa3.
Z-
c<jJanepHT.
Eg
IX
W - BIOp~HT.
AIN
GaN
W
W
W
D 3,112 4,982 6,28 9,4 . 10.34 6,2 . lOIS 4,9.1020 300 14 7 0,3 1,9
D 3,191 5,185 3,425 1,9 .10. 10 2,3.10 18 1,8.10 19 1500 30 39 0,75 4,1 10-s 0,20 me 0,80 me 8,9 2,5
D 3,545 5,703 0,77 920 9,0.10 17 5,3. 1019 3200
0,40 me 3,53 me 8,5 2,15 3.105
lOS
InN
80
(EouHu~a)
A A 3B CM-3 CM-3
i§
CM-3 2 CM /B C 2 CM /B C CM2/C
;:s
CM2/C B C
~ 0 !:: <"'l
~
'" ~ ~
1<:
0
8' Co>
0,11 me
1,63 me 15,3 2,9 6.10 4
<"'l
;t:
I:l .0:
;t:
CM- I
~
fIe - rrnOTHOCTh COCTOgHHH. 3fI - 30Ha rrpOBO.rIHMOCTH. B3 - BaneHTHlIJI 30Ha.
K03cj><jJHQHeHT .rIH<jJ<jJY3HH H rrO.rlBHlKHOCTh HOCHTeneH 3apJI.ZIOB B HeBblpOlK.rleHHOM rronyupOBO.rlHHKe CBg3aHbI COOTHoweHHeM 3ii:HwTeii:Ha
D = ll(kT/e).
,l(Hcj><jJY3HOHHble .z:IHHHbI HeOCHOBHbIX HocHTeneii: orrpe.rlenllIOTCJI BbIpaJKeHHJlMH
Ln = (Pn 't)112 HLp = (Dp't/ 12 .
fIpHBe.rleHHble 3HaQeHHJI rrO.rIBHlKHOCTH H K03<jJqlH~eHTa .!UI<jJ<jJY3HH HocHTeneH 3apg.rlOB COOTBeTCTBYIOT HH3KHM KOH~eHTpa~HJlM rrpHMeceii:
(-lOIS CM"3).
Bpewr lKH3HH HeOCHOBHbIX HOCHTeneH 't COOTBeTCTBYeT KOHQeHTpaIIHH rrpHMeceii:
1018 CM·3.,l(ng orrpe.rleneHHJI 10-10 CM3/C.
't rrpH .rIpyrnx KOH~eHTpa~x MOlKHO Bocrronb30BaTbCJI COOTHoweHHeM 't = H·I (n+p)-I·, r.rle BOaN '"
00 """ v:>
,j::o.
C6oiicm6a nOJlynpo6ooHUK06 - tjJOCtjJU006 III zpynnll' npu KOMHamHoii meMnepamype
CrpYKTYPa KpHCTaJIJIa TIPJlM0301:lHl>l.il: (D)/HerrpJIM03ol:lHl>l.il: (1)
ao Eg
TIOCTOllHHlUI peIIIeTKH lliHpHHa 3arrpeIIleHHoH 30HbI
KOH~eHTPa~1UI co6cTBeHHbIX HocHTeneH 3apJ!,ll;OB
ni
3
Nc
3
Nv
TIO,!lBIDKHOCTb 3neKTpOHOB
~n ~p
TIO,!lBIDKHOCTb ,!IblPOK
K03
Dn Dp
K03
X
3neKTpOHHOe CPO,!lCTBO BpeMJ! lKH3HH HeOCHOBHblX HOCHTeneH
't
me* mbh*
3
Er
TIoKa3aTeIlb rrpenOMneHIUI
n
K03
a
D -
anMa3.
Z-
c<panepHT.
W-
,j::o.
EouHiu~a
AlP
GaP
InP
Z I 5,4635 2,45 0,044 2,0 .10 19 1,5 . 10 19 60 450 1,6 11,6 3,98 10-6 0,83 me 0,70 me 9,8 3,0 103
Z I 5,4512 2,26 1,6' 100 1,9' 1019 1,2' 10 19 110 75 2,8 1,9 3,8 10-6 0,82 me 0,60 me 11,1 3,0 103
Z D 5,8686 1,35 1 .107 5,2 . 1017 1,1 .10 19 4600 150 120 3.9 4.5 10-8 0,08 me 0,56 me 12,4 3,4 104
0603Ha'leHUe
Be.nU·IUHa
00
A 3B CM-3 CM-3 CM-3 2
/B 2 CM /B CM
~
'"o~
C
C CM2/C CM
2
!-:
2 ~
/ C
~
B
~
C
sa:
(\)
o
g ;.: !:>
.s:
CM- I
~
BlOp~. TIC - rrnOTHOCTb COCTOllHHH. 3TI - 30Ha rrpOBO,!lHMOCTH. B3 - BaneHTHlUI 30Ha.
~
K03
~(kT/e).
D=
,[(H
L. = (D. 't)112 HLp
=
(Dp't/ 12•
TIpHBe,!leHHble 3HaQeHIUI rrO,!IBHlKHOCTH H K03
10 18 CM'3.,[(IDI orrpe,!leneHIUI = B-1 (n+p)-I ,r,!le BGaP= 10-13 CM3/C.
BpeMJ! lKH3HH HeOCHOBHblX HOCHTeneH 't COOTBeTCTByeT KOH~eH1pa~HH rrpHMeceH 't npH ,!IpyrHX KOH~eHTPa~ MOlKHO Bocnonb30BaTbClI COOTHOIIIeHHeM 't
C6oiicm6a nOJlynpo6ooHUK06 -
Si U Ge npu KOMHamHoii meMnepamype Si
Ge
D
D
I 5,43095 1,12 1,0· 10 10 2,8' 10 19 1,0' 10 19 1500 450 39 12 4,05 10-'6 0,98 me 0,49 me ·11,9 3,3 103
I .5,64613 0,66 2,0 .10 13 1,0' 1019 6,0.10 18 3900 1900 101 49 4,0 10-6 1,64 me 0,28 me 16,0 .4,0 103
0603Ha'leHUe
BeJlU'IUHa CTPYKTYPa KpHCTaJIJIa TIPJIM0301:lHl>l.il: (D)/HerrpJIM030HHbIH (1)
ao Eg
TIOCTOllHHlUI peIIIeTKH lliHpHHa 3arrpeIIleHHoH 30HbI
KOH~eH1p~1UI co6CTBeHHbIX HOCHTeneH 3apJ!,ll;OB
ni
3
Nc Nv
TIO,!lBIDKHOCTb 3neKTpoHoB
~n
3
TIO,!lBHlKHOCTb ,!IbIpOK
~p
K03
Dn Dp X
K03
t
BpeMJ! lKH3HH HeOCHOBHr.IX HocHTeneH
me* mbh*
3
K03
D -
alThfa3.
Z-
c
Eg
W - Biop~.
Er
n a
EOUHUl{a
A 3B ~~
~
~~
~
~~
~~c ~~c ~~ ~~
B
o
!-:
2
~ ~
0'
~
sa:
(\)
C
o
i ~
(\)
;.:
CM- I
~
TIC - rrnOTHOCTb COCTOJlHHH. 3TI - 30Ha rrpOBO,!IHMOCTH. B3 - BaneHTHlUI 30Ha.
K03
D=
~(kT/e).
,[(H
L. = (D. 'tyl2 HLp
=
(Dp
t/
12
•
TIpHBe,!leHHble 3HaQeHIUI nO,!lBIDKHOCTH H K03
KOH~eH1pa~HJ!X MOlKHO Bocnonb30BaTbCJI COOTHOIIIeHHeM
't
10 18 CM-3.,[(IDI onpe,!leneHHJI t rrpH 13 14 CM3/C, BSi ;:::' 5'10-
='= B-1 (n+p)'l, r,!le BGe ;:::. 5'10-
,j::o.
CM3/C.
00
c:n
IA
~
HepUOdUlieCKaR CUCmeMa 311eMenm06/(.H. MendeJlee6a
a>
~
'"o~
I::
2
~ '" ~
~ ~
(\)
o
8' fi!
l=l
~ ~
npUMe'lSHue: Ha S-060JIOQKe MO)f(eT 6b1Th He 60JIee 2 3JIeKTpoHoB, Ha p-06oJIoue - He GoJIee 6-TH, Ha d -060JIOQKe - He 60JIee 10, a Ha /-060JIOQKe - He 60JIee 14. KOJIH'IeCTBO 3JIeKTpoHoB B HHepmLIX ra3OX: 2(He), 10(Ne), 18(Ar), 36(Kr), 54(Xe) H 86(Rn).
IA
VIII
HepuodulieCKOJI CUCmeMa 311eMenmo6,l(.H.Mendl!llee6a
~
~
I::
2 ~
~
~ ~
(\)
o
8'
'"l=l ;z: .<:
~
~
II.(enO'lH!de M. . . . .b1
AKTIo1HOH,Qbl**
npUMeliSHue: Ha s-060nOQKe MOXCeT 6hlTh He Gonee 2 JJlekTpOHOB, ua p-oGonollKe - He Gonee 6, U8 d-06oJIotUCe KonH'leCTBo 3neKTpOHoB B HHepTIfLIx rB3BX: 2(He), lO(Ne), 18(Ar), 36(Kr), 54(Xe) H 86(Rn).
He
Gonee 10, a H8 /-o60nOlJKe -
He
Gonee 14.
,j:.
00 -...)
489 Si02 18, 195, 202, 209, 210, 214, 215,217,221-223,226,241,297, 304-306, 438
DPE,lJ;METHbIH YKA3ATEJIb
TAG 418 Ti02 195,241,422 YAG 417
Ab03 195
Al,,,Oy 195 AlAs 161, 207, 209, 210, 215-218, 314, 316, 318, 322, 330 AlGaAs 25, 47, 56, 98, 102, 159-162, 180,207,218,221,244,250-253, 259,280,314,322,325,330,457, 458 AlGaN 102, 108, 130, 135, 137, 270, 271,273,274,276,281,283-286, 4II, 425, 435 AlinGaN 271, 279, 425 AlinGaP 39, 125, 126, 128, 129, 136, 144-146, 150, 155, 159~164, 174, 185,186,191-194,202-204,214, 216,218,221,244,253-256,259, 261-265,306,307,322-324,398, 402,426,430,431,457,458 AlN 134, 241, 271, 277, 285, 286
CaF2 195, 241, 422
GaAs 23, 55, 56, 61, 66, 67, 72, 76, 98, 102, 104, 105, 110, 114, 116, II7, 119, 123, 125, 126, 129, 133-135,145,154-156,159-164, 174, 180, 181, 187, 191-194, 203,207,209,210,214-218,221, 227,244-246,250-255,258,259, 262-265,280,293,311,314,316, 318-323,325,330,431,439,448, 452,454,457,476 GaAsP 34, 134, 135, 156, 158, 159, 180, 244-249, 258-260 GaAsP:N 244
GaN II, 36-38, 76, 79, 87, 102, 107, 109, 119, 125, 126, 133, 134, 140,141,156,167-171,181,188, 189,194,222,226,235,241,256, 262-265,271,273-277,279-281, 283,285,398,399,419,430 GaP 25, 29, 31, 32, 76, 77, 134, 159-163, 180, 181, 185, 186, 191-194,202,217,244-246,248, 280, 458 GaP:N 244, 246, 248 GaSb 134 Ge 76, 133, 134
InAs 134 InGaAs 67, 230, 316, 318-321, 325, 452 InGaAsP 455, 456 InGaN 37, 38,87, 91, 107; 125, 126, 128,129,136,156,164,167-171, 185, 186, 188, 189, 194,204,222, 223, 236, 237, 244, 250, 256, 257, 259,261-265,270,271,273-275, 279-283,397,399,402,419,420, 424,426,430,431 InN 134, 257, 271, 402 InP 66, 129,.133,134, 147, 156, 181, 455, 456 InSb 134
Si 23, 36, 66, 76, 133, 134, 202, 209, 210,214,215,217,219,236,297, 304, 306, 474 Si3N4 195 SiC 18, 21, 186, 256
ZnO 241 ZnS 22, 195 Zr02 316 A,l(apTHBHbIH C,l(BHr UBeTa 387 AAAHTHBHoe CMeweHHe H3nyqeHHH 376 - - UBeTOB, CM. CMeweHHe uBeTOB A,l(Ha6aTHqeCKHH nepeHoc 100 AKTHBHbIH cnoH BonHoBoJ!,a 459 AnIOMoHTTpHeBbIH rpaHaT, CM. YAG AnIOMoTep6HeBbIH rpaHaT, CM. TAG lie3bI3nyqaTenbHaH peKoM6HHaUHH, CM. peKoM6HHaUHH 5ecnoporoBbIH na3ep, CM. na3ep C HyneBbIM noporOM 5eCnpOBO,l(HaH CHCTeMa CB1I3H, CM. CHCTeMa CB1I3H 5eCnpOBO,l(Hble CHCTeMbI CB1I3H 452 5HMoneKynllpHaH peKoM6HHaUHlI CM. peKOM6HHaUHlI 495 5nRlKHee pacnOnOJKeHHe nIOMHHo
- MHOrOMO,l(OBOe C rpa,l(HeHTHbIMnpo
IlpeaMemHwl YKaaameJlb
490 [OMonepeXOJl:
94, 142
3aTyxaHHe, CM. nOTepH B BOJIOKHe -
[paJl:HeHTHblH nOKa3aTeJIb npeJIOMJIe-
3epKaJIO, CM. OTpa:lKaTeJIb
HHH MaTepHaJIa Kopnyca, CM. Ma-
KOJIbpaYlIIa
223 3Hr3aroo6pa3HaH TpaeKTopHH 436 30JIOTOe npaBHJIO 4>epMH 71 3epKaJIbl:lbIX OTpa:lKaTeJIHX
[pynnoBoH nOKa3aTeJIb npeJIOMJIeHHH, CM. nOKa3aTeJIb npeJIOMJIeHHH -
nOKa3aTeJIH npeJIOMJIeHHH
442
3peHHe, CM. qeJIOBeqeCKOe 3peHHe
.IJ:BoHHaH reTepocTpYKTypa, CM. reTe-
HJl:eaJIbHblH H30TponHbIH HCTOqHHK,
pocTpyKTypa ,lleq,eKT
CM. H30TponHblH HCTOqHHK
59, 61, 62 63
1136bITOK HOCHTeJIeH, CM. YTeqKa HO-
,lleq,eKTbI
npeJl:eJIeHHe H3JIyqeHHH -
H3JIyqeHHH
113rH6, CM. H3rH6 3anpeIUeHHoH 30HbI -
346
CM. Jl:HOJl: illOTTKH -
illOTTKH
113JIyqaTeJIbHaH peKoM6HHaUHH, CM.
153
113JIyqaTeJIbHOH cnoco6HoCTH
94
HOCTb
qepHOrO TeJIa, CM.
223 -
-
:lKaTeJIb
-
361
HaTopa
IlJIaHKa, CM.
nJIaHKOBCKHH
364,
Jl:JIHHa BOJIHbI
TaKT
98
-
napa60JIHqeCKHH
CHeJIJIHyca (CHeJIJIH)
-
coxpaHeHHH HPKOCTH
3anHpalOIUHH CJIOH
l1cKa:lKeHHe
205 228
pHHa) 3anpeIUeHHoH 30HbI HenpHMaH, CM. npHMoH -
HenpH-
nOBepxHocTHbIH
npHMaH, CM. npHMoH MOH nepexoJl:
137
nOCTOHHHoro HanpH:lKeHHH
-
THna MeTaJIJI-Jl:H9JIeKTpHK-nOJIynpOBOJl:HHH
-
-
MeTaJI-nOJIynpOBOJl:HHK, CM. Jl:HOJl: illOTTKH
MOIUHoro CBeTOJl:HOJl:a
JIoKaJIH3aUHH HOCHTeJIeH
279
JIoKaJIH30BaHHbIH CBeT, CM. CBeT
337 337 JIIOMeH-9KBHBaJIeHTOM 344 JIIOMHHOq,Op 416-418 JIIOKC, onpeJl:eJIeHHe
JIeHHeM
233
Typa
372
414
94
-
HJl:eaJIbHOCTH BOJIbTaMnepHoH xa-
-
87
HeHJl:eaJIbHOCTH Jl:HOJl:a, CM. K09q,-
63
O:lKe
-
OnTHQeCKOrO
BbIBOJl:a
413
rpaJl:HeHTHbIH nOKa3aTeJIb npe-
-
CHJIHKOH
H3JIYQeHHH
241 240
~aTepHaJIbI KpaCHTeJIb
415
415
-
JIIOMHHOq,Op
-
nOJIynpOBOJl:HHK
415
~aTpHqHbIH 9JIeMeHT nepexoJl:a
35,
CM.
--880
A 80
71
MeTaJIJI-Jl:H9JIeKTpHK
nOJIynpOBOJl:HHK
~e:lKMOJl:OBaH Jl:HCnepcHH
3HHIIITeHHa
KpaCHTeJIH
-
238
P~~A, CM. MaTepHaJI Kopnyca
~,llIl
-
468
JIOMJIeHHH
Jl:Hq,q,y3HH
-
-
51
-
-
TeJIeH
~aTepHaJI Kopnyca
- -
q,HUHeHT HeHJl:eaJIbHOCTH
346
377
~aKCHMaJIbHaH KOHueHTpaUHH HOCH-
MaTepHaJI Kopnyca -
361
35 HenpH-
JIHHeHHblMH KOM6HHaUHHMH KOOPJl:H-
JIIOMHHOq,OPbI C KBaHTOBbIM paCIUen-
paKTepHCTHKH
-
MOH nepexoJl:
JIHHeHHblH KOHTaKT, CM. KOHTaK"I:
Kopnyc H3 9nOKCHJl:HOH CMOJIbI, CM.
109
l1CTOqHHK 6eJIoro CBeTa -
166
KOM6HHaUHH
l1CTOPHH CBeTOJl:HOJl:OB, CM. CBeTOJl:HOJl:
3anpeIUeHHaH 30Ha, CM. 9HeprHH (UIH-
QeHHH, CM. pacnpeJl:eJIeHHe H3JIy-
KOHTaKTHaH paaHocTb nOTeHUHaJIOB
379
449
l1cnycKaHHe q,OHOHOB
457
KpyrJIblH
294
JIaM6epToBcKoe pacnpeJl:eJIeHHe H3JIy-
JIIOMeH, onpeJl:eJIeHHe
K09q,q,HUHeHT 6HMOJIeKYJIHpHOH pe-
CM. CBeTOJl:HOJl:bI
l1H:lKeKUHOHHbIH JIa3ep, CM. JIa3ep
-
248
eHT, CM. nOrJIOIUeHHe
11K CBeTOJl:HOJl:bI Jl:JIH CHCTeM CBH3H,
369
JIaaep C HYJIeBbiM noporOM
HaT UBeTHocTH
KOppeJIHpOBaHHaH UBeTOBaH TeMnepa-
l1HJl:eKC UBeTOnepeJl:aqH
-
319 449
MeCb
,lloMHHaHTHblH UBeT, CM. UBeT
MaTepHaJI Kopnyca
JIoBYIIIKa, CM. Jl:eq,eKT
KOHcTaHTa nOrJIOIUeHHH K09q,q,HUH-
1130TponHblx H3JIyqaTeJIeH
CM.
KynoJI H3 9nOKCHJl:HOH CMOJIbI, CM.
83
11309JIeKTpOHHaH npHMecb, CM. npH-
,lloMHHaHTHaH Jl:JIHHa BOJIHbI
459 353-364
KOHeQHaH pacTBopHMOCTb a30Ta
-
1130TponHbIH HCTOqHHK
,l106POTHOCTb, CM. Jl:06POTHOCTb pe30-
-
KorepeHTHoe YCHJIeHHe, CM. YCHJIeHHe
HCTOqHHK
,llJIHHOH BOJIHbI Jl:OMHHaHTHaH
KpyrJIblH KOHTaKT, CM. KOHTaKT
QeHHH
KBapueBoe BOJIOKHO, CM. BOJIOKHO
nJIaHKOBCKHH
HCTOqHHK
,llHq,q,Y3HbIH OTpa:lKaTeJIb, CM. OTpa-
-
98 262 - HMa 40, 56, 104-107, 143, 144, 273, 279, 282-284, 399-401 KBaHToBbIH BbIXOJl: 69, 112, 113 - - Bl:lelIIHHH 177 - - BHYTpeHHHH 177 - Jl:eq,HUHT 413
KOHTaKT B q,opMe rpe6eHKH, CM. KOH-
rHH H3JIyqeHHH -
,llHq,q,Y3Hble OTpa:lKaTeJIH
-
346
CM. TOJIIUHHa
nOJIHOrO BHYT-
BHyTpeHHee OTpa:lKeHHe
KBaJl:paTHQHaH 3aBHCHMOCTb
KorepeHTHocTb
155, 286,
peHHero OTpa:lKeHHH, CM. nOJIHOe
18
KBaHToBaH TOQKa
113JIyqeHHe Jl:JIHHa BOJIHbI, CM. 9Hep-
,llHq,q,Y3HaH nOBepXHOCTb, CM. nOBepx-
3aKOH BHHa
Kap6opYHJI:
TOJIIUHHa
KpHTHQeCKHH yrOJI
KOHHQeCKHe peuenTopbI, CM. rJIa3
peKoM6HHaUHH
,llHCJIOKaUHH HeCOOTBeTCTBHH
336
Kap6HJI: KpeMHHH, CM. SiC
KOJIOpHMeTpHH
MOIUHOCTb
19, 20, 33, 237
,llHq,q,Y3HH JI:JIHHa
96, 271
3anpeIUeHHoH 30HbI
113JIyqaeMbIH nOTOK, CM. OnTHqeCKaH
,llHOJl: THna MeTaJIJI-nOJIynpOBOJl:HHK,
-
KBapu, CM. Si02
CHTeJIeH
,llHarpaMMa HanpaBJIeHHOCTH, CM. pac-
-
KaHJl:eJIa onpeJl:eJIeHHe
:lKaTeJIb
417
[paHaTbI
ueHTpaUHH
3epKaJIbHbIH OTpa:lKaTeJIb, CM. OTpa-
TepHaJI Kopnyca
KpHTHQeCKaH KOHueHTpaUHH, CM. KOH-
58
[paJl:HeHT, CM. rpaJl:HeHT COCTaBa
491
437, 440,
CM. Jl:HCnepCHH
~e30nHqeCKOe 3peHHe, CM. QeJIOBeqe-
416
CKoe 3peHHe
.. 492
MeTaJIJIHqeCKHH OTpa)!{aTeJIb, CM. OTpa)!{aTeJIb
06eAHeHHaH 06JIaCTb 06JIaCTb rroTepb
MeTaJIJIHqeCKOe 3epKaJIO, CM. OTpa-
MeToA MHHHMaJIbHOH BcrrbIlIIKH
341
BeKTOpy
64, 153
36 .
06paTHaH CBH3b, CM. OIITHqeCKaH 06paniaH CBH3b
74
06paTHoe BpeMH )!{H3HH <poToHa
THqeCKaH TOJIW:HHa
06paTHbI~ TOK HaCblw:eHHH, CM. TOK
MHKpOrrOJIOCTb, CM.pe30HaTOp
422 468 357
422 OIITHtIeCKaH MOW:HOCTb 336 - rrJIOTHOCTb 205
BOJIOKHO
OrrTHtIeCKHH BbIBOA H3JIyqeHHH
reOMeTpHqeCKOe paCCTOHHHe
cM.
MHoroMoAoBoe BOJIOKHO,
MHO)!{eCTBeHHaH KBaHTOBaH HMa, CM.
.C KpyroBoH HarrpaBJIeHHOCTbIO
-
tIalIIKa
UHH
199
233
OTCYTcTBHe Me)!{MOAOBOH AHcrrepcHH
437
MOHTa)!{ MeTOAOM rrepeBepHYTblX KpH-
194
233
MOW:HOCTb H3JIyqeHHH eAHHHUbI rroBepxHocTH OIITHqeCKaH
88 yrropHAOtIeHHOCTH 58
IIapa3HTHoe corrpOTHBJIeHHe ITapaMeTp
453 438
porOBoe HarrpH)!{eHHe
108
B036Y)!{AeHHH
-
Ha AHOAe, CM. rrpHMoe HarrpH)!{eHHe
-
rrpHMoro
CMew:eHHH
UBeTa
-
465
CBeTOAHOAa rro MOW:HOCTH
ITepecTpoHKa rrOBepXHOCTH
362,
CM. tIHCTOTa UBeTa
HeaAHa6aTHtIeCKaH HH)!{eKUHH HerrpHMaH
30Ha,
109
CM.
rrpHMOH-HerrpHMOH rrepeXOA HepBHblH Y3eJI, CM. rJIa3 HeCHMMeTpHtIHOe raYCCOBO pacrrpeAeJIeHHe
402
He3KcrroHeHUHaJIbHOe 3aTyxaHHe, CM. TaK)!{e 3aTyxaHHe KOJIbpaYlIIa HH3KHH ypOBeHb B036Y)!{AeHHH, CM. B036Y)!{AeHHe
64
180
91
-
-
CBeTOAHOAOB
452
453
ITOJIHOe BHyTpeHHee OTpa)!{eHHe
PeKoM6HHaUHH
158
238
HarrpaBJIeHHH
436
6e3bI3JIytIaTeJIbHaH
-
H3JIytIaTeJIbHaH
-
rroBepXHOCTHaH
IToTepH Ha rrpe06pa30BaHHe AJIHHbI
446 -
-
-
-
3HHlIITeHHa
HeOrrpeAeJIeHHOCTeH
-
-
-
06beMHoe
-
349
H3JIytIeHHH a6COJIIOTHO tIepHOrO Te-
tIeHHH
436 294 25, 293
rro BOJIHOBOAaM
KOM6HHaUHH
HaUHH
436
CrrOHTaHHble rrepeXOAbI
-
-
330 460
cyrrepJIIOMHHeCueHTHbIH
CBeQa
336
80
CTaHAapTHbIH HCTOtIHHK H3JIYQeHHH, CM. CTaHAapTHbIH HCTOtIHHK H3JIy-
CBeToAHoA OAHOMOAOBblH C pe30HaTopOM
346
CrrOHTaHHoe H3JIytIeHHe, CM. peKOM6H-
CBeToBble BOJIHbI pacrrpOCTpaHHIOW:HeCH B cB060AHOM rrpocTpaHcTBe
368
CrreKTpaJIbHaH HHTeHCHBHOCTb H3JIy-
CrroHTaHHaH peKoM6HHaUHH, CM. pe-
436 436 rrOTOK 336, 337, 344
-
109
109
ueHUHH
345
-
109
pe3KHX rpaHHuax pa3AeJIa B re-
CrreKTp, CM. crreKTp H3JIytIeHHH
rrOJIHMepHbIH
-
94
CorrpOTHBJIeHHe Ha KOHTaKTax
CrraA JIIOMHHeCueHUHH, CM. JIIOMHHeC-
58
58 152
CBeToBoA KBapueBblH
-
29
feH3eH6epra, CM. COOTHOlIIeHHe
JIa
-
376
H3JIytIeHHH
CooTHolIIeHHe HeOrrpeAeJIeHHOCTeH
TepocTpyKTypax
PeueIITOpaMH rOJIy60ro He6a
CBeToBoH
325
CoeAHHeHHe, CM. coeAHHeHHe BOJIOKOH
83
63
-
-
206, 209 - rrporrycKaHHH 465 ITOJIyrrpoBoAHHK 416 -'- HerrpHM030HHblH 61 - rrpHM030HHbIH 61 IToTeHUHaJI oAHHaKoBblH 98 413
pacTeKaHHH TOKa
COrJIaCOBaHHe HCTOtIHHKa H3JIYtIeHHH
52,76
57
Ka
IToJIoca 3aTyxaHHH
BOJIHbI
-
CMOJIbI
336 PacrrOJIO)!{eHHe JIIOMHHo<popa 422 PaCrrpeAeJIeHHe H3JIyqeHHH 119, 121, 346 PaCrrpeAeJIeHHeM faycca 397 PaCrrpeAeJIeHHOe 3epKaJIO Dp3rra 199 PacTeKaHHe TOKa AJIHHa 169
94
ITOJIHaH MOW:HOCTb H3JIytIeHHH -
437
107 26, 28,
CBeTOBaH 3
ITOABH)!{HOCTb HOCHTeJIeH
CJIO)!{HOCTb COrrpH)!{eHHH
CJIOH, OrpaHHtIHBaIOW:HH 3JIeKTpOHbI
338 ITorJIow:eHHe
364
466
ITJIow:aAb rrpoeUHpyeMoH rrOBepXHOCTH
CBeTOAHOAa
108 Hacblw:eHHocTb -
HHIO -
-
422
Pe3KHe p-n-rrepeXOAbI
ITepeAaTOtIHaH
52
HOCHTeJIeH
pacrrOJIO)!{eHHe
PacTHHYTbIH 3KcrroHeHUHaJIbHblH crraA
185 85,
CHcTeMbI
PaAHOMeTpHtIeCKHe eAHHHUbI
ITepeBepHYTaH ycetIeHHaH rrHpaMHAa
HarrpH)!{eHHe BKJIIOtIeHHH
336
346 CBH3H 436
CHH)!{eHHH H3JIytIeHHH B rrOrrepeQHOM
-
CTaJIJIOB (
MOHoxpOMaTHtIeCKOrO HCTOtIHHKa
CKOPOCTb peKoM6HHaUHH H36b1TOtIHbIX
PaBHOBeCHaH CKOPOCTb peKoM6HHa-
MOHOMOJIeKYJIHpHaH peKOM6HHaUHH,
MOHTa)!{HaH paMKa
-
337
336
CHJIbI CBeTa
OCBew:eHHocTb
AHOAOB, CM. CBeTOAHOA
orrpeAeJIeHHe
C MOW:HOCTbIO H3JIytIeHHH
39, 61, 159, 251, 255
413
OTpa)!{aTeJIb
MOHoxpOMaTHqeCKaH rrpHpOAa CBeTO-
-
88 ITpe06pa30BaHHe AJIHH BOJIH 413 ITpe06pa30BaTeJIb AJIHH BOJIH 414 ITpHMecb OrrTHqeCKH aKTHBHaH 29 ITpocToTa COrrpH)!{eHHH 437
ITPHMoH-HerrpHMoH rrepeXOA
337 345 224
-
CHJIa CBeTa
ITpHMoe HarrpH)!{eHHe
MOAbI, CM. OrrTHqeCKHe MOAb!
CM. peKOM6HHaUHH
BOJIHOBOMY
0,01 408
JIIOMHHo<popa
OTAaqa, CBeTOBaH
KBaHTOBaH HMa
rro
ITpe)!{AeBpeMeHHoe BKJIIOtIeHHe
OAHOPOAHOCTb UBeTa
MHHHMaJIbHOe BpeMH )!(H3HH
-
ITpaBHJIO
oT60pa
k 72
ITpocTpaHcTBeHHoe
HaCblw:eHHH
MHHepaJIbHble pacceHBaIOW:He rrpHMe-
-
ITpaBHJIaMH
06JIytIeHHe 3JIeKTpOHHblM rrytIKOM
MeToAHKa M3TbIO-DJI3KCJIH, CM. KPH-
CH
83
460
060pBaHHble CBH3H
)!{aTeJIb
493
JlpeaMemHbtU YKaaameJLb
JlpeaMemHbtU YKaaameJLb
tIeHHH MKO -
-
-
MKO
379, 391, 393, 394
CTep)!{HeBble peuerrTopbl, CM. rJIa3 CTOKCOBoe CMew:eHHe
413
$
495
494 CTpYKTypa C 3arrpemeHHOH 30HOH ,1J.JISI CPOTOHOB
330, eM.
eM.
JIaBHHHOe
YMHO)!{eHHe
eM.
YJIbTpacpHOJIeT,
CTaJIJI CyrrepJlloMHHecueHTHblH CBeTo,n:HO,n:,
eM.
Y,n:apHaSi HOHHsaUHSI,
CPOTOHHblH KpH-
CTBO
eM.
TeKCTypHpOBaHHe rrOBepXHOCTH
125, 370
TeMrrepa'rypa -
eM.
3aBHCHMOCTb H3JIyqeHHSI,
CTH
187
TeKcTypHpoBaHHaSi rrOBepXHOCTb,
H3JIy-
-
eM.
rrpSl-
-
llJOKJIH
-
UlHpHHbI
eM.
3arrpemeHHOH
ypaBHeHHe llJOKJIH
85 53
-
HOCHTeJIeH
-
rrepexo,n:a,
128, eM. eM.
TeMrrepaTypa
eM.
OrrTHqeCKOe YCHJIeHHe
YTeqKa, -
eM.
103 eM.
TerrJIOBOe CBeqeHHe -
18 corrpOTHBJIe-
HHe TecTHpyeMbIH HCTOqHHK -
-
6eJIoro UBeTa,
eM.
-
442, eM. qHrra,
TecTHpyeMbIH
TecTHpyeMblH
TeCTOBbIH HCTOqHHK
TOqeqHbIH ,n:ecpeKT,
TOKa
eM.
TeMrrepaTYP-
eM.
,n:e-
cpeKT
eM.
59
yrOJI BbIBo,n:a HSJIY-
117
-
-
JIbI aKTHBHoH 06JIaCTH
V('x)
468
MKO
-
TeMrrepaTypa
3HepfHSI sarrpemeHHoH SOHbI
UHSI,
381 370, 372 eM.
UBeToBoe HaCblmeHHe,
qHCTOTa
UBeTa
TOH
-
eM.
Yp6axa,
eM.
-
SlPKOCTH
348, eM.
355
XapaKTepHCTHqeCKaSi
TeMrrepaTypa,
TeMrrepaTypa
179
XpOMaTHqeCKaSi ,n:HcrrepcHSI ,n:HcrrepCHSI
442, eM.
271
XBOCT Yp6axa
)!{H,n:Kocpa3HaSi
3TaJIOH MKO,
UHpKa,n:HblH pHTM
381 382
eM.
rJIa3
eM.
123, 241 3TaJIOHHaSi OTpa-
)!{alOmaSi rrOBepXHOCTb
qacTHble HH,n:eKCbI UBeTorrepe,n:aqH qacTHblH HH,n:eKC UBeTorrepe,n:aqH
173
22
22
3rroKcH,n:HaSi CMOJIa
348
HOCTb
OTpa)!{alOmaSi
rrOBepx-
380
3TaJIOHHbIH HCTOqHHK CBeTa,
379
eM. 3TaJIOHHblH HCTOqHHK eM. 3TaJIOHHaSi OTpa)!{alO-
-
-
-
06beKT,
-
CTaH,n:apTHbIH
335
maSi rrOBepXHOCTb
-
-
CKOTOrrHqeCKOe
-
-
cpoTOrrHqeCKOe
qHCJIOBaSi arrepTypa qHcToTa UBeTa
334 334 445, 446
HHSI,
eM.
-
HCTOqHHK HSJIyqe-
3TaJIOHHblH HCTOqHHK
3cpcpeKTHBHOCTb
362
344, 345
BblBo,n:a HSJIyqeHHSI,
eM.
3cpcpeKTHB-
HOCTb IDepOXOBaTaSi rrOBepXHOCTb,
eM.
TeK-
CTypHpOBaHHe rrOBepXHOCTH rrOBepXHOCTH,
eM. 3cpcpeKTHBHOCTb eM. coe,n:HHeHHe BOJIO-
-
MomHOCTH;
-
coe,n:HHeHHSI,
eM.
KOH
TeKCTypHpOBaHHe rrOBepXHOCTH llJHpHHa sarrpemeHHOH SOHbI
344
357
3rrHTaKcHSI rasocpasHaSi -
llJepoxoBaTOCTb
340 353
peKOM6HHaUHSI
3rrHTaKCHaJIbHOe ,n:opamHBaHHe
360
364
UHKJI
OTpa-
340
MO,n:HCPHUHpoBaHHaSi
XBOCT Yp6axa
Y,n:aJIeHHe qaCTH HOCHTeJIeH sa rrpe,n:e-
eM.
eM.
qeHHSI HSJIyqeHHSI
3JIJIHrrCbI MaKA,n:aMa
qeJIOBeqe-
)!{eHHe
164
TYllIeHHSI JIIOMHHeCueHUHH
eM.
CKoe speHHe
357
TYllIeHHe JIIOMHHeCueHUHH,
336
,n:ecpeKT
354
-
eM.
18
peKoM6HHa-
pa3HOCTb
meHHOH 30HbI
TpexUBeTHoe qeJIOBeqeCKOe 3peHHe
TYHHeJIbHbIH rrepexo,n:
3JIeKTpOHHO-,n:blpOqHaSi
qeJIOBeqeCKOe speHHe MeSOrrHqeCKOe
471
TOqKa paBHOH ::mepfHH
-
cpopMa KpHCTaJI.lla
464
corrpOTHBJIeHHe
CHCTeMa MaHCeJIJIa
qeJIOBeqeCKHH rJIas,
HaSi saBHCHMOCTb IlIHpHHbI 3arrpe-
H3JIyqeHHSI
YrOJI BbIBo,n:a,
eM.
182-187
468
TeCTOBbIH HCTOqHHK HSJIyqeHHSI MaH-
eM.
eM.
-
HCTOqHHK
ceJIJIa,
rrOKaSaTeJIb rrpeJIOMJIeHHSI
-
eM.
HSJIyqeHHSI,
H3JIyqeHHSI
-
-
-
379
HCTOqHHK -
-
3JIeKTpOJIIOMHHeCueHUHSI
353 382, 383
UHpKa,n:HbIH pHTM
Cl»asoBblH rrOKaSaTeJIb rrpeJIOMJIeHHSI
IlIHpHHa JIHHHH HSJIyqe-
387
UBeToBble Koop,n:HHaTbI CBeTo,n:HO,n:
eM.
JIHHHH,
3TaJIOHHaSi
132
eM.
corrpOTHBJIeHHe,
,n:HarpaMMa
-
YTeqKa HOCHTeJIeH
HOCHTeJIeH
-
TeMrrepaTypHblH K03CPCPHUH-
131
HHSI -
378
raMMa
-
llJYHT,
UBeTOBOH KOHTpaCT
TeMrrepaTypHaSi 3aBHCHMOCTb IlIHpHHbI 3arrpemeHHOH 30HbI
CBeTo,n:HO,n:
364
-
YCH-
JIeHHe HSJIyqeHHSI
Y
TeMrrepaTypa
eM.
crrOHTaHHoro HSJIyqeHHSI,
30HbI,
UlHpHHa 3arrpemelIHoH 30HbI
75
YpaBHeHHSI CKOPOCTH MOHOMOJIeKYJISlp-
YCHJIeHHe,
eM.
UBeTHocTb
-
eHT -
UBeToBaSi a,n:aIITaUHSI
eM.
,n:Ho,n:a,
-
Moe HarrpSl)!{eHHe -
359
HOH peKoM6HHaUHH
rrpSiMoro HarrpSl)!{eHHSI,
H ,n:JIHHa BOJIHbI HSJIyqeHHSI CBeTO,n:Ho,n:a,
YpaBHeHHe BaH Poc6YKa-llJoKJIH
qeHHe -
-
383
-
-
eM.
,n:oMHHaHTHbIH AOMHHaHTHaSl, ,n:JIHHa BOJIHbI
YHHBepCaJIbHble Koop,n:HHaTbI UBeTHOTeKCTYPHpOBaHHe rroBepxHocTH
370
Y
YHHBepCaJIbHOe UBeTOBoe rrpOCTpaH-
CBeTo,n:HO,n:
UBeT
-
-
-
133
131
TeMrrepaTypHaSi saBHCHMOCTb
RPKOCTH HPKOCTb -
364 346
rroBepxHocTH HCTOqHHKa
337
IllYBEPT CPo CBETO,llUO,llbI
Pe.ll.aKTOp K.C. lfepH.JlBCICUU 0pHrHHaJI-MaKeT: J1..11. BaICYJleH.ICo O
nO.llTIIICaHO B ne'!aTb 19.06.08.
H3.llaTeJIbC~all
cf!lIpMa {<
OTne'!aTaHO C rOTOBbIX .llllan0311TIIBOB B n
lIcT. 160001, r. BOJIor.lla, YJI. lJ:eJIlOCKIIH~eB, 3 TeJI.: (8172) 72-55-31, 72-61-75, cf!aKc: (8172) 72-60-72 E-mail: form.pfp@voteI.ru http://www. vologda/rvpfpv